| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 49.1 | OnTrak after hours support | SUBPAC::TOOKER | | Fri Jun 28 1996 11:30 | 6 |
| Here is a telephone number that can be used for contacting OnTrak Systems
field service and technical support after hours. This number will connect
you to an answering service. They will forward your message to the people
who are on call. The number is: 1-888-ONTRAK1
Jim T.
|
| 49.2 | startup update | SUBPAC::LANDRY | | Tue Jul 23 1996 20:22 | 32 |
| Installation / system update:
* All facility hook ups are complete EXCEPT for the ammonia. It is
currently locked out. Before the ammonia gets turned on, the 1/4"
line needs to be tied in within the system.
* Bob Welch (OnTrak Rep doing the startup) has completed the necessary
hook-ups/installs needed to check the system functionality out. The
brushes have been installed in this activity.
* There is currently a problem with a broken IB station drain
connection. The issue/logistics are being addressed by Jim T. At
this time, the station has been RTV'd to allow water to flow for
system checkout. This is only temporary until a new station is
procured.
* Bob W has been through the initial set-ups. Several hundred wafers
were exercized through the system. Sound adjustments were made
during this testing.
* The mechanical acceptance was started this afternoon. 191 wafers
into the run, the system alarmed for a roller motor out of spec.
The board was calibrated and the run continued. A cassette or two
later and another motor out of spec occurred. That motor (unknownst
to me as to which exact motor it was) was calibrated.
At this time, Bob halted the marathon and went through all the
motors. He will restart the marathon tomorrow.
* The alarm board is due to arrive tomorrow.
A Shift
|
| 49.3 | Startup activities.....continued | SUBPAC::LANDRY | | Mon Jul 29 1996 20:20 | 29 |
| A couple of happenings today.......
* The OCP has been hooked up to the system. A3 is now using the OCP
originally used on system A2. The label on the OCP has been changed
to reflect this status.
- A2, as previously mentioned in yesterdays note (A2 note), is now
hooked up in tandem with system A1. The OCP has been labeled
appropriately to reflect this change.
* The 2% ammonia supply HAS BEEN TURNED ON. The flow meters have been
setup for proper flow.
Some items on the horizon include.
- The IB station Lexan tank will be replaced as soon as the new
tank arrives this week. It's scheduled to arrive possibly
Tuesday, Wednesday at the latest (so I'm told!).
- Process acceptance is due to start soon.
* Wafers are being gathered
* Pre-measurements will follow
* The wafers will be run through the system, brush height
finalization achieved
* Post measurements after that
A shift
|
| 49.4 | initial system offset numbers | SUBPAC::LANDRY | | Tue Jul 30 1996 11:16 | 14 |
| Here are the initial "System Offsets".
Load Station 2100
Unload Station 500
Wrist at Spin Station 114
Wrist at Receive 246
Spin Transport Delay 50
Rotation at Spin Station 791
Rotation at Receive 1910
Blade Lifter 11400
Robot Fingers 200
Doc
|
| 49.5 | new station installed | SUBPAC::LANDRY | | Wed Jul 31 1996 19:39 | 23 |
| The process acceptance has been halted in mid-stream due to a lack
of wafers. They are currently working on getting some prepared.
Bob Welch will be back in the morning.
Also today, the new Brush Station arrived. So, it was installed. Lots
of fun! Remind me to pass the next station tub change to the oncoming
shift next time!!! I wouldn't want to hog all the fun.
While changing the station, we cut the drain line apart, removing about
an inch of the line, then re-attached the line with a PVC coupling.
This activity was necessary to properly align the drain port to the
drain. There was extreme tension on the previous hookup which caused
the station to break in the first place.
After the change activity, 2 cassettes of wafers were exercised to
assure proper installation. Had a few minor adjustments to make:
- The IB station rollers were not opening/closing well
- The transport assembly needed to be shim'd to properly level it.
- fixed a couple of mis-installed roller o-rings
A shift
|
| 49.6 | BELT JUMPED PULLEY | LUDWIG::WESTPHAL | | Wed Aug 07 1996 20:47 | 5 |
| SCRB.3 - Down for errors for no wafer at the outside brush station. The belts
in the load station were off the pullies. Corrected the same
rebooted and ran with no further problems.
|
| 49.7 | lift finger made NO sense! | SUBPAC::LANDRY | | Sun Aug 11 1996 14:15 | 10 |
| The system broke a wafer this morning whilst transfering a wafer from
the robot to the lift finger in the unload station. Somehow, the lift
finger didn't sense that it possessed a wafer, allowing the robot to
try and hand off the next wafer to the finger. Yes, there was a wafer
present in the lift finger at this time. The EMO couldn't be activated
in time to save this mishap. Tried to re-create this problem, but it
wouldn't fail. Ran the rest of the cassette just fine.
A shift
|
| 49.8 | Timeout errors | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Aug 16 1996 08:18 | 8 |
|
The tool kept erroring for "timeout for wafer at outside
brush station." The tool had be EMO'ed and recovered before
I was able to look at it. I ran the transfer belts manually in
the send and outside brush stations but I found everything working
fine.
BJ
|
| 49.9 | Receive station problems | SUBPAC::LANDRY | | Mon Aug 19 1996 20:23 | 13 |
| A very annoying system today........
The system kept messing up on several items. The 1st was caused by
the system needing an unload cassette installed. No big deal, right?
Wrong! This seemed to trigger off a rash of Receiver errors. Twice,
the receive cassette reset itself. Could not locate the reason why
this happened. Also, the knife (I believe this is what it's called)
messed up with the sensors "not" detecting a wafer, when indeed one was
in place. Didn't have time to thouroughly trouble shoot as the room
was abuzz with activity. The amplifiers for the sensors are a good
place to start should someone encounter these mishaps tonight.
A shift
|
| 49.10 | Lifter problem | FABSIX::R_POIRIER | | Tue Aug 20 1996 08:01 | 15 |
|
Scrubber A3 has a problem with the lifter in the recieve cassette.
The lifter will go all the way up to receive the 1st wafer from
the robot, but each consecutive wafer from the robot the lifter
decrements in height reached until the robot starts dropping the
wafer and the lifter is to low to receive it. We think the problem
is with the PIA Gespac board which we believe controls the step
count. I ordered one from S/R 6 but it hasn't come down yet.
Maybe A shift can try it. (PIA#7)
B Shift
|
| 49.11 | Lifter problem continued.... | SUBPAC::LANDRY | | Tue Aug 20 1996 20:16 | 14 |
| Continuation of the Blade Lifter problem.........
* Tried the PIA Gespac board for the fix. No improvement.
* Next, we tried the Intelligent Stepper board (which controls the
motor steps). Again, no improvement.
* Ran into several inhibits, lost position problem in the middle of
trouble shooting, but were able to fix them and move on.
