| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 21.1 | INSTALL CONTINUES | STRATA::WESTPHAL | | Sat May 04 1996 20:15 | 7 |
|
CMP.B3 - Reps continue with there installation checks and alignments. The down
force for the carriers and the conditioner were calibrated. Final
platen run out was noted. Pressures and flows were also checked
and corrected as needed. A pad was also put on as requested by
SPEEDFAM.
|
| 21.2 | Sunday (5/5) Installation Update | SUBPAC::LANDRY | | Sun May 05 1996 20:43 | 32 |
| Today, the reps showed up to continue on with the start-up.
Things accomplished today were:
* ALL DI water sprays were set up. While setting up the sprays, the
system periodically would alarm for LOW DI WATER FLOW. There is a
big pressure drop (~8 PSI) occassionally. Turning up the pressure
only created a different problem, which are that some of the DI
solenoid valves remain ON when they should be shutting off. Lower-
ing the pressure back down allows them to shut off properly. There
is a possibility that the incoming water loop may need to supply a
larger volume (not pressure) to the system. It will be further
looked at in the morning.
* The scrubber was occassionally timing out. The physical movement
was not acceptable. The rails were fine. The speed controlling
valve was adjusted, but good, consistant results were never
achieved. The incoming air to the respective speed valve was in-
creased to 60 PSI. We may change the valve in the near future.
* As of 7:20 PM, the reps have run 100 wafers (NO_TOUCH program) very
successfully. More would have been run, but there was a waiting
line forming at the OnTrak scrubbers. They plan to run more before
leaving for the day.
* Another "potential" check they may attempt (time permitting) is to
calibrate the slurry flows. They are currently running on the high
side.
* No carry over work need be handed off to B shift tonight. Reps are
on or ahead of schedule.
A shift
|
| 21.3 | Slurry leak | FABSIX::R_GEE | | Mon May 06 1996 08:14 | 5 |
| The fitting coming out of the #2 slurry shutoff valve was
leaking, repaired the leak and verified. The system is in
wet mode.
B shift
|
| 21.4 | di pressure | STRATA::RIDLON | Eliminate the obvious | Tue May 07 1996 02:31 | 14 |
| A-shift mentioned having a problem with the DI low pressure alarm. From
my understanding it happened most often when the elevators were
filling. Fiddled around with the system and the only thing out of the
ordinary that was noticed was that the elevator di bypasses were
closed. These were opened up and then DI regulator readjusted up to
24psi inside the machine. Also adjusted the di return regulator thats
in the fluids cabinet so that the incoming DI regulator could be
adjusted to a pressure of 30psi (gauge outside of machine) which
mimics the pressures on b2 and b1. With these things adjusted the DI
pressure holds fairly steady at 24-25psi and the lowest we saw it go
when the elevators were filling was 16psi.
B-shift
|
| 21.5 | crash, due to pad issue | SUBPAC::LANDRY | | Tue May 07 1996 20:36 | 30 |
|
Today, final adjustments were made to the system. More NO_TOUCH
runs were made with good results. Mid Afternoon, the reps decided
to run some wafers touching down on the pad at about 80 lbs Down
force. A couple of table rotations into the run and CRASH. Three
carriers and the pad were trashed. Upon removing the polishing
pad, it was discovered that there was a piece (~ 3" X 10") of
plastic (the material that is on the sticky side of the new polishing
pads) was still attached to the underside of the pad. The gentle
crackling sound of an air bubble (or the material on the underside
of the pad) was heard right before the crash. On another side note,
the pad that was being used had dried out the previous day when the
power to the system off. So, were chalking this crash up to the pad.
The mild mess was cleaned up. Three new carriers were installed.
The system was left in WET MODE for the evening.
The 500 wafer mechanical acceptance run is being planned for tomorrow
morning, utilizing the prescribed programs layed out for the test.
The two pads will be laid down in the morning (or B shift can do
this if they desire tonight). Please keep in mind that there is
only ONE secondary table pad in-house. It is in the draw second from
the bottom of the pad cabinet. It is clearly labeled on the back side
to be used on B3 ONLY. More pads are due in Friday (per my discussion
with Linda Boisoneault). If the primary pad is installed tonight, it
can be conditioned as well, using the standard condition procedure.
Doc
|
| 21.6 | pads replaces | FABSIX::R_GEE | | Wed May 08 1996 07:37 | 4 |
| Placed a pad on both the primary and secondary table. Conditioner
the primary pad, the system is in wet mode.
B Shift
|
| 21.7 | Acceptance preparation day! | SUBPAC::LANDRY | | Wed May 08 1996 20:37 | 45 |
| Well, we had a tentative plan to attempt the marathon run
today, but that was postponed pending further exercising of
the system. This due to the crash which occurred on
Tuesday afternoon. Also, Roe and Hershel went to Fab 6
protocol training in the morning.
What transpired today was actual testing of touchdown onto
the Primary polish pad (and a couple of touchdowns on the
secondary pad). All the recipes that are scheduled to run
during the mechanical acceptance were tested briefly today
(one set of five wafers on each recipe). There were NO
crashes, failures or assists. The system made some noise
(the noise that occurs when excessive vibration occurs) early
in each of the runs, but the noise settled out a few
oscillations into each run.
There is no further work needed to be done by the oncoming shift
tonight. Please leave the system in WET MODE.
Some noteables before the marathon run:
* The recipes on B3 have the slurry being dispensed from one
pump at 1000 ML. The existing tools flow at 551 ML, with both
pumps on (or a total of 1102 ML).
* The recipes have been edited today to remove the second table
polish. This is due to the fact that this remains the one
and only secondary polish pad in-house. Please assure that
the step is edited prior to the acceptance run. ALL marathon
recipes should be checked for this step.
* NO wafers reserved for the marathon have been used yet. They
all remain on the shelf next to the system.
* The pad was just put down Tuesday night/Wednesday morning.
There are not many runs on it yet. The secondary pad has
only seen a couple of wafers. (the ordered pads are due in
on Friday).
* The DI water situation seems resolved since B shift by-pass
adjustments/regulator reset up.
* The acceptance run is scheduled to start Thursday morning.
