TOPIC | 2.0 | PAD CHANGE DATA |
| 2.1 | Tue Nov 07 1995 00:47 | CMP.A2 PAD CHANGE | 8 lines |
| 2.7 | Sat Nov 11 1995 21:19 | PAD CHANGE CMP.A2 | 4 lines |
| 2.55 | Tue Dec 12 1995 05:19 | Pad change CMP.A2 | 7 lines |
| 2.65 | Sat Dec 16 1995 23:10 | PAD CHANGE CMP.A2 | 7 lines |
| 2.82 | Tue Jan 02 1996 23:23 | CMP.A1 PAD CHANGE | 7 lines |
| 2.92 | Sun Jan 07 1996 03:30 | PAD CHANGE CMP.A2 | 7 lines |
| 2.109 | Sat Jan 13 1996 21:23 | PAD CHANGE CMP.A2 | 7 lines |
| 2.110 | Sat Jan 13 1996 21:36 | PAD CHANGE CMP.B2 | 5 lines |
| 2.113 | Mon Jan 15 1996 22:16 | PAD CHANGE CMP.B2 | 4 lines |
| 2.138 | Sun Jan 28 1996 07:37 | CMP.A1 PAD CHANGE | 7 lines |
| 2.141 | Tue Jan 30 1996 05:46 | PAD CHANGE CMP.A2 | 7 lines |
| 2.142 | Wed Jan 31 1996 05:08 | PAD CHANGE CMP.A1 | 7 lines |
| 2.150 | Sun Feb 11 1996 04:28 | PAD CHANGE CMP.A2 | 7 lines |
| 2.160 | Sat Feb 17 1996 23:53 | PAD CHANGE CMP.A1 | 7 lines |
| 2.163 | Mon Feb 19 1996 06:01 | PAD CHANGE CMP.A2 | 7 lines |
| 2.164 | Mon Feb 19 1996 06:05 | PAD CHANGE CMP.A1 | 6 lines |
| 2.165 | Tue Feb 20 1996 00:20 | Pad change CMP.B1 | 4 lines |
| 2.166 | Tue Feb 20 1996 06:23 | Pad change CMP.B1 | 4 lines |
TOPIC | 3.0 | CONDITIONER CHANGE DATA |
| 3.7 | Tue Dec 12 1995 05:23 | Conditioning disk change. CMP.A2 | 2 lines |
| 3.8 | Sat Dec 16 1995 23:01 | disk changer CMP.A2 | 3 lines |
| 3.16 | Wed Jan 31 1996 05:10 | Conditioning disk change | 2 lines |
| 3.18 | Sat Feb 17 1996 23:54 | CMP.A1 | 2 lines |
| 3.19 | Mon Feb 19 1996 06:02 | CMP.A2 DISK CHANGE | 2 lines |
| 3.20 | Mon Feb 19 1996 06:06 | DISK CHANGE CMP.A1 | 2 lines |
TOPIC | 5.0 | CMP.A1 EE/PE PASSDOWNS |
| 5.360 | Wed Mar 26 1997 06:23 | Failed 24 hr MQC'S | 8 lines |
| 5.373 | Mon Apr 28 1997 08:14 | Failed MQC's | 7 lines |
| 5.384 | Mon May 05 1997 07:03 | Failed mqc's | 7 lines |
| 5.385 | Tue May 06 1997 07:38 | Failed MQCs | 10 lines |
TOPIC | 6.0 | CMP.A1 PM CHECKSHEETS |
| 6.26 | Wed Mar 27 1996 06:50 | WW39 Weekly PM | 72 lines |
| 6.32 | Mon May 06 1996 01:59 | WW45 Weekly PM | 74 lines |
| 6.39 | Wed Jun 05 1996 07:08 | WW49 Weekly PM | 69 lines |
| 6.47 | Mon Jul 15 1996 06:41 | WW03 Monthly PM | 154 lines |
| 6.55 | Mon Sep 02 1996 02:49 | CMP.A1 SHUTDOWN CHECKSHEET | 36 lines |
| 6.58 | Tue Sep 17 1996 07:55 | WW12 Annual PM | 217 lines |
| 6.65 | Sun Nov 03 1996 04:58 | WW19 Weekly PM | 76 lines |
| 6.79 | Tue Feb 04 1997 02:58 | WW32 Weekly PM completed | 76 lines |
| 6.82 | Sun Feb 23 1997 06:54 | WW35 WEEKLY PM | 77 lines |
| 6.85 | Tue Mar 18 1997 06:56 | WW38 SEMI-ANNUAL PM COMPLETED | 217 lines |