Currently, the system will remain down for the night. This is a
warranty issue problem. The rep will be here in the morning to address
this problem. See Jim T's mail message. Call him with any concerns.
Doc / Jim T
|
| 49.12 | broken arm | FABSIX::L_SHKOLNIKOV | | Fri Aug 23 1996 08:23 | 5 |
| During the quarterly PM found that the front lower roller arm was
broken. Did not get a chance to replace it now. Will do it tonight.
d shift
|
| 49.13 | Inside Brush Station Roller Arm Cracked | ASDG::POIRIER | | Fri Aug 23 1996 20:23 | 12 |
|
Inside Brush Station Roller Arm:
-------------------------------
The (FRONT) Inside Brush Station Roller Arm was cracked causing
it to slip on the shaft. This condition was causing numerous time
out errors for the Spin Station. The other 3 roller arms look like
they are too tight (no gap at the bolt hole slot). Keep a look out
for cracks in the other 3 arms.
C Shift.
|
| 49.14 | send station belt. | FABSIX::L_SHKOLNIKOV | | Sat Aug 31 1996 07:38 | 9 |
| The tool double load the wafers in outside brush station.
Wafer stack between sender and outside brush station. Process
stopped and OP's started it again so second wafer was send to
outside station. I checked the sender and one of the drive belts
which goes from motor pulley up was loose. After the belt was
replaced tool worked all night without any problems.
Leon
|
| 49.15 | Bad roller | FABSIX::O_WHITFORD | | Thu Sep 05 1996 00:33 | 8 |
| Rollers on inner brush station had "delaminated" (for lack of a better
term) and wafer was actually being pinched between upper and lower
halves of separated roller. Replaced both rollers as we do not have the
larger diameter rollers PN. Ran a cassette of "dummy" wafers with no
"slip thru" (no adjustments were made to the arms on the inner brush
station) Passed MQC's o.k., back to ops.
Dave
|
| 49.16 | sensor tyimeout problems | FABSIX::O_WHITFORD | | Thu Sep 05 1996 07:02 | 7 |
| Again, problems with timing out on spin station sensor. Did a little
more digging into the problem and found air cyl #2 on the inner brush
station not always extending which prevented the wafer from exiting the
station and onto the spin table. Ultimately found incoming air pressure
to the tool at less than 50 psi. Adjusted incoming pressure to 65psi
and reduced it at the tool regulator to @ 50~52 psi and ran a number
of wafers thru the system with no problems.
|
| 49.17 | Robot Dropping Wafers At Spin Station | ASDG::POIRIER | | Thu Sep 05 1996 20:31 | 13 |
|
Robot Dropping Wafers:
---------------------
The system has been intermittently dropping wafers at pick-up in
the Spin Station. An attempt was made this moring to teach the
Robot fingers new pick-up positions. After running 2 cassettes of
wafers, it appeared that we were sucessful. However, the problem
returned late this afternoon. 2 cassettes have just been sucessfully
completed again. We are unsure of the root cause at this time. D
Shift, please continue to monitor & search for root cause.
C Shift.
|
| 49.18 | Dropping wafer problem | FABSIX::O_WHITFORD | | Fri Sep 06 1996 03:50 | 12 |
| Took over from C shift.
Observed the fingers on the robot as it picked each wafer from the spin
station.
Finger on the trailing edge of the wafer closest to the access door (as
observed from the side of the tool) not low enough to grasp edge of
wafer. All others took the wafer fine.
Increased the steps on the "robot at spin" position from 788 to 790. Ran another
full cassette of wafers and observed robot operation. All fingers now
grasp wafer properly with no fails.
|
| 49.19 | Dropping Wafers At Recieve Station Lifter. | ASDG::POIRIER | | Fri Sep 06 1996 19:59 | 10 |
|
System Dropping Wafers:
----------------------
The System in now dropping wafers at drop-off from the Robot to
the Lifter. It appears that the recieve cassette is not in the proper
location. We supect the belt that drives the recieve cassette may have
slipped. Will investigate shortly.
C Shift.
|
| 49.20 | dropping wafers & erratic sensors | FABSIX::O_WHITFORD | | Sat Sep 07 1996 06:27 | 18 |
| Picked up on above problem. Observed tool operation using aluminum
alignment wafer. Where the robot stopped to drop off wafer at recieve
and where the recieve blade was in relation to the robot were not in
alignment. Adjusted wafer reciever assembly and lined up the blade with
the wafer still in the fingers. Ran 10 silicon wafers with no problem
Numerous inner brush station wafer sense errors. Re seated the inner
brush station sensor a bit further away from the wafer as it passed by.
No more problems.
Began having frequent spin station lock sense errors. Locking arm
motion very rough. Found slight bind in linkeage between arm and air
actuator. Relieved bind by slightly loosening the shoulder screw which
the arm itself pivots on.
Ran a full cassette with no problems.
Dave
|
| 49.21 | door latch troubles..... | SUBPAC::LANDRY | | Sat Sep 07 1996 19:18 | 34 |
| Today, we had a problem with the door latch mechanism.
What was happening was 1) the door latch would NOT lock when starting
a cassette and 2) the system would alarm each time the receive cassette
would home.
Problem 1: The wafers would run through the system right up to the
spin station drying cycle was complete. It would then alarm for the
door latch not being made (which it wasn't). The robot would not go
into the spin station to retrieve the wafer. To get by this, we had to
activate the door latch switch through the I/O screen. From there, the
remaining wafers would run fine.
Problem 2: Once the wafers were completed through the system, the
cassette would home (as should) but the door latch alarm would sound
once again. Silenced it and it was content.
The fix for both these problems was traced to one source. While
trouble shooting the circuit, it was noticed that the amplifier for the
sensor was NOT illuminated. Hhhmmmmm. Why was that. Started the
quick, easy probability checks, low and behold, a broken wire at the
end of the amplifier connector. Re-attached "said" wire using a new
pin and re-installed into the connector. Voila! an LED lit on the
amplifier. Lets try it. Still no good, but wait, the sensor is not
changing states as should. Found the "light pipe" cable which derives
from the amplifier was a bit mangled at the end. Shaved off the
damaged section and re-installed the wire into the block on the plexi
housing. The block is where the door latch piston shaft injects into.
From there, it was just a matter of re-setting-up the amplifier to
detect the state changes.
Confused yet??? Doc
|
| 49.22 | Time-out errors | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Sep 21 1996 06:57 | 9 |
|
The tool alarmed several time for timeout in the outside
brush station. It was discovered that the rear roller arm
was intermittently getting caught on the 1/4" DI feed line
for the exit rinse manifold. The manifold was repositioned
identical to the inside brush station and the tool has been
fine since.
