| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 7.86 | | SUBPAC::LANDRY | | Mon Nov 06 1995 19:48 | 17 |
| Late this morning, manufacturing surrendered the system to EE so that
the Monthly PM could be performed. There still remains a few items
that need to be performed (check sheet has been forwarded to the B
shift people of remaining items).
A couple of interesting things happened while doing the PM. Down force
was extremely difficult. The left spindle down force (DF) was out of
spec, it required three passes to fall within spec. The right
spindle DF was way out. So far out, in fact, that the E-P regulator
calibration procedure needed to be performed. Once this was completed,
the DF cal took ~5 passes to tweak into spec. Unbelieveable!
The slurry pumps will need to have the flow rates checked, as the lines
were replaced at the pump head.
A shift
|
| 7.87 | High Table Amps / wafer fly outs | FABSIX::R_GEE | | Wed Nov 08 1995 07:03 | 27 |
| * After the system had been idle for sometime, breakin wafers
were run. On the first set of two a wafer slid out from under
the left carrier. The system was EMO'ed before it crashed.
System status at the time:
- 24 wafers on the pad (2 suba IV, 1 IC1000)
10 wafers run before the counters were reset, counter
is at 14 wafers.
- 7 wafers on the carriers. (Exposure .0065 & .0070)checked.
- Engineering carrier film mounted.
- Table amps at the time spiked to 57 amps.
- Checked slurry flow, slightly low 450 ml/min at 500 setting,
adjusted.
- Down force was 313 lbs
- Slurry flow set at 417 ml/min
- 20 sec into a 180 sec polish.
- Back pressure 14.8
- Believe the wafers to be oxide monitors.
The system is now unscheduled down.
B shift
|
| 7.88 | passdown | SUBPAC::LANDRY | | Wed Nov 08 1995 19:32 | 14 |
|
Came in this morning to the system spittin' wafers from the left
spindle. Found broken wafer chips on right clean station brush???
Replaced the brush on the right side. Rebuilt both carriers, Thanks
Earl.
Checked the E-P regulator pressures and they were off
on both spindles. Brought them in and reperformed the down force
calibration. Completed, and AGAIN its under 1%. Changed pad Thanks
Barry. MQC's passed up and running
jim,doc,kyle,john_p. Brendan
|
| 7.89 | Wafer breakage.... | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 09 1995 08:35 | 7 |
|
The tool wasn't used for a while because of the
stall outs. We up'ed the slurry flow and before
we could even get a look at some results. The pad
replaced as well as the carriers. The tool needs
full break-in and MQC's.
D shift
|
| 7.90 | TABLE PROBLEMS STILL EXIST | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 05:35 | 9 |
|
Another day, another problem... When Step is all
done, the table comes to a dead stop before the spindles
even lift off. The spindles are still turning as well.
We went through all of the possible software calibration
variables and software program settings and found nothing
out of the ordinary. The machine is still logged down.
D shift
|
| 7.91 | Wafer Fly-Out Experiment | ASDG::POIRIER | | Fri Nov 10 1995 19:51 | 9 |
|
Wafer Fly-Out Experiments:
The system is currently UP to ENG. It experienced the same conditions
as CMP.A1 (See Note #5 for CMP.A1) Please build one new carrier and
mount it on the Right spindle. Leave the current pad on the table
and follow the instructions from Eric Bodensieck.
John.
|
| 7.92 | Table stall seeing an end | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Nov 11 1995 07:18 | 16 |
|
We started off running the new pad break-in per Eric.
We ran an additional 50 wafers for a total of 85 wafers with
no problems. We went to break and started up some more wafers
before the MQC's were ran and the table stalled out on the first
(2) wafers at 313 lbs. The retaining ring on the right spindle,
which was brand new was all shiny and appears to have been
polished. After sitting in wet idle for an hour, the pad
acted like a sponge and was wrapping around the wafers and
as a result, the retaining ring was causing the table to stall.
We ran 12 wafwers, (4) @ 200, (4) @ 250 and (4) @ 313l lbs and
it ran fine. Theyu ran MQC's and they passed everything and there
were now stalls. If you have the tool sitting idle, run the 12
wafer sequence and it looks like it will be ok.....
D shift
|
| 7.93 | Oil level low | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 16 1995 07:29 | 7 |
|
we checked the oil level in the gear box and we couldn't even
get an oil level. It will have to be filled as well. refer to
5.last for more details.
D shift
|
| 7.1 | MECHANICAL ACCEPTANCE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:45 | 277 |
| ASDG::POIRIER 12 lines 17-AUG-1994 22:09
-< Mechanical Acceptance >-
--------------------------------------------------------------------------------
* The tool was powered up for the first time tonight. Eric checked the
main power connections and took voltage readings.
* I ran 3/8 tubing from the main CDA line to the back of the tool.
* The robot was removed and dis-assembled on the bench. Eric and I
exchanged servo encoders with the robot assembly he brought from
Strasbaugh's field service office. The robot was then re-installed.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.9 CMP.A2 9 of 296
SUBPAC::BJUBINVILLE "The other side of life -- 3rd" 16 lines 8-SEP-1994 11:23
-< Passdown for 8/8 >-
--------------------------------------------------------------------------------
Started working with Eric on setting up this machine.
The machine wouldn't initialize because the upper
structure sensor wasn't being made, adjusted same.
The shuttle needed to be leveled
We were about to try and indicate the carry arms
but the motor on the right didn't come down far enough.
It was was discovered that the motor was catching on the
sensor bracket. This bracket needed to be re-adjusted out
of the way of the robot. Eric is going to continue indicating
everything in.
BJ
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.15 CMP.A2 15 of 296
ASDG::POIRIER 12 lines 15-SEP-1994 23:21
-< Mech Acceptance Activities >-
--------------------------------------------------------------------------------
* The damaged tub in recieve station #2 was replaced with a new one.
* Table Gearbox: Strasbaugh is concerned about the possibility of
excess heat in the gear box bearing now that the shims have been
removed. This action has increased the pre-load on the bearing.
The Strasbaugh rep is planning to run the table at 150 rpm
for 8 hours on Monday and monitor the bearing temperature with
a thermo probe.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.16 CMP.A2 16 of 296
ASDG::POIRIER 11 lines 16-SEP-1994 23:24
-< Start-up activities >-
--------------------------------------------------------------------------------
* I attempted to level the tool tonight but ran into difficulties.
The leveling bolts are not holding up to the load that the tool is
placing on them. I tried turning the left front bolt with a 3/4"
wrench and it bent over. I will ask the Strasbaugh rep to supply
some new leveling bolts of at least Grade 5 quality on Monday.
* I started indicating the spindles tonight. The right one is within
.009". I'll continue with the alignments on Monday.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.23 CMP.A2 23 of 296
ASDG::POIRIER 13 lines 29-SEP-1994 00:49
-< CMP.A2 Start Up >-
--------------------------------------------------------------------------------
* The Strasbaugh rep replaced the bent shaft in the robot lower arm
assembly but cracked the upper arm during reassembly. A new upper
arm was shipped from Strasbaugh today and should arrive here tomorrow.
* Elevator heights were reset on all 4 elevator stations. This was
necessary due to the disassembly of the lower robot arm.
* The Barksdale pressure transducer came in today and was installed
on the right spindle.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.24 CMP.A2 24 of 296
ASDG::POIRIER 23 lines 30-SEP-1994 00:06
-< CMP.A2 Start Up >-
--------------------------------------------------------------------------------
* The elevator height calibrations were set.
* The robot top arm was replaced and aligned. This arm is a replacement
for the one Eric cracked yesterday.
* The robot heights were calibrated.
* The right spindle back pressure is consistantly 50% higher than
the the back pressure on the left spindle. We replaced the right
spindle pressure transducer and followed the normal adjustment
procedure only to find no change. Eric will continue trouble
shooting this problem tomorrow.
* We discovered a problem with the white plastic rings on the carriers.
They appear to be warping. This causes the the carriers to not seat
properly into the load stations. Some possible causes of the warping
could be overtightening the screws, helicoils backing out or maybe
the heads of the screws are dragging in the counterbores in the
rings. Can anyone shed any light on this subject?
J.P.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.25 CMP.A2 25 of 296
ASDG::POIRIER 10 lines 30-SEP-1994 23:54
-< CMP.A2 start up >-
--------------------------------------------------------------------------------
* Replaced SOL #31 (D.I. water supply).
* Re-installed the 4 elevator tubs.
* The right spindle is experiencing excessive play. A major disassembly
of the Right spindle is planned for Monday.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.26 CMP.A2 26 of 296
ASDG::POIRIER 11 lines 4-OCT-1994 00:01
-< CMP.A2 start-up >-
--------------------------------------------------------------------------------
* The load stations, cleaning stations, robot heights & elevator
heights were "tweaked-in" today. The system was able to run 100
wafers without an assist. We're planning to finish-up the fine
tuning tomorrow and run a 500 wafer pre-test on Wednesday.
* The problem with the LOOSE right spindle turned out to be an
improperly seated 3" snap ring. Eric managed to knock it back into
place. He will have to realign the right spindle tomorrow.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.29 CMP.A2 29 of 296
ASDG::POIRIER 19 lines 12-OCT-1994 23:58
-< 1000 wafer run preparations >-
--------------------------------------------------------------------------------
* A 150 wafer (pre test) run was sucessfully completed @ 10:30 p.m.
The 1000 wafer marathon run is now scheduled for tomorrow. This run
will include a 1 min polish on each wafer and will take approx
28 hours to complete.
* All monitor wafers used in the pre test were cleaned on the OnTrak
scrubbers after use. They are now on the SEND elevators in CMP.A2.
* The Strasbaugh rep replaced the robot end effector arm and related
vacuum hoses. It appears that the installation of the hoses into the
end effector (at the Factory) was not done properly. Eric feels that
this contributed to the intermittent end effector vacuum errors we
experienced yesterday. The error did not occur during tonight's 150
wafer run.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.30 CMP.A2 30 of 296
ASDG::POIRIER 19 lines 13-OCT-1994 23:58
-< 1000 wfer run / Carrier clamp ring problems >-
--------------------------------------------------------------------------------
* The 1000 wafer marathon run is in progress. 182 wafers have been
completed as of 11:30 p.m. Brian Jubinville is taking over for
3rd shift. Please relieve him as early as possible tomorrow morning.
* The plastic carrier clamp rings are starting to distort out of shape.
We measured them at 9.765" and 9.770". The spec is 9.750".
This extra .015" to .020" is starting to cause interference problems
in the load stations. We had to change the "DOWN SOFT" calibration
variable to compensate for the tight fit. One possible cause of the
distortion is over tightening. I can order a torque limiting screw
driver to get some control on the screws. Another option, suggested
by Eric, is to replace the 10-32 X 3/8 SS screws with shoulder
screws. This will allow the rings to compress just enough to keep
them tight without any distortion.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.32 CMP.A2 32 of 296
ASDG::POIRIER 13 lines 14-OCT-1994 23:21
-< CMP.A2 >-
--------------------------------------------------------------------------------
* The tool ran 262 wafers then errored for END EFFECTOR VACUUM. It
appears that the air valve is acting up again. Eric has ordered a
replacment valve from Strasbaugh. We're planning to re-start the 1000
wafer run on Monday.
* All monitor wafers used on the A1 & A2 have been cleaned on the
OnTraks.
* The sytem was left in wet idle mode.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.33 CMP.A2 33 of 296
ASDG::POIRIER 6 lines 18-OCT-1994 00:19
-< 1000 wafer marathon run >-
--------------------------------------------------------------------------------
* The 1000 wafer marathon run is continuing to run into 3rd shift.
A2 has sucessfully completed 372 wafers as of 12:15 a.m. with no
operator assists. Brian is taking over until 1st shift comes in.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.36 CMP.A2 36 of 296
ASDG::POIRIER 13 lines 18-OCT-1994 23:35
-< 1000 wafer marathon run complted >-
--------------------------------------------------------------------------------
* The 1000 wafer marathon run was sucessfully completed at 9:40 p.m.
tonight. There was one operator assist during the run. It happened on
1st shift today and was caused by the shuttle assembly not completing
its full travel. We are aware of a slight interference between two
pieces on sheet metal on the shuttle assembly when it indexes.
I'm not sure if this contributed to the shuttle failure or not.
The only thing I noticed about the shuttle tonight was a slight
hesitation during its travel. We are planning to rework the sheet
metal covers in the near future.
John.
|
| 7.2 | GEAR BOX PROBLEM | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:45 | 57 |
| ASDG::POIRIER 18 lines 8-SEP-1994 23:42
-< Table Gear Box Problem >-
--------------------------------------------------------------------------------
* A problem was encountered by the Strasbaugh rep while performing
the table alignment procedure today. The table has .018" play
after tightening all the bolts. We called Strasbaugh and were
informed that the spec is .002". After a lengthy inspection,
we determined that the play is in Table gear reduction box.
Strasbaugh instructed us to remove the top plate from the gear box
and remove one shim. I removed the plate and found no shims present.
Maybe the contact at Strasbaugh was mis-informed. Anyway, the rep
will resume work on this issue first thing in the morning.
We may end up removing the table and the gear box.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.11 CMP.A2 11 of 296
ASDG::POIRIER 28 lines 9-SEP-1994 23:44
-< Start-up Activities >-
--------------------------------------------------------------------------------
* The gear box problem was resolved by the Strasbaugh rep today. Eric
removed the gearbox top plate and removed some shims. The shaft play
was reduced from .018" to .0015". This is well within the .002" spec.
* Eric also replaced the Right Spindle Air Cylinder. The cylinders on
this tool have the same problem that the cylinders on CMP.A1 had. The
lever arm adjustment was set incorrectly at the factory causing the
cylinder housing to rub against the bridge box. This induced a
lateral force on the cylinder piston causing the guide bushing to slide
inside the cylinder. The cylinders are not permenantly damaged, they
will be sent back to Control Air co. and reworked.
* Eric brought a new elevator tub with him from conn. This is a
replacment for the one with a cracked weld.
* I recieved a call from Eric Jacobson (Strasbaugh field service
manager), he is shipping us a newly designed support bracket to
stiffin-up the base. This bracket is intended to reduce the
oscilation problem that the conditioning arm is currently experiencing
due to the machine base flexing at the point where the conditioning
arm bolts to the base. The new bracket will be here on Monday.
* The Strasbaugh rep will be back on Tuesday morning to continue the
start-up.
John.
|
| 7.3 | VACUUM CABINET | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:46 | 16 |
| ASDG::POIRIER 13 lines 13-SEP-1994 23:35
-< Vacuum Cabinet >-
--------------------------------------------------------------------------------
* The vacuum cabinet is now functioning and supplying vaccum to the
tool.
* The vacuum cabinet pressure swith was adjusted to provide the proper
pressure differential.
* The table was aligned to the spindle.
* The replacement recieve tub was moved into the Service chase. (On
table)
John.
|
| 7.4 | Alignments & Leveling bolts | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:47 | 25 |
| ASDG::POIRIER 22 lines 20-SEP-1994 23:39
-< Alignments & Leveling bolts >-
--------------------------------------------------------------------------------
* Both left and right spindles were aligned today.
* The left and right spindle hubs were also aligned.
* The Strasbaugh rep has a custom indicator support rod that he uses
to align the spindles. It makes the spindle alignment task much
easier than the procedure described in the manual. I drew a sketch
of Eric's indicator support rod and will drop it off at the model
shop in Shrewsbury tomorrow.
* I looked into upgrading the leveling bolts on the 2 Strasbaughs
today. The current leveling bolts are 1/2 -13 X 5"grade #2 bolts,
threaded the entire lenth of the bolt. Grade #3 or better are only
threaded along the first 2" of the bolt. Therefore, it appears that
we'e not going to find "off the shelf" grade #5 bolts for this
problem. I'm going to call Dan Trogen at Strasbaugh tomorrow and
ask him to supply us with new bolts of grade #5 quality. He might have
special order them.
John.
|
| 7.5 | SPINDLE STOPPING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:47 | 28 |
| ASDG::POIRIER 25 lines 23-SEP-1994 16:56
-< start-up activities. >-
--------------------------------------------------------------------------------
* We experienced a problem with the left spindle stopping by itself.
We swapped cables and the problem persisted. We then switched
amplifiers and the problem stopped. We're still not positive of
the cause, but it was most likely a bad connection.
* We completed a 1 wafer run this afternoon. We ran a course cycle
that still requires much fine tuning.
* The robot lead screw is very noisy when the robot transverses back
and forth. This is the same problem we encountered on CMP.A1. The
problem turned out to be a loose lead screw bracket.
* We discovered a bad Barksdale pressure switch on the right spindle.
Eric will bring a replacement when he returns next Wednesday.
* It looks like we'll need a 10-32 heli-coil extractor after all.
We attempted to work this issue many months ago but Strasbaugh
insisted that the silver plated heli-coils in the carriers were
extreamly reliable and that they never heard of one failing.
We now have 2 carriers down for stripped heli-coils.
John.
|
| 7.6 | Calibration variable for table rotation | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:47 | 18 |
| ASDG::POIRIER 15 lines 20-OCT-1994 00:05
-< Calibration variable for table rotation >-
--------------------------------------------------------------------------------
* The table would not rotate while the tool was in WET IDLE mode.
I called Eric and discovered that there is a calibration variable
that is not listed on our documentation. (D1 49) will enable or
disable the table rotation during wet idle.
* The bracket for the capacitance sensor arrived from Strasbaugh today.
Eric will be in tomorrow to install it.
* The 90 deg offset tips for the internal retaining ring pliers should
arrive tomorrow. This will allow us to remove the 4" retaining ring
on the right spindle. We want to disassemble the spindle and find out
where the excess play is comming from.
John.
|
| 7.7 | ROBOT BINDING UP | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:48 | 20 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 17 lines 20-OCT-1994 16:44
-< Passdown for 10/20 >-
--------------------------------------------------------------------------------
Well, we started to level the plate under the robot
since it was a little out. When we tried moving the
robot back and forth, it kept getting stuck in mid
travel. At first, I thought the lead screw got hit
but that wasn't the case. This happened to Eric and
John before. They had put some lubricant on the rails
to fix it and make it run smooth. This is what happened
to us. Eric decided to pull the entire robot and plate
right off of the machine. We cleaned up everything and
removed any debris on the screw. Before we left for the
Films meeting, Eric and Bob had the everything back in
and they were leveling things.
BJ
|
| 7.8 | ELEVATOR ALIGNMENTS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:48 | 31 |
| ASDG::POIRIER 28 lines 21-OCT-1994 00:07
-< CMP.A2 activities >-
--------------------------------------------------------------------------------
* The cassette sensor arm on SEND elevator #1 is interfering with the
H-bar on the cassettes. This creates a condition where it appears that
the elevator has initialized but in fact has not because the micro
switch on the sensor arm does not make contact. There are no adjustments
on the cast aluminum sensor arm assembly to rectify this situation.
However, we could remove a little stock from the teflon locating blocks
on the elevator platform. I think 1/32" would be enough.
* The elevator heights on all 4 elevators were checked and adjusted as
needed.
* The pad was removed in preparation for the right spindle alignment
procedure. I was about to start the alignment when I noticed that the
retaining ring on the right spindle was removed. Eric told me that the
spindle would be put back together and to re-align the spindle when I
returned from the meeting. I'm not sure if he changed his mind or
possibly found a new problem with the spindle. In any case, I didn't
want to expend all that effort if the spindle was not ready to be
re-aligned. Eric will be back tomorrow moring so I guess we'll find
out whats going on then.
* Please let Eric know that the capacitance sennsor for A2 and the
conditioner amplifier for A1 are in the 2nd draw of the remote
control panel.
John
|
| 7.9 | Robot lead screw assembly bushings | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:49 | 12 |
| ASDG::POIRIER 9 lines 3-NOV-1994 00:28
-< Robot lead screw assembly bushings >-
--------------------------------------------------------------------------------
* I replaced the robot lead screw assembly bushings with the new
ball bearing style tonight. They arrived from Strasbaugh today
along with new o-rings for the spindle chucks. The old bushings
are on Jim Tooker's desk.
John.
|
| 7.10 | ROBOT CLEANED AND ALIGNED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:49 | 12 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 9 lines 3-NOV-1994 16:19
-< 1st shift passdown for 11/3 >-
--------------------------------------------------------------------------------
Re-installed the robot and drive assembly. We
went through all of the different stations to verify
calibration. We made some minor adjustments involving
positioning of the robot. We've been running exercise
wafers all afternoon without any problems.
1st shift
|
| 7.11 | #1 Cassette position sensor | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:50 | 7 |
| PATE::GEE 4 lines 15-NOV-1994 22:55
-< #1 Cassette position sensor >-
--------------------------------------------------------------------------------
The #1 send cassette position sensor wasn't seating properly onto the
cassette. Had to realigned the sensor bracket.
Bob
|
| 7.12 | lead screws | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:50 | 9 |
| PATE::GEE 6 lines 16-NOV-1994 23:55
-< lead screws >-
--------------------------------------------------------------------------------
Receive elevator #2 was binding during its travel. Lubricated all 4
lead screws on both cmp.a1 and cmp.a2.
Also, both robot lead screws where lubricated.
2nd shift
|
| 7.13 | Robot Z-axis calibration variables | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:51 | 16 |
| ASDG::POIRIER 13 lines 28-NOV-1994 23:54
-< Robot Z-axis calibration variables >-
--------------------------------------------------------------------------------
* It appears that the robot (Z height)is off. I changed the Robot
Z-axis TOP position calibration variable from .17 to .26 and the
robot picked up the wafers from slot #1 thru slot #13 with no
problems. It starts clipping the wafers from slot 15 thru 25 so it
looks like the Z-axis MIDDLE and the Z-axis BOTTOM calibration
variables will have to be changed as well.
John.
|
| 7.14 | ROBOT NOT PICKING UP WAFER | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:51 | 108 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 15 lines 30-NOV-1994 16:25
-< Passdown for 11/30 >-
--------------------------------------------------------------------------------
Today... Eric found the end effector vacuum line was
hanging down causing the robot to hit the wafer. Wether
or not this like was like this all week is questionable.
A new style arm is coming in next and will be replaced
on both systems. We traced all of the input and output
sources for the fountains on the LOAD station. We tweaked
the 24V because it was low. Eric ended up realizing that
the current software was never updated to the newer version
and he'll do that when the disk comes in. Eric and John are
currently tracing a DI water sensor chattering that exists
on both machines.
1st shift
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.60 CMP.A2 60 of 296
ASDG::POIRIER 34 lines 30-NOV-1994 00:23
-< robot Z-height/fountian rinse problems >-
--------------------------------------------------------------------------------
*Load station fountian rinse problem:
------------------------------------
We checked output opto's #158 & #159 during the fountian rinse
cycle. The LED's were on.
The connections on the terminal block (next to the solenoid valves),
were checked. Both #158 & 159 were good.
We checked for 24 V at solenoid valve #72 (right load station fountian
rinse), 24 V was present.
I operated solenoid valve #72 manually and the fountian rinse sprayed
nicely. When the carrier rinse solenoids energized, the fountian rinse
flow dropped to zero. This may be due to the abnormally low D.I. water
pressure of 20 p.s.i. we had during all of 2nd shift. Therefore, the
valves may be energizing after all, it just doesn't appear so. I
didn't have time to verify this theory before leaving. Please check it
out in the morning.
Elevator Z-height problem:
-------------------------
The robot continued to give us intermittent problems tonight. We ran
many auto cycles during the shift and encountered different Z-height
position problems at various times. The robot picked up wafers from
both send stations with no problems on some runs and clipped wafers on
other runs. Rehomming the system didn't appear to have any effect on
this condition.
Eric Ronnebaum will be comming in tomorrow morning to take a look
at this problem.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.62 CMP.A2 62 of 296
ASDG::POIRIER 40 lines 30-NOV-1994 23:56
-< 2nd shift passdown >-
--------------------------------------------------------------------------------
* Wafer handling problem:
----------------------
Test runs were run using both send stations and both recieve
stations. Recieve station #1 is still clipping wafers slightly
in cassette positions 1 & 2. Eric Ronnebaum will be in tomorrow
morning to tweak it in. I am leaving the tool DOWN in RTC until
Eric tweaks it in tomorrow morning.
* Fountian rinse problem:
----------------------
Eric discoverd that CMP.A2 has version 3.0 software loaded instead of
version 3.6. With 3.0, the fountian rinse shuts off before the
carriers lift up from the load stations. With this condition, it
appears that the fountian rinse is not functioning when in fact it
is. It just shuts off sooner. Strasbaugh is shipping version 3.6
to us ASAP.
Elevator squeeling/hesitation problem:
--------------------------------------
Eric thinks that the problem lies with the elevator assembly
alignment. He doubts that the lead screw bushing is the problem.
He is planning to demonstrate the alignment procedure for us tomorrow.
PLEASE NOTE:
-----------
A wafer came off the carrier during a test run @ 11:00 p.m. We lost 2
wafers and the pad. The carriers involved are on the stainless table
next to A1. The carriers need to be rebuilt and the retaining rings
are damaged.
John
|
| 7.15 | ELEVATOR HEIGHT NOT REPEATING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:51 | 12 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 9 lines 1-DEC-1994 14:36
-< Passdown for 12/1 >-
--------------------------------------------------------------------------------
Eric traced the elevator non-repeating problem to the
pulley that is on the end of the lead screw. The set screw
had loosened up. He tigtened it back down and tweaked
everything back in. There are harder pulleys that are being
shipped in and Eric will be replacing all of the pulleys on
both A1 and A2.
1st shift
|
| 7.16 | ELEVATOR HEIGHT NOT REPEATING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:52 | 52 |
| ASDG::POIRIER 49 lines 1-DEC-1994 23:58
-< 2nd shift passdown >-
--------------------------------------------------------------------------------
* Elevator problem:
----------------
Eric found a loose set screw on the pulley that drives the elevator
on the left RECIEVE station. He also found a crack in the( plastic )
pulley. The set screw was tightened and the elevator was reinstalled.
We expect the pulley to function for the short period of time it will
take for the new one to arive from Strasbaugh.
Elevator squeeling problem:
--------------------------
Eric demonstrated the elevator removal and disassembly procedure
tonight. It appears that the squeeling is caused by dirty/grimey
build up on the lead screw. Another contributing factor is the
small twist we found in the elevator backing plate. This plate
has the guide rails and the ball nut bracket bolted to it. Any
deformation in this plate will cause binding. As usual, Strasbaugh
used aluminum for the backing plate material and as usual its
distorted out of tolerance. We place the precision level across it
and its twisted about an 1/8 ". We throughly cleaned the lead screw,
guide rails and the ball nut. It now travels with no sqeeling.
Fountian rinse problem:
----------------------
We installed version 3.08 software and the fountian rinse now
functions in the same manner as CMP.A1.
Carriers:
--------
Jim Martin and Jesus Roa trained Bob and myself on carrier rebuilding
tonight. We rebuilt the two carriers that were involved in last
night's run that resulted in wafer breakage.
Valve chattering problem:
------------------------
Eric called Strasbaugh about our continuing problems with the D.I.
water soleniod valves chattering. The people at Strasbaugh informed
Eric that other 6DS customers have been complaining about the same
problem. They are looking into this issue and will retrofit the tools
when they develop a solution.
John.
|
| 7.17 | Elevators PULLEYS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:52 | 17 |
| ASDG::POIRIER 14 lines 2-DEC-1994 23:29
-< 2nd shift passdown/Elevators >-
--------------------------------------------------------------------------------
* All four elevator assemblies were removed from the tool. They were
disassembled, cleaned, lubricated and reassembled. We also replaced
both plastic pulleys on all of the elevators with the new aluminum
ones that arrived from Strasbaugh today. We ran test runs utilizing
both SEND and both RECIEVE stations at the end of the shift. The
elevators moved smoothly with no sqeeling. The robot loaded and
unloaded with no clipping in all four cassettes. The rest of the new
pulleys are on Jim Tooker's desk.
Bob & John.
|
| 7.18 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:53 | 34 |
| ASDG::POIRIER 31 lines 20-DEC-1994 01:28
-< servo amp problems >-
--------------------------------------------------------------------------------
* The system went down tonight for a (AXIS #2 SERVO AMPLIFIER FAULT)
error. The table and spindles were stopping during the auto polish
cycle. We suspect that the problem was with the servo amp
connections. The amps had oversized lugs on them when the tool first
arrived. These oversized lugs came into contact with the inside of
the electrical box door which in turn bent the connectors on the amps.
We replaced the lugs with smaller ones 3 months ago but the
connectors may be permanently damaged causing intermittent failures
with the servo amps. We repositoned the connector on servo amp #2
and the problem ceased to exist.
The repair was delayed by the inability to get 2 good carriers to
test the tool. One of the carriers gave us a lot of trouble, we had
to take it apart 3 times to find the problem. We ended up back
flushing the 2 check valves in the carrier before it would work
properly. Special thanks to Jim Martin for staying late and helping
us with the carriers.
* We also had trouble with the carrier on the left spindle loading
wafers correctly. We repositioned the left load station to work
with the carrier on the left spindle and the problem went away.
I think the problem lies with the carrier clamp rings. They are
distorted out of shape and tend to cause loading problems in the
load stations. We can tweak either load station to fit a
particular carrier, but the problem will return when a new carrier
is mounted on the spindle. The clamp rings need to be redesigned
so they don't distort or they should be changed more frequently.
John & Bob.
|
| 7.19 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:53 | 8 |
| ASDG::POIRIER 5 lines 21-DEC-1994 00:14
-< WAFER DETECTED ON SPINDLE error >-
--------------------------------------------------------------------------------
* The system errored for (WAFER DETECTED ON SPINDLE). The problem
turned out to be a malfunctioning carrier.
John
|
| 7.20 | 301 = IBM MANUAL ERROR | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:53 | 15 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 12 lines 2-JAN-1995 08:28
-< Passdown for 1/2 >-
--------------------------------------------------------------------------------
This morning at power-up, the screens kept coming up
with a 301 = IBM MANUAL. I traced it to the roll around
unit. After I got A2 running in wet mode, I looked into
the roll around unit and traced it to being the keyboard
being unplugged.
BJ
|
| 7.21 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:54 | 14 |
| ASDG::POIRIER 11 lines 10-JAN-1995 01:28
-< Conditioner actuator reed switch >-
--------------------------------------------------------------------------------
* PROBLEM: CONDITIONER DISK CONTACTING SIDE OF PARK STATION DISH.
ACTION: The reed switch on the side of the conditioner actuator
does not appear to be operating properly. The problem
may be with the switch itself or with the magnet that
is mounted on the inside of the actuator cylinder
housing. Brian will continue to troubleshoot on 3rd
shift.
John.
|
| 7.22 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:54 | 14 |
| ASDG::POIRIER 11 lines 10-JAN-1995 23:56
-< conditioning arm problems >-
--------------------------------------------------------------------------------
* Adjusted the mechanical travel in the conditioning arm actuator
assembly. The conditioning disk now lands in the center of the
park station.
* The conditioning arm homing failure problem turned out to
be a bad connection on the terminal strip located next
to the conditoning arm actuator.
John & Jim M.
|
| 7.23 | LOSS OF POWER | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:54 | 20 |
| SUBPAC::LANDRY 17 lines 12-JAN-1995 16:37
-< wheres all the juice? >-
--------------------------------------------------------------------------------
A couple of crazy things with machine power went on today:
* The system powered down totally today. Found one leg of the 208V
incoming power to be off. What? The wall breaker wasn't tripped
though. What? So, shut said breaker off and turned back on.
That brought the "power on" light back, but the system still would
not power up. Traced the problem to be an open interlock, located
on the back/lower door at the polish table end. Mechanically
re-positioned the doors bracket that hits the switch. All set!
* As Ops Techs returned from dining half-hour, the found the system
powered down. The system power on light was lit though. Well,
back to the interlocks. Re-adjusted the previous problem bracket
as well as the bracket on the door with one missing latching mech-
anism. The system has stayed powered up since.
1st shifters
|
| 7.24 | COMPUTER WON'T BOOT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:56 | 16 |
| PATE::GEE 13 lines 12-JAN-1995 23:36
-< Computer >-
--------------------------------------------------------------------------------
PROBLEM: System would not boot at initialization
root cause: board not seated in computer
action: all boards removed and reseated.
Jim Martin taught John P. and myself how to backup all files from the Computer.
John has the floppys.
2nd Shift
|
| 7.25 | POWER PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:56 | 31 |
| SUBPAC::LANDRY 28 lines 13-JAN-1995 15:12
-< A Fun and Educational Day, wish you were here! >-
--------------------------------------------------------------------------------
Arrived this morning to be greeted with a re-occuring problem. Yup,
the system has just powered itself down. OK, let get to it. As was
the case from the previous day, one of the legs coming from the wall
breaker (90 AMP) was not supplying the proper current to the system.
The day before, we reset the breaker and the system survive about 16
hours until it happened again. This time, the breaker wasn't reset.
A call was logged to have facilities check out the breaker prior to
us attempting to track down the problem. The electrician's first
reaction was that something on the system was taking it down. Well,
I was skeptical cause the power to the system wasn't going to far
through the system. We couldn't even get the "power on" light to
light up. Thats one of the first things to see juice. Well, back to
the wall breaker box we go. The suspected breaker was removed. Lo
and behold, it had signs of mechanical failure. The electrician
quickly rounded up an new one, installed it and voila, power! Joe,
the electrician, did a great job.
Next thing was to fire up the system and initialize everything. The
system came up with a 301 error. Whats that? After a short delay,
the screen suddenly showed a cute little hint. This is what it said:
/
301 = ( O/K ) >>-----> IBM manual
/
Basically, to interpret, it meant 301 = not ok, RTFM (read the manual).