A Shift
|
| 21.8 | start up | STRATA::TDYER | | Fri May 10 1996 16:50 | 41 |
| +---+---+---+---+---+---+---+
| d | i | g | i | t | a | l |
+---+---+---+---+---+---+tm-+
Semiconductor
I N T E R O F F I C E M E M O
To: CMP.dis Date: May 9th 1996
From: Timothy P. Dyer
Dept: Engineering
cc: Dennis Goodwin Ext: 5072
Node: Scoman::Tdyer
CMP.B3 - INSTALLATION and EQUIPMENT START UP are complete. We have started the
EQUIPMENT ACCEPTANCE portion (500 wafer marathon). The marathon will
continue into the night until the SF reps leave and will resume in
the morning. One DEC EEG tech must work with the reps to monitor
assist and or failures. I have allowed for 3 assist and no failures.
If a wafer STICKS to the pad during LIFT OFF (only) this can be
counted as an assist. Currently we have ONE assist logged, (wafer
stuck at lift off), this allows for TWO more possible assist.
wafer count assist failures recipe problem
50 0 0 IO_MQC,
100 0 0 IO_bin1
150 1 IO_bin1 cassette
200 0 0 IO_bin1
250 0 0 IO_bin1
300 IO_bin1
350 IO_bin1
400 IO_bin1
450 IO_bin1
500 IO_bin1,2,3,io_410
There is only ONE 2nd table pad for B3, it is on the tool. More pads are
due in tomorrow.
|
| 21.9 | update | STRATA::SWENSON | | Sat May 11 1996 09:27 | 49 |
|
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]CMP.NOTE;1 >>>
-< CMP >-
================================================================================
Note 21.8 CMP.B3 EEG PASSDOWNS 8 of 8
STRATA::TDYER 41 lines 10-MAY-1996 15:50
-< start up >-
--------------------------------------------------------------------------------
+---+---+---+---+---+---+---+
| d | i | g | i | t | a | l |
+---+---+---+---+---+---+tm-+
Semiconductor
I N T E R O F F I C E M E M O
To: CMP.dis Date: May 9th 1996
From: Timothy P. Dyer
Dept: Engineering
cc: Dennis Goodwin Ext: 5072
Node: Scoman::Tdyer
CMP.B3 - INSTALLATION and EQUIPMENT START UP are complete. We have started the
EQUIPMENT ACCEPTANCE portion (500 wafer marathon). The marathon will
continue into the night until the SF reps leave and will resume in
the morning. One DEC EEG tech must work with the reps to monitor
assist and or failures. I have allowed for 3 assist and no failures.
If a wafer STICKS to the pad during LIFT OFF (only) this can be
counted as an assist. Currently we have ONE assist logged, (wafer
stuck at lift off), this allows for TWO more possible assist.
wafer count assist failures recipe problem
50 0 0 IO_MQC,
100 0 0 IO_bin1
150 1 IO_bin1 cassette
200 0 0 IO_bin1
250 0 0 IO_bin1
300 0 0 IO_bin1
350 IO_bin1
400 IO_bin1
450 IO_bin1
500 IO_bin1,2,3,io_410
There is only ONE 2nd table pad for B3, it is on the tool. More pads are
due in tomorrow.
|
| 21.10 | additional update | STRATA::SWENSON | | Sat May 11 1996 09:30 | 49 |
| <<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]CMP.NOTE;1 >>>
-< CMP >-
================================================================================
Note 21.8 CMP.B3 EEG PASSDOWNS 8 of 8
STRATA::TDYER 41 lines 10-MAY-1996 15:50
-< start up >-
--------------------------------------------------------------------------------
+---+---+---+---+---+---+---+
| d | i | g | i | t | a | l |
+---+---+---+---+---+---+tm-+
Semiconductor
I N T E R O F F I C E M E M O
To: CMP.dis Date: May 9th 1996
From: Timothy P. Dyer
Dept: Engineering
cc: Dennis Goodwin Ext: 5072
Node: Scoman::Tdyer
CMP.B3 - INSTALLATION and EQUIPMENT START UP are complete. We have started the
EQUIPMENT ACCEPTANCE portion (500 wafer marathon). The marathon will
continue into the night until the SF reps leave and will resume in
the morning. One DEC EEG tech must work with the reps to monitor
assist and or failures. I have allowed for 3 assist and no failures.
If a wafer STICKS to the pad during LIFT OFF (only) this can be
counted as an assist. Currently we have ONE assist logged, (wafer
stuck at lift off), this allows for TWO more possible assist.
wafer count assist failures recipe problem
50 0 0 IO_MQC,
100 0 0 IO_bin1
150 1 IO_bin1 cassette
200 0 0 IO_bin1
250 0 0 IO_bin1
300 0 0 IO_bin1
350 IO_bin1
400 IO_bin1
450 IO_bin1
500 IO_bin1,2,3,io_410
There is only ONE 2nd table pad for B3, it is on the tool. More pads are
due in tomorrow.
Speedfam rep will be in this a.m. 5/11 to complete marathon.
|
| 21.11 | Marathon Run Results/Adjustments/Ready for MQC's | ASDG::POIRIER | | Sat May 11 1996 20:56 | 24 |
|
MARATHON RUN:
------------
The 500 wafer marathon run was sucessfully completed today.
2 assists were logged during the run. Both assists were
with the transfer paddle.
After the run was completed, the Speedfam rep found the a few
problems with he transfer paddle which he corrected.
a) The cylinder was in need of lubrication.
b) The rail assembly was out of adjustment.
c) Loose bolts were found in the assembly.
The pre-aligner flow controllers were adjusted to ensure a
slow and steady clamping motion in the assembly. The fingers
were slamming into the wafer prior to the adjustment.
