TOPIC | 5.0 | CMP.A1 EE/PE PASSDOWNS |
| 5.127 | Fri Jan 12 1996 19:38 | ROBOT SENSOR ERRORS | 4 lines |
| 5.128 | Sat Jan 13 1996 19:42 | ROBOT SENSOR | 6 lines |
| 5.130 | Thu Jan 18 1996 19:51 | vacuum | 5 lines |
| 5.173 | Fri Mar 15 1996 19:40 | handling trouble | 9 lines |
| 5.299 | Wed Dec 11 1996 19:22 | POOR UNIFORMITY | 5 lines |
| 5.302 | Sat Dec 14 1996 09:39 | Poor Uniformity | 6 lines |
| 5.354 | Wed Mar 19 1997 18:32 | POOR UNIFORMITY | 5 lines |
| 5.370 | Thu Apr 17 1997 20:32 | WAFER CRASH | 7 lines |
| 5.372 | Fri Apr 18 1997 21:44 | PAD CHANGE | 4 lines |
TOPIC | 7.0 | CMP.A2 EE/PE PASSDOWNS |
| 7.136 | Thu Feb 15 1996 19:40 | Slurry lines adjusted. | 3 lines |
| 7.150 | Thu Mar 14 1996 19:06 | BROKEN WAFERS | 6 lines |
| 7.151 | Fri Mar 15 1996 19:41 | Sslipping wafers | 10 lines |
| 7.285 | Wed Dec 11 1996 19:22 | POOR UNIFORMITY | 4 lines |
| 7.308 | Fri Jan 24 1997 19:39 | POOR UNIFORMITY | 4 lines |
| 7.344 | Sat Mar 15 1997 18:20 | POOR UNIFORMITY | 5 lines |
TOPIC | 8.0 | CMP.A2 PM CHECKSHEETS |
| 8.12 | Sat Jan 06 1996 16:51 | WW27 WEEKLY PM COMPLETE | 78 lines |
| 8.84 | Fri Mar 07 1997 19:25 | WW36 monthly pm completed | 182 lines |
TOPIC | 17.0 | CMP.B1 EE/PE PASSDOWNS |
| 17.152 | Fri Jan 12 1996 19:39 | SCRATCHES/VENDOR WORK | 9 lines |
| 17.176 | Thu Jan 25 1996 19:45 | SMASHED WAFERS | 4 lines |
| 17.178 | Fri Jan 26 1996 19:09 | ROBOT TROUBLE | 11 lines |
| 17.186 | Sat Feb 03 1996 19:29 | Carrier #1 not rotating error. | 5 lines |
| 17.196 | Fri Feb 16 1996 19:40 | B1 now matches B2 | 5 lines |
| 17.201 | Fri Feb 23 1996 11:12 | slurry pumps lines | 5 lines |
| 17.209 | Thu Feb 29 1996 16:25 | Slurry motor/kennsington controller | 7 lines |
| 17.214 | Sat Mar 09 1996 19:42 | Pad change/Carrier #4 | 6 lines |
| 17.223 | Fri Mar 15 1996 19:42 | crash | 11 lines |
| 17.489 | Sat Dec 21 1996 19:45 | | 14 lines |
| 17.499 | Thu Jan 02 1997 19:53 | Index table INFRANOR changed | 10 lines |
| 17.526 | Thu Mar 06 1997 20:52 | LOADING PROBLEMS | 14 lines |
| 17.544 | Sat Apr 05 1997 20:23 | WAFER CRASH | 10 lines |
| 17.548 | Sat Apr 12 1997 20:29 | LOST A WAFER/SCHEDULED PAD CHANGE | 15 lines |
| 17.551 | Fri Apr 18 1997 21:45 | DECONTAMINATION STARTED | 8 lines |
TOPIC | 18.0 | CMP.B1 PM CHECKSHEETS |
| 18.17 | Sat Jan 27 1996 18:20 | WEEKLY COMPLETED | 66 lines |
TOPIC | 19.0 | CMP.B2 EE/PE PASSDOWNS |
| 19.50 | Wed Jan 10 1996 19:37 | Wafer detection problem | 6 lines |
