| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 5.95 | down force | FABSIX::B_FINN | | Tue Nov 07 1995 19:37 | 13 |
|
Ops requested that we check down force on CMP.A1.. Found it to be way
out due to E-P transducers being out of cal. Calibrated transducers first then
calibrated down force for both spindles. Both came in within two passes. Both
are well under 1%
System is in MQC with new pad.
A shift
|
| 5.96 | High Table amps, wafers slidding out | FABSIX::R_GEE | | Wed Nov 08 1995 07:02 | 30 |
| * After the system had been idle for sometime breakin wafers
were run. On the second set of two a wafer slid out from under
the left carrier. The system was EMO'ed before it crashed.
System status at the time:
- 24 wafers on the pad (2 suba IV, 1 IC1000)
- 112 wafers on the carriers. (Exposure .0065 & .0070)checked.
- Table amps at the time spiked to 53 amps.
- Checked slurry flow, it was good.
- Down force was 313 lbs
- Slurry flow set at 417 ml/min
- 20 sec into a 180 sec polish.
- Back pressure 14.8
- Believe the wafers to be oxide monitors.
Tried to run a second time following the break-in procedure.
- 2 wafers at 200 down force = spike of 20 amps
- 2 wafers at 250 down force = spike of 26 amps
- 2 wafers at 313 down force = spike of 47 amps
The wafers on the right carrier slid out , the system was
EMO'ed before it could crash. The system is now unschedule
down.
B shift
|
| 5.97 | down force | SUBPAC::LANDRY | | Wed Nov 08 1995 19:21 | 13 |
| Came in this morning to the system spittin' wafers from the left
spindle. Tried running the system to repeat the feat, and yes it
did, left carrier again. EMO'd in time to save the pad/carriers.
Upon examination, found several small slices of film had come loose
from the carrier. Swapped the carriers and the wafer slipped out again
on the same carrier (now on the right). Changed the carrier but the
problem remained. Checked the E-P regulator pressures and they were
off on both spindles. Brought them in and reperformed the down force
calibration. Completed, and AGAIN its under 1%. Currently changing
the pad.
jim,doc,kyle,john_p. Brendan
|
| 5.98 | Table stall-outs | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 09 1995 08:22 | 8 |
|
After countless table stalls and many wafer slide outs,
we up'ed the slurry flow on pump #1 in Step #2 from 417 ml/min
to 500 ml/min. The pad break-in and MQC's were perfect. No
stall outs and no wafer slide outs.
D shift
|
| 5.99 | A1 INSTALLATION AND FIT-UP | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:13 | 220 |
| Monday Installation Update...........
There wasn't much activity today. I got with the contractors (KSI &
NEVCO) and clarified a couple of questions they had concerning plumb-
ing (DI & GCW) and slurry supply and return. Also, since the systems
had moved a little due to the pedistal installation, they wanted to
reverify with me where they could and could not run the hookups.
They are in the process of running pipe under the floor at this time.
Not much to see! There was no other activity with this system today.
Doc
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Note 55.2 CMP.A1 2 of 356
SUBPAC::LANDRY 8 lines 7-JUN-1994 15:53
-< 6/7 Update >-
--------------------------------------------------------------------------------
Today, KSI hooked up the two GCW drains to the system. The also
hooked up the GCW drain on the vacuum cabinet resevoir. Both of these
tasks required substantial installation work under the floor (running
headers and sticks). Don't be alarmed as you look through the raised
floor and notice some water, they had to cut into an existing line that
contained some water.
Doc
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Note 55.3 CMP.A1 3 of 356
SUBPAC::LANDRY 18 lines 9-JUN-1994 15:40
-< 6/9 Update >-
--------------------------------------------------------------------------------
Today, KSI has the main system and vacuum cabinet drain lines under
pressure testing. Alls well so far!
KSI had a question concerning the slurry supply and return line hookup.
They were under the assumption that the incoming and outgoing lines
needed to be double contained plumbing. After confering with George
Hynes and Tom Richards, it was determined that the lines would NOT have
to be double containment. This will help this portion of the install
go alot quicker. The double contained wall would have housed a supply
and a return line within each of the two pump hookups. They would have
had to fabricate a manifold between the slurry valves and the valve
manifold box to separate the two prior to entering/exiting the VMB's in
order to maintain double containment integrity.
Also, the electricians are beginning to address what is needed on the
system. Some conduit has been run (minus the wires).
Doc
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Note 55.4 CMP.A1 4 of 356
SUBPAC::LANDRY 18 lines 16-JUN-1994 15:49
-< 6/16 Update >-
--------------------------------------------------------------------------------
Installation status:
The electrical hookup is complete.
The GCW drains have been leak/pressure checked to satisfaction. The
lines were then connected up to the main system.
The TCU installation has begun. There is a rack mounted that houses
the incoming/outgoing process cooling lines. They still need to be
tied into the TCU. Also, need the hookup from the TCU to the main
system to be performed. The electrical hookup is complete.
The vacuum cabinet has the GCW drain hooked up. The electrical is also
complete. Waiting for the CDA hookup to be performed.
No slurry hook ups have been performed as of yet.
Doc
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Note 55.5 CMP.A1 5 of 356
SUBPAC::LANDRY 15 lines 24-JUN-1994 14:05
-< 6/24 Installation Update >-
--------------------------------------------------------------------------------
KSI personnel ran and hooked up the slurry lines on the system today.
The lines are a single PVA hook up (NO secondary containment plumbing
is required). The lines are supported by a unistrut rack.
KSI also is making good progress with the GCW drains. The main system
hookup is COMPLETE! The vacuum cabinet drains are COMPLETE as well!
Plumbing work for the TCU is on-going.
The system still needs the following hook ups:
CDA, UHP DI, Cooling water in/out, vacuum cabinet tied into the
main system, vacuum cabinet CDA, ALL TCU plumbing requirements.
Doc
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Note 55.6 CMP.A1 6 of 356
SUBPAC::TOOKER 37 lines 8-JUL-1994 10:59
-< Hook-Up Status for 7/8/94 >-
--------------------------------------------------------------------------------
CMP.A1 Tool Hook-Up Status For 7/8/94
COMPLETED ITEMS:
----------------
* Bulkhead
* DI Water connection except for pressure gauge.
* All GCW drain connections
* Eelectrical connections
* NESLAB TCU soft water, process cooling water, and drain
connections
* Slurry line from valve manifold box to system
OPEN ITEMS:
-----------
* DI Water pressure gauge
* DI water return line final connection
* CDA final connection to main system and vacuum cabinet
* N2 final connection
* All exhaust work
* HEPA filter connection
* Slurry valve manifold box valve work
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Note 55.11 CMP.A1 11 of 356
ASDG::POIRIER 64 lines 4-AUG-1994 20:51
-< CMP.A1 Mech Accept >-
--------------------------------------------------------------------------------
Power, vacuum, CDA and D.I. water have all been supplied to the tool.
The D.I. water pressure is still too low. Its currently at 25 p.s.i.
up from 15 p.s.i. yesterday but still not at the required 40 p.s.i.
There is currently no slurry available. We're hoping the slurry system
will be operational by next Tuesday for the planned 500 wafer run.
If not, then we will perform the 500 wafer run with water only. The
limitation of doing this is "touching down" on the polishing pad
momentarily instead of oscillating on the pad.
Here is a highlight of some of the work completed thus far on CMP.A1
* The table, spindles and chucks have been indicated and adjusted to the
proper specifications.
* The shuttle has been leveled and adjusted in both the forward and
rear positions.
* The shuttle speed has been adjusted.
* The shuttle hard stop positions have been adjusted.
* The load stations and cleaning stations have been set to the proper
positions.
* Calibration values have been set for Table Min Pressure, Spindle Down
Soft and Spindle Down Hard.
Plans for tomorrow:
* Adjust spindle down force.
* Adjust conditioner down force.
* Calibrate slurry PH meters.
* Calibrate robot positions.
* Calibrate Elevator positions.
* Install elevator tubs.
* Cycle machine.
Problems:
* The load cell that was shipped with the machine doesn't work. The rep
went to Conn. tonight to get another one.
* Some of the poly welds cracked during shippment.
* Rust was discovered in the weldment area.
* The Thompson bar way bearings that support the robot are noisy.
* The lead screw bearing on SEND elevator #2 is binding.
*
|
| 5.2 | SPINDLE AIR CYLINDER REPLACED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:15 | 33 |
|
* The left spindle air cylinder was replaced today. The reason was that
the spindle would not retract the last 1/4 " of its travel. The
cylinder replacement required us to recalibrate the spindle down force
as well.
* The conditioning arm assembly was reinstalled after the replacement
of the mounting shaft. This shaft suffered broken a weld last
Thursday. All adjustments and locations were set today.
* We opened the valve in the slurry valve box and slurry is now flowing
in the tool. The slurry flow rate was also calibrated today.
* The send and recieve elevators were recalibrated. This was done
because the wafers were dragging out of slots # 23, 24 & 25.
Since we are mounting the cassettes H-BAR up, I'm not sure if were
referencing from a surface on the cassette that is held to tight
tolerences. Also, since the problem seems to come and go, I'm not
confident that the cassettes are uniform to each other. I'll take a
look at the Empak print when I get a chance.
Plans for tomorrow:
-------------------
1) Change polishing pad.
2) Install latest rev software.
3) Start setting up CMP.A2.
F.Y.I.:
------
A new phone has been installed in the CMP service bay, the # is 5804.
|
| 5.3 | PCW LEAK AT TABLE ROTARY UNION | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:18 | 22 |
| ASDG::POIRIER 19 lines 6-SEP-1994 23:38
-< PCW leak >-
--------------------------------------------------------------------------------
* A large puddle of PCW was discovered on the floor under CMP.A1 at
4:30 this afternoon. Tim, Brian and myself, flashlights in hand,
found the cause to be a loose hose clamp on the hose leading to the
rotory union. I tightened the clamp and the leak stopped. While I was
under the tool, I tightened the rest of the hose clamps on hoses that
were flowing PCW. Most of them were fairly loose.
Brian brought out some spill pillows and we cleaned-up the spill on
the floor. I also cleaned-up the inside of the base. Any water in
the base will be from another source.
* I also noticed a slight PCW leak from the fitting on the bottom of the
rotory union. I left the PCW valve off until we repair the fitting.
* The system was left in WET IDLE mode.
J.P.
|
| 5.4 | CONDITIONER EXCESSIVE PLAY | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:18 | 17 |
| ASDG::POIRIER 14 lines 25-AUG-1994 23:43
-< Conditioner Performance >-
--------------------------------------------------------------------------------
The cylinder assembly that moves the conditioning arm had quite
a lot of play. I removed the assembly, disassembled it and tightened
the lock nut on the end of the lead screw. It was reassembled and a
test run was performed. The conditioning disk seems to have less
oscillation the it did this afternoon. I'm concerned that yesterdays
crash may have degraded the performance of this assembly although
the Strasbaugh rep claims that the larger conditioning disk is
responsible. Its easy enough to prove, lets swap disks and see what
happens.
Please note that the down force was reduced to 50 and the polish time
to 2 seconds for my test run.
|
| 5.5 | CONDITIONER ADJUSTMENTS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:19 | 32 |
| -< Conditioning arm issues >-
--------------------------------------------------------------------------------
* The new base stiffening bracket was tested today under process
conditions,(20 lbs of down force). The conditioning arm osculation
was greatly reduced and the base did not flex. Any remaining movement
in the arm is due to the design of the conditioning arm mechanisim.
* The strasbaugh rep also readjusted the rotating sleave in the
conditioning arm mechanisim. This sleave did not have enough
stock milled out of it and thus provides minimal clearance for the
socket head cap screws that slide inside the sleave. When the screw
heads contact the sides of the sleave, a hesitation is induced into
the vertical motion of the conditioning arm. Larry is working this
issue with Strasbaugh.
* The Strasbaugh rep drilled and tapped 10-32 holes into 2 carriers and
installed the new check valves. He ran a test run with only the
center ten carrier ports open and was able to lift off the pad
without loosing a wafer. It appears that the new check valves will
solve the lift off problems we've been experiencing with the carrier
ports open in the center ten configuration.
* The Strasbaugh rep brought an issue to my attention tonight. One
the carrier backing plates was damaged by what appear to be hammer
marks. The carriers are machined to tight specifications and are
very expensive. Please handle them with extreme care.
John.
|
| 5.6 | TCU FLOW AND ADJUSTMENTS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:20 | 22 |
| SUBPAC::LANDRY 19 lines 9-SEP-1994 17:14
-< The TCU issue has been whipped! >-
--------------------------------------------------------------------------------
Chiller Update:
* The plumbing swap was performed yesterday.
* Glycol was procured and poured into the chiller.
* Eric Ronnebaum worked on the rotary joint and it's solenoid for
liquid flow. Found the connectors on the wires for the solenoid
to be a problem. They came from the factory crimped over the
wire insulation. The valve was working intermittenly. This is
attributed to the vibration in the area making/breaking contact.
* Check for leaks after the work was performed. All looks fine!
* The chiller has been shut down for the weekend and the valves that
pertain to this plumbing loop have been shut off (both at the system
and at the TCU).
Doc
|
| 5.7 | CONDITIONER DOWNFORCE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:21 | 11 |
| ASDG::POIRIER 8 lines 13-OCT-1994 23:37
-< Inconsistant conditioner down force >-
--------------------------------------------------------------------------------
* Eric noticed that the conditioner downforce is not constant. He
checked the amplifier and found noise on the line. He's going to
check the shielded cable for proper grounding. He is also going to
look at the routing of the cable for a possible source of the
interference.
John.
|
| 5.8 | CONDITIONER GROUNDING NOISE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:22 | 11 |
| ASDG::POIRIER 8 lines 18-OCT-1994 00:15
-< Conditioner arm control cable. >-
--------------------------------------------------------------------------------
* The Strasbaugh rep re-routed the shielded cable for the conditioner
arm. He put a scope on the line and the noise was not present.
It appears that the cable was routed too close to the servo motors.
John.
|
| 5.9 | LOW VACUUM ON CARRIERS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:23 | 12 |
| ASDG::POIRIER 19 lines 26-OCT-1994 00:10
-< Vacuum errors >-
--------------------------------------------------------------------------------
* The system went down for low vacuum on the carriers. We unloaded the
carriers, removed the spindle chucks and measured the vacuum at the
bottom of the spindles. The vacuum was good on both spindles. We then
replaced the spiindle chucks and took a look at the o-rings. The
inner most ring was compressed below the surface of the chuck. I
swapped the inner most ring on both spindles with the rings from A2
and the vacuum error was corrected.
|
| 5.10 | DI WATER LINES VIBRATING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:24 | 19 |
| ASDG::POIRIER 16 lines 7-NOV-1994 23:41
-< 2nd shift passdown >-
--------------------------------------------------------------------------------
* The D.I. water valves are still chattering on both A1 & A2. Eric
wants to check the routing of all the tubing going into and out of
the valve manifold tomorrow.
* Eric called Strasbaugh and ordered 2 new valves that will be used
to control D.I. water flow to the conditioner park station dishes.
The valves will control flow to the conditioning disk rinse lines
that Jim and I are adding to the park stations on A1 & A2..
* Eric is planning to add a D.I. water valve in line with the
conditioner park station water supply line. This should eliminate
the siphoning problem we've been experiencing during WET IDLE mode.
John.
|
| 5.11 | CONDITIONER ARM WOULDN'T GO UP | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:24 | 16 |
| ASDG::POIRIER 13 lines 9-NOV-1994 23:40
-< conditioner assembly micro-switch problem >-
--------------------------------------------------------------------------------
* The system went down for a conditioning arm problem around 7:00 p.m.
The arm would move to the UP position and lock up during the
initialization sequence. The problem was with the conditioner
micro-switch. I readjusted the switch and the problem went away.
I'm not sure why the adjustment changed, maybe the switch arm
loosened up and moved a little bit.
* The system was wiped down and the slurry lines were flushed at the
end of the shift.
John.
|
| 5.12 | ELEVATOR WOULDN'T MOVE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:25 | 16 |
| ASDG::POIRIER 13 lines 18-NOV-1994 23:17
-< Elevator problems >-
--------------------------------------------------------------------------------
* Brian and I removed the elevator assembly on SEND ELEVATOR #1. A
partially disconnected electrical connector was discovered under the
elevator servo encoder. The connector was repositioned and the
problem disappeared.
FYI: I noticed some corrosion starting to form on the terminal block
connections on the elevator assembly. Its probably caused from
the nasty environment of D.I. water and slurry that was all
over everything. I wish Strasbaugh used connectors designed
for this type of environment.
John.
|
| 5.13 | LOW SLURRY FLOW | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:26 | 25 |
| SUBPAC::LANDRY 22 lines 10-DEC-1994 16:07
-< The housing was jammed up and jelly tight! >-
--------------------------------------------------------------------------------
There was a problem today with the slurry flow. The day started
off with a low flow situation and progressively got worse until it
stopped flowing altogether. Led by Jim Tooker, the EE grouped jumped
into action! It was observed that the pressure gauge on the slurry
loop was reading nil (0). Ashland was contacted and they investigated
on their end. All was fine at the distribution unit. Back to EE's
court. We noticed that the Speedfam flow was adequate. Hhhmmm, must
be an air leak or flow restriction on the system alone. Sure enough,
the filter was discovered to be "caked" with a jelly-ous substance,
which turned out to be slurry transforming into cement. Both filters
were removed from the system and the flow was checked. Voila, nice
flow.
The state of the filter housings is as such: Both are empty, due to we
currently have no replacement for the 10 micron filter at this time.
Therefore, the smaller micron filter would have clogged real quick so
it had to be removed as well. Bobby will put the system in a state
of warning until this situation is rectified.
EE
|
| 5.14 | ELEVATOR PULLEYS REPLACED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:27 | 15 |
| ASDG::POIRIER 12 lines 13-DEC-1994 00:03
-< 2ND SHIFT PASSDOWN >-
--------------------------------------------------------------------------------
* WE RECALIBRATED THE SLURRY FLOW RATES ON BOTH SLURRY PUMPS.
* WE REMOVED BOTH (SEND) ELEVATORS ASSEMBLIES TONIGHT.THE
PLASTIC PULLEYS WERE REPLACED WITH THE NEW ALUMIMUM STYLE
PULLEYS THAT STRASBAUGH SENT US A FEW WEEKS AGO.
THE ELEVATORS WERE DISASSEMBLED, CLEANED AND RELUBRICATED.
THEY WERE REINSTALLED INTO THE TOOL AND RELEVELED. A TEST RUN
WAS COMPLETED WITH NO HANDLING ERRORS.
JOHN & BOB.
|
| 5.15 | ROBOT BINDING UP | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:27 | 13 |
| PATE::GEE 10 lines 11-DEC-1994 00:31
-< robot >-
--------------------------------------------------------------------------------
* Removed robot, robot slide rails, and ball screw. Disassembled
and cleaned the slide rail assembly. Replaced the pillow block
bushings with the new ball bearing style. Reassembled and reinstalled
entire assemble. Ran a test run with no handling problems.
The Pillow block bushings were caked up with dryed Apieson grease.
John and Bob
|
| 5.16 | ROBOT SENSORS REPLACED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:27 | 8 |
| ASDG::POIRIER 5 lines 15-DEC-1994 00:06
-< 2nd shift passdown >-
--------------------------------------------------------------------------------
* The Strasbaugh rep replaced the robot (lower arm) home sensor.
He also replaced the robot servo encoder connectors.
John & Bob.
|
| 5.17 | ROBOT COMMUNICATION PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:28 | 10 |
| SUBPAC::LANDRY 7 lines 14-DEC-1994 21:13
-< The robot is coming along >-
--------------------------------------------------------------------------------
Today, Eric Ronnebaum arrived to address the infamous robot perils.
He had special connectors/pins shipped in to try and fix the less than
acceptable configuration that exists. The robot is working fine now
and Eric is finishing up tweaking calibration adjustments on the robot
to elevator workings.
Doc
|
| 5.18 | CONDITIONER ACTUATOR ALL LOOSE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:29 | 19 |
| ASDG::POIRIER 16 lines 16-DEC-1994 00:15
-< 2nd shift passdown. >-
--------------------------------------------------------------------------------
* Disassembled conditioning arm actuator and tightened rack assembly.
The backlash in the actuator has been increasing over the last few
weeks. Strasbaugh has agreed to send us their new anti-backlash
actuators for both tools.
* We replaced the right spindle rotory union. It had developed a leak.
Strasbaugh is now using an upgraded version rotory union, they are
sending us 4 new ones next week.
* We realigned both left and right spindle hubs tonight. The right hub
was out of alignment by .010" and the left by .030". They both are
now less than .001".
John & Bob.
|
| 5.19 | BRUSHES WEREN'T SPINNING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:56 | 10 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 7 lines 20-DEC-1994 08:15
-< Passdown for 12/20 >-
--------------------------------------------------------------------------------
The brushes weren't spinning on the wafer scrub station.
I found the mounting piece on the brush to be mounted
upside down. I flipped it around and the brushes fuctioned
properly.
BJ
|
| 5.20 | ROBOT AND SHUTTLE TRAVEL PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:56 | 11 |
| SUBPAC::LANDRY 13 lines 20-DEC-1994 17:06
-< slimy work, but it had to be done! >-
--------------------------------------------------------------------------------
Lots of fun here today..........
* Started off the shift with the robot not moving it's fuul sweep.
Cleaned and lubricated the rails. Working fine, for now.
* A half hour later, the shuttle movement was unacceptable. So, I
cleaned and lubricated those rails as well.
|
| 5.21 | PARTICLES | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:57 | 10 |
| ASDG::POIRIER 12 lines 21-DEC-1994 00:12
-< Particle problem resolved >-
--------------------------------------------------------------------------------
* Particle problem turned out to be contaminated load stations. This
condition was brought on by yesterday's wafer breakage. The
contamination was carried over from the pad to the load stations
by the carriers. The load stations were cleaned by first shift and
the MQC's were in spec. (600 particles)
|
| 5.22 | SLURRY FLOW PROBLEM | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:57 | 17 |
| SUBPAC::LANDRY 14 lines 2-JAN-1995 15:30
-< much like my post holiday head, it was clogged! >-
--------------------------------------------------------------------------------
* Slurry flow problem:
- Found filter to be clogged. This was the original filter
that was removed from the system prior to Christmas shut
down. The filter had it's ports capped off, hence retaining
moisture in the filter core. We attempted to re-install it
but it proved to be an unsuccessfull endeavor. The last in-
house filter was installed and flow performance was verified.
- Performed a slurry flow calibration check after the new filter
was installed. NO adjustments were necessary for either pump.
Doc
|
| 5.23 | ROBOT ARMS, POSITIONING PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:58 | 15 |
| SUBPAC::LANDRY 12 lines 5-JAN-1995 16:59
-< it ain't broke, but it is dislocated! >-
--------------------------------------------------------------------------------
The robot home position went out of kilter somehow. It happened as
the arm was heading in to take a wafer from the load cassette. The
top arm was noticeably off by an good inch or two. WE mechanically
moved the top arm to line up over the top arm, then referenced it.
It is picking up and depositing down the wafer as should.
We're not totally sure how the arm could have shifted as the top arm
retaining collar appeared to be tight enough to hold it in place.
Also, once the arm is "hit", it loses it's torque. We should probably
keep an close eye on this.
1st shifters
|
| 5.24 | CONDITIONER ARM ACTUATOR BACKLASH | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 02:58 | 8 |
| SUBPAC::LANDRY 6 lines 10-JAN-1995 17:36
--------------------------------------------------------------------------------
The condition had some excessive backlash this morning. Brian, Jim
and myself removed the conditioner motor and tightened up the "spacely"
sprocket. Backlash has been reduce, but will be re-done for better
performance once time is alotted.
1st shift & BJ
|
| 5.25 | LOAD JET SPRAY NOT COMING ON | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:01 | 22 |
| SUBPAC::BJUBINVILLE "IT'S HOCKEY TIME!!" 19 lines 18-JAN-1995 09:12
-< 3RD SHIFT PASSDOWN FOR 1/18 >-
--------------------------------------------------------------------------------
The right load spray jet was not coming on during the
polish cycle. The problem was experienced before with the
service rep and he had concluded it was just a sticky solenoid.
The problem was traced to a wire that came out of its socket
inside of the solenoid head. It has also been noted that the
solenoid is suppose to be mounted to its panel but an unseen
aggressor thought smacking it would free up the valve. It's
not going anywhere but I'll look into replacing the valve tonight.
BJ
|
| 5.26 | ELEVATOR MOTOR PULLEYS REPLACED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:01 | 16 |
| ASDG::POIRIER 14 lines 20-JAN-1995 23:35
-< Weekly P.M. - Elevator Pulleys - Park Station Bowl >-
--------------------------------------------------------------------------------
* The plastic servo motor pulleys on both Recieve Elevators were
replaced with the new aluminum type that Strasbaugh sent us.
This completes the change over of all eight elevators on both
Strasbaugh polishers.
* A new D.I. line was tapped into the incomming D.I. supply line to
provide water to the conditioner park station bowl during wet idle mode.
John, Bob & Jim M.
|
| 5.27 | SPINDLE ALWAYS DETECTING VACUUM | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:02 | 23 |
| SUBPAC::BJUBINVILLE "IT'S HOCKEY TIME!!" 20 lines 25-JAN-1995 09:24
-< Problems with the left spindle vacuum >-
--------------------------------------------------------------------------------
The left spindle was always detecting vacuum. A few
checks were done narrowing it down to the vacuum switch.
After speaking with John P. on the phone, it was confirmed.
We don't stock this item (we will now) so it had to be pulled
off of CMP.A2 which is down. The switch was installed on A1
and tested out ok. Doc is getting the ball rolling on getting
a new switch in here ASAP. A SID sheet will also be in the works.
We can't get anyone of the phone from Strasbaugh right now so we'll
have to wait until 10am or so.
CMP'er
|
| 5.28 | RIGHT SEND ELEVATOR NOT HOMING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:04 | 20 |
| SUBPAC::BJUBINVILLE "IT'S HOCKEY TIME!!" 17 lines 26-JAN-1995 09:26
-< vacuum and board problems >-
--------------------------------------------------------------------------------
The right send elevator wasn't homing or going where it
was suppose to go. We traced it back to the computer, board #6.
A2 was having all kinds of left spindle vacuum problems so a
decision was made to take Board #5 out of A2 (all of the elevator
driver cards are the same so it didn't matter which one we swapped
out). We also swapped back the vacuum sensor and brushes to get a
full machine running. It is now in MQC.
Bob, Doc and BJ
|
| 5.29 | BOOT-UP PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:06 | 24 |
| SUBPAC::LANDRY 32 lines 26-JAN-1995 16:54
-< Should have spec'd a Digital PC!!! >-
--------------------------------------------------------------------------------
Today........
Bj and I had done some component swapping (driver board, brushes and a
pressure transducer) to bring this system back up. Both systems (a1 &
a2) were down for multiple reasons. There was only one set of brushes
so they had to go on the system we brought up. No driver boards were
in stock, so again, the set of good driver boards were installed. Same
thing with the pressure transducer (status of these component orders
can be found at the end of this note). After configuring this system,
we tested out and all was fine. We powered down to button up the
covers, then re-powered up the system and initialized. All looked
good, we thought. The system started coming up with multiple erronious
error messages. Took the cover off the computer and rebooted. Every-
thing was back to normal. ^$*$#% IBM computers! We are strongly
beginning to think this beast is causing most of our recent problems.
Trouble last week with it affecting the conditioner arm and polish
table! We have to keep an eye on the cover putting tension on the
boards/connectors. The system ran without problem from 10:00 AM to
the present, except for minor MQC happenings, which a change of
carriers should fix.
|
| 5.30 | ROBOT TRAVEL VIBRATION | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:14 | 15 |
| SUBPAC::LANDRY 12 lines 31-JAN-1995 15:15
-< Sha, sha, sha, sha, sha, shakin'! >-
--------------------------------------------------------------------------------
Unacceptable robot travel......not only was it not making it's
destination, it was shaken' profoundly as it approached the elevators.
Upon eagle eye examination, it was discovered that the bellows that
protects the rails from moisture, was the culprit. A couple of bellows
"fins" were lodged under the robot housing. I believe it was actually
contacting the bearings that "ride the rail". Gently yanked the fins
out, repositioned the bellows and tested travel. Hhhmmmm, not to bad!
But, a tad bit of relubrication was added and it is now "much better
than new".
Doc
|
| 5.31 | NO VACUUM AT SPINDLE ERROR | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:15 | 14 |
| SUBPAC::LANDRY 11 lines 27-JAN-1995 17:03
-< A vacuum problem, how surprizing!!! >-
--------------------------------------------------------------------------------
Well, the system had a vacuum problem mid-morning. The right
spindle had the problem. No, it wasn't a pressure switch this time.
No, it wasn't o-rings. Hmmm, let me dig into the past and use the
ancient art of ATS (analyticle trouble shooting). Yes, that world
renown trouble shooting technique came in good use. Well, without
getting to deep, the problem turned out to be a leak in the filter
housing. The leak was repaired and manufacturing commenced!
Doc
|
| 5.32 | CONDITIONING ARM NOT FUNCTIONING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:16 | 29 |
| ASDG::POIRIER 26 lines 2-FEB-1995 23:39
-< Conditioning Arm not functioning/Low Spindle vacuuum >-
--------------------------------------------------------------------------------
* Problem: Conditioning arm not functioning during Manual or Auto
Polish cycles.
Cause: The "conditioning cycles" parameter in the Pad/Condition
menu was set to zero.
Acton: Entered a 1 for the conditioning cycles parameter and
ran a few pad conditioning cycles. System performed normally.
---------------------------------------------------------------------------
Problem: Right Spindle vacuum too low.
Cause: The vacuum tubing inside the right Carrier was disconnected
at the check valve.
Action: The Carrier was removed from the Right Spindle and
disassembled. The vacuum tubing was reconnected and the
Carrier was reassembled and mounted on the Right Spindle.
The Right Spindle now maintains proper vacuum.
John & Bob.
|
| 5.33 | COMPUTER BUGS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:16 | 18 |
| SUBPAC::BJUBINVILLE "IT'S HOCKEY TIME!!" 15 lines 2-FEB-1995 10:00
-< Passdown for 2/2 >-
--------------------------------------------------------------------------------
The robot wasn't going to where it was suppose to
when it was told to go to the load cups. It never errored
out nor was it binding up. After referencing the axis',
it started to run ok. Later in the morning, the left spindle
didn't to turn when told. The machine was once again powered
down. It looks like the computer is starting to play games
with us. Please keep an eye on it.
We lost slurry tonight due to the Solvent Exhaust dump on 2nd.
It shutdown the slurry pumps including the power to drive our
warning lights.
BJ
|
| 5.34 | ROBOT NOT PICKING UP WAFERS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:17 | 19 |
| SUBPAC::BJUBINVILLE "IT'S HOCKEY TIME!!" 16 lines 13-FEB-1995 06:35
-< ROBOT not picking up from LOAD or SEND >-
--------------------------------------------------------------------------------
The robot tried once to pick up the wafer from the
left load cup and stopped. The machine never went into
alarm. It just sat there, Upon discovery, it wasn't
coming down enough to get the wafer. All of the robot
positions were referenced but the problem existed. It
was also noted that the robot wasn't picking up wafers
properly at the SEND station. The Cal. variables for
the robot Z-height at SEND and LOAD were different
from the latest verion of the variable listings updated
on 2/9. After re-aligning the pick-up, the old numbers
needed to be changed for better pick up. No problems
since.
BJ
|
| 5.35 | SCRAPPING NOISE COMING FROM BRIDGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:17 | 38 |
| SUBPAC::LANDRY 35 lines 10-FEB-1995 16:20
-< Report from the Noise Reduction Task Force >-
--------------------------------------------------------------------------------
* The infamous noise coming from the bridge movement has been solved!
I was able to get the system this morning for my WEEKLY PM. After
that was accomplished, manufacturing was able to let me keep it for a
short time to check into the movement noise. I, like the shifts before
me, checked out the bridge lead screw and guide rails. All looked
fine. The bridge movement didn't have any slop to it, making me think
the bearings, lead screw and rails were tight and pretty much in ok
shape. Manufacturing need the system back at this time, so I gave it
back. After all, the system was actually running fine and wafers were
looking good. Just had that strange noise.
In the afternoon, manufacturing was able to give me the system
again. So, I started checking again. I decided it was time to check
out the motor/pulley/belt. Alas, wheres the keyway!! It came loose
from the motor shaft/pulley. But how in the world could the bridge be
moving with the keyway missing? Well, seems the pulley is a little
different than your standard pulley. It has an insert with three
retaining bolts. The bolts are to assist in locking the whole pulley
assembly in place. So, when the keyway came loose, the pulley slipped
but the bolts were still tight enough to wedge the pulley onto the
shaft (a little cocked though). The pulley slid in up against the
bracket (starting to slice some nice grooves into it). Thats the noise
we were hearing. It's right under the bearing that was beginning to
look like the culprit, hence the confusion.
Anyway, repositioned the pulley with the keyway inplace and bolts
firmly doing the secondary locking. Adjusted the belt tension.
Powered up the system and home all axis'. The bridge responded as
should. The noise has returned to it's normal sound. Manually ran
the bridge back and forth to asure proper operating performance. All
are happy in Mudville!
Doc
|
| 5.36 | FAIRCHILD EP REGULATORS CALIBRATED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:19 | 14 |
| ASDG::POIRIER 15 lines 16-FEB-1995 23:55
-< Back pressure calibration/Fairchild EP valve cal >-
--------------------------------------------------------------------------------
* The spindle FAIRCHILD electro-pneumatic valves were calibrated
tonight. The were out of cal by a very small margin. We are of
the opinion that they are not contributing to the iratic uniformity
problems we've been experiencing.
We also completed the back pressure calibration procedure. Both
spindle pressures were within spec.
John & Bob.
|
| 5.37 | END EFFECTOR VACUUM PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:20 | 13 |
| SUBPAC::BJUBINVILLE "IT'S HOCKEY TIME!!" 10 lines 14-FEB-1995 02:06
-< END EFFECTOR AND VACUUM PROBLEMS >-
--------------------------------------------------------------------------------
Between the end effector and the robot stopping and
not erroring out is a mystery. The vacuum sensor was
checked on the robot and it was ok. The air was a little
off so I adjusted it to in spec. The load cups sensors
were working but needed adjustment. After using the fomula,
my new set point was -3 psi different from the previous setting.
So far... we've run about 10 wafer and everything ran smooth
without any problems.
BJ
|
| 5.38 | DOWNFORCE READOUTS IN QUESTION, DOWNFORCE CHECKED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:21 | 22 |
| SUBPAC::LANDRY 19 lines 23-FEB-1995 16:35
-< May the Force Cal be with you! >-
--------------------------------------------------------------------------------
A "concern" was voiced today centering around the Force readout on the
screen when the spindles were in the up position. Both of the spindles
read differently (as did the other systems two spindles, all four read
something different). Well, I hadn't the knowledge of why there were
that way and no one else was quite sure as to what the reading range
should be. The Manual had no information around this question. So,
the spindle down force was performed to assure that the spindles were
in fact reading right. Other than the normal tweak here and there, all
was fine with the spindle and it's respective load cell.
After performing the above procedure, the "idle" force read outs had
changed but were still not in sink with each other. The readings just
tracked with the amount of adjustment made during calibration. Eric B
did all the cals with me. He wants to run some MQC's to see what
results the adjustments made. Time will tell.
Doc, with early BJ assistance and late Eric assistance
|
| 5.39 | LOW SLURRY PH | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:22 | 11 |
| SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 8 lines 9-MAR-1995 06:57
-< LOW SLURRY2 Ph >-
--------------------------------------------------------------------------------
"Low SLURRY2 Ph" was coming on during the polish
cycle. The problem was traced to the OPTO-22 converter
that drives the SLURRY2 meter. After it was reseated,
everything started working ok.
BJ and Doc
|
| 5.40 | TABLE STALLED OUT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:22 | 20 |
| SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 17 lines 17-MAR-1995 05:46
-< Table stopping during polish cycle >-
--------------------------------------------------------------------------------
Entered the fab around 8pm to find A1 down with table
problems. During the polish cycle, the amps on the table
draw up to 40-45amps. The table and left spindle would come
to a complete stop. The servo controller was checked and
it was ok. First, just the right spindle was run and the table
drew only around 10amps. When just the left spindle was run,
the table drew 15amps. The carriers were swapped to verify that
they were ok. The slurry pumps were calibrated and found them to
be out a small margin. The conditioner disk was changed to try
and eliminate that. After everything was done, both spindles were
once again tried together and the table drew 30 amps at some point
and the table did not stop. Jesus noticed that the results of two
pevious wafers that the left spindle took of 3000� more than the
right spindle. Until Strasbaugh can be reached, I had Gwen run
only the right spindle.
3rd
|
| 5.41 | TABLE STALL OUTS, OVER CURRENT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:22 | 28 |
| ASDG::POIRIER 25 lines 21-MAR-1995 20:02
-< Table over current error / Servo amp loop gain adjusted >-
--------------------------------------------------------------------------------
* PROBLEM: Still experiencing table over current errors.
* SUSPECTED
CAUSE : Strasbaugh performed some calculations today and determined
that the present settings on the Table Servo Amp are apt
cause over current errors. They recommended that we check
the CURRENT LIMIT pot and increase the LOOP GAIN pot from
50% to 75%.
* ACTION: We increased the down force to 390 lbs in an attempt to
cause the Table to over current. It worked, the Servo Amp
errored every 3rd Auto Cycle on average. We checked the
CURRENT LIMIT pot to ensure it was set to 100, it was.
We then increased the LOOP GAIN pot from 50% to 75%.
Strasbaugh cautioned us to not increase the loop gain
more than 75% due to oscilation problems that could
cause damage to the motor and or gear box. Bobby is
going to run the machine at the new settings and check
for the over current problem to reoccur.
John & Bob.
|
| 5.42 | TABLE STALLED OUT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:23 | 19 |
| PATE::GEE 16 lines 22-MAR-1995 00:03
-< Loop Gain Adjustment >-
--------------------------------------------------------------------------------
* After the Loop Gain was adjusted from 50% to 75%, per the
Strasbaugh rep. I began running oxide monitors at a down
pressure of 390 for 60 seconds, (the same as earlier in the night).
