| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 17.85 | WAFERS NOT GETTING INTO RECEIVE #1 CASSETTE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 10 1995 05:49 | 8 |
|
The wafers were getting caught slidding into RECEIVE
ELEVATOR #1. Darrin and I went through the calibration
procedure and found the elevator slot height to be off.
We went through and set a new height and cycled wafers
through it without any more problems.
D-shift
|
| 17.86 | Wafers getting stuck at receive elevator | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Nov 11 1995 07:24 | 9 |
|
Yesterday, Darrin and I adjusted the Elevator #1 height
because the wafers weren't going in all the time. This
happened (4) more times again this morning but for now,
OPS are just giving it a hand. They can live with it right
now.
D shift
|
| 17.87 | Vibration after polish | FABSIX::R_GEE | | Sun Nov 12 1995 07:04 | 5 |
| There is an intermittent loud vibration sound at liftoff after
the polish cycle. It happened about 5 times tonight no pattern
to it. This needs to be monitored.
B shift
|
| 17.88 | passdown | FABSIX::B_FINN | | Mon Nov 13 1995 19:17 | 8 |
|
System is down bgn_repair, Two product wafers and 3 monitors broke on last run
of the lot. Carrier # 1 had a screw fall out and onto the table. Aprox.
~~ 1500 wafers on these carriers. Two carriers are being rebuilt currently.
Found screws loose on one other carrier. System has been cleaned and
pad has been changed.
A shift
|
| 17.89 | Severe Vibration at polish / High Particles | FABSIX::R_GEE | | Tue Nov 14 1995 05:59 | 40 |
| * Failed particles and uniformity.
- Ran a particle check using the "Transfer" program, this
cycles the wafers thru the system without touching the
pad. Particle check showed 1 adder, this shows that the
particle problem has to be coming from the polish table
area.
- Removed and cleaned the conditioner.
- Cleaned the index table and polish table area.
- Re-conditioned the pad 300 sec.
- Ran a second particle check, no improvement.
- Replaced the pad. Broke in the pad with 50 wafers and ran
MQC's, we had no improvement on particles.
The system failed particles (overloaded the surfscan) for
the 2nd time. Uniformity is also very unstable.
Head #1 = 10.2 %
#2 = 8.8 %
#3 = 6.4 %
#4 = 13.4 %
#5 = 10.6 %
* There is a severe vibration sound coming from the multi-head/
table area during every polish cycle now, yesterday it was
intermittent. It sounds and feels like it is coming mainly
from head #1. The program shows there is 30 more pounds
of downforce applied to this head than the other 4. The downforce
for Head #1 is over 400 pounds, this may be the reason for the
vibration. The carriers have maximum downforce on them when
only 2/3 of the carrier is on the pad.
We feel the head vibration on the pad is causing the particle
problem, it maybe damaging the pad.
The system is now down to bgn_repair and will need to be
evaluated by Engineering and field service this morning.
B shift
|
| 17.90 | particles, maybe head 4 related | SUBPAC::LANDRY | | Tue Nov 14 1995 19:40 | 19 |
| The system was down this morning for particles. The pad was replaced
after a thorough clean. The condition wheel was removed, cleaned and
re-installed. The carriers were changed out as well. As this was
taking place, the weekly pm was performed.
Breakin and MQC's followed. Particles were still bad and uniformity
wasn't good. Rust was found in a carrier. The same thing was found
yesterday as well. Both times, the carrier was mounted to head #4.
It appears that there is something leaking by (the rotary union or
spindle seals) to cause this.
Head 4 is being taken off-line. The carrier will remain on head 4.
a piece of DF200 film is being applied to it to plug up the blow off
holes. The pad will be replaced, the system re-cleaned and MQC's will
be attempted again. The hope is that the problem is definately related
to head 4 ONLY.
A Shift
|
| 17.91 | High particles, leak at Chiller PCWS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 15 1995 06:37 | 17 |
|
Well, once again we scrubbed the entire machine, cleaned out the
carriers and replaced the pad to try and get rid of the particle
problems.
When we came in tonight, Leon noticed the chiller was left off
once again. After he turned it on, he noticed a small stream of
mist shooting from a 1/2" PVC fitting. It so happened that at
different times when the pressure went up, the stream was hitting
the heat exchanger. I wonder if that blew out the first chiller...
We tried PVC cementing it and letting it sit for 8 hours but
since it was high pressure, it started leaking again. We ended up
replacing the entire PVC section and stopping the leak that way.
We used threaded fittings thus killing the downtime.
D shift
|
| 17.92 | Slurry pump hose/wafer breakage - COnd gimbal assem | ASDG::POIRIER | | Fri Nov 17 1995 19:23 | 19 |
|
Slurry Pump Hose:
----------------
A slurry hose ruptured at approx 5:00 p.m. while wafers were polishing.
Wafers broke on heads #'s 2, 3 & 4. The pad was removed and the broken
wafers cleaned-up. A new pad has just been mounted on the Table.
Please build-up 3 more carriers and begin MQC's.
Conditioner gimbal assembly:
----------------------------
Bob Gugerty from Speedfam replaced the Conditioner Gimbal Assembly
Bearing Seal this afternoon. While the assembly was apart, Bob also
replaced the shims in the assembly with a stainless steel type to
prevent any further corrosion.
John.
|
| 17.93 | major wafer crash, vacuum pump problems | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Nov 18 1995 08:47 | 34 |
|
where do I start... the front door...
The tool was running the second set of 5 wafer during the
pad break-in when it started making a moose mating call. A
wafer slid out head #1 and the tool ws EMO'ed. It was discovered
that the slurry valves were off. Everything was back to normal
and was running again.... well.... for the 1st set of wafers.
Wafer #3 was in the middle of unloading as the machine wafer
detect tripped for a disaster. Wafer #3 was missing 1/4 of its
wafer. It looks like it cracked unde the carrier and the carrier
kept the 1/4 of the wafer. The 1/4 wafer with the next whole
wafer started a chain reaction and sent little pieces of wafers
to all of heads. Since we are using the ID/OD pads, there isn't
much oscillation so small chunks of wafers can slip around the
"red eyes." This by far was THE WAFER(S) CRASH IN HISTORY!!!!
The inner part of the table that is exposed with no pad was
very damaged. There was hack marks in the steel table everywhere.
A very fine grit stone was used to take them out but it doesn't
look pretty. Head #3 was the worst hit. It now looks like it
sends "sand" sized wafer stuff at blow off. C shift will be
looking at today. Another problem.... the circuit breaker for the
vacuum pump kept tripping at power-up as it was all week according
to the vendors. I swapped out the check valve off of the vacuum
pump and found it stuck closed. It was replaced with a new one.
There are (7) known new white rings left and no plates. There
are (10) plates due in today. The carriers that are on B1 we taken
from B2 per Tim D.
We'z outta here!!!!!!!!
|
| 17.94 | Wafer Breakage Recovery / System Status | ASDG::POIRIER | | Sat Nov 18 1995 19:02 | 23 |
|
SYSTEM STATUS:
-------------
1) All Carriers, Plates & Shims left over from the wafer breakage
event last night have been cleaned and returned to the Carrier
Rebuild Room.
2) Spindle #3, that was disabled due to contamination concerns, has
been verified "clean" and is now back on line.
3) Five good carriers from CMP.B2 have been transfered to CMP.B1.
(There are no remaining "good" carrier plates in house for B2.
Ten were scheduled to arrive today. However, shipping information
was unavailable from Speedfam today). "A" shift, try checking the
recieving dock or Package Express tomorrow. If your unable locate
the plates, we'll have to wait until Monday morning.
4) A 20 wafer Break-in/Verification run was completed at 6:00 p.m.
The Pad is now broken-in and the system is ready for MQC's.
John.
|
| 17.95 | good start.......bad ending | SUBPAC::LANDRY | | Sun Nov 19 1995 19:27 | 34 |
| The system is currently down, waiting parts. The system ran good
most of the day until early evening. A wafer got loose from a
carrier, taking out all five carriers. Obviously, the wafer
detection circuit didn't work properly. There are NO pressure
plates in-house at this time. We expected some this weekend, but
the shipment never arrived.
An SBA has been generated for 29 plates to go out Monday morning.
This is an unusually high number, but between the two systems now
on site, the bad equipment performance since Friday night, and the
lack of shipping capability from this site on weekends, we've hit
this snag. Shipping alternatives will need to be researched for
such future occurrences.
So, the system is currently being cleaned. B shift will have to
pick up where we leave off. The following items will need to be
done:
- Remove, clean and re-install the conditioner wheel
- Fragments will need to be removed from the Index Table,
including brushing the cups with a scrub brush
- Both the tub areas will need to be thoroughly wiped
(the wafers were grinding away for awhile and many
silicon dust particles are everywhere).
- The wafer detection circuitry/sensor setup will need
to be checked out prior to running more wafers. This
require a pad on the table (or a piece of used pad).
The sensor can't receive a reflection from the SS
table.
- Maybe a good opportunity tonight to do the PM.
A Shift
|
| 17.96 | Cleaned-up wafer particles. | FABSIX::R_GEE | | Mon Nov 20 1995 07:00 | 10 |
| - Dis-assembled and cleaned the conditioner.
- Cleaned the load / unload cups.
- Cleaned the index table, and polish table area.
- Dis-assembled and cleaned the 5 carriers, there on a cart
in the carrier rebuild room.
B shift
|
| 17.97 | passdown | STRATA::FINN | | Mon Nov 20 1995 19:17 | 28 |
|
Five (5) carriers pressure plates were received today from Speedfam.
Four were successfully built and installed on the system. The fifth pressure
plate is exhibiting a large range, even when built with different rings on
different carriers. Speedfam suggests stoning the bottom of the pressure plate
and the top of the carrier. We have not done this yet due to down equipment in
the area.
Twenty nine pressure plates were taken to the dock today and shipment
confirmation has been received.
Six pressure plates are due here tomorrow from Speedfam.
The systems wafer load reference positions were adjusted by Speedfam while we
were building carriers. Table index, multihead, and carrier arm positions were
reprogrammed. Wafer loss detection was also readjusted.
The system was placed up to verify at 1:30pm, but immediately failed due to
wafers not being picked up at load by the carriers. Table index and carrier
arm reference portions are not set correctly. Possibly drifting?
We are currently attempting to recalibrate these positions. Index table
position intermittently drifts. Index table home sensor and flag seem tight.
Work continues.
A shift
|
| 17.98 | plates....carriers | SUBPAC::LANDRY | | Tue Nov 21 1995 19:07 | 15 |
| Today.......
A case of pressure plates (5 plates) were received in. A decision
was made to build them to the ring extention of 5.5 - 6.0, which
are run exclusively on B1 (B2 currently is running ring extentions
of 7.0 - 8.0). The five built carriers are on the cart in the
carrier rebuild room.
Six more plates are expected to arrive tomorrow morning. One will be
built for B1 to complete the desired ten carrier minimum and the other
five will be built to B2's desire ring extention. More plates should
arrive on Friday.
A shift
|
| 17.99 | Elevator water level / Touch screen lockup | FABSIX::R_GEE | | Wed Nov 22 1995 05:08 | 13 |
| * Cross slotting wafers in cassette #1.
- Found the DI water level in the water track for
elevator #1 was to high. Lower the overflow tubes
3/16".
* Touch screen locked up during recipe changes.
- Checked all the computer connections, no good.
- reset the computer, all set.
Bob & Brian
|
| 17.100 | pad, cleaning, carrier info | SUBPAC::LANDRY | | Wed Nov 22 1995 19:12 | 12 |
| The system ran fine today up until mid-afternoon, when the pad came up
with some poor performance. A bubble was forming in the middle of the
pad. It was changed out with a new ID/OD pad. The condition wheel was
removed and cleaned. The index table was drained and cleaned. At
this time, a fifth carrier was installed (on head 4). The pad wad
broken in and, as of this typing, MQC's are underway.
Carrier plates arrived today. B1 has a full set of built carriers
ready in the rebuild room.
Todays Crew.....
|
| 17.101 | particles | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 23 1995 06:33 | 8 |
|
Failed MQC's and particles. We pulled the pad and cleaned the
entire machine. It passed particles but borderlined failed on
uniformity. After another 25 wafers, it looks like it will come
in.
D shift - Equip.+ Ops
|
| 17.102 | MQC's passed....we're running product | SUBPAC::LANDRY | | Sat Nov 25 1995 18:40 | 9 |
| We arrived today to find that the system hadn't passed MQC's since late
Wednesday evening. It was polishing center fast. The oscillation
distance was reduced to keep the edge of the wafer on the pad more.
All five heads came in under the max limit for uniformity. The system
is currently up and flying.
Special thanks to Jim Sadin for this fix. It was his idea!
A/C shifters
|
| 17.103 | slurry supply blues...... | SUBPAC::LANDRY | | Mon Nov 27 1995 18:49 | 20 |
| The slurry supply system went down early this morning. The pump in the
distribution unit down stairs kicked off for excessive pressure. This
is normally caused by a "dead-head" situation. So, we opened the by-
pass valve in the end VMB to allow flow to increase in the loop. The
pump down stairs remained running. As the valve was closed down to
supply pressure to the line, we were able to get the pressure up, but
there wasn't sufficient flow.
We began taking valves and fittings apart in the VMB's. There were many
restrictions/solidified lines in the "return" side of the loop. The two
valves in the VMB were changed out, still not right. Found the return
tubing to be plugged up solid. The "slurry cement ball" was removed
from the line and the line re-installed. All was flowing well through
the entire tool loop.
We also changed out the incoming filter during this extravaganza.
The system is currently UP and running product just fine.
A shifters and Tim D
|
| 17.104 | passdown | STRATA::FINN | | Tue Nov 28 1995 19:20 | 13 |
|
System threw a wafer from carrier 5 while lifting off of the
table at completion of polish. It did not break, one other wafers in same run
failed to blow off carrier. With this exception, system has and is
running well.
Brought 10 good Speedfam Pressure plates up from the dock. Tim is rush ordering
the white rings.
Brendan
|
| 17.1 | INSTALL INFORMATION | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:04 | 1090 |
| -< 4/26 update >-
--------------------------------------------------------------------------------
On Tuesday, the rep (Mike Slepikas) and Mark Aubuchont were in to
begin working on some of the pre-equipment startup items that can be
addressed.
What was accomplished Tuesday:
* ALL the motor controllers were removed from the system and a
jumper on the pc board was changed to a different position.
This mod was a fix for any "out of control" motor performance
that may/may not occur during an EMO situation. During an EMO
situation, the motors would "jerk" prior to a safe shutdown.
The original fix at the factory was an inprovement but still not
sufficient enough to feel comfortable working near the system.
The new fix consisted of removing the controllers and bring them
out of the cleanroom so that soldering could take place. Very
long and tedious work! Lots of screws, gowning/degowning, walk
up and down the stairs.
The Speedfam people will be back in on Wednesday to continue on
with the pre-startup punch list.
Have a safe an ergonomical day.............Tim
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Note 62.2 CMP.B1 2 of 292
SUBPAC::LANDRY 12 lines 6-JUN-1994 16:25
-< Monday installation progress >-
--------------------------------------------------------------------------------
Monday Installation Update.........
Today, the electricians ran conduit and pulled wires from the main
breaker on the wall to the transformer. They also ran the conduit from
the transformer to the main system (minus the wires at this time). The
conduit mounted on the system was removed temperarily so that they
could pulled the wires through it easier. Once this was accomplished,
the conduit was remounted to the system.
There was no activity with any other hookups to this system today.
Doc
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Note 62.3 CMP.B1 3 of 292
SUBPAC::LANDRY 13 lines 16-JUN-1994 15:57
-< 6/16 Update >-
--------------------------------------------------------------------------------
Installation Update:
All electrical work has been completed. This includes the main system,
the transformer and the TCU.
KSI is beginning to run the GCW drains under the floor.
No exhaust or incoming air for the HEPA filters work has been performed
at this time.
No slurry, N2 or CDA installation work has started at this time.
Doc
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Note 62.4 CMP.B1 4 of 292
SUBPAC::LANDRY 22 lines 24-JUN-1994 13:56
-< 6/24 Installation Update >-
--------------------------------------------------------------------------------
ALL electrical installation work is COMPLETE!
Both GCW drains have been assembled, leak checked and installed on the
main system. COMPLETE!
Work is beginning on the TCU installation at this time.
Installation has yet to begin on the following:
CDA
N2
Slurry
Exhaust
Incoming air for the HEPA filter
Started gathering labels needed per safety.
Have: CDA, Ethylene Glycol, DI Water
Need: Slurry, N2, GCW, Exhaust
Doc
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Note 62.5 CMP.B1 5 of 292
SUBPAC::TOOKER 35 lines 8-JUL-1994 11:02
-< Hook-Up Status For 7/8/94 >-
--------------------------------------------------------------------------------
CMP.B1 Tool Hook-Up Status For 7/8/94
COMPLETED ITEMS:
----------------
* Bulkhead
* All GCW drain connections
* Eelectrical connections
OPEN ITEMS:
-----------
* DI Water final connection and pressure gauge
* Soft water lines
* NESLAB TCU soft water, process cooling water, and drain
connections
* CDA final connection
* N2 final connection
* All exhaust work
* HEPA filter connection
* Slurry lines from valve manifold box to system
* Slurry valve manifold box valve work
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Note 62.6 CMP.B1 6 of 292
SUBPAC::LANDRY 18 lines 12-JUL-1994 13:34
-< 7/12 Installation Update >-
--------------------------------------------------------------------------------
The two HEPA filters for the system were installed today. This was
performed now due to NEVCO needing them in-place prior to AC hookup to
the tool. Thanks to Earl and Jim for assisting in this task!
Also today, KSI was still in a state of confusion over the VMB and
regulator hookups required on the slurry loop. A decision has been
made to allow KSI to hookup the regulator in the 4th VMB for containment
purposes. This 4th VMB isn't needed until another planarizer is to be
installed. A containment vessel will be made in the future to move the
regulator out of that VMB, thus freeing up the 4th VMB for future
installation.
Jim Tooker is currently writing the necessary paper work to allow the
above discribed work to be performed.
Doc
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Note 62.7 CMP.B1 7 of 292
SUBPAC::TOOKER 19 lines 26-JUL-1994 09:20
-< CMP.B1 punch list >-
--------------------------------------------------------------------------------
CMP.B1 Tool Hook-Up Status As Of 7/25/94
PUNCH LIST ITEMS
----------------
ITEM RESPONSIBLE PERSON
--------------------------------------------------------------------------
1) GCW pipe union located near tool drain D. Atkinson/KSI
connection needs to be moved. It is
interfering with the electrical cabinet
door.
2) Rotate ball valve handles to inside to D. Atkinson/KSI
avoid damaging or guard area with uni-strut.
3) Complete exhaust work. D. Atkinson/NEEVCO
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Note 62.8 CMP.B1 8 of 292
SUBPAC::LANDRY 10 lines 1-AUG-1994 13:09
-< 8/1 equipment installation update >-
--------------------------------------------------------------------------------
Brian and I finished up the facilities hookups that EE personnel are
responsible for on this system. Those facilities are CDA & N2. We
still need to remove the HEPA filter access covers and remove the HEPA
filters.
The DI in/out connections still need to be connected by the
sub-contractors. Also, the slurry lines / VMB's still need major work
performed.
Doc
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Note 62.9 CMP.B1 9 of 292
SUBPAC::LANDRY 35 lines 5-AUG-1994 16:37
-< Installation Update >-
--------------------------------------------------------------------------------
Installation status is as such (as of 4:00PM on 8/5/94):
DI water problem still exists, but it has improved since Thursday. The
pressure has increased to 35 PSI. This may be sufficient for this
system. We'll need to load up the DI usage to confirm.
N2 and CDA all set
Slurry lines were connected today (thanks BJ) to the back of the
system. The work slated for the VMB hookup is still un-started. This
issue will be addressed Monday with the appropriate parties. The
hookup performed by Brian and I consists of one input line and one
output line, tee'd off to the three slurry pumps using SS tubing.
Vendor install is as such:
* The flipper gripper fingers were changed out to an improved version.
Earl Dawson helped perform this task.
* The slurry pumps were run today using water instead of slurry.
They are all set up and ready to go.
* There is a problem with ALL the motor controllers at this stage.
This is a major gating item at this time. The system can not
initialize totally until this problem is resolved. Additional
help is being persued to excellerate this debug. Stay tuned!
* Mike Slepikas, using the manual control, function tested several
of the moving components. All seem fine at this time
* The remote terminal was tested and used today in beginning the debug
of the system. This terminal is a touch screen and is working as
it should be.
Doc
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Note 62.10 CMP.B1 10 of 292
SUBPAC::LANDRY 20 lines 9-AUG-1994 07:25
-< Startup Update as of 8/8/94 >-
--------------------------------------------------------------------------------
* The motor controllers are all working properly now. Five
controllers were fixed by rewiring performed at the controller
input. The remaining controllers were fixed by making proper
connection to ground.
* Began moving components around using the manual mode.
* The system is presently experiencing a problem with the conditioner
arm. The arm is not lifting out of it's rinse station.
* We are still running the original software used during the source
inspection (SPEED463). New, upgraded software will be installed
prior to running the system.
* Earl graciously drew out some cassettes from the stockroom. So we
have enough to start up with.
Doc
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Note 62.11 CMP.B1 11 of 292
SUBPAC::LANDRY 22 lines 10-AUG-1994 19:35
-< One thing after another, but we'll get there! >-
--------------------------------------------------------------------------------
* A CMP milestone: ALL glue has been removed safely from the polish
table. Many thanks to the Process Eng crew for their diligent work
to make this task a success.
* A problem exists with the flipper/gripper box. The unload flipper
is having problems finding home.
* Reps are having a hard time installing the new version software.
The system is coming up with an error concerning I/O ports. Seems
like an easy enough fix, but it's really turning into a nightmare.
* A DI water hose began leaking severely. Found the ferrules to be
the problem. It's been repaired.
* Problems redevelope around two of the motor controllers. Found the
wires in the connector to be the problem. Re-did the connectors,
all set.
* The conditioner arm still needs attention once the system software
is correctly configured/installed.
Doc
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Note 62.12 CMP.B1 12 of 292
SUBPAC::LANDRY 21 lines 11-AUG-1994 19:19
-< A glimmer of light is beginning to appear!!! >-
--------------------------------------------------------------------------------
After many hours of trouble shooting, the software has been
successfully loaded (SPEEDFAM477). The reason the system had problems
accepting the new version was attributed to noisy RF coming from
the general area around the system. The tape drive needed to be
down loaded on to diskettes and loaded through the A drive. Thanks
to Jim Martin for assisting the reps with this problem. His insight
with computers/software was a great benefit to the Speedfam Reps.
The flipper/gripper box was re-installed and re-calibrated. Seems to
be working fine. Will monitor.
The condition arm still has problems at this point. Rep's will now
be able to address the situation now that the software problem is
resolved. Stay Tuned!
All motor controllers are functional again.
Hopefully, the startup will begin to excellerate with a few of the
major problems out of the way. Only time will tell.
Doc
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Note 62.13 CMP.B1 13 of 292
SUBPAC::LANDRY 21 lines 12-AUG-1994 15:36
-< The light at the end of the tunnel is brightening >-
--------------------------------------------------------------------------------
A good/productive day!
* Software problems have been greatly reduced since the new software
has been installed
* Both unload cassette elevators have been calibrated
* Robot alignment has been completed
* The flipper box has been taken care of. Both flipper/grippers have
been calibrated and are working as should
* All but one of the door interlocks are working. One has a bent
shaft on the Bimba cylander. Matt will have one shipped in.
* Attempted to reduce the vibration caused from the robot vacuum pump.
There is some slight improvement, but the problem still exists.
* Still a long way to go, but things are beginning to shape up.
Doc
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Note 62.14 CMP.B1 14 of 292
SUBPAC::LANDRY 37 lines 16-AUG-1994 18:06
-< Progress Report >-
--------------------------------------------------------------------------------
Accomplishments over the last day or so are as such:
* First off........The infamous traveling crate has arrived. The
crates "trek" started in Chandler AZ, then ended up somehow on
a flight to Hong Kong (really!). From there it returned to the
states, hung out in customs for awhile, then showed up at the Fab 6
dock on Monday morning. All this in three weeks! The crate had
more stickers than Herbie the Love Bug!
* Changed out the Automation Frame door.
* All safety guards for electrical connections were installed.
* The "timeout" problem on the unload flipper to the paddle has
been resolved. One of the three sensors in the unload flipper
box was out of adjustment. Mechanically re-adjusted said flipper
is working with positive results.
* The "timeout" problem with the carriers at the load cups still
exists. The problem has been identified as a problem with carrier
# 4. It will be addressed further.
* Initial "run-out" was performed on the polish table. The reading
came out less than 1 mil tolerance. It will be re-performed again
for any and/or all CMP personnels viewing pleasure!!!
* Both unload cassettes were re-setup, due to the new software in-
stall and are working the nads.
* The calibration of the touch screen has been performed. The Input/
Output screen still has a problem with a couple of dead zones.
Software guru's in Chandler are researching the problem as I type!
* The Cleanroom compatible TCU arrived late this afternoon. It will
be de-crated and brought up stairs within the next couple of days.
Doc
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Note 62.15 CMP.B1 15 of 292
SUBPAC::LANDRY 28 lines 19-AUG-1994 16:07
-< another day closer! >-
--------------------------------------------------------------------------------
* Head #4 had a problem showing on the Infranor motor controller
indicating that their was an over-temp condition. After many
hours of trouble shooting, the problem was found to be a short
in the connector going to the motor controller. It has been
repaired.
* All 5 heads are now moving upon command from the computer. There
was an initial problem with heads 3 & 4 where there was no move-
ment. Again, many hours were spent trouble shooting the wiring /
connectors / and motor hardware. Head #4 was found to have
overdriven. This triggered the override circuit. The head had to
be physically moved by hand prior to any clearing of the override
sensor (not much fun doing this). Head #3 had the same situation
as well as a suspected poor connection at one of the connectors.
* Slurry is available but has not been turned on to the system.
* Both flipper/gripper boxes were worked on again. They were mechan-
ically adjusted and home positions were set through the software.
* The Neslab TCU plumbing has a problem. It requires a shutoff valve
for the drain resevoir. The system was hard plumbed without this
feature. The proper people have been notified and it will be
addressed.
Doc
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Note 62.16 CMP.B1 16 of 292
SUBPAC::LANDRY 32 lines 22-AUG-1994 19:44
-< two steps forward....one step back! >-
--------------------------------------------------------------------------------
A very productive day!
* There was a problem with a couple of the heads. Somehow, the
pneumatic over-rides for those particular heads were in the
activation mode. Returned them to their proper positions and
all seems fine.
* Had a problem with some heads not picking up wafers. Found the
vacuum pump off. A wire had come loose from the connector.
Reattached wire and all is fine.
* Aligned the heads to the load cups and set home position.
* Aligned the heads to the unload cups and set home position.
* Cycled 10 wafers from the load station through to the unload
elevators (without touched down on the polish table due to
no pad). All alignments are fine.
* Removed four wiring harnesses from the flex track. The wire
originally installed has proven to be a problem on the other
system in the semi-conductor field. The wire doesn't stand up
well to movement. It is being replaced now to avoid anticipated
problems in the future. Rewiring to begin in the morning. About
a couple of hundred wires will need to be run, cut to size, spliced,
and attached to the terminal blocks in the multihead. Oh Joy!!!!
Doc
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Note 62.17 CMP.B1 17 of 292
SUBPAC::LANDRY 18 lines 23-AUG-1994 20:24
-< What a day!!! I'm WIRED, so's the machine! >-
--------------------------------------------------------------------------------
Lots of work done today!
* All four cables needing replacement were changed out and hooked up.
* The TCU was swapped out today. Awaiting KSI to repair improper
PVC plumbing hookup as well as re-do one of the connection
configurations.
* Ran the interface wires from the main system to the chiller.
* Repaired broken wires/connectors to the system vacuum pump.
* Upon completion of the re-wiring, the system would not power up
properly. Slurry pumps #1 & #2 were traced to be the problem.
It's late and it's been a long day. We'll address this in the
morning.
Doc
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Note 62.18 CMP.B1 18 of 292
SUBPAC::LANDRY 33 lines 24-AUG-1994 21:07
-< Lost a day+ due to mis-labeling! >-
--------------------------------------------------------------------------------
Todays activities.......
* Fixed the slurry pumps problem. Found that the wires we ran the day
before to be done correct. The problem was that the female
connector for the four wire harnesses (which is mounted in the
system) was labeled wrong. Put the proper connector to the proper
spot and this problem cleared. UNFORTUNETLY......read on!
* Since the wire cables were in the wrong spots on power up, many
sensors saw a bit more current than they should have. Many sensors
will be replaced over the next couple of days. This will further
delay the scheduled mechanical acceptance date.
* Spent many hours trouble-shooting the system after the mishap.
* We did replace four sensors in the multihead for arms 1, 2, 3, & 4.
This took 6 hours to do by three people. Definetly not located in
a technician friendly spot. We had to actually remove the multihead
top cover and change these out from the top of the system. After
they were replaced, all arms needed the sensor and accompanying
inhibit switches adjusted. That BJ for your assistance with this
task. (The pedistals definetly got a workout with the two of us
on top of the machine!!!!)
* A piece of the the Index Table ring was damaged by one of the heads.
It has been repaired by welding the polypropylene piece back on. It
was originally damaged due to the wiring problem mis-communicating
with the sensors.
* More sensors are due in tomorrow from Speedfam.
Doc
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Note 62.19 CMP.B1 19 of 292
SUBPAC::BJUBINVILLE 10 lines 25-AUG-1994 17:26
-< Passdown for 8/24 >-
--------------------------------------------------------------------------------
Replaced the final round sensors that were found blown.
There was no vacuum on arm #4. We traced it to a blown
fuse on the sensor.
The slurry is on and flowing. We had to leave the fab
due to a gas detector alarm. Mike is going in when the
all clear is given and is going to do some more work.
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Note 62.20 CMP.B1 20 of 292
SUBPAC::LANDRY 22 lines 26-AUG-1994 15:53
-< We're getting closer!!!!! >-
--------------------------------------------------------------------------------
* All sensors have been checked for proper functionality....all set.
* The load station vacuum pump has been turned off (due to excessive
vibration causing wafers to wander in the cassettes). BJ and I
took the side panel off the system. We then used a "Greenlee" to
punch an access hole in it. BJ then ran a vacuum hookup to the
house vacuum system.
* The systems "Wet Mode" was tried today. It is functional and the
system has been left in that mode for the weekend.
* We began hooking up the chiller to the main system. Found a leak
in one of the lines. It was substantial. Found the o-ring to be
missing. Procured an o-ring and the leak is fixed. It appears now
that we have no process cooling water coming to the system. All
valves in the room have been checked and are ALL open. I'll notify
Dave Atkinson to have valves in the sub-fab checked.
Doc
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Note 62.21 CMP.B1 21 of 292
SUBPAC::LANDRY 31 lines 29-AUG-1994 19:46
-< Monday, Monday, Moanday >-
--------------------------------------------------------------------------------
* All five heads had their respective "wafer sense" sensors adjusted
today. They have all been set at 17" of mercury as the acknowledged
setting. Once the sensors are made, the system allows for 3" of
mercury drop until the sensor reaches the low limit of 14".
* The scrubber section had a problem with the bottom position not
sensing when it should. All the I/O's checked out find but the
computer didn't recognize it. While trouble shooting the problem,
it cleared up somehow. The sensor may be on the "edge" of passing
or failing. We'll monitor it.
* The chiller hookup is in adequate at this time. The problem is two
fold. 1) There is still no PCW coming into the room. 2) The line
that supplies the coolant to the main system needs to be regulated
to 10 PSI. There is currently NO regulator and or pressure gauge on
this line. Stay tuned!
* The system began cyclying wafers this afternoon. All was working
well until the scrubber began to get a "timeout error" (see above).
Also, a wafer come loose from one of the polishing heads. It's
unclear at this time why this happened. Will monitor future runs.
When this happened, the system was only using one head down on the
table at a time. Nothing was damaged.
* We need to find a "10X Magnifying Glass" or equivalent to use now
that wafers are being run on the system.
* Yet another couple of interlocks were tried today (unplanned of
course!!!).
Doc
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Note 62.22 CMP.B1 22 of 292
ASDG::POIRIER 4 lines 31-AUG-1994 23:26
-< Speedfam 1000 wafer run >-
--------------------------------------------------------------------------------
* The speedfam reps ran into a few minor problems and thus decided
to postpone the 1000 wafer run until tomorrow. They will be here
at 7:00 a.m..
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Note 62.23 CMP.B1 23 of 292
SUBPAC::LANDRY 37 lines 6-SEP-1994 18:48
-< next wave of reps are here! >-
--------------------------------------------------------------------------------
* The TCU was fired up today:
- The PCW pressure is capable of attaining at least 80 PSI.
_ The TCU had a flow valve restriction on the incoming valve to
the system. It required a manual reset to clear the fault.
- The TCU also had a problem with the internal cooling fan. This
also required a manual reset to clear. This reset was necessary
due to an excessive pressure problem. This may have happened
possibly as long as two weeks ago when the initial PCW pressure
first started.
- The main system/TCU interface is being tested out for proper
communication/functionality. All appears fine but will continue
to monitor.
- Two new reps in here this week (Craig Howard, software & Tom
Crosby, electro/mechanical). Both attended site protocol/safety
training.
- Craig began looking into the software issues in the short time
available.
* Carriers:
- I received a message from Mike Slepikas this afternoon. He
informed me that the carriers that were shipped out last Thurs.
have arrived at Speedfam. The down side was that they were
damaged. He reported that they were shipped in poor condition.
Many pins were bent and some carriers were shipped face to face
with no protective coatings in-place. He says it will take some
additional time to fix these, possibly delaying their return.
Doc
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Note 62.24 CMP.B1 24 of 292
SUBPAC::LANDRY 66 lines 7-SEP-1994 18:59
-< Software changes will make the Hardware run good! >-
--------------------------------------------------------------------------------
Todays activities were........
* Software: Extensive work was done
- In a "carrier up" segment, the pressure alarm limit was changed
to look for an excess of 100 lbs. as opposed to the previous
setting of 50 lbs.
- Elevator #2 was experiencing an intermittent alarm saying that
track 2 was blocked when it wasn't. The sensor was fine. The
problem was discovered to be within the software. It has been
fixed.
- The acceleration/deceleration of the polish table was changed by
a factor of 10.
- The prealigner was getting timeout errors. The timeout value
was changed to 15 seconds. Previous setting was 8.
- A check was added for the robot sensing the wafer before going
to the prealigner. This was added as an equipment safety
feature in case of vacuum failure.
- Match mode bugs were fixed. Let me explain match mode to you!
Match mode is used to keep track of the wafers from the load
cassettes right on through until they end up in the unload
cassettes. By the means of using the wafer mapper on the
system, the system knows what slots contain wafers and what
slots don't. This feature, combined with the match mode, will
put the wafer into the unload cassette in the exact orientation
as they came out of the load cassettes. For example, if the
mapper detected say 22 wafers, with slots 3, 8, and 19 empty,
the unload cassette would end up with slots 3, 8, and 19 empty.
Basically, it's a nice feature for experiments/individual wafer
tracking.
* Speedfam Fed-X shipment:
- The parts from Speedfam for the vacuum cabinet upgrade arrived
this morning. Prep work is underway to perform the task.
- Still waiting on one more part (being shipped directly from the
Furon Company) to arrive. It's a valve needed to perform the
upgrade.
* TCU (temperature control unit):
- Now that the CMP-V is controlling the Neslab TCU performance,
including set points, I noticed that the Neslab will not con-
trol temperature properly WHEN THE CMP-V SYSTEM IS OFF. This
is a non-issue but one that should be communicated. When the
main system is turned off, the Neslab does NOT receive a set
point and assumes you want to hit 0 degrees. There are several
ways to get around this condition. They are:
a) Turn the interface switch to manual and dial in a set
point on the front of the TCU.
b) Simply power down the chiller while the main system
is off.
c) Do nothing and let the cooling solution temperature
change. The only draw back to this is that your fluid
temperature will require time to recover to an opera-
ting temperature thats acceptable.
Doc
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Note 62.25 CMP.B1 25 of 292
SUBPAC::LANDRY 26 lines 9-SEP-1994 17:08
-< befuddled!!!! >-
--------------------------------------------------------------------------------
Friday activity:
* Craig Howard continued to work on the software. The software is
nearing completion.
* Craig attempted to backup the software but ran into two seperate
stoppers. The first one was due to someone bumping the EMO, hence
killing power to the computer. The other was caused by a "dip" in
the incoming power to CMP, which again killed power to the computer.
We'll attempt this again Monday. It takes about two hours to per-
form this task.
* Tom Crosby has made good progress with the vacuum up-grade to the
carriers. The tank has been modified, tubing has been layed out
(in some cases it's in place), and all necessary fittings have been
procured. He was waiting on the valve from Furon to arrive to com-
plete the job. Said valve has arrived and the balance of the
upgrade will be completed Monday.
* The system is close to running the 1000 wafer mechanical acceptance
run. There is one major holdup left. Speedfam management will not
allow the run to take place until the new carriers are available.
They should be available soon, but I do not have the due date at
this time.
Doc
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Note 62.26 CMP.B1 26 of 292
SUBPAC::LANDRY 26 lines 12-SEP-1994 17:38
-< Mondays activities >-
--------------------------------------------------------------------------------
Todays activities........
* Vacuum Upgrade:
1) The vacuum hose was changed out today to 1/2" diameter. The
original size was 3/8". Sounds like an easy task, but guess
again. The line had to be snaked through the flex track and
the multihead, not to mention the path under the index table.
2) The new valve has not been installed yet. The area it needs
to go into is pretty crowded. We'll make it fit though. Stay
tuned!
3) All wiring harness that were removed (due to them being in the
way of the hose installation) have been re-installed.
* Software:
1) Continues to be a problem with backing up the system. Last
week's problems were due to power glitches. The backup tape
was reformated and tried again. It proved unsuccessful.
Craig Howard will bring in a new tape tomorrow and retry to
backup the system. He may also need to reboot the software.
The power glitches may have corrupted a few files.
Doc
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Note 62.27 CMP.B1 27 of 292
SUBPAC::LANDRY 29 lines 13-SEP-1994 19:30
-< Tuesdays activities........... >-
--------------------------------------------------------------------------------
Tuesday's activities.......
Vacuum Upgrade:
- The new valve was installed.
- The check valve on the vacuum tank was removed and cleaned.
This was necessary due the tank being drilled into. Shavings
of PVC cement got into the valve, causing a reduction of
vacuum.
- Re-installed valve and tested the vacuum system for proper
functionality. Alls well.
Software:
- The systems still needs to be backed up.
Cycling:
- Began cycling the system now that the vacuum upgrade is
complete.
- Confirmed proper use of match mode.
- All hardware functions are beginning to move.
Doc
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Note 62.28 CMP.B1 28 of 292
SUBPAC::LANDRY 31 lines 15-SEP-1994 21:03
-< Polishers do it on a padded table! >-
--------------------------------------------------------------------------------
Thursday's activities..............
TCU: Came in this morning and found the Neslab powered off. The
"power on" switch was in the on position but the electrical
breakers was NOT tripped. After some quality CMP team work
trouble shooting was performed, traced the problem back to a
hidden switch that was in the wrong position. Corrected said
switch and presto.........power was back on.
Pressure switches: All facility pressure switches were verified for
proper functionality. Facilities consisted on N2, CDA, DI, and
vacuum. Done deal!
Polishing: Yes, polishing was tried late this afternoon! Ten wafers
(Oxided) were run performing single head polishing. Two wafers
were done on each head (one at a time). They were then scrubbed
and dried on the OnTrak. Larry C. to measure them in the AM.
Stay tuned for these potential milestone process results.
Carriers/Pressure Plates: After the ten wafer polish run, Mike
Slepikas and your truely changed out the pressure plates on the
five carriers used. The pressure plates had come in from
Speedfam today. Pre-teardown and post-buildup measurements
were taken on each carrier and the information is logged in
the newly started Speedfam log book. A good experience! They
are pretty easy to change out as they arrived with new film on
each plate.
Doc
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Note 62.29 CMP.B1 29 of 292
SUBPAC::LANDRY 42 lines 19-SEP-1994 18:46
-< Monday.....Monday >-
--------------------------------------------------------------------------------
* Began the day cycling wafers (with the carriers up at the polish
table). The systems was running smooth.
* Began experiencing some minor problems. Seems to be a few bugs
still in the software.
* Tried verifying flow rates for the slurry. Both Pump 1 & 2 had
insufficient flow. Pump 1 was really bad. Traced problem to be
a couple of kinked lines in the flex track. The hoses seemed to
bunch up for some reason. The problem has been fixed, but we'll
definetly have to keep an eye of this. The flex track has given
us multiple problems, starting at the source inspection. At the
source insp., an air hose was pinched causing a spindle to react
slowly to commands.
* The vacuum tank had a problem. We were getting periodic "low
vacuum" alarms. Seems the tank was extremely full of water. It
needed to have the "blow out" performed several times to deplete
the excessive water containment.
NOTE: The tank is designed much like the Strasbaugh vacuum tank.
It's has a interior wall with a valve in it. When the
water needs to be drained, the internal valve closes, the
bottom half is opened up to drain (assisted by the intro-
duction of CDA to blow out the water), while the top half
retains vacuum for continuous operation of the system.
* Softwater flow is insufficient at this time. We're getting about
25 - 30 PSI to the system. Looks like this will need to be jacked
up some.
* a log book is next to the system to record system activities and/or
malfunctions as we begin to cycle more and more wafers. Please feel
free to use it if necessary.
* Larry C is scheduled to polish some wafers tomorrow morning (about
10 or so). This will be the second attempt at actual polishing.
Not sure how reliable the initial attempt is due to the unknown
flow rate of the slurry (was it a problem or not).
Doc
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Note 62.30 CMP.B1 30 of 292
SUBPAC::LANDRY 25 lines 20-SEP-1994 19:37
-< interesting day to say the least >-
--------------------------------------------------------------------------------
Todays events.............
* Attempted to run 12 wafers (actual polish), 10 survived....2 didn't.
One wafer came loose from the carrier taking the second wafer along
with it. The root cause is believed to be the carrier. The new
carriers will help in reducing this situation, so say'ith the rep!
By the way, I don't have the data from the surviving 10 wafers.
* There is presently a low flow of softwater going to the system. We
broke into the PVC plumbing/regulator/flow meter this morning. Low
and behold, a multitude of PVC shavings. Cleaned affected area's,
flowed waterthrough the plumbing for 20 - 30 minutes, re-assembled
the regulator/flow meter and pressure improved.......temporarily.
It's quite possible some of the shavings had already made their way
into the internal system regulators/tubing. The flow is fine for
time being, but we'll have to address improving it in the near
future. We'll have to break into the internal plumbing.
* The flipper/gripper box was modified this evening. The mod was to
lengthen the flex/sealtight hosing. The original hosing caused a
lot of stress on the wires running through it. This, coupled with
the 180 degree swing in position, was only going to cause inter-
mittant problems in the near future.
Doc
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Note 62.31 CMP.B1 31 of 292
SUBPAC::LANDRY 38 lines 21-SEP-1994 17:59
-< Wednesdays activities........not so smooth! >-
--------------------------------------------------------------------------------
Another day........another problem....or 2
* Began the day with the usual system wipe down/clean.
* Proceeded to cycle wafers with the heads up. All was well to the
system came up with an error {All Cups are NOT Down}. The monitor
said to fix the problem and hit any key to continue. Well, all cups
were down, so we (Jim S and myself) hit any key and away went the
system to cycle more wafers. About 25 wafers or so along, the
problem re-occurred. The cups were again down. So, I stopped the
system and checked out the I/O's for the cup positions. Low and
behold, cup # 2's sensor was not being made. So, the sensor was
adjusted and tested. All is well with this problem.
* As we were in the process of fixing the sensor, the cup to the right
of cup # 2 (this one has no number as it is a stationary cup) was
found to be free twisting. This needs to be locked into a safe
position when the index table rotates. Found the dowel pin to be
recessed into the wall, thus not locking the cup in place. Moved
the dowel to it's proper position and tested. All is well with
this problem.
* The reps made a modification to the scrubber assembly. It is an air
driven mechanism that would bang when each limit was made. They
installed springs to help alleviate the banging situation. They
then re-setup the sensors and tested several strokes. All seemed
fine. Again, wafers were cycled. Ten wafers or so into running,
the scrubber started acting up. Timeout errors were happening,
the travel rate wasn't consistant and sensors were sporatically
working/not working. As I type, the scrubber is being torn down
to investigate what exactly is happening. See tomorrows news reel
for the out-come.
* Mike S. rebuilt one of the carriers with Jim S. this afternoon. It
will be tested out when the scrubber situation clears.
Doc
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Note 62.32 CMP.B1 32 of 292
SUBPAC::LANDRY 32 lines 26-SEP-1994 18:04
-< Monumental day.......the Gyro's are here! >-
--------------------------------------------------------------------------------
Today......
TCU: Bobby Gee fixed the last remaining leak on the Neslab.
Carriers: The new "Gyro" carriers arrived today. Upon unpacking, it
was noticed that two carriers were damaged. Both had one pin that
was sheared off. It was obvious that the currier didn't handle
them gently at all. There was a hole in the side of one of the
boxes (pretty much the same size as a pin which sheared off...hmmm)
So, Speedfam will rush out a couple of replacement pins. Should be
here tomorrow. Four of the five new Gyro's are presently on the
machine. The fifth will be installed upon replacing the broken
pins.
Vacuum Tank: At startup this morning, there was no vacuum going out
to supply the heads. There was vacuum at the tank in idle mode,
but it went to atmosphere when it performed it's "dump" of the
tank. Dump? Whats that you say? Well, a dump is a normal occur-
ance of the system during elevator servicing or system initializa-
tion. The internal vacuum tank valve closes off the bottom half
from the top half. The top half retains vacuum while the bottom
half opens to drain the water accumulated in the tank. Upon the
completion of the dump, the valve opens back up and the entire tank
again acts as a vacuum resevoir. Well, upon completion, the tank
never recovered it's proper vacuum pressure. Found the problem to
be PVC shavings in the check valve located at the bottom of the
tank. Removed the check valve, cleaned out all the shavings and
voila, 25 inches of mercury (good vacuum pressure to others).
Cycling: Countinued to cycle various configurations of wafers.
Doc
|
| 17.3 | COMPUTER ERROR | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:05 | 20 |
| SUBPAC::LANDRY 17 lines 6-DEC-1994 09:33
-< Help me.....I'm drying! >-
--------------------------------------------------------------------------------
This morning,
I walked in to discover that the system was not in it's proper
state, which is "wet mode" of course. So, I turned on the screen to
observe what state it was in........low and behold, it was in a state
of "computer dump"! Tried to reboot the system and it came up with a
"low vacuum" error. This is somewhat normal as the vacuum tank needs
to perform a water dump. So, I gave it ample time to dump but the
error didn't go away. It was discovered that the vacuum pump breaker
had tripped. Reset the breaker and then rebooted the computer. Alas,
the vacuum pump/tank performed as should. The system was then
re-initialized and returned to wet mode, where it is properly wetting!
The pump functionality will need to be watched for awhile as it is
unclear as to how this problem originated (was it the computer?....was
it the pump?)
Doc
|
| 17.4 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:05 | 27 |
| SUBPAC::LANDRY 24 lines 13-DEC-1994 18:46
-< Upgrades performed today >-
--------------------------------------------------------------------------------
Tom Crosby, Speedfam rep extrodinaire, arrived to day to begin some
modifications to the system. Heres whats been accomplished:
* A new slurry drip ring was installed at the bottom of the polishing
table. This mod will re-route the slurry/DI waste to drain directly
into the tub as opposed to draining into the small drain lines
originally designatedas the path. These lines are feared to be too
small in diameter, with potential clogging of slurry to happen.
* The main vacuum pump had a safety feature installed. The mod is a
cover over the exposed wiring going to the 240VAC connection.
* Safety covers were installed over all the exposed muffin fans in
the system.
* The "park" station for the conditioner arm had a cascade pipe
installed. This will allow the conditioner wheel to be submerged
in water when in an idle condition.
Tomorrows goal is to install the new inverter into the system. Other
minor projects may also happen depending on time restraints.
Doc
|
| 17.5 | VACUUM BREAKER TRIPPED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:06 | 9 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 6 lines 12-DEC-1994 08:29
-< 3rd shift passover >-
--------------------------------------------------------------------------------
The main vacuum pump circuit breaker tripped when
I was taking the left and right receive elevators off
line to dump the DI. I had to reset the breaker and
power the machine back up.
BJ
|
| 17.6 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:06 | 27 |
| SUBPAC::LANDRY 24 lines 13-DEC-1994 18:46
-< Upgrades performed today >-
--------------------------------------------------------------------------------
Tom Crosby, Speedfam rep extrodinaire, arrived to day to begin some
modifications to the system. Heres whats been accomplished:
* A new slurry drip ring was installed at the bottom of the polishing
table. This mod will re-route the slurry/DI waste to drain directly
into the tub as opposed to draining into the small drain lines
originally designatedas the path. These lines are feared to be too
small in diameter, with potential clogging of slurry to happen.
* The main vacuum pump had a safety feature installed. The mod is a
cover over the exposed wiring going to the 240VAC connection.
* Safety covers were installed over all the exposed muffin fans in
the system.
* The "park" station for the conditioner arm had a cascade pipe
installed. This will allow the conditioner wheel to be submerged
in water when in an idle condition.
Tomorrows goal is to install the new inverter into the system. Other
minor projects may also happen depending on time restraints.
Doc
|
| 17.7 | COMMUNICATION PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:07 | 20 |
| SUBPAC::LANDRY 17 lines 14-DEC-1994 21:10
-< communicate.......will ya! >-
--------------------------------------------------------------------------------
Todays activities:
* The new Furon valve for the carrier/spindle vacuum was installed
along with it's accompanying bracket.
* The new inverter was installed today. At the present time, it is
having difficulty communicating properly with the computer. Much
information was exchanged between Tom Crosby and Speedfam home base.
Still unable to change some parameters. A recovery plan will be
determined tomorrow amongst the powers that be. The system has been
lockedout / taggedout for the evening. The hand sprayer has been
"fudged" to spray water into the index table to allow the films to
remain wet.
Doc
|
| 17.8 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:07 | 11 |
| -< no progress on the inverter issue >-
--------------------------------------------------------------------------------
No work was performed today concerning the inverter problem. A
decision was made to wait for the software guru who will be here
on Monday (12/19).
I removed the carrier from the system. The pressure plates were
dismantled and an SBA has been generated to send them back to Speedfam
to be re-filmed.
Doc
|
| 17.9 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:07 | 38 |
| SUBPAC::LANDRY 35 lines 19-DEC-1994 18:14
-< Inverter, software and teamwork! What a trio! >-
--------------------------------------------------------------------------------
This morning, Craig Howard arrived to begin software changes to the
system, as well as a couple of other items. Her's whats transpired:
* The new version of software Craig arrived with was installed. We
couldn't verify it's performance until the inverter problem was
fixed.
* The inverter problem has been solved. After verifying that the
hardware was indeed installed properly, the software was checked
out. A problem was found within the "config.sys" file. The error
was fixed, alas, the inverter began to communicate properly. We
then initialized the system and manually ran the table. All is
well with this issue!
* Next, we tried to make a run (with all heads remaining up at the
polish table). It didn't go so well. The system ran was performing
well until the carriers picked up ,the wafers from the load cups.
Low and behold....Low Vacuum Alarm. We found the wafers to NOT be
loaded properly inside the carrier ring. Traced the problem back
to be the Index Table not at home position. Not sure why this was.
It could have been from the new software parameters installed or
possibly because the sensor bracket was a tad loose. Anyway, we
secured the bracket and performed the Index Table calibration.
All seems fine at this time.
* We ended the day there and will attempt to run the system in the
morning.
* Talked with Mike Slepikas just a few minutes ago. He will talk
with the Speedfam Films group (led by the incomparable Mark
Aubuchont) to try and arrainge for more pressure plates to arrive
here before the first week on January. We will definetly need a
back up set of plates for the only set we currently have in-house.
Doc
|
| 17.10 | PEDISTAL BENT, SOFTWARE PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:08 | 24 |
| SUBPAC::LANDRY 21 lines 20-DEC-1994 17:18
-< Todays activities >-
--------------------------------------------------------------------------------
Today's activities:
* Craig attempted to run the system (with his newly installed
software) but had some problem with one of the load cups, cup 5.
We found the cylinder that raises the cup to be bent, causing the
cup to have problems. We were able to get a spare cylinder from
stock but we were unable to come up with the necessary extender
piece that was also mangled. Speedfam was notified and that piece
will be here prior to our need to run said cup. It will probably
be hand carried by Mike Slepikas who will be here 1/4/95. Presently
the system is running with head 5 disabled. No problem due to Craig
will be spending the balance of this week on software
changes/upgrades.
* Some software upgrades have been checked out. Still a couple of
bugs but also some favorable results. One such pleasant result was
the ability of programming in multiple recipes per lot run, instead
of stopping processing between cycle to change the recipes. Other
mile stones will be published as they come along.
Doc
|
| 17.11 | SOFTWARE AND RPM CHECK | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:09 | 17 |
| SUBPAC::LANDRY 14 lines 21-DEC-1994 17:10
-< Coming along quite nicely >-
--------------------------------------------------------------------------------
* The software was given a test trial today. At this time, all looks
good as far a strictly cycling goes. The heads were run UP with no
contact being made to the polish table.
* The table rotation was strobed today. A setting of 29 RPM was pro-
grammed in. The tach readout (handheld tach, external of system)
was 28.9, can't get much more precise than that.
* Head five is still in the "disabled" mode until a part we're waiting
on arrives.
* More indepth runs to be performed tomorrow.
Doc
|
| 17.12 | DOWNFORCE CHECKED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:10 | 40 |
| SUBPAC::LANDRY 37 lines 4-JAN-1995 19:28
-< Very good day...lots accomplished! >-
--------------------------------------------------------------------------------
A very productive day on the system!
* The new load cell calibration fixture was tested out today. It
works real good. We then proceeded to calibrate all five heads
at a down pressure of 300 lbs. Most heads were fairly close and
needed only to be tweaked in.
* Cup 5's cylinder (which was installed last week but was awaiting
it's lifting pedestal to arrive) was finally fixed totally. The
sensor gap for cup at home was re-set-up as well. Works the nads.
This also gave us the opportunity to check out the new cup align-
ment tool. It appearance is similar to a carrier, except for it's
diameter and color. Works good.
* The new cascade drain set up for the carrier park station was semi-
fixed today. It will need to be fit with the proper size o-ring to
work at optimum performance.
* The conditioner wheel was removed and checked out. A decision will
be made on keeping it or replacing it tomorrow. A new wheel is in-
house if needed.
* Carriers were rebuilt today. Larry C and the reps worked this
issue. New ring gapping is being checked out for best performance
of the wafer as well as the hardware. Stay tuned.
* A couple of negatives happened today. Nothing serious though:
- One of the polypropylene flaps that keep's slurry/water away
from the multihead drive mechanism's was damaged. I will
attempt to reweld it in the morning.
- Somehow, unbeknowst to everyone, the film on carrier five got
gouged. The carrier has been dis-abled for now and four head
cycling is underway. Carrier five will be addressed in the AM.
Doc
|
| 17.13 | UNIFORMITY, CONDITIONER | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:10 | 26 |
| SUBPAC::LANDRY 23 lines 6-JAN-1995 16:27
-< Still needs to improve, but it's getting better >-
--------------------------------------------------------------------------------
Todays activities consisted of the following:
* Larry C, Earl D, and the reps ran some wafers . Head to head
uniformity comparisons will be made. Data presently being
compiled. Wafers that were run the prior evening showed a
range of 4 - 10. This needs to be improved, shooting to
eventually get down below the 3 range.
* The diamond conditioning wheel was replaced with a new one.
* The conditioner wheel park station cascade tube was fitted with
an o-ring to prevent water leakage. Functionality to be verified
tomorrow.
* Earl D rebuilt five carriers today. All went well.
* I gathered up all the items needing to be returned to Speedfam.
There are 11 pressure plates going back to be re-filmed, 5 carriers
that are of the obsolete style being returned, a diamond condition-
ing wheel, and the old inverter that was removed last month. An
SBA will be generated next week to ship these out.
Doc
|
| 17.14 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:11 | 13 |
| SUBPAC::LANDRY 10 lines 9-JAN-1995 16:50
-< Door locking mechanism adjusted >-
--------------------------------------------------------------------------------
The unload door locking mechanism alignment was out. There wasn't
much adjustment space to use, in fact so little that I could not get it
to align sufficiently. Had to remove the metal guide that is attached
to the door and open up the holes used to attach the guide to the door.
This enabled the guide to have just enough adjustment to get the lock/
guide to line up sufficiently.
Doc
|
| 17.15 | VACUUM PUMP CHECK VALVE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:11 | 12 |
| SUBPAC::LANDRY 9 lines 10-JAN-1995 17:51
-< Check that valve! >-
--------------------------------------------------------------------------------
This afternoon.........the system failed several times for a low vacuum
error. After searching for an hour or so, the problem was finally
traced to be a defective (or sticking) check valve. The valve showed
signs of slurry in it (hell, thats what the valves there for!). Tried
rebuilding the valve with skeptical results. Therefore, the check
valve was changed out and normal vacuum pressures were exhibited.
Special kudo's to Larry C for his part in the deal!
Doc
|
| 17.16 | SCRUBBER BELT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:11 | 26 |
| SUBPAC::LANDRY 23 lines 23-JAN-1995 14:55
-< Warning, warning.......we got a belt problem! >-
--------------------------------------------------------------------------------
The Speedfams scrubber currently is being run under a warning
status. The bottom set of brushes on the scrubber are not rotating.
This past Saturday, the problem was investigated. It showed that
one of the spliced endings on the drive belt has broken, causing the
belt to slip off of the gears. With no way of repairing the belt
properly, the belt was put back on the gears and the tension adjusted
to try and help hold it on to the gears better. It ran that way four
at least four hours. Upon arriving Monday morning, it was noted that
the brushes were not turning again. The top belt is still working as
should, rotating the brushes most important as they are the ones that
make contact with the device side of the wafer. Regardless of the
Speedfam scrubber status, the wafers ARE ALWAYS run on the OnTrak
scrubbers after polishing.
Speedfam has been contacted and they will ship out two belts, one
to install and one as a spare. Speedfam is also in the process of try-
ing to come up with a different belt that will last longer than what
we're seeing now.
Speedfam will also be sending a check valve for the vacuum system.
This was replaced once already by Larry C and your truely.
Doc
|
| 17.17 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:12 | 13 |
| SUBPAC::LANDRY 10 lines 26-JAN-1995 17:02
-< Good things are starting to happen here!!! >-
--------------------------------------------------------------------------------
Manufacturing ran several lots today. The belt for the scrubber
section has yet to arrive. Jim T to have dialog with rep concerning
status. System still being run with a warning status.
Ops techs currently changing the polishing pad and carrier films as I
type. Film life is proving to last much longer on this system than
what is used on the Strasbaughs! An SBA will be generated to ship
out the next set of pressure plates for re-filming.
Doc
|
| 17.18 | COMMUNICATION PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:12 | 25 |
| SUBPAC::LANDRY 22 lines 8-FEB-1995 16:43
-< What happened? wheres the communication? >-
--------------------------------------------------------------------------------
Not a pleasant day......
The day started with the unload flipper mis handling a wafer. It
didn't crunch it or anything, but it did require EMO'ing the system.
No big deal. Retrieved the wafer and re-powered the system. Nice
try, but the vacuum pump needed to be reset. Power down, open the
safety interlocked door, reset the breaker and rebooted. All looked
good. Unload some wafers to check the flipper, it looked real good.
Then, went to load some more wafers, lo and behold, the pre-aligner
isn't responding to it's commands. Rebooted, same thing. Tried a
third time, same thing. Powered down and started checking out the
communication, electronics, power supply, boards, cables, connectors,
you name it...it was checked. The only problem seemed to be in the
communication to drive II board. No LED's lit up. Power was there
though. What there to lose....rebooted the old software and the pre-
aligner was back in motion. Went back and forth with the software
versions to confirm that it was the problem. The problem stayed with
one software set and cleared with the other set very consistantly.
I am currently having dialog with the reps and hope to have a recovery
plan soon.
Doc
|
| 17.19 | SCRATCHES | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:13 | 12 |
| SUBPAC::LANDRY 9 lines 13-FEB-1995 17:07
-< You scratch my back, I'll scratch your wafer! >-
--------------------------------------------------------------------------------
The system is currently going through a polishing pad change and
carrier swap out. The system was scratching wafers. Larry C and
Jim S working the issue.
The system vacuum pump breaker needed resetting a couple of times
today. It was definetly overworked as it took a while for the
over-temp protector to reset prior to restarting.
Doc
|
| 17.20 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:13 | 19 |
| SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 16 lines 20-FEB-1995 06:58
-< SLURRY SYSTEM SHUT DOWN, FILTER INSTALLED >-
--------------------------------------------------------------------------------
An in-line slurry filter has been installed and all
stainless steel fittings in the slurry section of the
machine have been replaced. A 5 micron filter was installed
for now. Finished things up around 5am.
Around 6:30am, there was no slurry flow on any of the
polishers. The slurry alarm did NOT come on. Ashland is
on their way in now. A1 was logged to BGN_EXTERNAL. Checked
system to see if the upgrade caused the trip but no leaks were
found.
BJ
|
| 17.21 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:13 | 23 |
| SUBPAC::LANDRY 20 lines 20-FEB-1995 16:32
-< Software / Hardware problems >-
--------------------------------------------------------------------------------
A couple of problems today................................
* The wrong software was booted up by accident. This software (486)
is capable of running the system but should only be used as an
emergency backup. Reloaded the latest version (487) and tested.
Heres where the next problem occurred.
* The Hardware addresses were mixed up. Re-addresses the proper line
items and tested. Heres where problem 3 occurred.
* The load flipper was overtraveling at the pre-aligner station,
causing the wafers to miss-load. Actually, they weren't loading at
all. The grippers were not grasping the wafers properly, leaving
them on the pre-aligner pedistal. Re-calibrated the flipper to
aligner position. Tested and all was fine.
* Ops/Process personnel changed out the pad & carriers as well!
Doc
|
| 17.22 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:14 | 47 |
| SUBPAC::LANDRY 44 lines 24-FEB-1995 15:24
-< Load Flipper isn't homing >-
--------------------------------------------------------------------------------
The system is currently down for a "load flipper homing" problem.
It all started with a wafer mis-unloading to the scrubber (yes, this is
the unload flipper side). It appeared it was going to be broken, so
the EMO was hit to prevent such a scene. Got the wafer out of harms
way and rebooted the system. Multiple problems appeared.
* The vacuum pump breaker kicked off a couple of times. Found water
(with some slurry content) had made it's way back to the pump dia-
phrams. This caused reductions in filter pores, causing the pump
to work like hell. Eventually mpopping the breaker. Tore down the
pump's filter assembly's, cleaned the filter material (thanks
Larry) and diaphrams as well as the housing, and rebuilt the
assembly's. Pump, performance was greatly improved. This will now
become a normal check.
The only way water can make it's way back to the pump is if the
drain time is too short or if the drain/blowout it's happening.
Will be investigated as time allows.
* The system then had trouble homing the load flipper and the
scrubber. Wiped off the sensor for the scrubber and that is now
working properly.
* The system still is experiencing a flipper home problem. I've
checked the wiring / connectors, which appear fine. The digital
input isn't responding or receiving a signal, which means the
sensor isn't working. The sensor isn't located in a technician
friendly spot. It'll require the removal of the flipper box
assembly. If someone gets to it, be careful not to touch the
adjusting screws as this is a critical area upon re-assembly.
If messed with, we're in for a bunch of hardware / software
adjustments.
* PLEASE NOTE: The carriers have been removed from the spindles
and have been placed in the load/unload cups of the index table.
DO NOT MOVE THE MULTIHEAD without first removing these carriers,
as major damage WILL happen. The carrier films need to stay in
there if possible to stay wet. If removed, make sure you keep
them in a wet situation. WET MODE is unavailable due to the load
flipper homing problem prohibits automatic modes. MANUAL movement
can still take place though.
