TOPIC | 2.0 | PAD CHANGE DATA |
| 2.5 | Thu Nov 09 1995 07:16 | B1 PAD CHANGE | 8 lines |
| 2.6 | Thu Nov 09 1995 07:16 | A2 PAD CHANGE | 10 lines |
| 2.27 | Sat Nov 25 1995 03:28 | A2 PAD CHANGE | 11 lines |
| 2.34 | Wed Nov 29 1995 03:20 | A2 PAD CHANGE | 11 lines |
| 2.35 | Wed Nov 29 1995 21:27 | A2 PAD CHANGE | 11 lines |
| 2.37 | Thu Nov 30 1995 08:34 | B1 PAD CHANGE | 7 lines |
| 2.40 | Fri Dec 01 1995 22:22 | B1 PAD CHANGE | 9 lines |
| 2.41 | Sat Dec 02 1995 01:39 | B1 PAD CHANGE | 9 lines |
| 2.70 | Thu Dec 21 1995 00:08 | B2 PAD CHANGE | 8 lines |
| 2.71 | Thu Dec 21 1995 00:09 | A2 PAD CHANGE | 10 lines |
| 2.72 | Fri Dec 22 1995 05:35 | A1 PAD CHANGE | 11 lines |
| 2.73 | Fri Dec 22 1995 05:36 | B2 PAD CHANGE | 8 lines |
| 2.74 | Fri Dec 22 1995 05:36 | B1 PAD CHANGE | 8 lines |
| 2.84 | Thu Jan 04 1996 00:38 | A2 PAD CHANGE | 10 lines |
| 2.89 | Sat Jan 06 1996 06:49 | A1 PAD CHANGE | 8 lines |
| 2.96 | Tue Jan 09 1996 20:53 | A2 PAD CHANGE | 11 lines |
| 2.97 | Tue Jan 09 1996 20:56 | B1 PAD CHANGE | 8 lines |
| 2.98 | Thu Jan 11 1996 06:48 | A1 pad change | 12 lines |
| 2.99 | Thu Jan 11 1996 06:49 | B1 pad change | 8 lines |
| 2.100 | Thu Jan 11 1996 06:49 | B2 pad change | 8 lines |
| 2.102 | Fri Jan 12 1996 05:18 | B2 PAD CHANGE | 8 lines |
| 2.103 | Fri Jan 12 1996 05:19 | B1 PAD CHANGE | 8 lines |
| 2.117 | Thu Jan 18 1996 03:50 | A2 PAD CHANGE | 10 lines |
| 2.118 | Fri Jan 19 1996 07:11 | B2 pad change | 9 lines |
| 2.127 | Wed Jan 24 1996 06:48 | A1 PAD CHANGE | 11 lines |
| 2.128 | Thu Jan 25 1996 00:47 | A1 Pad Change | 11 lines |
| 2.129 | Thu Jan 25 1996 06:48 | A2 PAD CHANGE | 11 lines |
| 2.133 | Fri Jan 26 1996 21:43 | A1 pad change | 10 lines |
| 2.143 | Wed Jan 31 1996 22:01 | A2 PAD CHANGE | 12 lines |
| 2.147 | Thu Feb 08 1996 21:27 | A1 pad change | 12 lines |
| 2.148 | Thu Feb 08 1996 22:58 | B1 PAD CHANGE | 8 lines |
| 2.149 | Fri Feb 09 1996 23:34 | A2 PAD CHANGE | 12 lines |
| 2.155 | Wed Feb 14 1996 22:04 | A1 PAD CHANGE | 10 lines |
| 2.156 | Thu Feb 15 1996 21:55 | A1 PAD CHANGE | 10 lines |
| 2.157 | Fri Feb 16 1996 21:41 | B1 PAD CHANGE | 8 lines |
| 2.158 | Sat Feb 17 1996 07:05 | A2 PAD CHANGE | 10 lines |
| 2.168 | Tue Feb 20 1996 20:53 | A1 PAD CHANGE | 11 lines |
| 2.169 | Tue Feb 20 1996 20:54 | A2 PAD CHANGE | 10 lines |
TOPIC | 3.0 | CONDITIONER CHANGE DATA |
| 3.9 | Sat Jan 06 1996 06:52 | A1 DISK CHANGE | 5 lines |
| 3.14 | Wed Jan 24 1996 06:25 | A1 DISK CHANGE | 5 lines |
| 3.21 | Tue Feb 20 1996 21:04 | A2 DISK CHANGE | 4 lines |
TOPIC | 4.0 | Tue Apr 16 1996 22:08 | CMP.A PM CHECKSHEET TEMPLATES | 7 lines |
| 4.1 | Tue Apr 16 1996 22:09 | WEEKLY PM CHECKSHEET TEMPLATE | 78 lines |
| 4.2 | Tue Apr 16 1996 22:09 | MONTHLY PM CHECKSHEET TEMPLATE | 90 lines |
| 4.3 | Tue Apr 16 1996 22:10 | SEMI-ANNUAL PM CHECKSHEET TEMPLATE | 32 lines |
| 4.4 | Tue Apr 16 1996 22:10 | ANNUAL PM CHECKSHEET TEMPLATE | 27 lines |
TOPIC | 5.0 | Sat Nov 11 1995 00:04 | CMP.A1 EE/PE PASSDOWNS | 5 lines |
| 5.1 | Sat Nov 11 1995 00:44 | A1 FIT-UP AND MECHANICAL ACCEPTANCE | 748 lines |
| 5.2 | Fri Nov 10 1995 02:15 | SPINDLE AIR CYLINDER REPLACED | 33 lines |
| 5.3 | Fri Nov 10 1995 02:18 | PCW LEAK AT TABLE ROTARY UNION | 22 lines |
| 5.4 | Fri Nov 10 1995 02:18 | CONDITIONER EXCESSIVE PLAY | 17 lines |
| 5.5 | Fri Nov 10 1995 02:19 | CONDITIONER ADJUSTMENTS | 32 lines |
| 5.6 | Fri Nov 10 1995 02:20 | TCU FLOW AND ADJUSTMENTS | 22 lines |
| 5.7 | Fri Nov 10 1995 02:21 | CONDITIONER DOWNFORCE | 11 lines |
| 5.8 | Fri Nov 10 1995 02:22 | CONDITIONER GROUNDING NOISE | 11 lines |
| 5.9 | Fri Nov 10 1995 02:23 | LOW VACUUM ON CARRIERS | 12 lines |
| 5.10 | Fri Nov 10 1995 02:24 | DI WATER LINES VIBRATING | 19 lines |
| 5.11 | Fri Nov 10 1995 02:24 | CONDITIONER ARM WOULDN'T GO UP | 16 lines |
| 5.12 | Fri Nov 10 1995 02:25 | ELEVATOR WOULDN'T MOVE | 16 lines |
| 5.13 | Fri Nov 10 1995 02:26 | LOW SLURRY FLOW | 25 lines |
| 5.14 | Fri Nov 10 1995 02:27 | ELEVATOR PULLEYS REPLACED | 15 lines |
| 5.15 | Fri Nov 10 1995 02:27 | ROBOT BINDING UP | 13 lines |
| 5.16 | Fri Nov 10 1995 02:27 | ROBOT SENSORS REPLACED | 8 lines |
| 5.17 | Fri Nov 10 1995 02:28 | ROBOT COMMUNICATION PROBLEMS | 10 lines |
| 5.18 | Fri Nov 10 1995 02:29 | CONDITIONER ACTUATOR ALL LOOSE | 19 lines |
| 5.19 | Fri Nov 10 1995 02:56 | BRUSHES WEREN'T SPINNING | 10 lines |
| 5.20 | Fri Nov 10 1995 02:56 | ROBOT AND SHUTTLE TRAVEL PROBLEMS | 11 lines |
| 5.21 | Fri Nov 10 1995 02:57 | PARTICLES | 10 lines |
| 5.22 | Fri Nov 10 1995 02:57 | SLURRY FLOW PROBLEM | 17 lines |
| 5.23 | Fri Nov 10 1995 02:58 | ROBOT ARMS, POSITIONING PROBLEMS | 15 lines |
| 5.24 | Fri Nov 10 1995 02:58 | CONDITIONER ARM ACTUATOR BACKLASH | 8 lines |
| 5.25 | Fri Nov 10 1995 03:01 | LOAD JET SPRAY NOT COMING ON | 22 lines |
| 5.26 | Fri Nov 10 1995 03:01 | ELEVATOR MOTOR PULLEYS REPLACED | 16 lines |
| 5.27 | Fri Nov 10 1995 03:02 | SPINDLE ALWAYS DETECTING VACUUM | 23 lines |
| 5.28 | Fri Nov 10 1995 03:04 | RIGHT SEND ELEVATOR NOT HOMING | 20 lines |
| 5.29 | Fri Nov 10 1995 03:06 | BOOT-UP PROBLEMS | 24 lines |
| 5.30 | Fri Nov 10 1995 03:14 | ROBOT TRAVEL VIBRATION | 15 lines |
| 5.31 | Fri Nov 10 1995 03:15 | NO VACUUM AT SPINDLE ERROR | 14 lines |
| 5.32 | Fri Nov 10 1995 03:16 | CONDITIONING ARM NOT FUNCTIONING | 29 lines |
| 5.33 | Fri Nov 10 1995 03:16 | COMPUTER BUGS | 18 lines |
| 5.34 | Fri Nov 10 1995 03:17 | ROBOT NOT PICKING UP WAFERS | 19 lines |
| 5.35 | Fri Nov 10 1995 03:17 | SCRAPPING NOISE COMING FROM BRIDGE | 38 lines |
| 5.36 | Fri Nov 10 1995 03:19 | FAIRCHILD EP REGULATORS CALIBRATED | 14 lines |
| 5.37 | Fri Nov 10 1995 03:20 | END EFFECTOR VACUUM PROBLEMS | 13 lines |
| 5.38 | Fri Nov 10 1995 03:21 | DOWNFORCE READOUTS IN QUESTION, DOWNFORCE CHECKED | 22 lines |
| 5.39 | Fri Nov 10 1995 03:22 | LOW SLURRY PH | 11 lines |
| 5.40 | Fri Nov 10 1995 03:22 | TABLE STALLED OUT | 20 lines |
| 5.41 | Fri Nov 10 1995 03:22 | TABLE STALL OUTS, OVER CURRENT | 28 lines |
| 5.42 | Fri Nov 10 1995 03:23 | TABLE STALLED OUT | 19 lines |
| 5.43 | Fri Nov 10 1995 03:23 | TABLE STALL OUTS, OVER CURRENT | 16 lines |
| 5.44 | Fri Nov 10 1995 03:24 | END EFFECTOR PROBLEMS | 40 lines |
| 5.45 | Fri Nov 10 1995 03:25 | END EFFECTOR PROBLEMS | 14 lines |
| 5.46 | Fri Nov 10 1995 03:26 | ROLLERS REPLACED | 27 lines |
| 5.47 | Fri Nov 10 1995 03:28 | VACUUM LEAK AT END EFFECTOR | 10 lines |
| 5.48 | Fri Nov 10 1995 03:29 | AIR LEAK AT END EFFECTOR | 27 lines |
| 5.49 | Fri Nov 10 1995 03:29 | TABLE STALL | 25 lines |
| 5.50 | Fri Nov 10 1995 03:36 | END EFFECTOR PROBLEMS - TABLE STALL-OUTS | 22 lines |
| 5.51 | Fri Nov 10 1995 03:37 | TABLE STALL-OUTS, SPINDLE RPM'S TOO LOW | 58 lines |
| 5.52 | Fri Nov 10 1995 03:37 | TABLE STALL OUTS | 14 lines |
| 5.53 | Fri Nov 10 1995 03:38 | TABLE STALL-OUTS, SLURRY PUMP CALIBRATIONS | 36 lines |
| 5.54 | Fri Nov 10 1995 03:39 | HUB AND SPINDLE ALIGNMENTS DUE TO BAD UNIFORMITY | 38 lines |
| 5.55 | Fri Nov 10 1995 03:39 | ROLLERS REPLACED | 8 lines |
| 5.56 | Fri Nov 10 1995 03:39 | SHUTTLE MOVEMENT REAL SLOW | 12 lines |
| 5.57 | Fri Nov 10 1995 03:42 | MANY ROBOT END EFFECTOR PROBLEMS | 240 lines |
| 5.58 | Fri Nov 10 1995 03:42 | MORE END EFFECTOR PROBLEMS | 15 lines |
| 5.59 | Fri Nov 10 1995 03:43 | CONDITIONER BACKLASH PROBLEMS | 51 lines |
| 5.60 | Fri Nov 10 1995 03:43 | MANY ROBOT END EFFECTOR PROBLEMS | 78 lines |
| 5.61 | Fri Nov 10 1995 03:44 | SLURRY LOOPS CLEANED | 15 lines |
| 5.62 | Fri Nov 10 1995 03:45 | BRUSH AIR MOTORS REPLACED | 15 lines |
| 5.63 | Fri Nov 10 1995 03:46 | WAFER BREAKAGE PROBLEMS | 37 lines |
| 5.64 | Fri Nov 10 1995 03:46 | ROBOT Z AXIS PROBLEMS, EMO DELAYS | 44 lines |
| 5.65 | Fri Nov 10 1995 03:47 | ROBOT HARDWARE PROBLEMS (CORROSION, ENCODERS) | 190 lines |
| 5.66 | Fri Nov 10 1995 03:48 | ROBOT END EFFECTOR PROBLEMS | 28 lines |
| 5.67 | Fri Nov 10 1995 03:53 | MORE CORROSION PROBLEMS WITH THE ROBOT | 263 lines |
| 5.68 | Fri Nov 10 1995 03:54 | CONDITIONER ARM FROZE | 90 lines |
| 5.69 | Fri Nov 10 1995 03:55 | CONDITIONER PROBLEMS, ROBOT X-AXIS PROBLEMS | 67 lines |
| 5.70 | Fri Nov 10 1995 03:55 | CONDITIONER PROBLEMS | 92 lines |
| 5.71 | Fri Nov 10 1995 04:03 | WAFERS BROKE IN SEND CASSETTES | 34 lines |
| 5.72 | Fri Nov 10 1995 04:05 | SEND ELEVATOR PROBLEMS | 9 lines |
| 5.73 | Fri Nov 10 1995 04:05 | EMO DELAYS | 68 lines |
| 5.74 | Fri Nov 10 1995 04:07 | TABLE STALLS, EMO DELAYS | 125 lines |
| 5.75 | Fri Nov 10 1995 04:09 | CONDITIONER ARM PROBLEMS | 13 lines |
| 5.76 | Fri Nov 10 1995 04:09 | CONDITIONER ARM PROBLEMS | 23 lines |
| 5.77 | Fri Nov 10 1995 04:09 | CONDITIONER DELAYS | 30 lines |
| 5.78 | Fri Nov 10 1995 23:47 | BRIDGE TRAVELED IN WRONG DIRECTION | 8 lines |
| 5.79 | Fri Nov 10 1995 23:47 | PAD CONDITIONER SWEEP PROBLEM | 19 lines |
| 5.80 | Fri Nov 10 1995 23:48 | ROBOT LEAD SCREW | 8 lines |
| 5.81 | Fri Nov 10 1995 23:48 | ROBOT LEAD SCREW TRAVEL | 27 lines |
| 5.82 | Fri Nov 10 1995 23:48 | CONDITIONER TRAVEL/SWEEP PROBLEMS | 36 lines |
| 5.83 | Fri Nov 10 1995 23:49 | HIGH PARTICLES | 11 lines |
| 5.84 | Fri Nov 10 1995 23:49 | CONDITIONER DISK SIZE CHANGED | 11 lines |
| 5.85 | Fri Nov 10 1995 23:51 | CONDITIONER ARM AIR CYLINDER LINES | 13 lines |
| 5.86 | Fri Nov 10 1995 23:52 | LEAK AT ROTARY JOINT | 60 lines |
| 5.87 | Fri Nov 10 1995 23:52 | BRIDGE VACUUM FILTERS | 8 lines |
| 5.88 | Fri Nov 10 1995 23:52 | EMO CONTACTOR REPLACED | 9 lines |
| 5.89 | Fri Nov 10 1995 23:53 | RMP'S IN QUESTIONS, CHECKED OUT | 15 lines |
| 5.90 | Fri Nov 10 1995 23:55 | ELEVATOR NOT HOMING | 64 lines |
| 5.91 | Fri Nov 10 1995 23:56 | ROBOT WAFER PICKUP PROBLEM | 42 lines |
| 5.92 | Fri Nov 10 1995 23:56 | TABLE STALLING | 17 lines |
| 5.93 | Fri Nov 10 1995 23:56 | TABLE STALLING AGAIN | 50 lines |
| 5.94 | Fri Nov 10 1995 23:57 | CONDITIONER PROBLEMS | 36 lines |
| 5.98 | Thu Nov 09 1995 08:22 | Table stall-outs | 8 lines |
| 5.99 | Fri Nov 10 1995 02:13 | A1 INSTALLATION AND FIT-UP | 220 lines |
| 5.100 | Fri Nov 10 1995 05:54 | TABLE STALL OUTS STILL WITH US | 9 lines |
| 5.102 | Sat Nov 11 1995 07:10 | Things are looking better.... | 9 lines |
| 5.105 | Thu Nov 16 1995 07:27 | Gear box oil level | 17 lines |
| 5.107 | Sat Nov 18 1995 08:30 | Wafer breakage | 8 lines |
| 5.110 | Thu Nov 23 1995 06:28 | Wafer breakage | 6 lines |
| 5.115 | Thu Nov 30 1995 08:37 | Wafer breakage | 7 lines |
| 5.117 | Thu Dec 21 1995 00:35 | CALIBRATION VARIABLES AS OF 12/21/95 | 203 lines |
| 5.118 | Fri Dec 29 1995 15:09 | Start-up for 12/29 | 12 lines |
| 5.120 | Sun Dec 31 1995 14:31 | CMP.A1 START-UP COMPLETE | 43 lines |
| 5.123 | Fri Jan 05 1996 01:17 | DOWNFORCE PROBLEMS, LEAKING HOUSING | 55 lines |
| 5.131 | Fri Jan 19 1996 06:49 | Spindles dropping off hubs | 25 lines |
| 5.132 | Fri Jan 19 1996 07:09 | Clogged drain lines | 15 lines |
| 5.134 | Sat Jan 20 1996 05:28 | Robot Z height | 11 lines |
| 5.137 | Wed Jan 24 1996 06:46 | Left SEND elevator | 11 lines |
| 5.139 | Thu Jan 25 1996 05:52 | AIR MOTOR REPLACED | 7 lines |
| 5.147 | Thu Feb 01 1996 05:45 | Vacuum problem corrected | 8 lines |
| 5.149 | Thu Feb 01 1996 19:28 | Robot amendment | 9 lines |
| 5.155 | Fri Feb 16 1996 07:28 | Vacuum switch recalibrated | 6 lines |
| 5.162 | Thu Mar 07 1996 23:17 | wafer breakage | 7 lines |
| 5.164 | Sat Mar 09 1996 04:52 | scratches and brushes | 20 lines |
| 5.170 | Thu Mar 14 1996 04:52 | Auto-cycle failure, slurry filter issue | 17 lines |
| 5.172 | Thu Mar 14 1996 22:23 | Left send elevator | 14 lines |
| 5.182 | Thu Mar 21 1996 05:10 | Crash... | 21 lines |
| 5.184 | Fri Mar 22 1996 05:03 | Tool had no problems | 9 lines |
| 5.186 | Sat Mar 23 1996 05:28 | no crashes but failed MQC's | 10 lines |
| 5.188 | Thu Mar 28 1996 06:07 | CMP.A1 shutdown for facilities tie-in completed | 57 lines |
| 5.193 | Wed Apr 17 1996 05:57 | No slurry flow | 9 lines |