Found a jack on the back of the system just barely hanging on. Plugged
it fully in and rebooted the system. Alls well at this stage.
Doc
|
| 7.26 | COMPUTER WON'T BOOT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:56 | 25 |
| ASDG::POIRIER 22 lines 13-JAN-1995 23:48
-< PC boot-up problems >-
--------------------------------------------------------------------------------
* Problem: System fails to boot-up approx 30% of the time.
ERROR: Board 0 failure.
Root cause: Suspected PC problem.
Action: a) Reloaded Initialization files. We thought they might
be corrupted.
b) Opened up PC and removed, inspected and reseated
boards. (No schematics available to identify boards.)
Current status: a) No improvement.
b) Will place call to Strasbaugh field service for
board identification and related information.
2nd Shift.
|
| 7.27 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:56 | 25 |
| ASDG::POIRIER 22 lines 17-JAN-1995 00:00
-< conditioner down force calibration >-
--------------------------------------------------------------------------------
Problem: Conditioner Down Force out of calibration.
Cause: Needs full calibration. Possible amplifier problem.
Action: Followed procedure in Manual. The machine would not respond to
the commands outlined in the Manual. We called Eric Ronnebaum
at his home and he informed us that the functions we were
trying to activate are now contolled by the DCX controller
not by Analog inputs as stated in the Manual.
We were able to continue with the procedure until we tried
to disable the Conditioner Down Force Control with the FLAGG
function. We cannot locate the Flagg number for this function
in any of the documentation. Will someone on 1st shift please
call Strasbaugh for this information.
Bob & John
|
| 7.28 | ROBOT ARMS NOT ARRIVING AT ZERO | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:57 | 12 |
| SUBPAC::BJUBINVILLE "IT'S HOCKEY TIME!!" 9 lines 18-JAN-1995 09:07
-< 3RD SHIFT PASSDOWN FOR 1/18 >-
--------------------------------------------------------------------------------
The robot arms were not arriving at the right load station
all of the way and the machine kept erroring out. After the
robot arms were referenced, the error went away. An assist was
logged for this event.
BJ
|
| 7.29 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:58 | 27 |
| PATE::GEE 24 lines 19-JAN-1995 00:11
-< Pad Conditioner >-
--------------------------------------------------------------------------------
PROBLEM: The pad conditioner doesn't submerge into the
park station reservoir after it conditions the
pad, unless you manually move it.
CAUSE: Found the linear bearings need to be replaced.
ACTION: Disassembled, cleaned and reassembled the pad conditioner
assembly. We found that all the bearings in the housing
are rusted and that the linear bearings need to be replaced.
There are no linear bearing in-house so we will rush them
in tomorrow, they should be here Friday.
After cleaning the bearings, the pad conditioner is
submerging about a 1/4" and can be run. Please monitor
it, and log an assist if you have to manually push it
down. The system has been put on Warning in RTC.
John and Bob
|
| 7.30 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 04:59 | 16 |
| ASDG::POIRIER 13 lines 19-JAN-1995 23:29
-< conditioning disk shaft bellows >-
--------------------------------------------------------------------------------
* The bellows on the conditioning disk assembly was twisted around it's
shaft. The conditioning disk continued to rotate without any problems
and the neoprene bellows was undamaged. We disassembled the lower
end of the shaft assembly and found a spacer in upside down. We
reassembled it upside down last night on 2nd shift. It's working
fine now.
* Bob and I rebuilt 2 carriers while Jim Martin ran product on CMP.A2.
John & Bob.
|
| 7.31 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:01 | 15 |
| ASDG::POIRIER 12 lines 26-JAN-1995 23:30
-< Spindle Vacuum Switch >-
--------------------------------------------------------------------------------
* Recalibrated Barksdale pressure switch on left Spindle. The system
now detects and alarms for low vacuum.
* Replaced both left and right spindle vacuum filters.
* The system will remain in a DOWN status until the cleaning station
pads are installed.
John & Bob.
|
| 7.32 | DOWNFORCE ISSUES | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:01 | 80 |
| SUBPAC::BJUBINVILLE "IT'S HOCKEY TIME!!" 77 lines 20-JAN-1995 06:34
-< PASSDOWN FOR 1/20 >-
--------------------------------------------------------------------------------
ENG suspected that the spindle down force and aligment might
have problems due to examining some previous lots run on CMP.A2.
Both spindle down forces and were found to be both out of spec.
The left spindle was out 10% and the right was out 3.5%. Both
spindles were brought into spec. The spindle/hub alignment was
checked on both spindles. The left spindle was within spec.
The right was out by 2 mils. The right spindle was adjusted
and was brought into spec.
Listed below is the reading from the down force. Hit NEXT UNSEEN
if you don't like numbers and charts.......
LEFT SPINDLE DOWN FORCE - FINAL TEST
====================================
LBS. DISPLAY ACTUAL ACTUAL+TEST VALUE ERROR VALUE
=================================================================
50 58.5 40.7 58.4 .1
=================================================================
100 99.9 81.9 99.6 .3
=================================================================
150 149.9 132.8 150.5 -.6
=================================================================
200 199.9 182.4 200.1 -.2
=================================================================
250 249.8 233.3 250.9 -.9
=================================================================
300 300.1 283.3 301 -.9
=================================================================
350 350 334.1 351.7 -1.7
=================================================================
400 400 384.6 402.3 -2.3
=================================================================
450 450.2 434.5 453.2 -3
=================================================================
500 499.9 485.6 503.3 -3.1
=================================================================
= -1.14%
RIGHT SPINDLE DOWN FORCE - FINAL TEST
LBS. DISPLAY ACTUAL ACTUAL+TEST VALUE ERROR VALUE
=================================================================
50 64.4 43.7 61.7 2.7
=================================================================
100 100 78.9 96.9 3.1
=================================================================
150 149.9 129.7 147.7 2.2
=================================================================
200 200 179.5 197.5 2.5
=================================================================
250 249.8 230.6 248.6 1.2
=================================================================
300 299.9 282.2 300.2 -.3
=================================================================
350 350 333.6 351.6 -1.6
=================================================================
400 400.1 384.8 402.8 -2.7
=================================================================
450 450 435.0 453.0 -3
=================================================================
500 499.8 485.0 503.0 -3.2
=================================================================
= .09%
|
| 7.33 | LOAD CUPS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:02 | 39 |
| SUBPAC::BJUBINVILLE "IT'S HOCKEY TIME!!" 36 lines 27-JAN-1995 08:26
-< passdown for 1/27 >-
--------------------------------------------------------------------------------
The brushes came in and were installed. Once the
MQC got under way, the left spindle kept dropping vacuum
when it had a wafer on it. After inspection of the spindle,
it was discovered that the left load cup was moving around
everytime the carrier came down. The top ring is suppose
to move freely but the hold down was cranked down. Also,
all four load cup mounting bolts were loose and the shims
were slid out from under the cup. After re-assembly and
re-aligned the spindle came down smooth. As of right now,
the vacuum is great on both spindles. No pad touch downs
were done as of 8am. Wether or not the case yesterday with
the wafers sliding out was tied into what was fixed is
undetermined at this time.
The top robot arms still isn't also arriving to the right
load cup. I ttied 2nd shifts suggestion with lubing up the
lead screw a little more but that didn't appear to help. It's
better but still not quite right.
BJ
|
| 7.34 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:04 | 15 |
| ASDG::POIRIER 12 lines 26-JAN-1995 23:30
-< Spindle Vacuum Switch >-
--------------------------------------------------------------------------------
* Recalibrated Barksdale pressure switch on left Spindle. The system
now detects and alarms for low vacuum.
* Replaced both left and right spindle vacuum filters.
* The system will remain in a DOWN status until the cleaning station
pads are installed.
John & Bob.
|
| 7.35 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:10 | 12 |
| PATE::GEE 9 lines 6-FEB-1995 23:41
-< robot bellows >-
--------------------------------------------------------------------------------
The robot wouldn't home.
Found the bellows wasn't seated properly, causing the robot to
stop.
Lubricated the slide rails and reseated the bellows.
John & Bob
|
| 7.36 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:11 | 62 |
| ATE::GEE 18 lines 13-FEB-1995 23:49
-< Robot & Computer >-
--------------------------------------------------------------------------------
Problem: The robot was slamming the inside right side of the cassette
at the send stations.
Cause: Found that the vacuum line had slid down and wouldn't allow the
lower arm to extend.
Action: Repositioned the lines to allow more slack. Cleaned and
relubricated the robot leadscrew, it was houling.
-------------------------------------------------------------------------
Problem: Intermittent computer booting problem.
Action: Called the rep. and he said the problem may be one of the
modules plugging into the top of board "0" and not board
"0" itself. We will look into this when time permits.
John & Bob
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.131 CMP.A2 131 of 296
SUBPAC::LANDRY 33 lines 13-FEB-1995 17:03
-< Robots and switches! >-
--------------------------------------------------------------------------------
A long long day........
The robot arm has a flaw. The problem is......the arm enters the
Send cassette to take a wafer, pauses as should, then just as it's
about to lower to pickup the wafer, it flings to the side of the
cassette. Of course it then errors out. This happens on both of
the send cassettes.
As I attempted to trouble shoot the problem, the system started
exhibiting a "left spindle low vacuum" alarm. So, this had to be
repaired before the robot could attempt to work.
Found several things had happened concerning the vacuum. 1) Swapped
the carriers to confirm they weren't the problem. They were alright.
2) The coellessing filter housing was 2/3rds full of water. Emptied
it and tried to run again. No luck. 3) Removed all four o-rings
from the hub assembly, cleaned them and the grooves they fit into, and
then re-installed them. Again no luck. 4) You with me here? Yup,
the vacuum switch. I believe that the switch that resided in there was
the original switch we continued to move from spindle to spindle while
new ones were ordered. So, I removed the varment and installed a new
one. Success! Now back to square one....the robot.
Began looking into it again and it wasn't consistant at all times. Ya,
it was consistant in it's flinging to the cassette side wall, but it
was also periodically not returning to the ZERO position. This is
where I get off and second shift takes the reigns.
My speculation is that we either have a connector problem or a wire
either pinched or broken inside the robot housing. Good luck lads.
Doc
|
| 7.37 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:10 | 15 |
| PATE::GEE 12 lines 17-FEB-1995 23:21
-< Spindle back pressure calibration >-
--------------------------------------------------------------------------------
Calibrated the left and right spindle back pressure. The left spindle
was within spec. The right spindle was out of spec by a large margin.
Left spindle back pressure was within +/- 1 psi of low setpoint and
within +/- 1 psi of high setpoint.
Right spindle back pressure was + 10 psi of the low setpoint and
+ 15 psi of the high setpoint.
Spec is +/- 1 psi of both the high and low setpoint.
Bob, John and Jesus
|
| 7.38 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:11 | 22 |
| SUBPAC::LANDRY 19 lines 23-FEB-1995 16:39
-< Force Cal performed >-
--------------------------------------------------------------------------------
A "concern" was voiced today centering around the Force readout on the
screen when the spindles were in the up position. Both of the spindles
read differently (as did the other systems two spindles, all four read
something different). Well, I hadn't the knowledge of why there were
that way and no one else was quite sure as to what the reading range
should be. The Manual had no information around this question. So,
the spindle down force was performed to assure that the spindles were
in fact reading right. Other than the normal tweak here and there, all
was fine with the spindle and it's respective load cell.
After performing the above procedure, the "idle" force read outs had
changed but were still not in sink with each other. The readings just
tracked with the amount of adjustment made during calibration. Eric B
did all the cals with me. He wants to run some MQC's to see what
results the adjustments made. Time will tell.
Doc, with early BJ assistance and late Eric assistance
|
| 7.39 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:11 | 18 |
| PATE::GEE 15 lines 24-FEB-1995 03:39
-< Spindle air cylinder, E-P Regulator >-
--------------------------------------------------------------------------------
* Found the air line going to the left spindle air cylinder badly
pinched, we repaired it.
* Calibrated the spindle load current so that it reads "0" amps
when the spindles are up.
* Adjusted the zero pod on the Fairchild E-P regulators for the left
and right spindles so that the spindle forces displayed on the
monitor screen both read the same. This had to be changed back
becouse the actual down force increased 40 lbs on the left and
decreased the right spindle 20 lbs.
Bob & John
|
| 7.40 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:12 | 209 |
| SUBPAC::LANDRY 206 lines 24-FEB-1995 09:00
-< Updated Variables >-
--------------------------------------------------------------------------------
CALIBRATION VARIABLES
1. BRIDGE HOME POS.= -33.86
2. BRIDGE LOAD POS.= -33.53
3. BRIDGE POLISH POS.= 0
4. BRIDGE MIDDLE POS.= -11
5. TEMP IN SCALE FACTOR= 1
6. TEMP OUT SCALE= 1
7. TEMP IN OFFSET= -.8
8. TEMP OUT OFFSET= 1.5
9. BRUSH SPEED SCALE FACTOR= .719
10. SLURRY 1 FLOW FACTOR= 1.08
11. SLURRY 2 FLOW FACTOR= 1.29
12. TABLE SHUNT LOE TEMP= 0
13. TABLE SHUNT HIGH TEMP= 0
14. BRIDGE LEFT CURTAIN POS.= -12
15. BRIDGE RIGHT CURTAIN POS.= -25
16. NOT USED
17. NOT USED
18. NOT USED
19. NOT USED
20. SLURRY 2 FLOW FACTOR= .96
21. NOT USED
22. NOT USED
23. NOT USED
24. NOT USED
25. NOT USED
26. NOT USED
27. NOT USED
28. NOT USED
29. NOT USED
30. LEFT PRESS. OUTPUT FACTOR= 6.1
31. LEFT PRESS. OUTPUT OFFSET= 975
32. LEFT PRESS. MIM.= 800
33. LEFT FORCE SCALE FACTOR= .94
34. LEFT SPINDLE DEAD WEIGHT= 144.79
35. LEFT SPINDLE REDUCE RATIO= 10
36. LEFT SPINDLE CURRENT OFFSET= 0
37. LEFT PRESSURE MINIMUM, TBL2= 0
38. SPINDLES DOWN SOFT VALUE= 1200
39. SPINDLES DOWN HARD VALUE= 1100
40. RIGHT PRESS. OUTPUT FACTOR= 6.1
41. RIGHT PRESS. OUTPUT OFFSET= 975
42. RIGHT PRESS. MIM.= 800
43. RIGHT FORCE SCALE FACTOR= .946
44. RIGHT SPINDLE DEAD WEIGHT= 142.46
45. RIGHT SPINDLE REDUCE RATIO= 10
46. RIGHT SPINDLE CURRENT OFFSET= .1
47. RIGHT PRESSURE MINIMUM= 0
48. SPINDLES DOWN EXTRA SOFT VALUE= 0
49. NOT USED
50. PRESS. CONTROL LOOP GAIN= .75
51. MAX. PRESSURE STEP DIVISOR= 30
52. FORCE LOOP DERIVATIVE GAIN= 56
53. FORCE LOOP NEG DER GAIN= 0
54. DOWN FORCE INTEGRAL GAIN= 0
55. LEFT FORCE SCALING= 1
56. RIGHT FORCE SCALING= 1
57. BACK PRESS. CONTROL GAIN= 4
58. NOT USED
59. NOT USED
60. 6DS REPEAT TEST (0-NO, 1-YES)= 0
61. TABLE TEMP CONTROL GAIN= 35
62. TABLE REDUCER RATIO= 7.5
63. TABLE CURRENT OFFSET= .9
64. FILTER CONST.(0-UP/FAST-SLOW)= 1
65. BACKPRES UNITS(0-PSIA, 1-PSIG)= 0
66. LT BACKPRESS OFFSET= -.5
67. LT BACKPRESS SCALING= 1
68. RT BACKPRESS OFFSET= -.9
69. RT BACKPRESS SCALING= 1
70. COND FORCE LOOP GAIN= 3
71. COND FORCE DEAD WEIGHT (LBS)= 2.436
72. COND FORCE SCALE FACTOR= .8
73. COND FORCE 0-LBS, DIA (mm)-PSI= 0
74. NOT USED
75. PUMP 3 FLOW FACTOR= 0
76. NOT USED
77. NOT USED
78. NOT USED
79. NOT USED
80. AXIS 5 OFFSET TO SLOT 0= 3.08
81. AXIS 6 OFFSET TO SLOT 0= 3.1
82. AXIS 7 OFFSET TO SLOT 0= 3
83. AXIS 8 OFFSET TO SLOT 0= 2.93
84. CASSETTE SLOT SPACING= .25
85. LEFT LOAD RINSE, 0-DI, 1-CHEM= 0
86. RIGHT LOAD RINSE, 0-DI, 1-CHEM= 0
87. LEFT CLEAN RINSE, 0-DI, 1-CHEM= 0
88. RIGHT CLEAN RINSE, 0-DI, 1-CHEM= 0
89. CURTAIN RINSE, 0-DI, 1-CHEM= 0
90. CURTAIN RINSE (1-ENBL, 0-DSBL)= 0
91. CURTAIN RINSING TIME (SECONDS)= 0
92. FORCE 0-LBS, WAFER DIA(mm)-PSI= 0
93. TEMP UNITS (O-degC, 1-degF)= 0
94. SHOW COND FORCE (0-NO,1-YES)= 1
95. SHOW PUMP 3 (0-NO, 1-YES)= 1
96. SHOW pH (0-NO, 1-YES)= 1
97. TBL RNS W/CUR RNS (0-NO, 1-YES)= 0
98. NOT USED
99. NOT USED
100. SPINDLE FLUSH (0-NO, 1-YES)= 1
101. FOUNTAIN RINSE (0-NO,1-YES)= 1
102. ROBOT LEADSCREW VALUE= 8000
103. SEND 1 ROBOT POSITION= -35.88
104. SEND 2 ROBOT POSITION= -24.99
105. REC'V 1 ROBOT POSITION= -35.82
106. REC'V 2 ROBOT POSITION= -24.95
107. LEFT LOAD ROBOT POSITION= -9.7
108. RIGHT LOAD ROBOT POSITION= -.36
109. NOT USED
110. ROBOT ARMS POSITION SEND 1= -3000
111. ROBOT ARMS POSITION SEND 2= -3100
112. ROBOT ARMS POSITION REC'V 1= 2900
113. ROBOT ARMS POSITION REC'V 2= 2980
114. ROBOT ARMS POSITION LEFT LOAD= 3000
115. ROBOT TOP ARM POSITION RT LD= 4975
116. ROBOT Z TOP POSITION= .17
117. ROBOT Z MIDDLE POSITION= .255
118. ROBOT Z BOTTOM POSITION= .34
119. NOT USED
120. ROBOT BOTTOM ARM POS'N RT LD= -3000
121. NOT USED
122. NOT USED
123. NOT USED
124. PROG CONDITION (0-NO,1-YES)= 1
125. PROG COND PARK POSITION= -2500
126. PROG COND CENTER POSITION= 109000
127. PROG COND EDGE POSITION= 140000
128. PROG BRUSH REDUCER RATION= 15
129. NOT USED
130. ROBOT Z OVER LOAD POSITION= .24
131. ROBOT Z LEFT LOAD POSITION= .415
132. ROBOT Z RIGHT LOAD POSITION= .415
133. NOT USED
134. SWEEP START (0-EDGE, 1-CENTER)= 1
135. SWEEP STYLE (0-1 WAY, 1-2 WAY)= 0
136. IN SITU COND (0-DSBL, 1-ENBL)= 0
137. NOT USED
138. NOT USED
139. NOT USED
140. CONTROLLED SWEEP (0-NO, 1-YES)= 1
141. COND SCALAR= 0
142. COND PERIOD WIDTH= 0
143. COND HORIZONTAL SHIFT= 0
144. COND MINIMUM COMMAND= 0
145. COND VERTICAL OFFSET= 0
146. NOT USED
147. SEAT WAFERS @ UNLD (0-NO, 1-YES)= 0
148. VAC W/FOUNT RINSE (0-NO, 1-YES)= 0
149. WET IDLE TABLE SPEED= 10
150. AUTO WET IDLE (0-NO, 1-YES)= 1
151. WET IDLE TABLE ON (secs)= 30
152. WET IDLE TABLE OFF (secs)= 60
153. WET IDLE CARRIERS ON (secs)= 5
154. WET IDLE CARRIERS OFF (secs)= 60
155. CARRIER PAD RINSE TIME (secs)= 5
156. LOAD RINSE TIME (secs)= 5
157. FOUNTAIN RINSE TIME (secs)= 5
158. NOT USED
159. NOT USED
160. 2nd TABLE (0-NO, 1-YES)= 0
161. NOT USED
162. 2ND TABLE REDUCER RATIO= 0
163. NOT USED
164. SCRUBBER PRESENT (0-NO, 1-YES)= 0
165. USE SCRUBBER (0-NO, 1-YES)= 0
166. SCRUBBER LOAD POSITION= 0
167. SCRUBBER UNLOAD POSITION= 0
168. NOT USED
169. WAFER BLOWOFF TIME (secs)= 15
170. APPROX WAFR BLOWOFF (psi)= 35
171. MIN LIFT OFF VACUM (psia)= 8
172. WAFER PRESENT ERROR VAC (psia)= 8
173. APPROX FLUSH BLOWOUT PRES (psi)= 12.5
174. WAFER ABSENT ERROR VAC (psia)= 8.5
175. COOL WATER DETECT (GPM, 0-DSBL)= 0
176. TBL START W/SLRY (RPM, 0-DSBL)= 10
177. ROTATE RESTART (0-NO, 1-YES)= 1
178. LOAD RINSE (0-INTRVL, 1-STEADY)= 0
179. ELEV TANK FILL TIME (sec)= 0
180. DUNK SEND (1-EN,0-DIS) RESET= 0
181. FILTER ROUTINE Kf= 10
182. FILTER ROUTINE Kl= .1
183. SERVICE ALARM (0-DSBL, 1-ENBL)= 0
184. CASS RANDOM/MATCH (0,1) RESET= 0
185. IDLE DELAY MINUTES (5 MINIMUM)= 0
186. CONSERVE LOAD RNS (0-NO, 1-YES)= 0
187. AIR WAND 90-OFF, 1-POL, 2-COND)= 0
188. NOT USED
189. NOT USED
190. SECS BAUD RATE= 9600
191. SECS DEVICE ID= 1
192. SECS T1 TIMEOUT= 5
193. SECS T2 TIMEOUT= 5
194. SECS T3 TIMEOUT= 15
195. SECS T4 TIMEOUT= 15
196. SECS RETRY LIMIT= 3
197. SECS COMM PORT (1 OR 2)= 1
198. REPORT INTERVAL (SECONDS)= 10
199. REPORT MODE (1-ENBL, 0-DSBL)= 1
200. PASSWORD (4 DIGIT NUMBER)=
|
| 7.41 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:11 | 23 |
| ASDG::POIRIER 20 lines 26-FEB-1995 22:35
-< Rotory Joint Problems >-
--------------------------------------------------------------------------------
Problem: New Right Spindle Rotory Joint Is Wobbling Badly.
History: The new Joint is higher that the old one. This made it
necessary to fabricate new brackets to prevent the entire
assembly from rotating. DONE
The vacuum tube hole that is drilled through the hub mount
is off center. This is causing the tube to RUN OUT and the
Rotory Joint, which is 28" higher, to wobble. The old joint
was a much different design and didn't seem to be affected
by this condition. Therefore, I'm recommending that we re-
install the old joint until we can work out the problems
with the new one. I've asked Brian to get started on 3rd
shift tonight.
John.
|
| 7.42 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:12 | 29 |
| SUBPAC::LANDRY 26 lines 28-FEB-1995 16:49
-< load cells checked >-
--------------------------------------------------------------------------------
Today..........
Eric and I went over a couple of items concerning the spindles:
* We checked the spindle dead idle weight. By this we mean that
the locking pin was removed from the spindle assembly where it
mates with the air cylinder, hence at an idle state. Using the
diagnostics screen, the reading for the spindles should be at
2048 +/- 5. The right spindle was fine. The left spindle was
at 2060. So, we adjusted the load cell "zero" potentiometer to
read 2048.
* We then checked the display monitor for the force readings.
They still were not matching. We tried swapping the load cells
for the spindles to see if the readings went with the load cells
but they didn't. This tells us the load cells are fine.
* Since one load cell was tweeked, we then performed down force
calibration. As expected, the left spindle reading was out (due
to it being tweeked) and the right spindle was fine (due to no
load cell tweeking).
* The system will now cycle wafers to see if there is any improve-
ment or degregation.
Doc / Eric
|
| 7.43 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:12 | 19 |
| ASDG::POIRIER 16 lines 1-MAR-1995 00:17
-< "Spindles not Lifting" problem >-
--------------------------------------------------------------------------------
* Checked the eccentric cam adjustment on both spindles. Both
adjustments were correct. (checking for excessive friction)
* Checked the span adjustment on the Fairchild E-P regulators.
* I spoke with Strasbaugh field service about the (surface tension/
spindles not lifting) problem. They suggested that we make sure the
vacuum is off until the end of step #3 in the auto polish cycle.
They also suggested we check the spindle lever arm linkage for
excess friction and make sure the spindle air cylnder needle valves
are open.
John.
|
| 7.44 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:13 | 27 |
| ASDG::POIRIER 24 lines 3-MAR-1995 23:56
-< Spindle lift-off problem solved >-
--------------------------------------------------------------------------------
* PROBLEM: Spindles not lifting carriers off polishing table.
ROOT CAUSE: Conditioning disk was worn out. It appears that the pad
was not being completely conditioned. This caused excess
surface tension at the wafer/pad interface and prevented
the spindles from lifting up.
SOLUTION: Eric Bodensieck replaced the conditioning disk with a
new one. We left the old pad on the table, conditioned
it with the new disk and ran 25 monitor wafers. There
were no fly-outs or lifting problems during the run.
* All pivot points on both spindle assemblies were
lubricated.
John & Bob.
|
| 7.45 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:12 | 26 |
| ASDG::POIRIER 23 lines 7-MAR-1995 18:01
-< Back Pressure E-P Regulator/Conditioner Air Cylinder >-
--------------------------------------------------------------------------------
* The Spindle Down Force E-P Regulator Calibration was performed today.
* The Back Pressure Calibration procedure was also completed today.
It was discovered during the calibration procedure that the Right
Spindle E-P Back Pressure Regulator was not repeating. Strasbaugh
was called and agreed to a warranty replacement. They shipped a
replacement today via UPS Red. We should have it tomorrow.
* Conditoner: The conditioning disk was not completely retracting into
the Park Station Resivoir. This is the same problem that
led to the Ball Spline Assembly repacement 2 months ago.
The Ball Spline Assembly checked out O.K. The conditioner
down force(air cylinder) turned out to be the cause this
time. Strasbaugh was called and agreed to a warranty
replacement. The shipped it today along with the
regulator.
John, Tim & Jim.
|
| 7.46 | SPINDLE REGULATOR INSTALLED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:13 | 31 |
| SUBPAC::LANDRY 28 lines 8-MAR-1995 17:53
-< A busy afternoon! New parts installed. >-
--------------------------------------------------------------------------------
Todays activities.............
* The new regulator for the right spindle back pressure arrived late
this afternoon. It has been installed. Tomorrow morning we will
calibrate it per the new procedure being tested. Please leave it
as it is.
* The new air cylinder for the conditioning arm's verticle disk move-
ment arrived late today as well. It was installed and tested for
proper movement. All is working fine. This will also be calibrated
in the morning per the new procedure just developed. Please leave
it as it is.
* The system had many problems with the computer today. The problems
centered around system re-powerup. Kept getting the infamous "bad
command" right after the initial setup checks. Took several retries
each time re-powering. Computer connections / board connections
may possibly be the culprit. Tried repositioning the cables in the
back of the computer and booted up fine the first time. Future work
may be necessary to improve connection situation.
* The top slurry pump hose has a minor leak at this time. The hose
itself may need replacing. If the time permits tonight, feel free
to acquire the proper hosing and replace. Be a good idea to change
out the bottom pumps hose as well.
JP / Jim / Bobby / Doc
|
| 7.47 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:13 | 18 |
| ASDG::POIRIER 15 lines 14-MAR-1995 20:29
-< Left Load Station / Load ring out of tolerance. >-
--------------------------------------------------------------------------------
* The load stations were realigned on 1st shift today because of the
misloading errors we've been experiencing lately.
Jim Tooker identified a problem with the Load Ring in the Left Load
Station. The I.D. of the Left Load Ring is .005" less than the Right
Load Ring. This is causing a .001" interference fit between the Ring
and the Carrier. The result of this condition is consistantly mis-
loaded wafers on the Left Load Station. Strasbaugh was contacted and
has agreed to ship us a new Load Ring for the Left Load Station via
UPS RED. We expect it to arrive tomorrow afternoon.
John, Jim, Doc & Roger.
|
| 7.48 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:13 | 33 |
| ASDG::POIRIER 30 lines 15-MAR-1995 20:33
-< Load Ring replacement/Conditioner Disk Assembly >-
--------------------------------------------------------------------------------
* Left Load Station:
The (Load Ring) on the Left Load Station was replaced on first shift
today. The Station was realigned after the ring was replaced and a 50
wafer test run was completed. 1 load failure was observed during the
50 wafer run. We'll repeat the alignment procedure tomorrow and look
for improvement.
* Conditioner Head Assembly:
The conditioner was partially disassembled due to the reoccuring
problem with the "disk not completely retracting into the park
station resevoir." The Ball Spline Assembly in the Conditioning
Head was replaced a few months ago because of this problem. We
knew the Ball Spline was defective because the ball bearings were
falling out of it's linear bearings. Last week the Conditioner Air
Cylinder was replaced because it's seals were swelled and it had
excessive friction. Now the 2 lb disk retracts only 50% of the time.
Since the system is now free of excessive friction, we're of the
opinion that the ball bearing in the ball spline don't move freely
on every cycle. When they do, the disk retracts and when they don't,
the disk retracts only partially. We called Strasbaugh and they
suggest we bias the air pressure on the Conditioner E-P reguator
by 1 or 2 p.s.i. to ensure that the disk retracts.
John, Doc, Jim & Roger.
|
| 7.49 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:13 | 14 |
| PATE::GEE 11 lines 22-MAR-1995 23:48
-< Conditioning arm >-
--------------------------------------------------------------------------------
* When the conditioning arm homed, the pad conditioner was resting
on the side of the clean station bowl.
- Repositioned the conditioned arm home position Reed
switch 1/16" to the right.
- Ran some homing tests and the pad conditioning program.
Back up for production.
Bob
|
| 7.50 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:14 | 11 |
| SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 8 lines 3-APR-1995 08:02
-< roller replaced >-
--------------------------------------------------------------------------------
Replaced the new style rollers with the old style. The
new style caused the retaining ring to scrape up everywhere.
the worse ring is on public display in the chase for your veiwing
pleasure. John will be contacting Strasbaugh regarding this
problem. Longer shoulder screws would be the best solution...
BJ
|
| 7.51 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:13 | 17 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 14 lines 4-APR-1995 06:27
-< roller problems, actuator being replaced >-
--------------------------------------------------------------------------------
Problems with the rollers were focused on the flow controllers
for the load chucks. The load chucks were moving to fast and hitting
the end of travel. Using solenoid #4 and #6, they were turned down.
The Load Station Air Cylinders didn't seem to go down to hard or fast.
In fact, they they came down rather soft so I didn't adjust them at
all. The value for #38, SOFT DOWN was changed to 1100 lbs.
Jim had also wanted me to swap out the conditioner arm
actuator with a new style that was in his office. Still
working on it...
BJ
|
| 7.52 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:14 | 51 |
| ASDG::POIRIER 48 lines 4-APR-1995 19:53
-< Load Chuck/Soft Down/Hard Down adjustments >-
--------------------------------------------------------------------------------
* Conditioner Assembly Actuator replacement:
Brian Jubinville replaced the actuator on 3rd shift last night. He
asked me to double check the edge, center & park positions. They
all checked-out fine.
* Load Chuck adjustments:
I tweaked the Load Chuck "travel speed" and "supply pressure"
this morning per Strasbaughs instructions. The jarring motion in
the Spindles is now gone. It appears that the supply pressure was
indeed too high as Strasbaugh suspected. This excess pressure was
over-powering the Spindles during the load sequence.
Spindles "down soft" & "down hard" calibration variables:
I reduced the down soft value to 1000 and the hard down to 1200.
The carriers no longer put excessive force on the Cleaning Station
Rollers during the cleaning sequence or during the Wet Idle mode.
FYI: Annie has placed an order for replacement rollers and has added
them to the Fab 6 stockroom BOM for the Strasbaughs.
* Load Rings:
Annnie has placed an order with Strasbaugh for 2 additional Load
Rings. This will allow us to cycle them out for replating 2 at a
time.
* Conditioning Disk:
It appeared that the carriers were experiencing the same excessive
suction condition that was discovered during the last rash of
wafer breakage. This was detected by visual and audible observation
by Bob Gee and myself. Bob and I replaced the conditioning disk as a
precaution. It has been 32 days since the last disk replacement. We
will enter this info in the EST notes file for tracking purposes.
John & Bob.
|
| 7.53 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:14 | 24 |
| SUBPAC::LANDRY 21 lines 13-APR-1995 19:18
-< Slurry issues of the day >-
--------------------------------------------------------------------------------
The system experienced a couple of issues today..........
* The slurry loop kept kicking off every time ANY VMB box was touched.
Ashland Chemical attributed this to the frozen ball valve in the
last slurry box. They came up an installed a new one.
* Next, we experienced problems with slurry getting past the pumps and
eventually dripping onto the pad. This was attributed to the new
ball valve installed an hour earlier. We were having a hard time
maintaining a steady pressure. As the pressure rose, the leak would
increase. It took awhile, but we got it under control.