Good Luck.............Doc
|
| 17.23 | FLIPPER BOX PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:14 | 21 |
| SUBPAC::LANDRY 18 lines 25-FEB-1995 12:15
-< The User Friendly Flipper Box has been yanked! >-
--------------------------------------------------------------------------------
The Flipper Box has been removed from the system. Unfortunetly, this
had to come out as all the easy fix possibilities had dwindled down to
nil. Thank the Lord that I had a couple of other people in CMP when
this removal took place. Definetly an ergonomical hardship. The unit
weighs in excess of 40 pounds and is burrowed in a cavity several feet
inside the panels. Thanks to Jim S and Eric B for there participaion
in this endeavor.
The positional sensor amplifier for the load flipper appears to be the
problem. The proper 24 VDC is coming from the connector with it's next
junction the amplifier (could be a broken wire too). The amplifier
isn't doin' it's communication with the sensor. By the way, the sensor
is fine. Tried it on the unload flipper amplifier, checks out good.
The system is currently locked out/tagged out. The carriers have been
left in the index table so that the films may still remain wet.
Can't wait for Monday! %^)> Doc
|
| 17.24 | | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:14 | 18 |
| SUBPAC::LANDRY 15 lines 27-FEB-1995 16:21
-< Flipped out......then re-installed! >-
--------------------------------------------------------------------------------
The system is back to manufacturing........
The Load Flipper's sensor amplifier was found to be biscuits.
The amplifier was replaced, the new one tweaked in, and the flipper
positions were retaught. Thanks go out to Brian to get the flipper
box amplifier installed dispite the swamping of work he had Sunday
evening.
Upon attempting to run wafers, the slurry wasn't flowing. The nozzles
had become clogged from the system going down on Friday. Unable to
put the system in wet mode over the weekend due to the sensor problem
prohibiting this from happening. Jim S cleaned up the nozzles and
the system was off and running. Good Job Jim!
Doc / BJ / Jim T
|
| 17.25 | WATER LEAK | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:16 | 30 |
| SUBPAC::LANDRY 27 lines 9-MAR-1995 17:55
-< Lets hope this won't be a standard Weekly! >-
--------------------------------------------------------------------------------
Some interesting happenings while doing the Weekly PM today!
* Did the minor wiping, cleaning, etc.
* Went to check the numerous pressure gauges in the pneumatics
cabinet, Whoa! I do detect liquid. The vacuum pump was sucking
the water right out of the vacuum resevoir tank and blowing it
out it's (be nice) orifice vent. Well, we powered down the system
and yanked the pump out of the cabinet. The diaphram area was
tore down, cleaned and rebuilt. Nothing unusual found here. We
cleaned up the cabinet and re-installed the pump.
Upon start up of the system, the pump fired up with NO problem.
Seconds later, it was blowing water again. The resevoir tank was
extremely full. We performed several tank dumps to return the
tank to proper operating levels.
Now, this situation that happened shouldn't be considered normal.
The tank should never reach this level. So, we checked out the
dump time and we feel confident that is isn't being allowed enough
time to rid itself of water. Hence the gradual rise in level. The
value has been increased from 10 to 20 in the program to allow more
dumping time. It will be closely monitored over the next couple of
weeks.
Doc & the Poiriers X 2
|
| 17.26 | GREASE BUILD-UP, WATER LEAK | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:16 | 28 |
| SUBPAC::LANDRY 25 lines 15-MAR-1995 16:48
-< No runs, one drip, one error! >-
--------------------------------------------------------------------------------
The Weekly PM was performed today. Found a couple of items to note.
* Some lubricant was found sitting on the anidized metal of polish
arm #2. This was no where near the polish area. It was spotted
internal to the multihead. We could not locate where the sub-
stance came from as there were no drips, streaks, moist areas
other than where it was located. We wiped up the area and will
monitor it.
* The fitting on the bottom of the vacuum tank had developed a leak.
The leaking substance is water (yes, there should be water in this
section of the tank. don't be misled by the vacuum word). Anyway,
we remove the fitting and re-taped the threads. After a few hours,
the leak began to drip again. This time it was from the barb
fitting/hose clamp. Slightly tightened the clamp and the leak has
stopped.
* While wiping up the minor amount of water that had collected in the
spill containment pan, we accidently had a wet wipe fall on the
spill detector. Nice test to assure the spill detection circuit is
working fine, which it is. The reason to why it didn't alarm for
the drip was that the water amount was so insignificant that it
never reached the sensor.
Doc / JP / Roger
|
| 17.27 | CONDITIONER ARM | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:17 | 30 |
| SUBPAC::LANDRY 27 lines 21-MAR-1995 17:48
-< the Tale of the Statuesque Conditioner Arm >-
--------------------------------------------------------------------------------
Today, the conditioner arm movement crapped out........
Well, Roger and I took a quick look at it this morning. The computer
has a tendency to occasionaly lock up every so often, which causes
componants like this to stall out. It usually just takes a reboot of
the computer and all is fine. No such luck this time.
After the reboot, the arm movement was tried in manual mode. It raised
then moved out over the table where it decided to pull the statue
routine, just suspended there. All screen touch pads were dead and we
couldn't exit the screen. Rebooted. Upon initialization, the
multihead began to home while the conditioner arm was still over the
table. To avoid a massive and expensive crash, we powered down.
Looked into the situation. All I/O's we could check were functional.
The motor was fine, gears too! Checked the connectors associated with
the loop, one looked suspicious. Redid the connector and rebooted.
After assuring the hardware program, we initialized and all was well.
Some interesting findings, there are 7 sensors associated with the
conditioner arm. 4 for the left to right movement and 3 for the up /
down movement. Incredible! But all warranted as the lose of position
of the arm could be a major financial hardship, not to mention the
weeks of down time that would accompany it.
Doc / Roger
|
| 17.28 | VACUUM PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:18 | 20 |
| SUBPAC::LANDRY 17 lines 30-MAR-1995 18:10
-< Better today than yesterday! >-
--------------------------------------------------------------------------------
Today...............
The system ran pretty good. Ran all the wafers fine until the last
cycle of wafers went through. The system alarmed for low vacuum. It
quickly recovered (as it should). Upon restarting the cycle, the
system interpreted this as polish again. Jim therefore went into
manual and finished the cycle. I could not get the system to repeat
this phenomena. We'll watch closely tomorrow.
Talk to Speedfam concerning the vacuum system. They didn't tell me
anything I didn't know. I'll retrace some steps when the system is
available for a few hours. I think we need to take a good look at our
mapping procedures/head disabling/program segments, we may be missing
something. Anyway, the system is UP and functional for manufacturings
use.
Doc
|
| 17.29 | SCRATCHES | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:18 | 11 |
| SUBPAC::LANDRY 8 lines 22-MAR-1995 16:23
-< Stop Scratching!!! >-
--------------------------------------------------------------------------------
This afternoon...........
The scrubber brushes were changed per Engineerings request.
Although the polishing pad had been changed out, scratches were still
showing up, hence the brush change request.
1st Shifters
|
| 17.30 | COMPUTER BOOT-UP PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:19 | 51 |
| SUBPAC::LANDRY 48 lines 6-APR-1995 18:04
-< To boot or not to boot....... >-
--------------------------------------------------------------------------------
Bizarre happening occured today........
We couldn't boot up the computer. Kept getting two faults:
* Controller not responding
* ELODEV not installed
Dispite these faults, MS-DOS booted up to where we got the proper
prompt. So, we attempted to boot-up the executable file. No response
from the keyboard what_so_ever.
Well, I had no idea as to what controller this refered to as we have
many controllers. So, I checked each and everyone out individually.
They were all ok with NO fault lights lit up. Checked the inverter,
ok too! Now what? Well, proceeded to check for the obvious. Cables,
connectors, various hardware, etc, etc. No help! Removed the CPU
module from the rack, looked good / connections clean and in tact.
Did the same to the floppy module, same results.
Talked to Craig out at Speedfam. He didn't sound optomistic at all.
From the errors and the way the system was responding, he suspected
some DOS problems. They ain't gonna get fixed from freakin Phoenix!
Well, the situation was bleak, but low and behold, Craig suggested a
few items to check. Utopia didn't seem possible. One of the ideas
was to try another keyboard. Why, it passed without any keyboard
error? Anyway, I located a keyboard that could be hooked up in the
computer cabinet. Due to the cable connection, it couldn't be hooked
up to the front panel. So, a rebootin' we'll go. Unbelievable! The
system booted up just fine. Tried with the old keyboard, no go. Tried
the new keyboard, go. System back up and humming.
Should someone run the system before the new keyboard from Speedfam
arrives........and the system is powered down in any way.......the
temporary "Digital" keyboard will need to be hooked up in the computer
cabinet to execute the bootup software. It's located on the module
that is positioned furthest to the left in the cabinet (labeled CPU).
It's the top cable connection. Once the windows program is booted,
re-attach the original cable back to the CPU. Any questions or
concerns??? Feel free to call me at home.
The keyboard will be shipped out today. We'll have it Monday at the
latest, possibly tomorrow. The keyboard is not needed to run the
system.
the Doctor
|
| 17.31 | PARTICLES | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:19 | 25 |
| SUBPAC::LANDRY 22 lines 12-APR-1995 17:48
-< Particles!!! >-
--------------------------------------------------------------------------------
The system was experiencing high particles this morning. Several
things were done prior to running any MQC's.
* The hoses on both slurry pumps were changed out. The old hose
was badly worn and stretched. Not sure if this was contributing to
the particle issue, but it was definetly a possibility. By the way,
it's an arduous task to say the least.
* The slurry flow from the VMB (valve manifold box) was poor. The
filter was suspected to be clogging as the secondary gauge was
fairly stagnant. The filter was removed and inspected. It didn't
appear to be the problem. Non-the-less, the filter was flushed out
until a steady flow of clear water was exhibited. Re-installed the
cleaned filter and same senario with the gauges existed. Low and
behold, the other systems were experiencing the same results. The
Ashland folks were contacted to check their end. The pump down
stairs had stalled out. They reset it. Decent flow was back.
* Jim Sadin then conditioned the polish pad several times. MQC checks
came in fine.
1st shifters
|
| 17.32 | CUPS NOT GOING DOWN, PEDISTAL BROKE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:20 | 46 |
| SUBPAC::LANDRY 43 lines 13-APR-1995 19:58
-< We're waiting on parts! >-
--------------------------------------------------------------------------------
What an incredible day. Can't say I've ever had a worse one!
Arrived to find that the system wasn't detecting all cups down, despite
the fact that they were. Traced problem to a sheared off lifting
pedistal. Well, I located one and attempted to install it. Something
wasn't quite right. The cup height was different from before. Turns
out that of the six cups that lift, one was a specialty! Yup, thats
the one that broke and we ain't got one.
Proceeded to check into why this happened. Found that some cups were
barely making it to the down sensor, right at the hairy edge as they
say. Of course I wasn't there when it originally happened, but i'd say
it's safe to say that the sensor was made by the top edge of the
pedistal but the pedistal was just low enogh to catch the cups bottom
mechanism.
Anyway, we worked the cups up and down a few times and all seemed
workable. Wrong! Somehow, Load Cup four never dropped after picking
up the wafers from the index table. The heads began to move in and
the wafer got wedged/broken. Minor damage was done to the cup. The
carrier film ripped pretty good on that one carrier. That got rebuilt.
Began looking into why this happened. It's still unclear. There are
many possibilities and none are obvious at this time. We'll need to
check a few things while waiting on the obvious parts:
1) Need to check if the cup feedthrough is cracked or the weld
broken on the index table feed through. If the tube is shifted
it could be causing the cup(s) to hang up.
2) Need to check the index table feedthroughs for burrs.
3) Need to check the stems of the cups for defects/differences
between suspected bad ones and know good ones.
Anyway, the system is down for parts, being pedistals for the air
cylinders. The above items don't require power on to the system.
The system can't be properly initialized at this time due to a
missing pedistal that won't make a sensor. Hence, half the system
will not be properly initialized.
Doc / BJ / Roger
|
| 17.33 | LOAD/UNLOAD CUPS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:20 | 14 |
| PATE::GEE 11 lines 13-APR-1995 23:36
-< load & unload cups >-
--------------------------------------------------------------------------------
De-burred and cleaned the #4 load cup so that it now slides
smoothly. Straightened the lift cylinder rod for load #5 the
best we could.
Need to replace the load #5 sensor bracket, it's bent. The
load and unload cups will need to be dismantled and cleaned,
there are silicon particles between the two sections.
2nd Shift
|
| 17.34 | PEDISTAL REPLACEMENT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:21 | 29 |
| SUBPAC::LANDRY 26 lines 14-APR-1995 17:43
-< We're 80% functional. >-
--------------------------------------------------------------------------------
Somewhat successfull day........
* Received the two lifter cylinder pedistals from Speedfam. They
were installed, alignment performed and a test run made. We used
the transfer program as we were just concerned with wafer handling
issues. The test run went as such:
- Load cups 1, 2, 3, 5 all performed acceptably.
- Load cup 4 was in bad shape.
- The unload cup was raising fine but lowering was a bit iffy.
* From the above information, we determined that: 1) Load cup 4 would
be disabled in the software, which means the cup would stay put in
the bottom of the Index Table (for water retaining purposes). We
will be able to run the other four heads for the time being. 2) The
unload cup specifically (as well as the other cups) would need to be
watched closely for the next couple of days. This is due to the
cups not seating as well as they should. This is what caused the
two days of down time. The cup didn't seat properly, causing a
crash of the cup and the lifter pedistal. 3) Cup 4 will need to
be examined much more closely to locate exactly what the problem is.
Field Service may need to be called in. Stay tuned. Kudo's to Jim
Sadin and Brian Connelly for their assistance in the post-fix
activities.
Doc
|
| 17.35 | ARM WOULDN'T HOME | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:21 | 29 |
| SUBPAC::LANDRY 26 lines 18-APR-1995 18:01
-< DTWYDK >-
--------------------------------------------------------------------------------
Rough start today...........
Came in to find the system half powered up (still sitting in DOS).
Upon rebooting, arm #1 would not home. The arm had driven by the home
sensor and tripped the inhibit switch, killing power to the arm.
Couldn't get the arm to respond. This, in addition to the load cup #4
problem, put the system into a 60% runable system. Due to the number
of lots backed up in the room, it was decided that we would run three
heads for now and address the two problem areas as time permitted.
Later on in the day, there was an hour window of oportunity for
maintenance work. Went back into DOS from where the motors could be
forced on. Got arm # 1 to move off of the inhibit switch. Enabled the
arm and rehomed it. All went well. A fourth head was available to the
manufacturing folks. Due to MQC's prior to the fix, they will not run
this head today. It will be used tomorrow as checks are done again.
The head has been disabled for the night.
Moved on to the load cup 4 problem. Through swapping out of cups, cup
positions, utilizing different air cylinders, etc. it was determined
that the index table cup feed-through is the problem with this area.
It had taken a whack mid week and made have deformed the shape of the
feed-through. Will take a closer look tomorrow, when time permits.
Doc / with some help from Jim T
|
| 17.36 | CONDITIONER ARM | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:22 | 30 |
| SUBPAC::LANDRY 27 lines 19-APR-1995 17:59
-< Couple of problems, but we produced anyway! >-
--------------------------------------------------------------------------------
Couple of happenings today............
* A problem occurred with the conditioner arm. Despite it's obvious
physical "up" position, we received a "timeout for condition arm
up" error. Would work sometimes, sometimes not. Traced problem to
be two fold, 1) a loose wire in the top sensor molex connector, and
2) the top sensor position was on the edge of make or break. Of
course, the wire/connector was repaired and the sensor adjusted.
* The scrubber timed out several times during manufacturing. Let them
finish up the lot, then checked out scrubber performance. The
in/out movement of the unit was slower than normal. The rails were
lubricated to correct this. Also wiped off both the in and out
sensors. Working fine now.
* Arm #1 was qualified and used today, bring the system back to four
heads polishing. We may give the fifth head a try tomorrow!
* Had dialog with Speedfam reps today concerning the performance of
Load Cup #4. The feethrough needs to be thouroughly checked out for
integrity (no broken welds, no scratched/pitted areas, possibly try
to check for any oval shape that may be causing the sticking
problem).
* Brought 9 pressure plates to the dock for shipment, be re-filmed.
Doc / Bobby
|
| 17.37 | CUP PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:22 | 27 |
| SUBPAC::LANDRY 24 lines 20-APR-1995 17:21
-< more cup research info >-
--------------------------------------------------------------------------------
Today..........the four running heads ran well. I took some time to
continue investigating the load cup 4 issue.
* The seal for the cup feedthrough was removed and examined. Found
some minor chaffing, but nothing substancial enough to cause the
problem. Tried the cup up/down movement without the seal. The
movement was the same whether the seal was in or out.
* Took the locating pin out of play. No luck. No luck with the seal
in or out too.
All possibilities/configurations/etc have been tried to this point,
except for the feedthrough "roundness" intergrity. We'll have to
figure out a way to measure the circumference to see if the shape has
become ovaled or not.
Dialog continues with the Speedfam reps. They are also trying to
figure out a way for us the measure the feedthrough.
* One last item, they have sent out the load cup adjustment fixture.
I will be checking all cup alignments as time permits.
Doc
|
| 17.38 | Machine powered down | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:23 | 16 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 13 lines 21-APR-1995 07:40
-< Machine powered down >-
--------------------------------------------------------------------------------
OPS couldn't get the display to appear at the monitor.
Come to find out that it appears the machine had apparently
had been accidentally EMO'ed and all DI out of the LOAD table
indicating it had been off for at least (4) hours. The pad
was still damp but I told Gwen to check the MQC results carefuly.
The particle count was way out of spec. Larry and Erik will
have to decide it the pad should be replaced. Full MQC's have
to be run again.
3rd shift
|
| 17.39 | CUP PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:23 | 21 |
| SUBPAC::LANDRY 18 lines 22-APR-1995 11:34
-< a first! >-
--------------------------------------------------------------------------------
I had an opportunity to work on the system today. Continued on
with the load cup 4 research. All cups were removed from the Index
Table. Throughly cleaned and dried as well. Upon suggestion from
Speedfam, I checked out the table for flatness using a dial indicator.
Seeing that the surface to be measured was made of polypropylene, it
was expected that there would not be a strict flat tolerance. They
just wanted me to find out if there was a big difference in the area
of the troubled cup as opposed to the known working cups. Much to my
shugrin, there didn't seem to be any major change change.
Right now, all thats left to verify is the inner circumference of the
feedthrough. We'll need to come up with a method of measuring it.
Any ideas on how to measure this are greatly welcomed.
Doc
|
| 17.40 | ARM #1 homing sensor failed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:24 | 18 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 15 lines 24-APR-1995 08:28
-< ARM #1 homing sensor failed >-
--------------------------------------------------------------------------------
Machine was being set-up for running exercise wafers from wet
idle when ARM #1 failed to move out to the LOAD position. After
cycling the power, ARM #1 failed to initialize. This appear to be
the same problem as last week, same arm. It appears the arm missed
the HOME sensor and tripped the inhibit switch which killed the
power to the arm. I spoke with Doc on the phone and there is a
extensive procedure to go into DOS and manually bring the head.
That procedure is not available to us at this time. Doc is calling
SpeedFam as soon as they open and will be calling in with the
procedure. Mr. Zimage is requesting a Service Rep comes in and looks
at this ASAP.....
BJ
|
| 17.41 | Pressure plate, Load/Unload Flipper Box | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:24 | 16 |
| FABSIX::R_POIRIER 13 lines 24-APR-1995 23:40
-< Pressure plate, Load/Unload Flipper Box >-
--------------------------------------------------------------------------------
Removed carrier pressure plates from the carriers on
CMP.B1. Tim will be sending them back to vendor.
Helped Tim remove Load/Unload Flipper box from CMP.B1.
Removed cover from Load/Unload Flipper Box. No visible
damage seen. SpeedFam rep will be coming in tomorrow
to work on this and other problems.
2nd Shift
|
| 17.42 | FLIPPER BOX | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:24 | 49 |
| SUBPAC::LANDRY 46 lines 25-APR-1995 19:30
-< The Lord has surely graced me today! >-
--------------------------------------------------------------------------------
Very good day for equipment recovery........
* The Load Flipper not homing problem was identified and repaired.
The problem was two-fold. 1st, the sensors amplifier was out of
tolerance. Adjusted it. Upon test out, problem 2 was discovered.
Seems that there was a mechanical problem with the motor shaft/cam.
Couldn't get the LED's on the amplifier to jive with it's perform-
ance. Found the problem to be that the cam was binding a bit with
the shaft housing. Repositioned the cam and voila, success. Re-
setup the amplifier to match cam position.
After the Flipper Box was reinstalled, the Load Flipper positions
were set and tested. All went smoothly. At this time, we checked
out the Unload Flipper to assure all was still working. All posi-
tions remained as was. We did, however, mechanically adjust one of
the grippers as this gripper was not making contact with picking up
wafer. Retested and all was fine. Big kudo's to Roger for his
assistance in the flipper box ordeal.
* The Scrubber timeout problem was checked out. All sensors are re-
sponding as should. Was unable to duplicate past failure occurances.
We'll have to monitor it for any re-occurances.
* As the system was powered up today, the Arm #1 not homing occurred.
Along with it came no rotation. Found both of these problems to have
stemmed from the DCX boards (1 & 2). There are several cable con-
nectors that were either partial dislodged or totally dislodged.
Reconnected the cables and tried to relieve some of the tension on
the wiring. The tensioned wires, coupled with the plugging in of
the remote terminal, seems to have caused this atrocity.
* Jim, JP and myself checked out the feedthrough for Load Cup #4 today
for any inner diameter flaws. This was done with percision tools.
The feedthrough doesn't seem to be out of round. I don't know what
Speedfam plans next, but I'm about out of ideas to troubleshoot this
baby. A rep will be here tomorrow to address this issue. Stay tuned!
* The "double loading" problem has been identified as a software problem,
as was suspected earlier this week. The rep will address this too!
* Load Cup height adjustments will be performed tomorrow to assure that
the proper gapping still exists.
Doc, with guest appearances by Roger, JP & Jim
|
| 17.43 | CUP PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:25 | 34 |
| SUBPAC::LANDRY 31 lines 26-APR-1995 19:25
-< good day again >-
--------------------------------------------------------------------------------
A second good day in a row..........
* Load Cup # 4 is now functional to use. Found the feedthrough
mildly "out of round". This, coupled with a less than perfect
cup cylinder, combined to be the culprit. The Speedfam rep
(Mark Aubuchont) made the decision to hone the feedthrough and
lightly smooth the cup cylinder with crocus paper.
* The Unload cup was adjusted to better sit once the air cylinder
retracted. Working better now.
* The scrubber performance wasn't up to par as well. found the
pedistal wafer rotation guides on two pedistals uneven. Fix that
problem by reseating.
* Had Brian Connelly build a fifth carrier for the fix load cup.
He was shown some techiques by Mark in rebuilding these. Then
installed all five rebuilt carriers.
* Installed a polishing pad. IT HAS YET TO BE CONDITIONED! It
WILL NEED conditioning prior to MQC runs.
* Using the TRANSFER program, a cassette of wafers were run to
mechanically test all moving components. NO wafers touch down
on the pad when using this program.
* The system will also need to run 50 or so "break-in" wafers, as is
standard procedure for this system.
Doc
|
| 17.44 | Flipper box problem | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:25 | 15 |
| FABSIX::R_POIRIER 12 lines 28-APR-1995 01:47
-< Flipper box problem >-
--------------------------------------------------------------------------------
Removed Load/Unload Flipper box from CMP.B1.
Removed cover from Load/Unload Flipper Box.
Load Home Cam does not seem loose or out of
sync. No visible damage seen. Set up Flipper
box on the bench using jumper connectors for
Tim to work with in the morning.
2nd Shift
|
| 17.45 | FLIPPER PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:25 | 34 |
| SUBPAC::LANDRY 31 lines 28-APR-1995 16:43
-< between a rock and a hard place >-
--------------------------------------------------------------------------------
Some good news.........some bad
* Bad news:
- The Load Flipper has a bad sensor amplifier. There was one in
stock. Installed it and it was also bad. The original one
couldn't get the LED's to light when commanded. The new
couldn't get the LED'd to shut off! Yes, I'm sure somethings
not hooked up correctly. One is being Fed-X'd for Saturday
morning (hopefully). Plans are to install it and test it that
day. If all works fine, final installation of the flipper box
and gripper alignments will be done.
* Good news:
- The Paddle travel problem (shaking) has been cleared up.
Cleaned and lubricated the guide rails. Adjusted the sweep
pressure. Much better!
- The scrubber travel (hard stopping) has been cleared up.
Adjusted the sweep pressure.
- Got the carriers into Wet Mode by disabling flipper box.
- Fix the software to allow the carrier arms to spread prior to
servicing the carriers. This will allow a better ergonomical
situation as well as allow the use of two hands when using the
quick disconnects. Please refrain from using the channel locks
on the quick disconnects.
Doc / Speedfam / Jim T
|
| 17.46 | lipper Box was removed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:26 | 34 |
| SUBPAC::LANDRY 31 lines 2-MAY-1995 17:46
-< not again!! >-
--------------------------------------------------------------------------------
Guess what happened today? The Flipper Box was removed. Surprised?
Upon arriving this morning, RTC messages showed that the system was on
warning for scrubber timeouts. To fix this problem, one must first
clean the travel rails by wiping them with a dry wipe. DO NOT use any
isopropyl alcohol to clean these. Just the wipe will do. At this time
we are NOT adding any lubricant to the rails. This is to try an use up
some of the lubricant that is jammed in the bearings. Speedfam will
look into whether we have hardened rails or not. They may be changed
out in the near future. Stay tuned! Follow the above procedure for
now, until Speedfam gets back to us.
Now the Flipper Box. Again, the Load Flipper would not home properly.
The box had to be removed. Upon checkout, moisture was spotted inside
the sensor amplifier. Previous checkouts when the amplifier failed
showed no signs that moisture had been introduced to the amplifier.
Moisture was found in the box on two of the three occassions it was
removed and opened though. The leaking sections were identified and
hopefully were repaired enought to last until new seals arrive from
Speedfam. Knowing we had no more amplifiers in stock this morning, all
looked bleak. But, thanks to Greg Gravelle, we were able to install a
new one. He happened to have one squirreled away from years gone by.
The new one is working fine. It has been adjusted. The box has been
sealed with RTV in the affected leaking area's and a loose bolt was
tightened down (also evidence of moisture leakage). The box was
re-installed and final load cup/pre-aligner alignments were made.
Hopefully we've seen the last of the interior of the flipper box!
Doc
|
| 17.47 | Slurry system shut down | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:26 | 9 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 6 lines 3-MAY-1995 08:30
-< Slurry system shut down >-
--------------------------------------------------------------------------------
The slurry system shut down causing a few "problems."
The slurry ran out and the (5) exercise crashed and the
carriers and pad are being replaced.
BJ
|
| 17.48 | wafers were bit due to slurry supply outage | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:27 | 12 |
| SUBPAC::LANDRY 9 lines 3-MAY-1995 17:02
-< wafers were bit due to slurry supply outage >-
--------------------------------------------------------------------------------
Late third shift last night, the slurry supply went off. This caused
the system to loose wafers, breaking them on the polish table. The
pad and carriers were changed out. The system was cleaned up.
Standard breakin procedures were done.
The system ran fine for the duration of the shift.
Doc
|
| 17.49 | scrubber timeouts | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:27 | 17 |
| SUBPAC::LANDRY 14 lines 4-MAY-1995 18:04
-< A decent day was had by all! >-
--------------------------------------------------------------------------------
Finally, a productive day!
* System ran all day. We did get a couple of scrubber timeouts.
The rails were wiped clean. We are going to implement a wiping
of the rails once a shift. This will be communicated to the
people who operate the system over the next day or two.
* We received in 10 wafer guide rings for the carriers. I will be
submitting a SID sheet to have these stocked on site. They are
considered a consumable, so we'll have to purchase them. Other
consumables will be added to the list.
Doc
|
| 17.50 | Wafer breakage incident | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:28 | 18 |
| ASDG::POIRIER 15 lines 8-MAY-1995 19:09
-< Wafer breakage incident / Warnings logged >-
--------------------------------------------------------------------------------
* Wafer breakage incident today:
The system alarmed for the "vacuum system" for quite some time
this morning but continued to function normally. The system
evidently lost a wafer or wafers during an auto polish cycle
around mid-morning. Noone actually had visual contact with the
carriers during the incident. In addition, the wafer detection
system, designed to detect broken wafers on the pad, failed to
operate. The auto polish cycle continued to operate for some time
reducing the wafers to a powder. Two Warnings were logged against
the tool today, One for the Vacuum system and one for the wafer
detection system.
John.
|
| 17.51 | Conditioner Arm problem | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:28 | 34 |
| SUBPAC::LANDRY 31 lines 11-MAY-1995 18:52
-< Conditioner Arm problem >-
--------------------------------------------------------------------------------
Interesting day......
With the uniformity problems happening this week, we had been checking
out the normal causes (pads, films, parameters, etc., even % solids of
the slurry) from past experience. None were panning out to well. So,
we began observing the opeation of the system. Looks like we came up
with a first. The conditioner arm was experiencing some strange move-
ment. It would sweep inward fine, but the outward movement showed some
erratic behavior. It would temorarily stop rotating. Even when it
would rotate, it was much slower than the normal speed.
We decided to tear into the conditioner arm and have a see. Several
problems were prevalent. 1) The anodized housing containing two
pressed bearings had a problem with less than adequate rotation, 2)
The shaft assembly had a great deal of rust around the gimbal bearing.
The rust was so bad it had frozen the gimbal in a stationary position,
hence defeating it's purpose.
It's believed that the lack of gimballing is definately causing the pad
to be conditioned poorly. This will cause the uniformity to sky-rocket
badly. It's also possible that the poor pad condition is causing the
unusually high number of wafer breakage.
Speedfam will be shipping out the necessary parts to repair the
problem. They should be here tomorrow morning. And will be installed
then. Speedfam has also experienced this problem elsewhere and are
currently working on redesigning the assembly.
1st Shifters
|
| 17.52 | condition arm parts arrived and installed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:28 | 24 |
| SUBPAC::LANDRY 21 lines 12-MAY-1995 17:31
-< condition arm parts arrived and installed >-
--------------------------------------------------------------------------------
Well fans, the conditioner arm assembly came in this morning. Leon and
I installed it. It was tested out and is working fine. The wheel
spins smoothly and uniformly. In fact, the noise the arm would make
when conditioning has been reduced to virtually nothing (no more cry of
the Moose in heat).
The system status is now in "verify". Process Eng. wants to check out
the rebuilt carriers before they are installed and used. The ring
extention may need to be adjusted prior to running the system. This is
due to changes made previously to try and correct the uniformity
problem that existed. See Larry for details.
Upon working on the conditioner arm this week, I have noticed excessive
build up of slurry within the polish area and index table. It appears
we will need to increase the cleaning frequency. I will be getting
with all those who are currently working on the system and showing them
the areas that will need to be addressed more often. It's obvious that
we will have better control of particles and equipment longevity if we
institute some cleaning measures.
Doc / Leon
|
| 17.53 | scrubber timed out | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:29 | 30 |
| SUBPAC::LANDRY 27 lines 17-MAY-1995 19:18
-< one wafer per head please >-
--------------------------------------------------------------------------------
Bad, bad day.............
Upon arriving, I was told that the scrubber timed out a couple of
times. So, I did the standard wipe down of the rails. The system
began to run again and the timeouts persisted. What I observed was
that the scrubber was indeed making the sensor in plenty of time but
the scrubber would back off the sensor once made, hence showing
scrubber wasn't at home. So, I was going to adjust the speed of the
scrubber when IT happened again. IT = the system double loading then
heading off to polish. Not good, people. Crunch! The software bit
us again. The system was shut down and Speedfam was called to get the
software bug fixed. They sent a person down from Burlington, VT.
He has taken what software we have and will analyse it and remove said
software bug. He will be back in the morning to reload the necessary
files and test out.
Also, we are currently down to two pressure plates. Six more are being
Fed-X'd for tomorrow morning along with five rings. Eight other plates
are currently in the delivery loop.
Back to the scrubber..........to prevent the scrubber from backing off
the sensor, Booby and I took off some of the spring loops on the rails.
These springs were initially added at startup to help the scrubber slow
down as it approached the home position.
Doc
|
| 17.54 | NEW SOFTWARE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:29 | 36 |
| SUBPAC::LANDRY 33 lines 19-MAY-1995 18:02
-< excellent day >-
--------------------------------------------------------------------------------
Big day............
* The new boot-up software is revision 491 (speed491).
* The new software has added some new features to the touch screen.
I will be getting with all who choose to learn these features in
the very near future. The changes made will not affect the way the
tool has been operated in the past. The new items are more in the
realm of convieniences.
* Started the day with a pad change due to a drying situation of the
pad. The scrubber air pressure had dropped, causing the scrubber
to fail for "waiting scrubber in". This stops the wet mode cycle
until the problem is corrected. It had stopped in a position such
that the pad was NOT being supplied water. Adjusted the air pressure
to the regulator and the scrubber ran flawlessly all day.
* Checked out the mis-loading problem from the day previous. It was
confirmed that it wasn't software related. We'll chalk this one up
as a poor pickup.
* With the help of Brian C, 200 additional wafers were cycled through
the system today. NO failures or assists what-so-ever.
* The system status is in VERIFY for the purpose of giving it an MQC.
* We received in an additional 8 pressure plates today, bringing us to
a spare stock of 11 plates.
* Also received in 5 sets of load cup alignment fixtures.
Doc
|
| 17.55 | WAFER BREAK, CONDITIONER RUST | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:29 | 45 |
| SUBPAC::LANDRY 42 lines 25-MAY-1995 19:15
-< will it never end? >-
--------------------------------------------------------------------------------
Many problems today..........
* System crashed and broke 5 wafers at the polish table. Wafers were
being polished at the time of crash. The two layered polish pad was
on the table at the time.
* Performed cup alignment with the new fixtures just received in this
past week. Found cup three to be off substantially and cup one of
marginally. Both were re-aligned by the rep.
* Took apart the conditioner arm gimbal assembly, as this was a major
problem a few weeks back with wafer breakage. Even though the
gimbal assembly was only a couple of weeks old, it is already show-
ing signs of rust/deterioration. Cleaned and dried the assembly the
best I could and re-assembled. The gimbal effect is a tad better
than adequate, but it's making the loud noise of conditioning days
gone by. Speedfam is aware of this design flaw as all of their
customers have this problem. Redesign is being addressed.
- We'll have to dismantle the gimbal assembly every week to clean
and lubricate. Work the lubrication in and wipe off the excess
left around the edges. Wipe the teflon encased spring seal
before re-assembly.
- The condition arm park station is filling up to high, causing
the gimbal area to take on more water than is needed. Due to
the process, we can not rid the assembly of water, but we sure
can reduce the time it see's water. Roger (if time permits)
will be cutting the drain tube down to allow only the diamond
surface to make contact with the water on a continuous basis.
* After the adjustments were made, the system was run. Load cup #1
mis-loaded several times. It needed to be re-aligned. Showed Roger
how to perform this task, we were able to get the spindle to cup
tolerance fairly tight.
* The system is going down to an ENG state to research further on the
excellerated amount of wafer breakage that has been happening of
late. Please do NOT attempt to run the system tonight.
Doc / Roger
|
| 17.56 | CUP ALIGNMENT | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:30 | 22 |
| SUBPAC::LANDRY 19 lines 26-MAY-1995 17:31
-< 60% for know! >-
--------------------------------------------------------------------------------
Well, this is what happening with the system.........
* Cup alignment was checked on all heads this morning. This was done
due to vacuum problems on heads 1 & 2. Heads two and three were
adjusted, the remaining three heads were fine.
* Carrier tolerence were checked out first thing this morning. All
carriers were verified and re-installed.
* Upon exercising of the system, heads 1 & 2 errored for vacuum
problems. The problem could be one of several different items.
Lack of polisher equipment in the UP state swayed us to run three
heads for the time being. Heads 1 & 2 were disabled.
* Nylon washers were received in today. I will bring them into the
room Tuesday.
Doc
|
| 17.57 | VACUUM switches adjusted | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:31 | 26 |
| SUBPAC::LANDRY 23 lines 30-MAY-1995 18:43
-< switches adjusted..........temporarily >-
--------------------------------------------------------------------------------
The system was turned over to EE late in the afternoon for "no more
than forty-five minutes, ok?" to look at the vacuum problem with heads
# 1 + 2.
Yes, there is a slight vacuum deficiency. No, it's not severe. In
fact, it's marginal. It's missing set point by 1" Hg. Due to the
amount of lots in the room and the amount of systems functioning in the
room right now, a decision was made to adjust the pressure switches to
trip off at about 15" Hg, instead of the customary 17" +/- 2" range.
It will remain as is until ample time can be arrainged to properly
address the problem.
After adjusting the switches, we went to change the off-sets, but the
settings were long gone. Jesus is in the process of trying to contact
Larry C for those settings. If he does not get through to Larry
tonight, Jesus will continue to run heads 3, 4, & 5. If he does get
the off-set info, heads 1 + 2 will need to be re-qualified and heads 3,
4, + 5 will need removal rates checked.
Also today, the scrubber timed out a couple of times. Wiped the rails
clean and re-lubed them.
Doc / Roger
|
| 17.58 | vacuum restriction found | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:31 | 22 |
| SUBPAC::LANDRY 19 lines 31-MAY-1995 17:50
-< restriction found >-
--------------------------------------------------------------------------------
Some good results today with the vacuum problem...............
We experienced vacuum problems again today with spindles 1 & 2.
Looking at the gauge, they were at the same reading as the previous
day. It was thought that maybe we set the pressure switches too close
to the "cross-over-point". Not the case this time.
Head 5 errored as well, so Earl and myself took a look at the vacuum
pump. It was obvious that the pump had seen some water/slurry residue.
We tore the pump down and found a build-up of "crust_ated" slurry on
the internal filters and diaphrams. We cleaned up the mess and
re-assembled the pump. Pressure improved to about 5" Hg. All heads
were reaching approximately 19-21" except for head four which was at
25". Found the gauge to be defective as it was reading about 4" at
atmosphere. This "convienience" gauge will be replaced in the future.
As time permits, the pressure switches on heads 1 + 2 will be re-set
for 17" Hg.
Doc / Earl
|
| 17.59 | cup problem | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:32 | 13 |
| SUBPAC::LANDRY 10 lines 1-JUN-1995 17:45
-< cup problem resolved >-
--------------------------------------------------------------------------------
The system had an equipment failure at the tail end of 3rd shift last
night. The system came up with the error "one or more cups not down".
Through the use of the I/O functions, the problem was traced to a
sensor not being made on cup #3. Checked out the sensor functionality
and found it to be "good". Therefore, the physical position of the
switch was adjusted. Twenty five wafers were run to verify the fix.
Got some assistance from Earl and Rich with this endevor.
Doc / BJ
|
| 17.60 | a lack of N2 pressure | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:32 | 15 |
| SUBPAC::LANDRY 12 lines 2-JUN-1995 17:45
-< a lack of pressure for a change >-
--------------------------------------------------------------------------------
The system had problems with the incoming N2 pressure today. We were
getting @ 70 PSI this morning, causing erractic system behavior. The
N2 was being supplied by the backup system. Air Products was contacted
and about 4 hours later, we were back on line with 100 PSI incoming.
The system ran after this and high uniformity was exhibited on two of
the heads. The carriers were removed and measured. One was definately
out of spec and the other was tweaked in a bit tighter. Roger and I
ran 25 breakin wafers after the carriers were installed. Next step due
is MQC's.
Doc
|
| 17.61 | vacuum pump down | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:32 | 17 |
| SUBPAC::LANDRY 14 lines 6-JUN-1995 17:25
-< vacuum pump down for the count >-
--------------------------------------------------------------------------------
The system is currently down awaiting a vacuum pump.
We had trouble pulling acceptable levels of vacuum. Found the fan
portion on one of the pistons in disarray. Looks like some internal
workings have come loose.
So, I have shut off the vacuum pump breaker, edited a couple of files
to ignore the vacuum checks, and rebooted the system. It is currently
in wet mode. The pump is due in tomorrow.
Thanks to Earl and Brian for their assistance.
Doc
|
| 17.62 | the pump has been installed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:33 | 31 |
| SUBPAC::LANDRY 28 lines 7-JUN-1995 18:04
-< the pump has been installed >-
--------------------------------------------------------------------------------
The system is currently back on line..........
The vacuum pump arrived this morning. It was wired and installed.
We ran 50 wafers utilizing the "transfer" receipe (no contact made
at the polish table). The vacuum pressure at the most troublesome
head (head #1) was reading 21" Hg, which is very good.
Now, with the new pump installed, we have not rid ourselves of the
original vacuum problem with the system. The new pump will not pre-
vent the pump from sucking waste water/slurry through it. Some ideas
were exchanged between Speedfam and myself. We both feel that the
problem resides within the vacuum tank. The feeling is that the
internal tank valve is failing to actuate to it's designed limits.
The vacuum tank internal working can not be checked out right now
due to the location of the unit. Therefore, we have made a pressure
adjustment to the "Miscallaneous" regulator. The pressure has been
increased to ~70 PSI (from the original setting of 40 PSI). This
increase is to supply more air pressure for the valve actuation.
Preliminary results look favorable at this time. We'll have to run the
system for a day or two before we can begin to feel that this may have
solved the problem. We'll continue dialog with Speedfam until the
problem has been solved.
So, Jesus Roa is beginning to run some MQC wafers through the system.
He and Brian C just finished up running 50 breakin wafers.
Doc
|
| 17.63 | Wafer breakage, machine down | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:33 | 13 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 10 lines 8-JUN-1995 01:47
-< Wafer breakage, machine downage.... >-
--------------------------------------------------------------------------------
A wafer broke on the pad and took everything else out.
Carrier #2 was the one that lost it's wafer. There are no
more rings so we can't get it back on line. The pad was removed
and not reinstalled. The scrubber brushes were removed and
placed in DI water. The entire machine was cleaned up and and
the carriers were broken down and cleaned. Cause of the problem
is still under investigation.
Leon, Gwen and BJ
|
| 17.64 | CARRIERS, PLATES, RINGS AND TABLE ISSUES | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:34 | 45 |
| SUBPAC::LANDRY 42 lines 8-JUN-1995 18:22
-< waiting on pressure plates / retaining rings >-
--------------------------------------------------------------------------------
Depressing day............
* Came in to a disaster with broken wafers. Only one plate was left
to use. No rings either.
* We decided to run a single head using the best of the old rings on
that one carrier. At least this head ran good all day.
* The rings have not been ordered for stock yet due to some
communication problems with Speedfam.
* The polish table needed to have a few dings / scratches removed
from it today. The slurry ring also has some dings in it. Please
refrain from using an unacceptable implements when removing the
pads.
* Had dialog with several Speedfam people today concerning the vast
problems we've exhibited over the last few weeks.
- Carriers: the .010" shims we've been using appear to be causing
some problems with hardware integrity. The inside diameter of
these shims are smaller than the other two sizes we have (.002"
+ .003"). The tightness is causing the retaining ring receive
more stress than is expected. New shims are on the way.
A minimum of 5 pressure plates (potential of 10) will be here
tomorrow. We'll be back on line to run 5 heads.
We should also be receiving 20 retaining rings.
They have FAX'd out a new parts listing for the carriers. I
will be pulling together a list of various items and get them
stocked on site in the near future.
- Wafer Breakage: Speedfam has asked that I perform a couple of
checks for them that may be affecting our breakage problems.
The conditioner arm is the focus concerning this check. I need
to gap the conditioner gimbal assembly when the wheel is at the
table. Down force pressure changes will need to be adjusted for
this check.
Doc
|
| 17.65 | plates/rings and assorted things | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:34 | 33 |
| SUBPAC::LANDRY 30 lines 9-JUN-1995 17:21
-< plates/rings and assorted things >-
--------------------------------------------------------------------------------
Today was like Christmas, 4 boxes of consumables showed up!
* Received in 10 pressure plates.
* Received in 20 retaining rings (valued at $412.50 each).
* No new shims showed up though. But I have found plenty in our
fab to suffice for the time being. I have weeded out several bad
ones. I'll weed out the remaining as time permits.
* Larry is currently constructing some carriers.
* Had more dialog with Speedfam today about wafer breakage. The
problem has been ellivated there. Many people are focusing on our
situation. Work between us and them forges forward.
- We will be checking the gimbal gap of the conditioner assembly
as the system becomes available.
_ Segments of the recipe will be thoroughly researched.
- Carrier construction will be altered. Received a procedure that
Speedfam recommends using while building carriers.
- New .010" shims to be procured.
Stay Tuned!
Doc
|
| 17.66 | gap measurement of the gimbal assembly | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:35 | 20 |
| SUBPAC::LANDRY 17 lines 10-JUN-1995 11:35
-< gap measurement of the gimbal assembly >-
--------------------------------------------------------------------------------
This morning,
The gap was measured at the conditioner arm gimbal assembly.
Speedfam had ask me to check this measurement. The conditioner arm /
gimbal assembly has a lot to do with potential wafer breakage. The gap
was measured at .011" @ 100% down force, taking 8 measurements in a 360
degree radius. The gap was consistant. The gimbal assembly seems to
be holding up better since the conditioning disk stations drain pipe
height was altered. The potential exposed gimbal seal no longer sit's
in the water in an idle state.
Took a shot at building one carrier. It is on the table and
labeled. It should be checked out by Larry prior to anyone attempting
to use it. He has been notified of it.
Doc
|
| 17.67 | wafer got loose without smashing! | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:35 | 36 |
| SUBPAC::LANDRY 33 lines 16-JUN-1995 18:21
-< 1st time a wafer got loose without smashing! >-
--------------------------------------------------------------------------------
Rough start.............
Upon arrival, the machine just spit out a wafer from under one of the
carriers. We found that another wafer was hanging over the edge of the
extention ring of the carrier. It was unclear as to how this happened.
We then manually moved the wafers to the Mutihead to the Index Table to
blow the wafers off the carriers. We found that one of the wafers got
crunched a little on the edge of the wafer, breaking a small chunk off
(maybe about the size of one die). So, we checked the pad and carriers
for any damage that may have occurred. Low and Behold, there was
silicon fragments on the polish pad and some loose fragments on the
film of carrier 3 (I think). The carrier film wasn't damaged., so we
did an extended rinse cycle to flush away anything left behind. We did
however remove the pad as this is common procedure, couple with the pad
life situation.
The conditioning ring was dismantled, cleaned, rebuilt and reinstalled.
A new pad was installed, double conditioned and breakin wafers were
run. MQC's came in OK.
Some other news, during manually unloading the wafers (by software), we
ran into a problem with the unload flipper grippers at the unload cup.
It wasn't lining up properly to get the wafer. BJ and I calibrated and
set the position. Ran fine. Upon restarting the automatic running,
the unload flipper position was off again, this time it was under
traveling to the unload cup. Re-calibrated the position and all ran
fine for the entire day. Don't ask me why it was off in the manual
mode! Seems like the original positions needed to stay put.
Cleaned and lubricated all three scrubber rails.
Doc / BJ / Brian C
|
| 17.68 | uniformity problems | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:35 | 14 |
| SUBPAC::LANDRY 11 lines 22-JUN-1995 19:54
-< uniformity stuff >-
--------------------------------------------------------------------------------
Uniformity problems today. The carriers have had several weeks of wear
on them. So, they have been removed and are currently being rebuilt.
Earlier in the day, BC broke down the conditioner arm, cleaned and then
rebuilt it. While that was taking place, BJ and I tore down the gimbal
assembly, lubricated it and re-installed it. That portion of the
Weekly PM has been completed along with the cleaning of all contamin-
ants within the tubs.
a bunch of us...........
|
| 17.69 | Wafer Breakage-Water Pressure Drop Suspected | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:36 | 22 |
| ASDG::POIRIER 19 lines 26-JUN-1995 20:25
-< Wafer Breakage-Water Pressure Drop Suspected >-
--------------------------------------------------------------------------------
* Wafer Breakage:
The system broke wafers this morning. A strong vibration was felt
through out the room just prior to the breakage. We strongly
suspect a temporary D.I. water pressure drop. A HOTLINE call
was logged and people in the CUB building responsible for the D.I.
system were contacted. They have had no indication of fluctuations
in the D.I. water system.
In a related matter, on Tuesday June, 13th, at 4:50 P.M., the D.I. water
pressure in CMP went to zero for 10 sec. This seems to be an alarming
trend. Lets keep a close watch on the water pressure in CMP until we
can identify and solve the cause of this problem.
John.
|
| 17.70 | Unload Flipper/Unload cUps #'s 4 & 5 - Mechanical Interference | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:36 | 24 |
| ASDG::POIRIER 21 lines 27-JUN-1995 18:58
-< Unloed Flipper/Unload cUps #'s 4 & 5 - Mechanical Interference >-
--------------------------------------------------------------------------------
* Wafer Pick-up Problem:
The unload flipper was contacting the top of unload cups #4 & #5
during the wafer unload sequence. The guide pins on these two cups
had retracted into the bodys of the assemblies causing the cups to
free-float/rotate. This rotating motion caused the flipper tips
to contact the top of the cups instead of lowering into the cut-out
slots.
Roger and I gently tapped the pins back into position and aligned
them with the guide slots on both cup assemblies. This activity
required rotating the 2 cups 180 degrees. We tested the load cup
up/down motion by actuating the air cylinders in manual mode. The
motion was not very smooth or consistant in any of the load cup
assemblies. Speedfam has a fix in the works for this problem so
I guess we'll just have to keep a close watch on the situation
until the upgrade is completed.
John & Roger.
|
| 17.71 | Low Vacuum at head | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:36 | 15 |
| SUBPAC::LANDRY 12 lines 29-JUN-1995 19:50
-< Low Vacuum at head 1 >-
--------------------------------------------------------------------------------
Today...........
Carrier # 1 was coming up with intermittent vacuum problems. The
wafer was loading fine, but the vacuum at this head was hovering around
the make/break point of setting. The head was soaked with water for
awhile. This seemed to improve it's performance. It's possible the
film needed to be soaked down. Ran fine from early afternoon >>-->
this memo.
Doc
|
| 17.72 | scrubber motor being shipped today | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:37 | 11 |
| SUBPAC::LANDRY 8 lines 7-JUL-1995 17:56
-< scrubber motor being shipped today >-
--------------------------------------------------------------------------------
The system is currently logged down awaiting a scrubber motor. It is
being shipped out this afternoon and will hopefully arrive Saturday
morning. The package is being sent to "Packaging Plus", which is
located down the street. I'll pick it up in the AM and install it
that day.
Doc
|
| 17.73 | Scrubber Rotation Problem / Motor Replaced | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:37 | 27 |
| ASDG::POIRIER 24 lines 10-JUL-1995 20:23
-< Scrubber Rotation Problem / Motor Replaced >-
--------------------------------------------------------------------------------
* Scrubber Brush Rotation Problem:
The Scrubber Motor arrived this morning and was installed into the
Scrubber assembly. The brushes performed normally for a few cycles
then stopped rotating after contact with a wafer on every scrub
cycle thereafter. We called Speedfam and they recommened the
following action:
1) Check for a good ground on the scrubber motor.
2) Check the voltage on the motor. It is supplied by
by an unregulated power supply so don't be sur-
prized by a voltage up to 50 V.
3) Pull-up the scrubber menu and run one off the test
recipe's. Check for reduced torque sysmtoms at
various rpm settings.
Bob has begun the above mentioned testing activivties.
John.
|
| 17.74 | scrubber motor problem | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:38 | 31 |
| SUBPAC::LANDRY 28 lines 12-JUL-1995 19:54
-< we're getting much, much closer >-
--------------------------------------------------------------------------------
A long, busy, educational day..........
The system is still down for a scrubber motor problem. The Servo-Amplifier
arrived this morning. This was the recommended next step in finding what
exactly is the problem. The amplifier was installed and an immediate problem
appeared. No documentation arrived with the amplifier. Found some DIP
switches internal to the amp that needed setting. Duplicated the original
amp DIP switch configuration.
The Amplifier still wasn't up to speed. Had to have some more dialog with
the reps on the loop, current, offset, and gain pots. Got it tweaked properly
and tyested the results. I would occasionally work / occasionally fail. The
motor would work fine and then just cut out sometimes. The problem then
shifted to wiring. With a mighty stroke of luck, the problem was narrowed to
a short section of wiring within a liquid tight flex tube.
Unfortunetly, the wire is connected to a connector that is sealed up real
tight. We'll have to splice into the connector for the time being with a short
section of new wire. On the other end of the flex tube, we'll have to cut in
and use a molex connector to make the junction, as the cable is mixed in with
about 100 other cables, snaking back many, many feet to it's destination.
I've communicated with Speedfam about a replacement in the near future. They
will take care of it asap.
Doc
|
| 17.75 | Scrubber repaired | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:38 | 15 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 12 lines 13-JUL-1995 06:25
-< Scrubber repaired >-
--------------------------------------------------------------------------------
Well.... the (3) conductor wire was replaced and re-run
through all the holes and tight fitting places and into the
smaller than needed water tight teflon fittings. It took
quite a while and I don't recommend replacing "the work" with
the new harness unless it breaks. We ran into some problems
with the manual operation of the scrubber. All and all...
its in VERIFY and needs 25 wafers through it to verify the
scrubber operation and then will need full MQC's.
Bob and BJ
|
| 17.76 | Unload Flipper adjusted | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:39 | 22 |
| SUBPAC::LANDRY 19 lines 13-JUL-1995 20:11
-< Unload Flipper adjusted / PM completed >-
--------------------------------------------------------------------------------
The system bit some wafers early in the shift this morning. No one was
able to capture details as to how or why. The only info was that the
unload module had an alarm around the time of the mishap. Of course,
the unload module is no where near the polish table.
After the mess was cleaned up and the carriers changed out, the system
ran fine, right through the rest of the day. MQC's came in good.
There was one minor problem that occurred during the shift. The unload
flipper failed to properly pick up a wafer from the unload cup. The
unload flipper positions were adjusted at the "flipper to unload cup"
and the "flipper to scrub". The wafers are currently picking up
satisfactory for now. Mechanical adjustment may be needed in the
future.
The Weekly PM was performed today while the MQC data was being
retreived.
Doc
|
| 17.77 | vacuum pump problem | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:39 | 46 |
| SUBPAC::LANDRY 43 lines 14-JUL-1995 19:33
-< vacuum pump problem >-
--------------------------------------------------------------------------------
The system is currently down for a vacuum problem. Many, many items
were checked out today. Here's the recap:
Arrived today to a "main vacuum low pressure" problem. So, I first looked at
the vacuum tank gauge for the reading. It was sitting at 10" Hg, totally
unacceptable. The switch minimum is set at @ 18" Hg, but it's recommended
we run at a greater number (normally runs about 22 - 24"). From there, the
vacuum pump was checked out for possible slurry/water (as has been the case
in the past). The pump turned out to be clean as a whistle. From there, we
proceeded to check for loose fittings/hoses, crimped hose, etc. All checked
out good.
At this point, the vacuum line from the pump was removed and a pressure gauge
was put in-line to read the pump performance. The pump pulled 27" Hg. So,
we then rehooked up the pump and tried again, 12" was attained at best at the
vacuum tank gauge. The pressure gauge was then installed between the vacuum
tank and the hose junction manifold. We barely got any response at all, a
couple inches at best. So, we felt we had it isolated to the vacuum tank and
the hosing that links the tank to the pump and to the junction manifold.
Check the vacuum tank drain check valve for any debris, slurry, etc that may
have prevented the valve from seating properly. It was removed, checked and
re-installed. No change in tank pressure. Checked the hosing/fittings, all
good. Really getting rediculous now.
By the way the system responded to vacuum and the almost calibrated reading it
kept attaining, I figured that possibly the <10 PSI blow off valve may not be
working well, letting some air leak by into the tank. So, I turned off the
valve and checked for results. No chnage again.
Now it's looking like the vacuum tank has a leak. We pumped it down the best
we could, then shut off the vacuum pump breaker and observed the leakback rate.
It held vacuum remarkably well. That was the last physical check we could
perform and nothing checked out bad.
Jim T suggested we try hooking up the process vacuum (house) to the system.
With the process vacuum hooked up to all the existing hoses/fittings/vacuum
tank, etc.; the system attained a pressure of 25+" Hg. So, we have request
they send us a vacuum pump, which they will. It could be here in the morning.
Thanks to Earl and Barry for they're assistance in performing some of the
checks. The bulkheaded walls got to go.
Doc / Jim T / Earl
|
| 17.78 | vacuum pump check valve | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:39 | 18 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 15 lines 15-JUL-1995 07:41
-< vacuum pump checked out ok >-
--------------------------------------------------------------------------------
Upon concluding that the vacuum system on A2 could handle
B1 as a last resort, we decided to see what we could do about
checking the pump one more time. We located a vacuum pump
from HLO1 to try some trouble shooting. Upon checking the
plumbing coming out of the pump, it was discovered that the
check valve was clogged with slurry. We replaced the check
and everything came back to normal. The vacuum tank was back
to spec. We ran a boat of wafers and after the last (5) wafers,
it appears the vacuum went to atmosphere. I quickly unplugged
the vaccum pump after the fittings and there was plenty of vacuum.
After I plugged it back in, the vacuum came back to normal.
doc is in now and will be checking things out....
BJ and Brian P.
|
| 17.79 | Low Nitrogen Flow / Vacuum pump | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:40 | 13 |
| PATE::GEE 10 lines 17-JUL-1995 07:33
-< Low Nitrogen Flow / Vacuum pump >-
--------------------------------------------------------------------------------
Ran 50 wafers using the "transfer" program, no problems. Installed
a pad and started to break it in. After about 15 wafers an error
came up "low Nitrogen flow", checked the guage at the system it
read 50 psi. this is good. This error forced use to power the system
down and unload the wafers.
When we tried to re-initialize the vacuum pump kicked off, we did
get the system into Wet mode but still no vacuum. Will pass on
to 1st shift.
|
| 17.80 | vacumm pump circuit breaker tripping at boot-up | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:40 | 18 |
| ASDG::POIRIER 15 lines 17-JUL-1995 19:26
-< vacumm pump circuit breaker tripping at boot-up >-
--------------------------------------------------------------------------------
Vacuum Pump Circuit Breaker Problems:
The vacuum pump breaker was being tripped during every boot-up cycle
this morning. The problem was the vacuum bleed-off valve adjustment.
The valve was opened 3/4 turn and the system now boots-up without
tripping circuit breaker #13.
NOTE: The electrical conections at the vacuum pump were in bad shape.
The copper strands in the wires were frayed and the connectors
were loose. It appears that the cause was excessive vibration
generated by the vacuum pump. The wires were soldered to the
connectors for improved vibration resistance.
|
| 17.81 | Brush station drive chain | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:40 | 7 |
| PATE::GEE 4 lines 18-JUL-1995 06:44
-< Brush station drive chain >-
--------------------------------------------------------------------------------
The lower set of brushes on the scrub station stopped rotating.
We disassembled the unit and found the drive chain was broken.
Found a drive chain in the Speedfam storage case, we replaced
it and reassembled. All set.
|
| 17.82 | wafer breakage | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:41 | 11 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 19-JUL-1995 06:36
-< wafer breakage >-
--------------------------------------------------------------------------------
Wafer #4 appeared to be the culprit in the 5-head crash.
The machine was all cleaned up, carriers rebuilt and pad replaced.
The was only (4) plate avaible so Brian Connoley stayed late to
get us back on track. Pad broken-in, machine needs full MQC's.
Bob and BJ
|
| 17.83 | computer lockup | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:41 | 21 |
| SUBPAC::LANDRY 18 lines 20-JUL-1995 20:17
-< computer lockup >-
--------------------------------------------------------------------------------
Pretty decent day of running, except for one incident.....
The computer locked up. The condition arm would not recess into it's
home station, the MHTA didn't recognize it's position, and a poly-
propylene cover over the MHTA rails broke off. So, we rebooted the
software to rtecover fromm the lockup condition. The cover suffered
severe damage. I was able to reconstruct enough of it to re-install on
the system. It poses no safety, process, or equipment problems. It's
purpose in life is to shield any contaminants from reaching the rails,
which is doing!
Speedfam has been contacted to ship out the necessary parts to repair
the problem. They should arrive by Saturday morning.
Pressure plates should be here in the AM, should we need them.
Doc
|
| 17.84 | Intermittent Electrical Problems | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:41 | 28 |
| ASDG::POIRIER 25 lines 14-OCT-1995 19:48
-< Intermittent Electrical Problems >-
--------------------------------------------------------------------------------
* System Performance:
There have been 3 instances of intermittent electrical problems
during "C" shift today. Twice during power-up breakers #13 & #6
tripped. #13 is the vacuum pump and #6 connects to Power Supply
#4 which supplies power to the INFANOR Motor Controllers for
(Head #4 Rotation), (Index Table Rotation), (Head #5 Rotation)
& (Multihead Transport).
The 3rd instance was at 7:20 p.m.. The system errored for a Head
Rotational Failure. We EMO'd the system and attempted to power-up
and re-initialize. The same Rotational Failure occured. The system
was EMO'd again, this time the cable harness was wiggled and the
power-up/intialization was sucessful. "D" shift, you may want to
investigate the cable harness further. The Speedfam rep has indicated
that the cables have given them intermittent problems on the other
tools in the field.
NOTE: Both Speedfam reps have left the East Coast. Bob will be
returning Monday evening at 9:00. For support between now and Monday,
page their replacement, Mark Aubuchont, at 1-800-980-6682.
John.
|
| 17.2 | MECHANICAL ACCEPTANCE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 22:53 | 3921 |
| SUBPAC::LANDRY 30 lines 28-SEP-1994 21:11
-< The Marathon Man runs!!!! >-
--------------------------------------------------------------------------------
* After a long and arduous installation/startup, we are finally
running the 1000 wafer mechanical acceptance marathon run.
* We started at 9:30 this morning.
* All mechanical components are huming along just fine.
* We had to pause for several minutes a couple of times today due
to a lack of wafers and the length of time on the OnTrak scrubber
program. The Speedfam was polishing at the table for only 30
seconds (much shorter than an actual run). This was necessary
due to the amount of oxide on each wafer. We needed to remove
about 100 angstroms or less to make the wafers last.
NOTE: by the way, the OnTrak is also huming along nicely. It's
like running a second marathon on this system!
* The marathon run has seen one "assist" occurrance happen several
times. The problem is for low vacuum. This happens when the
mapper feature is used. As the mapper is used, the vacuum tank
performs it's dump on water that accumulates in the tank. As the
start button is activated to begin a run, the vacuum system isn't
quite within operating range. After waiting 10 seconds or so, the
tank vacuum pressure improves and the alarm clears.
* Other than the above problem, the system is running like a champ!
* Wafer count as of 9:00PM is at 575 (give or take a few).
Doc
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================================================================================
Note 62.34 CMP.B1 34 of 292
ASDG::POIRIER 8 lines 29-SEP-1994 00:55
-< 1000 wafer marathon run. >-
--------------------------------------------------------------------------------
* 1000 wafer run:
777 completed @ 12:20 A.M.
Brian Jubinvile is taking over on 3rd shift.
John.
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Note 62.35 CMP.B1 35 of 292
SUBPAC::LANDRY 33 lines 29-SEP-1994 14:26
-< The Marathon is Complete! >-
--------------------------------------------------------------------------------
* THE MARATHON IS COMPLETE!!!
* The run funished about 6:00 AM
* There were a couple of problems that occurred:
1) Low Vacuum Alarm, almost every time the wafers were mapped in.
The tank still need additional time to recover proper pressure.
The fault only required a couple extra seconds to clear.
2) The system locked up twice, both induced by operator error.
Cassettes were trying to be swapped as the system ran, hence
confusing the computer as to cassette status.
* After the run was complete, we continued to run the system for a
couple of hours. Ran great.
* Late morning, Larry C and I polished 35 wafers for initial process
results. We found slurry pump #1 not flowing. Found the problem to
be a pinched hose in the flex track. I had to unlatch the retaining
pieces of the track and pull out some excessive hose. This is the
2nd time this has happened since the system has been on sight.
Speedfam will be made aware of this.
* The system is currently in Wet Mode.
* I'd like to say thanks to all who help out with the marathon.
Especially Jesus Roa, Brian Jubinville and Earl Dawson for their
dedicated participation with the run. Thanks again.
