TOPIC | 2.0 | PAD CHANGE DATA |
| 2.12 | Wed Nov 15 1995 05:02 | .B1 Pad change | 8 lines |
| 2.14 | Wed Nov 15 1995 23:12 | A1 pad change | 8 lines |
| 2.16 | Thu Nov 16 1995 23:26 | B1 PAD CHANGE | 8 lines |
| 2.18 | Sat Nov 18 1995 01:19 | .A1 Pad change | 10 lines |
| 2.19 | Sat Nov 18 1995 05:06 | B1-bad change | 7 lines |
| 2.26 | Wed Nov 22 1995 23:52 | .B1 Pad change | 8 lines |
| 2.36 | Thu Nov 30 1995 08:20 | A1 Pad change | 10 lines |
| 2.38 | Fri Dec 01 1995 02:04 | CMP.B1 | 7 lines |
| 2.39 | Fri Dec 01 1995 05:27 | B1 PAD CHANGE | 9 lines |
| 2.57 | Wed Dec 13 1995 04:55 | A2 Pad change | 10 lines |
| 2.58 | Wed Dec 13 1995 22:43 | .A2 Pad change | 11 lines |
| 2.59 | Thu Dec 14 1995 04:53 | .A1 Pad change | 10 lines |
| 2.60 | Thu Dec 14 1995 07:22 | .A2 Pad change | 10 lines |
| 2.61 | Thu Dec 14 1995 22:54 | A1 Pad change | 10 lines |
| 2.62 | Fri Dec 15 1995 02:00 | A2 Pad change | 9 lines |
| 2.63 | Fri Dec 15 1995 02:05 | .B1 Pad change | 8 lines |
| 2.64 | Sat Dec 16 1995 07:11 | A1 Pad change | 10 lines |
| 2.87 | Fri Jan 05 1996 01:07 | PAD CHANGED CMP.B2 | 7 lines |
| 2.106 | Sat Jan 13 1996 01:40 | CMP.A2 | 10 lines |
| 2.107 | Sat Jan 13 1996 07:35 | B1 PAD CHANGE | 9 lines |
| 2.116 | Thu Jan 18 1996 03:44 | CMP.A1 | 10 lines |
| 2.121 | Sat Jan 20 1996 07:23 | CMP.A1 | 10 lines |
| 2.126 | Wed Jan 24 1996 00:18 | CMP.B2 | 8 lines |
| 2.131 | Fri Jan 26 1996 02:11 | CMP.A1 | 10 lines |
| 2.144 | Fri Feb 02 1996 21:45 | CMP.B2 | 8 lines |
| 2.146 | Wed Feb 07 1996 22:17 | CMP.B1 | 7 lines |
| 2.170 | Wed Feb 21 1996 02:40 | cmp.b1 | 7 lines |
| 2.171 | Thu Feb 22 1996 23:29 | CMP.A2 | 10 lines |
TOPIC | 5.0 | CMP.A1 EE/PE PASSDOWNS |
| 5.126 | Fri Jan 12 1996 06:39 | Rbot wafer detection vacuum sensor | 6 lines |
| 5.141 | Fri Jan 26 1996 07:13 | Robot problem back. | 4 lines |
| 5.174 | Sat Mar 16 1996 07:34 | Robot problem went away??? | 11 lines |
| 5.204 | Fri May 17 1996 08:38 | What's up A1 is down. | 6 lines |
| 5.256 | Fri Sep 27 1996 07:26 | It's just to many of them. | 15 lines |
| 5.271 | Fri Oct 11 1996 08:14 | Carriers,brushes,particles etc. | 15 lines |
| 5.307 | Thu Dec 19 1996 06:33 | robot, strange acting. | 13 lines |
| 5.311 | Sat Dec 21 1996 06:46 | robot failure. | 6 lines |
| 5.349 | Fri Feb 28 1997 06:29 | Conditioner sweep motor. | 9 lines |
| 5.376 | Thu May 01 1997 07:07 | Slurry supply change. | 8 lines |
| 5.381 | Fri May 02 1997 08:21 | Back to business. | 4 lines |
TOPIC | 6.0 | CMP.A1 PM CHECKSHEETS |
| 6.21 | Thu Feb 22 1996 22:18 | Weekly | 71 lines |
| 6.30 | Fri Apr 26 1996 00:06 | WW43 weekly PM | 69 lines |
| 6.44 | Thu Jul 04 1996 00:45 | CMP.A1 Shutdown Checksheet | 40 lines |
| 6.45 | Sat Jul 06 1996 07:38 | A1 START-UP | 35 lines |