| 5.203 | Sat May 11 1996 06:17 | scratches | 9 lines |
| 5.206 | Thu May 23 1996 06:59 | Bad Uniformity | 8 lines |
| 5.207 | Wed May 29 1996 08:19 | Bubbles.... | 7 lines |
| 5.208 | Sat Jun 01 1996 05:25 | Slurry line blew | 6 lines |
| 5.225 | Sat Jul 13 1996 07:06 | scratches | 12 lines |
| 5.234 | Fri Aug 02 1996 05:26 | bubbles | 6 lines |
| 5.235 | Mon Aug 05 1996 14:48 | | 6 lines |
| 5.245 | Sat Sep 21 1996 06:53 | Bent conditioner spindle shaft | 18 lines |
| 5.254 | Thu Sep 26 1996 07:48 | Particles | 18 lines |
| 5.260 | Thu Oct 03 1996 07:20 | scratches and particles | 14 lines |
| 5.282 | Fri Oct 25 1996 00:46 | pad change | 4 lines |
| 5.283 | Sat Oct 26 1996 04:48 | Bubble under pad | 6 lines |
| 5.285 | Fri Nov 01 1996 05:59 | Slurry delivery and bubbles | 13 lines |
| 5.286 | Fri Nov 08 1996 06:55 | Bubbles under pad | 7 lines |
| 5.287 | Fri Nov 15 1996 06:20 | Pad change | 7 lines |
| 5.292 | Sat Nov 30 1996 06:12 | Massive wafer breakage | 8 lines |
| 5.298 | Wed Dec 11 1996 07:50 | Low bridge oil alarm | 9 lines |
| 5.300 | Fri Dec 13 1996 05:04 | Carrier change | 8 lines |
| 5.301 | Fri Dec 13 1996 06:52 | Uniformity issues | 10 lines |
| 5.308 | Fri Dec 20 1996 06:23 | Failed MQC's - Monthly PM completed | 7 lines |
| 5.310 | Fri Dec 20 1996 20:59 | Broken DI gun/line | 9 lines |
| 5.317 | Sat Dec 28 1996 07:18 | Robot failed... again... | 20 lines |
| 5.323 | Fri Jan 03 1997 05:00 | Shuttle doin' the see-saw... | 14 lines |
| 5.325 | Sat Jan 04 1997 04:25 | Pad change | 7 lines |
| 5.327 | Wed Jan 08 1997 07:13 | pad change | 4 lines |
| 5.328 | Thu Jan 09 1997 06:57 | pad change - bubbles | 6 lines |
| 5.331 | Tue Jan 14 1997 16:41 | Problems with the REMOTE/Black Box | 11 lines |
| 5.340 | Fri Feb 14 1997 05:16 | Bad unif., monthly completed | 8 lines |
| 5.342 | Sat Feb 15 1997 06:58 | EMO and stalling issues | 23 lines |
| 5.357 | Sat Mar 22 1997 05:56 | Carriers are falling.... | 8 lines |
| 5.362 | Fri Mar 28 1997 05:21 | Pad replaced | 8 lines |
| 5.366 | Thu Apr 10 1997 07:32 | Pad change | 4 lines |
| 5.369 | Thu Apr 17 1997 01:03 | Uniformity and vacuum issues | 16 lines |
| 5.380 | Fri May 02 1997 06:51 | Scotty.. we need more slurry!!! | 9 lines |
| 5.387 | Fri May 09 1997 06:01 | Pad change | 5 lines |
| 5.388 | Fri May 16 1997 05:58 | pad change | 5 lines |
| 5.389 | Sat May 17 1997 08:22 | Bad unif. - Robot issue | 11 lines |
| 5.391 | Thu May 22 1997 06:05 | Pad change | 6 lines |
| 5.394 | Thu May 29 1997 02:55 | Pad change - bad uniformity | 10 lines |
| 5.395 | Fri May 30 1997 08:14 | Pad change | 6 lines |
TOPIC | 6.0 | CMP.A1 PM CHECKSHEETS |
| 6.1 | Wed Nov 08 1995 20:59 | Weekly PM Checksheet Template | 78 lines |
| 6.2 | Wed Nov 08 1995 21:01 | Monthly PM Checksheet Template | 94 lines |
| 6.3 | Wed Nov 08 1995 21:05 | Semi-annual PM Checksheet Template | 32 lines |
| 6.4 | Wed Nov 08 1995 21:06 | Annual PM Checksheet Template | 27 lines |
| 6.5 | Fri Nov 17 1995 02:08 | A1 MONTHLY COMPLETED FOR 11/15 | 95 lines |
| 6.7 | Tue Nov 28 1995 22:33 | WEEKLY PM FOR 11/28 COMPLETED | 78 lines |
| 6.12 | Fri Dec 22 1995 05:33 | A1 MONTHLY PM COMPLETED | 86 lines |
| 6.17 | Thu Jan 25 1996 00:37 | A1 MONTHLY COMPLETED | 85 lines |
| 6.18 | Thu Feb 01 1996 05:40 | A1 WEEKLY PM COMPLETED | 72 lines |
| 6.28 | Mon Apr 08 1996 10:27 | Weekly PM for WW41 completed | 69 lines |
| 6.33 | Thu May 16 1996 08:17 | Monthly PM for WW46 completed | 157 lines |
| 6.71 | Fri Dec 20 1996 03:17 | MONTHLY PM COMPLETED FOR WW25 | 163 lines |
| 6.74 | Thu Jan 02 1997 22:07 | WEEKLY PM COMPLETED FOR WW27 | 76 lines |
| 6.80 | Thu Feb 13 1997 23:26 | MONTHLY PM COMPLETED FOR WW33 | 167 lines |
TOPIC | 7.0 | Fri Nov 17 1995 05:25 | CMP.A2 EE/PE PASSDOWNS | 7 lines |
| 7.1 | Fri Nov 17 1995 04:45 | MECHANICAL ACCEPTANCE | 277 lines |
| 7.2 | Fri Nov 17 1995 04:45 | GEAR BOX PROBLEM | 57 lines |
| 7.3 | Fri Nov 17 1995 04:46 | VACUUM CABINET | 16 lines |
| 7.4 | Fri Nov 17 1995 04:47 | Alignments & Leveling bolts | 25 lines |
| 7.5 | Fri Nov 17 1995 04:47 | SPINDLE STOPPING | 28 lines |
| 7.6 | Fri Nov 17 1995 04:47 | Calibration variable for table rotation | 18 lines |
| 7.7 | Fri Nov 17 1995 04:48 | ROBOT BINDING UP | 20 lines |
| 7.8 | Fri Nov 17 1995 04:48 | ELEVATOR ALIGNMENTS | 31 lines |
| 7.9 | Fri Nov 17 1995 04:49 | Robot lead screw assembly bushings | 12 lines |
| 7.10 | Fri Nov 17 1995 04:49 | ROBOT CLEANED AND ALIGNED | 12 lines |
| 7.11 | Fri Nov 17 1995 04:50 | #1 Cassette position sensor | 7 lines |
| 7.12 | Fri Nov 17 1995 04:50 | lead screws | 9 lines |
| 7.13 | Fri Nov 17 1995 04:51 | Robot Z-axis calibration variables | 16 lines |
| 7.14 | Fri Nov 17 1995 04:51 | ROBOT NOT PICKING UP WAFER | 108 lines |
| 7.15 | Fri Nov 17 1995 04:51 | ELEVATOR HEIGHT NOT REPEATING | 12 lines |
| 7.16 | Fri Nov 17 1995 04:52 | ELEVATOR HEIGHT NOT REPEATING | 52 lines |
| 7.17 | Fri Nov 17 1995 04:52 | Elevators PULLEYS | 17 lines |
| 7.18 | Fri Nov 17 1995 04:53 | | 34 lines |
| 7.19 | Fri Nov 17 1995 04:53 | | 8 lines |
| 7.20 | Fri Nov 17 1995 04:53 | 301 = IBM MANUAL ERROR | 15 lines |
| 7.21 | Fri Nov 17 1995 04:54 | | 14 lines |
| 7.22 | Fri Nov 17 1995 04:54 | | 14 lines |
| 7.23 | Fri Nov 17 1995 04:54 | LOSS OF POWER | 20 lines |
| 7.24 | Fri Nov 17 1995 04:56 | COMPUTER WON'T BOOT | 16 lines |
| 7.25 | Fri Nov 17 1995 04:56 | POWER PROBLEMS | 31 lines |
| 7.26 | Fri Nov 17 1995 04:56 | COMPUTER WON'T BOOT | 25 lines |
| 7.27 | Fri Nov 17 1995 04:56 | | 25 lines |
| 7.28 | Fri Nov 17 1995 04:57 | ROBOT ARMS NOT ARRIVING AT ZERO | 12 lines |
| 7.29 | Fri Nov 17 1995 04:58 | | 27 lines |
| 7.30 | Fri Nov 17 1995 04:59 | | 16 lines |
| 7.31 | Fri Nov 17 1995 05:01 | | 15 lines |
| 7.32 | Fri Nov 17 1995 05:01 | DOWNFORCE ISSUES | 80 lines |
| 7.33 | Fri Nov 17 1995 05:02 | LOAD CUPS | 39 lines |
| 7.34 | Fri Nov 17 1995 05:04 | | 15 lines |
| 7.35 | Fri Nov 17 1995 05:10 | | 12 lines |
| 7.36 | Fri Nov 17 1995 05:11 | | 62 lines |
| 7.37 | Fri Nov 17 1995 05:10 | | 15 lines |
| 7.38 | Fri Nov 17 1995 05:11 | | 22 lines |
| 7.39 | Fri Nov 17 1995 05:11 | | 18 lines |
| 7.40 | Fri Nov 17 1995 05:12 | | 209 lines |
| 7.41 | Fri Nov 17 1995 05:11 | | 23 lines |
| 7.42 | Fri Nov 17 1995 05:12 | | 29 lines |
| 7.43 | Fri Nov 17 1995 05:12 | | 19 lines |
| 7.44 | Fri Nov 17 1995 05:13 | | 27 lines |
| 7.45 | Fri Nov 17 1995 05:12 | | 26 lines |
| 7.46 | Fri Nov 17 1995 05:13 | SPINDLE REGULATOR INSTALLED | 31 lines |
| 7.47 | Fri Nov 17 1995 05:13 | | 18 lines |
| 7.48 | Fri Nov 17 1995 05:13 | | 33 lines |
| 7.49 | Fri Nov 17 1995 05:13 | | 14 lines |
| 7.50 | Fri Nov 17 1995 05:14 | | 11 lines |
| 7.51 | Fri Nov 17 1995 05:13 | | 17 lines |
| 7.52 | Fri Nov 17 1995 05:14 | | 51 lines |
| 7.53 | Fri Nov 17 1995 05:14 | | 24 lines |
| 7.54 | Fri Nov 17 1995 05:15 | | 12 lines |
| 7.55 | Fri Nov 17 1995 05:14 | | 21 lines |
| 7.56 | Fri Nov 17 1995 05:15 | | 50 lines |
| 7.57 | Fri Nov 17 1995 05:14 | | 8 lines |
| 7.58 | Fri Nov 17 1995 05:15 | | 16 lines |
| 7.59 | Fri Nov 17 1995 05:15 | | 10 lines |
| 7.60 | Fri Nov 17 1995 05:16 | ROBOT TRAVEL PROBLEMS | 12 lines |
| 7.61 | Fri Nov 17 1995 05:16 | | 214 lines |
| 7.62 | Fri Nov 17 1995 05:16 | | 20 lines |
| 7.63 | Fri Nov 17 1995 05:16 | | 22 lines |
| 7.64 | Fri Nov 17 1995 05:17 | | 151 lines |
| 7.65 | Fri Nov 17 1995 05:16 | | 11 lines |
| 7.66 | Fri Nov 17 1995 05:17 | | 54 lines |
| 7.67 | Fri Nov 17 1995 05:17 | | 30 lines |
| 7.68 | Fri Nov 17 1995 05:17 | | 11 lines |
| 7.69 | Fri Nov 17 1995 05:17 | | 11 lines |
| 7.70 | Fri Nov 17 1995 05:18 | | 6 lines |
| 7.71 | Fri Nov 17 1995 05:18 | | 8 lines |
| 7.72 | Fri Nov 17 1995 05:19 | | 20 lines |
| 7.73 | Fri Nov 17 1995 05:18 | | 18 lines |
| 7.74 | Fri Nov 17 1995 05:19 | | 21 lines |
| 7.75 | Fri Nov 17 1995 05:18 | | 28 lines |
| 7.76 | Fri Nov 17 1995 05:19 | | 10 lines |
| 7.77 | Fri Nov 17 1995 05:19 | | 17 lines |
| 7.78 | Fri Nov 17 1995 05:19 | | 36 lines |
| 7.79 | Fri Nov 17 1995 05:20 | DI WATER VALVE REPLACED | 17 lines |
| 7.80 | Fri Nov 17 1995 05:20 | | 26 lines |
| 7.81 | Fri Nov 17 1995 05:21 | | 41 lines |
| 7.82 | Fri Nov 17 1995 05:20 | | 37 lines |
| 7.83 | Fri Nov 17 1995 05:21 | | 9 lines |
| 7.84 | Fri Nov 17 1995 05:20 | | 25 lines |
| 7.85 | Fri Nov 17 1995 05:21 | | 53 lines |
| 7.89 | Thu Nov 09 1995 08:35 | Wafer breakage.... | 7 lines |
| 7.90 | Fri Nov 10 1995 05:35 | TABLE PROBLEMS STILL EXIST | 9 lines |
| 7.92 | Sat Nov 11 1995 07:18 | Table stall seeing an end | 16 lines |
| 7.93 | Thu Nov 16 1995 07:29 | Oil level low | 7 lines |
| 7.100 | Thu Nov 23 1995 06:30 | DI attack!!! | 8 lines |
| 7.104 | Thu Nov 30 1995 08:42 | Uniformity issues | 14 lines |
| 7.110 | Thu Dec 21 1995 06:38 | WAFER BREAKAGE | 10 lines |
| 7.111 | Fri Dec 29 1995 15:10 | Start-up for 12/29 | 12 lines |
| 7.113 | Sun Dec 31 1995 14:32 | CMP.A2 START-UP COMPLETE | 43 lines |
| 7.115 | Thu Jan 04 1996 08:25 | Wafer breakage.... | 8 lines |
| 7.117 | Wed Jan 10 1996 06:11 | Wafer breakage, pm | 4 lines |
| 7.119 | Sat Jan 20 1996 05:24 | LEFT SEND LEFT ELEVATOR NOT REPEATING | 10 lines |
| 7.123 | Thu Jan 25 1996 06:50 | pad change, left send elevator | 7 lines |
| 7.128 | Fri Feb 09 1996 05:17 | Robot upgrade | 7 lines |
| 7.137 | Fri Feb 16 1996 07:28 | Blown slurry line on pump #1 | 9 lines |
| 7.146 | Sat Mar 09 1996 04:52 | wafer breakage, brushes | 8 lines |
| 7.152 | Sat Mar 16 1996 07:00 | MQC failures | 12 lines |
| 7.156 | Thu Mar 21 1996 05:51 | Crash... again... | 28 lines |
| 7.158 | Fri Mar 22 1996 05:00 | More crashes and ENG experiments | 18 lines |
| 7.162 | Thu Mar 28 1996 06:07 | CMP.A2 shutdown for facilities tie-in completed | 57 lines |
| 7.163 | Fri Mar 29 1996 06:34 | carrier issues | 14 lines |
| 7.182 | Sat May 11 1996 06:18 | wafer breakage | 13 lines |
| 7.190 | Sat Jun 01 1996 05:27 | particles | 8 lines |
| 7.202 | Wed Jul 10 1996 08:16 | Crash and PM | 11 lines |
| 7.206 | Thu Jul 18 1996 07:41 | right spindle uniformity | 10 lines |
| 7.211 | Fri Aug 02 1996 06:43 | bubbles | 6 lines |
| 7.224 | Thu Sep 19 1996 08:03 | Brushes changed | 5 lines |
| 7.227 | Thu Sep 26 1996 07:49 | Particles | 18 lines |
| 7.231 | Wed Oct 02 1996 07:42 | Wafer Breakage | 19 lines |
| 7.233 | Thu Oct 03 1996 07:20 | Removal rates misc. repairs | 31 lines |
| 7.251 | Thu Oct 17 1996 07:17 | Carrier staying on table, wafer not blowing off | 8 lines |
| 7.252 | Fri Oct 18 1996 05:06 | WAFER BREAKAGE | 8 lines |
| 7.256 | Thu Oct 24 1996 08:12 | Wafer breakage | 6 lines |
| 7.258 | Fri Oct 25 1996 05:49 | Robot loading problems | 10 lines |
| 7.260 | Sat Oct 26 1996 04:52 | No vacuum on left carrier | 13 lines |
| 7.263 | Fri Nov 01 1996 06:00 | Slurry delivery and bubbles | 13 lines |
| 7.274 | Fri Nov 15 1996 06:20 | Pad change | 7 lines |
| 7.279 | Sat Nov 23 1996 05:15 | Robot issues | 9 lines |
| 7.281 | Sat Nov 30 1996 06:14 | Wafer breakage.... | 10 lines |
| 7.283 | Thu Dec 05 1996 04:38 | Pad change due to MQC's results. | 10 lines |
| 7.284 | Sat Dec 07 1996 01:20 | Pad change | 7 lines |
| 7.286 | Thu Dec 12 1996 06:19 | Robot crash | 13 lines |
| 7.288 | Fri Dec 13 1996 06:55 | Uniformity, near-crash, vacuum error | 17 lines |
| 7.292 | Wed Dec 18 1996 21:28 | ROBOT MIS-LOAD | 13 lines |
| 7.293 | Thu Dec 19 1996 05:11 | Robot slamage.... | 14 lines |
| 7.295 | Sat Dec 21 1996 00:50 | Pad change - Bad unif. | 8 lines |
| 7.313 | Thu Jan 30 1997 08:47 | Wafer breakage - Product.... | 9 lines |
| 7.314 | Fri Jan 31 1997 05:09 | Another one bites the dust! | 17 lines |
| 7.315 | Sat Feb 01 1997 06:27 | Pad change | 4 lines |
| 7.327 | Thu Feb 13 1997 06:30 | lost 100psi on the back pressure regulators | 22 lines |
| 7.329 | Fri Feb 14 1997 05:22 | Gearbox upgrade status | 15 lines |
| 7.331 | Sat Feb 15 1997 07:04 | A2 upgrade? | 9 lines |
| 7.337 | Wed Feb 19 1997 05:58 | Table status | 11 lines |