D shift
|
| 49.23 | splash guard...what a drag! | SUBPAC::LANDRY | | Sun Sep 22 1996 13:51 | 12 |
| The system was "timing out" for top OB brush out of spec. Checked
out the brush and found that the splash ring was half on the teflon
bracket and half on the bearing. This was causing the brush speed
to fluctuate due to the drag. Moved the splash guard on to the
teflon mounting bracket. Motor spins freely now.
Also found the IB station to be similar. This time the splash guard
was riding the bearing round and round. Positioned the guard to the
teflon mounting bracket.
A shift
|
| 49.24 | spindle lock mechanism | SUBPAC::LANDRY | | Tue Sep 24 1996 20:33 | 9 |
| The system had a problem with the spindle lock actuator today. After
removing a couple of annoying safety covers, the mechanism was checked
out. It appeared to be physicall hung up. Freed up by "hand"
assisting it. Actuated the mechanism numerous times. Couldn't
duplicate the problem. Ran a cassette full of wafers to verify
functionality. Looks alright for now.
Oh ya, re-installed said safety covers! Doc
|
| 49.25 | Lost wafer syndrome | FABSIX::O_WHITFORD | | Sat Sep 28 1996 00:20 | 5 |
| Alarming for "lost wafer". Tower sensor not toggling, tweaked up
sensitivity on the amp for the tower sensor. Ran std. 25 wafers with no
further errors.
Dave & Brian
|
| 49.26 | spin station errors | STRATA::FINN | | Sun Sep 29 1996 20:20 | 37 |
|
Continued problem from B shift for blank screen upon system boot up.
Powered system down waited 60 seconds and powered back up. NO Problem.
This error only occurs when system is shut down and immediately powered
back up. (during the course of today we powered down at least a dozen
time with the only blank screen error occurring the one and only time
we forgot to wait before power up).
Ran test wafers after successful bootup.
Spin station cam did not lock in place. No red LED lit on banner opto
amps or cassette knife. Checked power supplies. 24 volt supply was
good at source but not making it through interface, due to bad 5 amp
fuse, replaced same. Rebooted and ran test wafers, Megasonics arm
would not home. Tried adjusting pots on photoamps, but sequence was
not correct. Continued troubleshooting and found 2 open wires behind
banner amps at terminal board for arm sweep. Please note J14 is wired
to P13 and J13 wired to p14. We thought this to be a source of the
problem until we traced the sensors back and found them to be
mislabeled at the factory.
Eliminated the sensors and amplifiers and source of problem by testing
each sensor and amp. View i/o as we tested each and found both home and
sweep signals steady at amp but toggling on the i/o.
Called hotline and they advised changing pia # 4 which we did with no
change. We check our documentation and found the correct board to be
PIA #2. Changed PIA #2. Worked fine after slight adjustments of amps.
Also had error for receiver door not locking found quick connect at
solenoid seated but loose. Reseat aok.
Ran verify wafers -- system given back to manufacturing.
A shift
|
| 49.27 | more errors | LUDWIG::RIDLON | Eliminate the oblivious | Mon Sep 30 1996 07:29 | 10 |
| Continued problem from A shift. System screwed up some more. Found it
waiting to pick wafer off of spin station with no alarms. Noticed that
the spin station would stop spinning before it locked sometimes.
Adjusted pot 31 per tech manual to see if this would correct this
problem. 20 wafers cleared with no problems. Running 25 more to verify.
Also installed a support bracket for the unload station's plexiglass so
that the lower stainless door can be removed.
B-shift
|
| 49.28 | to spin or not to spin | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 01 1996 05:54 | 11 |
| Had two instances where the spindle wouldn't spin to lock. Manual
manipulation took care of the first one but the second it didn't.
AND on the second time the robot loaded 5 wafers into the recieve
cassette without spinning them dry. The lifter blade got wet and may
have shorted out something as the fault that we finally got was a
receiver error (I forget exactly). Other priorities and ert calls
prevented us from paying much attention to this machine.
B-shift
|
| 49.29 | must unionized | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 01 1996 06:44 | 4 |
| Operations started using the tool again and its working fine now???
Nice piece of machinery.
B-shift
|
| 49.30 | spin station / H2O alarm tie in | SUBPAC::LANDRY | | Tue Oct 01 1996 20:36 | 21 |
|
Today, was eventfull to say the least. Here's the roll call.
* The Spin station stopped spinning. This was observed the previous
evening as well. As with them, the station didn't alarm for any
motor/tolerance problems. The Megasonics arm swept, the heat lamp
went on, the robot came over and picked up the wet wafer. We stopped
it before it left the spin station.
At this time, Glen Mouser walked in to check it out. The problem was
traced to a inconsistant 24 VDC relay which would occassionally stick.
We replaced it and have run ~75 wafers without a re-occurance.
* The system was then logged down to have the alarm upgrade started. Some
plumbing was done and the DI water portion of the project was installed.
The pressure gauge is in line and is functional. Tomorrow, Glen will
perform the Ammonia tie in and functionality checkout.
A shift
|
| 49.31 | Update on pressure interlock upgrades | SUBPAC::TOOKER | | Wed Oct 02 1996 17:26 | 9 |
| Today OnTrak field service continued the pressure interlock upgrade work on
the scrubbers. The work is complete on cmp-scrub.a3 except for tying into the
NH4OH supply. The tie in will require all scrubbers to shutdown for 30 min.
The work on cmp-scrub.a1 is still ongoing. The electrical work is complete,
but still have the plumbing left to do. When OnTrak field service leaves today,
cmp-scrub.a1 will be available for Operations to run product. Work will
continue tomorrow.
Jim
|
| 49.32 | Update on the pressure interlock upgrades | SUBPAC::TOOKER | | Fri Oct 04 1996 17:04 | 15 |
| Today OnTrak field service continued work on the pressure interlock upgrades.
They have now completed all necessary work on cmp-scrub.a1/.a2/.a3 except
for the following open items:
1) CMP-SCRUB.A1: Needs new software installed to enable the new pressure
& interlocks. The new software will arrive on Monday and
CMP-SCRUB.A2 OnTrak will be back on Tuesday to install.
2) CMP-SCRUB.A3: Needs final connection of the NH4OH pressure interlock
to the incoming NH4OH supply line. We will do this
ourselves because all three scrubbers will need to go
down for 45 minutes to perform this task.
Jim
|
| 49.33 | replce roller arm | FABSIX::O_WHITFORD | | Sat Oct 05 1996 01:08 | 4 |
| Replaced broken right hand lower roller arm on the outer brush station.
Ran test wafers to check alignment/operation. Ran MQC, passed.
Dave W.
|
| 49.34 | Cracked roller arm | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Oct 05 1996 07:04 | 14 |
|
Tool alarming for "timeout waiting for wafer at Inside brush station."
