TOPIC | 5.0 | CMP.A1 EE/PE PASSDOWNS |
| 5.209 | Sat Jun 01 1996 20:49 | SCRATCHES | 6 lines |
| 5.218 | Fri Jun 28 1996 20:12 | particles and uniformity after pad change | 5 lines |
| 5.219 | Fri Jun 28 1996 20:12 | also | 2 lines |
| 5.224 | Fri Jul 12 1996 20:24 | SCRATCHES | 9 lines |
| 5.232 | Thu Jul 25 1996 20:14 | UNIFORMITY,PARTICLES AND SCRATCHES | 7 lines |
| 5.272 | Fri Oct 11 1996 20:35 | particles. | 3 lines |
| 5.284 | Wed Oct 30 1996 19:00 | Hub alignment performed on left spindle | 6 lines |
| 5.291 | Sat Nov 23 1996 18:28 | uniformity problem | 9 lines |
| 5.309 | Fri Dec 20 1996 19:31 | water leak | 5 lines |
| 5.312 | Sat Dec 21 1996 19:18 | robot/vacuum line | 15 lines |
| 5.330 | Sat Jan 11 1997 18:15 | tanks filling problem | 12 lines |
| 5.361 | Thu Mar 27 1997 19:39 | long pad breakins | 15 lines |
| 5.378 | Thu May 01 1997 20:05 | Pad Conditioner roll pin Shot. | 20 lines |
TOPIC | 6.0 | CMP.A1 PM CHECKSHEETS |
| 6.93 | Wed May 14 1997 19:46 | ww 46 monthly p.m. completed | 164 lines |
TOPIC | 7.0 | CMP.A2 EE/PE PASSDOWNS |
| 7.200 | Fri Jun 28 1996 20:14 | particles | 2 lines |
| 7.203 | Thu Jul 11 1996 20:25 | system not detecting vacuum loss | 4 lines |
| 7.204 | Fri Jul 12 1996 20:13 | SCRATCHES | 11 lines |
| 7.220 | Fri Sep 13 1996 15:11 | Load adjustments/Slurry lines | 7 lines |
| 7.257 | Thu Oct 24 1996 19:31 | A2 Crash | 16 lines |
| 7.280 | Sat Nov 23 1996 18:42 | info for 11/22 end effector vac. problem | 16 lines |
| 7.287 | Thu Dec 12 1996 19:23 | Vacuum problems | 13 lines |
| 7.294 | Thu Dec 19 1996 19:25 | Right Carrier Problem | 12 lines |
| 7.299 | Sat Jan 11 1997 18:16 | tank filling problem | 14 lines |
| 7.307 | Thu Jan 23 1997 19:28 | ROBOT | 11 lines |
| 7.320 | Fri Feb 07 1997 19:47 | valves installed | 8 lines |
| 7.346 | Thu Mar 27 1997 19:27 | wafer crash a2/dummy wafers no product lost | 24 lines |
| 7.359 | Thu Apr 24 1997 19:58 | Left send Elevator Needs Adj. | 16 lines |
| 7.361 | Fri Apr 25 1997 20:26 | robot crash | 24 lines |
| 7.381 | Thu May 15 1997 20:29 | wafers left on pad | 16 lines |
TOPIC | 9.0 | STRASBAUGH CRASH FORMS |
| 9.49 | Sat Feb 01 1997 18:56 | robot crashes wafer | 68 lines |
TOPIC | 15.0 | STRASBAUGH GENERAL ISSUES |
| 15.10 | Thu Jan 23 1997 19:33 | gimbal assy's | 9 lines |
TOPIC | 17.0 | CMP.B1 EE/PE PASSDOWNS |
| 17.261 | Sat Jun 01 1996 20:52 | ROTATION AND DROPPED WAFER | 4 lines |
| 17.293 | Thu Jul 11 1996 20:27 | upgrade update | 2 lines |