MQC's:
-----
The system is now ready for MQC's on B shift tonight.
|
| 21.12 | | STRATA::SWENSON | | Sat May 11 1996 21:05 | 50 |
| <<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]CMP.NOTE;1 >>>
-< CMP >-
================================================================================
Note 21.8 CMP.B3 EEG PASSDOWNS 8 of 8
STRATA::TDYER 41 lines 10-MAY-1996 15:50
-< start up >-
--------------------------------------------------------------------------------
+---+---+---+---+---+---+---+
| d | i | g | i | t | a | l |
+---+---+---+---+---+---+tm-+
Semiconductor
I N T E R O F F I C E M E M O
To: CMP.dis Date: May 9th 1996
From: Timothy P. Dyer
Dept: Engineering
cc: Dennis Goodwin Ext: 5072
Node: Scoman::Tdyer
CMP.B3 - INSTALLATION and EQUIPMENT START UP are complete. We have started the
EQUIPMENT ACCEPTANCE portion (500 wafer marathon). The marathon will
continue into the night until the SF reps leave and will resume in
the morning. One DEC EEG tech must work with the reps to monitor
assist and or failures. I have allowed for 3 assist and no failures.
If a wafer STICKS to the pad during LIFT OFF (only) this can be
counted as an assist. Currently we have ONE assist logged, (wafer
stuck at lift off), this allows for TWO more possible assist.
wafer count assist failures recipe problem
50 0 0 IO_MQC,
100 0 0 IO_bin1
150 1 IO_bin1 cassette
200 0 0 IO_bin1
250 0 0 IO_bin1
300 0 0 IO_bin1
350 0 1 IO_bin1 PADDLE UP
400 0 0 IO_bin1
450 0 0 IO_bin1
500 1 0 IO_bin1,2,3,io_410
paddle up
There is only ONE 2nd table pad for B3, it is on the tool. More pads are
due in tomorrow.
After the 500 wafers were run the paddle assy was taken apart,cleaned and
reassembled with 25 wafers cycled without reoccurance of the paddle time
out.
|
| 21.13 | mqc data for 5-13-96 | FABSIX::J_ROA | | Mon May 13 1996 21:00 | 26 |
| Mqc's performed today May 13/96
Head Mean Unif % R/R
1 5890 4.258 2945
2 5616 3.655 2808
3 5852 2.953 2926
4 5292 4.378 3051
Particles before
Head bin7 total scratch lenghth
1 15- 39 0
2 3 24 0
3 2 19 0
4 12 42 0
5 3 21 0
particles after
1 188 575 0
2 284 885 10.7
3 133 411 1.37
4 431 1452 1.36
5 242 775 1.15
|
| 21.14 | Transfer paddle retaught | STRATA::FINN | | Mon May 13 1996 21:11 | 8 |
|
Jim Sadin tried to run wafers to check Polish rates. Paddle did not
rise up before indexing to the left and wedged itself into Teflon stanchion.
Reps retaught "home" and travel positions. Wafer were then completed.
a shift
|
| 21.15 | passdown | STRATA::FINN | | Tue May 14 1996 21:37 | 7 |
|
Process acceptance has begun. Changed pad and carriers per Frank
before acceptance began. Since we are short on carriers, the ones
that were removed are in water in the back room, Please keep them
wet, they can be used in a pinch. They were in spec.
A shift
|
| 21.16 | Lockedout/Taggedout for the night! | SUBPAC::LANDRY | | Mon May 20 1996 20:29 | 18 |
| The system is currently in a LOCKOUT/TAGOUT state.
This is due to the removal of an Infranor. "Said" Infranor has been
installed on B2. The Index Table on B2 stopped. It was discovered
that the problem was a blown Infranor (NO power within it, not power
supply related). Since we have none in stock, Speedfam officials
authourized the removal from B3 to sustain B2 up status. The reps
have requested a new Infranor. Should be in tomorrow morning.
So, the system will remain locked out. The CDA was shut off to allow
the heads/carriers to lower into the load cups of the Index Table to
retain a proper wet status. The lockout is inplace, with Speedfam reps
holding the key. The water guns have been rigged to supply water to
the Index Table and Polish Pad. Please refrain from touching all
setups until the new Infranor arrives. Thanks in advance for your
cooperation in this trying matter.
A Shift / Speedy Guys
|
| 21.17 | New trap intalled on vac pump | STRATA::RIDLON | Eliminate the obvious | Tue May 21 1996 05:16 | 6 |
| New filter traps were found in 94 stock and installed onto B2 and B1.
Replacement filter elements were also found and are in the top of the
tool box with two more traps.
B-shift
|
| 21.18 | B3's big adventure | SUBPAC::CMP | | Tue Jun 04 1996 17:38 | 4 |
| we have begun the installation of the motor on tool 024 (B3) we are
half way completed with the motor pulled this morning and the new one
replaced this afternoon. we hope to have it completed by thursday.
|
| 21.19 | doors derailed | FABSIX::B_FINN | | Mon Jun 10 1996 20:38 | 8 |
|
3 of four sliding doors on b3 needed to be aligned to track,
two were actually removed and replaced. Two bottom guide rail's were
shimmed due to low spots.
A shift
|
| 21.20 | boot errors | STRATA::FINN | | Tue Jun 11 1996 21:25 | 17 |
|
Eng. tried to start a polish cycle. System had unknow wafers on
carrier. He removed the mystery wafers and again tried to start cycle. This
time the multihead traveled out to the table in a lost attempt top polish.
He EMO'ed the system and then started the system back up. The system began to
power up, but then shut down completely and would not boot up again. At
this point I was called. Checked EMO and door panels then found breaker
off for vacuum pump and CPU controller. Reset both and system powered up past
K2, but software did not boot nor did the CRT come on. Rear CRT was also dead.
CPU has failure as well as all Digital and Analog I/O boards (dio/aio) the
serial comm card (board 5)is working as well as all Dcx cards. Reset CPU with
no luck.. Traced power via schematic through system seems OK as does all
power supplies. 5 and 24 volts is making it to the i/o's ...
Looks like the CPU. Kevin has come back to the plant to work on it.
A shift
|
| 21.21 | boot problem/no screen | FABSIX::L_SHKOLNIKOV | | Tue Jun 11 1996 22:49 | 16 |
| arrived at digital at 20:00hr received pass down from Brendon. At tool b3
observed what was happening and this is the course of action.
1) powered tool down.