After the third run the Table amps. started to rise 5 to 10 amps
with each run. On the seventh run the amps read over 55 and a wafer
spit out of the left carrier, already smashed. The EMO was hit and
the right carrier was never touched. The system was cleaned, pad
removed and carrier disassembled.
I think that by raising the Loop Gain we just changed the table
amp trip point.
* Also, replaced the 1/16" Robot End effector vacuum line.
Bob
|
| 5.43 | TABLE STALL OUTS, OVER CURRENT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:23 | 16 |
| ASDG::POIRIER 37 lines 22-MAR-1995 19:16
-< Table Servo Amp Adjustment results/Robot Vacuum Sensor >-
--------------------------------------------------------------------------------
* Table "over current" problem:
We ran over 50 wafers thru the system today with no "over current"
errors. Since the "over current" problem was occuring intermittently,
we cannot be absolutly sure that the present Servo Amp (loop gain)
setting will be satisfactory in the long term. However, compared
to the prevous week's performance, the problem has ceased to exist.
We are reasonably confident that this problem has been solved and
will continue to monitor the Table Servo Amp performance regularly.
|
| 5.44 | END EFFECTOR PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:24 | 40 |
| ASDG::POIRIER 37 lines 27-MAR-1995 19:52
-< Robot End Effector Vacuum Problems >-
--------------------------------------------------------------------------------
1) PROBLEM: Robot End Effector Vacuum failing intermittently.
POSSIBLE
CAUSE: Found the robot end effector vacuum sensor loose.
It may have been rotating around inside the End
Effector. This condition may have blocked off the
ports to the sensor causing the system to detect
low vacuum and fail intermittently..
ACTION: Removed and cleaned the sensor. Reinstalled it and
bonded it in place with Loctite. Performed the "Robot
Pneumatic Wafer Detection Vacuum Sensor Adjustment"
procedure on page 36 in the maintenance manual.
--------------------------------------------------------------------------
2) PROBLEM: No vacuum present at the Robot End Effector / Low vacuum alarms
on both Spindles.
CAUSE: Vacuum line open to atmoshere. Solinoid #43
(End Effector Vacuum) hose popped off its
barbed fitting.
ACTION: Reattached vacuum hose to solinoid #43. Vacuum returned
to its normal level of (28 in/Hg). It was at (14.5 in/Hg)
with the hose off. Bob is going to perform the Robot
Vacuum Sensor Adjustment again on 2nd shift. We made
the adjustments this afternoon before we realized the
system vacuum was low.
John & Bob.
|
| 5.45 | END EFFECTOR PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:25 | 14 |
| SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 11 lines 30-MAR-1995 06:14
-< fitting stripped, sensor intermitting >-
--------------------------------------------------------------------------------
End effector failed hard at the beginning of 3rd. Went right
to solenoid #44 and found the white teflon elbow stripped in the
1/4 fitting, replaced both pieces. After removing the front cover
of the robot, the green LED was flashing. If there was a wafer on
the robot, the light should stay off. With no wafer, the light should
stay on solid. The machine kept stopping thinking there was a wafer
on the end effector. After the sensor was recalibrated, the machine
ran great all morning.....
BJ
|
| 5.46 | ROLLERS REPLACED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:26 | 27 |
| PATE::GEE 14 lines 30-MAR-1995 23:24
-< Robot End Effector air leak, Clean station >-
--------------------------------------------------------------------------------
Replaced the clean station rollers and shoulder screws with
a new design that arrived from Strasbaugh today. These rotate
much better.
I didn't get a chance to seal the air leak between the nozzle
and the robot end effector arm tonight. Production is running
it and it's running good.
I placed a WARNING in RTC for this problem. We will need an hour
or so for the RTV to dry plus time to recalibrate the sensor
and verify the fix. I'll pass it on to 3rd shift.
Bob
-< roller replaced >-
--------------------------------------------------------------------------------
Replaced the new style rollers with the old style. The
new style caused the retaining ring to scrape up everywhere.
the worse ring is on public display in the chase for your veiwing
pleasure. John will be contacting Strasbaugh regarding this
problem. Longer shoulder screws would be the best solution...
BJ
|
| 5.47 | VACUUM LEAK AT END EFFECTOR | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:28 | 10 |
| SUBPAC::LANDRY 7 lines 31-MAR-1995 16:53
-< Seal that baby! >-
--------------------------------------------------------------------------------
Currently, the system is down for a robot vacuum malfunction. There
is a leak on the arm that is being repaired with RTV. Bobby has put
the RTV on and it is currently drying. Once dried, the vacuum sensor
will have to be re-calibrated.
Doc
|
| 5.48 | AIR LEAK AT END EFFECTOR | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:29 | 27 |
| PATE::GEE 13 lines 31-MAR-1995 23:08
-< Robot End Effector Air leak >-
--------------------------------------------------------------------------------
Repaired the air leak between the nozzle and the robot end
effector, by sealing it with RTV. Recalibrated the end effector
wafer sensor. Ran 16 wafers with no polish, no vacuum
problems.
The system was brought up and the warning taken off in RTC.
It was put back down in RTC because it needs carriers and a
new pad. The system is powered down, the clean station brushes
have been remove and are submerged in water next to the sink.
Bob
SUBPAC::LANDRY 7 lines 31-MAR-1995 16:53
-< Seal that baby! >-
--------------------------------------------------------------------------------
Currently, the system is down for a robot vacuum malfunction. There
is a leak on the arm that is being repaired with RTV. Bobby has put
the RTV on and it is currently drying. Once dried, the vacuum sensor
will have to be re-calibrated.
Doc
|
| 5.49 | TABLE STALL | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:29 | 25 |
| SUBPAC::LANDRY 23 lines 5-APR-1995 17:16
--------------------------------------------------------------------------------
Late this afternoon.......
The polish table rotation slowed down to a slow crawl. The set
point was 23 with an actual of 4. The program was halted to allow the
carriersd to rise from the table. The table continued at a 4 RPM
speed. We then "Quit Out" of the screen and the table continued to
spin at the 4 RPM speed. Totally ludicrous! We had to EMO the system
to get the table to cease.
After a reboot, they tried to run a couple of wafers to see what
was up. The AMPs hit about 50 (I was told) and a wafer spit out from
under the carrier. Aqwuick EMO saved a big silicon mess.
The computer was checked for PC board placement, pinched cables,
loose connectors, etc. Nothing unusual was found. Resat the boards
and carefull re-inserted the cover. Rebooted the system wi8th no
problem. All components homed. Ran a condition cycle to check the
table speed/amps. All was normal.
Manufacturing will run a few wafers to test the system.
Doc
|
| 5.50 | END EFFECTOR PROBLEMS - TABLE STALL-OUTS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:36 | 22 |
| ASDG::POIRIER 19 lines 5-APR-1995 20:59
-< Robot End Effector Vacuum/Table Servo Amp >-
--------------------------------------------------------------------------------
* Robot End Effector Vacuum:
Two vacuum errors occured on 3rd shift last night. We cleaned the air
nozzle on the Robot End Effector this morning and haven't had any
problems.
* Table RPM failure:
The table RPM slowed down to an unacceptable level around 5:00 P.M.
today. The tool errored for "table RPM too low". We placed a call
to Strasbaugh and are waiting for a reply. It's likely that they will
send a field service rep in next week to exchange the Table Servo
Amp. The last time it failed was 1 week ago. 2nd shift has resumed
running the tool since the problem is intermittent in nature.
John & Doc.
|
| 5.51 | TABLE STALL-OUTS, SPINDLE RPM'S TOO LOW | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:37 | 58 |
| ASDG::POIRIER 12 lines 10-APR-1995 19:16
-< Table RPM Problems/Troubleshootong Activities. >-
--------------------------------------------------------------------------------
* DC Servo Module #'s 2 & 4 on the DCX Motion Control Board were
swapped this afternoon. 2nd & 3rd shifts are going to watch for
"RIGHT SPINDLE RPM TOO LOW" errors during test runs on both
shifts. If the error occurs on the Right Spindle, the RPM
problem is following the Table Servo Module (#4). Hence, bad
Module! If the error doesn't occur on the Right Spindle,
Strasbaugh will send in a Field Service Rep this week to
replace the Table Servo Amp free of charge.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 55.173 CMP.A1 173 of 356
ASDG::POIRIER 16 lines 11-APR-1995 14:59
-< Table DC Servo Module Failure >-
--------------------------------------------------------------------------------
* DC Servo Module (Axis #4 - Table):
The "RPM TOO LOW" error has followed Module #4 from the Table
to the Right Spindle. This verifies that the Module is failing.
We now know that the Module is definitly part of the problem
and hopefully all of the problem. Strasbaugh is shipping us
a replacement Module via UPS RED. It should be on the 2:00
P.M. truck tomorrow. After the Module is replaced, we will
continue to monitor the Table RPM performance to ensure the
Table Servo Amp is operating properly. Due to this latest
development, Strasbaugh will not be sending a Field Service
Tech this week to replace the Servo Amp.
John.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 55.176 CMP.A1 176 of 356
ASDG::POIRIER 11 lines 12-APR-1995 20:07
-< Table Stalling Problem/Update >-
--------------------------------------------------------------------------------
* Table Stalling Problem/Update:
The replacement DC Servo Module for Axis #4 arrived this afternoon
and was installed on the Motion Control Board. Due to the long
periods of time between failures, it was determined that a 500
wafer VERIFY test should be run. This test will begin on 2nd shift
tonight and continue thru 3rd and 1st shifts tomorrow.
John.
|
| 5.52 | TABLE STALL OUTS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:37 | 14 |
| ASDG::POIRIER 11 lines 12-APR-1995 20:07
-< Table Stalling Problem/Update >-
--------------------------------------------------------------------------------
* Table Stalling Problem/Update:
The replacement DC Servo Module for Axis #4 arrived this afternoon
and was installed on the Motion Control Board. Due to the long
periods of time between failures, it was determined that a 500
wafer VERIFY test should be run. This test will begin on 2nd shift
tonight and continue thru 3rd and 1st shifts tomorrow.
John.
|
| 5.53 | TABLE STALL-OUTS, SLURRY PUMP CALIBRATIONS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:38 | 36 |
| ASDG::POIRIER 33 lines 13-APR-1995 19:30
-< Slurry point-of-use Filters/ Table stalling prob/update >-
--------------------------------------------------------------------------------
* Slurry Pump line:
The Tygon tubing on Slurry Pump #1 blew-off this morning making
a mess. It took a few hours to replace the tubing and clean-up
the slurry.
* Slurry flow calibration/slurry filter problems:
It is standard procedure to recalibrate the slurry flow after the
the tubing is changed on either slurry pump. After the tubing was
changed, I could not calibrate the pump due to inadequate slurry
flow to the pump. This condition was present on both Strabaugh
polishers. The flow was restricted by the (point-of-use) filters
that were installed in the tools last week. These filters are
currently under evaluation. Since there were only 2 replacements
available, (2 per tool), CMP.A2, which is running product, recieved
the replacement filters. CMP.A1, which is running a 500 wafer
verification test, is operating without any point-of-use filters.
NOTE: The above mentioned filters are in addition to the slurry
filters on the bulk delivery system.
Table Stalling Problem/update:
There have been NO Table failures since the SC Servo Module was
replaced yesterday.
|
| 5.54 | HUB AND SPINDLE ALIGNMENTS DUE TO BAD UNIFORMITY | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:39 | 38 |
| PATE::GEE 35 lines 18-APR-1995 23:29
-< Uniformity, alignment checks >-
--------------------------------------------------------------------------------
Do to poor uniformity it was determined that we would check
all the mechanical adjustments. We checked the table, both
spindles and hubs, all are within spec (+/- 002).
Replaced the pad with one that came in this afternoon and
conditioned it. We started running wafers and ran into a
couple of problems.
1. Right spindle sticking and wafers being left on the
table at the end of the polish cycle.
Fix:
We swapped the conditioner disk and holder from
CMP.A2. This helped but still loosing wafers every
few runs on the right spindle. Disassembled the
right carrier plate, cleaned and replaced the two
o-rings. The problem went away.
2. Uneven back pressure between spindles. Both at Idle
read left 13.4 psia right 14.6 psia.
Fix:
Disassembled the left carrier plates, replaced the two
o-rings. Also, drained the water out of the two filters
on top of the spindles, they were full. Now both
spindles read 14.7 psia at idle.
Note: 20 wafer had been run before the first mqc test. The
left was 14% and the right was 15% "better". We are
running 16 more before the next test.
2nd Shift
|
| 5.55 | ROLLERS REPLACED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:39 | 8 |
| ASDG::POIRIER 5 lines 25-APR-1995 19:18
-< Cleaning Station Rollers >-
--------------------------------------------------------------------------------
* The Cleaning Station Rollers & Shoulder Screws were replaced
on 1st shift today.
John.
|
| 5.56 | SHUTTLE MOVEMENT REAL SLOW | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:39 | 12 |
| FABSIX::R_POIRIER 9 lines 1-MAY-1995 23:45
-< Shuttle problem >-
--------------------------------------------------------------------------------
Shuttle moving to slow. Problem suspected to be
lack of grease on rail. John Poirier and I cleaned
and re-greased rail. Shuttle moving better but is
still slow. Unable to do any more work on the shuttle
because Operations needed A1 to run a HOT lot.
2nd Shift
|
| 5.57 | MANY ROBOT END EFFECTOR PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:42 | 240 |
| ASDG::POIRIER 55 lines 3-MAY-1995 19:30
-< Robot Problems: Homing Failure & Pneumatic Sensor Failure >-
--------------------------------------------------------------------------------
* ROBOT PROBLEMS:
--------------
Problem: #1) Robot "Bottom Arm" will not retain home position
location.
Cause: Moisture in the Home Position Sensor.
Action: Disassembled robot and found "Bottom Arm" optical sensor
contaminated with moisture. We also found a small hole
in the Robot Bellows. The underside of the Bellows was
totally permiated with D.I. water. Maybe the water wicked
into the fabric. The Bellows appears to made from some
type of fabric with a rubberized coating on the outer
surface. A rush order was placed with Strasbaugh for a
replacement Sensor and Bellows. We expect both parts to
arrive by tomorrow afternoon. A quantity of 2 each have
also been ordered and have been added to the Strasbaugh
BOM in the Fab 6 stockroom.
Problem: #2) Robot End Effector failing to retrive wafers from the
Load Elevators consistantly. (Vacuum does not enable
at the appropriate time)
Cause: Robot Pneumatic sensor not maintaining adjustment settings.
Action: The following items check out O.K.:
1) Vacuum leaks. (#1 cause according to Strasbaugh)
a) Tubing: from Regulator to End Effector Nozzle.
b) No leak at Nozzle/End Effector Arm interface.
c) No blocked ports in Nozzle.
d) No cracked vacuum fittings in End Effector Arm.
2) Sol #44 (End effector vac/wafer blow off) functioning
properly.
3) Control system functioning properly.
We have aquired the ordering information and will place a
rush order tomorrow morning for a replacement sensor.
John, Bobby & Jim T.
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Note 55.205 CMP.A1 205 of 356
ASDG::POIRIER 41 lines 4-MAY-1995 17:53
-< Robot Problems - Sensors & Encoders >-
--------------------------------------------------------------------------------
* Robot Problems:
--------------
1) Robot Top Arm failing Home Sequence:
A new Robot Top Arm Home Position Sensor arrived and was installed.
The Robot was reinstalled into the machine and the homing sequence
performed. The All axis homed properly.
2) Robot Bellows leaking:
A replacement Bellows arrived today and was installed on the Robot.
3) Robot pneumatic sensor not repeating causing vacuum pick-up errors:
A new sensor was ordered and will be shipped FedEx overnight. It
should arrive at the Fab6 dock on the 9:30 A.M. truck.
4) After all axis sucessfully home, an error message appears on the
CRT. (Arms not reaching zero):
This is most likely a servo encoder problem with the Robot Top Arm
servo motor encoder. We have had similar problems in the past. Roger P.
is placing a call to Strasbaugh to confirm before he exchanges encoders
tonight. We do stock this part.
John
The Robot homed properly then the system errored for "Arms not reaching
zero".
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Note 55.206 CMP.A1 206 of 356
FABSIX::R_POIRIER 27 lines 4-MAY-1995 23:59
-< Robot problems >-
--------------------------------------------------------------------------------
Talked to Todd Forydice of Strasbaugh about problem with
Robot. Error message "Arms not arriving at zero". He
suggested that the problem may be either a broken wire
on J3 (Robot Arm Encoder connector) or a bad Encoder.
Removed Robot from CMP.A1 and checked for broken wires,
and shorts on connector J-3. Found a Violet wire that wasn't
connected to a pin. Uncertain if wire was ever connected.
Doesn't look like sheild had ever been stripped back.
According to schematic 09 SHT 14, Voilet wire should be
going to J3-5. There was no wire in J3-5, but there was a
pin in the socket. It's possible that the wire does go to
pin 5. All other un-used wires were cut short and covered
by shrink tubing. Recommend calling Strasbaugh in the morning
and finding out about the Violet wire.
Also, new Encoder from Stockroom 6 needs 2 connector pins.
And Jim Tooker does not want Robot put back in A1 because we
will be receiving the Wafer Present sensor tomorrow that
needs to be put in.
2nd Shift
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Note 55.207 CMP.A1 207 of 356
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 17 lines 5-MAY-1995 05:58
-< encoder wire repaired >-
--------------------------------------------------------------------------------
Checked out schematics that Roger pointed out and it's
safe to say that the wire that was dangling should be in the
D-Sub connector. Some female D-submini pins were found and
the wire was repaired. The robot was then placed in the
machine and re-connected. The machine booted up and homed
fine without any problems. The robot was exercised in different
positions and it went to home everytime it was told. No "arms
not at zero" errors popping up. If however, the "arms not at
zero" error comes back, the encoder should be the next victim.
The robot was taken back off because Jim T. wants to replace
the wafer detector sensor.
BJ
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Note 55.208 CMP.A1 208 of 356
PATE::GEE 13 lines 5-MAY-1995 23:36
-< robot , carriers , cleaning >-
--------------------------------------------------------------------------------
The Robot end effector wafer sensor was installed and the
robot put back into the system today on first shift. We
verified the repair by cycling 50 wafers using the "ZERO"
recipe ( no touch downs onto the pad).
The system was then put down for new carriers, pad and a
cleaning (scheduled down). 4 Carriers are built and the pad
removed.
The system needs to be cleaned, brushs replaced and a pad
installed for sunday night startup.
2nd shift
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-< CMP >-
================================================================================
Note 5.62 CMP.A1 EE/PE PASSDOWNS 62 of 62
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 21 lines 10-NOV-1995 03:40
--------------------------------------------------------------------------------
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Note 55.201 CMP.A1 201 of 356
PATE::GEE 14 lines 3-MAY-1995 00:40
-< Robot vacuum problem >-
--------------------------------------------------------------------------------
Problem: The robot wouldn't pick-up wafers from either send
station.
Fix: Found and air leak on top of the end effector valve block.
Repaired the leak with RTV and cleaned the end effector.
Still wouldn't pick-up wafers, so we performed the robot wafer
sensor adjustment, still wouldn't pick-up wafers.
Checked the solenoid and all hoses for leaks, none found.
Reperformed the robot wafer sensor adjustment and got it to work
for 6 wafers, then it stopped again. Brian is working on it now.
2nd Shift
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-< CMP >-
================================================================================
Note 5.63 CMP.A1 EE/PE PASSDOWNS 63 of 63
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 17 lines 10-NOV-1995 03:41
--------------------------------------------------------------------------------
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Note 55.211 CMP.A1 211 of 356
ASDG::POIRIER 10 lines 8-MAY-1995 18:33
-< Robot Pnuematic Sensor Adjustment >-
--------------------------------------------------------------------------------
* Robot pnuematic sensor adjustment:
The air pressure at the End Effector Nozzle was reset to 5 psi.
This was followed by a recalibration of the Robot Pnuematic sensor.
A 55 wafer test run was then sucessfully completed and the system was
returned to "UP" status in RTC.
John.
|
| 5.58 | MORE END EFFECTOR PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:42 | 15 |
| <<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
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Note 55.212 CMP.A1 212 of 356
PATE::GEE 8 lines 9-MAY-1995 00:12
-< Robot End Effector Vacuum >-
--------------------------------------------------------------------------------
System came up with an "End Effector Vacuum not found" and
"Left spindle vacuum not found" errors tonight.
Found a piece of teflon tape sticking out of the bottom of the
robot end effector valve block. Removed the tape and cleaned it up,
All set.
2nd shift
|
| 5.59 | CONDITIONER BACKLASH PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:43 | 51 |
| ASDG::POIRIER 48 lines 11-MAY-1995 20:39
-< Conditioner Backlash/ RObot "Z" Height >-
--------------------------------------------------------------------------------
* Conditioner Backlash problem:
The bracket connecting the Conditioner Assembly to the Actuator
was loose. Loctite 242 was applied to the bracket screws before
they were installed back into the bracket. The "Rod Ends" that
mount on both ends of the Actuator are begining to show signs
of wear. These Rod Ends are also contributing the backlash.
We'll contact Strasbaugh for replacements.
* Robot "Z Height" problem:
The Robot experienced pick-up problems at both "Send" elevators this
afternoon. The Robot did not complete its full travel in the "Z"
direction. The problem was resolved by loosening the front cover on
the Robot base. It appears that the precision slide inside the Robot
,that controls the linear "Z" motion, was experiencing a mechanical
bind.
The thru holes in the Robot covers are not symetrical. The opposite
side of the cover may have been mounted facing outwards after the
Robot was reassembled. We'll identify the covers for proper alignment
in the future.
* Air Bubbles in SLurry Line:
The Tygon tubing in Slurry Pump #1 had pulled-up partially out of the
ferrel in the compression fitting. This caused it to draw-in air. The
tubing was replaced with a slightly longer piece and the pump flow
was recalibrated.
Machine Cleaned:
The system was given a thorough cleaning this afternoon.
John.
|
| 5.60 | MANY ROBOT END EFFECTOR PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:43 | 78 |
| ASDG::POIRIER 23 lines 13-MAY-1995 12:18
-< Wafer Pick-up Problems >-
--------------------------------------------------------------------------------
* Wafer pick-up problems:
I rechecked the Robot Pnuematic Sensor adjustment. It checked-out
O.K. The pnuematic part of the sensor appears to be changing states
correctly because the green LED is in the correct state as the End
Effector Air Nozzle passes over wafers. However, digital input #21,
(End Effector Wafer Sensor), is not seeing 24 volts when the pnue-
matic sensor is tripped. (Green LED off = tripped)
I removed the Robot front cover and disassembled the connector
containing the leads from the pnuematic sensor. I measured 24v
going into the sensor and 0 volts comming out no matter what
state the sensor was in. I checked the continuity in the con-
nector and it was was O.K. As I see it, the question at this
point is; why is there no output signal from the pnuematic
sensor in either state? Brian will pick up the search on
Sunday night. System will remain DOWN/Repair in RTC.
Note: The system can be run in "manual load" mode if necessary.
John.
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Note 55.222 CMP.A1 222 of 356
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 15-MAY-1995 06:14
-< end effector problem >-
--------------------------------------------------------------------------------
Continued working on end effector sensor. We traced
everything and it all comes back to the $900 sensor that
was just replaced. We swapped out CR18, #5 driver card
and OPTO-21/23 and swapped back after it was verfied as
not being the problems. All of the wiring was checked
for shorts. Still no progress...
3rd shift
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Note 55.223 CMP.A1 223 of 356
ASDG::POIRIER 11 lines 15-MAY-1995 19:13
-< End Effector Sensor Problem >-
--------------------------------------------------------------------------------
* Robot End Effector Sensor:
The diagnosis is that the new pnuematic sensor for the End Effector
is failing to send a signal thru it's output consistantly. We called
the Strasbaugh Field Service Rep, explained ths situation, and he
agreed that the sensor is most likely defective. Strasbaugh is
shipping us a replacement via FedEx. It should arrive tomorrow
morning on the 9:30 A.M. truck.
John.
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Note 55.227 CMP.A1 227 of 356
ASDG::POIRIER 9 lines 16-MAY-1995 18:49
-< Pnuematic sensor replacement >-
--------------------------------------------------------------------------------
* Robot End Effector Pnuematic Sensor Problem:
The sensor was replaced and adjusted per the specs in the manual.
A 50 wafer verify run was sucessfully completed and the system status
was returned to UP.
John & Doc.
|
| 5.61 | SLURRY LOOPS CLEANED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:44 | 15 |
| SUBPAC::LANDRY 12 lines 16-MAY-1995 17:47
-< plumbing cleaned >-
--------------------------------------------------------------------------------
While waiting for the vacuum detection switch.........
We got a chance to check out the slurry loop, 3-way valve and pH lines
for both pumps. They were dismantled and checked for clogs. All lines
were in fine shape, with no solidified slurry anywhere. This verifies
that the system is air tight.
We cleaned and reassembled the plumbing. Turned slurry back on and
checked for leaks/air bubbles. All is tight!
Doc / Jim
|
| 5.62 | BRUSH AIR MOTORS REPLACED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:45 | 15 |
| ASDG::POIRIER 12 lines 18-MAY-1995 19:22
-< Air Motor replacement >-
--------------------------------------------------------------------------------
* Cleaning Station Air Motor:
The Left Cleaning Station Air Motor was replaced today.
Both Stations now have new Air Motors.
John.
|
| 5.63 | WAFER BREAKAGE PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:46 | 37 |
| PATE::GEE 34 lines 23-MAY-1995 23:38
-< Wafer Breakage problems. >-
--------------------------------------------------------------------------------
Problem: Starting a wafer breakage trend, 3 times in 3 work days.
Observations:
* Ops had problems with carrier vacuum today.
Checked the vacuum at the spindle hubs, no problems with
the system vacuum. Checked the check valves and they were
good also, could have been a bad o-ring.
* The Right spindle was vibrating and the left was not.
Checked the spindle to hub gap and found it between
.027 and .072 We performed the spindle to hub alignment
and brought it to .035 and .065 the Vibration went away.
Note: With the way the spindle and hub are made there is no
way to maintain a gap of .060 and also keep them aligned
properly.
This is NOT part of the monthly P.M. and needs to be
added.
* Tonight we had wafers sticking to the pad very badly, this
was a new Speedfam pad.
We increased the conditioning frequency and changed the
conditioning disk, nothing helped, one time we almost
broke wafers. We decided to change the pad with one from
another lot, this seemed to stop the sticking problem.
The pad info is in the EST notes file.
Second Shift
|
| 5.64 | ROBOT Z AXIS PROBLEMS, EMO DELAYS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:46 | 44 |
| PATE::GEE 22 lines 24-MAY-1995 23:59
-< Robot top position / EMO >-
--------------------------------------------------------------------------------
* Broke a wafer on the pad today.
Replaced pad and carriers and started running with a
Strasbaugh pad. We ran into robot problems, it would
not move up to the top "Z" position.
* Robot not finding top "Z" position. It will not move to top
position.
We checked all the wire connections in the robot, but
still no go. We are in the process of removing the robot
from the system. Will pass on to third shift.
* EMO problems in front and on the top right panel.
Found a loose set screw on the front panel EMO button
that was hitting the outside casing of the EMO. Doc
tightened it. Found the top right panel EMO button
not traveling smoothly, so it was replaced.
Second Shift
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Note 55.236 CMP.A1 236 of 356
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 11 lines 25-MAY-1995 07:51
-< Z-axis drive problem >-
--------------------------------------------------------------------------------
After Roger puled the robot, it was discovered that the belt
came off of the Z-axis and the gear that rides the shaft was all
loosened up. It was put back in place and re-assembled. The
machine homed fine. When the robot went over to pick up the wafer,
the Z-axis worked fine and the END EFFECT switch was changing states
but the vacuum didn't come. The output on the switch might have
blown... again... Doc is putting the robot back in after we checked
the cables out again.
Roger, Doc, BJ
|
| 5.65 | ROBOT HARDWARE PROBLEMS (CORROSION, ENCODERS) | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:47 | 190 |
| ASDG::POIRIER 17 lines 25-MAY-1995 21:53
-< Low Output Voltage on Pnuematic Sensor. >-
--------------------------------------------------------------------------------
* Robot End Effector (Low Voltage Output) Problem:
24v was present at the input of the sensor and only 12v
at the output when the sensor was tripped. 12v was also
measured at relay 18. In addition, the clipping diode
on relay 18 was verified as GOOD.
With the sensor output lead removed from the connector, the
output voltage returned to 24v at the sensor and at relay 18.
I suspect a short somewhere in the connector. Bob is going to
check-out the connector tonight.
John.
PATE::GEE 5 lines 26-MAY-1995 04:56
-< Bad connectors >-
--------------------------------------------------------------------------------
Leon removed the robot and is in the process of rebuilding
the shorted connectors. Found the connector for the bottom
arm encoder had the red 5v wire broken also.
Third Shift
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Note 55.239 CMP.A1 239 of 356
SUBPAC::LANDRY 48 lines 26-MAY-1995 17:56
-< and the beat goes on...... >-
--------------------------------------------------------------------------------
What a fiasco this has turned into.............
* Upon arriving, Leon was in the midst of finishing re-doing a couple
of the robot connectors that had seen better days. Upon re-instal-
lation, it was discovered that the new problem with the robot was
now NO power to the unit. The connector that houses said wires was
NOT one of the connectors re-done. So, out the robot came again.
Leon continued on with this beast while I scurried over to A2. What
Leon found was a broken wire within the connector. So, he re-did
the three wires that pertained to this problem.
Again, the robot was re-installed. Alas power was present. We then
tried to HOME all components. We didn't get far. The Z axis of the
robot was non-functional. Checked all associated wiring and all
checked out fine. You guessed it, out comes the robot yet again.
At this time Leon departed after many hours work.
Found a mechanical flaw this time. The lead screw/bearing assembly
was a mess. It was wedged at the end of the lead screw. The bear-
ing assemblr also pulled through the bearing retaining block. More
relief help shows up in the person of Brian Provencher. We dis-ass-
embled the bearing assembly, removed some rust/corrosion build up,
did a lube job and then re-assembled the unit. By Brian, thanks for
the help. Karl Koch arrives. He re-fortifies some connectors as I
re-install the bearing assembly. The robot is re-installed and we
try to HOME the robot. No luck. John Poirier now joins in. The
robot is removed and the assembly was re-adjusted to allow a more
free moving actuation. It is now Z'ing fine.
Now we're back to a vacuum problem with the robot picking up wafers
out of the cassette. John will take over here with Debbie V and Joe
N to trace down a voltage problem associated to the vacuum problem.
* A rep will be onsight Tuesday morning to address this issue as well
as the A2 robot problem. John Poirier will be contacting Strasbaugh
with a list of items needed to repair the robots. Among those items
are the following:
- New connectors (hopefully, some that are water tight)
- A new lead screw for the robot (the one we have is bent)
- Bearings for the lead screw (as ours are rusting)
_ John to request additional parts
Thanks go to Brian P, Karl K, Debbie V, and Joe N for their help with
the arduous task today.
Doc // Leon
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Note 55.240 CMP.A1 240 of 356
ASDG::POIRIER 21 lines 26-MAY-1995 22:25
-< Robot Vacuum Failures / Connector Replacement >-
--------------------------------------------------------------------------------
* Robot End Effector Vacuum Problem:
Intermittent voltage readings were measured at the Robot connector
and at relay #18. At this point, the Robot connectors are so bad
that it's nearly impossible to cycle the tool without an error.
The connectors have been handled so many times that their ability
to make a connection has been severely compromised, not to mention
the corrosion or bent leads.
The current consensus is that the connectors must be replaced before
we can proceed any further, and that the connectors are most likely
responsible for the End Effector vacuum failures.
A Strasbaugh Field Service rep will arrive on Tuesday morning with
upgraded (mil spec/water tight) connectors. All Robot connections
on both CMP.A1 & CMP.A2 will be replaced. If vacuum failures persist,
he will assist us until this issue is resolved.
John.
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Note 55.241 CMP.A1 241 of 356
ASDG::POIRIER 19 lines 30-MAY-1995 20:39
-< Robot RS-232 Connectors/Robot Lead Screw >-
--------------------------------------------------------------------------------
Robot RS-232 Connector Problems:
The local Strasbaugh Field Service Rep arrived this afternoon. We had
hoped that he would have a replacement Robot in his possesion since
this tool has a bent Robot lead screw in addition to the connector
problem. Unfortunatly, Strasbaugh experiencd an internal communication
problem this morning the rep never recieved instructions to bring a
replacement with him. The Rep has returned to the Conn Field Service
Office tonight to pick-up the replacement Robot. He will return
tomorrow morning, robot in hand, to install the new upgraded conn-
ectors and swap lead screws, bearings and the ball nut between Robots.
Replacement connectors, insersion, extraction, alignment and crimping
tools will arrive FedEx tomorrow morning at 9:30. (Shipment confirmed at
4:00 this afternoon)
John.
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Note 55.242 CMP.A1 242 of 356
ASDG::POIRIER 11 lines 31-MAY-1995 21:28
-< Connector Problem Update >-
--------------------------------------------------------------------------------
Connector Problem Status:
The Strasbaugh Rep arrived this morning with a new Robot. The new style
pins and connectors were installed on the Robot on 1st shift today. The rep
will finish the connector replacement on the machine harness tomorrow
morning. In the mean time, all effort from 2nd & 3rd shift will be
focused on bringing up CMP.A2.
John.
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ASDG::POIRIER 25 lines 1-JUN-1995 20:19
-< Robot Replacement / New Connectors >-
--------------------------------------------------------------------------------
* New Robot/Connectors:
The replacement Robot was installed today along with new connectors
on both the Machine cables and Robot wires. The system is now running
verification test monitors and is in DOWN/VERIFY status in RTC.
F.Y.I.: The rep discovered water inside 2 of the cables during
disassembly. The outer insulation was worn thru due
to chaffing on both cables. The bad areas of cable were
cut-off and undamaged cable was pulled-up thru the cable
track before the connectors were crimped-on. There may
still be moisture futher down inside the cables.We may want
to consider replacing the cables during the Robot upgrade
activity in the near future.
John.
John.
|
| 5.66 | ROBOT END EFFECTOR PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:48 | 28 |
| SUBPAC::LANDRY 25 lines 2-JUN-1995 17:40
-< End effector vacuum switch again >-
--------------------------------------------------------------------------------
Just when you thought the robot problems were gone..........
Right about 11:45 this morning, the robot end effector came up with an
error (wafer detected on the end effector) when in all actuallity, no
wafer existed. So, I took off the robot end plate, and sure enough, no
green LED was on.
Not sure what actually caused this fault. Thw cables/connectors were
not stressed. The tygon tubing going to the switch was a bit
restricted, but even when the restriction was removed, it still
detected a wafer. So, I performed the wafer detection calibration once
again. Found the pressure to be at 7 PSI, adjusted it to it's proper
setting of 5 PSI. Performed the normal adjustments and all was well.
About the 7 PSI I found........I'm not sure if it's related or not at
this time, but this error coincided with the CMP room incoming N2
pressure boost. It's possible the switch could have been set up when
the room N2 pressure was on the low side (@ 70 PSI this morning). The
pressure after the boost was @ 100 PSI. Quite a substantial change.
The only way to verify it would be to regulate the pressure back down
to 70 PSI and see what affect it has on the wafer detection pressure at
the robot. Food for thought!!!!
Doc
|
| 5.67 | MORE CORROSION PROBLEMS WITH THE ROBOT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:53 | 263 |
| ASDG::POIRIER 56 lines 5-JUN-1995 22:05
-< Robot Cables, Connectors & Termiator Boards Corroded >-
--------------------------------------------------------------------------------
* Cracked tank on Left Send Elevator:
Strasbaugh was called and all ordering information was forwarded
to our Materials dept for processing. The Tank will be added the
the Strasbaugh Fab6 Stockroom BOM. A min stocking level of 2 was
requested.
* Robot Z axis malfunction:
The Robot was reinstalled and tested for Z-axis functionality.
The z-axis movement was normal thru the full stroke and the home
switch functioned properly.
* (NEW CONDITION) Robot Top Arm not homing:
The Robot Top Arm would not home apon placing the Robot back into
the system. The diagnostics screen was pulled-up and input #41 was
observed. No input was present as the flag passed thru the switch.
A 24v input was measured at the switch. Next, the switch was replaced
with a KNOWN GOOD switch, still no input #41. We then took a look at
CR #23, the contacts did not actuate as the flag passed thru the Top
Arm switch. We then followed the cables down to the terminator
boards at the bottom of the electrical cabinet. (13R1 & 14R1)
There we found corrosion, water & slurry inside the cables,
connectors & terminator boards.
Jim Tooker was called at home and made the decision to replace all
affected cabling, connectors and boards. Strasbaugh was then called
and agreed to a warranty replacement of all the above mentioned
parts. They shipped the parts FEDEX Priority #1 at 4:00 pst. The
items will arrive tomorrow either at 9:00 a.m or by 2:00 P.M. the
latest.
Power to the system has been Locked Out and the disassembling of the
cables connectors and boards has been started by Bob and myself.
The corrosion in the all these parts is likely to blame for the
intermittent failing of various Robot functions over the last few
weeks.
* Conditioning Arm Amplifier Cable:
While skwerming around inside the base of the machine, I noticed
that the cable for the Conditioning Arm (Down Force) Amplifier
was damaged. It appears that the PC mounting rails have scrapped
the insulation off the cable exposing the shielding. We'll call
Strasbaugh in the morning for a replacement.
John & Bob.
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Note 55.249 CMP.A1 249 of 356
ASDG::POIRIER 25 lines 6-JUN-1995 20:08
-< Cable & Board Replacement / Robot Z-Axis not moving >-
--------------------------------------------------------------------------------
* Robot Cable & Terminator Board replacemnt:
The parts arrived this morning on the 9:00 FEDEX truck. The cables
and terminator boards were replaced. The cables came with RS-232
connectors on both ends. We left the connectors on the ends of the
cables that connect to the boards. The connectors were removed from
the ends that connect to the Robot and replaced with the Water Tight
variety.
The Robot was reinstalled and tested. One problem was encountered
during testing. The Robot Z-axis failed to move. We tested the
Robot Z-Axis Home Switch while the system was powered-up. With the
diagnostics screen pulled-up, no signal was present at input #43
as a flag was passed thru the switch.