| 17.317 | Sat Aug 10 1996 20:35 | B1 Particle test | 54 lines |
| 17.375 | Fri Sep 20 1996 19:33 | Robot Error | 5 lines |
| 17.376 | Fri Sep 20 1996 19:57 | Robot Squeaking/Unload cup 2 not lowering | 8 lines |
| 17.399 | Sat Oct 05 1996 20:16 | MQC failure/Down to ENG. | 3 lines |
| 17.406 | Fri Oct 11 1996 20:26 | carrier rotation error | 6 lines |
| 17.418 | Sat Oct 19 1996 20:37 | Parts on the way | 6 lines |
| 17.442 | Thu Oct 31 1996 10:42 | Carrier rotation out of tolerance error. | 20 lines |
| 17.446 | Fri Nov 01 1996 19:26 | B1 issues | 24 lines |
| 17.466 | Sat Nov 23 1996 18:22 | Particles | 11 lines |
| 17.470 | Fri Nov 29 1996 19:10 | Particles | 27 lines |
| 17.471 | Fri Nov 29 1996 19:39 | ex | 20 lines |
| 17.529 | Thu Mar 13 1997 19:39 | Wafer left in load cup 2 | 14 lines |
| 17.537 | Thu Mar 27 1997 19:43 | uniformity problem head 3 | 11 lines |
TOPIC | 19.0 | CMP.B2 EE/PE PASSDOWNS |
| 19.173 | Sat Jun 01 1996 20:57 | INDEX TABLE | 12 lines |
| 19.189 | Sat Jun 15 1996 20:21 | pad's changed, system cleaned | 7 lines |
| 19.196 | Sat Jun 22 1996 20:11 | down force calibrated due to head 2 removal rates. | 0 lines |
| 19.197 | Sat Jun 22 1996 20:22 | down force calibrated due to head 2 removal rates | 25 lines |
| 19.245 | Sat Oct 05 1996 20:28 | Vacuum error came and went ????? | 16 lines |
| 19.285 | Thu Jan 02 1997 17:53 | vacuum problem | 29 lines |
| 19.309 | Fri Feb 07 1997 19:44 | head two removal high | 14 lines |
TOPIC | 20.0 | CMP.B2 PM CHECKSHEETS |
| 20.33 | Sat Jun 08 1996 15:56 | MONTHLY P.M. COMPLETED FOR WW 49 | 174 lines |
| 20.41 | Fri Jul 12 1996 12:49 | ww2 monthly p.m. completed | 147 lines |
| 20.46 | Sat Aug 10 1996 16:59 | WW06 WEEKLY P.M. | 80 lines |
| 20.88 | Wed Apr 30 1997 20:35 | WW 44 WEEKLY COMPLETED FOR B2 | 99 lines |
TOPIC | 21.0 | CMP.B3 EE/PE PASSDOWNS |
| 21.60 | Sat Aug 10 1996 20:37 | B3 crash | 8 lines |
| 21.79 | Thu Sep 19 1996 20:19 | INVERTER PROBLEMS | 28 lines |
| 21.90 | Sat Oct 05 1996 20:31 | Mapper Errors | 7 lines |
| 21.105 | Thu Oct 24 1996 19:38 | particles/double slotted wafers/lift off problems | 16 lines |
| 21.123 | Sat Nov 23 1996 18:47 | Particles | 12 lines |
| 21.134 | Fri Dec 20 1996 19:30 | second table bearing pulled parts on there way | 4 lines |
| 21.150 | Sat Jan 11 1997 18:00 | pad change | 14 lines |
| 21.175 | Fri Mar 28 1997 19:22 | wafer slide out segment 3 of tup_b | 20 lines |
| 21.187 | Fri Apr 11 1997 15:52 | Slurry Detect Sensor, Fluid's cabinet leak, Slurry ysprayano carrier4 | 34 lines |