| 6.50 | Sat Aug 10 1996 08:01 | ww6 weekly completed | 73 lines |
| 6.52 | Thu Aug 22 1996 01:13 | ww08 weekly p.m | 73 lines |
| 6.57 | Thu Sep 12 1996 01:30 | ww 11 weekly pm | 73 lines |
| 6.62 | Wed Oct 16 1996 08:04 | MONTHLY PM COMPLETED FOR WW16 | 153 lines |
| 6.63 | Fri Oct 25 1996 06:55 | ww17 weekly pm. | 71 lines |
| 6.92 | Sat May 10 1997 00:08 | ww45 weekly pm. | 79 lines |
TOPIC | 7.0 | CMP.A2 EE/PE PASSDOWNS |
| 7.187 | Thu May 23 1996 06:53 | robot sensor calibration. | 7 lines |
| 7.354 | Fri Apr 11 1997 07:37 | Scratches-uniformity. | 7 lines |
| 7.360 | Fri Apr 25 1997 08:18 | left send elevator works again. | 5 lines |
| 7.362 | Sat Apr 26 1997 08:30 | No crash. | 6 lines |
TOPIC | 8.0 | CMP.A2 PM CHECKSHEETS |
| 8.45 | Sat Jul 06 1996 07:38 | A2 START-UP | 35 lines |
| 8.48 | Thu Jul 25 1996 07:20 | ww4 weekly pm completed | 71 lines |
| 8.52 | Wed Aug 21 1996 07:57 | WW08 WEEKLY PM | 72 lines |
| 8.63 | Fri Oct 25 1996 07:02 | ww17 weekly pm. | 71 lines |
TOPIC | 17.0 | CMP.B1 EE/PE PASSDOWNS |
| 17.124 | Wed Dec 13 1995 07:00 | passdown | 9 lines |
| 17.153 | Sat Jan 13 1996 07:05 | SCRATCHES,SCRATCHES... | 10 lines |
| 17.267 | Thu Jun 06 1996 08:59 | rotation errors | 8 lines |
| 17.285 | Sat Jul 06 1996 08:21 | mapper problem | 15 lines |
| 17.347 | Thu Aug 29 1996 08:08 | head#2 rotation error. | 8 lines |
| 17.439 | Wed Oct 30 1996 07:42 | Recipes,carriers etc. | 16 lines |
| 17.441 | Thu Oct 31 1996 07:33 | Still out of Spec. | 14 lines |
| 17.492 | Thu Dec 26 1996 07:30 | Christmas crash. | 11 lines |
TOPIC | 18.0 | CMP.B1 PM CHECKSHEETS |
| 18.31 | Wed Apr 17 1996 08:14 | Weekly PM for WW42 completed | 81 lines |
| 18.35 | Sat May 18 1996 06:24 | Weekly PM completed for WW46 | 79 lines |
| 18.36 | Fri May 24 1996 23:40 | WW47 weekly pm | 82 lines |
| 18.40 | Fri Jun 07 1996 00:00 | ww49 weekly pm completed | 82 lines |
| 18.41 | Thu Jun 13 1996 00:29 | ww50 weekly pm | 81 lines |
| 18.43 | Wed Jun 26 1996 06:02 | ww52 weekly pm | 81 lines |
| 18.46 | Sat Jul 06 1996 04:32 | B1 STARTUP COMPLETED | 21 lines |
| 18.48 | Wed Jul 17 1996 22:51 | WEEKLY PM COMPLETED FOR WW3 | 79 lines |
| 18.49 | Wed Jul 24 1996 08:28 | ww4 weekly pm completed. | 79 lines |
| 18.54 | Wed Aug 21 1996 02:09 | ww08 weekly completed | 81 lines |
| 18.55 | Thu Aug 29 1996 01:37 | ww09 weekly pm completed. | 81 lines |
| 18.62 | Fri Oct 11 1996 06:16 | ww15 weekly PM. | 85 lines |
| 18.66 | Thu Nov 07 1996 06:30 | ww19 weekly pm. | 84 lines |
| 18.69 | Wed Nov 27 1996 23:36 | WW22 MONTHLY PM COMPLETE. | 179 lines |
| 18.73 | Thu Dec 26 1996 20:59 | ww26 weekly pm. | 84 lines |
| 18.79 | Tue Jan 21 1997 23:53 | WW30 weekly pm completed. | 86 lines |
| 18.86 | Thu Mar 13 1997 02:03 | ww37 weekly pm completed. | 103 lines |