Bob is taking over on 2nd shift and is working with the Strasbaugh
via the phone to continue the troubleshooting activities. If the Z-Axis
movement issue is not resolved by the end of 2nd shift, Strasbaugh will
send a rep here in the morning.
John, Tim & Bob.
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Note 55.250 CMP.A1 250 of 356
PATE::GEE 34 lines 6-JUN-1995 23:57
-< Robot >-
--------------------------------------------------------------------------------
Problem: After the connectors and cables were replaced the robot
wouldn't move up to home. It would jam in the down position.
We checked the diagnostic inputs and found that neither
the up #43 or down #44 switches activated when tripped.
Action: Called field service (Mike Nochols).
* He had us check the DCX user to see if board #2 Counter #8
changed when the up down motor was moved, it did, telling
us that the problem was not the DCX Module for that motor.
* Checked inputs #43 and #44 in the power distribution
cabinet while toggling the switches and nothing happened.
#43 stayed on and #44 stayed off, this is an indication
that there is a wiring problem.
* We disassembled the 9 pin connector in the power distribution
cabinet and found that the wires didn't match the old
connector. We rewired the cable at the military connector
and robot did find up/down home.
The Robot mechanical is working fine.
New Problem : The Robot won't pickup wafers everytime. The Vacuum
Switch will need to be looked at and also the
elevator heights.
*** As for now the rep. is planning on being here around 10:30am
tomorrow. He will call before he leaves for here in the morning.
He also said that he is available tonight by telephone.
Beeper 1-800-514-1603
Second Shift
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Note 55.251 CMP.A1 251 of 356
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 13 lines 7-JUN-1995 03:54
-< Effector dead, PM completed >-
--------------------------------------------------------------------------------
Completed weekly PM while it was down....
The problem with the Z-axis was resolved by the end of
the 2nd shift. But... the robot wasn't picking up the wafers.
The end effector switch was way out of adjustment. After I brought
it back in, the robot picked up a couple of wafers but died again
just after midnight. We tried ajusting the switch again but it
didn't want to re-calibtrate. There are no more switches in stock.
A shortage requsest was sent in.
BJ
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Note 55.252 CMP.A1 252 of 356
ASDG::POIRIER 19 lines 7-JUN-1995 19:56
-< Robot Pnuematic Sensor Replacement >-
--------------------------------------------------------------------------------
* Robot Pneumatic Sensor Problem:
The Strasbaugh rep has been working on this problem with us since
2:00 p.m. We verified that the wiring in the 25 conductor Robot
cable is correct. The problem appears to be a malfunctioning
Pnuematic Robot Sensor again. The rep thinks that the corroded
connectors may have allowed current to leak across the pins
and blow the Output Transistor in the sensor. The corroded
connectors may have been responsible for the low voltage
readings as well.
A replacement sensor was ordered from Strasbaugh and is expected to
arrive tomorrow morning at 9:00 A.M. The rep will be back at 9:00 A.M.
to install the sensor and evaluate its performance during the verifi-
cation run.
John, Bob & Roger.
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Note 55.253 CMP.A1 253 of 356
ASDG::POIRIER 19 lines 8-JUN-1995 18:46
-< Robot Pnuematic Sensor Replaced >-
--------------------------------------------------------------------------------
* Robot Pnuematic Sensor replacement:
The Strasbaugh rep arrived this morning and the sensor was replaced.
A verification run was started but the sensor failed after 30 wafers.
By "failed" I mean the sensor stopped changing states and thus didn't
send an output signal. A slight tweeking of the sensor pot returned
the sensor to full functionality.
The problem we now face is SENSOR DRIFT. Noone, including the
Strasbaugh rep understands why the sensor can't maintain a setting.
The pnuematic hoses in the effected circuit were checked for leaks
and none were found. The Strasbaugh rep, and possibly an assistant
will return tomorrow to continue with the troubleshooting. 2nd
& 3rd shift will continue to run the system and record the results.
John.
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Note 55.254 CMP.A1 254 of 356
PATE::GEE 23 lines 8-JUN-1995 23:42
-< Robot Verification >-
--------------------------------------------------------------------------------
Problem: Need to verify the robot pneumatic vacuum switch repair.
Action:
* Started running wafers, on the 22 wafer the robot saw
the wafer but didn't turn vacuum on to pick it up.
We turned the "SET " pod 1/2 turn clockwise at the
request of D.Sullivan The procedure used to set the switch,
(Strasbaugh Manual) and the procedure sent with the switch,
(Nippon Pneumatics) are not the same.
* We are now up to 168 wafers with no problems. Third
shift will take over.
FYI:
* The rep. has indicated that we should be very careful
tightening the nut that holds the "P ADJ" set screw
over tightening may damage the switch, finger tight
is good.
Second Shift
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-< CMP >-
================================================================================
Note 5.72 CMP.A1 EE/PE PASSDOWNS 72 of 72
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 16 lines 10-NOV-1995 03:49
--------------------------------------------------------------------------------
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Note 55.247 CMP.A1 247 of 356
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 5-JUN-1995 06:14
-< Z-axis on robot lost >-
--------------------------------------------------------------------------------
The robot started crashing into the elevator when it went
to pick up a wafer. The machine kept erroring with ROBOT DID
NOT GO TO LOWER LIMIT, UPPER ect... Homing it didn't work.
Pulled the robot to see if there was any obstructions but none
were found. We are continuing to look into sensor and binding
possibilities.
3rd
|
| 5.68 | CONDITIONER ARM FROZE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:54 | 90 |
| SUBPAC::LANDRY 17 lines 10-JUN-1995 11:43
-< arm froze >-
--------------------------------------------------------------------------------
Late this morning as Jim was running touch-up wafers......
The conditioner arm froze up over the middle of the table (was
still in the UP position. Tried re-homing but wouldn't move. Through
the Diagnostics menu, we could get the arm to lower and raise, but it
would not got back or forth.
We powered down then rebooted the system. The arm was down on the
table once power was shut off. Upon the HOMING sequence, it said that
the "arm would not move up or down". It required an answer of yes or
no. Of course answered no, raised the arm up using D32, then homed
from there. All went well. No problems occured for the balance of his
running time.
Doc
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Note 55.260 CMP.A1 260 of 356
PATE::GEE 11 lines 12-JUN-1995 08:10
-< Conditioner Arm >-
--------------------------------------------------------------------------------
Problem: Conditioner arm would not move to center position,
but would move up and down.
Action: Checked all wire connections and mechanical hardware,
everything looks good. Re-booted the system and it
is working. Made a slight adjustment on the home sensor,
the arm was very close to the right panel when it homed.
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Note 55.261 CMP.A1 261 of 356
ASDG::POIRIER 43 lines 12-JUN-1995 19:28
-< Conitioning Arm Travel Problem / Robot X-Axis Travel Problem >-
--------------------------------------------------------------------------------
* Conditioning Arm Travel Problem:
The bracket that is located between the Conditioning Arm Assembly and
the Actuator had moved slightly out of position. This caused the head
of the Bracket Mounting Bolt to interfere with the Jam Nut on the
Actuator Rod End.
The Bracket mounting screws were cleaned and the threads in the mounting
holes were chased with a 1/4 - 20 tap to remove the old loctite.
The Bracket was reinstalled using fresh loctite.
Also, the Rod Ends that are connected to both ends of the Actuator
were both rotated 2 turns . This provided an extra 1/8" of clearance
between the head of the Bracket Mounting Bolt and the Jam Nut on the
Actuator. This will prevent the Assembly from binding-up if the
Bracket lossens-up in the future.
Robot X-Axis Movement Problem:
This problem is related to the (Rail/Lead Screw) assembly that the
Robot is mounted on top of and NOT the Robot itself. We called
Strasbaugh and the recommendation was a thorough cleaning and
relubrication of both the Lead Screw and both Rails. Roger has
begun this activity and expects to be finished in a few hours.
If a significant improvement is observed, a Pad & Carriers will
be installed on the tool and MQC's will begin. If not, the entire
assembly will have to be removed (at some future date), stripped
on the bench and thoroughly cleaned/lubricated to attain smooth
motion.
Strasbaugh has recommended that we change lubricants on all Lead
Screws and guide rails. They want us to stop using NSK #2 light
duty grease and start using Mobil Velocite #6 light oil.
John & Roger.
|
| 5.69 | CONDITIONER PROBLEMS, ROBOT X-AXIS PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:55 | 67 |
| ASDG::POIRIER 43 lines 12-JUN-1995 19:28
-< Conitioning Arm Travel Problem / Robot X-Axis Travel Problem >-
--------------------------------------------------------------------------------
* Conditioning Arm Travel Problem:
The bracket that is located between the Conditioning Arm Assembly and
the Actuator had moved slightly out of position. This caused the head
of the Bracket Mounting Bolt to interfere with the Jam Nut on the
Actuator Rod End.
The Bracket mounting screws were cleaned and the threads in the mounting
holes were chased with a 1/4 - 20 tap to remove the old loctite.
The Bracket was reinstalled using fresh loctite.
Also, the Rod Ends that are connected to both ends of the Actuator
were both rotated 2 turns . This provided an extra 1/8" of clearance
between the head of the Bracket Mounting Bolt and the Jam Nut on the
Actuator. This will prevent the Assembly from binding-up if the
Bracket lossens-up in the future.
Robot X-Axis Movement Problem:
This problem is related to the (Rail/Lead Screw) assembly that the
Robot is mounted on top of and NOT the Robot itself. We called
Strasbaugh and the recommendation was a thorough cleaning and
relubrication of both the Lead Screw and both Rails. Roger has
begun this activity and expects to be finished in a few hours.
If a significant improvement is observed, a Pad & Carriers will
be installed on the tool and MQC's will begin. If not, the entire
assembly will have to be removed (at some future date), stripped
on the bench and thoroughly cleaned/lubricated to attain smooth
motion.
Strasbaugh has recommended that we change lubricants on all Lead
Screws and guide rails. They want us to stop using NSK #2 light
duty grease and start using Mobil Velocite #6 light oil.
John & Roger.
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Note 55.272 CMP.A1 272 of 356
ASDG::POIRIER 13 lines 27-JUN-1995 19:03
-< Conditioning Arm Sweep Problem - Servo Module Replaced >-
--------------------------------------------------------------------------------
* Conditioner Arm Sweep Problem:
The DC Servo Control Module for Axis #15 was replaced this afternoon.
We ran a few conditioning cycles as a test with good results.
However, this problem has a history of being intermittent in nature
so we'll need a few shifts of operation before can have any level
of confidence with the fix.
The old module is being returned to Strasbaugh for a $630.00 warranty
credit.
John & Roger.
|
| 5.70 | CONDITIONER PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 03:55 | 92 |
| ASDG::POIRIER 17 lines 13-JUN-1995 20:03
-< Conditioning Arm Adjustments >-
--------------------------------------------------------------------------------
* Conditioner Arm Home Switch & Mechanical Travel Adjustments:
The Actuator Rod Ends were returned to their origional positions
due to interference with the Conditioner Assembly Sleeve. This
contact with the side of the sleeve caused the Conditioning Arm
Home Switch to loose its adjustment intermittently. The Rod End
adjustment was changed as a preventitive measure to ensure that
the linkage wouldn't bind-up if the Mounting Bracket lossened up
again.
It turns out that were better-off leaving the Actuator/Rod End
adjustment alone. We'll have to add an inspection of the Assembly
Bracket to the Monthly P.M. based on its inability to stay tight.
John.
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Note 55.265 CMP.A1 265 of 356
ASDG::POIRIER 14 lines 14-JUN-1995 19:12
-< Conditioner Arm Motion Problem/ Control Module Replacement >-
--------------------------------------------------------------------------------
* Conitioner Arm Motion Problem:
The Conditioner Arm Motion is continuing to malfunction at the
rate of once per shift. When this occurs, a system power down
and reboot is necessary. Strabaugh was called and recommended
replacing the DC Servo Control Module for the Conditioner axis.
They have agreed to send us a warranty replacement module and
will send it FEDEX Priority #1. We expect it to arrive tomorrow
morning at 9:00. We'll swap out the boards at an appropriate
time tomorrow.
John.
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Note 55.270 CMP.A1 270 of 356
ASDG::POIRIER 21 lines 26-JUN-1995 19:41
-< Conditioner Arm Sweep/Table Stalling Problems >-
--------------------------------------------------------------------------------
* Conditioner Arm sweep problem:
A replacement DC Servo Control Module for Axis #15 is in the Grey
cabinet. Please install this module on the Motion Control
Board in the PC as soon as the tool becomes available.
* Table Stalling problem:
This problem came back today after disappearing 2 months ago. We
thought this issue was dead after replacement of the axis #4
control module. Strasbaugh was called and wants us to observe
one more failure before sending a Field Service tech. The next
logical step is to replace the axis #4 Motor Controller. Strasbaugh
has agreed to replace the Motor Controller if one more failure
occurs, even if it happens after the August 26 expiration of our
warranty. This is reassuring since this controller costs over 5K.
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Note 55.272 CMP.A1 272 of 356
ASDG::POIRIER 13 lines 27-JUN-1995 19:03
-< Conditioning Arm Sweep Problem - Servo Module Replaced >-
--------------------------------------------------------------------------------
* Conditioner Arm Sweep Problem:
The DC Servo Control Module for Axis #15 was replaced this afternoon.
We ran a few conditioning cycles as a test with good results.
However, this problem has a history of being intermittent in nature
so we'll need a few shifts of operation before can have any level
of confidence with the fix.
The old module is being returned to Strasbaugh for a $630.00 warranty
credit.
John & Roger.
|
| 5.71 | WAFERS BROKE IN SEND CASSETTES | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 04:03 | 34 |
| PATE::GEE 10 lines 27-JUN-1995 07:27
-< Right Send Station >-
--------------------------------------------------------------------------------
Problem: Broke a wafer tonight, two wafers came out of the right
send cassette, #24 and #25 slots. #24 broke on the robot
body.
Action: Releveled the elevator so it has a very slight pick towards
the back. Adjusted Calabration variable #81 to 2.97 from
3.04
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Note 55.272 CMP.A1 272 of 356
ASDG::POIRIER 13 lines 27-JUN-1995 19:03
-< Conditioning Arm Sweep Problem - Servo Module Replaced >-
--------------------------------------------------------------------------------
* Conditioner Arm Sweep Problem:
The DC Servo Control Module for Axis #15 was replaced this afternoon.
We ran a few conditioning cycles as a test with good results.
However, this problem has a history of being intermittent in nature
so we'll need a few shifts of operation before can have any level
of confidence with the fix.
The old module is being returned to Strasbaugh for a $630.00 warranty
credit.
John & Roger.
|
| 5.72 | SEND ELEVATOR PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 04:05 | 9 |
| PATE::GEE 6 lines 28-JUN-1995 04:34
-< Right Send station/Cal.Variable #81 >-
--------------------------------------------------------------------------------
Had to adjust calibration variable #81 from 2.97 to 2.99
(axis 6 offset to slot 0). The robot was having trouble
picking wafers from the right send station. Ran 24 wafers
with no polish and another 36 breaking in the pad and
doing MQC's, no problems.
|
| 5.73 | EMO DELAYS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 04:05 | 68 |
| FABSIX::R_POIRIER 21 lines 29-JUN-1995 23:40
-< Problem with EMO's >-
--------------------------------------------------------------------------------
There is a problem with the EMO'S on A1. Sometimes they
take as much as 5-10 seconds to completely shut down the
tool. This caused a wafer breakage today when we lost
Slurry for a little while. Jim Sadin tried to EMO the
tool but was unsucessful. He hit the EMO in time but
it failed to shut off the system.
John call Strasbaugh and they recommended we replace the
24VAC relay citing that this could be the cause of the problem.
I've tried searching thru the stockrooms and thru Maxcim
and I have been unable to find the correct relay. It appears
we will need to order a relay from Strasbaugh.
All the relays in the other bay of A1 are 24VDC relays. They
won't work for our need. The part we need is a 24VAC 10A relay
I put the old relay back in the tool. The tool is still down.
There is still a safety hazard because we don't know if the
EMO switches will work when pushed.
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Note 55.279 CMP.A1 279 of 356
ASDG::POIRIER 7 lines 6-JUL-1995 17:43
-< EMO circuit relay replaced >-
--------------------------------------------------------------------------------
* The 24v AC relay for the EMO circuit was replaced this afternoon.
No delay was observed after several EMO power-off cycles.
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Note 55.280 CMP.A1 280 of 356
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 21 lines 6-JUL-1995 23:49
-< table stall, conditioner failed, EMO delay >-
--------------------------------------------------------------------------------
The table stalled right in the middle of polishing tonight.
The error "TABLE SPEED TOO LOW" came up and put the machine into
finish cycle after 20 seconds into the polish cycle. After the
machine was still idle, the table started turning by itself at
3 RPM's. The call was to log the system to EXTERNAL and wait for
the Service Rep. to come in. A call was placed to Mike Nichols
but there was no call back. Strasbaugh will have to be called
in the morning.
The conditioner arm failed to sweep and do its conditioning
again. The board has already been swapped out per Strasbuaugh's
request. The Rep can be filled in as to that problem as well.
The EMO time delay still exists. I was pushing the front EMO
button for 4 seconds before the system shut down.
The machine is down until further notice....
BJ
|
| 5.74 | TABLE STALLS, EMO DELAYS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 04:07 | 125 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 21 lines 6-JUL-1995 23:49
-< table stall, conditioner failed, EMO delay >-
--------------------------------------------------------------------------------
The table stalled right in the middle of polishing tonight.
The error "TABLE SPEED TOO LOW" came up and put the machine into
finish cycle after 20 seconds into the polish cycle. After the
machine was still idle, the table started turning by itself at
3 RPM's. The call was to log the system to EXTERNAL and wait for
the Service Rep. to come in. A call was placed to Mike Nichols
but there was no call back. Strasbaugh will have to be called
in the morning.
The conditioner arm failed to sweep and do its conditioning
again. The board has already been swapped out per Strasbuaugh's
request. The Rep can be filled in as to that problem as well.
The EMO time delay still exists. I was pushing the front EMO
button for 4 seconds before the system shut down.
The machine is down until further notice....
BJ
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Note 55.281 CMP.A1 281 of 356
SUBPAC::LANDRY 26 lines 7-JUL-1995 17:52
-< Table speed/amps problem, help on the way >-
--------------------------------------------------------------------------------
Here's where it be.........
The polish table bogging down problem has officially been elevated to
Strasbaugh for them to come in and have a look. It was quite the
experience today trying to get some action from them. After many phone
calls, many beeps, many hours, we finally got confirmation that an
abled body will be here Monday morning. He will also have parts
shipped here to use in trouble shooting the system. He'll have at
least an axis module for the computer and a motor controller/amplifier.
I neglected to mention it to them, but the EMO delay time still exists
dispite the newly installed 24 VAC relay Strasbaugh suggested we start
with. Good time to have them take a gander at it while on site.
Today, a new "old style" Strasbaugh pad was installed along with the
brushes that were removed to stay wet. Installed two new carriers
thanks to BJ and Jim S building them. Once all was installed, we found
that a wafer pickup problem existed at both elevators. So, the "robot
height adjustment procedure" was performed. Variable number 130 was
changed from .23 to .16. Finally, late first shift, we began to run
wafers. They are to be run to try and re-create the bogging down
problem. If problem occurs, try and gather as much info from the
status screen as possible (amps, speeds, pressures, etc).
Doc / Jim T
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Note 55.282 CMP.A1 282 of 356
SUBPAC::LANDRY 24 lines 8-JUL-1995 18:20
-< The Tables draggin' me down >-
--------------------------------------------------------------------------------
Well, I finally witnessed the polish table stalling senario. As was
the case when BJ saw it Thursday night, the following happened/was
noticed:
* Table AMPs went to approximately 30
* Table RPM dropped to 3-4 range (stayed rotating at 3 RPM even
after "quitting out" of run mode).
* The spindle down force readings remained at set point (313). No
spikes or dips occured.
* Spindle amps: Left reading ranging from 1.0-1.5 amps. Right
reading never moved off of -.1 (???). It reads this number when
idle of spinning. Somethings not right here!
* Back pressure stayed at 14.8
* Slurry flow was at 303 (no restrictions or "pulsing" flow
noticed)
Check the computer connections yet again. All looked fine.
Hopefully, the patrs arriving can conquer the problem.
Doc
By the way, Lightning storms swept through the area this afternoon.
Several times the system dumped out to DOS. Fortunetly, no wafer
breakage occured during these occurrances.
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Note 55.283 CMP.A1 283 of 356
ASDG::POIRIER 27 lines 10-JUL-1995 20:00
-< Table Servo Amp Replaced - Conditioner Arm Sweep Problems >-
--------------------------------------------------------------------------------
* Table Stalling Problem:
Todd from Strasbaugh arrived this Morning. We replaced the Axis #4
DC Servo Control Module and the Table Servo Amp. We observed no
Table rotation failures during a test run of 25 wafers. Since the
problem has been intermittent in nature, we'll need a few days of
production on the tool to be confident with this fix.
* Conditioner Sweep Problem:
Although Strasbaugh has sent us a replacement Conditioning Arm
Actuator/Encoder Assembly, Todd recommends that we first replace
the "Rod-Ends" that are mounted on both ends of the actuator assembly.
Both rod-ends are worn out causing excessive play in the assembly.
Todd has observed this conditioner problem at other customer sites
and replacing the rod-ends solved the problem. The excess play may
be causing the Actuator Reed switch disable when the Conditioner
Arm moves up. Strasbaugh is sending 2 new rod ends ASAP. In the mean
time, we'll have to run under warning status.
John.
|
| 5.75 | CONDITIONER ARM PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 04:09 | 13 |
| PATE::GEE 10 lines 12-JUL-1995 09:21
-< Conditioner Arm Motion problems >-
--------------------------------------------------------------------------------
* Replaced the conditioner arm Actuator/Encoder and repaired a poor
connection on the Reed switch. This didn't correct the conditioner
arm sweep problem, it failed to sweep about one out of every five
times between wet mode cycles. This was checked by running 2 minutes
of wet mode between pad condition cycling. Ran wafers in auto mode
with no conditioner problems.
Checked the wire connections all the way back to the Axis #14 module,
inside the computer, they all look good. Swapped Axis #14 module with
unused module #13.
|
| 5.76 | CONDITIONER ARM PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 04:09 | 23 |
| ASDG::POIRIER 20 lines 13-JUL-1995 19:21
-< Conditioner Problem / Emo Delay Problem >-
--------------------------------------------------------------------------------
Conditioner Arm Sweep Problem:
Strasbaugh was in Today to address this reoccuring problem. The
servo control module for axis #14 was replaced and the system was
tested under various conditions without any failures. (Auto cycles
& conditioning cycles). We are currently performing a verification
run. Warnings #'s 1 & 2 have been removed and the status has been
changed to VERIFY.
EMO Power-Down Delay Problem:
The Strasbaugh rep changed the system main contactor (CON #1) this
afternoon. Repeated power-down tests revealed no delay. Continued
testing will take place at appropriate intervals during the verifi-
cation run tonight.
|
| 5.77 | CONDITIONER DELAYS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 04:09 | 30 |
| ASDG::POIRIER 27 lines 10-JUL-1995 20:00
-< Table Servo Amp Replaced - Conditioner Arm Sweep Problems >-
--------------------------------------------------------------------------------
* Table Stalling Problem:
Todd from Strasbaugh arrived this Morning. We replaced the Axis #4
DC Servo Control Module and the Table Servo Amp. We observed no
Table rotation failures during a test run of 25 wafers. Since the
problem has been intermittent in nature, we'll need a few days of
production on the tool to be confident with this fix.
* Conditioner Sweep Problem:
Although Strasbaugh has sent us a replacement Conditioning Arm
Actuator/Encoder Assembly, Todd recommends that we first replace
the "Rod-Ends" that are mounted on both ends of the actuator assembly.
Both rod-ends are worn out causing excessive play in the assembly.
Todd has observed this conditioner problem at other customer sites
and replacing the rod-ends solved the problem. The excess play may
be causing the Actuator Reed switch disable when the Conditioner
Arm moves up. Strasbaugh is sending 2 new rod ends ASAP. In the mean
time, we'll have to run under warning status.
John.
|
| 5.100 | TABLE STALL OUTS STILL WITH US | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 05:54 | 9 |
|
Table stalling out again due to high current. Wafers
were getting out and trashing the retaining rings as well.
We noticed several items changed in the polish steps from
the previous shift but since the stalling started two weeks
ago and is still with us, these changes obviously haven't
changed anything. The system is still down in workstream.
D shift
|
| 5.101 | Wafer Fly-out experiment | ASDG::POIRIER | | Fri Nov 10 1995 19:47 | 15 |
|
Wafer Fly-out Experiment:
The system continued to fly-out wafers and experience high amperage
conditions today. These conditions occured even after the force
ramp time was increaced to 15 sec and the slurry flow was increaced
to 500 mil/min.
D Shift, a Speedfam pad has been mounted on the table. This Pad is
from an old lot that was shipped to us many months ago. Please build
2 new carriers and follow the instructions from Eric Bodensieck.
John.
|
| 5.78 | BRIDGE TRAVELED IN WRONG DIRECTION | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:47 | 8 |
|
The bridge was all done polishing and after the carriers
lifted off the pad, the bridge moved towards the conditioner
arm and hit the over-travel limit. Homing the bridge wouldn't
move it even after a power down. With the power down, the bridge
was moved off of the limit switch manually by rotating the pulley.
BJ
|
| 5.79 | PAD CONDITIONER SWEEP PROBLEM | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:47 | 19 |
| ASDG::POIRIER 16 lines 17-JUL-1995 19:19
-< Pad Conditioner / Poor Uniformity >-
--------------------------------------------------------------------------------
* Pad conditioner sweep problem:
Control modules for axis # 14 & 15 were changed in the PC last
Thursday. There were no failures until this morning at 6:00 a.m.
The system was re-booted and no failures have been observed since.
Strasbaugh was contacted and have recommended changing the motor
controller board for the conditioner. They will ship a replacement
ASAP.
* MQC Failure:
The system failed MQC's this morning for poor uniformity. The pad was
replaced, conditioned & break-in wafers run. MQC's are now being run.
|
| 5.80 | ROBOT LEAD SCREW | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:48 | 8 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 5 lines 5-AUG-1995 00:30
-< Lead screw >-
--------------------------------------------------------------------------------
The robot wasn't making it to the right load cup.
After the lead screw was cleaned and lubed, it traveled
fine.
BJ and Doc
|
| 5.81 | ROBOT LEAD SCREW TRAVEL | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:48 | 27 |
| ASDG::POIRIER 24 lines 14-AUG-1995 20:00
-< Robot Leadscrew sticking/send 1 & recieve 1 elevators off-line. >-
--------------------------------------------------------------------------------
* The robot leadscrew assembly has been sticking in the same
manner as CMP.A2's did last week. We have therefore changed
calibration variable #105(Rec'v 1 robot position) to -35.5
This makes Send Elevator #1 & Recieve Elevator #1 unusable
until the leadscrew position is changed back. The leadscrew
assembly will be removed, cleaned & readjusted as soon as
we have an opportunity to do so. This will most likely be
after completion of the Speedfam upgrade activities.
The Strasbaugh rep has suggested that we reduce the length of
Robot bellows on the Elevator end of the leadscrew assembly.
The current length is unecessarly long and only compounds
our problem with excess friction in the assembly. The
bellows ends-up getting compacted tighly between the Robot
base and the side of the machine base.
John.
P.S. The old (rec'v 1 robot postion) has been stored in an
unused variable, #109.
|
| 5.82 | CONDITIONER TRAVEL/SWEEP PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:48 | 36 |
| ASDG::POIRIER 33 lines 15-AUG-1995 20:30
-< Conditioning Arm Position Changes >-
--------------------------------------------------------------------------------
* Conditioner "not arriving at center position" problem:
This problem was investigated with the Strasbaugh rep
this afternoon. The following problems were discovered:
1) The Conditioner Assembly bracket screws were dragging
on the assembly sleeve during its up/down motion.
This was causing an over-current condition with the
motor which halted the movement of the conditoner axis.
2) An engineering update, published by Strasbaugh concerning
this issue, was never sent to us. It requires entering an
additional command into the (init1.dan) file.
Action Taken:
Tony entered the required command into the init1.dan file.
This allows a negative value to be entered into the conditioner
arm position variable. The park station position is now -2500
instead of o. The center and edge positions are also 2500 less
than they were previously.
The conditioner assembly sleeve was rotated slightly to permit
clearance on both sides of the bracket. The end result is that
the conditioning disk now postions itself 2500 counts off center
in the park station resivoir. However, this reduction in sweep
allows the conditioner assembly to travel in both directions
without any mechanical iterference with the bracket.
John.
|
| 5.83 | HIGH PARTICLES | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:49 | 11 |
| PATE::GEE 8 lines 16-AUG-1995 08:41
-< High particles / brush change >-
--------------------------------------------------------------------------------
Failed MQC's for high particles after a pad change.
We found that the load cup guide rings and the PVA brushes
had a black substance on them. We couldn't remove it so
we replaced the brushes and load cup guide rings. We also
cleaned everything inside the system with IPA wipes.
Ran a second particle check and it passed.
|
| 5.84 | CONDITIONER DISK SIZE CHANGED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:49 | 11 |
| PATE::GEE 8 lines 22-AUG-1995 07:26
-< 4" Conditioning Disk / variable changed >-
--------------------------------------------------------------------------------
We replaced the conditioner disk assembly with the 4" type
(no 6" in stock), do to poor performance.
There has been a rush order placed on the 6" conditioner
disks since last week.
We had to change calibration variable #126 (center position)
from 113000 to 108000 and #127 (edge position) from 139750
to 142000.
Roger & Bob
|
| 5.85 | CONDITIONER ARM AIR CYLINDER LINES | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:51 | 13 |
| ASDG::POIRIER 20 lines 22-AUG-1995 18:58
* Conditioning Arm Air hose failure:
The air line that supplies the Conditioner down force air cylinder
blew apart today. A union fitting was spliced-in as a temporary
repair. Strasbaugh recommends using 1/4 " Poly-Flow hose. Teflon
can also be used but is not necessary. The use of Teflon will also
require replacing all the fittings. The repair will require approx 10
ft of hose. It begins at the air cylinder under the conditioning
assembly and terminates at the air cylinder at the end of the
conditioner arm.
|
| 5.86 | LEAK AT ROTARY JOINT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:52 | 60 |
| PATE::GEE 11 lines 23-AUG-1995 07:16
-< Rotary joint >-
--------------------------------------------------------------------------------
Found a water leak at the top of the left spindle rotary
joint, looks like the top inner seal is bad. It only leaks
when the wafer blow-off occurs. This needs to be monitored
until time can be scheduled with production to fix it.
The front spindle housing cover has been re-installed to
prevent any contamination from reaching the table.
We need around 6 hours to replace both left and right spindle
rotary joint.
Leon & Bob
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Note 55.305 CMP.A1 305 of 356
ASDG::POIRIER 38 lines 23-AUG-1995 19:41
-< Rotory Joint Replacement / Conditioner Disk Mount >-
--------------------------------------------------------------------------------
* Left Spindle Rotory Joint:
The Left Spindle Rotory Joint was replaced this afternoon. This was
the first time we've replaced one. The replacement joint was a newer
rev than the joints that came with the tool. Also, we experienced
problems with the joint that we first attempted to install. The
tappered pipe threads in the mounting nut were not tapped to the
correct depth. Fortunately, we had more than one in stock and
were sucessful with the 2nd joint we tried.
Be careful of the following items if you install a new Rotory Joint
on the Strasbaughs:
1) The new rev joint is a 2 stage design and is much higher. Make
sure the back pressure transducer doesn't interfere with the
sheet metal air filter supports on the top of the tool. Move
the Bridge manually to ensure clearance.
2) The Barbed fitting that protrudes from the Bottom of the Spindle
Quill has been replaced with a 90 deg plastic fitting. The new
Rotory Joint pipe is slightly longer than the old style.
3) Do not reuse the old pipe it, is too short. The new pipes are
in the bottom draw of Jim Tooker's file cabinet.
Conditioner Disk Mount:
The Spacer Sleeves in the Conditioner Disk Mount were replaced with
slightly shorter ones to allow better gimbling of the assembly.
This was done to reduce the rotational hesitation we've been seeing
as the disk rotates on the Pad.
John, Tim & Brendan.
|
| 5.87 | BRIDGE VACUUM FILTERS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:52 | 8 |
| FABSIX::R_POIRIER 5 lines 29-AUG-1995 23:37
-< Bridge vacuum filters >-
--------------------------------------------------------------------------------
Replaced Bridge Vacuum Filters in CMP.A1 during pad change.
Bob,Roger,BJ
|
| 5.88 | EMO CONTACTOR REPLACED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:52 | 9 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 6 lines 8-SEP-1995 07:06
-< Loud EMO contactor replaced >-
--------------------------------------------------------------------------------
Replaced the EMO contactor with a new one. The old one
is on the tool box. The new one does not hummmmmmm at this
time.
BJ
|
| 5.89 | RMP'S IN QUESTIONS, CHECKED OUT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:53 | 15 |
| SUBPAC::LANDRY 12 lines 13-SEP-1995 15:01
-< rotation speeds confirmed, slurry filter changed >-
--------------------------------------------------------------------------------
While waiting on new pad shipment, we checked both spindles for proper
spin speed. 23 RPM was programmed, 23 RPM was the tach readout on both
spindles. The table speed was also checked. Again, 23 was the
programmed speed andd 23 was the tach readout.
Changed the pimary slurry filter, as the old one was clogged. Just to
make note of, when this filter clogged, the pressure gauges on the
other systems rose about 10 PSI. Makes sense, seeing they are all on
the same feed loop.
Doc / JP
|
| 5.90 | ELEVATOR NOT HOMING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:55 | 64 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 22 lines 21-SEP-1995 23:31
-< Elevator and robot problems, PM completed >-
--------------------------------------------------------------------------------
The left SEND elevator wasn't homing. At first, since we
had the problem last week with the encoder, we were going to
go right after the encoder. When we pulled the elevator away
and discovered the 3/8" line to fill the tank was all crimped
and sitting near the home switch. It looks like the line was
caught under the elevator and was blocking the it rom getting
to home.
The robot wasn't picking wafers from the right SEND. The
Axis 6 to slot zero parameter was changed to -3.07. Everything
ran fine after that.
ORIGINAL PROBLEM--- -< LEFT SEND ELEVATOR dead >-
--------------------------------------------------------------------------------
DI water has once again caused problems. The left send
elevator encoder appears to be the culprit after (3) hours
or checking things out. The elevator and tub are on the table
in the chase for ENG inspection.
================================================================================
Note 55.318 CMP.A1 318 of 356
ASDG::POIRIER 26 lines 22-SEP-1995 19:57
-< Left Send Elevator Motion Problem / Right Send Tank Replacement >-
--------------------------------------------------------------------------------
* Left Send Elevator Motion Problem:
The Left Send Elevator Motor, Encoder & related wiring were removed
from the tool and allowed to dry-out overnight. The corroded
connectors & lugs were cleaned and re-tightened. The Elevator
assembly was then reinstalled and tested. Its working fine now.
Leon took the motor apart and cleaned the rotor & stator. They
were rusted together.
It appears that D.I. Water was splashing onto the Elevator Mounting
Base and running over to the Elevator Motor, Encoder & Connectors.
The Elevator Tank Drain Hoses were extended to prevent water from
splashing on the Elevator Mounts in the future.
John/Leon/Brian
* Right Send Elevator Tank:
The cracked Tank was replaced this afternoon. While the elevator was
out, corroded connectors were found on the assembly. They were
cleaned and retightened.
The outstanding intems for the annual including the slurry
lines and robot positioning was completed. The annual PM has
finally been completed.
D - shift
|
| 5.91 | ROBOT WAFER PICKUP PROBLEM | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:56 | 42 |
| ASDG::POIRIER 11 lines 13-OCT-1995 18:48
-< Robot pick-up problems >-
--------------------------------------------------------------------------------
* Robot Sensor Adjustment:
The Robot experienced wafer pick-up problems around 5:00 this
afternoon. The sensor was readjusted and a verification run was
completed. It seems to be working fine now. We're not sure why
the sensor is continually going out of adjustment. we'll have
to keep a close watch on the Robot for the time being.
John.
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Note 55.340 CMP.A1 340 of 356
FABSIX::R_POIRIER 7 lines 15-OCT-1995 20:36
-< Robot Pick-up problems (A1) >-
--------------------------------------------------------------------------------
* Robot Sensor Adjustment
Had problems with wafer pick-up on A1 Saturday nite. Re-adjusted
sensor and ran fine after that.
B Shift
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Note 55.341 CMP.A1 341 of 356
FABSIX::R_POIRIER 5 lines 16-OCT-1995 04:16
-< Robot End -effector CMP.A1 >-
--------------------------------------------------------------------------------
* Robot Sensor Adjustment
The problem occured again tonite. Re-adjusted sensor and
robot is working fine since.
|
| 5.92 | TABLE STALLING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:56 | 17 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 14 lines 20-OCT-1995 09:03
-< table stalled, wafer breakage >-
--------------------------------------------------------------------------------
The pad was replaced earlier in the shift and was broken
in using the BREAKIN recipe. As soon as wafers were started
on the tool for MQC's, the table stalled out during polishing
after the amps got over 40. The system was EMO'ed before
anything crashed. we started the tool back up and we started
to run some wafers to see if the table would stall again. As
we were running the tool, a wafer under the left spindle broke
THEN slid out. The table did not over current. The pad was
replaced and Barry break-in the original way. He did not
experience any problems. MQC's are being run and the machine
is being closely watched.
D shift
|
| 5.93 | TABLE STALLING AGAIN | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:56 | 50 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 14 lines 21-OCT-1995 06:50
-< Table stalled out.... >-
--------------------------------------------------------------------------------
The table stalled out but Gwen saved it from crashing
by EMO'ing the system. 12 wafers were without any problems.
New carriers were installed due to poor vacuum problems so
MQC's needed to be done. The MQC wafers ran fine but when
(4) sender heads were sent, the table stalled. There was
a 15 minute wait between the MQC's and the sender heads.