* Due to the pressure change, the slurry pumps were calibrated. They
were way off as expected....but much more than expected. We
therefore checked out the in-line filters. You could see through
them that they were "jell-in up". Changed them out and reran the
calibration. Made the adjustment and turned the system back over
to manufacturing. (Kudo's to Earl for his help in the matter).
Doc / JP
|
| 7.54 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:15 | 12 |
| ASDG::POIRIER 9 lines 17-APR-1995 23:37
-< DC Servo Module for Axis #4 Replaced. >-
--------------------------------------------------------------------------------
* Replaced the DC Servo Module for Axis #4 on the DCX Motion Control
Board. This was the Module that the rep brought on Friday. We
couldn't get access to the tool on Friday do to the amount of
work in the area. We're not planning to run a verification test
on A2 since the results of the 500 wafer run on A1 were good.
(The DC Servo Module was replaced on A1 early last week.)
John.
|
| 7.55 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:14 | 21 |
| ASDG::POIRIER 18 lines 24-APR-1995 21:23
-< Send Elevator problems/Cleaning Station rollers >-
--------------------------------------------------------------------------------
* The "Right Send" elevator is experiencing problems transfering
wafers to the robot. It appears that the Z-height is incorrect
even after the axis is rehomed. Because this repair will require
removal of the Elevator assembly (a time consuming task), we
decided to put the system back UP with a WARNING on the Elevator.
This allowed Manufacturing to perform MQC's and prepare the system
to run product tonight. The system can still function using the
Left Send Elevator. Please do not use the Right Send Elevator until
futher notice.
* New rollers have been installed on both Cleaning Stations. These
rollers spin on the shoulder screws unlike the old ones that were
dragging. We expect the new rollers to remain functional as long
as the SPINDLES SOFT DOWN VALUE calibration variable remains under 1200.
John.
|
| 7.56 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:15 | 50 |
| ASDG::POIRIER 47 lines 25-APR-1995 19:56
-< Particle problem activities >-
--------------------------------------------------------------------------------
* Particle problem activity:
The system was experiencing particles in the 20,000 range this
morning. A thorough cleaning was performed and MQC run. The
particles came down somewhat but were still over 10,000. A
second cleaning was performed and a "pad break-in" run was
completed. Another particle check indicated particles still
in the 10,000 range.
The following plan of action was taken this afternoon:
1) Clean oxide monitors (<50 particles) were used. They were
premeasured and run thru scrubber A2 and remeasured on the
surfscan. They came within spec (<50 adders). CLEAN SCRUBBER
2) The system was cleaned once again with extra attention paid to
polishing pad. The pad was thoroughly rinsed with D.I. water
for 15 min using the spray gun.
3) Eight wafers were run thru CMP.A2. Four were run thru the Load
Station & Cleaning Station with NO touch down on the pad. The
remaining four wafers ran thru the same process AND a 10 sec
touch down on the polishing pad.
4) The four wafers that touched down on the pad averaged 650 adders.
The spec is (<800).
The four wafers that did NOT touch down on the pad averaged 175
adders.
CONCLUSION: It appears that the thorough cleaning of the pad made
a significant difference in the amout of particles added.
Also, there is a big difference in the amount of
particles added between the wafers that touched down
on the pad and the wafers that didn't.
This may be due to the fact that we're presently
adapting Speedfam pads to run on the Strasbaughs.
For example, cutting off the outer 2" of the pad
& plugging the center hole. (exposed fibers &
exposed PSA adhesive). Just a theory, no data to verify.
John, Jim S. & Jesus.
|
| 7.57 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:14 | 8 |
| PATE::GEE 5 lines 28-APR-1995 21:13
-< Right send elevator would not home >-
--------------------------------------------------------------------------------
The Right send elevator wouldn't home, it would go up looking for
home instead of down. Powered down the system and re-homed, it's
working good now. I removed the Warning in RTC.
Bob
|
| 7.58 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:15 | 16 |
| FABSIX::R_POIRIER 13 lines 1-MAY-1995 23:46
-< Spindle problem >-
--------------------------------------------------------------------------------
Had a problem with Left Spindle. Error message
said Left Spindle Vacuum not found. Unloaded left
carrier and cleaned O-rings and carrier. Problem
still the same. Swapped left and right carriers
and problem went away. Put carriers back on the
original spindles and both carriers worked fine.
Jesus Roa running MQC's on CMP.A2
2nd Shift
|
| 7.59 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:15 | 10 |
| PATE::GEE 7 lines 16-MAY-1995 23:58
-< Robot Travel Problems >-
--------------------------------------------------------------------------------
Problem: Robot would not arrive at left send position.
Fix: Removed and re-aligned the bellows. Cleaned and lubricated
the rails, lead screw and robot bearings. Re-aligned the
slide rails. We removed the Warning from RTC.
2nd Shift
|
| 7.60 | ROBOT TRAVEL PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:16 | 12 |
| SUBPAC::LANDRY 9 lines 17-MAY-1995 18:58
-< wired!!! >-
--------------------------------------------------------------------------------
This morning...........
The robot Z movement was not completing it's full travel. The movement
was also very jerky. Took the front cover of robot assembly off.
Found some wires/connectors in a stressed situation. Relievd the
stress and tested results. All was working fine. I tried to place the
wires/connectors in a place that would be more user friendly.
Doc
|
| 7.61 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:16 | 214 |
| PATE::GEE 211 lines 17-MAY-1995 23:53
-< Updated Cal. Variables >-
--------------------------------------------------------------------------------
CALIBRATION VARIABLES
Change : #103 before -35.88 after -35.85
----------------------------------------
1. BRIDGE HOME POS.= -33.86
2. BRIDGE LOAD POS.= -33.53
3. BRIDGE POLISH POS.= 0
4. BRIDGE MIDDLE POS.= -11
5. TEMP IN SCALE FACTOR= 1
6. TEMP OUT SCALE= 1
7. TEMP IN OFFSET= -.8
8. TEMP OUT OFFSET= 1.5
9. BRUSH SPEED SCALE FACTOR= .719
10. SLURRY 1 FLOW FACTOR= 1.08
11. SLURRY 2 FLOW FACTOR= 1.29
12. TABLE SHUNT LOE TEMP= 0
13. TABLE SHUNT HIGH TEMP= 0
14. BRIDGE LEFT CURTAIN POS.= -12
15. BRIDGE RIGHT CURTAIN POS.= -25
16. NOT USED
17. NOT USED
18. NOT USED
19. NOT USED
20. SLURRY 2 FLOW FACTOR= .96
21. NOT USED
22. NOT USED
23. NOT USED
24. NOT USED
25. NOT USED
26. NOT USED
27. NOT USED
28. NOT USED
29. NOT USED
30. LEFT PRESS. OUTPUT FACTOR= 6.1
31. LEFT PRESS. OUTPUT OFFSET= 975
32. LEFT PRESS. MIM.= 800
33. LEFT FORCE SCALE FACTOR= .94
34. LEFT SPINDLE DEAD WEIGHT= 144.79
35. LEFT SPINDLE REDUCE RATIO= 10
36. LEFT SPINDLE CURRENT OFFSET= 0
37. LEFT PRESSURE MINIMUM, TBL2= 0
38. SPINDLES DOWN SOFT VALUE= 1200
39. SPINDLES DOWN HARD VALUE= 1100
40. RIGHT PRESS. OUTPUT FACTOR= 6.1
41. RIGHT PRESS. OUTPUT OFFSET= 975
42. RIGHT PRESS. MIM.= 800
43. RIGHT FORCE SCALE FACTOR= .946
44. RIGHT SPINDLE DEAD WEIGHT= 142.46
45. RIGHT SPINDLE REDUCE RATIO= 10
46. RIGHT SPINDLE CURRENT OFFSET= .1
47. RIGHT PRESSURE MINIMUM= 0
48. SPINDLES DOWN EXTRA SOFT VALUE= 0
49. NOT USED
50. PRESS. CONTROL LOOP GAIN= .75
51. MAX. PRESSURE STEP DIVISOR= 30
52. FORCE LOOP DERIVATIVE GAIN= 56
53. FORCE LOOP NEG DER GAIN= 0
54. DOWN FORCE INTEGRAL GAIN= 0
55. LEFT FORCE SCALING= 1
56. RIGHT FORCE SCALING= 1
57. BACK PRESS. CONTROL GAIN= 4
58. NOT USED
59. NOT USED
60. 6DS REPEAT TEST (0-NO, 1-YES)= 0
61. TABLE TEMP CONTROL GAIN= 35
62. TABLE REDUCER RATIO= 7.5
63. TABLE CURRENT OFFSET= .9
64. FILTER CONST.(0-UP/FAST-SLOW)= 1
65. BACKPRES UNITS(0-PSIA, 1-PSIG)= 0
66. LT BACKPRESS OFFSET= -.5
67. LT BACKPRESS SCALING= 1
68. RT BACKPRESS OFFSET= -.9
69. RT BACKPRESS SCALING= 1
70. COND FORCE LOOP GAIN= 3
71. COND FORCE DEAD WEIGHT (LBS)= 2.436
72. COND FORCE SCALE FACTOR= .8
73. COND FORCE 0-LBS, DIA (mm)-PSI= 0
74. NOT USED
75. PUMP 3 FLOW FACTOR= 0
76. NOT USED
77. NOT USED
78. NOT USED
79. NOT USED
80. AXIS 5 OFFSET TO SLOT 0= 3.08
81. AXIS 6 OFFSET TO SLOT 0= 3.1
82. AXIS 7 OFFSET TO SLOT 0= 3
83. AXIS 8 OFFSET TO SLOT 0= 2.93
84. CASSETTE SLOT SPACING= .25
85. LEFT LOAD RINSE, 0-DI, 1-CHEM= 0
86. RIGHT LOAD RINSE, 0-DI, 1-CHEM= 0
87. LEFT CLEAN RINSE, 0-DI, 1-CHEM= 0
88. RIGHT CLEAN RINSE, 0-DI, 1-CHEM= 0
89. CURTAIN RINSE, 0-DI, 1-CHEM= 0
90. CURTAIN RINSE (1-ENBL, 0-DSBL)= 0
91. CURTAIN RINSING TIME (SECONDS)= 0
92. FORCE 0-LBS, WAFER DIA(mm)-PSI= 0
93. TEMP UNITS (O-degC, 1-degF)= 0
94. SHOW COND FORCE (0-NO,1-YES)= 1
95. SHOW PUMP 3 (0-NO, 1-YES)= 1
96. SHOW pH (0-NO, 1-YES)= 1
97. TBL RNS W/CUR RNS (0-NO, 1-YES)= 0
98. NOT USED
99. NOT USED
100. SPINDLE FLUSH (0-NO, 1-YES)= 1
101. FOUNTAIN RINSE (0-NO,1-YES)= 1
102. ROBOT LEADSCREW VALUE= 8000
103. SEND 1 ROBOT POSITION= -35.85
104. SEND 2 ROBOT POSITION= -24.99
105. REC'V 1 ROBOT POSITION= -35.82
106. REC'V 2 ROBOT POSITION= -24.95
107. LEFT LOAD ROBOT POSITION= -9.7
108. RIGHT LOAD ROBOT POSITION= -.36
109. NOT USED
110. ROBOT ARMS POSITION SEND 1= -3000
111. ROBOT ARMS POSITION SEND 2= -3100
112. ROBOT ARMS POSITION REC'V 1= 2900
113. ROBOT ARMS POSITION REC'V 2= 2980
114. ROBOT ARMS POSITION LEFT LOAD= 3000
115. ROBOT TOP ARM POSITION RT LD= 4975
116. ROBOT Z TOP POSITION= .17
117. ROBOT Z MIDDLE POSITION= .255
118. ROBOT Z BOTTOM POSITION= .34
119. NOT USED
120. ROBOT BOTTOM ARM POS'N RT LD= -3000
121. NOT USED
122. NOT USED
123. NOT USED
124. PROG CONDITION (0-NO,1-YES)= 1
125. PROG COND PARK POSITION= -2500
126. PROG COND CENTER POSITION= 109000
127. PROG COND EDGE POSITION= 140000
128. PROG BRUSH REDUCER RATION= 15
129. NOT USED
130. ROBOT Z OVER LOAD POSITION= .24
131. ROBOT Z LEFT LOAD POSITION= .415
132. ROBOT Z RIGHT LOAD POSITION= .415
133. NOT USED
134. SWEEP START (0-EDGE, 1-CENTER)= 1
135. SWEEP STYLE (0-1 WAY, 1-2 WAY)= 0
136. IN SITU COND (0-DSBL, 1-ENBL)= 0
137. NOT USED
138. NOT USED
139. NOT USED
140. CONTROLLED SWEEP (0-NO, 1-YES)= 1
141. COND SCALAR= 0
142. COND PERIOD WIDTH= 0
143. COND HORIZONTAL SHIFT= 0
144. COND MINIMUM COMMAND= 0
145. COND VERTICAL OFFSET= 0
146. NOT USED
147. SEAT WAFERS @ UNLD (0-NO, 1-YES)= 0
148. VAC W/FOUNT RINSE (0-NO, 1-YES)= 0
149. WET IDLE TABLE SPEED= 10
150. AUTO WET IDLE (0-NO, 1-YES)= 1
151. WET IDLE TABLE ON (secs)= 30
152. WET IDLE TABLE OFF (secs)= 60
153. WET IDLE CARRIERS ON (secs)= 5
154. WET IDLE CARRIERS OFF (secs)= 60
155. CARRIER PAD RINSE TIME (secs)= 5
156. LOAD RINSE TIME (secs)= 5
157. FOUNTAIN RINSE TIME (secs)= 5
158. NOT USED
159. NOT USED
160. 2nd TABLE (0-NO, 1-YES)= 0
161. NOT USED
162. 2ND TABLE REDUCER RATIO= 0
163. NOT USED
164. SCRUBBER PRESENT (0-NO, 1-YES)= 0
165. USE SCRUBBER (0-NO, 1-YES)= 0
166. SCRUBBER LOAD POSITION= 0
167. SCRUBBER UNLOAD POSITION= 0
168. NOT USED
169. WAFER BLOWOFF TIME (secs)= 15
170. APPROX WAFR BLOWOFF (psi)= 35
171. MIN LIFT OFF VACUM (psia)= 8
172. WAFER PRESENT ERROR VAC (psia)= 8
173. APPROX FLUSH BLOWOUT PRES (psi)= 12.5
174. WAFER ABSENT ERROR VAC (psia)= 8.5
175. COOL WATER DETECT (GPM, 0-DSBL)= 0
176. TBL START W/SLRY (RPM, 0-DSBL)= 10
177. ROTATE RESTART (0-NO, 1-YES)= 1
178. LOAD RINSE (0-INTRVL, 1-STEADY)= 0
179. ELEV TANK FILL TIME (sec)= 0
180. DUNK SEND (1-EN,0-DIS) RESET= 0
181. FILTER ROUTINE Kf= 10
182. FILTER ROUTINE Kl= .1
183. SERVICE ALARM (0-DSBL, 1-ENBL)= 0
184. CASS RANDOM/MATCH (0,1) RESET= 0
185. IDLE DELAY MINUTES (5 MINIMUM)= 0
186. CONSERVE LOAD RNS (0-NO, 1-YES)= 0
187. AIR WAND 90-OFF, 1-POL, 2-COND)= 0
188. NOT USED
189. NOT USED
190. SECS BAUD RATE= 9600
191. SECS DEVICE ID= 1
192. SECS T1 TIMEOUT= 5
193. SECS T2 TIMEOUT= 5
194. SECS T3 TIMEOUT= 15
195. SECS T4 TIMEOUT= 15
196. SECS RETRY LIMIT= 3
197. SECS COMM PORT (1 OR 2)= 1
198. REPORT INTERVAL (SECONDS)= 10
199. REPORT MODE (1-ENBL, 0-DSBL)= 1
200. PASSWORD (4 DIGIT NUMBER)=
|
| 7.62 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:16 | 20 |
| ASDG::POIRIER 17 lines 18-MAY-1995 19:27
-< Air motors / D.I. gauge replacement / D.I. leak >-
--------------------------------------------------------------------------------
* Air Motors:
Two replacement Air Motors arrived for the Cleaning Stations.
The system was not available today due to production needs.
2nd shift will replace them if the tool becomes available.
* D.I. pressure gauge:
The gauge was not replaced today for the same reason as above.
Also, a small D.I. leak was noticed just below gauge diaphram.
John.
|
| 7.63 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:16 | 22 |
| FABSIX::R_POIRIER 19 lines 22-MAY-1995 23:58
-< Wafer break/Brush motors >-
--------------------------------------------------------------------------------
There was a wafer break on 1st shift today. We rebuilt
two carriers, replaced the pad with a Speedfam pad,
and cleaned the tool. We have started wafer break-in.
MQC's will have to be run after pad break-in. Per a
request from 1st shift we also checked out both the
left and right send elevators while running break-in
wafers. Both seem to be working fine.
We also replaced the Cleaning brush motors.
We replaced the DI water pressure gauge but the problem
does not appear to be the gauge. Bob suspects the problem
is with the gauge guard. A new gauge guard will have to
be ordered from Facilities.
2nd Shift
|
| 7.64 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:17 | 151 |
| PATE::GEE 37 lines 26-MAY-1995 05:00
-< Robot >-
--------------------------------------------------------------------------------
Problem: Robot bottom arm not moving to home.
Action: Checked the the top and bottom arm home sencors
in diagnostics and they looked good Input 41 and 42.
* Removed the robot and repaired many water damaged wires.
Reinstalled the robot and tried to home. We found that
everything would home but, when going to pickup a wafer
the top arm would not move into the cassette.
* Checked all connections again and found a pin socket pushed
out. Tried to rehome and found that the bottom arm would
not move at all
* After checking every connection again we decided to
replace the bottom arm encoder. Reinstalled the robot and
found the bottom arm still would not move. Swapped the
top and bottom arm encoders everything moved, so we put
them back into there proper positions and reinstalled the
robot.
-----> The Robot condition now is:
It's in the system again the top arm homes, the up/down travel
homes, but the bottom arm shots out to the right then the left
and will not home. I suspect that the connector for the bottom
arm was damaged on the last move.
Note; We need to replace all these wire connectors with
water resistant and stronger connectors as soon as
possible if we expect the robot to run. I like the
machine, but these connectors are not made to be
submerged in water or even handled.
Second Shift
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.226 CMP.A2 226 of 296
SUBPAC::LANDRY 20 lines 26-MAY-1995 18:07
-< Wires/connectors and skeet shooting!!! >-
--------------------------------------------------------------------------------
This must be National Robot Week!
* The robot bottom arm isn't homing properly. It's doing the skeet
shooting thing. I didn't spend alot of time on this system as I
felt the other two polishers would be an easier time of repairing.
Only God knows the real truth to that as B1 got partial success and
A1 has continual failure.
John Barbarito was kind enough to come in and give it a run for it's
money though. He did find a couple of problems. Yup, one was at-
tributed to a broken wire on a connector and another suspected cul-
prit was a couple of cold solder joints. After repairing both of
the items, we tried it out. No luck! The arm was still "skeetin'".
John checked out all the connectors/pins and all seemed ok. This is
where we stand. Thanks to John for his gallant effort in attacking
the robot problems.
Doc
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.228 CMP.A2 228 of 296
ASDG::POIRIER 17 lines 30-MAY-1995 20:48
-< Robot RS-232 Connector Problems >-
--------------------------------------------------------------------------------
Robot RS-232 Connector Problems:
Although the current Plan Of Action is to upgrade the Robot connectors
to a watertight/mil-spec type tomorrow, some new RS-232 connectors and
pins were located tonight. 2nd shift is planning to replace the conn-
ectors tonight and resume verifiying the cause of the Homing problems
with the Robot Bottom Arm.
Note: Please use extra caution when handling the connector that con-
tains the pnuematic sensor wires. The output transistor in this
sensor will blow if the (white) output wire contacts the 24v
(red) input wire.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.229 CMP.A2 229 of 296
ASDG::POIRIER 10 lines 31-MAY-1995 21:23
-< Robot Connector Problem update >-
--------------------------------------------------------------------------------
Robot Connector Problem:
The new connectors arrived this morning and were installed on both
the Robot and the machine harness. 2nd shift will be re-installing
the Robot and testing the system for functionality. If the tool
performs normally, a verification test run will be started and
will continue into 3rd shift.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.230 CMP.A2 230 of 296
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 16 lines 1-JUN-1995 10:01
-< Robot cables replaced and now working >-
--------------------------------------------------------------------------------
Came in to help Roger get the robot in. The upper and
lower arms on the robot were instant discus throwers. We
pulled the robot back off and traced the problem to the
encoders and the need to have their respectiove leads swapped.
The lower arm was now fixed. The orignal problem from last
week was the lower encoder which was now appearing on upper
robot.... thus... the encoder was bad. The encoder was swapped
out and now it worked fine except... the home sensor wasn't working.
That was traced to being a broken shield wire. The sensor was
replaced and now everything works. John and the Rep are re-routing
some cable for more slack for the installation of the covers.
After that, break-in wafers look like they will be run shortly.
BJ
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.231 CMP.A2 231 of 296
ASDG::POIRIER 8 lines 1-JUN-1995 20:06
-< Connector Problem Update >-
--------------------------------------------------------------------------------
* Robot Update:
The connectors on the machine cables and Robot wires were completed
last night on 3rd shift. The machine passed the verify test this
afternoon and is now running MQC's.
John.
|
| 7.65 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:16 | 11 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 3-JUN-1995 05:55
-< Bridge stopped during process >-
--------------------------------------------------------------------------------
During a run both spindles had wafers on them leaving the LOAD
table but the bridge stopped half way to the polish table. The
bridge would not move so it had to be re-homed. The only thing
that makes sense is that the back pressure must of gotten just
out of spec during travel. This is the first time we've seen this
happen.
BJ
|
| 7.66 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:17 | 54 |
| ASDG::POIRIER 51 lines 13-JUN-1995 20:30
-< Cable Carrier Track/Slurry Pump Tubing >-
--------------------------------------------------------------------------------
* Robot Z-Axis Bellows:
The Bellows detached itself from the Robot Base this morning.
The screws evidently backed out and fell off. Replacement
10 - 32 X 3/4" SS Socket Head screws were used. The old ones
were slotted round heads 1/2" long. (A real pain to work with).
* Lead Screw/Rail Assembly:
The Robot X-Axis (Lead Screw/Guide Rail Assembly) was cleaned and
lubricated while the bellows were off. The motion is greatly
improved.
* Cable Carrier Track:
The bottom link of the Cable Carrier Track broke-off this morning.
This caused the entire track to float around unsecured. A temp-
orary fix was initiated using 3 tie wraps. It has held-up fine
thus far, please keep a close watch on it for the next 2 shifts.
The replacement Cable Carrier Mounts (END LINKS) have been order-
ed from Strasbaugh and added to the Fab6 Stockroom BOM. Also, Cable
Carrier Links, (REGULAR LINK AND COVER) have been ordered and
stocked. The order is being FEDEX'ed PRIORITY #1 and will arrive
tomorrow morning at 9:00 a.m.
* Slurry Pump #1 Tubing:
The Tygon Tubing on Slurry Pump #1 blew-off around 11:00 this
morning. The tubing was replaced and the flow recalibrated.
NOTE: Don't use the tubing in the top draw of the Vidmar cabinet
for the Slurry pumps. It has the wrong wall thickness and will not
work in the Peristalic pumps. (I found out the hard way)
The correct size is 3/16" I.D. X 7/16" O.D. X 1/8" Wall
I placed a req for this tubing today. In the mean time, there
is a small quantity of this tubing in the draw under the Stainless
sink.
John.
|
| 7.67 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:17 | 30 |
| ASDG::POIRIER 27 lines 20-JUN-1995 19:29
-< Cabel Carrier Track Replaced/Annual P.M. Begun >-
--------------------------------------------------------------------------------
* Cable Carrier Track:
The Cable Carrier Track was replaced and the slack in the cables
was adjusted. A little extra slack was allowed inside the Robot
base to ensure easy removal of the connectors. At the other end
of the track, the cable bundle was fastened to the rear deck
with a tie wrap to prevent any contact with the Shuttle. This
routing is identical to the way the cables were routed at the
factory.
* Annual P.M.:
The Annual P.M. was started this afternoon. Roger has removed the
pad, rinsed-out the Carriers and placed them in a tray to keep the
films wet. These Carriers have had only 135 wafers polished on them.
Lets try to reuse them. Please change the water a few times per shift.
John.
|
| 7.68 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:17 | 11 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 8-JUL-1995 07:55
-< noise from within >-
--------------------------------------------------------------------------------
A loud metal noise was being heard when the shuttle was moving.
It ended up being the metal strip that secures the rubber skirt
on the shuttle access door making contact with the door lock.
There was several nuts missing thoughout the door area. All
have been replaced and secured.
BJ
|
| 7.69 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:17 | 11 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 15-JUL-1995 06:14
-< Bridge stopped during travel >-
--------------------------------------------------------------------------------
The bridge was on the way to the polish table to begin
polishing when it stopped half way. After it was homed,
it moved fine. It is suspected that one of the carriers
lost its back pressure for a second and caused the bridge
to halt.
BJ
|
| 7.70 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:18 | 6 |
| PATE::GEE 3 lines 17-JUL-1995 07:44
-< Robot to left send position. >-
--------------------------------------------------------------------------------
Had problems with the robot traveling to the left send position
a few times tonight. Cleaned and lubricated the slide rails and
lead screw, also cleaned the front and rear robot bearings.
|
| 7.71 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:18 | 8 |
| PATE::GEE 5 lines 25-JUL-1995 08:55
-< Water flow >-
--------------------------------------------------------------------------------
Both carriers were sticking to the table after the polish cycle
was completed. Rich swapped the conditioner disk from cmp.a1, but
they still were sticking. I checked the water flow during step 3
and found it set at 4 gpm. Checked cmp.a1 and found that system
set at 10 gpm. Adjusted cmp.a2 to 10 gpm and the problem went away.
|
| 7.72 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:19 | 20 |
| PATE::GEE 17 lines 26-JUL-1995 08:52
-< Bridge / Robot travel >-
--------------------------------------------------------------------------------
c
* The Bridge wouldn't move from the polish table.The error
was "Bridge not arriving at load". We couldn't find anything
wrong, vacuum was in the fours. Tried to move it manually, it
would not move. Checked the lubrication on the rails and lead
screw both looked good, oil level was good also. Powered down
the system, moved the bridge manually with no problem, very
smooth. Powered up the system, homed the bridge, ran it back
and forth, it looked smooth and sounded good. Ran the rest of
the night with no problems. Need to contact the field rep.
for a possible cause.
* Robot travel problems, the robot wouldn't make it to the left
receive position. Cleaned and lubricated rails, lead screw
and robot bearings.
|
| 7.73 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:18 | 18 |
| SUBPAC::LANDRY 15 lines 3-AUG-1995 10:28
-< conditioner air cylinder >-
--------------------------------------------------------------------------------
A day late, but non_the_less data to enter..........
Yesterday, the conditioning arm had a problem where the air cylinder
would not raise the diamond disk from the dish. The cylinder was
definetly getting the air input to raise the cylinder, but mechanically
it would move. Disassembled the air cylinder asswmbly. Found the
cylinder disconnected from the ball shaft. It had unscrewed from it's
normal mounting position. screwed it back on and re-assembled. Tested
fine.
This fix required two people do to space constraints and a poorly
designed assembly that utilizes a retaining ring.
Doc / JP
|
| 7.74 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:19 | 21 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 18 lines 4-AUG-1995 07:06
-< pad change / robot cal. changed >-
--------------------------------------------------------------------------------
completed pad change as pad count reached 600.
However.. some good news and bad news. The bad
news is that it failed MQC's. The good news is
that it might just need another boat of wafers.
That's going on right now and then we'll give the
MQC's another shot.
As far as the robot is concerned. It was not
arriving at the the front receive almost everytime
the robot was told to move. I ended up tricking the
the machine into think that the receive elevator was
closer than it was. The value for SEND-1 was -35.83
and it noe -35.01. RCV-1 was -35.82 and it now -35.
We haven't had a hang up with the robot for over 50
wafers now.
BJ
|
| 7.75 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:18 | 28 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 25 lines 9-AUG-1995 19:51
-< Robot repaired >-
--------------------------------------------------------------------------------
Robot activities continue...........
The robot / rail assembly was removed again at the end of 1st shift.
The bearings, lead screw, rail heights/widths, and the general assembly
were all thoroughly checked. The bearings looked good. The rails were
a little pitted. Used crocas paper to smoothen out best we could.
Lubricated the rails and tried moving around by hand turning the lead
screw. Could not initially get both ends of the rails to have the same
torque feeling. Adjusted a couple of componants, they being the set
screws on the pillow blocks, the two bolts on the assembly that
supports the robot, and lastly, the lead screw mounting block
assemblies on each end. The robot seemed to be performing much better.
Re-installed the assembly, bellows, and robot. Hooked up the
electronics to the robot and tested results. The robot repeatably made
it to it's proper destination EVERY time. No failures what_so_ever.
JP has begun building carriers as I type. Also, a pad will need to be
installed. Normal recovery procedures from a pad change/carrier change
need to be performed.
Two more items need to be verified to finish off the PM. See the
check sheet for details.
JP / Doc
|
| 7.76 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:19 | 10 |
| SUBPAC::TOOKER 7 lines 12-AUG-1995 10:53
-< spindle down force calibrations >-
--------------------------------------------------------------------------------
Checked left and right spindle Fairchild E-P regulator calibration. No
adjustments necessary. Re-checked left and right spindle downforce cal-
ibration. All displayed and actual downforce readings are well within
+/- 2.0% of each other as per Strasbaugh spec. Downforce calibration
does not appear to be the cause of left/right removal rate differences.
Jim T.
|
| 7.77 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:19 | 17 |
| PATE::GEE 14 lines 22-AUG-1995 07:27
-< 4" Conditioner / variable change / Robot >-
--------------------------------------------------------------------------------
* We had to replace the pad because of poor removal rates and
uniformity problems.
* We replaced the conditioner disk assembly with the 4" type
(no 6" in stock), do to poor performance.
There has been a rush order placed on the 6" conditioner
disks since last week.
* We had to change calibration variable #126 (center position)
from 108000 to 104000.
* Robot end effector was detecting a wafer when no wafer was
present. Had to clean out the end effector air blow off
port.
|
| 7.78 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:19 | 36 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 31-AUG-1995 07:07
-< Solenoid #23 inspected >-
--------------------------------------------------------------------------------
During the pad change, we took apart solenoid #23 to see
if anything could be done with it. It had been leaking for
quite some time judging from the rust stains inside of the
valve. We re-assembled the valve and it still leaked but
not as much. A new one is coming in today, tomorrow at the
latest.
Brian x 2
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.264 CMP.A2 264 of 296
ASDG::POIRIER 16 lines 30-AUG-1995 19:55
-< Solenoid #23 is leaking. >-
--------------------------------------------------------------------------------
* Sol #23 leaking:
Sol #23 has developed a leak which triggered the leak detection
system. Since the leak is a small steady drip and a replacment
solenoid will not arrive until Friday morning, we have put the
system back UP and will continually replace the water soaked
wipes every few hours. Strasbaugh will try to catch the UPS
truck tonight. I they do, the solenoid will arrive tomorrow
afternoon. If they can't, it will arrive at the Fab6 recieving
dock Friday morning.
"D" shift is looking into improved methods of containing the water.
Possibly a small trough to direct the excess water into a container.
John, Roger & Doc.
|
| 7.79 | DI WATER VALVE REPLACED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:20 | 17 |
| SUBPAC::LANDRY 14 lines 1-SEP-1995 18:19
-< valve......pm >-
--------------------------------------------------------------------------------
Today, during a pad change, the new DI water valve was installed.
Quite the task as panels, many DI connections, and wiring were needed
to be removed. The valve mounting screws were under the entire DI
solenoid manifold. Anyway, the job got done with the assistance of
Earl D and Barry C's help. They were quite instrumental!
The defective valve needs to be sent back to Strasbaugh within 30 days
for financial credit. They have sent an RMA # for this purpose. I
have the number elsewhere at the moment.
The Weekly PM was also completed at this time.
Doc
|
| 7.80 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:20 | 26 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 23 lines 7-SEP-1995 06:21
-< Contactor and monitor replaced, PM finished >-
--------------------------------------------------------------------------------
The down force was completed on both spindle as part of
the monthly PM. The data can be verified in the PC under
A2_L906.XLS and A2_R906.XLS. The remaining items need to
have the rest of the data retrieved by C shift in the morning.
The monitor and keypad that were shipped in have been re-
installed on the swivel mount in front. The front right panel
latch was re-adjusted so the panel doesn't pinch the wires when
the cover in locked into place. Everything test fine. The
remote monitor is back home in the maintenance chase between
CMP.A1 and CMP.A2.
The EMO contactors that were shipped in with the wrong coils
in them. We needed a 24V coil and we got 208V coils. We installed
a new contactor with the orginal 24V coil from the machine. The
contactor section is on the tool box marked N.G. Inspection clearly
shows cooked contacts. The system was EMO'ed numerously without
any hesitations or delays. All set.... case closed...
D shift
|
| 7.81 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:21 | 41 |
| ASDG::POIRIER 38 lines 16-SEP-1995 19:43
-< Pack Press Verification / Hub O-rings / Vac Leak >-
--------------------------------------------------------------------------------
* Back pressure verification:
--------------------------
The Hubs were removed from both Spindles and presence of back pressure
was verified at the Feed Tubes on both Spindles.