Found right(front) roller arm cracked at the shaft and preventing the
roller to let the wafer leave the outside brush station. Upon disassembly,
we noticed the top arms in the outside we cracked and the the top rear
arm in the inside brush station cracked. The roller arm was replaced
but the top arms are not stocked. We looked around the area and Jim's
office but came up empty. The tool is ok to run now but I put a WARNING
on the tool. They will need to be replaced as soon as they are rushed
in...
D shift
|
| 49.35 | Top roller arms replaced | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Oct 19 1996 07:16 | 5 |
|
Replaced (3) out of the (4) top roller arms which
were broke. Ran (100) wafer verification run and tool
came up. MQC's passed....
|
| 49.36 | dropping wafers at recieve | FABSIX::J_SWENSON | | Thu Oct 24 1996 19:22 | 16 |
| Robot dropping wafers at reciever:
1. lifter did not come fully up robot released wafer above reciever.
found liftewr up/down belt loose (tightened)
2. robot gripper assy was being pushed up by lifter every drop off
cycle. changed the lifter up position from 11250 to 11000. drop
off/ release to lifter much smoother now.
3. ran 25 test runs (wafers) looked good.
4. root cause mainly due to a software glitch, which led to the
tightening of the belt.
C-shift
|
| 49.37 | IB roller motor adjustment | SUBPAC::LANDRY | | Sun Nov 10 1996 16:54 | 7 |
| The system was alarming for "inside brush roller motor out of spec".
Tach'ed the motor and found it to be rotating at 49 RPM, just what the
status screen was reading. Adjusted the appropriate pot on the motor
control board to set the rotation speed to matched the set-point.
A shift
|
| 49.38 | top secret, for your eyes only! | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Nov 24 1996 22:42 | 15 |
| Alarmed for leak detection during process. Found bottom tray filled
with water 1/2 inch deep. Putting my investigative powers to the
task I deduced that this was the cause of said alarm. Delving deeper
into the problem I noticed that two fittings were leaking at a steady
rate. Hmmmm, could be why the tray is full, however, this will need
further study. Getting back to the task at hand I quickly tightened the
suspicious fittings plus a few more that were loose. Once the water was
soaked up a boat of wafers were processed to verify conclusions assumed
to this point. No water leakage could be seen, however, this savy
technician isn't so sure this is so cut and dry. Perhaps a communist
plot is unfolding and this was the first step in their diabolical plan.
Mental note: Look into the feasibility of having operators armed.
double-ought-eight
|
| 49.39 | Ammonia alarm tied in | SUBPAC::LANDRY | | Tue Nov 26 1996 17:51 | 12 |
| The Ammonia supply went down today for some scheduled work to be
performed on Ashlands end of the line. Some new EPROMS were installed
in the computer control section.
Whilst the supply was shut down, it provided ample opportunity for us
to plumb the Ammonia pressure regulator into the supply line. This was
done, along with the electronic tie-in of the alarm circuitry.
Therefore, henceforth even, the ammonia alarm is on line and
functional. Special kudo's to Jim Sadin for his timely assistance in
this detailed and precise project.
A shift
|
| 49.40 | robot fail | FABSIX::L_SHKOLNIKOV | | Wed Nov 27 1996 00:05 | 6 |
| The robot was not picking up the wafers from spin station.The wrist
rotation belt pulley was spinning free on the motor shaft. After
tighten it up and wrist alignment run 25 wafers to verify. Looked
good. Released to manufacturing
Leon
|
| 49.41 | Door latch fault | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Nov 30 1996 06:11 | 10 |
|
Tool kept alarming for door latch fault. There is a
support under the receive station hood now and it appears
to be slowing making the hood twist. The switch location
was adjusted to compensate.
D shift
|
| 49.42 | Time out wafer sensor spin station | FABSIX::J_SWENSON | | Fri Dec 06 1996 15:47 | 12 |
|
Tool kept alarming for time out for system looking for spin wafer
sensor.
Adjusted flow for inside brush rollers in and out.
Replaced transport belts.
Ran 30 wafers to verify.
returned to production.
C-Shift
|
| 49.43 | OB station roller speed out of spec | FABSIX::R_GEE | | Sun Dec 15 1996 18:18 | 8 |
| The system was erroring for "OB station roller speed out of spec".
During processing, set to 40 rpm, it was reading 30 rpm. Ran it in
manual and it was running at 40 rpm, normal. Found that when a wafer
would rotate in the station it would rub on the OB station entry
belts. Lowered the rollers slightly so the wafer sits level in the
station, no longer touching the belts, all set.
A shift
|
| 49.44 | OB station motor | FABSIX::R_GEE | | Mon Dec 16 1996 19:26 | 8 |
| The system errored again today for "OB station roller speed
out of spec". During processing, set to 40 rpm, it was reading
32 rpm. Tacked the roller and it was rotating at 32 rpm. Adjusted
the motor control board so the roller rotated at 40 rpm when
called for, verified with the tack. Need to monitor the roller
speed, the motor may be degrading.
A shift
|
| 49.45 | lower left inside brush station roller arm cracked | FABSIX::J_SWENSON | | Sat Jan 04 1997 19:26 | 10 |
|
Inside Brush Station Roller Arm
-------------------------------
Found left roller brush arm sliding on shaft,(cracked lower arm)
Replaced and aligned, ran test wafers looks good.
C-shift
|
| 49.46 | gauge replaced | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Jan 07 1997 02:20 | 4 |
| The DI water PSI gauge was reading 0. Replaced it.
B-shift
|
| 49.47 | DC Motor Control Board / ass. motor | SUBPAC::LANDRY | | Mon Jan 13 1997 19:38 | 13 |
| The system had a problem with the IB top brush motor out of spec. The
rotation speed was strobed (called for 120 RPM and found it at 120
RPM). The display screen was at 104 RPM. Attempted to calibrate the
board and was incapable of adjusting the readout. Quickly swapped out
the board with the OB station. The problem went with the board to that
station. So, we installed a new board. Calibration went ok until we
attempted to bring in the display RPM. We could change it, but still
incapable of attaining the proper readout. Therefore, the motor was
determined weak at this time. It was replaced, and final calibration
was successfully achieved. And yes, the original board IS bad.
A shift
|
| 49.48 | spin station blues | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Feb 24 1997 07:29 | 18 |
| Alarmed for mega sweep arm not at home. Found several wires loose and
unconnected. Whilst repairing them I accidently drew a spark from one
of the power wires going to arm home MA3 amp (we had to replace the
connectors due to no identical pins being available). After this little
mishap the spin station failed to initialize. We checked the fuses and
found one open on the opto #2 board (opto 30 and 31). This failed to
correct the problem. We then changed the first pia board thinking that
this was one that connected to the mega arm and sweep home sensors but
this failed to correct the problem. We then tried changing the the
fourth pia board because the manuals explain so well which pia board
goes with what sensor. This also failed to correct the problem. I don't
like passing problems along (especially ones that I probably created)
but time is running out on this one.