Doc
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Note 62.36 CMP.B1 36 of 292
SUBPAC::LANDRY 16 lines 4-OCT-1994 17:46
-< To regulate or not???? >-
--------------------------------------------------------------------------------
The softwater flow to the system has been inadequate since the startup
of the system. Many times the PVC plumbing was removed, dismantled
and cleaned. Each time this happened, many pieces of pvc shavings were
found in the regulator, severely reducing the flow of water. Well, it
was cleaned again today and once the shavings were removed, the flow
was still not quite acceptable. Therefore, a decision was made to
eliminate the regulator (which had a small 1/4" oriface) and the flow
gauge. This was replaced with 1/2" PVC pipe, hence providing more
flow. Prior to the modification we were seeing a flow of about 1 1/2
GPM. After the mod, we were able to achieve about 4 GPM. The system
has internal regulators to adjust the flow accordingly.
Also today, wafers were polished. The average uniformity was ~6%. So,
we're getting better with each attempt.
Doc
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Note 62.37 CMP.B1 37 of 292
SUBPAC::LANDRY 17 lines 7-OCT-1994 16:09
-< Tighten your belt boy! Clean your plate too! >-
--------------------------------------------------------------------------------
A little late...........
The polish table was experiencing a "jerking" situation upon intial
rotation of the table, but would quickly smooth out (in about a second
or two). It was found that a belt had stretched and was a little
loose. The rep when in and made a few adjustments to improve the per-
formance. There was a little bit of a learning curve to adjusting this
belt, but it got done just fine by the time it was over.
The new -2 micron plates for the carriers came in and have been
installed on the system. Their respective serial numbers and final
height adjustments have been recorded in the log book.
Process Engineering personnel are beginning to exercise the system to
familiarize themselves with parameter adjustments.
Doc
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Note 62.38 CMP.B1 38 of 292
PATE::GEE 2 lines 14-OCT-1994 11:11
-< new carrier heads >-
--------------------------------------------------------------------------------
The new carrier heads came in and are on the table next to the system.
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================================================================================
Note 62.39 CMP.B1 39 of 292
SUBPAC::LANDRY 25 lines 18-OCT-1994 17:00
-< I knew this day of re-attaching was coming! >-
--------------------------------------------------------------------------------
The system update is as such...............
* We began to re-attach alot of components/covers back onto the
system. They are:
- All five vacuum sensors for the spindle heads were remounted
into their respective positions and bolted down.
- The &$#%*#$ multihead cover was re-installed. It had taken us
several hours to remove it (back a couple of months ago). Well,
putting it back on was just as much fun. We had to loosen all
the surrounding covers prior to the top cover fitting in
properly.
- Four of the five internal arm covers were put back on. The
fifth will remain off the system for now until some additional
checks are performed.
* Tom Crosby, Speedfam rep extrodinare, is presently changing out the
plates on the five carriers. I'm not sure at this time what the
minus micron reading is for the new plates. It will be recorded
as usual in the on-line log book along with the respective serial
numbers.
Doc
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================================================================================
Note 62.40 CMP.B1 40 of 292
SUBPAC::LANDRY 7 lines 27-OCT-1994 13:12
-< Whats that on your plate? >-
--------------------------------------------------------------------------------
We shipped out fifteen (15) carrier pressure plates to Speedfam today.
They are being returned to have new film put on them. Yesterday, we
received in five new filmed plates. They have not been installed on
the carriers yet.
Doc, BJ, Bob
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Note 62.43 CMP.B1 43 of 292
SUBPAC::LANDRY 21 lines 10-NOV-1994 12:03
-< Here's the "condition" of the "pad"!!! >-
--------------------------------------------------------------------------------
This morning, we (Brian Bobby, and I) took a look at the problem
concerning the Wet Mode functionality. It was noted that the center
section of the pad was not getting during wet mode operation. After
a quick examination of the plumbing, we decided to just swap the DI
water line with the "optional" slurry line at the base of the rinse
tub. The slurry line is not used at this time. It is an option
that may be experimented with in the future. Anyway, this solved the
problem. If it decided that slurry will be used at the conditioner
arm, we will return the lines to their proper spots.
Also, when we removed the cover from the conditioner arm, we found the
drive belt to the conditioner head/drive motor was not hooked up. This
is not to be confused with slipping off! We mean that the belt was
removed and tucked away neatly in the arm cavity. It is believed that
Process Eng. and Speedfam reps performed this task due to the drive
mechanism causing excessive wear to the pad. It will be left in this
state until it is deemed needable (is that a real word? If not, it
is now!).
Doc / BJ / Bobby
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Note 62.44 CMP.B1 44 of 292
ASDG::POIRIER 6 lines 10-NOV-1994 23:35
-< conditioning pad >-
--------------------------------------------------------------------------------
* The pad did not dry out during WET IDLE mode tonight. Looks like
swapping the tubing is working out fine. Good idea 1st shift!
John.
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Note 62.45 CMP.B1 45 of 292
ASDG::POIRIER 5 lines 11-NOV-1994 23:51
-< RTC status changed to BGN_EXTERNAL >-
--------------------------------------------------------------------------------
* The status of all CMP tools in RTC was changed to 'BGN_EXTERNAL'due
to the exhaust shutdown this weekend.
John.
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Note 62.46 CMP.B1 46 of 292
SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 9 lines 15-NOV-1994 16:17
-< Passdown for 11/15 >-
--------------------------------------------------------------------------------
Doc, Earl and myself rebuilt the carriers
that were on the machine with the new plates
with the white film already on them. Doc
reinstalled the carriers on the machine and
the pad was conditioned by Larry. B1 is
currently in MQC for Larry.
BJ
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Note 62.47 CMP.B1 47 of 292
SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 6 lines 16-NOV-1994 15:16
-< Passdown for 11/16 >-
--------------------------------------------------------------------------------
I finished up rebuilding as set of plate and pads
with the DF-200 film on them. We will be checking them
on the system tomorrow.
BJ
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Note 62.48 CMP.B1 48 of 292
SUBPAC::LANDRY 19 lines 17-NOV-1994 16:09
-< Whats up with the Cup? >-
--------------------------------------------------------------------------------
The system went down today for "one or more cups not down" fault.
ALL cups were down put the system didn't acknowledge it. Using
the I/O's, it was determined that cup # 5 was the culprit. The
"cup down" sensor needed to be adjusted. Brian and myself performed
this task. We throughly tested the results by manually moving the
cup up/down through the use of the software. The switch responded
correctly to the respective positions.
Also, upon arriving at the system, we found one of the process doors
to be off it's track. This has happened numerous times since we first
acquired the system. We were able to "coax" it back on it's track
without removing any hardware. It needs to be mentioned that if the
doors are not sliding freely, stop moving it and call EE to correct
the problem. Moving the doors once they have shifted off track has
a tendency to generate alot of particles, not to mention excessive wear
to mechanical components.
Doc / BJ
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Note 62.49 CMP.B1 49 of 292
PATE::GEE 3 lines 17-NOV-1994 23:39
-< TCU >-
--------------------------------------------------------------------------------
Insulated all the TCU lines and wrapped with aluminum tape.
Bob
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Note 62.50 CMP.B1 50 of 292
SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 9 lines 18-NOV-1994 16:54
-< Passdown for 11/18 >-
--------------------------------------------------------------------------------
A wafer let loose under possibly carrier #1 and
took the rest of the (4) wafers out to lunch, free of
charge. Larry investigated the carriers and really
found nothing wrong. B1 will stay down until Monday when
the carriers are taken care of.
BJ
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Note 62.51 CMP.B1 51 of 292
SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 11 lines 21-NOV-1994 16:46
-< 1st shift passdown >-
--------------------------------------------------------------------------------
We rebuilt all (5) carriers and installed a new pad.
After the pad was conditioned, Larry ran some wafer to
check things out. After (15) wafers, LOAD CUP #5 sensor
screwed up again. Doc tweaked it in and we checked it
by repeatedly sending the cup up and down.
BJ
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Note 62.52 CMP.B1 52 of 292
SUBPAC::LANDRY 6 lines 28-NOV-1994 16:19
-< NO PCW means NO RUN! >-
--------------------------------------------------------------------------------
The system was re-powered this morning after the holiday shutdown. No
problems were observed. Late in the morning, fab 6 lost the process
cooling water which goes to the Neslab TCU. Therefore, the system will
remain idle until the PCW problem has been rectified.
Doc
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Note 62.53 CMP.B1 53 of 292
SUBPAC::LANDRY 7 lines 1-DEC-1994 17:13
-< around the rim and........off >-
--------------------------------------------------------------------------------
Today.....
The system broke another wafer. It wasn't totally annihilated,
just a small section of the outer rim was broken off. Not sure
if the wafer was a little stressed or the system caused it.
Doc
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Note 62.54 CMP.B1 54 of 292
SUBPAC::LANDRY 17 lines 6-DEC-1994 09:33
-< Help me.....I'm drying! >-
--------------------------------------------------------------------------------
This morning,
I walked in to discover that the system was not in it's proper
state, which is "wet mode" of course. So, I turned on the screen to
observe what state it was in........low and behold, it was in a state
of "computer dump"! Tried to reboot the system and it came up with a
"low vacuum" error. This is somewhat normal as the vacuum tank needs
to perform a water dump. So, I gave it ample time to dump but the
error didn't go away. It was discovered that the vacuum pump breaker
had tripped. Reset the breaker and then rebooted the computer. Alas,
the vacuum pump/tank performed as should. The system was then
re-initialized and returned to wet mode, where it is properly wetting!
The pump functionality will need to be watched for awhile as it is
unclear as to how this problem originated (was it the computer?....was
it the pump?)
Doc
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Note 62.171 CMP.B1 171 of 292
ASDG::POIRIER 24 lines 25-JUL-1995 19:28
-< Carrier Plates / Unload FLipper >-
--------------------------------------------------------------------------------
* Carrier Plates:
The system broke wafers for the 3rd time in 24 hrs. This has depleted
our stock of "filmed" carrier plates. There are currently no usable
carrier plates in-house. Seventeen were shipped back to Speedfam
this afternoon for film application. We're expecting a shipment
of 10 plates tomorrow morning. The system will remain down until
the plates arrive and carriers are built.
* Unload Flipper:
The Unload Flipper was mis-aligned with the wafers in the Index
Station Load Cups. This condition was corrected by recalibrating
Unload Flipper Pick-up location by 25 counts towards the "front"
direction.
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Note 62.172 CMP.B1 172 of 292
SUBPAC::LANDRY 12 lines 26-JUL-1995 19:56
-< 80% running >-
--------------------------------------------------------------------------------
We received in 5 pressure plates for a set of carriers. The powers
that be have decided to run only four heads today, leaving head # 4
disabled for the time being.
Jesus and I built four carriers from set A to use. All new
extention rings were used. Uniformity was acceptable on all heads,
although heads three and five were a bit close to the spec limit. It's
possible the omission of head four is the cause, as slurry flows past
the track of least resisstance best.
Doc
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Note 62.174 CMP.B1 174 of 292
SUBPAC::LANDRY 26 lines 27-JUL-1995 19:34
-< a first, the re-use of film! >-
--------------------------------------------------------------------------------
What a week we're having..............
Arrived to find the system down and out for the count. A wafer spit
out at the table again last night. No, it wasn't head four! Well,
with only one new pressure plate in-house, they could go no further
than to clean up the debris and sit tight.
After the morning meeting, a plan was made to attempt to salvage two
of the carriers involved in the crash. The film on them looked ok, but
the extention rings would need to be replaced. These two, along with
the known good plate, were built and installed.
Prior to running the system, a couple of major alterations were made.
Some new pads had come in, so we reverted back to them. Also, a new
diamond conditioning ring was installed, incorporating the new style
mounting plate equiped with groumets. The new ring eliminated the
infamous "moose" call feature associated with the old style.
Break-in wafers went well. MQC's, the first attempt were marginal.
One of the heads had 11.*% uniformity and the other two wavered on the
border line. The second pass went better with all heads improving a
few %. So, we're running three heads.
A shipment of plates should be here tomorrow (late morning hopefully).
Doc / Jesus
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Note 62.175 CMP.B1 175 of 292
PATE::GEE 15 lines 31-JUL-1995 08:18
-< Low N2 Flow / Scrub station >-
--------------------------------------------------------------------------------
Came in tonight and found the system wasn't in "wet mode".
There was an error "scrub station not home", this error
must have kicked the system out of wet mode.
The pad was dry, no idea how long it was out of wet mode.
Cleaned and lubricated the slide rails for the scrub station
and put it into wet mode, replaced the pad.
At 6:30 this morning the system errored for "low n2 flow"
twice, left a message on 2 numbers for Air Product to find
out if work is being done. George C. will bring it up in
with them this morning.
Earl noticed some vibration during the polish cycle this morning
just before the N2 Error. We need to bring this up with the feild
rep. He will be here this morning.
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Note 62.176 CMP.B1 176 of 292
SUBPAC::LANDRY 17 lines 4-AUG-1995 19:35
-< whats left for the PM >-
--------------------------------------------------------------------------------
The system continues to run well since the new conditioning wheel was
installed last week. Most of the month has been performed in intervals
this week. All that remains is the changing of the peristaltic pump
lines. If time permits, please perform the task. If the system is not
available, I'll get to it tomorrow sometime.
Please try the clear tygon tubing (that we use on the Strasbaughs) if
you change it. Use the manual polish screen to flow slurry to see if
the rate changes.
If the lines get changed, a check sheet can be filled out and put in
the Notes file. ALL other items on the monthly are complete.
Don't forget to restart the tape as it's limit gets close.
Doc
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Note 62.177 CMP.B1 177 of 292
PATE::GEE 6 lines 9-AUG-1995 07:18
-< Broken Wafers / Retainer rings >-
--------------------------------------------------------------------------------
* While running verification wafers after a scheduled pad and
carrier change, the system broke wafers on the pad. Two Speedfam
Rep.s were here and saw it happen, also the video was on at the
time. The Rep.s will be back around 8:00 am this morning. Two
carriers have been built ( by them ).
There is only one more retainer ring left in-house.
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Note 62.180 CMP.B1 180 of 292
SUBPAC::LANDRY 37 lines 10-AUG-1995 16:34
-< Some runouts done, carrier rebuilt! >-
--------------------------------------------------------------------------------
After the wafer breakage............
It appears that the wafer breakage problem has been happening at the
head #4 spot more than all other heads combined, but not exclusively
there. Anyway, we performed several checks today to try and determine
the exact cause. Here's what transpired:
* Spindle runout was performed an head #4. There was some play, but
not that much to cause a problem. Two other heads were checked
(heads 1 + 3) and they had approximately the same amount of play.
* The table runout was then done. No problem there.
* Next to look at would be the carriers used on head #4. Four of the
last five head 4 breakages happened on set B (carrier 4B). So,
carrier 4B was dismantled and checked out. Nothing unusual was
found. The gimballing effect was smooth and sturdy. No play was
evident within the assembly. So, the carrier was cleaned up and
rebuilt. We'll give it a try after the up-grade is complete.
* The old diamond wheel had been re-installed prior to this last wafer
breakage problem. The newer one was scratching wafers abit too
much. Speedfam will send us out a new diamond wheel replacement.
* A couple of recipes had also been changed prior to the breakage.
This change is not believed to be related to any of the breakage
problems.
* This afternoon, we unpacked 5 huge boxes of up-grade materials and
brought them to the fab. They are currently on the cart between A2
and B1. Please leave them there, ON THE CART!
* The 1st wave of up-grades will be starting tomorrow at 8:00 AM.
Although, there is a possibillity that some items may start tonight.
Doc / Jim / Larry / Speedfam Reps
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Note 62.182 CMP.B1 182 of 292
SUBPAC::TOOKER 17 lines 11-AUG-1995 16:10
-< phase 1 upgrade status >-
--------------------------------------------------------------------------------
CMP.B1 Phase 1 Upgrade Status Report for 8/11/95
------------------------------------------------
The Phase 1 upgrade is well under way. The original schedule called for the
work to begin at 8:00 am on 8/11. Due to the system being down all day on
8/10/95 because of wafer breakage, SpeedFam was able to get a 7+ hour head
start on the work. As of 4:00 pm, all Day 1 tasks have been accomplished,
and they are 1 shift ahead of schedule. This included all necessary dis-
assembly work. The 2nd shift team has arrived and work has begun on items
listed for Day 2.
No problems have been encountered so far. We are looking for continued smooth
sailing.
Jim T.
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Note 62.184 CMP.B1 184 of 292
SUBPAC::TOOKER 106 lines 19-AUG-1995 16:08
-< CMP.B1 UPGRADE STATUS FOR 8/19/95 >-
--------------------------------------------------------------------------------
Digital Equipment Corporation I N T E R O F F I C E M E M O
To: Lou Golato Date: 08/19/95
Marco DeMartino From: Jim Tooker
Steve Otenti Dept: FAB6 CMP Equipment Engineering
Jim Zimage DTN: 225-7073
karl Koch Loc/Mail Stop: HLO1-1/T09
George Cumming DEC NET: SUBPAC::TOOKER
CC: CMP Team
SUBJECT: CURRENT STATUS OF CMP.B1 UPGRADE AND RECOVERY PLAN
Background Information:
-----------------------
On 8/11/95 a scheduled 6 day major upgrade began on the SpeedFam CMP-V Planar-
izer (CMP.B1). These upgrades were offered to Digital free of charge as a part
of SpeedFam's ongoing tool reliability improvement program. This upgrade in-
cluded the following items:
1) Installation of a wafer loss detection system to detect the
presence of whole or broken wafers on the polishing pad and
shut down the tool before those wafers can cause damage to
other wafers and wafer carriers. The addition of the wafer
loss detection system to this tool will have a major impact
on tool availability. Just since 5/20/95 we have experienced
13 down events for broken wafers. These 13 down events equate
to 65 broken wafers and ~208 hours of lost production time.
While the wafer loss detection system does not eliminate wafer
breakage, it does minimize the number of broken wafers and sub-
sequent recovery time. If wafer loss detection had been pre-
sent during the previously mentioned 13 down events for breakage,
the impact could have been potentially reduced to 13 broken
wafers and ~52 hours of lost production time.
2) Relocation and reconfiguration of stepper controllers to prepare
for eventual upgrade from software to hardware cassette elevator
limit switches. This upgrade was combined with #1 because the
stepper controllers would have been removed anyway.
3) Replacement of the optical wafer pre-aligner with a mechanical
pre-aligner. Also performed at this time because of tie in to
#1, several problems have occurred in the field with optical pre-
aligners at other SpeedFam customer sites.
Problems encountered to date:
-----------------------------
In the performance of this upgrade, it was necessary for SpeedFam to completely
remove from the system several major components such as the robot, wafer mapper,
13 servo controllers, wafer pre-aligner, frequency inverter, stepper motors, and
lots of cables and wires. The component removal and re-installation phases of
the upgrade went very well and according to the planned schedule. Since initial
power-up after component re-installation, the following problems have occurred
and have caused major slips in the planned schedule:
1) Three damaged servo controllers. (new controllers have been installed)
2) Electrical noise interference causing problems with the flipper
box controller. (new shielded ribbon cables have been installed)
3) Carrier rotation problems. (a wiring problem has been fixed)
4) Damaged DCX controller board modules. (some modules replaced and more
replacement modules are due in today)
5) Cassette elevator operation problems. (new encoders are due in today)
Trouble shooting of the above listed problems, testing of the wafer loss
system, and re-calibration of the various components has caused a three day
slip in the planned schedule to date. More schedule slips are possible as
not all of the problems have been solved.
Recovery plan:
--------------
To complete the upgrade work and minimize further schedule slips, the follow-
ing recovery plan has been implemented:
1) The original four member team from SpeedFam which was on site
from 8/11 thru 8/17 has been relieved by a fresh four member team.
The new team includes SpeedFam's leading engineer on software and
motion controllers and an electrical engineer.
2) SpeedFam management has committed to having their people work in
two person shifts around the clock until all problems are identified
and resolved.
3) Once production has resumed on the tool, SpeedFam has committed to
providing a combination of on site/on call local coverage until
Operations has cleared away the backlog of lots now sitting in CMP.
4) There will be an immediate re-evaluation of the SpeedFam consignment
parts package to ensure that all critical parts will be stocked on
site.
If anyone has any questions regarding the upgrade work, please do not hesitate
to contact me.
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Note 62.185 CMP.B1 185 of 292
SUBPAC::TOOKER 7 lines 21-AUG-1995 15:36
-< PLEASE READ.......CMP.A2 EMO PROBLEM >-
--------------------------------------------------------------------------------
Due to the intermittent EMO problem we are experiencing in CMP.A2, it will be
necessary to activate the side sliding door interlocks until the parts arrive
to repair this problem. The necesary parts are on order and should arrive on
8/22. Until that time, please to not disable any system interlocks.
Thanks,
Jim Tooker
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Note 62.186 CMP.B1 186 of 292
ASDG::POIRIER 27 lines 21-AUG-1995 20:25
-< Invertor Communication Timeout error / Scrubber Travel Problem >-
--------------------------------------------------------------------------------
* "Invertor Communication Timeout" error problem:
The Speedfam rep increaced the rate of Table decceleration. This
change was made to ensure that the Table comes to a complete stop
after the conditioning cycle. It appeared that the Table was still
rotating slightly at the beginning of the Auto Polish Cycle. If the
Table has not completly stopped when the Polish Cycle initiates, a
Invertor Communication Error will result.
* Scrubber movement problem:
The Scrubber required numerous assists today. Although there appears to
be adequate lubrication on the rails, the scrubber continually binds
during its travel. A disassembly, cleaning & inspection of this unit
should be done asap. A future planned upgrade of this assembly will
take care of this problem.
John & Brendan
time allows.
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Note 62.187 CMP.B1 187 of 292
PATE::GEE 7 lines 22-AUG-1995 07:35
-< Clean station >-
--------------------------------------------------------------------------------
The clean station wasn't making it to the front position
so the field Rep. adjusted the air solenoid for forward
travel 2 1/2 turns. Relubricated the guide rails with
oil.
We are only running with 3 heads do to do to poor uniformity,
carriers need to be built.
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Note 62.188 CMP.B1 188 of 292
ASDG::POIRIER 24 lines 22-AUG-1995 19:06
-< Pads / Carriers / Scrubber / Uniformity >-
--------------------------------------------------------------------------------
* Carriers:
Rebuilt 5 Carriers on A shift today. We need more plastice washers
for the retaining ring screws. We couldn't find them in SGMR, does
anyone know if we have them in house?
* Uniformity problems:
Ran with 3 spindles all day due to poor uniformity on 2 heads.
* Pads:
Still experiencing short pad life. (<375 wafers per pad)
* Scrubber:
The scrubber continues to limp along. It needs constant lubrication
to prevent binding on the rails. This causes constant "scrubber
timeout" errors/alarms.
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Note 62.190 CMP.B1 190 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 19 lines 24-AUG-1995 07:35
-< Wafer detect failed >-
--------------------------------------------------------------------------------
Late on 2nd shift the system halted when the second
set of (5) wafers where ready to touch down. The error
on the screen was "INVERTER ERROR" and the head by head
error of "CARRIER ROTATION TIMEOUT." At first we suspected
that the slurry never came on. We started things over again
and it happened again. It we ran 25 wafers without the
wafer dectect on-line and there were no errors. When we
put the dectect back on line, it failed. Tony noticed that
the detector sensor for head #1 was out of position and may
of cause a false reading and prevented the machine from
starting up. The sensor was repositioned and we tried things
out again. It failed again... It was decided upon that we
would run the system without the wafer dectect on-line just to
give the machine back to production. When time permits, Tony
is ready to go after the sensor alignment.
Bob/BJ
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Note 62.191 CMP.B1 191 of 292
STRATA::FINN 23 lines 25-AUG-1995 16:26
-< B1 "low vac alarm" >-
--------------------------------------------------------------------------------
Speedfam "LOW VACUUM ALARM"
Low vacuum alarm occurred on B1 today. When tech tried to reboot.
Circuit breakers for carriers 4 and 5 tripped. Reset breaker. Homed table.
Vacuum pump was not draining. Tried several mappings of cassettes. Top
half of vacuum tank read 23"HG, when purge N2 turned on no dump occurred, but
pressure leaked back into vacuum tank top half indicated by rise in vac
gauge to 5" HG. Intermittently the tank would drain properly, and no rise
in top vacuum gauge was noticed until N2 was shut off and inline pneumatic
isolation valve opens, causing momentary increase in pressure (as expected),
as top and bottom compartments are evacuated. Conclusion was that
isolation valve was leaking by, possibly caused by dried slurry or wafer chips.
Hooked water line to input of vac tank and flushed with water
while cycling isolation valve. Replaced water line with N2 line and flushed
pump.
Ran from 11:30 until 4pm. Has not failed yet for "vac low" but tank is draining
intermittently again. DOC has isolation valve coming in tomorrow.
We currently looking "requirements and time" to take A2 off line and hook up
B1 to A2's pump.
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Note 62.192 CMP.B1 192 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 19 lines 26-AUG-1995 07:49
-< Wafer crash >-
--------------------------------------------------------------------------------
Good news and bads news this morning....
The good news... The mega upgrade with the introduction
of the wafer loss detect system works great. An execise
wafer slid out of head #5 and the machine stopped dead in
its tracks. All of the heads stayed down and the table
stopped as it is suppose to. Carriers #1, #2 and #3 are
fine. #5 looks ok but the ring got chewed. Head #4 didn't
break its wafer but has a trashed ring. We cleaned up the
mess, installed a new pad and conditoned it. It's now in
wet idle awaiting C shift evaluation....
The camera did pick up the crash but the really isn't a
direct view of head #5. Just hit play and the crash is within
the few seconds of viewing.
Brian x 2
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Note 62.193 CMP.B1 193 of 292
PATE::GEE 13 lines 29-AUG-1995 06:56
-< Indexing table >-
--------------------------------------------------------------------------------
The indexing table ran into all five active pedestals while
in the up position and became jammed. Had to remove all the
pedestal air cylinder assembles to release the indexing table.
Re-installed the cylinder assembles and re-aligned the pedestals
and load/unload cups, as well as adjusted the pedestal sensors.
Replace damaged index table feed thru seals for cups #3 and #4.
There are 2 new air cylinders and pedestals arriving tonight
along with another field service rep. The system is running
fine but these parts will need to be replaced due to damage
from the crash.
Bob/Doc/Roger
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Note 62.194 CMP.B1 194 of 292
STRATA::FINN 13 lines 29-AUG-1995 18:03
-< Load cup sensor >-
--------------------------------------------------------------------------------
Load Cup Sensor
Errors on load cup # 5. Sensor not seeing down position of cup.
Bob tried to adjust sensor but found (cup actuator/pedistel) bent out of round
due to crash. Doc and Bob repalced this pedisteland readjusted the sensor.
Also had "Head 5 Rotation Error". Reset circuit breaker. aok
Bob/Doc
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Note 62.195 CMP.B1 195 of 292
STRATA::FINN 60 lines 29-AUG-1995 18:04
-< Manual Tank Dump Procdure >-
--------------------------------------------------------------------------------
Scope: The following documents the addition of a quarter turn isolation valve
to simplify the purging of B1's Vacuum tank. And the recommended
procedures and frequency for the purge.
Safety: After insuring there are no wafers on the system. Isolated the
electrical power by actuating the systems EMO switch. Tagout the
switch. Inform others in the area that this system is locked out.
Attempt to operate the system to insure that power has been removed.
Procedure:
Remove side panel containing vacuum pump and pneumatic solenoids.
Remove the next side panel to access vacuum tank and drain line
Closed new 1/4 turn isolation valve so the handle is across the 3/8
line as compared to inline with it. This valve isolates the vacuum pump
from the tank and is located near "R6 Head Ball adj."
Turn the red actuator on Solenoid "SV 28 Vacuum tank dump" 180'
clockwise until it stops.
Turn red actuator on solenoid "SV 19 Vac tank blow out" Counter
clockwise until it stops.
Pressure will start to build inside the tank and can be read on
the tanks vacuum gauge. When the gauge reads higher than 0"HG the
drain will start to purge.
When most of the water has been removed, you may increase the flow
to through the solenoid by the adj. needle valve under this solenoid
and you may read this increase pressure on the associated gauge.
When the water has been removed and air is running through the tank
drain, you must close the red actuator on solenoid
"SV 19 Vac tank blow out" clockwise until it stops. The dot on this
solenoid should now be inline with the other solenoids in the manifold.
Readjust the pressure of the solenoid via the needle valve if it had
been adjusted. Insure that it NEVER EXCEEDS 10 PSI as stated on the
solenoid gauge. Severe damage to the tank could resultif the pressure
as read on tank gauge exceeds 10 PSI
Then turn actuator on solenoid "SV 28 Vacuum tank dump" counter
clockwise until it stops. The dot on this solenoid should
now be inline with the other solenoids in the manifold.
Open the green 1/4 turn isolation valve so the handle is inline with
the 3/8 hose.
Replace all covers.
Return EMO to its operational state.
Refer to the maintenance Spec for system power up procedure.
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Note 62.196 CMP.B1 196 of 292
ASDG::POIRIER 33 lines 29-AUG-1995 18:27
-< Follow-up to last night's Index Table collision passdown >-
--------------------------------------------------------------------------------
* Indexer Problem - Follow-up from last night's passdown:
The following is a description of the events leading up to
the collision between the Index Table and the Send Cup
Cylinder Assemblies:
1) While loading wafers from the Load Station to the Index Table
in Auto Cycle, the Unload Flipper began its sequence without
a wafer present in the Unload Cup. (SHOULDN'T HAVE HAPPENED)
2) Four of the Send Cup Cylinder Assemblies rose-up while the
Index Table was rotating. This caused a collision between
the Load Cups, which are mounted in the Index Table, and
the Cylinder Assemblies, which are mounted on the deck just
below the Index Table. (THE CYLINDER ASSEMBLIES SHOULD
NOT RISE WHILE THE INDEX TABLE IS ROTATING).
3) Two errors repeatedly appeared on the screen, "All Send Cups
are up" and "One or more Send Cups is up".
4) Since the Index table never completed its sequence, the Multihead
and the Conditioner Arm locked-up.
5) The system was then rebooted but the initialization sequence
would not complete due the Index Table collision. Also, the
two error messages mentioned in item #3, would not clear from
the initialization screen.
John, Roger & Brian C.
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Note 62.197 CMP.B1 197 of 292
PATE::GEE 27 lines 30-AUG-1995 01:53
-< Air Cylinder replacement / Vacuum tank valve >-
--------------------------------------------------------------------------------
The Speedfam rep. came in tonight at 8:00 pm and checked the
system out while it was running. He said that it was functioning
well enough to run until morning. He brought 4 air cylinders and
2 pedestals, these are all that were available. We have 1 air
cylinder in stockroom #6. These are not the new upgrade type, these
are the same type we have in the system now.
He will be back in at 8:30 am to discuss what needs to be done,
and will be here until Friday.
* Air Cylinder replacement.
To replace the 5 air cylinders and fix the water leaks under the
air cylinder assemblies, it will required 3 to 4 hours. This includes
removing and re-installing all 5 air cylinder brackets and assembles
that attach them to the base of the machine.
* Vacuum Tank valve replacement.
This has never been done and can possible be a very difficult task,
he estimates between 4 and 6 hours.
His name is: Bob Gugerty Beeper # 1-800-593-5880
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Note 62.198 CMP.B1 198 of 292
PATE::GEE 17 lines 30-AUG-1995 05:50
-< Vacuum tank purge / scrub station >-
--------------------------------------------------------------------------------
* We have been blowing the water out of the vacuum tank every
4 to 5 hours, using the new procedure. We found a large quantity
of water in the tank each time. The last time the procedure was
performed was at 6:00am.
* Had to clean and lubricate the scrub station guide rails twice
tonight. The DI water cascades onto the guide rails and keeps
washing off the lubricant.
* The Field service rep. recommends we lubricate the load cup
air cylinder shafts on a weekly bases with the same lubricant
used for the scrub station guide rails. This will help the cups
travel up and down smoothly.
B & D shift
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Note 62.199 CMP.B1 199 of 292
SUBPAC::LANDRY 28 lines 30-AUG-1995 20:26
-< cylinders and no rotating head problems >-
--------------------------------------------------------------------------------
The ride continues rough.........
The system continues to run on three heads (1, 2, 5). Anyway, those
heads were running fine when an alarm appeared for one or more cups
not down. Found all cups to be seated, but the I/O module for cup 2
wasn't being made. Discovered that the sensor was positioned under the
pedistal, hence it couldn't see the pedistal position. Mechanically
adjusted the sensor and tested numerous times. All looked functionally
well. After several runs, the problem reappeared. Same results, the
sensor under the pedistal.
We then made a decision to remove the cylinder and install a new one.
The new one was setup and tested. All is well.
Upon inspection of the old cylinder, the pedistal showed signs of
slight warpedness. Also, we'll need to start lubricating the cylinder
shafts occasionally.
After that, the system was run again and the rotation on head 5 wasn't
working as it touched down to polish. This cause the wafer to crash.
The breaker for that motor was tripped. This has tripped several times
since the retrofit. Speedfam has been notified of this occurance and
will investigate. The mess was cleaned up and D shift is taking over
from here. Some carriers will need to be rebuilt. No word on whether
any new rings have come in yet. SGMR needs to be checked for this
info.
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Note 62.200 CMP.B1 200 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 21 lines 31-AUG-1995 07:04
-< Wafer breakage, LOAD problems >-
--------------------------------------------------------------------------------
Came in to helping Doc clean up after a wafer crash.
Worked with rep with some leaks from under the index
table. Two carriers were rebuilt and a pad was installed.
Heads #1, #2, #3 and #5 were activated. After 40 or so
wafers, the wafer under #1 slid out and the machine halted.
The wafer did not break. I used a questionable ring since
there none in stock. Rather than risk a crash, #1 was taken
off line. MQC's failed for the first round and Earl is
going to check it out to see what needs to be done. The
pad that was used came from Larry's office. The other two
on the Vidmar came from the same lot.
While running the final break-in wafers, the LOAD flipper dropped
the wafer at the aligner and never knew it. The wafer sat on the
aligner when the next wafer was placed on top of it. Still no error.
I had to ABORT the run since the two wafers were now double stacked
in the index table.
BJ
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Note 62.201 CMP.B1 201 of 292
SUBPAC::LANDRY 9 lines 31-AUG-1995 20:20
-< valve replaced........vacuum tank one. >-
--------------------------------------------------------------------------------
The vacuum tank internal valve was replaced today. Took about 2 and
a half hours, first time ever performed in the field.
Most of the quarterly is done. All the weekly section is done. All
but the replacement of the peristaltic lines on the monthly is
complete. Just the quarterly section and the slurry pump lines remain.
Doc
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Note 62.202 CMP.B1 202 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 10 lines 1-SEP-1995 03:18
-< Down for the count >-
--------------------------------------------------------------------------------
A 50 wafer verify was done with SpeedFam Rep, Bob, and
the vacuum tank looks good.
The Quarterly PM was finished up.
B1 failed the final round of MQC's. Management's request
was to log the machine down until the pad show up today. The
pad was removed and placed in wed idle.
D shift
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Note 62.203 CMP.B1 203 of 292
SUBPAC::LANDRY 26 lines 1-SEP-1995 18:13
-< pads, hoses, breakers..... >-
--------------------------------------------------------------------------------
Couple of things today........
* New Rodel pads showed up. In a rush to get them on line, I was
subject to mule work. Pads came in at HLO1 dock. Had to be
received in at fab 6 dock. I had to haul 20 boxed pads all the
way over to the sub fab, get them received and truck a few up
stairs to the fab. A job not fit for man nor beast.
Five Speedfam pads were brought into the room and the other five
went into stock.
* Upon breakin of the pad, the slurry flow in pump one stopped. The
line was pinched at the peristaltic pump head. Repositioned the
line and resecured same.
* Later on, the multihead never picked up the five wafers from the
load cups. Not sure what happened here, but it appears that the
computer interface went askewed. It also had no rotation on
carriers 4 & 5. The breaker had blown, again. This seems to be
happening daily since the retrofit took place. The rep has been
told of this. He will investigate the issue.
* Currently running MQC's.
Doc
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Note 62.204 CMP.B1 204 of 292
SUBPAC::LANDRY 45 lines 2-SEP-1995 19:33
-< Scrubber rotation non-existant >-
--------------------------------------------------------------------------------
The system is currently down for NO scrubber brush rotation.
Whats been done so far:
* The system was working fine until Jim noticed no brush rotation.
* I checked for a broken belt, but the belt(s) and coupling were intact.
* Checked the circuit breaker, all was fine.
* Checked the motor controller (#18). Found a connector on it that
had two wire attachments. One wire was "holding on" by 1 strand of
wire from the sheathing. The other wire was connected by two strands.
It's obvious that the same connector was used from the original
installation as both wires were spliced about an inch back from
the connector. The strands that were loose from the connectors were
all over the place. Vibration from the MHTA travel could have
caused problems. The pins used in the connector were pretty mangled
as well. Checked around and couldn't locate any replacement pins.
Therefore, I soldered a couple of pins, taped them individually for
insulation purposes and reconnected to the proper pins. No success.
* Voltage was checked at the scrub brushes motor. The voltage isn't
getting to it. Don't quote me, but I believe we should be seeing
about 4 VDC when the system is idle and the brushes rotating (not
spinning at high speed during the clean step, which should read
about 60 VDC when it's high speed spinning).
* So, we have voltage at the motor controller and lose it before it
reaches the motor. The cable in the flex track has got to be bad
again. I began pulling the old/running the new wire through the
system. It is currently snaked through a little more than half way.
Not to make any excuses, but one person trying to snake the wire is
almost impossible. I got as far as I could. Hopefully, Bobby and
Roger won't have a tough a time as I. Sorry to leave the job in this
kind of shape.
* Once done, this should take care of it. If not, the Speedfam Hotline
number is 800-276-9149. I've have talked with them (Ian) today about
this situation. They feel confident that this is the solution too.
Doc
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Note 62.204 CMP.B1 204 of 292
SUBPAC::LANDRY 45 lines 2-SEP-1995 19:33
-< Scrubber rotation non-existant >-
--------------------------------------------------------------------------------
The system is currently down for NO scrubber brush rotation.
Whats been done so far:
* The system was working fine until Jim noticed no brush rotation.
* I checked for a broken belt, but the belt(s) and coupling were intact.
* Checked the circuit breaker, all was fine.
* Checked the motor controller (#18). Found a connector on it that
had two wire attachments. One wire was "holding on" by 1 strand of
wire from the sheathing. The other wire was connected by two strands.
It's obvious that the same connector was used from the original
installation as both wires were spliced about an inch back from
the connector. The strands that were loose from the connectors were
all over the place. Vibration from the MHTA travel could have
caused problems. The pins used in the connector were pretty mangled
as well. Checked around and couldn't locate any replacement pins.
Therefore, I soldered a couple of pins, taped them individually for
insulation purposes and reconnected to the proper pins. No success.
* Voltage was checked at the scrub brushes motor. The voltage isn't
getting to it. Don't quote me, but I believe we should be seeing
about 4 VDC when the system is idle and the brushes rotating (not
spinning at high speed during the clean step, which should read
about 60 VDC when it's high speed spinning).
* So, we have voltage at the motor controller and lose it before it
reaches the motor. The cable in the flex track has got to be bad
again. I began pulling the old/running the new wire through the
system. It is currently snaked through a little more than half way.
Not to make any excuses, but one person trying to snake the wire is
almost impossible. I got as far as I could. Hopefully, Bobby and
Roger won't have a tough a time as I. Sorry to leave the job in this
kind of shape.
* Once done, this should take care of it. If not, the Speedfam Hotline
number is 800-276-9149. I've have talked with them (Ian) today about
this situation. They feel confident that this is the solution too.
Doc
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Note 62.205 CMP.B1 205 of 292
FABSIX::R_POIRIER 6 lines 3-SEP-1995 04:19
-< Scrubber brush rotation >-
--------------------------------------------------------------------------------
We found, removed and replaced the section of cable that had the broken
wire in it. After putting the scrubber back together we tested it and
scrubber works fine.
B Shift
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Note 62.206 CMP.B1 206 of 292
PATE::GEE 18 lines 5-SEP-1995 07:25
-< Scrub station travel problems >-
--------------------------------------------------------------------------------
* The scrub station was timing out going in and out everytime.
Lubricated 2 inches out from the in position with NSK#2.
* We noticed that when the scrubber return to the home position
it would bounce out away from the home position and time out,
also the home sensor is being used as a hard stop. The travel
speed seemed to be good. To cushion the sensor and limit the
bounce we cut a very small piece of polishing base pad and placed
it were the sensor hits the steel wall. It worked fine the rest
of the night. Hopefully this temporary fix will last until the
scrub station can be permanently repaired.
* The unload flipper problems that caused a wafer to break on
A shift were not observed tonight on B shift. The flipper
operated with no problems, very smooth.
B shift
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Note 62.207 CMP.B1 207 of 292
SUBPAC::TOOKER 12 lines 5-SEP-1995 13:06
--------------------------------------------------------------------------------
SpeedFam now has a 24 hour technical support line. The number is 800-276-9149.
This number must be called by anyone seeking technical support no matter what
time of day and for ordering parts after hours. SpeedFam personnel will be
available from 11:00 AM to 8:00 PM to take the calls. After hours, weekends,
and holidays the call will be picked up by an answering service and they will
notify the SpeedFam person currently on call. Do no contact any SpeedFam
people (such as Mike Slepikas) at their direct lines for technical assistance.
Many times these people are away from desks or traveling and will not get your
call. This could slow down the whole process and cause longer down situations.
Thanks,
Jim
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Note 62.208 CMP.B1 208 of 292
SUBPAC::LANDRY 19 lines 5-SEP-1995 19:15
-< pads.....carriers >-
--------------------------------------------------------------------------------
Today.......
* The polishing pad was changed.
* 5 new rebuilt carriers were installed.
* The system was caked with slurry at the polish table section.
We are in need of a new slurry drain feedthrough to attach to the
slurry containment ring. A couple have been broken off lately.
Please do not use these plastic fittings as "grips" to turn
the 800 pound table!
* There is currently a set of 5 carriers that need to be dismantled,
plates wrapped up and ready to ship out. Put the used plates on
the cart, not the carrier rebuild table as that is reserved for new
plates.
Doc
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Note 62.209 CMP.B1 209 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 10 lines 7-SEP-1995 06:02
-< Wafer hooked by Unload Flipper >-
--------------------------------------------------------------------------------
One finger on the unload flipper hooked a corner of a the
wafer after it was lifting from dropping the wafer onto the
cleaning station. This caused the wafer to lift up and fall
between the (4) supports. When the shuttle came in, it wedge
the wafer more. Luckily, the shuttle was manually moved back
and the wafer did not break. Further wafer runs went through
without any problems.
D shift
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Note 62.210 CMP.B1 210 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 8-SEP-1995 00:14
-< head rotation and flipper alignments >-
--------------------------------------------------------------------------------
Found broken wire from power supply #3 to the #5 motor
controller and #3 controller which is a likely suspect for
the rotation and homing problems.
Re-adjusted the unload flipper to pick-up and drop off
wafers smoother.
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Note 62.211 CMP.B1 211 of 292
PATE::GEE 6 lines 10-SEP-1995 06:18
-< slurry lines >-
--------------------------------------------------------------------------------
Had to replace a broken slurry line at the peristaltic pump.
We replaced both lines and cleaned the system.
Replaced the pad do to high wafer count 1066 and poor removal rate.
B Shift
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Note 62.212 CMP.B1 212 of 292
SUBPAC::LANDRY 13 lines 10-SEP-1995 19:47
-< slurry problems......minor stuff >-
--------------------------------------------------------------------------------
A weird things happened today. Slurry was constantly flowing and
not shutting off. Found the the incoming pressure fromt the loop
was excessively high (@50 PSI). The pumps can only handle pressures
of 40 PSI, hence in blowing through. Reduced the pressure at the
loop ball valve to about 25 PSI. Please periodically check it out
tonight.
Alsop, slurry pump #1 has it's hose kinked. This could have been
caused by the excessive pressure problem. Loosened the locking
collar and stretched the kink out. Re-locked the collar.
Doc / Brendan
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Note 62.213 CMP.B1 213 of 292
PATE::GEE 8 lines 11-SEP-1995 05:48
-< Unload cup air cylinder >-
--------------------------------------------------------------------------------
The unload flipper only grabbed the wafer with 2 fingers.
This happened 3 times tonight on unload 2,3, & 4 but
we never dropped a wafer. We noticed that the unload cup
air cylinder is leaking air badly around the plunger shaft.
We need to order another and replace it as soon as possible,
this could be the reason for the flipper problem.
B shift
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Note 62.214 CMP.B1 214 of 292
STRATA::FINN 7 lines 11-SEP-1995 16:21
-< Two SBA's to dock >-
--------------------------------------------------------------------------------
Brought 13 used speedfam carrier plates to the dock for
shipment/rebuild. Also brough cart load of misc. speedfam hardware to
doc for shipment. Spoke to the dock to insure double boxing and
carefull handling of carrier plates.
Brendan
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Note 62.215 CMP.B1 215 of 292
PATE::GEE 8 lines 12-SEP-1995 07:24
-< Unload Cup air cylinder >-
--------------------------------------------------------------------------------
We noticed that the unload cup air cylinder is leaking air
badly around the plunger shaft, it's still working properly.
We need to order a replacement, the Speedfam 800 hot line number
was called tonight, but we found that it was out of service, we'll
ask "A" shift to contact them for a new one.
B shift
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Note 62.216 CMP.B1 216 of 292
FABSIX::R_POIRIER 10 lines 12-SEP-1995 07:44
-< Unload Flipper >-
--------------------------------------------------------------------------------
The Unload Flipper was still having a problem picking up wafers.
It would either grab the wafer but lose it when the Unload
cup went back down or it would only grab the wafers with two
or three of the four fingers. We found that the fingers needed
adjusting to equalize the pressure on the wafer from all four
fingers. Made adjustments to the fingers and Flipper is working
much better.
B Shift
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Note 62.217 CMP.B1 217 of 292
SUBPAC::TOOKER 16 lines 12-SEP-1995 17:29
-< SpeedFam Field Serv. onsite tonight >-
--------------------------------------------------------------------------------
The SpeedFam field service eng.(Bob Gugerty) will be onsite tonight.
He should arrive between 7:00 and 8:00 PM. Please have him check out
the unload flipper and unload cups for proper adjustment. Also, he
will be looking for the scrubber upgrade parts. These parts are lo-
cated on the cart behind cmp.b1. He may want to do some sub-assembly
of these parts. If on the outside chance that cmp.a1 and .a2 come back
alive, Bob wants to take cmp.b1 to perform the scrubber upgrade. The
time duration to perform the upgrade is 10 hours, so please check with
the Ops supervisor to see if it is OK. Also, please let Bob know that
the left over parts from the wafer detect upgrade were shipped out on
Monday. If there are any questions, please call me at home
(508-874-0839).
Thanks,
Jim Tooker
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Note 62.219 CMP.B1 219 of 292
ASDG::POIRIER 12 lines 14-SEP-1995 19:15
-< Unload Air Cylinder replacement. >-
--------------------------------------------------------------------------------
* Unload Position Air Cylinder:
The Unload Air Cylinder, located under the Index Table, was replaced
this afternoon. The distance from the bottom of the pedestal to the
top of the Air Cylinder was set to 1 inch. In addition, the Unload
Flipper was taught a new position. It is now 25 counts lower into
the Index Table Cup. Earl has begun the 50 wafer verification run.
John, Earl & Jim T.
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Note 62.221 CMP.B1 221 of 292
SUBPAC::TOOKER 35 lines 18-SEP-1995 09:12
-< PLEASE READ: SpeedFam Technical Service Bulletin >-
--------------------------------------------------------------------------------
================================================================================
SpeedFam Technical Support Bulletin:
Bulletin #: 9509TSB012
Date: 09/08/95
Tight Load Cup Causing Wafer Misload and Loss:
PROBLEM:
Several wafer misloads have been detected that would have caused a wafer
crash. When the cups are raised (with MTHA over the polish table), the
outer guide ring on the cups is being pulled down by the tight fit on the
index table. When this happens, the wafer is not being properly guided
into the carrier pocket. This problem may exist even when all normal
checks/inspections are made and are not related to arm alignments or cup
height adjustments.
FIELD ACTION:
* Check the cup position with the MHTA over the polish table and see if
any resistance is holding the outer guide ring down. Any cup that does
not slip smoothly in and out of the index table may have this problem.
Remove the load cup and check it dimensionally.
* The Lower Shaft Guide, P/N AD3170, is causing the problems in the field
due to the tight fit between the shaft and the hole in the index table.
Check your inventory and make sure all shafts are to print and the parts
did not change over time due to temperature fluctuations.
================================================================================
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Note 62.222 CMP.B1 222 of 292
SUBPAC::TOOKER 65 lines 18-SEP-1995 09:13
-< PLEASE READ: SpeedFam Technical Support Bulletin >-
--------------------------------------------------------------------------------
================================================================================
SpeedFam Technical Support Bulletin:
Bulletin #: 9509TSB010
Date: 09/12/95
Resolver - Analog/Digital Cables Replacement
PROBLEM:
Recently, cable problems have been occuring with four cable failures on
Tool #10 alone during a short interval of 1.5 weeks.
The affected assembly part numbers are AD1022A1-1-10 and AD1023A1-1
through AD1023A1-4. New cables (with new part numbers) have been
utilized on Tool #08 for four weeks with no problem.
SYMTOMS:
Typical symtoms of a broken cable are:
1. Carier will not rotate
2. Arm will not oscillate
3. Carrier time-out error
You will not necessarily see error lamps illuminate on the Infranor
amplifier or see DCX errors. However, if you do see Infranor error lamps
illuminate or you see DCX errors, this could be a sign of broken cables.
FIELD ACTION:
EN #CMP00407 contains the following data which SpeedFam recommends replacing
all old cables with new cables (with new part numbers):
1. CABLE, RESOLVER, FLEX
NEW PART NUMBER OLD PART NUMBER
---------------------------------------
950324 AD1022A1-1
950325 AD1022A1-2
950326 AD1022A1-3
950327 AD1022A1-4
950328 AD1022A1-5
950329 AD1022A1-6
950330 AD1022A1-7
950331 AD1022A1-8
950332 AD1022A1-9
950333 AD1022A1-10
2. CABLE, A I/O, FLEX
NEW PART NUMBER OLD PART NUMBER
---------------------------------------
950334 AD1023A1-1
950335 AD1023A1-2
950336 AD1023A1-3
950337 AD1023A1-4
================================================================================
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Note 62.223 CMP.B1 223 of 292
STRATA::FINN 28 lines 19-SEP-1995 19:36
-< scrubber and vac errors >-
--------------------------------------------------------------------------------
Problems: 1. Scrubber brushes not working
2. Vacuum Errors "Low Tank Pressure"
Found brushes would turn "on", when bottom wire (within corrugated tube)
was flexed. Cut out bad (open) section of wire. Rewired and reassembled
scrubber. (Note: ohm'ed out bad section of wire harness and found open was in
black wire at the apex of the curve). Tested scrubber, but found it to be at a
slow rpm without much torque. Traced to inside motor housing.. found motor
brushes worn and touching commutator intermittently. Cleaned and realigned
worn brushes. Tested AOK. Brushed are worn an will not last forever.
Speedfam is shipping a new motor to us. Thanks to Larry Cedrone for his
astute assistance.
Found vacuum pump speed to be extremely slow. Used vac gauge to
test speed at pump. Found it aok. Then tested just before tank. Found poor
pumping speed. Worked back, shut off valve was aok. Tested without checkvalve
and speed was good. Replaced checkvalve. Tested by mapping several
cassettes. aok. Also adjusted needle bleed valve, which was open significantly.
Ran 24 wafer verification lot. aok. Placed system up on equipment
tracking system.
Doc/Brendan/Larry
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Note 62.224 CMP.B1 224 of 292
SUBPAC::LANDRY 15 lines 20-SEP-1995 12:36
-< plates.....motors >-
--------------------------------------------------------------------------------
13 pressure plates were received in this week. Brendan and I have
brought them to the room and are on the carrier rebuild table.
Please do not stack any items on top of these plates, as imprints
can and will occur. And it will affect uniformity, big time!
Also received in today was a spare scrubber brush motor. As you read
yesterdays note, the motor currently in the system was temporarily
fixed and is currently working. We do not expect this motor to last
to long though. Should the motor quit on your shift, the spare motor
is located in the black storage bin (Speedfam's) under the carrier
rebuild table. PLEASE, do not discard the defective motor as it will
need to be returned to Speedfam as a swap. Label it and leave it in
the carrier rebuild table draw. Thank you!
B & D.......the A shifters
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Note 62.225 CMP.B1 225 of 292
STRATA::FINN 12 lines 20-SEP-1995 20:13
-< broken wafer >-
--------------------------------------------------------------------------------
Speedfam broke a wafer. Larry found all screws loose. Issue was raised
that small Plastic or nylon washer are not in stock. Doc ordered 5200 on sid
sheet with immediate order of 800 two months ago. Part appears on stock but
with zero balance. John/Mike please check on this with the stock room.
Pad was changed, carriers were dropped, as of now Doc and I have
check and verified the exposure and tightness of 4 of the five carriers. Dan
was trying to second source the washers. I believe he has spoken to Mike.
a shift
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Note 62.226 CMP.B1 226 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 10 lines 21-SEP-1995 06:49
-< Pad breakage >-
--------------------------------------------------------------------------------
After the 2nd batch of (5) wafers of the break-in wafers
were polishing, the wafer from head #2 slid out and blew away
taking out #1 as well. The pad was replaced and carriers #2
and #1 were rebuilt. A new pad was put on and brek-in went
smooth. However.. it failed MQC's. Another pad was installed
and broken it and we are now waiting for the MQC results.
D shift
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Note 62.227 CMP.B1 227 of 292
ASDG::POIRIER 9 lines 21-SEP-1995 19:52
-< Head #2 Rotational Failure >-
--------------------------------------------------------------------------------
* Head #2 Rotation Failure:
Head #2 stopped rotating during an Auto Cycle today and broke
a wafer. The system is now runing on 4 heads. Head #2 will remain
off line until we can find the cause of the failure.
John.
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Note 62.228 CMP.B1 228 of 292
ASDG::POIRIER 17 lines 22-SEP-1995 20:05
-< Vacuum Problems / Invertor & Rotation Errors >-
--------------------------------------------------------------------------------
* Vacuum Problem:
The Vacuum Pump and Check Valve were replaced on the system today.
The vacuum is now holding at a steady 24 in.
* Invertor Communication & Spindle Rotation Errors:
The system is failing to initialize due to the Rotation errors
at the present time. We have jumped-out the wafer loss detection
system per Speedfams instructions. We've been working with the rep
via telephone and they will have a rep here sometime tomorrow.
"D" shift is picking-up the trouble shooting activities.
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Note 62.229 CMP.B1 229 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 20 lines 23-SEP-1995 08:56
-< breaker #6 tripped >-
--------------------------------------------------------------------------------
Heads #4 and #5 were off-line due to the circuit breaker #6
tripped at boot-up. Reset breaker, put #4 and #5 back on line.
a 100 wafer verify was run and there were now problems. However...
Head #1 lost its wafer at segment #3 which is before the polish step.
Head #1 was taken off line and there were now problems after that
with any other head. B1 flunked MQC's due to particles and bad
uniformity. The pad was changed and broken in. B1 flunked MQC's
again for the same reasons. The pad and brushes are being changed
as I type.
Randy Spears from SpeedFam will be in on Monday to re-wire
the motor controllers. I informed him on what was needed as far
as suppliers (wire, labels.. exc..). I also relayed to him that
circuit breaker #6 trips on boot up from time to time and is likely
tied into the wiring problems.
BJ
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Note 62.232 CMP.B1 232 of 292
PATE::GEE 44 lines 25-SEP-1995 07:35
-< Elevator #1 / Arm #3 not homing >-
--------------------------------------------------------------------------------
* Elevator #1 wouldn't move.
We found a wire on the 24 pin connector had come loose, we
soldered it back on.
The elevator would then move down to the home sensor, but
would continue to try and travel down, hitting the hard stop.
We checked the 2 bottom sensors, they are good. The input
rack also indicated that they were working properly.
We swapped the motor controllers with one not being used,
the elevator would travel down 1 inch smoothly and then
start to act like it was binding then timeout. We powered
the system down and checked for binding, it moved very
smooth manually. We re-installed the old controller.
* During all of this we had a problem trying to boot the system up.
It would say, "Arm #3 not at home position". This wouldn't
allow us to initialize the system, the touch screen would lock up.
DCX board #2 light #4 was on meaning that this was a real error.
We tried resetting the computer, no go. Checked the Inverters
for spindle #3, no error lights. Checked wire connectors
for spindle #3 and found some loose, tightening these
didn't help. Called the Speedfam hot line and talked to
Brian, he asked use to check most everything that was
already done.
He told use how to get around the screen lockup and get
into the system functions. We tried to move the arms out
to the service position, they wouldn't move and it would
come up with "elevator not homing " error, and lock up.
Tried to rotate them, no problems with that. He said
that until the elevator was fixed we couldn't go any
further.
* Elevator status as of now.
If you try to home the elevator now, the first time it will
time out. If you hit any key to continue and tell it to
home a second time it will home. Feild service should be
in today.
B shift
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Note 62.233 CMP.B1 233 of 292
FABSIX::B_FINN 36 lines 25-SEP-1995 20:23
-< Passdown >-
--------------------------------------------------------------------------------
Powered system up found tb6 tripped. Reset and re init.
Received error head 3 not homing on power up. Went into DOS and disabled head
3. Error moved to head 4 with corresponding dcx error. Went into DOS and
disabled all heads. Error moved to conditioning arm. REP arrived check all
limit switches aok, moved all heads via his pc aok. Found corrupted data files
for servo gains and error limits. Corrected with backup files he had from last
months upgrade. This corrected all init errors except the original elevator 1
problems (creep and binding).
Swapped both cables at motor , drift and motor binding problem swapped to
elevator 2 with cables and electronics. Motors seem ok.
Swapped cables at DCX no change in problem
Swapped DCX and amp cables and motor problem remained on elevator 1
Exchanged amps no change.
Lowered value of current reference resistor on pre amp to 8.2k no change in
problem.
Swapped motor cable from elevator 1 to 2 and at amp. motor drift problem moves
to elevator 2. the drift problem seems to be in this cable.
Re- verified that moving both cables from 1 to 2 causes binding problem to move
from motor 1 to motor 2. It does!
There does not seem to be a mechanical bind.
Swapped DCX modules no change
Need to check out "encoder" cable for motor 1 all the way from dcx to motor.
A shift
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Note 62.234 CMP.B1 234 of 292
PATE::GEE 52 lines 26-SEP-1995 07:25
-< elevator #1 >-
--------------------------------------------------------------------------------
* Continuing on with the Elevator #1 problem:
The field Rep. (Randy Smith) swapped the elevator #1 ribbon cable
at the DCX board with the one from elevator #2. Swapped both
the motor and encoder cables at the elevator #1 with the ones
from elevator #2. One molex connector had to be repaired.
Ran elevator #1 on DCX elevator #1, no hard stop or drift.
Swapped limit sensors, but didn't need to swap home sensors,
those go to the IO's only. The elevator homed and ran fine.
Removed the old elevator #1 cabling, it needs to be inspected.
* Tried to initialize the system and found carrier #1 wouldn't move.
Found the ribbon connector pulled off of DCX board #2, re-seated.
* Adjusted the lost wafer detection, it was to sensitive.
He left at 12:00pm. He would like to be called early morning if
there are any problems with the systems operation. Otherwise, he'll
be here mid-morning.
Pager # 1-800-823-6094
Hotel # 1-508-634-9500
* After he left 5 carriers and a pad were installed on to the system.
When we tried to start the break-in wafers it wouldn't start, and
came up with an error "elevator #2 disabled". We enabled the elevator
then the system started. Randy was contacted about this.
* We completed the break-in wafers and are now running mqc's.
Things the rep. needs to look at:
---------------------------------
* Found that when the transfer paddle traveled up, the scrub station
hadn't moved out of the way completely and the edge of the paddle
would nick the bottom front of the scrub station. Turned the air
pressure down to slow the up travel. I believe the scrub station
home sensor needs to be replaced. Randy was contacted about this.
* Slight problem with wafers going into cassette #1.
B shift
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Note 62.235 CMP.B1 235 of 292
SUBPAC::LANDRY 45 lines 26-SEP-1995 19:33
-< a multitude of issues addressed >-
--------------------------------------------------------------------------------
Another rough ride today, but we're currently running product.....
Some of the days events:
* The scrubber brushes were not rotating this morning. The rotation
motor was replaced. We knew this motor was on it's way out as it
was overhauled last week for intermittently stalling out. Speedfam
had sent a spare to last week. We were waiting for an opportunity
to change it. I have the old motor in my posession and will send it
back to Speedfam as a swap for a new one at no cost.
* Head one alarmed today for no rotation. It is believed that the alarm
is actually duee to the slipping out of a wafer during polish. The
detection would cause the head rotation, table rotation, etc to shut
down, preventing all wafers/heads from getting wiped out. The computer
would look for the first alarm (which is head 1 rotation) and display
it on the screen. We will have to monitor it to assu5re this in fact
is tyhe real reason.
* Still need to check out all motor controller wires/connections as time
permits. System availability will be a factor in this issue.
* Elevator #1 had a failure mid afternoon. Don't panic! It wasn't the
pulsing problem we've been seeing. It was just a simple re-calibration
of the elevator home position for the fix. The wafers were not making
it into the cassette slots properly, hence hanging up and triggering
an alarm. Good training spot for the newer folks to see.
* The original elevator situation has been moved. Elevator #2 remains
off line. We are expecting the arrival of two cables associated with
the problem. Said cables should be here in the morning.
* The scrubber home position sensor is currently faulty. It doesn't
create a down status though. We will have one arriving in the morning
and will install it upon system availability.
* Jim S and Larry Cedrone tried installing a double stacked pad today.
Uniformity was out to lunch, so they removed the pads and installed
one pre-stacked pad. All five carriers were run for the break-in/MQC
runs. All five passed said tests. Heads 4 & 5 were high, but acceptable.
the A shifters........
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Note 62.236 CMP.B1 236 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 21 lines 27-SEP-1995 08:41
-< Head #2 giving us some problems. >-
--------------------------------------------------------------------------------
A wafer slid out of head #2 and took out #1 and #5.
The mess was cleaned up and a new pad was installed.
Carriers #1, #2 and #5 were rebuilt and insatalled on the
machine. After 10 wafers, a wafer from #2 once again
slid out but I made the save... The wafer and machine
were ok. We swapped heads #2 with the #3 to see if it
is a carrier issue. After we got everything started back
up again, head #4 errored out because it wasn't rotating.
The breaker was not tripped and it would not come on in
manual mode. After was cycled the power to the machine,
head #4 started to rotate again. We started up the break-in
again and head #2 lost another wafer but didn't break. This
rules out a carrier issue. We took the panels off of head #2
assembly and checked alot of things out but we came up empty.
We took #2 off-line so OPS could continue along with break-in
and to reduce the many numbers of lots in the area.
D shift
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Note 62.237 CMP.B1 237 of 292
SUBPAC::LANDRY 32 lines 27-SEP-1995 19:42
-< rotation problems >-
--------------------------------------------------------------------------------
Today........
* Calibrated head two "pickup" position. It was slightly off
originally. This may have contributed to the wafer slip-out
problems on that head. Time will tell.
* Check the vacuum switch set point for head two. It was kicking out
at 13" Hg. This is an acceptable situation. We believe that this
would not contribute to the wafer slippage.
* Checked all five heads for proper wafer detection acknowledgement.
They are all responding. Not sure how the system could have had
three heads damaged the night before. See below though....
* Attempted to run all five heads. Nice try! Head four had NO
rotation. Aborted the run. Powered down to open some cabinets and
then rebooted. All heads were rotating fine now. Re-attempted to
run the system, crash! Head five wafer slipped out taking head four
along with it. The wafer detection system should probably be a bit
more sensitive to halt it faster. Research to be done.
* The rep has had a DCX board sent out and it should be here in the
morning. He feels this may be the problem with the non-rotating
head issues. This board sends a direct signal to the motor
controllers for what currant is desired.
