TOPIC | 3.0 | CONDITIONER CHANGE DATA |
| 3.1 | Wed Nov 15 1995 17:48 | Disk change | 3 lines |
TOPIC | 5.0 | CMP.A1 EE/PE PASSDOWNS |
| 5.365 | Sun Apr 06 1997 20:48 | rotory unions | 18 lines |
TOPIC | 7.0 | CMP.A2 EE/PE PASSDOWNS |
| 7.108 | Tue Dec 12 1995 19:28 | | 7 lines |
| 7.175 | Tue Apr 30 1996 20:35 | vac sensor | 10 lines |
| 7.303 | Mon Jan 20 1997 19:18 | wafer detect | 7 lines |
| 7.312 | Wed Jan 29 1997 19:44 | ex | 7 lines |
| 7.342 | Mon Mar 10 1997 19:19 | carrier orings | 5 lines |
TOPIC | 17.0 | CMP.B1 EE/PE PASSDOWNS |
| 17.123 | Tue Dec 12 1995 19:26 | passdown | 9 lines |
| 17.232 | Tue Mar 26 1996 19:45 | transducer installed | 14 lines |
| 17.361 | Wed Sep 11 1996 20:40 | condtioner repaired | 20 lines |
| 17.450 | Mon Nov 04 1996 19:14 | reload of 493C software | 19 lines |
| 17.463 | Wed Nov 20 1996 19:36 | test motor installed/ deinstalled | 11 lines |
TOPIC | 19.0 | CMP.B2 EE/PE PASSDOWNS |
| 19.12 | Tue Nov 14 1995 19:33 | install update | 84 lines |
| 19.29 | Tue Dec 12 1995 19:25 | passdown | 9 lines |
| 19.202 | Mon Jul 01 1996 20:44 | Wafer crash | 8 lines |
| 19.290 | Sun Jan 05 1997 19:30 | vac check valve | 11 lines |
| 19.296 | Wed Jan 15 1997 19:50 | chiller setpoint | 10 lines |
| 19.347 | Mon Jun 02 1997 20:30 | overtravel | 20 lines |
TOPIC | 37.0 | CMP.C1-7 EE/PE PASSDOWNS |
| 37.397 | Tue Jan 07 1997 19:19 | final table padconditioner installed | 11 lines |
| 37.403 | Mon Jan 27 1997 19:38 | temp problem /leak | 19 lines |
| 37.404 | Tue Jan 28 1997 18:48 | temp problem | 43 lines |
TOPIC | 54.0 | CMP-SCRUB.C1 EE/PE PASSDOWNS |
| 54.12 | Tue Mar 25 1997 19:40 | ob brush | 15 lines |