Conclusion: Back pressure is being applied thru both Spindles to the
Carriers.
Left Spindle Hub O-rings:
-------------------------
The silicone o-rings in the Left Hub are in bad shape. "B" shift,
please replace them tonight and mount both Hubs back on the tool.
Right Spindle Rotory Joint:
---------------------------
The Right Spindle Rotory Joint is experiencing a vacuum leak.
The leak is in the area of the Joint that supplies vacuum to
the Spindle Quill chamber.(outside the Feed Tube)
You can test the leak by attaching a vacuum gage to the barbred
fitting protruding from the Hub Mount. Put the tool in manual mode
and turn the Right Spindle Vacuum ON. The gage will read approx
20" of vac. (It should be at 24") Now push-up on the Rotory Joint
and the vacuum will drop to 12" and the alarm will sound. (The
press switch is set to alarm at 15")
Since it's possible to drop a Carrier off the Spindle during a Polish
Cycle, disable the Right Spindle until the Joint can be replaced.
|
| 7.82 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:20 | 37 |
| SUBPAC::LANDRY 34 lines 17-SEP-1995 19:52
-< rotary union/spindle assembly vacuum leak >-
--------------------------------------------------------------------------------
What a day..........
The right spindle was looked at today for a problem with it losing
vacuum when up pressure is applied to the rotary union. The carrier
vacuum would only pull down to @20 Hg when the vacuum was applied to
secure the carrier. When physical pressure was exerted to the rotary
union, the pressure would drop below the 15 Hg set point, hence alarming
for low vacuum.
We dismantled the spindle assembly. We found the top o-ring to be
sheared severely and the bottom o-ring to be in bad shape as well. So,
both o-rings were replaced and re-assembly of the spindle commenced.
It was then tested out. Initial vacuum went to @21 Hg (not much improve-
ment) and it would drop to about 12 Hg when up pressure was applied.
So, disd-assembled again to find the top o-ring damaged. The threads on
the nut were messed up a bit, so a new rotary union was installed, using
the original shaft. After re-assembly, the initial vacuum was @24" Hg.
As up pressure was performed, the drop was still poor, but better than
before. Out we come again. The o-ring was bad again. Upon closer
inspection of the parts, we found that the shaft was bent enough to cause
the threaded nut to pinch the o-ring as it attempted to seal properly.
With no shafts to be found, we tried to straighten the shaft bend out.
Surprisingly, it came out pretty good, enough to try a re-assembly.
The initial vacuum was now at @25" HG and the drop after up pressure was
minimal (@20" Hg). After doing up pressure for 5-10 minutes, the leak
gets bad again.
Looks like we'll have to order a shaft or two and a spare rotary union
on Monday morning. In the mean time, the B shifters will take a shot
at it tonight. Good Luck.
the A shifters
|
| 7.83 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:21 | 9 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 6 lines 13-OCT-1995 05:17
-< End effector adjusted >-
--------------------------------------------------------------------------------
The end effector switch was detecting a wafer when
there was none present. The switch had to be adjusted.
It was tested and continued on its way without any problems.
D shift
|
| 7.84 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:20 | 25 |
| ASDG::POIRIER 22 lines 19-OCT-1995 19:28
-< Wafer Breakage/Shuttle Movement >-
--------------------------------------------------------------------------------
System Performance/ Wafer Breakage:
A2 broke wafers on the Pad during step 2 of the Auto Cycle early
in the shift. Brad and I built-up 2 more Carriers and the system ran
for the rest of the shift wihout any wafer breakage.
Shuttle Movement Problem:
The Shuttle failed to move this afternoon. The Shuttle rails and
Pillow Bock Bushings were cleaned and relubricated. The Shuttle
translates back and forth now without any problems.
Brad & John
|
| 7.85 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 05:21 | 53 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 13 lines 20-OCT-1995 09:04
-< table stalled >-
--------------------------------------------------------------------------------
The pad was replaced earlier in the shift and was broken
in using the BREAKIN recipe. As soon as wafers were started
on the tool for MQC's, the table stalled out during polishing
after the amps got over 40. The system was EMO'ed before
anything crashed. Larry and I monitored the table with
different downforces applied the table. The amps went to
40 several more times but it did not stall the table. At
this time, MQC's are being run and the machine is going to be
closely watched.
D shift
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.294 CMP.A2 294 of 296
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 16 lines 21-OCT-1995 08:12
-< Another break.... >-
--------------------------------------------------------------------------------
stall... crash... clean-up...
Another stall more breaks. The Table AMPs went over
45 and stoppped without any ewrrors. We lost an exercise
wafer and a product wafer. The pad was removed and the
machine was cleaned up. New carreiers and pad have been
installed.
The mystery of all of the wafer breaks on A1 and A2
have been narrowed down to the table stalling out. The
gear box is being pushed to its limit and we are now seeing
the end results. John and Brad now the proud owners of this
issue.
BJ
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 56.296 CMP.A2 296 of 296
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 5 lines 2-NOV-1995 06:07
-< Stall speed error >-
--------------------------------------------------------------------------------
The table appeared to have stalled out and alarmed for table
speed too low. This error occured with exercise wafers where on
the tool. When product was run, it gave the same error. The
computer was softbooted and ran fine for the rest of the monring.
|
| 7.94 | CMP.A2 Status - 11/18/95 | ASDG::POIRIER | | Sat Nov 18 1995 19:27 | 9 |
|
SyStem Status:
-------------
* Pad changed & MQC's completed. System ready for Super Hot Lot.
John.
|
| 7.95 | broke wafers / replaced carrier plates | FABSIX::R_GEE | | Sun Nov 19 1995 07:14 | 23 |
| * Broke product wafers on the pad.
System status at the time:
- 406 wafers on the pad (2 suba IV, 1 IC1000)
- 203 wafers on the carriers.
- Down force was 313 lbs
- Slurry flow set at 500 ml/min
- 180 sec polish.
- Back pressure 15.8
- 10 wafers into a 21 wafer lot.
Replaced the pad and carriers. Began running a wafer slid out
from under the left carrier twice, the emo was hit and it
didn't crash. Dis-assembled the carrier and replaced the backing
plate with the older style threaded standoffs. We encountered
the same problem with the right carrier and replaced that one
also.
B shift
|
| 7.96 | High particles / brush change | FABSIX::R_GEE | | Sun Nov 19 1995 07:15 | 19 |
| * Failed particles and uniformity.
- Ran a particle check using the "Transfer" program, this
cycles the wafers thru the system without touching the
pad. Particle check showed 1 adder, this shows that the
particle problem has to be coming from the polish table
area.
- Removed and cleaned the conditioner.
- Cleaned the index table and polish table area.
- Ran a second particle check, no improvement.
* Broke 2 wafers in the clean station.
- Found a wafer stuck in the paddle rails. This stopped the
paddle assembly and caused the mis-load at the scrub station.
B shift
|
| 7.97 | DI Water leak | FABSIX::R_GEE | | Tue Nov 21 1995 07:17 | 14 |
|
* Errored for DI water leak detected.
- Found about 1 inch of water in the bottom of the system.
- Cleaned up the water, and found valve SOL31 had a small
leak coming from the top. Looked in stockroom 6 with no luck.
A shift will need to order one.
B shift
|
| 7.98 | valve on the way | SUBPAC::LANDRY | | Tue Nov 21 1995 18:58 | 8 |
|
We contacted Strasbaugh today concerning the DI solenoid valve.
They are sending one to us for tomorrow morning. It's shipping by
Fed-Ex Priority 1. We'll try and schedule some time with manufac-
turing to replace it.
A shift
|
| 7.99 | slurry lines changed | SUBPAC::LANDRY | | Wed Nov 22 1995 19:05 | 17 |
| Today, we had a hose split on the slurry line to pump #1. The mess was
cleaned up and the tubing was replaced on both pumps. Once completed,
slurry pump flow calibration was performed on both pumps. Both needed
new calibration variable numbers as they were flowing on the low side.
The infamous DI valve didn't make it through shipment today. Checked
both docks (morning and afternoon delivery) with no luck. Therefore,
D shift will have to make a decision by the end of their shift. The
water will either need to be shut off on the system OR a union can be
put in-line instead of the valve. A union has been procured and it
currently resides in the top draw of the tool box. If the pad life is
bad/old, maybe best just to shut off the incoming water and put the two
carriers in a basin of water for the day. If the pad is good/new, it
may be best to put in the union. Do what you think is best!
Doc / JP
|
| 7.100 | DI attack!!! | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 23 1995 06:30 | 8 |
|
The right SEND elevator wasn't repeating. We pulled
out the elevator and for several wire corroded and broken.
We cleaned up the connectors and rewired the broken ones.
Everything ran fine after that.
D shift
|
| 7.101 | Conditioner Arm Actuator "Rod End" Replaced | ASDG::POIRIER | | Fri Nov 24 1995 19:40 | 13 |
|
Conditoner Arm Failure:
----------------------
The Conditioning Arm failed to rise out of the Park Station this
afternoon. The Whole Conditioning Assembly had excessive backlash.
Further inspection revealed a worn-out Rod End on the Actuator.
The Rod End was replaced and the Actuator Reed Switch was adjusted
for proper Arm location at the Park Station. The Flow Controllers for
the Conditioner Up/Down motion were also adjusted to eliminate the
cluncking on the down stroke. The motion is much smoother now.
John.
|
| 7.102 | low slurry flow | STRATA::FINN | | Mon Nov 27 1995 19:05 | 23 |
|
No slurry flow , Ashland's pump had shut off. Contacted ashland
to restart pump. Pressure to all systems was still high, but flow through
system was minimal. Bypassed system using external loop at A2 and slurry flow
was still low. Check B1 with same results. Ashland Chemical changed the input
and output (return) valve in valve manifold box, hence referred to as VMB.
Return was clogged solid. Slurry filter was changed, it was clogged.
We turned systems back on with great expectations. BUT, same problem
remained. Took this opportunity to modify A2 slurry manifold so pump two is in
series series with pump one, as it on CMP.A1. To make a long story short
it turns out turns out that in addition to the valves in the VMB, the last 12"
of the return line was clogged with slurry. Cut and flared and installed a new
return line back to the manifold. Slurry calibration was verified.
During breakin, after 10 successful wafers, one wafer flew out of the carrier
and broke on the tape. Pad and carries have been changed. System is in MQC.
Water valve has not arrived from Strasbaugh, and due to the hectic
nature of the day, we have not found time to follow up on this shipment..
Although the bypass seems to be working fine.
Tim/Doc/Brendan
|
| 7.103 | changed v31 | STRATA::FINN | | Tue Nov 28 1995 19:19 | 7 |
|
Picked up valve at Fab 6 dock today.
Replaced water valve 31. Tested aok.
System up and running product.
Brendan/Jim T.
|
| 7.104 | Uniformity issues | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 30 1995 08:42 | 14 |
|
Since early Wed. morning, the left carrier showed
a 6% uniformity difference from the right. A pad and
carriers change was done due to life. All day Wed. it
still showed signs of problems with the left. At 8:10pm,
the tool crashed a wafer from the left spindle. It was
a reclaim wafer to boot. After the tool was cleaned up,
I checked both hubs due to the uniformity. I Found the left
hub out .08 mils and the right was at .0025. They were both
brought in within .0005 mils.
BJ
|
| 7.105 | Semi annual completed | FABSIX::B_FINN | | Wed Dec 06 1995 19:12 | 13 |
|
Completed semi annual pm. Pad and carrier changed. System
turned over to manufacturing for breakin and MQC. Left carrier passed Right
carrier had edged heavy removal. Carrier was changed. Wafer broke on pad fro
new carrier. Pad and carrier were changed.
The last MQC has heavy center removal, shapes looks good, operation tech is
running more wafers to bring Sdev into spec.
Brendan
|
| 7.106 | Robot vacuum line | FABSIX::R_GEE | | Mon Dec 11 1995 06:51 | 6 |
| Replaced the 1/8" robot end effector vacuum line.
B shift
|
| 7.107 | broken wafer | FABSIX::R_GEE | | Tue Dec 12 1995 07:02 | 14 |
| * Broke a wafer on the pad.
476 wafers on the carriers.
232 wafers on the pad.
1st 2 wafers of the 2nd 3 min. run.
looks like wafer broke inside the carrier with 1 piece
that had slid out.
Replaced the pad and carriers, the system is now in mqc's.
B shift
|
| 7.108 | | LUDWIG::FINN | | Tue Dec 12 1995 19:28 | 7 |
|
Wafer broke on pad. Pad and carrier changed, Breakin and MQC to start.
Brendan/John
|
| 7.109 | Wafer Breakage | ASDG::POIRIER | | Wed Dec 13 1995 19:16 | 7 |
|
Wafer breakage:
--------------
The system experienced a wafer fly-out and breakage at 7:00 p.m.
D shift, please start the clean-up activity and replace the Pad & Carriers.
|
| 7.110 | WAFER BREAKAGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Dec 21 1995 06:38 | 10 |
|
A wafer slid out of the right carrier and crashed.
The wafer was an exercise oxide wafer. After the carrier
was torn down. A faulty check valve seemed to be the
culprit. The tool was cleaned up and new carriers and
pad was installed. After the first round of MQC's, it
failed for unifomity. OPS are running more wafers to
try and bring it in.
D shift
|
| 7.111 | Start-up for 12/29 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 29 1995 15:10 | 12 |
|
The DI came on but is still out of spec so we didn't want
to keep it to the tool so we shut off the DI feed and opened the
by-pass. Facilities still have some by-passes opened, that's
why we don't have very high pressure.
The slurry lines are all back to normal and slurry is flowing.
We put the filter on but but we didn't run the slurry through
the machine because of the DI situation.
Mitch,John,Leon,BJ
|
| 7.112 | Shuttle Adjustments / Air Motor Performance | ASDG::POIRIER | | Sat Dec 30 1995 15:39 | 27 |
|
Shuttle:
--------
The Shuttle was not moving smoothly so Mitch and I decided to lube &
readjust the assembly. The rails were cleaned and relubed. We opened-up
the Needle Valve Flow Controllers to increase the Shuttle speed. After
we reached the desired speed, (same speed as CMP.A1's Shuttle) the
Shuttle was banging hard against the front stop. Mitch readjusted the
Stop dampner but found it difficult adjust for a smooth deceleration.
It appears that the unit is failing. We'll have to call Strasbaugh
this week for a replacement.
Cleaning Station Air Motors:
----------------------------
Since the "RIGHT" Air Motor an CMP.A1 was not performing normally, we
decided to start-up the Air Motors on CMP.A2 and check them out. The
"Right" Air Motor on CMP.A2 would not rotate. We let the Motor sit
for 5 min with air pressure applied and it started to turn slowly.
After 20 min, the motor appeared to rotate at full speed although
somewhat noisy. We should probably replace all 4 motors at a time
since they don't seem to have a long life. Approx 9 months.
Note: The Left Motor on CMP.A1 was repaced in November 95, the other
3 have been on the tools approx 9 months.
|
| 7.113 | CMP.A2 START-UP COMPLETE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sun Dec 31 1995 14:32 | 43 |
|
CMP.A2 STARTUP CHECKSHEET
-------------------------
Shift Date
------- -------
1. Ensure that all necessary facilities are B, C + D 12/31/95
available and ready to use.
2. Power up each system. B, C + D 12/31/95
3. Power up each vacuum pump cabinet. B, C + D 12/31/95
4. Power up each Neslab TCU. B, C + D 12/31/95
5. Open incoming DI Water Valve to each B, C + D 12/31/95
system.
6. Close UDR valve at each system. B, C + D 12/31/95
7. Install wafer carriers with new films. B, C + D 12/31/95
8. Place cassettes in left and right send
and receive stations to fill DI Water
tanks.
9. Re-connect slurry inlet and outlet lines B, C + D 12/31/95
to filter housings and install new filters.
10. Change RTC status to SCHEDULED DOWN and
perform a Weekly PM on each system.
11. Install new polishing pads.
12. Re-install PVA scrub brushes. B, C + D 12/31/95
13. Place systems in wet idle mode. B, C + D 12/31/95
14. Change RTC status to VERIFY and notify
Operations that the systems are ready
for MQC.
|
| 7.114 | slurry line / broken wafers | FABSIX::R_GEE | | Tue Jan 02 1996 07:46 | 13 |
| The slurry line for pump #1 was leaking, replaced pump #1
slurry line. Calibrated the slurry flow for both pump #1
and #2.
* After the system passed mqc's 2 breakin wafers broke on the pad.
the pad was changed and carriers from cmp.a1 installed.
The system is now in verify_u and running breakin now.
B shift
|
| 7.115 | Wafer breakage.... | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 04 1996 08:25 | 8 |
|
A break-in wafer slid out for the left carrier and
blew away. Everything was checked out and we came up
empty. The tool was cleaned up and brought back up for
production with 45 minutes or so. The wafer count for
both carriers was around 250 and the pad count was almost
400.
D shift
|
| 7.116 | wafer slippage | STRATA::RIDLON | Eliminate the obvious | Sun Jan 07 1996 06:32 | 4 |
| Product wafer slipped out of right carrier. Had to cut a 32" inch pad
down to fit. Cleaned up the mess and changed the carriers.
B shift
|
| 7.117 | Wafer breakage, pm | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 10 1996 06:11 | 4 |
|
A wafer slid out of the right carrier and blew apart.
We took this opportunity to complete the monthly PM.
|
| 7.118 | Bridge not arriving at polish | FABSIX::R_GEE | | Wed Jan 17 1996 07:04 | 11 |
| The bridge stopped midway between the load cups and the polish
table., before polish. No reason was found for the malfunction,
the error was, "Bridge not arriving at polish".
Had to unload the wafers and home the bridge to recover, ran
fine the rest of the night.
B shift
|
| 7.119 | LEFT SEND LEFT ELEVATOR NOT REPEATING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Jan 20 1996 05:24 | 10 |
|
The robot was hitting the wafers past the 15th slot
in the left send elevator. After homing, cycling the
power and swapping cassettes, the problem stayed with
the left elevator. Due to a hot lot and A1 going down
in a few minutes, we are unable to take the elevator out
to have a look. A2 is still with the right on-line but
there is a note on the machine as well as a WARNING on
in. The elevator is not repeating so it could be anything
from the lead screw to the possible corroded wiring,
|
| 7.120 | New airmotors have arrived | SUBPAC::TOOKER | | Mon Jan 22 1996 15:06 | 8 |
| CMP Equip. Techs,
I have just received 4 new air motors for the cmp.a1/.a2 clean stations. These
need to be installed as soon as possible. I will leave them on my desk in a
plastic bag.
Thanks,
Jim Tooker
|
| 7.121 | Slurry #1 line leak. | FABSIX::R_GEE | | Tue Jan 23 1996 06:57 | 7 |
| Slurry pump #1 line was leaking. We replaced the line and
calibrated the slurry flow for pump #1.
B shift
|
| 7.122 | Air brush change | FABSIX::B_FINN | | Tue Jan 23 1996 18:41 | 6 |
|
Changed both air motors at scrub/clean station, per Jim Tooker request.
MQC's pasted fine, system was up but will be going down for a normal
pad change @ 272 wafers.
A shift
|
| 7.123 | pad change, left send elevator | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 25 1996 06:50 | 7 |
|
Bubbles we found on pad. Replaced pad and carriers.
OPS used the LEFT SEND elevator with no problems this morning.
BJ
|
| 7.124 | bubbles between the pads/ broke wafer | FABSIX::R_GEE | | Sun Jan 28 1996 08:19 | 12 |
| Had to remove one pad do to bubbles between the pads after 114
wafers. Did a second pad change do to poor uniformity
after only 34 wafers, it failed 2 mqc attempts. The system
is still down for poor uniformity 12% and may need a third
pad change.
At the end of our shift 2 wafers broke on the pad, it needs
a pad and carriers.
B shift
|
| 7.125 | robot upgrade | STRATA::FINN | | Tue Feb 06 1996 19:10 | 13 |
|
System is down for the scheduled robot upgrade. Robot rails and
bearings have been removed. New rail assembly has been installed
with new hardware and aligned to motor. Boot has been reinstalled over rails.
Wires have been run and spliced, pins have been installed. New pressure gauge
and bracket have been installed.
Wire connectors will be installed tomorrow. Robot and Software are
still to go. Project is on Schedule.
A shift
|
| 7.126 | robot upgrade status | SUBPAC::LANDRY | | Wed Feb 07 1996 19:03 | 21 |
| More good progress with the upgrade today..........
- ALL wiring/connectors/hookups completed.
- Software was sucessfully installed.
- Robot functionality has been verified.
- ALL homing sequences have been verified.
- Some robot alignments were performed. Will need to check again
in the morning. Will also have to perform other alignments/
calibrations.
- Two new carriers have been loaded up.
- Both brushes have been re-installed.
- The pad will need to be changed PRIOR to any wafers touching down.
PLEASE DO NOT put a new one on until Todd has finished with the
remaining alignments/cal's/verifications.
*** Please leave the system as is. Todd has several things to
do before we try any polishing.
Doc / Todd F.
|
| 7.127 | Strasbaugh Robot Upgrade | ASDG::POIRIER | | Thu Feb 08 1996 20:29 | 9 |
|
* Robot Upgrade:
-------------
The Strasbaugh Rep ran into problems with the new Robot. A 2nd unit
will arrive at 10:00 p.m. tonight. He may resume the upgrade work
tonight. If not, he will be back in the morning with a second
Strasbaugh field service tech.
|
| 7.128 | Robot upgrade | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Feb 09 1996 05:17 | 7 |
|
The problem with the first new robot was either the motor or the
encoder for the in/out axis. The 2nd robot checked out ok. Todd
went home and will finish the upgrade in the morning.
BJ
|
| 7.129 | cmp.a2 robot upgrade update | SUBPAC::TOOKER | | Fri Feb 09 1996 16:59 | 13 |
| Jim Tooker
2/09/96
The new new robot in cmp.a2 is now operational. At ~5:15 pm we will be
ready to return the tool to Operations for a new pad, carriers, and MQC.
The Strasbaugh field service engineer will be staying late to monitor
the tool's peformance. Please call me at home, 508-874-0839, if there
are any problems or questions.
Thanks,
Jim
|
| 7.130 | Robot Upgrade completed | ASDG::POIRIER | | Fri Feb 09 1996 19:27 | 5 |
|
* Robot upgrade:
-------------
The robot upgrade has been completed. The system is currently running
MQC's.
|
| 7.131 | Robot Vacuum Sensor needs recalibration | ASDG::POIRIER | | Sat Feb 10 1996 19:46 | 10 |
|
* Robot failing to pick-up wafers:
-------------------------------
It appears that the vacuum sensor is in need of adjustment. The same
condition developed on cmp.A1's upgraded robot last week and a
sensor recalibration solved the problem. The procedure for cali-
brating the (new) robot vacuum sensor is in Vol #2 of the Stras-
baugh maintenance manual.
|
| 7.132 | right carrier sticking | STRATA::RIDLON | Eliminate the obvious | Sun Feb 11 1996 01:01 | 9 |
| Right carrier sticking to pad on lift off. Pad was changed on previous
shift and operator was trying to qualify tool. Ran pad condition and
retested with no improvement. Removed right carrier and checked
tolerance of retainer ring. Result was -.0055in to -.0070in. There were
three rebuilt carriers so one of these was installed. Ran some more
breakins and the carrier lifted off as it should repeatedly.
B shift
|
| 7.133 | Scratches | FABSIX::R_GEE | | Sun Feb 11 1996 07:02 | 12 |
| * The system failed for scratches 2 times. Traced the
scratches to the polish table area.
Replaced the pad and conditioner disk, cleaned
the system, it still failed for scratches. Replaced
the pad and conditioner a second time. "A" shift will
need to keep working on it.
B shift
|
| 7.134 | MQC's are fine | STRATA::FINN | | Sun Feb 11 1996 19:23 | 6 |
|
Jesus and Kim ran breakin and MQC's after B shift pad change.
No scratches and particles were in spec. Fix belongs to B shift.
A shift
|
| 7.135 | Slurry Pump hoses replaced | ASDG::POIRIER | | Thu Feb 15 1996 19:27 | 6 |
|
* Slurry lines:
------------
The hose on Slurry Pump #1 ruptured this afternoon. Brad replaced
the hoses on both pumps and returned the tool to Manufacturing.
|
| 7.136 | Slurry lines adjusted. | FABSIX::B_WESTPHAL | | Thu Feb 15 1996 19:40 | 3 |
| CMP.A2 - Down for slurry pump #1 leaking. The line was cracked so replaced
both #1 & #2's slurry lines. Also changed the pad as requested by
production.
|
| 7.137 | Blown slurry line on pump #1 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Feb 16 1996 07:28 | 9 |
|
The slurry line on pump #1 was too long and pinched off causing
a tear and causing slurry to spray everywhere. It also caused the
tool to stop during polishing. No wafers were damaged. The line
was replaced and both pumps were recalibrated.
D shift
|
| 7.138 | Softt ware bug | SUBPAC::TOOKER | | Fri Feb 16 1996 14:33 | 15 |
| On cmp.a1 and cmp.a2 there is a bug in the software that will occasionally
cause the autocycle to abort and go to idle. This occurs after the robot
has unloaded wafers and before trying to load more wafers. At this point,
the system checks to see if there are any wafers present on the robot before
trying to take any wafers from a load cassette. Strasbaugh says that the
time delay in the software is too short and this is causing the system to
eroneously sense the presence of a wafer. Next week, Strasbaugh is sending
a new software Rev. to us that will correct this problem. If the auto cycle
does abort to idle, hit "start" to resume the autocycle. Maintenance techs.,
please do not adjust the vacuum switch as a fix for this problem. Only adjust
the vacuum switch when the robot misses picking up a wafer from a cassette.
(i.e. the robot moves into the cassette and comes back out without a wafer)
Thanks,
Jim T.
|
| 7.139 | No response from the Computer Bezil | SUBPAC::LANDRY | | Sun Feb 18 1996 14:44 | 9 |
| This afternoon, the opts people were unable to activate any touch pads
on the front computer. It originally appeared that the system had
locked up. Further checking proved otherwise. The remote terminal was
having no problems with keyboard use. So, back to the front computer
for a look_see. Found the keyboard cable just barely inserted into the
interface module (which is mounted on the back wall directly in back of
the computer). Re-inserted said cable. Computer bezil working fine.
A shift
|
| 7.140 | Robot/Cassette problem | FABSIX::R_POIRIER | | Wed Feb 28 1996 05:06 | 15 |
|
Operations had a problem with robot crashing into and/or
not picking up wafers from cassette. We found that a wrong
cassette - Empak P/N XT204-02 was being used. Should be
XT200-02E.
XT204-02 has a wafer gap that is about 1/16th of an inch
bigger than the XT200-02E.
B Shift
|
| 7.141 | Conditioner arm up sensor bracket | FABSIX::R_GEE | | Wed Feb 28 1996 07:27 | 14 |
| * The conditioner was erroring for "conditioner not arrive up"
it was up.
Found a broke off screw that holds the up sensor
on. There are 2 screws holding it on. We tightened
up the one remaining. Production requested that they
beable to finish the lots running. After these have
been completed it will need to be drilled out and
retaped.
B shift
|
| 7.142 | passdown | FABSIX::B_FINN | | Wed Feb 28 1996 19:34 | 8 |
|
One of the screws holding the Pad Conditioner up sensor
snapped off in it hole. Removed bracket and sensor, drilled out
old screw and re taped to 10-32. Reinstalled and tested aok.
Completed weekly pm.
A shift
|
| 7.143 | New wafer push bars installed | SUBPAC::TOOKER | | Fri Mar 01 1996 15:39 | 9 |
| Today we installed new style wafer push bars in cmp.a1 and cmp.a2. These
are the bars located inside each elevator rinse tank to help keep the wafers
from floating out of the cassettes. The new bars are thicker than the old
ones and should do a much better job of keeping the wafers in the cassettes.
Please ensure that the wafers are completely in the cassette when placing a
cassette of wafers onto a cassette station.
Jim T.
|
| 7.144 | pads........... | SUBPAC::LANDRY | | Tue Mar 05 1996 19:33 | 8 |
|
The system went down late morning for scratches. Process Eng
decided to try an expiremental pad (spiral) at this time. It
was installed, broken in and MQC's run. Poor uniformity was
the result. The pad is currently being removed in favor of a
normal pad. It will need the usual break_in and MQC's run.
A Shift
|
| 7.145 | Wafer breakage | FABSIX::B_JUBINVILLE | | Fri Mar 08 1996 06:56 | 12 |
|
During the running of the MQC wafers after the
monthly PM was completed, a ~crash~ consisting of
two wafers and their respective carriers took place.
The small pieces of film that was as a result of not
being blown out during assembly was evident on the
brushes, the wafers, pad and check valves. After
everything was cleaned up, new carriers and pad
were put on the tool.
BJ
|
| 7.146 | wafer breakage, brushes | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Mar 09 1996 04:52 | 8 |
|
While running pre-break-in wafers, the tool crashed. The
tool was cleaned up and wiped down. The brushes were removed
to bring up A1. This system will have to stay down until
Monday when VSR-1 is repaired.
BJ
|
| 7.147 | brushes found | STRATA::RIDLON | Eliminate the obvious | Sun Mar 10 1996 00:53 | 7 |
| Found the keys to open the lower door of VSR-1 and as luck would have
it thats where draw 14 was. Removed the brushes needed to bring A2 back
up. New pad and carriers being installed now.
The stock room was notified about the removal of the two brushes.
B shift
|
| 7.148 | Robot End Effector | FABSIX::R_GEE | | Mon Mar 11 1996 03:31 | 12 |
| * After swapping the end effector from CMP.A1 the problem
with the robot not detecting the wafer on the robot moved
to CMP.A2. We found a small burr on the end effector created
by the end effector hitting wafers in the past. We scrapped
the burr off and siliconed the stainless steel tube where
it meets the end effector, looked like it could have been
leaking vacuum. No more robot problems.
B shift
|
| 7.149 | robot to left send station position | FABSIX::R_GEE | | Wed Mar 13 1996 02:31 | 12 |
| The robot wouldn't pickup the wafer out of the left send
station.
We re-homed the robot and elevator, still wouldn't work. The
robot end effector wasn't low enough. We adjusted calibration
variable # 80 "left send elevator offset to slot 0" from 3.02
to 3.05, no more problems.
B shift
|
| 7.150 | BROKEN WAFERS | FABSIX::B_WESTPHAL | | Thu Mar 14 1996 19:06 | 6 |
|
CMP.A1 - Down for broken wafers on the polish table. Could not determine any
definite cause. Pulled the pad and cleaned up the process area. The
carriers were replaced and the conditioning disc was checked and
cleaned.
|
| 7.151 | Sslipping wafers | FABSIX::B_WESTPHAL | | Fri Mar 15 1996 19:41 | 10 |
| CMP.A2 - Down for breaking wafers during polish. Originally Suspected poor slurry flow to be
the problem. The filter was checked and it was heavily clogged with
slurry. The filter was Changed out with a new one that was sent in
FEDEX. The polish area was cleaned and pad and carriers were changed
by production. The problem reoccurred while ops was tring to run there
breakins. Pulled the pad and cleaned up the mess. Checked the
carriers for any obvious defects, none were found. O-rings between
the spindle and carrier. The same seemed good. Ran out of time. The
tool presently sets with 2 new carriers and no pad on the table.
|
| 7.152 | MQC failures | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Mar 16 1996 07:00 | 12 |
|
The tool was hurtin' all night running wafers
and MQC's. The hub alignments were checked and
they were ok. We swapped the carriers with (2)
new carriers that were sitting on A1 and they
re-ran MQC's. This time the left carrier came
right into spec at 6%. The right was at 12%.
Another new carrier was placed on the right spindle
and as of 7am, they are running MQC's once again.
BJ
|
| 7.153 | scratches | STRATA::FINN | | Mon Mar 18 1996 19:30 | 9 |
|
System down for scratches, wafer were broke on an engineering
experimental run. Table Amps increased and wafers broke. Pad and
carrier changed. Mqc showed scratched. Pad about to be changed.
A shift
|
| 7.154 | System was in a funk for a couple hours | SUBPAC::LANDRY | | Tue Mar 19 1996 18:24 | 33 |
| What a fiasco on this baby today.............
The system was crankin' along fine (running product) until about 2:00
PM, when all of a sudden, it unloaded both carriers in the middle of
the product run. It dropped them off in the clean station as if it
told to do it. Of course I was in the process of a Semi-Annual PM on
A1 at the time. Don't it figure? So, the vacuum system was checked
and it was fine. The carriers were loaded up and we attempted to get
back on-line.
Well, first attempt, it dropped a wafer from the left carrier. A small
piece of material (looked like a shaving off the film) was with the
wafer on the table. Kim was quick to EMO, hence preventing any crash.
Checked the carrier and it looked alright. Retried again. This time,
there was no rotation at the left carrier, EMO'd and saved a potential
crash. Rebooted and manually tried rotating the left carrier. Worked
fine.
OK, lets try running again. First try, the Amps on the table rose
dramatically, emo'd again. Rebooted, checked the carriers again. The
left carrier was showing signs of being a problem. Looked like small
shavings of the retaining ring were now on the table. Alright, get
this carrier outta here. Put a new one on the left spindle, ran the
system as if breaking in a new pad (low down force to begin; gradually
increasing down force each run). The system seemed to be back in
proper working order dispite the multitude of inadequacies the previous
couple hours. They ran MQC's with good results. Wish I could tell
you what this fiasco was all about, but NONE of it made any sense.
Get me away from this tool......please! I've had enough.