| 18.86 | Thu Mar 13 1997 22:28 | ww37 weekly pm. | 103 lines |
TOPIC | 19.0 | CMP.B2 EE/PE PASSDOWNS |
| 19.180 | Fri Jun 07 1996 07:07 | Waferfly | 9 lines |
| 19.195 | Thu Jun 20 1996 07:48 | Wafer crash | 8 lines |
| 19.208 | Wed Jul 24 1996 08:02 | srubber not working | 12 lines |
| 19.227 | Fri Aug 30 1996 08:26 | Crash after crash | 12 lines |
| 19.232 | Thu Sep 12 1996 08:15 | Load flip initialization failure | 19 lines |
| 19.239 | Fri Sep 27 1996 08:34 | High particles. | 10 lines |
| 19.255 | Sat Nov 02 1996 07:44 | wafer crash. | 8 lines |
| 19.297 | Thu Jan 16 1997 07:50 | Chiller wouldn't operate. | 7 lines |
| 19.310 | Sat Feb 08 1997 04:51 | GOOD EXCUSE. | 24 lines |
| 19.335 | Fri Apr 18 1997 06:56 | New PPS ring experiment a flop... | 32 lines |
| 19.338 | Sat Apr 19 1997 08:35 | Just for a short time. | 5 lines |
TOPIC | 20.0 | CMP.B2 PM CHECKSHEETS |
| 20.24 | Fri Apr 19 1996 07:57 | Weekly PM completed for WW42 | 91 lines |
| 20.29 | Fri May 24 1996 05:12 | WW47 WEEKLY PM | 82 lines |
| 20.34 | Wed Jun 12 1996 00:29 | Weekly PM for WW50 completed | 82 lines |
| 20.40 | Sat Jul 06 1996 04:33 | B1 Startup completed | 21 lines |
| 20.42 | Sat Jul 20 1996 08:34 | ww3 weekly pm | 79 lines |
| 20.44 | Sat Aug 03 1996 01:01 | WW05 WEEKLY PM | 78 lines |
| 20.49 | Thu Aug 22 1996 06:19 | ww08 weekly pm | 79 lines |
| 20.53 | Fri Sep 13 1996 05:39 | ww11 weekly pm | 80 lines |
| 20.58 | Fri Oct 18 1996 00:49 | WW16 WEEKLY PM | 88 lines |
| 20.59 | Thu Oct 24 1996 23:01 | WW17 WEEKLY PM COMPLETE | 92 lines |
| 20.62 | Thu Nov 14 1996 06:03 | WEEKLY PM COMPLETED FOR WW20 | 84 lines |
| 20.65 | Fri Dec 06 1996 00:55 | WW23 Monthly PM complete. | 153 lines |
| 20.71 | Wed Jan 08 1997 01:15 | MONTHLY PM FOR WW28 COMPLETED | 153 lines |
| 20.72 | Thu Jan 16 1997 06:59 | WW29 WEEKLY PM COMPLETED. | 91 lines |
| 20.73 | Wed Jan 22 1997 06:51 | WW30 WEEKLY PM COMPLETED. | 88 lines |
| 20.76 | Sat Feb 15 1997 00:13 | ww33 weekly pm completed. | 110 lines |
| 20.79 | Fri Feb 28 1997 00:22 | WW35 WEEKLY PM COMPLETED. | 105 lines |
| 20.80 | Tue Mar 04 1997 21:21 | ww36 S/A pm completed. | 234 lines |
| 20.86 | Wed Apr 16 1997 01:14 | ww42 weekly pm. | 102 lines |
TOPIC | 21.0 | CMP.B3 EE/PE PASSDOWNS |
| 21.21 | Tue Jun 11 1996 22:49 | boot problem/no screen | 16 lines |
| 21.46 | Fri Jul 26 1996 08:20 | Warning status on scrubber | 11 lines |
| 21.53 | Wed Aug 07 1996 08:11 | B3, sensors getting tired. | 19 lines |
| 21.93 | Thu Oct 17 1996 06:42 | 15v Power supply | 9 lines |
| 21.215 | Sat May 24 1997 08:26 | No load problem but... | 14 lines |
TOPIC | 22.0 | CMP.B3 PM CHECKSHEETS |
| 22.7 | Sat Jul 06 1996 04:34 | B3 STARTUP COMPLETED | 21 lines |
| 22.14 | Sat Aug 24 1996 08:19 | WEEKLY PM FOR WW8 COMPLETED | 82 lines |