* Two more Speedfam people will be here in the morning to assist with
the repairs/problems. Stay tuned!!!
the Modified C shift
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Note 62.238 CMP.B1 238 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 12 lines 28-SEP-1995 09:09
-< Elevator #2 cables replaced >-
--------------------------------------------------------------------------------
Replaced the ELEVATOR #2 cables. The machine was powered
up without any problems with the elevators. Carriers #4 and
#5 were installed on the machine and they are all now at the
index table rotating and staying wet. The PVA brushes for the
scrubber are still submerged on the ELEVATOR #2 because the
Service Rep is replacing the HOME sensor for the scrubber.
All three Reps should be here around 9:30am or so. Elevator #2
is still going to be looked at by Randy to verify positioning.
D shift
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Note 62.239 CMP.B1 239 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 20 lines 29-SEP-1995 05:42
-< Machine running but particles everywhere >-
--------------------------------------------------------------------------------
The Reps were here all day and left around ~8:30.
the found several problems with the machine which they
fixed or are going to fix. They removed several cups
and rubbed them down with VERY fine sand paper and got
them to go up and down real smooth. The LOAD air cylinder
is leaking and they have a new one coming in this morning.
They also feel that there is also alot of mis-alignments
with the load flippers and cups and that they are going
to go through the machine today. They noticed some kind
of vibration in HEAD #2 and they are not quite sure what
it is. They took #2 off line for us to use the machine.
We ran 50 wafers for break-in without any problems. The
MQC's were run and it passed on uniformity but failed
bad on particles, all from the pad. There were also some
scratches showing up on the TRANSFER program. The PVA
brushes are going to be replaced as well.
D shift
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Note 62.240 CMP.B1 240 of 292
ASDG::POIRIER 23 lines 29-SEP-1995 20:04
-< Invertor Comm Error Prob. - Damaged Wire. >-
--------------------------------------------------------------------------------
* Invertor Communication Timeout Errors:
The Speedfam Reps changed-out the 24v power supply only to find
it being pulled down by a short. An unlabled wire on the buss
was then traced back to the (Multihead "Table" Home Sensor)
(Digital Input #61). The wire leading to the sensor was badly damaged,
it appears that it may have got pinched by the Conditioner
mechanisim. The wire was spliced and soldered. We are of the opinion
that this wire was the cause of the Invertor Communication Error problem.
The system is now running a 25 wafer verification run. If sucessful
MQC's will commence.
* Load Station Air Cylinder:
A replacement Air Cylinder arrived from Speedfam today. It was
installed by the Speedfam reps this afternoon.
John.
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Note 62.241 CMP.B1 241 of 292
ASDG::POIRIER 14 lines 30-SEP-1995 19:57
-< Pad Cond Down Force Reduced / N2 Pressure Switch Replacement >-
--------------------------------------------------------------------------------
Activities today:
A replacement Carrier was built for head #1. Head #2 remained off-line
due to oscillation errors. The conditioner down force was reduced
proportionally to the amount that the Strasbaugh conditioners were
reduced yesterday.(Approx 23%) We ran 75 wafers with no fly-outs.
At this point, The tool errored for (Main N2 LOW). We are now in the
process of replacing the (Nitrogen OK - DG IN 25) Pressure Switch.
This switch is located next to the incomming nitrogen regulator.
John.
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Note 62.242 CMP.B1 242 of 292
PATE::GEE 55 lines 1-OCT-1995 07:27
-< N2 switch / dropping wafers >-
--------------------------------------------------------------------------------
* Replaced the n2 sensor and set it per specification.
The sensor didn't trip the way the specification said it would,
when we adjusted the pod it didn't respond. We had no
n2 low errors all night.
* Ran 24 test wafers and began mqc's when a wafer fell off of
carrier #2 before polish and the wafers on #4 and #5 were
mis-loaded, not seated in the carrier properly. Field
service was here and determined the problem was the alignment
at the load cups.
We performed an alignment between the spindles and the load cups
using the alignment fixtures. We found #2 and #5 needed to be
adjusted.
We checked the multi-head repeatability, it looked good.
We checked the index table repeatability, it looked good.
We adjusted the load flipper so it seats the wafer into the
load cup better, and checked repeatability. This was check on
all load cups.
* When the wafers were not seated properly there was no error for
low vacuum. The vacuum switches on heads #1,3,4,5 were re-adjusted
to trip at 20hg. Head #2 was not adjusted do to it not having
a carrier, this will need to be done when a carrier is mounted.
Manually mis-aligned wafers on all 4 carriers to check the
functionality of the switches, all 4 worked properly.
* Ran 40 wafers using the break-in program to verify the repair.
* At 6:15 am running mqc's using the mqc program a wafer dropped off
of carrier #1 and landed on the polish table. The carriers never touch
the table do to the wafer detection, detected the wafer. This is the
second that wafers have fallen off the carriers in the mqc recipe.
Contacted field service (Joe) and he asked use to run it again and
watch the vacuum at the spindle. We ran the break-in and then the mqc
programs. Break-in ran and the mqc lost a wafer again, before polish.
Vacuum on head #4 was on.
He wants use to contact process engineering and have them check
the MQC program.
Speedfam beeper #'s
Joe 1-800-936-0984
Randy 1-800-823-6094
B shift
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Note 62.243 CMP.B1 243 of 292
FABSIX::B_FINN 15 lines 1-OCT-1995 19:29
-< passdown >-
--------------------------------------------------------------------------------
Jim and Eric zeroed back pressure in all recipes. Deleted segment 3
on recipes (contained table speed at 11 rpm). Set speed to 23 rpm for all
recipes. Ran 24 wafers without a problem.. Noticed scrubber brushes were not
working when the scrubber indexed out to the scrub position. However, they did
work at home position and low speed. You guessed it, found open in scrubber
motor wire at apex of curve. Splice new wire and repaired.
Verified scrubber fix and continued to cycle wafer using "test MQC"
recipe.. At approximately 6:50 pm system through a wafer from head 5 and broke
it. Changing pad now
Note: 5 pressure plates are packed and will be shipped out tomorrow on sba
box is labeled
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Note 62.244 CMP.B1 244 of 292
PATE::GEE 29 lines 2-OCT-1995 07:01
-< Slurry line / Verification wafers >-
--------------------------------------------------------------------------------
Three Speedfam field Rep's came in tonight. These are things
they checked.
* They checked some alignments for drifting.
* Slurry flow and PH.
* Voltage going to the load cell amplifier and load cells
for each carrier.
No problems were found. They wanted to run wafer but we hadn't
finish rebuilding the carriers. We were asked to run 100 wafers
using the "break-in" program when the carriers were completed.
* We ran 80 wafers when an error appeared " waiting for one or more
cups down." Checked the LED's and found #1 load cup wasn't being
detected down, but infact it was down. I adjusted the down position
sensor slightly and the LED came on.
After that the touch screen froze so we had to reboot.
* Found that a slurry line had burst, replaced both slurry lines.
Still need to run 20 more wafers using the Breakin program.
B shift
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Note 62.246 CMP.B1 246 of 292
PATE::GEE 20 lines 3-OCT-1995 07:25
-< 2 wafers on head #5 >-
--------------------------------------------------------------------------------
Ran product all night with only one error "Wafer not detected
on carrier". We found no wafer on carrier #4 when the multi-head
picked up the wafers at the index table and two on head #5.
The run was a touch up run with a monitor wafer setup for
head #1 and #4 and product on head #3 and #5. This was in the
middle of a 24 wafer run. We found a monitor seated on carrier #1,
a product wafer seated on #3, no wafer on #4 and a monitor seated
in #5 with a product wafer stuck to the monitor. No visable
damage to the wafer the die side was facing down.
Field service called (Joe) and was told about the error. We
ran some dummy runs with no problem and monitored the system
for the rest of the night, no other errors.
B shift
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Note 62.247 CMP.B1 247 of 292
FABSIX::B_FINN 53 lines 3-OCT-1995 08:52
-< tim's passdown >-
--------------------------------------------------------------------------------
This is mondays a shift passdown for B1.
From: SCOMAN::TDYER "TIM....CMP/ETCH ENGINEER, X5072, P997 02-Oct-1995 1937" 2-OCT-1995 19:39:53.58
To: @CMP.DIS
CC: TDYER
Subj: CMP passdown
+---+---+---+---+---+---+---+
| d | i | g | i | t | a | l |
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Semiconductor
I N T E R O F F I C E M E M O
To: cmp.dis Date: October 2nd, 1995
From: Timothy P. Dyer
Dept: Engineering
Ext: 5072/4515
CC:Larry Camiletti Node: Scoman::Tdyer
Jim Tooker Lock/Mail Stop: HLO1-1/p-11
================================================================================
SUBJECT: CMP.A1,A2,B1 AND WSTK.1.2 PASSDOWN
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
B1 - The standard MQC recipe was determined to be corrupted today. Over the
past several days wafers have been breaking during the MQC recipe but
not during the BREAKIN recipe. A new "MQC" recipe has been created.
~100 Wafers, including 3 lots, have run with out wafer loss. The
floppy drive is not working. The wafers loss sensors were calibrated
and tested.
DO NOT USE RECIPES 31 - 90 (TUP, QUICKIES,TDP_MD, etc).
FOR ANY TOUCH UP PROCESS USE "T_UPA" - "T_UPL", make your time
adjustments to each of these as required per head.
If B1 goes down please page Tony (speedfam rep) at pager 1-800-516-4197.
or Joe at 1-800-936-0984
A1 - Running with 1 IC1000/SUBA-IV stacked ontop of an other SUBA-IV
A2 - Pad was at ~400 and the system broke a wafer.
WSTK.1 - Running, hand stacked pads. Press bar is due in tomorrow.
WSTK.2 - Please plan to shut down WSTK.2 tomorrow at 8:30am, Westech
field service will be here to put in the arm run away SAFETY upgrade
and the new software for RPC-II.
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Note 62.248 CMP.B1 248 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 12 lines 5-OCT-1995 09:04
-< Pad change and PM started >-
--------------------------------------------------------------------------------
Started some of the monthly PM items. No adjustments made to the
the machine, just the observation items.
The pad was replaced due to bad uniformity. (24) wafers
were used as break-in. B1 passed uniformity but failed bad on
particles. Another pad was installed but it failed particles
once more. Every MQC wafer had a 1"-2" imprint on the side of
wafer in only one spot. C shift is looking into a possible fix
as I type.
D shift
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Note 62.249 CMP.B1 249 of 292
SUBPAC::LANDRY 42 lines 5-OCT-1995 19:23
-< Particles, sensors, etc. >-
--------------------------------------------------------------------------------
A bad, bad day......
* The scrubber brushes were changed out today to help address the
particle issue.
* The slurry filter was changed out today too. The removed filter
was not clogged what so ever (for what it's worth). Upon re-
introducing slurry through the filter/system, they was a big air
bubble that was difficult to move. We may be having slurry loop
problems as the same thing happened when A2's filter was replaced.
Please check on it occasionally.
* The system was wiped down throughly this morning, both in the polish
area as well as the index table aea.
* The carriers were removed and checked for any potential particle
problems. There seemed to be evidence of contaminated water within
the carriers. This was removed and the carriers were re-installed.
* Ran 24 break-in wafers once ready to go. Had a problem with an
"inverter error". The table wouldn't rotate. Traced the problem
back to the wafer loss detection board. The sensors for heads 3 + 5
were alarming, dispite the presence of any "beam" interuption. The
sensors were adjusted by Tony and off we were running.
* Initial MQC's showed high particles were still there. This is when
we decided to change the filter and brushes.
* We attempted to put head #2 back on line but were getting a "no
rotation" alarm. The motor controllers, DCX board 1 and wafer
detection showed no signs of failure. Head 2 was the only head
on-line at the time. Retried running and got an inverter error
again. Yup, head #5's sensor was triggered off again for no
apparent reason.
* Tony has been paged (by Tim Dyer). Have him get a procedure from
Speedfam on the correct way to adjust this. He appears to be
"winging it" to me. I check a couple of other sensors and they
seem to be operating differently from one another. The LED
sequences don't repeat from sensor to sensor.
Doc
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Note 62.251 CMP.B1 251 of 292
SUBPAC::LANDRY 33 lines 6-OCT-1995 19:35
-< Wafer detection, bootup problems, etc >-
--------------------------------------------------------------------------------
Not much improvement today.......
* Particles still out of spec at the beginning of the day.
* Upon attempting to run the system, head # 5's wafer detection LED
lit up again. The beam was missing at the table.
* The wafer detection circuitry was taken of line after this
reoccurrance.
* Breakins went fine. An ILD lot was started and the very first wafer
run had a mishap with a wafer loss. Head 3's wafer was the culprit.
Cleaned up the mess, put on a new pad, new carriers AND THE WAFER
DETECTION CIRCUITRY.
* Checked the wafer loss sensors on all heads and adjusted a few (#5
for one).
* Upon re-trying to run, the wafer centering pedistal (load station)
became non-finctional. The pnuematic cylinder is defective.
* We had various nuances all day with the system: Vacuum pump breaker
a couple of times, flipper pick up problems in the load station,
the now usual bootup problems, the scrubber brushes not
excellerating to high speed, scrubber water not flowing, and a
few more that escape me.
* Many Speedfam people, many new parts and many new hopes will be
here in the morning sometime.
* Many thanks to Earl and Samuel for there help today!
A on C shifter / Tim D / Larry C
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Note 62.252 CMP.B1 252 of 292
STRATA::TDYER 63 lines 6-OCT-1995 20:11
-< cmp pd >-
--------------------------------------------------------------------------------
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Semiconductor
I N T E R O F F I C E M E M O
To: cmp.dis Date: October 6th, 1995
From: Timothy P. Dyer
Dept: Engineering
Ext: 5072
CC:Matt Vanhanehem Node: Scoman::Tdyer
Jim Tooker Lock/Mail Stop: HLO1-1/p-11
Larry Camilletti
Eric Bodensiec
Frank Krupa
==============================================================================
SUBJECT: FAB4/FAB6 CMP passdown
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
CMP PARTICLES/BREAKAGE TEST: Today we installed a FAB6 triple stack (ic/s4/s4)
on WSTK.1 in FAB4 to evaluate particles and breakage potential.
Before any pads were removed from WSTK.1 we ran a particle check with
out going to the final pad (simulating a FAB6 condition), particles were
~2200 with 300 large. .050" of shim has been removed from the carrier shaft
and the triple pad installed. Particles on this new pad with NO final
process was 900 with 55 large. Although this is only two data points, we
are pretty confident that the PAD is NOT the particle problems in FAB6.
Also Frank had the particles from A2 analyzed, the majority was SiO2,
silicon dioxide from the slurry (slurry particles). This will be repeated
on B1 in the morning. As far as the triple stack causing wafer breakage,
this tests not yet completed. WSTK.1 will cycle monitors through the night,
if no breakage occurs by morning, we will not focus on the pad as a source
of PARTICLES or the cause for BREAKAGE.
WSTK.1 - Pro_ENg, cycle monitors through out the night.
B.1 - The system is still having a verity of problems, currently the centering
station is not working. The plan for the night and tomorrow is to have
Speedfam go through the entire system THOROUGHLY, correct any hardware
and software problems, especially problems related to wafer detect (this
appears to be a catalyst for everything else). There will be NO product
run on this Polishers until Speedfam has completed there tasks, than
the system will be hardware accepted and released by Engineering. If
B1 is able to cycle wafers tonight, go ahead and check MQCs, we still
have not resolved the particle problem and we will need particle data.
The following Speedfam personnel will be here through the weekend, please
make sure a representative from Equipment Engineering is with them at all
times. I will be in in the morning. Tony will work with the system
through the night with D shift.
PAUL HOLZAPHEL
SCOTT RAY.
Toby Jordon
Allan Tam
Tony
A1 - Running, when a pad is needed, put down 1 SUBA-IV and than put an
IC1000/SUBA-IV on top of it.
A2 - Running, when a pad is needed, put down 1 SUBA-IV and than put an
IC1000/SUBA-IV on top of it.
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Note 62.253 CMP.B1 253 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 31 lines 7-OCT-1995 07:41
-< a bunch of bugs... >-
--------------------------------------------------------------------------------
Well....
The water wasn't flowing on the scrubber again.
Checked everything out only to reboot the machine
and it works now.
The pre-aligner fingers weren't closing, cycled
power, all set.
Scrubber brushes weren't turning during the scrub
cycle. Lowered speed from 155 to 145, now they spin.
Wafer detect sensors #3 and #5 flaking out, now working.
The unload cup went down but the pedistal didn't go all
the way down... SNAP... replaced... adjusted... all set...
The multihead motor controller went south at boot-up.
Swapped motor controller for #5 rotation with the
multihead and got that working. We took head #5 off-line.
Carrier #5 was removed and placed on the back table and
is being kept wet. There isn't any controllers in stock
so that is being sent out today.
The SpeedFam party train showing up soon....
Can someone say SOFTWARE BUGS?????????
D-shift
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Note 62.254 CMP.B1 254 of 292
FABSIX::B_FINN 28 lines 7-OCT-1995 19:41
-< passdown >-
--------------------------------------------------------------------------------
Changed slurry pump lines
Cleaned and lubricated scrubber
Cleaned and lubricated paddle rails
Cleaned drip pan
Completed weekly and monthly
Reps;
Replaced floppy drive
Adjusted CDA to all cups so they don't slam on accent.
Cup three sensor is not working and needs to be replaced, Checking
stockroom. If not Reps will rush order. Don't run this cup single test.
until sensor is replaced.
Replaced bad motor controller on head 5
Replacing pneumatic solenoid for prealigner. Sticking has recently
been noticed at other customers as well. Reason for premature failure
is being evaluated.
Changed Pad conditioner.
Software upgrade is planed for tonight.
Brad/Brendan
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Note 62.255 CMP.B1 255 of 292
PATE::GEE 18 lines 8-OCT-1995 06:54
-< Robot / Index Table / Vacuum Sensors >-
--------------------------------------------------------------------------------
Four Field Service Rep.'s Activities tonight :
* Re-taught the robot positions. Replaced a blown fuse
inside the robot power supply (2.5amp 250v).
* Adjusted the index table home position, the home
sensor was loose.
* Checked the spindle to load cup alignments.
* Installed carriers and pad.
* Checked the scrub sensors, front and back are working.
* Tried to run wafers, but the system errored for no vacuum
found on all heads. Adjusted the vacuum sensors, this was done
last week for not detecting lose of vacuum.
B shift
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Note 62.256 CMP.B1 256 of 292
FABSIX::B_FINN 35 lines 8-OCT-1995 19:39
-< passdown >-
--------------------------------------------------------------------------------
Replaced cup #3 sensor (wire had been torn out by cup)
Ran test mqc, it placed 2 wafers in carrier 5 and 1 in head 3, and 2
wafers on table. ??? not under stood how? Could not get it to
repeat this feat.
Vacuum pump tripped at least 3 times at bootup during the day.
Ran 75 wafers run in breakin program aok
Tried passivated wafers 5 wafer
results:
non uniformity 15-22% particles were 5k avg.
edge fast removal.
Changed Bin 1-3 and breakin programs to 120 sec
Changed pad suba iv and ic 1000 (old pad adhesive was really
accumulated on table, needed razors iso and scotch-brite to
remove it all)
Head four had carrier down error, adjusted sensor
Currently running 5 wafers in bin 1, 5 wafers in bin 2, and 5 wafers
in bin 3, then will switch to breakin for last 10 wafers.
There are 5 pre measured wafers, preceded by five breakin wafers in
cassette on table left of speedfam. Data is on A4 and all particles
are under 10.
a shift
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Note 62.257 CMP.B1 257 of 292
PATE::GEE 18 lines 9-OCT-1995 06:52
-< Unload Flipper / Field service activities >-
--------------------------------------------------------------------------------
Field Service Rep.'s Activities tonight :
* Adjusted the unload flipper at the unload cup.
* Ran MQC wafers two times, both times they failed for
high uniformity 11.0 % to 15.0 % and also overloaded
on particles 8000+.
* Checked some programs for problems, they will talk to
process engineering this morning.
* Ran 300 exercise wafers using the Breakin program.
B shift
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Note 62.258 CMP.B1 258 of 292
FABSIX::B_FINN 46 lines 9-OCT-1995 19:27
--------------------------------------------------------------------------------
Changed direction of carrier clean station nozzles 90',
at Jim Tookers request.
Lowered clean station rpm at rinse per factory recommendation.
Ran particle wafer for Lab analysis ( came back later in day with
aluminum and si02 )
Checked vacuum sensors setting to determine if it will detect misplaced
wafer. It did not. Adjusted all heads for 20"hg trip point.
Ran MQC wafers, it fail uniformity and particles. Removed pad and
replaced with ic 1000 prestacked only.
Uniformity was in on 3 heads, Eric found screw to pressure plate loose.
tightened and ran MQC again.
Started to build replacement carriers. System loaded first 5 from
cassette #1 and did not pick up any wafers from cassette #2. I was
paged back from the dock at this point and unloaded in Manual.
Error out for rotation head 3+4 and numerous vacuum pump circuit
breaker trips. Yes we did wait on power up ! Screen locked up on Eric
in manual.
Frank took slurry samples from all systems including b1. Wafer detect
tripped as well as screen lock up again and later dump from windows
to DOS when I acknowledged "waiting for carrier 4 vac".
Added speed291 back to autoexec.bat file.
Ran 10 MQC wafers, ran fine waiting for readings
If tests at scrubber don't improve particle problems 2 jugs of slurry
are at systems door, please hook them in before internal slurry pump
to eliminate house sully line as possible cause of contamination.
Run MQC wafers and check particle levels pre/post run.
Rep cleaned water from wafer detect 4 sensor.
Brought 10 pressure plates up from dock and cut sba to send 5 pressure
plates and 200 monitor (source inspection) wafers to speedfam.
Brendan/Tim/Frank
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Note 62.259 CMP.B1 259 of 292
PATE::GEE 22 lines 10-OCT-1995 06:53
-< Flipper Assembly >-
--------------------------------------------------------------------------------
Field Service Rep.'s Activities tonight :
* Removed the load / unload flipper assembly, adjusted
the wafer detection sensors. Re-installed and adjusted
the load and unload flipper positions.
We removed the pad and cleaned the adhesive off of the table.
Also, cleaned the table area and conditioner. By the time
the rep.'s finished with the flipper repair there was no
time to do the slurry test.
There is 2 gallons of slurry in a green container at the rear
of the system and 2 gallon containers filled with slurry also.
The spindles are down in the rinse station rotating with
rinse on. We built 5 speedfam carriers, there on the cart.
B shift
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Note 62.260 CMP.B1 260 of 292
SUBPAC::LANDRY 42 lines 10-OCT-1995 19:33
-< Product is flowing........... >-
--------------------------------------------------------------------------------
We're running product!!! Zippity do-dah!
This morning, we disconnected the slurry loop from the system.
We then connected a rung of tubing from a tub of slurry (slurry
from fab 4's loop in it) to the inlet of B1's slurry junction.
A new pad was installed and conditioned prior to running the
new slurry. Also, we flushed the internal slurry tubing in B1
prior to the expirement. Once ready, we loaded up 20 wafers.
first 5 ran the B_IN.1, 2nd 5 ran B_IN.3, the 3rd 5 ran BREAK_IN
and the last 5 ran MQC. The system ran fine for the expirement.
Post readings showed that particle readings were still high.
Our Slurry loop has been ruled out as the source of the particles.
After this, Larry Camilletti edited the MQC recipe (not sure what
he actually called it at this time). Runs were made again, and
particle and uniformity was checked. 4 heads stayed under 8%
uniformity with the 5th at 9%. Particles were somewhat high, but
acceptable. Product is running.
During the day, a couple of occurrances happened:
- The Multihead timed out for some reason. The head was in
between the tables when it stalled. An assist was performed
to move it along. No reason was found for this problem.
No failures since.
- The bottom section of the scrubber had a chain break. Non
in stock. Speedfam is sending one out for tomorrow. When
assemblying, make sure it is routed such that the brushes
all rotate in the same direction. Process Eng blesses the use
of the scrubber until the new chain arrives.
- Five more pressure plates were sent out fr re-filming.
- A shortage request was sent today to Annie Hargraves for
a multitude of shortages (shims, brushes, chains, etc).
- See the mail message from Frank Krupa/Robin Sacco about the
metrology equipment thats down.
A shifters
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Note 62.261 CMP.B1 261 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 18 lines 11-OCT-1995 07:30
-< Wafer handling problems >-
--------------------------------------------------------------------------------
Things started off somewhat ok at first. The unload
flipper started giving us some problems with handling. It
would intermittingly grab only two corners of the wafer and
drop the wafer in the scrub area. Tony checked out the flipper
and load cups and re-seated the cups and the problem went away.
OPS were questioning the uniformity so MQC's were started. Head
#2 stopped dead in its tracks and failed to ocillate. Tony took
#2 off-line and MQC's were ran. The uniformity was boarder line
but ok to run. About 20 minutes ago, the robot failed to pick
wafers up at the right LOAD cassette. After the third slot, it
started picking up the wafers. OPS were not comfortable with
thses problems since it was a hot lot on the machine so they
logged it down. SpeedFam was called and they will be here in 20
minutes.
D shift
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STRATA::TDYER 43 lines 11-OCT-1995 16:31
-< cmp pd 10/11 >-
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Semiconductor
I N T E R O F F I C E M E M O
To: CMP.dis Date: October 11th, 1995
From: Timothy P. Dyer
Dept: Engineering
Ext: 5072
CC: Matt Vanhanehem Node: Scoman::Tdyer
Jim Tooker Lock/Mail Stop: HLO1-1/p-11
Larry Camilletti
Eric Bodensiec
Frank Krupa
==============================================================================
SUBJECT: FAB4/FAB6 CMP PD
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
WSTK.2 - Reported RPC errors (again) to Westech. Waiting on their next move...
Continue to contact EEG techs when RPC-II locks up, eeg please record
exact errors on alarm page.
B.1 - System has been running MOST of the day with head 2 off line and load
cassette 2 off line. Head 2 will not be looked at until a new infinor
arrives tomorrow, then we will set up time with MFG. The scrubber belt
arrived today, the reps installed and calibrated it in between lots.
Speedfam will have 24 hour support until the WIP BUBBLE is clear and
when we have some confidence in system performance. If the reps are not
in the room when a problem occurs, page them ASAP. If Digital EEG
technicians are able to recover the system, do so, but page Speedfam as
well to review the failure.
(6pm-6am coverage) Tony - 800 516 4197
(6am-6pm coverage) Bob - 800 593 5880
A.1 - Running, use a IC1000/SUBA-IV over another SUBA-IV.
A.2 - Running, use a IC1000/SUBA-IV over another SUBA-IV.
* Sent request for more 28" and 32" ic1000/suba-iv and suba-iv to materials.
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ASDG::POIRIER 29 lines 11-OCT-1995 19:49
-< Head #2 Oscil Failure / Right Load Sta Pick-up Prob/ Scrubber Be >-
--------------------------------------------------------------------------------
* Head #2 Oscillation Failure:
Head #2 has been taken off-line do to an oscillation failure error.
The Speedfam reps have ordered a replacement Motor Controller to
address this problem. We expect it to arrive tomorrow. We're
currently running with 4 heads.
* Right Load Station Handling Problems:
The Robot is having problems removing wafers from slots #'s 1 & 2
on the Right Load Station. The Left Load Station is not experiencing
this problem. Tim Dyer has aquired an ADE corp diskette and manuals that
will allow us to troubleshoot the Robot and ,if necessary, teach it
new locations for slots 1 & 2 on the Right Load Station. The file has
been installed on the hard drive in the Dell system in the CMP
service Chase. The Manuals are in the Speedfam tool box.
* Scrubber Belt:
The lower brush drive belt in the scrubber has been replaced. The
belt was routed such that the brushes now rotate in the proper 8 inch
configuration. (per Speedfam's recomendation)
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SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 20 lines 12-OCT-1995 07:47
-< more cylinder probs... >-
--------------------------------------------------------------------------------
here we go again...
Cylinder #4 failed to go down all of the way. The
pedistal got bent but repairable. Actually, the cylinder
assembly was swapped with #2 until a new one can be sent
in. The sensor for #2 was detecting that the cup was not
down even though it was off line (It still looks for it for
safety reasons). Tony tried to adjust the sensor it ended
up breaking off. That will be replaced today.
Some software bugs... the touch screen froze up several
times as well as the scrubber brushes failed to rotate.
Gwen did MQC's and it failed bad for scratches. The
system is now DOWN and the pad is being replaced as well as
a massive cleaning to the entire system.
D shift
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ASDG::POIRIER 8 lines 12-OCT-1995 19:37
-< Neslab TCU - Solid State Relay Burnt-out. >-
--------------------------------------------------------------------------------
Neslab TCU Problems:
The TCU failed to power-up at 5:00 p.m., closer inspection revealed
a burnt-out SS relay. The TCU intended for B2 is being swapped with
B1's unit. We expect the work to be completed on "D" shift tonight.
John.
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SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 12 lines 13-OCT-1995 05:15
-< still failing uniformity >-
--------------------------------------------------------------------------------
The chiller was turned on around 3am without any
problems. B1 had failed MQC's for uniformity twice prior
to this. We are working on the 3rd pad on D shift as of
5am. Tony replaced the Infranor on head #2 as well as
the data board for #2. He wasn't able to continue as we
took the machine back. The right send elevator was
re-taught and tested without any problems. Please keep
an eye on it.
D shift
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SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 14-OCT-1995 05:40
-< Vacuum pump breaker tripped >-
--------------------------------------------------------------------------------
The vacuum pump circuit breaker tripped for an unknown
reason. Nothing broke but we had to run to unload cycles
to start things over. The breaker has tripped in the past
with the old vacuum pump. A slightly larger breaker might
be considered.
D shift
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SUBPAC::LANDRY 36 lines 15-OCT-1995 19:35
-< carrier timeout, unload problems.... >-
--------------------------------------------------------------------------------
The system failed this morning for a "carrier timeout". Well,
this is one both Brendan and I have never seen before. The MHTA
was over the Index Table, the arms were spread to prepare to
unload the wafers into the cups, the cups were up.....but every-
thing just halted, with the alarm sounding.
Checked the I/O's and all were fine. The screen was prompting us
to hit any key to continue, which we did. The timeout happened
again. We could not get off the screen or abort the process, so
we had to EMO and reboot. Upon rebooting, several problems arose.
The unload flipper and the unload cup were the main hitters. The
flipper wouldn't pickup the wafers consistantly and the unload
cups were the same case. Upon exam, we found that the down stroke
of the unload pedistal was slow/sticky. Adjusting the air only
helped slightly. We checked the cups/feedthroughs. Found eight
of the ten cups out of position to their assigned feedthrough
ports. Returned all cups to the designated spots and tried again.
A big improvement, but still an occassional sticking situation.
Checked the feedthrough seals. Found a couple not quite sitting
in their grooved seats properly. Assured all were properly seated.
Used crocas paper on the cup shafts to "clean up" any dings and/or
buildup on them. All cups were working sufficiently. Successfully
unloaded 15 wafers manually to confirm performance.
Back to the original problem...............
We then tried to repeat the "carrier timeout" problem. We used the
"transfer" program to exercise the carrier arms. Ran a couple of
cycles fine. No problems!?!? The system ran the rest of the shift
without this alarm re-appearing.
The ID/OD pad was changed today. The wafers were edge-light, meaning
the outside of the wafer wasn't polishing enough. So, a "full" sized
pad was installed. MQC's looked real good. Uniformity is 3% to 5%
range. Still running with head two off line.
A shifters
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SUBPAC::LANDRY 22 lines 15-OCT-1995 19:47
-< Speedfam tidbits >-
--------------------------------------------------------------------------------
Let me suggest a few things we all should try and do with this system.
- When powering down the system for any reason, DO NOT repower the
system back up for ~ 1 minute or so. The quick pwoering up is
believed to be causing many bootup problems (ie. breakers need-
ing to be reset, scrubber water flow/brush rotation problems,
rotation problems, etc.). If given the minute plus delay, the
system seems to boot up fine.
- When the system is powered down for any time greater than 3
minutes, shut the chiller power off. DO NOT hit the mute button
as that only shuts up the alarm and the chiller continues to
dive in temperature. This no_let contributed to the death of
the first chiller.
- Leave the carriers on all heads when the system is running,
especially Wet Mode. With the carrier removed, the wafer de-
tection sensors are exposed to potential water mishaps. When
the water hits the sensor, it thinks a wafer is detected, not
a pretty scene.
Doc
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PATE::GEE 29 lines 16-OCT-1995 07:09
-< Carrier Timeout >-
--------------------------------------------------------------------------------
* The system error for "timeout waiting for carriers".
This happened everytime before loading the second 4 wafers
onto the carriers using the ID_OD program. It would lock the
touch screen up and we would need to re-boot.
The first time it happened we noticed on DCX board #2 the
number 3 error light was on "Carrier #2 oscillation error",
carrier #2 is off line so no error should occur.
The 3 times after that all the led's looked good. Called the
field rep, no response.
We decided to remove carrier #2 from the multi-head, it ran
fine without it last night. Changed the program from ID_OD
to ID_OD75. At the same time we placed a call to the speedfam
hot line. We received a call back from Tony within minutes.
The system ran fine after that using the ID_OD75 ID_OD_PD program.
We had the same problem when we tried to use ID_OD240 and
ID_OD200 programs. Tony said that there must be something in
those programs telling the system to reference head #2. We
checked the programs, they looked o.k. to us.
Hope this makes sense
B shift
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FABSIX::B_FINN 13 lines 16-OCT-1995 19:19
-< System hang up >-
--------------------------------------------------------------------------------
Multihead stopping at index table with arms extended over cups. Error
read " time out waiting for carriers". Found no DCX errors or missing I/O's.
Checked them all. Traced to spindle 3 out overtravel switch. Found bad
connection. Jumpered connection system ran fine. Removed connector and pins and
hard wired switch, tested aok. Returned to Manufacturing. Thanks to
Larry Cedrone (operations) for his assistance.
Brendan
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PATE::GEE 9 lines 17-OCT-1995 08:07
-< Head #5 >-
--------------------------------------------------------------------------------
* Errored for "Waiting for carriers" over the index table.
Had to adjust Head #5 limit switch.
B shift
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STRATA::TDYER 44 lines 17-OCT-1995 18:53
-< pd >-
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Semiconductor
I N T E R O F F I C E M E M O
To: CMP.dis Date: October 17th, 1995
From: Timothy P. Dyer
Dept: Engineering
Ext: 5072
Node: Scoman::Tdyer
Lock/Mail Stop: HLO1-1/p-11
Matt Vanhenehem
Larry Camiletti
Eric Bodensieck
Frank Krupa
==============================================================================
SUBJECT: CMP
++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
Speedfam coverage - If any problems arise call Bob Guberti 800 -593 5880
WSTK.2 - Unif was poor, after alignment uniformity was still center slow.
* CHECK TO MAKE SURE THE CAM/ROLLER IS NOT RESTRICTING THE ARM DOWN
MOVEMENT. (When the arm is down the ROLLER should NOT be touching the
center post). If the cam is not a problem, a IC1000/suba-lite pad
will be tested. If this pad produces center slow polishing, there
is an other hardware issue. Please repeat alignments thoroughly.
B.1 - Running with ID/OD process with FULL IC1000/SUBA-IV pad.
A.1 - Running breakin with ID/OD process ID=8", OD=20". Erik B. will modify
the recipe and conditioing parameters. see below if a pad change is needed see below.
A.2 - Running with ID/OD process, ID=8", OD=20". If a pad change is needed do
the following:
1) Install a 22.5" SUBA-IV in the center of the platen
2) Cut a 22.5" IC1000 down to 20" (use the pen/string in the room)
3) Cut a 8" hole in the center of the IC1000
4) Mount and center the IC1000 ontop of the SUBA-IV
5) Break in and check MQCs.
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SUBPAC::LANDRY 29 lines 17-OCT-1995 19:41
-< Hardwire them sensors........... >-
--------------------------------------------------------------------------------
A couple of things occurred today.........
* Product did flow henceforth from the system most of the day.
* Carrier timeouts happened again, this time head 5. They wanted
to finish of the product lot before they had us address it. Once
available, the A shift and Bob Gugerty sprang into action. We found
that the Molex connectors were indeed the problem. Therefore, we
decided to totally eliminate the problem with ALL the heads by remov-
ing the Molex connectors, a straight hardwire job. After completing
the task, we exercised the heads numerous times without failure. We
can't be assured, for a couple of days, that the problem is totally
fixed or not as this problem has been intermittent. Time will tell.
* The scrubber stopped rotating today. The problem, like the carrier
timeouts, has been intermittent. The problem has been narrowed down
to a small section of the electrical circuit. No, not the normal
pivot spot within the flex-sheathing. This time it is located in
the general area of the connector at the scrubber head. It's either
in the wire or at the pins themselves. While flexing the wire in that
vacinity, the scrubber started to work. Repeated attempts at flexing
the suspected area to bring back the failure was futile. Eng/Opts
requested to take the system back into their control. The problem
WILL be back. If it happens on your shift, try to pull some wire
slack back to the scrubber head, cut off 3-4 inches of wire, and
put on new pins in the connector.
"A"
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SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 13 lines 18-OCT-1995 06:25
-< carrier errors still with us... >-
--------------------------------------------------------------------------------
The carrier error once again joined us. It only happens
when the carriers go out to load on #5. It didn't error when
it came back from the polish table. Bob and I looked at the
switch that was adjusted and tried to move it. It got worse.
We put everything back and now it is just intermitting. Rich
is limping it though right now but Bob will have to take a peak
at it in the morning.
The other problem we were seeing was the conditioner arm
timing out because the machine didn't know it was home. Therefore,
it wouldn't go down. After (2) reboots, thje machine ran fine
since.
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SUBPAC::LANDRY 43 lines 18-OCT-1995 18:47
-< pad change, head alignment, slurry hoses >-
--------------------------------------------------------------------------------
Some things that transpired today with the system.........
* The system received a new pad first thing this morning. The old
pad had a >800 wafer total on it. It was smooth!!!!!!
* While the pad change took place, we had the opportunity to perform
the weekly PM. All items were performed. A good training spot for
Brad, who was pro-active with the tasks! See checksheet for details.
* The system came up quick from the pad change with excellent results
using an entire pad (hold the donut)!
* During a short recess, JP.....Bob Guug's and I checked into the carrier
timeout issue that intermittently exists. We checked out the head to
load cup alignment for head 5 (the current problem child). It was
discovered that the "out" direction travel to the load cup wasn't quite
going far enough. We performed head 5 calibration. Ran the head in
and out several times to assure repeatabillity. Just like with the
hardwiring, only time will tell if the timeout still exists.
* With the recess time ticking away, we moved on to head two performance
problem. Using DOS, we attempted to move the arm out. No response!
DCX board 2 lit the fault LED for head two travel. Reset and tried
again. Same results. No voltage command was evident between the DCX
board and the motor controller. This equates to the problem existing
from the DCX board to the motor controller. The wires in this loop
remain stationary, they don not go through the flex-track. I'm finding
it hard to believe that the cabling has a break in it. We'd like to
look at the DCX board connector next and possibly a DCX module (or
daughter board as some have called it) swap. The DCX modules are the
small boards mounted to the DCX main board, similar to the DCX modules
we've changed out on the Strasbaugh's IBM computer.
* By the way, the system did not exhibit any carrier timeouts on C shift
today. Neither was there a problem with the conditioner up/down
movement.
* Late afternoon, one of the slurry hoses on the system sprung a small
leak. It was only leaking as the pump was used. The bottom pump
was the culprit. Anyway, both hoses were changed out at this time.
Shift C and Me
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SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 19-OCT-1995 06:28
-< carrier error, scrubber stopping >-
--------------------------------------------------------------------------------
B1 ran great all night/morning without too many problems.
The carrier error popped up again. I gave head #5 a tug and
started running again. The scrubbers weren't turning during
the scrub cycle. After checking out the connector and belts,
the scrubber started working again.
D shift
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ASDG::POIRIER 16 lines 19-OCT-1995 19:39
-< Errors / New Invertor Panel Door. >-
--------------------------------------------------------------------------------
* Errors:
1 "Carrier Time Out" error occured during the shift. The system will
be going down for a cable upgrade beginning tomorrow morning at 6:00 a.m.
Electrical Panel Door:
The door on the Invertor Panel has been changed to an upgraded type
with louvers for added cooling.
John & Brad.
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SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 20-OCT-1995 08:46
-< Cable swapping has begun... >-
--------------------------------------------------------------------------------
The carriers were removed from the tool and place in water
on the table next to A1. The brushes were placed in wet sink.
All (4) reps showed up at 6am and have started the replacement
of the cables.
D shift
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Note 62.281 CMP.B1 281 of 292
ASDG::POIRIER 8 lines 20-OCT-1995 19:37
-< Cable Replacement Activity - Update >-
--------------------------------------------------------------------------------
* Cable Upgrade Activity:
The replacement of the cables has been completed and the system has
been powered-up. The Speedfam reps are currently checking their
connections and troubleshooting a problem with head #3 not moving.
John.
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SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 13 lines 21-OCT-1995 06:44
--------------------------------------------------------------------------------
The REPS found they connected up (5) cables in the
wrong connectors. This was discovered after they had
all sorts of head problems. Nothing blew up however...
The cables were re-connected to their correct locations
and they fired up the machine. They are now getting a
"table not responding error" at boot-up. They didn't
touch either table so they are troubleshooting this
now. Head #2 appears to fixed now. They founbd a broken
wire at the terminal strip area in the multihead. They
will be back hear in the a.m. to continue the upgrade.
BJ
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ASDG::POIRIER 13 lines 21-OCT-1995 19:52
-< Vendor Cable Upgrade - Update >-
--------------------------------------------------------------------------------
* Cable Upgrade:
The Speedfam reps verified proper functionality of the rotation and
oscilation on all 5 heads. They ran into a problem with the Polishing
Table rotation this morning. They have identified the problem as a
bad board in the Table Invertor. They have ordered the part and
expect it to arrive at Logan on a 7:00 a.m. flight tomorrow. They
are planning to pick-up the part at 7:00 and arrive back at HLO
by 10:00 a.m to install the board and continue trouble shooting the
system.
John & Brad.
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FABSIX::B_FINN 17 lines 23-OCT-1995 19:21
-< passdown >-
--------------------------------------------------------------------------------
Reps replaced RS232 - RS485 converter module. Table ran fine.
Changed pad. (see entry in EST). Installed carriers and attempted
breaking runs. Found particle (rust in conditioner bath) disassembled
conditioner and bearing and bearing seal, cleaned rust out and
re lubed. Reassembled.
Started running the remaining breaking wafers and load cup 2 down sensor
errored. Rep is moving sensor closer to the pedestal now.
All 5 heads are on line
Were Close.
A shift
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PATE::GEE 71 lines 24-OCT-1995 07:16
-< Flipper Assemby / poor uniformity >-
--------------------------------------------------------------------------------
* After the 2nd run the multi-head went to polish and stopped.
There was no errors, we tried to re-start but the system
wouldn't respond.
- Checked the IO's and found that #2 load cup was not
detected down, but infact it was down. We adjusted the
pedestal and sensor to finish the run.
* The unload flipper was missing #2 & #3 wafers everytime.
Called field service, they arrived at 10:00pm.
- Re-adjusted the #2 load cup pedestal and down position
sensor.
- Put the unload cups back into the designated feed thru
holes.
- Adjusted the unload cup pedestal up and moved the sensor.
- Adjusted the unload flipper fingers.
They left at 11:30.
* We ran 25 wafers then mqc's. The mqc's range came out between
7.7% and 9.0 %, 2 heads within spec. Eric B. made some
adjustments and we ran another 25 wafers then another mqc,
the range is now 5.5% to 12.0%, one carrier within spec.
* The system is down for poor uniformity and load flipper problems.
-----------------------------------------------------------------------
* Problems the Speedfam rep.'s should address this morning:
1. After the first 25 wafers the load flipper began
mis-aligning the #2 wafer in the #2 load cup every-
time. We had to manually adjust the wafer position
in the cup to complete the break-in and mqc wafers.
This happened once in # 3 also.
It seem that we are constantly re-adjusting the load
and unload flippers. The positions seem to be drifting
or maybe the system vibration is moving the flipper
assembly slightly.
The system should stay down until the positions are
re-adjusted.
2. Unload cups not seating down all the way into the
index table.
3. We have the wrong unload cup pedestal. The one
we have in the unload cup is made for the load cups,
it's to thin. They need to order use a new one.
4. The Scrub Station brushes are not rotating everytime.
We had to start it by manually rotating the motor shaft
the first time, then it ran fine for the night.
The motor maybe sticking or there is a mechanical
bind in the scrub assembly somewhere. We checked the
wiring and connector, they seem o.k. The scrub error
didn't repeat so it's had to say what the actual
problem is.
B shift
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SUBPAC::LANDRY 38 lines 24-OCT-1995 19:46
-< todays events >-
--------------------------------------------------------------------------------
At the start of the shift, the system was experiencing load problems
with the flipper to load cup position. Also, a pad change was taking
place along with the carriers being checked for proper ring extention.
* A new pad was installed. It was a modified version of the ID/OD
style. This pad had the inner portion (only) removed, with the
remainder of the pad left intact.
* The carriers were all re-installed after ring extention verification
was complete.
* A cassette of wafers was loaded up and run using the "TRANSFER"
program. No loading mishaps were seen. In fact, it was loading
very smoothly. ???
* So, the Opts folks ran some break-ins and MQC's all was well, except
carrier three's uniformity was +9%. So, a couple of more break-ins
were run. The system came up with a "wafer not detected on carrier 4"
error. The wafer was checked for proper placement (which was found
to be good) and off they went. A few runs later and the problem
re-surfaced. The pressed a button to continue, and to the polish table
it went. CRASH! Head 4 spit a wafer. So.........
* Head alignment was performed. Unfortunetly, head 4 was dead nuts on.
A couple of other heads were off, so alignment was performed. The Index
Table and Multihead positions were checked prior to any adjustments.
During the adjustments, the limit sensor for head # 2 had to be adjusted
for the proper head movement needed to complete this alignment.
* Load flipper calibration is currently taking place.
* The system will need a new pad (bare table now) and the carriers re-
installed. Three of the original carriers are still good. Jim and
Larry built the other two. The two they built are on the carrier re-
build table. The original three are staying wet in the tray near the
system.
A shifters
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Note 62.287 CMP.B1 287 of 292
PATE::GEE 31 lines 25-OCT-1995 07:26
-< Head #4 vacuum >-
--------------------------------------------------------------------------------
Replaced the pad and carriers after the wafer break today.
Began running break-in wafers. We got an error "vacuum no
found on head #4".
We checked the vacuum gauge for head #4, there was no vacuum.
Removed the vacuum line going into solenoid valve #40, vacuum
was present.
Checked the voltage to the valve connector we had 23.5v.
Checked the connector, it looked o.k.
Toggled the vacuum in manual, it worked everytime. In auto
we would get the error every other run.
We thought the valve maybe sticking so we replaced it.
The problem was still there.
-----------------------------------------------
Field service has been contacted.
* The vacuum works in manual everytime. In auto mode it
works about every other time.
B & D shift
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-< Films Only! >-
================================================================================
Note 62.288 CMP.B1 288 of 292
FABSIX::B_FINN 16 lines 25-OCT-1995 19:07
-< passdown >-
--------------------------------------------------------------------------------
Carrier 4's vacuum working intermittently. Troubleshot and found
open in common wire to solenoid 40. Found open in the wire. Replaced wire from
Multi Head terminal strip to solenoid molex. Ran 25 wafers aok. Changed
to a new ID OD pad. Wrote and stored pad conditioner recipe # 3 which centers
conditioner on pad for equal overhang and removes all oscillation from
conditioner arm per Speedfam and Larry's recommendations.
Engineering has been on it, and it's running fine.
Cut two extra speedfam ID OD pads and placed on vidmar cabinet.
A shift
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-< Films Only! >-
================================================================================
Note 62.289 CMP.B1 289 of 292
ASDG::POIRIER 8 lines 26-OCT-1995 19:37
-< System Performance / Rep Support >-
--------------------------------------------------------------------------------
* System Performance:
The tool ran well during the shift with no problems.
Darren McDougal from Speedfam has returned to Vermont but
will be on call until tomorrow at 5:00 p.m.. After tomorrow,
call the 24hr Speedfan service line for support.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 62.290 CMP.B1 290 of 292
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 27-OCT-1995 06:52
-< Weekly PM almost complete >-
--------------------------------------------------------------------------------
Most of the weekly PM was completed except for lubrications
of the scrubber, paddle and conditioner gimbal. The other items
will be submitted in the checksheet topic.
D shift
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================================================================================
Note 62.291 CMP.B1 291 of 292
ASDG::POIRIER 16 lines 27-OCT-1995 19:10
-< Unload Air Cylinder Pedistal replaced >-
--------------------------------------------------------------------------------
* Unload Air Cylinder problems:
The system errored for "Load Cups Not Down" this morning. We checked
the I/O's and found #97 (Unload Air Cylinder Sensor) not lit. We
decided to change the Air Cylinder Mushroom Pedistal from the thin
type to the thick style per Speedfams request. The thick type
increase the Cup travel by 1/8". After the Unit was reassembled,
the Cup sensor was readjusted and the "Unload FLpper" pick-up
position was taught a new location.
Reminder: For Speedfam support tonight and thru the weekend, call
their 24 hr support line. All reps have returned to Az.
John & Brad.
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-< Films Only! >-
================================================================================
Note 62.292 CMP.B1 292 of 292
SUBPAC::LANDRY 26 lines 30-OCT-1995 18:56
-< exhaust work, monthly PM, pad change >-
--------------------------------------------------------------------------------
Lots of activity on this baby today...........
* The system ran up until about noon time. At that time, many
things happened with the system.
- There was a scheduled down situation to allow some contractor
work to be done on the exhaust line. The work centered around
preparation for the much awaited Speedfam (B2), which will be
brought into the fab on Wednesday.
- Some other contractor work performed was the laying of PVC pipe.
The polisher remained running as this work didn't impact the
system from running (no direct tie_in/break_in done on B1's
facilities inputs)
- The Monthly PM was performed in this time frame. And just in
time, as the slurry lines were mighty thin.
- The pad was changed out. The conditioner wheel was broken down,
cleaned, and re-assembled.
* Later on, the system errored for NO rotation/Inverter error. The
problem was traced back to the "wafer detection sensors" being wet.
They were dried and away we go.
A Shifters
|
| 17.105 | B1 wafer breakage due to loose screws | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 30 1995 08:47 | 11 |
|
Many 3mm clamp ring screws were found loose after the
tool had crashed. An exercise wafer slid out of carrier #1,
slid under #5 (scratching the product wafer) then crashing
into #4, scratching the product wafer there as well. Carriers
#1, #4 and #5 were replaced due to the crash. The screws on
carriers #2 and #3 were found loose. They along with the three
new carriers now have an exposure of -7 to -7.5. John is
running to the hardware store to look for a different type of
washer such as a star washer.
BJ
|
| 17.106 | (2) wafer crashes | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 01 1995 08:35 | 17 |
|
The tool crashed twice tonight, not "bad" crashes
but a crash is a crash. The first time, a product wafer
broke in carrier #2 and sent "sand" sized particles to the
other carriers. (4) product wafers were all scratched.
The carrier rings were scorn and all pulled off. After
looking into them later, some of the films were ok and
some weren't. I was able to rebuild some. The second
crash came from #4 and was cracked during polish. The
wafer was unloaded in two pieces. There were some
particles on the pad but the carriers were ok. The
only thing that was common was that it looks like both
wafers broke at the notch. ENG has the ball.
BJ
|
| 17.107 | Load Cup height adjustment | ASDG::POIRIER | | Fri Dec 01 1995 19:31 | 20 |
|
Load Cup Height Adjustment:
Samples of the broken wafers from last nights breakage incident
indicated that a wafer may have fractured during the load sequence.
Therefore, we decided to inspect the load cup height adjustment.
Inspection was extreamly dificult due to the vague instructions in the
manual (Speedfam was called for clarification), very limited access
to the adjustment rods & rusted extention rods and lock nuts. (We had
to run a 5/16 - 18 die down some of the extention rods and tap-out one
of the tapped holes in an Air Cylinder Piston).
All 5 load cups have been adjusted and tightened in place. D shift,
please double check the load cup air cylinder sensor adjustment on all
5 air cylinders as we are running out of time.
|
| 17.108 | Spindle Alingment Out | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 02 1995 07:32 | 17 |
|
The cups up/down was checked for sensor detecting and
speed and the flipper handling. #2 was a little fast going
up so it was slowed down to match the rest. Everything else
was ok... The tool ran 45 wafers before #5 cracked on the
table. The carreirs were ok. we checked the index table
to spindle alignment and found spindle #2 and #5 way out.
#2 and #5 as you know were the ones that kept crashing.
Upon completing this task, I noticed all of the load and
unload cups were in the wrong places. The MUST be put
back in their own holes....... Ops ran 50 wafers with
no problems. MQC's ran and passed uniformity but had a
a small scratch on one wafer. C shift OPS will be informed
and they will either run it or do (5) more wafers to verify.
D shift
|
| 17.109 | Vacuum Errors / load Errors / Wafer Fly-out | FABSIX::R_GEE | | Sun Dec 03 1995 06:54 | 36 |
|
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]CMP.NOTE;1 >>>
-< CMP >-
================================================================================
Note 19.19 CMP.B2 EE/PE PASSDOWNS 19 of 19
ASDG::POIRIER 26 lines 2-DEC-1995 19:35
-< Vacuum Errors / Load Errors / Wafer Fly-out >-
--------------------------------------------------------------------------------
Vacuum Failure:
The system alarmed for "main vacuum too low" at approx 5:00p.m.
I found the vacuum pump off, breaker #6 tripped & the check valve
bound-up with dried slurry. I replaced the check valve and reset the
breaker. The vacuum rose to 25 in hg. ( The old check valve was
cleaned. Its on the toolbox minus the spring which is under the floor).
We then attempted to boot-up and experienced a "fatal error". We powered
down the system and tried again. This time everything looked normal
until the sytem errored for "carriers 3,4 & 5 not seated in cups
properly". We recovered from this situation by powering down and
rebooting.
We then ran 15 wafers with the transfer program with no problems. After
that, we changed to the break-in program. During the first run, a wafer
slid out of carrier #1 during lift off. The wafer slid to the edge of
the table as the table came to a stop. The wafer did not break. B
shift, check the spindle to cup aligment on cup #1. D Shift found 2
spindles off center with the load cups last night. Maybe they're
drifting out of locaton. The system is in BGN_REPAIR in workstream.
We left it in Wet Idle Mode.
During load while the conditioning screen was up.
|
| 17.110 | Vacuum Problems | FABSIX::R_GEE | | Sun Dec 03 1995 06:55 | 36 |
| * Checked spindle #1 load cup alignment do to "A" shifts
passdown, it looked good.
* Tried to run the Transfer program, but came up with a
Low vacuum to all heads error.
- Checked head #4 & #5 vacuum gauges, they both read 15hg.
- Powered down and checked the vacuum at the tank. It read
26hg, but when you start it up and pull vacuum on all 5 heads
it would read 15hg and never recover.
- Checked the wafer positions on all 5 carriers to verify
the wafers where seated correctly, all looked good.
- Replaced the check valve with the old cleaned up one.
- Cleaned the inside of the vacuum pump.
* Began running again, vacuum increased to 26hg at the spindles.
- Ran 25 wafers with no problems, started mqc's.
* Came up with a "low main vacuum" error.
- Found the breaker #13 had tripped, also #6,(carrier #4 & #5
rotation).
- Reset Breaker #6.
- Reset Breaker #13, this took many tries before it would stay on.
* Ran 25 more wafers then MQC's with no errors, the system is up
in RTC.
B shift
|
| 17.111 | vacuum error | FABSIX::B_FINN | | Sun Dec 03 1995 19:28 | 18 |
|
Would not pick wafers up on table (carrier 5). Low vacuum alarm.
Pump was on. Vacuum tank was at 0 "hg. Check for appropriate vacuum after
check valve, found NO vacuum, check directly at output of pump, found NO
vacuum although pump was on. Dismantled pump, diaphrams were fine, but
filter had been caught in screw in NPT fitting at pump input. This, plus some
dried slurry was choking off input side of the pump. Took pump, diaphrams,
filters and fittings apart cleaned and reassembled. Replaced scored vacuum line
and tested. Vacuum was at pump but not past check valve, installed original
style check valve. Tested aok.
Adjusted cup locating pins for Load 5 and Unload 2. This will prevent the cups
from twisting.
A shift
|
| 17.112 | Bridge failure / broken wafer | FABSIX::R_GEE | | Mon Dec 04 1995 07:28 | 19 |
| * After stopping wet mode the bridge wouldn't move.
- The carriers went up then an error was displayed
"Timeout waiting for Bridge at polish".
- Tried to re-home the bridge but no luck, had to reset the
computer. The error never repeated.
* Broke a monitor wafer on the pad around 6am.
- A wafer slid out from under carrier #4, replaced the pad
and carriers #3 & #4. Checked vacuum to the head, it was
25hg, good. Checked to see if the wafers are seating into
the carrier properly, looked good.
- Ran 50 breakin wafers, the system is ready for MQC's.
B shift
|
| 17.113 | | SUBPAC::LANDRY | | Tue Dec 05 1995 20:29 | 27 |
| The infamous low vacuum problem cropped up again today. Here's the
details of the problem/fix.
* The system errored for "no wafer on heads 2 & 5"
* The vacuum tank gauge was checked and we were pulling only 18" Hg
* Removed the check valve/needle valve from the loop and the system
pumped down to @ 22" Hg, still not the optimal situation
* Broke down, cleaned up and re-installed the check valve and needle
valve. Slurry (still damp) was found in the check valve. The
needle valve was ok.
* After re-instalment, check the performance. The pump down response
was slow, but making it to 23" Hg. Ran three cycles of the transfer
recipe without failure
* At this point, Opts began running again.
* The system went down very shortly thereafter for low vacuum.
* Again, found slurry in the check valve. Rebuilt it.
* The pump was also changed at this time for slow pump down
performance. The pump isn't new, rather, it's
* Found some slurry in the vacuum line between the tank and the pump
* Flushed the hose to remove any "hidden" slurry blobs.
* Retried pumping performance. The tank pumps down to 25" Hg and
never gets below 20". Very acceptable at this time.
* Ran a cassette of wafer using the transfer program and tank vacuum
was steady, staying over 22" throughout the testing.
* Opts has the system back
Doc / Brendan / Guug's
|
| 17.114 | cup not down time out error | STRATA::RIDLON | Eliminate the obvious | Wed Dec 06 1995 05:33 | 22 |
| System alarmed for cups not down time out error twice during the shift.
Once production was through this is what I found.
* Both errors occured while unload cup 2 was over the load cup #3
solenoid (labeled "Send load cup 3 up" in pnuematics cabinet).
* Both times the solenoid was pushed down by hand.
* Unload cup 2's up and down movement was compared to unload cup 1's
and was found to have more friction.
* The shaft and hole for ul2 cup was cleaned which improved the up/down
movement. However this didn't correct the problem.
* Exercised load cup 3's solenoid and found that down sensor wasn't
being met (dig-in #94).
* Loosened the setscrew on the down sensor and moved it out of the
way which gave the solenoid the clearence it needed to go all the
way down.
* While the solenoid was down adjusted the sensor so that dig-in 94
was satisfied.
* Exercised load cup 3's solenoid several times to insure that the
plunger wouldn't hit the sensor and that dig-in 94 was being
satisfied.
B shift
|
| 17.115 | passdown | FABSIX::B_FINN | | Wed Dec 06 1995 19:14 | 20 |
|
Elevator #1 failed to index. Rep added new connector to pins on power
cable. System ran half a lot then faulted for the same error. Check
in manual and elevator 1 would not index or home. OHM'ed power cable
to motor. aok Swapped cables (power and tach between elevator motors
and problem moved to elevator #2) isolated to tach cable. Ohm'ed out
and found two bad wires. One was open and one was intermittent (broke
while handling.) Cut cable back and re solder all wires to
tach D connector. Elevator ran fine.
Water level at cassette #1 was low and would not float wafer to
cassette. Adjusted water level and sticking float sensor.
Brendan/ Bob
|
| 17.116 | vacuum and rotating problems | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Dec 07 1995 09:08 | 19 |
|
We came into vacuum problems at the beginning of the shift.
I inspected the check-valve and it was clogged. I also found
the needle valve clogged. After they were replaced, the vacuum
went right to 25. I ran a 25 wafer verify run and had no problems.
About three hours later, there was a new problem. The MHD picked
up (5) wafers and went to the polish table and everything satarted
to rotate as it should. Just before the carriers were ready to
go down, all (5) carriers and table stopped rotating and errored
on all saying they weren't rotating. Now breakers were tripped
and now wafer detects were tripped. There was a red LED on #5
of the #2 MDX board but I wasn't able to find out what it was.
After I moved the MHD to LOAD, the tool errored saying the MHD
didn't reach LOAD. That problem went away. I spoke with Bob
Guggerty on the phone and he was baffled. He was suppose to
be here around 7:45am so he should be in the fab.
BJ
|
| 17.117 | Vacuum Tank Popet Valve rebuilt / Head #4 Wafer Loss Sensor | ASDG::POIRIER | | Thu Dec 07 1995 19:17 | 45 |
|
* Vacuum Tank Popet valve:
-----------------------
The reoccuring "Main Vacuum Too Low" error was traced back to the
vacuum tank popet valve. This valve was replaced approx 3 months ago.
The internal o-rings looked worn and were replaced. The valve was
reassembled and installed back into the tank. The tool has been
running for approx 5 hours with no vacuum errors.
Having experienced this situation twice now, it appears that the
following senerio takes place:
1) The system errors for "Main Vacuum Too Low".
2) We disassemble the check valve and find it bound-up
and full of dried slurry residue.
3) We replace the check valve only to discover the exact same
conditions two days later.
4) Soon thereafter, the vacuum pump fails due to the ingestion of
large quantities of slurry.
What we learned:
---------------
The vacuum tank popet valve must completly close and seal every time
it's activated or slurry will leak by and contaminate the check
valve, needle valve & vacuum pump.
Close inspection of the popet valve revealed a questionable design
where the sealing surfaces for the internal o-rings were of unusual
design. There were sharp edges in bore of the valve that appeared
to shave the edges of the main sealing o-ring. The condition of this
valve was not very reassuring after only 3 months of service.
Bob Gugerty, our Speedfam field service rep, is filing a report on
this situation with the hope of recieving a better quality valve
sometime soon.
* Head #4 Wafer Loss Detection Sensor:
-----------------------------------
The Wafer Loss Sensor on head #4 was repositioned. It lookslike it was
sensing the side of the carrier.
|
| 17.118 | Table and Carriers not rotating | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 05:18 | 11 |
|
From C shift, the table and carriers weren't spinning
in polish step. The problem went away. It popped up
on us and I checked the program they were using which
was I_o_LDA, and found in segment #3, which is the
polish step and found all RPM's set to 0. They are
suppose to be at 37. Tool ran fine for the rest of
the morning.
BJ
|
| 17.119 | Gremlins | STRATA::RIDLON | Eliminate the obvious | Mon Dec 11 1995 02:58 | 10 |
| System alarmed because wafer wasn't making into elevator 1's cassette.
Wafer wasn't making it into cassette because elevator 1 wasn't full
of water. The operators were able to "manipulate" the wafers into the
cassette so the run was continued. Traced some signals and found that
the elevator 1's quick dump valve was being commanded open by dig-out
70. Once the run was completed the elevator was cycled out of and back
into service which corrected the problem. Cycled it a couple of more
times and problem didn't reoccur.
B shift
|
| 17.120 | Slurry pump lines | FABSIX::R_GEE | | Mon Dec 11 1995 06:52 | 5 |
| * Blew a slurry pump line.
- replaced both slurry pump lines and cleaned the system.
B shift
|
| 17.121 | | FABSIX::B_FINN | | Mon Dec 11 1995 19:33 | 29 |
|
Weekly pm completed. Assisted by Larry C. and Jim S.
Upon startup, low vac error occurred found pump breaker tripped.
Continually tripped, Tim found pump dead headed. I adjusted bleedoff
needle valve. aok
In the late afternoon Jim was running a laminate split with program
I/O ILD b. The range was high he felt it was due to carriers 1+4 so he took
them off line. Sometime into the run he notice that the heads were not
oscillating. I checked for DXC and infornor errors but all was fine.
Program was fine I had Larry C. confirm.
Put all five heads back on line without powering down. Tied 5
wafers on on programs I/O ILD A, I/O ILD B and I/O ILD C. System ran fine.
