TOPIC | 2.0 | PAD CHANGE DATA |
| 2.33 | Tue Nov 28 1995 19:25 | b2 change | 4 lines |
| 2.139 | Sun Jan 28 1996 14:00 | Pad change B1 | 7 lines |
TOPIC | 5.0 | CMP.A1 EE/PE PASSDOWNS |
| 5.114 | Mon Nov 27 1995 19:03 | passdown | 8 lines |
| 5.167 | Mon Mar 11 1996 19:19 | vac line torn | 8 lines |
| 5.179 | Mon Mar 18 1996 19:32 | semi annual in progress | 6 lines |
| 5.192 | Wed Apr 10 1996 20:15 | water nozzles added | 5 lines |
| 5.242 | Tue Sep 10 1996 20:36 | load chucks | 5 lines |
| 5.297 | Tue Dec 10 1996 19:30 | slurry detection installed | 6 lines |
| 5.386 | Wed May 07 1997 21:09 | axis 5 motor control module | 5 lines |
TOPIC | 6.0 | CMP.A1 PM CHECKSHEETS |
| 6.38 | Tue May 28 1996 19:59 | weekly completed | 69 lines |
| 6.40 | Tue Jun 11 1996 21:31 | ww50 weekly pm | 68 lines |
| 6.48 | Sat Jul 27 1996 14:07 | WEEKLY COMPLETED WW4 | 71 lines |
TOPIC | 7.0 | CMP.A2 EE/PE PASSDOWNS |
| 7.102 | Mon Nov 27 1995 19:05 | low slurry flow | 23 lines |
| 7.103 | Tue Nov 28 1995 19:19 | changed v31 | 7 lines |
| 7.125 | Tue Feb 06 1996 19:10 | robot upgrade | 13 lines |
| 7.134 | Sun Feb 11 1996 19:23 | MQC's are fine | 6 lines |
| 7.153 | Mon Mar 18 1996 19:30 | scratches | 9 lines |
| 7.164 | Sun Mar 31 1996 19:37 | software upgrade completed | 11 lines |
| 7.166 | Mon Apr 01 1996 19:20 | new water nozzles added | 7 lines |
| 7.185 | Sun May 19 1996 20:04 | lift off delay | 13 lines |
| 7.189 | Tue May 28 1996 20:20 | passdown | 10 lines |
| 7.219 | Tue Sep 10 1996 20:38 | new load cups bridge location | 10 lines |
| 7.229 | Mon Sep 30 1996 21:17 | broke wafers | 9 lines |
| 7.371 | Wed May 07 1997 21:18 | 18% slurry | 5 lines |
TOPIC | 8.0 | CMP.A2 PM CHECKSHEETS |
| 8.25 | Sun Mar 31 1996 19:35 | 3/31/96 weekly completed | 74 lines |
| 8.31 | Sun May 12 1996 19:10 | WW 46 weekly pm completed | 74 lines |
| 8.34 | Tue May 28 1996 19:35 | weekly completed | 69 lines |
| 8.36 | Tue May 28 1996 20:00 | weekly completed | 69 lines |
| 8.58 | Sun Sep 15 1996 11:36 | ww12 weekly pm completed | 74 lines |
TOPIC | 15.0 | STRASBAUGH GENERAL ISSUES |
| 15.3 | Fri Oct 25 1996 17:37 | filter change | 29 lines |
TOPIC | 17.0 | CMP.B1 EE/PE PASSDOWNS |
| 17.97 | Mon Nov 20 1995 19:17 | passdown | 28 lines |
| 17.104 | Tue Nov 28 1995 19:20 | passdown | 13 lines |
| 17.181 | Sun Jan 28 1996 19:28 | power glitch | 15 lines |
| 17.205 | Tue Feb 27 1996 19:38 | mapper problems | 23 lines |
| 17.211 | Tue Mar 05 1996 19:40 | mapper error is back | 18 lines |
| 17.219 | Mon Mar 11 1996 19:24 | mapper failed/ offline | 6 lines |
| 17.245 | Wed Apr 24 1996 20:14 | hard disk / NU | 24 lines |
