TOPIC | 2.0 | PAD CHANGE DATA |
| 2.9 | Mon Nov 13 1995 14:10 | PAD CHANGE | 6 lines |
| 2.46 | Wed Dec 06 1995 11:41 | pad change | 9 lines |
TOPIC | 5.0 | CMP.A1 EE/PE PASSDOWNS |
| 5.95 | Tue Nov 07 1995 19:37 | down force | 13 lines |
| 5.104 | Mon Nov 13 1995 19:16 | pass down | 9 lines |
| 5.129 | Sun Jan 14 1996 17:56 | cal of wafer detect sensor | 9 lines |
| 5.133 | Fri Jan 19 1996 19:08 | vacuum regulator leak | 10 lines |
| 5.138 | Wed Jan 24 1996 19:38 | pm in progress | 14 lines |
| 5.151 | Mon Feb 05 1996 18:49 | load station alignment | 15 lines |
| 5.158 | Wed Feb 28 1996 19:32 | air motor replaced | 8 lines |
| 5.161 | Mon Mar 04 1996 19:30 | uniformity/scratches | 12 lines |
| 5.169 | Wed Mar 13 1996 19:38 | software changed to ver 4.16.3 | 25 lines |
| 5.194 | Sun Apr 21 1996 20:27 | not picking up wafer at load stations | 11 lines |
TOPIC | 6.0 | CMP.A1 PM CHECKSHEETS |
| 6.16 | Fri Jan 19 1996 12:21 | monthly delayed, weekly performed | 73 lines |
| 6.29 | Mon Apr 15 1996 19:55 | ww42 monthly completed | 178 lines |
| 6.43 | Wed Jul 03 1996 20:24 | WW#1 weekly completed | 71 lines |
| 6.68 | Sun Nov 24 1996 10:16 | WW-22 WEEKLY PM COMPLETED | 72 lines |
| 6.76 | Tue Jan 14 1997 15:08 | ww29 monthly completed | 177 lines |
TOPIC | 7.0 | CMP.A2 EE/PE PASSDOWNS |
| 7.105 | Wed Dec 06 1995 19:12 | Semi annual completed | 13 lines |
| 7.122 | Tue Jan 23 1996 18:41 | Air brush change | 6 lines |
| 7.142 | Wed Feb 28 1996 19:34 | passdown | 8 lines |
| 7.167 | Sun Apr 07 1996 20:16 | breakin wafers broken | 9 lines |
| 7.183 | Sat May 18 1996 20:43 | pad change | 6 lines |
| 7.282 | Tue Dec 03 1996 19:25 | slurry loss detect installed | 7 lines |
| 7.319 | Tue Feb 04 1997 19:23 | Vacuum errors | 22 lines |
| 7.336 | Tue Feb 18 1997 19:06 | table alignments | 33 lines |
| 7.352 | Mon Apr 07 1997 20:28 | valves replaced | 14 lines |
TOPIC | 8.0 | CMP.A2 PM CHECKSHEETS |
| 8.8 | Wed Dec 06 1995 13:04 | Semi-annual check sheets (inc. weekly + monthly) | 211 lines |
| 8.9 | Sun Dec 10 1995 15:18 | weekly pm completed | 75 lines |
| 8.10 | Tue Dec 19 1995 17:58 | weekly completed | 76 lines |
| 8.14 | Fri Jan 19 1996 18:26 | weekly completed | 75 lines |
| 8.20 | Wed Feb 28 1996 18:50 | ww 35 pm weekly pm completed | 76 lines |
| 8.27 | Sun Apr 14 1996 20:19 | 4/14/96 weekly pm completed | 77 lines |
| 8.28 | Mon Apr 22 1996 19:28 | ww43 weekly pm completed | 72 lines |
TOPIC | 17.0 | CMP.B1 EE/PE PASSDOWNS |
| 17.88 | Mon Nov 13 1995 19:17 | passdown | 8 lines |
| 17.111 | Sun Dec 03 1995 19:28 | vacuum error | 18 lines |
| 17.115 | Wed Dec 06 1995 19:14 | passdown | 20 lines |
| 17.121 | Mon Dec 11 1995 19:33 | | 29 lines |
| 17.154 | Sun Jan 14 1996 18:02 | wafer detection adjustment | 6 lines |
| 17.158 | Tue Jan 16 1996 19:20 | new rotory unions | 11 lines |
| 17.160 | Wed Jan 17 1996 19:30 | | 15 lines |
| 17.163 | Fri Jan 19 1996 19:10 | down force and pm | 9 lines |