| 21.198 | Sat Apr 26 1997 19:53 | mapper error | 17 lines |
| 21.208 | Fri May 16 1997 17:58 | 5/15 carrier 4 issue | 17 lines |
| 21.214 | Fri May 23 1997 20:34 | Load problem | 23 lines |
| 21.218 | Fri May 30 1997 20:36 | Multiple Errors | 26 lines |
TOPIC | 22.0 | CMP.B3 PM CHECKSHEETS |
| 22.19 | Thu Sep 19 1996 13:48 | WW 12 WEEKLY P.M. COMPLETED | 87 lines |
| 22.23 | Sat Oct 12 1996 19:32 | B3 Weekly Complete | 91 lines |
| 22.51 | Thu Apr 24 1997 19:41 | cmp.b3 weekly p.m. completed for ww 43 | 101 lines |
TOPIC | 23.0 | CMP.B4 EE/PE PASSDOWNS |
| 23.36 | Wed Mar 05 1997 18:52 | carrier one e.p. not responding | 9 lines |
| 23.38 | Sat Mar 08 1997 19:21 | A and B tilts adjusted | 24 lines |
| 23.40 | Thu Mar 13 1997 19:42 | Tilt Adj. loc tighted | 11 lines |
| 23.41 | Thu Mar 20 1997 17:19 | Slurry pump 3 | 51 lines |
| 23.45 | Sat Mar 29 1997 19:19 | DI hose rupture | 27 lines |
| 23.47 | Sat Apr 05 1997 19:52 | guage installed | 13 lines |
| 23.81 | Sat May 10 1997 19:38 | Input 70 | 15 lines |
| 23.83 | Thu May 15 1997 20:34 | carrier 3/robot problem. | 16 lines |
TOPIC | 31.0 | SPEEDFAM GENERAL ISSUES |
| 31.12 | Fri Nov 08 1996 17:56 | Cmp.B3 ionizer turned off | 6 lines |
| 31.14 | Sat Jan 11 1997 18:07 | filters/rebuild kits for speedfam vac. | 13 lines |
| 31.17 | Sat Mar 15 1997 16:24 | wafer detect tested | 18 lines |
| 31.19 | Fri Mar 28 1997 19:25 | ionizers installed today | 3 lines |
TOPIC | 45.0 | CMP-SCRUB.A1 EE/PE PASSDOWNS |
| 45.164 | Thu Dec 19 1996 19:16 | Arm Home Error | 10 lines |
| 45.172 | Fri Mar 21 1997 19:53 | particles | 36 lines |
| 45.184 | Thu May 15 1997 20:37 | robot/recievestation | 9 lines |
| 45.190 | Thu May 29 1997 20:31 | Particles | 28 lines |
TOPIC | 49.0 | CMP-SCRUB.A3 EE/PE PASSDOWNS |
| 49.36 | Thu Oct 24 1996 19:22 | dropping wafers at recieve | 16 lines |
| 49.42 | Fri Dec 06 1996 15:47 | Time out wafer sensor spin station | 12 lines |
| 49.45 | Sat Jan 04 1997 19:26 | lower left inside brush station roller arm cracked | 10 lines |
| 49.82 | Fri May 23 1997 20:20 | ROBOT ISSUE | 45 lines |
TOPIC | 61.0 | GENERAL CMP ISSUES |
| 61.41 | Thu Jul 11 1996 20:30 | load cell shimmed | 6 lines |
| 61.57 | Sat Oct 12 1996 20:05 | {Power Glitch} | 8 lines |
| 61.81 | Sat Mar 29 1997 19:31 | Pad's Glazing on A and B Tools | 21 lines |
| 61.84 | Fri May 16 1997 20:26 | Slurry Purge | 13 lines |
TOPIC | 77.0 | IN-COMPLETE PMs |
| 77.1 | Wed Feb 05 1997 17:23 | ww32 incomplete weekly for cmp.b1 | 102 lines |