| 7.339 | Thu Feb 20 1997 05:58 | Table, sweep and spindle alignments | 23 lines |
| 7.347 | Fri Mar 28 1997 05:24 | Carrier replaced - bad uniformity | 6 lines |
| 7.350 | Fri Apr 04 1997 07:14 | ENG work completed | 9 lines |
| 7.353 | Thu Apr 10 1997 07:32 | Pad change | 4 lines |
| 7.365 | Wed Apr 30 1997 07:08 | Bad Uniformity - pad change | 5 lines |
| 7.374 | Fri May 09 1997 06:07 | Eng. work completed, monthly completed | 14 lines |
| 7.376 | Fri May 09 1997 20:42 | Sweep parameters | 8 lines |
| 7.378 | Wed May 14 1997 07:17 | Bad uniformity.... GONE!! | 11 lines |
| 7.382 | Fri May 16 1997 05:58 | pad change | 5 lines |
| 7.388 | Thu Jun 05 1997 07:13 | Pad change - Bad uniformity | 5 lines |
TOPIC | 8.0 | CMP.A2 PM CHECKSHEETS |
| 8.1 | Wed Nov 08 1995 21:07 | Weekly PM Checksheet Template | 78 lines |
| 8.2 | Wed Nov 08 1995 21:07 | Monthly PM Checksheet Template | 90 lines |
| 8.3 | Wed Nov 08 1995 21:07 | Semi-annual PM Checksheet Template | 30 lines |
| 8.4 | Wed Nov 08 1995 21:08 | Annual PM Checksheet Template | 27 lines |
| 8.6 | Wed Nov 22 1995 06:12 | Weekly PM for 11/22 completed | 71 lines |
| 8.7 | Wed Nov 29 1995 21:54 | WEEKLY PM COMPLETED FOR WW22 | 74 lines |
| 8.13 | Wed Jan 10 1996 06:15 | MONTHLY PM FOR CMP.A2 COMPLETED | 90 lines |
| 8.18 | Sat Feb 17 1996 07:07 | MONTHLY PM COMPLETED FOR WW33 | 90 lines |
| 8.21 | Thu Mar 07 1996 23:26 | MONTHLY PM COMPLETED FOR WW36 | 90 lines |
| 8.23 | Wed Mar 20 1996 06:30 | Weekly PM completed for WW38 | 74 lines |
| 8.30 | Thu May 09 1996 23:22 | MONTHLY PM FOR WW45 COMPLETED | 159 lines |
| 8.44 | Thu Jul 04 1996 00:40 | CMP.A2 JULY 4TH SHUT-DOWN CHECKSHEET | 42 lines |
| 8.46 | Wed Jul 10 1996 08:07 | Monthly PM for WW2 completed | 157 lines |
| 8.50 | Wed Aug 07 1996 07:10 | MONTHLY PM FOR WW6 COMPLETED | 158 lines |
| 8.75 | Thu Jan 02 1997 07:38 | CMP.A2 START-UP COMPLETED | 34 lines |
| 8.93 | Fri May 09 1997 04:56 | Monthy PM for WW45 completed | 164 lines |
TOPIC | 9.0 | Fri Dec 13 1996 04:58 | STRASBAUGH CRASH FORMS | 66 lines |
| 9.11 | Fri Oct 18 1996 04:39 | WAFERS CRASHED ON CMP.A2 | 32 lines |
| 9.24 | Sat Nov 30 1996 02:36 | WAFER BREAKAGE, CMP.A2 | 36 lines |
| 9.27 | Wed Dec 04 1996 21:03 | PRODUCT WAFER BREAKAGE ON CMP.A1 | 32 lines |
| 9.32 | Fri Dec 13 1996 04:57 | CMP.A2 SLIDE-OUT NO SCRAPPED WAFERS! | 69 lines |
| 9.33 | Fri Dec 13 1996 05:01 | CMP.A2 SLIDE-OUT CRASH PREVENTED! | 69 lines |
| 9.46 | Wed Jan 29 1997 22:50 | WAFER CRASH ON CMP.A2, BOTH PRODUCT WAFERS | 66 lines |
| 9.47 | Thu Jan 30 1997 22:37 | (2) wafer monitor crash, no product lost | 62 lines |
| 9.48 | Fri Jan 31 1997 04:58 | Product crash, not on polish table!!! | 63 lines |
TOPIC | 10.0 | Sat Dec 14 1996 04:28 | CMP.A1 DECTREE USAGE | 6 lines |
TOPIC | 11.0 | Sat Dec 14 1996 04:30 | CMP.A2 DECTREE USAGE | 6 lines |
TOPIC | 14.0 | Wed Nov 29 1995 23:14 | RESERVED | 3 lines |
TOPIC | 15.0 | Sat Sep 28 1996 04:30 | STRASBAUGH GENERAL ISSUES | 8 lines |
TOPIC | 16.0 | CMP.B PM TEMPLATES |
| 16.1 | Mon Feb 03 1997 15:15 | WEEKLY CMP.B PM TEMPLATE | 99 lines |
| 16.2 | Mon Feb 03 1997 15:20 | MONTHLY CMP.B PM TEMPLATE | 183 lines |
| 16.3 | Mon Feb 03 1997 15:44 | SEMI-ANNUAL CMP.B PM TEMPLATE | 406 lines |
| 16.4 | Mon Feb 03 1997 15:45 | CMP.B SHUTDOWN/STARTUP CHECKSHEETS | 50 lines |
TOPIC | 17.0 | Wed Nov 29 1995 22:45 | CMP.B1 EE/PE PASSDOWNS | 6 lines |
| 17.1 | Wed Nov 29 1995 22:04 | INSTALL INFORMATION | 1090 lines |
| 17.2 | Wed Nov 29 1995 22:53 | MECHANICAL ACCEPTANCE | 3921 lines |
| 17.3 | Wed Nov 29 1995 22:05 | COMPUTER ERROR | 20 lines |
| 17.4 | Wed Nov 29 1995 22:05 | | 27 lines |
| 17.5 | Wed Nov 29 1995 22:06 | VACUUM BREAKER TRIPPED | 9 lines |
| 17.6 | Wed Nov 29 1995 22:06 | | 27 lines |
| 17.7 | Wed Nov 29 1995 22:07 | COMMUNICATION PROBLEMS | 20 lines |
| 17.8 | Wed Nov 29 1995 22:07 | | 11 lines |
| 17.9 | Wed Nov 29 1995 22:07 | | 38 lines |
| 17.10 | Wed Nov 29 1995 22:08 | PEDISTAL BENT, SOFTWARE PROBLEMS | 24 lines |
| 17.11 | Wed Nov 29 1995 22:09 | SOFTWARE AND RPM CHECK | 17 lines |
| 17.12 | Wed Nov 29 1995 22:10 | DOWNFORCE CHECKED | 40 lines |
| 17.13 | Wed Nov 29 1995 22:10 | UNIFORMITY, CONDITIONER | 26 lines |
| 17.14 | Wed Nov 29 1995 22:11 | | 13 lines |
| 17.15 | Wed Nov 29 1995 22:11 | VACUUM PUMP CHECK VALVE | 12 lines |
| 17.16 | Wed Nov 29 1995 22:11 | SCRUBBER BELT | 26 lines |
| 17.17 | Wed Nov 29 1995 22:12 | | 13 lines |
| 17.18 | Wed Nov 29 1995 22:12 | COMMUNICATION PROBLEMS | 25 lines |
| 17.19 | Wed Nov 29 1995 22:13 | SCRATCHES | 12 lines |
| 17.20 | Wed Nov 29 1995 22:13 | | 19 lines |
| 17.21 | Wed Nov 29 1995 22:13 | | 23 lines |
| 17.22 | Wed Nov 29 1995 22:14 | | 47 lines |
| 17.23 | Wed Nov 29 1995 22:14 | FLIPPER BOX PROBLEMS | 21 lines |
| 17.24 | Wed Nov 29 1995 22:14 | | 18 lines |
| 17.25 | Wed Nov 29 1995 22:16 | WATER LEAK | 30 lines |
| 17.26 | Wed Nov 29 1995 22:16 | GREASE BUILD-UP, WATER LEAK | 28 lines |
| 17.27 | Wed Nov 29 1995 22:17 | CONDITIONER ARM | 30 lines |
| 17.28 | Wed Nov 29 1995 22:18 | VACUUM PROBLEMS | 20 lines |
| 17.29 | Wed Nov 29 1995 22:18 | SCRATCHES | 11 lines |
| 17.30 | Wed Nov 29 1995 22:19 | COMPUTER BOOT-UP PROBLEMS | 51 lines |
| 17.31 | Wed Nov 29 1995 22:19 | PARTICLES | 25 lines |
| 17.32 | Wed Nov 29 1995 22:20 | CUPS NOT GOING DOWN, PEDISTAL BROKE | 46 lines |
| 17.33 | Wed Nov 29 1995 22:20 | LOAD/UNLOAD CUPS | 14 lines |
| 17.34 | Wed Nov 29 1995 22:21 | PEDISTAL REPLACEMENT | 29 lines |
| 17.35 | Wed Nov 29 1995 22:21 | ARM WOULDN'T HOME | 29 lines |
| 17.36 | Wed Nov 29 1995 22:22 | CONDITIONER ARM | 30 lines |
| 17.37 | Wed Nov 29 1995 22:22 | CUP PROBLEMS | 27 lines |
| 17.38 | Wed Nov 29 1995 22:23 | Machine powered down | 16 lines |
| 17.39 | Wed Nov 29 1995 22:23 | CUP PROBLEMS | 21 lines |
| 17.40 | Wed Nov 29 1995 22:24 | ARM #1 homing sensor failed | 18 lines |
| 17.41 | Wed Nov 29 1995 22:24 | Pressure plate, Load/Unload Flipper Box | 16 lines |
| 17.42 | Wed Nov 29 1995 22:24 | FLIPPER BOX | 49 lines |
| 17.43 | Wed Nov 29 1995 22:25 | CUP PROBLEMS | 34 lines |
| 17.44 | Wed Nov 29 1995 22:25 | Flipper box problem | 15 lines |
| 17.45 | Wed Nov 29 1995 22:25 | FLIPPER PROBLEMS | 34 lines |
| 17.46 | Wed Nov 29 1995 22:26 | lipper Box was removed | 34 lines |
| 17.47 | Wed Nov 29 1995 22:26 | Slurry system shut down | 9 lines |
| 17.48 | Wed Nov 29 1995 22:27 | wafers were bit due to slurry supply outage | 12 lines |
| 17.49 | Wed Nov 29 1995 22:27 | scrubber timeouts | 17 lines |
| 17.50 | Wed Nov 29 1995 22:28 | Wafer breakage incident | 18 lines |
| 17.51 | Wed Nov 29 1995 22:28 | Conditioner Arm problem | 34 lines |
| 17.52 | Wed Nov 29 1995 22:28 | condition arm parts arrived and installed | 24 lines |
| 17.53 | Wed Nov 29 1995 22:29 | scrubber timed out | 30 lines |
| 17.54 | Wed Nov 29 1995 22:29 | NEW SOFTWARE | 36 lines |
| 17.55 | Wed Nov 29 1995 22:29 | WAFER BREAK, CONDITIONER RUST | 45 lines |
| 17.56 | Wed Nov 29 1995 22:30 | CUP ALIGNMENT | 22 lines |
| 17.57 | Wed Nov 29 1995 22:31 | VACUUM switches adjusted | 26 lines |
| 17.58 | Wed Nov 29 1995 22:31 | vacuum restriction found | 22 lines |
| 17.59 | Wed Nov 29 1995 22:32 | cup problem | 13 lines |
| 17.60 | Wed Nov 29 1995 22:32 | a lack of N2 pressure | 15 lines |
| 17.61 | Wed Nov 29 1995 22:32 | vacuum pump down | 17 lines |
| 17.62 | Wed Nov 29 1995 22:33 | the pump has been installed | 31 lines |
| 17.63 | Wed Nov 29 1995 22:33 | Wafer breakage, machine down | 13 lines |
| 17.64 | Wed Nov 29 1995 22:34 | CARRIERS, PLATES, RINGS AND TABLE ISSUES | 45 lines |
| 17.65 | Wed Nov 29 1995 22:34 | plates/rings and assorted things | 33 lines |
| 17.66 | Wed Nov 29 1995 22:35 | gap measurement of the gimbal assembly | 20 lines |
| 17.67 | Wed Nov 29 1995 22:35 | wafer got loose without smashing! | 36 lines |
| 17.68 | Wed Nov 29 1995 22:35 | uniformity problems | 14 lines |
| 17.69 | Wed Nov 29 1995 22:36 | Wafer Breakage-Water Pressure Drop Suspected | 22 lines |
| 17.70 | Wed Nov 29 1995 22:36 | Unload Flipper/Unload cUps #'s 4 & 5 - Mechanical Interference | 24 lines |
| 17.71 | Wed Nov 29 1995 22:36 | Low Vacuum at head | 15 lines |
| 17.72 | Wed Nov 29 1995 22:37 | scrubber motor being shipped today | 11 lines |
| 17.73 | Wed Nov 29 1995 22:37 | Scrubber Rotation Problem / Motor Replaced | 27 lines |
| 17.74 | Wed Nov 29 1995 22:38 | scrubber motor problem | 31 lines |
| 17.75 | Wed Nov 29 1995 22:38 | Scrubber repaired | 15 lines |
| 17.76 | Wed Nov 29 1995 22:39 | Unload Flipper adjusted | 22 lines |
| 17.77 | Wed Nov 29 1995 22:39 | vacuum pump problem | 46 lines |
| 17.78 | Wed Nov 29 1995 22:39 | vacuum pump check valve | 18 lines |
| 17.79 | Wed Nov 29 1995 22:40 | Low Nitrogen Flow / Vacuum pump | 13 lines |
| 17.80 | Wed Nov 29 1995 22:40 | vacumm pump circuit breaker tripping at boot-up | 18 lines |
| 17.81 | Wed Nov 29 1995 22:40 | Brush station drive chain | 7 lines |
| 17.82 | Wed Nov 29 1995 22:41 | wafer breakage | 11 lines |
| 17.83 | Wed Nov 29 1995 22:41 | computer lockup | 21 lines |
| 17.84 | Wed Nov 29 1995 22:41 | Intermittent Electrical Problems | 28 lines |
| 17.85 | Fri Nov 10 1995 05:49 | WAFERS NOT GETTING INTO RECEIVE #1 CASSETTE | 8 lines |
| 17.86 | Sat Nov 11 1995 07:24 | Wafers getting stuck at receive elevator | 9 lines |
| 17.91 | Wed Nov 15 1995 06:37 | High particles, leak at Chiller PCWS | 17 lines |
| 17.93 | Sat Nov 18 1995 08:47 | major wafer crash, vacuum pump problems | 34 lines |
| 17.101 | Thu Nov 23 1995 06:33 | particles | 8 lines |
| 17.105 | Thu Nov 30 1995 08:47 | B1 wafer breakage due to loose screws | 11 lines |
| 17.106 | Fri Dec 01 1995 08:35 | (2) wafer crashes | 17 lines |
| 17.108 | Sat Dec 02 1995 07:32 | Spindle Alingment Out | 17 lines |
| 17.116 | Thu Dec 07 1995 09:08 | vacuum and rotating problems | 19 lines |
| 17.118 | Sat Dec 09 1995 05:18 | Table and Carriers not rotating | 11 lines |
| 17.131 | Sat Dec 23 1995 01:11 | SHUTDOWN COMPLETED, SCRATCHES | 13 lines |
| 17.132 | Fri Dec 29 1995 15:10 | Start-up for 12/29 | 12 lines |
| 17.133 | Sun Dec 31 1995 14:35 | CMP.B1 START-UP COMPLETE | 18 lines |
| 17.138 | Fri Jan 05 1996 01:16 | 1/3 B SHIFT P-DOWN - SCRATCHES, CRASH | 27 lines |
| 17.139 | Thu Jan 04 1996 22:10 | DOWNFORCE CHECKED/ADJ./RESULTS | 22 lines |
| 17.147 | Wed Jan 10 1996 06:19 | HEAD #4 NOT ROTATING | 8 lines |
| 17.149 | Thu Jan 11 1996 07:01 | More scratches | 14 lines |
| 17.151 | Fri Jan 12 1996 05:30 | Scratches - The saga continues | 31 lines |
| 17.162 | Fri Jan 19 1996 06:57 | grub work... | 7 lines |
| 17.171 | Wed Jan 24 1996 04:50 | ADE robot still not functioning | 27 lines |
| 17.173 | Thu Jan 25 1996 05:52 | VERIFY COMPLETED, NO ROBOT ERRORS, UP AND IDLE!!! | 11 lines |
| 17.177 | Fri Jan 26 1996 06:26 | robot installation | 14 lines |
| 17.179 | Sat Jan 27 1996 16:45 | power glitch wafer detect system | 13 lines |
| 17.187 | Thu Feb 08 1996 06:21 | Carrier #1 rotation, pad change | 23 lines |
| 17.190 | Fri Feb 09 1996 05:18 | Head rotation problem | 11 lines |
| 17.193 | Sat Feb 10 1996 07:38 | left send mapper control | 12 lines |
| 17.195 | Fri Feb 16 1996 07:29 | Oscillation positioning of carriers completed | 31 lines |
| 17.197 | Sat Feb 17 1996 07:12 | scratches | 7 lines |
| 17.200 | Wed Feb 21 1996 07:33 | Scratches... still scratching | 15 lines |
| 17.202 | Sat Feb 24 1996 05:15 | Inverter error | 10 lines |
| 17.208 | Thu Feb 29 1996 08:52 | Crash!, No slurry flow! | 22 lines |
| 17.213 | Sat Mar 09 1996 04:52 | head rotation problems | 7 lines |
| 17.224 | Sat Mar 16 1996 07:00 | Wafer breakage | 16 lines |
| 17.229 | Wed Mar 20 1996 03:29 | No Head Oscillation | 15 lines |
| 17.233 | Thu Mar 28 1996 06:12 | CMP.B1 shutdown for facilities tie-in completed | 54 lines |
| 17.234 | Fri Mar 29 1996 06:33 | motor #5 problem, DI flow, slurry stuff.. | 31 lines |
| 17.236 | Sat Mar 30 1996 06:36 | rotation and MHTA errors | 17 lines |