Took head 1+4 off line and ILD A past but B+C FAIL for NO OSCILLATION, and no
system errors.
Jim found after 100% measure that heads 1 + 4 are not a problem, all 5 heads
are back on line. Suspect software problem. But system just ran another lot
aok.
Brendan
|
| 17.122 | Drain valve Elevator 2 | LUDWIG::RIDLON | Eliminate the obvious | Tue Dec 12 1995 06:42 | 15 |
| Elevator cassette #2 did not fill with water during product run.
We checked the usual signals (dig-out 68-71) and found every thing as
it should be, ie, the drain was closed and the quick fill was on
(electronically). Looking at the drain valve it appeared that it was
still open. Wacked it with a hammer a few times and it closed. Once
production was through with the system we removed the lower portion of
the drain valve and disassembled. The spring inside was painted and
some of the paint had come off which may have contributed to the valve
sticking close. Also found the oring on the plunger cracked, this was
replaced. Cleaned it up and regreased with the teflon grease in the
tool box. Reassembled and reinstalled and it tested fine.
B shift
|
| 17.123 | passdown | LUDWIG::FINN | | Tue Dec 12 1995 19:26 | 9 |
|
Wafers piled up at input of elevator #2, due to rinse not filling with
water. One wafer broke. Valve is sticking again. Cleaned both elevators and
scrub station. Thanks for the help FRANK. Ordered a new valve through
Speedfam. Shut off Elevator two and we are running on elevator 1. Warning
placed on system until new valve is installed. Valve should be in
tomorrow fedx.
Brendan/Frank
|
| 17.124 | passdown | FABSIX::L_SHKOLNIKOV | | Wed Dec 13 1995 07:00 | 9 |
| Upon startup, elevator #1 not responding error occurred went into hardware
enable screen everything looked fine but didn't work. Took elevator #2 back
in service - #1 started work again. Machine was running all night with on
elevator just did not use #2. Suspect software problem. But system just run
another lot fine.
Later got error message MOISTURE SENSOR ACTIVE. Checked bottom cabinet
on elevator side found about a gallon of water on the bottom and couple
loose fittings of elevator #2 drain pipe. Problem corrected. Machine running
fine since then.
|
| 17.125 | R Recieve Elev Dump Valve / Vac Tank Poppet Valve | ASDG::POIRIER | | Sat Dec 16 1995 19:20 | 19 |
|
* Recieve Elevator Dump Valve:
--------------------------
The Recieve Elevator Dump Valve has arrived. It's on the Snap-on
tool box. Please install the valve at the first available opportunity.
The Right Recieve Elevator is currently off-line do to the dump valve
sticking.
* Vacuum Tank Poppet Valve:
------------------------
We're having problems again with slurry getting drawn thru the entire
vacuum system. We believe the root cause is the Vacuum Tank Poppet
valve not closing completely. A replacement valve arrived today.
Please replace the valve at the earliest possible opportunity. The
check valve is clogging approx every 2 days. The old check valve was
cleaned and stored in the pnumatics cabinet for a quick swap. The
system has been running non-stop for the last 3 shifts.
|
| 17.126 | new dumper in | LUDWIG::RIDLON | Eliminate the obvious | Sun Dec 17 1995 03:33 | 3 |
| Replaced the dump valve on elevator 2 with the new one. Tested fine.
B shift
|
| 17.127 | Vacuum tank poppet valve / index table gearbox leak | FABSIX::R_GEE | | Mon Dec 18 1995 07:07 | 13 |
| * "C" shift passdown indicated the vacuum tank poppet valve
needed to be replaced.
Replaced the vacuum tank poppet valve, tested o.k. Dis-
assembled the old poppet valve, found no visible problems
with it.
* Noticed the index table gear box is leaking oil from
the rear shaft seal. Checked the oil level, it's still
above the bottom of the fill hole. We need to order
a seal and bottom case gasket to repair the leak.
B shift
|
| 17.128 | pad/carrier change | SUBPAC::LANDRY | | Tue Dec 19 1995 18:23 | 10 |
|
* The pad and all 5 carriers were changed today.
* The five used carriers were dismantled with 3 used plates being
cased up for shipment. The film was removed from the other 2
plates. DF "experimental" film was applied to them and will be
used for experimental purposes in the near future.
A shift
|
| 17.129 | Main Vacuum to low. | FABSIX::R_GEE | | Wed Dec 20 1995 04:00 | 9 |
| * The system errored for "main vacuum to low".
Found no vacuum in the vacuum tank. Had to remove
and clean check valve, needle valve, all fittings.
Rebuilt and clean the top part of the vacuum pump.
Everything was clogged with dried slurry.
B shift
|
| 17.130 | Scratches | ASDG::POIRIER | | Fri Dec 22 1995 17:26 | 11 |
|
* Scratches:
----------
The system has been scratching wafers since the begining of the
shift. It was suggested that the inside edge of the Pad might be
responsible so we trimmed the inside edge of the Pad and rinsed
everything down thoroughly. Still no improvement! At this point,
it doesn't make much sense to continue because the Pad will be
removed very soon as part of the shutdown activity. We'll have to
wait for results when the new Pad is MQC'd at start-up.
|
| 17.131 | SHUTDOWN COMPLETED, SCRATCHES | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 23 1995 01:11 | 13 |
|
Since the tool still has scratch problems. This was
logged down. Tim D. said to keep it down and start the
shutdown procedure. The checksheet has been completed
with the exception of the slurry purge. That will commence
when the rest of the tools are shutdown.
I left a PVC/SS setup with B2 for the N2/DI purge. Disconnect
the 3/4" elbow from the main shutoff valve above the floor and
put the fitting on. I used the existing N2 line for the 40psi
purge.
D shift
|
| 17.132 | Start-up for 12/29 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 29 1995 15:10 | 12 |
|
The DI came on but is still out of spec so we didn't want
to keep it to the tool so we shut off the DI feed and opened the
by-pass. Facilities still have some by-passes opened, that's
why we don't have very high pressure.
The slurry lines are all back to normal and slurry is flowing.
We put the filter on but but we didn't run the slurry through
the machine because of the DI situation.
Mitch,John,Leon,BJ
|
| 17.133 | CMP.B1 START-UP COMPLETE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sun Dec 31 1995 14:35 | 18 |
|
CMP.B1 START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
1) RE-CONNECT DI WATER B/C/D-12/31/95
2) POWER ON SYSTEM B/C/D-12/31/95
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTE B/C/D-12/31/95
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY B/C/D-12/31/95
5) DRY TABLES, INSTALL PADS
6) INSTALL SCRUBBER BRUSHES B/C/D-12/31/95
7) INSTALL CONDITIONER B/C/D-12/31/95
8) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) B/C/D-12/31/95
9) REPLACE SLURRY FILTERS B/C/D-12/31/95
10) CONTACT ASHLAND CHEMICAL, REQUEST DI TO BE PURGE FROM B/C/D-12/31/95
SLURRY SYSTEM AND CHARGED WITH SLURRY
11) CALIBRATE SLURRY FLOW B/C/D-12/31/95
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQCS
|
| 17.134 | Head-4, Cond arm failure | STRATA::TDYER | | Tue Jan 02 1996 15:32 | 12 |
|
CMP.B1 - The system did not want to cooperate today durring MQCs. Head-4
failed to rotate, Tim L. found the connector loose on DCX bd-2.
The conditioner failed to go home. A broker wire was found on the
connector for the "conditioner at home" sensors. Eventualy we
ran MQC's. High particles were described as a "streak" by B shift.
We noticed that some of the wafers today after polish had a steak,
a 1" by 3" stripe of THIN oxide. This may be a film quality
issues from the CVD tools. The oxidemsy be less dense in the
striped area and polished faster. The thinner oxide causes problems
when reading on the Tencor. All MQCs passed.
|
| 17.135 | broken wafers | SUBPAC::LANDRY | | Tue Jan 02 1996 19:41 | 15 |
| See Tim D's note prior to this note. I'll pick up where that one ends!
The system passed MQC's and began to run product. A wafer was lost
from head 4, taking that and the next carrier out. Cleaned up the
wafers, installed a new pad and it's currently awaiting a fourth
carrier to come in from the rebuild room. There are no plates left
in house, so the system will run four heads for now.
The reason for the loss of wafer may have been due to an interlock
triggering the power to shut off on the system.
Doc
|
| 17.136 | pressure plate tolerances out of spec | SUBPAC::LANDRY | | Wed Jan 03 1996 19:35 | 6 |
| The system is down until new pressure plates arrive. We have found
that the last several plate changes have had a film curvature in excess
of the 2 um that is spec'd. Some plates have been found to be in the
10-20 um range, resulting in extremely poor uniformity.
Doc
|
| 17.137 | Infranor's rewired / Scrubber Rebuilt | ASDG::POIRIER | | Thu Jan 04 1996 18:54 | 18 |
|
* Power Supplies & Motor Controllers:
----------------------------------
The Infranor's were rewired with the Factory supplied wiring kits.
The Connectors were partially pre-wired, it was still necessary to
remove the Motor Controller Cable Wires from the old Connectors and
fasten them into the new ones.
* Scrubber:
--------
The Scrubber was torn down and rebuilt today. The unit was adjusted
and tested. It seems to be working fine.
|
| 17.139 | DOWNFORCE CHECKED/ADJ./RESULTS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 04 1996 22:10 | 22 |
|
the downforce calibration was done on all (5) heads.
Listed below is all of the data collected and original
results of each head.
========================================================================
CARRIER # | INPUT COEFF. | OUTPUT COEFF. | INITIAL | CURRENT
| | | ACTUAL LBS. | ACTUAL LBS.
| | | @375 | @375
========================================================================
#1 | .46182 | 6.19467 | 380 LBS | 375 LBS
========================================================================
#2 | .47710 | 5.99467 | 377 LBS | 375 LBS
========================================================================
#3 | .48765 | 5.82933 | 395 LBS | 375 LBS
========================================================================
#4 | .46972 | 5.95467 | 355 LBS | 375 LBS
========================================================================
#5 | .48201 | 5.99467 | 389 LBS | 375 LBS
========================================================================
|
| 17.138 | 1/3 B SHIFT P-DOWN - SCRATCHES, CRASH | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 05 1996 01:16 | 27 |
| From: FABSIX::R_GEE "Bob Gee, Beeper #184 03-Jan-1996 0808" 3-JAN-1996 08:12:00.39
To: @CMP_ALL
CC: R_GEE
Subj: Passdown, the notes file is down. Info for CMP.a1,CMP.B1,CMP.B2
CMP.B1
------
* The system was down until 3am due to scratches (?)
found on the mqc wafers. A second mqc was run with no
scratches found.
* At 6 am the system powered itself down in the middle
of polishing for no apparent reason, crashing all 4 wafers.
- we found that carrier #1 had been polishing
a broken wafer for some time. The wafer detection
didn't detect the crash due to the small size of
the particles.
We thing the system powered itself down due to high
amps. from either the table or head #1.
B shift
|
| 17.141 | carrier 3 disabled | STRATA::RIDLON | Eliminate the obvious | Sun Jan 07 1996 05:32 | 12 |
| Carrier 3 would not rotate with a wafer loaded and down on the pad.
Rotated fine in wet mode. Checked the infranors and found the orange
x5 motor control plug not seated properly on motor control #9.
Reseated and tried again but still the carrier would not turn. Pulled
out mc#9 and looked at the orange connector. Found wires w9 and u7
backwards. Put them in their proper slots and tested again and now the
carrier wouldn't turn in wet mode. The w9 and u7 must be switched at
the motor as well. Left the wires where they should be and removed the
carrier and disabled it as well.
B shift
|
| 17.142 | rotation blues...... | SUBPAC::LANDRY | | Sun Jan 07 1996 19:02 | 13 |
| Found the prints to be wrong on the motor controllers. Wires that were
switched on the B shift HAVE been returned to their original places.
The two wires of concern are U7 & W9.
Checked all connections at the motor controller, all good. Checked the
connections at the DCX board. They appeared to be fine as well. Went
into DOS and ran a rotation macro program to check the rotation. All
heads rotated. At next MQC, the carrier should be reinstalled and
actual performance of rotation on the pad should be checked out.
Doc
|
| 17.143 | no rotation update | SUBPAC::LANDRY | | Mon Jan 08 1996 17:29 | 23 |
| The status of head three remains the same, rotation stops when the head
is on the table under a load. Eevn with the swap of the Infranor (B2,
head 3), the problem still exists. The next likely senario is a bad
connection or broken wire. The connections at the Infranor are good
and the connection at the DCX board is good. The other junction spots
need to be looked at. Ohming of the wires may need to be done if the
connections prove to be fine.
At the start of the shift, scratches were occuring on the wafers. They
could have been caused by silicon chips found in the index table or
possibly from the rough cut ID of the pad. The cut left several burrs
on the top portion of the pad. Also, Jim S cleaned other possibly
areas as a plus.
The system broke a wafer late morning. The wafer came from head 5,
taking head fours carrier/ring out. The plate that was on carrier five
is fine, but the ring will need to be replaced prior to re-using. It's
keeping wet in the tray near the sink.
MQC's are being re-run as I type this memo.
Jim / Tim / Doc
|
| 17.144 | parts / help on the way...... | SUBPAC::LANDRY | | Mon Jan 08 1996 17:33 | 7 |
| I forgot to mention in the prior note, Darren McDougal will be flying
in with parts (Infranors, Wafer detection bd., etc). Hopefully, he
will arrive tomorrow, airports willing!
Doc
|
| 17.145 | huge steps....backwards. | STRATA::RIDLON | Eliminate the obvious | Tue Jan 09 1996 03:18 | 25 |
| Got a call from Tim with a suggestion of checking the down force on
head 3. With a setpoint of 300 the actual was around 290. We also ran
some dummies through using bin1 breakin recipe which uses less down
force. Still no head 3 rotation upon touch down. My next bright idea
was to switch the cables from motor control 10 to motor control 9. Both
the resolver (x1) and dcx board connectors (x2) were swapped and the
five cables from the orange connector (that go to the motor) were
swapped. W9 and U7 weren't swapped for head 4 so they were put onto
mc#3 in there normal positions. All this proved for not as the carrier
#4 wouldn't rotate. Put all the wires where they're supposed to go
thinking everything would be fine but ran into some problems. Carrier
#4 wouldn't rotate. Bob noticed that it looked like it was trying to
rotate backwards so w9 and u7 were swapped on mc#4 and the head
rotated. BUT it wouldn't rotate on the pad!!!! AGGGGHHHHHHHHHHH...shoot
me. Ohmed out from x5 pins 6,7,8,9 on the motor controller to the motor
connector pins a,b,c,d on both motor #9 and #10. As it turns out both
motors are pinned backwards, ie, W9 on x5-9 is supposed to go to pin C
but the wire labeled w9 is soldered to pin A so you have to swap wires
U7 and W9 on the orange plug x5. I know for a fact that the wires were
NOT swapped before I removed them from mc#10 because I wrote their
locations down. So I guess the question is how did it work before????
Kind of long winded, hopefully its clear. Shitty week and its only
3:20.
B shift
|
| 17.146 | head 4 rotation problem re-appears | SUBPAC::LANDRY | | Tue Jan 09 1996 19:33 | 12 |
| * See Tim Dyers general passdown note prior to this.
Head four stopped rotating once again. The head has been taken off
line until tomorrow. The reps are due in tomorrow to look at this
re-occuring problem.
The uniformity is good on all heads, put the MQC's show scratches on
every wafer. We ran the TRANSFER program, no scratches were found.
So, the problem resides at touchdown / polishing steps. Good luck.
Doc
|
| 17.147 | HEAD #4 NOT ROTATING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 10 1996 06:19 | 8 |
|
Came in and had B1 down for scratches. We replaced the pad
and brought it back up. We used head #4 and it errored during
the first initial (5) wafers for break-in. I looked the wiring
on the infanor for the head and everything looked ok. We started
the tool back up and we didn't have a problem since.
BJ
|
| 17.148 | H3,4 NO ROT UNDER LOAD | LUDWIG::TDYER | | Wed Jan 10 1996 10:33 | 11 |
|
CMP.B1 - We replaced ALL the lugs at head-3's infanor connector and it worked
under load. Head-4 also would not work under load today. At the
terminal board on the left side of the multi-head, we swapped the
3 motor phases. We swapped them at this location because access
is best. Originally the phases from top to bottom on the terminal
board was U, V, W (Sine, com, Cosine). They are now wired V, W, U
(com, Cosine, Sine). ALL heads tested OK, MQCs pass and system is
up. I will schedule some time and we will re-label the wires in their
current location.
|
| 17.149 | More scratches | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 11 1996 07:01 | 14 |
|
The tool was MQC'ed twice and failed both times for scratches.
We installed a new pad and checked as much things as we could
thing of as being the source of the scratches. I know the brushes
were changed so I swapped the lowers with the uppers to start.
(5) wafers - no-touch, no scrub - no scratches
(5) wafers - no-touch, scrub - no scratches
(10) wafers - I_O_MQC recipe, 120 second polish - scratches
(5) wafers - I_O_MQC recipe, 120 second polish - scratches
no oscillation with positioning set at 129 on
both segments
|
| 17.150 | Particle Problems / Slurry Filter Changed | ASDG::POIRIER | | Thu Jan 11 1996 19:14 | 10 |
|
* Particle Problems:
-----------------
The system is still suffering from high particles. They appear as
scratches on the Surfscan due to the density of the particle
distribution. However, they're really a group of densly spaced
particles. After numerous trials to isolate the source, we're
currently investigating the slurry supply. A new 10 micron
slurry fitler was installed on the tool at 7:00 p.m.
Particle MQC"s will commence shortly.
|
| 17.151 | Scratches - The saga continues | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 12 1996 05:30 | 31 |
|
The conditioner was checked and this is the result...
@ 100% - 53 lbs - book says 50 lbs
@ 67% - 31.6 lbs
The top panel was installed. There was alot of metal shaving
debris from aparent drilling. Everything was wiped up. The
outside panels that access the spindles were removed and low and
behold, the inner covers were all off and all of the slurry, metal
chips and grease where evident and all ready to fall down below.
There wewre even some broken chips of wafers in there. Everything
was vacuumed and cleaned out. All of the inner and outer covers
were put back on. This should work right???? hahahahahahahahaha
NOT! the scratches are still there and are
actually worse. They are #6-#10 wafers
in the marked cassette next to the surf
scan. The I_O_MQC program was run. The
pre-particle test was done with PETOS-12K
and post done with PETOS-6K.
The pad that was on the tool when we cvame in last night
was removed and I cut up three different sections and
placed them in seperate bags. I left them on the back
table marked for Tim and Frank to look at.
BJ
|
| 17.152 | SCRATCHES/VENDOR WORK | FABSIX::B_WESTPHAL | | Fri Jan 12 1996 19:39 | 9 |
| CMP.B1 - Down for scratches and work by reps. The reps. upgraded the vacuum
system with some new hose, a gauge that can be read from inside the
vacuum cabinet and a moisture filter. They also calibrated the down
force for each head to 377. To fight scratches The multihead was
blown out w/ N2 and the entire inside of the tool was wiped down. The
Conditioner was taken apart and checked to if any particles were being
generated from inside. It was also recommended by the reps that no
grease be used to lube the conditioners gimble bearing. The tool
has a new pad and presently sits at verify_u.
|
| 17.153 | SCRATCHES,SCRATCHES... | FABSIX::L_SHKOLNIKOV | | Sat Jan 13 1996 07:05 | 10 |
| CMP.B1 - System still down for scratches. First run - no vacuum present on
the carriers,found lose hose connector on multihead. Machine run
fine (mechanically) after that. Failed MQC's for scratches.
According to action plan BLOCKY conditioner has been installed and
pad replaced.
D-shift
|
| 17.154 | wafer detection adjustment | FABSIX::B_FINN | | Sun Jan 14 1996 18:02 | 6 |
|
System alarmed for "inverter error". Found wafer detect alarm on
carrier 5. Wafer detect was lit even when no wafer was present. We calibrated
wafer detect sensor for carrier 5. Ran test wafers aok
A shift
|
| 17.155 | internal slurry line purge | STRATA::RIDLON | Eliminate the obvious | Mon Jan 15 1996 01:56 | 15 |
| Testing on A shift kind of pointed to the slurry lines being the source
for particls. We only have two operators tonight so we thought it would
be best if we rigged the slurry lines to purge di water for most of
the night. We put in jumper lines from the slurry in to slurry out
manual valves in the fluids box and then hooked up the slurry in lines
to the two spare solenoid valves (sv-66, sv-67). We wired these valves
directly to 24vdc and undid the slurry pumps so that the di could free
flow. We also had to turn on dig-outs 74 and 75 (slurry flow 1 and 2
solenoid valves) and whala, we had flow. We did run into one problem
though, when we powered down the system to hook sv66&67 to 24vdc the
vacuum pump wouldn't restart on power up. We installed the one that was
in the room and it worked fine. We'll put everything back to normal
before passdown so that testing can resume on A-shift.
B shift
|
| 17.156 | major spindle work ahead | SUBPAC::LANDRY | | Mon Jan 15 1996 19:38 | 18 |
| Slurry and pad expirements were run today, due to the scratching
problem. See Tim D's passdown for details.
Rust is coming through at least three of the spindle assembly's. They
are currently being dis-assembled. Parts are being ordered. Much work
ahead to recover from this situation. Please organize parts when dis-
assembling the heads.
Head three is almost out, as Brendan is feverishly working away.
The carriers need to be stripped down and thouroughly cleaned and
re-assembled. One has been completed, it's located on the cart with
the pressure plate facing up. Please wet it down occassionally.
Another carrier has been dis-assembled and cleaned, awaiting
re-assembly. It's on the bench next to the sink.
A Shift
|
| 17.157 | Spindle removal | FABSIX::R_GEE | | Tue Jan 16 1996 07:04 | 16 |
| Removed the four remaining spindle rotation motors, solenoid valves
clear lines, fittings going to the rotary unions, gauges and rotary
union guide rails.
Removed the quick release chucks and bellows from heads #1,3,4,5.
The chuck from head #2 is rusted onto the rotary union shaft and
will not come off, it has been lub'ed with oil and hopefully will
free up for "A" shift.
All the parts are located on a rack behind CMP.A2, each spindle
has it's designated shelf top #5 bottom #1.
One more carrier has been dismantled and is on the table next to
the sink.
B shift
|
| 17.158 | new rotory unions | FABSIX::B_FINN | | Tue Jan 16 1996 19:20 | 11 |
|
See Tim's pass down. Reps are finishing up the installation of rotary
unions. They have asked we continue the installation of the motors and
solenoid manifold and hooked up all cables and sensors with the exception of
head 2 which is awaiting a new spindle spline shaft from speedfam. Darren has
also asked that the vacuum elbow/pressure gauge assembly not be hooked to
the rotary union. All else should be connected, arms have been moved out to
facilitatedinstallation of "that last bottom bolt". New vacuum tank installed.
A shift
|
| 17.159 | Spindle work | FABSIX::R_GEE | | Wed Jan 17 1996 07:07 | 59 |
| Action taken tonight:
Head #1:
* Completed:
- installed, connected and tightened down the rotation
motor.
- installed the new middle and bottom solenoids with
new fittings and hose.
- installed the quick disconnect hub and bellows.
* left to do:
- install the gauge and stainless fittings going to
the rotary union.
Head #2 : Nothing done.
Head #3 :
* Completed:
- installed, connected and tightened down the rotation
motor.
- installed the new middle and bottom solenoids with
new fittings and hose.
- installed the quick disconnect hub and bellows.
NOT COMPLETELY ON OR BOLTED UP.
* left to do:
- Finish installing the quick disconnect hub.
- install the gauge and stainless fittings going to
the rotary union.
Head #4:
* Completed:
- installed, connected and tightened down the rotation
motor.
- installed the new middle and bottom solenoids with
new fittings and hose.
- installed the quick disconnect hub and bellows.
* left to do:
- install the gauge and stainless fittings going to
the rotary union.
Head #5: Nothing done.
Carriers: Nothing done.
B shift
|
| 17.160 | | FABSIX::B_FINN | | Wed Jan 17 1996 19:30 | 15 |
|
Cleaned/removed score on head 3 quick disconnect an reinstalled quick
disconnect on head 3. Reinstalled motor and hardware solenoid manifold on
head 5. Installed quick disconnect on head 5.
Awaiting spindle spline shaft from speedfam on Head 2.
Darren says there is nothing to do on B1 tonight.
A shift
|
| 17.161 | from the cats at speedfam | SUBPAC::CMP | | Thu Jan 18 1996 19:31 | 5 |
| brian, install left side terminal block plate , perform loadcell cals,
change pad, wipe down inside of multihead,install top plate of
multihead, and monitor vacuum tank for any possible leaks, do not worry
about cycling wafers we will need to take a look at the robot in the
am.
|
| 17.162 | grub work... | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 19 1996 06:57 | 7 |
|
I started on some of the items in the previous reply but
duty calls. I got the top panel in place and was starting
on the terminal block panel. The load cell is on and is
warming up for the load cell calibrations.
BJ
|
| 17.163 | down force and pm | FABSIX::B_FINN | | Fri Jan 19 1996 19:10 | 9 |
|
Down force calibration successfully performed. Robot would not home,
traced to theta axis. Speedfam Reps have hand carried the robot to ADE
Newton,MA. for repair. Weekly pm was performed but we could not log time on
RTC due to down status. Check Sheet was submitted to notes file.
45 32" IC 1000 removed from fab 6 stock and placed in our cabinet
C shift
|
| 17.164 | ROBOT | SUBPAC::CMP | | Fri Jan 19 1996 19:55 | 3 |
| HEY GUYS....THIS IS DARREN.....WE'VE GOT A ROBOT COMMING IN FROM
PHOENIX TONIGHT...WE PICK IT UP AT LOGAN TOMMORROW AM....WE WILL BE IN
TO INSTALL IT AND START CYCLING WAFERS.....
|
| 17.165 | FROM SPEEDFAM DUDES | SUBPAC::CMP | | Sat Jan 20 1996 17:08 | 5 |
| WE FINISHED THE ROBOT INSTALL AND CALIBRATION....CYCLED WAFERS FOR
TRANSFER AND ON THE PAD...
TO DO NEXT: WIPE DOWN MHTA
INSTALL COVERS
START MQC'S OR ???????
|
| 17.166 | Carrier #1 stops rotating during polish | FABSIX::R_GEE | | Sun Jan 21 1996 07:07 | 16 |
| Replaced the rest of the covers and began running verification
wafers. Every third run during the polish cycle the system would
error for "carrier #1 not rotating".
We noticed that on each run carrier #1 would slow down or sometimes
stop. The LED L1 on the Infranor for carrier #1 would light
indicating amps are to low.
We checked and reseated the wire connectors going to the Infranor
and at the bulkhead connector panel on the multihead, still not
working.
.
B shift
|
| 17.167 | Head 1 rotation problem....continued | SUBPAC::LANDRY | | Sun Jan 21 1996 19:36 | 40 |
|
Well, we looked into the Head 1 rotation problem tonight.
We unfortunetly have not found the problem as of yet. The
system was returned to manufacturing to run on 4 heads for
the time being.
A call was placed to the Speedfam Hotline. No contact was
made with anyone technical, though. The answering service
was to dispatch the call to the technical staff.
So, here is what was checked and the outcome of each:
* Re-checked all connections at the Infranor and power supply.
No problem observed.
* Ohm'd the wires out from the Infranor to the motor. No
problem found. There were a couple of military connectors
that we were able to tighten a bit, but don't suspect these
to be of any consiquence.
* Checked the connectors under the flex track on the left side
of the machine (table gear box side). Again, a couple of
connectors were not tight, but still don't think they were
loose enough to cause the problem.
* Checked the connections at the DCX board (#2) and found the
connector associated with head 1 to be cocked a bit. We
thought we might have had it when we exercised and the first
try at rotation was successful. Tried to repeat the success
but the next attempt, the Infranor L1 light came on dimly BUT
the head continued to rotate. A third try was a disaster as
LED L1 light lit up good and the head promptly stopped.
* Some slop in the motor backlash was then looked at. It was
adjusted, but it wasn't of any help.
* We then discided to halt at this time and turn 4 heads over to
manufacturing for the shift.
A shift
|
| 17.168 | Carrier Arms not oscillating | FABSIX::R_GEE | | Mon Jan 22 1996 06:56 | 12 |
| The polish arms failed to oscillate in. They would move
to the outside OD position and stay there for the remainder
of the polish cycle. No alarms or errors were displayed.
Reset the computer and the problem went away.
B shift
|
| 17.169 | current reference adjustment | FABSIX::B_FINN | | Mon Jan 22 1996 19:23 | 11 |
|
System had been running 4 heads due to intermittent current error.
Reps adjusted current reference for spindle rotation on head #1.
Ran 3 runs to test system. Looks Fine. Turned back to manufacturing
in "verify". Tim has asked that they run new MQC and OLD MQC ( lifting
off in the center of the pad and slightly off the pad, respectively),
and then inspect for Scratches.
A shift
|
| 17.170 | ADE Robot failure | SUBPAC::LANDRY | | Tue Jan 23 1996 19:25 | 16 |
| The system is down for an ADE robot failure. Seems to work fine until
it pauses while the multihead makes a wafer pickup at the index table.
When the robot tries to resume working, it just sit there, ten times
out. We've rebooted a couple of time today to get there wafers through
the system, but it's currently logged as DOWN. The power supply was
pulled out of it's casing for trouble shooting purposes. It cycled 50
wafers just fine. As the power supply is put back into the casing, the
problem re-occurs. May be a connection/wire problem as these flex when
the power supply is pushed back in. Daniel and Rich are looking into
some error codes associated with the problem. They have hooking up the
software (in our PC) for the ADE robot as I type. They may need to
find some specialty connectors/wires that we don't have in the room.
So, they may be asking for help finding it here.
A shift / S/F reps
|
| 17.171 | ADE robot still not functioning | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 24 1996 04:50 | 27 |
|
Took over running wafers through the tool after the Rep.
went home. We were using the TRANSFER program and bumped
Segment #3 process time to 90 seconds. We ran 75 wafers
with this program. Twice the robot went in and failed to
retrieve a wafer. Both times the wafer count was around
slot 11-20. The error message indicated that the robot
had missed the wafer and to just put the wafer on the pre-
aligner. For the last 25 wafers, we ran I_O_ILDA. The
robot failed when it was ready to load wafers 6-10. The
robot didn't even try to go for the wafers. The 3rd LED
is lit at this time. It will only clear if the power is
cycled to the controller. I hooked up the PC as directed
by the Rep. and checked the Robot Status screen. I found
bytes with a value of zero at the time of the error.
Byte #2 - Arm Ready
" #11 - Brake Not Active
" #15 - Servo Motor Inactive
We tried several different profgrams and the tool will
either it will fail right away or load 5 then fail.
The tool is in WET mode with the Robot still errrored.
BJ
|
| 17.172 | Robot problems | FABSIX::B_FINN | | Wed Jan 24 1996 19:22 | 16 |
|
Robot was removed from the system and hand carried to ADE. ADE checked
the robot out and found no problems. Robot was brought back and cycled tested
300 times via pc and external software, without error. Robot was then
reinstalled. Reps then found broken wires in the rs232 connect. Repaired.
They feel this happened today since this connection was checked last night
by Rich and he saw no broken wires. ADE did suggest that it may be a noise
problem since it occurs on the fifth wafer after multi head moves out. Reps
just tried to disconnect ground , but the multihead is not liking this.
Their still working on it.
C shift
|
| 17.173 | VERIFY COMPLETED, NO ROBOT ERRORS, UP AND IDLE!!! | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 25 1996 05:52 | 11 |
|
After 25 more wafers were run with the TRANSFER program,
25 more were ran with a 10 sec. polish. A total of 100
wafers were run with no robot timeouts. Rich ran the MQC's
and got scratches. The program was coming off the edge, 129.
B2 was running at 120. I had him run the MQC's with 120 and
the tool passed MQC's with no scratches. The tool is finally
UP and IDLE.
BJ
|
| 17.174 | SPEEDFAM REPS. | SUBPAC::CMP | | Thu Jan 25 1996 14:47 | 3 |
| INVESTIGATING PROBLEM WITH ROBOT, FOUND THAT IT IS INTERNAL TO ASSY.
WE ARE LOOKING INTO A FLAKY CONNECTION TO THE BRAKE CAUSING THE
Z AXIS TO FAIL.
|
| 17.175 | old robot out...new one going in! | SUBPAC::LANDRY | | Thu Jan 25 1996 19:42 | 41 |
|
The system is back down for a robot problem. Many things were
checked/rechecked today. It's currently pointing towards the
robot, itself, malfunctioning. Speedfam reps are currently in
transit to the manufacturer (ADE in Newton, Ma), where they will
pick up another robot. Ah, alas, here they are now with the
new robot. That was quick! It will be installed now.
Quick days happenings..........
* The robot failed early in the shift.
* It was suspected that the wire connector for the brake was the
problem. The wire connectors were soldered and testing was
attempted.
* Things were looking fairly good at this stage. Therefore,
position calibrations were performed and more testing commenced.
* The system ran into trouble, not picking up the wafer from the
cassette.
Other things as an FYI
* The robot has been removed from the system
* The squeak still exists in one of the carriers when rotating
CLOCKWISE in the rinse station. No squeak is exhibited when
normal rotation (CCW) occurs.
* Couldn't get the system to pass initialization after the robot
was removed. Tried editing the HARDWARE.CMP file to remove
the robot, pre-aligner, and mapper to see if we could get
past this problem, no luck. Upon startup tonight/tomorrow,
the above three line items need to be verified as "on" in
the above file. 1 = on 0 = off
* The system is currently powered down. Thw carriers/pad are
being kept wet by the spray hoses.
Brad / Tim / Doc
|
| 17.176 | SMASHED WAFERS | FABSIX::B_WESTPHAL | | Thu Jan 25 1996 19:45 | 4 |
| CMP.B1 - Down for slipping wafers on the polish table. Wafers from carriers
4 & 5 were smashed while running product. Two carriers were damaged,
the same were replaced along w/ pad. Tool is back to production for
MQCs.
|
| 17.177 | robot installation | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 26 1996 06:26 | 14 |
|
I tried... I tried... I tried...
Worked on the robot alignment all night and
came real close but not enough. If the (3)
robot bolts next to the leveling screws were a
1/2" longer, I would have it. I also found the
metal strip that channels the vacuum on the end
effector had broken its silicone or epoxy seal.
This was without a doubt a direct problem with
the robot pick-up. Wether it was like this all
week or just from yesterday I don't know.
It's all your guys.... BJ
|
| 17.178 | ROBOT TROUBLE | FABSIX::B_WESTPHAL | | Fri Jan 26 1996 19:09 | 11 |
| CMP.B1 - Down for problems with the robot. Received errors for the Z axis
while trying to level and cal the robot this morning. The robot
was pulled and tested against the one pulled yesterday using different
cables and controllers. The best combination was reinstalled. Had
problems with the wafers not being picked right because the wafers and
end effector were not parallel with each other. A new end effector
was installed and #2 cassette platform was shimmed accordingly to
correct this situation. The cal was completed and 50 wafers were ran
to check for any further handling problems. The system is back to
production for MQCs.
|
| 17.179 | power glitch wafer detect system | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Jan 27 1996 16:45 | 13 |
| from this morning, ASDG was down...
The tool passed MQC's and OPS ran production
lots on it all morning. There was a power clitch
in CMP around 7:15am and the tool started having
problems as well. The tool was indicating that
that the wafer detect system was picking up a
wafer slide-out and stopping the carrier rotation.
If this is still happening during the day, have the
Speedfam REPS look at the detection sensors to make
sure they are ok as far as alignements are concerned.
D shift
|
| 17.180 | Robot Problems | FABSIX::R_POIRIER | | Sun Jan 28 1996 07:54 | 12 |
| CMP.B1 - ROBOT PROBLEMS
Robot would not move when it was supposed to pick up wafers.
We tried a number of combinations (new robot/new controller,new
robot/old controller, etc.) and eventually ended up with the old
controller and new robot. There is still a problem with alignments
for the robot. These alignments are necessary because the robot
is coming in to high in the cassette.
B Shift
|
| 17.181 | power glitch | STRATA::FINN | | Sun Jan 28 1996 19:28 | 15 |
|
Checked robot in both manual and auto, cassette 1 is fine but cassette
two need to be leveled, (we say cassette not robot because robot is fine on
cassette one). Changed pad and let them run cassette one to move the six lots
in the room.
Had power glitch and evac. Soaked carriers and conditioned pad. MQC's
passed fine.
System is up and running 5 heads with warning on load cassette # 2.
CMP.b1 1/28/96 Q CR QJMR0313a,P/II/S-IV Pad was visibly worn
Lot #LR5-JP9
a shift
|
| 17.182 | robot and cassettes adjusted | STRATA::RIDLON | Eliminate the obvious | Mon Jan 29 1996 07:02 | 9 |
| Adjusted cassette 1 home and adjusted robot level so that when wafers
were removed they wouldn't scrap in the cassette slots. Checked the
alignment on cassette 2 and it was off. Removed the shims that C shift
had installed and installed some in another area so that the wafers
were level with the robot. Recalibrated cassette 2's home and then
checked wafer removal and it was great. Placement on prealigner for
both cassettes was also fine.
B shift
|
| 17.183 | Vacuum Pump fan broke | FABSIX::R_POIRIER | | Tue Jan 30 1996 07:02 | 8 |
| A whining noise was noticed coming from the vacuum pump. The
fan on the left side of the Vacuum pump broke. It was up against
the fan cover and wasn't spinning. We replaced it with a fan from
the old Vacuum pump.
B Shift
|
| 17.186 | Carrier #1 not rotating error. | FABSIX::B_WESTPHAL | | Sat Feb 03 1996 19:29 | 5 |
| CMP.B1 - Tool errored for carrier #1 not rotating while product was being run.
The operator reported that the wafer from carrier #5 was left on the
pad unbroken and the screen was locked up on him so the tool was
rebooted. A 15 wafer transfer was also ran by production to verify
the tool. The incident was then logged as an assist.
|
| 17.184 | System powered down / Carrier rotation | FABSIX::R_GEE | | Tue Feb 06 1996 06:25 | 15 |
| The system powered itself off in the middle of an
Auto polish cycle, no reason found.
Powered the system back up and began running dummy wafers.
On the first run the system errored for heads #1,#2,#3 not
rotating. No error lights on the Infranor or DCX boards,
everything was normal. The voltages at the Infranor were also
correct. Powered the system up and ran 50 dummy wafers with
no errors, released it back to production.
B shift
|
| 17.185 | new connectors for DCX/Cable connect | SUBPAC::LANDRY | | Tue Feb 06 1996 19:19 | 10 |
| Today, the reps installed new connectors to the ribbon cables
that go to the DCX boards. The connectors were of the "clip"
style, which locked the connector to the board, hence prohibiting
the cables to become dislodged when cables are moved. They also
verified proper installation prior to returning to manufacturing
hands. Opts personnel ran 25 exercise wafers and MQC's to also
assure functionality.
A Shift
|
| 17.187 | Carrier #1 rotation, pad change | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Feb 08 1996 06:21 | 23 |
|
The tool failed for MQC's once again. The pad had almost
700 wafers on it and the carriers all had near 1000 wafers each.
We pulled off the carrier and pad. We noticed a build up of
some sort of a grime/grease on top of some of the carriers.
These were the same one on since the particle/multihead cleaning.
After everything was cleaned up and re-installed. We had two
wafer fly-outs on different occasions as well as several Carrier #1
not rotating errors. We checked the alignments and #5 and #1 were
out but not enough to cause a problem and weren't the ones that
had the fly-outs. We checked the newly installed carriers with all
of the stainless washers and found an exposure of -.011 to -.013 on
all (5) carriers. The initials on the carrier "tags" were "SG." I
don't know who that is but could someone notify her/him of the
exposure issue? We then looked at the 2nd problem which was with the
carrier #1 rotation. We cranked up the voltage to the max. (15.17V)
as directed and gave it a shot. The error was still there. We pulled
the carrier and ran with four heads. MQC's came in fine. I'm
placing a WARNING for the HEAD #1 issue.
D shift
|
| 17.188 | High Particles | ASDG::POIRIER | | Thu Feb 08 1996 20:36 | 13 |
|
* High Particles:
--------------
The system was thoroughly cleaned and MQC's were run. It passed
for particles but failed for uniformity on one spindle. (10.5%)
This may be due to only 30 break-in wafers being run. 20 more
break-in wafers were run and a uniformity measurment is in
progress. We expect the uniformity to come in shortly.
NOTE: We're currently running critically low on oxide monitors!
|
| 17.189 | Carrier #1 Rotation Motor will be replaced. | ASDG::POIRIER | | Thu Feb 08 1996 20:46 | 13 |
|
* Carrier #1 Rotation Problems:
----------------------------
Carrier #1 Rotation errors have been continuing to plauge the tool
all day. The Speedfam reps changed the Infranor motor controller
and no change was noticed. They then measured the voltage on the
Infranor IDC tap (pins 1 & 6) under load on spindle #1 & spindle
#2. The voltage on spindle #1 was twice the voltage on spindle #2.
Speedfam has concluded that Carrier #1 Rotation Motor is BAD.
The tool will go back "UP" tonight with 4 spindles active. The
motor will be replaced when a new one is recieved on-site.
|
| 17.190 | Head rotation problem | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Feb 09 1996 05:18 | 11 |
|
Went through some more things one head #1. Dan and I
checked the downforce (which was in) as well as some DCX
and offsets to make sure nothing was changed. A new motor
is coming hopefully today. Head #1 is still off line and
has a WARNING on it. All of the panels except for the two
for head #1 were put back on the tool. A new pad was installed
and was brought back up for Production.
BJ
|
| 17.191 | head-1 failure | STRATA::TDYER | | Fri Feb 09 1996 18:38 | 23 |
|
CMP.B1 - Down for head-1 troubleshooting. The system will be returned in the
next hour with FOUR heads. Here's what we found today:
Swapped the motor and resolver cables for head 1 and 5 on the
RIGHT side of tb-13.
* The problem moved to head-5 (head-5 stalled)
We put the wires back to normal on TB13
Swapped mtr-3 cable (head-1 rot) with mtr-12 cable (head-5 rot) and
their respective resolver cables on the LEFT side of the bulk-
head connections under the polish area.
* The problem moved to head-5.
* So, we have a bad cable between the bulk head connector and the
INFRANOR for head-1 rotation. (the infranor was already replaced)
The connector itself could be bad,please inspect. If nothing
obvious is found, put system back together with heads 2-4 ONLINE.
The reps will replace the cable next week.
- At one point both head-5 and head-1 stalled, for this reason I have
also request a flex track motor cable.
TD/JP/Rich
|
| 17.192 | Head #1 rotation failures / new cables on the way. | ASDG::POIRIER | | Fri Feb 09 1996 19:32 | 8 |
|
* Head #1 rotation problems:
-------------------------
After further troubleshooting, it was determined that the PAC-SCI
Rotation motor for head # 1 was O.K. We now feel that a cable is
causing the intermittent rotation failures on head #1. See Tim
Dyer's passdown for a detailed explanation of the troubleshooting
activities that took place today.
|
| 17.193 | left send mapper control | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Feb 10 1996 07:38 | 12 |
|
The tool mapper was intermittingly erroring out and
was not mapping the cassetttes. Swapped cable outputs
and the problem went to the right send unit. After than
I swapped the cables all together and the there was no
change. The problem is within the Kennsington controller
itself. Until a board is ordered, only the right send
elevator can be used. On top of that, it has to be manually
mapped (ie: tell the system where the wafers are).
BJ
|
| 17.194 | scrubber upgrade | SUBPAC::LANDRY | | Tue Feb 13 1996 19:26 | 12 |
| The scrubber motor failed today. First thought it to be the wire,
but a quick check indicated said wire was fine. The motor torque
was examined. I could get it to spin with a little twist of the
coupling. Well, it was decided on that the scrubber up-grade would
now take place. At the time of this typing, all components have
been installed. BUT, while calibration was taking place, the
adjustment pot on the board was dislodged. Reps are attempting
to re-attach the pot. May need to improvise with another pot
should this one not survive.
A Shift
|
| 17.195 | Oscillation positioning of carriers completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Feb 16 1996 07:29 | 31 |
|
The arm oscillation calibration was performed and found
all heads out of spec. Below is the original results along
with the new results.
The measurement is measured from the center of the table
to the center of the head post which should be 14".
HEAD OLD NEW
============================
#1 12.64" 13.99"
============================
#2 12.72" 14.04"
============================
#3 12.85" 14.04"
============================
#4 12.82" 14.04"
============================
#5 12.76" 14.04"
============================
the blocky style conditioner wheel was installed on the
tool and broken in with ~1 hour at 67% downforce. The tool
was cleaned and the carriers were re-installed. A new pad was
installed but has not been broken in or conditioned. It is still
new and hasn't seen water on it yet. I'm going to leave the
carriers rotating and rinsing. I'll let EE decide about the
new pad conditioning.
BJ
|
| 17.196 | B1 now matches B2 | FABSIX::B_WESTPHAL | | Fri Feb 16 1996 19:40 | 5 |
| CMP.B1 - The tool was given to process engineering and all of the process
parameters were adjusted to match B2's. A door that protects the
track that the multihead rides in was damaged. The reps. are ordering
the new parts.
|
| 17.197 | scratches | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Feb 17 1996 07:12 | 7 |
|
System was down at the beginning of the shift for scratches.
The pad was replaced and broken-in. There were no MQC wafers
available to test the machine. Tool passed MQC's for uniformity
and no scratches.....
D shift
|
| 17.198 | Head #1 not rotating | FABSIX::R_GEE | | Sun Feb 18 1996 06:47 | 10 |
| * The system kept erroring for head #1 not rotating.
Tony (the field service Rep.) adjusted the
voltage at the Infranor from 12.5 to 15.0.
B shift
|
| 17.199 | Slurry filter changed | FABSIX::R_GEE | | Mon Feb 19 1996 02:03 | 4 |
| Replaced the slurry filter do to unusual slurry flow. It
was last changed on 1-30-96.
B shift
|
| 17.200 | Scratches... still scratching | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Feb 21 1996 07:33 | 15 |
|
Still down for scratches. After is failed once again
for scratches, the pad was replaced. It failed again for
scratches. I didn't come across any passdowns that said the
old conditioner was put back on so we tried that and we
still had the scratches. We tried running the MQC's at
115 on the pad with no oscillation and there were no scratches.
We now would like to see what edge is causing the problem but
we have no MQC wafers as of 7:30am and we won't know until
then. I would "hope" to see two wafers run from 115 to 95
and two run 115 to 135 to see where the scratches are coming
from.
D shift
|
| 17.201 | slurry pumps lines | FABSIX::B_WESTPHAL | | Fri Feb 23 1996 11:12 | 5 |
| CMP.B1 - Down for a leak in one of the slurry pump lines. Both line
were replaced but one was replaced with medical grade
masterflex tubing as recommended by Speedfam. This was done
so a comparison could be made between the 2 types of tubing.
|
| 17.202 | Inverter error | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Feb 24 1996 05:15 | 10 |
|
Countless time the tool errored for "Inverter Error, record and
hit button to continue." We've yet to find the source of the problem.
The error comes up over the index table during carrier clean/wafer
rinse after polish. Kev from SpeedFam call in to check on things
and Barry told him about. He said is was a software issue. Instead
of OPS logging a million ASSISTS, I threw a WARNING on it.
BJ
|
| 17.203 | Inverter Timeout Error-Table RPM / Head #4 Rotation Errors. | ASDG::POIRIER | | Sat Feb 24 1996 19:24 | 16 |
|
INVERTER COMMUNICATION ERRORS:
------------------------------
The system errored numerous times Today for "Inverter Timeout".
The Speedfam rep (Tony) feels this is due to a recent change in
the Table RPM. According to Tony, the system is trying to start
the Table Rotation command but the Table hasn't stopped rotating
from the previous Segment. This causes a "Wait" error & eventually
an Inverter Timeout condition. He is adding an extra Segment
to the recipies to give the Table extra time to slow down.
CARRIER #4 ROTATION ERROR:
-------------------------
Spindle #4 errored for "Rotation Failure" six times Today.
|
| 17.204 | Broken wafer | FABSIX::R_POIRIER | | Tue Feb 27 1996 06:51 | 16 |
|
Wafer slipped out of carrier # 4 and was crushed by carrier # 3.
It appears the wafer detection didn't catch it in time. We
noticed that the polish table appeared to be dry. After re-booting
the system we checked the slurry flow and saw no problem. Just
before the crash we heard the table vibrating. Possible reason
for crash could have been no slurry flow. Nobody was watching the
tool when crash happened. The tool had been running all night.
We replaced three carriers. # 3 and # 4 due to the crash and # 5
because of bad uniformity. After replacing pad we ran 30 wafers
without any problems.
Carrier 4 was a 21 hole carrier as was carrier 5. # 1,2,3 were
all 29 hole carriers.
B shift
|
| 17.205 | mapper problems | STRATA::FINN | | Tue Feb 27 1996 19:38 | 23 |
| Wafers dropping off the carrier at liftoff. Process changed
oscillation so liftoff occurs further out off the pad.
System errored for "Waiting for mapper response out". Cassette would
not see home switch as it tilted back. We have no schematics. Swapped cables
at mapper and problem moved to cassette two. Swapped both ends of both cables
and problem returned to cassette one. Swapped tilt boards within the
controller and problem stayed with cassette one. Swapped cables at input to
the controller and problem moved to cassette 2. Problem is definitely in the
controller. On installation the system magically began working. It remained
working for one hour then failed for the original error. We disabled the
controller. Operator must manually tell the system via the map page which
slots contain wafers. Cassette 2 is not working it wont tilt, cassette 1 is
working. System is on warning. Tried to put cassette 2 on warning but rtc is
down.
We notified reps that we took the controller off line, they may be
able to get one here from Speedfam by tomorrow morning. This is still a maybe,
Kevin or tony will call the room and confirm this availability in one hour.
A shift
|
| 17.206 | mapper info / vacuum tank dumping | SUBPAC::LANDRY | | Wed Feb 28 1996 19:37 | 18 |
| The Mapper situation was looked at today. New parts installed, but
unfortunetly the mapper is in the same shape. It still is DOWN for
automatic running. Manual mapping is still required. See Tim's
daily passdown for game plan.
Due to manual mapping, the vacuum tank needs to manually dumped every
50 wafers. Again, see Tim's instructions on procedure. Was last
dumped at 7:20 PM.
Elevator #1 messed up at the end of the shift. It would not home for
the Opts folks. On my first look at homing it, I noticed that the
motor was driving, but extremely slow. Once home position was finally
made, the elevator motor drove at normal speed. Retried homing
sequence four times after that, with normal homing speed/performance
every time.
A shift
|
| 17.208 | Crash!, No slurry flow! | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Feb 29 1996 08:52 | 22 |
|
The system crashed early. It appears that there was very
little slurry on the table. A wafer was dragged out of #4 and
took out #3. The slurry flow was checked and both pumps were
ok. We replaced the filter to make sure there was no blockage.
We replaced the slurry lines just to be safe. The medical line
on pump #1 had a slit in it so we might of saved a blow out.
After the pad was replaced and break-ins started, it was noted
that there was no slurry coming out of pump #2. After trouble
shooting #2, it had juice but wasn't turning. We checked all
of the wiring and everything appeared to be ok. We took the
pump out of the machine and it worked??? We pulled the brushes
out of the motor and they were pretty well spent. Since this
pump/motor is intermittent, Tim is having SpeedFam pull the pump
for the un-used #3 pump for the time being. The (3) remaining
carriers are on the table soaking next to the sink. The pad
has seen lots of debris so it will have to be pulled. Lots of
hardware so have lots of fun... call if me if you guys get
snagged.
BJ
|
| 17.209 | Slurry motor/kennsington controller | FABSIX::B_WESTPHAL | | Thu Feb 29 1996 16:25 | 7 |
| CMP.B1 - Down from previous shift for a wafer crash. Low slurry flow due to an
intermittent problem w/ slurry pump #2 was believed to be the cause.
Pump #2 was exchanged w/ #3 and both #1 & the now #2 pumps were
calibrated. The problem with the wafer mapping was also addressed by
Speedfam. The kennsington controller was swapped out w/ an old part
that was tested good. System seems to be mapping alright. The tool
was cleaned up and, a new prestamped pad was installed.
|
| 17.210 | Spindle Rotation Error on Heads #4 & #5 | ASDG::POIRIER | | Fri Mar 01 1996 19:27 | 7 |
|
* Spindle Rotation Error:
----------------------
The system errored for "Spindles 4 & 5 Not Rotating" Today.
Circuit Breaker #6 was reset and the tool ran for the remainder
of the shift with no further errors.
|
| 17.211 | mapper error is back | STRATA::FINN | | Tue Mar 05 1996 19:40 | 18 |
|
Five breakin wafers were being run prior to product. Carrier 1 spit
the wafer on the pad. Carrier 5 survived minus it's white ring, but carrier
one needed to be replaced due to small tear in the carrier film. Pad was
changed.
Breakin wafers were started
System errored for mapper at 7:05 PM as we were watching the screen.
Both cassettes A and B failed. Systems exhibits same symptoms as last week.
Cassette is also continously rocking back and forth looking for it's limit
switch, as it did last week. Tony (SF) has been notified and will be onsite
in approximately 30 minutes. System was manually told which slots contained
wafers so manufacturing could continue.
A shift
|
| 17.212 | Mapper issue | FABSIX::B_JUBINVILLE | | Wed Mar 06 1996 19:26 | 9 |
|
Tony came in looked at the mapper issue. He found wafer debris
under the left send elevator. The wafer debris seemed to of have
be causing the elevator not to tilt properly and therefore causing
a fault in the Kensington. Ran 25 wafers using the transfer program
without any problems. System was turned over to production and the
WARNING was lifted.
BJ
|
| 17.213 | head rotation problems | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Mar 09 1996 04:52 | 7 |
|
System errored for head #4 not rotating after lift off and
wouldn't clear. The breaker the the head had tripped. Reset
breaker and rotation checked out ok. Tool ran fine after that.
BJ
|
| 17.214 | Pad change/Carrier #4 | FABSIX::B_WESTPHAL | | Sat Mar 09 1996 19:42 | 6 |
| CMP.B1 - Tool went down for low removal rates. The pad was replaced and
process area was cleaned up by production. While getting ready
to run the breakins we received a carrier #4 rotation error. No
breakers were tripped but the infranor was reading motor over temp
error. Reset the system and the carrier ran without any further
errors. Currently running MQCs.
|
| 17.215 | carrier 4 rotation errors and then some | STRATA::RIDLON | Eliminate the obvious | Sun Mar 10 1996 05:35 | 14 |
| Had two instances tonight where carrier 4 failed to rotate during
polish. First time we ended up emoing the tool to correct the problem.
The second time I had the bright idea of just powering down carrier 4's
infranor to clear the errors. The good news is that it worked the bad
news is that the circuit breaker that powers mc10 also powers the
mc13 (multi-head transport). Even though the multi-head was locked in
at the home position it still lost its way and after polish it stopped
halfway on the way back to the index table. Carriers 1 and 5 dropped
onto the edge of the index table and pulverized the wafers. 2,3, and 4
were ok. 1 product and 1 dummie were wasted. Cleaned up the mess,
changed the carriers 1 and 5 (inspected the rest), and changed the pad.
B-shift
|
| 17.216 | Carrier #4 No Rotation | FABSIX::B_FINN | | Sun Mar 10 1996 19:10 | 24 |
|
Carrier four no rotation. Passdown shows this as reoccurring
problem. Infranor for carrier 4 rotation showed all three lights
illuminated indicating a motor temp error. We swapped carrier rotation
#4 Infranor with that of carrier rotation #3. After 20 wafers problem
returned and did not follow the Infranor, it stayed on Infranor attached to
motor/carrier # 4 indicating a real temp problem or intermittent
connection problem. Checked rotation # 4's PTC on terminal strip # 12, pins
57 and 58. Found voltage to be + 57 millivolts. Head 5 was
+ 67 millivolts the rest were lower lower including a - 12 millivolts on
head 3. Ohmed Cable back to X1 pins 1 + 2 of Infranor looked good. Tried to
stress cables looking for intermittent opens found none. Tried system.
Failed at wafer clean prior to wafer pickup for #4 rotation. Found a
REAL loose military connector on # 4 motor. Tried running in manual mode at
both polish table and at index table to simulate failure, while monitoring
tc with meter, but system would not fail. Changed program to a no
touch, system ran fine. Tried breakin program system ran fine. Tried to give
system back with all five head, but Jesus wanted to run four heads and
test five heads later. System is up with head four off line. Carrier has been
removed and is in water.
A shift
|
| 17.217 | carrier 4 work | STRATA::RIDLON | Eliminate the obvious | Mon Mar 11 1996 06:56 | 13 |
| From the work that A-shift did we thought it would be a good idea to
install carrier 4 and re-mqc the machine. The mqc's passed but when
they went to run product it faulted for carrier 4 rotation. Every time
we've seen it fault it's been the first or second set of wafers and always
before touch down. This time we turned of the breaker to reset the
infranor and, learning from our mistakes, we homed the multi-head.
It finished the product lot without error. AFter they were through with
the machine we decided to install a resistor on TB-12 pins 58-57 to bypass the
motor tc. 30 wafers were ran with out errors. The resistor (100ohm) was
removed and original tc wires reinstalled as well as all panels for shift
change.
B-shift
|
| 17.218 | Mapper / Field Rep. beeper # | FABSIX::R_GEE | | Mon Mar 11 1996 07:03 | 14 |
| At the end of A shift the mapper failed. After sitting for
an hour or so it began working again. Field service was contacted
about the problem. It worked for the remainder of our shift.
We were informed by Speedfam field service that Tony is
nolonger in the area and to contact Kevin with any equipment
issues. His beeper # is
1-800-796-7363 pin # 1020584
B shift
|
| 17.219 | mapper failed/ offline | STRATA::FINN | | Mon Mar 11 1996 19:24 | 6 |
|
Mapper failed. Shut mapper off at 5:30pm. Shut off controller and
reconfigured hardware file. Operators are mapping in manual.
Reps are aware of the failure.
A shift
|
| 17.220 | Mapper | FABSIX::R_GEE | | Tue Mar 12 1996 07:39 | 13 |
| * Send cassette #2 (B) wouldn't level for the robot to pickup
the wafers. Since the mapper had 4 hours to cool down and
is working again, we put it back on-line.
* Errored for spindle #1,#3, & #5 not rotating. No problems
found pressed start and continued. The error never re-occured.
B shift
|
| 17.221 | Mapper again | FABSIX::R_GEE | | Wed Mar 13 1996 06:54 | 11 |
| The mapper failed again, we powered the mapper off and disabled
it. An Assist and a Warning was logged in workstream to manually
map the cassettes.
After 3 hours we powered the mapper back up and enabled it,
all is well for now. The warning was removed. If anybody is
interested, the mapper lasted 24 hours before failing.
B shift
|
| 17.222 | ground added | FABSIX::B_FINN | | Wed Mar 13 1996 19:04 | 5 |
|
Reps added grounds to cassette tilts to help eliminate mapper errors.
Mapper is on , no problems today.
A shift
|
| 17.223 | crash | FABSIX::B_WESTPHAL | | Fri Mar 15 1996 19:42 | 11 |
|
CMP.B1 - Down for breaking a wafer from carrier #3 in segment 5. Suspect that
the problem was caused by a dip in slurry flow due to the operator
reports of a loud vibration previous to the crash. The slurry filter
was checked and looked good but was replaced as requested by engineer-
ing. The slurry flow for both pumps was out by about 100ml/min. The
same was corrected. The process area was cleaned up, pad replaced w/
a prestamped. The index table was drained and wiped out. Only
carrier #3 needed to be changed out. Gave the tool back to
production.
|
| 17.224 | Wafer breakage | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Mar 16 1996 07:00 | 16 |
|
System slurry flow dropped to almost nothing and halted
the table and caused a crash on a hot lot to boot. I took
a look at the slurry filter and it was caked. I took the
filter off of A1 to get B1 running. Slurry flow was back
to normal after that. The was cleaned up and I put new
carriers on #3 and #4. MQC's were run and #3 was they only
one that failed MQC's for Unif. twice, ~13%. Due to the
condition of the area, #3 was removed from the tool and
the tool is running with (4) heads. A WARNING is on the
tool for #3.
BJ
|
| 17.225 | carrier 4 not rot | STRATA::RIDLON | Eliminate the obvious | Sun Mar 17 1996 03:38 | 8 |
| Carrier 4 errored for no rotation during process. Same old error where
the infranor faults for overtemp before the carrier touches down.
Killed the breaker (cb#6) for that carrier, homed the multi-head, homed
the index table and restarted. Finished the lot with no other problems.
B-shift
|
| 17.226 | Carrier 4 rotation error | FABSIX::R_POIRIER | | Mon Mar 18 1996 07:35 | 11 |
|
Early in the shift we had a carrier rotation problem with
Head #4. It was just before Touchdown. Infranor #4 alarmed
(L2-Sensor). Reset the circuit breaker CB6, re-homed the
Multihead, and continued running the tool.
Also, the right load cassette didn't map during a run. The
left one mapped ok, and the system didn't alarm out but the
right one had to mapped manually.
|
| 17.227 | carrier 4 rotation errors | LUDWIG::RIDLON | Eliminate the obvious | Tue Mar 19 1996 02:42 | 14 |
| We've had a total of 5 carrier #4 rotation tonight. Took the tool when
they were through and removed the covers for carrier 4. Found the
PSI/VAC gauge destroyed from rubbing on the cover. The screws on the
back of the gauge were found down below the spindle gear. Alot of
plastic from the gauge was also found in this area. Looks like some of
the plastic got into the spindle bearing. Rotation by hand seems to be
smooth and is fairly easy. Cleaned up as best we could, replaced the
gauge and adjusted the elbow so that the gauge wouldn't rub any more.
Tried to run some breakins but it alarmed for carrier 4 rotation on the
first set. Eight lots in the room other wise I'd tear the spindle out.
The powers that be need the machine so carrier 4 has been disabled.
B-shift
|
| 17.228 | head 4 / mapper | SUBPAC::LANDRY | | Tue Mar 19 1996 18:32 | 16 |
| The system went down for a pad change today. While this was to happen,
the Reps (Kevin and Ian) were allowed to take a look at the Head 4 no
rotation issue. I don't have the full story as I wasn't able to work
with them on this. This what I do know:
- Head four will remain off line until some parts come in. A
cable is suspected as the problem. I think it's a cable within
the MHTA, but check with them for exact details.
- The mapper also messed up again. Same old same old. They have
some items coming in to use with the PC which will help in the
trouble shooting scheme. The mapper was shut-off for awhile
and then turned back on. It's currently functioning for now.
Doc
|
| 17.229 | No Head Oscillation | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Mar 20 1996 03:29 | 15 |
|
System kept failing MQC's for bad uniformity. Too
much edge removal. During the running of the MQC's, I
noticed the heads weren't oscillating at all when they
were suppose to. Aprrox. 60 wafers were were run with the
heads half way off the inside of the pad, thus, too much
edge removal. The heads wouldn't oscillate in MANUAL mode
either. Hard booted entire tool and the heads functioned
fine after that. OPS tried running MQC's again but the
inside of the pad had taken to much of a beating. The
pad was replaced and MQC's were started over.
BJ
|
| 17.230 | Head #4 Cable Upgrade / Load Cassette Mapper Controller | ASDG::POIRIER | | Thu Mar 21 1996 20:26 | 15 |
|
* Head #4 Rotation Cable:
----------------------
The Speedfam reps have completed the cable upgrade. A 50 wafer
verification run using the Handling recipe has been sucessfully
completed. The system is now running MQC's.
* Load Cassette - Kensington Controller:
-------------------------------------
The Reps didn't have time to replace the Kensington Controller
this afternoon. Therefore, please continue to manually map
the cassette and manually drain the vacuum tank tonight.
The reps are planning to complete the Controller replacement
tomorrow.
|
| 17.231 | Load Cassette Mapper Controller Replaced. | ASDG::POIRIER | | Fri Mar 22 1996 19:26 | 9 |
|
* Load Cassette Mapper Controller:
--------------------------------
The Speedfam reps finished replacing the Kensington Controller
at 7:15 p.m.. The system is now performing a 25 wafer verification
run. After this run, full MQC's will be needed.