Doc......with help and amazement from Kyle
|
| 7.155 | System upgraded with new load and clean station rings | SUBPAC::TOOKER | | Wed Mar 20 1996 16:27 | 8 |
| CMP.A1 and CMP.A2 have been upgraded with new load station rings and new
6 roller clean station rings. I have checked the alignment between the
spindles and the new rings, and cycled 50 wafers through each system with
the handling recipe without any problems. Please be aware that if either
system starts to have misloads, that a re-alignment may be necessary.
thanks,
Jim T.
|
| 7.156 | Crash... again... | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Mar 21 1996 05:51 | 28 |
|
the latest definition of CMP:
Continuously Mauling Pads
Came to a tool that was just re-assembled
as a result of yet another crash. It just
needed some carriers built. After I built up
some carriers and got A2, running it crashed
as it got to 20 wafers on the pad and at 313lb
downforce. The wafer in the left carriers was
the culprit. I checked the downforce on both
spindle and found the right just a bit out
of spec and brought it in. The left spindle
was a different case. On my first pass, I
got a force error of -21, it's suppose to be
~+/- 2. I was able to bring it in according to
spec. I decided to check the EP regulators but
I was following the spec and "it ain't happenin'!"
It is in reference to the old software but I don't
think that mattered much. I called the 24-hotline
and got no response. They don't need the tool so
I'm leaving it down and I'm going to speak to EE
at 8am.
BJ
|
| 7.157 | Performed left & right spindle downforce and backpressure calibration | SUBPAC::TOOKER | | Thu Mar 21 1996 16:12 | 13 |
| Today the left and right spindle downforce and backpressure was calibrated on cmp.a2.
The Strasbaugh manual is a little ambiguous when it talks about the different Fairchild
E-P regulators. Please remember that the three small Fairchilds bundled together in the
lower right hand corner of the electronics cabinet are for left spindle backpressure,
right spindle backpressure, and pad conditioning downforce. The two large Fairchilds
located above this are for left and right spindle downforce. The calibration procedures
for downforce and backpressure are located in the back section of the vol. 2 Strasbaugh
manual. I will be ordering two new sets of manuals from Strasbaugh. This should help
some of the confusion created by the new software with changed calibration variable
numbers and analog output nomenclature.
Thanks,
Jim T.
|
| 7.158 | More crashes and ENG experiments | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Mar 22 1996 05:00 | 18 |
|
Another night more slides and crashes. The carriers
on the tool were the new style without the check valves
and no o-rings. The back pressure is not being used.
After the second crash on the night, removed the center
plug as well as the first inner ring of plugs in the
right carrier and left the left carrier as is with just
the outer plugs out. We had over currents and two more
slide out near crashes. The tool has a new pad and has
been conditioned. The pad was used in the last experiment.
The current condition of the carriers have the left being
the new ENG way with just the outer holes open and the right
has the outer ring, inner ring and center hole opened.
I changed the tool to status DOWN/PROCESS.
BJ
|
| 7.159 | Wafer Fly-Outs - Cut Down Speedfam 32" IC1000 Pads | ASDG::POIRIER | | Fri Mar 22 1996 19:39 | 21 |
|
* Wafer Fly-out Problem:
---------------------
The system was flying-out wafers all day during the break-in recipe.
At Break-in recipe #3, the Table Controller Amperage would Spike-up
to 35 AMPs is Step #3. (@313 lbs of down force)
We even went to the stockroom and tried a different lot # of 28" pad.
The problem persisted!
At 6:00p.m., we cut down a 32" Speedfam IC1000 pad. The Amperage
spiked-up to 32, dangerously close to the 35 amp fly-out value.
However, NO wafers flew-out. On the next two wafers, the Amperage
spiked to 27. It spiked lower and lowaer thru consecutive runs.
It appears that the Speedfam pads are able to break-in nicely.
We recommend using only Speedfam 32" IC 1000 pads on the Strasbaugh's
for the next shift. Process Engingeering will be in tomorrow morning
to continue with analysis of this problem.
|
| 7.160 | rotation axis error | STRATA::RIDLON | Eliminate the obvious | Mon Mar 25 1996 05:19 | 10 |
| It was noticed by the operator that the right spindle was going down
slower than the left and that removal rates were 1000 angstroms
different from left to right. The tool then errored for rotation axis
error. The right and left ep regulators were checked and both were ok.
Down force was also checked and again both were ok. During our
investigation we found that the right air cylinder had a leak at the
clippard fitting. AFter the leak was repaired both spindles went down
at the same rate and force.
B shift
|
| 7.161 | Wafer Crash | FABSIX::R_POIRIER | | Wed Mar 27 1996 07:05 | 10 |
|
A2 crashed last night. Wafer came out of left carrier.
The carriers were new as was the pad. Replaced pad and
carriers and Ops. ran break-in and MQC's. Passed MQC's.
B Shift
|
| 7.162 | CMP.A2 shutdown for facilities tie-in completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Mar 28 1996 06:07 | 57 |
|
SHUTDOWN: 5:00 AM ON 3/28/96
STARTUP: 9:00 PM ON 2/28/96
CMP.A2 SHUTDOWN CHECKSHEET
--------------------------
Tech. Date
------- -------
1. Change RTC status to SCHEDULED DOWN. BJ 3/28/96
2. Remove all wafer carriers. If possible
keep them wet. If not ensure that there
are enough carriers with new films for
startup. BJ 3/28/96
3. Remove all wafer cassettes and drain Send
and Receive DI Water tanks. BJ 3/28/96
4. Purge both slurry lines with DI Water. BJ 3/28/96
5. Remove and discard all polishing pads. BJ 3/28/96
6. Remove all PVA scrub brushes and submerge
in DI water. BJ 3/28/96
7. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry
all wet surfaces. BJ 3/28/96
8. Remove and discard all slurry filters. BJ 3/28/96
9. Disconnect inlet and outlet lines on each
filter housing and remove housing. Connect
inlet and outlet lines together with a 3/8"
union. This will completely bypass the
filter housings. BJ 3/28/96
10. Close main incoming DI Water valve to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. BJ 3/28/96
11. Power down each system. BJ 3/28/96
12. Power down each vacuum pump cabinet. BJ 3/28/96
13. Power down each Neslab TCU. BJ 3/28/96
|
| 7.163 | carrier issues | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Mar 29 1996 06:34 | 14 |
|
After just getting the tool up from the shut-down,
both carriers kept sticking to the table. When they
did finally come up, the wafers were being left on the
table. I took the right carrier apart only find that
one of the plate screws snapped off upon dis-assembly.
New carrier for right... There appeared to be nothing
wrong with the left upon inspection so it went back
on the tool. The right carrier was now ok but the left
still left wafers on the table. I put a new carrier on
the left and the tool ran fine after that.
BJ
|
| 7.164 | software upgrade completed | STRATA::FINN | | Sun Mar 31 1996 19:37 | 11 |
|
Pad was changed due to unifomity and wafers sticking to pad
at lift off.
Performed weekly pm.
Upgraded Software to Verersion. 4.16.3. No problems.
Mqc's passed first time.
A shift
|
| 7.165 | Wafer crash | FABSIX::R_POIRIER | | Mon Apr 01 1996 08:16 | 7 |
| We lost a product wafer out of the left carrier at lift-off.
It slid under the right carrier and both were destroyed.
We replaced the pad and carriers and tool is running break-in
and MQC's
B Shift
|
| 7.166 | new water nozzles added | STRATA::FINN | | Mon Apr 01 1996 19:20 | 7 |
|
Added new additional spray nozzles to the left and right clean
stations. Spliced into the nozzles for the load stations.
Tested aok.
A shift
|
| 7.167 | breakin wafers broken | FABSIX::B_FINN | | Sun Apr 07 1996 20:16 | 9 |
|
Ran hot lot fine, after an idle period breakin wafers were
run, prior to next lot. Breakin wafer from right spindle flew out
at lift off. Monitor wafers looked a little bare. Cleaned system
and replaced pads and both carriers. Mqc's being run.
A shift
|
| 7.168 | New Strasbaugh maintenance manuals are here | SUBPAC::TOOKER | | Mon Apr 08 1996 13:42 | 12 |
| We have received 2 new sets of maintenance manuals for cmp.a1 & cmp.a2. These
new manuals are marked ver. 3. One set has been placed in the gray cabinet
in the CMP service aisle and the other set is in my office. These new manuals
reflect all the changes brought about by the new software rev. and the new
style robot. The old manual containing the schematics has been left in the
service aisle. You may find that in some cases these will need to be
referenced. Please be gentle with these manuals and ensure that pages are not
ripped out or lost. These manuals cost $1200.00 per set.
Thanks,
Jim
|
| 7.169 | Left spindle air leak | FABSIX::R_GEE | | Wed Apr 10 1996 08:10 | 11 |
| When we were performing the left spindle down force part of the
Monthly p.m. we noticed the down force readings were bouncing
30 lbs. at the 300 lb setting.
We found 2 air leaks at the air cylinder, one at the clippered
valve and one at the connector next to the air cylinder. We
tightened the clippered valve and replaced the connector, all set.
B shift
|
| 7.170 | SLIPPING WAFERS | LUDWIG::WESTPHAL | | Thu Apr 11 1996 20:33 | 6 |
| CMP.A2 - Slipping wafers. Changed the pad and ran Barry's modified breakin
method. where 200 lbs. of down force was applied for 4 wafers than
250, 260, 270, 280, 290 300, 313. This was done because the fly outs
were thought to be caused by the pad not breaking in. Process also
extended the rate of ramp to help aliminate friction on the pad.
|
| 7.171 | broken wafer / poor uniformity / poor range | FABSIX::R_GEE | | Tue Apr 16 1996 08:45 | 16 |
| The system failed MQC's for poor uniformity 21% and
removal rate between the spindles of 1000 ang. We
found that the left carrier exposure was only .004 to
.0045.
We replaced the pad and carriers then began running breakin
wafers. On the second set of breakin wafers, before
the second MQC check a wafer slid out from under the right
carrier.
The system has been cleaned and will need a down force check,
carriers and a pad. Carriers are being built as I type this.
B shift
|
| 7.172 | Down Force checked | SUBPAC::LANDRY | | Tue Apr 16 1996 20:36 | 14 |
| Today......
We arrived to find the system had just broken a wafer. B Shift found
a huge difference in removal between the two spindles. We, along with
Bobby G, performed down force calibration on both spindles. Both were
out of spec a tad bit, but consistant between each. We had expected one
spindle to differ from the other in a major way, but no, they were
close to each other.
One of the carriers was found to be built with an extention ring gap
out of spec. The system (at 7:30PM) is being "broken_in". MQC's to
follow.
A Shift
|
| 7.173 | scheduled DI work done | SUBPAC::LANDRY | | Tue Apr 23 1996 19:48 | 10 |
| The system went down today for scheduled work to be performed
by the contractors on the DI water line. The pad was removed
at this time and the carriers were also changed out. The
brushes were removed and placed in water to remain intact.
They were re-installed once the system was returned to us.
A new pad and two new carriers were installed. Breakin wafers
and MQC's followed with positive results. The system is
cranking product.
A Shift
|
| 7.174 | Broken wafer | FABSIX::R_GEE | | Sun Apr 28 1996 07:51 | 10 |
| At the beginning of the shift we broke a product wafer on
the polish table. A wafer slid out from under the right
carrier on the first run, in the middle of a 120 second polish.
We suspect the fly-out was caused by a bad carrier, it had
high wafer count, 387 and was due to be changed.
B shift
|
| 7.175 | vac sensor | LUDWIG::FINN | | Tue Apr 30 1996 20:35 | 10 |
|
System would not move robot back to unload cassette from load cups, although
end effect had a wafer. Vacuum switch was not seeing the sensor, checked air
pressure, check hose then end effect, then adjusted vacuum sensor. AOK
gave back to ops for continuation of MQC.
A shift
|
| 7.176 | Down force calibration performed today | SUBPAC::TOOKER | | Wed May 01 1996 16:17 | 10 |
| This morning cmp.a2 broke wafers on the pad and it was reported that there was
a difference of ~800 Ang/min in removal rates between the left and right
spindles. John Swenson and I did a complete down force calibration including
E-P regulators. We found that both E-P regulators were OK, but both spindles
were out of calibration by around 10%. After the calibration, a new pad and
new carriers were installed. The MQC wafers that were polished after breakin
had only a 10 Ang/min difference in the left and right removal rate
and the removal rate mean was very close to the mean of the SPC chart.
Jim T. & John S.
|
| 7.177 | SLURRY LEAK | STRATA::WESTPHAL | | Sat May 04 1996 20:14 | 5 |
|
CMP.A2 - Down for a slurrry leak. Pump #1 slurry line had a crack in it.
Removed and cleaned both pump heads and replaced the lines. Tool
was returned to production.
|
| 7.178 | Broken wafer | FABSIX::R_GEE | | Sun May 05 1996 08:15 | 9 |
| Broke a wafer on the polish table. The wafer slid out
from under the right carrier. Checked out the machine
and found nothing. There was 234 wafers on the pad and
283 on the carriers. The system is now running MQC's.
B shift
|
| 7.179 | Broken wafer | FABSIX::R_GEE | | Mon May 06 1996 08:13 | 12 |
| Broke a wafer on the polish table.
The wafer slid out from under the right carrier at lift off.
It was running a 10 sec touchup, both carriers stuck to the
pad. When the right carrier lifted off the pad the wafer stayed
and hit the left. 77 wafers on the carriers and 154 on the pad.
Suspect the crash was a pad or conditioner problem.
B shift
|
| 7.180 | New E-P regulator installed on left spindle | SUBPAC::TOOKER | | Thu May 09 1996 17:21 | 10 |
| Today a new E-P regulator was installed on the left spindle of cmp.a1. After
calibration the +/- 10 lbs of downforce fluctuation previously seen at
downforces greater than 350 lbs. on the old E-P regulator is now at +/- .2 lb.
Strasbaugh now uses the Fairchild T6000 E-P'S (same model that is used on
backpressure) in place of the big Fairchild E-P'S that we usually use for
downforce. The T6000's require different analog counter settings for the
calibration. I will publish these new analog counter settings tommorow.
Jim T.
|
| 7.181 | Fairchild E-P analog counter settings for calibrations | SUBPAC::TOOKER | | Fri May 10 1996 13:23 | 42 |
| To all CMP ET's;
Here are the proper analog counter settings for calibrating the Fairchild E-P
transducers for left and right spindle downforce on cmp.a1/.a2. These analog
counter settings apply only to the spindle downforce E-P's and do not apply
to the left and right backpressure or conditioning downforce E-P's. Please
refer to the Strasbaugh manual for the proper counter settings for those E-P's.
Prior to any spindle downforce E-P calibrations, please check the E-P to see
which model number it is and then use the appropriate analog counter setting
listed below. The adjustments work the same on both models. Adjust the
"ZERO" pot for 10.0 PSI and the "SPAN" pot for 80 PSI. When either the "ZERO"
or "SPAN" is radically adjusted, it is sure to through out the other one, so
be sure to go back and forth between the two until the proper PSI is achieved.
You may have noted that the Strasbaugh manual calls for the "ZERO" pot to be
adjusted to 5.0 PSI. We adjust our tools to 10.0 PSI. We do this (with Stras-
baughs blessing) to bias the spindles with a few pounds of downforce, so that
when the spindles are manually lowered over the load station or cleaning sta-
tion they don't float upwards over time.
Please contact me with any questions or if anyone needs more one on one training
for this calibration.
================================================================================
CMP.A1/.A2 LEFT OR RIGHT SPINDLE DOWNFORCE E-P TRANDUCER CALIBRATION
--------------------------------------------------------------------
FAIRCHILD E-P ANALOG COUNTER SETTINGS
-----------------------
MODEL # 10.0 +/- .2 PSI 80.0 +/- .2 PSI
------------- --------------- ---------------
Z18109-3 580 3410
(old style)
TT6000-06 601 3481
(new style)
NOTE: If any of the E-P's are re-calibrated, then the downforce must
also be re-calibrated.
================================================================================
|
| 7.182 | wafer breakage | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat May 11 1996 06:18 | 13 |
|
Tool crashed at beginning of shift. A vacuum problem
with the right spindle is suspected. We pulled the hub
off and found lots of debris inside, a lot... We cleaned
everything and inspected the tubing and o-rings inside.
The hub was re-installed and re-aligned. A new pad, carriers
and brushes were installed. MQC's were run and tool failed
uniformity twice with no end in sight. Another pad from another
lot was installed. We are awaiting MQC results....
D shift
|
| 7.183 | pad change | FABSIX::B_FINN | | Sat May 18 1996 20:43 | 6 |
|
Changed pad due to wafer count approaching upper limit.
Wafer count 392. System is in MQC.
Brendan
|
| 7.184 | Carrier problem | FABSIX::R_GEE | | Sun May 19 1996 08:09 | 9 |
| The left carrier left a wafer on the pad, the wafer
broke while placing it back onto the carrier.
Found a defect on the carrier film, replaced the carrier
and conditioner disk. The system is running MQC's now.
B shift
|
| 7.185 | lift off delay | STRATA::FINN | | Sun May 19 1996 20:04 | 13 |
|
The Right Carrier was significantly slower in lifting off from the pad
than the left carrier,after polish. Carrier was swapped with the left
carrier and problem stayed with the carrier. We replaced both the
white oring and the check valves on the suspected carrier. Tested aok.
All work was accomplished in between lots to reduce downtime, (your
welcome Jim).
A shift
|
| 7.186 | Condition Arm Down Force Cal | SUBPAC::LANDRY | | Wed May 22 1996 17:50 | 19 |
| The system had experienced much trouble trying to pass MQC's. The
first issue was concerning uniformity. The second issue concerned
the removal rate from spindle to spindle, which had a variation of
~400 � a minute.
Issue one was resolved by performing down force calibration on the
Conditioning Arm, as well as installing a new diamond conditioning
disk. The down force was found to be 5 pounds off, which is quite
substantial when you consider that we condition at 13 pounds DF.
Calibration procedure was thoroughly performed.
Issue two still remains at this time. The problem has been traced to
a carrier. After the early morning MQC attempt (and the arm cal),
the carriers were swapped. The problem shifted to the other spindle,
hence identifying the carrier as the culprit. Due to a vast workload,
Opts people will run as is. At the next MQC check, the problem carrier
(or both carriers, depending on the wafer count) should be changed out.
Doc / Jim T
|
| 7.187 | robot sensor calibration. | FABSIX::L_SHKOLNIKOV | | Thu May 23 1996 06:53 | 7 |
|
* Robot Sensor Adjustment:
The Robot experienced wafer pick-up problems tonight.
The sensor was readjusted and It seems to be working fine now.
Leon
|
| 7.188 | Slurry on Pad during Wet Idle Mode | ASDG::POIRIER | | Fri May 24 1996 20:25 | 10 |
|
Slurry On Pad During Wet Idle Mode:
----------------------------------
We just noticed that slurry is making its way past the rollers in the
pump heads and building up on the pad during Wet Idle Mode.
"D" Shift, please take a look at this problem as we are running out of
time.
thanks,
C Shift.
|
| 7.189 | passdown | STRATA::FINN | | Tue May 28 1996 20:20 | 10 |
|
Completed weekly pm and slurry cal, installed new carriers from rebuild
cabinet. MQC's were started but plagued by wafers fly. Found check valves in
backwards. Reinstalled. Mqc's passed aok.
A shift
|
| 7.190 | particles | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Jun 01 1996 05:27 | 8 |
|
Tool keep failing for high particles. The transfer program
looked good. The conditioner disk was changed again. We looked
at the rinse cycle and it was fine. It was discovered that the
slurry psi was up around 45 psi and slurry was leaking onto the
table during wet idle.
D shift
|
| 7.191 | Robot vacuum problem | FABSIX::R_GEE | | Mon Jun 03 1996 08:16 | 10 |
| The robot went down for failing to pickup wafers. We cleaned
the robot end effector, check all lines for clogs & leaks,
replaced the 1/8" end effector line and adjusted the vacuum
switch. The problem has been narrow down to the vacuum switch
itself, it looks like it will needs to be replaced. We couldn't
find one in stock.
B shift
|
| 7.192 | robot/wiring problems | SUBPAC::LANDRY | | Mon Jun 03 1996 20:21 | 37 |
| This morning, the system was not responding properly concerning
the robot wafer sensor circuit. It was first believed to have
been a faulty vacuum switch. Began looking at the problem.
Opened the electronics cabinet and then rebotted. Could not
home the system. It would do the bridge ok, but the next axis
(robot arm position) wasn't working properly. The arm was trying
to home moving in the opposite direction. When the arm had
extended out to it's physical limit, you could still see it
attempting to go further, as it pulsed repeatably. ESC'd out
and retried several times. The same result was consistant every
time. So, homing each axis individually was tried. All homed
fine except for the robot arm and robot rotation.
Started tracing prints/wires/connectors. Everything was looking
fine. Decided to take apart the connector (RS232) in the elec-
tronics cabinet. The connector goes to the cable which terminates
at the top connector on the robot. Well, we've seen this before
folks, water was in the connector. The wires were corroded pretty
bad. Water had "wicked" it way from the robot all the way back
to the electronics cabinet. Same situation we saw with the
original robot assembly. Of course we don't stock this cable, so
the connections were cleaned in an attempt to temporarily get
around the problem. Success! All axis' were homing as should.
My next concern, could we be so lucky that the vacuum sensor would
now function. Praise GOD! It was responding to changes in
vacuum state. Re-calibrated the switch, check results in manual
and all was fine. Ran two dozen wafers in AUTO CYCLE using the
HANDLING recipe, excellent results.
A cable will need to be ordered (and an RS 232 connector acquired
as well) to replace the one that is in the system now, as it still
remains moist. The corrosion WILL be back. But, I feel we can
resume running for the time being. The system was logged as an
end_repair and logged down for a pad and carriers change. There
are currently NO MQC wafers available in the room.
Doc
|
| 7.193 | robot missed again | STRATA::RIDLON | Eliminate the obvious | Wed Jun 05 1996 03:16 | 10 |
| Robot crashed into a wafer at send cassette. Same problem as yesterday.
Went immediately to the connector and it was soaking wet. Removed the
metal connector jacket and stripped back the cable housing about 4
inches. After drying and cleaning the connector a couple of times input
21 finally toggled when a wafer was picked up in manual. Cycled 25
wafers using no touch with out a mishap. The pad was replaced due to a
larger than acceptable bubble in the center.
b-shift
|
| 7.194 | Robot Cable Replaced / Cable not the same. | ASDG::POIRIER | | Sat Jun 08 1996 10:19 | 16 |
|
Robot Cable Replacement:
-----------------------
The Robot Cable has been replaced and tested. All Robot axes homed
correctly. D Shift will reassemble the Cable Track and replace the
covers.
NOTE: The replacement cable has 3 out of the 12 wires that do
not match the old cable. (color & pin location)
Watch out for this situation if you ever have the pleasure of
changing a Strasbaugh Robot Cable.
C Shift.
|
| 7.195 | head to head removal / carrier problem | FABSIX::R_GEE | | Sun Jun 09 1996 08:06 | 11 |
| The system was down for head to head removal out of spec.
it was +800 ang. and the left carrier was sticking to the
pad, it had a new pad and carriers. We checked down force
per operations request, it looked good. We removed the
carriers, replaced the o-rings and the backing plate o-ring
bolts. The removal is now within 100 ang. between the heads.
B shift
|
| 7.196 | Particles - Cal Var #158 changed from 0 to 1 | ASDG::POIRIER | | Wed Jun 12 1996 20:38 | 12 |
|
* Load Station Pedestals:
----------------------
Gwen noticed scratches in the center of both wafers consistent with
the round shape of the Load Pedestals. We found silicon debris
embeded in the top surfaces of both Pedestals. They were cleaned
MQC's were run. Particles were decreased but were still out of spec.
Jim T. found calibration variable #158 set to 0 instead of 1. This
caused the vacuum to remain on during the unload segment of the auto
cycle. The paramenter was changed to 1 (no vacuum) and MQC's were run
again. This time the particles were in spec.
|
| 7.197 | Robot | FABSIX::R_GEE | | Tue Jun 18 1996 08:28 | 6 |
| Robot wouldn't pickup wafers, cleaned the end effector.
B shift
|
| 7.199 | bubble on pad/ weekly pm | LUDWIG::RIDLON | Eliminate the obvious | Sun Jun 23 1996 06:37 | 4 |
| Bubble found on pad. Did the weekly while it was down.
B-shift
|
| 7.200 | particles | FABSIX::J_SWENSON | | Fri Jun 28 1996 20:14 | 2 |
| particles failed.
Adjusted scrub brush heights and rinsed system.
|
| 7.201 | Start up A2 | LUDWIG::SWENSON | | Fri Jul 05 1996 20:38 | 3 |
| powered tool up with no problems.
ordered new scrub brushes and retrieved.
obtained new carriers for installation.
|
| 7.202 | Crash and PM | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jul 10 1996 08:16 | 11 |
|
Tool crashed a Metal-1 lot during polishing.
Found pad barely sticking to base SUBA pad.
Basically, it looked like one huge bubble.
The SUBA pad was completely soaked through.
Not too normal from what I've seen in the
past. Cleaned up tool and completed monthly
while I was at it. There are no complete carriers
built-up so it's waiting for carriers and a pad.
BJ
|
| 7.203 | system not detecting vacuum loss | FABSIX::J_SWENSON | | Thu Jul 11 1996 20:25 | 4 |
| wafer flew off right carrier and system did not detect vacuum loss.
measured vacuum at both hubs and found them to be @23in/hg.
suspect clog in within carrier so replaced carrier.
|
| 7.204 | SCRATCHES | FABSIX::J_SWENSON | | Fri Jul 12 1996 20:13 | 11 |
| DUE TO GLITCH TODAY DI WATER WAS LOST.
REQUIRED PAD CHANGE AND CLEAN OF SYSTEM.
PERFORMED PAD CHANGE AND CONDITIONING DISC.
MQC FOUND TO HAVE MAJOR SCRATCHES.
REMOVED SCRUB BRUSHES, RAN MQC STILL SCRATCHES.
INSTALLED NEW PAD AND REPLACED CONDITIONING DISC WITH
WITH ORIGINAL. MQC'S PASSED.
NOTE:: THESE WERE NEW DISCS FROM THE STOCKROOM LOOKS TO BE A PROBLEM.
C-SHIFT
|
| 7.205 | Failed MQC's | FABSIX::R_GEE | | Wed Jul 17 1996 08:04 | 17 |
| Failed MQC's for uniformity and head to head removal.
We did the weekly p.m., replaced the pad, carriers and
condition disk. The head to head removal came in tight
but we found bad scratches coming from the pad. We felt
that the scratches were coming from the conditioning disk.
Replaced the pad and conditioning disk, (we filed the
holes with burrs and wire brushed for loose diamonds).
Ran MQC's again, the scratches are gone and particles
passed, but the uniformity failed at 16 %. More breakin
wafers are being run alone with another set of MQC's.
B shift
|
| 7.206 | right spindle uniformity | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 18 1996 07:41 | 10 |
|
A shift OPS put a WARNING on the right spindle because
the left was in spec and the right was way out, ~22. We
swapped the carriers so MQC's will have to be run to see
if the problem follows the carrier.
D shift
|
| 7.207 | particles | STRATA::SWENSON | | Fri Jul 19 1996 20:38 | 5 |
| bubble in pad and had particle problems on right carrier.
replaced right carrier.
replaced pad.
cleaned system.
put in wet idle.
|
| 7.208 | Wafers sticking | FABSIX::R_GEE | | Mon Jul 22 1996 08:20 | 9 |
| After a pad and carrier change both carriers had problems
with sticking to the pad and leaving wafers on the pad.
We replaced the black o-rings, screws and 1 check valve. The
problem went away.
B shift
|
| 7.209 | PARTICLES | STRATA::WESTPHAL | | Wed Jul 24 1996 20:39 | 3 |
| CMP.A2 - Down for scratches. Suspect the conditioner is loosing diamonds. A
different old disk was already installed and the tool was cleaned up.
Ran out of time. The tool presently sets needing a pad.
|
| 7.210 | blank | SUBPAC::LANDRY | | Mon Jul 29 1996 19:52 | 11 |
| Today, the system failed MQC's for uniformity. The pad and the
carriers were changed out to correct this problem. MQC's passed
after this activity was completed.
Late in the shift, the left carrier was having problems picking up the
wafer from the polish table. The viton o-ring for the plate circum-
ference and the three screws/o-rings were replaced. Positive results
followed the activity.
A shift
|
| 7.211 | bubbles | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Aug 02 1996 06:43 | 6 |
|
the pad was replaced due to a large bubble in the
middle.
D shift
|
| 7.212 | broken wafer | FABSIX::R_GEE | | Mon Aug 19 1996 07:57 | 13 |
| A product wafer slid out from under the left carrier during
the last part of a 130 sec PMD polish. 102 wafer on the pad
and 51 wafers on the carriers.
We checked the system out and found nothing wrong. The carriers
had slight damage so we could still check the wafer exposure height.
The right carrier was set between .005 & .006, the left carrier was
set between .007 & .0085, to high. We believe this was the reason
for the fly out. Replaced the pad, carriers and conditioner disk.
B shift
|
| 7.213 | Dropping Wafers At Lift Off / Right Hub O-Ring Replaced | ASDG::POIRIER | | Sat Aug 24 1996 16:53 | 10 |
|
Right Spindle Leaving Wafers On Pad:
-----------------------------------
The right spindle has been repeatedly leaving wafers on the pad at
lift off today. This condition eventually ended in wafer breakage.
The 2nd o-ring (counting from the center outward) on the right hub
was replaced. The system is now running MQC's.
C Shift.
|
| 7.214 | two vacuum problems | SUBPAC::LANDRY | | Sun Aug 25 1996 20:29 | 10 |
| A couple of vacuum problems today......
* The robot vacuum was inconsistant. Replaced the small tubing thats
attached to the end effector. All set.
* The robot missed picking up a wafer from the right load/unload cup.
Found the vacuum to the pedistal was releasing slower that the left.
The system was rebooted and a dozen wafers were cycled. All set.
A shift
|
| 7.215 | Left Spindle Vacuum Errors | ASDG::POIRIER | | Fri Sep 06 1996 19:53 | 8 |
|
Left Spindle Vacuum Trouble:
---------------------------
The system experienced repeated vacuum errors on the left spindle.
We're going to take a look at the left carrier & left hub o-rings
shortly.
C Shift.
|
| 7.216 | | STRATA::WESTPHAL | | Sat Sep 07 1996 20:23 | 17 |
|
================================================================================
EQUIPMENT HIGHLIGHTS:
CMP.A1 - Down for poor uniformity. Replaced the pad.
CMP.A2 - Down for slipping wafers from the right carrier on every lift off.
replaced the carrier plate O-ring and ran 6 wafers with no further
problems.
CMP.B2 - Weekly PM is in the incomplete note file.
|
| 7.217 | LOOSING WAFERS | STRATA::WESTPHAL | | Sat Sep 07 1996 20:24 | 6 |
|
CMP.A2 - Down for slipping wafers from the right carrier on every lift off.
replaced the carrier plate O-ring and ran 6 wafers with no further
problems.
|
| 7.218 | Carrier sticking to the table | FABSIX::R_GEE | | Tue Sep 10 1996 08:40 | 2 |
| The right carrier was sticking to the table. Replaced the
black o-ring and the backing plate screws, allset.
|
| 7.219 | new load cups bridge location | STRATA::FINN | | Tue Sep 10 1996 20:38 | 10 |
|
Installed new left and right load station chucks. Retaught robot.
Upon reboot bridge drove to left travel limit switch. Found both
Home and Load software locations at 0. Retaught bridge home, load
and polish positions and realigned carrier to load stations and clean
station positions. Ran test wafers in HANDLING program
Jim and A shift
|
| 7.220 | Load adjustments/Slurry lines | FABSIX::J_SWENSON | | Fri Sep 13 1996 15:11 | 7 |
| Adjusted left and right load buckets. Retaught robot for left and right
load positions. Ran verification wafers. Replaced tygon slurry lines
with Masterflex tubing. Checked slurry flow. Returned system to
production.
Jim/C-shift
|
| 7.221 | SYSTEM CRASH/LEAD SCREW LUBE | STRATA::SWENSON | | Fri Sep 13 1996 20:03 | 8 |
| System crashed, left carrier flew a wafer and made quite the mess.
Cleaned tool. Replaced both carriers. Replaced pad and conditioned.
Lubricated lead screw. Adjusted oil flow, marked off oil level.
25 wafers no touch were run, handling looked fine.
Returned system back to production.
C-Shift
|
| 7.222 | re-constructed a carrier | SUBPAC::LANDRY | | Sat Sep 14 1996 18:26 | 7 |
| We had some problems today with a carrier. The left carrier would NOT
come up off the table when it's time was due. Had to halt the process
to get the spindle to raise. Changed out the 3 o-rings on the plate
retaining screws. Also, the white o-ring was repositioned as well.
All is fine.........
Hawk & Doc show
|
| 7.223 | PARTICLES | LUDWIG::WESTPHAL | | Wed Sep 18 1996 20:22 | 4 |
| CMP.A2 - Down for failing MQCs for particles. Found the brush heights to be too
low. Adjusted the same and cleaned the process area and conditioner.
Tool failed again for high particles. Ran out of time.
|
| 7.224 | Brushes changed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Sep 19 1996 08:03 | 5 |
|
tool down at shift change for partticles. Brad asked to
change the brushes. Tool came up after the brushes were changed.
D shift
|
| 7.225 | BRIBGE NOT OSCILLATING? | STRATA::WESTPHAL | | Fri Sep 20 1996 20:11 | 4 |
|
CMP.A2 - FYI it was noticed that the bridge was not oscillating during polish.