| 6.90 | Mon Apr 21 1997 07:46 | Weekly PM completed | 81 lines |
TOPIC | 7.0 | CMP.A2 EE/PE PASSDOWNS |
| 7.140 | Wed Feb 28 1996 05:06 | Robot/Cassette problem | 15 lines |
| 7.161 | Wed Mar 27 1996 07:05 | Wafer Crash | 10 lines |
| 7.165 | Mon Apr 01 1996 08:16 | Wafer crash | 7 lines |
| 7.267 | Tue Nov 05 1996 06:57 | Right carrier leaving wafers on pad at lift-off | 10 lines |
| 7.269 | Sun Nov 10 1996 21:01 | Hub Alignments | 6 lines |
| 7.270 | Mon Nov 11 1996 04:08 | Vacuum/ | 10 lines |
| 7.298 | Mon Dec 30 1996 07:33 | Wafer dropped out of left carrier. | 3 lines |
| 7.321 | Mon Feb 10 1997 07:14 | Leaving wafers on table | 17 lines |
| 7.366 | Mon May 05 1997 07:01 | Failed MQC's | 8 lines |
| 7.367 | Tue May 06 1997 07:39 | Engineering Experiment | 11 lines |
TOPIC | 8.0 | CMP.A2 PM CHECKSHEETS |
| 8.16 | Tue Jan 30 1996 05:53 | WW 31 Weekly PM | 79 lines |
| 8.19 | Mon Feb 19 1996 05:56 | WW34 Weekly PM | 72 lines |
| 8.24 | Sun Mar 24 1996 06:36 | WW39 Weekly PM | 75 lines |
| 8.26 | Wed Apr 10 1996 02:37 | WW41 Monthly PM | 156 lines |
| 8.54 | Mon Sep 02 1996 02:48 | CMP.A1 SHUTDOWN CHECKSHEET | 36 lines |
| 8.60 | Sun Sep 29 1996 05:15 | WW14 Weekly PM | 72 lines |
| 8.67 | Mon Nov 18 1996 04:50 | WW21 Weekly PM | 71 lines |
| 8.73 | Tue Dec 31 1996 02:16 | WW27 Weekly PM completed | 78 lines |
| 8.77 | Sun Jan 12 1997 21:43 | WW29 Weekly PM | 79 lines |
| 8.80 | Sun Feb 02 1997 05:02 | WW32 Monthly PM | 170 lines |
| 8.81 | Mon Feb 10 1997 05:09 | WW33 Weekly PM | 76 lines |
| 8.87 | Tue Mar 25 1997 07:01 | WW39 Weekly PM completed | 84 lines |
TOPIC | 9.0 | STRASBAUGH CRASH FORMS |
| 9.9 | Mon Oct 14 1996 06:09 | A1 crash 10-14-96 | 25 lines |
TOPIC | 17.0 | CMP.B1 EE/PE PASSDOWNS |
| 17.180 | Sun Jan 28 1996 07:54 | Robot Problems | 12 lines |
| 17.183 | Tue Jan 30 1996 07:02 | Vacuum Pump fan broke | 8 lines |
| 17.204 | Tue Feb 27 1996 06:51 | Broken wafer | 16 lines |
| 17.226 | Mon Mar 18 1996 07:35 | Carrier 4 rotation error | 11 lines |
| 17.436 | Tue Oct 29 1996 06:51 | Wafers left on Pad | 16 lines |
| 17.460 | Tue Nov 19 1996 06:28 | Carrier 2 Rotation errors | 10 lines |
| 17.474 | Tue Dec 03 1996 07:23 | Carrier # 3 dropping wafers | 5 lines |
| 17.524 | Wed Feb 26 1997 07:18 | Inverter errors | 16 lines |
| 17.528 | Wed Mar 12 1997 05:20 | Load problem Carrier #2 | 17 lines |
| 17.536 | Wed Mar 26 1997 06:24 | Carrier #1 rotation error | 15 lines |
| 17.546 | Mon Apr 07 1997 08:31 | Wafer slipped out of carrier # 1 | 13 lines |
TOPIC | 18.0 | CMP.B1 PM CHECKSHEETS |
| 18.21 | Tue Feb 06 1996 05:01 | WW32 Weekly PM | 59 lines |
| 18.22 | Mon Feb 12 1996 00:47 | WW33 weekly PM | 66 lines |