| 17.169 | Mon Jan 22 1996 19:23 | current reference adjustment | 11 lines |
| 17.172 | Wed Jan 24 1996 19:22 | Robot problems | 16 lines |
| 17.216 | Sun Mar 10 1996 19:10 | Carrier #4 No Rotation | 24 lines |
| 17.222 | Wed Mar 13 1996 19:04 | ground added | 5 lines |
| 17.241 | Tue Apr 23 1996 20:35 | boot up errors | 45 lines |
| 17.308 | Sun Aug 04 1996 20:46 | | 29 lines |
| 17.405 | Thu Oct 10 1996 19:04 | ERP replaced | 14 lines |
| 17.415 | Thu Oct 17 1996 19:07 | bearings changed | 18 lines |
| 17.419 | Mon Oct 21 1996 19:16 | passdown | 15 lines |
| 17.424 | Wed Oct 23 1996 18:59 | ex | 30 lines |
| 17.425 | Thu Oct 24 1996 19:03 | passdown | 25 lines |
| 17.427 | Fri Oct 25 1996 17:32 | passdown | 28 lines |
| 17.445 | Fri Nov 01 1996 15:34 | please record for SF | 10 lines |
| 17.469 | Tue Nov 26 1996 19:23 | another test motor | 16 lines |
| 17.475 | Tue Dec 03 1996 19:16 | wafer loss/inverter error | 12 lines |
| 17.517 | Sun Feb 09 1997 20:08 | Load cup 5 sensor adjust | 9 lines |
| 17.547 | Tue Apr 08 1997 20:46 | dropped wafer carrier 3 | 10 lines |
| 17.554 | Sun Apr 20 1997 20:10 | removed pressure transducers | 7 lines |
| 17.555 | Wed Apr 23 1997 20:14 | b1 removed from room | 10 lines |
TOPIC | 18.0 | CMP.B1 PM CHECKSHEETS |
| 18.16 | Fri Jan 19 1996 19:19 | 1/19/96 weekly performed | 59 lines |
| 18.23 | Mon Feb 19 1996 14:49 | ww34 weekly pm completed | 65 lines |
| 18.70 | Sun Dec 01 1996 18:49 | ww-23 weekly pm completed | 85 lines |
TOPIC | 19.0 | CMP.B2 EE/PE PASSDOWNS |
| 19.11 | Mon Nov 13 1995 19:18 | passdown | 18 lines |
| 19.21 | Wed Dec 06 1995 19:16 | passdown | 8 lines |
| 19.27 | Mon Dec 11 1995 19:34 | cups machined | 7 lines |
| 19.57 | Wed Jan 17 1996 19:32 | scratches on wafer | 13 lines |
| 19.59 | Fri Jan 19 1996 19:13 | passdown | 8 lines |
| 19.64 | Sun Jan 21 1996 19:41 | blown PS 4 and Hi I infranor | 26 lines |
| 19.73 | Tue Jan 30 1996 19:24 | index table drift | 57 lines |
| 19.104 | Sun Feb 18 1996 19:24 | multi problems | 34 lines |
| 19.106 | Mon Feb 19 1996 19:32 | vacuum switches | 49 lines |
| 19.108 | Tue Feb 20 1996 19:06 | passdown | 25 lines |
| 19.115 | Sun Feb 25 1996 19:40 | infranor/pad conditioner replaced | 47 lines |
| 19.141 | Sun Apr 07 1996 20:17 | chiller fault | 7 lines |
| 19.150 | Mon Apr 22 1996 19:43 | FLIPPER BOX CABLE | 26 lines |
| 19.158 | Sun May 05 1996 21:07 | FAILED MQC | 7 lines |
| 19.167 | Mon May 20 1996 20:40 | bad infranor idex table | 20 lines |
| 19.171 | Sun May 26 1996 20:22 | carrier 2 no rotation | 11 lines |
| 19.184 | Mon Jun 10 1996 20:38 | passdown | 19 lines |
| 19.193 | Tue Jun 18 1996 20:05 | | 19 lines |
| 19.194 | Tue Jun 18 1996 20:07 | slurry sensor added | 4 lines |
| 19.199 | Tue Jun 25 1996 20:37 | passdown | 10 lines |
| 19.263 | Mon Nov 11 1996 19:07 | lock up | 9 lines |
| 19.276 | Sun Dec 01 1996 19:30 | strange event (CPU ?) | 28 lines |
| 19.316 | Tue Mar 04 1997 19:21 | Semi annual and index table | 13 lines |