They also repaired a door switch.
|
| 17.232 | transducer installed | LUDWIG::FINN | | Tue Mar 26 1996 19:45 | 14 |
|
Installed (temporarily) one transducer and one omega display to capture
pressure and vacuum on carrier 5. Installation is not only to to check for
early mortality and judge the effectiveness of the transducer. If all
works out we will in stall all five and mount their displays in a panel.
Index table would not home. It would move 2 cups then seize. DCX error 1 on
board one. Power failed and check infranors aok reset DCX board cable
and module, still had error. Check motor in DCX mode all ran fine, once table
saw the home switch system ran fine, could not duplicate. Up and running
A shift
|
| 17.233 | CMP.B1 shutdown for facilities tie-in completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Mar 28 1996 06:12 | 54 |
|
SHUTDOWN: 5:00 AM ON 3/28/96
STARTUP: 9:00 PM ON 2/28/96
CMP.B1 SHUTDOWN CHECKSHEET
--------------------------
Tech. Date
------- -------
1. Change RTC status to SCHEDULED DOWN. BJ 3/28/96
2. Remove all carriers. Any carrier that
has a wafer count higher than 500,
break the carrier down. If any carriers
have less than 500, place in DI water and
and mark a indicated. BJ 3/28/96
3. Remove all wafer receive cassetts. BJ 3/28/96
4. Remove and discard all polishing pads. BJ 3/28/96
5. Remove all PVA scrub brushes and submerge
in DI water. BJ 3/28/96
6. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry
all wet surfaces. BJ 3/28/96
7. Remove and discard all slurry filters. BJ 3/28/96
8. Disconnect inlet and outlet lines on each
filter housing and remove housing. Connect
inlet and outlet lines together with a 3/8"
union. This will completely bypass the
filter housings. BJ 3/28/96
9. Close main incoming DI Water valve to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. BJ 3/28/96
10. Power down each system. BJ 3/28/96
11. Power down each Neslab TCU. BJ 3/28/96
|
| 17.234 | motor #5 problem, DI flow, slurry stuff.. | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Mar 29 1996 06:33 | 31 |
|
First off.. after the startup, carrier #3
failed real bad for uniformity (18%). Replaced with
a new carrier.
Found slurry dripping all over the conditioner
arm and coming out of the multihead. Blown slurry
line, replaced them both.
Multiple head #5 rotation errors, soft and hard
boots fixed at first then it died all together. I took
it off-line and paged Ian to let him know what's up.
Once MQC's were ran, some small scratches were
seen. This is most likely caused from the slurry
line that blew. A new pad was installed and MQC's
have run and we are waiting for the results.
While admiring the polishing, excessive water
was seen under the entire multihead. While watching
the carrier/wafer cleaning, gallons of water was spraying
everywhere. The DI supply inside the tool was set to
40 psi. This could of been the cause for #5 to flake out.
The DI was turned down to spec, 20 psi and there was no
more excessive spraying. Rechecked the rotation on #5
and its still dead. There was water found up inside the
motor #5 cavity and around the newly mounted read-out
gauge.
BJ
|
| 17.235 | ARM 5 ROT ERROR AFTER GORE CABLE UPGRADE | FABSIX::R_TRAN | | Fri Mar 29 1996 21:26 | 21 |
| SPEEDFAM CONTINUED TO TROUBLESHOOT ARM 5 ROTATION ERRORS. FOUND THAT
ARM 5 WOULD SERVO OUT WHEN POLISHING AT DOWNFORCE OF 377LBS, OK AT
250LBS(ERROR WAS SHORT CIRCUIT!!).
CHECKED DOWNFORCE CALIBRATION ON ARMS 1 & 5 ALL O.K.
CHECKED SLURRY FLOWS - ALL O.K
REPLACED PAD AS BRAD BROKE CHIP OF GLASS FROM BEAKER WHEN CHECKING
SLURRY FLOWS.
RERAN MACHINE AND ERROR ON ARM 5 ROTATION HAPPENED AGAIN.
SUSPECTED THAT AS THE ONLY THING THAT HAS CHANGED IN THE SYSTEM IS THE
NEW GORE CABLES IN THE MHTA THAT MAYBE THE IMPEDENCE OF THE CABLES WERE
DIFFERENT CAUSING THE ERRORS.
SWAPPED INFRANORS 3 & 5 AND RAN MACHINE WITH 20 WAFERS 10 ON I_O_BKIN
AND 10 ON IAN PROCESS (I_O_MQC WITH REDUCED SEG 4 TIME OF 20 SECS).
ROTATION ERROR HAS DISSAPPEARED. THE ONLY EXPLANATION WE CAN DETERMINE
IS THAT THE ORIGINAL INFRANOR ON ARM 5 WAS MORE SENSITIVE TO IMPEDENCE
CHANGES THAN THE INFRANOR ON ARM 3.
IAN L. / KEVIN C. (SPEEDFAM)
|
| 17.236 | rotation and MHTA errors | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Mar 30 1996 06:36 | 17 |
|
Before touchdown, heads #4 and #5 errored for no rotation.
Found breaker #6 was tripped. Had to EMO tool and reset
breaker.
Three times during the night, head #3 failed for not rotating
before touchdown but I didn't find any visible evidence as to why.
After the third time, I went through all of the wiring and voltages
on #3 and found everything ok. I ran manual polish with rotation
and oscillation for 15 minutes and there were no error. OPS started
back up again and as of 6:30am, no problems were reported....
Tool timed out for multihead not arriving at load. Tool
showed no signs of problems or restrictions. Soft booted
once again....
BJ
|
| 17.237 | ARM 3 INFRANOR ROT ERRORS | SUBPAC::CMP | | Sat Mar 30 1996 16:29 | 7 |
| IT NOW APPEARS THAT DUE TO THE MANY ARM 3 ROTATION ERRORS THAT THE
INFRANOR WE REPLACED WAS ALSO BAD. I REPLACED ARM 3 ROTATION INFRANOR
(WHICH WAS ORIGINALLY ARM 5'S) WITH A KNOWN BRAND NEW ONE.
RAN 25 WAFERS ALL O.K. NOW EARL IS RUNNING MQC'S
IAN LOWBRIDGE(SPEEDFAM)
|
| 17.238 | slurry problem | FABSIX::R_GEE | | Sun Mar 31 1996 08:18 | 12 |
| A wafer slid out from carrier #4 and crashed carrier #3.
There was a loud vibration sound heard just before the crash,
and the pad was dry. We suspect that the slurry somehow
stopped flowing. We checked the slurry pumps and hoses,
also check the slurry flow, all looked good. We replaced
the 2 carriers and the pad. We need to keep an eye on the
slurry flow during polish.
B shift
|
| 17.239 | 493c/index oil leak/monitor/MHTA cover | SUBPAC::CMP | | Tue Apr 02 1996 16:40 | 18 |
| during the PM this morning we fitted a replacement MHTA flap cover
(back right) and investigated index table gearbox leak.
The leak appears to be in multiple places. We recommend
removing/install new seals or replace the gearbox when the index table
repairs are being done.
Ran speed493c with NO PROBLEMS WHATSOEVER!!. We recommend changing to
493c on B1 ASAP.This will enable process engineers to develop process
changes required due to the faster transition time between segments in
493c.
Couldn't complete monitor check due to lack of communication cable. we
will obtain one in order to complete task.
looked at calibration of polish pad temp sensor , have calibrated it in
a coarse manner. Will fine tune when 493c is in use.
Kevin Colman / Ian lowbridge
|
| 17.240 | Multihead Travel | FABSIX::R_GEE | | Wed Apr 10 1996 08:12 | 2 |
| The multihead wouldn't move after coming out of wet mode. Had
to reboot the system to get it to home.
|
| 17.241 | boot up errors | FABSIX::B_FINN | | Tue Apr 23 1996 20:35 | 45 |
|
System crashed head 4 during polish segment 7. System and
silicon debris cleaned up.
Cup to carrier alignment checked. Heads 1 2 and 5 were out of
alignment. but head 4 which broke the wafer was in.
We aligned all cups including arm and index table axis, when
we verified the new settings it was discovered that the index table's
new home position had not updated. We tried over compensating in the
CCW direction and realigning in the CW direction, (due to known
software bug). This failed 3 times. We went into dos and
verified current home setting, on the 5 alignment it stored
the new index value.
Upon final bootup index table would only home approximately 1'
then stop and errored for "time out". We entered DOS DCX mode
and manually positioned the index table for "home" ( aprox.
one inch from the home sensor). It then worked automatically from
there.
Pads and carriers removed. Facilities work completed. Pads and
carriers replaced. System booted fine, we were attempting to
run 5 wafers to verify flipper to cup alignment, but Robot failed
to go get the wafer from the cassette. NO ERRORS until
flipper could not find wafer at the prealigner. We tried to
use manual mode to move robot without success. When told in manual to
" get wafer from slot 1" error was " Time out waiting for Robot
response. Rebooted and tried again, but Index table failed to home,
had to use DCX mode again to home the table.
ALSO had dcx failure board 1 led #1. Rebooted and table homed fine,
but now arm four would not home. Rebooted and Arm 3 would not home.
No DCX or infranor errors on any or the arm problems. Entered DCX and
moved both arms manually fine. Rebooted and System errored for "c:\
bad sector found" "IGNORE _ ABORT_ RETRY. At FS recommendation we
reseated CPU and VME still errored for Bad sector found. We chose
ignore and continued through init until it errored on at "homing arm
3". We shut Arm 3 off in the config file and the problem moved
to head 4. FS is going to get a new DCX card for us from their
office. (all the oscillations are on card 2). But does not explain
other errors!
Also intermittent problems with init on elevator 1 and pad
conditioner up/down, had to be homed in manual
|
| 17.242 | corruption abounds | STRATA::RIDLON | Eliminate the obvious | Wed Apr 24 1996 02:10 | 16 |
| Continuing from last note....FS replaced the DCX#2 board which didn't
help and then they replaced the infranor for carrier 3 oscillation
which also didn't help. ROTGO and OSCGO commands worked fine. FS then
booted system up with speed493 software. Initialized fine. Ran some
breakin wafers through and everything worked fine. We also aren't
seeing the handler delay that was seen on B2 last week. We did have a
minor problem with slurry flow but that was isolated to the filter down
stairs being clogged. Ashland promptly rectified that situation. So to
summarize, 491 software is corrupted. Upon initialization it won't
perform various functions such as homing arm #3. If 3 is disabled the
problem moves to 4. If 4 and 5 are disabled the problem moves to the
pad conditioner.
B-shift w/FS
|
| 17.243 | aarrrrggggghhhh. | STRATA::RIDLON | Eliminate the obvious | Wed Apr 24 1996 07:22 | 13 |
| The tool failed to polish. It would alarm consistently for carriers not
rotating. The first time was due to the poor slurry flow from the
filter being clogged. However, subsequent times the carrier down force
was seen to go as high as 500 lbs upon touch down. Whilest
troubleshooting broke a wafer in manual polish (what a waste of a
program) so machine is being cleaned up and pad replaced. Carrier 4
will also be (or need to be) replace as well. Not sure if the down
force issue is due to using the 493 version startup so it wasn't
pursued that intensely. The infranor for carrier 5 rotation died during
the manual polish (again, what a waste of a program) so it will need to
replaced.
B-shift
|
| 17.244 | continued | STRATA::RIDLON | Eliminate the obvious | Wed Apr 24 1996 07:33 | 5 |
| News flash......the infranor for carrier 5 rotation is now working????
The power led was off but now its on and it does rotate...amazing.
Carrier 4 has been replaced and Roger is now working on the pad. It
could be installed by passdown but then again it might not be as well.
Its been one of those nights.
|
| 17.245 | hard disk / NU | STRATA::FINN | | Wed Apr 24 1996 20:14 | 24 |
|
System had bootup problems. Norton utility was used and found
cross linked files and corrupted files. These files were then deleted.
Norton utilities was used to defragment and cleanup disk.
CPU and Hard drive was borrowed from B3. Swapped B3's CPU, but BIOS was
configured for b3's hard drive. Swapped both as set and system booted
fine, with the exception of head 5 rotation. Changed infranor. System
booted aok.
Put B3's hard drive and CPU back in B3.
Reps ordered New CPU and Hard drive
Reps worked with Software Engineers in AZ. Kevin and Rich undeleted
the previously deleted files at Az.'s request. System booted fine.
Carriers were reinstalled. New pad was installed and conditioned twice.
Jesus is running breakin's.
New disk and CPU coming in tomorrow as a back up if this goes down
again.
A shift
|
| 17.246 | Software problems, downforce checked | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 25 1996 07:28 | 40 |
|
At the beginning of the shift, a wafer was left
on the table at lift-off.
We had problems the entire shift. After multiple
rotation errors after every run of (5) wafers, it got
out of hand. The multihead failed to move at one point
and the DCX board #1 was reset to clear up the multihead
transport problem. After a while, the multihead failed
again and Kevin suggested switching from 493 to 491.
At start of the process, it failed once again for rotation
errors on all (5) heads. Kevin suggested trying to do the
downforce calibration on all (5) heads. The data is below.
The tool has started a 50 wafer verify with touchdown.
Time will tell...
CARRIER PRE POST
==============================================
1 I-.43234 I-.46429
O-6.83289 O-6.29708
413lbs 377 lbs
==============================================
2 I-.46543 I-.45312
O-6.25199 O-6.54377
365lbs 377lbs
==============================================
3 I-.43735 I-.44988
O-6.63926 O-6.31586
390lbs 377lbs
==============================================
4 I-.46371 I-.49868
O-6.12997 O-5.62069
403lbs 377lbs
==============================================
5 I-.46486 I-.44615
O-6.23607 O-6.55172
361lbs 377lbs
D shift
|
| 17.247 | offsets and software kicks | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Apr 26 1996 05:50 | 68 |
|
We came into problems with B1 again. After seeing
the offset results from C shift, it did correlate to the
adjustments we did on the downforce Wednesday night.
We went through the downforce procedure again and found
the downforce out. The only way this could of happened
is if the zeroing on the offsets didn't go through. We
got all (5) heads back into spec. Below are the results.
We checked the spindle to center of polish sweep calibration
and (4) out (5) heads were in spec. Head #1 was out around
.3 inches. This will have to be manually adjusted, not
through the software. The home switch will have to brought
out to bring it in. The results are below as well.
During the running of the 1st (5) verify no-touch wafers,
the tool came up with a LOW VACUUM error when the wafers were
on the carriers. START continued the run without touchdown
and it unloaded fine. The tool failed to keep running the
rest of the wafers after the 1st (5) had unloaded so START
needed to be hit to finish the other 45 wafers.
After coming out of WET MODE, the multihead timed-out
going to home. A softboot didn't work. The SHORT CIRCUIT
LED was lit on the Infranor. The tool was powered down and
the wiring was checked at the Infranor without signs of a
problem. The tool powered back up and the multihead was
fine.
CARRIER PRE POST
==============================================
1 I-.46429 I-.45312
O-6.29708 O-6.23873
390lbs 377 lbs
==============================================
2 I-.45312 I-.44988
O-6.54377 O-6.31565
400lbs 377lbs
==============================================
3 I-.44988 I-.45531
O-6.31565 O-6.2069
390lbs 378lbs
==============================================
4 I-.49868 I-.46658
O-5.62069 O-5.99204
353lbs 377lbs
==============================================
5 I-.46615 I-.44668
O-6.55172 O-6.43501
389lbs 376lbs
HEAD-TO-POLISH-CENTER
HEAD PRE-TEST
====================
1 13.777
====================
2 14.032
====================
3 14.101
====================
4 14.094
====================
5 14.053
====================
D shift
|
| 17.248 | Broken Wafer | FABSIX::R_GEE | | Sun Apr 28 1996 07:52 | 12 |
| Spit a dummy wafer from head #3, it was the last run of
20 wafers. The wafer came out during segment #4 of the
TOUCHUPB recipe. We checked all the alignments and everything
looked good. Checked slurry flow and that also looked o.k.
Ran 25 wafers using the TRANSFER recipe with no vacuum lose
or mis-alignments. The cause of the fly-out is unknown
at this time, released it back to production.
B shift
|
| 17.249 | Cat Scratch Fever | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu May 02 1996 08:29 | 13 |
|
Tool still down since yesterday with scratches.
We did two pad changes and a lot of cleaning. Nothing
is evident as to what it is at this time but it related
to the pad. We had a no-touch run done and nothing
showed up. The last run showed a 30mm scratches on #4.
Two pads later and we're still dead in the water.
Rich is running more break-ins and is going to check
particles once more. They should be done by 8am.
D shift
|
| 17.250 | software problems | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat May 11 1996 06:18 | 10 |
|
Tool kept having rotation errors in segment #3. The
software for SPEED491 was brought back on line. No problems
with tool since.
D shift
|
| 17.251 | | STRATA::SWENSON | | Thu May 16 1996 20:34 | 9 |
|
B1 events for today.
1. CB 4 TRIPPED
2. HAD ROTATION ERRORS ON HEAD 4 AND 5
3. ALSO MAIN VACUUM ERROR TODAY.
|
| 17.252 | New filter traps for vac pump | STRATA::RIDLON | Eliminate the obvious | Tue May 21 1996 05:14 | 8 |
| Found some replacement filter traps for the vacuum pump in 94 stock.
Also found some replacement filter elements. The new traps were
installed on B1 and B2. Two more traps are in the top of the tool box
along with the replacement elements. A note will be sent to Annie
Hargraves to add these items to CMP.B's parts lists.
B-shift
|
| 17.253 | Head Rotation Errors / Infranor MC Adjustments Made. | ASDG::POIRIER | | Fri May 24 1996 20:10 | 13 |
|
Rotation Errors:
---------------
The system experienced "Head Rotation" errors this afternoon. Kevin
from Speedfam came in and made the following adjustments to the
INFRANOR Motor Controllers:
Motor Controller #1 - Voltage was increased from 12 vdc to 13 vdc.
Motor Controller #3 - Voltage was increased from 10.5 vdc to 12 vdc.
A 25 wafer verification run was sucessfully completed at 6:00 p.m.
|
| 17.254 | Carrier #1 not rotating | FABSIX::R_GEE | | Sun May 26 1996 07:45 | 15 |
| The system was erroring for "carrier #1 not rotating",
we would restart and it would complete the polishing
cycle. This was happening on every run. We found that
carrier #1 & #2 would stop rotating during step #3 of the
polish cycle, no visual errors found at the Infranor or
DCX boards. Took carrier #1 off line and ran 24 monitors
with no errors. Put carrier #1 back on line and the error
was gone. The error happened one other time later in the night
on the first run of a metal 3 lot, again no errors found.
B shift
|
| 17.255 | ROBOT CONTROLLER ERROR | SUBPAC::CMP | | Tue May 28 1996 18:04 | 3 |
| THE ROBOT CONTROLLER FOR THE TOOL IS SCHEDULED TO ARRIVE ON WED.
MORNING, THE PROBLEM WITH IT'S OPERATION WAS TRACED TO THE CONTROLLER
NOT GENERATING 28 VOLTS FOR THE PROM SAFETY BOARD.
|
| 17.256 | Robot Controller Replaced / Head #2 Rotation Errors | ASDG::POIRIER | | Wed May 29 1996 20:34 | 13 |
|
Robot Controller:
----------------
The Robot Controller was replaced this afternoon. New points were
taught and a verification run was completed.
Head #2 Rotation Errors:
-----------------------
The tool is going DOWN at shift chage for repeated Rotaion Errors on
Head #2.
|
| 17.257 | Head rotation errors | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu May 30 1996 07:40 | 30 |
|
Came in with tool down for head #2 rotation problem.
After tweaking Infranor to 13V, we checked all (5) heads
with 400lbs downforce. Head #1 stopped rotating every time
(4) seconds into polish in segment #3. No errors on the
infranors, nothing! All of the voltages were fine. We
tweaked rotation #1 and #2 Infranor to 13.5V but #1 kept
failing at 400lbs and every run at 377 lbs. We took #1
off line and the tool ran flawless. Due to the workload
and B2 struggling through MQC's we turned B1 back over to
production with (4) heads to lighten up the workload. The
tool failed MQC due to a recent spec change which only
allows for 300 removal rate range across the (5) carriers.
OPS could not bring tool into spec because off-set program
needs (5) inputs. OPS tried putting in n/a and 0000.0
but it would take n/a and 0000.0 produced bogus readings.
(ie. 132 for an off-set) Well, the tool can't run with (4)
heads. I took the tool back and swapped out the infranor
for #1 rotation with a new one from SF office. The voltage
was first set to 12.5 and #1 stalled out on the pad again
with errors on the infranor. The voltage was then boosted up
to 13.5 and it still failed. We tried running the gradual
downforce increase using the I_O_BREAKIN recipes but after
the third run, we left a wafer on the table at lift-off.
Kevin now feels its a pad issue. We've changed the pad and
currently giving it a long pad condition. After that, we
are going to try break-in wafers again.
D shift
|
| 17.258 | BAD HEAD ON B1 | SUBPAC::CMP | | Thu May 30 1996 17:45 | 16 |
| WE FOUND A PROBLEM WITH HEAD 1 STOPPING ON SEGMENT 3, AFTER
TROUBLESHOOTING, WE FOUND A BAD CABLE OR CABLES IN THE FLEXTRACK.
PARTS ARE NOW ON ORDER AND WE WILL UPDATE AS TO THE ARRIVAL DATE AND
TIME.
THE SEQUENCE OF EVENTS FOR TROUBLESHOOTING ARE AS FOLLOWS:
1) MOVE CABLES AT BULKHEAD CONNECTOR BETWEEN HEAD 1 AND 4 TO DIVIDE
PROBLEM TO MULTIHEAD OR INFRANORS BACK TO THE CPU CABINET.
2) PROBLEM STILL WITH HEAD 1, SO WE MOVED CABLES AT BULKHEAD BACK TO
NORMAL CONFIGURARTION, THEN MOVED CABLES AT TB13 BETWEEN HEADS 1 AND
5. THE PROBLEM THEN CHANGED TO HEAD 5 AND THE FAULT NOW ISOLATED TO
THE CABLE IN THE FLEXTRACK.
3) DURING TROUBLESHOOTING WE MONITORED THE VOLTAGE AT THE INFRANOR
AND MONITORED THE CURRENT (AMPS) AT TB13.
|
| 17.259 | Head #1 Rotation Cable Is Bad | ASDG::POIRIER | | Thu May 30 1996 20:37 | 7 |
|
Bad Cable:
---------
Head #1 Rotation Cable is bad. Head #1 is off line and we're running
with 4 heads until the cable arrives tomorrow.
|
| 17.260 | B1 FIX | SUBPAC::CMP | | Fri May 31 1996 19:33 | 2 |
| THE TOOL IS BACK WITH ALL 5 HEADS, THERE IS A POSSIBLE SOFTWARE ERROR
THAT CAUSED THE PROBLEMS.
|
| 17.261 | ROTATION AND DROPPED WAFER | FABSIX::J_SWENSON | | Sat Jun 01 1996 20:52 | 4 |
| 1. WAFER SPIT AT LIFT OFF ON CARRIER 2.
SWAPPED CARRIER 2 AND 3 ERROR WOULD NOT REPEAT.
2. ROTATION ERROR ON CARRIER 1. TRIPPED BREAKER (RESET)
REBOOTED AND RAN ERROR, DID NOT COME BACK.
|
| 17.262 | Carrier #1 rotation error | FABSIX::R_GEE | | Sun Jun 02 1996 07:51 | 11 |
| The system was erroring for "carrier #1 not rotating",
we would restart and it would complete the polishing
cycle, this was happening on almost every run. The system
was erroring in segment #3 of program #31 ILD1. We tightened
the connections on TB13 that go to head #1 Resolver. The error
never reappeared.
B shift
|
| 17.263 | HEAD 1 UPDATE | SUBPAC::CMP | | Mon Jun 03 1996 09:11 | 7 |
| AMMENDMENT TO FRIDAYS PASSDOWN:
REPLACE BOTH MOTOR AND RESOLVER CABLES IN THE FLEXTRACK, STILL HAD
ERROR ON HEAD 1, ADJUST VOLTAGE ON INFRANOR TO 14.5V AND REBOOTED
SYSTEM WITH 491 SOFTWARE. RAN WAFERS WITH OLD SOFTWARE THEN BROUGHT
BACK 493C SOFTWARE AND RAN WITH THAT VERSION. 493C IS NOW THE CURRENT
SOFTWARE RUNNING.
|
| 17.264 | carrier 1 not rotating | STRATA::RIDLON | Eliminate the obvious | Tue Jun 04 1996 08:27 | 6 |
| Tool errored for carrier 1 not rotating again. Recipe this time was
touchupc. Only happened on first 5 wafers. Backed out and restarted
with no other mishaps.
B-shift
|
| 17.265 | Carrier #1 rotation | FABSIX::R_GEE | | Tue Jun 04 1996 08:40 | 7 |
| We had carrier #1 rotation errors about 6 times tonight. No
specific pattern or problems noticed.
B shift
|
| 17.266 | carrier 1 | STRATA::RIDLON | Eliminate the obvious | Wed Jun 05 1996 03:18 | 2 |
| Carrier 1 rotation errors on first 5 wafers of an ILD2 recipe.
The rest ran fine.
|
| 17.267 | rotation errors | FABSIX::L_SHKOLNIKOV | | Thu Jun 06 1996 08:59 | 8 |
|
The system was erroring for "carrier #1 not rotating",
this morning. The system was erroring on 4th second in segment #3
D shift
|
| 17.268 | It's back online. | SUBPAC::CMP | | Thu Jun 06 1996 19:19 | 1 |
| The tool is back online for your processing pleasure
|
| 17.269 | Rotation Errors / CDATA.CMP File Changed | ASDG::POIRIER | | Thu Jun 06 1996 20:19 | 23 |
|
Carrier Rotation Errors:
-----------------------
This morning we observed that the actual Down Force readings on the
status screen were approx 25% higher than the 377 lb. setpoints
during a Rotation Error event. The error occured with 4 sec remaining
in Segment #3.
After observing B2, we noticed that the initial Down Force (spike)
was only around 5%. We decided to look in the DOS files for any
differences between B1 & B2. We found a difference in the CDATA.CMP
file. The "CLOSED LOOP INTERVAL" in B1 was 18 and was 36 in B2.
(CLOSED LOOP INTERVAL was changed from 18 to 36 in CMP.B1)
85 wafers were run at 410 lbs. Down Force with no Rotation Errors.
The initial Down Force (spike) at touch down in segment 3 is now
in the 5% - 10% range. The system was returned to Manufacturing
at 3:00 p.m.
C Shift.
|
| 17.270 | Wafer track #1 | FABSIX::R_GEE | | Tue Jun 11 1996 07:51 | 8 |
| The system was alarming for "wafer in cassette #1 wafer
track", after it was put into wet mode. We tightened a loose
connection on the wafer present sensor and adjusted it, (#98).
B shift
|
| 17.271 | Process doors | FABSIX::R_GEE | | Tue Jun 11 1996 07:51 | 10 |
| Put the 4 side doors back onto the alignment tracks.
We need to get new rollers for these door to ensure
they stay on the tracks. The rollers are in very bad
shape, but are working for the time being. Please
be gentle when opening and closing the side doors.
B shift
|
| 17.272 | Head #1 Rotation Error - Experimental Pad On Table | ASDG::POIRIER | | Wed Jun 12 1996 20:29 | 11 |
|
Head #1 Rotation Error:
----------------------
We experienced 1 Rotation Error on C shift today. Process Engineering
was running an experimental pad at the time the error took place.
Larry C descibed the pad as "harder and more aggresive than the normal
IC1000 pad". Also, we observed that the ramp overshoot was in the
normal 5% range in segment #3. We're of the opinion that the Rotation
error was caused by the additional friction of the experimental Pad.
C Shift.
|
| 17.273 | B1 slurry calibrated | SUBPAC::KRUPA | | Fri Jun 14 1996 17:16 | 8 |
| Slurry was calibrated after the slurry delivery problem.
Results:
set-point Pre-adjust Post-adjust
----------- ----------- ------------
Pump #1 500mL/min ~350 mL/min ~480 mL/min
Pump #2 500mL/min ~400mL/min ~500 mL/min
-Earl/Rich/Frank
|
| 17.274 | moisture sense module off | STRATA::RIDLON | Eliminate the obvious | Mon Jun 17 1996 01:22 | 5 |
| After B2's leak detection module was found to be off B1's was checked
and also found to be off. It was turned back on.
B-shift
|
| 17.275 | Lost a wafer at liftoff | FABSIX::R_GEE | | Tue Jun 18 1996 08:27 | 9 |
| Lost a dummie wafer from carrier #5 at liftoff, it
didn't break. Recovered the wafer and restarted the
system. Checked the vacuum system, everything looks
normal.
B shift
|
| 17.276 | slurry detect/mapper problems | LUDWIG::RIDLON | Eliminate the obvious | Wed Jun 26 1996 17:14 | 7 |
| Installed the slurry detect sensor, line, and amplifier. Emo's the tool
to hook the amplifier up to 24vdc and when I brought it back up the
mapper wasn't working properly. The reps reseated the ic's on the
control cards inside the mapper which apperently fixed the problem.
Reinitialized and everything started working properly. The slurry
detect isn't operational as of yet. Keep the amplifier on A for the
time being.
|
| 17.277 | Particles are back... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Jun 28 1996 08:18 | 10 |
|
Problems with particles all night.
* cleaned entire tool - failed for particles
* no touch - particles passed
* cleaned condtioner and carriers - failed for particles on
#1 and #2. the rest barely passed.
* swapped out carriers #1 and #2 - passed particles barely
all others failed bad.
* replacing pad one more time
|
| 17.278 | wafer breakage... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Jun 29 1996 09:20 | 13 |
|
found source of particles... :^)
A wafer slid out of carrier #1 and nailed #5. Small
pieces of #1 managed to get around the table cause
scratches on the rest of the wafers. Tool was stripped
down and cleaning was started but not finished.
total for the crash - (2) carriers - #1 & #5
(5) product wafers
BJ
|
| 17.279 | Carrier to CUp Alignment Problems/Table Drains/Rust on Table | ASDG::POIRIER | | Sat Jun 29 1996 20:29 | 30 |
|
Polish Table Drains:
-------------------
The rectangular shaped Teflon blocks that the table rings drain into
have been drilled out. The slurry flowing off the table now drains
through the bottom of the blocks instead of flowing into tubing and
draining through the base of the tool. All 3 tools now drain slurry
from the table in the same way. This change will eliminate the repeated
clogging we have experienced with the old draining set up.
Rust Found On Table Under Pulley Ring:
-----------------------------------
In order to drill out the Teflon drain blocks, we had to remove the
pulley ring that is mounted at the TOP of the table. We discovered a
large quantity of rust sandwiched between the ring and the table.
Both rings and the table were thoroughly cleaned.
Carrier To Cup Alignment Problems:
---------------------------------
The tool was down from this morning for a wafer crash. We continued to
clean where D shift left off. We had considerable problems with the
carrier to cup alignments. We tried aligning the head to the cups using
the standard procedure. We're still haveing trouble getting head #2 to
load properly. B Shift will pick it up from here.
C Shift.
|
| 17.280 | cup to carrier aligned | LUDWIG::RIDLON | Eliminate the obvious | Sat Jun 29 1996 23:54 | 18 |
| Picking up where C-shift left off we came in and checked the cup to
carrier alignment. All 5 were off by a considerable amount. Before
moving anything we checked the locate.cmp file and found that the
"offset from home" number for the index table was at -497. Went back to
calibrate it and we were able to get all five to align by moving the
index table a couple thousand steps. Final "offest from home" number
was -2403. We then tried screw up the alignment by first making the cpu
reinitialize the DCX boards (opening the process doors when they
shouldn't be takes care of that), rotating the index table, resetting
the cpu board, and then finally emoing the tool. After each step we
checked the locate.cmp file and the -2403 number never changed. Ran 5
wafers through using the transfer recipe and had no problems. Checked
the locate.cmp file one more time and "offset from home" was still at
-2403. Told production they could have it back but to let us know
before they ran so we could watch it.
B-shift
|
| 17.281 | MC11 infranor changede | LUDWIG::RIDLON | Eliminate the obvious | Sun Jun 30 1996 06:53 | 14 |
| Production was short handed tonight so they couldn't get right to
MQCing B1 so took the oportunity to continue with the slurry detect
installation. Powered down the tool to remove the amplifier (to
relocate) and upon power up the infranor for the index table didn't
power up. This happened while calibrating the index table earlier in
the night but it powered up when we emo'd the machine again then. This
time it wouldn't power up no matter what we did. We found one in the
cabinet so it was changed. Other problems in the room prevented the
completion of the slurry detect installation (Bob had vaca) so this
will be finished tonight. Tool powered up fine after the infranor was
swapped.
B-shift
|
| 17.282 | SLURRY DETECT ACTIVATED | LUDWIG::RIDLON | Eliminate the obvious | Mon Jul 01 1996 03:28 | 5 |
| The slurry detect amplifier and probe are installed and adjusted.
Slurry detect in hardware.cmp has also been turned on.
B-shift
|
| 17.283 | Fly-out from head #5 | FABSIX::R_GEE | | Wed Jul 03 1996 08:29 | 10 |
| A product wafer slid out from under carrier #5 during a 1 sec.
polish (step #5). It was the first run off a PMD touch-up using
the "LIGHT" recipe. Three product wafers had to be scrapped.
We cleaned up the mess, checked the alignments and loading,
replaced the pad and carriers #3,#4, & #5.
B shift
|
| 17.284 | Start up for B1 | LUDWIG::SWENSON | | Fri Jul 05 1996 20:24 | 12 |
| Jumpered di pressure switch
powered system up. System hung up waiting for vacuum level at
carrier # 4. powered down and rebooted with no problems.
installed 5 new carriers
performed conditioner arm cal, found to be approximately @93 lbs @ 67%
set to 76. 3 +/- 1 lb
cut primary pad.
retrieved new brushes from stockroom for scrubber.
C Shift
|
| 17.285 | mapper problem | FABSIX::L_SHKOLNIKOV | | Sat Jul 06 1996 08:21 | 15 |
|
System errored for "Waiting for mapper response out". Cassette would
not see home switch as it tilted back. Cassette B (#2) is continuously rocking
back and forth looking for it's limit switch and the mapper moving up and down
in the same time.
Swapped cables at mapper and problem moved to cassette one. Swapped both ends
of both cables and problem returned to cassette two. Swapped tilt boards within
the controller and problem stayed with cassette one. Swapped cables at input
to the controller and problem moved to cassette 1. Problem is definitely
within the Kennsington itself. I disabled the controller. Cassette 2 is not
working it wont tilt and scan, cassette 1 is working. Rich (SF) has been called
but did not call back.
Leon
|
| 17.286 | vacuum pump moved | STRATA::RIDLON | Eliminate the obvious | Sun Jul 07 1996 06:22 | 7 |
| Relocated vacuum pump to the black box below the floor.
Test fine.
B-shift
|
| 17.287 | Carrier #1 not rotating | FABSIX::R_GEE | | Sun Jul 07 1996 08:06 | 14 |
| This morning the system began erroring for carrier #1 not
rotating. The problem was that during step #3 carrier #1
would stop rotation, no errors on the dcx boards or Infranor.
The actual downforce display looked good, only overshooting by
2 to 3 lbs.
Checked all the connections at the infranor and everything
looked ok. Checked the voltage at the infranor and it is at
12.10, no change was made. Conditioned the pad for 300 seconds
and ran 25 wafers with no more errors.
B shift
|
| 17.288 | Index table out of adjustment / air cylinders | FABSIX::R_GEE | | Tue Jul 09 1996 06:33 | 16 |
| Repaired water leaks at #2 and #3 load cup air cylinders, plus
fix other leaks.
Installed all 10 cups and adjusted the pedestal to cup
clearance. Checked the index table horizontal runout, it
is within spec but will need to be brought in tighter. When
the table rotates there is excessive vibration. The vibration
is due to the inside of the index table rubbing against the
carrier scrub station. The index table will need to be centered
better to eliminate the excessive vibration.
When the table is in the home position it is rubbing between
load two and load four.
B shift
|
| 17.289 | index table and such...... | SUBPAC::LANDRY | | Tue Jul 09 1996 20:35 | 25 |
|
We continued on with the Index Table install today. The following
info contains work performed so far.
* The new Index Table has been installed. Runout was done by
B shift.
* 10 new cups were installed. Cups were specifically matched to
the respective feed-throughs.
* All six cup lift cylinders were replaced with a new style
cylinder. Upon checking for leaks, they were several found.
It appears they all have been repaired over the last couple of
shifts, but continual monitoring for a few days may be of a
benefit.
* The new mapper was installed and is functional.
* PLEASE refrain from using this system tonight as the reps still
have several items to do. The system is down to them for these
upgrades!
A shift / SF reps
|
| 17.290 | upgrade progress | SUBPAC::CMP | | Tue Jul 09 1996 20:37 | 4 |
|
Completed adjustments of the cups and multihead to table, installed
the new mapper system and will finish up in the A.M.
|
| 17.291 | upgrades and repairs | SUBPAC::CMP | | Wed Jul 10 1996 17:29 | 4 |
| The index table work has been completed and the tool tested with
wafers. An upgrade for the conditioner ring has also been installed
at the same time. The mapper has been replaced and calibrated due to
a failure.
|
| 17.292 | LOAD CUP #! sensor | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 11 1996 08:03 | 12 |
|
The sensor or connection for LOAD CUP #1 DOWN sensor
is junk. Due to the fact that I can't get into the bottom
of the machine because of my belly (stop laughing!), I
can't seem to find where the sensor connection is.
Since the sensor is not detecting CUP DOWN, the multihead
can't move. I went into SERVICE and hit SERVICE CARRIERS
which brought the carriers onto the table and I have two
DI guns spraying on everything to keep things wet for now.
BJ
|
| 17.293 | upgrade update | FABSIX::J_SWENSON | | Thu Jul 11 1996 20:27 | 2 |
| Reps continued to wrok on upgrades all day and system will remain down
for eng. Reps will perform further upgrade verifications tomorrow.
|
| 17.294 | Invertor Communication Errors / IO_ILD3 recipe corrupted | ASDG::POIRIER | | Sat Jul 13 1996 20:44 | 38 |
|
Invertor communication error while running IO_ILD3 recipe:
----------------------------------------------------------
The system errored for "invertor communication" on every attempt
to run the IO_ILD3 recipe at the begining of C shift today.
Repeated reboots did not remmedy the situation. The Multihead
would move to polish position, pause & timeout for invertor
communication. There was no spindle rotation or table rotation
and Infranors & DCX boards were completely lit up with error lights.
However, the BREAKIN, MQC, IO_ILD1 & IO_ILD2 recipies ran with no
problems. It appears that the IO_ILD3 recipie was corrupted by
EMOing the tool during a run. The person operating the tool at the
time was experiencing a "Main Vac Too Low" error and hit the EMO to
recover.
Speedfam recommends exiting back thru the menus on the touchscreen
to DOS before EMOing the tool. This will facilitate a CLEAN shutdown
in the software and will avoid the corruption of files.
We recovered from thgis situation by performing the following:
1) Choose the PROCESS edit/view/copy button from the CMP-V Main Menu.
2) Choose the PROCESS copy/erase/rename button from the Process Menu.
3) Erase the corrupt IO_ILD3 recipe.
4) Copy a "known good" IO_ILD1 or IO_ILD2 recipe and insert in place
of the file just erased.
5) Rename the known good file to IO_ILD3 and change the run time to 400
sec. (IO_ILD1, IO_ILD2 & IO_ILD3 recipes are identical except for
the run time).
C Shift.
|
| 17.295 | mapper error | STRATA::FINN | | Sun Jul 14 1996 20:23 | 10 |
|
System originally failed for mapper error. Ops techs EMO'ed the system.
Upon bootup, system would not init passed "homing arm 1". We were paged
and system was placed down at that point. Found screen locked up and
DCX error 2 on board 2. Reset DCX board and error cleared but screen
frozen. Reset CPU bd for a soft reboot. And all I/O's failed except
com board. Reset cpu again, same thing. EMO'ed system and brought it
back up, tested mapper aok.
A shift
|
| 17.296 | High particles and scratches / conditioner tub | FABSIX::R_GEE | | Mon Jul 15 1996 08:10 | 15 |
| The system failed mqc's for high particles and scratches.
When we were cleaning the system we found what is believed to
be dry sticky Contact Cement on the conditioner disk and floating
in the conditioner disk rinse tub. Also, some found on of the
load/unload cups. We cleaned the entire system and replaced the
pad. We found the conditioner overflow tube had been broke and
repaired with the Contact Cement, the Contact Cement was flaking
off and contaminating the system. We replaced the overflow tube
with one found in the Speedfam cabinet.
B shift
|
| 17.297 | high particles..... | SUBPAC::LANDRY | | Wed Jul 17 1996 20:35 | 20 |
| The system is currently down for high particles.......
Check and/or eliminated:
Throughly cleaned the polish area, index table, all cups, conditioner
wheel (including the tank).
Scrubber brushes disabled from program and particles were still high.
Flushed spindles to assure that no contamination/rust was present. It
was clean.
Run the "TRANSFER" program and particles were good. This run included
the use of the scrubber program. Also have to feel that the carriers
are fine as they obviously hold the wafers!
So, it looks like the pad needs to be changed, at least. May want to
dissemble the conditioner gimbal should a new pad fail.
A shift
|
| 17.298 | Particles.... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 18 1996 07:39 | 29 |
|
Tool had high particles when we came in. We took the
conditioner and assembly apart. There was dried up slurry
inside. The gimble assembly was taken apart and dried out.
The drain tube was sitting too high. It was unscrewed almost
3/4" from the base. The brushes we swapped from top to bottom.
The tool was cleaned up and a new pad was installed. The first
round of MQC's failed for (1) head with high particles but the
other (4) were just barely in spec. MQC's were run one more
time and then all (5) failed for high particles. It would make
sense that as more wafers were run on the tool, the particle
count would get higher then it would make sense it had something
to do with the pad. The pad were taken from different lots.
The options left would be:
change the conditioner
change the brushes
check slurry flow
The slurry flow came up 150 ml/min too high on each pump.
Do the math and that 300 ml/min extra during the polishing.
The flow was brought back into spec at 551 ml/min each pump.
still failed.....
Leon is starting another pad change now.
D shift
|
| 17.299 | particles | STRATA::WESTPHAL | | Wed Jul 24 1996 20:38 | 9 |
| CMP.B1 - Down for high particles. After cleaning, checking scrub recipes, and
numerous MQCs it was determined by process and process engineering
that we may have a problem with the wafers. This conclusion was
reached because Gwen rechecked her MQCs, using some old MQC wafers
from CMP.B3's process acceptance. The MQCs were good. EEG was
notified and accepted the particle check done with CMP.B3's the old
MQC wafers. The tool was returned to production. EEG will get with
the Engineer for the DEP tools and work out the issue.
|
| 17.300 | DCX.CMP corrupted | FABSIX::R_GEE | | Tue Jul 30 1996 07:50 | 12 |
| A monitor wafer from carrier #3 stuck to the pad at liftoff.
Had to reset the computer to recover due to the touch screen
freezing up. When we tried to initialize the system nothing
would home. Found the DCX.CMP file had been corrupt when we
reset the computer. Re-entered all the variables and intialized
the system with no problems. This is the second time today
this happened.
B shift
|
| 17.302 | B1 upgrade | SUBPAC::CMP | | Thu Aug 01 1996 15:43 | 3 |
| busbar upgrade done for infanors on b1, made adjustment dcx. cmp file
as per upgrade, installed new style rollers to doors, checked and
adjusted scrubber rpm.
|
| 17.303 | carrier time-out errors | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Aug 02 1996 06:46 | 18 |
|
Tool faulted three times for time-out waiting for
carriers to go to home, load and clear respectively.
According to workstream, it timed out three times on
C shift for waiting for carriers at load. The tool
would let us get out of the program every time however.
Soft and hard boots didn't work. After the tool had been
off for a while it was powered up and we lost the Infranor
for the multihead. I personally don't think it was related
to the carrier issue because it failed again after Leon
replaced the Infranor. After speaking with Rich from SF.,
he had me look at some files and eventually delete the
current DCX.CMP and replaced it with the back-up file,
DCX.OLD. After 50 wafers were run for VERIFY, there were
not problems at this time and the tool was turned back over
to OPS.
D shift
|
| 17.304 | PARTICLES | STRATA::WESTPHAL | | Sat Aug 03 1996 20:28 | 14 |
|
CMP.B1 - Down for high particles and install of new ball bearings in the
conditioner arm. The tool never came up from the PM. Pulled all the
cups and cleaned the index table. Cleaned the conditioner and process
area. Swapped out the pad with a prestamped one from stock. The ball
bearings for the conditioner arm came in this morning and were
installed but we also need the seal which protects the bearings. This
was never ordered. Speedfam was notified about the seal and will
order it ASAP. Until the old seal was cleaned and reinstalled until
the new part arrives. MQCs were run on the toolbut they failed for
high particles. Process Engineering was contacted and they requested
that a filter be placed inline with the tool and the pad changed again
and the MQCs repeated.
|
| 17.305 | High Particles Continue / Pads and/or Slurry suspected | ASDG::POIRIER | | Sat Aug 03 1996 20:35 | 52 |
|
High Particles:
--------------
B1 still has not come up from the Monthly P.M. due to high particles.
Repeated cleanings and pad changes have not yielded acceptable
particle levels. (2000+)
John Swenson reviewed the SPC charts for particles on all 5 polishers
from July 2nd thru Aug 2nd. He found the total mean particle level
at or above the UCL on all 5 tools. In addition to TOTAL particles,
we have been consistantly failing for > than 250 LARGE partilces.
Total mean - particles: 7/2/96 thru 8/2/96 on all 5 polishers.
Strasbaugh:
Carrier: Left Right
------------------------
CMP.A1 732 1135 UCL = 1000
CMP.A2 925 1112 UCL = 1000
Speedfam:
Carrier: 1 2 3 4 5
--------------------------------------------------------
CMP.B1 1626 1502 1569 1712 1710 UCL = 1500
CMP.B2 1300 1609 1412 1325 1226 UCL = 1000
CMP.B3 955 976 950 1080 979 UCL = 1000
Frank Krupa was called at home this afternoon. He would like B & A
shifts to try a few things in an attempt to isolate the source of
the particles. He suspects PADS or SLURRY at this point.
1) Temporarally install a point of use filter on the incomming slurry
line on CMP.B1. Change the pad and run an MQC.
NOTE: The last 3 pad changes yielded 2000+ adders and were over the
250 limit for LARGE particles.
2) If the slurry filter experiment does not help, continue changing
pads making sure to use a different lot number each time.
Frank has asked that all particle data be posted in notes and sent
to him for evaluation. Please remember to collect particle data
for every change of condition during the evaluations.
C Shift.
|
| 17.306 | filter installed | STRATA::RIDLON | Eliminate the obvious | Sun Aug 04 1996 06:55 | 23 |
| Following the game plan given to C-shift by Frank we installed a point
of use filter. When we opened the slurry valves in the vmb, however,
the slurry flowed backwards through the filter (yes, we installed it on
the "slurry in" line). We followed the "slurry-in" line back to the vmb
and found it connected to the slurry return main line. Swapped the
lines in the vmb so that the slurry would be filtered going into the
machine and not out of it. A monitor run was performed and the
particles were still high (large >350 to <700 and total >1500 on
4 carriers and ~1300 on carrier 1). The pad was pulled
and a hand cut one installed (how do you check the pad_change data in
workstream?). Several black specs were seen on the pad after
installation. They came off with water but a thorough inspection
was done prior to installation and no black specs were seen. It is
believed that they were coming from the red handled roller as alot of
black crap was around the Teflon ends. It was taken apart and
thoroughly cleaned. Another test run still came out with hi particles,
large hovered around the 500 range and totals around 2000. Another pad was
installed from another lot. Particle test data was not available as of
posting.
B-shift
|
| 17.307 | PARTICLESB1.TXT 8/4/96 | FABSIX::M_PROVENCHER | | Sun Aug 04 1996 07:46 | 36 |
| MQC B1 08/04/96
PAD LOT# (6EN-JP4(NOT SURE))
PRE PARTICLE DATA POST PARTICLE DATA
#1-5/32/0 #1-388/1396/0
#2-5/39/0 #2-580/1910/0
#3-3/39/0 #3-615/1955/0
#4-3/29/0 #4-398/1278/0
#5-1/16/0 #5-405/1395/0
RESULT : PARTICLES FAILED MQC CRITERIA, PAD WAS PULLED FOR NEW ONE.
MQC B1 08/04/96
PAD LOT# 6BR-JP7 (PAD #4)
PRE PARTICLE DATA POST PARTICLE DATA
#1-3/22/0 #1-587/2366/0
#2-5/27/0 #2-487/1849/0
#3-2/06/0 #3-478/2060/0
#4-4/17/0 #4-455/1786/0
#5-4/15/0 #5-531/2290/0
RESULT : PARTICLES FAILED MQC CRITERIA, PAD WAS PULLED FOR NEW ONE
MQC B1 08/04/96
PAD LOT# 6BR-JP9 (PAD #10)
PRE PARTICLE DATA POST PARTICLE DATA
#1-8/22/0 #1-526/2160/0
#2-2/14/0 #2-408/1620/0
#3-7/16/0 #3-398/1618/0
#4-1/18/0 #4-458/1707/0
#5-3/36/0 #5-472/1921/0
RESULT : PARTICLES FAILED MQC CRITERIA, PAD WILL BE PULLED AND RE-
-PLACED WITH A NEW PAD FOR THE NEXT SHIFT. MQC'S FOR THESE
THREE RUNS, WERE TAKEN FROM LOT #MA 2614.MQC'S TO BE MEASURED
FOR THE NEXT RUN, WILL BE TAKEN FROM LOT #MA2611.
|
| 17.308 | | FABSIX::B_FINN | | Sun Aug 04 1996 20:46 | 29 |
|
Check pad data history via workstream. Confirmed that lot jp5
had not been used on b1 since pm/particles. Cut out and installed
6BR-JP5, cleaned pad conditioner and tub (both were in good shape).
Failed mqc's for high particles.
0-16-0 556-1939-0
4-16-0 659-2524-0
0-06-0 700-2503-0
4-05-0 584-2091-0
4-27-0 642-2175-1.23
According to cmt data jp4 was the last pad to pass for Earl.
Installed 6en-jp4 pad 4 on system.
During breakin's robot failed to go get the first wafer.
System does not realize this until flipper misses wafer at
pre-aligner. placed wafer on prealigner but system hung up.
Exited to DOS and re init system. re mapped and started
again. Robot did not go get first wafer again. Exited to DOS and
powered down. Brought system up and it ran fine. Now running
breakin and MQC wafers.
A shift
|
| 17.309 | new carriers/downforce cal | LUDWIG::RIDLON | Eliminate the obvious | Mon Aug 05 1996 07:10 | 31 |
| After 6 different pads and a point of use filter installation it looks
like it might not be a pad or slurry problem. Brendan mentioned that
spc shows that particles took a "dive" right after the monthly was
performed on Friday. We checked spc and even though particles were up
and down before Friday (8/2), since then they have been out of spec
high. We had process read the last monitors for removal rate and
uniformity. The rate was low at ~2800/min and uniformity was below
9% on all carriers. We rechecked the down force calibrations for the
conditioner and carriers since, in our estimation, these would be
the only things on the monthly that could effect particles. The
conditioner was found to be at 58lbs with 77 requested. Using note
23 as a guideline (its also in the pm spec) this was adjusted so
that the actual was 77lbs. The carriers were also found to be low
by roughly 20 lbs on all carriers. These were also adjusted per
the speedfam tech manual so that the actual on the screen and the
sensotec read 377 +/-1%. Not quite what we expected to see to
attribute to the particle problem. The last pad put on by A-shift had
the lowest particle counts compared to the other 5 pads used in the
past two days so the same lot number was installed. New carriers were
installed to eliminate them as a possible source of particles.
During the first set of MQC's two mqc wafers slipped out during lift
off. The second set of mqc's made it through fine. The wafers may
have slipped out due to inproper procedure. According to the process
spec 5 wafers are to be run using bin1, 5 using bin2, and 10 using
Bkin. The first mqc's ran 5 each using bin1, bin2, and bin3 and then
only 5 using bkin. Second set of mqc's passed particles. Large were
316 to 231 and totals were 780 to 1074.
B-long-winded-shift
|
| 17.310 | PARTICLES | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Aug 08 1996 07:51 | 14 |
|
Tool failed particles.... no kidding...
A new pad installed at shift change and failed.
a new pre-cut pad from STK-6 was installed. Break-ins
just started.
ps... B2 passed with old spec values for particles.
It has a pre-cut pad on it....
D shift
|
| 17.311 | Particles | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Aug 09 1996 07:28 | 22 |
|
The wafers that used for evaluation for the
EXT_80lbs run on C-shift were, none-usable before
D shift started. We ran wafers on D shift and
the failed for particles
1 - pre-3-0-18 post-571-0-1959
2 - pre-6-1-20 post-637-0-2006
1 - pre-3-0-14 post-562-0-1925
1 - pre-8-0-18 post-1437-0-2143
1 - pre-4-0-14 post-1430-0-2185
We brought over the 55-gallon drum of slurry but
we couldn't find the 5u filter that EE instructed. We
tried a 1u filter but we could only get a maximum flow
of 300 ml/min. NEXT..........
D shift
|
| 17.317 | B1 Particle test | FABSIX::J_SWENSON | | Sat Aug 10 1996 20:35 | 54 |
| CMP PASSDOWN
------------
CMP.B1
------
At start of tests had to do several reboots for robot errors, then
ran the tests below prior to lunch, discontinued testing due to wafer crash
on standard io_mqc recipe; wafer came out of carrier 5 after 8 seconds into the
polish segment; changed out all carriers due to cracks on the pps rings at the
helicoils. Had difficulty restarting tool due to low vacumm; discovered
nitrogen pressure was too low.
Particle Test Results for 08/10/96
Tool B1 Carriers
1 2 3 4 5
1. Fab6 Slurry 628-2432-0 D 603-2222-0 D 522-1904-
Normal
(MQC_RECIPE)
2. Fab4 Filtered 328-1124-0 D 728-2584-39.6 D 847-3417-0
Slurry
3. Fab6 Slurry 316-1018-0 D 240-1153-0 D 191-709-0
water flush
CMP.B3
------
System crashed 30 seconds into the 50 second segment 6.
Removed carriers 1,2 and 5 and replaced.
cleaned tool replaced pad,reset counters.
system returned to production for MQC's.
CMP.B2
------
Weekly p.m. completed
|
| 17.312 | Robot | FABSIX::R_GEE | | Mon Aug 12 1996 08:25 | 8 |
| The robot wouldn't respond, found one of the cables going
to the robot was loose. Re-seated, repositioning the cable
and tightened the connectors. Ran 100 wafers using the transfer
program with no errors.
B shift
|
| 17.313 | Load flipper / unload cup / broken wafer | FABSIX::R_GEE | | Tue Aug 13 1996 08:18 | 21 |
| The load flipper was missing wafers at the aligner.
Adjusted the load flipper to aligner position back
10 steps.
The unload cup down sensor wasn't seeing the cup down,
adjusted the sensor.
Left breakin wafers on the table at lift off many times
tonight.
Many computer and screen problems tonight, believed to be
created by excessive vibration.
Broke 2 breakin wafers on the pad in step #6, the wafer slid
from carrier # 1. We think maybe the new water polish step
may not be a good idea with a new pad.
B shift
|
| 17.314 | B1 back and proud of it. | SUBPAC::CMP | | Tue Aug 13 1996 21:55 | 12 |
| First off,, What the heck happened???
Found the alignments off on the robot, load and unload flippers, and
the elevators. Realigned the robot, load and unload flippers, and
the elevators, also made adjustments to the load and unload cups
up and down speed. Checked the multihead arms and they looked good.
I reloaded 493C software and saved 491 for a computer museum.
Rich(Mr. Goodwrench)
|
| 17.315 | loosing its mind | STRATA::RIDLON | Eliminate the obvious | Wed Aug 14 1996 07:59 | 12 |
| Production tried to mqc the tool due to b2 and b3 being down. However
several faults prevented this. First off the carriers down at carrier
clean wasn't being seen. Then carriers out to load cups wasn't being
seen. Checked the dcx files and nothing seemed to be out of the
ordinary. Tried recalibrating the carriers to load cup positions which
worked. Both the index and carriers 4 and 5 positions had to be
changed. Tried to run again but tool still wasn't seeing the carriers
down at the clean station. The DIGin for the reed switches were being
satisfied (41-45). Running out of time for this one as well. Will have
to leave down for A-shift eval.
B-shift
|
| 17.316 | b1 is back | SUBPAC::CMP | | Wed Aug 14 1996 20:14 | 5 |
| Continued work on the problem of software, first made some changes to
file (hardware.cmp) then made calibration changes to correct problem
handling wafers. The tool is back to operations, but they will be doing
some recipe changes for a while. Also replaced all the cmp files due to
corruption.
|
| 17.319 | b1 alignments | SUBPAC::CMP | | Thu Aug 15 1996 14:53 | 4 |
| Found the calibrations were off for the robot,load and unload flippers
and theelevators, as well as the index table alignments. Realigned the
table to the carriers, spent most of the day with table alignment.
Reloaded .cmp software files due to possible corruption.
|
| 17.320 | adjustments and a public service message. | SUBPAC::CMP | | Thu Aug 15 1996 19:50 | 14 |
| Made more adjustments to the load flipper fingers for better loading
into the cups, also made minor adjustments to the aligner and robot to
cassettes. Just a word about the flipper alignment, when you have
aligned the fingers to drop the wafer into the cup and you see the
fingers are NOT aligned to the prealigner when they go to pick up a
wafer, adjust the prealigner at that time (if you adjust the fingers
to the prealigner then they will not be aligned to the cups) The
prealigner is the last thing to adjust for wafer pickup. After the
prealigner is adjusted then it may be necesary the calibrate the
robot to prealigner.........
Rich (Mr. Goodwrench)
|
| 17.321 | Load flipper and elevator #1 errors | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Aug 16 1996 08:15 | 23 |
|
A fifty wafer verify run was done after Marco Inc. meeting
got over. There wasn't any handling issues except for an
(2) "pinging" noises when the flipper was picking up the
wafer at the aligner. So, the tool was turned over to OPS
for pad break-in and MQC's. It was loading the finally round
of wafers and the load flipper failed to pick up a wafer at
the aligner because the two outside fingers got under the wafer.
The flipper at load cup alignment was perfect so I nudged the
aligner to the left (looking at the front of the machine). The
robot at aligner positioning was still ok. The tool handled
great after that. Elevator #1 dumped the DI water but failed to
fill back up. There was air going to the quick fill valve and
DI was getting by. We were looking into the 3-way dump valve
when it started working again. If it had failed again, we
we going to pull the valve assembly out but it worked fine
all morning. It failed for the first round of MQC's barely due
to uniformity and we are waiting for the next next results now.
BJ and Dave
|
| 17.322 | update for thurs. | SUBPAC::CMP | | Fri Aug 16 1996 09:11 | 5 |
| This is an update for Thursday.
On thursday we also installed a new lift cylinder on load cup 1
due to the fact that it was not lifting smoothly.
|
| 17.323 | water leak | SUBPAC::CMP | | Fri Aug 16 1996 11:33 | 2 |
| There was a report of a leak, possibly coming from lift assy. from load
cup 1, found a screw that had a bad seal and replaced the seal.
|
| 17.324 | sticky cyl. | SUBPAC::CMP | | Fri Aug 16 1996 17:22 | 5 |
| Replaced the keyboard, found load flippers not fully opening
intermitently, the air cylinder will be replaced. Found on thurs.
that the air pressure to the cyl. was at 30lbs. when reduced to
correct limit of 20lbs. the problem started to happen. ? was it
turned up to compensate for stickiness???
|
| 17.325 | Flipper Gripper for the "Gipper" | SUBPAC::CMP | | Fri Aug 16 1996 19:22 | 3 |
| Replaced the air cylinder for the load flipper, 2 more will arrive
tommorow at package plus, John or John will pick up and replace unload
side due to age.
|
| 17.326 | Load Flipper Problems | ASDG::POIRIER | | Fri Aug 16 1996 20:48 | 52 |
|
Load Flipper Performance Problems:
----------------------------------
Load Flipper - The load flipper malfunctioned intermittently today.
We repeatedly found the flipper at the pre-aligner
with the left fingers against the side of the wafer
and the right fingers on TOP of the wafer. We think
the right fingers are slipping off the side of the
wafer and riding on top. This of course causes the
flipper box sensor to leave the "wafer present" position
and make the "flipper closed " position, thus the error.
We opened-up the flipper box and replaced the Bimba Air
cylinder. 25 wafers were run without incident running
the No Touch recipe. We decided to run an additional
25 wafers using the Touch-Up -A recipe since most of
failures occured during an actual polish recipe.
The system broke a wafer on the first run!
Details: A wafer slid out of head #5 and caused
head #4 to break a wafer five seconds into
segment #7. The Touch-Up-A recipe runs water
only during the 7th segment. It is supposed to
have 313 lbs of down force. B1's down force
was 377 lbs. We suspect this as the cause.
Fresh 50K oxide monitors we being run at the
time of the breakage.
Where do we go from here? : We feel the following items should be
checked:
a) Flipper box alignment. (The Index Table
position was changed
earlier in the week)
b) Flipper Box mechanisim. (We inspected it and
changed the air
cylinder)
Current Status: Carriers 3 & 4 need replacement.
Pad needs replacement.
Tool needs to be cleaned.
Workstream: Changed from VERIFY-U to BGN_REPAIR.
C Shift.
|
| 17.318 | Flipper issues | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Aug 16 1996 22:56 | 23 |
|
All of the break-in programs were successfully updated by OPS
per PE. PE to change over polish recipes.
The load flipper was mis-loading at the start of MQC's.
the mis-loading was causing scratching. The load flipper
fingers were loading the wafer off center. They were
adjusted to compensate.
After lunch, the unload flipper was starting to have
problems. It was intermittingly going under the wafer
on the inside flipper arm fingers. It was physically
bent lower???? Rather than bend it back, it was shimmed
to make both sides level. If someone want to bend it...
I didn't hear about it.
The load flipper box makes a clunk now and then when
going from the load cup to the aligner. It doesn't appear
to be causing a problem. Rich (Speedfam) was notified and
will look at look at it first thing in the morning.
BJ
|
| 17.327 | Load flipper and float'in wafers... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Aug 17 1996 08:09 | 15 |
|
The tool was cleaned up after the crash on C shift.
Manually verifying load flipper. The flipper failed to
pick up a wafer after 15 wafers. Found flipper just under
wafer at align. Re-cal'ed flipper back 20 steps. Tool ran
25 wafers without any problems. A new pad and (2) new carriers
were installed. Tool ran 25 wafers with MQC's and passed
after second round of MQC's.
Later in the morning, several wafers were floating out of
slots after the wafer was sent into the cassette and the
elevator indexed. Adjusted water level to compensate.
D shift
|
| 17.328 | Elevator Dump Valve Sticking / DI Water Leak In Fluids Cabinet | ASDG::POIRIER | | Sat Aug 17 1996 20:40 | 19 |
|
Elevator #1 dump valve:
----------------------
The dump valve got stuck in the open position twice on C shift today.
It happened on D shift once last night. We couldn't find one in the
Stockroom or the Speedfam Reps office. We should probably replace this
valve as soon as new one can be obtained.
DI Water Leak In Fluids Cabinet:
-------------------------------
A small puddle of water set off the "Leak Detection Sensor" alarm this
afternoon. We wipped it up and observed the cabinet for 10 min. No
leaks were found. We looked in the cabinet an hour later and found a
puddle of the same size. It appears the leak is origionating in the
manifold area. It may be leaking only during an auto cycle when certian
solinoid valve are energized?
C Shift.
|
| 17.329 | load flipper loose | LUDWIG::RIDLON | Eliminate the obvious | Sun Aug 18 1996 04:27 | 5 |
| Load flipper missing wafers every so often. Found the right thumb screw
loose. It didn't have any problems once it was tightened.
B-shift
|
| 17.330 | Broken oxide monitor from head #5 | FABSIX::R_GEE | | Sun Aug 18 1996 07:17 | 10 |
| A dummy wafer slid out from under carrier #5 and broke
on carrier #4. 6 seconds into step # 7 of the TUP-f
recipe. No reason for the crash was found, we replaced
the pad and carriers #4 & #5. The dummy wafer that slid
out still had oxide on it, the program also looked correct.