| 18.24 | Mon Feb 26 1996 06:44 | WW35 Quarterly PM | 110 lines |
| 18.26 | Wed Mar 13 1996 01:08 | WW37 Weekly PM | 63 lines |
| 18.51 | Mon Aug 05 1996 04:13 | WW06 Weekly PM | 80 lines |
| 18.56 | Mon Sep 02 1996 02:50 | CPM.B1 SHUTDOWN CHECKSHEET | 30 lines |
| 18.61 | Sun Sep 29 1996 07:41 | WW14 Monthly PM | 152 lines |
| 18.83 | Mon Feb 17 1997 04:47 | WW34 Weekly PM completed | 107 lines |
TOPIC | 19.0 | CMP.B2 EE/PE PASSDOWNS |
| 19.83 | Sun Feb 04 1996 07:10 | Scrubber problem with B2 | 16 lines |
| 19.162 | Sun May 12 1996 07:50 | Crash on 2nd table (Cont.) | 14 lines |
| 19.241 | Tue Oct 01 1996 06:10 | Wafer break (lost slurry) | 31 lines |
| 19.257 | Sun Nov 03 1996 07:13 | Wafer break (Double Load) | 15 lines |
| 19.262 | Sun Nov 10 1996 20:57 | Wafer Loss Detection board | 5 lines |
| 19.278 | Tue Dec 24 1996 05:48 | Crash in Segment 10 (Lift-off) | 28 lines |
| 19.324 | Wed Mar 26 1997 06:25 | EOL for pads and carriers | 10 lines |
| 19.329 | Sun Apr 13 1997 08:49 | Dropped wafer from carrier #1 | 28 lines |
| 19.330 | Mon Apr 14 1997 08:40 | Some problems with B2 | 36 lines |
| 19.340 | Sun Apr 20 1997 08:39 | Crash on secondary table | 24 lines |
| 19.342 | Tue May 06 1997 07:40 | Carrier 2 problem | 18 lines |
| 19.346 | Sun May 25 1997 06:10 | Pad change | 7 lines |
| 19.348 | Wed Jun 04 1997 07:13 | Moisture sensor alarm | 13 lines |
TOPIC | 20.0 | CMP.B2 PM CHECKSHEETS |
| 20.10 | Wed Jan 31 1996 05:05 | WW31 Weekly PM | 61 lines |
| 20.15 | Mon Feb 26 1996 00:06 | WW35 Weekly PM | 66 lines |
| 20.50 | Mon Sep 02 1996 02:51 | CMP.B2 SHUTDOWN CHECKSHEET | 30 lines |
| 20.68 | Sun Dec 22 1996 06:04 | WW26 Weekly PM | 90 lines |
| 20.69 | Tue Dec 31 1996 02:17 | WW27 Weekly PM completed | 91 lines |
| 20.83 | Wed Mar 26 1997 06:27 | WW39 Weekly PM completed | 106 lines |
| 20.84 | Tue Apr 01 1997 02:20 | WW40 Weekly PM completed. | 105 lines |
| 20.90 | Wed May 14 1997 11:29 | Monthly PM completed | 189 lines |
TOPIC | 21.0 | CMP.B3 EE/PE PASSDOWNS |
| 21.82 | Tue Sep 24 1996 23:43 | Carrier crash on 2nd table 9/23 | 14 lines |
| 21.96 | Mon Oct 21 1996 05:39 | vac/particle problems | 11 lines |
| 21.102 | Wed Oct 23 1996 08:11 | Slurry pump 1 line broke | 9 lines |
| 21.110 | Sun Oct 27 1996 07:27 | Index table alingment | 9 lines |
| 21.166 | Wed Mar 12 1997 07:25 | inverter error | 13 lines |
| 21.177 | Tue Apr 01 1997 06:32 | Slurry Loss Detector broke | 9 lines |
| 21.195 | Mon Apr 21 1997 07:44 | Polish table belt and other problems | 33 lines |
| 21.200 | Mon May 05 1997 06:14 | Mapper errors | 14 lines |