TOPIC | 20.0 | CMP.B2 PM CHECKSHEETS |
| 20.20 | Sun Mar 24 1996 17:04 | ww 39 B2 weekly completed | 58 lines |
TOPIC | 21.0 | CMP.B3 EE/PE PASSDOWNS |
| 21.19 | Mon Jun 10 1996 20:38 | doors derailed | 8 lines |
| 21.33 | Wed Jul 03 1996 20:36 | pad cond / scrub motor | 14 lines |
| 21.117 | Mon Nov 11 1996 19:08 | Mapper error | 5 lines |
| 21.174 | Wed Mar 26 1997 19:29 | replaced slurry sensor | 5 lines |
| 21.181 | Tue Apr 08 1997 20:41 | | 21 lines |
| 21.190 | Tue Apr 15 1997 20:47 | temp | 9 lines |
TOPIC | 22.0 | CMP.B3 PM CHECKSHEETS |
| 22.45 | Sun Mar 09 1997 19:44 | MONTHLY COMPLETED | 195 lines |
TOPIC | 23.0 | CMP.B4 EE/PE PASSDOWNS |
| 23.34 | Mon Mar 03 1997 19:34 | loose ribbon cable | 18 lines |
| 23.61 | Mon Apr 21 1997 20:47 | door sw | 17 lines |
| 23.64 | Wed Apr 23 1997 20:39 | waf detect/carrier position | 26 lines |
| 23.71 | Mon Apr 28 1997 20:14 | vibration | 24 lines |
TOPIC | 37.0 | CMP.C1-7 EE/PE PASSDOWNS |
| 37.430 | Tue May 27 1997 19:29 | startup | 10 lines |
TOPIC | 39.0 | WESTECH GENERAL ISSUES |
| 39.2 | Wed Dec 04 1996 19:21 | leak h/e | 13 lines |
TOPIC | 41.0 | CMP.D1 EQUIP PASSDOWNS |
| 41.45 | Tue May 27 1997 19:34 | D1 startup | 13 lines |
TOPIC | 45.0 | CMP-SCRUB.A1 EE/PE PASSDOWNS |
| 45.96 | Tue Apr 16 1996 20:07 | wafers not exiting outer station | 9 lines |
| 45.146 | Tue Oct 15 1996 15:41 | OCP alarm | 6 lines |
TOPIC | 46.0 | CMP-SCRUB.A1 PM CHECKSHEETS |
| 46.23 | Mon Mar 04 1996 19:17 | weekly pm ww36 | 28 lines |
| 46.55 | Tue Sep 03 1996 20:16 | start up | 24 lines |
| 46.67 | Sun Nov 24 1996 13:49 | ww22 pm completed | 28 lines |
TOPIC | 47.0 | CMP-SCRUB.A2 EE/PE PASSDOWNS |
| 47.61 | Wed Dec 20 1995 18:38 | arm not at home | 9 lines |
| 47.70 | Fri Jan 19 1996 19:06 | brush hight adjustment | 11 lines |
| 47.111 | Sun Jul 28 1996 20:39 | ocp mod's | 6 lines |
| 47.126 | Tue Oct 15 1996 15:42 | OCP alarm | 6 lines |
| 47.127 | Sun Nov 10 1996 19:25 | pulley slipping | 11 lines |
TOPIC | 48.0 | CMP-SCRUB.A2 PM CHECKSHEETS |
| 48.17 | Mon Feb 05 1996 19:32 | 2/5/95 weekly completed | 24 lines |
| 48.52 | Tue Sep 03 1996 20:18 | | 24 lines |
| 48.53 | Tue Sep 03 1996 20:31 | WEEKLY PM COMPLETED | 26 lines |
| 48.65 | Sun Nov 24 1996 13:43 | ww22 weekly pm completed | 27 lines |
TOPIC | 50.0 | CMP-SCRUB.A3 PM CHECKSHEETS |
| 50.10 | Tue Sep 03 1996 20:18 | | 24 lines |
TOPIC | 55.0 | CMP-SCRUB.C1 PM CHECKSHEETS |
| 55.4 | Tue Sep 03 1996 20:19 | startup | 24 lines |
| 55.5 | Tue Sep 03 1996 20:33 | WEEKLY PM COMPLETED | 30 lines |
| 55.45 | Tue May 27 1997 19:38 | scruber c1 start up | 26 lines |
TOPIC | 61.0 | GENERAL CMP ISSUES |
| 61.27 | Mon Mar 04 1996 19:24 | micrometer missing?? | 34 lines |
| 61.28 | Mon Mar 04 1996 19:36 | Speedfam Index Table Return | 5 lines |
TOPIC | 77.0 | IN-COMPLETE PMs |
| 77.2 | Tue Mar 04 1997 18:22 | cmp.b2 semi annual | 232 lines |
TOPIC | 85.0 | CMP ops passdowns - dec '96 |
| 85.9 | Wed Dec 04 1996 19:35 | chart recorder | 4 lines |