2)reset every ckt brkr manually
3)reset main power switch
4) powered tool up to let it cycle, tool appeared to cycle but no
screen on front
5)reset cpu bd all bds cycled
6) removed video splitter cable and reset cpu again, complete tool
cycled up.
7)powered off and hard cycled system from scratch and tool booted
8) re-installed all carriers and tool is in wet mode
will check video cable tomorrow
KEVIN
|
| 21.22 | motion problems w/polish table | SUBPAC::CMP | | Wed Jun 12 1996 16:19 | 7 |
| We corrected a problem with jerky rotation on the polish table. We had
looked at the belt tension being possibly to tight and we loosened the
tension only to find the problem still there to a lesser degree, next
we checked the wiring to the motor and discovered that 2 of the
windings to the motor located in the junction box had become
disconnected, we reconnected the wires and tested with no more jerky
motion The tool is now fit for use.
|
| 21.23 | upgrade completion | SUBPAC::CMP | | Mon Jun 17 1996 14:13 | 4 |
| The upgrade for the bus bar and new style cables for the infranors are
now completed, also done as part of the upgrade was voltage adjustments
for the infranors and a software change on dcx.cmp (sets operating-
parameters). Tool was tested and now ready for use.
|
| 21.24 | carrier at polish reed switches | FABSIX::R_GEE | | Tue Jun 18 1996 08:10 | 21 |
| The system ran good for the first 3 hours of our shift.
A very annoying error started appearing "Waiting for carriers
down" during polish and at the secondary pad, but infact they
all were down. It would display the error on the touch screen
with no buzzer and keep polishing until the STOP button was touched.
When the STOP button was touched the carriers would raise and
the system would halt.
It wouldn't allow us to exit the process screen or press any
button but STOP, when you hit STOP twice the system would complete
the next function. For example, press STOP twice the MTHA moved
to the polish table, press STOP two more times , unload flipper
would move to the unload cup, press STOP two more times, unload
flipper to water drain position. This would go on until all 5
wafer in the index table were put into the exit cassette. The
system would then allow you to exit the process screen, fun stuff.
We found that the reed switches for heads #3, #4, & #5 at polish
table and at wafer clean positions were intermittently not being
made. Adjusted the reed switches and ran test wafers.
B Shift
|
| 21.25 | elevator 1 home off | STRATA::RIDLON | Eliminate the obvious | Wed Jun 19 1996 05:34 | 10 |
| Cassette 1 was double loading in slot 1 only, the rest of the cassette
would load fine. Found that the first wafer was hitting the cassette.
Recalibrated the home for elevator 1 so that the first wafer would load
smoothly. Had to decrease the counts by about 3000 before the wafer
would load smoothly which led us to check the elevator 1's sensor. It
was loose. After it was tightened we recalibrated elevator 1's home and
then tested a cassette load of wafers with no problems encountered.
b-shift
|
| 21.26 | cabling corrected | SUBPAC::CMP | | Wed Jun 19 1996 11:12 | 6 |
| The cabling for the keyboard is now plugged back in so the front and
rear of the tool can now be accessed when needed.
Rich (Mr. Goodwrench)
|
| 21.27 | Slurry flow problems and touch screen issue | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Jun 21 1996 08:33 | 22 |
|
Came to have both slurry pumps not working. Went through
schematics and found loose connectors on sb#12 and tb#4. Both
slurry pumps now working. The slurry flow was now checked.
slurry pump #1 was flowing fine. Pump #2 was checked and only
DI water came out. We found the Slurry Pump #2 DI rinse flow
control all the open causing only DI water to flow through
the tool. The flow control was closed several turns to match
#1. The flow was tested and the flow amount was ok and it was
only slurry. The rinse was the turned on and it purged the
lines clear.
Something else was happening this morning. After the tool was
powered down due to frozen screen we powered it up and got the
error message ellodev not installed divide overflow - so we removed
all communication and video cable which goes to rear of the tool
and disconnect second monitor. The tool powered up fine.
D shift
|
| 21.28 | Slurry Delivery Trouble / Timeout Errors - Carriers at Scrub | ASDG::POIRIER | | Fri Jun 21 1996 20:30 | 29 |
|
* Slurry deliverly / sensor errors:
--------------------------------
System timed out for "No Slurry Flow". There was an air pocket in the
top 8" of supply tubing just under the sensor in the Fluids Cabinet.
Slurry was flowed manually and the air pocket disappeared only to
return 15 min later. Ashland was called and told us that they had
just changed a slurry filter. This activity evidently causes air
pockets to flow through the supply system and end up in the Fluids
Cabinet at the Slurry Sensor location. THis causes errors!
a) Ashland has agreed to notify the CMP area whenever filter changes
are done.
b) We are considering a new location for the slurry sensor to avoid this
problem in the future.
Timeout Error for "Carrier At Scrub":
-------------------------------------
The system errored for this problem today. The system displayed
"Press any button to continue". Earl tried this and it timed out
again. The tool was EMO'd, rebooted and 5 wafers were sucessfully
run for verification.
event.
|
| 21.29 | high particles and uniformity | FABSIX::R_GEE | | Mon Jun 24 1996 08:36 | 11 |
| The system failed mqc's for high uniformity and particles.
Changed the two pads and ran breakins then mqc's. The mqc's
failed for particles and head #4 had high uniformity.
We changed carrier #4 and also the scrub brushes. Ran mqc's
again, the uniformity failed with all heads around 11%,
particles are still out of spec also at 300. The ID/OD will
need to be adjusted and hopefully running more wafers will
bring the particles down.
B Shift
|
| 21.30 | Head #3 rotation motor controller | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jun 27 1996 05:20 | 13 |
|
B3 was powered down for the weekly PM to check
for leaks. After everything was cleaned up, the tool
was powered back up but head #3 wasn't rotating. We
lost the Infranor apparently from either the EMO or
power-up. The tool was off for a good 15-20 minutes.
There are no rotation Infranors in stock. Kev from
SPEEDFAM has one and will be bringing it into the fab
at the change of shift. The tool has a WARNING on the
tool for head #3 but the tool can be run if needed.