For now, run (4) send heads before you run product. Have
the 1st two wafers set at 200 down force and the 2nd two
at 313. The last time we started seeing the stalling problem,
the Reps suggested looking at a bigger ratio in the gear box.
I will speak with John P. in the a.m. regarding this....
BJ
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Note 55.351 CMP.A1 351 of 356
ASDG::POIRIER 25 lines 26-OCT-1995 19:32
-< Power-Down Problem / Wafer Breakage >-
--------------------------------------------------------------------------------
* Mysterious Power-off Problem:
The system powered itself down 3 times this morning while idle
and once this afternoon while polishing. I checked the EMO circuit
including all door interlock switches and all 4 EMO button contacts.
All connections were o.k.
Strasbaugh field service was called and they advise checking the
following after the next incident:
a) Main Contactor (CON #1) Coil may be bad.
b) 24v relay in EMO circuit.
c) check continuity on all door interlocks and EMO buttons.
Wafer breakage:
The system just broke wafers during the verification run for
the power-down problem. The status should be changed to VERIFY
after the Pad and Carriers are replaced.
|
| 5.94 | CONDITIONER PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 23:57 | 36 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 11 lines 1-NOV-1995 05:30
-< Conditioner assembly disassembled >-
--------------------------------------------------------------------------------
The roll pin that connects the drive shaft to the
white ring which in turns connects to the conditioner
disk worked its way out and ripped the bellows apart.
The bellows are not a stocked item so at least one will
have to be rushed in. The machine is still usuable but
the bellows should be put back on the machine asap.
The Strasbaugh 24-hour hotline was called but I got no
answer.
D shift
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Note 55.356 CMP.A1 356 of 356
ASDG::POIRIER 14 lines 3-NOV-1995 19:47
-< Conditioner Bellows Replacement / Cond Drive Belt Idlers Adj. >-
--------------------------------------------------------------------------------
Conditioning Disk Bellows:
The replacement bellows arrived this morning and was installed
on the Conditioning Arm Disk Assembly.
Conditioning Disk Hesitation:
A hesitation was observed as the Conditioning Disk was rotating. It
seemed to be getting worse over the last few weeks. We adjusted the
idlers on the Conditioning Arm Belt Assembly an the hesitation ceased.
|
| 5.1 | A1 FIT-UP AND MECHANICAL ACCEPTANCE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Nov 11 1995 00:44 | 748 |
| ================================================================================
Note 55.1 CMP.A1 1 of 356
SUBPAC::LANDRY 12 lines 6-JUN-1994 16:34
-< 6/6 update >-
--------------------------------------------------------------------------------
Monday Installation Update...........
There wasn't much activity today. I got with the contractors (KSI &
NEVCO) and clarified a couple of questions they had concerning plumb-
ing (DI & GCW) and slurry supply and return. Also, since the systems
had moved a little due to the pedistal installation, they wanted to
reverify with me where they could and could not run the hookups.
They are in the process of running pipe under the floor at this time.
Not much to see! There was no other activity with this system today.
Doc
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Note 55.2 CMP.A1 2 of 356
SUBPAC::LANDRY 8 lines 7-JUN-1994 15:53
-< 6/7 Update >-
--------------------------------------------------------------------------------
Today, KSI hooked up the two GCW drains to the system. The also
hooked up the GCW drain on the vacuum cabinet resevoir. Both of these
tasks required substantial installation work under the floor (running
headers and sticks). Don't be alarmed as you look through the raised
floor and notice some water, they had to cut into an existing line that
contained some water.
Doc
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Note 55.3 CMP.A1 3 of 356
SUBPAC::LANDRY 18 lines 9-JUN-1994 15:40
-< 6/9 Update >-
--------------------------------------------------------------------------------
Today, KSI has the main system and vacuum cabinet drain lines under
pressure testing. Alls well so far!
KSI had a question concerning the slurry supply and return line hookup.
They were under the assumption that the incoming and outgoing lines
needed to be double contained plumbing. After confering with George
Hynes and Tom Richards, it was determined that the lines would NOT have
to be double containment. This will help this portion of the install
go alot quicker. The double contained wall would have housed a supply
and a return line within each of the two pump hookups. They would have
had to fabricate a manifold between the slurry valves and the valve
manifold box to separate the two prior to entering/exiting the VMB's in
order to maintain double containment integrity.
Also, the electricians are beginning to address what is needed on the
system. Some conduit has been run (minus the wires).
Doc
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Note 55.4 CMP.A1 4 of 356
SUBPAC::LANDRY 18 lines 16-JUN-1994 15:49
-< 6/16 Update >-
--------------------------------------------------------------------------------
Installation status:
The electrical hookup is complete.
The GCW drains have been leak/pressure checked to satisfaction. The
lines were then connected up to the main system.
The TCU installation has begun. There is a rack mounted that houses
the incoming/outgoing process cooling lines. They still need to be
tied into the TCU. Also, need the hookup from the TCU to the main
system to be performed. The electrical hookup is complete.
The vacuum cabinet has the GCW drain hooked up. The electrical is also
complete. Waiting for the CDA hookup to be performed.
No slurry hook ups have been performed as of yet.
Doc
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Note 55.5 CMP.A1 5 of 356
SUBPAC::LANDRY 15 lines 24-JUN-1994 14:05
-< 6/24 Installation Update >-
--------------------------------------------------------------------------------
KSI personnel ran and hooked up the slurry lines on the system today.
The lines are a single PVA hook up (NO secondary containment plumbing
is required). The lines are supported by a unistrut rack.
KSI also is making good progress with the GCW drains. The main system
hookup is COMPLETE! The vacuum cabinet drains are COMPLETE as well!
Plumbing work for the TCU is on-going.
The system still needs the following hook ups:
CDA, UHP DI, Cooling water in/out, vacuum cabinet tied into the
main system, vacuum cabinet CDA, ALL TCU plumbing requirements.
Doc
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Note 55.6 CMP.A1 6 of 356
SUBPAC::TOOKER 37 lines 8-JUL-1994 10:59
-< Hook-Up Status for 7/8/94 >-
--------------------------------------------------------------------------------
CMP.A1 Tool Hook-Up Status For 7/8/94
COMPLETED ITEMS:
----------------
* Bulkhead
* DI Water connection except for pressure gauge.
* All GCW drain connections
* Eelectrical connections
* NESLAB TCU soft water, process cooling water, and drain
connections
* Slurry line from valve manifold box to system
OPEN ITEMS:
-----------
* DI Water pressure gauge
* DI water return line final connection
* CDA final connection to main system and vacuum cabinet
* N2 final connection
* All exhaust work
* HEPA filter connection
* Slurry valve manifold box valve work
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Note 55.7 CMP.A1 7 of 356
SUBPAC::LANDRY 6 lines 12-JUL-1994 13:39
-< 7/12 Installation Update >-
--------------------------------------------------------------------------------
Today, the three HEPA filters for the system were installed. This
will allow NEVCO to begin installation of the AC hookup to the top of
the system. Thanks to Jim and Earl for their astute assistance in this
installation!
Doc
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Note 55.8 CMP.A1 8 of 356
SUBPAC::TOOKER 11 lines 26-JUL-1994 09:17
-< CMP.A1 punch list >-
--------------------------------------------------------------------------------
CMP.A1 Tool Hook-Up Status As Of 7/25/94
PUNCH LIST ITEMS
----------------
ITEM RESPONSIBLE PERSON
--------------------------------------------------------------------------
1) Complete exhaust work. D. Atkinson/NEEVCO
2) Uni-strut guard around plumbing area. D. Atkinson
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Note 55.9 CMP.A1 9 of 356
SUBPAC::BJUBINVILLE 7 lines 29-JUL-1994 15:46
-< CMP.A1 is all set for the vendor on 8/1 >-
--------------------------------------------------------------------------------
Doc and I completed N2, CDA and vacuum facility hook-ups
this afternoon. It's all set for the vendor on Monday. We are
hoping to be able to pick up the drip pans and install them on
Monday.
BJ
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Note 55.11 CMP.A1 11 of 356
ASDG::POIRIER 64 lines 4-AUG-1994 20:51
-< CMP.A1 Mech Accept >-
--------------------------------------------------------------------------------
Power, vacuum, CDA and D.I. water have all been supplied to the tool.
The D.I. water pressure is still too low. Its currently at 25 p.s.i.
up from 15 p.s.i. yesterday but still not at the required 40 p.s.i.
There is currently no slurry available. We're hoping the slurry system
will be operational by next Tuesday for the planned 500 wafer run.
If not, then we will perform the 500 wafer run with water only. The
limitation of doing this is "touching down" on the polishing pad
momentarily instead of oscillating on the pad.
Here is a highlight of some of the work completed thus far on CMP.A1
* The table, spindles and chucks have been indicated and adjusted to the
proper specifications.
* The shuttle has been leveled and adjusted in both the forward and
rear positions.
* The shuttle speed has been adjusted.
* The shuttle hard stop positions have been adjusted.
* The load stations and cleaning stations have been set to the proper
positions.
* Calibration values have been set for Table Min Pressure, Spindle Down
Soft and Spindle Down Hard.
Plans for tomorrow:
* Adjust spindle down force.
* Adjust conditioner down force.
* Calibrate slurry PH meters.
* Calibrate robot positions.
* Calibrate Elevator positions.
* Install elevator tubs.
* Cycle machine.
Problems:
* The load cell that was shipped with the machine doesn't work. The rep
went to Conn. tonight to get another one.
* Some of the poly welds cracked during shippment.
* Rust was discovered in the weldment area.
* The Thompson bar way bearings that support the robot are noisy.
* The lead screw bearing on SEND elevator #2 is binding.
*
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Note 55.12 CMP.A1 12 of 356
ASDG::POIRIER 17 lines 5-AUG-1994 17:51
-< Mechanical Acceptance >-
--------------------------------------------------------------------------------
* We attempted to calibrate the down force on both spindles today.
* The spindle lever arms were not adjusted properly at the factory
which caused the air cylinder housings to contact bridge box frame.
This in turn put a side load on the teflon air cylinder bushings which
caused them to move out of they're proper locations.
* The left spindle air cylinder was replaced with the spare that came with
the machine.
* The spindle lever arms have been adjusted to the proper specs. This
will prevent this situation from occuring in the future.
* Four new Air cylinders were shipped today from Strasbaugh. We'll replace
them on Monday morning.
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Note 55.13 CMP.A1 13 of 356
ASDG::POIRIER 36 lines 8-AUG-1994 22:48
-< Mechanical Acceptance >-
--------------------------------------------------------------------------------
* The four spindle air cylinders that were ordered last Friday arrived
this morning. One cylinder was pulled from stock on Friday and
installed on the left spindle. One of the four that arrived today was
fitted with a load cell and mounted on the right spindle assembly.
Down force calibrations were then sucessfully performed on both spindles.
* Down force calibration was also performed on the pad conditioner
assembly.
* All four elevator tubs were installed and are flowing D.I. water.
* Both left and right spindle hub o-rings have been replaced with
the new silicone style o-rings.
Problems:
---------
* The A23 pad conditioner down force output was incorrectly labled on
the print. Strasbaugh was notified and will send a corrected print.
* The teflon tubing which was disconnected from the elevator tubs would
not fit onto the the valve fittings. Strasbaugh sent a flaring tool
and we resized the tubing.
* Broken poly welds were discovered near the send elevators. Strasbaugh
is sending a small hand held poly welder so we can rework the welds.
* The D.I. water pressure continues to be a problem. The water pressure
at the Speedfam tool holds steady at 35 p.s.i., we're only 10 ft down
line and the pressure at the CMP.A1 fluctuates from 5 to 20 p.s.i.
We need 40 p.s.i. of D.I. water pressure at CMP.A1. This will be a
gating item for the planned 500 wafer run tomorrow. We can't touch-
down on the pad without a sufficient amount of water flowing.
We could most likely get by with 20 p.s.i. for tomorrow's 500 wafer
run as long as the pressure holds STEADY.
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Note 55.14 CMP.A1 14 of 356
ASDG::POIRIER 52 lines 10-AUG-1994 09:29
-< mechanical acceptance >-
--------------------------------------------------------------------------------
* The status of CMP.A1 in RTC has been changed from "red tag sign off"
to "mechanical acceptance". All other CMP tools have been changed
as well.
* The noisy robot travel problem has been solved. The sheet metal
mounting bracket for the robot servo motor was loose. This forced
the lead screw coupling to bind and caused the noise. The bracket
has been tightened and the robot is running quiet now.
* The shuttle support brackets have been replaced with the new stronger
ones that arrived from Strasbaugh on Monday.
* The robot to elevator locations will be re-checked with the new
Empak cassettes. The tool was origionally set-up with pre-production
sample cassettes in January. The material of the new cassettes is
slightly different from the earlier ones and may have a different rate
of shrinkage thus different distances between slots.
* The machine was cycled and a 25 wafer run was completed with 1
assist. The spindles did not lift up off the pad when they were
supossed to. The problem was corrected by changeing the "Min Lift
Off" variable.
* Fine tuning needed before 1000 wafer run:
1) Set motor spindles so they operate together. They don't touch down
or lift off at exactly the same time.
2) Fine tune load station.
3) Fine tune the conditioner functions.
4) Install new version of software.
* Problems:
1) Neoprene door gaskets are already tearing.
2) Water is accumilating on the poly deck behind the recieve stations
and dripping on the floor.
Misc issues:
1) We could really use an access door behind the recieve elevators.
This tool was not origionally designed for a bulkhead
configuraton. This leaves no access to the send/recieve elevators
from the service chase. I recommend we repace the plexiglass
window behind the recieve elevators with an access door.
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Note 55.15 CMP.A1 15 of 356
ASDG::POIRIER 35 lines 11-AUG-1994 02:50
-< ex >-
--------------------------------------------------------------------------------
* The 500 wafer run was completed at 2:30 a.m. with no operator assists.
The following items will be addressed prior to Monday's 1000 wafer run:
1) Right load station ring doesn't fit properly.
Strasbaugh will ship new one tomorrow.
2) Right carrier spray nozzel hose is too short.
New hose will be installed tomorrow.
3) Left load station cylinder has a slight hesitation.
It will be cleaned and inspected.
4) Left recieve elevator is making noise.
We will clean and inspect the lead screw bushing.
Lube if necessary.
5) Brush height on both cleaning stations is to high.
Height will be adjusted.
6) Elevator locations need to be set to four new Empak cassettes.
Currently set to pre production cassettes.
7) The down force count calibration needs to be reset.
This ensures that the spindles come down evenly. This calibration
will not effect the actual down force during the polishing cycle.
8) The new version of software needs to be down loaded.
9) The leak in the poly shroud needs to be sealed.
We'll seal it with RTV.
* We are ready to polish as soon as slurry becomes available.
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Note 55.16 CMP.A1 16 of 356
ASDG::POIRIER 27 lines 11-AUG-1994 20:40
-< Mechanical Acceptance >-
--------------------------------------------------------------------------------
* The new load station guide rings arrived today and were installed in
both CMP.A1 & A2.
* The pad conditioner arm was fine tuned. The uneven vertical motion
turned out to be a slight mechanical interference in the drive
mechanisim. Eric and I adjusted the mechanisim and the motion is
now smooth. The home position location was also changed, this allows
the conditioning head to rest in the center of the park position
tank.
Misc items that need attention:
1) Finish leveling machine.
2) Install containment trays under tool.
3) Have 11" dia plexiglass plates fabricated. These plates will fit
into the load stations and act as fixtures.They will aid in setting up
the brush heights. They will also provide a convenient surface to
place the indicator base while indicating the chucks. This is
especially helpful when a fresh pad is on the table.
* (1000 wafer run in planned for Monday)
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Note 55.17 CMP.A1 17 of 356
ASDG::POIRIER 6 lines 15-AUG-1994 22:50
-< Mechanical Acceptance >-
--------------------------------------------------------------------------------
* The 1000 wafer run was postponed due to a malfunctioning robot (upper
arm) motor encoder. The encoder was replaced and the robot is now
functioning normally.
* A second attempt at the 1000 wafer run will comence tomorrow.
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Note 55.18 CMP.A1 18 of 356
ASDG::POIRIER 15 lines 16-AUG-1994 21:39
-< Mechanical Acceptance >-
--------------------------------------------------------------------------------
* The 1000 wafer run has been delayed once again. This time because of
robot and conditioner problems. Replacing the robot assembly last night
rendered most of the elevator locations to be incorrect. All of the
locations have been corrected except for the elevator Z-heights. That
work should be finished-up in the morning.
The other time consuming hit was the conditioner arm. It died at 8:00
p.m.. Upon disassembly, a broken weld was discovered on the main
shaft bushing. This bushing is welded to the shaft near the top of
the conditioning arm. Strasbaugh was called and a new shaft/bushing
assembly will be shipped tomorrow. We expect the assembly to arrive
Thursday morning.
J.P.
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Note 55.19 CMP.A1 19 of 356
ASDG::POIRIER 12 lines 17-AUG-1994 21:59
-< Mechanical Acceptance >-
--------------------------------------------------------------------------------
* The elevator Z-height postions for both the send and recieve
elevators were calibrated today. These locations were lost
when the robot was dis-assembled to replace the servo encoder.
* A 300 wafer run was completed at 9:00 p.m. with no assists.
This test was run in preparation for tomorrow's 1000 wafer
marathon run. The Strasbaugh rep will start the run at 8:00 a.m.
and I will finish it at approx 12:00 midnight. (16 hrs)
John.
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Note 55.20 CMP.A1 20 of 356
SUBPAC::LANDRY 15 lines 18-AUG-1994 15:33
-< Almost slurry time! >-
--------------------------------------------------------------------------------
Slurry happenings today.......
A decision was made to have one supply and one return line supply both
pumps. Therefore, one supply and one return line were removed from the
system/rack/VMB. We (Earl and myself) then cut into the remaining two
lines and "tee'd" off them.
Also, the VMB connection was made to complete the slurry line
installation. We are now ready for slurry, pending the room eye wash /
safety shower signoff. Said signoff work is in process.
Thanks go out to Earl for his support and work with this project.
Doc
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Note 55.21 CMP.A1 21 of 356
ASDG::POIRIER 12 lines 19-AUG-1994 03:44
-< Mechanical Acceptance >-
--------------------------------------------------------------------------------
* The 1000 wafer marathon run was sucessfully completed at 3:32 A.M.
No assists were necessary.
* Power, vacuum & D.I. water were turned off.
MISC:
* I checked the slurry valve boxes for leaks during 2nd shift. No leaks
were found.
John.
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Note 55.22 CMP.A1 22 of 356
SUBPAC::LANDRY 9 lines 19-AUG-1994 16:11
-< nice try....but totally unacceptable >-
--------------------------------------------------------------------------------
* The Neslab TCU has been found to be improperly plumbed up. The
resevoir drain was hard-plumbed without including a shutoff valve.
This was discovered as we attempted to fill the resevoir. The
ethylene glycol ended up going straight to the GCW drain. The
problems has been addressed with the proper people to have the
situation fixed. Stay Tuned!!!
Doc
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Note 55.23 CMP.A1 23 of 356
ASDG::POIRIER 7 lines 19-AUG-1994 22:37
-< Leveling >-
--------------------------------------------------------------------------------
* CMP.A1 was leveled. The design & layout of the six leveling feet
leaves a lot to be desired. What a pain in the neck, back and just
about everywhere else.
J.P.
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Note 55.24 CMP.A1 24 of 356
ASDG::POIRIER 8 lines 22-AUG-1994 12:09
-< Slurry is flowing in CMP.A1 >-
--------------------------------------------------------------------------------
FYI: Slurry is flowing in CMP-.A1 as of 12:00 noon today.
Please be aware of the protocol restrictions now that
slurry is flowing in the tool.
John.
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Note 55.25 CMP.A1 25 of 356
ASDG::POIRIER 33 lines 22-AUG-1994 18:54
-< mechanical acceptance >-
--------------------------------------------------------------------------------
* The left spindle air cylinder was replaced today. The reason was that
the spindle would not retract the last 1/4 " of its travel. The
cylinder replacement required us to recalibrate the spindle down force
as well.
* The conditioning arm assembly was reinstalled after the replacement
of the mounting shaft. This shaft suffered broken a weld last
Thursday. All adjustments and locations were set today.
* We opened the valve in the slurry valve box and slurry is now flowing
in the tool. The slurry flow rate was also calibrated today.
* The send and recieve elevators were recalibrated. This was done
because the wafers were dragging out of slots # 23, 24 & 25.
Since we are mounting the cassettes H-BAR up, I'm not sure if were
referencing from a surface on the cassette that is held to tight
tolerences. Also, since the problem seems to come and go, I'm not
confident that the cassettes are uniform to each other. I'll take a
look at the Empak print when I get a chance.
Plans for tomorrow:
-------------------
1) Change polishing pad.
2) Install latest rev software.
3) Start setting up CMP.A2.
F.Y.I.:
------
A new phone has been installed in the CMP service bay, the # is 5804.
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Note 55.26 CMP.A1 26 of 356
ASDG::POIRIER 22 lines 23-AUG-1994 18:39
-< Mechanical Acceptance >-
--------------------------------------------------------------------------------
* The conditioner arm travel was re-adjusted. We're trying to set up
IN-SITU conditioning. We need more travel to cover the wafer track.
Strasbaugh is sending us a 6" conditioning disk to replace the 4"
one we are currently using.
* The process folks polished wafers for the first time this afternoon.
* We discovered that the suction between the wafer and the pad is strong
enough to prevent the spindle from lifting under certain conditions.
We may be able to solve this problem by changing our process
parameters or maybe Strasbaugh can come up with a hardware change
on the tool. Stay posted.
Planned activities for tomorrow:
1) Calibrate slurry PH meters.
2) Replace conditioning disk.
3) Polish wafers.
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Note 55.27 CMP.A1 27 of 356
ASDG::POIRIER 41 lines 24-AUG-1994 20:11
-< Mechanical Acceptance >-
--------------------------------------------------------------------------------
* The cleaning station brush heights were checked today using the new
lexan fixture made by Al in the carpentry shop. It worked great.
* The air brush deflector that blows air onto the pad does not work
very well. Gregg Myers came up with an idea for a new one with an
angle instead of the current flat plate. I'm going to ask Al in the
carpentry shop to fabricate us a prototype.
* The new 6" dia conditioning disk arrived today. It does allow
full coverage of the wafer track on the pad but not without
a few problems. The increased friction of the larger disk puts
additional strain on the conditioning arm. This increased strain
is causing the base of the machine, where the conditioner mechanisim
is bolted, to flex approx 1/8". This 1/8" of movement translates into
2" of oscillation at the conditioning disk which is cantilevered over
2 feet from the base. If it is determined that the 6" disk is going
to be used (it's needed for IN-SITU conditioning) then the base will
have to be strengthened with a support bracket or plate.
* Do to a verbal miscommunication during a software adjustment, we
suffered of minor crash. The bridge plowed into the conditioning arm.
The arm did not get the full force of the bridge, thank goodness. If
it did there would be nothing left to it. An alert individual hit the
EPO with just seconds to spare. This allowed time for the bridge to
slow down before impact resulting is a small bend in the conditioner
arm. The arm was disassembled, reshaped and reassembled. We then
made all the necessary adjustments, both software and mechanical, and
ran a test run. The conditioner is now working fine.
* The problem with the spindles not retracting UP has been identified.
The IC 1000 pads combined with an 8 inch wafer cause a lot of suction.
Eric Bodensieck has contacted Rodel for a new pad that will incorporate
concentric grooves and thus reduce the suction. The temporary solution
is to block off different vacuum/pressure ports in the the carriers.
This works but it also constrains the process folks from optimizing
the backpressure on the wafer which is critical to polishing results.
John.
|
| 5.102 | Things are looking better.... | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Nov 11 1995 07:10 | 9 |
|
The night went rather well....a pad that was in Larry's office
for (6) months was installed on C shift. We broke the pad in per
Eric's direction. After seeing results of what happened to A2
(see 7.last), we let the machine sit for an hour and tried running
more wafers at 313 lbs. The table was fine the entire time.
It appears the pad is the culprit. MQC's are going to be run.
D shift
|
| 5.103 | Robot vacuum | FABSIX::R_GEE | | Sun Nov 12 1995 07:02 | 14 |
| * The robot wouldn't pickup wafers out of the send stations.
- Cleaned the robot, end effector and air nozzle, no good.
- Checked the air pressure at the end effector, it read 9 psi.
turned the air pressure back to 5 psi, no good.
- Adjusted the vacuum switch, all set.
B shift
|
| 5.104 | pass down | FABSIX::B_FINN | | Mon Nov 13 1995 19:16 | 9 |
|
System had been Idle. Upon start up it threw a wafer from the left
carrier. System just came up from MQC.
A shift
|
| 5.105 | Gear box oil level | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 16 1995 07:27 | 17 |
|
We checked the level of the gear box and we couldn't
even get a level detection from the top fill/full level
port. The oil is thicker than molasses and we don't a
pump so we are playing doctor and using the intravenus
method. We are working on a gollon right now and we
are not full yet. We called the Strasbaugh 24-hotline
to verify and he said the top hole (the only port hole)
was the fill/full level port. He also agreed that the
spec was correct as far as the quantity, 19 pints. Both
style gear boxes are the same except for the gear ratio,
the oil level is the same. At different times during the
morning, we were firing the table up to 30 RPM's and it
already sound nice and quiet. The oil was not spilling
out of the hole at this time. We will continue to fill
the oil until it hits its level.
D shift
|
| 5.106 | Table cal. value changed, monthly PM completed | FABSIX::B_JUBINVILLE | | Thu Nov 16 1995 11:00 | 16 |
|
also... the carriers on the machine were just going to
be used for the grooved pad. After that, they are to be
pulled off the machine due to high wafer count. The machine
was left in wet idle, however, change the table RPM value
back to 15 RPM's in WET IDLE in the calibration menu. We
wanted to keep the pad and carriers wet without having the
table spin.
The monthly PM was completed and the checklist will
be posted tonight when I come in. SUBPAC is down right now
and I can't access the filled in checklist with all of the
results.
BJ
|
| 5.107 | Wafer breakage | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Nov 18 1995 08:30 | 8 |
|
Tool crashed an exercise wafer from the right
carrier. The carrier housing is the new style
housing with the shims rather than the jack screws.
Tool was cleaned up and is running product again.
D shift
|
| 5.108 | CMP.A1 Status 11/18/95 | ASDG::POIRIER | | Sat Nov 18 1995 19:25 | 12 |
|
System Status:
-------------
* Hot Lot completed at 6:30 P.M.
* Pad being removed after 205 wafers for poor removal rate.
* Carriers still in good shape with only 85 wafers run.
John.
|
| 5.109 | Broke wafers | FABSIX::R_GEE | | Sun Nov 19 1995 07:13 | 11 |
| * Broke wafers on the pad tonight.
Carriers need to be built and a pad installed. One carrier is on
the table witrht the holes completed.
B shift
|
| 5.110 | Wafer breakage | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 23 1995 06:28 | 6 |
|
A wafer slid out of the left carrier and crashed into
the right carrier. We stripped the machine and put the
brushes in the sink and cascading.
D shift
|
| 5.111 | Air Motor Replaced | ASDG::POIRIER | | Fri Nov 24 1995 19:32 | 9 |
|
Cleaning Station Air Motor:
--------------------------
The Left Cleaning Station Air Motor failed to rotate this morning.
The Air Motor was replaced and the Brush height was readjusted.
John.
|
| 5.112 | comments whilst performing the Weekly PM | SUBPAC::LANDRY | | Sat Nov 25 1995 18:36 | 12 |
| The weekly PM was performed today, hence fullfilling the weekly quota.
While performing the PM, we ahd to cut back the tubing on the DI spray
gun due to a severe kink in the line. Also, the jam nut on the inner
conditioner lift cylinder was tightened up, as it had some slop to it.
Slurry pump # 2 was out of whack a bit. it was running at ~10% more
flow than desired. Adjusted the calibration variable to tweak in flow.
The PM was taken one step deeper with the shuttle assembly being
cleaned and lubed. No other problems were found with the system.
JP / Doc
|
| 5.113 | Broken wafer | FABSIX::R_GEE | | Mon Nov 27 1995 07:08 | 14 |
| * Broke a wafer on the pad tonight.
- First 2 wafers after a 45 min. idle period
- 54 wafers on the pad.
- 252 wafers on the carriers.
B shift
|
| 5.114 | passdown | STRATA::FINN | | Mon Nov 27 1995 19:03 | 8 |
|
No slurry flow , Ashland's pump had shut off. Contacted ashland
to restart pump. Changed filter it was clogged. Verified slurry flow.
System was down due to problems with the main slurry pump and other
two systems. System is up and running product.
Tim/Doc/Brendan
|
| 5.115 | Wafer breakage | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 30 1995 08:37 | 7 |
|
A wafer from the left spindle slid out and crashed.
It was discovered that the barbed fitting for the hub
was loose. It's not related to the crash however it
was noted. The machine was cleaned up and a new pad was
installed.
D shift
|
| 5.116 | Robot vacuum line | FABSIX::R_GEE | | Mon Dec 11 1995 06:50 | 7 |
| Replaced the 1/8 " robot end effector vacuum line.
B shift
|
| 5.117 | CALIBRATION VARIABLES AS OF 12/21/95 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Dec 21 1995 00:35 | 203 |
|
1. BRIDGE HOME POS.= -33.751
2. BRIDGE LOAD POS.= -33.709
3. BRIDGE POLISH POS.= 0
4. BRIDGE MIDDLE POS.= -11
5. TEMP IN SCALE FACTOR= 1
6. TEMP OUT SCALE= 1
7. TEMP IN OFFSET= -.3
8. TEMP OUT OFFSET= 1
9. BRUSH SPEED SCALE FACTOR= .719
10. SLURRY 1 FLOW FACTOR= .83
11. SLURRY 2 FLOW FACTOR= 1.29
12. TABLE SHUNT LOE TEMP= 0
13. TABLE SHUNT HIGH TEMP= 0
14. BRIDGE LEFT CURTAIN POS.= -12
15. BRIDGE RIGHT CURTAIN POS.= -25
16. NOT USED
17. NOT USED
18. NOT USED
19. NOT USED
20. SLURRY 2 FLOW FACTOR= .75
21. NOT USED
22. NOT USED
23. NOT USED
24. NOT USED
25. NOT USED
26. NOT USED
27. NOT USED
28. NOT USED
29. NOT USED
30. LEFT PRESS. OUTPUT FACTOR= 6.1
31. LEFT PRESS. OUTPUT OFFSET= 975
32. LEFT PRESS. MIM.= 1100
33. LEFT FORCE SCALE FACTOR= .98
34. LEFT SPINDLE DEAD WEIGHT= 150.26
35. LEFT SPINDLE REDUCE RATIO= 10
36. LEFT SPINDLE CURRENT OFFSET= 0
37. LEFT PRESSURE MINIMUM, TBL2= 0
38. SPINDLES DOWN SOFT VALUE= 1000
39. SPINDLES DOWN HARD VALUE= 1000
40. RIGHT PRESS. OUTPUT FACTOR= 6.1
41. RIGHT PRESS. OUTPUT OFFSET= 975
42. RIGHT PRESS. MIM.= 1100
43. RIGHT FORCE SCALE FACTOR= .98
44. RIGHT SPINDLE DEAD WEIGHT= 142.37
45. RIGHT SPINDLE REDUCE RATIO= 10
46. RIGHT SPINDLE CURRENT OFFSET= .1
47. RIGHT PRESSURE MINIMUM= 0
48. SPINDLES DOWN EXTRA SOFT VALUE= 0
49. NOT USED
50. PRESS. CONTROL LOOP GAIN= .75
51. MAX. PRESSURE STEP DIVISOR= 30
52. FORCE LOOP DERIVATIVE GAIN= 56
53. FORCE LOOP NEG DER GAIN= 0
54. DOWN FORCE INTEGRAL GAIN= 0
55. LEFT FORCE SCALING= 1
56. RIGHT FORCE SCALING= 1
57. BACK PRESS. CONTROL GAIN= 4
58. NOT USED
59. NOT USED
60. 6DS REPEAT TEST (0-NO, 1-YES)= 0
61. TABLE TEMP CONTROL GAIN= 35
62. TABLE REDUCER RATIO= 7.5
63. TABLE CURRENT OFFSET= .9
64. FILTER CONST.(0-UP/FAST-SLOW)= 1
65. BACKPRES UNITS(0-PSIA, 1-PSIG)= 0
66. LT BACKPRESS OFFSET= -1.5
67. LT BACKPRESS SCALING= 1
68. RT BACKPRESS OFFSET= -..255
69. RT BACKPRESS SCALING= 1
70. COND FORCE LOOP GAIN= 6
71. COND FORCE DEAD WEIGHT (LBS)= 2.49
72. COND FORCE SCALE FACTOR= .726
73. COND FORCE 0-LBS, DIA (mm)-PSI= 0
74. NOT USED
75. PUMP 3 FLOW FACTOR= 0
76. NOT USED
77. NOT USED
78. NOT USED
79. NOT USED
80. AXIS 5 OFFSET TO SLOT 0= 3.02
81. AXIS 6 OFFSET TO SLOT 0= 3.04
82. AXIS 7 OFFSET TO SLOT 0= 3.02
83. AXIS 8 OFFSET TO SLOT 0= 3.02
84. CASSETTE SLOT SPACING= .2488
85. LEFT LOAD RINSE, 0-DI, 1-CHEM= 0
86. RIGHT LOAD RINSE, 0-DI, 1-CHEM= 0
87. LEFT CLEAN RINSE, 0-DI, 1-CHEM= 0
88. RIGHT CLEAN RINSE, 0-DI, 1-CHEM= 0
89. CURTAIN RINSE, 0-DI, 1-CHEM= 0
90. CURTAIN RINSE (1-ENBL, 0-DSBL)= 0
91. CURTAIN RINSING TIME (SECONDS)= 0
92. FORCE 0-LBS, WAFER DIA(mm)-PSI= 0
93. TEMP UNITS (O-degC, 1-degF)= 0
94. SHOW COND FORCE (0-NO,1-YES)= 1
95. SHOW PUMP 3 (0-NO, 1-YES)= 0
96. SHOW pH (0-NO, 1-YES)= 1
97. TBL RNS W/CUR RNS (0-NO, 1-YES)= 0
98. NOT USED
99. NOT USED
100. SPINDLE FLUSH (0-NO, 1-YES)= 1
101. FOUNTAIN RINSE (0-NO,1-YES)= 1
102. ROBOT LEADSCREW VALUE= 8000
103. SEND 1 ROBOT POSITION= -35.9
104. SEND 2 ROBOT POSITION= -24.99
105. REC'V 1 ROBOT POSITION= -35.5
106. REC'V 2 ROBOT POSITION= -25.08
107. LEFT LOAD ROBOT POSITION= -9.965
108. RIGHT LOAD ROBOT POSITION= -.51
109. NOT USED
110. ROBOT ARMS POSITION SEND 1= -3030
111. ROBOT ARMS POSITION SEND 2= -3090
112. ROBOT ARMS POSITION REC'V 1= 2880
113. ROBOT ARMS POSITION REC'V 2= 2900
114. ROBOT ARMS POSITION LEFT LOAD= 3030
115. ROBOT TOP ARM POSITION RT LD= 5075
116. ROBOT Z TOP POSITION= .31
117. ROBOT Z MIDDLE POSITION= .44
118. ROBOT Z BOTTOM POSITION= .48
119. NOT USED
120. ROBOT BOTTOM ARM POS'N RT LD= -3120
121. NOT USED
122. NOT USED
123. NOT USED
124. PROG CONDITION (0-NO,1-YES)= 1
125. PROG COND PARK POSITION= -2500
126. PROG COND CENTER POSITION= 110000
127. PROG COND EDGE POSITION= 143000
128. PROG BRUSH REDUCER RATION= 15
129. NOT USED
130. ROBOT Z OVER LOAD POSITION= .185
131. ROBOT Z LEFT LOAD POSITION= .39
132. ROBOT Z RIGHT LOAD POSITION= .37
133. NOT USED
134. SWEEP START (0-EDGE, 1-CENTER)= 1
135. SWEEP STYLE (0-1 WAY, 1-2 WAY)= 0
136. IN SITU COND (0-DSBL, 1-ENBL)= 0
137. NOT USED
138. NOT USED
139. NOT USED
140. CONTROLLED SWEEP (0-NO, 1-YES)= 1
141. COND SCALAR= 0
142. COND PERIOD WIDTH= .5
143. COND HORIZONTAL SHIFT= 0
144. COND MINIMUM COMMAND= 0
145. COND VERTICAL OFFSET= 0
146. NOT USED
147. SEAT WAFERS @ UNLD (0-NO, 1-YES)= 0
148. VAC W/FOUNT RINSE (0-NO, 1-YES)= 0
149. WET IDLE TABLE SPEED= 15
150. AUTO WET IDLE (0-NO, 1-YES)= 1
151. WET IDLE TABLE ON (secs)= 40
152. WET IDLE TABLE OFF (secs)= 60
153. WET IDLE CARRIERS ON (secs)= 15
154. WET IDLE CARRIERS OFF (secs)= 60
155. CARRIER PAD RINSE TIME (secs)= 5
156. LOAD RINSE TIME (secs)= 5
157. FOUNTAIN RINSE TIME (secs)= 8
158. NOT USED
159. NOT USED
160. 2nd TABLE (0-NO, 1-YES)= 0
161. NOT USED
162. 2ND TABLE REDUCER RATIO= 0
163. NOT USED
164. SCRUBBER PRESENT (0-NO, 1-YES)= 0
165. USE SCRUBBER (0-NO, 1-YES)= 0
166. SCRUBBER LOAD POSITION= 0
167. SCRUBBER UNLOAD POSITION= 0
168. NOT USED
169. WAFER BLOWOFF TIME (secs)= 10
170. APPROX WAFR BLOWOFF (psi)= 30
171. MIN LIFT OFF VACUM (psia)= 8
172. WAFER PRESENT ERROR VAC (psia)= 7
173. APPROX FLUSH BLOWOUT PRES (psi)= 12.5
174. WAFER ABSENT ERROR VAC (psia)= 7
175. COOL WATER DETECT (GPM, 0-DSBL)= 0
176. TBL START W/SLRY (RPM, 0-DSBL)= 10
177. ROTATE RESTART (0-NO, 1-YES)= 1
178. LOAD RINSE (0-INTRVL, 1-STEADY)= 0
179. ELEV TANK FILL TIME (sec)= 0
180. DUNK SEND (1-EN,0-DIS) RESET= 1
181. FILTER ROUTINE Kf= 10
182. FILTER ROUTINE Kl= .1
183. SERVICE ALARM (0-DSBL, 1-ENBL)= 0
184. CASS RANDOM/MATCH (0,1) RESET= 0
185. IDLE DELAY MINUTES (5 MINIMUM)= 5
186. CONSERVE LOAD RNS (0-NO, 1-YES)= 0
187. AIR WAND 90-OFF, 1-POL, 2-COND)= 0
188. NOT USED
189. NOT USED
190. SECS BAUD RATE= 9600
191. SECS DEVICE ID= 1
192. SECS T1 TIMEOUT= 5
193. SECS T2 TIMEOUT= 5
194. SECS T3 TIMEOUT= 15
195. SECS T4 TIMEOUT= 15
196. SECS RETRY LIMIT= 3
197. SECS COMM PORT (1 OR 2)= 1
198. REPORT INTERVAL (SECONDS)= 10
199. REPORT MODE (1-ENBL, 0-DSBL)= 1
200. PASSWORD (4 DIGIT NUMBER)=
|
| 5.118 | Start-up for 12/29 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 29 1995 15:09 | 12 |
|
The DI came on but is still out of spec so we didn't want
to keep it to the tool so we shut off the DI feed and opened the
by-pass. Facilities still have some by-passes opened, that's
why we don't have very high pressure.