Was a process change made?
|
| 7.226 | carriers sticking | STRATA::RIDLON | Eliminate the obvious | Sun Sep 22 1996 07:32 | 14 |
| Carriers sticking to pad. Changed cond disk with no change. Checked
carriers and replaced the 3 plate screws (orings shot) with no change.
Changed carriers but had trouble loading. The right one wouldn't load.
Swapped carriers and now neither would load. Swapped them back and
neither would load. Checked vacuum going to spindles and both seemed to
be low (but now sure what they should be so it could have been ok).
Removed the vacuum lines from solenoids 16 and 17 and vacuum was good
out of solenoids. Reinstalled lines and carriers loaded. Good enough
for now. Ran a couple of wafers through to check for carrier sticking
to pad and that looked good as well. Over to production for mqc's.
B-shift
|
| 7.227 | Particles | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Sep 26 1996 07:49 | 18 |
|
Tool down all night for high particles. Tried the following:
changed pad
cleaned tool
changed brushes
checked brush heights
changed and wire brushed conditioner disk
checked recipes and programs
checked slurry flow
checked surfscan recipe
checked particles with B2, B2 below a 1000, A2 ~4500
latest move: changed pad with one from new lot... awaiting
MQC results.....
D shift
|
| 7.228 | CMPA-TOOL particle update | STRATA::WOOLDRIDGE | Pleasure, Spiked With Pain | Thu Sep 26 1996 16:58 | 78 |
|
Strasbaugh particle problem update: 9/26
-Kyle
Today:
o Repeated no touch recipe (eliminating IC pad) and particle counts were good.
o Particle checks on both machines were in the 4000-6000 range
o Because of low pad count on A1, pad was conditioned for an extended
time. New MQC was run- no change.
o Changed conditioning disk on A1- counts went up? - put old disk back on
o Pad was scrubbed down with a brush and rinsed repeatedly on A1. No
change.
o Noticed that the MQC wafers after polish looked like the polish pad?
This is the first time I have seen this. The wafers show the pad
perforation marks perfectly.
o Looked at pad expiration dates of the IC lots we have in the
drawer- one expired Aug. 27th and the other expires Oct 1st.
(Rodel claims pads are good 6 months after expiration date)
o Decided to change pad on A1 and install a pad with expiration date
of Jan 97'. Conditioned & broke-in the pad with NEWPAD recipe.
Ran MQC's and the counts were 4288 & 3323. Interestingly, no pad
perforation marks were seen on these wafers however.
Followed this by running a modified MQRINSE recipe: Defects went
down to 200.
o Ran a modified MQC recipe with extended rinse at the end of the
recipe on CMP.A2. DEFECTS WERE REDUCED TO 267 on one head and 245 on the
head. (no pre-measurements were taken so in fact the defects were
actually lower) Specifically changed was:
Step 3: 20 seconds polish time
40 rpm spindle speed
40 rpm table speed
Step 4:
60 seconds polish time
20 rpm spindle speed
60 rpm table speed
The difference here is simply the addition of a step 4 rinse time with
different spindle/table speeds & changing the final rinse step from
10 seconds to 60 seconds. The recipe name is MQRINSE.
o John P. has cut a speedfam pad down to try on A2. There is also
another pad from the batch now on A1 on top on the pad cabinet.
(good through Jan '97) if we want to look at that.
o Speedfam tools defectivity OK?
Musings:
- defects are hard to remove, but an extended rinse brings defects
into a very low level.
-Pads may be partially the problem- but this is not fully
understood since the new pad on A1 did not qual.
-It appears for what ever reason, the slurry is NOT rinsing off the
wafers. This could be related to the pad/polishing OR to something
going on with the slurry/delivery system.
-It appears we can run the process currently, but the process recipes
will need to be modified to reflect steps 3 & 4 in the MQRINSE recipe.
A TDCO/edco will need to be put in place tonight (pss) in order to
reflect this change until the process/hardware fix is fully
understood. This is simply an extension & addition to the rinse step.
If needed, I can be reached at home @ 464-5721
/Kyle
|
| 7.229 | broke wafers | STRATA::FINN | | Mon Sep 30 1996 21:17 | 9 |
|
System crashed, operations heard alarm and found right head stuck to table and
left head raised with broken wafer on pad, cleaned system, replaced pad,
installed one carrier and built and installed second carrier, ran pad cond, and
breakins, MQC in progress.
A shift
|
| 7.230 | crashed | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 01 1996 05:27 | 8 |
| Tool crashed while breaking in. The breakin wafers in the fab are
pretty thin. No carriers for this tool yet. Other priorities have
prevented their assembly. Will try to get to but we have a fire drill
today so doubt if we we'll have the time. This crash was not induced by
the slurry problem we had tonight.
B-shift
|
| 7.231 | Wafer Breakage | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Oct 02 1996 07:42 | 19 |
|
Three instances in 45 minutes relating to vacuum.
First, a wafer on the right carrier wasn't seeing
good vacuum and needed a personal touch. The next was
the left carrier leaving a wafer on the table. Finally,
the robot failed to pick up a wafer in the left send
elevator. During polish, the final two wafers were on the
table and the wafer on the right spindle slid out. I was
looking at the shuttle area when it happened and I tried
stopping the tool quickly by opening the polish door BUT
SOMEONE USED NUTS TO DEFEAT THE MICROSWITCHES ON BOTH POLISH
DOORS!!!! Fortunately, Barry saw it and hit the EMO as I was
in motion for my button. The tool was cleaned up and new
pad and carriers were installed. Upon install, I found a
a small slice on the 1/4" vacuum line on the outside of the left
spindle, repaired same.... Tool was turned over to OPS for
break-in and MQC's.
D shift
|
| 7.232 | NO WAFER ERROR/ SLIPPED WAFER | STRATA::WESTPHAL | | Wed Oct 02 1996 20:55 | 11 |
| CMP.A2 - Down for "NO WAFER AT LEFT UNLOAD" errors. Ran 14 wafers using the
handling recipe. Watched the chuck vacuum sensors and for any obvious
problems. Didn't see anything wrong. Ran 14 more wafers on a recipe
using an abbreviated polish time. On the last run it brokes a wafer.
It came out of the left carrier during polish. Cleaned up the process
area, conditioner, and load stations. Changed all consumables
conditioned the pad and returned it to production for BREAKINS.
Because no problems with the original error were found. Engineering
requested that the a dozen wafers be run and the tool observed. If
no problems occur, return it for MQCs.
|
| 7.233 | Removal rates misc. repairs | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Oct 03 1996 07:20 | 31 |
|
The tool was down when we came it and it was in the
middle of VERIFY. It failed three times for poor vacuum
on the right carrier. The right load cup rinse jet wasn't
aiming at the cup so the wafers were kind of dry at load
and had slurry after polish. The robot was also having
problems trying to pick up wafers at SEND and LOAD. Found
the 1/8" line on the end effector hanging out and catching
The jet was repositioned and 1/8" repositioned. The tool
then ran ~36 wafers for verify and had no problems. The
tool failed MQC's for low removal rate. After looking at
at the rate chart for A2 with OPS it shows a decrease trending
since last week which indicated something was heading south.
We checked the fairchild transducers and the left was coming
in at 70psi. It was tweaked up to 80psi. The right was fine.
The downforce was checked on both heads and both had force errors
of ~4. Downforce calibrations were done on both and brought
in at .41 on the left and -.1. The left send elevator wouldn't
home. We pulled that out and found two things.... The drain
for the dump solenoid on the RIGHT SEND fell off and the water was
flowing right onto the LEFT SEND elevator wiring connections,
repaired same. We also found the home sensor for the LEFT SEND was
pinched under the elevator and was shorting out. These two
items are most likely the cause of the load problems we've seen
lately. All this work and I don't think the removal problems
have been corrected. A new pad had been installed and is ready
for break-in and MQC's.
D shift
|
| 7.234 | Wafer load problems | SUBPAC::TOOKER | | Thu Oct 03 1996 17:00 | 18 |
| Today cmp.a2 went down due to wafer loading problems. Wafers were not
properly seating in either the right or left carrier. After checking the
spindle to load station alignmnent, it was discovered that both spindles
were about 1/2 inch too far to the left of the load station. After re-
homing the bridge and re-checking the spindle to load station alignment,
the alignment was perfect. After running the bridge back and forth several
times from the load station to the polish table, the bridge had again
drifted about a 1/2 inch to the left of the load station. The cause of the
bridge drifting turned out to be an extremely loose bridge drive belt.
After tightening the drive belt, the bridge drifting went away. The load
stations were also re-aligned and the hard down software variable was in-
creased from 1000 to 1200 counts to give the spindles a little for force
when loading. As a part of troubleshooting this problem, it was necessary
to defeat both of the side door interlocks with tie wraps. After completing
the work, the tie wraps were removed and the interlocks were once again
operational.
Jim Tooker
|
| 7.235 | low polish rate/slurry status | LUDWIG::WOOLDRIDGE | Pleasure, Spiked With Pain | Thu Oct 03 1996 17:47 | 19 |
|
Low CMP polish rate- UPDATE:
A new batch of slurry (lot #2h-16-96-1) was manually pumped to
CMP.A2 due to the problems we are currently having with low rates.
The results were:
head 1-1300
head 2-1115
Directly after this, the slurry from the day tank was hooked back up
and the results were as follows:
head 1-1132
head 2-1054
Based on the above, I have asked Ashland Chemical to dump the current
day tank and replenish the slurry with the new batch. We should have
new slurry by 6pm or 7pm tonight. The change over should be transparent
to operations. Unfortunately, there is only enough slurry of this
batch to tide us over through the weekend. Then a new batch will have
to come on line.
- Kyle
|
| 7.236 | slipped wafer | STRATA::WESTPHAL | | Fri Oct 04 1996 20:44 | 10 |
|
CMP.A2 - Down for slipping a wafer. Tool was cleaned up and consumables
replaced. Tool was returned to production.
|
| 7.237 | crash | STRATA::WESTPHAL | | Sat Oct 05 1996 20:10 | 3 |
| CMP.A2 - Down for crashing 2 product wafers. Process area was cleaned up and
all consumables were changed. Conditioner was cleaned. Tool sets
needing only MQCs.
|
| 7.238 | slurry pmp 1 | STRATA::RIDLON | Eliminate the oblivious | Sun Oct 06 1996 00:41 | 10 |
| While running NEWPAD recipe noticed that the pad was kinda dry. My
technician instincts kicking in I quickly halted the machine. Ahhhhh
no crash....amazing considering that the pad was completely dry!!!
Ran slurry flush and pump 1 wasn't rotating. Isolated problem to the DC
motor control card in the electronics cabinet (P/N 06-12023-00, VP/N
106668). Replaced and tested/cal'd fine. INspected pad and no damage
could be seen. Only 197 wafers on pad so it was not changed.
B-shift
|
| 7.239 | CRASH. | STRATA::RIDLON | Eliminate the oblivious | Mon Oct 07 1996 08:08 | 8 |
| CRASH, and just like that two product wafers turned to sand. Root cause
for crash suspected to be slurry flow. Air bubbles found in supply line
in rear vmb. CDU in slurry room pumping very slowly. Called ashland.
Filters switched and flow came back to normal.
New pad, carriers, cond disk. Needs mqc's.
B-shift
|
| 7.240 | Furon valves ordered | SUBPAC::LANDRY | | Mon Oct 07 1996 20:37 | 15 |
| Per Engineerings request, the 3-way valve for the slurry distribution
was checked out. We were checking to see if DI water was leaking by
the 3-way valve, hence diluting the slurry and/or supply. This work
was done in leu of the low removal rate being seen on all the tools.
What we did find was that both 3-way Furon valves were leaking by.
We tried re-building a valve, as we don't have any in stock. The per-
formance was better, but still not good enough.
Jim T has ordered several of these valves. They are being rushed in
for tomorrow. The 1/4 turn slurry valve shut-offs to pumps 1 & 2 are
currently in the "off" position. Please leave the valves off until we
install the new valves when they arrive.
A shift
|
| 7.241 | weekly and monthly | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 08 1996 06:01 | 6 |
| Started the weekly and monthly pm's. Most of both have been completed.
The check sheets have been forwarded to Doc and Bob for A-shift
completion.
B-shift
|
| 7.242 | 3 way valves installed | SUBPAC::LANDRY | | Tue Oct 08 1996 20:33 | 18 |
| The Furon valves for the slurry distribution/pump flush arrived
today. They were installed and tested with positive results.
We also picked up where Mitch left off on the Monthly PM. The
PM is now completed.
New software was also installed today. The current Rev is now
version 4.0. After the software was installed, we came across
a couple of problems. We needed to change the state of some of
the calibration variables to correct. There currently exists
two problems which will need to be addressed. The Send tank dump
valves are not responding correctly all the time and the "dunk"
performance of the send cassettes is off. We are currently working
the issue with Strasbaugh. These problems do NOT necessitate that
the system remain down. A warning has been logged in RTC.
A shift
|
| 7.243 | right side high stddev. | LUDWIG::RIDLON | Eliminate the oblivious | Wed Oct 09 1996 04:15 | 8 |
| Failed mqc's X5 for right carrier high stddev. After the first 2
A-shift changed the right carrier. MQC's still came out high. B-shift
swapped the left and right carriers. MQC still came out high. Checked
the run out on the right carrier and it was great. Pulled the pad and
it came off way too easily. New pad was installed and conditioned.
Ready for mqc's.
B-shift
|
| 7.244 | Send cassette water dunk featuer now operational | SUBPAC::TOOKER | | Thu Oct 10 1996 16:48 | 7 |
| Today the old revision of the Strasbaugh software (4.16.3) was reloaded onto
cmp.a1 & cmp.a2. This software version will allow us to use the send cassette
water dunk feature. Strasbaugh is implementing a fix to software version
4.20 that will give all the new features of 4.19 plus the send cassette water
dunk feature. All warnings have been removed from cmp.a1 & cmp.a2.
Jim T.
|
| 7.245 | HIGH PARTICLE / POOR UNIFORMITY | LUDWIG::WESTPHAL | | Sat Oct 12 1996 20:59 | 7 |
| CMP.A2 - Down for high particles and poor uniformity. For uniformity changed
the pad. The high particles were on the wafer that came off the right
head. The right scrub brush intermittently does not turn unless you
physically help it. The motor appears to be bad. Ordered the part
from stock but could never get a hold of anyone. Tool presently sets
in wet idle still needing break ins and MQCs.
|
| 7.246 | brush motor | LUDWIG::RIDLON | Eliminate the oblivious | Sun Oct 13 1996 03:11 | 6 |
| Removed the brushes and ran both in diagnostics. The right was actually
fine and the left one bad. REplaced the left one and installed/adjusted
the brushes. Waiting on MQC's.
B-shift
|
| 7.247 | passed | LUDWIG::RIDLON | Eliminate the oblivious | Sun Oct 13 1996 22:01 | 2 |
| MQC's passed. The left remained good at less than 500 and the right
came down to ~1000.
|
| 7.248 | robot crash | LUDWIG::RIDLON | Eliminate the oblivious | Mon Oct 14 1996 08:14 | 6 |
| Robot crashed into a wafer on the right send. Cleaned up mess. cycled
some wafers with the handling recipe. MQC's were ran using the handling
recipe, which passed.
B-shift
|
| 7.249 | TDCO on line | STRATA::WOOLDRIDGE | Pleasure, Spiked With Pain | Tue Oct 15 1996 16:52 | 3 |
| I put a TDCO on line for an added rinse step to reduce particle levels.
Assuming this works out ok, I'll spec it.
-Kyle
|
| 7.250 | Dropping wafers | FABSIX::O_WHITFORD | | Wed Oct 16 1996 23:55 | 5 |
| Right carrier dropping wafers on lift-off after polish cycle. Noted pad
count approaching max, replaced pad and both left & right carriers, ran
10 pad condition cycles and turned over for MQC's.
Dave W.
|
| 7.251 | Carrier staying on table, wafer not blowing off | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Oct 17 1996 07:17 | 8 |
|
During pad break-in, the left carrier kept staying
on the table as well as the wafers weren't blowing off
into the load cup. Took apart carrier and found both
valves installed backwards. Tool finished break-in
without any problems and needs full MQC's.
BJ
|
| 7.252 | WAFER BREAKAGE | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Oct 18 1996 05:06 | 8 |
|
Tool crashed two product wafers. Problems found
were the right carrier had exposure out of range and
the pad was practically floating on the SUBA pad. See
note 9.11 for more details...
D shift
|
| 7.253 | PVA BRUSH FELL OFF | LUDWIG::WESTPHAL | | Fri Oct 18 1996 17:19 | 2 |
| CMP.A2 - Down for the PVA brush falling off. Ordered a new one from stock and
installed it.
|
| 7.254 | air motor replaced | FABSIX::J_SADIN | Freedom isn't free. | Sun Oct 20 1996 11:54 | 7 |
|
cmp.a2 - replaced right air brush motor (old one squeaking loudly).
Checked brush height, ok.
|
| 7.255 | uniformity | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 22 1996 06:26 | 7 |
| AFter b3 and a1 crashed we decided to increase step 3 of the mqc recipe
by 5 seconds. Particles passed (barely) but uniformity failed. Pad
count at 386 so it was changed. It will be conditioned for breakins by
7:30.
B-shift
|
| 7.256 | Wafer breakage | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Oct 24 1996 08:12 | 6 |
|
The tool crashed to no reason. Tool was cleaned up and
the weekly PM was completed.
D shift
|
| 7.257 | A2 Crash | FABSIX::J_SWENSON | | Thu Oct 24 1996 19:31 | 16 |
| system crashed taking out both carriers.
1. cleaned tool and replaced pad and suba
2. replaced carriers 1 and 2
3. ashland chemical called and said that they had a float sensor
problem which in turn shut the slurry flow off. ( phone call came in
5 min after A2 crash, see Earls crash report.
4. Ashland has requested time to investigate this problem further.
ie. try to recreate error, But due to excessive work load (32 lots)
request was denied.
C-shift
|
| 7.258 | Robot loading problems | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Oct 25 1996 05:49 | 10 |
|
The robot kept having loading problems. Several homing
sequences and a power down couldn't correct it. Leon tweaked
the sensor switch and it ran fine after that.
D shift
|
| 7.259 | Wafer Crash - No Slurry Flowing | ASDG::POIRIER | | Fri Oct 25 1996 20:14 | 10 |
|
Wafer Crash:
-----------
The system broke 2 product wafers at 6:30 tonight. Ashland called
to say there was no slurry flowing when we heard the machine groan.
Earl ran to the tool but he was a few seconds too late. This is
the same senario as yesterdays crash on A2. See Earl's wafer crash
report for more details.
C Shift.
|
| 7.260 | No vacuum on left carrier | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Oct 26 1996 04:52 | 13 |
|
Installed new carriers after C shift crash. New
carriers installed but the left failed for vacuum.
After opening up the carrier, no o-ring was found inside.
Installed o-ring and the tool passed MQC's and is now up and
running.
D shift
|
| 7.261 | Crash update | LUDWIG::RIDLON | Eliminate the oblivious | Tue Oct 29 1996 05:43 | 8 |
| Had a couple of crashes tonight. The weekly was performed
after the first crash. Both crashes were dummies (with
plenty of oxide). The first was unexplainable, the second had
some robot problems, which were taken care of, but when the wafers got
to the table it hadn't conditioned in awhile so there probably wasn't
enough slurry (the pad was kept wet though).
B-shift
|
| 7.262 | POOR UNIFORMITY | STRATA::WESTPHAL | | Thu Oct 31 1996 19:38 | 5 |
| CMP.A2 - Down for poor uniformity. There were 230 wafers on the pad so it was
changed. The conditioner was changed out due several spots showing
wear. The process area was cleaned up. Tool passed MQCs and was
returned to production.
|
| 7.263 | Slurry delivery and bubbles | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Nov 01 1996 06:00 | 13 |
|
The tool was given to us around 03:30am for the
slurry change over to barrel feed. The tool was
converted over and slurry flow was adjusted in software.
The 3-way slurry valves were replaced as well.
When OPS went to use the tool, several bubbles had
formed so we had to change the pad. The tool is turned
back of to OPS for MQC's.
D shift
|
| 7.264 | Robot Vac Switch / Left Spindle Vac Error / D.I.- SLurry Valves | ASDG::POIRIER | | Fri Nov 01 1996 19:31 | 30 |
|
Robot pick-up problems:
----------------------
The robot vacuum switch was recalibrated this morning due to pick-up
problems. Jim T. increased the end effector blow off pressure slightly.
Jim thinks the puddle of D.I. water on top of the robot may be getting
drawn into the end effector tubing. This condition might be the cause
of the vacuum switch calibration drift we've been seeing.
Left Spindle Vacuum Errors:
--------------------------
The systen had numerous errors for "Left Spindle Vacuum Not Found".
The Barksdale pressure switch on the left spindle was adjusted to
13 in/hg. No Spindle Vac Errors for the last 4 hours.
Slurry/ D.I. 3 Way Valve Problems:
---------------------------------
The Furon valves on the back of the tool were getting a burst of air
during every conditioning cyle. This condition was causing D.I. water
to get drawn into the house slurry system. Jim T. called Strasbaugh
and was told to remove the exhaust lines from the manifold in the
pnuematic cabinet. After the lines were removed, the D.I. back flow
problem ceased. Thhe Strasbaughs can now be connected back to the house
slurry system.
C Shift.
|
| 7.265 | Barksdale ain't the problem | SUBPAC::LANDRY | | Mon Nov 04 1996 19:35 | 8 |
| While performing the Monthly pm today, we installed a new Barksdale
pressure switch on the left spindle assembly. Unfortunetly, the new
switch is responding the same way as the previous one. And yes, we
did setup the switch per the Strasbaugh manual procedure. The system
is still running under a warning statu for this issue.
A shift
|
| 7.266 | robot | LUDWIG::RIDLON | Eliminate the oblivious | Tue Nov 05 1996 04:24 | 5 |
| Robot started missing wafers in the left send cassette. Ended up having
to recalibrate the left send 0 position to correct problem.
B-shift
|
| 7.267 | Right carrier leaving wafers on pad at lift-off | FABSIX::R_POIRIER | | Tue Nov 05 1996 06:57 | 10 |
|
We had a problem with the right carrier. It was leaving
wafers on the pad at lift off. We took the carrier apart.
Replaced check valves, O-ring, and carrier screws.
No problems since then.
B Shift
|
| 7.268 | Left & Right Spindle Rotory Unions Replaced | ASDG::POIRIER | | Sat Nov 09 1996 19:08 | 25 |
|
Left Spindle Vacuum Problems:
----------------------------
The system has been intermittently erroring for various Left Spindle
vacuum errors all week. This morning the Bridge deservoed during an
auto cycle for a "no vacuum found on left spindle" error.
1) The left & right spindle vacuum was checked at the hubs. (24-26"/hg)
2) The Barksdale Vacuum switches in the Bridge were checked and
readjusted. The left alarmed at 12"/ hg and the right at 8"/ hg.
Both were set to 15"/hg per the Strasbaugh manual.
3) With the vacuum ON and reading 26"/hg at the hub, a slight lifting of
the vacuum supply tube in the Bridge caused the vacuum to drop to
12"/hg on the left spindle and 0"/hg on the right spindle.
At this point we concluded that both spindle rotory unions were BAD.
Both rotory unions were replaced and 4 new o-rings were installed on
both the left and right hubs. At the present time, we're mounting
the hubs and starting the hub alignment procedure. "B" shift will
be finishing up the hub alignments, installing a new pad and
turning the tool over to Mfg for MQC's.
C Shift.
|
| 7.269 | Hub Alignments | FABSIX::R_POIRIER | | Sun Nov 10 1996 21:01 | 6 |
| On Sat. nite we did the Hub alignments for both spindles, after
the Rotary Union changes were done on C shift. Turned tool back
over to OPS.
B shift
|
| 7.270 | Vacuum/ | FABSIX::R_POIRIER | | Mon Nov 11 1996 04:08 | 10 |
| We were having two problems. Right carrier was leaving wafers on the
pad at lift off, and "left/right spindle off" errors.
We found that the rotary union for the right spindle needed to be
tightened. This took care of the wafer vacuum problems.
Did slight adjustments to the Barksdale switches and this got rid
of the spindle off errors.
B Shift
|
| 7.271 | more on hoover | LUDWIG::RIDLON | Eliminate the oblivious | Mon Nov 11 1996 07:06 | 8 |
| Just an fyi to let everyone know that we put a vacuum gauge in line on
both the right and left spindles. The "spindle vacuum off" alarms were
happening at cycle start and we saw the vacuum go as low as 8 inHg when
the load chucks checked for wafers but then it would go right back down
to 24-25 range. The vacuum gauge is still in line on the left spindle
for your viewing pleasure.
B-shift
|
| 7.272 | TUB OVERFLOW ERROR | STRATA::WESTPHAL | | Wed Nov 13 1996 19:40 | 4 |
| CMP.A2 - Down for "Tub drain overflow" error. The tub overflow sensor
sensitivity got out of adjustment. Adjusted the same and
tested several times. returned the tool to production.
|
| 7.273 | Polish Tub Water Level Alarms. | ASDG::POIRIER | | Thu Nov 14 1996 19:28 | 11 |
|
Polish Table Tub High Level Alarms:
----------------------------------
The tool is intermittently alarming for the Polish Tub water level.
The level sensor needs a sensitivity adjustment. We've been letting it
alarm because MFG needs the tool and the tool is running GREAT at this
time. "D" shift, please readjust this sensor at the first available
opportunity.
C Shift.
|
| 7.274 | Pad change | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Nov 15 1996 06:20 | 7 |
|
Tool failed for deviation and range, replaced pad.
D shift
|
| 7.275 | Polish Tub Level Errors / Remote Vacuum Pump | ASDG::POIRIER | | Fri Nov 15 1996 19:27 | 18 |
|
Polish Tub level Errors:
-----------------------
The system errored numerous times today for Polish Tub Level errors.
Even though it errored repeatedly, it was less frequent than
yesterday. The Polish Tub level sensor still needs a little more
adjustment. We didn't adjust it today due to tool availability.
Remote vacuum cabinet pump:
--------------------------
The vacuum pump in the remote vac cabinet is blowing water out of the
exhaust muffler. There may be a problem with the float switches in the
water collection tank in the cabinet. We need to verify the top and
bottom float switches are working correctly at the first available
opportunity.
C Shift.
|
| 7.276 | Pad Replacement Due To Poor Uniformity | ASDG::POIRIER | | Sat Nov 16 1996 19:23 | 10 |
|
Poor Uniformity:
---------------
A Pad change is currently taking place due to poor uniformity.
The typical (salad bowl) profile has appeared once again.
Current status is bgn_repair.
C Shift.
|
| 7.277 | Furon's replaced | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Nov 19 1996 06:25 | 5 |
| Replaced the Furon slurry/di valves with 2 Burkett valves per pump.
Calibrated slurry flows.
B-shift w/ AQ
|
| 7.278 | Wafer Detected On Robot Errors | ASDG::POIRIER | | Thu Nov 21 1996 19:37 | 9 |
| "Wafer Detected On Robot" errors:
--------------------------------
The system experienced numerous errors for "wafer detected on robot".
This condition also knocked the tool out of auto cycle. This problem
hasn't occured during the last four hours. If this problem persists
into D Shift, check the robot vacuum tube.
C Shift.
|
| 7.279 | Robot issues | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Nov 23 1996 05:15 | 9 |
|
The robot had been removed and inspected on C shift and
re-installed. when we came in, we checked all of the robot
positions for verification, replaced pad, brushes and
carriers. Tool didn't have any problems with the robot
during break-ins, MQC's or product runs all morning.
D shift
|
| 7.280 | info for 11/22 end effector vac. problem | FABSIX::J_SWENSON | | Sat Nov 23 1996 18:42 | 16 |
|
Checked stockroom for spare furon valve none in stock
Rushed in valve, recieved 11/23
Cleaned out valve as best as posible (44)
Reassembled robot and valve
Set end effector vac. switch.
If the intermittent vac. problem comes back there is a new
Solenoid Valve in the Strausbaugh roll around
J.T./C-Shift
|
| 7.281 | Wafer breakage.... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Nov 30 1996 06:14 | 10 |
|
Tool crashed two product wafers in segment #3.
The crash was caused from a wafer sliding out of
the left carrier. The only thing we found was the
left carrier expossure was at -4 to -7. The uniformity
was ok previous to the crash. The crash form was posted
and tool cleaned up. MQC's will be starting shortly...
D shift
|
| 7.282 | slurry loss detect installed | FABSIX::B_FINN | | Tue Dec 03 1996 19:25 | 7 |
|
Slurry loss sensor install for "slurry #1 loss detect", on I/O
input 29. It will inhibit the start of a cycle if slurry # 1 loss is detected,
and generate an "end cycle" if loss is detected during a run.
A shift
|
| 7.283 | Pad change due to MQC's results. | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Dec 05 1996 04:38 | 10 |
|
Product coming off tool with wacked out readings,
8000A on the left with 900A on the right. PSS had them
run full MQC'S. The tool was in spec for removal but
out on uniformity, particles and scratches. All in all,
there was a problem with the lot but the tool needed TLC
anyways due to the MQC results.
D shift
|
| 7.284 | Pad change | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Dec 07 1996 01:20 | 7 |
|
A pad change was needed due to failing MQC's
for bad uniformity. There was actually a bubble
around 12" around the center.
D shift
|
| 7.285 | POOR UNIFORMITY | FABSIX::B_WESTPHAL | | Wed Dec 11 1996 19:22 | 4 |
|
CMP.A2 - Down for poor uniformity. The pad and conditioner were changed and
the tool was cleaned up and returned to production.
|
| 7.286 | Robot crash | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Dec 12 1996 06:19 | 13 |
|
The robot went to unload the 2nd wafer of the two that it was
placing into the receive elevator and didn't release it. It didn't
alarm and went to pick up the next set of wafers from the send
elevator and crashed into the next wafer that was suppose to have
been picked up. The tool did not error for having a wafer on the
robot before it loaded more wafers nor after the crash. The robot
kept trying to drive to the elevator. The tool was EMO'ed and
recovered without any problems. Wafers were run with the NOTOUCH
recipe and the problem did not repeat.
D shift
|
| 7.287 | Vacuum problems | FABSIX::J_SWENSON | | Thu Dec 12 1996 19:23 | 13 |
|
Replaced solenoid 44
Replaced vacuum line to robot.
Set vacuum switch.
System as of 0715 in verify. Tool running dummy wafers. to verify
fix.
C-shift and J.Tooker
|
| 7.288 | Uniformity, near-crash, vacuum error | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 13 1996 06:55 | 17 |
|
A pad change was needed due to failing MQC's
for bad uniformity.
The tool then needed another pad change because of
scratches and uniformity.
The tool finally passed MQC's and was running product
when a wafer slid out of the right carrier and the tool was
EMO'ed before crashing. The right carrier was replaced and
MQC's needed to be run again. While running MQC's, there
were vacuum errors regarding the new carrier but it ended
up being the o0ring in the hub. After the o-ring was
replaced, MQC's were started over again.
D shift
|
| 7.289 | Right Spindle Hub (GAP) Adjusted. | ASDG::POIRIER | | Fri Dec 13 1996 19:23 | 10 |
|
* Right Spindle Hub (GAP) Adjusted:
--------------------------------
The gap was measured at .020" on the tight side to .100" on
the wide side. With the base of the hub swept in at .>.001",
the new gap is .042" on the tight side and .100" on the wide side.
C Shift.
|
| 7.290 | Broken Wafers / Wafers Sticking To Pad - Suspect Pads | ASDG::POIRIER | | Sat Dec 14 1996 19:35 | 25 |
|
Broken Wafers / Pads Suspected :
------------------------------
The system broke 2 product wafers this morning. The Pad, Carriers &
conditioning disk were changed. We stopped using the pads in the cmp
room (3 different lots) and found pads with different lot #'s in the
stock room. A pad with a different lot # was used as areplacement.
The polish table controller amperage spiked to 48 amps during the down
force ramp just prior to the crash. This unusually high amperage spike
occured after 106 wafers were run on the pad. This supports our feeling
that something is wrong with the pads.
7:00 update:
-----------
The system just went down again for wafers sticking to the table after
60 wafers were run on the pad. This tool had new carriers and a new
conditioning disk installed this morning. We believe this sticking
condition supports the BAD PAD theory.
C Shift.
|
| 7.291 | Broken wafer, carrier problem | FABSIX::R_GEE | | Sun Dec 15 1996 19:37 | 13 |
| A breakin wafer was left on the pad by the right carrier The
system never errored for lose of vacuum. The conditioner
crushed the wafer during the pad conditioning cycle.
Found a pinched line inside the carrier. Cleaned the system,
performed the weekly p.m., replaced the pad and conditioner.
Reconfigured the vacuum lines and turned the barbed fitting
that is fixed to the top plate back to its normal 90% from
center position.
A shift
|
| 7.292 | ROBOT MIS-LOAD | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Dec 18 1996 21:28 | 13 |
|
The robot apparently went in to pick up a product
wafer from the right send elevator and the wafer went
between the end effector and its base. No damage visible.
Ran (6) wafers at slots #1, #2, #10, #11, #24 and #25
under NOTOUCH with no problems. PSS will have evaluate
the wafers on hold from OPS.
good to go...
D shift
|
| 7.293 | Robot slamage.... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Dec 19 1996 05:11 | 14 |
|
The robot apparently went in to pick up a product
wafer from the right send elevator and the wafer went
between the end effector and its base. No damage visible.
Ran (6) wafers at slots #1, #2, #10, #11, #24 and #25
under NOTOUCH with no problems. The two product wafers
in question visibly looked ok but were send along with
remarks per PPS.
good to go...