D shift
|
| 21.31 | faulty wafer loss detection | STRATA::WESTPHAL | | Fri Jun 28 1996 09:28 | 8 |
|
CMP.B3 - Problems with wafer loss detection. The tool was detecting lost
wafers while testing an engineering pad. Attempted to jump out wafer
detect sensors but this lead to invertor errors. The tool was then
returned to production w/ an IC 1000 installed and the sensors
adjusted accordingly. Breakin wafers were run with no sensor errors.
|
| 21.32 | Table Gearbox Is Leaking Again | ASDG::POIRIER | | Sat Jun 29 1996 20:01 | 10 |
|
Oil Leak In Table GearBox:
---------------------------
FYI: The oil puddle under the gearbox is continuing to grow.
It's now approx 6" in diameter.
C Shift.
|
| 21.33 | pad cond / scrub motor | FABSIX::B_FINN | | Wed Jul 03 1996 20:36 | 14 |
|
Scrub brush motor was intermittently not working. Checked
cabled and brushes (motor), motor was shot. None in stock room 94 or
cabinet. Kevin had one in F.S. office. It was an upgraded motor like
(B1 AND B2). Gear ratio is different. Installed motor and it screamed.
Kevin came in to perform calibration to rpm. Procedure took longer
than both of us expected. Aok now
Also checked Pad Conditioner down force. It was 89.9 PSI. We adjusted
back to 77 PSI. Also asked manuf. tech to run MQC again. It passed
fine. Tim would like B1 and B2 Pad conditioner checked also as they
become available. 12 lots in room now.
A shift
|
| 21.34 | Start up B3 | LUDWIG::SWENSON | | Fri Jul 05 1996 20:33 | 10 |
| Jumpered di pressure switch
powered system up with no problems
no carriers were installed due to there were only 16 new carriers,
cut primary pad.
retrieved new brushes from stockroom for scrubber.
C Shift
|
| 21.35 | Conditioner, downforce and scrubber issues | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 11 1996 07:59 | 41 |
|
The downforce was checked on all (5) heads. No problems
found. All heads were within tolerance except head #3 which
out by 17 lbs. +/- 2 lbs. Below is the chart results. After
the downforce was checked and MQC's were run, the tool was still
in spec. Next, I put the original conditioner wheel back on.
The tool failed for fast removal. Frank is being called as
instructed. We noticed scratches on the particle wafers. While
looking at the scrubber, it scrubs the wafer but stops during
the cycle for (4) seconds or so before the scrubber drops down
to come back. It cycles fine with no wafer in it. The
spacer configuration on the (4) posts that support the wafer
after the pedestal places the wafer are not configured right
but it looks like that it was put that way for a reason. I
took off the front bottom brush and the scrubber works fine.
I left the bottom brush off and floating in the Elevator #2
platform for now until I speak with the Reps.
HEAD PRE POST
===========================================================
#1 INPUT COEFF.--.47601 | INPUT COEFF.--.45476
OUTPUT COEFF.--5.87003 | OUTPUT COEFF.--5.90981
373 LBS | 376 +/- 1 LBS
===========================================================
#2 INPUT COEFF.--.47964 | INPUT COEFF.--.45422
OUTPUT COEFF.--5.81698 | OUTPUT COEFF.--5.86737
371 LBS | 376 +/- 1 LBS
===========================================================
#3 INPUT COEFF.--.50469 | INPUT COEFF.--.50469
OUTPUT COEFF.--5.83820 | OUTPUT COEFF.--5.59947
394 LBS | 376 LBS
===========================================================
#4 INPUT COEFF.--.47007 | INPUT COEFF.--.46032
OUTPUT COEFF.--5.77454 | OUTPUT COEFF.--5.69231
380 LBS | 376 +/- 1 LBS
===========================================================
#5 INPUT COEFF.--.46144 | INPUT COEFF.--.46144
OUTPUT COEFF.--6.03714 | OUTPUT COEFF.--6.03714
377 LBS | 377 LBS
===========================================================
|
| 21.36 | B3 spin speeds checks | STRATA::KRUPA | | Thu Jul 11 1996 18:27 | 17 |
|
Checked Spins speeds of table, conditioner wheel, and carriers. All
appeared to match B2 except conditioner wheel. Results were:
B3 B2
set-point actual actual
carrier 37 36.5 36.5
table 37 39 39
condition wheel free ~29.5 ~33
Adjusted the postition of the conditioner from 9.0 to 10.0 and no
change in speeds were observed.
Ran MQC's w/ no touchdown on 2nd table(like B1) and rate was
~3200A/min...compared to ~3400A/min w/2nd table. 2nd table may
actually be removing a couple hundred A. Need to further investigate
oxide loss on the driven 2nd table. Due to a lot of work in the room
B3 was released to production until we have more time to run
experiements.
|
| 21.37 | CARRIER#4 NOT ROTATING | STRATA::WESTPHAL | | Thu Jul 18 1996 20:48 | 4 |
|
CMP.B3 - DOWN FOR THE CARRIER #4 NOT ROTATING. THE INFRANOR WAS REPLACED AND
THE TOOL WAS RETURNED TO PRODUCTION.
|
| 21.38 | carrier one losing wafers/ down force issue. | STRATA::SWENSON | | Fri Jul 19 1996 20:00 | 11 |
| 1. carrier one not coming down for wafer clean.
2. losing wafer out of carrier one.
3. found the ep for carrier 1 to be misadjusted, adjusted the zero
slightly which enabled carrier one to proceed down to wafer clean.
4. The ep regulators need to be checked and down force recalibrated
A call is being placed to speedfam for the analog output values and
corresponding pressures to correctly calibrate the ep regulators.
|
| 21.39 | Head #1 DF & Conditioner DF EP Regulators need Recalibration | ASDG::POIRIER | | Fri Jul 19 1996 20:52 | 26 |
|
Spindle #1 Down Force EP Regulator:
----------------------------------
Upon completion of the Monthly PM, we noticed that Spindle #1 was not
moving down to the scrub table with the other 4 heads. This condition
led us to the zero pot on head #1's EP Regulator. A quarter turn on
the zero pot made the head come down with the others. After further
test runs we noticed head #1 repeatedly flying-out wafers at lift
off. We attempted to calibrate the Ep regulator but could not find the
analog output values and corresponding pressure values needed to
properly perform the calibration.
