TOPIC | 5.0 | CMP.A1 EE/PE PASSDOWNS |
| 5.199 | Wed May 01 1996 20:30 | leaks | 5 lines |
| 5.246 | Sat Sep 21 1996 20:42 | Conditioner trouble continued | 10 lines |
| 5.273 | Sat Oct 12 1996 20:58 | WAFER CRASH | 5 lines |
| 5.280 | Wed Oct 16 1996 20:21 | WAFER CRASH | 5 lines |
TOPIC | 7.0 | CMP.A2 EE/PE PASSDOWNS |
| 7.170 | Thu Apr 11 1996 20:33 | SLIPPING WAFERS | 6 lines |
| 7.223 | Wed Sep 18 1996 20:22 | PARTICLES | 4 lines |
| 7.245 | Sat Oct 12 1996 20:59 | HIGH PARTICLE / POOR UNIFORMITY | 7 lines |
| 7.253 | Fri Oct 18 1996 17:19 | PVA BRUSH FELL OFF | 2 lines |
TOPIC | 17.0 | CMP.B1 EE/PE PASSDOWNS |
| 17.377 | Sat Sep 21 1996 20:43 | Robot not responding | 7 lines |
| 17.431 | Sat Oct 26 1996 20:25 | "ROTATION OUT OF TOLERANCE" ERRORS | 10 lines |
| 17.440 | Wed Oct 30 1996 19:23 | UNIFORMITY OUT OF SPEC. | 17 lines |
TOPIC | 19.0 | CMP.B2 EE/PE PASSDOWNS |
| 19.139 | Sat Apr 06 1996 20:38 | VACUUM PROBLEM? | 14 lines |
| 19.142 | Thu Apr 11 1996 20:35 | SCRATCHES | 5 lines |
| 19.155 | Thu Apr 25 1996 21:15 | FLY OUTS | 12 lines |
| 19.238 | Thu Sep 26 1996 20:29 | HIGH PARTICLES | 9 lines |
| 19.254 | Fri Nov 01 1996 19:37 | PADS/CARRIERS CHANGED | 4 lines |
TOPIC | 21.0 | CMP.B3 EE/PE PASSDOWNS |
| 21.54 | Wed Aug 07 1996 20:45 | particles | 8 lines |
| 21.108 | Sat Oct 26 1996 20:43 | POOR HEAD TO HEAD REMOVAL | 15 lines |
TOPIC | 37.0 | CMP.C1-7 EE/PE PASSDOWNS |
| 37.2 | Fri Aug 30 1996 21:13 | gGIGLIST | 22 lines |
| 37.6 | Thu Sep 05 1996 21:16 | WSTK START-UP WORK CONTINUED. | 4 lines |
| 37.11 | Wed Sep 18 1996 20:19 | projects. | 6 lines |
TOPIC | 45.0 | CMP-SCRUB.A1 EE/PE PASSDOWNS |
| 45.138 | Sat Sep 21 1996 20:45 | Outside brush station problems | 6 lines |
| 45.145 | Thu Oct 10 1996 20:34 | Ignore this alarm | 6 lines |
TOPIC | 47.0 | CMP-SCRUB.A2 EE/PE PASSDOWNS |
| 47.125 | Thu Oct 10 1996 20:35 | IGNORE THIS ALARM | 5 lines |
TOPIC | 49.0 | CMP-SCRUB.A3 EE/PE PASSDOWNS |
| 49.6 | Wed Aug 07 1996 20:47 | BELT JUMPED PULLEY | 5 lines |
TOPIC | 54.0 | CMP-SCRUB.C1 EE/PE PASSDOWNS |
| 54.6 | Thu Jan 16 1997 19:52 | Brushes changed | 3 lines |
TOPIC | 61.0 | GENERAL CMP ISSUES |
| 61.71 | Fri Dec 20 1996 19:58 | MEGASONIC PUMP | 4 lines |