B shift
|
| 17.331 | Carrier 5 changed | STRATA::FINN | | Sun Aug 18 1996 20:29 | 6 |
|
MQC'S failed uniformity, particles passed, Kevin changed carrier #5.
Mqc's passed. Running well all day.
a shift
|
| 17.332 | Broken wafer | FABSIX::R_GEE | | Tue Aug 20 1996 08:26 | 9 |
| A product wafer slid out from under carrier #1 and broke
on carrier #5. 6 seconds into step # 7 of the TUP-f
recipe, same thing as saturday night. No reason for the
crash was found, we replaced the pad and carriers #1 & #5.
B shift
|
| 17.333 | head 1 rotation error. | SUBPAC::CMP | | Tue Aug 20 1996 18:54 | 10 |
| Head 1 rotation errors, found that head 1 would stop during seg. 3 of
recipe due to rotation stopping, swapped cables for head 1 rot. with
head 2 rot. and still had problems with head 1. Ordering cables for
bulkhead to term. block and from term. block to motor.
Cables will arrive in A.M.
Rich (Mr. Goodwrench)
|
| 17.334 | head 1 rotation errors. | SUBPAC::CMP | | Tue Aug 20 1996 19:04 | 5 |
| This is an addendum to the last message.
Earlier in the day we had the same problem and replaced the infranor
and reseated the cable at the bulkhead.
|
| 17.335 | bad motor, bad,bad motor | SUBPAC::CMP | | Wed Aug 21 1996 20:01 | 8 |
| Well here's the poop, After testing the cables from the bulkhead up to
the motor for rotation 1 and swapping the infranor from rot.2 with
rot.1 and swapping the dcx cables for rot.1 with rot.2, it finally
seems to be the motor. One thing that was noticed when the motor is
running is that there is a thumping coming from the motor then it just
stops and errors. So the order has been placed for a new one as well as
a quick dump valve due to sticking open. Parts will arrive tomorrow in
the A.M.
|
| 17.336 | Head #1 Rotation Motor On Order / Elevator #1 Dump Valve Sticking | ASDG::POIRIER | | Wed Aug 21 1996 20:40 | 19 |
|
Head #1 Rotation Errors:
-----------------------
Head #1 continued to error for "Rotation" on every recipe containing
a value of 377 lbs of down force. It ran fine on recipes with a value
of 313. All cables relating to head #1 were verified good. The Infranor
motor controller for head #1 was verified good as well.
A replacement PAC-SCI motor for Head #1 Rotation was ordered from
speedfam, it will be here at 10.00 a.m. tomorrow. The system was
returned to manufac with head #1 off line. (Warning status)
Elevator #1 dump valve:
----------------------
This dump valve was stuck in the open position once again today. The
Speedfam rep has ordered a replacement.
|
| 17.337 | rotation to down condition. | SUBPAC::CMP | | Thu Aug 22 1996 19:52 | 5 |
| The problem with head1 rotation is put on hold due to the fact that the
CPU went south, a new cpu and disk setup was tried but the disk had
no software installed, so the order went out for a fully loaded disk
to be delivered, also will contact Xycom in A.M. for info on old disk
so that we might get going with old disk and new CPU.
|
| 17.338 | Hard Drive Problems / Head #1 Rotation Failure | ASDG::POIRIER | | Thu Aug 22 1996 20:39 | 15 |
|
CPU & Hard Drive Issues:
-----------------------
The CPU & Hard Drive were replaced this afternoon. We're having
problems with the set-up. Speedfam is shipping another hard drive.
This one will be pre-loaded with software. Delivery at 10:00 a.m.
Head #1 Rotation:
----------------
Still searching for cause. Rotation motor verified good. Will resume
troubleshooting when hard drive comes up.
C Shift
|
| 17.339 | B1 is up again. | SUBPAC::CMP | | Fri Aug 23 1996 19:24 | 11 |
| Well we finally got back up, the CPU and disk drive was replaced. The
nice thing about the disk is that it's twice the capacity as the old
one. Still continuing to work on the stalling problem, J.P. and B.W.
are looking at a few more items and I will check in to see how they
made out.
Rich (Mr. Goodwrench)
|
| 17.340 | Hard Drive Replaced / Elev #1 Dump Valve Replaced / Head #1 Rotation Probs | ASDG::POIRIER | | Fri Aug 23 1996 20:14 | 20 |
|
Hard Drive Replaced & Software Loaded:
-------------------------------------
The replacement hard drive, pre loaded with dos, arrived at 11:30 am
today. All necessary files were then transfered to the hard drive from
CMP.B3
We are now back where we left off 24 hrs ago, troubleshooting the head
#1 rotation problem. The effort is now concentrating on the cabling &
connections in the down force control loop.
Elevator #1 Dump Valve:
----------------------
The sticky dump valve in elevator #1 has been replaced.
C Shift.
|
| 17.341 | Continuation on carrier #1 | FABSIX::O_WHITFORD | | Sat Aug 24 1996 08:05 | 27 |
| Continued with troubleshooting the carrier #1 & polish table stalling.
Just for grins, we measured the waveform and voltage at TB 16, pins 3 & 6.
These are the signal lines leading back to the DCX/Board #8 thru the ACRO-MAG
modules for carriers 1 & 2 respectively.
We took some baseline readings at 377PSI (Same proceedure as downforce
checks) and found carrier 1 at -1.74VDC and carrier 2 at -1.72 VDC. Good so far.
Loaded up 5 wafers and made a test run using a break in recipe.
Got a lot of moaning and serious vibrations during max downforce/
oscillation but no stalls of either carrier #1 or the polish table. Measuring
the load cell output at TB16/pin3, the output ranged from -1.66 VDC to -1.88 VDC
while carrier #2 remained fairly stable ranging from -1.66VDC to -1.72 VDC.
We disconnected the cabling from the load cell, and both input & output
ends of the load cell amp to inspect the pins & sockets. Found nothing obvious
to indicate a connection problem......
Had to drop it at that point, starting Weekly PM on CMP.B3
Dave & Leon
|
| 17.342 | Head #1 Rotation Error Problem - Update. | ASDG::POIRIER | | Sat Aug 24 1996 16:48 | 40 |
|
Head #1 rotation failure problem:
--------------------------------
It appears that the problem is with the analog control loop wiring
for head #1's down force control. We have sucessfully run a full
cassette of wafers at 377 lbs of down force. (IO_BKIN recipe)
D shift removed and retightened every connection on terminal boards
14,15, & 16 last night. They also removed and reconnected cable #2
on the right side lower bulkhead . They sucessfully completed 1/2
cassette of wafers and passed down to us this morning. We continued
with a verification run and experienced a head #1 rotation error on
the fourth run.
Richie from Speedfam arrived this morning with a new Analog I/O cable
for cable #2 ( head #1's feedback cable). The cable was run outside
the tool from the right bulkhead connector to terminal board #16 on
the Multihead. We have just finished running a full cassette of
wafers at 377 lbs. of down force with NO head #1 rotation errors.
However, head #5 slipped out a wafer near the end of segment 5 and
it broke under carrier #4. We are now in the process of cleaning up
and resuming the verification run. We will need to run at least 4
cassettes of wafers before we're satisfied that we've got resolution
on this problem.
This passdown is being sent out early because I'm leaving at 4:00 p.m.
today. Check out Bradley's passdown at 8:00 p.m. for the latest info
on the head #1 rotation error saga.
C Shift.
NOTICE
------
The IO_BKIN recipe on CMP.B1 has been modified. The time in segment #5
has been reduced to 20 seconds from 120 seconds. We did this to reduce
the amount of oxide we were removing from the wafers. We weren't able
to obtain fresh 50K wafers until 2:30 this afternoon. Please remeber
to change the time back to 120 seconds before returning the tool to
manufacturing.
|
| 17.343 | unload solenoid plunger bent | LUDWIG::RIDLON | Eliminate the obvious | Sun Aug 25 1996 06:27 | 9 |
| Removed the spacers in the unload flipper. Checked the arms on the
marble stone and both were perfectly flat. Checked the arms for level
with out spacers and both were level. Checked unload cup and it was not
level to the flipper. Found the unload solenoid plunger(mushroom) bent.
Replaced with spare from cabinet. Checked alignment and was much
better.
B-shift
|
| 17.344 | Carrier #1 rotation Adjusted Infranor voltage | FABSIX::R_GEE | | Sun Aug 25 1996 07:39 | 16 |
| The system was erroring for carrier #1 rotation stopping.
We turned the voltage on the Infranor for carrier #1 rotation
from 10.36 volts to 10.50 to try and stop the carrier rotation
problem. Found that the LED on L1 would still flicker during
step three, so we raised the voltage to 10.60, it no longer
flickered.
Ran 200 wafers using a modified BREAKIN recipe with 390 lbs
of downforce in steps #3, #4 & #5 and only 20 second of polish
time. No errored during the 200 wafers run, released the tool
back to production with all 5 heads on line. Removed the Warning
in Workstream.
B shift
|
| 17.345 | all carriers not rotating | FABSIX::R_GEE | | Tue Aug 27 1996 07:52 | 19 |
| The system errored twice for carriers not rotation in step #2
of the IO_ILD1 recipe. The first time we simply restarted and
the system ran fine. The seconds time we tried to restart but
the system acted like it was lost, it began polishing with no
carrier rotation and the carriers all the way in. The system
had to be EMO'ed to recover.
After the system was re-initialized we tried to duplicate what
had happpened by running 1 breakin run with the second run being
IO_ILD1. 8 seconds into step #5 of the IO_ILD1 recipe a wafer
slid out from under carrier #4 taking out carriers #3 & #2.
We cleaned up the mess, replaced the pad and 3 carriers, ran
the pad breakin procedure then MQC's. We then ran the breakin
recipe followed be the IO_ILD1 recipe with no problems, ran
good the rest of the night.
B shift
|
| 17.346 | Head rotation errors / head to index table alignment | FABSIX::R_GEE | | Wed Aug 28 1996 08:00 | 36 |
| Head rotation error
The system errored for carriers #1 & #2 not rotating in step
#4 of the 1P_ILD1 recipe. This is the 3rd time we have had this
problem running this particular recipe. Found no lit LEDs anywhere,
everything looked o.k. We exited out and changed the recipe to
1P_ILD2 and edited the time to match recipe #1, then restarted with
no errors.
We renamed 1P_ILD1 to ILD1_BAD now #42 and copied 1P_ILD2 to 1P_ILD1.
Ran the recipe, the first run had the error again then ran fine after
that, 50 wafer. Looks like the intermittent rotation problem is back,
but seems to be only happening while running 1P_ILD1 recipe immed-
iately after BREAKIN.
Broken wafers / head to index table alignment
Later in the morning a wafer slid out from under carrier #3 taking
out #2 and both wafers. The fly-out happened at the beginning of
step #3 of the 1P_ILD1 recipe (touchdown). We cleaned the mess
and checked index table to head alignments, found all heads out
with #3 out drastically.
Changed the offset from home position in the locate.cmp file from
-2799 to +194 and also head in out positions. We now have heads
#2 & #4 looking good, #3 maybe and #1 & #5 out in different index
table directions.
How we stand now.
There is a new pad on the system, the 3 good carriers are wet and
labeled on the table, 2 new carriers next to the vise. The align-
ment fixtures are in. Field service needs to evaluate the alignment
problem.
B shift
|
| 17.347 | head#2 rotation error. | FABSIX::L_SHKOLNIKOV | | Thu Aug 29 1996 08:08 | 8 |
| The tool was alarming for carrier #2 not rotating twice
this night.(both times IO_ILD1 at segment#4) First time
system was rebooted and in the second time we turned the
voltage on the infranor for carrier #2 rotation from 10.3 v
to 10.6. Run 50 wafers using IO_ILD1 with 30 sec of polish
time with no errors.
D shift
|
| 17.348 | Head #2 Rotation Errors / Dump Valve Leak | ASDG::POIRIER | | Thu Aug 29 1996 20:12 | 15 |
|
Head #2 Rotation Errors:
------------------------
Four verification runs were sucessfully completed running the
TUP_A & IO_ILD1 recipies. (2 runs using TUP_A & 2 using IO_ILD1)
The tool wasn't run by Ops this afternoon. They will begin running
MQC's on D Shift tonight.
Elevator #1 Dump Valve:
----------------------
A small DI leak was discovered where the dump valve connects to the
PVC drain. A little teflon tape did the job.
|
| 17.349 | Head #1 Rotation Error During Segment #3. | ASDG::POIRIER | | Sat Aug 31 1996 20:24 | 14 |
|
Head #1 Rotation Error:
----------------------
The system errored for "Head #1 Not Rotating" during segment #3 of the
IP_ILD2 recipe. Since the carriers are not touching the pad during
seg #3, and are seeing no frictional forces, this event appears to be
unrelated to the head #1 rotation errors we struggled with last week.
The DCX board showed an error for Head #1 rotation. A soft boot took
care of the problem.
C Shift.
|
| 17.350 | CARRIER TO CUP ALIGNMENTS | SUBPAC::CMP | | Tue Sep 03 1996 11:41 | 12 |
| HEAD TO CUP ALIGNMENT ON B1
ON WED. 8/28 TOOL1 HAD A CRASH AND THE HEAD TO CUP ALIGNMENT WAS
CHECKED, AND WAS FOUND TO BE OUT OF ALIGNMENT. THE CAUSE OF THE
MISALIGNMENT COULD BE A) WHEN THE DISK WAS REBUILT THE SOFTWARE INFO
MIGHT HAVE BEEN SLIGHTLY DIFFERENT THAN THE TRUE ALIGNMENTS NEEDED.
B) THE TOOL MIGHT HAVE BEEN POWERED OFF DURING SOFTWARE THAT WAS
RUNNING. IN ANY CASE THE TOOL WAS ALIGNED AND TESTED AND TURNED
BACK TO PRODUCTION WITH NO FURTHER PROBLEMS. THE ADJUSTMENTS THAT
WERE NEEDED WERE RESET INDEX HOME POSITION, AND CARRIER IN/OUT
POSITIONS.
|
| 17.351 | New Conditioner ring plan | STRATA::KRUPA | | Wed Sep 04 1996 17:43 | 24 |
| CMP.B1 Plan for tonight:
Summary: To install a new conditioner ring that has higher cut-rate in an
effort to increase B1's removal rates to the level of B2&B3.
Plan: - Do not remove pad
- Check pad step height to ensure there is >60 mils if it isn't
install new pad
- Remove old ring and save it for Frank labeled "CMP.B1's old ring"
- Install New conditioner ring w/serial #216
- Run conditioner manually at 80% downforce for 30 minutes on old pad
- Change pad
- Record total number of wafers on the tool(Note this is the total
running counter that is not re-settable). This is being done to
track the total # of wafers on the conditioner ring. Record this
number and serial# in notes with a comment that a new ring was
installed.
- Perform std 10 minute condition followed by normal breakins and
MQCs.
- If removal rate has increased be sure to pass it down to next shift.
- Call me if there are any questions, concerns, or problems.
thanks,
-Frank
|
| 17.352 | Tank #2 Dump valve | ASDG::POIRIER | | Wed Sep 04 1996 20:36 | 10 |
|
Tank #2 Dump valve:
------------------
The valve stuck open causing the tank to remain dry during an unload
sequence. A product wafer broke in the unload track. The valve was
replaced and the tool was cleaned. The system should have alarmed for
the low water level. We're investigating why it didn't alarm.
C Shift.
|
| 17.353 | Robot Deservoed Itself Twice | ASDG::POIRIER | | Fri Sep 06 1996 19:50 | 8 |
|
ROBOT:
-----
The Robot de-servoed itself twice today. The Robot controller was
powered down both times to recover. Please monitor, root cause unknown.
C Shift.
|
| 17.354 | Robot problems | FABSIX::O_WHITFORD | | Sat Sep 07 1996 08:05 | 3 |
| Had one robot error with not loading wafers. Again, powered down the
robot controller for a short time (@ 5 min.) restored power to
controller and soft boot the tool. Working fine since then.
|
| 17.355 | wafer breakage, recipe re-doing | SUBPAC::LANDRY | | Sat Sep 07 1996 19:36 | 24 |
| The system broke a wafer today. The details (as best to our knowledge)
are this: The I_O_BKIN program was being utilized. The damage occured
during segment 3. There were exercise wafers (plenty of oxide), and
the 3rd consecutive run of that program. From the Opt's people, I was
told that this was a problem the day before. So, I deleted the
I_O_BKIN recipe, transferred I_O_BIN3 to the vacated spot, and edited
the necessary data points.
The pad was changed along with all five carriers. Due to a lack of man
power, the system could not be taken care of at the time o the mishap.
This caused the carriers to dry off, hence why they were all changed.
Upon system startup, breakin wafers were run. Bin 1, 2, 3 all ran
fine. I_O_BKIN was then run and the system faulted for no Head 1
rotation. We checked it out and found nothing unusual. The Infranor
was reading 10.08 volts. We kicked this up to 11 volts and re-tried.
Well, as luck would have it, the system shimmied pretty good on the
next attempt. This was caused by a lack of slurry flow to the table.
The room pressure was low. Called Ashland, they swapped over to a new
filter and pressure returned. We then ran 5 consecutive runs using the
newly edited I_O_BKIN recipe. It ran all wafers fine. The system was
given back to Opt's for MQC's.
Brad / Doc
|
| 17.356 | dump 2 | STRATA::RIDLON | Eliminate the obvious | Sun Sep 08 1996 03:33 | 8 |
| Tub 2 wasn't filling in wet idle. Found dump valve not closed
completely. Removed lower portion and relubed all orings. The oring for
the shaft was dry and the shaft had oring residue on it because it was
dry which increased the friction and didn't allow the valve to close
all the way. Relubed and tested X10 with no problems.
B-shift
|
| 17.357 | rotation problems on head 1 | SUBPAC::CMP | | Mon Sep 09 1996 19:12 | 11 |
| the head rotation problem.....
today we swapped the acromags for head 1&2 with backfill 3&4, it did
not correct the problem. swapped an analog board in stock and still
no result. checked voltage on infranor on pins 1&5 and saw a dramatic
increase compaired to head 3's infranor (4.2v compaired to 2.2v) and
made an adjustment to infranor to 14.5v to compesate until the problem
is resolved. At this time we have run 25 wafers and will run 25 more
to test for operation for the night shift. Also being fixed is the pins
for the wafer loss plug due to wear and tear.
|
| 17.358 | add-on to previous note | SUBPAC::LANDRY | | Mon Sep 09 1996 20:14 | 9 |
| Just a quick add on to the previously entered note......
The DCX daughter board was swapped out as well. Problem remained.
Also, the second cassette of 25 wafers ran successfully. The system is
being returned to manufacturing for now.
Doc (for Dave who is faithfully working in the fab)
|
| 17.359 | crash, head 5 | SUBPAC::LANDRY | | Mon Sep 09 1996 20:32 | 9 |
| Another quick add-on.............
The system crashed during mid-afternoon. This while the DF
settings were being played with. The wafer slipped out of head 5,
which took out head 4's carrier. This carrier was replaced along
with the pad.
Dave
|
| 17.360 | pad conditioner problem | SUBPAC::CMP | | Wed Sep 11 1996 09:17 | 6 |
| On Tuesday afternoon when the Tool was rebooting we noticed that the
pad conditioner arm went beyong it's normal distance for travel and
did not home properly. Upon further investigation it was discovered
that the target on the gear that senses home and pad position had come
loose and destroyed the limit switches. A parts order was made and
they will be here in the morning (Wed.).
|
| 17.361 | condtioner repaired | LUDWIG::FINN | | Wed Sep 11 1996 20:40 | 20 |
|
Field reps installed switches for B1's conditioner. Ran test wafers
had trouble with upper cabinet door interlock.
Rich asked that system be placed up and idle.
I installed the kick plate and swing out meter rack for the pressure
transducers. One meter is broken. Need to order a new one. Hookup and
calibration will begin next week.
Pad was changed by Jim S. due to bubble. (installed a pre cut)
System broke wafers during breakin seq 3. Carriers 2+3 replaced as well
as pad.
MQC wafers were run and are now being read.
A shift
|
| 17.362 | End of shift crash | FABSIX::O_WHITFORD | | Fri Sep 13 1996 08:59 | 10 |
| Flyout from carrier #2, crashed into carrier #1 before tool got stopped
completely.
Cleaned up fragments from polish table basin, removed pad and cleaned
polish table surface & drain lines. Installed two fresh carriers in
positions 1 & 2.
Needs new pad, MQC's. Tool still down.
Leon & Dave
|
| 17.363 | dump valve sticking | SUBPAC::CMP | | Fri Sep 13 1996 09:17 | 3 |
| Last evening b1 had a sticking dump valve on elevator 1, removed the
dump valve and cleaned and lubed the mechanism, also checked and
readjusted the spring.
|
| 17.364 | B1 checks and adjustments | SUBPAC::CMP | | Fri Sep 13 1996 12:17 | 5 |
| B1 had a crash this morning and we check the following items for proper
operation. Slurry flow, made an adjustment to pump1 400ml min to 500ml-
min, pump 2 about 450ml min to 500 ml min.
Checked the carrier to cup alignment and found it to be within spec.
|
| 17.365 | Carrier #2 crash again | FABSIX::O_WHITFORD | | Sat Sep 14 1996 06:46 | 18 |
| While running new break in wafers on recipe PMD, segment #7, wafer slid
out of carrier #2 & "chain reactioned" into carriers 1 & 5. Wiped out 3
wafers and carriers 2, 1, & 5. This was the first run after tool had
been in "wet idle" mode for a little less than an hour.
Cleaned up fragments, dust, mud, blood & beer.....
Replaced pad.
Checked carrier to load cup alignment for load cups 1, 2, & 5. Found to be
within spec.
This is the 3rd crash this week on D shift, the second which involved a
wafer sliding out of carrier #2.
Dave & Leon
|
| 17.366 | solenoid #2 water leak | STRATA::RIDLON | Eliminate the obvious | Sun Sep 15 1996 06:37 | 8 |
| Moisture sensor alarm during process. Sensor on right side under index
table in puddle with a continuous drip coming down from index table.
Isolated to solenoid for load cup 2. Removed and found one of the
sealing washers for the three allen bolts was ripped. Stocked item.
Replaced and so far leak has been stopped.
B-shift
|
| 17.367 | Dumb vavles. | STRATA::RIDLON | Eliminate the obvious | Mon Sep 16 1996 05:31 | 12 |
| Dump valves for elevators failing to close completely again. Looks like
relubing with the teflon super lube isn't working. Di water apparently
breaks this stuff down. In fab4 we had to get a special grease for
teflon valves to rebuild, I have some feelers out trying to find the
stock number (in any) for this grease. I would suggest calling
TEQCOM industries (I tried but they apparently don't work a compressed
schedule) at 714 979 7024 to see if they can ship us some grease.
Removed both valves and relubed with nsk grease, seems to be working
so far.
B-shift
|
| 17.368 | carrier 2 no ro | STRATA::RIDLON | Eliminate the obvious | Mon Sep 16 1996 05:32 | 6 |
| Carrier 2 not rotating alarm during segment 4 of an ILD1 recipe.
Exited out and restarted with no other errors. Did not witness actual
fault so its not known if carrier 1 stopped as well.
B-shift
|
| 17.369 | rotation problems, Infranor adjustments | FABSIX::R_GEE | | Mon Sep 16 1996 20:35 | 7 |
| Several rotation stalls today, Head 1 and 2. Checked the voltage on
head 1 Infranor, it was totally max'd out at 15.3 volts. Dropped it
back to 14.5 volts. Raised the voltage on head 2 to 12.5 volts per
Tim D's request. The system is currently in it's 24 hour MQC.
A shift
|
| 17.370 | Vacuum transducers / slurry soleniod / broken wafer | FABSIX::R_GEE | | Tue Sep 17 1996 20:41 | 14 |
| Flushed out all the slurry lines and fittings with DI water
for 30 minutes. Replaced slurry solenoids #70 & #71 and the
two check valves.
Later in the day, at the end of a 400 second polish a wafer was
found in #3 unload cup broken, with wafer particles on the pad.
Found the new solenoid #70 had failed, replaced the solenoid and
tested o.k.
Installed transducers on all 5 heads to monitor vacuum, still need
to be wired.
A shift
|
| 17.371 | Loud vibrations | FABSIX::O_WHITFORD | | Wed Sep 18 1996 07:14 | 13 |
| Operator EMO'd tool during period of high vibration during segment #7
of M1 recipe. This was the same lot which crashed earlier in the day.
3 monitor wafers were involved. All monitor wafers were inspected and found
to have a good amount of oxide remaining on them.
Checked slurry flow from pumps 1 & 2. Both were in spec at 550ml/min.
Checked water flow at 1800ml/min, this too was in spec at a little over
900ml/30 seconds.
We found no hard fail this time.
Leon & Dave
|
| 17.372 | CMP.B1 unload cup#2 sticking problem | FABSIX::J_SADIN | Freedom isn't free. | Wed Sep 18 1996 10:19 | 8 |
|
Unload cup #2 sticking. found guide pin had walked out slightly.
Tapped guide pin back in and smoothed out guide pin channel with
scotchbrite. Reinstalled and cycled 30times. No failures.
jim
|
| 17.373 | dump valve fix | SUBPAC::CMP | | Wed Sep 18 1996 19:35 | 3 |
| The sticky dump valve problems on the tool should now be history. Today
we installed the positive close feature, ran an air line from the
regulator to the dump valve.
|
| 17.374 | vibration problem | STRATA::TDYER | | Thu Sep 19 1996 18:51 | 48 |
|
CMP.B1 - Vibration problem:
Created 3 recipes, vib_1 (step7=300), vib-2 (step7=313) and vib-3
(step-7=330). Ran 5 wafers on each recipe results were:
vib-1 = vibrated in step 7 head4
vib-2 = no vibration
vib-3 = no vibration
Notice all offset were the same except head-4, decide DF on 4 may be out.
Calibrated DF on all 5 heads, head4 WAS out by ~20lbs.
Ran the following:
vib-1=vibration head2
vib-2=vibration head1
vib-1=vibration head3
Created an MQC recipe "270_mqc" with 270lbs of DF in the clean step, step-7.
NO vibrations, particle were: tot lrg ~scrL
425 79 .2
220 70 .24
249 79 .9
274 58 .6
292 60 .4
Create a MQC recipe with 250lbs of DF in clean step, particles were:
tot lrg ~scrL
425 79 .2
220 70 .24
249 79 .9
274 58 .6
292 60 .4
Repeated the 250lb test results were:
413 112 0
290 90 0
341 109 0
204 70 0
406 97 0
Repeated the 250lb test again results were:
362 91 0
294 66 0
330 82 0
441 71 0
291 84 0
No hardware discrepancies were found. The table and or carrier shaft bearings
on this older tool may be wearing down and make the tool more susceptible to
vibration. DF in step-7 will be lowered to 250lbs in In ALL recipes with a
313lb STEP7. We will continue to monitor and research the problem in conjunction
with the head-1 rotation problem.
|
| 17.375 | Robot Error | FABSIX::J_SWENSON | | Fri Sep 20 1996 19:33 | 5 |
| Robot became de'servo'ed.(ILD2 recipe) Cause unknown.
Powered controller on and off still no go.
Exited to DOS, softbooted system, robot came up.
Cycled wafers through the no touch program, returned system back to
manufacturing.
|
| 17.376 | Robot Squeaking/Unload cup 2 not lowering | FABSIX::J_SWENSON | | Fri Sep 20 1996 19:57 | 8 |
| An add on from last reply:
noticed robot would squeak during the first five
slots of a cassette in the bottom position.
Unload cup #2 did not lower once tonight. will
pass on to B-shift.
C-shift
|
| 17.377 | Robot not responding | LUDWIG::WESTPHAL | | Sat Sep 21 1996 20:43 | 7 |
|
CMP.B1 - Down for robot errors. The robot kept deservoing. Tried move robot
on the cal screen. Tried reseting the robot controller w/ no luck.
Powered the tool down for a few minutes and checked the cables,
Everything seemed alright. Powered it back up and had no more
troubles.
|
| 17.378 | robot/ul cup 2 | LUDWIG::RIDLON | Eliminate the obvious | Sun Sep 22 1996 06:00 | 10 |
| 1. Robot deservo'd. Soft boot corrected.
2. Unload cup 2 not going down all the way. Had to push the pin in more
to get it to start going down but then it hung up with 1/4 left to
travel. After swapping cups around to eliminate some things we ended up
simply switching unload cup 2's gasket (on B1 it's the black gasket on
the index table) with unload cup 3's gasket. Up and down movement was
smooth after that. Tested several times with no errors.
B-shift
|
| 17.379 | flextrack cabling update | SUBPAC::LANDRY | | Sun Sep 22 1996 20:08 | 6 |
| Here's an update on the cabling issue. I talked with Kevin Coleman
today. He has ordered the necessary cables that reside in the flex-
track. Should see them here by Tuesday morning. The system has been
running fine since the "B" shifts/Kevin's repair.
A Shift
|
| 17.380 | ex | STRATA::RIDLON | Eliminate the obvious | Tue Sep 24 1996 06:02 | 10 |
| Unload flipper missing wafer every now and then. Found that wafer was
not level with flipper grippers. Had this problem a couple of weeks
ago. Same fix here. The plunger on top of the unload solenoid was bent.
Removed and installed the one that we took off a couple of weeks ago
(someone did a good job in straightening in out, thanks). Checked
alignment and it was flawless.
B-shift
|
| 17.381 | correction | SUBPAC::CMP | | Tue Sep 24 1996 13:20 | 1 |
| the last update refers to tool b2
|
| 17.382 | Pad Profile | STRATA::KRUPA | | Wed Sep 25 1996 18:13 | 13 |
| Performed pad profile on last pad. Was changed on 9/24 after only 965
wafers. Results were:
location thickness
-------- ----------
ID 65 & 65
1/4 RADIUS 68 & 69
1/2 RADIUS 72 & 73
3/4 RADIUS 77 & 78
OD 82 & 83
This indicates that the conditioner is placed too far toward the ID.
Changed the ID/OD of the conditioner recipe from 9.3" to 9.6" for this
tool.
|
| 17.383 | Head #1 Rotation Errors | ASDG::POIRIER | | Thu Sep 26 1996 20:21 | 9 |
|
Head #1 rotation errors:
-----------------------
The system experienced head #1 rotation errors twice in the last hour.
A soft reboot cleared-up the problem both times. Due to time constraints,
we haven't been able to persue this problem. Passing info on to D
shift.
C Shift.
|
| 17.384 | grounding | SUBPAC::CMP | | Fri Sep 27 1996 17:07 | 1 |
| The grounding of the robot and the mapper are now completed.
|
| 17.385 | ex | LUDWIG::RIDLON | Eliminate the oblivious | Sun Sep 29 1996 22:04 | 19 |
| This is what happened last night (Saturday night). Carriers 4 and 5
stopped rotation during mqc's (with mqc's on the carriers). Down forces
displayed on the screen were in the 460 range with head 5 at 550 lbs.
Carrier 1 offset was -18, carrier 5 offset was +19. Before the heads
stopped rotation there was excessive vibration as well. When we exited
and restarted there was also excessive vibration. Since the monthly pm
was due and given the above data we decided to perform the monthly.
We expected to see some major differences in the down force cal but
as will see we did not. Carrier 1 was 5 lbs high, Carrier 2 and 3
were 10 lbs low, carrier 4 was 12 lbs high, and carrier 5 was right on.
BUT on carrier 5 the actual df on the screen read ~400lbs while the
sensotec read ~377. The other 4 carriers were the same, that is, the
sensotec reading equaled the actual reading on the screen. The only
other thing to note is we made some adjustments to the robot. It was
way off at cassette 1. I'm surprised it picked up the wafer at all.
B-a-day-late-and-a-dollar-short-shift
|
| 17.386 | rotation problems | LUDWIG::RIDLON | Eliminate the oblivious | Mon Sep 30 1996 07:32 | 7 |
| Had three instances when carrier 1 and 2 stopped rotating. All three
times no one was watching the machine. Twice the recipe was ild3 in
segment 3. The third time it was tup_e in segment 3. All three times
the recipe was exited and restarted with no problems.
B-shift
|
| 17.387 | Inverter / Wafer Detection issue | SUBPAC::LANDRY | | Mon Sep 30 1996 21:36 | 41 |
| Rough day.......
The system was erroring out for an "Inverter Error" this morning.
Upon arriving in the fab, found the system had powered off when the
"stop" button on the run screen was hit. So, we rebooted the system
to check out the problem. After initialization, we attempted to unload
5 wafers from the Index Table. All was well until the 4th wafer was
tried. At this time, the system halted. The system didn't alarm or
timeout. We found the screen to be locked up. Soft-booted and re-
initialized the system. We didn't get far. The system timed-out for
"one or more cups not down". Checked the I/O's for the cups, sure
enough, cup 4 sensor wasn't being made (dispite it's actual proper
down position). Checked the sensor functionality and found it to be
operational. Made the necessary physical adjustment of the sensor.
Re-initialization went fine.
Returned to check on the original problem of the Inverter. We run
some runs and could not duplicate the problem!...??? Gave the system back
to opts. They ran fine for awhile, then the Inverter error came back.
The opts people logged an assist, exited from the run screen, and restarted
the run. It ran again for several hours.
Soon after, opts had a lag time in running the system. We loaded up
a cassette of wafers and ran the NO_TOUCH recipe. Several runs into the
running, the wafer detection board lit up for wafer 3. NOTE: this will
cause the table to stop and eventually cause an inverter error. Dave
and Rich looked at the sensor for this head, re-setup the sensor and tried
again. Soon after, the board lit again, this time just the wafer detection
sensor LED was illuminated. They feel the board is defective. We tried
to draw one from stock, but that turned into a frustrating endeavor. The
part has an assigned "digital" number, but the part they showed me was
not the board. The stockroom people showed us several bins of un-assigned
Speedfam parts not yet assigned a number. No luck there. Kevin C / Dave
have contacted Speedfam, who say the boards were shipped in August and
should be here. Thats where we're leaving the passdown at.
So, we have some issues to work and decisions to make. B shift is
going to attempt to locate the board first. If no luck, they will contact
Tim D to have the options presented to him for dissitation.
A shift / Reps
|
| 17.388 | wafer non-sense | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 01 1996 05:20 | 13 |
| Continuing from A shift. We were able to find the wafer detect board in
the stock room and installed it, HOWEVER, it was defective. It always
showed a wafer loss alarm. Troubleshot the board and found that u2 pin
8 was low. The inputs were also low and this was a nand gate. Got the
other board from stock and it worked fine. Returned the defective board
to stock. Ran some test wafers and we still got an inverter alarm in
segment 1 every now and then. Cal'd the sensors and found that sensor 3
was flaky. Replaced and ran a boat of wafers using Bkin recipe (had to
keep the carriers up as they're running out of BREAKIN wafers) and
didn't get any alarms. Running another set through now.
B-shift
|
| 17.389 | three boats thru | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 01 1996 06:43 | 5 |
| Ran three boats with the modified (carriers staying up) bkin recipe.
Nothing more will be done on this shift due to the upcoming fire drill.
B-shift
|
| 17.390 | b1 rotation error/fix | SUBPAC::CMP | | Tue Oct 01 1996 20:46 | 33 |
| Had problems with the head 1 rotation again.
Started the fix we have been waiting for, by checking the fairchild
regulators. We found the adjustments to be slightly low as follows.
Head1-55.0
Head2- 58.2
Head3-55.9
Head4-56.7
Head5-57.3
Made the neccesary adjustment to 60.0 and testing with 25 wafers.
We found the voltage on the infranor to spike to 4.7 - 5.0 so the
next step was to put in the new gearbox. When the gearbox was removed
we found the gear at the bottom to have grease on it. Upon putting
things back together and running again monitoring the voltage at the
infranor we saw that the voltage would only spike to 2.7 - 3.0 A
noticeable differance, but we had a crash that we are now cleaning up,
possibly due to some debris or damage to the pad????
We also did the downforce after the reclibration to the fairchilds
and found these results.
Head 1- 413.2 Adjusted to 376.1
Head 2- 442.4 adjusted to 376.5
Head 3- 413.4 adjusted to 376.7
Head 4- 407.6 adjusted to 378.4
Head 5- 423.7 adjusted to 377.4
After the crash is cleaned there is 45 wafers to run and monitor the
infranor.
Rich (Mr. Goodwrench)
|
| 17.391 | <finish up on carriewr stalls | FABSIX::O_WHITFORD | | Tue Oct 01 1996 23:56 | 10 |
| Working with Speed Fam rep (Dave) after chrash from previous shift, we
replaced 3 carriers and a new pad was installed. (looks like hell, 1st time
either of us has had to custom cut one) and ran 45 test wafers on the
BIN3 recipe. We do get some slight vibrations from time to time but not
consistant. Visual on the wafers show some look to be on the light side.
(close to showing bare silicon) Tool completed the remaining 45 wafers
with no carrier stalls. Turned over for MQC's.
Dave & Brian
|
| 17.392 | HEAD #1 STALL OUT | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Oct 02 1996 07:42 | 15 |
|
Came as REP was leaving. The tool had 10 more wafers to
go as part of the 50 wafer verify. Everything looked good and
after the 50 were done running, the tool was turned over to
OPS for MQC's. During the second set of (5) wafers, the MQC
wafers, head #1 stalled out on the table just after touchdown.
The tool had to be EMO'ed. Per SF rep, the rotation Infranor's
for heads #1 and #2 were brought from 10.7 volts up to 14 volts.
OPS ran another 25 wafers for verify and it went fine. MQC's
were run twice and the removal rate on three heads were below
spec (2400). A new pad was installed and conditioned. The
tool is now ready for MQC's.
D shift
|
| 17.393 | vibration plan of attack | SUBPAC::CMP | | Wed Oct 02 1996 13:01 | 5 |
| Had a wafer crash early this morning, so this is what has been done so
far as part of the plan for the vibrations. Checked the down force
calibrations and found they were very close (6-7 lbs. low), installed
a new slurry 1 pump, cleaned the tool fully, made adjustments to slurry
flow on all recipes to bring them up to 900 ml.
|
| 17.394 | vibrations | STRATA::SWENSON | | Wed Oct 02 1996 20:14 | 13 |
| Finished cleaning the tool. Put 3 new carriers on, and proceedded to run
the vibration test. All recipes had there slurry supply doubled, and
slurry pump 1 has been replaced.
In segment five 17 sec. of 30, of vib_.test recipe the tool crashed.
Down force on all five heads have been performed.
Tool has been cleaned and pad broken in.
The vibration test recipe has been modified and is presently running
a vibration test of 100 wafers.
25 wafers has been successfully ran as of now.
C-SHIFT
|
| 17.395 | WAFER CRASH | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Oct 03 1996 02:57 | 16 |
|
rechecked downforce using the point method , then rechecked with
carrier on tool. At about 65 wafers into the 100 wafer run we had a
slide out--- carrier 2 went into 5. Cleaned the tool again replaced Pad
and two carriers this happened at step 7( water ). Checked all recipes
at this point and found that step 5 had a ramp in it that it did not
need, reason being we were allready at set point and also at step 7
needed a ramp being that we are now applying less down force.
Adjusted all wafer loss sensors for reason being that they were not
catching wafers on slide out. Restarted 100 hundred wafer run again and
caught a slide out on head 4 . Were at 85 wafers into it . what was
noticed that head 4 load cup was sticking causing miss load. We will
run 25 more wafers at this point and turn back to production to run
their MQC . It is now 2 A,M, will answer all question tomorrow.
KEVIN--- Speedfam REP
|
| 17.396 | removal rates issues | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Oct 03 1996 07:20 | 11 |
|
The finished up its VERIFY run and MQC's were run. The
tool failed for removal rate and range. OPS re-ran MQC's
and it failed for removal rate again. The removal rate
chart shows a decline in MQC results since the slurry
flushing. That with the fact that so much has been done
to the downforces, it is in ENG hands for where to go from
here... Awaiting ENG by phone via page.
D shift
|
| 17.397 | VIBRATION FIX | SUBPAC::CMP | | Thu Oct 03 1996 19:56 | 7 |
| CONTINUED WORK WITH THE PROBLEM OF VIBRATIONS. A SUSPECTED PROBLEM WITH
POLISHING WITH WATER STARTING WITH SEGMENT 6 WAS INVESTIGATED AND FOUND
TO BE THE CAUSE OF THE VIBRATIONS. A CHANGED TO THE RECIPES BY THE
PROCESS ENGINEER WAS MADE BY CHANGING THE AMOUNT OF TIME THE WATER WAS
RUN DURING SEGMENT 6 THUS FIXING THE PROBLEM. A PARTICLE CHECK WAS MADE
AND THEY WERE WELL WITHIN LIMITS. AT THIS TIME WAFERS ARE BEING RUN AND
THE TOOL WILL BE TURNED OVER FOR PRODUCTION.
|
| 17.398 | Wafer breakage due to stall on #3 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Oct 05 1996 07:04 | 11 |
|
Tool crashed in BIN3 after head #3 stalled out on the table
5 seconds into segment #3. Tool cleaned up and carriers #2 and
#3 replaced. The tool has not passed MQC's for the uniformity
issue so it is still in VERIFY-U. Crash form entered in note #34.
D shift
|
| 17.399 | MQC failure/Down to ENG. | FABSIX::J_SWENSON | | Sat Oct 05 1996 20:16 | 3 |
| Tool was put down to eng. failure to mqc 3x h to h variation and
std for three carriers.
|
| 17.400 | Poor uniformity & removal rate / downforce | FABSIX::R_GEE | | Sun Oct 06 1996 20:42 | 13 |
| Failed MQC's for uniformity and low removal rates, we
tried a new pad and carriers with no improvement. Checked
the downforce using the plate and found heads #1, #3, & #4
out around 25 lbs. Head #5 was just slightly out and #2
was within spec. Checked the conditioner downforce and it was
also out high by 11 lbs. Brought all downforces in within spec.
Ran another set of MQC's, they failed for uniformity, 10 to 12%
but the removal rate was good.
Doc & Bob
|
| 17.401 | 1/4 turn incoming slurry valve | SUBPAC::LANDRY | | Mon Oct 07 1996 20:39 | 11 |
| The system was still experiencing "low removal rate" this morning. We
went through the slurry "package" looking for any slurry related causes.
Checked the DI flush solenoid to assure that the water wasn't leaking
by, hence diluting the slurry content. The solenoids were shutting just
fine, no leakage at all. We then checked the fluids cabinet for any
possible problems. Found the incoming valve for slurry pump 2 was in
the shut-off position. Opened the valve, flowed slurry to assure no
crystilization had occured. All was fine. Re-rans MQC's, everything
is now in spec!
A shift
|
| 17.402 | wafer loss detected | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 08 1996 06:00 | 9 |
| While running 5 breakins before product, one slipped out of carrier 4
went under carrier 3 and tripped the wafer loss detect system. Checked
carrier's 3 and 4 for damage, replaced carrier 4. Both wafers (the one
from 4 and the one on 3) were still intact. Checked pad for possible
damage with none found. Conditioned the pad and returned system to
production. The step this happened in was step 5.
B-shift
|
| 17.403 | 494d software tested | STRATA::FINN | | Wed Oct 09 1996 19:27 | 39 |
|
System was taken at 6am test of new software (494 d). Backed up old
493 software and recipes.
Hardware portion of modification ie break out boards and analog boards
upgraded. New software installed. Slurry/water line length on pumps
one and two to match the other Speedfam systems.
System was started up and appropriated software/calibration files
altered for new software.
Several software bugs were noticed and documented by Speedfam F.S.
Down force was plotted on chart recorder, and as promised no DF over
shoots were recorded with 494 d software. However carrier one stalled
several times with out a significant increase in DF on the chart
recorder or on CRT screen!
A New DCX mother board was installed in DCX1, by SF reps.
System was reverted back to 493 software and associated hardware.
IO_MQC recipe seqment six was changed to 10 sec's and breakin and MQC
wafers run. Particles passed and all recipes with the exception of 1
sec - 2 sec touchup recipes were modified to reflect 10 secs in seq six.
While these breakin/MQC wafers were being run the Chart recorder
monitored 493 Downforce. No spiking or overshoots were recorded.
System is being cleaned and will have a pad change. Full MQC will be
needed before returning to manufacturing.
Original DCX mother board will be reinstalled tomorrow or whenever
manufacturing will give it up for two hours so SF field service
can monitor DF, due to the mysterious disappearance of the DF spiking
problem.
A shift
|
| 17.404 | Scratches and (1) stall | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Oct 10 1996 07:37 | 12 |
|
Tool failed for scratches and got logged down.
Looked at pad and found some debris on pad. Rinsed
pad then scrubbed it. MQC's were re-run and all
MQC's variables passed.
Tool had one "carrier #1 not rotating" and we were
able to recover and keep running without any problems
for the rest of the morning.
D shift
|
| 17.405 | ERP replaced | FABSIX::B_FINN | | Thu Oct 10 1996 19:04 | 14 |
|
System was taken down for troubleshooting of head rotation
error and df overshoot. Connector X2 on carrier #1 infranor was
examined aok. Pressure regulator for carrier 1 was replaced.
Brad observed a spike to 490 on carrier one followed by a
rotation stall.
Plotted downforce again across several run. Traces were smooth
with no signs of overshoot
Downforce will be checked before returning system to
manufacturing.
|
| 17.406 | carrier rotation error | FABSIX::J_SWENSON | | Fri Oct 11 1996 20:26 | 6 |
| Infranor for carrier one adjusted to 14.02, per Brendan, We had carrier
rotation problems for head one, no down force spike segment #4,
4 seconds into segment of a 5 second segment. Down force at the time
was 399.
C Shift
|
| 17.407 | Incoming slurry problem | SUBPAC::LANDRY | | Sun Oct 13 1996 20:16 | 9 |
| Head one stalled out this morning. At the time of the occurrance, opts
personnel noticed that the slurry distributions was at a trickle pace.
Checked the incoming slurry to the system. Many, many bubbles were
present. Quickly checked the other systems in the room and all were of
the same state. Halted processing across the board and notified
Ashland. Ashland found the filter clogged. Repaired problem. No
other head rotation problems the rest of the shift.
A Shift
|
| 17.408 | 494 software install | STRATA::FINN | | Mon Oct 14 1996 17:37 | 10 |
|
System is down for install/debug/eval of 494 software and repair of
carrier one head rotation problem. Reps have installed new hardware
(ie breakout boards). Software has been installed and critical parameters set.
Rep is currently working to debug for our tool, (sys #1).
Please leave tool in remote screen in wet mode. System is not available for
manufacturing.
A shift
|
| 17.409 | b1 software update | SUBPAC::CMP | | Mon Oct 14 1996 20:15 | 8 |
| Software is updated to 494D, there is a little more debugging to be
done and hope to be completed this evening. The tool will be in wet
mode waiting for process verification tomorrow.
Rich (Mr. Goodwrench)
|
| 17.410 | hang, stall, and crash | SUBPAC::CMP | | Tue Oct 15 1996 21:35 | 6 |
| work was wrapped up for the day and the tool was turned over for
production. When MQC's were run the screen locked up, when that was
corrected there was a warning of polish table not rotating, when that
was corrected then there was a crash. The crash I believe was caused by
a very old pad (over 1000 wafers). We cleaned the mess and is now
going through the breakin series.
|
| 17.411 | Wrap up after crash | FABSIX::O_WHITFORD | | Tue Oct 15 1996 21:58 | 6 |
| Worked with SF rep, replaced pad (1170 wafer count) and heads 4 & 5.
(Slide out occured from carrier #5 and crashed into #4...) carriers had
aprrox 340 wafers each... Turned over to ops for verification and MQC
runs.
Dave
|
| 17.412 | Nasty deviation results | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Oct 16 1996 07:56 | 12 |
|
Tool failed real bad all night for deviation. Heads
#1, #3 and #5 were ~16% and the OP couldn't bring it in.
All three carriers were replaced, after 3 rounds of MQC's,
the average deviation was 16% with #1 being as high as 24.5%.
ENG taking the tool in an hour for Rep. work.
D shift
|
| 17.413 | rotation #1 trouble shooting | STRATA::FINN | | Wed Oct 16 1996 18:37 | 18 |
|
Continued troubleshooting rotation errors.
dxc mother board vme analog i/o, acromag, breakoutboards, epr,
infranors and infranor power supplies, have all been eliminated todate.
Chased phase wiring to motor, Swapped motor wires at bulkhead between
carriers one and carrier two. Carrier 1 stalled but errored for
"carrier 2 rotation fail". This narrowed our search from bulkhead to
motor assembly. Ran new cables and tested, still failed. Swapped
output of pressure transducer from carrier one to carrier two.
Still failed on carrier one.
Motor and gear box have already been swapped.
Checking parts supply to mechanical prints for bearings.
System will be down through the night for bearing change.
A shift
|
| 17.414 | Wrap up for the day | FABSIX::O_WHITFORD | | Thu Oct 17 1996 00:03 | 5 |
| Assisted SFreps & observed work in progress. The workday concluded with
the decision that oscillation arm #1 will have to be removed from the
MHTA to facilitate bearing replacement. Due to design and construction,
this cannot be accomplished in the tool. Work will resume on this in
the AM.
|
| 17.415 | bearings changed | FABSIX::B_FINN | | Thu Oct 17 1996 19:07 | 18 |
|
Continued disassembly of carrier one motor arm assemble.
Oscillation arm was removed. Disassembled shaft and bearings,
removed lower bearing and took to machine shop to be pressed out. Two new
bearings were pressed in. Reassembled Oscillation arm. Reps are
currently reassembling carrier rotation assembly. New carrier quick
connect could not be found in fab six SR. We looked twice. Kevin will
order. Old quick connects non contact surface is galled, but release
is functional, and is being temporarily reinstalled.
Down force and vacuum switch will need to be adjusted. System should
be tested at 400lbs of df for reoccurrence of carrier stall.
At this time F.S. feels they will not be done until tomorrow, but if
conditions change, J.P. John or Brad will update this passdown.
|
| 17.416 | passdown | STRATA::FINN | | Fri Oct 18 1996 18:05 | 16 |
|
System had vacuum switch adjusted for head one. Pad changed.
Carriers installed. Tried to run but had low slurry flow. Needed
purge of lines. Down force could not be performed on carrier one due to
input coefficient not updating. Swapped outputs of load cell amp
to carrier 2 with similar results. Checked stock room for loadcells
and amps. (note: these are a matched set). But the items in stock are
not matched . Confirmed this by calling Speedfam with serial numbers of
components in stock. Amp was installed but problem was the same.
Loadcell was installed with new am and input coefficient now changed
when recalibration took place but the output was none linear. Reps
adjusted span on Loadcell amplifier. Input coefficient looks good.
Downforce is being checked. System will need 100 wafers @ 400 lbs of
downforce to test rotation stalling error fix. Please call Tim with
result.
|
| 17.417 | Head #1 Load Cell Calibration Activity. | ASDG::POIRIER | | Fri Oct 18 1996 20:15 | 10 |
|
* Head #1 Rotation Bearing Replacement Activity: - Update
---------------------------------------------
As of 7:10 p.m. the Speedfam Reps are working
on the head #1 load cell amplifier calibration.
Refer to Tim Dyer's passdown for appropriate
plan of action.
C Shift.
|
| 17.418 | Parts on the way | FABSIX::J_SWENSON | | Sat Oct 19 1996 20:37 | 6 |
|
Tool is awaiting parts. Part's will be Monday, there seemed to be a
confusion with delivery, over night versus 2 day. Carriers were
removed and are presently being soaked and tool powered down.
C-Shift
|
| 17.419 | passdown | FABSIX::B_FINN | | Mon Oct 21 1996 19:16 | 15 |
|
Analog board was changed, io cables were swapped. Pad Conditioner
would not descend. Fixed cables, pad conditioner works properly but
high (max outputs) on manual io screen and scrubber. Tried new io boards (replaced
100k pot on original board. Az office wanted card cage and supply changed.
It was done, same problem. Io outputs from break outboard 8 were
lifted per Tim, problem stopped. Lifted one at a time and isolated to
Chiller output. Lifted output for chiller at back of system still had
problem. Found Broken leg to a pot on "advanced motion control
assembly". Repair continues.
Quick connect and loadcell/amp arrived fedx. Carrier ones
quick connect has been changed.
|
| 17.420 | further update | SUBPAC::CMP | | Tue Oct 22 1996 12:44 | 5 |
| Monday Night.......
Found that the wires to the new BB for the 494 upgrade were in the
incorrect positions, why??????????? rewired correctly and problem
disappeared. Continued with the load cell problem and will finish
up tomorrow.
|
| 17.421 | passdown | STRATA::FINN | | Tue Oct 22 1996 19:11 | 23 |
|
Monitored loadcells to insure proper reading dead weight and under
pressure, right at output of amp. Found erroneous input coefficient to be
caused by load cell. Rich noticed a spacing difference and discovered a
washer/spacer missing, causing load cell to press on outer edge of S block and
not on load cell. Replaced missing spacer, tested aok. Performed Down force to
all head. Tried to had several false starts due to slurry flow, manual/ auto
software bug, and bad pin at i/o for wafer blow off carrier one.
That was all straightened out by late afternoon.
Changed pad ran condition and breakins up to 377. aok. Next ran 400lbs
downforce and received CARRIER ONE ROTATION STALL. Bearing did not fix the
problem.
FS rep are splitting up into two groups, Daniel and Cesar will work into the
night (considering they have been here since 8am). Rich and Kevin will go home
and be back in the am.
Relooking at the cables
|
| 17.422 | Tues night update | SUBPAC::CMP | | Wed Oct 23 1996 10:21 | 9 |
| Late entry for Monday night........
Continued nto work the head stall problem with 2 Rep's from Phx.
Completed the rebuild of the polish arm and troubleshooting of
the load cell. During the test the head stalled and made checks
of what had been done to date. Installed cables from dcx to infranor,
and bulkhead to TB13, also from TB13 to motor(all installed outside
of tool for testing), will continue tomorrow with shift coverage
and more information from Phx.
|
| 17.423 | correction of last message | SUBPAC::CMP | | Wed Oct 23 1996 10:23 | 2 |
| Please make a note that the previous message was labeled Monday night
but is for Tuesday night. Sorry very tired lost track of what day.
|
| 17.424 | ex | FABSIX::B_FINN | | Wed Oct 23 1996 18:59 | 30 |
|
Continued troubleshooting carrier one rotation problem.
Acromat mother board replaced. No change.
Motor from carrier one was installed on carrier three, and
carrier three motor placed on carrier 1. Carrier stall occurred
on carrier #3 now. No stall occurred on carrier #1. Run was
repeated with similar results of carrier #3 rotation fail combined
with a spike in infranor current.
In other words the problem has been successfully been move to
carrier #3 by merely swapping motors.
A new (well from the SF office) motor been installed on
carrier #3. It failed for rotation as well. No wires were
touched just motor swapped. Phasing was verified and found to
be correct.
Bad motor from #3 was swapped back into carrier one to
verify the problem. Carrier #1 failed for rotation.
Speedfam is sending another motor tonight reps will pick
up at the airport(11pm) .
I asked that a "know good motor" be taken off a system for
shipment.
A 200 wafer cycle test at 400lbs will need to be run at
completion of fix.
|
| 17.425 | passdown | FABSIX::B_FINN | | Thu Oct 24 1996 19:03 | 25 |
|
Two motors are being shipped in from Speedfam.
Please install the first motor in carrier one. If it fails
swap motors between head 3 and 1. If the problem moves to head 3 put
next (second) motor in carrier 3 and try it. If it fails Call it a
head 3 problem turn head 3 off line. Begin cleaning for return to
manufacturing in the AM.
If one of these motors passes fine! If not please clean the
system through top to bottom inside out. Perform any
outstanding pm's with the exception of DF which has just been
done, repeatedly. Leave system down. Engineering will bring system
up tomorrow with new software on four carriers.
The problem is the motor but more info is required from
speedfam and motor OEM.
|
| 17.426 | motor repair | SUBPAC::CMP | | Thu Oct 24 1996 21:48 | 5 |
| Braved the Boston traffic to pick and bring back the 2 motors this
afternoon, installed the motor and ran 20 wafers before the room was
closed down to fix slurry/particle problems. The test will continue
when the slurry comes back online. By morning hope to have some good
news.
|
| 17.427 | passdown | FABSIX::B_FINN | | Fri Oct 25 1996 17:32 | 28 |
|
Another motor was shipped in from speedfam and was installed
on carrier 3. This motor was said to be a "know good motor taken off
their training system". It's year of manufacture was 1995. It failed
for rotation stall carrier #3.
System was wiped down. Infranor #3 set to 14.5 amps and loop
interval set to 75. (200 test wafers were successfully run at an
exaggerated df (400lbs) last night. Rotation alarm tolerance has been
set to 15% from 10%.
MQC were run and failed particles. No surprise given what the
system has been through. Also wafers were center fast.
large total scratches
355 2619 14.8
364 1974 0
498 3232 0
619 4201 0
382 2045 7.4
Note: Scratches look like slurry
Uniformity was center fast, pad was changed last night due to
breakage during test runs.
System will need to be cleaned cleaned cleaned.
|
| 17.428 | Rotation Motor Changed / High Particles | ASDG::POIRIER | | Fri Oct 25 1996 20:09 | 26 |
|
Motor replacement update:
------------------------
A replacement rotation motor was installed into head #3 today.
The ID tag on the motor indicated that it was manufactured in 1995.
With the Infranor set to the recommended 10v, the head stalled on
the first run. The voltage was increased to 14v and the tool was
returned to manufacturing. Although 14v is higher than recommended,
Speedfam is confident that the motor will not stall with the higher
voltage. This conclusion was based on the results of last nights
200 wafer run with the Infranor set to 14v.
Particle Problem:
----------------
The system failed MQC's for high particles and uniformity.
Action taken thus far:
1) Replaced Pad, Carriers & Brushes.
2) Cleaned polish area, multihead & index table.
3) Ran slurry purge for 10 min.
D Shift, please calibrate slurry flow (flow doesn't look right)
and run MQC's again.
C Shift.
|
| 17.429 | Particles | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Oct 26 1996 05:01 | 9 |
|
Tool down at shift change for particles and slurry pump
calibration. Both pumps were low and adjusted to proper
flow cal. The tool probably failed particles because of the
slurry issue because after a brief cleaning and after the
slurry system flushing, the tool passed particles.
D shift
|
| 17.430 | tolerance adjustment | SUBPAC::CMP | | Sat Oct 26 1996 13:52 | 5 |
| During some analytical checks for the head stall problem, we
experienced a out of tolerance warning for rotation, this appeared to
be similar to past warnings showing a slower speed for rotation.
Made an adjustment to the tolerance factor by raising the percentage
from 15 to 30.
|
| 17.431 | "ROTATION OUT OF TOLERANCE" ERRORS | LUDWIG::WESTPHAL | | Sat Oct 26 1996 20:25 | 10 |
|
CMP.B1 - Down for "ROTATION OUT OF TOLERANCE" errors and some voltage readings
that needed to be taken by SFAM. Rep in formed me that the error
response time needed to be adjusted temporarily to correct the error
problem. John H. & Rich B. hooked up an O-scope and a Dranetz
analyzer to the power in on various carrier rotation motors. Tool was
put to END_REPAIR.
|
| 17.432 | tolerance errors.... | SUBPAC::LANDRY | | Sun Oct 27 1996 19:21 | 25 |
| Today on this system, we experienced some strange behavior. Let me
eloborate for you.
1) We occassionally had "tolerance errors for pressure" on head 5.
Not knowing the new software yet, this alarm is foreign to me. I
can't offer anymore into it.
2) Another strange occurance was the head up movement of head 5. It
was slow in raising on several occassions. It also alarmed for
"all heads not up on MHTA" one time. The head was creeping up on
this occurance. In between measuring wafers, I quickly looked into
the air lines for this. All hoses were connected, and no leaks were
observed. There may be a pinching situation occuring as it only
happens at the polish table. It raises fine at the Index Table.
We'll need to keep an eye out on this.
3) We occassionally had "rotation out of tolerance" errors. No surprise
here. This is in the bundle of rotation concerns.
4) During one of the runs, a pressure tolerance alarm sounded. It appeared
to happen at the end of the cassette of wafers. When silencing the
system the MHTA stayed out over the Polish Table, and didn't unload
the last 5 wafers???? Looks like the computer burped??
Doctor
|
| 17.433 | ep regulator | LUDWIG::RIDLON | Eliminate the oblivious | Mon Oct 28 1996 04:10 | 13 |
| Head 5 failed to come up after polishing. It also removed ~2000
angstroms less than the other 4 heads. Isolated problem to EP regulator
not releasing the air to the head. Replaced the regulator and performed
down force cal. Ended up having to do all 5 heads due to a mix up. We
used the point method to calibrate and then rechecked with the carriers
on. The regulator for head 2 will need to be replaced soon. It drifts
while the others don't. Would have done it tonight but there aren't
anymore. Breakins and mqc's running now. All heads went up after
polishing.
B-shift
|
| 17.436 | Wafers left on Pad | FABSIX::R_POIRIER | | Tue Oct 29 1996 06:51 | 16 |
|
We had a problem with wafers coming out at lift-off. The 1st
time was on carrier 2. We took the carrier off and noticed
the white ring had a couple of deep nicks in it. We replaced
the ring and tried again. Again, carrier 2 left the wafer
on the pad at lift-off. We replaced carrier 2 and ran more
break-in wafers. This time the wafer came out of carrier 1.
We found water in the vacuum pump filter, cleaned it out,
replaced the filter and started running wafers again.
No problems since then.
B Shift
|
| 17.437 | EP's checked, condition ass. bad | SUBPAC::LANDRY | | Tue Oct 29 1996 19:33 | 40 |
| A rough ride with this beast today.....
The system failed early this morning for high particles and poor
uniformity. As an add-on, the slurry filter down stairs had been
changed about an hour prior to the above MQC results.
The particles were failing on 3 heads badly with the other 2 heads
just barely in. The major problem was the uniformity, which was
pretty bad. Head 4 was exceptional out. ALL the heads were polishing
center fast. The ID/OD was adjusted to it's limit without any suc-
cessfull results. Therefore, we decided to look into the DF on the
heads. We first checked the EP regulators. Heads 1, 2, and 5 needed
adjustment at the top end (60 PSI). Now that these were adjusted, it
was absolutely necessary to perform DF calibration.
Upon performing head one DF cal, we could not get the system to repeat.
Found the wiring hook up to the EP regulators unsatisfactory. Two of the
three wires were only attached by two strands. Stripped back and tried
again, same poor results. We decided to remove the wiring from the
stand-alone chart recorder. Checked DF again. All was stable and
repeatable. Moved on to head two, same fluctuating senario. Again,
removed the chart recorder wiring from the loop and all stabilized. Need
I say we removed all the chart recorder wiring at this point? Got all
heads to be at 377 lbs DF.
Put a new pad on the system, and began the pad conditioning cycle. Whoa!
What is the condition wheel doing? It wasn't rotating uniformly. It
would speed up / slow down. Definately a negative affect to the condi-
tioning of the pad. Gimbal was good though. Tore down the feed-through
assembly. Found much rust and a less than desirable lower bearing. We
attempted to get the bearing out of the assembly without damaging it.
It was virtually an impossible task. Therefore, a decission was made to
get the bearing to work as best as possible, and get a new assembly
shipped in. We were able to free up the bad bearing enough to make the
wheel rotate as should. A new assembly IS NEEDED.
At currently writing, the system has passed particle checks. It needs
the uniformity check done next.
A shift
|
| 17.438 | Pad change, tolorence errors | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Oct 30 1996 06:14 | 10 |
|
Tool failed MQC's for bad uniformity and OPS couldn't bring
it in. A pad change was completed. We are awaiting results.
Just an FYI, the "tolerance" errors were seen throughout our
shift....
D shift
|
| 17.439 | Recipes,carriers etc. | FABSIX::L_SHKOLNIKOV | | Wed Oct 30 1996 07:42 | 16 |
|
The system went down for wafers coming out at lift-off. The 1st
time was on carrier 2. I checked the vacuum and it appears to
be fine. When we checked the recipes we found that the segment#9
was different compare with B2. Frank was called and recipe was
changed to match B2. No problem since then.
Later tonight the tool was alarming for load miss the wafer.
So load flipper has been adjusted - works fine now.
Continued with high uniformity. The tool failed MQC's four times
tonight. Looks like the problem related to carriers issue. Did not
have a chance to check the carrier curvature ( it should be closer
to -2u).