| 17.246 | Thu Apr 25 1996 07:28 | Software problems, downforce checked | 40 lines |
| 17.247 | Fri Apr 26 1996 05:50 | offsets and software kicks | 68 lines |
| 17.249 | Thu May 02 1996 08:29 | Cat Scratch Fever | 13 lines |
| 17.250 | Sat May 11 1996 06:18 | software problems | 10 lines |
| 17.257 | Thu May 30 1996 07:40 | Head rotation errors | 30 lines |
| 17.277 | Fri Jun 28 1996 08:18 | Particles are back... | 10 lines |
| 17.278 | Sat Jun 29 1996 09:20 | wafer breakage... | 13 lines |
| 17.292 | Thu Jul 11 1996 08:03 | LOAD CUP #! sensor | 12 lines |
| 17.298 | Thu Jul 18 1996 07:39 | Particles.... | 29 lines |
| 17.303 | Fri Aug 02 1996 06:46 | carrier time-out errors | 18 lines |
| 17.310 | Thu Aug 08 1996 07:51 | PARTICLES | 14 lines |
| 17.311 | Fri Aug 09 1996 07:28 | Particles | 22 lines |
| 17.318 | Fri Aug 16 1996 22:56 | Flipper issues | 23 lines |
| 17.321 | Fri Aug 16 1996 08:15 | Load flipper and elevator #1 errors | 23 lines |
| 17.327 | Sat Aug 17 1996 08:09 | Load flipper and float'in wafers... | 15 lines |
| 17.392 | Wed Oct 02 1996 07:42 | HEAD #1 STALL OUT | 15 lines |
| 17.395 | Thu Oct 03 1996 02:57 | WAFER CRASH | 16 lines |
| 17.396 | Thu Oct 03 1996 07:20 | removal rates issues | 11 lines |
| 17.398 | Sat Oct 05 1996 07:04 | Wafer breakage due to stall on #3 | 11 lines |
| 17.404 | Thu Oct 10 1996 07:37 | Scratches and (1) stall | 12 lines |
| 17.412 | Wed Oct 16 1996 07:56 | Nasty deviation results | 12 lines |
| 17.429 | Sat Oct 26 1996 05:01 | Particles | 9 lines |
| 17.438 | Wed Oct 30 1996 06:14 | Pad change, tolorence errors | 10 lines |
| 17.444 | Fri Nov 01 1996 06:00 | Wafer dusting... | 12 lines |
| 17.452 | Fri Nov 08 1996 06:51 | Software burp? | 27 lines |
| 17.456 | Fri Nov 15 1996 06:12 | DRIED CARRIERS, LOAD FLIPPER, LEAK | 18 lines |
| 17.464 | Thu Nov 21 1996 05:43 | Head #2 stall | 18 lines |
| 17.472 | Sat Nov 30 1996 03:17 | Particles... begone! | 19 lines |
| 17.478 | Sat Dec 07 1996 02:04 | Head #3 taken off line until further notice | 14 lines |
| 17.481 | Fri Dec 13 1996 06:56 | Bad uniformity | 6 lines |
| 17.487 | Thu Dec 19 1996 05:09 | Heads stall - not machine issue | 21 lines |
| 17.488 | Fri Dec 20 1996 06:18 | Head stalls... carriers guilty as charged | 35 lines |
| 17.493 | Fri Dec 27 1996 04:41 | Mapper #2 failure | 15 lines |
| 17.496 | Sat Dec 28 1996 07:09 | Pad change - uniformity/R.R. | 10 lines |
| 17.497 | Thu Jan 02 1997 08:23 | Neumatic adjustment, Semi-annual PM | 13 lines |
| 17.505 | Thu Jan 09 1997 06:57 | particles... | 14 lines |
| 17.531 | Wed Mar 19 1997 06:32 | Wafer detect/infranor issue | 16 lines |
| 17.532 | Fri Mar 21 1997 06:07 | Pad and carriers replaced | 12 lines |
| 17.538 | Fri Mar 28 1997 05:19 | Carrier #5 not being detected at polish table | 21 lines |
| 17.540 | Sat Mar 29 1997 03:50 | Tool verified | 7 lines |
| 17.543 | Sat Apr 05 1997 06:12 | Wafer/water track #2 error | 7 lines |
| 17.550 | Thu Apr 17 1997 01:08 | Elevator, unif., pad change | 21 lines |
TOPIC | 18.0 | CMP.B1 PM CHECKSHEETS |
| 18.5 | Wed Nov 08 1995 21:21 | Weekly PM almost completed | 61 lines |
| 18.8 | Wed Nov 22 1995 06:13 | Weekly PM for 11/22 completed | 58 lines |
| 18.9 | Thu Nov 30 1995 05:17 | WEEKLY PM ALMOST COMPLETE, SEMI-ANNUAL WAIVED PER T. DYER | 60 lines |
| 18.13 | Wed Jan 03 1996 23:34 | B1 weekly pm completed | 59 lines |
| 18.19 | Sat Feb 03 1996 04:28 | Monthly PM almost completed, 3 outstanding items left | 28 lines |
| 18.25 | Tue Mar 05 1996 22:59 | Weekly PM completed for WW36 | 63 lines |
| 18.27 | Wed Mar 20 1996 03:20 | Weekly PM for WW38 completed | 64 lines |
| 18.28 | Mon Mar 25 1996 11:00 | Weekly PM started... some items outstanding | 64 lines |
| 18.30 | Wed Apr 10 1996 22:41 | Weekly PM for WW41 completed | 66 lines |
| 18.33 | Wed May 01 1996 08:04 | Monthly PM completed for WW44 | 143 lines |
| 18.39 | Wed May 29 1996 07:24 | B1 Monthly completed for WW48 | 144 lines |
| 18.44 | Thu Jul 04 1996 03:24 | B1 weekly PM completed for WW1 | 79 lines |
| 18.45 | Thu Jul 04 1996 03:27 | B1 SHUT-DOWN COMPLETED | 26 lines |
| 18.47 | Sat Jul 13 1996 00:30 | SEMI-ANNUAL PM FOR WW2 COMPLETED | 173 lines |
| 18.52 | Fri Aug 16 1996 01:29 | B1 weekly PM completed | 82 lines |
| 18.64 | Fri Oct 25 1996 22:27 | WEEKLY PM FOR WW17 COMPLETED | 90 lines |
| 18.75 | Thu Jan 02 1997 08:20 | B1 ALMOST COMPLETE, SEE #11 | 21 lines |
| 18.76 | Thu Jan 02 1997 22:03 | SEMI-ANNUAL PM COMPLETED FOR WW27 | 179 lines |
| 18.77 | Wed Jan 08 1997 23:28 | WEEKLY PM FOR WW28 COMPLETED | 95 lines |
| 18.80 | Thu Jan 30 1997 06:43 | MONTHLY PM COMPLETED FOR WW31 | 162 lines |
| 18.81 | Thu Feb 06 1997 06:31 | WEEKLY PM FOR WW32 COMPLETED | 106 lines |
| 18.82 | Thu Feb 13 1997 22:56 | WEEKLY PM FOR WW33 COMPLETED | 106 lines |
| 18.88 | Thu Mar 27 1997 00:13 | WEEKLY PM COMPLETED FOR WW39 | 106 lines |
| 18.89 | Thu Apr 03 1997 00:48 | MONTHLY PM FOR WW40 COMPLETED | 180 lines |
TOPIC | 19.0 | CMP.B2 EE/PE PASSDOWNS |
| 19.6 | Fri Nov 10 1995 05:42 | ROBOT AND ASSOCIATES LEVELED AND CALIBRATED | 18 lines |
| 19.8 | Sat Nov 11 1995 07:21 | Marathon stopped | 9 lines |
| 19.17 | Fri Dec 01 1995 08:38 | CUP SENSOR ADJUSTMENT | 12 lines |
| 19.36 | Thu Dec 21 1995 06:59 | Vacuum problems and crimped wire | 16 lines |
| 19.38 | Fri Dec 29 1995 15:10 | Start-up for 12/29 | 12 lines |
| 19.39 | Sun Dec 31 1995 14:35 | CMP.B1 START-UP COMPLETE | 18 lines |
| 19.43 | Thu Jan 04 1996 08:22 | Vibration gone, #5 rinse solenoid back with problems | 17 lines |
| 19.44 | Fri Jan 05 1996 01:15 | 1/3 B SHIFT PASSDOWN - VIBRATION, SOLENOID | 35 lines |
| 19.45 | Fri Jan 05 1996 07:14 | Wafer breakage and uniformity | 15 lines |
| 19.51 | Thu Jan 11 1996 06:55 | Cup alignment, wafer crash | 18 lines |
| 19.58 | Fri Jan 19 1996 07:04 | Carrier #1 error, low slurry flow | 20 lines |
| 19.60 | Sat Jan 20 1996 05:32 | Monthly PM started, | 10 lines |
| 19.65 | Fri Jan 26 1996 06:28 | Heads out of alignment | 10 lines |
| 19.68 | Sat Jan 27 1996 16:35 | #5 load cyl. replaced | 13 lines |
| 19.81 | Sat Feb 03 1996 04:33 | Scrubber RPM | 9 lines |
| 19.88 | Thu Feb 08 1996 06:22 | Scrubber upgrade, vacuum capacitor, particles | 19 lines |
| 19.99 | Fri Feb 16 1996 07:29 | Wafer slide out | 7 lines |
| 19.101 | Sat Feb 17 1996 07:12 | scratches and no slurry flow | 14 lines |
| 19.109 | Wed Feb 21 1996 07:30 | LOAD FLIPPER PROBLEMS | 26 lines |
| 19.112 | Thu Feb 22 1996 07:03 | FLIPPERS ALIGNED, BACK TO SCRATCHES | 13 lines |
| 19.113 | Sat Feb 24 1996 05:15 | Rotating error, scratches | 12 lines |
| 19.119 | Thu Feb 29 1996 08:59 | MQC and Uniformity issues | 10 lines |
| 19.120 | Sat Mar 09 1996 04:53 | wafers staying on table at lift-off | 10 lines |
| 19.122 | Thu Mar 14 1996 04:52 | TABLE STALL OUT, SLURRY FILTER CLOGGED | 10 lines |
| 19.123 | Thu Mar 14 1996 22:21 | Table indexed improperly | 8 lines |
| 19.125 | Sat Mar 16 1996 06:59 | Wafers being left on table at lift off | 11 lines |
| 19.127 | Wed Mar 20 1996 03:30 | Scratches | 7 lines |
| 19.131 | Thu Mar 28 1996 06:13 | CMP.B2 shutdown for facilities tie-in completed | 54 lines |
| 19.132 | Fri Mar 29 1996 06:36 | Receive elevator cross slotting | 9 lines |
| 19.137 | Fri Apr 05 1996 07:08 | Vacuum pump wiring | 11 lines |
| 19.138 | Sat Apr 06 1996 06:07 | Wafer crash, DI leak | 19 lines |
| 19.146 | Wed Apr 17 1996 05:57 | Loud noises, no slurry flow | 13 lines |
| 19.147 | Sat Apr 20 1996 01:03 | Leak found, float switch not working | 14 lines |
| 19.148 | Sat Apr 20 1996 08:09 | Pad change due to fab being dumped | 8 lines |
| 19.153 | Thu Apr 25 1996 07:28 | Wafer breakage | 11 lines |
| 19.154 | Thu Apr 25 1996 09:35 | Corrected wafer breakage passdown | 13 lines |
| 19.160 | Sat May 11 1996 06:18 | scratches | 9 lines |
| 19.165 | Thu May 16 1996 08:22 | Monthly PM, crash and a the 24V supply | 13 lines |
| 19.166 | Fri May 17 1996 08:35 | Vacuum problems..... | 32 lines |
| 19.178 | Thu Jun 06 1996 07:48 | Wafer breakage | 22 lines |
| 19.187 | Thu Jun 13 1996 00:24 | Head #3 rotation, slurry chunks | 14 lines |
| 19.200 | Wed Jun 26 1996 07:22 | rotation, door switch and pad issues | 17 lines |
| 19.201 | Sat Jun 29 1996 08:10 | Particles | 10 lines |
| 19.212 | Mon Aug 05 1996 14:47 | Scrubber belt snapped | 8 lines |
| 19.242 | Wed Oct 02 1996 07:43 | WAFER SLIDE OUT | 11 lines |
| 19.251 | Wed Oct 16 1996 07:56 | Removal rate | 7 lines |
| 19.253 | Thu Oct 31 1996 04:49 | NO DISPLAY | 8 lines |
| 19.259 | Fri Nov 08 1996 07:05 | I/O cables, filter elements | 11 lines |
| 19.260 | Sat Nov 09 1996 06:30 | Wafer loss board out to lunch! | 17 lines |
| 19.264 | Fri Nov 15 1996 06:20 | Head #5 load position drifting | 10 lines |
| 19.275 | Sat Nov 30 1996 06:18 | Index table vibration | 10 lines |
| 19.284 | Thu Jan 02 1997 08:30 | Touch screen on the blitz again | 8 lines |
| 19.286 | Fri Jan 03 1997 04:56 | Pad change, removal rates going down again | 6 lines |
| 19.289 | Sat Jan 04 1997 06:55 | Vaccum issues, marathon ran ok. | 20 lines |
| 19.292 | Wed Jan 08 1997 07:16 | Particles.... | 10 lines |
| 19.299 | Thu Jan 16 1997 17:24 | Chiller issue | 15 lines |
| 19.301 | Fri Jan 31 1997 07:48 | Unload flipper issue | 17 lines |
| 19.303 | Sat Feb 01 1997 06:26 | UNLOAD flipper problems again | 22 lines |
| 19.307 | Wed Feb 05 1997 05:56 | Software drag | 9 lines |
| 19.319 | Thu Mar 13 1997 06:00 | Unload flipper box problems | 20 lines |
| 19.320 | Sat Mar 15 1997 07:24 | Chiller controller board | 13 lines |
| 19.325 | Fri Mar 28 1997 08:33 | Timeout for one or more carriers not down | 20 lines |
| 19.331 | Wed Apr 16 1997 08:39 | This was from A shift... it was CMP.B2 that had the problem | 27 lines |
| 19.332 | Wed Apr 16 1997 08:44 | Fuses... interlocks and bears oh my!!! | 51 lines |
| 19.334 | Fri Apr 18 1997 00:30 | Carriers & pads replaced - Eng. rings on #3 and #4 | 11 lines |
TOPIC | 20.0 | CMP.B2 PM CHECKSHEETS |
| 20.5 | Thu Jan 04 1996 00:36 | B2 WEEKLY PM COMPLETED | 60 lines |
| 20.9 | Thu Jan 25 1996 05:03 | Weekly PM for B2 completed | 61 lines |
| 20.13 | Mon Feb 12 1996 17:54 | Monthly PM for WW33 completed | 25 lines |
| 20.18 | Fri Mar 15 1996 19:22 | Weekly for WW37 completed, Semi-annual waived | 60 lines |
| 20.19 | Fri Mar 22 1996 21:49 | Weekly PM completed for WW38 | 64 lines |
| 20.21 | Wed Apr 03 1996 06:26 | Weekly PM started | 58 lines |
| 20.22 | Thu Apr 04 1996 05:21 | Weekly PM completed | 67 lines |
| 20.23 | Wed Apr 10 1996 22:45 | Weekly PM for WW41 completed | 61 lines |
| 20.26 | Thu May 02 1996 00:11 | Weekly PM completed for WW44 | 84 lines |
| 20.27 | Thu May 09 1996 23:53 | WEEKLY PM FOR WW45 COMPLETED | 79 lines |
| 20.28 | Thu May 16 1996 22:15 | CMP.B2 MONTHLY PM FOR WW46 COMPLETED | 145 lines |
| 20.35 | Thu Jun 20 1996 05:39 | Weekly PM for WW51 completed | 83 lines |
| 20.36 | Tue Jun 25 1996 23:47 | weekly PM for WW52 completed | 84 lines |
| 20.37 | Thu Jul 04 1996 02:49 | B2 weekly PM completed for WW1 | 89 lines |
| 20.39 | Thu Jul 04 1996 02:55 | B2 SHUT-DOWN COMPLETED | 26 lines |
| 20.54 | Tue Sep 17 1996 23:45 | Weekly PM completed for WW12 | 78 lines |
| 20.55 | Fri Sep 27 1996 20:34 | WEEKLY PM FOR WW13 COMPLETED | 84 lines |
| 20.57 | Tue Oct 15 1996 20:33 | MONTHLY PM COMPLETED FOR WW15 | 155 lines |
| 20.61 | Fri Nov 08 1996 06:52 | MONTHLY PM COMPLETED FOR WW19 | 153 lines |
| 20.63 | Wed Nov 20 1996 22:42 | WEEKLY PM FOR WW21 COMPLETED | 84 lines |
| 20.75 | Wed Feb 05 1997 05:45 | MONTHLY PM COMPLETED FOR WW32 | 198 lines |
| 20.77 | Thu Feb 20 1997 05:07 | WEEKLY PM FOR WW34 COMPLETED | 105 lines |
| 20.81 | Fri Mar 14 1997 00:59 | WEEKLY PM FOR WW37 COMPLETED | 105 lines |
| 20.85 | Sat Apr 12 1997 02:38 | MONTHLY PM COMPLETED FOR WW41 | 180 lines |
TOPIC | 21.0 | CMP.B3 EE/PE PASSDOWNS |