| 17.295 | Sun Jul 14 1996 20:23 | mapper error | 10 lines |
| 17.331 | Sun Aug 18 1996 20:29 | Carrier 5 changed | 6 lines |
| 17.403 | Wed Oct 09 1996 19:27 | 494d software tested | 39 lines |
| 17.408 | Mon Oct 14 1996 17:37 | 494 software install | 10 lines |
| 17.413 | Wed Oct 16 1996 18:37 | rotation #1 trouble shooting | 18 lines |
| 17.416 | Fri Oct 18 1996 18:05 | passdown | 16 lines |
| 17.421 | Tue Oct 22 1996 19:11 | passdown | 23 lines |
| 17.527 | Mon Mar 10 1997 17:59 | elevator #1 | 25 lines |
TOPIC | 18.0 | CMP.B1 PM CHECKSHEETS |
| 18.11 | Mon Dec 11 1995 18:23 | weekly completed | 60 lines |
TOPIC | 19.0 | CMP.B2 EE/PE PASSDOWNS |
| 19.15 | Tue Nov 28 1995 19:21 | passdown | 26 lines |
| 19.70 | Sun Jan 28 1996 19:30 | inverter error | 14 lines |
| 19.118 | Wed Feb 28 1996 19:44 | passdown | 7 lines |
| 19.163 | Mon May 13 1996 21:09 | switch boxes | 10 lines |
| 19.164 | Tue May 14 1996 21:33 | passdown | 18 lines |
| 19.272 | Mon Nov 18 1996 19:19 | table stall / due to inverter temp | 14 lines |
| 19.305 | Sun Feb 02 1997 20:12 | unload cup pedestal crash | 18 lines |
| 19.318 | Wed Mar 12 1997 19:41 | multi head motor key | 28 lines |
TOPIC | 21.0 | CMP.B3 EE/PE PASSDOWNS |
| 21.14 | Mon May 13 1996 21:11 | Transfer paddle retaught | 8 lines |
| 21.15 | Tue May 14 1996 21:37 | passdown | 7 lines |
| 21.20 | Tue Jun 11 1996 21:25 | boot errors | 17 lines |
| 21.42 | Sun Jul 21 1996 20:24 | DOWNFORCE AND EP REGULATOR | 58 lines |
| 21.131 | Sun Dec 15 1996 18:32 | small slurry leak pump 1 | 7 lines |
TOPIC | 31.0 | SPEEDFAM GENERAL ISSUES |
| 31.7 | Fri Oct 25 1996 17:37 | filter change | 29 lines |
TOPIC | 37.0 | CMP.C1-7 EE/PE PASSDOWNS |
| 37.9 | Tue Sep 10 1996 20:40 | passdown | 10 lines |
TOPIC | 45.0 | CMP-SCRUB.A1 EE/PE PASSDOWNS |
| 45.105 | Tue May 14 1996 21:21 | broken motor coupling | 7 lines |
TOPIC | 46.0 | CMP-SCRUB.A1 PM CHECKSHEETS |
| 46.8 | Wed Nov 29 1995 18:50 | weekly pm | 24 lines |
| 46.9 | Mon Dec 04 1995 19:08 | pm weekly | 25 lines |
| 46.18 | Mon Jan 29 1996 19:00 | 1/29/96 weekly performed | 26 lines |
TOPIC | 47.0 | CMP-SCRUB.A2 EE/PE PASSDOWNS |
| 47.75 | Sun Feb 11 1996 19:13 | System halted | 14 lines |
| 47.87 | Wed Mar 27 1996 18:34 | roller motor inner station | 12 lines |
| 47.97 | Mon May 13 1996 20:18 | passdown | 10 lines |
| 47.141 | Sun Mar 02 1997 19:18 | Knife belt/bearings replaced | 11 lines |
TOPIC | 49.0 | CMP-SCRUB.A3 EE/PE PASSDOWNS |
| 49.26 | Sun Sep 29 1996 20:20 | spin station errors | 37 lines |
TOPIC | 54.0 | CMP-SCRUB.C1 EE/PE PASSDOWNS |
| 54.1 | Tue Sep 17 1996 20:34 | heat xchanger primary | 9 lines |