We called Speedfam and they agreed with our diagnosis. They are faxing
us a calibration procedure in the morning.
HEAD #1 HAS BEEN TAKEN OFF LINE UNTIL THE EP REGULATOR CAN BE
CALIBRATED. PLEASE RUN WITH 4 HEADS UNTIL FURTHER NOTICE.
C Shift.
Conditioner EP Regulator:
------------------------
After completion of the Monthly PM we noticed the conditioner not moving
down to the table on every cycle. We turned the zero pot on the
conditioner EP Regulator a quarter turn and the conditioner performed
normally. This ep regulator will also be recalibrated tomorrow when
Speedfam faxes us the calibration values.
|
| 21.40 | TROUBLE W/CARRIER#1 / SCRUBBER GONE | STRATA::WESTPHAL | | Sat Jul 20 1996 20:39 | 9 |
| CMP.B3 - Down the carrier#1 not going down at 2nd table and wafers sliding out
on the primary table (same head). Believe that the EP regulator is
out of calibration. Waited for most of the day to receive a
procedure from SF. A procedure was found in the SF office and
followed. The down force for head #1 will need to be done over. The
tool presently sets at PART waiting for the upper and lower scrub
assemblies that were put on CMP.B2. Speedfam has been notified about
the scrubber and they are ordering the appropriate parts.
|
| 21.41 | water leak | FABSIX::R_GEE | | Sun Jul 21 1996 08:09 | 7 |
| The system errored for a moisture sensor activated.
Founds a lot of water under the elevators. Cleaned the water
out repaired the leak under the #2 elevator and replaced the
moisture sensor cloth.
B Shift
|
| 21.42 | DOWNFORCE AND EP REGULATOR | STRATA::FINN | | Sun Jul 21 1996 20:24 | 58 |
|
Repaired water leak at feed thru of elevator #1. Tested by dumping
filling and cycling elevator. Check throughout day, its leak tight as of
7pm.
Checked Pad condition downforce, based on C shifts comments. Found it
to be 90 PSI. Recalibrated, to 77 PSI.
Checked EP regulator for Carrier #1, per procedure in F.S. office.
VALUE ANALOG CURRENT PSI DF
0 0 4 0 0
500 2020 5.95 6.2 53.6
1000 1828 7.9 13.8 142.5
1500 1636 9.85 21.3 243.5
2000 1445 11.8 28.8 333
2500 1254 13.76 36.2 421.4
3000 1063 15.71 43.6 510.3
3500 871 17.66 51.1 600.6
4000 679 19.62 58.5 690.7
4095 641 19.99 59.99 706
Then performed downforce on Carrier #1. Found it low at 351. Adjusted
to 377. Then checked other carriers, and found them low, had to calibrated
all five carriers.
Carrier 1:
OLD NEW
Input coefficient: 0.47903 Input coefficient: 0.45150
Output coefficient: 6.79045 Output coefficient: 6.08753
Carrier 2:
Input coefficient: 0.48834 Input coefficient: 0.46601
Output coefficient: 5.52785 Output coefficient: 5.79841
Carrier 3:
Input coefficient: 0.51432 Input coefficient: 0.47066
Output coefficient: 5.59947 Output coefficient: 6.13793
Carrier 4:
Input coefficient: 0.47066 Input coefficient: 0.46716
Output coefficient: 5.61008 Output coefficient: 5.66844
Carrier 5
Input coefficient: 0.48898 Input coefficient: 0.45476
Output coefficient: 5.57029 Output coefficient: 5.98674
Placed system in Wet idle.
A shift
|
| 21.43 | SCRUBBER MOTOR | SUBPAC::CMP | | Mon Jul 22 1996 16:10 | 8 |
| THIS IS FOR THE SCRUBBER PROBLEM.
AFTER SPEAKING WITH THE TECHS OVER THE WEEKEND, ORDERED PARTS FOR A
SCRUBBER THAT WAS THOUGHT TO NEED REBUILDING.ON MONDAY FOUND THE MOTOR
WAS THE ONLY THING THAT NEEDED REPLACEMENT AND THE SCREW THAT SECURES
THE MOTOR SHAFT TO THE DRIVE ASSY.LOOSE TO THE POINT OF NOT TURNING
THE BRUSHES. THERE IS A ??? OF WHETHER THE MOTOR NEEDED TO BE REPLACED
OR JUST TIGHTENED TO THE DRIVE ASSY.
|
| 21.44 | Table spray nossle / replaced carrier #5 | FABSIX::R_GEE | | Tue Jul 23 1996 07:50 | 10 |
| Replaced the primary and secondary pads.
Every run during the pad breakin a wafer was left on the
table by head #5 we replaced carrier #5.
Some how one of the hand spray nozzles used to clean the
table got caught by the table and ripped out. Had to repair
the hose and replace all the table drain tubes.
B Shift
|
| 21.45 | SCRUBBER REPAIR | SUBPAC::CMP | | Thu Jul 25 1996 12:02 | 7 |
| REPLACED A FEW BEARINGS IN THE SCRUBBER THAT WERE VERY WORN, MADE
BELT ADJUSTMENT FOR A VERY TIGHT BELT ON UPPER UNIT. I PUT B2'S
SCUBBER BACK TO B2 AND B3' IS NOW RETURNED. I DID NOT NOTICE ANY
UNUSUAL WEAR WITH COMPONENTS EXCEPT FOR THE BEARINGS THAT WERE
REPLACED.
RICH (MR. GOODWRENCH)
|
| 21.46 | Warning status on scrubber | FABSIX::L_SHKOLNIKOV | | Fri Jul 26 1996 08:20 | 11 |
|
Scrubber wasn't working again this night.It scrubs the wafer but stops
during the cycle before the scrubber drops down to come back.
It cycles fine with no wafer in it. I put warning on it. Looks like the
lower unit going up too far. So I pulled out the scrubber assembly and
found that the drive belt in lower unit was set too tight. I adjust the
drive belt tension. cycle 25 wafers works fine so far. The tool passed
MQC's and running product now.