D shift
|
| 7.294 | Right Carrier Problem | FABSIX::J_SWENSON | | Thu Dec 19 1996 19:25 | 12 |
| Right Carrier Problem
- Carrier leaving wafer on pad
- Carrier not unloading wafer in unload station
- Replaced carrier
- Returned back to production with no further problems
C-Shift
|
| 7.295 | Pad change - Bad unif. | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Dec 21 1996 00:50 | 8 |
|
Tool failed MQC's for uniformity at 292 wafers. A pad
change was done and the tool was returned to OPS for break-in
and MQC's....
D shift
|
| 7.296 | Robot errors / ruptured tubing. | ASDG::POIRIER | | Fri Dec 27 1996 19:25 | 15 |
|
Robot errors:
------------
The system errored for "no wafer found on robot". The 1/8' vacuum tubing
leading to the robot end effector was ruptured. The tubing
was replaced and the vacuum switch was recalibrated.
The system went down again shortly thereafter for the same error. We
discoverd tha the end effector disk was not seating correctly in the end
effector after each wafer pick up. A slight adjustment in the
tubing length took care of the problem. A 50 wafer verification run
has been started. The system status is now in VERIFY.
C Shift
|
| 7.297 | pad change | FABSIX::O_WHITFORD | Quticherwhinin' | Fri Dec 27 1996 21:10 | 4 |
| Replaced pad as it had dried out extensively during robot
troubleshooting. Conditioined and turned over for verification.
Dave Whitford/D shift
|
| 7.298 | Wafer dropped out of left carrier. | FABSIX::R_POIRIER | | Mon Dec 30 1996 07:33 | 3 |
| Dropped wafer out of Left carrier during polish.
Replaced right carrier also, due to high count (380).
|
| 7.299 | tank filling problem | FABSIX::J_SWENSON | | Sat Jan 11 1997 18:16 | 14 |
|
Tanks not filling quickly
_________________________________
Di pressure 40
cda 100 psi
reset tool, tanks filled still slow
di line acting as if there is air within the line.
returned tool for production.
C-shift
|
| 7.300 | mqc failure | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Jan 13 1997 07:28 | 5 |
| Failed mqc's. Did the weekly w/ a pad and carrier change. NOTE: the
conditioner disk had very little diamonds left on it.
B-shift
|
| 7.301 | pad change | FABSIX::O_WHITFORD | Quticherwhinin' | Sat Jan 18 1997 00:02 | 4 |
| Replace pad at 106 wafer count, LARGE bubble had developed since I
installed this pad last night.... bummer.....
Dave
|
| 7.302 | Wafer Breakage / 2 Product Wafers Scrapped | ASDG::POIRIER | | Sat Jan 18 1997 19:07 | 45 |
|
Wafer Breakage:
--------------
Two product wafers were lost during a crash this morning. The wafers
broke dring the polish step. We were unable to determine the cause of
th fly out. The pad was on the tool overnight with only 34 wafer run on
it. Both carrier films were severly damaged making it impossible to
measure the step height. (See crash report below)
The pad, carriers & conditioning disk were replaced. The tool was
sucessfully MQC'd and ran fine for the rest of the shift.
---------------------------------------------------------------------------
CMP.A1 & CMP.A2 WAFER CRASH FORM (to be filled out by MFG/EEG/PSS, together)
1) System __CMP.A2_________
2) Recipe ___PMD________
3) Step # __2___
4) Time into step __NA____
5) Type of wafers that broke _PRODUCT_________
6) Carrier which wafer slid out of __LEFT____
7) Other carriers that were damaged __RIGHT______
8) Alarms displayed by polisher _______NO VACUUM FOUND ON LEFT SPINDLE________
______________________________________________
______________________________________________
9) Did any other polisher error for slurry or crash NO__, systems____________
10) # of wafers on pad _34___
11) # of wafers on carrier __216____
12) Was there any vibration prior to the crash __NO____
13) Was there plenty of slurry (for step 1&2) or water (step 3) present on
the table __YES_______
14) Check step height of the carrier from question #6 (CARRIERS ALL CHEWED UP)
15) Please note any other unusual circumstances:
16) Put this check sheet in CMP note #9
C Shift.
|
| 7.303 | wafer detect | LUDWIG::FINN | | Mon Jan 20 1997 19:18 | 7 |
|
Installed power, common and signal wires from new wafer detect I/O,
via conduit and flex track to Bridge Terminal strip # 20.
Much more difficult than it sounds. Weekly pm completed.
A shift
|
| 7.304 | pad change | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Jan 21 1997 02:18 | 4 |
| Replaced pad due to mqc failure.
B-shift
|
| 7.305 | pad change and robot malfunction | FABSIX::J_SADIN | Freedom isn't free. | Tue Jan 21 1997 16:51 | 13 |
|
replaced pad again due to mqc failure. Went back to suba + machine
stacked. Mqcs passed, but only after 24 breakin wafers. Also, machine
errored for "left spindle vacuum not found" and then proceded to slam
the robot arm in and out of the left load cassette (arm was sliding in
between wafers and not sensing the wafer was present). This condition
always seems to accompany the "left spindle vacuum not found" alarm
(the alarm stops in just a few seconds without any operator
intervention). Weird software glitch. Aborted process and reset left load
elevator. Everything was ok from then on.
jim
|
| 7.306 | "Wafer Not Found On Robot " - Errors | ASDG::POIRIER | | Wed Jan 22 1997 19:27 | 10 |
|
Robot End Effector:
------------------
"Wafer Not Found On Robot " Errors.
The 1/8" vacumm tubing leading to the End Effector Puck was too
tight. This prevented the Puck from seating in the End Effector.
The tubing slack was adjusted and the vacuum errors ceased.
C Shift.
|
| 7.307 | ROBOT | FABSIX::J_SWENSON | | Thu Jan 23 1997 19:28 | 11 |
| Wafer not found on Robot
------------------------
Checked vac. switch cal looked good
checked blow off for end effector pressure 20 psi o.k.
checked end effector for defects o.k.
ran 25 wafers with handling recipe no errors occured.
returned to manufacturing.
C-Shift
|
| 7.308 | POOR UNIFORMITY | FABSIX::B_WESTPHAL | | Fri Jan 24 1997 19:39 | 4 |
|
CMP.A2 - Down for failing MQCs for poor uniformity. Pad was changed.
The tool is still at verify. Needs more breakin wafers.
|
| 7.309 | crash | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Jan 27 1997 05:54 | 16 |
| Tool crashed with no apparent nor obvious reason. The wafer came out
of the right carrier. Earlier in the evening the right carrier was
sticking to the pad. The black oring and the platen screws were
replaced but the problem persisted. The carriers were swapped which
improved the release but the right still lagged by about a second.
Not sure why the right would be sticking to the pad with a good
carrier. The cal/config numbers were checked and compared to A1 with
nothing out of the ordinary found. To recover from the crash the
carriers were flushed (autocycle, f8, f5) due to the right carrier
sucking up wafer debris. And then the carriers, pad, and diamond disk
were replaced. The disk was just replaced this AM by A-shift and
already had signs of considerable wear (only 80 wafers on pad).
Weekly pm was going to be performed but A-shift beat us to it.
B-shift
|
| 7.310 | wafer breakage investigation results | SUBPAC::LANDRY | | Mon Jan 27 1997 19:25 | 38 |
|
The system was taken down this morning to investigate some wafer breakage
problems that have occurred over the last week or two. Most of the wafer
breaks have been caused by the right carrier/spindle assembly. Many items
were checked out:
* The left pressure gauge on top of the bridge was found to be rubbing
the inner top of the system as the bridge moves. This gauge displays
the back pressure and vacuum read out. The gauge was rotated to
alleviate this occurrance. Prior to rotating, the atmospheric readout
numbers were off of the 14.7 target (the left ~15.0, the right ~14.4)
* The back pressure PSIA readout was calibrated, final readouts achieved
were 14.7 psia for both. This was followed by the E-P regulator
calibration for back pressure. The left side was about 1 psia low on
the high end. Performed calibration on both sides.
* Next, the spindle alignment was checked on both spindles. Both were
in spec, with NO adjustments made.
* Both hubs were checked. Both were fine, with NO adjustments made.
* Down force calibration was then performed on both spindles. The right
side was real tight (.09% force error). The left spindle was found to
be at a force error of ~3.5%. Calibrated the left side.
* Slurry calibration was checked. No problems found.
* Load and Cleaning station alignments were performed. The left side was
fine. However, the right load station was inconsistant in sitting in
the ring properly. Therefore, we made the mechanical adjustment to
allow free movement in all directions as the carrier picked up a wafer.
* A new pad was installed at the end of the above checks. The HANDLING
recipe was used to exercise the mechanical hand offs of the system.
All ran fine. Breakin wafers were then successfully run. MQC passed.
A shift and Jim T
|
| 7.311 | robot | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Jan 27 1997 20:50 | 9 |
| Tool put down for robot problems. The only thing that I could see wrong
while testing the robot was that the wafer appeared to be dragging on
the lower arm of the robot. Made a minor adjustment to the end effector
to correct and tested the load/unload utilizing the same recipe. No
other problems were seen.
B-shift
|
| 7.312 | ex | LUDWIG::FINN | | Wed Jan 29 1997 19:44 | 7 |
|
ADDED CR-40 relay for wafer detect mod.
A shift
|
| 7.313 | Wafer breakage - Product.... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 30 1997 08:47 | 9 |
|
A product wafer slid out of the left carrier at lift-off
a hit the right carrier which had not popped up yet. There
were some small bubbles noticed upon removal. The tool was
cleaned up and turned back over to OPS. A crash report was
posted in #9 with the lot/tool info.
D shift
|
| 7.314 | Another one bites the dust! | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Jan 31 1997 05:09 | 17 |
|
The tool crashed two monitor wafers on the table and it
was so bad, both wafers were turned into stone dust and the
left carrier fell off the tool???? The tool was cleaned up
and new pad and carriers and pad were installed. The tool
passed MQC's without any problems.
After the robot dropped a product wafer off at the left
receive station, surface friction caused the wafer to come
back out with the robot. When the robot went to swing around
to the load cassette, CRASH! SLAM! BAM! No more wafer...
The robot was re-homed and the mess cleaned up the best it
it could. VERIFY wafers were run without any issues. The
tool was brought back up.
D shift
|
| 7.315 | Pad change | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Feb 01 1997 06:27 | 4 |
|
Pad change was done due to bad unif. on MQC's.
D-shift
|
| 7.316 | Robot & Left Spindle Vacuum Failures | ASDG::POIRIER | | Sat Feb 01 1997 19:16 | 35 |
|
Vacuum Errors On Robot & Major Vacuum Loss On Left Spindle:
----------------------------------------------------------
The Robot experienced vacuum loss at the end of "D" shift this
morning. This caused wafer breakage during handling. The Robot
has been experiencing intermittent vacuum failures for the
last few days. In addition, and more importantly, there has
been two incidents in the last two days of THE LEFT CARRIER
FALLING OFF THE HUB. (MAJOR VACUUM FAILURE)
The left spindle rotory union appears to be the cause of the vacuum
failure. It is intermittently leaking vacuum as it rotates. This
lowers the vacuum at the hub and robot causing numerous vacuum
problems in the tool.
Both left and right spindle rotory unions were replaced in NOV 96.
See note 7.268
There is one union in stock at the present time. The Union o-ring does
not come with the union. A SID sheet has been sent to Materials for
the Strasbaugh supplied o-rings. We have located some that are close to
the proper size. We will hand them off to "B" shift tonight. If they
won't fit, call Jim Tooker at home.
The o-ring type is: 2-020 N70
The o-ring size is: .864 ID X .070 Width
NOTE: Remember to replace the small o-rings on the rotory union
feed tube as well. We have plenty of these sized o-rings
an will hand them off to "B" Shift.
C Shift.
|
| 7.317 | orings and monthly | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Feb 02 1997 03:58 | 7 |
| Installed new o-rings in both rotary unions. Could not cause vacuum
to fail as mentioned by C-shift in prior note. Monthly pm was
completed. New pad installed and conditioned and tool given back to
production.
B-shift
|
| 7.318 | unions leak | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Feb 04 1997 07:29 | 11 |
| INtermittent alarms for left spindle vacuum not found. Checked rotary
unions by pulling up on hose connections and vacuum dropped and caused
said alarm (left for left, right for right). One union obtained from
stock and one from Jim T.'s office. The new union went on the right.
The one from Jim's office has a different kind of nut which has holes
in the side preventing a vacuum seal. We tried the old union with new
and improved orings but it was a no go. When tested it failed while the
right one passed. This is over to A-shift as our time is about up.
B-shift
|
| 7.319 | Vacuum errors | FABSIX::B_FINN | | Tue Feb 04 1997 19:23 | 22 |
|
Continued rotary union repairs from B shift. Removed left rotary
union, removed large oring from base of rotary union reducer. This
does not provide a seal. The two small orings below the threads
provide the top seal. Measured male and female threads depth and
length and confirmed this oring is not being compressed. Removed inner
tube and found the lower oring damaged. This oring was split in two
via its circumference so that we had two intact orings, neither
providing a seal. Reinstalled orings and tube, installed new rotary union.
Installed both left and right hubs, set both gaps and aligned with dial
indicator.
Ran 36 wafers with handling program and received a vacuum error. This
error conincided with a loud whistle from the Vacuum pump cabinet.
This error has not reoccurred and seems VERY intermittent.
We have swapped sol 1 with sol 2 per eng request. None in stock, eng is
has ordered 2. Due in fedx p1. Just completed 50 wafer verify run with
handling program. Pad has been condition, but not yet broken in.
System remains in verify.
A shift
|
| 7.320 | valves installed | FABSIX::J_SWENSON | | Fri Feb 07 1997 19:47 | 8 |
| Vacuum valves installed in vac. cabinet
A 50 wafer verification run will need to be run on the handling
recipe before product can be run.
Will pass on to D-Shift
C-Shift
|
| 7.321 | Leaving wafers on table | FABSIX::R_POIRIER | | Mon Feb 10 1997 07:14 | 17 |
|
We had a problem with A2. Right carrier was leaving wafer
on the pad at lift-off. I replaced both carriers because
the wafer count was high (386). Started running break-ins,
and after the 4th set of wafers, the left carrier left a
wafer on the table.
The tool didn't alarm and the conditioning arm came over
and broke the wafer. Replaced the left carrier, the pad
and conditioning disk. Did weekly PM.
Tool is in break-in/MQC's.
B Shift
|
| 7.322 | wafer breakage | SUBPAC::LANDRY | | Mon Feb 10 1997 19:25 | 5 |
| The system is currently in a pad change after a wafer breakage. See
breakage report for details.
A shift
|
| 7.323 | CMP.A2 problems...loooong story | FABBIT::J_SADIN | Freedom isn't free. | Tue Feb 11 1997 19:41 | 36 |
|
Well, it's been a rough ride on this doggy today. Started off the
day with both carriers sticking to pad for an extended amount of time
after polish. It was necessary to stop all axis' to get carriers off
the table. Initially changed the conditioner and performed an extended
condition...no change in behavior (carriers still sticking). Checked
carriers and found tubings bent over. Repaired carriers and tried
again. Carriers were now lifting off! Ran 16wfrs and turned back over
to manufacturing. The very first run resulted in a crash (wafers slid
out of left carrier. left carrier stuck to pad without the wafer).
Right carrier popped up ok. Screen alarm for this was "axis error"
which refers to carrier rotation failure. This could be explained by
the fact that the vacuum was on at the carrier (minus the wafer), hence
the vacuum was trying to stop the table and carrier rotation.
Cleaned up the mess, built two new carriers (installed on tool now)
and tried again. First run we lost a wafer out of the left carrier as
soon as it touched down on the pad (EMO'd tool before wafer crashed).
We were running the NEWPAD recipe. Swapped carriers and ran wafers only
to have the wafer slide out of the left spindle AGAIN (at touchdown).
Doc swapped the two vacuum lines back to their proper positions (these
are the lines that were switched last night). Retried running wafers
and noticed that the backpressure on the left spindle was up at 67psia
despite the fact that the program was not calling for it (program was
calling for 14.8psia in step 2 of the NEWPAD recipe. right spindle was
ok).
B-shift will need to switch anything they changed last night back
to the way it was previously. Vacuum lines are already done.
Leaving the system as is. Will verbally pass off to B-shift.
jim/doc/brendan
|
| 7.324 | communicating | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Feb 11 1997 23:42 | 21 |
| Sorry for the confusion folks. Heads been up the ole poop shoot of
late. Last night we swapped the vacuum lines (82 & 88, 24 & 26) and the
backpressure control lines (c98 & c99) in the hopes of getting more
info on the "wafer-being-left-on-table" problem we've been
experiencing. In a sense we did get some more info. If you filter
through the problems that were seen today the important data is that
the wafer flyouts and being-left-on-the-pad problems switched to the
left spindle. We swapped the vac lines and control lines back to normal
and then just switched the left and right backpressure EP regulators.
We'll monitor this and if the wafers continue to fly out of the left
spindle than the EP regulator is at fault. NOTE: product will not be
subjected in this short test, just breakins (new pad). One other thing
to note, could be important, the BKPR readings in idle were reading
14.5 to 14.6. All the recipes have Backpressure set to 14.8 (when not
0.0) which is going to put 2 to 3 tenths of psia onto the wafer.
Calibrated number 66 and 68 (left and right back pressure offset's) so
that the idle reading is 14.8 psia.
B-shift
|
| 7.325 | more communicating | FABSIX::M_RIDLON | Eliminate the oblivious | Wed Feb 12 1997 05:48 | 8 |
| No fly outs or wafers left on the pad with the backpressure regulators
swapped. We swapped them back and calibrated them using the procedure
in the manual. Ran another boat of wafers using the PMD recipe and
again we didn't have any problems or errors. Gave it to production to
run MQC's and they passed on the first try.
B-shift
|
| 7.326 | CMP.A2 passdown | FABSIX::J_SADIN | Freedom isn't free. | Wed Feb 12 1997 19:34 | 19 |
|
Lots of issues on this machine today. An operator put the tool down for
having severe rem rate range after mqcs and on product (the tool was
removing 1000� more on the right spindle than the left). EP regulator
and bp valves fittings were checked and most all were found to be
leaking. All fittings were retaped and reinstalled (no leaks).
Downforce cal was performed and the right spindle was found to be
fluctuating ~10lbs at the higher cal pressures (left calibrated ok with
no fluctuation). Determined downforce EP regulator to be bad and
replaced the old style regulator with the new style. EP regulator has
been installed and calibrated.
ONLY RIGHT SPINDLE DOWNFORCE NEEDS TO BE DONE! Left is ok and the
spreadsheet has been entered into Excel.
a-shift
|
| 7.327 | lost 100psi on the back pressure regulators | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Feb 13 1997 06:30 | 22 |
|
Picked up from A shift and completed the downforce
on the right spindle. It was fine...
Started up the VERIFY and the tool crapped out after
the 1st set of wafers. The tool wasn't blowing off the
wafers into the load cups. Tried looking into spindle flush
to confirm there is a problem and the tool wouldn't flush
either. According to the schematics, there is suppose to
be constant 100 psi to the back pressure regulators in the
pneumatic cabinet. The 100 psi was missing. We tried tracing
the line but we lost it when it goes towards the electrical
cabinet. The line is suppose to be #1 but we have #114.
Both tools are the same way. We spoke with Todd about it
he seemed to thing it was a pinched line. We jumped the #114
line and brought in another 100 psi. The tool now ran fine.
The line is still by-passed but was ok to run. The riggers
are suppose to be here at 8am for the upgrade.
D shift
|
| 7.328 | Gearbox Replaced | ASDG::POIRIER | | Thu Feb 13 1997 19:33 | 23 |
|
Gearbox Replacement:
-------------------
The gearbox has been replaced and the table reinstalled.
Action plan for tonight:
-----------------------
1) Todd from Speedfam will stay here tonight until the install is
complete.
2) After final alignments are complete, put a new pad on table
and run 25 wafers using the BREAKIN recipe.
3) After the Breakin recipe is run, turn the tool over to manuf
for MQC's.
Also, Jim Tooker wants the filters in the Bridge changed.
If any major problems develop, call Jim Tooker at home.
C Shift.
|
| 7.329 | Gearbox upgrade status | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Feb 14 1997 05:22 | 15 |
|
The table is skewed left to right and the Rep.
decided that the table will have to be pulled again
in the morning. None of the items that were listed
in the C-shift passdown were able to get done. Jim
Tooker was notified and work will commence around
8am.
Both 50 micron spindle filters were replaced.
Area cleaned up of debris.
D shift
|
| 7.330 | Can't get the Bridge to Table sweep alignment in. | ASDG::POIRIER | | Fri Feb 14 1997 19:35 | 18 |
|
Gearbox Upgrade Status:
----------------------
We struggled all shift trying to get the sweep reading in. The Table
was pulled again and the holes on the gearbox mounting bracket were
enlarged. The Table was reinstalled and the sweep reading is still
.085". The Strasbaugh rep is planning to work into D Shift.
We don't know if the sweep reading was in spec before the Table was
removed yesterday. The Bridge to Table sweep reading is something
Strasbaugh started checking last year. I remember that this measurement
was not taken when the tools were installed 3 years ago. Maybe we're
chasing a phantom problem? CMP.A2 is the first time the rep has
encountered this problem in over 20 gearbox conversions. He is trying
to decide how to proceed at the present time. Passing on down to "D"
shift.
C Shift.
|
| 7.331 | A2 upgrade? | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Feb 15 1997 07:04 | 9 |
|
Rep. left at 9pm... left a note for C shift.
We didn't even get a change change to see what was
needed for completion but from what the note on the tool
reads and everything being still in pieces, who know. We
don't even know if the Rep. is coming back.
|
| 7.332 | Gearbox install update | ASDG::POIRIER | | Sat Feb 15 1997 19:41 | 32 |
|
Gearbox Install Update:
----------------------
The Strasbaugh rep left Friday night at 9:00. He gave up on trying to get
the table sweep alignment in. He left instructions to perform our standard
table/spindle/hub method of alignment. We didn't have time to finish
the alignments due to other priorities in the area. Here's the current
status:
1) Table alignment: currently at .0012" OK
2) Left Spindle alignment: currently at .001" OK
3) Right Spindle alignment: Currently at .020" Spec .001
4) Left & Right Hub alignments: Not Done Spec .001
Todd from Strasbaugh can be reached via his pager in Springfield Mass
at 1-800-459-6922.
In addition to the alignments, there are a few pipes & hoses that
connect the chilled water to the water jacket not yet installed.
Also, there are hoses and exhaust ducts that are not yet installed.
One other thing, the mounting hardware for the slurry delivery tube
has been lost. It consistes of a nut and two washers. Take a look at
A1 to see what sizes are needed.
C Shift.
|
| 7.333 | Show me the money | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Feb 16 1997 07:38 | 15 |
| To make a really long story short....the table run out alignment equals
.001". Both the left and right spindles were checked and since we did
some messin around with the table they needed some adjusting, not to
worry though as they are both .001". All hoses and nuts and bolts and
watchyamacallits that go underneath have been installed. The left and
right hub run out alignments need to be performed as well as all panels
reinstalled. The slurry delivery also needs to be reinstalled. The
chiller was turned on and flow maxed out at 3.9gpm to check for leaks
with none being found. We can see why the rep got a bit frustrated with
this pig. Would have been nice if the table sweep alignment was done
before the table was removed. Its a good thing that alignments not in
the spec.
B-shift
|
| 7.334 | CMP.A2 hub runouts etc... | FABSIX::J_SADIN | Freedom isn't free. | Sun Feb 16 1997 19:44 | 8 |
|
Did hub-runouts and brought within .001. Replaced
pad/carriers/conditoner disk and ran 25 wafers on NEWPAD recipe without
incident. Turned over to production and machine passed mqcs.
a-shift
|
| 7.335 | RR stands for Reading Railroad | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Feb 18 1997 06:49 | 10 |
| Failed mqc's. Left RR was 2200, right RR was 1100. Since we had the
reverse situation last week we went ahead and rechecked the EP
regulator cal to rule out drifting and redid the down force cal. Both
EP's were 10psi low at 3140 and at 580 both read 9psi. We cal'd the
high end to 80 psi following the book but left the low to 9psi. The
down force cal for the right didn't need any adjustments but the left
needed to be tweaked. It wasn't out by much at least not enough to
account for the differenc in RR.
B-shift
|
| 7.336 | table alignments | FABSIX::B_FINN | | Tue Feb 18 1997 19:06 | 33 |
|
System failed MQC's. Decision was made at the post morning
meeting to correct the table tilt condition, (which has been at 64 mils
low on load side), since the completion of the table's gear box. Before
loosening any bolts we check the tilt by sweeping the table with a dial
indicator attached to the spindle. We the rotated the the table 90'
and sweeped again until we had measured the table in 360's. The tilt was
continuously ~-64 to -68 mils. Tim D. tried to contact Strasbaugh in
N.Y. We contacted Ca. and got the Eastcoast F.S. Sup. phone and
pager. Tim spoke with him and explained the situation. They
(Strasbaugh) have no one to send at this time.
We tried to slightly loosen the gearbox bolts and jack up the load
side of table, we improved to approximately -45. We tried loosening the
the white exhaust box to pick up some play, but NFG. We
tried installing a second jack on the far right side of the table to wedge the
high end down whilst still raising the front we improved to -35. Base
of drip pan began to bow as we jacked. We installed boards and shims
under the system and steel plates under the bottom jack to prevent this. We
loosened the front jacking support bar and retried the above procedure. We
improved to -27. Unfortunately from this point on ...the whole table,
both sides began to rise.
Table center eye bolt for table removal could not be found in the room or
Jim T's office.
All jacks have been removed for safety at passdown. Current sweep ,(bolts loose)
is -73 mils (hey we worked all day to get this!).
There does not seem to be enough adjustment room.
The 6 bolts to the gear box are still loose.
Table rotation motor cables are still unplugged
|
| 7.337 | Table status | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed Feb 19 1997 05:58 | 11 |
|
how the heck does that thing come out?????
We got three of the bolts out for Tim but the
the right top one and two front ones are still in.
We felt it was necessary to leave it in the condition
it is now rather than have hundreds of pounds of metal sitting
on a scissors jack. The locking bolts and supports
are still in place.
D shift
|
| 7.338 | Gearbox Update / Mounting Screws Turned Down | ASDG::POIRIER | | Wed Feb 19 1997 19:33 | 18 |
|
Gearbox Replacement Update:
--------------------------
The gearbox mounting screws were removed and turned down on the lathe.
This allowed for greater left to right movement of the gearbox. The
bridge to table sweep alignment is now .0005". However, when the
table is rotated 90 deg, the sweep measurment increases to .009".
Somehow we need to align the bridge to table while (rotating) the table
and sweeping the table (linear). We're much closer than we were
yesterday, it appears that turning down the mounting screws worked.
Passing on to "D" shift to finish the alignments and reassemble all the
remaining hoses and duct.
C Shift.
|
| 7.339 | Table, sweep and spindle alignments | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Feb 20 1997 05:58 | 23 |
|
Pre-readings showed table sweep .001 on one direction
and .009 at 90 degrees. Table run-out was .050???? We
wanted to get a baseline before we cranked some weight on
the table from the spindles. We put ~600 lbs from each
carrier at three locations to see if the table would
actually settle. It didn't move! First we brought the
table run-out in to .0005. We got the sweep at both cross
sections to .001 and .002. We re-checked the table run-out
and still had .0005. We applied the 600lbs downforce again
at three locations to see if the readings would change and
they didn't. The spindles were checked. The left was out
at .03 and brought in to .002. The right spindle was at
.05 and that was brought in to .001. Both hubs were at
.003 and brought in to .0005 each. The tool was cleaned
up and all of the covers, plates and hoses were re-connected.
We ended replacing both carriers due to the right carrier
having vacuum problems and the left for sticking to the pad.
The first round of MQC's had R.R. at 1100, and 1300 with unif.
at 7% and 11%. Things are looking good.
D shift
|
| 7.340 | Unif. issues GONE!!! | FABSIX::B_JUBINVILLE | | Fri Feb 21 1997 06:16 | 11 |
|
At first change, the MQC results showed 8% on the left
and 12% on the right. We wanted to prove it was the carrier
and not the tool so we swapped the carriers from left to right
and 'voila!' the left came in at 9.2% and the right at 7.6%.
Just a precaution, a 2nd round of MQC's were run and tool
passed with the same results. Tool came back up to OPS.
Good to go...
D shift
|
| 7.341 | lousy conditioner | FABSIX::M_RIDLON | Eliminate the oblivious | Wed Feb 26 1997 01:37 | 4 |
| Failed mqc's twice. Pad was changed and given back.
B-shift
|
| 7.342 | carrier orings | LUDWIG::FINN | | Mon Mar 10 1997 19:19 | 5 |
|
Right Carrier sticking to the pad. Orings changed.
A shift
|
| 7.343 | robot | FABSIX::R_GEE | | Tue Mar 11 1997 19:28 | 8 |
| The robot was erroring for no wafer on robot whenever the was an
empty slot between wafers. Adjusted cal. variable #118 from .88
to .82 ran verification wafers on both elevators, all set.
A shift
|
| 7.344 | POOR UNIFORMITY | FABSIX::B_WESTPHAL | | Sat Mar 15 1997 18:20 | 5 |
|
CMP.A2 - Down for failing MQCs for poor uniformity. Cleaned up the process
area. Replaced the conditioner and pad. Conditioned the pad 10 times
and returned the tool for MQCs.
|
| 7.345 | Carrier Vacuum Problems | LUDWIG::STANDING | | Thu Mar 27 1997 14:28 | 16 |
| CMP.A2 Vacuum System. The left carrier had problems with maintaining
carrier vacuum. Swapped carriers left to right and the problem
moved with the carrier. So it was decided to replace the O-rings
and the check valves in the carrier and reinstall. After doing this
and turning on the vacuum pump we noticed water dripping from the
pump cabinet. Found the water to be coming from the pump exhaust
muffler. Upon closer inspection we found the regulator to the pump
cabinet reading zero lbs. this was due to the regulator being shut
off. Then checked the blown down tank and it was full of water,
drained into a bucket. Then checked the vacuum tank and found it to
be completely full of water! Well with the air shut off to the blow
down tank it never drained, so the vacuum tank never drained either.
This could account for the vacuum problems. Next we checked the
vacuum pump for CMP.A1 and found the air to the regulator was shut
off as well! Both tanks were full of water. Drained same.
Returned both tools to production.
|
| 7.346 | wafer crash a2/dummy wafers no product lost | FABSIX::J_SWENSON | | Thu Mar 27 1997 19:27 | 24 |
| Wafer Crash
-------------
- Send ahead wafer slid out of right carrier causing crash
- Manufacturing noticed wafer had slid out and tool was EMOED
- Noticing pads are having long breakin periods (40-50 wafers)
- This will be the third pad in 24hrs for this tool.
- Cleaning up tool, replacing pad,carriers and conditioning disk
- Will be passing on to D-Shift for MQC's
FYI these are the lot #'s of the 2 previous pads
- 6FN-JP2
- 6HO-JP9
C-Shift
|
| 7.347 | Carrier replaced - bad uniformity | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Mar 28 1997 05:24 | 6 |
|
The tool failed for uniformity on the left carrier
which was replaced. The tool finally passed MQC's after
that.
D shift
|
| 7.348 | 4" Disk/BP Cond'n tests | FABSIX::B_POLLARD | | Thu Apr 03 1997 18:53 | 19 |
|
The Conditioning tests are continuing from day shift. I ran 2 MQC's and
a total of about 25 wafers on the MQCBP recipe. For tonight I need
to a MQC done when the current boat of dummies finishes (Eric will do the
MQC). Then I need 100 to 150 more dummy wafers cycled before the tool
is given back to production and then 1 FINAL MQC on the MQCBP recipe using
the EMQC wafers next to the tool. Please print out the maps (if PSS can
help with the final MQC that would be appreciated). NOTE - the wafer counter
was NOT reset with this PAD so it should be over 250 by the END of the last
batch of 100 dummies.
When the Tool is given back over to Production - the following will be
needed:
1. Save the cross-section of the PAD for Bryan.
2. EE will put the STD 6" disk back on along with correcting the offsets
that were changed for the 4" disk.
3. A new pad will be needed with standard MQC's.
Bryan Pollard
|
| 7.349 | 4" COnditioning Disk Experiment Ongoing. | ASDG::POIRIER | | Thu Apr 03 1997 19:19 | 15 |
|
4" Conditioning Disk Experiment Ongoing - Offset Coeff's Changed:
----------------------------------------------------------------
Bryan Pollard is currently running an experiment with the 4"
conditioning disk. This evaluation will run into "D" Shift
tonight. When the experiment is completed, set the following
offset coefficients to their origional settings:
#126 Conditioner Offset Coefficient 96,500 (currently 94K)
#71 Conditioner Dead Weight Coeff Set Same as CMP.A1.
C Shift.
|
| 7.350 | ENG work completed | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Apr 04 1997 07:14 | 9 |
|
The tool finished its ENG work. The pad was removed
and a piece was cut out for Bryan. Replaced a shredded o-ring
in the left hub. Installed a new pad. Re-installed 6"
conditioner disk and changed back the variables. Pad was
broken-in and is BGN_MQC, waiting for the results.