Leon
|
| 17.440 | UNIFORMITY OUT OF SPEC. | LUDWIG::WESTPHAL | | Wed Oct 30 1996 19:23 | 17 |
|
CMP.B1 - Down for poor uniformity. Ran the MQCs. The uniformities for 1 & 4
were high and the rest of the carriers were barely in (around 9.4).
swapped heads 1 & 2 to see if the problem followed the carrier 1. It
seemed to follow the carrier so it was decided to swap them all. The
MQC was ran again. The removals and uniformities are as follows.
REMOVAL STD
4736 10.9
5076 9.1
5120 4.8
4758 12.7
4773 8.4
Adjusted the offsets to see if that will make any difference. The MQCs
have been ran and are waiting to be read by the following shift.
|
| 17.441 | Still out of Spec. | FABSIX::L_SHKOLNIKOV | | Thu Oct 31 1996 07:33 | 14 |
| Still down. Uniformity is way out of spec. Three times run the MQCs.
After first MQC'S has been run the uniformity for carr.#4 was high
12.7% and ops couldn't bring it in by running the offset program, so
carrier #4 was replaced and we attempted to run the MQC's again.
Well now all 5 heads came in for deviation right in spec. and failed
for removal rate between 2000� and 2495� (spec lower control limit
for the r/r is 2400� ). We checked the conditioner downforce calibration
and it was looking good - 74 lb. So pad was changed(we put the same pad
which sitting on B3 now) after that and removal rate looks good and
uniformity is way out of limit between 9.6% and 19.7% on carr#5.
Leon
|
| 17.442 | Carrier rotation out of tolerance error. | FABSIX::J_SWENSON | | Thu Oct 31 1996 10:42 | 20 |
| System errored several times for carrier rotation out of tolerance.
carrier
1 23RPM
2 24RPM
3 25RPM
4 24RPM
5 24RPM
Carrier's 1 and 3 were strobed and the deviation was +/- 2 RPM during
process.
Screen also said 66 sec left in process.
C-Shift
|
| 17.443 | POOR UNIFORMITY | STRATA::WESTPHAL | | Thu Oct 31 1996 19:36 | 6 |
|
CMP.B1 - Down for poor uniformity issues. Frank brought the STD in by
adjusting the position of the conditioner and the IDOD for carriers.
The tool passed MQCs and was returned to production.
|
| 17.444 | Wafer dusting... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Nov 01 1996 06:00 | 12 |
|
The tool crashed after a loud short vibration followed
by a ROTATION TOLERANCE ERROR and a monitor wafer sliding
out of #2 and "dusting" against #1, taking #1 product wafer
as well. The tool was cleaned up and we are completing
several items on the MONTHLY PM. A crash report was posted
in NOTES.
D shift
|
| 17.445 | please record for SF | FABSIX::B_FINN | | Fri Nov 01 1996 15:34 | 10 |
|
CMP.B1 - Kevin Colman is looking into the carrier rotation
tolerance alarms. He has asked that the following info be
record for any further incidents.
Process name
Segment number
Total time remaining
Thanks
|
| 17.446 | B1 issues | FABSIX::J_SWENSON | | Fri Nov 01 1996 19:26 | 24 |
|
* a couple of things were forund during p.m.
- broken wire for load cup five sensor (repaired original, could not
locate duplicate in the stockroom.
- pad conditioning % of down force was set to 99% (set back to 67%)
- not able to perform rpm check for polish table due to software.
did not want to take the chance of scratching table.
- slurry valves for both pumps are turned off.
- the valves will need to be opened and slurry flushed for 20 - 30
minutes.
- the pad needs to be conditioned and broken in.
- the tool has the carriers rotating and spray on.
c-shift
|
| 17.447 | Software Locking UP During Wafer Loading Sequence | ASDG::POIRIER | | Sat Nov 02 1996 19:36 | 21 |
|
Software Repeatedly Locking Up:
-------------------------------
The Software locked up on 6 out of 7 consecutive runs. Each time we had
the same condition. The lock up occured while the wafers were being
loaded into the index table. Two wafers were in the load cups, one
wafer was in the load flipper (home position), one wafer was in the
pre-aligner and one wafer was on the robot. We ran our test runs on
the ILD1, ILD2 and ILD3 recipies with the same results. We suspect that
that a corrupted file is to blame. The Speedfam 1 800 number was called
(per John Hoekstras aprroval) and phone support was requested.
Kevin from SF informed us that the Software on B1 has been locking up
whenever the MANUAL POLISH mode is used. D Shift informed us that they did
indeed use the manual polish mode last night to perform the table rpm
check on the monthly P.M. Kevin is calling us back at 7:30 p.m. for
info on our last test run (it locked up). It looks like the software
will need to be reloaded. B shift is picking up the phone support with
Speedfam at this point.
C Shift.
|
| 17.448 | ??? | LUDWIG::RIDLON | Eliminate the oblivious | Sun Nov 03 1996 05:07 | 6 |
| Performed a soft boot. Ran 25 wafers using ild1 with no problems. Ran
25 using notouch with no problems. Would have liked to have run ild2
and ild3 but the room was short of breakins. Tool is up waiting mqc's.
B-shift
|
| 17.449 | Mapper B / Rotation tolerance | SUBPAC::LANDRY | | Sun Nov 03 1996 19:27 | 19 |
| Today's happenings.......
* We experienced NO problem with the system halting while loading up
the Index Table. Looks like the B shift reboot took care of that.
* We did have a couple of rotation tolerance errors. Nothing unusual
was found. Acknowledged the alarms and resumed running. Oh ya, then
the friendly "reminder" error followed to tell you it just errored.
* The cassette B mapper had a problem. The tilt would activate as
should, the wafer scanner would scan as should, but it would stay
in this loop (tilt, scan, tilt, scan) until it had a "timeout for
mapper B" error. We checked all the connections, all were fine.
Felt for any overheating at the transistors on the controller, none
were hot, just warm. Went back to retry mapping, but the screen was
locked up. Soft-booted the system, all mapping functions returned
to normal.
A shift
|
| 17.450 | reload of 493C software | LUDWIG::FINN | | Mon Nov 04 1996 19:14 | 19 |
|
A group decision was made between Equipment, Process and Field Service
Engineering, to revert to 493 c software. This was in response to the "carrier
rotation errors and manual/reboot bugs.
Hardware was changed at the breakout board and 493c reloaded. Autoexec
file edited. To prevent or lessen the chance of a stall due to pressure
overshoots the infranors on carriers 1 and 3 have been increased to 14.5 amp.
The interval loop and delay in cdata.cmp file were increase to 75.
3 breakins recipes were increase in time in segment 6 from 3 secs to
10 secs, all other recipes checked in segment 6 to insure 10 sec's.
Ran breakin 2-3, Io_breakin, and runs in io_mqc without error.
Gave system to manufacturing for real MQC.
A shift
|
| 17.451 | alignments | LUDWIG::RIDLON | Eliminate the oblivious | Tue Nov 05 1996 04:29 | 9 |
| Alarmed for main vac low while running breakins for mqc's. Carrier 3's
wafer wasn't seated in the carrier. Performed cup to carrier alignment
and ended up having to recalibrate the mhta load position, carrier 5's
load position, carrier 3's load position, and index home position to
get all the heads in spec. Ran some wafers through to test with no
problems.
B-shift
|
| 17.452 | Software burp? | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Nov 08 1996 06:51 | 27 |
|
How do you explain this one....
The OPS tech running the tool set up for two different
product lots with two different recipes for the two boat.
This is the "out-lined" form:
- The tool somehow cooked (5) wafers. (5) Metal-1 wafers were
run at ILD1 recipe.
- The tool left (5) other wafers in the unload cups and double
slotted (10) total wafers.
- The OPS tech first noticed the (5) "cooked" wafers
- The tool then started alarming for multiple unload errors
due to the tool not being able to handle the double stacked
wafers.
The process ended and I went into the recipe/mapping section
to double check the OPS mapping/recipe line-up. Everything was
in order and we couldn't see what could of have gone wrong.
The tool was powered down for 10 minutes then powered back
up. The tool ran 25 break-in wafers without any problems.
The tool was handed back over to OPS.
D shift
|
| 17.453 | conditioner DF verified | SUBPAC::LANDRY | | Mon Nov 11 1996 18:58 | 7 |
| Per request......
We checked the Conditioning Down Force. Found it to be just fine.
No adjustment was made.
A shift
|
| 17.454 | cmp.b1 downforce calibration | FABSIX::J_SADIN | Freedom isn't free. | Wed Nov 13 1996 15:11 | 12 |
|
re-calibrated down force on all heads.
pre-adjust post
1- 377 377 (no change)
2- 360 376.9
3- 376.5 376.5 (no change)
4- 367.5 377.5
5- 367 376.8
|
| 17.455 | High Particles / Broken Scrubber Drive Belt | ASDG::POIRIER | | Thu Nov 14 1996 19:23 | 22 |
|
High Particles:
--------------
The system went down at 6:00 p.m. for high particles. (approx 2000)
The Pad and Scrubber Brushes are being changed. MQC's to commence on
"D" shift.
Note: The other Speedfam tools have particles under 1000.
Both Strasbaughs have around 400 adders.
Broken Scrubber Brush Drive Belt:
--------------------------------
While replacing the Scrubber Brushes, we noticed that the Scrubber
Drive Belt was broken. The belt has been replaced and the Scrubber
is being reinstalled at this time.
C Shift.
|
| 17.456 | DRIED CARRIERS, LOAD FLIPPER, LEAK | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Nov 15 1996 06:12 | 18 |
|
The tool wasn't in WET MODE when we came in at 10pm from
the Comm. meeting. the carriers were inspected and they
looked ok but wouldn't cut. After numerous MQC runs, the
OP couldn't bring in the range and dev. All (5) carriers
needed to be changed.
While loading the 1st wafer for break-in, the load flipper
went 2" past the wafer and hard stopped. The flipper wouldn't
recover so we have power down the tool to free it up.
The 1/4" DI fitting on the scrubber was stripped and
DI was spraying on the scrubber motor connector. The
entire bulkhead fitting needed to be replaced. It was
metric to boot...
D shift
|
| 17.457 | High Particles / Tool Cleaned & Pad Replaced | ASDG::POIRIER | | Sat Nov 16 1996 19:27 | 13 |
|
High Particles:
--------------
The system failed MQC's this afternoon for high particles.(3000+)
All other CMP Polishers had low particles. The tool was thoroughly
cleaned and the pad was replaced. Mfg is now running MQC's.
C Shift.
|
| 17.458 | broken wafer, leaking valve | SUBPAC::LANDRY | | Sun Nov 17 1996 20:14 | 31 |
|
Oh boy, what an afternoon with this baby........
The system somehow broke a wafer in the Unload Module, more specifically,
in the water track of elevator #1. It's not conclusive of how it actually
occured, but a computer malfunction is suspected. The system didn't get
any alarms when the breakage happened. The Opts tech stopped the system
when he noticed the fragments. Something else strange about this problem
was that there were several wafers stacked on top of each other on the
pedestals of the scrub station. The Unload flipper just kept stacking them
up. Also, one of the scrubber brushes ended up in the water track. A total
mess to say the least.
After cleaning up the debris and installing new brushes, we attempted to
run a cassette using the NO_TOUCH recipe. The system immediately came up
with a Main Vacuum Low alarm. We couldn't clear it. Checked the gauge in
the pneumatics cabinet, whoa, there was water in the cabinet. The water
was passing through the electronic/pneumatic solenoids. We were able to
trace the source to an internally leaking PVC valve in the fluids cabinet.
The water is backing up through the incoming air supply to the valve, which
is terminated in the pneumatics cabinet. The valve is for the Polish Tub
Rinse. We don't have one in stock. Rich Barrett was to call back to see
if we located one. If not, he will have one sent out ASAP.
Also, that the water has made it to the solenoid block, water has been sent
to various parts of the system. Those lines may need to be blown out prior
to moving on.
We did run wafers to check on the unload sequence. All looks fine.
A shift
|
| 17.459 | running | STRATA::RIDLON | Eliminate the oblivious | Mon Nov 18 1996 06:14 | 10 |
| We removed the air line quick disconnect from the process tub valve and
installed a barbed fitting and then ran a hose from it to the drain. We
then manually opened the valve so that the polish tub is constantly
rinsing. We then disconnected all the air lines at specific functions to
bleed out any water that might still be in the manifold block. ONce we
gave it back to production it alarmed for no cassette present in elev
1. Found the right sensor needed to be adjusted. Its been running fine
now for about 8 hours.
B-shift
|
| 17.460 | Carrier 2 Rotation errors | FABSIX::R_POIRIER | | Tue Nov 19 1996 06:28 | 10 |
|
We had problems with Carrier 2 rotation errors. It happened
twice. We checked the Infranor voltage level and adjusted it
from 10.05 volts to 13.0 volts. Problem hasn't happened since.
B shift
|
| 17.461 | rebuilding valve | SUBPAC::CMP | | Tue Nov 19 1996 10:06 | 6 |
| Over the weekend there was a problem with the polish tub rinse valve
leaking back into the air line. Rebuilt the valve with new O rings
and there are no more leaks.
A recommendation is to rebuild this type of valve at the first sign of
wear as O rings are really really cheap.
|
| 17.462 | pad arm fix | SUBPAC::CMP | | Tue Nov 19 1996 19:00 | 3 |
| Today the pad arm would not oscilate. Found the infranor was bad,
replaced and also readjusted the infranor for rotation on head 2
back to 10V.
|
| 17.463 | test motor installed/ deinstalled | LUDWIG::FINN | | Wed Nov 20 1996 19:36 | 11 |
|
New motor was obtained by speedfam which had had its resolver adjusted
by 30' to help our wafer stalling problem. It was installed but made
significant noise. It was then deinstalled and the original motor was
installed.
Test wafers were successfully run and system returned to manuf.
a shift
|
| 17.464 | Head #2 stall | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Nov 21 1996 05:43 | 18 |
|
Tool errored for head #2 not rotating in segment #5.
Tool would not recover so we had to reboot.
D shift
\/ \/
(__)
(@@)
/_______\/
* | || \ Brian's deer that got away....
||----||
~~ ~~
|
| 17.465 | System Paused in Seg #1 / Broken Wafers. | ASDG::POIRIER | | Thu Nov 21 1996 19:28 | 9 |
|
Broken Wafers on Heads 3 &4:
---------------------------
The system broke 2 wafers during seg #5 today. The system was paused by
the operator in seg #1 and then restarted. The tool was cleaned and
the pad & carriers were replaced. We've had no further problems.
C Shift.
|
| 17.466 | Particles | FABSIX::J_SWENSON | | Sat Nov 23 1996 18:22 | 11 |
| - Tool failed for particles
- Cleaned tub,carriers and conditioning ring.
- Mqc's ran again and failed for particles.
- PAL filter changed over to Osmonic's particles passed and system
returned for manufacturing.
C-Shift
|
| 17.467 | crash, head 3 the culprit | SUBPAC::LANDRY | | Mon Nov 25 1996 22:04 | 16 |
| The system crashed a wafer (actually, 2) today. The system was running
the IO_MQC recipe. Right before it crashed, the system alarmed for "No
rotation on head 3". Cleaned up the small mess, changed the pad and
carrier 2 only. Checked the carrier the wafer spit out of for damage,
proper extention ring height, etc. Everything looked fine. The
extention ring measured in at 8.0, with zero damage to the ring. So we
put the carrier back on the system (same head, #3), ran breakins and
MQC's. All is well. The crash form holds all the vitals, should you
need additional info.
If the system faults for carrier 3 rotation, please take the head off
line and enter a warning status for said problem. Re-qualification of
the system will be necessary as uniformity will surely change. MQC's
will be a must. This request comes from Tim D.
A shift
|
| 17.468 | index infranor died | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Nov 26 1996 04:40 | 14 |
| While unloading the last 5 wafers from a touch up lot the scrubber
didn't time out and go back home (or in other words, it kept on
scrubbing and scrubbing and scrubbing and scrubbing and...you get the
picture). I was able to stop the process and enter manual mode so the
cpu wasn't locked up. I was also able to stop the scrubber in manual
mode, hmmmmm. Tried to rotate the index table and it didn't move, ah
haaa. Found that the infranor had died. Replaced and everything worked
fine. Theorize that the cpu was waiting for the index table to rotate
so as to continue unloading. When it didn't the scrubber kept going and
going and going and.....you get the picture. Like I said...it's only a
theory.
B-shift
|
| 17.469 | another test motor | FABSIX::B_FINN | | Tue Nov 26 1996 19:23 | 16 |
|
FS installed modified rotation motor on carrier #3. It failed
(sounded like the last test motor, ie golf balls in a garbage disposal).
Original motor was reinstall aok.
Contingency plan per Tim:
"
IF HEAD-3 HAS ANY INSTANCES OF ROTATION STALLING, TAKE
HEAD-3 OFF LINE AND RE-MQC WITH 4 HEADS AND RELEASE TO MFG.
WE DO NOT WANT TO RISK BREAKING PRODUCT WAFERS.
"
A shift
|
| 17.470 | Particles | FABSIX::J_SWENSON | | Fri Nov 29 1996 19:10 | 27 |
| High particles -
system failed twice for high particles.
Tool was cleaned after the first failure, carriers also.
Cmp.B2 and cmp.B3 are running well below spec
B1 B2 B3
head
1 341-1873-0 142-352-0 143-641-0
2 336-1768-0 111-369-0 172-725-0
3 342 1345-0 86-268-3.0 212-785-0
4 330-1788-0 57-192-0 185-881-0
5 392-1683-0 42-179-3.0 240-618-0
Only 6 Speedfam carriers left and no plates in-house
Will place call to Tim for action plan
C-Shift
|
| 17.471 | ex | FABSIX::J_SWENSON | | Fri Nov 29 1996 19:39 | 20 |
| Action plan for B1 after talking with Tim.
- while running wafers, time how long the water is on in segment 6
(should be 2-3 seconds at the end of the segment, no more)
- clean the index table and the unload tracks with peroxide
- Do not use fresh carriers from the carrier rebuild room. (6 left)
(no plates)
- Perform clean with peroxide on unload elevators also.
- as a last resort, put tool on barrel to isolate house system.
This is a long shot since B2 and B3 are so clean.
C-shift
|
| 17.472 | Particles... begone! | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Nov 30 1996 03:17 | 19 |
|
The tool was down at the beginning of the shift for
particles. Before the action plan was implemented, it
was decided that another boat of 25 wafers were run with
(5) more particles wafers as well. The tool passed
particles after they were run.
D shift
\/ \/
(__)
(@@)
/_______\/
* | || \ Brian's deer that got away....
||----||
~~ ~~
|
| 17.473 | tool lockup | SUBPAC::LANDRY | | Mon Dec 02 1996 19:37 | 18 |
| Couple of problems back to back today.........
Whilst the tool was running, the system stopped processing due to a
Process Door open fault. The doors were closed and the system running
resumed. Unfortunetly, the tool timing sequence messed up and the run
kept on polishing. Needless to say, the five wafers were toasted. The
"stop run" button would not actuate to halt processing. Finally, the
system decided to stop. We then tried to re-sart the system, but a
multitude of things were not going right. The heads never dropped,
although they oscillated. The carriers didn't rotate as well. The
flippers halted operation. We couldn't end or stop the run.
Therefore, a soft-boot was performed. After initialization, the tool
was put to the DOS prompt and a a hard power down was performed. The
system was then repowered up and initialization was performed. All
functions were working properly. Ran a quick test run to verify tool
performance, all is well.
A shift
|
| 17.474 | Carrier # 3 dropping wafers | FABSIX::R_POIRIER | | Tue Dec 03 1996 07:23 | 5 |
|
Replaced Carrier # 3. It was dropping wafers in the
clean tub after polishing. Ran boat of dummies and
had no more occurances.
|
| 17.475 | wafer loss/inverter error | FABSIX::B_FINN | | Tue Dec 03 1996 19:16 | 12 |
|
B1 failed in 1st_pmd run with 5 monitors for carrier rotation
(2+3) and inverter error. Wafer lost board showed a fault for wafer
loss, but no wafers were out of the carriers. Carrier one wafer loss
sensor had samll droplets of water splashed around it on the bottom of
multihead, and was very dim. Wiped up water and adjusted carrier one's
wafer detect sensor per the procedure and tested the other four sensors.
Ran test wafers. GOOD TO GO!
A Shift
|
| 17.476 | sensory perception | FABSIX::M_RIDLON | Eliminate the oblivious | Wed Dec 04 1996 03:37 | 10 |
| Alarmed for process door open during process. Operator checked doors
and found them closed and restarted to continue processing. The tool
then alarmed for heads not rotating in segment 5. Thats when we saw the
Bat signal. We checked all the doors and found that the right side
index table process door sensor wasn't seeing the door. Turned out to
be just a loose crimp on one of the pins. Corrected and resumed
polishing with out a hitch.
B-shift
|
| 17.477 | Wafer detect sensors adjusted | FABSIX::R_GEE | | Wed Dec 04 1996 19:05 | 7 |
| Wafer detection tripped stopping the table and carrier
rotation, no wafers had slipped out. Calibrated all 5 wafer
detection sensors, ran 50 wafers, all set.
A shift
|
| 17.478 | Head #3 taken off line until further notice | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Dec 07 1996 02:04 | 14 |
|
The tool alarmed for Head #2 and #3 not rotating in
segment #4. I assuming it was caused by #3 but no
one saw it actually happen. I booted back-up fine
with no rotation errors. When OPS went to run the next
(5), head #3 stalled out in seg. #4 again. Per E.E.,
(T. Dyer), head #3 has been taken off line and will need
MQC's checked before they can run product. I'm leaving
the carrier on the tool to protect debris from getting
up inside the spindle or stuff coming out...
D shift, oh, it's just me tonight!
|
| 17.479 | motor fix for stalling | SUBPAC::CMP | | Thu Dec 12 1996 08:29 | 6 |
| Yesterday we replaced the motor on head 3, the motor originaly stalled
and it was suggested from Phx. that we adjust the resolver to match the
Infranor. After the adjustment the motor was checked and it worked fine
( no current spikes or stalls) a small vibration was noticed and a
software correction was made that stopped the noise(the software
was adjusted to stop an over driving situation to the motor).
|
| 17.480 | RESET FILE PARAMETERS | SUBPAC::CMP | | Thu Dec 12 1996 19:17 | 6 |
| NOTICED THAT THE HEAD STALLING WAS HAPPENING MORE FREQUENTLY TODAY,
THIS WAS DUE TO THE FACT THAT YESTERDAY WE SET THE CLOSED LOOP AND
INTERVALE TIMER BACK TO 36 AFTER THE MOTOR WAS REPAIRED. THE REAL
REASON THE NUMBERS WERE CHANGED IN THE FIRST PLACE WAS THE SPIKING
THAT WE SAW WITH 493C SOFTWARE AS WELL AS THE MOTOR STALLING.
NOW THE NUMBERS ARE BACK TO 75.
|
| 17.481 | Bad uniformity | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 13 1996 06:56 | 6 |
|
A pad change was needed due to failing MQC's
for bad uniformity. The pad replaced and the tool
passed MQC's.
D shift
|
| 17.482 | Inverter Comm Errors - Suspect Wafer Loss Board | ASDG::POIRIER | | Sat Dec 14 1996 19:47 | 22 |
|
Inverter Communication Errors:
-----------------------------
The system errored for Inverter Comm this afternoon. The LED was lit
for carrier #1 on the wafer loss detection board. The wafer loss sensor
for carrier #1 was adjusted and a sucessful 25 wafer verification run
was completed. The tool was then put Up and Idle.
On the next run, the inverter communication error returned. Again, the
LED for carrier #1 on the wafer loss detection board was lit. The
detection board was jumped out and the system did not fail for the
inverter. Every time the detection board was activated, the system
would shorty thereafter fail for inverter comm.
Although there is no physical evidence of failure on the wafer loss
detection board, we're of the opinion that something is wrong with it.
(The last time this board failed on B2,there were scorched components)
We're passing on to B Shift for replacement of the Wafer Loss Detection
Board.
C Shift.
|
| 17.483 | wafer loss pcb | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Dec 15 1996 20:25 | 5 |
| Replaced the wafer loss board. Recalibrated head 1's wafer loss
sensor. Ran 15 wafer verification (room a little low on wafers).
B-shift
|
| 17.484 | wafer loss info | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Dec 15 1996 21:07 | 9 |
| Troubleshot wafer loss board replaced last night. Found that the board
is faulty. U4 pin 3 should in a hi state with pins 1 and 2 at a low
state (nand gate) in order for this board to output the correct
signals. U4 pins 3 is at -0.46 volts while 1 and 2 are at .166 volts.
Obviously this gate is malfunctioning. These boards are failing at a
higher than acceptable rate, in my opinion.
B-shift
|
| 17.485 | new proximity sensor | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Dec 16 1996 23:59 | 6 |
| Replaced the proximity sensor for the right front process door. The
led was burnt out and this is the one we had problems with last week
as well. Tested fine.
B-shift
|
| 17.486 | readjust voltage | SUBPAC::CMP | | Wed Dec 18 1996 15:01 | 4 |
| Lowered the voltage on the rotation Infranors to 10.5V and ran 25
wafers. Set the down force to 400 pounds and ran a 30 second process
on no crash. No stalls noticed and the down force stayed within a good
limit.
|
| 17.487 | Heads stall - not machine issue | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Dec 19 1996 05:09 | 21 |
|
Head #2 stopped rotating at touchdown. Tool alarmed
and halted. Head #2 voltage was sitting at 10.5V. Re-set
tool and started over. It failed two more times on #4 and
then a third time on head #5. The voltages were tweaked
back up to 12V. The tool failed again on head #2. Spoke
with Rich on the phone. Checked ramp time... it was ok.
On thing noted, it was only product wafers it was screwing
up on. On the third run, 5 send-aheads were run under the
same recipe and they ran fine. Ran the product again and it
stalled on head #2. We then ran 25 wafers under the same
recipe without any problems. We then ran (5) wafers from
an ILD3 lot using the same recipe and it worked. The
original lot was put back on the tool and it failed again.
The ILD3 lot continued to run fine on the tool with the
voltages back to 10.5V and the ILD1 lot was put on CMP.B3
and that ran fine. I know it is unlikely but this happened
to a lot about a year ago....
D shift
|
| 17.488 | Head stalls... carriers guilty as charged | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 20 1996 06:18 | 35 |
|
Head #2 stopped rotating 10 seconds into seg. #4. Tool alarmed
and halted. Head #2 voltage was sitting at 12.5V. Re-set
tool and started over. It failed one more time on #2.
A ILD1 run went first then failed on an ILD2 lot. I can't
explain.. yesterday seemed so understandable.. The downforce
was checked on all (5) heads and they were in spec. A pad change
was done after that then we turned it back to OPS. Tool went
through break-in without any stalls... Tool failed MQC's and
a pad and carrier change was prompted. The exposure was checked
and (4) out of the (5) carriers were out of spec - (2) were at
-5, (2) at -6 and one at 7.5. It makes perfect sense now why
certain lots were able to run on the tool and some weren't.
The ILD1 lot that was on the tool failing yesterday was obviously
one the thinner side and the white ring was touching the pad.
The ILD3 lot was thicker and the rings weren't touching. On a
side note, the slurry was checked and one came in a 450ml and one
a 500 which were both suppose to run at 550ml/mn. The pad was
replaced with a expiration date of 1/97 as compared to the one on
the tool which was 9/96. The carriers were replaced and is now
conditioning and is ready for break-ins again.
HEAD - PRE - POST
=================
1 375 377
=================
2 384 377
=================
3 374 377
=================
4 382 377
=================
5 372 377
=================
D shift
|
| 17.489 | | FABSIX::B_WESTPHAL | | Sat Dec 21 1996 19:45 | 14 |
|
CMP.B1 - Down for wafer crash. A wafer came out of head #2 and crashed head
#1 6 seconds into segment 7. The requested down force was 250lbs but
the heads were ranging from 357 - 388. The tools uniformity was out
and removal rates were barely in. Cleaned up the process area and
conditioner. Changed the pad (135 wafers) with a lot# not used before
and carrier #1. As requested by EEG the "closed loop interval" and
"closed loop delay" variables in the CDATA.CMP file were changed from
100 for each to 75 for each. This was tested and then the variables
were changed 75 and 36 respectively and the test was repeated. The 75
and 75 arrangement seemed to work best so the variables were changed
back (75&75) and a 50 wafer marathon was run. Pad was broke in and
the tool sets in wet idle needing only MQCs.
|
| 17.490 | head-2 stall | LUDWIG::TDYER | | Mon Dec 23 1996 15:55 | 6 |
|
Head-2 stalled at touch down on recipe tup_a (377lbs of DF). Pleanty of
slurry, no vibrations, screen displayed 398lbs on head-2. Re-started
with out error. Long term fix is being worked with Phoenix.
TD
|
| 17.491 | multiple problems | SUBPAC::LANDRY | | Tue Dec 24 1996 13:33 | 38 |
| Lots of fun with this baby today.......
Right after the morning passdown, we were beeped for a major crisis.
Seems the previous shift started the "rocket" lot on this tool. Just
as A shift was coming in, the tool came up with a "process door open"
fault. Opts tried stopping the processing, but the touchscreen was
locked up. Therefore, the EMO switch was used to halt processing. NO
wafers were over polished and the intergrity of the rocket lot was in
deed intact. Nice save Lads!
Well, the doors were checked. One of the process doors was on the edge
of making/breaking the sensor. This was noticed after rebooting the
system. We checked the Bimba air cylinders to see if they were locking
the doors in-place. Low and behold, nary a one was working. All four
door Bimba's were jammed closed. Found all to have bent shafts. There
were only two in stock, so thats all that was changed out. We changed
out the two bimba's on the left side of the system (Inverter cabinet side).
A note has been sen5t to the Speedfam reps to have several sent to us.
After resuming production, the tool ran fine for a few runs, then the
system halted running. It was in the middle of unloading the Index Table,
the fourth wafer would have been next. No alarms were heard, nor were any
error codes visible on the screen. So why did it stop??? Pressed the stop
button, then pressed the start button to resume. Still no action. Hit the
stop button again, exited the processing screen, re-entered the processing
screen, then tried resumming the run. The alarm went off for "one or more
cups not down". Checked all cup I/O's and found the Unload cup I/O not
illuminated. Checked the lift cylinder/pedistal/sensor to find that the
pedistal was not retracting enough to make the sensor. The retaining nut
on the pedistal shaft had loosened up, the pedistal backed out a few threads
with the retaining nut rotating down each time. The nut was actually pre-
venting the the cylinder to retract properly. We re-set-up the height/sensor
so that it would function properly. We then secured the nut (I've been told
it's best to keep your nuts secured). Of course, the unload cup height needed
adjusting AND the unload pick up spot re-calibrated. We performed said func-
tions. Tested the results........smooth, slick.
A Shift
|
| 17.492 | Christmas crash. | FABSIX::L_SHKOLNIKOV | | Thu Dec 26 1996 07:30 | 11 |
|
The system crashed a wafer (actually, 2) tonight. The system was running
the IO_MQC recipe. The wafer came out of carr.#5 and took #4. Wafer detect
system didn't see the wafer however right after it crashed, the system
alarmed for "No rotation on head 3". Cleaned up the mess, changed the pad
and carriers 4&5.Checked the carrier #5 to load cup alignment- slightly
off (actually 256 steps out). All is well. The crash form holds all the
vitals, should you need additional info. Just completed weekly pm. and
released tool for manufacturing.
Leon.
|
| 17.493 | Mapper #2 failure | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 27 1996 04:41 | 15 |
|
Cassette #2 mapper failed to map cassette. Hard booting
the Kinsington didn't correct it. A softboot wouldn't work
either so a hard boot was needed to bring it back to life.
According to all the shutdown/start-up in the life and
days of CMP.B1, the mapped/robot association has had problems
within 24 hrs or a startup. I don't want to sound superstitious
or anything but should we make sure a controller is in stock
for next week?
D shift
|
| 17.494 | Head to Head Removal Rate & Uniformity Problems | ASDG::POIRIER | | Fri Dec 27 1996 14:59 | 48 |
|
Head to Head Removal Rate & Uniformity Out Of Spec:
---------------------------------------------------
The Electo Pnumatic regulator calibration was checked, results were as
follows: (@4095)
Before After
------ ------
#1) 59.8 60.0
#2) 59.9 60.0
#3) 60.4 60.0
#4) 60.3 60.0
#5) 60.2 60.0
These results were close to nominal. The Spindle Down Force was then
checked and the results were as follows:
Before After
------ -----
Head #1) 376.4 n/a
#2) 378.7 n/a
#3) 373.5 377.9
#4) 372.5 376.8
#5) 378.2 n/a
Again, these results were close to nominal. Our attention was then
directed towards the pad. The pad peeled off the table with very
little force. It had only 295 wafers run on it. The pad was replaced
and MQC's are now being run.
FYI: These head to head removal rate & uniformity problems occured
yesterday on B3. In each case the pad had run approx 300
wafers. (Possible Pad Problem?)
C Shift.
|
| 17.495 | Head to Head Removal Rates Still Out Of Spec | ASDG::POIRIER | | Fri Dec 27 1996 19:42 | 29 |
|
Head to Head Removal Rate Still Out Of Spec:
-------------------------------------------
Action Thus Far:
1) EP Regulators Calibrated
2) Down Force Calibrated
3) Pad Changed
Status changing from VERIFY to DOWN.
---------------------------------------------------------------------
Suggestions:
-----------
a) Check the Pad Conditioner down force calibration.
b) Try a different lot # Pad.
FYI: The removal rates on all 3 Speedfams have dropped slightly from
the normal 3000 to 3200 A range. We've been seeing 2700 to 2900
A today.
FYI: The house slurry sytem pressure was up to this morning. The filter
was removed and replaced with an osmonics type filter.
C Shift.
|
| 17.496 | Pad change - uniformity/R.R. | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Dec 28 1996 07:09 | 10 |
|
Pad change due to removal rate issues. A pad
change was done but head #4 failed for uniformity
which was ~18% and the others were ok. After the
carrier was replaced, the tool came in after a couple
MQC runs.
D shift
|
| 17.497 | Neumatic adjustment, Semi-annual PM | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 02 1997 08:23 | 13 |
|
B1 is still down. It needs slurry flow cal. and (4) lubrication
items on the semi-annual.
On the new PM spec, there were two items that were different
between the tools. One was Carrier Head balance which was 3.2
which is now 6psi and Scrubber down was 80 psi and it is 20 psi
now. The downforce was checked and was out as a result of the
change and was brought back into spec. The scrubber was tested
ok a well.
D shift
|
| 17.498 | High Particles / Cleaned up ok | ASDG::POIRIER | | Thu Jan 02 1997 19:36 | 13 |
|
High Particles:
--------------
The tool failed MQC's for high particles this morning. The index table
& Cups were wiped with alcohol and rinsed with DI. The carriers were
also scrubbed and rinsed. The next MQC was within spec (on the high
side).
FYI: B2 & B3 MQC'ed fine for particles. The House Slurry system appears
to be OK.
C Shift.
|
| 17.499 | Index table INFRANOR changed | FABSIX::B_WESTPHAL | | Thu Jan 02 1997 19:53 | 10 |
| CMP.B1 - Down for wafers not being picked up from the index table. The carrier-
to-cup alignments were checked and all were found to be out in the
same manner. They were out CCW so far that the carrier would not even
fit into the inner part of the cup. It was also noticed that the
index table was vibrating excessivly. The Index table INFRANOR was
swapped out and the voltage adjusted to 13.6v. The alignments were
done again and the shafts for load cup air cylinders were lightly
greased. Operations ran a boat of wafers (BREAKIN/MQCs) with no
further problems.
|
| 17.500 | oem vac filt | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Jan 05 1997 03:13 | 4 |
| Installed OEM vacuum filter and another gauge.
B-shift
|
| 17.501 | pad cond | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Jan 06 1997 06:39 | 5 |
| Observed that the pad conditioner is not centered on the pad while
conditioning. Could not address as the tool was running and would be
until shift change.
B-shift
|
| 17.502 | Conditioner recipe #1 ID/OD changed | FABSIX::R_GEE | | Mon Jan 06 1997 18:43 | 6 |
| Changed the ID/OD for pad conditioner recipe #1 from 9.3 to 9.5
so the conditioning ring is centered on the pad during the
conditioning cycle.
A shift
|
| 17.503 | pump lines replaced | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Jan 07 1997 06:23 | 6 |
| Tool alarmed for carriers not rotating in segement 10 of a TUP375 run.
Found that the line in slurry pump1 had failed. Replaced both pump
lines and continued the run.
B-shift
|
| 17.504 | index table vibrations | SUBPAC::CMP | | Tue Jan 07 1997 16:17 | 4 |
| Looked into trouble with index table vibrations.
Checked for a binding and found nothing really bad, but tried another
infranor and found that it cured the problem. It appears the infranor
that was replaced the other day was marginal in it's operation.
|
| 17.505 | particles... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 09 1997 06:57 | 14 |
|
Tool failed for particles after pad change and
weekly PM. The tool was cleaned... again... and
was re-run and failed for particles.. again...
The tool was cleaned once again along with another
pad change. It was noticed that the conditioner wasn't
catching all of the pad so the O.D. position was changed
from 9.2" to 9.5".
D shift
|
| 17.506 | Particle Problem / Slurry System Flushed & Filter Changed | ASDG::POIRIER | | Thu Jan 09 1997 19:10 | 19 |
|
Particle Problem:
----------------
MQC's failed for particles shortly after shift change this morning.
Particles on B2 & B3 were running close to the UCL. The house slurry
system was flushed with D.I. water and the house filter was changed.
Slurry flowed thru the new filter for one hour before the system was
returned to manufacturing.
The system passed MQC's for particles after the flush and filter change
but they were higher than expected.
Total Large
----- -----
700 -1300 200 - 250
C Shift.
|
| 17.507 | prealigner | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Jan 14 1997 06:22 | 7 |
| Load flipper was occasionally hitting the wafer in the prealigner. We
ovserved that the wafer, when aligned, wasn't centered between the
forks of the flipper. We moved the base of the aligner to center the
wafer. Tool loaded fine after.
B-shift
|
| 17.508 | Conditioner Wheel Replaced | ASDG::POIRIER | | Thu Jan 16 1997 19:07 | 15 |
|
Conditioning Wheel Changed:
--------------------------
The Conditioning Wheel was changed on the tool Today. The new diamond
wheel I.D.# is 196. The total wafer count on the tool at change over
was 109,501.
FYI: Tim D. edited the maint counter screen. There is now a condition-
ing cycle counter. The counter adds 5 counts for each cycle. Since
the conditioner sweeps once per cycle, remember to divide by 5
to get the correct count.
C Shift.
|
| 17.509 | wafer loss errors | SUBPAC::CMP | | Mon Jan 20 1997 12:30 | 7 |
| Arrived to find the interlock intermitently tripping causing errors.
Checked the wafer loss circuit and found that # 3 was tripping in
segment 5, upon further checking we found the pad was worn to the
point that the dark of the metal table was bleeding through causing the
sensor to trip the wafer loss detect. When measured the pad was only
at 52 which is well below the point of replacement. The pad was
replaced and the tool brought back up.
|
| 17.510 | Broken Wafers In Unload Elevator Tank | ASDG::POIRIER | | Wed Jan 22 1997 19:38 | 11 |
|
Broken Wafers In Unload Elevator Tank:
-------------------------------------
A slight mishap occured at shift change tonight. Two wafers slid out of
a cassette as it was being removed from the unload elevator. The wafers
slid partially into the water track as the elevator was homing. There
are broken pieces of wafer in the bottom of the tank. Passing on to
"D" shift for clean up.
C Shift.
|
| 17.511 | Elevator crash | FABSIX::O_WHITFORD | Lead, follow or get out of the way.... | Wed Jan 22 1997 21:25 | 7 |
| Drained elevator #1 tank and cleaned up wafer residue. Flushed tank
(fill/drain) several times and then filled and observed water level to
make sure the dump valve was not leaking due to chunks getting past
the seive and down the drainline. Looks to be holding o.k., returned
control back to ops.
Dave W.
|
| 17.512 | homed load module | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Jan 28 1997 07:00 | 5 |
| Tool would not map cassette b. It was obvious that tilt B had lost hits
home. Homed the load module and mapper worked fine on both A and B.
B-SHIFT
|
| 17.513 | Unload Lift Cylinder Sensor Replaced / Cup #2 Sleeve Honed | ASDG::POIRIER | | Thu Jan 30 1997 19:11 | 24 |
|
Unload Lift Cylinder Sensor:
---------------------------
System errored for "one or more cups not down". It appears that the
table rotated with a cup not completely down. There was a mechanical
collision between load cup #2 and the unload lift cylinder.
The sensor on the unload lift cylinder was replaced.
C Shift.
Load Cup #2:
-----------
Cup #2 failed to reach its down position tonight. Speedfam honed the
sleeve for cup #2 in the index table. Verification run in progress.
C Shift.
|
| 17.514 | sticking cup | SUBPAC::CMP | | Thu Jan 30 1997 19:12 | 3 |
| The tool had a sticking unload cup (2), found the shaft was a little
tight in the table. Honed the opening to allow the cup to move freely.
|
| 17.515 | Load station problems | FABSIX::O_WHITFORD | Lead, follow or step aside. | Thu Jan 30 1997 22:36 | 15 |
| Load station problems.
1) Operator reported that the load robot wasn't placing wafer in
pre-aligner properly. Described as it wasn't actually setting the wafer
into the pre-aligner, it was being "raked" off the robot arm.
2) When the load flipper came to the pre-aligner, the fingers closed
over top of the wafer.
We exercised the load sequence after powering down the tool,
leaving it set and restoring power. The exercise sequence went fine
with no evidence of either problem descibed above.
|
| 17.516 | unload pedistal bend_age | SUBPAC::LANDRY | | Sun Feb 02 1997 20:00 | 33 |
| The system experienced a crash today: "Load Cup 4 vs Unload lift pedistal"
Whilst unloading wafers, somehow, the lift pedistal didn't retract enough
to allow the next cup to safetly pass by it. This caused the bottom of
Load Cup 4 to severly bend the lift pedistal of the unload cup. No alarms
were experienced with this mishap. The Opt Tech noticed that the system
had ceased operating and was sitting stagnant. Upon investigating the
reason why, he found that the cup currently positioned at the unload
position was angled badly. Our initial checks found that the unload
pedistal was bent over, wedging Load cup 4 and halting the Index Table.
The respective Infranor was fine and NO breakers were tripped. No alarms
or timeouts were prevalent.
We had to exit out to DOS and use the DCX commands to drive the table back
off of the cup. The cup was then removed and checked out. No apparent
damage was found. The respective hole for that cup was checked out as well.
Again, no apparent damage. The locating pin was present, so that rules out
the cup rotating as the cause. We then checked the lift cylinder/pedistal.
The pedistal portion of the assembly was bent over about 60 degrees. It
was removed. The lift cylinder didn't appear to be damaged, as it's up /
down movement was smooth and consistant. We checked the sensor gapping;
it was found to be at .015". This was regapped .010" and a new pedistal
was installed. We verified that the sensor on/off LED performance was
working as should. Height alignment was performed at this time. Also,
unload flipper at unload cup calibration was performed.
As for unload cup 4's performance after the crash.....we checked it out at
the load cup station and the Index Table home position. The cup was lifting
smoothly and consistantly. It appears to be fine as wafers are loading
quite well at both cup 1 position and head 4 position. We watched it's
performance for a couple of cassette loads of wafers. All is well.
A shift
|
| 17.517 | Load cup 5 sensor adjust | FABSIX::B_FINN | | Sun Feb 09 1997 20:08 | 9 |
|
Errored for one or more cups not down. Found Load Cup 5 I/O 96
not made. Found sensor touching mushroom. Adjusted to an 10 mils and
sensor did not see mushroom. Adjusted gap to 8 mils, aok. Ran up and down
in manual mode and cup sensor performed aok. Seemed more
sensitive that usual during the position adjustment.
A Shift
|
| 17.518 | robot adjustment | SUBPAC::CMP | | Tue Feb 11 1997 07:30 | 2 |
| Made a slight adjustment to the robot positioning to the aligner. It
was off slightly which could have caused a problem.
|
| 17.519 | lift assy repair for 2-3-97 | SUBPAC::CMP | | Mon Feb 17 1997 11:57 | 8 |
| Found the tool down for cups not down. Found load cup 4 had crashed
into the lift assy. causing the mushroom to bend over and damage the
sensor assy. Replaced the air cylinder, sensor and mushroom then set
the sensor gap. During the repair we discovered the springs on the
bottom of the cup would not allow the center to fully reseat and the
lift plate on the bottom hit the mushroom causing the damage. We also
replaced the springs and plate due to the damage. Returned tool to
operation.
|
| 17.520 | low slurry flow | FABSIX::R_GEE | | Mon Feb 17 1997 19:33 | 8 |
| Errored for low slurry flow. Found air in the slurry lines.
Called and paged Ashland chemical they said they did change filters
without notifying use, they were told that we must be notified.
Manually pumped slurry and restarted the tool.
A shift
|
| 17.521 | crash, ? why | SUBPAC::CMP | | Wed Feb 19 1997 17:02 | 4 |
| Cleaned up the crash that occured during a product run. The wafer in
head 5 turned to very very small pieces and ruined the rest of the
wafers. The cause is unknown and was discovered in step 11. Cleaned
the tool and returned to production.
|
| 17.522 | Wafer breakage - no product | FABSIX::B_JUBINVILLE | | Fri Feb 21 1997 08:33 | 13 |
|
Tool crashed... It looks like it came out of head #4 and
took out #5. It was discovered that the wafer detect system
was physically jumped out so that's why the tool kept running.
Without the detection system on line, the tool will keep
running until it lifts off the table from which it will check
for vacuum. It didn't have good vacuum, thus it stopped
at seg.#11 as well as it did two days ago. Initial clean-up
was started and the tool has been turned over to C shift for
alignments and possible downforce.
D shift and Brad
|
| 17.523 | Replaced Slurry Pump #2 Motor/ Calibrated Down Force | ASDG::POIRIER | | Fri Feb 21 1997 19:48 | 15 |
|
CMP.B1 - Down for wafer crash. Continued clean up where D-shift left off.
Cleaned index table and cups. Checked the down force and carrier to
cup alignments. Made corrections where ever needed. Conditioned pad 3
times and returned it to production.
Down force using point to point method
found at adjusted to
347 354.2
370 353.4
357 354.7
349 353.8
368 354.1
|
| 17.524 | Inverter errors | FABSIX::R_POIRIER | | Wed Feb 26 1997 07:18 | 16 |
|
During the 3rd run of a product lot the tool stopped in
segment # 1 for an "Inverter Error". The tool also shut
itself off. We removed all wafers and re-homed the tool.
We then ran a boat of dummy wafers and during the 4th
run the same error occured. Again in segment # 1.
I thought the pad looked a little thin, it had 1300
wafers on it, and I thought it might be the same problem
we had on B2 a few months ago where the wafer detect was
causing the errors, so I changed the pad and ran some
break-in wafers. Mitch also adjusted the wafer detects.
Tool is running ok.
B Shift
|
| 17.525 | computer lock up X 2 | SUBPAC::LANDRY | | Sun Mar 02 1997 19:33 | 16 |
| The tool locked up twice today for different problems......
1) The first lockup happened mid morning. Seems the Multihead was
stalling during it's travel. It required a softboot to recover.
2) The second lockup happened late in the shift. The condition arm
froze above the polish table. No "red lined" alarms appeared on the
screen, but the audible alarm was sounding. Tried a quick softboot,
but no luck, as the polish table would not stop rotating. So, a
hardboot was then performed, but we came upon a bit of trouble when
head # 3 would not home. Found that the overtravel switch had been
made. So, rebooted, skipped over initialization, went to DOS, executed
the DCX command and drove the motor off of the switch. Rebooted again
and accomplished a successfull initialization of the system.
A shift
|
| 17.526 | LOADING PROBLEMS | FABSIX::B_WESTPHAL | | Thu Mar 06 1997 20:52 | 14 |
|
CMP.B1 - Down for loading problems. The tool did not pick up the wafers
properly from cups #2 & #3 after it was returned to production after
the monthly pm. Checked the carrier to cup alignments (all carriers
out) and the indexer needed to be moved clockwise 3500 counts. The
proper adjustments were made and saved. When the tool was homed and
the alignments verified the index table needed to be moved @3500
counts counterclockwise again. We assumed that the INFRANOR was bad.
So the same was swapped and the alignments done again with the same
result as before. Speedfam figured out that when we were rehoming w/o
exiting the screen it goes back to the previous home position (as a
safety feature). The Tool was returned to production for Breakins &
MQCs and is now having particle problems.
|
| 17.527 | elevator #1 | STRATA::FINN | | Mon Mar 10 1997 17:59 | 25 |
|
System halted during process with arms "in" at secondary clean station.
Conditioner disk was over polish table. VIA the opto 22 i/o's - the
system knew that the conditioner disk was up, but did not have
indication of its lateral location. All arms showed they were at
home position. Table was running. Error read "carriers not arriving at
load".
Aborted run. Upon bootup, Carrier 3 did not home. Needed to reset DCX
board. Retrieved product wafers. Ran arms and pad conditioner and
watched sensor. No errors.
Operation said Elevator #1 had been cross slotting. Check alignment and
found elevator low. Verified with several carriers and it was
consistently low. Recalibrated Elevator #1 and checked with jig and
wafers @ top, middle, and bottom slots.
Ran 25 no_touch wafers. AOk
A shift / Kevin
|
| 17.528 | Load problem Carrier #2 | FABSIX::R_POIRIER | | Wed Mar 12 1997 05:20 | 17 |
|
During a touch-up run, tool errored for low vacuum.
Carrier #2 didn't load a wafer in the 3rd run. Couldn't
open doors without stopping process. Stopped process,
and checked for vacuum on Carrier #2 by placing the
wafer on the carrier. Vacuum was present. Unloaded all
wafers, and exercised load cups. Cup #2 showed no problems.
Carrier #2 looked ok. Ran some dummy wafers and Carrier #2
load each time with no problems. Returned tool to Operations.
Tool ran fine the rest of the nite.
B Shift
|
| 17.529 | Wafer left in load cup 2 | FABSIX::J_SWENSON | | Thu Mar 13 1997 19:39 | 14 |
| Wafer left in load cup 2
------------------------
- Found load cup 2 not functioning properly.
replaced springs.
- Vacuum low replaced vacuum pump and filter.
- Ran wafers to verify, NPF
- tool ran rest of shift without incident.
C-shift/Dave,Kevin,Rich
|
| 17.530 | wafer slide on CMP.B1 | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 16 1997 19:56 | 10 |
|
System slid a wafer out of carrier five and it hit carrier four. No
smashed wafers, but we did lose a piece of the retainer ring on carrier
five, and the ring on number four had some damage also. Replaced both
carriers and put system to verify for mqcs.
a-shift
p.s. - dummy wafer slid during segment five of a PMD touchup.
|
| 17.531 | Wafer detect/infranor issue | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed Mar 19 1997 06:32 | 16 |
|
While completing the weekly PM, it was suggested
last week that the wafer detect system be checked in a
different fashion. Actually go into MANUAL POLISH and
trip a detector to see if the table and heads would
actually stop. Well, I put a wafer under the detector
for head #3 and everything stopped... great... It works!
The tool then froze up. It eventually errored for an
Inverter Communication error. We a hit a button to continue
and it started homing the arms. Guess what... #3 wouldn't
home. The infranor was out... Tried resetting the tool
and it was dead... how 'bout that, two in one night!
D shift
|
| 17.532 | Pad and carriers replaced | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Mar 21 1997 06:07 | 12 |
|
Pad needed to be replaced due to the step height
and carrier #1, #2 and #3 were replaced for wafer count.
OPS had a tough time trying to bring in the uniformity.
We just replaced carrier #4 and we are waiting for the results.
D shift
|
| 17.533 | Carrier Rotation Failure | ASDG::POIRIER | | Sat Mar 22 1997 19:37 | 10 |
|
Carrier rotation failure:
------------------------
The system errored for carriers not rotating in segment 3 at 7:10 p.m.
All 5 carriers stopped rotating in seg 3. Infranors were had power and
no errors were observed. Unloaded wafers from hot lot and placed tool in
wet idle. Passing on to B Shift for repair.
C Shift.
|
| 17.534 | Carrier #2 rotation infanor | FABSIX::R_GEE | | Mon Mar 24 1997 14:11 | 7 |
| Errored for carrier #2 not rotating in segment #3 twice. Adjusted
the Infranor voltage from 12.54 to 13.0
A shift
|
| 17.535 | carriers not rotating | FABSIX::J_SADIN | Freedom isn't free. | Tue Mar 25 1997 14:50 | 11 |
|
Multiple carrier not rotating errors (head 2 and head 5). Tried
swapping the head 2 infranor earlier, but received bad infranor from
stock. Replaced old infranor and adjusted voltage to 14.70. Booted up
ok but began erroring again shortly after install. Error can be cleared
and the recipe restarted, so production is currently running like this
until the problem can be properly diagnosed. Error only seems to occur
on the first run of five wafers (ok after that).
a-shift
|
| 17.536 | Carrier #1 rotation error | FABSIX::R_POIRIER | | Wed Mar 26 1997 06:24 | 15 |
|
B1 errored for Carrier 1 not rotating during
segment 4. Carriers had not yet touched the
pad. Unable to recover using the Touchscreen.
Had to do a soft-boot. Unloaded all wafers
and increased Infranor for carrier #1 rotation
from 12.3v to 13.0v. Checked rotation and it
worked fine. Gave tool back at 1:30 am and it
has been running fine ever since.
B shift
|
| 17.537 | uniformity problem head 3 | FABSIX::J_SWENSON | | Thu Mar 27 1997 19:43 | 11 |
| Carrier 3 uniformity problem
----------------------------
- Carrier 3 failed twice @17% for uniformity
- Replaced carrier and uniformity came in @9.5%
- This happened last week also and the carrier was swapped out
and uniformity came in.
C-Shift
|
| 17.538 | Carrier #5 not being detected at polish table | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Mar 28 1997 05:19 | 21 |
|
Tool was running product when the OPS tech noticed
there was an error on the screen for "timeout for one
or more heads not down." The screen and process timer
were froze. The tool was running TUP_375 and was in
segment #3. For the fact that the tool was in touch-up,
all heads were down and rotating as well as the table
and most importantly, product... the tool was EMO'ed.
Upon restart, the tool came up fine and all of the
Carriers At Polish REED switches appeared to be reading
ok. We ran 15 VERIFY wafers and it was fine. The OPS
tech went to run a lot and it timeout again, waiting
for one or more heads not down but they were. The
inputs were quickly checked and head #5 INPUT wasn't
on. The tool was again EMO'ed. We ended up having to
adjust the positioning of the REED switch for CARRIER #5
AT POLISH TABLE. VERIFY wafers were run and the system
was running fine. Good to go......
D shift
|
| 17.539 | Rotation Errors | ASDG::POIRIER | | Fri Mar 28 1997 19:32 | 18 |
|
Head Rotation Failures:
-----------------------
While running TUP_A this morning, carrier #2 stopped rotating 4 seconds
into segment 4. The TUP_A & 1P_ILD3 recipes were deleted. New recipes
were copied and edited to make new versions. 55 wafers were then run on
the NEW TUP_A with no further problems.
After lunch, 20 wafers were run on IO_ILD1 & 20 Wafers on IO_ILD2 with
no problems. At 3:30 the system errored for for " all 5 carriers not
rotating" in segment #4 while running TUP_125. The product wafers were
removed from the tool and 50 test wafers were run using TUP_125.
There have been no rotation errors so far. Passing on to D Shift to
continue the evaluation.
C Shift.
|
| 17.540 | Tool verified | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat Mar 29 1997 03:50 | 7 |
|
Tool ran an additional 25 on top of C shifts 50 wafers
with no rotation errors. Tool was turned over to OPS and
passed MQC's.
D shift
|
| 17.541 | Carrier to Cup ALign/ Down Force Cal / Infranor Replacement | ASDG::POIRIER | | Thu Apr 03 1997 20:22 | 46 |
|
Wafers Sliding Out of Head #4:
-----------------------------
A wafer slid out of head #4 this morning and collided with the wafer in
head #3. Both product wafers were broken. The tool was in seg 3 of the
TUP_B recipe when the slide out occured.
This afternoon, a monitor wafer slid out of head #4 at touch down but
did not break. The system was running the IO_MQC recipe at the time.
The manufac tech running the tool told us that the head to head removal
rate was out of spec.
The following action was taken:
------------------------------
* The "carrier to cup" alignment was performed on all 5 heads.
Head #4 needed adjustment.
* The down force calibration was performed on all 5 heads.
We decided to run a 25 wafer verification run after the adjustments
were made. The tool vibrated on the 3rd set of 5 while running the
TUP_B recipe. The wafers were a little thin for a 50 sec polish.
The cycle stop button was pressed to prevent the last 10 wafers from
running. This action caused the tool to lock up.
The current situation is:
* Head #4 won't home.
* LED #5 on DCX board #2 is lit. (Head #4 oscillation)
* The Infranor for Oscillation Arm #4 error LED's are lit.
* The Infranor for Rotation Arm #3 error LED's are lit.
Action:
* It's 7:15 p.m.
* We're ordering replacement Infranors from the stock room.
* Ritchie from Speedfam is comming in to replace the Infranors
with "D" Shift.
C Shift.
|
| 17.542 | repairs to Infranors | SUBPAC::CMP | | Thu Apr 03 1997 21:19 | 2 |
| Replaced a Infranors, head 3 rotation, head 4 osc. returned tool to
wet mode to continue the verify.
|
| 17.543 | Wafer/water track #2 error | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat Apr 05 1997 06:12 | 7 |
|
Twice wafers got stuck trying to go into elevator #2.
slot #1 position was moved down 100 steps. No problems
since.
D shift
|
| 17.544 | WAFER CRASH | FABSIX::B_WESTPHAL | | Sat Apr 05 1997 20:23 | 10 |
|
CMP.B1 - Down for a wafer crash. A wafer came out of head #3 & crashed both
carriers #3 & #4. Checked the carrier to cup alignments and all
looked good. The downforces were checked. Head #4 was at 346.1 lbs.
and head #5 was at 461.2 lbs. Both heads were brought in to 354 lbs.
Some water/slurry was found in the vacuum's moisture trap. The filter
was changed. No definiate cause for the crash was found. The tool
was cleaned and the apropriate consumables were changed out. Returned
the tool to production.
|
| 17.545 | extension ring culprit to crash | SUBPAC::LANDRY | | Sun Apr 06 1997 20:21 | 19 |
|
Crash!!!!
Started the shift off today with a crash on this system. A wafer had
slid out of carrier #3. Said wafer then preceeded to take carrier #2
out to lunch. Wafer detection kicked in, halted the table as should,
and prevented any further damage. Upon further review of the intricate
details, it was discovered that carrier #3 had four (4) screws missing
from the extention ring. The screws were not found in rinse tub area,
it appears that they were inadvertantly missing upon installation on
the system.
Regardless of the carrier problem, we quickly checked the head to cup
alignment on that head. It was fine! Changed the pad, installed new
carriers on heads 2 & 3, and ran a successful breakin procedure. MQC's
were run, but a few adjustments were made due to uniformity and removal
rates. The 2nd set of MQC's ran fine.
A shift
|
| 17.546 | Wafer slipped out of carrier # 1 | FABSIX::R_POIRIER | | Mon Apr 07 1997 08:31 | 13 |
|
During a process run (TUP200) a wafer came out
of carrire # 1 at touch-down 8 secs. in Seg.3.
Rebooted tool and unloaded all wafers. WE took
off carrier # 1 and found nothing wrong.
Ran a boat of dummy wafers, no problems. Ran
product and again saw no problems. Gave tool
back to production.
B Shift
|
| 17.547 | dropped wafer carrier 3 | FABSIX::B_FINN | | Tue Apr 08 1997 20:46 | 10 |
|
Dropped dummy wafer from carrier 3, four secs into seg 3 of touch up d recipe.
Wafer did not break due top waf detect. Checked all alignments, found cup to
carrier out on all but cup four with cup 3 being the worst. adjusted checked
cup to flipper aok.
returned to manuf.
A Shift
|
| 17.548 | LOST A WAFER/SCHEDULED PAD CHANGE | FABSIX::B_WESTPHAL | | Sat Apr 12 1997 20:29 | 15 |
|
CMP.B1- Down for an error for "carriers not rotating". The tool had errors for
"carriers not rotating". It was at step 3 with zero seconds of process
time expired. The heads had not even touched down. Noticed there was
a wafer in the bottom of the polish basin and all wafers to be unloaded
from the index table were present except for head #1's. All five
carriers had wafers on them ready to be processed. Deduced that
carrier #1's wafer did not blow off during the unload cycle for some
reason. Surface tension must have held the 2 wafers in carrier #1's
pocket. When the carriers began to turn in steps 1 & 2 the surface
tension broke between the two wafers triping the wafer loss sensor.
Ran a full boat of wafers w/ no errors. Returned the tool to
production... The tool later went down for a sheduled pad change.
tool is presently running MQCs.
|
| 17.549 | Elev 2 belt broke | LUDWIG::STANDING | | Wed Apr 16 1997 20:53 | 4 |
| CMP.B1 Elevator 2 belt broken, use elevator one only. And run 25
wafers max. Belt ordered, will be in tomorrow.
|
| 17.550 | Elevator, unif., pad change | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 17 1997 01:08 | 21 |
|
Elevator #2 kept alarming for not being at home. Since
belt not on tool, the elevator was disabled in the hardware
enable menu.
Tool failed MQC's - pad change and weekly PM completed
On a side note, when we checked the wafer detect system,
we tool heads #1, #2, #4 and #5 off line to do the test. When
we ran the WAF_DET recipe, heads #3 and #1 oscillated out even
though only head #3 was on line?!?!?!?!?!?!? Impossible?? I did
it. Of course when we tripped the detection board with a wafer
and stopped the tool, Head #1 eventually timed out for not being
at home and the screen froze. The tool had to be EMO'ed and we
didn't lose an infranor. That's a first... Tool ran fine after
that. We are just waiting for MQC results.
D shift
|
| 17.551 | DECONTAMINATION STARTED | FABSIX::B_WESTPHAL | | Fri Apr 18 1997 21:45 | 8 |
|
CMP.B1 - Down to external for decontamination. The slurry lines were purged w/
DI. The DI & slurry lines are all currently being purged w/ N2.
Only a few solenoid valves can be purge at one time or the power supply
will load down and cause all solenoids to chatter. wiped down the
cups and index table. Carriers were removed. Slurry and DI were shut
off.
|
| 17.552 | Decon continues | FABSIX::O_WHITFORD | Lead, follow or step aside. | Sat Apr 19 1997 07:15 | 9 |
| Continued with decon.
Purged city water line with N2 for @ 3 hrs and then blocked off all
drains and purged elevator, scrubber, index table and polish table GCW
drains for @ 6 hrs. Nocied some water build up in slurry lines,
reconnected N2 to slurry inlet and it is still purging.
D shift
|
| 17.553 | Decontamination Punch List - Update | ASDG::POIRIER | | Sat Apr 19 1997 20:30 | 22 |
|
DECONTAMINATION PUNCH LIST:
--------------------------
All items on Bruces' list have been completed with the exception
of "locking down the Multihead". Speedfam plans on doing this on
Monday. Please double check the Vacuum, Plumbing & electrical
connections in the Automation Frame before separating it from
the Main Frame. We're pretty sure we got everything but its
possible we missed something.
The vacuum trap along with the gages and vac pump fittings have been
stored in the vacuum pump cabinet under the floor. The electrical
connections for the vac trap solinoid & pump have been labled and
stored in th vac pump cabinet as well.
The chiller has been drained and unplugged.
The platen chillers lines have been purged.
C Shift.
|
| 17.554 | removed pressure transducers | FABSIX::B_FINN | | Sun Apr 20 1997 20:10 | 7 |
|
Removed pressure transducers from each carrier arm. Replaced
slurry lines from valves to carrier arm. Removed pressure transducer wiring.
A shift
|
| 17.555 | b1 removed from room | FABSIX::B_FINN | | Wed Apr 23 1997 20:14 | 10 |
|
B1 was removed from the room today. Temporary wall was reinstalled. We
reinstalled the guards around the exposed B1 facilities hookups. Hooked up
the VAC wands. Coughlin's removed the mega slurry alarm boxes and conduit,
only on one box has been reinstalled and no conduit.
A shift
|