The slurry lines are all back to normal and slurry is flowing.
We put the filter on but but we didn't run the slurry through
the machine because of the DI situation.
Mitch,John,Leon,BJ
|
| 5.119 | Shuttle Lubed & Adjusted / Right Cleaning Station Air Motor Noisy | ASDG::POIRIER | | Sat Dec 30 1995 15:21 | 11 |
|
* Shuttle:
The Shuttle Rails were cleaned and lubed today. The Air Flow Needle
Valve Controllers were adjusted to increase the travel rate of the
Shuttle. This will shave-off a few seconds from every Auto Cycle.
We also noticed that the Right Cleaning Station Air Motor was noisy.
A shortage request was generated in SGMR for 4 more Air Motors.
John & Mitch.
|
| 5.120 | CMP.A1 START-UP COMPLETE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sun Dec 31 1995 14:31 | 43 |
|
CMP.A1 STARTUP CHECKSHEET
-------------------------
Shift Date
------- -------
1. Ensure that all necessary facilities are B, C + D 12/31/95
available and ready to use.
2. Power up each system. B, C + D 12/31/95
3. Power up each vacuum pump cabinet. B, C + D 12/31/95
4. Power up each Neslab TCU. B, C + D 12/31/95
5. Open incoming DI Water Valve to each B, C + D 12/31/95
system.
6. Close UDR valve at each system. B, C + D 12/31/95
7. Install wafer carriers with new films. B, C + D 12/31/95
8. Place cassettes in left and right send
and receive stations to fill DI Water
tanks.
9. Re-connect slurry inlet and outlet lines B, C + D 12/31/95
to filter housings and install new filters.
10. Change RTC status to SCHEDULED DOWN and
perform a Weekly PM on each system.
11. Install new polishing pads.
12. Re-install PVA scrub brushes. B, C + D 12/31/95
13. Place systems in wet idle mode. B, C + D 12/31/95
14. Change RTC status to VERIFY and notify
Operations that the systems are ready
for MQC.
|
| 5.121 | vacuum problems / rotory union | FABSIX::R_GEE | | Tue Jan 02 1996 07:44 | 31 |
|
* Calibrated the slurry flow for both pumps.
* The system errored for bad vacuum on the right spindle. We
found the right rotory union was leaking.
- Removed the old rotory union.
- Assembled the new rotory union.
Things left to do:
- get and install a new o-ring for the top of the rotory union
rod.
- clean spindle shaft.
- install the rotory union assembly, it's already assembled.
- install and align the hub.
- install carriers and test, sorry no carriers built.
B shift
|
| 5.122 | rotary union installed (right spindle) | SUBPAC::LANDRY | | Tue Jan 02 1996 19:36 | 10 |
| The rotary union was installed this morning on the right spindle.
Vacuum performance was checked and it was fine. The hub was
re-installed and alignment was attempted. Didn't go well at all.
Backed up and checked the spindle alignment. Found it to be out of
tolerance (was .004, not to far out). Adjusted this to .001. Re-did
the hub alignment and brought that in to spec as well. The system is
currently in VERIFY, awaiting a new pad / carrier installation and then
to run breakin wafers.
Doc / Jim T / Kyle
|
| 5.123 | DOWNFORCE PROBLEMS, LEAKING HOUSING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 05 1996 01:17 | 55 |
| From: FABSIX::R_GEE "Bob Gee, Beeper #184 03-Jan-1996 0808" 3-JAN-1996 08:12:00.39
To: @CMP_ALL
CC: R_GEE
Subj: Passdown, the notes file is down. Info for CMP.a1,CMP.B1,CMP.B2
CMP.A1
------
High downforce was noticed on the display screen, 500 lbs
from the right spindle, the system was emo'ed.
- Found the right filter housing was leaking.
Water had leaked onto the load cell amplifier,
cleaned the water up and dried the amplifier.
Production is running mqc's.
B shift
* The system was down until 3am due to scratches (?)
found on the mqc wafers. A second mqc was run with no
scratches found.
* At 6 am the system powered itself down in the middle
of polishing for no apparent reason, crashing all 4 wafers.
- we found that carrier #1 had been polishing
a broken wafer for some time. The wafer detection
didn't detect the crash due to the small size of
the particles.
We thing the system powered itself down due to high
amps. from either the table or head #1.
B shift
High downforce was noticed on the display screen, 500 lbs
from the right spindle, the system was emo'ed.
- Found the right filter housing was leaking.
Water had leaked onto the load cell amplifier,
cleaned the water up and dried the amplifier.
Production is running mqc's.
B shift
|
| 5.124 | Robot "at Left Load" Position Changed. | ASDG::POIRIER | | Fri Jan 05 1996 19:38 | 5 |
|
* Robot Load Position Changed:
----------------------------
The "Robot at Left Load" Position was changed today.
Calibration variable #107 was changed from -9.965 to -9.90.
|
| 5.125 | Robot Pnuematic Sensor. | ASDG::POIRIER | | Sat Jan 06 1996 19:33 | 15 |
|
* Robot Pnumatic Sensor:
---------------------
The Robot Sensor acted-up again Today. The system kept booting out
of auto cycles after completing 1 cycle. No alarms or error messages
appeared during this situation. When I pressed the Cycle Start
button to resume, an error message appeared along the bottom of
the screen reading "Vacuum present at robot end effector". I took
the cover off the robot and found the green LED flickering. A 1/4
turn of the fine adjustment on the pnuematic sensor fixed the problem.
Keep an eye on the sensor over the next few days but don't knock
yourselves out to adjust it as were replacing the robot on Monday.
|
| 5.126 | Rbot wafer detection vacuum sensor | FABSIX::L_SHKOLNIKOV | | Fri Jan 12 1996 06:39 | 6 |
|
Machine would not continue cycling after each run and would not
go into wet mode. Robot vacuum sensor has been adjusted and
problem disappeared.
L.S.
|
| 5.127 | ROBOT SENSOR ERRORS | FABSIX::B_WESTPHAL | | Fri Jan 12 1996 19:38 | 4 |
|
CMP.A1 - Down for problems w/ the robot wafer sensor. The same was adjusted
and the tool was given back to production.
|
| 5.128 | ROBOT SENSOR | FABSIX::B_WESTPHAL | | Sat Jan 13 1996 19:42 | 6 |
|
CMP.A1 - Down For robot sensing errors. Attempted to adjust the sensor by
turning the needle valve until the lED flickered but it never did.
Made several attemps at adjusting both tthe needle valve and pot.
but could not get it in. Suspect that the switch itself is bad.
|
| 5.129 | cal of wafer detect sensor | FABSIX::B_FINN | | Sun Jan 14 1996 17:56 | 9 |
|
B shift replaced Robot Wafer Detect Sensor. We completed the repair by
calibrating said sensor. Ran test wafers aok. Returned the system
manufacturing.
A shift
|
| 5.130 | vacuum | FABSIX::B_WESTPHAL | | Thu Jan 18 1996 19:51 | 5 |
| CMP.A1 - Down for dropping the carriers of the spindle. This happened
at the end of the shift so I didn't have much time to look at it but
believe the pump to be the problem. Noticed that A1's pump was running
alittle louder than A2's. The outside cabinet housing the pump was
very warm to the touch and hot air could be felt coming from fan.
|
| 5.131 | Spindles dropping off hubs | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 19 1996 06:49 | 25 |
|
The spindles were dropping like bird turd last night.
With the assistance of Eric B., we lowered the "new"
software calibration for spindle flush pressure from 20
to 15 psi. The extra 5 psi was pushing the carriers off
of the hubs. The o-rings however are another story.
They were the stock line line type o-ring and not the
white proper o-rings. Eric replaced the four o-rings
in the hubs with new ones from stock.
When the right carrier fell, it had perfect timing.
It fell on the robot just after the robot arm was picking
up the wafer out of the right load cup. The pedistal took
a hit but seems to be ok. We now have an error. After the
wafer in the right cup is blown off and is ready for pick-up,
The system alarms saying there is no vacuum in the cup. The
alarm clears after 4 or so "rings" and continues on its way.
The pedistals were swapped and that wasn't it. The vacuum
setting might of gotten knocked off or the pedistal isn't
coming up enough to form a good seal. Along with the other
problems going on, we lets them run it since it wasn't causing
a problem. I logged a warning on it and informed D shift OPS.
Todd from Strasbaugh is suppose to be on site today. I will
communicate this problem to C shift and ENG.
|
| 5.132 | Clogged drain lines | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 19 1996 07:09 | 15 |
|
Another thing.... while we were working on the
load cups, we noticed the shuttle area had 3" of
DI water and slurry. It wasn't draining. We traced
it back to the union for the GCW waste where it comes
out of the machine and before it goes through the floor.
It was clogged beyond that. An action-call was placed
to security and site services brought in the roto-roter
and cleaned out the 2" line all the way to the main 4"
line. In a distance of 15ft, why are there soooooooooooo
many elbows. That is sure to cause a problem in the
future.
All's a flowin' now.......
D shift
|
| 5.133 | vacuum regulator leak | FABSIX::B_FINN | | Fri Jan 19 1996 19:08 | 10 |
|
Manufacturing ran a couple of lots, before system failed for carrier
vacuum problems. Rep traced the problem to vacuum regulator valve, when
back pressure would come on it depleted the vacuum leaking by the valve seat.
Replaced valve. System back up to manuf.
A shift
|
| 5.134 | Robot Z height | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Jan 20 1996 05:28 | 11 |
|
The robot Z-height must of gotten a bit out position
when it was nailed. The robot wasn't coming down enough
to pickupt the wafers. It was missing them from time to
time on both send elevators and was dropping them into
place in the receive elevators. The Z-bottom was adjusted
from 1 to 1.05. Its been running great all morning without
any problems but... keep an eye on it.
D shift
|
| 5.135 | The new airmotors have arrived | SUBPAC::TOOKER | | Mon Jan 22 1996 14:04 | 8 |
| CMP Equip. Techs,
I have just received 4 new air motors for the cmp.a1/.a2 clean stations. These
need to be installed as soon as possible. I will leave them on my desk in a
plastic bag.
Thanks,
Jim Tooker
|
| 5.136 | New robot calibration procedures | SUBPAC::TOOKER | | Mon Jan 22 1996 15:05 | 9 |
| CMP Equip. Techs,
I have placed clean room copies of the procedures for calibrating the new
robot on cmp.a1 in the very back of Strasbaugh manual #2. Please refer to
these new sections when performing any robot position calibration at an
elevator or load station.
Thanks,
Jim
|
| 5.137 | Left SEND elevator | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 24 1996 06:46 | 11 |
|
The left SEND elevator was removed and everything was
cleaned up and lubed. There was an excessive amount of
grease on the rails and lead screw. The motor assembly
showed signs of rust and was cleaned up as well. OPS
are running the tool right now so it was not tested as
far a repeatability is concerned but it homes fine. The
WARNING will stay on the tool until it is verified.
BJ
|
| 5.138 | pm in progress | FABSIX::B_FINN | | Wed Jan 24 1996 19:38 | 14 |
|
Kyle saw a 400 A' difference in removal rate between head 1 + 2,
he asked us to check out the system ie downforce. This was great since we
wanted the the system for a monthly. Trained brad on hub alignments. Right
spindle was 9mils out. Have been adjusting it since, real pain, came as close
as 2 mils but lost it. Sorry Brian and Leon. Check sheets for weekly and
monthly have been forward to you. Jim would like the air motors to go in also.
Could not find regulator setup to check ep pressure regulators. I got a fluke
adapter from Jim Tooker and brad added a tee, but we did not get past the
spindle angle. Screws for covers are on black pad cabinet.
A shift
|
| 5.139 | AIR MOTOR REPLACED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 25 1996 05:52 | 7 |
|
The air motors were replaced with new ones during
the monthly PM.
BJ
|
| 5.140 | it's hose was pinched! | SUBPAC::LANDRY | | Thu Jan 25 1996 12:28 | 8 |
| Was called to look at why slurry pump two was not flowing when it was
commanded to. Found that the hose length was a tad bit long, causing
the head rotation to pinch the tubing off on the output side. Cut back
about an inch on the hose, then reconnected. Performed slurry pump
calibration on pump two ONLY.
Dr.
|
| 5.141 | Robot problem back. | FABSIX::L_SHKOLNIKOV | | Fri Jan 26 1996 07:13 | 4 |
|
Robot didn't pick up the wafer from right send elevator.
Elevator was adjusted but problem appeared again after 6-8 wafers
run. Run machine with left send elevator.
|
| 5.142 | system checks in progress | SUBPAC::LANDRY | | Fri Jan 26 1996 18:23 | 43 |
| The system has been experiencing abnormal polishing performance
for the past couple of shifts. It appears to have just begun
these problems PRIOR to the PM that was performed mid-week.
Uniformity, removal rates, etc are bad. Therefore, Jim and I
began to check on a few components in hope of locating an obvious
cause. Details thus far are below.........
- Checked the E-P regulators (Fairchilds) for both the left and
right spindles. The high end (80 PSI) was off a tad bit on
both spindles, but not enough to cause any problems. We used
the new pressure transducer/fluke meter to read the pressure.
A neat little tool! The pressures can be read more accurately
than the gauges we were using previously.
- Performed Spindle Down Force calibration. Both were within spec.
We reran the left spindle a second time to tighten the margin.
The right was run once. Again, fairly certain this is not
causing the disparities.
- Next, the hub alignment was confirmed in spec for both spindles.
So, this is ruled out as the cause.
THEREFORE.........
- The spindle alignment needs to be confirmed next.
- Maybe look at the polish table alignment, which is never out???
- You might want to call Jim T at home (before the night gets too
late, of course)
AFTER THAT........
- Punt?? No....maybe run a wafer or two to see if any little
tweaks helped.
FYI department.....
- Both carriers and both scrub brushes are soaking by the sink.
- A new pad will need to be laid down when ready to exercise wafers.
Jim T / Doc
|
| 5.143 | left spindle pressure transducer / Robot | FABSIX::R_GEE | | Tue Jan 30 1996 07:12 | 32 |
| * We have been having carriers sticking to the pad intermittently
do to poor vacuum on the left carrier. The system won't allow
the spindles to raise without proper vacuum.
Found the problem to be a broken wire at the connector for
the left spindle pressure transducer. Repaired the broken
wire and ran for several hours with good vacuum.
----------------
* The Robot wouldn't pickup wafers from either send cassette.
The vacuum seems to be working fine. It looked like the robot
bottom and middle positions are to low. It picks up out of
the load cups fine.
Cleaned the robot and end effector, no good.
Checked the robot to send cassette level it looked o.k.
Adjusted the robot middle position (CV#117) from .96 to .85
Adjusted the robot bottom position (CV#118) from 1.05 to .98
Adjusted the left send offset to slot "0" from 3.02 to 3.1
The height alignments look good but still not working. Our
unfamiliarity with the software and robot made the job very
time consuming and frustrating.
B shift
|
| 5.144 | robot vacuum switch calibration | SUBPAC::TOOKER | | Tue Jan 30 1996 19:13 | 25 |
| This morning I calibrated the robot vacuum switch as per the new robot
calibration procedures added to the back of service manual #2. I found
this procedure very easy to perform in comparison to the calibration
procedure for the old robot vacuum sensor. Anyone attempting this new
procedure must use 2 mirrors in order to correctly read the digital
readout on the vacuum switch. I did this by wedging the mirror from
the toolbox in front of the vacuum switch and then holding a wafer in
my left hand to reverse the readout image. The switches for setting
the vacuum switch can be reached and pressed with the short end of an
allen wrench. After completing the calibration, I cycled 50 wafers
through the system (25 per station). The robot picked up all wafers
without a problem. However, there is still a problem with the left
receive cassette station. When the robot loads a wafer into the cassette,
the robot arm is dragging the wafer partially out of the cassette. Some
wafers are coming back out further than others. Once or twice, I saw a
wafer get caught on the top of the water tank and lift the cassette up.
This could break wafers and if the sensor arm raises up, it will some-
times abort the auto cycle. I believe the problem can be fixed by re-
calibrating the elevator and robot positions, but there was not enough
time today to do this. In the interim, I have placed a warning on cmp.a1
to NOT use the left send and receive cassettes. Tomorrow morning I will
try the new calibration procedure for this and see how it goes.
Jim
|
| 5.145 | Robot to elevator alignment / wafer present | FABSIX::R_GEE | | Wed Jan 31 1996 06:00 | 37 |
| Aligned the robot arm to the left send and left
receive elevators. Ran over 100 wafers using only
the left send and left receive elevators, everything
looked very smooth. Removed the warning in RTC.
Calibation variables changed:
old new
#80 left send offset to slot 0 3.1 3.07
#82 left recv offset to slot 0 3.15 3.12
#116 robot up/down top position .83 .8
* Still having problems with the robot thinking there
is a wafer on the end effector before it moves to the
send elevators, you must push cycle start to continue.
We believe the problem is that before the robot
moves to send it blows the water out of the end
effector line. This creates a puddle of water
between the end effector vacuum hole and the top
cover. When the robot checks for a wafer present,
before moving the send cassette it sucks up water
and thing there is a wafer present. This was confirmed
by blowing the water out from under the end effector
manually before it looks for a wafer, the error was
gone. This was tested many times.
The error is still there and needs to be addressed. A
warning has been logged in RTC.
B shift
|
| 5.146 | "wafer present on robot" error problem | SUBPAC::TOOKER | | Wed Jan 31 1996 16:10 | 23 |
| The last few days we have been seeing a problem on cmp.a1 where the "AUTO
CYCLE" will abort due to a "WAFER FOUND ON ROBOT" alarm. This has been
occuring at times prior to the robot getting wafers from the send cassettes.
Prior to getting wafers from a send cassette the system checks for any wafers
already present on the robot. We are getting this alarm because the air
pressure to the robot vacuum switch is too low. In talking to Strasbaugh,
they feel that there is a kink somnewhere in the airline running from
solenoid 44 to the robot air pressure regulator. This is the same regulator
previously used for the old robot vacuum sensor pressure. The pressure at
the regulator should be 15 psi and the pressure on the robot vacuum switch
readout should be 5.0 psi without a wafer present. Currently the robot
vacuum switch readout is ~1.4 psi. This is not enough pressure to blow the
water out from the vacuum line after unloading a wafer. When the system
checks to see if a wafer is present prior to getting another wafer from the
send cassette, the system thinks there is a wafer present due to the water
in the vacuum line. If this alarm occurs and the "AUTO CYCLE" aborts, you
will need to press "START" to continue the "AUTO CYCLE". When time allows,
maintenance will need to trace the lines to check for any kinks. Please call
me at home at 508-874-0839 if there are any questions.
Thanks,
Jim
|
| 5.147 | Vacuum problem corrected | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Feb 01 1996 05:45 | 8 |
|
Found a slit in the 1/8" end effector line.
Most definitely a potential cause for the vacuum
problems. Replaced line and checked with transfer
program. Will remove WARNING when everything else
looks ok.
BJ
|
| 5.148 | Robot End Effector Pressure too low | ASDG::POIRIER | | Thu Feb 01 1996 19:27 | 19 |
|
* Robot Air Pressure:
------------------
With the Robot End Effector Pressure Regulator set at 15 psi, the
pressure at the Robot should be 5 psi (Dynamic). Unfortunately, its only
1.2 psi. This condition is causing the system to error-out of
the Auto Polish Cycle after every run. (Software checks for wafer on
End Effector before picking-up wafer at the Send Cassette).
We visually inspected the air hoses that run from SOl 44 to the Robot
and found no kinks. We removed the barbed fittings from Sol 44 and
discovered them clogged with slurry. They were cleaned-out and re-
assembled. The pressure at the Robot increaced only slightly.
We suspect that the solenoid valve itself may be clogged with slurry
causing the pressure drop. "D" shift, we have ordered a replacement
valve fron the stockroom. Please replace sol valve #44 and check
the air press at the Robot.
"C" Shift
|
| 5.149 | Robot amendment | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Feb 01 1996 19:28 | 9 |
|
Due to the fire alarm this morning, my reply
was rushed. It was suppose to read that I had replaced
the 1/8" line and was about to start the transfer
program before the alarm went off. I spoke with EE
in the morning and they understood what I did and were
going to go ahead and recalibrate the robot..
BJ
|
| 5.150 | Robot Vacuum Sensor Calibrated | ASDG::POIRIER | | Fri Feb 02 1996 19:15 | 6 |
|
* Robot Vacuum Sensor Cal:
-----------------------
The Robot Vacuum Sensor was calibrated to reflect the change in air
pressure at the End Effector.
|
| 5.151 | load station alignment | FABSIX::B_FINN | | Mon Feb 05 1996 18:49 | 15 |
|
Broke a wafer form left spindle on the pad. Checked alignment and found
the wafer was intermittently not being placed in the carrier at
load correctly. Wafer was intermittently bridging the black exposure
ring.
Cleaned up broken wafers, (left broken, Right wafer scratched and
cracked), Replaced one Black extension ring, Changed Pad.
Realigned left Load Station to the lefty carrier, tested aok.
A shift
|
| 5.152 | crash & valve | SUBPAC::LANDRY | | Tue Feb 06 1996 19:17 | 13 |
| A wafer spit out on the table from the left carrier early
this morning. Jim T's trigger finger on the EMO save one
of the carriers. The left load station alignment was verified.
Mess cleaned up, new pad, one new carrier installed, a new
diamond disk installed and we were ready to run again. Breakin'
wafers were successfully run. MQC's passed. Turned the system
back into manufacturings hands.
While the mess was being cleaned, the teflon valve on the "dog
dish" was replaced with a new one from stock (listed in the
Strasbaugh parts inventory).
A Shift
|
| 5.153 | pm / pc | SUBPAC::LANDRY | | Tue Feb 13 1996 19:28 | 8 |
| The monthly PM was performed and completed today. I'm short on time,
so the chechsheet will be completed and entered tomorrow.
On a good note......Jim T got the PC back in shape. The down force
program works just fine!
A Shift
|
| 5.154 | Rotbot Vac Switch in need of adjustment | ASDG::POIRIER | | Thu Feb 15 1996 19:30 | 7 |
|
* Robot Vacuum Switch:
-------------------
The system started booting-out of Auto Cycle again this afternoon.
Its doing this on every 2nd or 3rd cycle. The Robot Vacuum switch
needs another adjustment after completion of the current run. The
run should be completed within the next few hours.
|
| 5.155 | Vacuum switch recalibrated | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Feb 16 1996 07:28 | 6 |
|
The vacuum sensor in the robot was tweaked again. The
tool kept stopping after polish cycles without any warnings.
D shift
|
| 5.156 | Software bug | SUBPAC::TOOKER | | Fri Feb 16 1996 14:35 | 15 |
| On cmp.a1 and cmp.a2 there is a bug in the software that will occasionally
cause the autocycle to abort and go to idle. This occurs after the robot
has unloaded wafers and before trying to load more wafers. At this point,
the system checks to see if there are any wafers present on the robot before
trying to take any wafers from a load cassette. Strasbaugh says that the
time delay in the software is too short and this is causing the system to
eroneously sense the presence of a wafer. Next week, Strasbaugh is sending
a new software Rev. to us that will correct this problem. If the auto cycle
does abort to idle, hit "start" to resume the autocycle. Maintenance techs.,
please do not adjust the vacuum switch as a fix for this problem. Only adjust
the vacuum switch when the robot misses picking up a wafer from a cassette.
(i.e. the robot moves into the cassette and comes back out without a wafer)
Thanks,
Jim T.
|
| 5.157 | Cut down a speedfam pad | FABSIX::R_GEE | | Mon Feb 26 1996 06:43 | 20 |
| We completed the weekly p.m. and replaced the pad with a
cut down speedfam pad. This was done because the engineering
and strasbaugh pads seem to be failing for poor uniformity
after only a very few wafers. The last Strasbaugh pad, (new
shipment) replaced had only 225 wafers and we had problems
qualifing the one on cmp.a2. The Engineering pad had to be
replaced after only 98 wafers. The speedfam pad is from an old
lot of pads and hopefully will last longer.
TOP CR QJMR0313A,P/II
S-IV, 32", II
LOT# 6AP-JP2
bottom cr suba iv,28",ii
lot# 6av-da1-4
Ran 12 breakin wafers and 2 mqc wafers, it passed mqc's.
B shift
|
| 5.158 | air motor replaced | FABSIX::B_FINN | | Wed Feb 28 1996 19:32 | 8 |
|
Robot lost position, would not continue needed to be
re home. Air brush motor on left clean station failed.
Replaced air motor, tested motor aok
A shift
|
| 5.159 | Robot Pick-up Problems on both Send Stations | ASDG::POIRIER | | Thu Feb 29 1996 19:38 | 27 |
|
* Robot pick-up problems at both Send Stations:
--------------------------------------------
The Robot was having wafer pick-up problems at the Right Send Station
this afternoon. The Robot End Effector was contacting the edges
of the wafers. The Elevator was re-homed and NO improvement was
observed. We noticed that the Elevator was vibrating at its upper-
most position. We performed a system reboot and the Elevater started
functioning normally again. I heard that this condition appeared
recently on another shift. Anyone have any thoughts? We're suspecting
the DCX Module.
* Robot not arriving at "Left Send" error:
----------------------------------------
This error came-up repeatedly all afternoon. We noticed that the
Robot X axis position was 35.990 while the error was appearing. We
checked the calibration variable for the Left Send and found the
value to be 36.150. The Robot was being mechanically restrained
from reaching its set position. Thus, the error "Robot Not Arriving
At Left Send."
WE cut six folds from the Robot lead screw bellows to eliminate
the bellows from wedging between the side of the tool & the Robot.
A cassette of wafers were run on both Send Stations without any
errors.
|
| 5.160 | New wafer push bars installed | SUBPAC::TOOKER | | Fri Mar 01 1996 15:39 | 9 |
| Today we installed new style wafer push bars in cmp.a1 and cmp.a2. These
are the bars located inside each elevator rinse tank to help keep the wafers
from floating out of the cassettes. The new bars are thicker than the old
ones and should do a much better job of keeping the wafers in the cassettes.
Please ensure that the wafers are completely in the cassette when placing a
cassette of wafers onto a cassette station.
Jim T.
|
| 5.161 | uniformity/scratches | FABSIX::B_FINN | | Mon Mar 04 1996 19:30 | 12 |
|
Problem: Bad uniformity and Scratches.
Engineering made several changes. Lowered Platen temp to
25 degrees, removed suba IV. Failed uniformity at 15%
Trying now with ic 1000 and suba IV, but temp still low.
If it fails again Temp will need to be set back to 37 degree's
A shift
|
| 5.162 | wafer breakage | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Mar 07 1996 23:17 | 7 |
|
System crashed two wafers. Upon cleaning up that carriers,
Leon found a bad chack valve inside one of the carreirs. The
tool was cleaned up and new pad and carriers installed.
D shift
|
| 5.163 | Wafer breakage | FABSIX::B_JUBINVILLE | | Fri Mar 08 1996 07:00 | 12 |
|
During the running of the break-in wafers
a ~crash~ consisting of two wafers and their
respective carriers took place. The small pieces
of film that was as a result of not being blown
out during assembly was evident on the brushes,
the wafers, pad and check valves. After everything
was cleaned up, new carriers and pad were put on the tool.
BJ
|
| 5.164 | scratches and brushes | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Mar 09 1996 04:52 | 20 |
|
A1 was down for scratches at the end of C shift. The
brushes were off the tool soaking. After inspection, a
few small pieces of wafer debris were embedded in the brushes.
The brushes were ordered but to my lovely luck this week, the
brushes are in VSR1 in stockroom 6 and it is down until Monday.
I called around and there were now brushes in hiding. Then to
my luck again, A2 crashes so I took the brushes off of A2 and
put them on A1 since there was already a new pad on A1. the tool
was MQC'ed and passed on everything, great! But... the right
spindle was sticking at lift off. The conditioner was looked at
and it was ok. While running product, a wafer slid out of the
right carrier but did not crash. My partner removed the right
spindle and performed open heart surgery. After the carrier
was rebuilt and put back on the tool. A quick MQC was done and
it failed for MQC's and scratches. Off goes the pad... The system
came back up after that.....
BJ
|
| 5.165 | Conditioner Head / Right Send Elevator - Software Bug | ASDG::POIRIER | | Sat Mar 09 1996 19:29 | 16 |
|
* CONDITIONER MOTION:
------------------
The Conditioner was hesitating and making a growling noise during its
sweep. One of the socket head cap screws had loosened-up and was
preventing the disk holder from gimbling. The screw was tightened and
the problem disappeared.
* Right Send Elevator/ Software Bug:
---------------------------------
The Right Send Elevator Continues to Loose its position. This causes
the Robot End Effector to miss a wafer at pick-up & hit the side of the
next wafer. We had to EMO the system twice today to recover from this
situation. Jim Tooker is waiting for Strasbaugh to send us a fix for
this bug.
|
| 5.166 | robot end effector | FABSIX::R_GEE | | Mon Mar 11 1996 03:30 | 6 |
| * The robot would pickup the wafer out of the send cassette
and then error for no wafer on the end effector. Cleaned the
end effector but it didn't help. Since CMP.A2 was down waiting
for parts we swapped the end effectors, the problem went away.
B shift
|
| 5.167 | vac line torn | STRATA::FINN | | Mon Mar 11 1996 19:19 | 8 |
|
End effect not picking up wafers. Replaced 1/8 inch vacuum hose, which
was torn. Vacuum was poor at wafer. Cleaned bur from end effector.
Test AOK
A shift
|
| 5.168 | left receive | STRATA::RIDLON | Eliminate the obvious | Tue Mar 12 1996 20:34 | 5 |
| Left receive elevator not working. Found the cassette sensor wire
crimped under the elevator preventing it from making the home sensor.
Once it was removed it homed fine.
B shift
|
| 5.169 | software changed to ver 4.16.3 | FABSIX::B_FINN | | Wed Mar 13 1996 19:38 | 25 |
|
Version 4.16.3 installed today.
System was placed down for system robot halting during wafer
load. We have been working the last three weeks to get a new version
of software in to fix this bug. We picked it up at the dock this
morning and installed it. Config values and error limits in dos were
changed as well as several on the config/parameter page. We also had
to make mechanical adjustment to upper and lower limit switches on
both right and left spindles. this is due to the new way the software
reads the switches.
System is running breakin wafers Right now, to test the complete
software. when this is complete the "handling" program must be run
until d Shift is satisfied there are no hang ups.
Also had to stone the end effector to remove burs. Its running well
now.
Brendan/Hawk
|
| 5.170 | Auto-cycle failure, slurry filter issue | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Mar 14 1996 04:52 | 17 |
|
After cycling ~250 wafers on the tool, the robot had
failed to continue auto-cycle (4) times. Since this is
why we were verifying the tool, I stopped the run. B2
had its slurry filter clogged and there were none in stock
so I used the one from A1. I tried calling PE to get the
ok to run the tool without the filter but I couldn't reach
him. OPS are running MQC's to at least get that part done.
If PE gives it the thumbs up, at least it will be ready
to be turned over to production.
The slurry upgrade for the peristaltic pumps has been
completed. Everything is flowing well and the calibration
of the flow was completed.
BJ
|
| 5.171 | Robot bottom position @ L Send/ Robot Load Pos Changed | ASDG::POIRIER | | Thu Mar 14 1996 19:43 | 28 |
|
* Load Positions Changed:
----------------------
The following calibration variables were changed due to poor loading
at both load stations:
#107 from -9.6 to -10
#108 from -.2 to -.3
#115 from 50100 to 50600
These changes work well when wafers are picked-up from the right send
elevator. However, these settings do not work well with the left send
station because the elevator needs calibration. The system was put
back UP with a warning on the left send elevator.
* Robot Bottom Position @ Right Send:
----------------------------------
The Robot (Bottom) position at the Right Send Station was changed
due to excessive deflection of the wafers. This may have been the
cause of the intemittent wafer pick-up problems at the Right Send
Station. The excess deflection of the wafer may have been causing
the Robot End Effector vacuum seal to break. If this happens, the
Robot will back out of the cassette, the elevator will index up by
one slot and the End Effector will crash into the side of the next
wafer. Calibration variable #118 was changed from .98 to .97
|
| 5.172 | Left send elevator | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Mar 14 1996 22:23 | 14 |
|
Previous shift had put a WARNING on the left send
elevator due to positioning and handling issues. Two
full boats of wafers were run using the HANDLING recipe
and we experienced no problems at all. With the elevator
that is...
One thing I did notice is a "Both up and down sensors
on the left spindle were on" error pop up for a second. These
switches were adjusted during the software upgrade. These
might have to be adjusted if this becomes an issue.
D shift
|
| 5.173 | handling trouble | FABSIX::B_WESTPHAL | | Fri Mar 15 1996 19:40 | 9 |
| CMP.A1 - Tool is down for robot pickup/handling problems. The robot vacuum
switch was recalibrated and the handling problems disappeared for
a few hours only to reappear later in the shift.
Strasbaugh was contacted and they suspect we have a vacuum leak
somewhere between sol #44 and the robot end effector. Trace hose
# 94 for leaks.
NOTE: A new slurry filter was installed on the tool today.
|
| 5.174 | Robot problem went away??? | FABSIX::L_SHKOLNIKOV | | Sat Mar 16 1996 07:34 | 11 |
| The robot wouldn't pickup the wafer out of the send cassette.
Vacuum line between sol#44 and the robot was bypassed.
No vacuum leak was found. Vacuum was checked at the end effector
point looks good 11 mm/m - on other side of vacuum line 12.
Recalibrated the vacuum sensor and run 70 wafers - OK.
After that robot failed again - didn't pick up wafer from slot 14.
Checked sensor calibration - fine. Looks like elevator getting
out of alignment after robot arm reaches certain slot.
Otherwise vacuum sensor doesn't work properly.
D - shift
|
| 5.175 | Robot Vac Problems / Load Station Drop-Off Positions | ASDG::POIRIER | Duuuhhh | Sat Mar 16 1996 19:37 | 25 |
|
* Robot Vacuum Problems:
---------------------
Vacuum line #94 that runs from SOl#44 to the Robot End Effector
was monitored for leaks, per Strasbaugh's instructions,
and none were found.
The Robot Vacuum Switch has been repeatedly recal'ed over the last few
days. The robot will handle wafers properly for 1 to 18 hrs before
failing. (We are observing a direct "cause & effect" after the vacuum
switch is adjusted). "B" Shift, you may want to continue the
troubleshooting by checking all the vac connections in the Robot.
A & B SHift, We've been working this problem with Todd Fordyce
at Strasbaugh.
Load Station Drop Off Positions:
-------------------------------
After the Robot Handling issue is resolved, the robot drop-off
positions at the 2 load stations need fine tuning.
This is due to a calibration of the "Robot at Right Send Station"
adjustment that was performed yesterday. We were not able to
follow thru with the Drop-off at Load adjustment due to the
Robot handling errors.
|
| 5.176 | robot stuff | STRATA::RIDLON | Eliminate the obvious | Sun Mar 17 1996 06:50 | 23 |
| Checked end effector and found burrs in the end of it from
hitting wafers, these were cleaned off with a razor blade (any burrs
will prevent the wafer from making a good seal which is essential in
any vacuum system). Checked the
robot arm for center (paddle end over rectangle black cover) and it was
out, also from smacking into wafers, this was bent back to center
(pretty flimsy set up).
On the right send cassette noticed that the spacing between the wafer
and end effector wasn't consistent from top to bottom. Changed the
motor and encoder to correct this.
The left and right receive cassette offsets were adjusted for smoother
wafer placement. The Left and right load placement numbers were
adjusted also for smoother wafer placement.
Transferred a cassette of wafers from the left and right and everything
looked good.
Time will tell.....
B shift
|
| 5.177 | Robot alignments / Right send elevator | FABSIX::R_GEE | | Sun Mar 17 1996 06:49 | 15 |
| The system was down due to robot vacuum and alignment
problems. We found all alignments needed to be adjusted.
The robot to right send elevator adjustment was done. We
found the alignments looked good at the top of the cassette
but the robot hit the wafers at the bottom of the cassette,
the 25th slot was off by 1/4". We removed the elevator and
replaced the motor and encoder, both looked bad. We ran 100
wafers with no problems.
No vacuum problems found.
B shift
|
| 5.178 | ghost wafers | STRATA::RIDLON | Eliminate the obvious | Mon Mar 18 1996 05:54 | 10 |
| Alarmed several times for "wafer found on robot". Rather than adjusting
the vacuum switch we checked the tool to make sure everything was
working as it should. The only thing we found out of the ordinary was
that solenoid 44 wasn't turning on when it should. When we checked the
machine the tool was in wet idle and solenoid 44 was not energized. On
A2 it was. Whether this is a problem or not is unclear. We cycled some
wafers through in the hopes it would alarm but it didn't. Gave it back
to production as they had work for it.