| 19.62 | Sat Jan 20 1996 17:57 | Slurry Line worn/ resolver cable replaced. | 4 lines |
| 19.67 | Sat Jan 27 1996 16:07 | Lifter replaced. | 7 lines |
| 19.78 | Thu Feb 01 1996 19:39 | INDEX TABLE JUMPING. | 6 lines |
| 19.80 | Fri Feb 02 1996 19:40 | INFRANORS/SCRUBBER UPGRADE | 18 lines |
| 19.87 | Wed Feb 07 1996 19:45 | scrubber upgrade | 2 lines |
| 19.90 | Thu Feb 08 1996 19:15 | PARTICLES/SCRATCHES | 7 lines |
| 19.100 | Fri Feb 16 1996 19:39 | Lost wafers/ scratches | 12 lines |
| 19.124 | Fri Mar 15 1996 19:43 | scratches | 7 lines |
| 19.277 | Wed Dec 11 1996 18:32 | BROKEN BELT | 4 lines |
| 19.321 | Sat Mar 15 1997 18:21 | UNLOAD FLIPPER MISSED A WAFER | 5 lines |
| 19.336 | Fri Apr 18 1997 21:46 | PROBLEMS PASSING MQCS | 8 lines |
TOPIC | 20.0 | CMP.B2 PM CHECKSHEETS |
| 20.8 | Sat Jan 20 1996 18:02 | Monthly completed. | 80 lines |
TOPIC | 21.0 | CMP.B3 EE/PE PASSDOWNS |
| 21.135 | Sat Dec 21 1996 19:43 | 2nd Table | 26 lines |
| 21.163 | Sat Feb 22 1997 19:57 | N2 GUN | 6 lines |
| 21.164 | Sat Mar 01 1997 21:27 | FILTER HOUSINGS MOVED. | 6 lines |
| 21.173 | Wed Mar 19 1997 18:33 | BROKEN SENSOR | 9 lines |
| 21.194 | Fri Apr 18 1997 21:47 | TRANSFER PADDLE REPLACED | 6 lines |
| 21.209 | Sat May 17 1997 20:52 | #5 POOR UNIFORMITY | 3 lines |
TOPIC | 23.0 | CMP.B4 EE/PE PASSDOWNS |
| 23.29 | Sat Feb 22 1997 19:58 | N2 GUN | 5 lines |
| 23.30 | Sat Feb 22 1997 20:00 | Slurry line, bracket repaired | 12 lines |
| 23.42 | Thu Mar 20 1997 19:51 | VARIOUS ERRORS | 9 lines |
| 23.54 | Thu Apr 17 1997 20:30 | DOUBLE LOADED A WAFER/SCRATCHES | 11 lines |
| 23.55 | Fri Apr 18 1997 21:49 | PROBLEMS W/ CARRIER #2 | 10 lines |
| 23.56 | Fri Apr 18 1997 21:50 | IF PRODUCTION NEEDS CMP.B4 | 10 lines |
| 23.66 | Thu Apr 24 1997 21:08 | NO SLURRY | 10 lines |
| 23.68 | Fri Apr 25 1997 21:00 | POOR UNIFORMITY/SLURRY NEEDS TO BE HOOKED UP | 11 lines |
| 23.85 | Sat May 17 1997 20:52 | HIGH PARTICLES | 5 lines |
TOPIC | 31.0 | SPEEDFAM GENERAL ISSUES |
| 31.20 | Sat Apr 05 1997 20:25 | INFRANORS NEED TO BE PICKED UP. | 8 lines |
TOPIC | 37.0 | CMP.C1-7 EE/PE PASSDOWNS |
| 37.400 | Wed Jan 22 1997 19:43 | EDGE LIFT OFF TROUBLE | 22 lines |
| 37.402 | Fri Jan 24 1997 19:43 | FINAL PLATEN NOT HEATING | 3 lines |
| 37.407 | Thu Feb 20 1997 19:49 | Vacuum Switch. | 4 lines |
| 37.414 | Sat Mar 08 1997 20:31 | TIM'S HIT LIST FOR .C1 | 47 lines |
| 37.421 | Sat Mar 22 1997 19:57 | Tim's hit list completed. | 32 lines |
| 37.422 | Thu Mar 27 1997 19:50 | POOR UNIFORMITY | 5 lines |