| 21.27 | Fri Jun 21 1996 08:33 | Slurry flow problems and touch screen issue | 22 lines |
| 21.30 | Thu Jun 27 1996 05:20 | Head #3 rotation motor controller | 13 lines |
| 21.35 | Thu Jul 11 1996 07:59 | Conditioner, downforce and scrubber issues | 41 lines |
| 21.50 | Fri Aug 02 1996 06:02 | unload flipper positioning and scrubber station | 11 lines |
| 21.52 | Mon Aug 05 1996 19:40 | Westec tie-in... | 9 lines |
| 21.55 | Thu Aug 08 1996 07:51 | PARTICLES | 14 lines |
| 21.56 | Thu Aug 08 1996 08:00 | Table spinning out of control | 13 lines |
| 21.104 | Thu Oct 24 1996 08:11 | Recipe issues | 12 lines |
| 21.107 | Fri Oct 25 1996 05:00 | Scrubber not working | 9 lines |
| 21.111 | Wed Oct 30 1996 07:25 | Particles....resolved? | 20 lines |
| 21.112 | Thu Oct 31 1996 04:53 | Scrubber issue | 11 lines |
| 21.115 | Fri Nov 08 1996 06:58 | Polish table gear box getting worse | 11 lines |
| 21.116 | Sat Nov 09 1996 06:36 | Scrubber WARNING | 8 lines |
| 21.118 | Fri Nov 15 1996 06:22 | Pad change | 6 lines |
| 21.119 | Thu Nov 21 1996 05:43 | Pad change due to bad unif. | 7 lines |
| 21.122 | Sat Nov 23 1996 05:22 | Particles... | 12 lines |
| 21.133 | Fri Dec 20 1996 06:34 | 2ND TABLE BEARING TRASHED | 16 lines |
| 21.140 | Fri Dec 27 1996 05:51 | Pads and carrier #2 replaced | 7 lines |
| 21.141 | Fri Dec 27 1996 07:44 | Unload cup issue | 11 lines |
| 21.142 | Sat Dec 28 1996 07:05 | Pad change due to low R.R. | 6 lines |
| 21.158 | Fri Jan 31 1997 07:50 | Pad change - scheduled | 9 lines |
| 21.159 | Thu Feb 06 1997 06:16 | MHTA/infranor and Mapper issues | 16 lines |
| 21.167 | Thu Mar 13 1997 05:49 | Vacuum error | 14 lines |
| 21.169 | Sat Mar 15 1997 06:40 | Stall - Crash - Software Corruption | 20 lines |
| 21.172 | Wed Mar 19 1997 06:24 | Rotation #2 blown infranor | 12 lines |
| 21.176 | Sat Mar 29 1997 04:13 | #4 arm problems source of crash | 15 lines |
| 21.179 | Fri Apr 04 1997 23:17 | Come on SUBPAC - This is the 2nd time you screwed up!! | 24 lines |
| 21.180 | Fri Apr 04 1997 23:18 | Slurry sensor replaced | 7 lines |
| 21.185 | Thu Apr 10 1997 07:19 | Tool has over 3000A R.R. with new pad.... | 15 lines |
| 21.186 | Thu Apr 10 1997 08:48 | Liquid detect unit/ Infranor | 15 lines |
| 21.199 | Wed Apr 30 1997 07:37 | Mapper time-out | 2 lines |
| 21.201 | Sat May 10 1997 09:12 | Pad due | 6 lines |
| 21.205 | Wed May 14 1997 07:14 | Particles.... GONE!! | 7 lines |
| 21.206 | Thu May 15 1997 09:25 | Wafer crash.... | 11 lines |
| 21.207 | Fri May 16 1997 04:06 | Slurry alarm | 6 lines |
| 21.211 | Thu May 22 1997 05:58 | Spill... | 7 lines |
| 21.212 | Fri May 23 1997 06:16 | Chiller - Slurry supply | 20 lines |
| 21.213 | Fri May 23 1997 07:17 | GOOD TO GO!!!!!! | 13 lines |
| 21.217 | Thu May 29 1997 03:34 | Particles gone.... | 18 lines |
| 21.219 | Sat May 31 1997 07:44 | Mappers/Tilts - D.O.A. | 24 lines |
| 21.220 | Sat May 31 1997 09:08 | Wafer crash in scrub station | 17 lines |
| 21.225 | Thu Jun 05 1997 07:11 | Brush fell off... | 8 lines |
TOPIC | 22.0 | CMP.B3 PM CHECKSHEETS |
| 22.4 | Thu Jun 27 1996 01:02 | Weekly PM for WW52 completed | 86 lines |
| 22.5 | Thu Jul 04 1996 02:52 | B3 weekly PM completed for WW1 | 81 lines |
| 22.6 | Thu Jul 04 1996 02:54 | B3 SHUT-DOWN COMPLETED | 26 lines |
| 22.11 | Wed Jul 31 1996 23:46 | WEEKLY PM FOR WW5 COMPLETED | 82 lines |
| 22.12 | Mon Aug 05 1996 18:38 | WEEKLY PM FOR WW6 COMPLETED | 82 lines |
| 22.28 | Thu Nov 21 1996 05:37 | WEEKLY PM COMPLETED FOR WW21 | 90 lines |
| 22.49 | Thu Apr 10 1997 00:47 | WEEKLY PM FOR WW41 COMPLETED | 96 lines |
| 22.50 | Fri Apr 18 1997 07:24 | MONTHLY PM COMPLETED FOR WW42 | 193 lines |
| 22.53 | Fri May 09 1997 03:09 | SEMI-ANNUAL PM COMPLETED FOR WW45 | 218 lines |
TOPIC | 23.0 | Sat Dec 14 1996 05:48 | CMP.B4 EE/PE PASSDOWNS | 6 lines |
| 23.3 | Mon Jan 13 1997 15:41 | Install progress | 21 lines |
| 23.5 | Tue Jan 14 1997 16:37 | CMP.B4 install progress for 1/14/97 | 20 lines |
| 23.6 | Wed Jan 15 1997 17:18 | Install progress for 1/15 | 29 lines |
| 23.18 | Mon Jan 20 1997 17:35 | Mechanical Acceptance Completed and Passed!!!! | 15 lines |
| 23.23 | Tue Jan 21 1997 17:24 | B4 install update | 18 lines |
| 23.24 | Wed Jan 22 1997 19:05 | CMP.B4 status.... | 22 lines |
| 23.26 | Wed Feb 05 1997 06:00 | Index table Infranor/moisture sensor | 11 lines |
| 23.43 | Sat Mar 22 1997 05:59 | DI dripping under scrubber | 14 lines |
| 23.65 | Thu Apr 24 1997 04:56 | Conditioner, pads, infranors oh my... | 20 lines |
| 23.65 | Thu Apr 24 1997 08:41 | Infranors, pads and flippers oh my...... | 27 lines |
| 23.72 | Wed Apr 30 1997 07:35 | ACTION ITEMS FOR SPEEDFAM | 12 lines |
| 23.77 | Fri May 09 1997 06:18 | Wafer detect sensor loss | 8 lines |
| 23.84 | Fri May 16 1997 22:40 | Rotation tolerance error | 7 lines |
| 23.89 | Thu May 22 1997 06:01 | Barrel swap | 7 lines |
| 23.90 | Fri May 23 1997 05:59 | Slurry barrel swap-out | 8 lines |
| 23.92 | Wed May 28 1997 08:28 | Infranor, PM and unload flipper issue | 33 lines |
| 23.94 | Fri May 30 1997 07:58 | Barrel change | 4 lines |
TOPIC | 24.0 | Sat Dec 14 1996 05:48 | CMP.B4 PM CHECKSHEETS | 7 lines |
| 24.1 | Thu Apr 24 1997 04:34 | WEEKLY PM FOR WW43 COMPLETED | 107 lines |
TOPIC | 25.0 | Sat Dec 14 1996 05:51 | RESERVED | 3 lines |
TOPIC | 26.0 | Sat Dec 14 1996 05:51 | RESERVED | 3 lines |
TOPIC | 27.0 | Sat Dec 14 1996 05:53 | CMP.B1 DECTREE USAGE | 6 lines |
TOPIC | 28.0 | Sat Dec 14 1996 05:53 | CMP.B2 DECTREE USAGE | 6 lines |
TOPIC | 29.0 | Sat Dec 14 1996 05:53 | CMP.B3 DECTREE USAGE | 5 lines |
TOPIC | 30.0 | Sat Dec 14 1996 05:54 | CMP.B4 DECTREE USAGE | 5 lines |
TOPIC | 32.0 | CMP.B WAFER CRASH FORM |
| 32.2 | Thu Sep 19 1996 09:19 | B1 CRASH | 24 lines |
| 32.4 | Wed Oct 02 1996 07:06 | CMP.B2 SLIDE-OUT @ 05:30, 10/2/96 | 23 lines |
| 32.7 | Sat Oct 05 1996 06:46 | CMP.B1 PAD BREAK-IN WAFER CRASH | 25 lines |
| 32.32 | Sat Mar 15 1997 08:16 | B3 crash - no product | 35 lines |
| 32.41 | Thu May 15 1997 08:31 | (3) product wafers crashed on B3 | 25 lines |
| 32.42 | Sat May 31 1997 09:19 | B3 WAFER CRASH IN SCRUB STATION | 25 lines |
TOPIC | 34.0 | SF SOFTWARE BUG/WISH |
| 34.1 | Thu Apr 18 1996 22:26 | SOFTWARE BUG/WISH LIST | 22 lines |
| 34.2 | Thu Apr 18 1996 09:24 | bug on B2 | 28 lines |
| 34.3 | Thu Apr 18 1996 22:30 | Another bug | 23 lines |
| 34.4 | Fri Apr 19 1996 08:27 | DI spray bug | 24 lines |
| 34.5 | Sat Apr 20 1996 08:15 | Not a bug this time.... | 24 lines |
| 34.7 | Wed Jun 26 1996 23:13 | 2nd table issue | 21 lines |
TOPIC | 36.0 | Sat Sep 28 1996 04:55 | CMP.C#-7 PM TEMPLATES | 6 lines |
| 36.1 | Sat Mar 22 1997 06:27 | Particles.... be gone!!!!1 | 34 lines |
TOPIC | 37.0 | CMP.C1-7 EE/PE PASSDOWNS |
| 37.15 | Tue Oct 15 1996 23:25 | VACUUM PROBLEMS | 12 lines |
| 37.16 | Tue Oct 15 1996 23:25 | | 14 lines |
| 37.17 | Tue Oct 15 1996 23:25 | | 15 lines |
| 37.18 | Tue Oct 15 1996 23:25 | | 16 lines |
| 37.19 | Tue Oct 15 1996 23:26 | | 8 lines |
| 37.20 | Tue Oct 15 1996 23:26 | | 6 lines |
| 37.21 | Tue Oct 15 1996 23:26 | | 12 lines |
| 37.22 | Tue Oct 15 1996 23:26 | | 6 lines |
| 37.23 | Tue Oct 15 1996 23:27 | | 6 lines |
| 37.24 | Tue Oct 15 1996 23:27 | | 20 lines |
| 37.25 | Tue Oct 15 1996 23:27 | | 6 lines |
| 37.26 | Tue Oct 15 1996 23:27 | | 16 lines |
| 37.27 | Tue Oct 15 1996 23:28 | | 6 lines |
| 37.28 | Tue Oct 15 1996 23:28 | | 9 lines |
| 37.29 | Tue Oct 15 1996 23:28 | | 8 lines |
| 37.30 | Tue Oct 15 1996 23:28 | | 12 lines |
| 37.31 | Tue Oct 15 1996 23:28 | | 9 lines |
| 37.32 | Tue Oct 15 1996 23:29 | | 15 lines |
| 37.33 | Tue Oct 15 1996 23:29 | | 16 lines |
| 37.34 | Tue Oct 15 1996 23:29 | | 7 lines |
| 37.35 | Tue Oct 15 1996 23:29 | | 13 lines |
| 37.36 | Tue Oct 15 1996 23:29 | | 16 lines |
| 37.37 | Tue Oct 15 1996 23:30 | | 27 lines |
| 37.38 | Tue Oct 15 1996 23:30 | | 15 lines |
| 37.39 | Tue Oct 15 1996 23:30 | | 24 lines |
| 37.40 | Tue Oct 15 1996 23:30 | | 12 lines |
| 37.41 | Tue Oct 15 1996 23:30 | | 29 lines |
| 37.42 | Tue Oct 15 1996 23:31 | | 14 lines |
| 37.43 | Tue Oct 15 1996 23:31 | | 7 lines |
| 37.44 | Tue Oct 15 1996 23:31 | | 7 lines |
| 37.45 | Tue Oct 15 1996 23:31 | | 16 lines |
| 37.46 | Tue Oct 15 1996 23:31 | | 8 lines |
| 37.47 | Tue Oct 15 1996 23:31 | | 9 lines |
| 37.48 | Tue Oct 15 1996 23:32 | | 13 lines |
| 37.49 | Tue Oct 15 1996 23:32 | | 8 lines |
| 37.50 | Tue Oct 15 1996 23:32 | | 10 lines |
| 37.51 | Tue Oct 15 1996 23:32 | | 15 lines |
| 37.52 | Tue Oct 15 1996 23:33 | | 20 lines |
| 37.53 | Tue Oct 15 1996 23:33 | | 6 lines |
| 37.54 | Tue Oct 15 1996 23:33 | | 9 lines |
| 37.55 | Tue Oct 15 1996 23:33 | | 11 lines |
| 37.56 | Tue Oct 15 1996 23:33 | | 15 lines |
| 37.57 | Tue Oct 15 1996 23:33 | | 16 lines |
| 37.58 | Tue Oct 15 1996 23:34 | | 19 lines |
| 37.59 | Tue Oct 15 1996 23:34 | | 21 lines |
| 37.60 | Tue Oct 15 1996 23:34 | | 23 lines |
| 37.61 | Tue Oct 15 1996 23:34 | | 10 lines |
| 37.62 | Tue Oct 15 1996 23:35 | | 11 lines |
| 37.63 | Tue Oct 15 1996 23:35 | | 17 lines |
| 37.64 | Tue Oct 15 1996 23:35 | | 7 lines |
| 37.65 | Tue Oct 15 1996 23:37 | | 38 lines |
| 37.66 | Tue Oct 15 1996 23:37 | | 5 lines |
| 37.67 | Tue Oct 15 1996 23:37 | | 11 lines |
| 37.68 | Tue Oct 15 1996 23:37 | | 15 lines |
| 37.69 | Tue Oct 15 1996 23:38 | | 7 lines |
| 37.70 | Tue Oct 15 1996 23:38 | | 28 lines |
| 37.71 | Tue Oct 15 1996 23:38 | | 10 lines |
| 37.72 | Tue Oct 15 1996 23:38 | | 29 lines |
| 37.73 | Tue Oct 15 1996 23:38 | | 11 lines |
| 37.74 | Tue Oct 15 1996 23:38 | | 11 lines |
| 37.75 | Tue Oct 15 1996 23:39 | | 7 lines |
| 37.76 | Tue Oct 15 1996 23:39 | | 30 lines |
| 37.77 | Tue Oct 15 1996 23:39 | | 10 lines |
| 37.78 | Tue Oct 15 1996 23:39 | | 15 lines |
| 37.79 | Tue Oct 15 1996 23:39 | | 13 lines |
| 37.80 | Tue Oct 15 1996 23:39 | | 12 lines |
| 37.81 | Tue Oct 15 1996 23:40 | | 14 lines |
| 37.82 | Tue Oct 15 1996 23:40 | | 8 lines |
| 37.83 | Tue Oct 15 1996 23:40 | | 9 lines |
| 37.84 | Tue Oct 15 1996 23:40 | | 8 lines |
| 37.85 | Tue Oct 15 1996 23:40 | | 16 lines |
| 37.86 | Tue Oct 15 1996 23:41 | | 12 lines |
| 37.87 | Tue Oct 15 1996 23:41 | | 11 lines |
| 37.88 | Tue Oct 15 1996 23:41 | | 17 lines |
| 37.89 | Tue Oct 15 1996 23:41 | | 8 lines |
| 37.90 | Tue Oct 15 1996 23:41 | | 7 lines |
| 37.91 | Tue Oct 15 1996 23:41 | | 7 lines |
| 37.92 | Tue Oct 15 1996 23:42 | | 14 lines |
| 37.93 | Tue Oct 15 1996 23:42 | | 14 lines |
| 37.94 | Tue Oct 15 1996 23:42 | | 16 lines |
| 37.95 | Tue Oct 15 1996 23:42 | | 20 lines |
| 37.96 | Tue Oct 15 1996 23:42 | | 12 lines |
| 37.97 | Tue Oct 15 1996 23:42 | | 9 lines |
| 37.98 | Tue Oct 15 1996 23:42 | | 8 lines |
| 37.99 | Tue Oct 15 1996 23:43 | | 8 lines |
| 37.100 | Tue Oct 15 1996 23:43 | | 10 lines |
| 37.101 | Tue Oct 15 1996 23:43 | | 14 lines |
| 37.102 | Tue Oct 15 1996 23:43 | | 16 lines |
| 37.103 | Tue Oct 15 1996 23:43 | | 28 lines |
| 37.104 | Tue Oct 15 1996 23:44 | ELEVATOR ISSUES | 14 lines |
| 37.105 | Tue Oct 15 1996 23:44 | | 10 lines |
| 37.106 | Tue Oct 15 1996 23:44 | | 6 lines |
| 37.107 | Tue Oct 15 1996 23:45 | | 12 lines |
| 37.108 | Tue Oct 15 1996 23:45 | | 14 lines |
| 37.109 | Tue Oct 15 1996 23:45 | | 14 lines |
| 37.110 | Tue Oct 15 1996 23:45 | | 8 lines |
| 37.111 | Tue Oct 15 1996 23:45 | | 15 lines |
| 37.112 | Tue Oct 15 1996 23:45 | | 24 lines |
| 37.113 | Tue Oct 15 1996 23:46 | | 14 lines |
| 37.114 | Tue Oct 15 1996 23:46 | | 8 lines |
| 37.115 | Tue Oct 15 1996 23:46 | | 5 lines |
| 37.116 | Tue Oct 15 1996 23:47 | SHUTTLE AND LOAD CUP ISSUES | 13 lines |
| 37.117 | Tue Oct 15 1996 23:48 | | 9 lines |
| 37.118 | Tue Oct 15 1996 23:48 | | 15 lines |
| 37.119 | Tue Oct 15 1996 23:49 | | 13 lines |
| 37.120 | Tue Oct 15 1996 23:49 | | 14 lines |
| 37.121 | Tue Oct 15 1996 23:49 | | 12 lines |
| 37.122 | Tue Oct 15 1996 23:49 | | 6 lines |
| 37.123 | Tue Oct 15 1996 23:49 | | 13 lines |