B-shift
|
| 5.179 | semi annual in progress | STRATA::FINN | | Mon Mar 18 1996 19:32 | 6 |
|
Semi annual pm in progress, check sheet sent to B shift
A shift
|
| 5.180 | Purge pressure increased on cmp.a1 | SUBPAC::TOOKER | | Wed Mar 20 1996 16:25 | 10 |
| Today I increased the robot vacuum line water purge pressure from 25 psi to
33 psi, and recalibrated the the vacuum switch. After this, 50 wafers were
cycled with the handling recipe without any problems. I want to see if this
helps the "wafer present on robot" error that we have been getting on cmp.a1.
If anyone sees this problem, please send me mail so that I will know if the
problem is getting better or not.
Thanks,
Jim T.
|
| 5.181 | System upgraded with new load and clean station rings | SUBPAC::TOOKER | | Wed Mar 20 1996 16:26 | 8 |
| CMP.A1 and CMP.A2 have been upgraded with new load station rings and new
6 roller clean station rings. I have checked the alignment between the
spindles and the new rings, and cycled 50 wafers through each system with
the handling recipe without any problems. Please be aware that if either
system starts to have misloads, that a re-alignment may be necessary.
thanks,
Jim T.
|
| 5.182 | Crash... | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Mar 21 1996 05:10 | 21 |
|
The tool crashed at beginning of shift. It
was a good crash to say the least. Not your
ordinary "slide out, opps, EMO, small mess ect....
The tool was cleaned up and a new pad was placed on
the tool. Upon checking out the carrier in question,
I found one of the .50 cent el-cheapo check valves
completely inoperative and closed. After I replaced
all of the tubing and check-valves, I actually spent
some nice quiet quality time rebuilding a set of
carriers. The tool went through pad break-in and
passed MQC's with no scratches and good uniformity.
e-ha...
I'm going to Disneyland.....
BJ
|
| 5.183 | Wafer Fly-Out & Breakage @ 7:10 p.m. | ASDG::POIRIER | Duuuhhh | Thu Mar 21 1996 19:25 | 11 |
|
* Wafer flyout & breakage at 7:10 P.M.
------------------------------------
Two wafers broke at Approx 7:10 p.m. The system was not used on the
shift until 7:00 p.m. Ten conditioning cycles were run on the Pad
before any wafers were run. The system was running wafers 5 & 6
when the fly-outs occurred. We do not know what step of the Auto
Cycle was in process when this happened as noone was watching at the
time.
|
| 5.184 | Tool had no problems | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Mar 22 1996 05:03 | 9 |
|
This tool has carriers built by ENG with no check valves
no back pressure in the recipes and just the outer holes open.
OPS broke in the pad and ran passed MQC's. No problems were
seen however there is only 38 wafers on the pad.
BJ
|
| 5.185 | 32" Pad cut down & installed | ASDG::POIRIER | | Fri Mar 22 1996 19:42 | 7 |
|
* Wafer Fly-out Problems:
----------------------
A 32"Speedfam IC 1000 pad was just placed on the tool. The Break-in
recipe is now running. The Left Carrier is has a vac leak. Please
remove & repair or build-up a new one.
|
| 5.186 | no crashes but failed MQC's | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Mar 23 1996 05:28 | 10 |
|
Tool failed first round of MQC's from being down and
there were no over currents or slide outs. The condition of
the tool is currently :
DOWN/VERIFY-U
32" pad cut down to 28"
check valves back in line in the carriers
new style housing with spacers, no jack screws.
|
| 5.187 | crash and burn | STRATA::RIDLON | Eliminate the obvious | Wed Mar 27 1996 06:19 | 9 |
| Crashed wafers twice tonight. Both times the wafers were just breakin
wafers. Pad and carriers replaced both times. Weekly pm was completed
while the machine was down. The second time it crashed the tool kept
alarming for "wafer found on spindle." This was due to one of the
carriers having a check valve installed backwards. Both of the check
valves should be installed so flow is allowed from outside of carrier
to middle of carrier.
B shift.
|
| 5.188 | CMP.A1 shutdown for facilities tie-in completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Mar 28 1996 06:07 | 57 |
|
SHUTDOWN: 5:00 AM ON 3/28/96
STARTUP: 9:00 PM ON 2/28/96
CMP.A1 SHUTDOWN CHECKSHEET
--------------------------
Tech. Date
------- -------
1. Change RTC status to SCHEDULED DOWN. BJ 3/28/96
2. Remove all wafer carriers. If possible
keep them wet. If not ensure that there
are enough carriers with new films for
startup. BJ 3/28/96
3. Remove all wafer cassettes and drain Send
and Receive DI Water tanks. BJ 3/28/96
4. Purge both slurry lines with DI Water. BJ 3/28/96
5. Remove and discard all polishing pads. BJ 3/28/96
6. Remove all PVA scrub brushes and submerge
in DI water. BJ 3/28/96
7. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry
all wet surfaces. BJ 3/28/96
8. Remove and discard all slurry filters. BJ 3/28/96
9. Disconnect inlet and outlet lines on each
filter housing and remove housing. Connect
inlet and outlet lines together with a 3/8"
union. This will completely bypass the
filter housings. BJ 3/28/96
10. Close main incoming DI Water valve to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. BJ 3/28/96
11. Power down each system. BJ 3/28/96
12. Power down each vacuum pump cabinet. BJ 3/28/96
13. Power down each Neslab TCU. BJ 3/28/96
|
| 5.189 | Strasbaugh Cleaning Station Brush Height Adjustment | ASDG::POIRIER | | Thu Mar 28 1996 19:43 | 9 |
|
Cleaning Station Brush Height Adjustment:
----------------------------------------
Looks like we're going to need a new adjustment plate. The 11" dia
plexiglass reference plate doesn't fit on the new Cleaning Station
rollers. We need a new one 9 1/2" in Dia. We'll contact Al LeBlanc
and ask him to fabricate a new one. We made a "Best-Guess" adjust-
ment on the brush heights for CMP.A1 & CMP.A2. Try to find something
flat, clean & 9" to 9 1/2" in Dia. to use as a reference.
|
| 5.190 | WAFER CRASH | STRATA::WESTPHAL | | Thu Apr 04 1996 20:05 | 5 |
|
CMP.A1 - Down for breaking wafers on the polish table. Broke wafers while
Process Engineering was performing experiments. Cleaned up the mess
and replaced the pad. The tool is back to production.
|
| 5.191 | New Strasbaugh maintenance manuals are here | SUBPAC::TOOKER | | Mon Apr 08 1996 13:43 | 12 |
| We have received 2 new sets of maintenance manuals for cmp.a1 & cmp.a2. These
new manuals are marked ver. 3. One set has been placed in the gray cabinet
in the CMP service aisle and the other set is in my office. These new manuals
reflect all the changes brought about by the new software rev. and the new
style robot. The old manual containing the schematics has been left in the
service aisle. You may find that in some cases these will need to be
referenced. Please be gentle with these manuals and ensure that pages are not
ripped out or lost. These manuals cost $1200.00 per set.
Thanks,
Jim
|
| 5.192 | water nozzles added | STRATA::FINN | | Wed Apr 10 1996 20:15 | 5 |
|
Added water nozzles to left and right clean station. Tested AOK
Brendan/Hawk/Dan
|
| 5.193 | No slurry flow | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Apr 17 1996 05:57 | 9 |
|
During the manual procedure of getting slurry in the
lines, large air bubbles were coming through the line.
The slurry system had shutdown and caused this problem.
Ashland came in and swapped over the filters. The flow
was back to normal after that.
BJ
|
| 5.194 | not picking up wafer at load stations | FABSIX::B_FINN | | Sun Apr 21 1996 20:27 | 11 |
|
Will not pick up wafer in load cassette left or right. Cleaned
end effector without positive results. Ran elevator and robot in
manual to check alignment and it pick wafers up ok. Looking for leak
and about to check cal of sensor.
A shift
|
| 5.195 | robot vacuum | FABSIX::R_GEE | | Mon Apr 22 1996 08:08 | 5 |
| The robot wasn't picking up the wafer out of either send cassette
in auto. Checked alignments and hoses for leaks, all looked OK.
Calibrated the vacuum switch, ran 100 wafers with the handling
recipe, all set.
B shift
|
| 5.196 | ex | STRATA::RIDLON | Eliminate the obvious | Tue Apr 23 1996 07:27 | 16 |
| We had more robot loading problems tonight. Since the switch was just
adjusted last night we looked around for some other root causes. We
finally found a cut in the pressure/vac line that supplies the end
effector. It was cut where the line connects to the robot base module.
The fitting is quick disconnect but instead of being an elbow like A2
it was straight fitting. This caused the air line to rub on the flex
track. The line was cut back and the straight fittings installed. There
isn't a parts listing in the fab for the Strasbaugh so we didn't look
up any part numbers. The robot didn't have any more problems loading
after the problem was corrected.
B shift
|
| 5.197 | robot vacuum switch adjustment | SUBPAC::LANDRY | | Tue Apr 23 1996 19:47 | 17 |
| Today..........
The system system experienced poor uniformity in the AM.
The pad was removed/replaced. While this was taking place,
the system went down for scheduled DI water work to be
performed by the contractors. The scrub brushes and the
carriers were removed and placed in water to remain wet
and intact.
While the DI work was taking place, the robot vacuum switch
was checked and re-calibrated.
After the system was returned to us, the carriers and brushes
were re-installed (as well as the new pad). Breakin wafers
and MQC's were run. The system is up and running.
A Shift / Jim T
|
| 5.198 | Right spindle downforce problems | FABSIX::R_GEE | | Tue Apr 30 1996 12:14 | 14 |
|
The system was put down for wafer breakage and an error,
"Right spindle downforce low". We looked at the old errors
and found that it had errored for that and "Right spindle
downforce high".
We did a quick downforce check at 300 lbs and found that it
was very unstable. Found a solder weld in the connector
coming out of the amplified was bad. Removed and resoldered
all the wires in the connector coming out of the amplifier
and going into the air cylinder, they all looked bad. Performed
the downforce calibration on the right spindle and checked
the left. Installed a new pad and carriers, the system is up.
B shift
|
| 5.199 | leaks | LUDWIG::WESTPHAL | | Wed May 01 1996 20:30 | 5 |
|
CMP.A1 - Down for a leaking slurry line on pump #1 and a DI water leaking from
the spray nozzle. Replaced the slurry line and repaired the DI
nozzle.
|
| 5.200 | Downforce calibration performed on cmp.a1 | SUBPAC::TOOKER | | Thu May 02 1996 16:31 | 7 |
|
Today John Swenson, Brad Wesphal and I did a complete down force calibration
including E-P regulators on cmp.a1. We found that both E-P regulators were OK.
The left spindle was out of calibration by around 1% (not much), and the right
spindle was on the money. After the calibration, a new pad was installed.
Jim T., John S.,& Brad W.
|
| 5.201 | Right load cup | FABSIX::R_GEE | | Mon May 06 1996 08:10 | 10 |
| Broke a breakin wafer on the pad.
The Wafer slid out from under the right carrier at touchdown.
There was 240 wafers on the pad, 285 wafers on the left
carrier and 345 wafers on the right. While it was down the
weekly p.m. was done and the carrier to load cup alignment
checked. We adjusted the right load cup slightly so the
carrier will seat smoother.
B shift
|
| 5.202 | Fairchild E-P analog counter settings for calibrations | SUBPAC::TOOKER | | Fri May 10 1996 13:22 | 42 |
| To all CMP ET's;
Here are the proper analog counter settings for calibrating the Fairchild E-P
transducers for left and right spindle downforce on cmp.a1/.a2. These analog
counter settings apply only to the spindle downforce E-P's and do not apply
to the left and right backpressure or conditioning downforce E-P's. Please
refer to the Strasbaugh manual for the proper counter settings for those E-P's.
Prior to any spindle downforce E-P calibrations, please check the E-P to see
which model number it is and then use the appropriate analog counter setting
listed below. The adjustments work the same on both models. Adjust the
"ZERO" pot for 10.0 PSI and the "SPAN" pot for 80 PSI. When either the "ZERO"
or "SPAN" is radically adjusted, it is sure to through out the other one, so
be sure to go back and forth between the two until the proper PSI is achieved.
You may have noted that the Strasbaugh manual calls for the "ZERO" pot to be
adjusted to 5.0 PSI. We adjust our tools to 10.0 PSI. We do this (with Stras-
baughs blessing) to bias the spindles with a few pounds of downforce, so that
when the spindles are manually lowered over the load station or cleaning sta-
tion they don't float upwards over time.
Please contact me with any questions or if anyone needs more one on one training
for this calibration.
================================================================================
CMP.A1/.A2 LEFT OR RIGHT SPINDLE DOWNFORCE E-P TRANDUCER CALIBRATION
--------------------------------------------------------------------
FAIRCHILD E-P ANALOG COUNTER SETTINGS
-----------------------
MODEL # 10.0 +/- .2 PSI 80.0 +/- .2 PSI
------------- --------------- ---------------
Z18109-3 580 3410
(old style)
TT6000-06 601 3481
(new style)
NOTE: If any of the E-P's are re-calibrated, then the downforce must
also be re-calibrated.
================================================================================
|
| 5.203 | scratches | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat May 11 1996 06:17 | 9 |
|
Failed for scratches during MQC. No-touch showed scratches
from brushes as well. After the brushes were replaced, no-touch
showed no scratches but touch down had a bunch of scratches. The
pad was replaced and was broke-in again. MQC's were run and there
were no scratches and passed uniformity.
D shift
|
| 5.204 | What's up A1 is down. | FABSIX::L_SHKOLNIKOV | | Fri May 17 1996 08:38 | 6 |
|
The system went down this morning - left carrier about 1/2 inch lower
at load and unload then the right one causing robot to hit the edge of left
carrier when loading the wafer.
|
| 5.205 | Robot position over load variable adjusted | SUBPAC::TOOKER | | Fri May 17 1996 16:26 | 16 |
| This morning the top of the robot arm was hitting the carrier on the left
spindle. This problem was caused by two things. One, the gap between the
top and bottom plates of the carrier vacuum chuck was set a little wider
than usual during the monthly PM hub alignment. Two, the left spindle
sits a little lower than the right spindle in the up position and always
has. This was not critical with the old style robots, because the robot
arms were much lower than the new style robot arms. The short term solution
to the problem was to increase the value of calibration variable 130, robot
position over load. This sets the robot arm at a lower position when moving
the wafer in over the load chuck and under the carrier. The long term
solution will be to install new style turnbuckles on the lever arms (an upgrade
already planned) and then adjust the left spindle up position to give a
greater clearance between the top of the robot arm and the bottom of the
carrier.
Jim T.
|
| 5.206 | Bad Uniformity | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu May 23 1996 06:59 | 8 |
|
Problems all night with uniformity. After two pad changes,
we are currently using a pad from lot #6DP-JP1. The conditioner
disk was changed as well. Carrier #1 was swapped out but the
uniformity on both were 16% after three tries.
D shift
|
| 5.207 | Bubbles.... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed May 29 1996 08:19 | 7 |
|
Huge bubble formed in middle of pad at 162 wafers.
replaced pad....
BJ
|
| 5.208 | Slurry line blew | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Jun 01 1996 05:25 | 6 |
|
The slurry line on pump #1 blew and sent slurry everywhere.
Leon replaced both lines with the surgical style tubing.
BJ
|
| 5.209 | SCRATCHES | FABSIX::J_SWENSON | | Sat Jun 01 1996 20:49 | 6 |
| REPLACED PAD.
REPLACED CONDITIONER PAD. MQC HAD SCRATCHES REINSTALLED ORIGINAL
CONDITIONER PAD AND REPLACED SCRUBBER PAD.
MQC'S THEN PASSED.
DOC AND HAWK
|
| 5.210 | broken wafer | FABSIX::R_GEE | | Sun Jun 02 1996 07:53 | 8 |
| Broke a wafer on the pad.
The Wafer slid out from under the left carrier during a 5 sec.
t-up run. There were 134 wafers on the pad and 408 wafers on the
carriers, the spec is 400 wafers on the carriers. The carriers
were to be changed when this lot finished.
B shift
|
| 5.211 | High particles and scratches | FABSIX::R_GEE | | Mon Jun 03 1996 08:16 | 16 |
| The system has been down all night due to high particles
and scratches. We did a run not touching the pad and the
particles level was good. We replaced the pad and conditioning
disk, still failed twice for particles and scratches, 5000+.
We changed the pad and conditioning disk again and ran the
old breakin recipes to see if the new breakin program with
25 lbs of conditioner down force was causing the high particles.
Still out of spec. no scratches but 3000+ particles edge heavy.
Tried another no pad touch and it also looked good, we are still
looking at a pad area problem.
The slurry delivery system went down at 5:00am for clogged filters,
could this be contributing to the high particle counts. We are
running another set of mqc's now.
B shift
|
| 5.212 | strasbaugh voodoo lounge | STRATA::WOOLDRIDGE | Pleasure, Spiked With Pain | Mon Jun 03 1996 16:57 | 10 |
| you were right Mitch/Bob- changed A1 conditioner force back to 13 where
it was supposed to be. A2 was correct at 13. Fould pad particles on
the pad & has center fast profile (makes sense at this force). Changed
pad and we will see what we have. (used a different pad batch for the
heck of it)- Good catch guys- hope this fixes it. mqc'S showed little
improvement prior to this change by the way (particles in the 1500
range) IF this does not work out, do you suppose this has anything to
do with the broken wafer a day or so ago? Maybe slicon in the vacuum
lines? dunno.
Kyle
|
| 5.213 | Particles high...but improving | SUBPAC::LANDRY | | Mon Jun 03 1996 20:31 | 7 |
| The system still has high particles. The latest run today showed a big
improvement, but still on the high side. There is optomism that a few
more break-ins and another MQC try may bring it in. Unfortunetly,
there are NO MQC wafers available in the room.
Doc
|
| 5.214 | Pad & Conditioning Disk Changed | ASDG::POIRIER | | Thu Jun 06 1996 20:22 | 5 |
|
Pad Change:
----------
The Pad and Conditioning Disk were changed at 7:00 p.m.
|
| 5.215 | Wafer slid out | FABSIX::R_GEE | | Tue Jun 11 1996 07:50 | 9 |
| A wafer slid out from under the right carrier, no wafers
broke but 1 was scrapped due to scratches. It was the 1st
run of t-ups, 9 sec. polish time. We believe it wasn't seated
properly in the carrier as it slipped out when the vacuum
released. We checked all the load cup to carrier alignments
and ran 24 dummies with no problems, gave the system back
to production. No problems with it the rest of the night.
B shift
|
| 5.216 | filters | FABSIX::R_GEE | | Mon Jun 17 1996 08:14 | 4 |
| The wafers wouldn't blow off into the unload cups after
polish, they stayed on the carriers. We replaced the two
in-line filters, all set.
B shift
|
| 5.217 | bubbles on pad | LUDWIG::RIDLON | Eliminate the obvious | Mon Jun 24 1996 07:24 | 4 |
| Found 5 bubbles on the pad. Pulled and replaced.
B-shift
|
| 5.218 | particles and uniformity after pad change | FABSIX::J_SWENSON | | Fri Jun 28 1996 20:12 | 5 |
| System failed for particles on left spindle and uniformity on both
spindles.
Found scrub brushes not touching wafer surface, adjusted to proper
height.
|
| 5.219 | also | FABSIX::J_SWENSON | | Fri Jun 28 1996 20:12 | 2 |
| more wafers are being run to bring in uniformity.
|
| 5.220 | Squeaking Noise In Bridge | ASDG::POIRIER | | Sat Jun 29 1996 19:57 | 10 |
|
* Squeaking Noise In Bridge:
-------------------------
We found the source of the squeaking noise to be the Right Lever Arm
Air Cylinder Pin (top). The Pin and Rod End assembly were lubricated
with a few drops of light oil. The Left Lever Arm Pins were also
lubricated. All's quiet for now.
C Shift.
|
| 5.221 | carriers changed | STRATA::RIDLON | Eliminate the obvious | Sun Jun 30 1996 07:01 | 7 |
| Left carrier sticking to pad. Removed carriers and found the ring on
the left to worn all the way around and the right not much better. They
both had only 234 wafers on them. Changed them and the maching passed
MQC's with out incident.
B-shift
|
| 5.222 | Start up A1 | LUDWIG::SWENSON | | Fri Jul 05 1996 20:36 | 3 |
| POwered tool up with no problems
New carriers brought into room for install.
scruber brushes ordered and retrieved
|
| 5.223 | wafer breakage issues | SUBPAC::LANDRY | | Tue Jul 09 1996 20:32 | 18 |
| Today, the system broke a wafer early in the shift. No apparent
reason could be identified. The mess was cleaned up, new pad and
carriers installed. Breakin wafers were run and MQC's performed
and passed. The lot was then placed back on the system, CRASH.
Did a spindle flush and a bunch of particles came flying out.
The particles turned out to be silicon, most likely sucked up
from the breakage. Cycled the flush procedure sevral times.
Installed two new carriers and a pad. Lets try again.
Also today, found the chiller reading ~15 C at the TCU. The TCU
was stuck in the "cooling" mode. Pressed the display to view the
set point and the gauge was fluctuating all over the place. Gave
the adjusting knob a bunch of turns and the fluctuating went away.
It is now stable and the TCU readout is responding properly.
Looks like the controller may need to be cleaned in the near future.
A shift
|
| 5.224 | SCRATCHES | FABSIX::J_SWENSON | | Fri Jul 12 1996 20:24 | 9 |
| SAME AS CMP. A2.
ENDED UP REPLACEING THE PAD AND CONDITIONING PAD.
MQC'S NOW BEING PERFORMED.
NOTE: LOOKS AS THOUGH THE DISC'S FROM THE STOCKROOM HAVE PROBLEMS.
RECOMMEND DO NOT USE.
C-SHIFT
|
| 5.225 | scratches | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Jul 13 1996 07:06 | 12 |
|
Down for large scratches.... I used a modified
no-touch program to include a brush cleaning cycle
and everything was fine. As soon as a touch-down on
the pad was involved, scratch city. The conditioner
looked ok but seems to be a suspect. I'm going to pull
the pad and have OPS break-in the pad and check MQC's
at their next open opportunity.
BJ
|
| 5.226 | Large scratches on wafers / conditioning disks suspected | ASDG::POIRIER | | Sat Jul 13 1996 20:48 | 10 |
|
Scratches on wafers:
-------------------
We are continuing to see large deep scratches on the wafers. Repeated
conditioning disk and pad changes yield no change. We highly suspect
the latest batch of conditioning disks are responsible for the
scratches.
C Shift.
|
| 5.227 | High particles and scratches | FABSIX::R_GEE | | Mon Jul 15 1996 08:08 | 10 |
| Saturday the system was put into Engineering in workstream.
This was done because of high particles and scratches believed
to be coming from the new shipment of conditioner disks.
We did the monthly p.m. replaced the pad and conditioner.
Before the conditioner disk was installed it was deburred
with a small hole file, wire brushed and cleaned. The system
passed particles and uniformity on the first try, returned
it to production.
B shift
|
| 5.228 | stores inventory look ok? | STRATA::WOOLDRIDGE | Pleasure, Spiked With Pain | Mon Jul 15 1996 10:48 | 3 |
| Has anyone looked at the currect inventory in stores to see if we have
inventory with the "burr" problems we saw some time ago?
/Kyle
|
| 5.229 | Left spindle water leak | FABSIX::R_GEE | | Tue Jul 16 1996 08:20 | 10 |
| The system failed MQC's for uniformity and head to head removal,
there was over 1000 ang difference between the two. Found a
small water leak coming from the left vacuum line filter, the
water had dripper onto the servo amplifier. We removed, dryer
and reinstalled the amplifier and connectors. Also tightened the
filter. We checked the down force and it was in.
Had to change the left brush due to high particles.
B shift
|
| 5.230 | UNIFORMITY / PARTICLES | STRATA::WESTPHAL | | Thu Jul 18 1996 20:50 | 6 |
|
CMP.A1 - DOWN FOR PROBLEMS WITH UNIFORMITY AND PARTICLES. THE CONSUMABLES
WERE SWAPPED OUT, AN O-RING OFF THE LEFT SPINDLE WAS REPLACED, THE
LEFT SCRUB BRUSH ADJUSTED, AND THE TOOL WAS CLEANED UP AND RETURNED TO
PRODUCTION.
|
| 5.231 | PARTICLES | STRATA::WESTPHAL | | Sat Jul 20 1996 20:37 | 4 |
| CMP.A2 - Down for high particles on the right carrier. The particles were at
3000. Changed out the right brush and the particles came in at 1100.
Returned the tool to production.
|
| 5.232 | UNIFORMITY,PARTICLES AND SCRATCHES | FABSIX::J_SWENSON | | Thu Jul 25 1996 20:14 | 7 |
| DOWN FOR UNIFORMITY ,PARTICLES AND SCRATCHES.
REPLACED BOTH CARRIERS, AND PAD.
CLEANED TOOL AND BROKE IN PAD.
RETURNED SYSTEM TO PRODUCTION.
C-SHIFT
|
| 5.233 | robot tubing replaced..... | SUBPAC::LANDRY | | Mon Jul 29 1996 19:43 | 10 |
| The robot was failing to pick up the wafers properly today.
Found a small gash in the 1/8" tygon tubing, about an inch from the
end effector connection. The tubing was replaced and results were
good.
The polish pad was changed out this morning. Breakin's and MQC's were
run. System came in on the first attempt.
A shift
|
| 5.234 | bubbles | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Aug 02 1996 05:26 | 6 |
|
the pad was replaced due to a large bubble in the
middle.
D shift
|
| 5.235 | | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Mon Aug 05 1996 14:48 | 6 |
|
two break-in wafers broke on the table for
an unknown cause. A new pad was installed and
turned back over to OPS.
A shift
|
| 5.236 | Pre-punched films- ok to run prod | STRATA::WOOLDRIDGE | Pleasure, Spiked With Pain | Thu Aug 08 1996 12:41 | 4 |
| fyi:
Two pre-punched carrier films are on the carriers on A1. They tested
out nicely at 6% and 8% non-uniformity.
|
| 5.237 | Left spindle | FABSIX::R_GEE | | Mon Aug 12 1996 08:27 | 7 |
| The robot was hitting the bottom of the left carrier when loading
and unloading wafers at the left load cup. We adjusted the left
spindle air cylinder height to match the right, the left carrier
now is up 1/2", even with the right. The monthly p.m. also was
completed. The prepunched carriers were kept wet and placed back
on the tool.
B shift
|
| 5.238 | Robot | FABSIX::R_GEE | | Tue Aug 13 1996 08:16 | 7 |
| The robot arm wouldn't home, had to reboot the system
to get it to homed.
The robot wouldn't pickup wafers off the left load cup.
Changed calibration variable #131 from .88 to .92
B shift
|
| 5.239 | Carriers sticking to pad | FABSIX::R_GEE | | Tue Aug 27 1996 07:53 | 7 |
| Carriers were stiking to the pad. We found that on both
carriers the 3 screws that hold the backing plate to the
carrier plate were loose, causing the carrier not to seat
properly into the backing plate, (finger tight is to loose).
Replaced and tightened the screws, no more problems.
B shift
|
| 5.240 | POOR UNIFORMITY | STRATA::WESTPHAL | | Sat Sep 07 1996 20:22 | 3 |
|
CMP.A1 - Down for poor uniformity. Replaced the pad.
|
| 5.241 | A1 DOWN TO PROCESS THIS WEEK | STRATA::WOOLDRIDGE | Pleasure, Spiked With Pain | Tue Sep 10 1996 16:15 | 7 |
| A1 is down to process for EX1400 pad experiments most likely for the
rest of the week. Please leave the machine as is. If the machine is
needed in an EMERGENCY for production (very last resort) is ok to pull
the pad AND CHANGE THE PLATEN TEMP BACK TO 38'. Now it is @ 22'.
Please only do this if the tool is REALLY NEEDED. I do not want to
change this pad unless absolutely required.
-kyle
|
| 5.242 | load chucks | STRATA::FINN | | Tue Sep 10 1996 20:36 | 5 |
|
Installed new left and right load station chucks.
Reprogrammed robot. Ran 30 test wafers aok in handling program.
A shift
|
| 5.243 | A1 still down to process | STRATA::WOOLDRIDGE | Pleasure, Spiked With Pain | Tue Sep 17 1996 16:26 | 6 |
| Still down to process engineering madness. If any pm work is done
please be sure to keep the pad & carriers wet. If ops HAS to have the
system because they need the capacity, the pad, carriers, conditioning
disc should be changed and the chiller temp should be brought up to
match CMP.A2.
Kyle
|
| 5.244 | CONDITIONING ARM TROUBLE | STRATA::WESTPHAL | | Fri Sep 20 1996 20:09 | 7 |
| CMP.A1 - Down for the conditioner spindle falling off. The expansion pin was
split and worked its way out. Put a new pin in from stock. While
testing the conditioner it was noticed that there was excessive play
in the C. arm while oscillating. J.P. recommends changing the "rod
ends" on the C. arm actuator. The parts have already been received
from stock. They're sitting on remote cart.
|
| 5.245 | Bent conditioner spindle shaft | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Sep 21 1996 06:53 | 18 |
|
The rod ends on the conditioner actuator were replaced
and the "play" now is identical to A2.
When conditioning the pad, the conditioner assembly is
jerking and jumping as the arm sweeps on the pad. Upon
disassembly of the conditioner shaft and bellows, the shaft,
when told to rotate is bent slightly. When the conditioner
is on the pad with force, the conditioner is not on the same
plane as the table and appears to be causing the skipping
and jumping. We couldn't find the parts so Strasbaugh will
have to be called in the a.m. or as late as Monday for the
shaft assembly. It is possible that when the spindle section
fell off on days, the bearings inside on top might have got a
good jolt as well. An entire assembly is recommended...
D shift
|
| 5.246 | Conditioner trouble continued | LUDWIG::WESTPHAL | | Sat Sep 21 1996 20:42 | 10 |
| CMP.A1 - Down for problems w/ the conditioner. Tool never came up from
yesterday when the conditioners's end effector fell off. After
putting the arm back together there was excessive play in the C.arm
while Oscillating. Previous shift suspected that the shaft was bent.
The shaft did'nt appear bent to me so I cleaned everything and put new
split pins in and reassembled the arm. Cycled the conditioner about
30-40 times in all w/ no problems. Put the old brushes and carriers
back on the tool w/ a new pad. Conditioned and broke in the pad. The
tool sets needing only MQCs.
|
| 5.247 | robot missing right load | LUDWIG::RIDLON | Eliminate the obvious | Sun Sep 22 1996 05:46 | 6 |
| Robot not picking wafers off of right load chuck. Everything looked
good operationally except that it didn't appear that the robot was
going down far enough before it alarmed. Recalibrated #132 "robot up/dn
right load pos'n" and robot worked fine after that.
b-shift
|
| 5.248 | pad/brushes replaced | STRATA::RIDLON | Eliminate the obvious | Sun Sep 22 1996 07:33 | 4 |
| Failed particles twice. Replaced pad and brushes. Over to production
for mqc's.
B-shift
|
| 5.249 | particles persist | SUBPAC::LANDRY | | Sun Sep 22 1996 20:05 | 14 |
| High particles persist. Here's what transpired today.
* Changed the pad again. Tried a different lot # from the stockroom.
* Cleaned all surfaces thoroughly.
* Flushed the spindles (carriers off hubs at the time) for 10 minutes.
* Flushed the slurry lines for 10 minutes.
* Verified brushes making contact in clean station.
* Confirmed (using the handling recipe) that the particles are coming
from the polish area. The handling run added just a fewe particles.
At shift change, the particles are in the 2500 - 3000 range.
A shift
|
| 5.250 | Fuel for the fire | LUDWIG::RIDLON | Eliminate the obvious | Sun Sep 22 1996 23:48 | 8 |
| Tried something different. Made a TEST recipe that only goes up
to 75lbs DF with vacuum ON in all 3 steps and step 1 is 20 sec,
step 2 is 30 sec, and step 3 is 10 sec. The right wafer removed only
455 angstroms and the left 136 agstroms. Particles on the left were
0 large and 565 total and 0 scratch count, the right were 0 large,
1575 total, and .67 scratch count.
B-shift
|
| 5.251 | new carriers/no particles | LUDWIG::RIDLON | Eliminate the obvious | Mon Sep 23 1996 05:30 | 6 |
| As a last resort we decided to build two new carriers with new
film from stock. First MQC passed with the left at 30-359-0 and
the right at 56-556-0. Both removal rate and std dev were in spec
as well.
B-shift
|
| 5.252 | problems found during the PM | SUBPAC::LANDRY | | Mon Sep 23 1996 18:42 | 27 |
| First off, good job by B shift last night. Glad I didn't have to
return to the particles issue. The tool had some idle time today,
so the weekly pm was performed. Whilst performing said pm, a couple
of issues arised:
* The chiller temp was sitting at 65 degrees C. Checked the Neslab
set point. It was jumping all over the place (+ to -). Opened up
the lid to check the electronics. All connectors/wiring was good.
Next, tried adjusting the set point. Seems the pot for the temp
adjust was erratic. The contact point must have be oxidized as
repeated rotation of the pot finally settled everything out. Temp
soon returned to normal.
* Whilst performing the slurry cal, the hose_to_SS tubing connection
was spewing everywhere. Cut back a section on the clear tubing and
retried. Still spewing. Found that the SS tubing was clogged solid
at the discharge end. Unclogged the tubes to solve spewing problem.
Cal'd slurry pumps, no adjustment to the variables was necessary.
Cleaned up all dried slurry in and around the polish area. Also,
a major amount of dried slurry on the carriers/hubs was cleaned.
* The condition arm "dog-dish" was overflowing. Found the drain hose
to have "arc'd" above the height of the dish. Repositioned the
hose.
A shift
|
| 5.253 | particles 2, techs 0 | SUBPAC::LANDRY | | Wed Sep 25 1996 20:39 | 10 |
| The system is currently down for particles.
Earlier in the week, we experienced the same problem. When the
particles showed up today, we changed out the pad and rebuilt two
carriers. Breakin's were running fine, when a wafer slipped out of the
right carrier, crash. Cleaned up the mess, installed a new pad and
again, built a set of carriers. Breakins, MQC's were run. Particles
are still high. Thats where we sit. Good luck!
Doc / Jim S
|
| 5.254 | Particles | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Sep 26 1996 07:48 | 18 |
|
Tool down all night for high particles. Tried the following:
changed pad
cleaned tool
changed brushes
checked brush heights
changed and wire brushed conditioner disk
checked recipes and programs
checked slurry flow
checked surfscan recipe
checked particles with B2, B2 below a 1000, A1 ~4500
latest move: changed pad with one from new lot... awaiting
MQC results.....
D shift
|
| 5.255 | cmp A-tool particle update | STRATA::WOOLDRIDGE | Pleasure, Spiked With Pain | Thu Sep 26 1996 16:57 | 78 |
|
Strasbaugh particle problem update: 9/26
-Kyle
Today:
o Repeated no touch recipe (eliminating IC pad) and particle counts were good.
o Particle checks on both machines were in the 4000-6000 range
o Because of low pad count on A1, pad was conditioned for an extended
time. New MQC was run- no change.
o Changed conditioning disk on A1- counts went up? - put old disk back on
o Pad was scrubbed down with a brush and rinsed repeatedly on A1. No
change.
o Noticed that the MQC wafers after polish looked like the polish pad?
This is the first time I have seen this. The wafers show the pad
perforation marks perfectly.
o Looked at pad expiration dates of the IC lots we have in the
drawer- one expired Aug. 27th and the other expires Oct 1st.
(Rodel claims pads are good 6 months after expiration date)
o Decided to change pad on A1 and install a pad with expiration date
of Jan 97'. Conditioned & broke-in the pad with NEWPAD recipe.
Ran MQC's and the counts were 4288 & 3323. Interestingly, no pad
perforation marks were seen on these wafers however.
Followed this by running a modified MQRINSE recipe: Defects went
down to 200.
o Ran a modified MQC recipe with extended rinse at the end of the
recipe on CMP.A2. DEFECTS WERE REDUCED TO 267 on one head and 245 on the
head. (no pre-measurements were taken so in fact the defects were
actually lower) Specifically changed was:
Step 3: 20 seconds polish time
40 rpm spindle speed
40 rpm table speed
Step 4:
60 seconds polish time
20 rpm spindle speed
60 rpm table speed
The difference here is simply the addition of a step 4 rinse time with
different spindle/table speeds & changing the final rinse step from
10 seconds to 60 seconds. The recipe name is MQRINSE.
o John P. has cut a speedfam pad down to try on A2. There is also
another pad from the batch now on A1 on top on the pad cabinet.
(good through Jan '97) if we want to look at that.
o Speedfam tools defectivity OK?
Musings:
- defects are hard to remove, but an extended rinse brings defects
into a very low level.
-Pads may be partially the problem- but this is not fully
understood since the new pad on A1 did not qual.
-It appears for what ever reason, the slurry is NOT rinsing off the
wafers. This could be related to the pad/polishing OR to something
going on with the slurry/delivery system.
-It appears we can run the process currently, but the process recipes
will need to be modified to reflect steps 3 & 4 in the MQRINSE recipe.
A TDCO/edco will need to be put in place tonight (pss) in order to
reflect this change until the process/hardware fix is fully
understood. This is simply an extension & addition to the rinse step.
If needed, I can be reached at home @ 464-5721
/Kyle
|
| 5.256 | It's just to many of them. | FABSIX::L_SHKOLNIKOV | | Fri Sep 27 1996 07:26 | 15 |
|
We had some problems tonight with a particles. So we run a modified MQC
recipe MQRINSE on CMP.A2 with good results 30-250-0 & 46-483-0.
In order to verify the slurry system we installed 1 micron filters, one per
pump on CMP.A1 and tool came up with following results 75-827-0 & 88-1367-0.
CMP.A1 passed MQC's and released to production.
Well.. Now we changed MQRINSE on A2 back to old MQC recipe and defects
went up to 6000, with micron filters installed tool passed particles
with flying colors and results: 43-256-0 & 63-1289-0. Running full MQC's
right now.