| 22.17 | Fri Sep 06 1996 08:13 | ww10 weekly pm | 80 lines |
| 22.25 | Wed Oct 30 1996 05:16 | ww18 - weekly PM. | 87 lines |
| 22.26 | Fri Nov 08 1996 07:18 | ww19 weekly pm. | 85 lines |
| 22.30 | Thu Dec 05 1996 05:43 | ww23 Weekly PM. | 83 lines |
| 22.37 | Sat Jan 18 1997 01:46 | ww29 monthly pm completed. | 159 lines |
| 22.46 | Wed Mar 19 1997 06:44 | ww38 weekly pm. | 100 lines |
| 22.50 | Fri Apr 18 1997 01:21 | ww42 monthly pm complete. | 191 lines |
| 22.55 | Fri May 23 1997 04:15 | ww47 weekly pm completed. | 101 lines |
TOPIC | 23.0 | CMP.B4 EE/PE PASSDOWNS |
| 23.9 | Fri Jan 17 1997 05:39 | interlock installed. | 9 lines |
| 23.12 | Sat Jan 18 1997 07:13 | Don't trash the carriers. | 6 lines |
| 23.69 | Sat Apr 26 1997 08:49 | Nothing but trouble. | 15 lines |
| 23.73 | Thu May 01 1997 06:44 | slurry alarm. | 5 lines |
| 23.78 | Fri May 09 1997 07:27 | Elevator#2. | 5 lines |
TOPIC | 24.0 | CMP.B4 PM CHECKSHEETS |
| 24.6 | Wed May 28 1997 07:46 | ww47 monthly pm completed | 187 lines |
| 24.7 | Wed May 28 1997 07:48 | ww48 weekly pm. | 103 lines |
TOPIC | 32.0 | CMP.B WAFER CRASH FORM |
| 32.21 | Thu Dec 26 1996 03:29 | B1 christmas crash. | 28 lines |
TOPIC | 45.0 | CMP-SCRUB.A1 EE/PE PASSDOWNS |
| 45.87 | Thu Mar 28 1996 07:02 | water leak | 8 lines |
| 45.102 | Thu May 09 1996 07:43 | Outside brrr station. | 9 lines |
| 45.114 | Sat Jun 15 1996 07:25 | I.B. drive shaft replacement. | 9 lines |
| 45.137 | Fri Sep 20 1996 08:34 | Brush stations went out. | 15 lines |
| 45.155 | Fri Nov 15 1996 23:32 | Some shorted wires. | 10 lines |
| 45.189 | Thu May 29 1997 08:25 | particles. | 26 lines |
TOPIC | 46.0 | CMP-SCRUB.A1 PM CHECKSHEETS |
| 46.22 | Thu Feb 29 1996 02:48 | ww35 weekly pm completed | 24 lines |
| 46.30 | Wed Apr 24 1996 23:07 | ww43 pm completed | 29 lines |
| 46.32 | Thu May 09 1996 06:51 | ww45 S/A PM completed? | 50 lines |
| 46.33 | Wed May 15 1996 00:55 | WW46 Wekly PM | 27 lines |
| 46.44 | Fri Jul 05 1996 23:45 | Startup check sheet. | 24 lines |
| 46.47 | Fri Jul 26 1996 06:45 | ww04 weekly pm | 27 lines |
| 46.82 | Wed Mar 05 1997 01:37 | ww36 weekly pm. | 31 lines |
TOPIC | 47.0 | CMP-SCRUB.A2 EE/PE PASSDOWNS |
| 47.72 | Thu Feb 01 1996 07:18 | o-ring or drive belt? | 10 lines |
| 47.90 | Wed Apr 03 1996 08:24 | door latch adjustment | 4 lines |
| 47.91 | Fri Apr 05 1996 07:42 | Inside brush station leak | 9 lines |
| 47.103 | Sat Jun 01 1996 06:15 | send st pulley assembly. | 7 lines |
| 47.116 | Thu Sep 05 1996 08:31 | robot fingers not closed. | 14 lines |
TOPIC | 48.0 | CMP-SCRUB.A2 PM CHECKSHEETS |
| 48.6 | Wed Nov 29 1995 07:21 | Weekly PM for WW22 completed | 23 lines |
| 48.27 | Tue Apr 16 1996 22:59 | ww42 weekly pm | 27 lines |
| 48.28 | Wed Apr 24 1996 23:35 | ww43 weekly pm | 27 lines |