| 37.124 | Tue Oct 15 1996 23:49 | | 8 lines |
| 37.125 | Tue Oct 15 1996 23:50 | | 8 lines |
| 37.126 | Tue Oct 15 1996 23:51 | UNIFORMITY | 19 lines |
| 37.127 | Tue Oct 15 1996 23:51 | | 11 lines |
| 37.128 | Tue Oct 15 1996 23:51 | | 8 lines |
| 37.129 | Tue Oct 15 1996 23:51 | | 10 lines |
| 37.130 | Tue Oct 15 1996 23:51 | NOT UNLOADING WAFERS | 11 lines |
| 37.131 | Tue Oct 15 1996 23:52 | | 13 lines |
| 37.132 | Tue Oct 15 1996 23:52 | | 12 lines |
| 37.133 | Tue Oct 15 1996 23:52 | | 9 lines |
| 37.134 | Tue Oct 15 1996 23:52 | | 8 lines |
| 37.135 | Tue Oct 15 1996 23:52 | | 5 lines |
| 37.136 | Tue Oct 15 1996 23:53 | | 11 lines |
| 37.137 | Tue Oct 15 1996 23:53 | | 14 lines |
| 37.138 | Tue Oct 15 1996 23:53 | | 9 lines |
| 37.139 | Tue Oct 15 1996 23:53 | | 15 lines |
| 37.140 | Tue Oct 15 1996 23:53 | | 14 lines |
| 37.141 | Tue Oct 15 1996 23:53 | | 9 lines |
| 37.142 | Tue Oct 15 1996 23:54 | | 14 lines |
| 37.143 | Tue Oct 15 1996 23:54 | | 9 lines |
| 37.144 | Tue Oct 15 1996 23:54 | | 17 lines |
| 37.145 | Tue Oct 15 1996 23:55 | POLISH ARM JERKING AT END OF CYCLE | 13 lines |
| 37.146 | Tue Oct 15 1996 23:55 | | 11 lines |
| 37.147 | Tue Oct 15 1996 23:55 | | 15 lines |
| 37.148 | Tue Oct 15 1996 23:56 | | 7 lines |
| 37.149 | Tue Oct 15 1996 23:56 | | 15 lines |
| 37.150 | Tue Oct 15 1996 23:56 | | 7 lines |
| 37.151 | Tue Oct 15 1996 23:56 | | 12 lines |
| 37.152 | Tue Oct 15 1996 23:57 | | 11 lines |
| 37.153 | Tue Oct 15 1996 23:57 | | 10 lines |
| 37.154 | Wed Oct 16 1996 00:19 | | 14 lines |
| 37.155 | Wed Oct 16 1996 00:19 | | 7 lines |
| 37.156 | Wed Oct 16 1996 00:19 | | 8 lines |
| 37.157 | Wed Oct 16 1996 00:19 | | 7 lines |
| 37.158 | Wed Oct 16 1996 00:19 | | 14 lines |
| 37.159 | Wed Oct 16 1996 00:20 | | 6 lines |
| 37.160 | Wed Oct 16 1996 00:20 | | 19 lines |
| 37.161 | Wed Oct 16 1996 00:20 | | 10 lines |
| 37.162 | Wed Oct 16 1996 00:20 | | 8 lines |
| 37.163 | Wed Oct 16 1996 00:21 | | 11 lines |
| 37.164 | Wed Oct 16 1996 00:21 | | 9 lines |
| 37.165 | Wed Oct 16 1996 00:21 | | 18 lines |
| 37.166 | Wed Oct 16 1996 00:21 | | 14 lines |
| 37.167 | Wed Oct 16 1996 00:22 | | 9 lines |
| 37.168 | Wed Oct 16 1996 00:22 | | 6 lines |
| 37.169 | Wed Oct 16 1996 00:22 | | 8 lines |
| 37.170 | Wed Oct 16 1996 00:22 | | 9 lines |
| 37.171 | Wed Oct 16 1996 00:22 | | 11 lines |
| 37.172 | Wed Oct 16 1996 00:23 | | 9 lines |
| 37.173 | Wed Oct 16 1996 00:23 | | 6 lines |
| 37.174 | Wed Oct 16 1996 00:23 | | 8 lines |
| 37.175 | Wed Oct 16 1996 00:23 | | 6 lines |
| 37.176 | Wed Oct 16 1996 00:23 | | 8 lines |
| 37.177 | Wed Oct 16 1996 00:23 | | 12 lines |
| 37.178 | Wed Oct 16 1996 00:24 | | 9 lines |
| 37.179 | Wed Oct 16 1996 00:24 | | 18 lines |
| 37.180 | Wed Oct 16 1996 00:24 | | 9 lines |
| 37.181 | Wed Oct 16 1996 00:24 | | 10 lines |
| 37.182 | Wed Oct 16 1996 00:24 | | 6 lines |
| 37.183 | Wed Oct 16 1996 00:24 | | 6 lines |
| 37.184 | Wed Oct 16 1996 00:25 | | 7 lines |
| 37.185 | Wed Oct 16 1996 00:25 | | 10 lines |
| 37.186 | Wed Oct 16 1996 00:25 | | 6 lines |
| 37.187 | Wed Oct 16 1996 00:25 | | 11 lines |
| 37.188 | Wed Oct 16 1996 00:25 | | 7 lines |
| 37.189 | Wed Oct 16 1996 00:26 | | 21 lines |
| 37.190 | Wed Oct 16 1996 00:26 | | 10 lines |
| 37.191 | Wed Oct 16 1996 00:26 | | 6 lines |
| 37.192 | Wed Oct 16 1996 00:26 | | 15 lines |
| 37.193 | Wed Oct 16 1996 00:26 | | 5 lines |
| 37.194 | Wed Oct 16 1996 00:26 | | 5 lines |
| 37.195 | Wed Oct 16 1996 00:27 | | 9 lines |
| 37.196 | Wed Oct 16 1996 00:27 | | 12 lines |
| 37.197 | Wed Oct 16 1996 00:27 | | 17 lines |
| 37.198 | Wed Oct 16 1996 00:27 | | 10 lines |
| 37.199 | Wed Oct 16 1996 00:27 | | 18 lines |
| 37.200 | Wed Oct 16 1996 00:27 | | 5 lines |
| 37.201 | Thu Oct 17 1996 05:54 | | 5 lines |
| 37.202 | Thu Oct 17 1996 05:54 | | 18 lines |
| 37.203 | Thu Oct 17 1996 05:54 | | 8 lines |
| 37.204 | Thu Oct 17 1996 05:55 | SYSTEM NOT LOADING WAFERS, PARTICLES | 33 lines |
| 37.205 | Thu Oct 17 1996 05:55 | | 8 lines |
| 37.206 | Thu Oct 17 1996 05:56 | DROPPING WAFERS AND NOT PICKING THEM UP | 15 lines |
| 37.207 | Thu Oct 17 1996 05:56 | | 10 lines |
| 37.208 | Thu Oct 17 1996 05:56 | | 14 lines |
| 37.209 | Thu Oct 17 1996 05:56 | | 5 lines |
| 37.210 | Thu Oct 17 1996 05:57 | | 7 lines |
| 37.211 | Thu Oct 17 1996 05:57 | | 35 lines |
| 37.212 | Thu Oct 17 1996 05:57 | | 11 lines |
| 37.213 | Thu Oct 17 1996 05:57 | | 9 lines |
| 37.214 | Thu Oct 17 1996 05:57 | | 10 lines |
| 37.215 | Thu Oct 17 1996 05:57 | | 8 lines |
| 37.216 | Thu Oct 17 1996 05:58 | | 8 lines |
| 37.217 | Thu Oct 17 1996 05:58 | | 16 lines |
| 37.218 | Thu Oct 17 1996 05:58 | | 7 lines |
| 37.219 | Thu Oct 17 1996 05:58 | | 8 lines |
| 37.220 | Thu Oct 17 1996 05:58 | | 10 lines |
| 37.221 | Thu Oct 17 1996 05:59 | | 6 lines |
| 37.222 | Thu Oct 17 1996 05:59 | | 7 lines |
| 37.223 | Thu Oct 17 1996 05:59 | | 8 lines |
| 37.224 | Thu Oct 17 1996 05:59 | | 11 lines |
| 37.225 | Thu Oct 17 1996 05:59 | | 8 lines |
| 37.226 | Thu Oct 17 1996 05:59 | | 8 lines |
| 37.227 | Thu Oct 17 1996 06:00 | | 9 lines |
| 37.228 | Thu Oct 17 1996 06:00 | | 26 lines |
| 37.229 | Thu Oct 17 1996 06:00 | | 6 lines |
| 37.230 | Thu Oct 17 1996 06:00 | | 6 lines |
| 37.231 | Thu Oct 17 1996 06:00 | | 23 lines |
| 37.232 | Thu Oct 17 1996 06:00 | | 8 lines |
| 37.233 | Thu Oct 17 1996 06:01 | | 6 lines |
| 37.234 | Thu Oct 17 1996 06:01 | | 11 lines |
| 37.235 | Thu Oct 17 1996 06:01 | | 7 lines |
| 37.236 | Thu Oct 17 1996 06:01 | | 5 lines |
| 37.237 | Thu Oct 17 1996 06:01 | | 10 lines |
| 37.238 | Thu Oct 17 1996 06:01 | | 8 lines |
| 37.239 | Thu Oct 17 1996 06:01 | | 19 lines |
| 37.240 | Thu Oct 17 1996 06:01 | | 6 lines |
| 37.241 | Thu Oct 17 1996 06:02 | | 27 lines |
| 37.242 | Thu Oct 17 1996 06:02 | | 16 lines |
| 37.243 | Thu Oct 17 1996 06:02 | | 10 lines |
| 37.244 | Thu Oct 17 1996 06:02 | | 19 lines |
| 37.245 | Thu Oct 17 1996 06:02 | | 7 lines |
| 37.246 | Thu Oct 17 1996 06:02 | | 135 lines |
| 37.247 | Thu Oct 17 1996 06:02 | | 6 lines |
| 37.248 | Thu Oct 17 1996 06:03 | | 7 lines |
| 37.249 | Thu Oct 17 1996 06:03 | | 9 lines |
| 37.250 | Thu Oct 17 1996 06:03 | | 8 lines |
| 37.251 | Thu Oct 17 1996 06:03 | | 6 lines |
| 37.252 | Thu Oct 17 1996 06:04 | | 6 lines |
| 37.253 | Thu Oct 17 1996 06:04 | | 6 lines |
| 37.254 | Thu Oct 17 1996 06:04 | | 29 lines |
| 37.255 | Thu Oct 17 1996 06:05 | | 5 lines |
| 37.256 | Thu Oct 17 1996 06:05 | | 13 lines |
| 37.257 | Thu Oct 17 1996 06:05 | | 17 lines |
| 37.258 | Thu Oct 17 1996 06:05 | | 9 lines |
| 37.259 | Thu Oct 17 1996 06:06 | | 15 lines |
| 37.260 | Thu Oct 17 1996 06:06 | | 12 lines |
| 37.261 | Thu Oct 17 1996 06:06 | | 6 lines |
| 37.262 | Thu Oct 17 1996 06:06 | WAFERS NOT ENTERING UNLOAD CASSETTE | 5 lines |
| 37.263 | Thu Oct 17 1996 06:07 | | 11 lines |
| 37.264 | Thu Oct 17 1996 06:07 | | 9 lines |
| 37.265 | Thu Oct 17 1996 06:07 | | 9 lines |
| 37.266 | Thu Oct 17 1996 06:07 | | 9 lines |
| 37.267 | Thu Oct 17 1996 06:07 | | 7 lines |
| 37.268 | Thu Oct 17 1996 06:08 | | 5 lines |
| 37.269 | Thu Oct 17 1996 06:08 | | 14 lines |
| 37.270 | Thu Oct 17 1996 06:08 | | 15 lines |
| 37.271 | Thu Oct 17 1996 06:08 | | 6 lines |
| 37.272 | Thu Oct 17 1996 06:09 | | 8 lines |
| 37.273 | Thu Oct 17 1996 06:09 | | 12 lines |
| 37.274 | Thu Oct 17 1996 06:09 | | 5 lines |
| 37.275 | Thu Oct 17 1996 06:09 | | 12 lines |
| 37.276 | Thu Oct 17 1996 06:09 | | 12 lines |
| 37.277 | Thu Oct 17 1996 06:09 | | 7 lines |
| 37.278 | Thu Oct 17 1996 06:10 | | 7 lines |
| 37.279 | Thu Oct 17 1996 06:10 | | 6 lines |
| 37.280 | Thu Oct 17 1996 06:10 | | 7 lines |
| 37.281 | Thu Oct 17 1996 06:10 | | 10 lines |
| 37.282 | Thu Oct 17 1996 06:10 | | 6 lines |
| 37.283 | Thu Oct 17 1996 06:10 | | 7 lines |
| 37.284 | Thu Oct 17 1996 06:10 | | 9 lines |
| 37.285 | Thu Oct 17 1996 06:10 | | 7 lines |
| 37.286 | Thu Oct 17 1996 06:11 | | 12 lines |
| 37.287 | Thu Oct 17 1996 06:11 | | 9 lines |
| 37.288 | Thu Oct 17 1996 06:11 | | 6 lines |
| 37.289 | Thu Oct 17 1996 06:11 | | 9 lines |
| 37.290 | Thu Oct 17 1996 06:11 | | 8 lines |
| 37.291 | Thu Oct 17 1996 06:11 | | 8 lines |
| 37.292 | Thu Oct 17 1996 06:11 | | 5 lines |
| 37.293 | Thu Oct 17 1996 06:12 | | 10 lines |
| 37.294 | Thu Oct 17 1996 06:12 | | 7 lines |
| 37.295 | Thu Oct 17 1996 06:12 | | 5 lines |
| 37.296 | Thu Oct 17 1996 06:12 | | 10 lines |
| 37.297 | Thu Oct 17 1996 06:12 | | 12 lines |
| 37.298 | Thu Oct 17 1996 06:12 | | 11 lines |
| 37.299 | Thu Oct 17 1996 06:12 | | 11 lines |
| 37.300 | Thu Oct 17 1996 06:13 | | 7 lines |
| 37.301 | Thu Oct 17 1996 06:13 | | 14 lines |
| 37.302 | Thu Oct 17 1996 06:13 | | 5 lines |
| 37.303 | Thu Oct 17 1996 06:13 | | 10 lines |
| 37.304 | Thu Oct 17 1996 06:13 | | 15 lines |
| 37.305 | Thu Oct 17 1996 06:13 | | 12 lines |
| 37.306 | Thu Oct 17 1996 06:13 | | 7 lines |
| 37.307 | Thu Oct 17 1996 06:13 | | 7 lines |
| 37.308 | Thu Oct 17 1996 06:14 | | 5 lines |
| 37.309 | Thu Oct 17 1996 06:14 | | 13 lines |
| 37.310 | Thu Oct 17 1996 06:14 | | 9 lines |
| 37.311 | Thu Oct 17 1996 06:14 | | 11 lines |
| 37.312 | Thu Oct 17 1996 06:14 | | 14 lines |
| 37.313 | Thu Oct 17 1996 06:14 | | 9 lines |
| 37.314 | Thu Oct 17 1996 06:14 | | 8 lines |
| 37.315 | Thu Oct 17 1996 06:14 | | 10 lines |
| 37.316 | Thu Oct 17 1996 06:15 | | 11 lines |
| 37.317 | Thu Oct 17 1996 06:15 | | 13 lines |
| 37.318 | Thu Oct 17 1996 06:15 | | 12 lines |
| 37.319 | Thu Oct 17 1996 06:15 | | 7 lines |
| 37.320 | Thu Oct 17 1996 06:15 | | 6 lines |
| 37.321 | Thu Oct 17 1996 06:15 | | 7 lines |
| 37.322 | Thu Oct 17 1996 06:15 | | 11 lines |
| 37.323 | Thu Oct 17 1996 06:15 | | 6 lines |
| 37.324 | Thu Oct 17 1996 06:15 | | 7 lines |
| 37.325 | Thu Oct 17 1996 06:16 | | 7 lines |
| 37.326 | Thu Oct 17 1996 06:16 | | 9 lines |
| 37.327 | Thu Oct 17 1996 06:16 | | 7 lines |
| 37.328 | Thu Oct 17 1996 06:17 | | 8 lines |
| 37.329 | Thu Oct 17 1996 06:17 | | 13 lines |
| 37.330 | Thu Oct 17 1996 06:17 | | 10 lines |
| 37.331 | Thu Oct 17 1996 06:17 | | 11 lines |
| 37.332 | Thu Oct 17 1996 06:17 | | 5 lines |
| 37.333 | Thu Oct 17 1996 06:17 | | 9 lines |
| 37.334 | Thu Oct 17 1996 06:18 | | 7 lines |
| 37.335 | Thu Oct 17 1996 06:18 | | 6 lines |
| 37.336 | Thu Oct 17 1996 06:18 | | 7 lines |
| 37.337 | Thu Oct 17 1996 06:18 | | 6 lines |
| 37.338 | Thu Oct 17 1996 06:18 | | 22 lines |
| 37.339 | Thu Oct 17 1996 06:18 | | 6 lines |
| 37.340 | Thu Oct 17 1996 06:18 | | 10 lines |
| 37.341 | Thu Oct 17 1996 06:18 | | 10 lines |
| 37.342 | Thu Oct 17 1996 06:19 | | 28 lines |
| 37.343 | Thu Oct 17 1996 06:19 | | 9 lines |
| 37.344 | Thu Oct 17 1996 06:19 | | 13 lines |
| 37.345 | Thu Oct 17 1996 06:19 | | 14 lines |
| 37.346 | Thu Oct 17 1996 06:19 | | 9 lines |
| 37.347 | Thu Oct 17 1996 06:19 | | 7 lines |
| 37.348 | Thu Oct 17 1996 06:20 | | 11 lines |
| 37.349 | Thu Oct 17 1996 06:20 | | 10 lines |
| 37.350 | Thu Oct 17 1996 06:20 | | 9 lines |
| 37.351 | Thu Oct 17 1996 06:20 | | 7 lines |
| 37.352 | Thu Oct 17 1996 06:20 | | 8 lines |
| 37.353 | Thu Oct 17 1996 06:20 | | 7 lines |
| 37.354 | Thu Oct 17 1996 06:20 | | 7 lines |
| 37.355 | Thu Oct 17 1996 06:20 | | 10 lines |
| 37.356 | Thu Oct 17 1996 06:21 | | 6 lines |
| 37.357 | Thu Oct 17 1996 06:21 | | 8 lines |
| 37.358 | Thu Oct 17 1996 06:21 | | 8 lines |
| 37.359 | Thu Oct 17 1996 06:21 | | 6 lines |
| 37.360 | Thu Oct 17 1996 06:21 | | 9 lines |
| 37.361 | Thu Oct 17 1996 06:22 | | 5 lines |
| 37.362 | Thu Oct 17 1996 06:22 | | 7 lines |
| 37.363 | Thu Oct 17 1996 06:22 | | 5 lines |
| 37.364 | Thu Oct 17 1996 06:22 | | 17 lines |
| 37.365 | Thu Oct 17 1996 06:22 | | 17 lines |
| 37.366 | Thu Oct 17 1996 06:22 | | 12 lines |
| 37.367 | Thu Oct 17 1996 06:22 | | 11 lines |
| 37.368 | Thu Oct 17 1996 06:23 | | 6 lines |
| 37.369 | Thu Oct 17 1996 06:23 | | 9 lines |
| 37.370 | Thu Oct 17 1996 06:23 | | 9 lines |
