TOPIC | 5.0 | CMP.A1 EE/PE PASSDOWNS |
| 5.135 | Mon Jan 22 1996 14:04 | The new airmotors have arrived | 8 lines |
| 5.136 | Mon Jan 22 1996 15:05 | New robot calibration procedures | 9 lines |
| 5.144 | Tue Jan 30 1996 19:13 | robot vacuum switch calibration | 25 lines |
| 5.146 | Wed Jan 31 1996 16:10 | "wafer present on robot" error problem | 23 lines |
| 5.156 | Fri Feb 16 1996 14:35 | Software bug | 15 lines |
| 5.160 | Fri Mar 01 1996 15:39 | New wafer push bars installed | 9 lines |
| 5.180 | Wed Mar 20 1996 16:25 | Purge pressure increased on cmp.a1 | 10 lines |
| 5.181 | Wed Mar 20 1996 16:26 | System upgraded with new load and clean station rings | 8 lines |
| 5.191 | Mon Apr 08 1996 13:43 | New Strasbaugh maintenance manuals are here | 12 lines |
| 5.200 | Thu May 02 1996 16:31 | Downforce calibration performed on cmp.a1 | 7 lines |
| 5.202 | Fri May 10 1996 13:22 | Fairchild E-P analog counter settings for calibrations | 42 lines |
| 5.205 | Fri May 17 1996 16:26 | Robot position over load variable adjusted | 16 lines |
| 5.270 | Thu Oct 10 1996 16:48 | Send cassette water dunk featuer now operational | 7 lines |
| 5.321 | Thu Jan 02 1997 18:43 | status of cmp.a1 | 23 lines |
| 5.374 | Tue Apr 29 1997 16:26 | New robot cable has been ordered | 5 lines |
TOPIC | 6.0 | CMP.A1 PM CHECKSHEETS |
| 6.11 | Thu Dec 21 1995 15:04 | No PM necessary for WW26 FY96 | 6 lines |
| 6.15 | Fri Jan 19 1996 10:25 | monthly PM waived | 7 lines |
TOPIC | 7.0 | CMP.A2 EE/PE PASSDOWNS |
| 7.120 | Mon Jan 22 1996 15:06 | New airmotors have arrived | 8 lines |
| 7.129 | Fri Feb 09 1996 16:59 | cmp.a2 robot upgrade update | 13 lines |
| 7.138 | Fri Feb 16 1996 14:33 | Softt ware bug | 15 lines |
| 7.143 | Fri Mar 01 1996 15:39 | New wafer push bars installed | 9 lines |
| 7.155 | Wed Mar 20 1996 16:27 | System upgraded with new load and clean station rings | 8 lines |
| 7.157 | Thu Mar 21 1996 16:12 | Performed left & right spindle downforce and backpressure calibration | 13 lines |
| 7.168 | Mon Apr 08 1996 13:42 | New Strasbaugh maintenance manuals are here | 12 lines |
| 7.176 | Wed May 01 1996 16:17 | Down force calibration performed today | 10 lines |
| 7.180 | Thu May 09 1996 17:21 | New E-P regulator installed on left spindle | 10 lines |
| 7.181 | Fri May 10 1996 13:23 | Fairchild E-P analog counter settings for calibrations | 42 lines |
| 7.234 | Thu Oct 03 1996 17:00 | Wafer load problems | 18 lines |
| 7.244 | Thu Oct 10 1996 16:48 | Send cassette water dunk featuer now operational | 7 lines |
TOPIC | 8.0 | CMP.A2 PM CHECKSHEETS |
| 8.11 | Thu Dec 21 1995 15:07 | No PM necessary for WW26 FY96 | 6 lines |
| 8.17 | Fri Feb 09 1996 17:12 | Waiver for WW32 Monthly PM | 7 lines |
| 8.38 | Fri Jun 07 1996 16:33 | Annual PM resheduled for WW50 due to unscheduled down time | 6 lines |
TOPIC | 45.0 | CMP-SCRUB.A1 EE/PE PASSDOWNS |
| 45.80 | Fri Feb 16 1996 10:50 | Contact phone numbers for OnTrak | 27 lines |
| 45.89 | Fri Mar 29 1996 15:05 | The parts for cmp-scrub.a1 will be here Saturday, 3/30/96 | 8 lines |
| 45.104 | Tue May 14 1996 17:16 | The new NH4OH drip manifolds have been installed | 7 lines |
| 45.106 | Tue May 14 1996 17:18 | New NH4OH drip manifolds have been installed | 7 lines |
| 45.124 | Fri Jun 28 1996 11:28 | OnTrak after hours support | 6 lines |
| 45.132 | Fri Aug 16 1996 15:59 | Do not use the rubber boots on the carriers | 12 lines |
| 45.140 | Wed Oct 02 1996 17:27 | Update on pressure interlock upgrades | 9 lines |
| 45.142 | Fri Oct 04 1996 17:03 | Update on pressure interlock upgrades | 15 lines |
| 45.148 | Thu Oct 17 1996 15:56 | DI Water pressure switch setpoint lowered | 8 lines |
| 45.168 | Wed Jan 22 1997 15:39 | Status of new software rev. | 8 lines |
TOPIC | 46.0 | CMP-SCRUB.A1 PM CHECKSHEETS |
| 46.12 | Thu Dec 21 1995 15:09 | No PM necessary for WW26 Fy96 | 6 lines |
TOPIC | 47.0 | CMP-SCRUB.A2 EE/PE PASSDOWNS |
| 47.79 | Fri Feb 16 1996 10:50 | Contact phone numbers for OnTrak | 27 lines |
| 47.84 | Tue Mar 12 1996 15:57 | cracked index station cover | 6 lines |
| 47.107 | Fri Jun 28 1996 11:30 | OnTrak after hours support | 6 lines |
| 47.112 | Fri Aug 16 1996 15:59 | Do not use the rubber boots on the carriers | 12 lines |
| 47.113 | Wed Sep 04 1996 14:45 | Spin station motor controller replaced | 12 lines |
| 47.114 | Wed Sep 04 1996 16:41 | Adjusted spin station wafer sensor | 4 lines |
| 47.121 | Thu Oct 03 1996 17:06 | OnTrak upgrade work continues | 6 lines |
| 47.123 | Fri Oct 04 1996 17:04 | Update on pressure interlock upgrades | 15 lines |
| 47.137 | Wed Jan 22 1997 15:41 | status of software upgrade | 8 lines |
TOPIC | 48.0 | CMP-SCRUB.A2 PM CHECKSHEETS |
| 48.11 | Thu Dec 21 1995 15:11 | No PM necessary for WW26 FY96 | 6 lines |
TOPIC | 49.0 | CMP-SCRUB.A3 EE/PE PASSDOWNS |
| 49.1 | Fri Jun 28 1996 11:30 | OnTrak after hours support | 6 lines |
| 49.31 | Wed Oct 02 1996 17:26 | Update on pressure interlock upgrades | 9 lines |
| 49.32 | Fri Oct 04 1996 17:04 | Update on the pressure interlock upgrades | 15 lines |
TOPIC | 54.0 | CMP-SCRUB.C1 EE/PE PASSDOWNS |
| 54.7 | Wed Jan 22 1997 15:43 | Black Empak cassettes can now be used | 5 lines |
TOPIC | 66.0 | Tue Aug 27 1996 13:46 | FY97 PM SCHEDULE (with corrected system name) | 160 lines |