TOPIC | 5.0 | CMP.A1 EE/PE PASSDOWNS |
| 5.368 | Wed Apr 16 1997 20:49 | Right carrier still falling off. | 8 lines |
| 5.383 | Fri May 02 1997 20:12 | Scratches, bad carrier | 7 lines |
TOPIC | 7.0 | CMP.A2 EE/PE PASSDOWNS |
| 7.345 | Thu Mar 27 1997 14:28 | Carrier Vacuum Problems | 16 lines |
| 7.363 | Sat Apr 26 1997 20:17 | PAD Change | 1 lines |
TOPIC | 17.0 | CMP.B1 EE/PE PASSDOWNS |
| 17.549 | Wed Apr 16 1997 20:53 | Elev 2 belt broke | 4 lines |
TOPIC | 19.0 | CMP.B2 EE/PE PASSDOWNS |
| 19.349 | Thu Jun 05 1997 18:47 | Defective scrubber motor. | 4 lines |
TOPIC | 21.0 | CMP.B3 EE/PE PASSDOWNS |
| 21.192 | Wed Apr 16 1997 20:56 | Removal problems | 3 lines |
TOPIC | 23.0 | CMP.B4 EE/PE PASSDOWNS |
| 23.70 | Sat Apr 26 1997 20:16 | AIR IN MEGA SYSTEM CAUSES SLURRY TO SPUTTER | 6 lines |
TOPIC | 37.0 | CMP.C1-7 EE/PE PASSDOWNS |
| 37.1 | Thu Aug 29 1996 10:02 | Replaced boot | 7 lines |
| 37.8 | Sat Sep 07 1996 18:24 | Ready to run process | 8 lines |
| 37.423 | Fri Mar 28 1997 19:37 | Continued alignments | 8 lines |
| 37.428 | Wed Apr 02 1997 20:31 | Both platen started leaking and they alignments went out | 10 lines |
TOPIC | 47.0 | CMP-SCRUB.A2 EE/PE PASSDOWNS |
| 47.155 | Thu May 01 1997 20:16 | TOOL LOCKED UP | 4 lines |
TOPIC | 49.0 | CMP-SCRUB.A3 EE/PE PASSDOWNS |
| 49.64 | Fri Apr 25 1997 20:26 | Replaced spindial sensor and driver cards | 17 lines |