| 37.371 | Thu Oct 17 1996 06:23 | | 8 lines |
| 37.372 | Thu Oct 17 1996 06:23 | | 7 lines |
| 37.373 | Thu Oct 17 1996 06:23 | | 8 lines |
| 37.374 | Thu Oct 17 1996 06:24 | | 8 lines |
| 37.375 | Thu Oct 17 1996 06:24 | | 22 lines |
| 37.376 | Thu Oct 17 1996 06:24 | | 6 lines |
| 37.377 | Thu Oct 17 1996 06:24 | | 13 lines |
| 37.378 | Thu Oct 17 1996 06:24 | | 10 lines |
| 37.379 | Thu Oct 17 1996 06:24 | | 20 lines |
| 37.380 | Thu Oct 17 1996 06:25 | | 12 lines |
| 37.381 | Thu Oct 17 1996 06:25 | | 12 lines |
| 37.382 | Thu Oct 17 1996 06:25 | | 15 lines |
| 37.383 | Thu Oct 17 1996 06:25 | | 7 lines |
| 37.384 | Thu Oct 17 1996 06:25 | | 13 lines |
| 37.385 | Thu Oct 17 1996 06:25 | | 8 lines |
| 37.386 | Thu Oct 17 1996 06:25 | | 9 lines |
| 37.387 | Thu Oct 17 1996 06:26 | | 13 lines |
| 37.388 | Thu Oct 17 1996 06:26 | | 5 lines |
| 37.389 | Thu Oct 17 1996 06:26 | | 6 lines |
| 37.390 | Thu Oct 17 1996 06:26 | | 5 lines |
| 37.391 | Thu Oct 17 1996 06:26 | | 10 lines |
| 37.392 | Thu Oct 17 1996 06:26 | | 5 lines |
| 37.393 | Thu Oct 17 1996 06:26 | | 7 lines |
| 37.394 | Thu Oct 17 1996 06:27 | | 8 lines |
| 37.395 | Thu Oct 17 1996 06:27 | | 7 lines |
| 37.406 | Fri Feb 07 1997 04:02 | Arm not arriving up | 9 lines |
TOPIC | 38.0 | CMP.C1-7 PM CHECKSHEETS |
| 38.1 | Fri Mar 28 1997 05:21 | Broken roller arm | 7 lines |
TOPIC | 39.0 | Sat Sep 28 1996 05:33 | WESTECH GENERAL ISSUES | 4 lines |
| 39.1 | Tue Oct 15 1996 23:36 | ACCESS CODES | 6 lines |
TOPIC | 40.0 | Mon Dec 30 1996 14:40 | CMP.D-7 PM TEMPLATES | 3 lines |
| 40.1 | Fri Mar 21 1997 06:24 | Roller arm adjustment | 9 lines |
TOPIC | 41.0 | Mon Dec 30 1996 14:41 | CMP.D1-7 EE/PE PASSDOWNS | 4 lines |
| 41.37 | Fri May 02 1997 06:54 | Slurry lines and hinges | 8 lines |
TOPIC | 42.0 | Mon Dec 30 1996 14:42 | CMP.D1-7 PM CHECKSHEETS | 3 lines |
TOPIC | 43.0 | Mon Dec 30 1996 14:49 | SPEEDFAM AURIGA GENERAL ISSUES | 4 lines |
TOPIC | 44.0 | Tue Apr 16 1996 22:17 | CMP-SCRUB.A PM CHECKSHEET TEMPLATES | 6 lines |
| 44.1 | Tue Apr 16 1996 22:22 | WEEKLY PM CHECKSHEET TEMPLATE | 26 lines |
| 44.2 | Tue Apr 16 1996 22:22 | QUARTERLY PM CHECKSHEET TEMPLATE | 23 lines |
| 44.3 | Tue Apr 16 1996 22:23 | SEMI-ANNUAL PM CHECKSHEET TEMPLATE | 46 lines |
TOPIC | 45.0 | Fri Dec 08 1995 22:20 | CMP-SCRUB.A1 EE/PE PASSDOWNS | 5 lines |
| 45.1 | Fri Dec 01 1995 23:24 | SCRUB.A1 INSTALL/MECHANICAL ACCEPTANCE | 253 lines |
| 45.2 | Fri Dec 01 1995 23:24 | COMPUTER INITIALIZATION PROBLEMS | 38 lines |
| 45.3 | Fri Dec 01 1995 23:26 | FLOW VALVE WON'T ADJUST HIGHER, MOTOR SPEED OUT OF SPEC | 22 lines |
| 45.4 | Fri Dec 01 1995 23:27 | SENSORS AND MOTOR SPEED PROBLEMS | 50 lines |
| 45.5 | Fri Dec 01 1995 23:28 | SEALS REPLACED, LEAKING MANIFOLDS AND MOTOR SPEEDS | 18 lines |
| 45.6 | Fri Dec 01 1995 23:28 | CARRIAGE PROBLEMS | 26 lines |
| 45.7 | Fri Dec 01 1995 23:29 | AMMONIA TURNED ON | 21 lines |
| 45.8 | Fri Dec 01 1995 23:30 | SOFTWARE UPGRADE | 16 lines |
| 45.9 | Fri Dec 01 1995 23:31 | DOUBLE STACKED WAFER | 20 lines |
| 45.10 | Fri Dec 01 1995 23:31 | HEAT LAMP NOT COMING ON | 12 lines |
| 45.11 | Fri Dec 01 1995 23:31 | BRUSH CHANGE | 23 lines |
| 45.12 | Fri Dec 01 1995 23:32 | MEGASONIC SWEEP | 13 lines |
| 45.13 | Fri Dec 01 1995 23:32 | WAFER ROLLER NOT SPINNING | 10 lines |
| 45.14 | Fri Dec 01 1995 23:32 | | 8 lines |
| 45.15 | Fri Dec 01 1995 23:33 | ROBOT PROBLEMS | 17 lines |
| 45.16 | Fri Dec 01 1995 23:34 | INSIDE BRUSH TIMEOUT ERROR | 15 lines |
| 45.17 | Fri Dec 01 1995 23:34 | ROBOT PROBLEMS | 16 lines |
| 45.18 | Fri Dec 01 1995 23:35 | SQEALING NOISE, BRUSH ROTATION HESITATION | 26 lines |
| 45.19 | Fri Dec 01 1995 23:37 | BLADE LIFTER NOT REPEATING | 39 lines |
| 45.20 | Fri Dec 01 1995 23:37 | BRUSHES WON'T ROTATE IN IDLE | 9 lines |
| 45.21 | Fri Dec 01 1995 23:37 | | 204 lines |
| 45.22 | Fri Dec 01 1995 23:37 | | 15 lines |
| 45.23 | Fri Dec 01 1995 23:38 | coiled electrical cord for the send station elevator | 39 lines |
| 45.24 | Fri Dec 01 1995 23:38 | HOT DI WATER TIE IN | 16 lines |
| 45.25 | Fri Dec 01 1995 23:39 | | 17 lines |
| 45.26 | Fri Dec 01 1995 23:39 | | 9 lines |
| 45.27 | Fri Dec 01 1995 23:39 | | 12 lines |
| 45.28 | Fri Dec 01 1995 23:39 | | 9 lines |
| 45.29 | Fri Dec 01 1995 23:39 | | 14 lines |
| 45.30 | Fri Dec 01 1995 23:39 | | 13 lines |
| 45.31 | Fri Dec 01 1995 23:39 | | 13 lines |
| 45.32 | Fri Dec 08 1995 22:00 | ROBOT TIMING OUT | 13 lines |
| 45.33 | Fri Dec 08 1995 22:01 | RECEIVE TIMEOUTS, BRUSH STATION TIMEOUT | 20 lines |
| 45.34 | Fri Dec 08 1995 22:01 | SYSTEM DOUBLE LOADING | 11 lines |
| 45.35 | Fri Dec 08 1995 22:02 | WAFER ROLLER ARMS NOT OPENING | 15 lines |
| 45.36 | Fri Dec 08 1995 22:03 | RECEIVE CASSETTE NOT READY, SENSOR ADJUSTMENT | 18 lines |
| 45.37 | Fri Dec 08 1995 22:04 | ROBOT ARM PROBLEM | 13 lines |
| 45.38 | Fri Dec 08 1995 22:06 | ROBOT FINGER PROBLEMS | 43 lines |
| 45.39 | Fri Dec 08 1995 22:07 | BRUSH ROLLER ARM CRACKED | 10 lines |
| 45.40 | Fri Dec 08 1995 22:08 | WAFER ROLLER ARMS NOT OPENING | 20 lines |
| 45.41 | Fri Dec 08 1995 22:09 | COMPUTER FREEZE UP, ROBOT FINGER PROBLEM | 24 lines |
| 45.42 | Fri Dec 08 1995 22:10 | robot finger position error | 15 lines |
| 45.43 | Fri Dec 08 1995 22:10 | PROCESS ENGINEERING ADJUSTMENTS CHANGED | 13 lines |
| 45.44 | Fri Dec 08 1995 22:11 | carriage problems | 35 lines |
| 45.45 | Fri Dec 08 1995 22:11 | spin and robot alignments, brushes replaced | 19 lines |
| 45.46 | Fri Dec 08 1995 22:12 | SYSTEM OFFSETS AS OFF 8/16 | 14 lines |
| 45.47 | Fri Dec 08 1995 22:13 | PROBLEMS WITH BRUSH HEIGHTS, EXHAUST AND NO AMMONIA | 27 lines |
| 45.48 | Fri Dec 08 1995 22:13 | BRUSH ROLLER ARM NOT OPENING, BROKE | 15 lines |
| 45.49 | Fri Dec 08 1995 22:14 | LEAKS IN THE BRUSH STATION TUBS | 14 lines |
| 45.50 | Fri Dec 08 1995 22:14 | brush station roller arm broke | 11 lines |
| 45.51 | Fri Dec 08 1995 22:14 | Robot finger flags loose | 11 lines |
| 45.54 | Thu Nov 23 1995 06:35 | DI attack!!!! | 32 lines |
| 45.55 | Sat Nov 25 1995 05:19 | Motor replaced and old spindle installed | 12 lines |
| 45.66 | Thu Dec 21 1995 00:36 | SYSTEM OFFSETS AS OF 12/21/95 | 19 lines |
| 45.68 | Fri Dec 22 1995 20:42 | SYSTEM OFFSETS AS OF 12/22/95 | 19 lines |
| 45.69 | Fri Dec 29 1995 15:11 | Start-up for 12/29 | 8 lines |
| 45.70 | Sun Dec 31 1995 14:39 | CMP-SCRUB.A1 START-UP COMPLETE | 25 lines |
| 45.73 | Wed Jan 10 1996 06:20 | Arm replaced | 4 lines |
| 45.76 | Fri Feb 09 1996 05:16 | Door latch | 6 lines |
| 45.79 | Thu Feb 15 1996 06:27 | roller drive shaft | 9 lines |
| 45.83 | Thu Mar 14 1996 23:37 | Lower brushes hesitating | 7 lines |
| 45.86 | Thu Mar 28 1996 06:17 | CMP-SCRUB.A1 shutdown completed for facilities tie-in | 28 lines |
| 45.88 | Fri Mar 29 1996 07:23 | Inside roller assembly | 18 lines |
| 45.92 | Wed Apr 03 1996 08:09 | Arm replaced | 5 lines |
| 45.93 | Tue Apr 09 1996 13:30 | Shaft and o-rings replaced | 7 lines |
| 45.94 | Tue Apr 09 1996 19:56 | Wafer sensor and PIA board replaced | 7 lines |
| 45.97 | Wed Apr 17 1996 05:57 | Motor speed errors, loose gear | 10 lines |
| 45.107 | Wed May 15 1996 08:26 | Coupling broke/replaced | 7 lines |
| 45.112 | Wed May 29 1996 07:33 | Spin station lift assembly | 15 lines |
| 45.118 | Sat Jun 22 1996 08:14 | Roller shaft replaced | 10 lines |
| 45.122 | Thu Jun 27 1996 07:32 | Roller shafts replaced | 13 lines |
| 45.130 | Thu Aug 08 1996 07:52 | Spin station lift errors | 10 lines |
| 45.135 | Thu Sep 19 1996 08:01 | NO TOUCH SCREEN CAPABILITIES | 23 lines |
| 45.147 | Thu Oct 17 1996 00:02 | LOWER DI OUT OF SPEC ALARM | 10 lines |
| 45.149 | Thu Oct 17 1996 20:11 | The expanded version.. :^) | 18 lines |
| 45.151 | Fri Oct 18 1996 22:49 | BEARINGS SHOT IN SEND STATION | 14 lines |
| 45.159 | Fri Nov 22 1996 06:55 | Regulator tie-in | 9 lines |
| 45.160 | Sat Nov 23 1996 01:35 | Wafer sensor in spin station | 7 lines |
| 45.171 | Fri Mar 21 1997 08:38 | Particles.... | 27 lines |
| 45.173 | Fri Mar 28 1997 07:22 | Auto reply system never posted this from 3/22 | 34 lines |
| 45.174 | Fri Mar 28 1997 08:43 | Roller motor brush motor issues | 17 lines |
| 45.176 | Fri Apr 04 1997 07:00 | Receiver/heat lamp | 12 lines |
| 45.181 | Sat May 10 1997 09:13 | Dummy wafer dropped in receive station | 6 lines |
| 45.183 | Wed May 14 1997 07:30 | Lifter issue.... | 33 lines |
| 45.185 | Fri May 16 1997 06:25 | Send station rebuilt | 7 lines |
| 45.191 | Fri May 30 1997 07:56 | Bad boats..... | 19 lines |
TOPIC | 46.0 | CMP-SCRUB.A1 PM CHECKSHEETS |
| 46.1 | Wed Nov 08 1995 21:08 | Weekly PM Checksheet Template | 26 lines |
| 46.2 | Tue Jun 11 1996 23:50 | Quarterly PM Checksheet Template | 36 lines |
| 46.3 | Tue Jun 11 1996 23:51 | Semi-Annual PM Checksheet Template | 66 lines |
| 46.15 | Wed Jan 17 1996 22:12 | Weekly PM for WW29 completed | 29 lines |
| 46.16 | Thu Jan 25 1996 04:24 | WEEKLY PM FOR A2 COMPLETED | 30 lines |
| 46.17 | Thu Jan 25 1996 04:27 | WEEKLY PM FOR A1 COMPLETED | 30 lines |
| 46.19 | Wed Feb 07 1996 03:30 | QUARTERLY PM COMPLETED FOR SCRUB.A1 | 27 lines |
| 46.21 | Fri Feb 23 1996 06:06 | WEEKLY PM FOR WW34 COMPLETED | 27 lines |
| 46.24 | Mon Mar 11 1996 14:03 | WEEKLY PM COMPLETED FOR WW37 | 27 lines |
| 46.28 | Mon Apr 08 1996 19:56 | Weekly PM completed for WW41 | 25 lines |
| 46.39 | Wed Jun 12 1996 00:33 | Weekly PM for WW50 completed | 26 lines |
| 46.43 | Thu Jul 04 1996 03:30 | SCRUB.A1 SHUT-DOWN COMPLETED | 24 lines |
| 46.49 | Wed Aug 07 1996 23:42 | QUARTERLY PM FOR WW6 COMPLETED | 34 lines |
| 46.65 | Tue Nov 12 1996 21:20 | WEEKLY PM FOR WW20 COMPLETED | 31 lines |
| 46.73 | Thu Jan 02 1997 07:39 | WEEKLY PM COMPLETED FOR WW27 | 29 lines |
| 46.74 | Wed Jan 08 1997 06:06 | WEEKLY PM COMPLETED FOR WW28 | 29 lines |
| 46.78 | Wed Feb 05 1997 08:36 | QUARTERLY PM COMPLETED FOR WW32 | 48 lines |
| 46.83 | Thu Mar 13 1997 21:27 | WEEKLY PM FOR WW37 COMPLETED | 31 lines |
| 46.88 | Fri Apr 18 1997 07:03 | WEEKLY PM FOR WW42 COMPLETED | 34 lines |
TOPIC | 47.0 | Sat Dec 09 1995 00:26 | CMP-SCRUB.A2 EE/PE PASSDOWNS | 5 lines |
| 47.1 | Fri Dec 08 1995 23:49 | INSTALLATION AND MECHANICAL ACCEPTANCE | 173 lines |
| 47.2 | Fri Dec 08 1995 23:50 | MECHANICAL ACCEPTANCE | 11 lines |
| 47.3 | Fri Dec 08 1995 23:51 | SYSTEM NOT INITIALIZING OR HOMING | 40 lines |
| 47.4 | Fri Dec 08 1995 23:51 | brush motor speed out of spec | 13 lines |
| 47.5 | Fri Dec 08 1995 23:52 | BRUSH HEIGHTS, MOTOR SPEEDS ADJUSTED | 17 lines |
| 47.6 | Fri Dec 08 1995 23:52 | OCP INTERFACE CONFIG, PROBLEMS | 22 lines |
| 47.7 | Fri Dec 08 1995 23:53 | ROLLER SHAFT LEAKS | 21 lines |
| 47.8 | Fri Dec 08 1995 23:53 | TOUCH SCREEN FROZE | 19 lines |
| 47.9 | Fri Dec 08 1995 23:54 | SOFTWARE BACKED UP | 11 lines |
| 47.10 | Sat Dec 09 1995 00:01 | AMMONIA IS FLOWING | 16 lines |
| 47.11 | Sat Dec 09 1995 00:01 | PROCESS ACCEPTANCE AND BRUSH HEIGHTS | 20 lines |
| 47.12 | Sat Dec 09 1995 00:02 | SOFTWARE UPGRADE | 15 lines |
| 47.13 | Sat Dec 09 1995 00:02 | ROLLER ARMS NOT CLOSING | 11 lines |
| 47.14 | Sat Dec 09 1995 00:02 | SCRUBBER WON'T GO INTO START | 13 lines |
| 47.15 | Sat Dec 09 1995 00:03 | HEAT LAMP NOT COMING ON | 12 lines |
| 47.16 | Sat Dec 09 1995 00:03 | SPIN STATION WAFER SENSOR | 12 lines |
| 47.17 | Sat Dec 09 1995 00:04 | HEAT LAMP WOULDN'T COME ON | 10 lines |
| 47.18 | Sat Dec 09 1995 00:04 | SPIN STATION HEAD | 11 lines |
| 47.19 | Sat Dec 09 1995 00:05 | A2 CHARACTERIZATION SHEET AS OF 12/12/94 | 204 lines |
| 47.20 | Sat Dec 09 1995 00:06 | LIFER MISSING WAFERS AND DOUBLE SLOTING | 20 lines |
| 47.21 | Sat Dec 09 1995 00:06 | double slotting wafers in the receive cassette | 15 lines |
| 47.22 | Sat Dec 09 1995 00:07 | SOFTWARE UPGRADE | 20 lines |
| 47.23 | Sat Dec 09 1995 00:07 | coiled electrical cord/send station elevator | 15 lines |