NOTE: The first pia board refers to the one with ribbon cables labeled
pia 1 and pia 2, the fourth refers to pia 7 and pia 8.
B-shift
|
| 49.49 | Megasonics Arm / Inside brush station rollers | FABSIX::R_GEE | | Mon Feb 24 1997 18:53 | 32 |
| Took over from were "B" shift left off. Found the megasonics
arm home sensor and the megasonics sweep sensors connectors
swapped at the amplifiers, it looks like they were miss labeled
from the factory.
Had to solder new pins on both connectors to make them match male
to female.
Re-positioned the megasonics home sensor so the arm doesn't hit the
side of the drain pan.
Adjusted the megasonics top spray so it sprays in the center of the
wafer.
Adjusted the megasonics sweep arm so it sweeps out to the center of
the wafer.
=====================================================
Inside brush station
Adjusted the roller positions in so the wafer sits centered while being
scrubbed.
Wafers not arriving at the spin station. Opened SV#7 (inside brush
station air solenoid #2) ports A & B 1 1/2 turns and lubricated the
shaft.
Replaced SV#8 because it wasn't functioning properly, it was sticking
open and couldn't be regulated with the A & B pods.
Ran 100 wafers with no problems.
A shift
|
| 49.50 | door latch fixed | SUBPAC::LANDRY | | Sun Mar 02 1997 19:12 | 15 |
| The system was being abnoxious today with the door latch assembly.
We found that the sensor block wasn't lining up properly with the
pneumatic plunger. Also, the door was actually resting on the
"unlock" L.E.D. The sensor block didn't have the necessary adjustment
swing to perform the job. Therefore, we opened up the holes on the
smoked gray plexiglas box/shield. This gave us the necessary
adjustment swing to align everything properly. We also had to rasp
a bit of plexiglas away (at the top cutout) to alleviate the tension
being applied to the LED.
Due to the new alignment of the block and plunger, it was necessary for
us to adjust the amplifier for the door switch position.
A shift
|
| 49.51 | LEAK FROM SPIN STATION | FABSIX::B_WESTPHAL | | Wed Mar 05 1997 19:39 | 6 |
| SCRUB.3 - Down for a leak from the spin stations drain. The leak is coming
from the clear blue hard plumbing under the spin station. I already
put in a 4141 call to see if facilities can help. I listed Leon as
the point of contact. Tool is down in the system.
|
| 49.52 | Leaks, jams and dropsies | FABSIX::O_WHITFORD | Lead, follow or step aside. | Thu Mar 06 1997 03:21 | 20 |
| Took over from C shift on leak in spin station drain.
1) Connection leaking at spin station drain port. Connector
didn't appear to have been assembled correctly, rubber sleeve distorted
and not seated din bottom portion of connector.
Pulled it apart and noted a lot of tension on the drain
line. Estimating from the way it had to be torqued to get the
connections together, it will have to be replumbed from the table out
to the grey PVC house GCW drain line in order to assure no further
leaks.
2) Tried a couple test wafers to check line for leaks and
recieve station dropped the first wafer. Pulled covers off and the
knife drive belt was literally shredded, causing the knife to
miposition. Replaced the belt and tried again with all ocvers off.
Worked flawlessly. Put covers back on and it dropped the first wafer
again. (Looks like knife is missing position again, maybe due to a jam
inside the box) Repositioned covers and exercised with no problems.
Dave & Leon
|
| 49.53 | A dull thud, then nothing.... | FABSIX::O_WHITFORD | Lead, follow or step aside. | Thu Mar 06 1997 06:11 | 9 |
| Dropped another wafer and blade would not come up. Removed covers
and found new belt had slipped out of one end of the clamp block which
dropped the whole thing into the bottom of the blade box..... DOH!
Re attached the belt and got it tight enough (this time). Ran 30
wafers without a hitch... in verify...
Dave
|
| 49.54 | is there a spin doctor in the hous | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Mar 10 1997 03:07 | 3 |
| Spin station not spinning to lock causing the robot to freeze. We put a
diode across the coil on the spin hibit relay to see if this would
help. Cycling some wafers now (100) to verify.
|
| 49.55 | lost wafer at lift | FABSIX::R_GEE | | Mon Mar 24 1997 14:13 | 4 |
| Errored for "failure in robot, lost wafer in lifter". Made
a slight adjustment to the two wafer present at lift amplifiers.
A shift
|
| 49.57 | Wafers dropped by robot | FABSIX::R_POIRIER | | Mon Apr 14 1997 08:42 | 20 |
|
Robot failed to take a wafer from the spin
station. Recovered and continued. Problem
only happened once.
The scrubber did have another problem which
we couldn't figure out. It would be running
and when the robot started going after a
wafer the tool woould freeze up and start
alarming. When we would start to go to the
Alarm screen the tool would start working
again. This happend 4-5 time over the night.
The error message was " Error trying to home nest"
B Shift
|
| 49.58 | lamp / fuse | SUBPAC::LANDRY | | Mon Apr 14 1997 20:52 | 9 |
| The system blew a heat lamp today. Along with the lamp went the fuse.
We do have the lamp (which is installed in the system), but we do NOT
have the proper fuse in stock. Consulted the Equip Eng and he has
given the ok to install a slightly higher amperage fuse (system had a
1 Amp fuse, closest we can get is 1 1/2 Amp fuse). This fuse is listed
as in stock (stockroom 6). It will need to be drawn out and installed.
A shift
|
| 49.59 | Blown fuse/heat lamp | FABSIX::R_POIRIER | | Tue Apr 15 1997 07:21 | 18 |
|
Found a blown 10A S/B fuse. Replaced the fuse
but Heat lamp still would not work. I checked
the lamp with a ohmmeter and found it was open.
I found another heat lamp in the chase. Part
of the ceramic insulator was broken off but
the lamp itself appeared good. And it checked
good with the meter so I put this lamp in the
socket, powered the tool back up. And the heat
lamp worked.
Also did the weekly PM. Tool rturned back over
to Operations.
B Shift
|
| 49.60 | Mega-sonig home problem | FABSIX::R_POIRIER | | Sun Apr 20 1997 08:42 | 7 |
|
Mega-sonic sweep home not making home.
Adjusted gain and no further problems.
B shift
|
| 49.61 | Homing problems. | FABSIX::L_SHKOLNIKOV | | Thu Apr 24 1997 08:53 | 14 |
|
Robot failed to take a wafer from the spin
station. Looks like it has a problem with carriage
homing and robot fingers. Rebooted the tool, readjust
the robot fingers. Verification run is being completed.