D-shift
|
| 5.257 | cond param wrong | STRATA::RIDLON | Eliminate the oblivious | Sat Sep 28 1996 21:31 | 10 |
| Checking on tools at start of shift and noticed that A1 was
conditioning with DI water. Checked A2's condition parameters and it
was still set to slurry 1. Checked notes for any changes that might
have been made and found none. Called Kyle at home and he was
surprised. Changed the condition parameters back to slurry 1 with
500mls/min and conditioned the pad 10 times. FYI, there were 200 wafers
on the pad.
B-shift
|
| 5.258 | crash recovery | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 01 1996 05:24 | 7 |
| Came in tonight with the machine down from a crash and no carriers
available. Built two carriers however they didn't have enough wafers
with enough oxide on them to breakin the machine. They were able to
scrounge some up and are in the process of breaking it in now.
B-shift
|
| 5.259 | Right carrier problem | FABSIX::R_GEE | | Tue Oct 01 1996 20:42 | 6 |
| The right carrier kept falling off the right hub.
Checked the inner hub and carrier for leaks. Replaced the
hub o-rings and ran verification wafers, all set.
A shift
|
| 5.260 | scratches and particles | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Oct 03 1996 07:20 | 14 |
|
Tool failed for nasty rug burns. MQC's were re-run and
the problem was still there. It looks like the wafers were
dragged off of the load pedestals. We checked the robot
heights on dummy wafers and it was fine. checked for particles
and there were ~5 areas on the pad that had pieces of either
film or silicone. After cleaning the entire tool, MQC's were
run again and failed. The pad was replaced and the tool once
again failed... the scratches are gone but now its failing for
particles, 1900 and 1600. Cleaned and scrubbed entire tool and
we gave it back to them for one more shot.
D shift
|
| 5.261 | follow up | FABSIX::O_WHITFORD | | Thu Oct 03 1996 08:23 | 4 |
| Tool passed MQC's with less than 1300 and 1200 respectively. No
scratches.
|
| 5.262 | low polish rate update- slurry status | LUDWIG::WOOLDRIDGE | Pleasure, Spiked With Pain | Thu Oct 03 1996 17:46 | 19 |
|
Low CMP polish rate- UPDATE:
A new batch of slurry (lot #2h-16-96-1) was manually pumped to
CMP.A2 due to the problems we are currently having with low rates.
The results were:
head 1-1300
head 2-1115
Directly after this, the slurry from the day tank was hooked back up
and the results were as follows:
head 1-1132
head 2-1054
Based on the above, I have asked Ashland Chemical to dump the current
day tank and replenish the slurry with the new batch. We should have
new slurry by 6pm or 7pm tonight. The change over should be transparent
to operations. Unfortunately, there is only enough slurry of this
batch to tide us over through the weekend. Then a new batch will have
to come on line.
- Kyle
|
| 5.263 | crash | STRATA::RIDLON | Eliminate the oblivious | Sun Oct 06 1996 01:57 | 7 |
| Tool had crashed just before passdown. Did a visual and could find no
evidence for a reason. Pad was flat, it was product, slurry in lines,
and no way to tell if it was the carriers or not. Changed everything
except for the conditioner disk. Pad cond x10. Gave back for
bkin/mqc's.
B-shift
|
| 5.264 | carrier screws loose | STRATA::RIDLON | Eliminate the oblivious | Sun Oct 06 1996 05:54 | 8 |
| Left removal was low and std dev was high at 28. Right was in spec.
Swapped the carriers and then the left stuck to the table. Took apart
and found the three carrier plate screws only hand tight, not good.
Rebuilt and reinstalled. Took apart the right one as well and
everything looked fine there. Back to them to finish up mqc's.
B-shift
|
| 5.265 | df cal | LUDWIG::RIDLON | Eliminate the oblivious | Mon Oct 07 1996 03:39 | 23 |
| A shift changed the right carrier and tool passed mqc's. B shift
ops did send aheads and the left carrier had a removal rate in the
400's w/ the right being fine. They redid mqc's and the left removal
was 920, the right 1620. Swapped the carriers. Left remained at
920 and right remained at 1620. Down force cal was performed. Both
needed adjustments, however the right was the farthest out.
OLD DATA NEW DATA
------- -------
Left spindle force error = 1.07 1.00
Rght spindle force error = 1.07 .91
Left dead weight variable= 162.18 160.75
Rght dead weight variable= 162.62 165.74
A new pad was installed and conditioned. The tool is ready for MQC's,
however, as I understand it, ops is having a hard time getting wafers.
B-shift
|
| 5.266 | Spindle Downforce Cal. | FABSIX::R_GEE | | Mon Oct 07 1996 20:36 | 9 |
| The system broke two wafers at the beginning of the shift,
also the head to head removal was high.
We performed the weekly p.m., calibrated the Fairchild
regulators and spindle downforce calibration. Process elected
not to MQC the system because there are very few MQC wafers
available. There are new carriers and a pad on the system,
the pad needs breakins run and full MQC's.
A shift
|
| 5.267 | oh what fun | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 08 1996 06:47 | 8 |
| Failed mqc's twice for high particles on the right carrier.
Changed the carrier and on then the mqc wafer from the right carrier
was left on the pad. Disassembled the carrier and replaced the carrier
plate screws due to the orings being chewed up. Returned system to
production.
B-shift
|
| 5.268 | ex | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 08 1996 08:33 | 10 |
| Particles on both carriers jumped to over 4000. Checked history
in notes and found same problem a few days ago. They ran MQRINSE
with good results. We ran MQRINSE with excellent results.
Particles on left dropped down to 86 total, Right was 69 total!!!
A side note, the left carrier was sticking to the pad during
MQRINSE. It stuck once running the MQC recipe and was taken apart. The
plate screw were replaced but everything else looked good.
B-shift
|
| 5.269 | software installed | SUBPAC::LANDRY | | Tue Oct 08 1996 20:34 | 12 |
| New software was also installed today. The current Rev is now
version 4.0. After the software was installed, we came across
a couple of problems. We needed to change the state of some of
the calibration variables to correct. There currently exists
two problems which will need to be addressed. The Send tank dump
valves are not responding correctly all the time and the "dunk"
performance of the send cassettes is off. We are currently working
the issue with Strasbaugh. These problems do NOT necessitate that
the system remain down. A warning has been logged in RTC.
A shift
|
| 5.270 | Send cassette water dunk featuer now operational | SUBPAC::TOOKER | | Thu Oct 10 1996 16:48 | 7 |
| Today the old revision of the Strasbaugh software (4.16.3) was reloaded onto
cmp.a1 & cmp.a2. This software version will allow us to use the send cassette
water dunk feature. Strasbaugh is implementing a fix to software version
4.20 that will give all the new features of 4.19 plus the send cassette water
dunk feature. All warnings have been removed from cmp.a1 & cmp.a2.
Jim T.
|
| 5.271 | Carriers,brushes,particles etc. | FABSIX::L_SHKOLNIKOV | | Fri Oct 11 1996 08:14 | 15 |
|
The system has been down all night due to high particles
We checked the slurry by using micron filters and slurry was fine.
We replaced the pad and brushes and still failed twice for
particles, 2000+. While changing the brushes I found a carrier
retaining ring screw under the clean station roller and a white
colored debris all over the left clean station. Found four more
screws in left clean station. All 6 rollers of the left clean
station are damaged by a lose screw and needs to be replaced.
We do not have them in stock. Replacing the left carrier right
now and try to convince ops run set of mqc's one more time.
Leon.
|
| 5.272 | particles. | FABSIX::J_SWENSON | | Fri Oct 11 1996 20:35 | 3 |
| Had high particles on left carrier, swithed carriers problems
followed replaced carrier cleaned tool still high particles. Eng
increased di rinse 25 seconds along with a edco particles passed.
|
| 5.273 | WAFER CRASH | LUDWIG::WESTPHAL | | Sat Oct 12 1996 20:58 | 5 |
|
CMP.A1 - Down for breaking wafers. Barry filled out the crash sheet and
assisted in cleaning up tool and changing consumables. The tool
presently sets waiting for MQCs.
|
| 5.274 | particles | LUDWIG::RIDLON | Eliminate the oblivious | Sun Oct 13 1996 03:09 | 10 |
| Failed mqc's for particles X2. No pattern. Had them run mqrinse and
particles came down considerably but they failed for scratch count. Had
some spots on the edge with high concentrations. Scrubbed the laod cups
and checked the pad for any defects around the perimeter or inside
edge. Found some questionable black marks that I tried to scrub off but
the brush I was using was full of wafer bits. Its been thrown away.
The pad was replaced. Waiting on mqc's.
B-shift
|
| 5.275 | recipe problems | LUDWIG::RIDLON | Eliminate the oblivious | Sun Oct 13 1996 05:26 | 7 |
| Failed mqc's again. A2 passed. Compared MQC recipes and they WERE NOT
THE SAME. Rinse step 3 was 25 seconds as specified by EDCO but the
spindle and table speeds differed. A2's were both 40 and A1's were 60
and 20 respectively. Another set of mqc's will be ran.
B-shift
|
| 5.276 | passed | LUDWIG::RIDLON | Eliminate the oblivious | Sun Oct 13 1996 21:57 | 2 |
| The mqc's passed after the mqc recipe was changed to match A2's.
The left had a total of ~1000 and the right ~500.
|
| 5.277 | a multitude of stuff | LUDWIG::RIDLON | Eliminate the oblivious | Mon Oct 14 1996 08:12 | 15 |
| Tool failed mqc's twice for poor uniformity. The numbers were close so
another set was done and they passed. The first two dummies of a pmd
lot crashed, however, and the system went back down. After the tool was
cleaned up and returned to ops we got an "Axis 1 servo amp fault".
The tech manual suggests powering down the tool to reset (first option
of opening and closing the doors didn't work) which corrected this
problem. AFter that the robot wouldn't pick up the wafer out of the
left load bucket. The air fittings on the robot were loose plus the
wafers had fine silicon chips on them, possibly coming from the new
carriers. EVerything was cleaned off and the spindles were flushed.
No evidence of wafer chips could be seen on the pad so the breakin was
continued. MQC's wont be done until A-shift.
B-shift
|
| 5.278 | fyi | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 15 1996 02:59 | 2 |
| Just an FYI; the air/vacuum line going to the robot is starting to wear
from rubbing on the flex track.
|
| 5.279 | tdco on line | STRATA::WOOLDRIDGE | Pleasure, Spiked With Pain | Tue Oct 15 1996 16:51 | 4 |
| There is a TDCO on line which covers an added step for rinse time to
help with particle problems. Assuming this works out ok I'll spec it.
/Kyle
|
| 5.280 | WAFER CRASH | LUDWIG::WESTPHAL | | Wed Oct 16 1996 20:21 | 5 |
|
CMP.A1 - down for losing a wafer. Cleaned up the process area and changed the
pad and carriers. Left the same conditioner on but cleaned it.
production filled out the crash sheet. Tool turned back to VERIFY-U.
|
| 5.281 | particles | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 22 1996 06:24 | 11 |
| AFter Ashlands work was completed tool failed particles X2 again.
Particle map showed build up around edge. Installed point of use
filters on both lines but tool crashed during breakins (fresh 50's).
Slurry was checked after filters were installed and was good. Slurry
flow was checked after it crashed (before halting) and there seemed to
be plenty of flow. Possible air bubbles coming from filter caused
crash. We purged them with slurry until air bubbles stopped or so we
thought. New pad and carriers installed. Pad has been conditioned and
awaits some fresh minds.
B-shiftoast
|
| 5.282 | pad change | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Oct 25 1996 00:46 | 4 |
|
Replaced pad due to bubbles....
D shift
|
| 5.283 | Bubble under pad | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Oct 26 1996 04:48 | 6 |
|
Tool went to unscheduled down for a bubble. Pad replaced and
came back up. MQC's passed fine...
D shift
|
| 5.284 | Hub alignment performed on left spindle | FABSIX::J_SWENSON | | Wed Oct 30 1996 19:00 | 6 |
| performed hub alignment, run out .0003 gap .0056 - .0086, cleaned tool
replaced pad and suba, put in verify and returned system back to
production for mqc's.
C-Shift
|
| 5.285 | Slurry delivery and bubbles | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Nov 01 1996 05:59 | 13 |
|
The tool was given to us around 10:30pm for the
slurry change over to barrel feed. The tool was
converted over and slurry flow was adjusted in software.
The 3-way slurry valves were replaced as well.
When OPS went to use the tool, several bubbles had
formed so we had to change the pad. The tool is turned
back of to OPS for MQC's.
D shift
|
| 5.286 | Bubbles under pad | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Nov 08 1996 06:55 | 7 |
|
Tool went to unscheduled DOWN for bubbles. Pad
was replaced and tool cleaned up and then was turned
over to OPS for break-in.
D shift
|
| 5.287 | Pad change | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Nov 15 1996 06:20 | 7 |
|
Tool failed for deviation and range, replaced pad.
D shift
|
| 5.288 | Wafer Breakage / Left Hub o-rings Shredded | ASDG::POIRIER | | Fri Nov 15 1996 19:17 | 17 |
|
Wafer fly out on left spindle:
-----------------------------
A wafer slid out of the left carrier and broke an oxide monitor
this afternoon. Two of the four o-rings on the left spindle
hub were shredded. This o-ring damage problem has been occuring
on both Strasbaugh tools lately.
The only apparent reason for this condition is that the carriers
must be slipping on the hubs. We need to understand why this is
happening before we throw a carrier during a polish cycle.
Maybe the vacuum is low during the polish cycle. Possibly a vac leak
in the rotory unions during spindle rotation.
C Shift.
|
| 5.289 | Wafer Breakage | ASDG::POIRIER | | Sat Nov 16 1996 19:15 | 11 |
|
Wafer Breakage at 6:15 p.m.:
---------------------------
The system broke two product wafers tonight. The pad & carriers have
been removed. The tool still needs some additional cleaning and
replacement pad & carriers installed. We'll try to finish the
work by the end of our shift. Current status is bgn_repair.
C Shift.
|
| 5.290 | carriers | STRATA::RIDLON | Eliminate the oblivious | Mon Nov 18 1996 20:26 | 16 |
| New pad and carriers installed. The right carrier wasn't pulling enough
vacuum when picking up wafers from load cup. Had to replace the check
valves (both were bad) and the black oring and the plate screws.
NOTE: I hope this is common sense but if not...If the oring on the
plate screw is shredded or crushed than it wont make a good seal when
tightened (No matter how tight). It would be nice to be able to replace
these orings but I've checked stock and we don't have the right size.
So please don't reuse plate screws that have deteriorated orings.
Same goes for the black plate oring, if its been crimped or crushed in
spots it wont seal correctly. If you run it between your fingers you
can easily feel these bad spots. If you do throw it away.
Mitch
|
| 5.291 | uniformity problem | FABSIX::J_SWENSON | | Sat Nov 23 1996 18:28 | 9 |
|
- Tool failed for uniformity
- Cleaned tool and replaced pad
- Returned tool to production
C-shift
|
| 5.292 | Massive wafer breakage | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Nov 30 1996 06:12 | 8 |
|
Came into a serious wafer breakage of two monitor
wafers. Tool needed an extensive cleaning. After MQC's
were run, they failed for scratches. The crash implanted
unforseen particles into the brushes. After the brushes
were replaced, particles came in.
D shift
|
| 5.293 | wafer crash | FABSIX::O_WHITFORD | Quticherwhinin' | Wed Dec 04 1996 21:34 | 5 |
| Product wafer crashed. Cleaned polish table and table area,
replaced carriers each with 57 wafers and pad with 114. Rewturned to
ops to complete verification.
D Shift
|
| 5.294 | Wafer crash | STRATA::WESTPHAL | | Fri Dec 06 1996 19:29 | 5 |
| CMP.A1 - Wafer crashed during an experimental lot. The crash appears
to be caused by a clogged slurry tube. The same was reamed out, the
process area cleaned and the consumables changed. The tool presently
sets needing breakins and MQCs.
|
| 5.295 | Amperage spikes during downforce ramp / Wafer fly outs | ASDG::POIRIER | | Sat Dec 07 1996 19:47 | 26 |
|
Wafer fly outs on left spindle:
------------------------------
The system has been flying out wafers on the left spindle.(no breakage)
The operator noticed a loud vibration and an amperage spike (> 40 amps)
just prior to the flyout. System went down at 7:03 p.m., passing on to
B shift.
Troubleshooting thus far:
------------------------
1) Checked slurry flow on both pumps. Both at 450 ml/min.
A little low but not significant.
2) Checked pad for bubbles. Pad O.K.
3) Checked carriers for proper gimbaling. Carriers O.K.
4) WE JUST OBSERVED CMP.A2 WITH 40 AMP SPIKES DURING DOWNFORCE RAMP!
The last time we had downforce amperage spikes on BOTH tools,
it was a problem with the PADS.
Passing troubleshooting onto B Shift.
C Shift.
|
| 5.296 | pad | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Dec 08 1996 06:13 | 13 |
| Picking up where C left off....we checked the carriers and found
nothing unusual except for evidence of wafer fly out marks on the left
carrier; this was replaced. Since all the pads in the room have gone
well past the manufactures recommended "Use by this date" date, we
ordered some new ones. Had to dig through the ones in stock to find
some that hadn't expired. Can someone explain why RODEL puts expiration
dates on these pads? We've been experiencing alot of crashes lately and
the pads that were in the room all expired in OCT of 96. Could this be
our root cause? Anyhow a new left carrier and an unexpired pad were
installed.
B-shift
|
| 5.297 | slurry detection installed | STRATA::FINN | | Tue Dec 10 1996 19:30 | 6 |
|
Installed slurry detection on CMP.A1. Wired into digital i/o 29.
Sensor monitors main slurry loop an will alarm during the absence of
slurry when slurry pump #1 is demanded.
A shift
|
| 5.298 | Low bridge oil alarm | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Dec 11 1996 07:50 | 9 |
|
Tool wouldn't start its cycle due to a low bridge oil alarm.
Found bridge oil level with 1/2" left on the bottom. Filled
tank back up with oil. All set....
D shift
|
| 5.299 | POOR UNIFORMITY | FABSIX::B_WESTPHAL | | Wed Dec 11 1996 19:22 | 5 |
|
CMP.A1 - Down For poor uniformity. The pad and conditioner disc were changed
out. The chiller was found to be at 3 degrees C. The chiller needed
to be topped off. Tool was cleaned up and returned to production.
|
| 5.300 | Carrier change | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 13 1996 05:04 | 8 |
|
The right carrier failed for uniformity... 16.5%
After the carrier was replaced, the tool passed MQC's.
D shift
|
| 5.301 | Uniformity issues | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 13 1996 06:52 | 10 |
|
The right carrier failed for uniformity... 16.5%
After the carrier was replaced, the tool failed uniformity
on both heads so the pad was replaced. MQC's were re-run and
tool passed MQC's.
D shift
|
| 5.302 | Poor Uniformity | FABSIX::B_WESTPHAL | | Sat Dec 14 1996 09:39 | 6 |
| CMP.A1 - Down for poor uniformity. Due to the short pad life and table
high currenting I think it must be the pads. Changed the pad to a
lot# different from the previous pad used. Checked and cleaned the
conditioning disc and did an extended conditioning ( 15 cycles ). All
so requested that the operator condition the pad 5 times between boats.
|
| 5.303 | Broken Wafers - Pads Suspect | ASDG::POIRIER | | Sat Dec 14 1996 19:25 | 14 |
|
Broken product wafers:
---------------------
The system broke product wafers this afternoon. A new batch of pads
were brought down from the stock room. The new pads have a different
lot number than the pad which the wafers broke on.
The new pads are in the black cabinet. The suspected "bad" pads are on
top of the black cabinet with a note attached. There are approx 200
pads in the stockroom with approx 15 different lot #'s. Keep trying
different lot #'s if the "bad Pad" symtoms persist.
C Shift.
|
| 5.304 | carrier blues | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Dec 15 1996 04:53 | 8 |
| Right carrier lagging behind the left on lift off, also vacuum was a
little higher than the left. Tore apart the carrier (the right one, for
those with dislexia) and sure enough we found one of the plate screws
loose. Replaced the three of them (orings shot) and also replaced the
black oring which had a cut in it. Reinstalled and tested fine.
B-shift
|
| 5.305 | more carrier blues | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Dec 16 1996 03:49 | 8 |
| The left carrier was intermittently showing higher vacuum then the
right and would alarm for no wafer found on left carrier. Removed and
replaced the plate screws, the black oring, and check valves. The check
valve hoses might have been too short causing the lines to crimp but
thats speculative. Tested with good vacuum (better than the right now
but only by .1 or .2 inches of Hg).
B-shift
|
| 5.306 | mqc fail | FABSIX::M_RIDLON | Eliminate the oblivious | Wed Dec 18 1996 06:42 | 11 |
| Failed mqc's for uniformity. Pad at 293, carriers at 320. Changed both.
Checked new carriers and found the one with plate A016 (no initials and
no step height info) to built wrong. This must have been a test because
even a new guy could do better. Check valves were facing each other,
black oring was old, no carrier spacer washers installed and the screws
were probably used before. I was surprised to see that the height was
set up right. Anyhow it was rebuilt and installed. Over to production
for breakins.
B-shift
|
| 5.307 | robot, strange acting. | FABSIX::L_SHKOLNIKOV | | Thu Dec 19 1996 06:33 | 13 |
|
The robot went in to pick up a wafer from right the send
elevator and the arm went all way down hit the wafer guide and
bend the wafer itself. No damage has happened at this time.
I've tried to rehome the tool - no luck. Had to powered tool
down and reseated all electrical connections on the robot
and on the back of the tool. Powered tool back up and after
ten wafers notouch tool was running a product lot with no problem.
D shift
|
| 5.308 | Failed MQC's - Monthly PM completed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 20 1996 06:23 | 7 |
|
Tool failed MQC's for bad uniformity. We decided to take
it for the MONTHLY PM. The downforce was out slightly and
was broughtin tighter. All of the run-outs were in spec.
Tool was turned back over for MQC's.
D shift
|
| 5.309 | water leak | FABSIX::J_SWENSON | | Fri Dec 20 1996 19:31 | 5 |
| sprayer hose severed
tool powered down
di shut off.
C-shift
|
| 5.310 | Broken DI gun/line | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 20 1996 20:59 | 9 |
|
Repaired broken DI spray gun. Re-routed direction of line.
Cleaned up DI under floor.
D shift
|
| 5.311 | robot failure. | FABSIX::L_SHKOLNIKOV | | Sat Dec 21 1996 06:46 | 6 |
| The tool went down for robot problems. It wouldn't operate
properly, (robot arm wouldn't move, initialize) Decided to remove
the robot from the tool and check the encoders and wiring for
rotational and radial axis.
Leon
|
| 5.312 | robot/vacuum line | FABSIX::J_SWENSON | | Sat Dec 21 1996 19:18 | 15 |
|
- Removed robot
- Removed broken elbow for vacuum line from robot
- reinstalled robot
- connected robot up, robot homed without issue
- replaced vacuum line
- after replaceing vacuum line and assembling flex tracked
went to hook up robot, did not leave enough length for bottom
connection flex track will need to be reopened.
- a new elbow fitting will be needed.
- di water is turned off
C-Shift
|
| 5.313 | robot ready | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Dec 22 1996 02:13 | 8 |
| Reinstalled air lines and electrical connections. Reinstalled buckets.
Ran some wafers through to check robot alignments, made some minor
adjustments but overall everything looked real good. Installed new pad
and old carriers and gave back to production for breakins.
B-shift
|
| 5.314 | Right carrier / Robot | FABSIX::R_GEE | | Mon Dec 23 1996 18:50 | 14 |
| The right carrier kept leaving wafers on the pad. The carrier
backing plate screws and o-rings were changed but still was
leaving wafers on the pad. Changed out the right carrier and
the problem went away.
The robot kept missing wafers. Cleaned the robot end effector,
replaced the 1/8" end effector line & leveled the robot top
arm. After this the robot top arm failed to home, powered
down the system to reset the computer. Ran 25 verification
wafers then released back to production, no errors the rest
of our shift. (and yes they did run it).
A shift
|
| 5.315 | No Z'ssss for the robot | SUBPAC::LANDRY | | Tue Dec 24 1996 13:50 | 5 |
| The "Z" motion on the robot froze up today. Re-homed the robot (all
3 axis') and tested. Ran fine the remainder of the shift.
A shift
|
| 5.316 | Robot Errors / Robot top Arm Sensor Cleaned | ASDG::POIRIER | | Fri Dec 27 1996 19:34 | 16 |
|
Robot errors:
------------
Robot Z axis travel was not moving. This cause robot errors. We have
not been able to recreate this condition during testing.
We did observe robot rotation chatter. Strasbaugh was called and
instructed us to check inputs 41, 42 & 43. All checked aok.
The robot top arm home sensor was covered with slurry. It was cleaned
and all robot functions appear to be ok. A verification run has been
started and the system status is now in VERIFY.
The Strasbaugh Field service reps pager is 1-800-506-4960 if you
require tech support tonight. (Todd Fordyce)
C Shift.
|
| 5.317 | Robot failed... again... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Dec 28 1996 07:18 | 20 |
|
The tool was down at the beginning of the shift
for VERIFY on the robot. The tool ran ok and passed
MQC's. Around ~4am, the robot crapped out for Z-axis
positioning errors. The robot was pulled and cables
inspected. Some moisture was found in the connectors
and three broken wire were broke which went to the
rotation encoder????? The wires were repaired and
nothing else was found wrong. The robot and right
receive elevator are currently being re-installed.
We will pass-on to C shift regarding what's left to
do for the re-install. At worst, the robot and elevator
positioning will need to be checked as well as the
vacuum cal.
D shift
|
| 5.318 | Robot Z Axis Failures / Encoder Cable Replacement | ASDG::POIRIER | | Sat Dec 28 1996 19:20 | 44 |
|
Robot Encoder Cable Needs Replacement:
-------------------------------------
The Robot Z axis has been intermittently (Failing/ running into end
stops) for the past two days. 50 + wafer verification runs have been
performed numerous times. Eventually the robot Z axis runs away.
Sometimes in the upward direction and sometimes in the downward
direction.
Action thus far:
1) A known good DCX control module was swapped with axis 12 (robot Z).
Axis 12 failed intermittently a short time later.
2) The encoder cable connections for the Z axis at the Robot were
verified AOK. pins 19,20,21,22,8,9 &10.
3) Jim Tooker was called at home this afternoon and agreed that the
cause of the intermittent Z axis encoder failures is most likely
Robot Encoder Cable.
Jim doesn't think the problem is being caused by the z axis motor
encoder due to the intermittent behavior of the failures.
He wants the Robot Encoder Cable removed and will order a
replacement asap. Call Jim at home if your have any issues
that arise relating to the cable over the weekend.
The cable has been snaked out thru the electrical cabinet.
It is still wired into the ribbon interface cards on the
electrical cabinet end.
Inspection of the cable revealed (knots/twisting/bunching)
of the conductors in numerous places along the cable.
C Shift.
|
| 5.319 | encoder cable fixed but... | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Dec 29 1996 06:55 | 14 |
| Ohmed out the encoder cable removed by C-shift. Found two wires that
were open. One goes to the z axis and the other to the theta axis.
Cut almost 2 1/2 feet off the cable and reohmed the cable and all wires
ohmed good. Snaked cable back thru machine, repinned, reconnected all
cables and tried powering up the tool to test. However the cpu would not
reboot. Removed the cpu cover but didn't find any discrepancies.
Checked the power supplies and 5vdc and 24vdc were good the 15vdc was
not, however this is controlled by CR28 which is controlled by DI 15.
None of the DI's are lit so this is probably due to the cpu not being
booted up. If the problem the cpu can be corrected the flex track for
the robot still needs to be put back together.
B-shift
|
| 5.320 | Computer / Robot top arm | FABSIX::R_GEE | | Mon Dec 30 1996 19:41 | 8 |
| Field Service was in today to investigate the boot-up
problem. Field service feels the computer is toast. A
new computer will be arriving thursday.
Replaced the robot top arm belt gears and tensioners.
A shift
|
| 5.321 | status of cmp.a1 | SUBPAC::TOOKER | | Thu Jan 02 1997 18:43 | 23 |
| The new computer arrived today for cmp.a1. To save time, the hard disk
drive from the old computer was installed in the new computer and the DCX
motherboards were installed before Strasbaugh field service arrived. When
field service arrived they installed the computer. The new computer booted
up just fine, but they could not get any video on either the front or remote
monitors and there was a keyboard error. Strasbaugh found that the main
"black box" was not working and the keyboard cable adapter had a broken pin.
They feel that when the black box went out, it took the computer with it.
A new "black box" and adapter have been ordered.
Currently, we have made the tool operational by using the keyboard and monitor
from the PC we have in the service aisle. Now that the tool will boot up, we
can now verify that the fix on the cable performed by D shift on 12/28 is OK.
John Poirier will install carriers and run at least 100 wafers with the
Handling recipe. This will stress the cable in the flex track. If all is ok,
he will try to set up the temporary monitor and keyboard in the WIP aisle,
install a pad, and try to qualify the tool.
Please call me home with any questions.
Jim
|
| 5.322 | Computer Replaced / video control boxes NG | ASDG::POIRIER | | Thu Jan 02 1997 19:31 | 16 |
|
COMPUTER REPLACED / CURRENT STATUS:
----------------------------------
The Strasbaugh Reps sucessfully replaced the computer today.
They discovered that the video controller boxes for the monitors
are not functioning (Both Monitors Blacked out). There are three
of these boxes in the tool. Replacements have been ordered and
will arrive tomorrow.
We have completed 75 wafers of the 100 wafer verification run. Please
run another 25 on D Shift.
C Shift.
|
| 5.323 | Shuttle doin' the see-saw... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Jan 03 1997 05:00 | 14 |
|
The tool finished running the 100 VERIFY wafers
and all of the consumables were put back on. After the
pad was broken-in and MQC's were getting ready to run,
OPS observed carrier damage. The white rings were both
being shaved. Upon further investigation, it was
discovered that the front shuttle clamp-down brackets
were under the shuttle instead of on top. The shuttle
was rocking back and forth as a result of it. Re-positioned
the brackets and installed new carriers.
D shift
|
| 5.324 | Video Controller Box Back Ordered / Temporary Set up in Place. | ASDG::POIRIER | | Fri Jan 03 1997 19:37 | 11 |
|
Monitor & Keyboard Temporarily Connected:
----------------------------------------
The Dell Monitor & keyboard were placed on the WIP isle clean room
rack next to A1. The wires and cables were snaked under the wall and
connected to the IBM computer in the tool. This temporary set up will
remain in place until the back ordered video controller box arrives
on Monday.
C Shift.
|
| 5.325 | Pad change | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Jan 04 1997 04:25 | 7 |
|
Pad change because of bubbles....
D shift
|
| 5.326 | Front monitor is working again | FABSIX::R_GEE | | Mon Jan 06 1997 16:47 | 5 |
| Replaced the bad KVM Extender/Sharer host module (black box).
The Dell monitor has been removed and the original monitor is
working again.
A shift
|
| 5.327 | pad change | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jan 08 1997 07:13 | 4 |
|
A pad change was needed due to bad uniformity.
D shift
|
| 5.328 | pad change - bubbles | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 09 1997 06:57 | 6 |
|
A pad change was needed due to bad uniformity.
D shift
|
| 5.329 | Vacumm leaks at the hubs / o-rings replaced | ASDG::POIRIER | | Fri Jan 10 1997 18:58 | 22 |
|
System leaving wafers on pad:
----------------------------
The tool was leaving wafers on the pad at lift off (right Spindle).
The two center o-rings on the right hub were replaced. Tested O.K.
Left Spindle not lifting off pad:
--------------------------------
Earlier in the day, the left spindle would take much longer to lift off
the pad than the right. It was taking it longer to reach the approriate
vacuum. The center two o-rings on thge left hub were replaced. Tested
O.K.
FYI: The center two o-rings on both hubs were shredded. We believe this
was causing the vacuum leaks. We called Strasbaugh a few weeks ago
about the o-ring shreding problem. They think the carriers are
slipping on the hubs.
C Shift.
|
| 5.330 | tanks filling problem | FABSIX::J_SWENSON | | Sat Jan 11 1997 18:15 | 12 |
|
Tanks not filling quickly
_________________________________
Di pressure 37
cda 100 psi
reset tool, tanks filled still slow
di line acting as if there is air within the line.
C-shift
|
| 5.331 | Problems with the REMOTE/Black Box | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Jan 14 1997 16:41 | 11 |
|
Since the video repair from the Strasbaugh Rep., it appears
there is a problem when you have REMOTE unit plugged in and you
switch the controls back to the front. You have to have the REMOTE
unplugged to have the front work. Jim Tooker was notified today
and he is looking into it.
BJ
|
| 5.332 | mqc failed | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Jan 19 1997 07:44 | 6 |
| Failed mqc's late in the shift. Pulled pad and started cleaning. No
work for A tools in room so leaving down so A-shift can finish up the
weekly pm.
B-shift
|
| 5.333 | replaced clean station brush | FABSIX::J_SADIN | Freedom isn't free. | Mon Jan 20 1997 18:00 | 5 |
|
replaced left clean station brush. Outer edge was worn.
a-shift
|
| 5.334 | CMP.A1 chiller | FABSIX::J_SADIN | Freedom isn't free. | Sun Jan 26 1997 16:14 | 9 |
|
The chiller for CMP.A1 was found powered off. Hotline call was
logged and electrician found breaker tripped in circuit panel.
Electrician reset breaker and power was restored. Electrician checked
lines/connections and found nothing wrong (no idea why breaker
tripped).
a-shift
|
| 5.335 | Carrier sticking to pad | FABSIX::O_WHITFORD | Lead, follow or step aside. | Fri Jan 31 1997 04:06 | 7 |
| Left carrier sticking to pad at lift-off. Swapped left to
right & vice versa. Problem followed carrier. Went to replace carrier
and noted both were high on wafer count. (left at 359, right at 358)
Only one carrier available. Built up another carrier and replaced both.
Turned over to ops for full MQC.
D shift
|
| 5.336 | Left Spindle Rotory Union Leaking Vacuum. | ASDG::POIRIER | | Sat Feb 08 1997 19:24 | 27 |
|
Left Spindle Vacuum Failure:
---------------------------
The Left Carrier flew off the spindle while polishing product today.
Luckily, the product wafers did not get damaged. One of the left Hub
o-rings was shredded. A vacuum gage was installed between the carrier
and the hub on both spindles. Vacuum on the Right was 24 in/hg. We applied
moderate pressure to the Right Spindle Rotory Union and the vac remained
at a steady 24 in/hg.
Vacuum on the left spindle rotory union was 19 in/hg. We applied
extreamly light pressure to the union and the vacuum dropped to 10
in/hg. We then squirted some SNOOP liquid leak detector to the top
of the union and the vacuum increased to 24 in/hg. The solution was
wiped off and the vacuum dropped to 19 in/hg.
It appears that the low vacuum induced by the leaking rotory union
is causing the carriers to slip on the hubs. This in turn is
shredding the silicone rubber o-rings in the hubs. Once the hub
o-rings fail, the vacuum drops to very low levels and the carriers
fly off.
The system is down. Passing on to B Shift for left spindle rotory
union replacement.
C Shift.
|
| 5.337 | Gear box, rotary union, system power problem | SUBPAC::LANDRY | | Mon Feb 10 1997 19:51 | 39 |
| The system is down (scheduled) for an upgrade to the polish table gear
box. In fact, it's a new box. The system is also down for a rotary
union on the left spindle. This is due in Tuesday morning. Also a
problem right now, is the system is powering itself down. More on
this at the end of the note.
Gear Box: Two East Coast reps and Hallamore riggers performed the swap
today. The new one is in. This action required the removal of the
polish table as well. All components associated were re-installed
and all alignments associated were performed. The gear box portion is
complete. Fixed several damaged sprayers along the way. Cleaned out
built up slurry in places unreachable with the table in place.
Rotary Union: It has been ordered and should arrive Tuesday AM. "A"
shift will install it and perform all the spindle alignments. Also,
the monthly portion of the PM will be completed at this time. After
all these things are completed, the system will be tested for proper
operation. Then, additional breakins and MQC's will be run.
System Power Down: After the gear box was installed, the system was
powered up and checks were performed. A couple of hours into power
up, the system powered down. It rebooted fine, but 10 minutes later,
it powered down again. The "red" power light on the back of the
system was not illuminated. Wiggled some components around, and it was
back on. It was first believed to have been contactor #1, as that
component was being played with when the system powered down. The
contactor has been ordered. We then were going to remove the contactor
and clean it, when the red light on the back of the system was found
off again. This light should be on when the power is making it through
the first circuit breaker, which it was, but no light. Traced this
problem to the 24 VAC relay (which is associated with the interlocks).
Non in stockroom 6. Check SR 94 (going through all the relay bins)
without success. We cleaned up the old relay's contacts, verified good
connection of the wiring at the relay plug-in spot, and retested the
results. We couldn't get the relay to fail. The system has remained
powered up for about 40 - 45 minutes without any problems. Please
monitor it occassionally this evening for a power up state.
A shift
|
| 5.338 | new rotary union/ table problem | FABBIT::B_FINN | | Tue Feb 11 1997 19:38 | 17 |
|
Removed left rotary union per c shift. Installed new rotary
union which we received today fedx. Installed hub, and continued
monthly pm (ie spindle alignments) Found left spindle out 10 mils found
right spindle out 9. Noticed both were low on the same side of the
table. Did a sweep of the table with via the bridge with dial indicator
attached to the spindle. Found table to be out left to right by 22
mils. This is a result of the table being removed yesterday during the
gear box change. Spoke to Jim T. at home. He wants the rep to fix it
tomorrow. He also wanted to communicate that the rep will be assigned
first to either CMP.A1 or A2 depending on productions needs in the morning.
We also changed the main contactor as a precautionary measure.
A Shift
|
| 5.339 | CMP.A1 alignments done | FABSIX::J_SADIN | Freedom isn't free. | Wed Feb 12 1997 19:32 | 10 |
|
Rep was in today to address table alignment issue. He calibrated the
table sweep, as well as calibrated all runouts (table, spindle,
hub, etc). Rep also fixed a conditioner rotation problem by tweaking the
DCX board and then tweaking the BRUSH ROTATION board. Downforce cal was
completed by us. New pad/conditioner installed and breakins completed with
no furthur issues. Mqcs are in process now and tool is back to production.
a-shift
|
| 5.340 | Bad unif., monthly completed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Feb 14 1997 05:16 | 8 |
|
Tool failed MQC's for 20%+ uniformity. Did a
pad change and finished outstanding monthly PM item.