D shift
|
| 7.351 | CMP.A2 vacuum pump replacement | FABSIX::J_SADIN | Freedom isn't free. | Sun Apr 06 1997 20:31 | 12 |
|
Left carrier fell off spindle during carrier clean step. Found some
o-rings not seated properly and fixed those. Carrier fell off again and
it was noticed that the vacuum pump was not reaching optimal vacuum
(running constantly). Isolating the vacuum pump from the system made no
change in the pumps behavior and it was therefore decided that the pump
was bad. Replaced the old pump with one of the new ones in CMP and all
is well! System is pumping down quickly and holding good vacuum.
a-shift
|
| 7.352 | valves replaced | FABSIX::B_FINN | | Mon Apr 07 1997 20:28 | 14 |
|
System crashed in left receive station, cleaned up and ran test wafers
found end effect very close of to of wafer while withdrawing on R
stroke. intermittently dragging wafers out of cassette and
tipping cassette over. Tried several cassette. Wafer was dragging on
the bottom of slots while being placed in cassette.
Adjusted robot/elevator position and ran test wafers aok.
And in other Unrelated news:
Replaced both left and right backpressure/vacuum regulators and Valves
45 and 46, at EE's request. System is in its 24 hour MQC.
A shift
|
| 7.353 | Pad change | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 10 1997 07:32 | 4 |
|
Pad change due to MQC's - bad unif.
D shift
|
| 7.354 | Scratches-uniformity. | FABSIX::L_SHKOLNIKOV | | Fri Apr 11 1997 07:37 | 7 |
| The tool failed MQC's for poor uniformity and scratches on the
left carrier. The tool has been cleaned and left brush replaced.
Tool passed MQC'c and released to manufacturing.
D-shift.
|
| 7.355 | System leaving wafers on pad at lift off. | ASDG::POIRIER | | Fri Apr 11 1997 20:25 | 9 |
|
System Dropping Wafers On Pad:
-----------------------------
The tool has been leaving wafers on the pad this afternoon. The o-rings
in both carriers have been replaced. We just ran 6 wafers with no
problems.
C Shift.
|
| 7.356 | robot blues | SUBPAC::LANDRY | | Tue Apr 22 1997 20:30 | 7 |
| The robot was rather annoying this morning. a couple of times, it
errored for "robot not making left send". The rails were cleaned (a
bit too much grease was found). Cleaned the lead screw as well. It
also have "fragments" near the end stroke of the travel. It has been
performing admirably since.
A shift
|
| 7.357 | Conditioning Tests for Tonight | STRATA::POLLARD | | Thu Apr 24 1997 17:54 | 20 |
| Please continue the following Conditioning Tests on CMP.A2
** NOTE the Left Send Cass is having problems so unless EE gets it fixed
only use the Right Send CAss.
1. Finish Current MQCBP run (Cassette has 4 dummies then 2 mon in slots 5,6
which of course are in reverse order after).
- Scrub wafers & Measure tx
- Pre readings on Filmthick.A1 ProcEng MQC prog with labels of
BP Cond'n Test3 L2nd (corresponds to SL2 after) & R2nd (corresponds to SL1)
- be sure to save Delta measurements on tool
2. Run 25 dummies thru MQCBP recipe.
3. Do std MQC run & eval - save Delta results.
4. Cycle 75 more dummies thur MQCBP recipe.
5. Do std MQC run & eval - save Delta results.
6. EE do Pad change & reinstall std 6" disk
EE also change Var 126 "Prog Cond Offset" back to 96,500.
7. Do std startup procedures for New Pad.
Thanks,
Bryan P.
|
| 7.358 | SAVE the Pad - Please!!! | STRATA::POLLARD | | Thu Apr 24 1997 17:58 | 22 |
| Please continue the following Conditioning Tests on CMP.A2
** NOTE the Left Send Cass is having problems so unless EE gets it fixed
only use the Right Send CAss.
1. Finish Current MQCBP run (Cassette has 4 dummies then 2 mon in slots 5,6
which of course are in reverse order after).
- Scrub wafers & Measure tx
- Pre readings on Filmthick.A1 ProcEng MQC prog with labels of
BP Cond'n Test3 L2nd (corresponds to SL2 after) & R2nd (corresponds to SL1)
- be sure to save Delta measurements on tool
2. Run 25 dummies thru MQCBP recipe.
3. Do std MQC run & eval - save Delta results.
4. Cycle 75 more dummies thur MQCBP recipe.
5. Do std MQC run & eval - save Delta results.
6. EE do Pad change & reinstall std 6" disk
****PLEASE TO SURE TO SAVE A FULL CROSS-SECTION OF THE PAD ******
EE also change Var 126 "Prog Cond Offset" back to 96,500.
7. Do std startup procedures for New Pad.
Thanks,
Bryan P.
|
| 7.359 | Left send Elevator Needs Adj. | FABSIX::J_SWENSON | | Thu Apr 24 1997 19:58 | 16 |
| Robot/Left Send Elevator
------------------------
- Robot would not pick up wafers in left send elevator.
- Moved cassette to right elevator robot picked up wafers and ran fine.
- Tool has a warning for left send elevator and is up to ENG.
- Looks like cal variable 80 will need to be adjusted.
- Will pass on to D-shift
C-Shift
|
| 7.360 | left send elevator works again. | FABSIX::L_SHKOLNIKOV | | Fri Apr 25 1997 08:18 | 5 |
| Replaced the pad after engineering tests. Rebooted the tool and run 24
wafers with notouch recipe to verify left send elevator. Did not have
any errors. Released tool to manufacturing.
D - shift.
|
| 7.361 | robot crash | FABSIX::J_SWENSON | | Fri Apr 25 1997 20:26 | 24 |
| Robot crash
----------
- robot crashed into right send elevator
- checked vac switch and re calibrated
- checked end effector vac solenoid looked good
- manually excercized robot and found alignments to be o.k.
- found no root cause to the crash.
- the original crash cassette is in the right send elevator
- tool remains down in comets
- these crashes are intermittent, we may be running worn cassettes
it might be time to weed out cassettes in which we are having
problems.
c-shift
|
| 7.362 | No crash. | FABSIX::L_SHKOLNIKOV | | Sat Apr 26 1997 08:30 | 6 |
|
Regarding recent wafer crash in right send elevator we checked
robot and elevators alignments,removed and cleaned the robot arm
and replaced vacuum line between robot and end effector.Verification
run of 24 wafers has been completed without any errors. tool released to
production.
|
| 7.363 | PAD Change | LUDWIG::STANDING | | Sat Apr 26 1997 20:17 | 1 |
| CMP.A2 Down for a pad change.
|
| 7.364 | robot arm problems | FABSIX::J_SADIN | Freedom isn't free. | Tue Apr 29 1997 17:19 | 11 |
|
Wafers were being dragged back out of both receive cassettes on
CMP.A2. Found two allen screws on the back of the robot arm were loose and
tightened them. Also adjusted robot top position to .63 (from .64)
since the arm still appeared a bit close to the wafers on retraction.
Ran verification wafers fine. Back to production.
a-shift
|
| 7.365 | Bad Uniformity - pad change | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed Apr 30 1997 07:08 | 5 |
|
tool failed MQC's for 20%+ unif. Replaced pad, conditioner
disk and tool came back in.
D shift
|
| 7.366 | Failed MQC's | FABSIX::R_POIRIER | | Mon May 05 1997 07:01 | 8 |
|
Failed 24 hr MQC's. Replaced pad, conditioner
and left carrier (380 wafer count). Awaiting
MQc results.
B Shift
|
| 7.367 | Engineering Experiment | FABSIX::R_POIRIER | | Tue May 06 1997 07:39 | 11 |
|
Took tool at 5:00am and began engineering
experiment for Brian Pollard. Put new pad
and 4 inch conditioning disk. Ran special
breakin recipie and special MQC recipie.
B Shift
|
| 7.368 | Cond'n Tests for Tonight | LUDWIG::POLLARD | | Tue May 06 1997 18:32 | 31 |
| We're rounding up the FINAL Cond'n Marathon on CMP.A2 - hopefully this will
help us Double the Pad LIFE.
PSS/OPs - Please continue the following Conditioning Tests on CMP.A2:
1. Cycle 50 Dummies (ECMP-XRSZ) thru recipe "XRSZBP2"
2. Do a MQC run (wafers ECMP-MQC-1 - Need Pre Tx Readings)
using recipe MQCBP2.
- Save Delta Tx map in Thickness.A4.
- Log OUT run as an MQC with Particles also.
- Put in NOTes the Time of MQC and # Wafers on Pad.
3. Cycle 50 Dummies (ECMP-XRSZ) thru recipe "XRSZBP2"
4. Do a MQC run (wafers ECMP-MQC-1 - Need Pre Tx Readings)
using recipe MQCBP2.
- Save Delta Tx map in Thickness.A4.
- Log OUT run as an MQC with Particles also.
- Put in NOTes the Time of MQC and # Wafers on Pad.
** Repeat the Above Steps Until the System has 500 wafers or the uniformity
is > 15%.
5. If the system is needed back to Prod - the following will be done:
EE do Pad change & reinstall std 6" disk
****PLEASE TO SURE TO SAVE A FULL CROSS-SECTION OF THE PAD ******
EE also change Var 126 "Prog Cond Offset" back to 96,500.
6. Do std startup procedures for New Pad.
Thanks,
Bryan P.
|
| 7.369 | mqc test for brian pollard | FABSIX::R_ANDERSON | | Tue May 06 1997 20:35 | 1 |
| mqc wafer run at 7:30 p.m. wafer count on pad 160. a-shift.
|
| 7.370 | Save the PAD! Condn & 18% tests on CMP.A2 | STRATA::POLLARD | | Wed May 07 1997 19:27 | 50 |
| ** MOST Important - SAVE THE PAD from the CMP.A2 Cond'n Tests!!!!!!!
Well the Marathon for the New Con'n recipe has gone very well. We've had
425 wafers and the last uniformity's were 9.4% & 6.3%. So I wanted to go
all the way to 500. Then we're going to be converting to SC1 18% slurry from
a barrel early in the morning so the system will be at UP/ENG all night.
Here's the detailed plan:
1. Finish the current 24 dummies thru recipe "XRSZBP2"
2. Do a MQC run (wafers ECMP-MQC - Need Pre Tx Readings)
using recipe MQCBP2.
- Save Delta Tx map in Thickness.A4.
- Log OUT run (LVNE) as an MQC with Particles also.
- Put in NOTes the Time of MQC and # Wafers on Pad.
3. Cycle 50 Dummies (ECMP-XRSZ) thru recipe "XRSZBP2"
4. Do a final MQC run (wafers ECMP-MQC - Need Pre Tx Readings)
using recipe MQCBP2.
- Save Delta Tx map in Thickness.A4.
- Log OUT run (LVNE) as an MQC with Particles also.
- Put in NOTes the Time of MQC and # Wafers on Pad.
5. EE will REMOVE current Pad and SAVE IT Please (put label on it "Bryan P")!
** NOTE - Leave SETUP for 4" DISK as I will do New Slurry Tests with
the 4" Disk and appropriate Offsets.
6. EE will get 18% barrels of SC1 slurry outside Ashland's office.
7. EE will install slurry and calibrate flows. Use small pump to keep
slurry in barrell mixed.
8. EE will do 20 Cond'n Cycles with the Recipe - "NWPadBP3"
(Note the Default # of Cond'n cycles is now 2).
9. Ops/PSS will do 20 Breakins with recipe "NwPadBP3".
10. Ops/PSS will do an MQC run with recipe "MQCBP2".
- Save Delta Tx map in Thickness.A4.
- Log OUT run (LVNE) as an MQC with Particles also.
11. If uniformity is > 10% then do 12 more Bkins on "NwPadBP3" then go to
#12 - otherwise just go to #12 with no additional Bkins.
12. Ops/PSS will do an MQC run with recipe "MQCBP2".
- Save Delta Tx map in Thickness.A4.
- Log OUT run (LVNE) as an MQC with Particles also.
13. Ops/PSS will do an MQC run with recipe "MQCBP2".
- Save Delta Tx map in Thickness.A4.
- Log OUT run (LVNE) as an MQC with Particles also.
I will continue testing to Optimize for particles/scratches in the morning.
NOTE this is very urgent as Lot JL1509 is on HOLD until I get an 18% process
in place to split it.
Thanks,
Bryan
|
| 7.371 | 18% slurry | STRATA::FINN | | Wed May 07 1997 21:18 | 5 |
|
Ashland has mixed 100 gals of 18% slurry and it is outside their office
for tomorrows eng test. (two 50 gal containers)
A shift
|
| 7.372 | Update to Bryans gameplan. | YIELD::SHONG | | Thu May 08 1997 08:44 | 140 |
| Here's the detailed plan:
1. Finish the current 24 dummies thru recipe "XRSZBP2"
________________________________________________________________________________
Bryan, This portion of the test was done on A-Shift. I'm not sure who did it
but when we came in they were running part 2.
________________________________________________________________________________
2. Do a MQC run (wafers ECMP-MQC - Need Pre Tx Readings) using recipe MQCBP2.
- Save Delta Tx map in Thickness.A4.
- Log OUT run (LVNE) as an MQC with Particles also.
- Put in NOTes the Time of MQC and # Wafers on Pad.
________________________________________________________________________________
The thickness readings were taken but the Pre's were done on Thickness.A1(A-
shift). I'm not sure why they did that but they did. Removal rate and Std.Dev
was L=1376/10.4 and R=1187/6.6. Particle results were:
Left Right
---- -----
7) 80 93
Sum) 835 840
Scr) 0mm 0mm
Results have been entered in Workstream. I've also placed a note in the notes-
file. The MQC's were completed at ~21:25. The count on the pad was 451 wafers
after the MQC's.
________________________________________________________________________________
3. Cycle 50 Dummies (ECMP-XRSZ) thru recipe "XRSZBP2"
________________________________________________________________________________
Done. That was completed at ~22:45.
________________________________________________________________________________
4. Do a final MQC run (wafers ECMP-MQC - Need Pre Tx Readings)
using recipe MQCBP2.
- Save Delta Tx map in Thickness.A4.
- Log OUT run (LVNE) as an MQC with Particles also.
- Put in NOTes the Time of MQC and # Wafers on Pad.
________________________________________________________________________________
This run was started at ~23:00. The PRE and POST readings for this MQC run
was done on Thickness.A4. The PRE is called "PRE MQC 500 WAFERS" the post is
called "POST MQCBP2 PART4". Thickness and Std.Dev readings were L=1253/11.2 and
R=1130/5.5. Particle results were::
Left Right
---- -----
7) 48 102
Sum) 389 653
Scr) 1.69mm 0mm
The file numbers for this run in the UV1050 are (Pre->L=2814, R=2815)(Post->
L=2816, R=2817).
Pad count after these two MQC wafers were run was 503. I've just talked to EE
and there going to go get the new Slurry drum. The time is 23:45.
________________________________________________________________________________
5. EE will REMOVE current Pad and SAVE IT Please (put label on it "Bryan P")!
** NOTE - Leave SETUP for 4" DISK as I will do New Slurry Tests with
the 4" Disk and appropriate Offsets.
6. EE will get 18% barrels of SC1 slurry outside Ashland's office.
7. EE will install slurry and calibrate flows. Use small pump to keep
slurry in barrell mixed.
8. EE will do 20 Cond'n Cycles with the Recipe - "NWPadBP3"
(Note the Default # of Cond'n cycles is now 2).
________________________________________________________________________________
There was some concern as to weather the carriers should be changed with the
pad. The counts were above 400. I had them changed with the pad. You didn't
mention anything special about the carriers so I didn't think there would be
a problem.
The pad and carrier change was completed at ~1:30AM 5/8/97. EE have placed the
pad in the backroom labeled HOLD FOR BRYAN POLLARD.
________________________________________________________________________________
9. Ops/PSS will do 20 Breakins with recipe "NwPadBP3".
________________________________________________________________________________
Done. This was started at ~2:30AM. It finished at ~4:00AM. There were no
alarms/problems with the breakins.
________________________________________________________________________________
10. Ops/PSS will do an MQC run with recipe "MQCBP2".
- Save Delta Tx map in Thickness.A4.
- Log OUT run (LVNE) as an MQC with Particles also.
________________________________________________________________________________
MQC was started at ~4:05AM. Wafers were polished with no problems(ie alarms)
Removal rate and Std.Dev was L=1385/17.8, R=1244/17.9. Particle results were:
Left Right
---- -----
7) 79 75
Sum) 379 342
Scr) 0 1.48
The file numbers for this run in the UV1050 are (Pre->L=2818, R=2819)(Post->
L=2824, R=2825).
Since the Std.Dev was high (> 10%) I'm going to step 11 and running 12 more
breakin wafers.
________________________________________________________________________________
11. If uniformity is > 10% then do 12 more Bkins on "NwPadBP3" then go to
#12 - otherwise just go to #12 with no additional Bkins.
________________________________________________________________________________
Done. 12 more breakins were started at 4:45am. I let them run and then let the
system sit in wet idle for ~30 minutes.
________________________________________________________________________________
12. Ops/PSS will do an MQC run with recipe "MQCBP2".
- Save Delta Tx map in Thickness.A4.
- Log OUT run (LVNE) as an MQC with Particles also.
________________________________________________________________________________
I ran two breakin wafers(NwPadBP3) after letting the system sit for ~30 minutes.
The pad count at this time is 36 wafers. Thickness and Std.Dev readings were
L=1418/16.7 and R=1221/16.3. Particle results were::
Left Right
---- -----
7) 66 72
Sum) 369 365
Scr) 0 16.8(I've saved this wafer for you to look at.
Instead of going right to another set of MQC's I requested another set of
Breakin wafers. There's currently 12 going now.
________________________________________________________________________________
13. Ops/PSS will do an MQC run with recipe "MQCBP2".
- Save Delta Tx map in Thickness.A4.
- Log OUT run (LVNE) as an MQC with Particles also.
I will continue testing to Optimize for particles/scratches in the morning.
NOTE this is very urgent as Lot JL1509 is on HOLD until I get an 18% process
in place to split it.
Thanks,
Bryan
|
| 7.373 | A2 plans for tonight - Split lot is running | STRATA::POLLARD | | Thu May 08 1997 19:12 | 24 |
| Finished up the Conditioning tests and all looked good (up to 500waf).
We've taken all day to get the 18% in spec for uniformity. It was
very Center fast - it finally came in after we changed the Right Carrier
(which didn't improve all day as the Left one did).
Rich and I started the split lot - JL1509. The send aheads are running on
CMP.A2 for the 18% split. Rich will target the rest of the 18% split and
finish it up. The std portion can be run on CMP.A1 (or CMP.A2 when everything
gets changed back to normal).
For EE to get CMP.A2 back to normal the following will be done:
1. Remove 18% slurry and reconnect STD slurry.
2. Change Pad (Please SAVE this PAD also as it acted weird!)
3. Change 4" Disk back to STD 6" Disk.
4. Change the following variables -
Var 126 "Prog Cond Offset" back to 96,500.
Var 71 back to 1.55
7. Do std startup procedures for New Pad. - Bk-ins and MQC.
Thanks,
Bryan P.
|
| 7.374 | Eng. work completed, monthly completed | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 09 1997 06:07 | 14 |
|
Removed 18% barrel and hooked tool back up to house slurry.
Completed monthly PM
changed the variables back to normal per P.E. and put
the 6" disc back on. Unfortunately, all of the sweep
parameters and ID/OD parameters were changed and the
conditioner crashed into the slurry distribution tubes.
After the sweep variable were set to match A1, the tool
conditioned fine. There was no apparent damage to the
conditioner or tubes.
|
| 7.375 | Scratches on Wafers / Cleaning Station Air Motors | ASDG::POIRIER | | Fri May 09 1997 20:33 | 8 |
| Scratches / Air Motors:
----------------------
The system was scratching wafers this morning. Both cleaning station
air motors were not rotating. Since there was only 1 motor in stock,
the system will remain down until the 2nd motor arrives via FedEx
tomorrow morning.
C Shift.
|
| 7.376 | Sweep parameters | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 09 1997 20:42 | 8 |
|
re - .374
When you have a recipe called up, the sweep parameters
are set as well under Sweep Param. All we had to do was
select a normal 6" conditioner recipe such as MQC and the
sweep recipe would have been fine.
BJ
|
| 7.377 | 18% Game Plan | STRATA::POLLARD | | Tue May 13 1997 18:32 | 30 |
| Game plan for 18% Split lots JD1453 and JD1457.
Today we hooked up the 18% SC1 and tried to get it up with the old pad
but uniformity was 25% Edge Fast so we did a pad change. After Bkins, the
first MQC was high at 16 and 17% Ctr Fast unif. (Removal Rates were ~ 1400A -
particles good at < 100). So we did additional Bkins and another MQC.
The results of the 2nd MQC were also bad with 15% Ctr Slow unif. So it
looks like we missed the whole window of opportunity.
So we're going to start over with a new pad and new carriers.
1. Regular slurry will be hooked back up to do Std Breakins and MQC.
2. Do Breakins and MQC until the Uniformity is in SPEC.
3. EE will hook up 18% slurry (keep same pad).
4. Do another std MQC with the 18% slurry. If all is in spec then run
the lots as described below (the uniformity can be as high as 11% on this
18% run).
The 2 lots (JD1453, JD1457) need to be split on the CMP.A tools as
follows (per Remark). Also note the lots need to be taken out of stores:
CMP.A1 - STD - wafers 1,2,5,6,9,10,13,14,17,18,21,22
CMP.A2 - 18% - wafers 3,4,7,8,11,12,15,16,19,20,23,24
NOTE - the wafers from JD1453 have been sorted with the 18% wafers in the
cassette next to CMP.A2 and the std wafers in the POD.
Thanks,
Bryan
|
| 7.378 | Bad uniformity.... GONE!! | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed May 14 1997 07:17 | 11 |
|
Tool failed 3 times for uniformity with 12% slurry.
The last straw was when the tool has 400A removal rate.
Went to change the pad and it came off with two fingers.
Replaced pad and the tool finally passed MQC's after
two rounds of MQC's. The tool was then swapped over
to 18% slurry and flow was calibrated. It now sits
in WET ILDE, ready for the next round of MQC's.
D shift
|
| 7.379 | Results of Bryans gameplan | YIELD::SHONG | | Wed May 14 1997 08:22 | 58 |
| Game plan for 18% Split lots JD1453 and JD1457.
Today we hooked up the 18% SC1 and tried to get it up with the old pad
but uniformity was 25% Edge Fast so we did a pad change. After Bkins, the
first MQC was high at 16 and 17% Ctr Fast unif. (Removal Rates were ~ 1400A -
particles good at < 100). So we did additional Bkins and another MQC.
The results of the 2nd MQC were also bad with 15% Ctr Slow unif. So it
looks like we missed the whole window of opportunity.
So we're going to start over with a new pad and new carriers.
1. Regular slurry will be hooked back up to do Std Breakins and MQC.
________________________________________________________________________________
Done. This was done on A-Shift and was ready for MQC's at ~8:30PM.
________________________________________________________________________________
2. Do Breakins and MQC until the Uniformity is in SPEC.
________________________________________________________________________________
A full boat(24) of breakins were ran first. MQC's failed on the first try with
high Std.Dev (~11%). I checked the map out and the tool is polishing edge fast.
Particles were good. Another set of 12 breakins were ran. Second set of MQC's
were ran and the removal rate for the second run was real bad ~350� for the
right carrier. We took a look at the pad and noticed the top pad was not stick-
ing well to the bottom pad. It was changed again and another set of MQC's were
started.
After the pad change we ran the conditioner for a while and then ran 10 break-
ins. MQC's were ran andd failed for high Std.Dev ~12% for the right carrier.
Ran some more breakins and MQC's. This time the Std.Dev came in at ~6%L and 9%R.
I turned the tool over for the 18% slurry hook up.
________________________________________________________________________________
3. EE will hook up 18% slurry (keep same pad).
________________________________________________________________________________
Done. EE hooked the 18% slurry tank up and flushed the 12.8% line.
________________________________________________________________________________
4. Do another std MQC with the 18% slurry. If all is in spec then run
the lots as described below (the uniformity can be as high as 11% on this
18% run).
________________________________________________________________________________
I requested 6 breakins be ran prior to running the MQC monitors. There currently
in process. Results should be available after passdown.
________________________________________________________________________________
The 2 lots (JD1453, JD1457) need to be split on the CMP.A tools as
follows (per Remark). Also note the lots need to be taken out of stores:
CMP.A1 - STD - wafers 1,2,5,6,9,10,13,14,17,18,21,22
CMP.A2 - 18% - wafers 3,4,7,8,11,12,15,16,19,20,23,24
NOTE - the wafers from JD1453 have been sorted with the 18% wafers in the
cassette next to CMP.A2 and the std wafers in the POD.
Thanks,
Bryan
|
| 7.380 | CMP.A2 Plans - Splits finishing up | STRATA::POLLARD | | Wed May 14 1997 17:53 | 30 |
|
The 18% splits for JD1453 and JD1457 have been completed.
Send aheads for the std portion of JD1457 were processed and it was found
out that the wafers had already been polished on Saturday (they had scrapped
2w at that time due to overpolish) and now 2 more wafers were scrapped.
Rich is doing 100% readings to be sure the lot is set.
Also Rich will read the std portion of JD1453 to be sure it set - if not
he will process these wafers on CMP.A2 and then CMP.A2 will need to go
down as explained below.
On the Tool side of things CMP.A2 didn't do so Hot today either. The
Head-to-Head variation was very high on the 18% slurry-
L- 1187A 9.8% R- 1660A 6.1%
So once we converted back to std slurry another MQC was done - results were:
L- 1167A 14.5% R- 1619A 9.8%
The carriers were swapped to see if the problem was just the carrier-
results were:
L- 1696A 14.5% R- 1059A 9.6%
So unexpectedly the rates went with the carrier and the uniformity stayed
with the splindle. So AFTER the work with JD1453 is completed the following
needs to be done:
1. Std Pad Change
2. Change Both Carriers - and SAVE both Carriers with a LABEL to
HOLD for Jim Tooker.
3. Do Std Breakins and MQC's.
/Bryan Pollard
|
| 7.381 | wafers left on pad | FABSIX::J_SWENSON | | Thu May 15 1997 20:29 | 16 |
| Wafer being left on pad
-----------------------
- right carrier leaving wafers on pad.
. found bad check valve (replaced)
. replaced three plate screws
. found white o-ring to be broken (replaced)
. returned tool back to production.
c-shift
|
| 7.382 | pad change | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 16 1997 05:58 | 5 |
|
Replaced pad because it failed MQC's for bad unif. and
had a bubble
D shift
|
| 7.383 | cmp.a2 pad/carrier change | FABSIX::J_SADIN | Freedom isn't free. | Sun May 18 1997 19:55 | 10 |
|
Performed weekly pm during routine 24hr pad change (after failed
mqcs). Changed pad and carriers. Tool then proceeded to fail 3 sets of
mqcs (high unif). Replaced pad with a fresh one and mqcs are running
now.
a-team
|
| 7.384 | Important Work for CMP.A tools Sun Nite/Mon Morn. | STRATA::POLLARD | | Fri May 30 1997 17:44 | 29 |
| **** IMPORTANT Info for Sunday night B shift on CMP.A tools! *******
Please DO the following if a normal PAD change is required on a CMP.A tool
on Sunday Night/Monday morning AFTER 2am:
(this is in preparation to convert to the new 4" conditioning recipes which
will be turned on by TDCO Monday during the day)
1. Install the 4" Conditioning Disk in place of 6"
2. Change the following variables: Var#126- 95,000 Var#71- 0.59
3. Install New Pad as normal.
4. Use Recipe "CRFSTBKN" to do 10 Conditioning Sweeps
(set # Sweeps back to 2 when finished).
5. Use Recipe "CRFSTBKN" to do 10 Break-ins.
6. On CMP.A1 use Recipe "MQCBP" to do MQC.
On CMP.A2 use Recipe "MQCBP3" to do MQC.
7. If MQC's pass leave up for Bryan to put TDCO on-line at 8am.
If fails go to #8.
8. If MQC's failed then evaluate whether the removal rate is Center Fast or
Center Slow:
- If it is Center Fast Repeat #4 and #5 and #6 - if it passes
system will wait for Bryan to put on TDCO at 8am. If it fails start
with another Pad.
- If it is Center Slow do 10 conditioning cycles with Recipe "CRSLWBKN"
and do 10 Breakin wafers with the same recipe then repeat #6. If
it passes system will wait for Bryan to put on TDCO at 8am. If it fails
start with another Pad.
Bryan Pollard
|
| 7.385 | TDCO for New Cond'n & Breakins | FABSIX::B_POLLARD | | Mon Jun 02 1997 16:57 | 106 |
| Please read the following TDCO which went on-line today for the New
Conditioning cycles and the New Breakin Procedure for New Pads.
Thanks
Bryan Pollard
DISK$DCS2:[UDOC.QUAL]BK20-00000-0006.T REV L 11-JUN-1996 PAGE 10 OF 13
| 6.1 Temporary D.C.O. Form
Originator__Bryan Pollard____ TEMPORARY TDCO # _________________
Tel Ext__4036_Date__5/29/97__ DOCUMENT Copy # _____ of ______
CHANGE ORDER Date Of Issue___________
_______________________________________________________________________________
PROBLEM: |1ST ISSUE APPROVAL STAMP
Conditioning part of all recipes have been updated for|EXPIRATION DATE
4" disk. This change will extend the pad life from |________
the typical 250-300 wafers up to 500 wafers. |
Also changes have been made to break-in recipes. |
______________________________________________________|_________________________
DESCRIPTION OF CHANGE: |2ND ISSUE APPROVAL STAMP
The conditioning sweep parameters (which are not |EXPIRATION DATE
typically seen by operators) have been updated for all|________
production recipes - MQC, PMD, ILD, STI. The sweep |
has also been changed from 1 to 2 & from Post |
to Pre Condition. |
|
The limit for Pad Life is extended to 500 wafers |________________________
(with 24 hour MQC's in Spec - Section 4.1.11) |3RD ISSUE APPROVAL STAMP
|EXPIRATION DATE
Also changes have been to the Pad Breakin procedures -|________
these apply to section 3.1.1 and to various parts of |
4.1 of the spec and are described on the second page. |
|
______________________________________________________|_______________________
DURATION OF TDCO OR NUMBER OF LOTS TO BE PROCESSED: 30 days
______________________________________________________________________________
DOCUMENT # / TITLE AFFECTED
HF6O-0069 / STRAUSBAUGH 6DS-SP (CMP.A1, CMP.A2) Chemical Mechanical
Planarization Operations Specification.
_______________________________________________________________________________
1ST ISSUE APPROVALS:| 2ND ISSUE APPROVAL | 3RD ISSUE APPROVAL | EARLY REMOVAL
| | | AUTHORIZATION
SIGNATURE/BADGE/DATE|SIGNATURE/BADGE/DATE|SIGNATURE/BADGE/DATE|SIGN./BADGE/DATE
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
IF LOT SPECIFIC: Upon completion of the lots, the originator must remove, sign,
date this TDCO form and return it Document Control (HLO1-1/P5).
____________________ ____________ ___________________
ORIGINATOR DATE DATE LOTS COMPLETED
---------------
|d|i|g|i|t|a|l|
---------------
DISK$DCS2:[UDOC.QUAL]BK20-00000-0006.T REV L 11-JUN-1996 PAGE 10 OF 13
| 6.1 Temporary D.C.O. Form
Originator__Bryan Pollard____ TEMPORARY TDCO # _________________
Tel Ext__4036_Date__5/29/97__ DOCUMENT Copy # _____ of ______
Page 2 CHANGE ORDER Date Of Issue___________
_______________________________________________________________________________
The Break-In recipes and procedures for breaking in a New Pad have been altered-
the new procedure will be as follows (applies to section 4.1.6- 4.1.14):
1. Run 10 Conditioning cycles with the recipe "CRFSTBKN" (stands for
CenterFast Break-in - most new pads start with a Center Fast polish).
2. Run 10 - 50K oxide wafers thru the recipe "CRFSTBKN".
3. Do monitor run with recipe "MQC"
4. If monitor fails uniformity then do the following:
- If monitor is Center Fast - run 10 more conditioning cycles with
the recipe "CRFSTBKN" then do 10 more 50K oxide dummies with the same
recipe and repeat MQC. If second MQC fails change the pad and start
over.
- If monitor is Center Slow - run 10 conditioning cycles with the recipe
"CRSLWBKN" then do 10 more 50K oxide wafer with the same recipe and
repeat MQC. If second MQC fails change the pad and start over.
- For either case, record in CMP Notesfile how many breakins are required
to get the uniformity in spec.
The Break-In recipes and procedures for breaking in a USED Pad have also been
altered- the new procedure will be as follows (applies to section 4.1.6 -
4.1.14):
1. All breakins which previously were done with the "USEDPAD" recipe will
be done with the "CRSLWBKN" recipe except if an MQC has failed
due to being Center Fast then use the CRFSTBKN recipe.
2. If a 24 hour MQC fails and is Center Slow then do 20 conditioning
cycles with the "CRSLWBKN" recipe and repeat MQC - if it passes system
is up if it fails then the system will require a pad change.
|
| 7.386 | set up for 4" conditioning | FABSIX::J_SADIN | Freedom isn't free. | Mon Jun 02 1997 20:03 | 9 |
|
set up for 4" conditioner. Just had to change the variables (126
and 71) to support 4" conditioning.
a-shift
|
| 7.387 | Please Save the Pads! | STRATA::POLLARD | | Wed Jun 04 1997 10:41 | 6 |
| NOTE - During the time of the 4" Disk TDCO - Please SAVE a full-length
cross-section of all pads on the A tools. Label them with the tool,
# of wafers, Date, and "Hold for Bryan Pollard".
Thanks
Bryan Pollard
|
| 7.388 | Pad change - Bad uniformity | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Jun 05 1997 07:13 | 5 |
|
Pad change due to poor uniformity. Pad was replaced
and saved for Bryan.
D shift
|