D Shift
|
| 49.62 | VARIOUS PROBLEMS | FABSIX::B_WESTPHAL | | Thu Apr 24 1997 21:12 | 19 |
|
SCRUB.A3- Down for various errors and problems. The problem at first was the
robot arm locked up over the spindle. The tool was powered down and
when it was rebooting the arm did not home properly. The tool was
again powered off and the was physically moved so that it would home
properly. That worked but the first condition remained. Found that
the spindle lock sensor was not seeing the flag. The same was
cleaned and checked several times w/ no errors. The robot dropped a
wafer and the spindle also grabbed a wafer wrong once on two separate
occasions. The alignments were checked and nothing appeared to be
out so the reasons for each of these problems is not known. The tool
was returned to production but it dropped a wafer out of the robot
again at 7:15. EE was notified of the situation and requested that
we run a minimum of 75 wafers through the tool after a suspected fix
is made. Jim T. called ONTRAK and because the tool is under warranty
they are sending a representative out to investigate the problem
further.
|
| 49.63 | Burn baby burn..... | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Apr 25 1997 08:34 | 23 |
|
Took over from C shift and at one time, the
only error we were getting was that the tool was
timing out for arm not arriving at spin. That
was just a simple flag sensor adjustment. We
ran 50 wafers before the robot went to pick up a
wafer at spin and dropped it on the way up. The
wafer didn't break though. We went through the
Ontrak procedures on the robot handling adjustments.
The fingers were all screwed up. The tension was
too tight and all of the adjustments in the spin and
receive position were off. After everything was brought
in and looking ok, we powered the tool down to close
the electrical cabinet door. When we powered the tool
up, the two Intel Stepper boards that control the wrist,
finger and sender cooked... bad... we have two new
boards in stock but there is a chip missing on both.
One of the cooked board's chips is fried, the other
one looks ok. In any case.. we need some parts and
we're out of time.
D shift
|
| 49.64 | Replaced spindial sensor and driver cards | LUDWIG::STANDING | | Fri Apr 25 1997 20:26 | 17 |
| CMP-SCRUB.A3 Took over for D shift. Checked out the stepper motors for the
wrist and fingers to see if they might have been damaged from when
the driver boards fried. They were OK. We were unsure if the EPROMs
were good. Tried to locate a EPROM burner to check out the checksum
on a known good one and they on the suspected bad ones. Could not
locate one to use, so it was decided to install the new boards with
the EPROMs installed. Still had problems with the robot arm locking
up. The ON-TRACK rep was here and started to check out out the board
that drives the wrist and shorted out a couple of transistors. So we
replaced that board. After that the tool came up and we started
having lockups with the robot arm hanging up over the spin station.
The spin lock sensor was acting flaky so I remove it and found it to
have a crack in it. Replace the sensor and tool worked fine. Taught
the robot fingers over the spin cup to pick up the wafer a little
better. Ran 75 wafers with out error. Returned tool to
manufacturing for MQCs.
|
| 49.65 | Robot dropping wafers at spin again | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed Apr 30 1997 07:16 | 15 |
|
Tool dropped wafers in the spin station at the
end of A shift and twice on our shift. Checked
robot handling and spin station. It appeared that
the spin assembly wasn't coming up to the top all
of the time accurately. Checked the level on both
the spin station and robot at spin with a wafer and
robot was out a bit. Leveled the robot by teaching
the robot at spin offset. After that, I found the
spin top hardware stop was all loose and was causing
the spin assembly to go intermittently to different
heights. Ran 50 wafers without any problems.
D shift
|
| 49.66 | Broken wafer at spin station | FABSIX::L_SHKOLNIKOV | | Sat May 03 1997 07:50 | 9 |
| Tool broke product wafer inside of the spin station.
While first wafer was at spin, another one was sent in
from outside brush station. So had to reboot the tool,
cleaned the spin station, adjusted time delay for spin
station xport assembly. Run 25 wafers to verify - no
errors. Released tool to mfg. The tool passed mqc and
running product now.
D - shift.
|
| 49.67 | Robot wrist problems (C Shift) | FABSIX::R_POIRIER | | Sat May 03 1997 23:41 | 17 |
|
To: R_POIRIER
CC:
Subj: PLEASE PUT THIS IN THE NOTES FILE FOR ME MY ACCOUNT IS'NT WORKING RIGHT.
CMP-SCRUB.A3 - Down for the robot intermittently dropping wafers. The tool was
also alarming for problems homing the robot during power up. It was
noticed that the arm was vibrating excessively during the wrist homing
task. The wrist stepper board was swapped with the sender as suggested
by Mike S. and the problem went away. The sender boards was Then put
back where it belonged and the wrist/finger stepper board was replaced.
A boat and a Half of wafers were ran and the tool was returned at the
end of shift.
|
| 49.68 | broken wafers and belt | FABSIX::J_SADIN | Freedom isn't free. | Mon May 05 1997 13:00 | 12 |
|
Wafers were broken in the unload station due to a cassette being
dropped through the top of the machine (we all knew this would happen
sometime!). It appears the wafer lifter (blade) was hit because we
found the belt broken when investigating why it wouldn't pick up
wafers. We were able to use the original belt again and the tool ran
verification wafers ok. Cleaned up the mess and gave the tool back to
production.
a-shift
|
| 49.69 | various items to correct | SUBPAC::LANDRY | | Mon May 05 1997 23:45 | 24 |
| A continuance to the previous note......
After the system was returned to production, the system ran fine.
An OnTrak rep was onsight in the afternoon to give a look_see with the
system, as the tool continues to run erratically. A couple of problems
were observed. 1) There is a ripped plastic sleave (which gaps the
send and OB station. The rip is allowing some water to drip into the
containment pan. 2) The nest bumpers (or wafer grip fingers in the
spin station as most people refer them as) are too tight. They should
spin freely, two do....two don't. 3) the send station flow solenoid
is not turning on as should. The Opto 22 board is toggle, but the
signal is not making it out to the solenoid. As a temporary solution
goes, we have increased the flow through the drip manifolds by
adjusting the manual by-pass on the teflon block on the fluids
manifold. These above items are not show stoppers, but will need to be
addressed as time permits.
Late in the shift (of course the rep had left and wasn't able to see
the problem), a wafer was broken in the unload cassette area. It
somehow didn't make it from the robot hand off to the slot in the
cassette. We were unable to confirm the exact cause, however, we did
adjust the lifter "variable/off set" to rise higher to meet the wafer.
A shift
|
| 49.70 | dropped wafer in unload station | FABSIX::J_SADIN | Freedom isn't free. | Tue May 06 1997 15:52 | 11 |
|
wafer dropped in the unload station. It appears that the wafer
lifter did not come up to meet the robot. Wafer lifter moved fine in
manual mode. Rebooted the tool to clear out its brain and ran
verification wafers fine. Returned to production.
a-shift
|
| 49.71 | cmp-scrub.a3 wafer drops | FABSIX::J_SADIN | Freedom isn't free. | Wed May 07 1997 19:37 | 14 |
|
monitored tool almost constantly for the past two days to try to
determine why it is dropping wafers. Neither we nor field service could
determine why the wafers are being dropped in the spin station and in
the unload station. The only repeatable portion of the error is that it
is always dropping the first wafer it tries to unload in the unload
cassette.