| 37.424 | Sat Mar 29 1997 19:33 | Alignments are out. | 6 lines |
| 37.429 | Fri May 23 1997 14:52 | SHUT DOWN COMPLETED | 20 lines |
| 37.433 | Thu Jun 05 1997 20:37 | Sv changed | 7 lines |
TOPIC | 41.0 | CMP.D1-7 EE/PE PASSDOWNS |
| 41.16 | Sat Apr 12 1997 20:31 | MARATON COMPLETED YESTERDAY | 91 lines |
| 41.17 | Sat Apr 12 1997 20:33 | TOOL CLEANED/N2 GUN/FILTER HOUSINGS NOT IN | 8 lines |
TOPIC | 41.0 | CMP.D1 EQUIP PASSDOWNS |
| 41.41 | Sat May 17 1997 20:50 | TIM'S HIT LIST COMPLETE. | 5 lines |
| 41.48 | Thu Jun 05 1997 20:38 | Sensor replaced/Robot adjusted | 6 lines |
TOPIC | 45.0 | CMP-SCRUB.A1 EE/PE PASSDOWNS |
| 45.60 | Sat Dec 02 1995 17:06 | ROBOT OFFSETS CHANGED | 7 lines |
| 45.67 | Fri Dec 22 1995 17:10 | ROBOT ROTATION ADJUSTED | 16 lines |
| 45.179 | Thu Apr 17 1997 20:28 | Needed a reboot | 4 lines |
| 45.180 | Thu Apr 24 1997 21:11 | WAFER CRASHED | 8 lines |
| 45.186 | Sat May 17 1997 20:49 | DROPPED A WAFER | 5 lines |
| 45.187 | Wed May 28 1997 19:44 | MEGASONIC NOT AT HOME. | 10 lines |
TOPIC | 47.0 | CMP-SCRUB.A2 EE/PE PASSDOWNS |
| 47.132 | Wed Dec 11 1996 19:24 | IB & OB HANDLING PROBLEMS | 8 lines |
| 47.148 | Fri Apr 04 1997 20:03 | Sensor not seeing these particular wafers | 12 lines |
| 47.159 | Thu May 29 1997 20:43 | Wafer lost in the receive? | 4 lines |
TOPIC | 49.0 | CMP-SCRUB.A3 EE/PE PASSDOWNS |
| 49.51 | Wed Mar 05 1997 19:39 | LEAK FROM SPIN STATION | 6 lines |
| 49.62 | Thu Apr 24 1997 21:12 | VARIOUS PROBLEMS | 19 lines |
| 49.73 | Thu May 08 1997 21:36 | DROPPING WAFERS IN THE SPIN | 20 lines |
| 49.75 | Sat May 10 1997 20:09 | Dropping wafers in the receive station | 28 lines |
| 49.86 | Thu May 29 1997 20:42 | Rep's Hit list | 9 lines |
TOPIC | 54.0 | CMP-SCRUB.C1 EE/PE PASSDOWNS |
| 54.8 | Thu Mar 06 1997 20:51 | O.B. Motor ERRORS | 7 lines |
| 54.10 | Thu Mar 20 1997 19:54 | SENDER HANDLING PROBLEM | 22 lines |
| 54.11 | Fri Mar 21 1997 19:52 | WAFER SENSOR ADJUSTED | 7 lines |
| 54.14 | Fri Apr 25 1997 18:23 | BAD MOTOR/ERRORS WHEN POWERING UP | 12 lines |
| 54.15 | Thu May 01 1997 20:34 | Bad Motor | 5 lines |
TOPIC | 55.0 | CMP-SCRUB.C1 PM CHECKSHEETS |
| 55.26 | Fri Jan 24 1997 16:26 | WW30 weekly PM completed | 33 lines |
TOPIC | 61.0 | GENERAL CMP ISSUES |
| 61.18 | Fri Jan 12 1996 19:45 | DON'T GREASE C. ARM BEARING. | 3 lines |
| 61.80 | Fri Mar 21 1997 19:53 | NOSLURRY ALARMS | 7 lines |
| 61.85 | Sat May 17 1997 20:54 | RECIRCULATION PUMP REPLACED | 5 lines |
TOPIC | 63.0 | EEG CMP DAILY PD |