Tool was broke-in and passed MQC's.
D shift
|
| 5.341 | Tool EMO'ing Itself / Table RPM Low Errors | ASDG::POIRIER | | Fri Feb 14 1997 19:25 | 25 |
|
Table RPM Low Errors:
--------------------
The tool errored 3 times this afternoon for "Table RPM Low" errors.
The Strasbaugh rep adjusted the Table Motor Controller DIP switches per
the latest rev Strasbaugh print. We're not sure why the settings
differed from the print. Maybe it's because the 7.5 to 1 ratio gearbox
requires different DIP switch settings than the new 15 to1 ratio box.
The Strasbaugh prints that we have are the latest rev for the 6DS-SP
polisher.
While running verification wafers, the tool EMO'd itself and stopped
the run. The last time we encounterd this problem, it was the EMO
button on the WIP isle side of the tool. We didn't have a replacement
switch so we disassembled the switch and streched the spring a little.
The problem did not reoccur for over a year.
Suggested plan for tonight:
1) Inspect EMO switches and repair.
2) Continue with verification run to ensure Table Controller DIP switch
change solves the "Table RPM Low" errors.
C Shift.
|
| 5.342 | EMO and stalling issues | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Feb 15 1997 06:58 | 23 |
|
well... what a night...
Tool EMO'ing before, during and after every two
wafers being polished. We did massive trouble-shooting
with the main breaker box and EMO/interlock circuits.
We kept having intermitting 24VAC problems. We by-passed
the EMO buttons and it kept EMO'ing. Everything was checked
for any possible loose wiring. The #3 in-line 208 line had
some slop on the terminal block below the main breaker. We
noticed some intermitting arching. We by-passed the
interlocks and it worked fine. While the tool was running
wafers, we checked all of the interlock wiring which looked
ok. We removed the jumper and tried running wafers with
everything back to normal. we ran 24 wafers total from the
remote controller and 8 wafers with the front controller.
The tool ran fine without any table amperage or stalling
issues nor any EMO problems. When all was said and done,
MQC's are about to be run.
D shift
|
| 5.343 | Left spindle rotary joint | FABSIX::R_GEE | | Mon Feb 17 1997 19:33 | 8 |
| The system errored for left spindle not rotating. Found the top
part of the left spindle rotary joint seized, (the bearing retainer
ring was ripped out and the bearing were ready to fall out).
Replaced the rotary joint, re-aligned the hub, replaced the pad &
conditioner disk, ran verification wafers.
A shift
|
| 5.344 | Pad change | FABSIX::B_JUBINVILLE | | Fri Feb 21 1997 08:35 | 4 |
|
Pad was replaced due to failing MQC's for unif.
BJ
|
| 5.345 | Faulty Door Interlock Switch / Robot Rotation Homing Failure | ASDG::POIRIER | | Sat Feb 22 1997 19:37 | 26 |
|
Polish Door Interlock Switch:
----------------------------
The system failed to home all axes due to a "Polish Door Open " error
message on the CRT. The right hand interlock switch was found to be BAD.
A replacement switch is sitting on the polish area deck. Please
replace.
Robot Rotation Axis Homing Failure:
----------------------------------
The System homed every axis except the Robot Rotation Axis (#11).
The robot initiates the rotation homing sequence, then continues on
past the home position until it contacts the end stop.
The robot home sensor connections were visually inspected at cable
side and robot side of the miltary style connector. The conductors,
sockets and pins all look good.
The robot has been removed from the tool and is on the table in the
service chase. We're in the process of replacing the robot rotation
home sensor. It is labled #2.
C Shift.
|
| 5.346 | switches and cables and bears, oh my. | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Feb 23 1997 02:40 | 17 |
| Continuing on from where C-shift left off. We ohmed out the right hand
interlock switch and found nothing wrong. The contactor switched when
the lever arm was pressed. It was wired back up and tested fine.
The robot rotation home sensor was replaced and tested and the robot
still would not home rotationally. Dug out the technicians first line
of defense (DVM) and started checking for signals. Relay CR24, which is
energized by the robots theta home sensor, was being energized but it
was being deenergized. The voltage was only dropping to 9 volts (from
23) instead of to zero. Pulled the connector off of 13r1 junction block
and found that pin 10 had shorted to 23 ( or vica versa depending on
the theory you follow ). Removed the connector housing and inside was
corroded and soaked. Called Jim and he just happened to have an extra
cable in his cabinet (oh joy). We're replacing now and will test and
adjust what ever needs it. If it works you won't here anything more.
B-shift
|
| 5.347 | CMP.A1 conditioner arm crash | FABSIX::J_SADIN | Freedom isn't free. | Tue Feb 25 1997 20:05 | 13 |
|
received a call from a-shift operator that the conditioner arm had
crashed into the slurry distribution tube. Hence, the slurry tube was
bent and the conditioner arm would not respond at all. Straightened the
slurry tube and then found that one of the brushes had fallen out of the
conditioner motor (the plastic brush holder was cracked/broken).
Epoxied/taped the brush holder in place. Reinstalled the motor and
recalibrated the home sensor. Ran a couple of test conditioning runs
and all seems to be ok. Back over to production.
a-shift
|
| 5.348 | park it | FABSIX::M_RIDLON | Eliminate the oblivious | Wed Feb 26 1997 01:36 | 10 |
| Pad conditioner would not park. We ended up removing the motor/piston
assembly from the conditioner. Then removed the motor from the piston
assembly. And then we retaped the brush. Once everything was
reinstalled we were able to calibrate the park position sensor with
ease. Later in the shift the tool failed mqc's twice so the pad was
changed.
b-shift
|
| 5.349 | Conditioner sweep motor. | FABSIX::L_SHKOLNIKOV | | Fri Feb 28 1997 06:29 | 9 |
| Pad conditioner electric cylinder (arm sweep motor) has been removed
from the tool and replaced with a new one. The replacement motor had a
very short encoder cable which was replaced with the old one. Home
position sensor - recalibrated. We noticed that conditioner goes too far
out over the table edge, so outer offset has been changed from 98500 to
96600. Tested - OK. Returned to production.
D-shift.
|
| 5.350 | Dorr Latches Need Replacement | ASDG::POIRIER | | Sat Mar 01 1997 19:04 | 11 |
|
Door Latches:
------------
The WIP isle side doors need replacement latches. The top latches on
both CMP.A1 & CMP.A2 have been replaced with their respective bottom
latches. (Sensors next to top latch) The doors are working ok for
now, but we'll be in trouble the next time a top latch fails.
We can order replacement latches from Strasbaugh or find another
type that will work.
C Shift.
|
| 5.351 | A dark and stormy night | FABSIX::O_WHITFORD | Lead, follow or step aside. | Thu Mar 06 1997 23:18 | 13 |
| Tool went down for pad change.
Replace pad, condition positioning off. Noticed with conditioner
homed and commanded down, it struck the edge of the bucket. Made
mechanical adjustment to turnbuckle at conditioner end of arm oscillate
cyl. Homes good, centers up in bucket good, conditione to edge of pad.
Small leak in polish table area. Table rinse bulkhead fitting loose.
Tightened, no more leak
Right carrier wafer count very high (348) Replaced right carrier.
Dave & Leon
|
| 5.352 | Carriers Sticking To Pad | ASDG::POIRIER | | Sat Mar 08 1997 17:04 | 35 |
|
Carriers Not Lifting Off Pad:
----------------------------
The Carriers would not lift off the pad during an auto cycle. The pad
had only 40 wafers on it and the conditioning disk was changed during
the weekly pm on Wednesday the 5th.
We pulled up workstream and found the lot #'s of the previous 3 pad
changes on both CMP.A1 & CMP.A2. We made sure we chose a different
lot # pad due to the "long breaking periods", "short pad life", "quick
drop-off in uniformity" and "carrier sticking to pad problems" that
have plauged us all week.
After the Pad & Conditioning Disk change, we ran 6 break-in wafers
using the "newpad" recipe. The carrier to pad STICKING problems
ceased to exist.
The current pad lot # is 6HR-JP2. Please monitor its performance.
Here is a little pad change history from this week:
CMP.A1 CMP.A2
------------------------------ --------------------------------
Pad Lot # Problem Pad Lot # Problem
--------- ------- --------- --------
6FL-JP4 /40 wafers Carriers sticking 6FE-JP4 /180 waf. no prob, PM
6HS-JP1 /198 wafers Uniformity 6HS-JP1 /318 waf. Unifor & RR
6HS-JP1 /232 wafers Uniformity 6PE-JP4 /168 waf. Uniformi
C Shift.
|
| 5.353 | Conditioner Head Rotation Failures | ASDG::POIRIER | | Sat Mar 15 1997 10:48 | 38 |
|
Conditioner Rotation Failures:
-----------------------------
The conditioner has been intermittently failing to rotate during the
its sweep while running the NEWPAD recipe. (higher rotation speed than
the other recipes) It has been failing between one and four times per
sweep. Power to the head rotation motor has been interupted during each
rotation failure.
The yellow LED, (CL) (current limit) on the rotation motor controller board
illuminates every time the rotation stops. The CL pot was turned 1/8
turn clockwise to slightly increase the current to the rotation motor.
This has stopped the conditioner head rotation failures but is not the
root cause.
The end cover was removed from the conditioner arm and the belt tension
checked out o.k. But, a loud grinding noise was observed. The
mechanical drawing for the conditioner assembly shows one ball bearing
on the top and one on the bottom of the vertical shaft of the
conditioner. There are also two sets of two ball bearings for the
belt tensioners inside the top arm. Its not clear which bearings are
bad but one or more of them definitly are. Its most likely the top
bearing on the vertical shaft assembly. Inspection will require major
disassembly of the conditioner.
Strasbaugh was called for pricing and avilability of the six bearings.
Since this happened late in the shift on Friday, they were instructed
to reply to Jim Tookers voice mail with the ordering info. Our under-
standing is that they're not available for parts ordering on Sat & Sun.
We'll call Jim T. at home this morning to verify this and he'll have
follow up on Monday morning.
The conditioner is still working fine at the higher current setting but
will eventually fail again as the bearing/s degrade further.
C Shift.
|
| 5.354 | POOR UNIFORMITY | FABSIX::B_WESTPHAL | | Wed Mar 19 1997 18:32 | 5 |
| CMP.A1 - Down for failing MQCs for poor uniformity. The process area was
cleaned. The pad, conditioner and Left carrier were swapped out.
|
| 5.355 | Dropped right carrier | FABSIX::O_WHITFORD | Lead, follow or step aside. | Wed Mar 19 1997 22:33 | 7 |
| Right carrier fell off spindle with shuttle in motion going to the
"clean" (in) position. This damaged the carrier film and the carrier
had a wafer count of 311... so replaced the carrier & inner most
silicone o-ring. (o-ring was moderately frayed) Returned tool to ops in
VERIFY-U.
Dave
|
| 5.356 | Right Carrier Fell Off Hub / New Fairchild Vac Regulator | ASDG::POIRIER | | Fri Mar 21 1997 19:40 | 19 |
|
Right Carrier Fell Off Hub:
--------------------------
The Hub o-rings were inspected and found to be in good condition.
Strasbaugh was called and informed us of a historical problem with
the Fairchild vacuum regulators. We replaced the aspirator tubes in the
regulators with the new stainless steel type that had previously
been sent to Jim T. A 20 wafer verification run was sucessfully
completed and the tool status was changed to UP.
The needle valve seal in one of the regulators appears to be slightly
deformed. Jim has arrainged for a Saturday delivery of 2 new
regulators. We'll install them tomorrow.
C Shift.
|
| 5.357 | Carriers are falling.... | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat Mar 22 1997 05:56 | 8 |
|
Within 20 minutes of each other, each carrier
had fallen off the tool and into the load cups.
Tool is down waiting for the Fairchilds as indicated
by C shift in the note previous to this one. They
are due in today.
D shift
|
| 5.358 | Left Spindle Dropping Carrier | ASDG::POIRIER | | Sat Mar 22 1997 19:32 | 23 |
|
Left Carrier Falling Off Hub:
----------------------------
Replaced faichild vacuum regulators. The carrier dropping problem
continued. We observed the left carrier dropping during the "spindle
rinse" step of the auto cycle. (just after unload)
The furon air operated isolation valve for the left spindle was
emitting rust from its exhaust port. The valve was disassembled
and the diaphram spring was rusty and brittle. It broke as soon
as we touched it. We did not have a replacement valve in stock but
found the correct spring in one of the old 3 way slurry distribution valves
that were removed for an upgrade.
We ran numerous spindle flush cycles and the carrier vacuum remained
above 23 in/hg. B SHift, please run 25 wafers using the HANDLING recipe
as a verification. The system status has been changed to VERIFY-U.
After the verification run, the tool will need a new pad & Carriers.
C Shift.
|
| 5.359 | rotary union replaced | SUBPAC::LANDRY | | Mon Mar 24 1997 19:29 | 21 |
| Well, the rotary union on the left spindle went bad again. Same thing
as the previous union, where the race was chewed up pretty bad. This
time, it was bad enough to cause a rotation axis error. Seeing this is
at least the 3rd union to go in the past month/month and a half, we
thoroughly examined all physical aspects of the assembly, in hope of
pinpointing the cause of this dilemma. No apparent reason was detected.
Todd Fordyce was contact for advice. All the things he recommended to
check were previously checked, with no problems found.
A new union was installed and it appears to be fine. Hub alignment was
performed and is within proper tolerence. A new pad is being installed
as I type. The system will be broken in post pad install. It will need
to have the carriers and brushes re-installed.
In the meantime, Strasbaugh will check further into the problem for us.
They have a couple of leads to chase. They will get back to us as soon
as possible.
Also today, the weekly pm was performed.
A shift
|
| 5.360 | Failed 24 hr MQC'S | FABSIX::R_POIRIER | | Wed Mar 26 1997 06:23 | 8 |
|
A1 failed 24 Hr MQC's. Twice. It got worse the
second time. Changed pad and conditioner.
B Shift
|
| 5.361 | long pad breakins | FABSIX::J_SWENSON | | Thu Mar 27 1997 19:39 | 15 |
| long breakin for pad #6FZ-JP1
-----------------------------
-replaced pad today mqc's failed.
- replaced pad conditioning disk also
- the pad took 48 wafers to breaking before mqc's would pass
- replaced carriers both had 414 wafers on them
Looks like there is a pad problem on the rise
C-Shift
|
| 5.362 | Pad replaced | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Mar 28 1997 05:21 | 8 |
|
The carriers started sticking to the pad after
the polishing was done. The pad's adhesive wasn't
holding down to the SUBA and came off the tool with
two fingers and no resistance. The pad was replaced
and was broken in. We are awaiting MQC's to be run.
D shift
|
| 5.363 | left carrier sticking | FABSIX::J_SADIN | Freedom isn't free. | Tue Apr 01 1997 20:39 | 6 |
|
left carrier sticking to pad. Replaced plate-oring and plate
screws. Ran test wafers ok.
a-shift
|
| 5.364 | Load Stations Adjusted | ASDG::POIRIER | | Wed Apr 02 1997 20:28 | 9 |
|
Load Stations Adjusted:
----------------------
Both load stations were adjusted due to loading failures today.
The thin flat washers on the load station brackets were replaced
with a thicker type. The thin washers were distorting into a concave
shape which made the adjustment move while the bolts were being tightened.
C Shift.
|
| 5.365 | rotory unions | LUDWIG::FINN | | Sun Apr 06 1997 20:48 | 18 |
|
Continued left rotory union installation from B shift. New rotory union is one
of three spare recently received. Strasbaugh had felt that these premature
failures were the result of our using their "rebuilt" rotory unions. This one
installed today is believed to be new, not rebuilt.
That said, we still choose to install the right rotory union on the left
spindle, and install the new rotory union on the right spindle. Any further
premature failures on the left spindle will be due to causes other than rebuilt
rotory unions .
Had wafer vacuum errors on left carrier. Found to be caused bad/old old
tubing at hub, replaced. Checked hub gaps and performed hub alignments.
Returned to manufacturing. System is currently MQC.
A shift
|
| 5.366 | pad change due to high uniformity | FABSIX::A_QUILLEN | Nobody will get away with anything | Tue Apr 08 1997 08:31 | 5 |
| Pad was changed due to high uniformity (over 20%). The tool was put to
end repair without recording pad data. The numbers are as follows:
#6ED-DA5
#6GF-JP2
MQC's passed.
|
| 5.366 | Pad change | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 10 1997 07:32 | 4 |
|
Pad change due to MQC's - bad unif.
D shift
|
| 5.367 | Carrier drop | FABSIX::O_WHITFORD | Lead, follow or step aside. | Wed Apr 16 1997 00:15 | 16 |
| Problems with the right hand carrier faling off spindle.
1) Checked vacuum at hub and at spindle 24"Hg
2) Checked vacuum at top of spindle (entry port
into rotary union) 30"
3) Re connected vac lines after ensuring the mating
surface of the ferrule & the fitting were clean
and free of burrs, dents dings etc.
4) Trimmed each end of the tygon tubing between hub
& spindle. Ops ran some breaking wafers with no
problems, logged into Verify-U for them to run MQC
Dave
|
| 5.368 | Right carrier still falling off. | LUDWIG::STANDING | | Wed Apr 16 1997 20:49 | 8 |
| CMP.A1 Continued with the problem of the right carrier falling off.
Also after about three to four wafers it would not be able to get
sufficient vacuum on the wafer. Upon doing a wafer blow off found
water coming out of the chuck. Removed chuck ring and found nothing
wrong. So I replaced the vacuum line and put tie wraps around both
ends. Hooked up a chart recorder to monitor the voltage on sols 16 an
17 to see if they could be closing at the wrong time. Could not run
any more wafers due to the tool not seeing any send cassettes.
|
| 5.369 | Uniformity and vacuum issues | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 17 1997 01:03 | 16 |
|
took over from C shift. SEND elevators were ok.
Ran 24 wafer verify for the carrier vacuum issue.
The right carrier was pulling poor vacuum at LOAD
(13 psia) with a wafer and it wouldn't come down.
Swapped carriers left to right and the vacuum was
4 psia on both. the tool ran fine with no carriers
dropping off or any other vacuum problems. Turned
tool back over to OPS for MQC's. Tool failed MQC's
for 16+% uniformity. Checked both hub alignments
and found left hub at .004 and the right at .005.
Brought both hubs below .0005. The pad had a bubble
so that was replaced as well. Tool ready for MQC's.
D shift
|
| 5.370 | WAFER CRASH | FABSIX::B_WESTPHAL | | Thu Apr 17 1997 20:32 | 7 |
|
CMP.A1- Down for a wafer crash. Cleaned the tool up and replaced all
consumables. Checked the carrier to load bucket alignments everything
was good. Noticed that the vacuum filter housing up in the bridge was
leaking. The same was removed from the system. The pad was
conditioned and returned to production for MQCs.
|
| 5.371 | dropping right carrier again | FABSIX::O_WHITFORD | Lead, follow or step aside. | Fri Apr 18 1997 21:28 | 16 |
| Blew off right carrier again.
Aske ops tech to try two more wafers and observe the vacuum. Everything
went fine until spindle flush. Lef spindle flushed at @ 40 psiA and
right spindle flushed in excess of 52 psiA. Hmmm....
PSS made a slight downtweak on the back pressure variable and the next
two wafers unloaded, and spindles flushed, both at @ 40 psia and the
right carrier remained with the hub. Ah-mazing.... :)
No for the REAL test, run it for a couple days and see if the problem
comes back....
D SHIFT
|
| 5.372 | PAD CHANGE | FABSIX::B_WESTPHAL | | Fri Apr 18 1997 21:44 | 4 |
|
CMP.A2 - Down for low removal rates. Changed the pad conditioner. cleaned up
the tool and returned it to production.
|
| 5.373 | Failed MQC's | FABSIX::R_POIRIER | | Mon Apr 28 1997 08:14 | 7 |
|
Tool failed 24 hr MQC's. Changed pad
and conditioning disk. Passed MQC's.
B Shift
|
| 5.374 | New robot cable has been ordered | SUBPAC::TOOKER | | Tue Apr 29 1997 16:26 | 5 |
| A new cable has been ordered for the cmp.a1 robot. This takes some
time to change out, so it will have to be planned. For the time
being, there should be no urgent need to change the cable.
Jim
|
| 5.375 | cable for robot | SUBPAC::LANDRY | | Tue Apr 29 1997 19:57 | 19 |
| This note is a followup to the previous note concerning the robot
cable (it's been ordered).
We arrived today with the system down for a split cable (robot top
cable) in the robots flex track. It seems a couple of links from the
tracks cover were missing, causing the cable to work it's way out and
eventually pinch a gash in the sheathing. Fortunetly, no wires within
the sheathing were damaged. After consulting with the powers that be,
it was determined to seal up the gash, rebuild the flex track,
re-install all removed hardware and test the system for proper
operation. Also, the cable end in the electronics cabinet was checked
to assure that no moisture had permiated back there. It was dry.
The test runs worked fine. The polish pad was changed and the tool
was returned to manufacturing.
A shift
Jim Tooker has placed an order for new cabling. Time will be arranged
to replace the damaged one when the new one arrives.
|
| 5.376 | Slurry supply change. | FABSIX::L_SHKOLNIKOV | | Thu May 01 1997 07:07 | 8 |
|
We hooked up external slurry barrel of 18% solids, per EE
request. Both slurry pumps were calibrated at 500ml. Pad,carriers
and conditioner disk were replaced. The tool is currently running
MQC's. Keep an eye on the level.
D - shift.
|
| 5.377 | 18% Slurry Tests for Tonight | STRATA::POLLARD | | Thu May 01 1997 18:03 | 37 |
| SS25 18% Slurry Tests - Plans For Tonight:
Today a lot of awesome tests were done with TERRIBLE results as we later
found the Cond'n arm was broken and not conditioning correctly. So this
means we're back at Square 1 for test. So I'm going to need some PSS & Ops
support to get the following MQC testing done tonight.
For wafers - I'm using the EXRSZ Dummies next to the Terminal By CMP.A1 &
the EMQC Monitors sitting next to the EXRSZ dummies. For the EMQC wafers slots
1-8 have been used & Slots 9-12 have been preread for Tx on Thickness.A1
(under "Proc Eng"). Particles were Pre-read on Slot 9-12 & were < 20.
****IMPORTANT - For ALL MQC Runs *****
-Please Save all MQC Monitor Wafers in original slots so I can study any
Particle Problems.
-Please Save all Delta Tx Maps on UV1050
-Record all particle (Large/Total/Scr Lngth) & Tx data in this Note.
----So here's the Plan:
1. EE will finish up fixing Cond'n Arm and Install New Pad and do 10 Cond'n
cycles.
2. PSS/Ops - Run 10 Breakins as normal on "NewPad" recipe.
3. Do Std MQC Run & Eval. ("MQC" recipe).
4. Do 6 Dummy Wafers on "18NewPad" Recipe.
5. Do Std MQC Run & Eval. If Uniformity is <10% then Go to Step 6.
If Uniformity is > 10% then do 10 more Dummies on "18NewPad" recipe &
repeat Std MQC then go to #6.
6. Use recipe "18MQC1" recipe for MQC run with 2 monitors.
7. Run 10 Dummy wafers on "18MQC1" Recipe.
8. Use recipe "18MQC1" recipe for MQC run with 2 monitors.
9. Use recipe "18MQC2" recipe for MQC run with 2 monitors.
10. Run 10 Dummy wafers on "18MQC2" Recipe.
11. Use recipe "18MQC2" recipe for MQC run with 2 monitors.
Thanks
Bryan
|
| 5.378 | Pad Conditioner roll pin Shot. | FABSIX::J_SWENSON | | Thu May 01 1997 20:05 | 20 |
| Conditioning Arm
----------------
- During Eng experiment noticed conditioning arm jumping.
- found roll pin for disk assy to be oxidized.
- Bought new roll pins
- installed new pin
- lubed assy
- conditioned pad for 10 cycles
- returned system back to ops
C-Shift
|
| 5.379 | Results for 18% slurry tests | FABSIX::R_THOMPSON | | Fri May 02 1997 06:23 | 44 |
|
1. EE will finish up fixing Cond'n Arm and Install New Pad and do 10 Cond'n
cycles.
2. PSS/Ops - Run 10 Breakins as normal on "NewPad" recipe.
3. Do Std MQC Run & Eval. ("MQC" recipe).
4. Do 6 Dummy Wafers on "18NewPad" Recipe.
5. Do Std MQC Run & Eval. If Uniformity is <10% then Go to Step 6.
If Uniformity is > 10% then do 10 more Dummies on "18NewPad" recipe &
repeat Std MQC then go to #6.
6. Use recipe "18MQC1" recipe for MQC run with 2 monitors.
7. Run 10 Dummy wafers on "18MQC1" Recipe.
8. Use recipe "18MQC1" recipe for MQC run with 2 monitors.
9. Use recipe "18MQC2" recipe for MQC run with 2 monitors.
10. Run 10 Dummy wafers on "18MQC2" Recipe.
11. Use recipe "18MQC2" recipe for MQC run with 2 monitors.
_______________________________________________________________________________
** processes completed through step 6, we ran out of the 18% slurry
continue processing at step 7.
** RESULTS**
RATE DEV. PARTICLES
STEP 3
rem.rate std. lg. tot. sc.ct
left- 1594 20.1 602 1758 7.1
right- 1698 22.4 463 2629 48.9
STEP 5
rem.rate std. lg. tot. sc.ct
left- 1579 21.0 35 378 1.0
right- 1471 18.1 20 170 16.1
STEP 5 (second try)
rem.rate std. lg. tot. sc.ct
left- 1208 13.5 27 210 2.6
right- 1288 14.8 22 249 0
STEP 6
rem.rate std. lg. tot. sc.ct
left- 1295 13.1 86 756 30.3
right- 1183 16.0 145 678 188
If you have any questions please contact me.
Rick Thompson
|
| 5.380 | Scotty.. we need more slurry!!! | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 02 1997 06:51 | 9 |
|
We ran out of 18% slurry so the tests were
halted. I couldn't find any 18% slurry anywhere
in HLO3. Ashland will be here around 6:30am so
I'll have Leon track them down to try and get
us another barrel. The tool is in WET MODE and
UP/ENG.
D shift
|
| 5.381 | Back to business. | FABSIX::L_SHKOLNIKOV | | Fri May 02 1997 08:21 | 4 |
| There is a new barrel of 18% slurry connected to the tool.
The slurry flow has been checked.
Leon.
|
| 5.382 | addition to .379 | FABSIX::R_THOMPSON | | Fri May 02 1997 08:40 | 7 |
| This is an addition to note .379
We have recieved more of the 18% slurry and the tests have continued
I am currently running step 7. "Run 10 Dummy wafers on "18MQC1" Recipe."
All previous data was recorded on thickness.A4.(pre and post readings)
Pre readings for step 8&9 have been read on thickness.A5.
Rick
|
| 5.383 | Scratches, bad carrier | LUDWIG::STANDING | | Fri May 02 1997 20:12 | 7 |
| CMP.A1 Removed barrel of slurry and reconnected tool to bulk supply.
Later tool went down for scratches on wafer, operator ran
wafers through brushes and without brushes and determined that
scratches were coming from brushes. Brushes were replaced.
Later the wafers were falling off right carrier, you can hear
a clicking sound coming from the carrier. Production was running lots
and would not release the tool for a carrier change.
|
| 5.384 | Failed mqc's | FABSIX::R_POIRIER | | Mon May 05 1997 07:03 | 7 |
|
Failed MQC's. Replaced Pad and conditioner.
Passed MQC's.
B Shift
|
| 5.385 | Failed MQCs | FABSIX::R_POIRIER | | Tue May 06 1997 07:38 | 10 |
|
Failed MQC's. Replaced pad, carriers and
conditioning disk. Also had a problem
with the conditioning disk dish. Would not
drain. Found the drain line plugged up.
Un-plugged line.
B Shift
|
| 5.386 | axis 5 motor control module | STRATA::FINN | | Wed May 07 1997 21:09 | 5 |
|
Changed Axis 5 motor control module at EE request.
A shift
|
| 5.387 | Pad change | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 09 1997 06:01 | 5 |
|
Pad replaced due to bad uniformity...
D shift
|
| 5.388 | pad change | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 16 1997 05:58 | 5 |
|
Replaced pad because it failed MQC's for bad unif. and
had a bubble
D shift
|
| 5.389 | Bad unif. - Robot issue | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat May 17 1997 08:22 | 11 |
|
Twice the robot crashed into the right and left send
elevators. Found small tear in 1/8" vacuum line. Cut back line
and ran 50 wafer VERIFY. All set....
Tool failed 24 hr. MQC's for bad unif. Replaced pad...
Tool in VERIFY-U at this time and is ready for break-ins.
BJ
|
| 5.390 | cmp.a1 crash | FABSIX::J_SADIN | Freedom isn't free. | Sun May 18 1997 19:52 | 13 |
|
Replaced both carriers due to max wafer counts and then the right
carrier began dropping wafers on the polish table (at lift off). It saw
enough vacuum that it thought it still had the wafer and the
conditioner crunched the wafer still on the polish table. Stripping the
carrier revealed the possibility of a pinched hose, so the carrier was
swapped with a new one. Cleaned up the tool and it's been running well
since then.
a-team
|
| 5.391 | Pad change | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu May 22 1997 06:05 | 6 |
|
Replaced pad due to tool failing MQC's for high unif.
Also, one incident with the right carrier sticking to pad.
Swapped the right carrier with the left carrier to monitor
carrier.
D shift
|
| 5.392 | Wafers falling off right carrier. | STRATA::STANDING | | Sat May 24 1997 20:00 | 6 |
| Tool went down for loosing wafers off the right carrier. Did a spindle
blow off and saw water coming out from the outer set of holes on the
carrier. Removed and disassembled carrier. Replaced the silicone
O-ring and the three O-ring screws. Checked the check valves they were
OK. Reassembled carrier and checked for leaks and there were none.
Returned tool to production.
|
| 5.393 | A1 pad change status from C shift | FABSIX::B_JUBINVILLE | | Wed May 28 1997 22:10 | 18 |
| From: ASDG::POIRIER "FAB6 CMP EQUIPMENT TECHNICIAN. PAGER # 254 FUNCTION 1. TEL:6610,5804,4774,6609." 28-MAY-1997 19:29:29.78
To: FABSIX::B_JUBINVILLE,FABSIX::L_SHKOLNIKOV
CC: POIRIER
Subj: passdown
Brian & Leon,
Here is the latest situation:
CMP.A1 - DOWN/REPAIR: Pad change in progress. We won't have time to finish.
C Shift.
|
| 5.394 | Pad change - bad uniformity | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu May 29 1997 02:55 | 10 |
|
Took over from C shift. Cleaned tool and replaced
pad due to bad uniformity on the 24hr MQC's. Tool
passed MQC's after pad change and tool was turned over
to OPS.
D shift
|
| 5.395 | Pad change | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 30 1997 08:14 | 6 |
|
Tool failed 24 hr. MQC's for uniformity. Pad was replaced.
The MQC's were run and we are waiting for the results.
D shift
|
| 5.396 | Important work for CMP.A tools Sun Nit/Mon Morn | STRATA::POLLARD | | Fri May 30 1997 17:49 | 29 |
| **** IMPORTANT Info for Sunday night B shift on CMP.A tools! *******
Please DO the following if a normal PAD change is required on a CMP.A tool
on Sunday Night/Monday morning AFTER 2am:
(this is in preparation to convert to the new 4" conditioning recipes which
will be turned on by TDCO Monday during the day)
1. Install the 4" Conditioning Disk in place of 6"
2. Change the following variables: Var#126- 95,000 Var#71- 0.59
3. Install New Pad as normal.
4. Use Recipe "CRFSTBKN" to do 10 Conditioning Sweeps
(set # Sweeps back to 2 when finished).
5. Use Recipe "CRFSTBKN" to do 10 Break-ins.
6. On CMP.A1 use Recipe "MQCBP" to do MQC.
On CMP.A2 use Recipe "MQCBP3" to do MQC.
7. If MQC's pass leave up for Bryan to put TDCO on-line at 8am.
If fails go to #8.
8. If MQC's failed then evaluate whether the removal rate is Center Fast or
Center Slow:
- If it is Center Fast Repeat #4 and #5 and #6 - if it passes
system will wait for Bryan to put on TDCO at 8am. If it fails start
with another Pad.
- If it is Center Slow do 10 conditioning cycles with Recipe "CRSLWBKN"
and do 10 Breakin wafers with the same recipe then repeat #6. If
it passes system will wait for Bryan to put on TDCO at 8am. If it fails
start with another Pad.
Bryan Pollard
|
| 5.397 | TDCO on-line for CMP.A tools | FABSIX::B_POLLARD | | Mon Jun 02 1997 16:59 | 107 |
| Please read the TDCO which went on-line today for New Conditioning cycles
and a New Pad Breakin Procedure.
Thanks,
Bryan
DISK$DCS2:[UDOC.QUAL]BK20-00000-0006.T REV L 11-JUN-1996 PAGE 10 OF 13
| 6.1 Temporary D.C.O. Form
Originator__Bryan Pollard____ TEMPORARY TDCO # _________________
Tel Ext__4036_Date__5/29/97__ DOCUMENT Copy # _____ of ______
CHANGE ORDER Date Of Issue___________
_______________________________________________________________________________
PROBLEM: |1ST ISSUE APPROVAL STAMP
Conditioning part of all recipes have been updated for|EXPIRATION DATE
4" disk. This change will extend the pad life from |________
the typical 250-300 wafers up to 500 wafers. |
Also changes have been made to break-in recipes. |
______________________________________________________|_________________________
DESCRIPTION OF CHANGE: |2ND ISSUE APPROVAL STAMP
The conditioning sweep parameters (which are not |EXPIRATION DATE
typically seen by operators) have been updated for all|________
production recipes - MQC, PMD, ILD, STI. The sweep |
has also been changed from 1 to 2 & from Post |
to Pre Condition. |
|
The limit for Pad Life is extended to 500 wafers |________________________
(with 24 hour MQC's in Spec - Section 4.1.11) |3RD ISSUE APPROVAL STAMP
|EXPIRATION DATE
Also changes have been to the Pad Breakin procedures -|________
these apply to section 3.1.1 and to various parts of |
4.1 of the spec and are described on the second page. |
|
______________________________________________________|_______________________
DURATION OF TDCO OR NUMBER OF LOTS TO BE PROCESSED: 30 days
______________________________________________________________________________
DOCUMENT # / TITLE AFFECTED
HF6O-0069 / STRAUSBAUGH 6DS-SP (CMP.A1, CMP.A2) Chemical Mechanical
Planarization Operations Specification.
_______________________________________________________________________________
1ST ISSUE APPROVALS:| 2ND ISSUE APPROVAL | 3RD ISSUE APPROVAL | EARLY REMOVAL
| | | AUTHORIZATION
SIGNATURE/BADGE/DATE|SIGNATURE/BADGE/DATE|SIGNATURE/BADGE/DATE|SIGN./BADGE/DATE
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
| | |
| | |
____________________|____________________|____________________|_______________
IF LOT SPECIFIC: Upon completion of the lots, the originator must remove, sign,
date this TDCO form and return it Document Control (HLO1-1/P5).
____________________ ____________ ___________________
ORIGINATOR DATE DATE LOTS COMPLETED
---------------
|d|i|g|i|t|a|l|
---------------
DISK$DCS2:[UDOC.QUAL]BK20-00000-0006.T REV L 11-JUN-1996 PAGE 10 OF 13
| 6.1 Temporary D.C.O. Form
Originator__Bryan Pollard____ TEMPORARY TDCO # _________________
Tel Ext__4036_Date__5/29/97__ DOCUMENT Copy # _____ of ______
Page 2 CHANGE ORDER Date Of Issue___________
_______________________________________________________________________________
The Break-In recipes and procedures for breaking in a New Pad have been altered-
the new procedure will be as follows (applies to section 4.1.6- 4.1.14):
1. Run 10 Conditioning cycles with the recipe "CRFSTBKN" (stands for
CenterFast Break-in - most new pads start with a Center Fast polish).
2. Run 10 - 50K oxide wafers thru the recipe "CRFSTBKN".
3. Do monitor run with recipe "MQC"
4. If monitor fails uniformity then do the following:
- If monitor is Center Fast - run 10 more conditioning cycles with
the recipe "CRFSTBKN" then do 10 more 50K oxide dummies with the same
recipe and repeat MQC. If second MQC fails change the pad and start
over.
- If monitor is Center Slow - run 10 conditioning cycles with the recipe
"CRSLWBKN" then do 10 more 50K oxide wafer with the same recipe and
repeat MQC. If second MQC fails change the pad and start over.
- For either case, record in CMP Notesfile how many breakins are required
to get the uniformity in spec.
The Break-In recipes and procedures for breaking in a USED Pad have also been
altered- the new procedure will be as follows (applies to section 4.1.6 -
4.1.14):
1. All breakins which previously were done with the "USEDPAD" recipe will
be done with the "CRSLWBKN" recipe except if an MQC has failed
due to being Center Fast then use the CRFSTBKN recipe.
2. If a 24 hour MQC fails and is Center Slow then do 20 conditioning
cycles with the "CRSLWBKN" recipe and repeat MQC - if it passes system
is up if it fails then the system will require a pad change.
|
| 5.398 | 4" conditioner installed | FABSIX::J_SADIN | Freedom isn't free. | Mon Jun 02 1997 20:02 | 9 |
|
Set up tool for 4" conditioner. Had to move outer bushing on pad
conditioning arm assembly in order to make the correct outside
position with the 4" conditioner. Variables 126 and 71 were changed to
support the 4" conditioner.
a-shift
|
| 5.399 | Please Save the Pads! | STRATA::POLLARD | | Wed Jun 04 1997 10:42 | 6 |
| NOTE - During the time of the 4" Disk TDCO - Please SAVE a full-length
cross-section of all pads on the A tools. Label them with the tool,
# of wafers, Date, and "Hold for Bryan Pollard".
Thanks
Bryan Pollard
|