Please continue monitoring system. Thanks.
a-shift
|
| 49.72 | Tool still dropping wafers in SPIN station | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu May 08 1997 09:48 | 49 |
| The tool left a wafer in the spin station. It errored
for the wafer not breaking the tower sensor. The wafer was
recovered and I was showing Dave M. the WAFER RECOVERY
option and I left a wafer in the spin station. I tried
recovering a wafer first from the INSIDE station to show
him that the tool won't let me because a wafer was being
detected in the SPIN station. Well, the tool did recover
the wafer even though there was a wafer present and it
crashed a wafer. We cleaned up the mess and checked the
sensor and it was ok. We repeated the RECOVERY with our
hands on the STOP button and this time, the tool wouldn't
let me recover the wafer because this time it detected a
wafer in the spin station. This incident and the other
issues with wafer drops are only connected through the
PIA board... When robot is picking up wafers from the
spin station, the carriage is in so the wafer sensor has
nothing to do with this. PIA board #1 which has the I/O's
for 1A, 1B, 2A and 2B has multiple I/O's for the spin
station. The board was replaced and verified with 25 wafers.
OPS used it for 3-4 lots and there wasn't one incident with
wafers dropping. The operator went to lunch and came back
and put more wafers in the tool. The tool had been sitting
for almost an hour. Well, it dropped a wafer in the spin
station again. The wafers were recovered the tool was left
in idle for 1 hours. We started up a wafer and it dropped
on us. The spin cycle went through fine. The robot closed
on the wafer and the spin fingers opened just after the robot
fingers closed. The robot appeared to of had over tensioned
and popped back open thus dropping the wafer. The original
PIA board was put back since it was ok. We first replaced
the robot finger stepper motor thinking it was somehow losing
counts after sitting idle. We went through all of the
alignments and just as were ready to run a wafer, we noticed
the two right side front and rear shock absorbers on the
spin station were all loosened up the spin station was able
to bounce around. We re-leveled the spin station and that
was back to normal. We have the robot pretty much all aligned
but as I put in passdown a week ago or so, it looks like the
robot had crashed into something. The the front right robot
finger seems to be hitting the wafer before the other three
do. I loosened up the white plastic bendable piece inside of
"U" section of the robot to see if we could get some compensation
for the fingers and that's were we left it. Ron is on his way
as I type this...
Dead shift
D shift
|
| 49.73 | DROPPING WAFERS IN THE SPIN | FABSIX::B_WESTPHAL | Bradley BP#661 EXT# 6610 | Thu May 08 1997 21:36 | 20 |
|
CMP_SCRUB.A3 - Down for the robot dropping wafers in the spin station. The
Representative made several adjustments. In the spin station he
adjusted the spindle height up, the angle of the carriage, the wafer
sensor time delay, and the cant of the spindle fingers. The whole
receive station was realigned to the pick up point in the spin. The
rollers in the IB station were adjusted in slightly so the wafer
would better clear the spindle fingers. All of the present software
offsets are recorded below.
Load 2050
Unload 480
Wrist at spin 118
Wrist at receive 244
Spin X-port 50
Rotation at spin 836
Rotation at receive 1870
Rlade lifter 11025
Robot fingers 150
|
| 49.74 | Dummy wafer dropped in receive station | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat May 10 1997 09:14 | 19 |
|
A dummy wafer was dropped in the receive station. The wafers
were removed and Ron was called.
After a 1.5 hours of investigating we found two things.
The cable for the right wafer present sensor in the lifter
blade has some shielding damage and needs attention at next
PM.
The other problem was a broken resistor on the Wrist at home
sensor. The resistor was repaired but the sensor still was
questionable. The sensor was replaced and tested ok.
The handling needs to be adjusted which the Rep is doing now.
Brad is in here now so I'll heading out.
BJ
|
| 49.75 | Dropping wafers in the receive station | FABSIX::B_WESTPHAL | Bradley BP#661 EXT# 6610 | Sat May 10 1997 20:09 | 28 |
|
CMP-SCRUB.A3 - Down for dropping wafers in the receive station. Continued
where D-shift left off with the ONTRAK Rep. It was noticed that the
robot fingers didn't jog open properly in teach mode. The stepper
board was exchanged with the send station's board for testing purposes.
The fingers then seemed to work okay. The boards were left in their
exchanged positions because no more stepper boards were in stock and
both stations are operating fine. A shortage was put in for 2 boards
so the sender board can be changed out later and still have 1 in stock.
The software offsets were adjusted again by the Rep. and EE requests
that they not be touched(see Jim Tooker's passdown). A 100 wafer
marathon was run and the tool was returned to production but be advised
the cover for the lifter assembly is off because some screws were
rubbing a sensor cable inside and we want to eliminate this as a cause.
The Rep requested that if a wafer is dropped that the tool be left in
its present condition and that we beep him at 1(800) 504-7906 (his
name is Ron).
Load 2050
Unload 480
Wrist at spin 122
Wrist at receive 234
Spin X-port 50
Rotation at spin 838
Rotation at receive 1870
Blade lifter 11025
Robot fingers 120
|
| 49.76 | Dropped wafer | FABSIX::R_GEE | | Sun May 18 1997 20:19 | 11 |
| The tool dropped a wafer in the receive station this morning,
Ran over 100 wafers. This afternoon it dropped another, always
the first wafer in the cassette. Beeped the east coast field
service manager with no answer. Called the 24 hour Ontrak hotline
to see if we can get a rep. in tomorrow morning, no call back.
Also informed EE. at home.
Logged a Warning in workstream to visually monitor the tool
unloading the first wafer into the cassette.
A shift
|
| 49.77 | Lifter blade problem | FABSIX::R_POIRIER | | Tue May 20 1997 00:39 | 8 |
| While running a boat of wafers, lifter blade stopped working.
It had taken the 1st wafer from the robot, but wouldn't come
back up for the next wafer. We reset the receiver and removed
the cassette. Put the cassette back in and lifter blade worked
fine for the rest of the wafers. 11:30 pm
B Shift
|
| 49.78 | rep working on tool | FABSIX::J_SADIN | Freedom isn't free. | Tue May 20 1997 20:12 | 10 |
|
Rep has been in the FAB since 12:30pm working on this tool. Please
see Glenn (the rep) for details on what has been done. He will be
staying over into "B" shift in order to work on the tool a bit more.
a-shift
|
| 49.79 | Work done by OnTrak rep | FABSIX::R_POIRIER | | Tue May 20 1997 22:38 | 31 |
|
OnTrak rep was here today. He worked on tool and
did the following:
1. Replaced PIA card #9-10. This card controls
Wrist Stepper Motor movement.