Leon
|
| 21.47 | no slurry thru pump 2 | STRATA::RIDLON | Eliminate the obvious | Sun Jul 28 1996 05:33 | 13 |
| Down for low removal rate from C-shift. They had replaced the pad with
no change. We checked the carrier step heights and found 4 of the 5 to
be off. Tightened the plate screws (1/8 to 1/4 turn) and the step
heights came back in. Reran mqc's and the removal rate was still low.
We then put on a precut pad and while the machine was running breakins
the slurry looked to clear. Found that no slurry was flowing through
pump 2. This was traced back to the incoming DI psi being to high at
36psi which was not allowing the slurry pump 2 di rinse solenoid to
close. Lowered the di psi to 30 and slurry flowed fine. We checked the
low di alarm by dumping both elevators and the pressure didn't go below
16psi.
B-shift
|
| 21.48 | Mapper error | FABSIX::R_GEE | | Tue Jul 30 1996 07:52 | 5 |
| Came up with a mapper error, it wouldn't recognize
cassette "A". powered down the mapper, powered
up the mapper and homed the load module, all set.
B Shift
|
| 21.49 | b3 scrubber | SUBPAC::CMP | | Thu Aug 01 1996 15:48 | 3 |
| checked and adjusted scrubber rpm
|
| 21.50 | unload flipper positioning and scrubber station | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Aug 02 1996 06:02 | 11 |
|
Two problems....
1 - wafers being mis-handled at unload.
- retaught fingers at unload cup position
2 - wafers cock-eyed at scrubber.
- one of the alignment spacers fell off it's
post
BJ
|
| 21.51 | PARTICLES | STRATA::WESTPHAL | | Sat Aug 03 1996 20:28 | 5 |
|
CMP.B3 - Down for high particles. Changed both pads. Cleaned the conditioner
ring and process area up. Scrubbed the carriers. Returned the tool to
production. It passed MQCs.
|
| 21.52 | Westec tie-in... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Mon Aug 05 1996 19:40 | 9 |
|
Tool went down to EXTERNAL for facility tie-ins for
CMP.C1-7. Unfortunately, the GCW and other items are
tied into all of the tools in CMP-6. A completed CMP
shut will be planned for the near future. The weekly PM
was completed when the tool came back.
A shift
|
| 21.53 | B3, sensors getting tired. | FABSIX::L_SHKOLNIKOV | | Wed Aug 07 1996 08:11 | 19 |
|
Tool alarmed numerous times for time-out waiting for
scrubber to go to home, It wouldn't go all way back.
Found scrubber home sensor (pushbutton) stack inside of the sensor
assembly. I removed sensor out of the tool took it apart and cleaned it.
Sensor seal is broken and water getting inside. It is working now but
needs to be replaced.
Later tonight we found some slurry in the slurry box slurry line #1 was
ready to blow but the Moisture Sensor did not alarmed. We replaced the
slurry lines and reset leak sensor module.
Finally wafer detection system misalarmed twice for lost wafer from
carrier #5 so wafer detection sensor #5 has been adjusted - no problem
since than.
D - shift
|
| 21.54 | particles | LUDWIG::WESTPHAL | | Wed Aug 07 1996 20:45 | 8 |
|
CMP.B3 - Down for high particles. The tool was at engineering most of the day.
Slurry was drawn directly out of a 55 gallon drum to eliminate the
slurry system. The particles failed. The pad was changed and MQCs
rechecked. The MQCs failed for particles again. MQCs were checked
using a recipe with an extended 2nd polish time but the tool still
failed. Please follow Engineering's action plan sent out by Krupa.
|
| 21.55 | PARTICLES | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Aug 08 1996 07:51 | 14 |
|
C shift ran Frank's game plan... still failed for
particles. New carriers were put on and a new pre-cut
pad from STK-6 was installed. The 2nd table pad was
replaced as well. The tool was thoroughly cleaned.
Break-ins are starting now.
ps.. B2 passed paricles, lower than old spec values...
D shift
|
| 21.56 | Table spinning out of control | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Aug 08 1996 08:00 | 13 |
|
When the OPS tech started running the tool for
break-ins, the table started rotating fast while
the tool was loading up the first (5) wafers.
Leon was able to get out to DOS but the table kept
spinning fast and wouldn't stop. The tool was then
softbooted and it kept running. The tool ended up
being EMO'ed. It came up fine after that.
D shift
|
| 21.57 | PARTICLES | STRATA::WESTPHAL | | Fri Aug 09 1996 20:22 | 14 |
| CMP.B3 - Down for high particles and testing by process engineering. For the
full passdown please refer to Tim Dyer's passdown. Had some handling
problems with the unload flipper manually exercised the flipper and no
further problems were experienced. Started to follow engineering's
particle get well plan. Ran the test using the unfiltered fab4
slurry. The results were as follows:
PRE POST
---------------------------------
1. 13-37-0 | 343-1344-0
2. 11-35-0 | 272- 918-0
3. 6-34-0 | 333-1303-0
|
| 21.60 | B3 crash | FABSIX::J_SWENSON | | Sat Aug 10 1996 20:37 | 8 |
| Tool crashed 30 seconds into segment 6.
replaced carriers 1,2,and 5.
cleaned tool and reset counters.
returned system back to porduction for Mqc's.
c-shift
|
| 21.58 | Door rollers | FABSIX::R_GEE | | Tue Aug 13 1996 08:21 | 11 |
| The door interlocks kept stopping the system. Found all
4 process doors were off the tracks. Most of the screw holes
that hold the door rollers on were stripped. Tapped out the hole
on the top of the door to 10-24 and reinstalled the rollers.
We did this only to some of the top holes, didn't want to due
this to the bottom rollers because they won't roll only slide.
This is only a short term fix, we need new door rails to repair
them correctly.
B Shift
|
| 21.59 | belt skipping. | STRATA::RIDLON | Eliminate the obvious | Wed Aug 14 1996 07:50 | 7 |
| Polish table belt slipping on bkin3 recipe. Slurry was suspect. Ashland
was changing the filter at 6am and the last time the filter was checked
was at 8pm. However after the filter was replaced 5 more breakins were
run and the belt still slipped, only once though. Leaving in wet mode
for A-shift eval.