| 48.31 | Fri May 17 1996 00:25 | WW 46 - Weekly | 26 lines |
| 48.42 | Fri Jul 05 1996 23:50 | STARTUP after SHUTDOWN. | 24 lines |
| 48.45 | Fri Jul 26 1996 01:42 | ww04 weekly pm | 25 lines |
| 48.57 | Fri Oct 04 1996 01:07 | ww14 weekly pm | 25 lines |
| 48.81 | Sat Mar 15 1997 04:06 | S/A PM COMPLETED. | 95 lines |
TOPIC | 49.0 | CMP-SCRUB.A3 EE/PE PASSDOWNS |
| 49.12 | Fri Aug 23 1996 08:23 | broken arm | 5 lines |
| 49.14 | Sat Aug 31 1996 07:38 | send station belt. | 9 lines |
| 49.40 | Wed Nov 27 1996 00:05 | robot fail | 6 lines |
| 49.61 | Thu Apr 24 1997 08:53 | Homing problems. | 14 lines |
| 49.66 | Sat May 03 1997 07:50 | Broken wafer at spin station | 9 lines |
| 49.81 | Fri May 23 1997 07:05 | Still in trouble. | 21 lines |
| 49.83 | Sat May 24 1997 08:35 | Still going. | 10 lines |
TOPIC | 50.0 | CMP-SCRUB.A3 PM CHECKSHEETS |
| 50.4 | Thu Aug 01 1996 00:20 | WW5 WEEKLY PM | 24 lines |
| 50.7 | Fri Aug 23 1996 08:18 | QUARTERLY PM FOR WW8 COMPLETED. | 39 lines |
| 50.36 | Wed Feb 19 1997 01:52 | ww34 Quarterly PM completed. | 45 lines |
| 50.40 | Wed Mar 19 1997 04:55 | ww38 weekly pm. | 32 lines |
TOPIC | 54.0 | CMP-SCRUB.C1 EE/PE PASSDOWNS |
| 54.9 | Fri Mar 07 1997 07:19 | Looks fine to me. | 7 lines |
| 54.16 | Fri May 02 1997 07:29 | Water leak | 6 lines |
TOPIC | 55.0 | CMP-SCRUB.C1 PM CHECKSHEETS |
| 55.7 | Wed Sep 18 1996 05:59 | ww12 weekly pm | 29 lines |
| 55.9 | Fri Oct 04 1996 06:01 | ww14 weekly pm | 28 lines |
| 55.11 | Tue Oct 15 1996 23:53 | ww16 weekly pm. | 26 lines |
| 55.12 | Thu Oct 24 1996 00:16 | ww17 weekly pm. | 26 lines |
| 55.17 | Wed Nov 27 1996 04:32 | ww22 weekly PM. | 26 lines |
| 55.18 | Thu Dec 05 1996 00:13 | ww23 weekly PM. | 26 lines |
| 55.25 | Fri Jan 17 1997 00:41 | ww29 weekly pm completed. | 29 lines |
| 55.28 | Wed Feb 05 1997 06:02 | WW32 WEEKLY PM COMPLETED. | 30 lines |
| 55.29 | Thu Feb 13 1997 06:06 | WW33 weekly pm. | 33 lines |
| 55.30 | Wed Feb 19 1997 22:22 | ww34 weekly pm. | 30 lines |
| 55.31 | Thu Feb 27 1997 05:06 | ww35 weekly pm. | 31 lines |
| 55.32 | Tue Mar 04 1997 23:16 | ww36 weekly pm completed. | 29 lines |
| 55.33 | Thu Mar 13 1997 22:54 | ww37 weekly pm | 29 lines |
| 55.34 | Tue Mar 18 1997 21:34 | ww38 weekly pm. | 29 lines |
| 55.40 | Tue Apr 29 1997 22:41 | ww44 weekly pm completed. | 32 lines |
| 55.43 | Wed May 21 1997 23:58 | ww47 weekly pm. | 30 lines |
TOPIC | 61.0 | GENERAL CMP ISSUES |
| 61.51 | Fri Sep 13 1996 00:02 | Slurry problem again | 5 lines |
| 61.75 | Thu Jan 16 1997 07:10 | Lost slurry, no room alarm | 5 lines |
TOPIC | 77.0 | IN-COMPLETE PMs |
| 77.1 | Sat Feb 15 1997 07:33 | ww33 CMP.B3 incomplete monthly pm checksheet. | 183 lines |
| 77.3 | Thu Mar 06 1997 07:38 | cmp.b1 monthly PM. | 187 lines |