TOPIC | 22.0 | CMP.B3 PM CHECKSHEETS |
| 22.16 | Mon Sep 02 1996 02:51 | CMP.B3 SHUTDOWN CHECKSHEET | 30 lines |
| 22.32 | Tue Dec 17 1996 05:14 | WW25 Weekly PM | 92 lines |
| 22.34 | Tue Dec 31 1996 02:19 | WW27 Weekly PM completed | 94 lines |
| 22.48 | Tue Apr 01 1997 05:24 | WW40 Weekly PM completed | 99 lines |
| 22.52 | Mon Apr 28 1997 03:33 | Weekly PM completed | 102 lines |
| 22.58 | Mon Jun 02 1997 22:49 | WW49 Weekly PM completed | 103 lines |
TOPIC | 23.0 | CMP.B4 EE/PE PASSDOWNS |
| 23.14 | Sun Jan 19 1997 07:07 | B4 problems during Marathon | 16 lines |
| 23.15 | Mon Jan 20 1997 07:26 | Marathon run | 15 lines |
| 23.31 | Tue Feb 25 1997 07:11 | Hose broke on Slurry Pump #1 | 11 lines |
| 23.49 | Sun Apr 13 1997 08:48 | Load station problems | 17 lines |
| 23.59 | Sun Apr 20 1997 08:40 | Failed MQC's for particles | 14 lines |
| 23.88 | Wed May 21 1997 07:30 | Slurry barrell replaced | 8 lines |
| 23.91 | Sun May 25 1997 00:55 | Slurry barrell | 5 lines |
TOPIC | 32.0 | CMP.B WAFER CRASH FORM |
| 32.3 | Tue Oct 01 1996 06:10 | Dummy wafer break | 31 lines |
TOPIC | 45.0 | CMP-SCRUB.A1 EE/PE PASSDOWNS |
| 45.134 | Mon Sep 02 1996 02:52 | CM-SCRUB.A1 SHUTDOWN CHECKSHEET | 20 lines |
| 45.167 | Sun Jan 19 1997 07:08 | Meagsonics sweep errors | 11 lines |
| 45.178 | Mon Apr 14 1997 08:41 | Wafer dropped by robot | 13 lines |
TOPIC | 46.0 | CMP-SCRUB.A1 PM CHECKSHEETS |
| 46.5 | Sun Nov 05 1995 23:08 | WW19 Semi-Annual PM | 87 lines |
| 46.11 | Tue Dec 19 1995 04:46 | WW25 WEEKLY PM | 27 lines |
| 46.13 | Tue Jan 02 1996 03:58 | WW27 WEEKLY PM | 30 lines |
| 46.26 | Sun Mar 24 1996 01:11 | WW39 Weekly PM | 26 lines |
| 46.31 | Mon Apr 29 1996 01:57 | WW44 Wekly PM | 30 lines |
| 46.38 | Wed Jun 05 1996 07:09 | WW49 Weekly PM | 26 lines |
| 46.41 | Mon Jun 24 1996 02:47 | WW52 Weekly PM | 28 lines |
| 46.46 | Wed Jul 17 1996 05:20 | ww03 weekly pm | 26 lines |
| 46.51 | Tue Aug 20 1996 00:04 | WW8 Weekly PM | 28 lines |
| 46.54 | Mon Sep 02 1996 02:55 | CMP-SCRUB.A1 SHUTDOWN CHECKSHEET | 20 lines |
| 46.58 | Sun Sep 22 1996 07:06 | WW13 Weekly PM | 29 lines |
| 46.75 | Mon Jan 13 1997 04:40 | WW29 Weekly PM | 31 lines |
| 46.76 | Sun Jan 19 1997 22:34 | WW30 Weekly PM Completed | 31 lines |
| 46.77 | Mon Jan 27 1997 21:59 | WW31 Weekly PM | 31 lines |
| 46.91 | Sun May 11 1997 00:45 | WW45 SEMI-ANNUAL COMPLETED | 100 lines |
| 46.93 | Tue May 20 1997 05:46 | WW47 Weekly PM completed | 32 lines |
TOPIC | 47.0 | CMP-SCRUB.A2 EE/PE PASSDOWNS |
| 47.94 | Sun Apr 14 1996 07:57 | Burnt out Quartz Lamp | 7 lines |
| 47.119 | Sun Sep 22 1996 07:40 | O.B. Tach problem | 6 lines |