| 63.62 | Sat Mar 09 1996 15:31 | C SHIFT CMP PASSDOWN | 38 lines |
| 63.63 | Sat Mar 09 1996 15:33 | C SHIFT CMP PASSDOWN | 38 lines |
| 63.64 | Sat Mar 09 1996 19:40 | C SHIFT CMP PASSDOWN | 36 lines |
| 63.65 | Thu Mar 14 1996 19:36 | C SHIFT CMP PASSDOWN | 45 lines |
| 63.66 | Fri Mar 15 1996 19:48 | C SHIFT CMP PASSDOWN | 69 lines |
| 63.71 | Thu Mar 28 1996 19:48 | C SHIFT CMP PASSDOWN | 85 lines |
| 63.72 | Fri Mar 29 1996 19:47 | C SHIFT CMP PASSDOWN | 49 lines |
| 63.73 | Sat Mar 30 1996 19:42 | C SHIFT CMP PASSDOWN | 67 lines |
| 63.74 | Wed Apr 03 1996 20:38 | C SHIFT CMP PASSDOWN | 42 lines |
| 63.75 | Thu Apr 04 1996 20:39 | C SHIFT CMP PASSDOWN | 32 lines |
| 63.76 | Fri Apr 05 1996 20:36 | C SHIFT CMP PASSDOWN | 31 lines |
| 63.77 | Sat Apr 06 1996 20:38 | C SHIFT CMP PASSDOWN | 45 lines |
| 63.78 | Thu Apr 11 1996 20:37 | C SHIFT CMP PASSDOWN | 42 lines |
| 63.79 | Fri Apr 12 1996 20:22 | C SHIFT CMP PASSDOWN | 34 lines |
| 63.80 | Wed Apr 17 1996 20:49 | C SHIFT CMP PASSDOWN | 37 lines |
| 63.82 | Thu Apr 18 1996 20:37 | C SHIFT CMP PASSDOWN | 38 lines |
| 63.84 | Fri Apr 19 1996 20:46 | C SHIFT CMP PASSDOWN | 38 lines |
| 63.85 | Sat Apr 20 1996 20:39 | C SHIFT CMP PASSDOWN | 36 lines |
| 63.86 | Thu Apr 25 1996 21:11 | C SHIFT CMP PASSDOWN | 42 lines |
| 63.87 | Wed May 01 1996 20:46 | C SHIFT CMP PASSDOWN | 44 lines |
| 63.88 | Thu May 02 1996 20:53 | C SHIFT CMP PASSDOWN | 32 lines |
| 63.90 | Fri May 03 1996 20:43 | C SHIFT CMP PASSDOWN | 65 lines |
| 63.91 | Sat May 04 1996 20:21 | C SHIFT CMP PASSDOWN | 38 lines |
| 63.104 | Thu Jul 18 1996 20:57 | C SHIFT CMP PASSDOWN | 37 lines |
| 63.105 | Sat Jul 20 1996 20:35 | C SHIFT CMP PASSDOWN | 50 lines |
| 63.107 | Sat Jul 27 1996 20:45 | C SHIFT CMP PASSDOWN | 47 lines |
| 63.109 | Sat Aug 03 1996 20:21 | C SHIFT CMP PASSDOWN | 47 lines |
| 63.110 | Wed Aug 07 1996 20:40 | C SHIFT CMP PASSDOWN | 47 lines |
| 63.113 | Fri Aug 09 1996 20:23 | C SHIFT CMP PASSDOWN | 31 lines |
| 63.118 | Sat Aug 24 1996 20:47 | C SHIFT CMP PASSDOWN | 80 lines |
| 63.119 | Fri Aug 30 1996 21:13 | C SHIFT CMP PASSDOWN | 80 lines |
| 63.120 | Sat Aug 31 1996 20:40 | C SHIFT CMP PASSDOWN | 27 lines |
| 63.121 | Sat Sep 07 1996 20:18 | C SHIFT CMP PASSDOWN | 20 lines |
| 63.123 | Sat Sep 21 1996 20:47 | C SHIFT CMP PASSDOWN | 34 lines |
| 63.135 | Sat Oct 26 1996 20:45 | C SHIFT CMP PASSDOWN | 40 lines |
TOPIC | 77.0 | IN-COMPLETE PMs |
| 77.1 | Sat May 10 1997 20:33 | CMP.A1 SA incomplete | 99 lines |