| 47.24 | Sat Dec 09 1995 00:08 | Robot fingers not repeating | 18 lines |
| 47.25 | Sat Dec 09 1995 00:08 | The robot with inconsistant fingers | 40 lines |
| 47.26 | Sat Dec 09 1995 00:08 | robot finger error | 12 lines |
| 47.27 | Sat Dec 09 1995 00:09 | brushes NOT STAYING ON IN IDLE | 22 lines |
| 47.28 | Sat Dec 09 1995 00:10 | robot finger error | 14 lines |
| 47.29 | Sat Dec 09 1995 00:10 | MACHINE OFF-SETS AS OF 3/21/95 | 26 lines |
| 47.30 | Sat Dec 09 1995 00:11 | Load Station elevator wiring harness replaced | 19 lines |
| 47.31 | Sat Dec 09 1995 00:11 | Send Station Rollers/Bad Bearings | 17 lines |
| 47.32 | Sat Dec 09 1995 00:11 | send station belt bearings | 10 lines |
| 47.33 | Sat Dec 09 1995 00:11 | Roller arm was loose | 10 lines |
| 47.34 | Sat Dec 09 1995 00:12 | broken roller arm | 15 lines |
| 47.35 | Sat Dec 09 1995 00:12 | repaired broken roller arm | 9 lines |
| 47.36 | Sat Dec 09 1995 00:12 | broken roller arm | 10 lines |
| 47.37 | Sat Dec 09 1995 00:13 | replaced cracked roller arm | 7 lines |
| 47.38 | Sat Dec 09 1995 00:13 | DI water gun was installed | 15 lines |
| 47.39 | Sat Dec 09 1995 00:13 | Megasonics sweep arm sensor | 12 lines |
| 47.40 | Sat Dec 09 1995 00:14 | Outer Brush motor problem | 12 lines |
| 47.41 | Sat Dec 09 1995 00:14 | new motor spin speed calibration | 22 lines |
| 47.42 | Sat Dec 09 1995 00:14 | OB sta brush change, new micrometer settings! | 30 lines |
| 47.43 | Sat Dec 09 1995 00:14 | New Brush Height Micrometer Settings | 24 lines |
| 47.44 | Sat Dec 09 1995 00:15 | Recieve Station Door Sensor | 10 lines |
| 47.45 | Sat Dec 09 1995 00:15 | broken or lost wafer error | 18 lines |
| 47.46 | Sat Dec 09 1995 00:15 | PROCESS ENGINEERING CHANGES | 30 lines |
| 47.47 | Sat Dec 09 1995 00:16 | BRUSH CHANGES AND ALIGNMENTS | 38 lines |
| 47.48 | Sat Dec 09 1995 00:16 | BRUSHES ALIGNMENTS, CHANGES AND EXHAUST | 37 lines |
| 47.49 | Sat Dec 09 1995 00:17 | sensor replaced/motor speeds changed | 12 lines |
| 47.50 | Sat Dec 09 1995 00:17 | Send Station Top limit sensor | 10 lines |
| 47.51 | Sat Dec 09 1995 00:17 | Input Cassette Sensor | 15 lines |
| 47.52 | Sat Dec 09 1995 00:17 | Outside station Roller speed | 42 lines |
| 47.53 | Sat Dec 09 1995 00:18 | ROLLER MOTOR tach problems | 27 lines |
| 47.54 | Sat Dec 09 1995 00:18 | Spin station / Send station SPEEDS | 14 lines |
| 47.55 | Sat Dec 09 1995 00:18 | transport rebuilding/ CARRIAGE | 16 lines |
| 47.56 | Sat Dec 09 1995 00:19 | Small D.I. Water Leak on Gage Guard | 14 lines |
| 47.57 | Sat Dec 09 1995 00:20 | gauge guards removed, amplifer issue | 14 lines |
| 47.58 | Sat Dec 09 1995 00:20 | Send Station Lock-up Problem | 14 lines |
| 47.62 | Thu Dec 21 1995 00:36 | SYSTEM OFFSETS AS OF 12/21/95 | 20 lines |
| 47.65 | Fri Dec 29 1995 15:11 | Start-up for 12/29 | 9 lines |
| 47.66 | Sun Dec 31 1995 14:40 | CMP-SCRUB.A2 START-UP COMPLETE | 28 lines |
| 47.69 | Wed Jan 10 1996 06:20 | Arm replaced | 4 lines |
| 47.78 | Thu Feb 15 1996 06:31 | Leak | 6 lines |
| 47.80 | Sat Feb 17 1996 00:52 | BRUSH MOTOR REPLACED | 6 lines |
| 47.83 | Sat Mar 02 1996 05:32 | Top roller arm replaced | 11 lines |
| 47.85 | Sat Mar 23 1996 05:32 | Send Station Replaced | 7 lines |
| 47.88 | Thu Mar 28 1996 06:16 | CMP-SCRUB.A2 shutdown completed for facilities tie-in | 28 lines |
| 47.92 | Sat Apr 06 1996 06:44 | Yet another leak | 9 lines |
| 47.93 | Mon Apr 08 1996 16:58 | Arm replaced | 6 lines |
| 47.100 | Wed May 29 1996 08:32 | Roller bearing shot! | 7 lines |
| 47.120 | Fri Sep 27 1996 22:13 | Robot finger issue | 10 lines |
| 47.130 | Sat Nov 23 1996 05:18 | Brush motor replaced | 9 lines |
| 47.133 | Thu Dec 12 1996 06:13 | TOP ROLLER ARM REPLACED | 7 lines |
| 47.145 | Sat Mar 29 1997 04:16 | Wafer left at SPIN | 6 lines |
| 47.150 | Sat Apr 12 1997 07:02 | Robot dropping wafers | 12 lines |
| 47.157 | Tue May 13 1997 22:47 | Current brush heights as of 5/13/97 | 8 lines |
TOPIC | 48.0 | CMP-SCRUB.A2 PM CHECKSHEETS |
| 48.1 | Wed Nov 08 1995 21:10 | Weekly PM Checksheet Template | 26 lines |
| 48.2 | Tue Jun 11 1996 23:57 | Quarterly PM Checksheet Template | 36 lines |
| 48.3 | Tue Jun 11 1996 23:58 | Semi-Annual PM Checksheet Template | 66 lines |
| 48.5 | Tue Nov 21 1995 23:09 | Weekly PM for 11/21 completed | 28 lines |
| 48.14 | Wed Jan 17 1996 21:53 | WEEKLY PM FOR WW29 | 29 lines |
| 48.15 | Fri Jan 26 1996 20:22 | forgot to post, weekly PM for WW30 | 24 lines |
| 48.19 | Fri Feb 23 1996 04:54 | WEEKLY PM COMPLETED FOR WW34 | 24 lines |
| 48.21 | Wed Mar 06 1996 04:28 | WEEKLY PM COMPLETED FOR WW36 | 25 lines |
| 48.22 | Thu Mar 14 1996 04:27 | SEMI-ANNUAL PM FOR WW37 COMPLETED | 43 lines |
| 48.29 | Tue Apr 30 1996 23:59 | WEEKLY PM COMPLETED FOR WW44 | 35 lines |
| 48.37 | Wed Jun 12 1996 00:10 | Quarterly PM for WW50 completed | 34 lines |
| 48.41 | Thu Jul 04 1996 03:31 | SCRUB.A2 SHUT-DOWN COMPLETED | 24 lines |
| 48.48 | Wed Aug 14 1996 22:12 | Weekly PM for WW7 completed | 25 lines |
| 48.63 | Tue Nov 12 1996 21:21 | WEEKLY PM FOR WW20 COMPLETED | 31 lines |
| 48.67 | Tue Dec 10 1996 22:45 | QUARTERLY PM FOR WW24 COMPLETED | 47 lines |
| 48.71 | Thu Jan 02 1997 07:39 | WEEKLY PM COMPLETED FOR WW27 | 29 lines |
| 48.72 | Wed Jan 08 1997 06:07 | WEEKLY PM COMPLETED FOR WW28 | 29 lines |
| 48.75 | Wed Jan 29 1997 21:49 | WEEKLY PM COMPLETED FOR WW31 | 30 lines |
| 48.86 | Fri Apr 18 1997 07:07 | WEEKLY PM FOR WW42 COMPLETED | 34 lines |
| 48.91 | Tue May 13 1997 22:48 | Current brush heights as of 5/13/97 | 8 lines |
TOPIC | 49.0 | Wed Jun 12 1996 00:01 | CMP-SCRUB.A3 EE/PE PASSDOWNS | 5 lines |
| 49.8 | Fri Aug 16 1996 08:18 | Timeout errors | 8 lines |
| 49.22 | Sat Sep 21 1996 06:57 | Time-out errors | 9 lines |
| 49.34 | Sat Oct 05 1996 07:04 | Cracked roller arm | 14 lines |
| 49.35 | Sat Oct 19 1996 07:16 | Top roller arms replaced | 5 lines |
| 49.41 | Sat Nov 30 1996 06:11 | Door latch fault | 10 lines |
| 49.63 | Fri Apr 25 1997 08:34 | Burn baby burn..... | 23 lines |
| 49.65 | Wed Apr 30 1997 07:16 | Robot dropping wafers at spin again | 15 lines |
| 49.72 | Thu May 08 1997 09:48 | Tool still dropping wafers in SPIN station | 49 lines |
| 49.74 | Sat May 10 1997 09:14 | Dummy wafer dropped in receive station | 19 lines |
| 49.85 | Wed May 28 1997 07:22 | Continued wafer handling issues | 33 lines |
TOPIC | 50.0 | Wed Jun 12 1996 00:02 | CMP-SCRUB.A3 PM CHECKSHEETS | 5 lines |
| 50.1 | Wed Jun 12 1996 00:04 | Weekly PM Checksheet Template | 26 lines |
| 50.2 | Wed Jun 12 1996 00:06 | Quarterly PM Checksheet Template | 36 lines |
| 50.3 | Wed Jun 12 1996 00:06 | Semi-Annual PM Checksheet Template | 66 lines |
| 50.21 | Tue Nov 12 1996 21:23 | WEEKLY PM FOR WW20 COMPLETED | 31 lines |
| 50.25 | Wed Dec 11 1996 00:19 | WEEKLY PM FOR WW24 COMPLETED | 28 lines |
| 50.29 | Thu Jan 02 1997 07:40 | WEEKLY PM COMPLETED FOR WW27 | 29 lines |
| 50.39 | Thu Mar 13 1997 21:29 | WEEKLY PM FOR WW37 COMPLETED | 31 lines |
| 50.44 | Thu Apr 17 1997 05:30 | WEEKLY PM COMPLETED FOR WW42 | 34 lines |
| 50.45 | Wed Apr 23 1997 22:46 | WEEKLY PM COMPLETED FOR WW43 | 35 lines |
| 50.50 | Wed May 28 1997 07:27 | SEMI-ANNUAL PM FOR WW47 COMPLETED | 47 lines |
| 50.51 | Wed May 28 1997 07:32 | WEEKLY PM FOR WW48 COMPLETED | 31 lines |
TOPIC | 51.0 | Thu Sep 26 1996 05:24 | RESERVED | 3 lines |
TOPIC | 52.0 | Thu Sep 26 1996 05:25 | RESERVED | 3 lines |
TOPIC | 53.0 | Sat Sep 28 1996 04:51 | CMP-SCRUB.C PM TEMPLATES | 7 lines |
| 53.1 | Sat Sep 28 1996 04:52 | WEEKLY PM TEMPLATE | 26 lines |
| 53.2 | Sat Sep 28 1996 04:53 | QUARTERLY PM TEMPLATE | 23 lines |
| 53.3 | Sat Sep 28 1996 04:53 | SEMI-ANNUAL PM TEMPLATE | 46 lines |
TOPIC | 54.0 | Wed Jan 29 1997 21:18 | CMP-SCRUB.C1 EE/PE PASSDOWNS | 5 lines |
| 54.17 | Wed May 07 1997 21:28 | Brush heights wrong, apparent spin station crash | 16 lines |
TOPIC | 55.0 | Wed Jan 29 1997 21:13 | CMP-SCRUB.C1 PM CHECKSHEETS | 5 lines |
| 55.1 | Wed Jan 29 1997 21:12 | CMP-SCRUB.C1 EE/PE PASSDOWNS | 5 lines |
| 55.15 | Tue Nov 12 1996 21:00 | WEEKLY PM COMPLETED FOR WW20 | 27 lines |
| 55.16 | Wed Nov 20 1996 23:06 | WEEKLY PM FOR WW21 COMPLETED | 27 lines |
| 55.23 | Thu Jan 02 1997 22:01 | WEEKLY PM COMPLETED FOR WW27 | 30 lines |
| 55.24 | Wed Jan 08 1997 05:43 | WEEKLY PM COMPLETED FOR WW28 | 29 lines |
| 55.27 | Wed Jan 29 1997 21:09 | WEEKLY PM FOR WW31 COMPLETED | 30 lines |
| 55.35 | Thu Mar 27 1997 06:55 | SEMI-ANNUAL PM COMPLETED FOR WW39 | 96 lines |
| 55.37 | Thu Apr 10 1997 06:07 | WEEKLY PM FOR WW41 COMPLETED | 30 lines |
| 55.38 | Thu Apr 17 1997 05:33 | WEEKLY PM COMPLETED FOR WW42 | 28 lines |
| 55.39 | Wed Apr 23 1997 22:17 | WEEKLY PM FOR WW43 COMPLETED | 29 lines |
| 55.41 | Wed May 07 1997 23:43 | Weekly PM completed for WW45 | 37 lines |
TOPIC | 56.0 | Sat Dec 14 1996 04:36 | CMP-SCRUB.A1 DECTREE USAGE | 6 lines |
TOPIC | 57.0 | Sat Dec 14 1996 04:38 | CMP-SCRUB.A2 DECTREE USAGE | 7 lines |
TOPIC | 58.0 | Sat Dec 14 1996 04:38 | CMP-SCRUB.A3 DECTREE USAGE | 6 lines |
TOPIC | 59.0 | Sat Sep 28 1996 05:07 | ONTRAK GENERAL ISSUES | 3 lines |
| 59.1 | Wed Oct 02 1996 00:27 | CMP-SCRUB.A1 SYSTEM OFF-SETS AS OF 10/1/96 | 14 lines |
| 59.3 | Wed Oct 02 1996 00:30 | CMP-SCRUB.A3 SYSTEM OFF-SETS AS OF 10/1/96 | 14 lines |
| 59.4 | Wed Oct 02 1996 00:31 | CMP-SCRUB.C1-7 SYSTEM OFF-SETS AS OF 10/1/96 | 14 lines |
| 59.5 | Sat Nov 09 1996 06:45 | Low Ammomium Hydroxide flow | 6 lines |
TOPIC | 61.0 | Wed Dec 20 1995 21:35 | GENERAL CMP ISSUES | 6 lines |
| 61.1 | Wed Dec 20 1995 21:36 | DRILL BITS | 10 lines |
| 61.2 | Wed Dec 20 1995 21:36 | Strasbaugh Cond. Disk & Carrier weight values | 19 lines |
| 61.3 | Wed Dec 20 1995 21:37 | Instruments on a set calibration schedule | 46 lines |
| 61.4 | Wed Dec 20 1995 21:38 | Activities & Events on the Strasbaughs since 4/5/95 | 77 lines |
| 61.5 | Wed Dec 20 1995 21:39 | New Load Cell 0 - 50 lbs | 14 lines |
| 61.12 | Fri Dec 29 1995 15:12 | Start-up for 12/29 | 7 lines |
| 61.39 | Sat Jun 01 1996 05:21 | Slurry pressure | 7 lines |
| 61.45 | Thu Aug 08 1996 07:53 | Slurry system shutdown | 7 lines |
| 61.46 | Fri Aug 09 1996 07:32 | Chemicals shut down | 8 lines |
| 61.55 | Thu Oct 03 1996 07:22 | Removal rates on the slide... | 6 lines |
| 61.56 | Fri Oct 04 1996 00:09 | New batch of slurry on line | 5 lines |
| 61.60 | Fri Oct 25 1996 00:49 | Slurry system flushed | 8 lines |
| 61.61 | Fri Oct 25 1996 07:15 | A slurry flush a week keeps the particles away! | 7 lines |
| 61.63 | Sat Oct 26 1996 05:07 | Slurry flushed.... again.... | 6 lines |
| 61.83 | Fri May 16 1997 04:03 | Lot slurry on B2, B3 and CMP.A tools | 9 lines |
TOPIC | 77.0 | IN-COMPLETE PMs |
| 77.1 | Wed Feb 19 1997 05:23 | INCOMPLETE WEEKLY PM CHECKSHEET FOR CMP.B3, WW34 | 101 lines |
| 77.1 | Thu Apr 10 1997 21:36 | WEEKLY PM FOR CMP.B1 STARTED AND INCOMPLETE | 98 lines |
| 77.1 | Wed May 14 1997 08:40 | Monthly PM FOR CMP.A1 incomplete | 163 lines |
| 77.1 | Wed May 21 1997 23:39 | WW47 WEEKLY PM FOR CMP.B3 STARTED | 101 lines |
| 77.2 | Thu Apr 10 1997 21:56 | MONTHLY PM FOR CMP.B2 FOR WW41 STARTED AND INCOMPLETE | 184 lines |
TOPIC | 78.0 | Tue Jul 16 1996 11:32 | CMP-6 CALIBRATION LISTINGS | 8 lines |
| 78.1 | Tue Aug 06 1996 23:53 | calibration listing for CMP as of 8/6/96 | 116 lines |
TOPIC | 80.0 | Wed Nov 20 1996 21:02 | ASHLAND CHEMICAL - SLURRY,AMMONIUM HYDROXIDE | 3 lines |
| 80.1 | Wed Nov 20 1996 21:06 | Ashland Chemical contact numbers | 6 lines |
TOPIC | 87.0 | Fri Jan 03 1997 23:55 | CMP FAB SAFETY ISSUES | 4 lines |
| 87.2 | Thu Jan 09 1997 21:45 | Bulk Chemical Advisory | 24 lines |
TOPIC | 93.0 | Sat May 10 1997 03:46 | CMP VENDOR PHONE NUMBERS AND CONTACTS | 3 lines |
| 93.1 | Sat May 10 1997 03:51 | ONTRAK SYSTEMS INC. | 13 lines |
| 93.2 | Sat May 10 1997 04:06 | SPEEDFAM CORPORATION SUPPORT NUMBERS | 26 lines |
| 93.3 | Sat May 10 1997 04:08 | STRASBAUGH CORP. CONTACTS AND SUPPORT NUMBERS | 24 lines |