| 47.151 | Mon Apr 14 1997 08:41 | Wafers dropped by robot | 23 lines |
| 47.152 | Sun Apr 27 1997 07:54 | Heat lamp blown | 9 lines |
| 47.158 | Sat May 17 1997 22:45 | WW46 Weekly PM completed | 39 lines |
TOPIC | 48.0 | CMP-SCRUB.A2 PM CHECKSHEETS |
| 48.12 | Mon Jan 01 1996 21:49 | WW27 Weekly PM | 29 lines |
| 48.18 | Sun Feb 11 1996 03:42 | WW33 Weekly PM | 26 lines |
| 48.20 | Mon Feb 26 1996 00:53 | WW35 Weekly PM | 25 lines |
| 48.24 | Sun Mar 24 1996 01:12 | WW39 Weekly PM | 26 lines |
| 48.25 | Tue Apr 02 1996 05:29 | WW40 Weekly PM | 27 lines |
| 48.26 | Mon Apr 08 1996 04:12 | WW41 Weekly PM | 27 lines |
| 48.44 | Wed Jul 17 1996 05:22 | ww03 weekly pm | 25 lines |
| 48.47 | Mon Aug 05 1996 04:40 | WW06 Weekly PM | 25 lines |
| 48.49 | Tue Aug 20 1996 00:19 | WW08 Weekly PM | 26 lines |
| 48.51 | Mon Sep 02 1996 02:56 | CMP-SCRUB.A2 SHUTDOWN CHECKSHEET | 20 lines |
| 48.69 | Mon Dec 23 1996 00:59 | WW26 Weekly PM | 29 lines |
| 48.74 | Sun Jan 19 1997 22:35 | WW30 Weeklu PM completed | 34 lines |
| 48.87 | Mon Apr 21 1997 07:45 | Weekly PM completed | 36 lines |
| 48.92 | Mon May 19 1997 22:12 | WW46 Weekly PM | 39 lines |
| 48.93 | Tue May 20 1997 04:57 | WW47 Weekly PM completed | 38 lines |
TOPIC | 49.0 | CMP-SCRUB.A3 EE/PE PASSDOWNS |
| 49.10 | Tue Aug 20 1996 08:01 | Lifter problem | 15 lines |
| 49.57 | Mon Apr 14 1997 08:42 | Wafers dropped by robot | 20 lines |
| 49.59 | Tue Apr 15 1997 07:21 | Blown fuse/heat lamp | 18 lines |
| 49.60 | Sun Apr 20 1997 08:42 | Mega-sonig home problem | 7 lines |
| 49.67 | Sat May 03 1997 23:41 | Robot wrist problems (C Shift) | 17 lines |
| 49.77 | Tue May 20 1997 00:39 | Lifter blade problem | 8 lines |
| 49.79 | Tue May 20 1997 22:38 | Work done by OnTrak rep | 31 lines |
TOPIC | 50.0 | CMP-SCRUB.A3 PM CHECKSHEETS |
| 50.5 | Mon Aug 05 1996 05:10 | WW06 Weekly PM | 25 lines |
| 50.9 | Mon Sep 02 1996 02:57 | CMP-SCRUB.A3 SHUTDOWN CHECKSHEET | 20 lines |
| 50.32 | Mon Jan 20 1997 21:41 | WW30 WEEKLY PM COMPLETED | 33 lines |
| 50.33 | Wed Jan 29 1997 07:12 | WW31 Weekly PM | 37 lines |
TOPIC | 55.0 | CMP-SCRUB.C1 PM CHECKSHEETS |
| 55.3 | Mon Sep 02 1996 02:57 | CMP-SCRUB.C1-7 SHUTDOWN CHECKSHEET | 20 lines |
| 55.36 | Tue Apr 01 1997 02:22 | WW40 Weekly PM Completed | 32 lines |
TOPIC | 61.0 | GENERAL CMP ISSUES |
| 61.82 | Tue Apr 01 1997 06:13 | Status of tools in CMP 4-1-97 | 31 lines |
TOPIC | 77.0 | IN-COMPLETE PMs |
| 77.1 | Mon Feb 03 1997 04:54 | INCOMPLETE MONTHLY PM CHECKSHEET FOR CMP.B2 | 157 lines |
| 77.5 | Sun Mar 09 1997 07:19 | CMP.B3 Incomplete Monthly PM | 187 lines |