2. Fixed leak at Megasonic DI solenoid.
3. Replaced Spin plates and bumpers.
4. Spin finger closed sensor was loose and out
of position. Adjusted and tightened.
5. Output cassette microswitch bracket was loose.
Added lock washers and tightened.
He ran tool all day and couldn't recreate the error
we have been having (dropping the 1st wafer).
He will be coming back in the morning.
Rep is Glen Mouser. Beeper number 1-800-796-7363
pin # 1036620
A shift, B shift
and OnTrak Rep
|
| 49.80 | cpu board replaced | SUBPAC::LANDRY | | Wed May 21 1997 20:26 | 19 |
|
Today......
The rep (Glenn Mauser) came back in to address the scrubber "wafer
dropping" issue. As was the case the previous times, the actual
cause of the problem could not be absolutely identified. We also
could not get the problem to re-occur. Regardless, Glenn went ahead
and changed the CPU board. This was done at 11:30 AM. The system
has run flawlessly the remainer of the day. Lets hope this was the
fix.
Also, he got the Send station sprayer working. Seems the wiring /
connectors was wrong.
Also, fixed a leak on one of the teflon water valves on the manifold
assembly.
A shift
|
| 49.81 | Still in trouble. | FABSIX::L_SHKOLNIKOV | | Fri May 23 1997 07:05 | 21 |
|
The tool broke a product wafer in the spin station tonight.
The robot went down to spin station to pick up the wafer, stopped
and the error came up "Failure in robot. Couldn't get fingers to
close". Ops reset the alarm, pressed start and crunch. The spin
fingers came down with wafer in it while the robot fingers were
already closed. Ontrack rep. has been called with no response.
So we ran about 75 wafers to verify that is not repeated. After
that the tool has been released to production and four hours
later in came up with the same error. The robot gripped the wafer
but the spin fingers did not released it yet. At this time we were
able to check all sensors and didn't find anything unusual. The root
cause of this problem couldn't be 100% identified at this point. So
we placed a second call to Ontrack rep and called to EE. Regarding
this problem the Rep. will be contacting to C shift until then
the tool will remain down.
D - shift
|
| 49.82 | ROBOT ISSUE | FABSIX::J_SWENSON | | Fri May 23 1997 20:20 | 45 |
| ontrak report
-------------
- Reproduced robot fingers closed alarm, could not get spindle
to to drop upon restarting tool.
- Replaced the following component's to stop the finger alarm's
and irregular finger movemnet's::
1. Robot "open and closed flag sensors
2. PIA board #4 (channels 7+8)
3. Stepper board #1 (wrist and finger channel's)
- Replaced the spin station transport drive o-ring
- Realigned spin finger sensors
- Rersistance checked for spin finger stepper motor
- Checked all connectors for spin finger sensor's and motor
- Lengthened micro switch plunger in output station
(used for cassette present
- Tool offsets
LOAD 2050 ROTATION AT SPIN 836
UNLOAD 490 ROTATION AT RECIEVE 1870
WRIST AT SPIN 126 BLADE LIFTER 11070
WRIST AT RECIEVE 240 ROBOT FINGERS 120
SPIN XPROT DELAY 54
ONTRACK/C-SHIFT
|
| 49.83 | Still going. | FABSIX::L_SHKOLNIKOV | | Sat May 24 1997 08:35 | 10 |
| The tool dropped MQC wafer about 10pm last night. the robot released
wafer but receiving blade did not come up to pick it up.The Ontrack rep
has been called. He did reply Shortly after that and told me that some
corrective action will be taken. For the time being we rebooted the
tool, ran 75 wafers and released tool to production. Three hours later
the tool dropped two product wafers the same way. Currently
troubleshooting the problem. Will pass it to C-shift.
D-shift.
|
| 49.84 | Robot drop off problems at Lifter | ASDG::POIRIER | | Sat May 24 1997 20:33 | 28 |
|
Robot drop off problems:
------------------------
The robot was dropping wafers at the recieve station lifter today.
The robot arm (wrist) would rotate past the centerline of the lifter.
This would cause the wafer to miss the lifter by 1/8 ". The only
change that made a difference was removing the robot covers. We
ran 100 wafers with the covers off. Prior to removing the covers,
the robot dropped at least 1 wafer every run.
We replaced the covers but this time they were slightly separated
be for they were tightened. We ran an additional 100 wafers with
no further problems.
Things we noticed:
1) The front lifter cover was rubbing on the cable for the lifter
(wafer present) sensors. The cable is cut thru to the conductors.
The sensors are still functioning normally. We couldn't find
a replacement in the stockroom. It needs to be replaced asap.
2) The stepper motor for the send station is hot to the touch. The
same motors on the other scrubbers are cool. We couldn't persue this
today to to the workload in the room. It appears to be functioning
normally.
|
| 49.85 | Continued wafer handling issues | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed May 28 1997 07:22 | 33 |
|
Took over from the Doctor with the Glen (Ontrak Rep.)
After stepper board #1 smoked during initialization,
the continuity was checked throughout the whole ribbon cable.
The cable was fine!
Replaced stepper card #1 with one from stock.
Formatted hard drive - re-installed software version 9.1.0.
Had corrupt startup/support disks - had to down load files from
SCRUB.C1.
Checked all power supplies with scope - all ok.
Replaced robot wrist motor.
Replaced wafer pinch rollers in inside brush station.
Ran 100 wafer verify with no problems. Around 05:30,
the lifter didn't see a wafer in the first slot and came up
to the upper position. The sensitivity of the amplifiers needed
to be tweaked. Ran another 25 wafers and tool was turned over
to OPS.
Glen will be in again in the morning..
D shift
|
| 49.86 | Rep's Hit list | FABSIX::B_WESTPHAL | Bradley BP#661 EXT# 6610 | Thu May 29 1997 20:42 | 9 |
|
CMP-SCRUB.A3 - Down for various work to be done by the Rep. The ribbon cables
to wrist, fingers, and PIA channels 8 & 9 (going to interface board #2)
were replaced by the Rep. He also fixed a leak in the send station near
the X-port motor. A new version of software was also installed (910B)
To prevent the tool from dropping wafers out of the lifter. This
software insures that atwafer is present in the lifter blade before
opening the robot fingers.
|
| 49.87 | wafer not sensed in unload lifter | FABSIX::J_SADIN | Freedom isn't free. | Tue Jun 03 1997 12:59 | 7 |
|
Wafer not being sensed in the unload lifter. Adjusted gain on left
sensor amplifier up by 1/4 turn. Worked fine after that.
a-shift
|