B-shift
|
| 21.60 | loose belt | SUBPAC::CMP | | Thu Aug 15 1996 14:43 | 3 |
| Found that the belt from the motor to the center shaft was loose,(the
bolts that lock the hub in place were loose) adjusted the belt tension
and retightened the hub bolts.
|
| 21.61 | loose belt | SUBPAC::CMP | | Thu Aug 15 1996 14:46 | 2 |
| Found that the belt from the motor to the center shaft was loose( bolts
on the hub) readjusted the tension and retightened the bolts.
|
| 21.62 | Vacuum pump moved | FABSIX::R_GEE | | Mon Aug 19 1996 08:34 | 7 |
| Relocated vacuum pump to the black box below the floor.
Test fine.
B-shift
|
| 21.63 | a multitude of problems | SUBPAC::LANDRY | | Mon Aug 19 1996 20:13 | 27 |
| Several problems with this system today............
* The Unload Flipper was alarming for "no wafer present", even though
it possessed a wafer. The alarm was happening on every wafer, very
consistant. Checked the I/O (with a wafer being gripped) for proper
functionality. The LED remained off. Found that the travel sweep
of the gripper to wafer was excessive. Observed that the I/O (#7)
would flash as the grippers were closing but once gripped, the I/O
was de-luminated. Therefore, made a mechanical adjustment of the
grippers to reduce the distance of the grip sweep. Cycled many
times, proper I/O sequencing each time. Also adjusted the flipper
to the unload cup position to better grip the wafer as it was
raising the wafer when gripping.
* The screen locked up today while trying to unload wafers. This
occurred when the above problem was happening. Had to reset the CPU
to correct the problem.
* The system later on alarmed for "low DI water pressure". Checked
the incoming supply and the internal gauge. Both were reading fine.
Hit a key to continue and the alarm never re-appeared. BUT, the Pad
Conditioning sequence remained on (virtually locked up). We were
able to exit the "run" screen, go into manual, and end the pad con-
ditioning segment. Went back into the "run" screen and restarted.
No problems since that.
A shift
|
| 21.64 | annoying little things, Part II | SUBPAC::LANDRY | | Tue Aug 20 1996 20:31 | 26 |
| More annoying little problems today........
* The system powered down today for no apparrent reason. Had the 240
VAC coming into the machine, but unable to power up the system.
Traced the problem to the Inverter Cabinet interlock. Repaired the
problem and power up was accomplished.
* From there, the system was getting "process door open", not able to
initialize. Found several switches not making it due to poor door
rollers. Fixed those and away we went.
* Next up was a couple of second table carrier rinse valves staying on
when they should have shut off. DI water everywhere!!! Even out
the top of the system onto the floor. Found the incoming pressure
up over 30 PSI. This high pressure is too much for the valves to
handle. Reduced the pressure to 24 PSI for the fix.
* Again today, the DI water alarm went off for no apparrent reason.
As was the case yesterday, it happened when the system was in a Pad
conditioning cycle. Hit a button to continue and off we went.
Again like yesterday, the conditioning cycle locked up, requiring us
to exit out of the screen to stop the cycle.
Doc
|
| 21.65 | Wafer Loss Detection Sensors Adjusted | ASDG::POIRIER | | Fri Aug 23 1996 20:17 | 11 |
|
Wafer Loss Detection Sensors:
----------------------------
The wafer loss detection sensors were adjusted due to numerous
assists for wafer loss errors.
C Shift.
|
| 21.66 | MAPPERS GROUNDED | STRATA::RIDLON | Eliminate the obvious | Tue Aug 27 1996 06:36 | 7 |
| Mapper intermittently failing while trying to map cassettes. Powering
down and back would correct. We installed ground wires to both mappers
to eliminate any possible static build up problems. Hasn't failed since
but it wasn't happening all the time to begin with.
B-shift
|
| 21.67 | Mapper Timeout / Scrubber Timeout Errors! | ASDG::POIRIER | | Thu Aug 29 1996 20:27 | 26 |
|
Mapper Error:
------------
The system errored for "Mapper Timeout" this morning. The Cassette
mounting base would tilt and relevel itself properly but the mapper
would only rise to the first slot then stop. After 4 repetitions, the
mapper would timeout. The program was exited to DOS, the Kensington
Controller was reset and a soft boot was performed. The mapper operated
normally for the rest of the shift.
The Speedfam rep ordered a replacement Kensington Controller as a
precautionary measure. It is expected to arrive tomorrow 8/30.
Based on past performance history, Richie believes the Controller
is apt to fail soon.
Scrubber Movement Trouble:
-------------------------
The system was erroring this afternoon for "Scrubber Timeout". The
scrubber was hanging up during its in/out travel. The rails were
cleaned & lubricated but the scrubber still did not move as smoothly
as we wanted. The flow controllers were opened up slightly and the
motion returned to normal.
C Shift.
|
| 21.68 | Scrubber Timeout Errors / Dampners Removed | ASDG::POIRIER | | Fri Aug 30 1996 20:38 | 13 |
|
* Scrubber Timeout Problems:
_________________________
The Scrubber Dampners (Air Shocks) were removed from Scrubber today.
The Speedfam rep tells me that they were removed from B1 & B2 as well.
It appears that they are more trouble than they're worth. The front
dampner had lost its ability to absorb shock and was causing the
scrubber to bounce back off the "scrubber in" sensor.
Both front & rear shocks were removed and the flow controllers were
adjusted for slow movement to prevent slamming at the end of the
stroke.
|
| 21.69 | Load Flipper Failing To Pick Up At Pre Aligner | ASDG::POIRIER | | Sat Aug 31 1996 20:31 | 9 |
|
Load Flipper Problems:
---------------------
The Load Flipper failed to grasp a wafer from the pre aligner 3 times
today. We weren't able to observe this condition, and since the tool was
run for most of the shift, we didn't get an opportunity to investigate.
C Shift.
|
| 21.70 | INVERTER ERROR | SUBPAC::CMP | | Thu Sep 05 1996 17:39 | 2 |
| TOOL HAD AN INVERTER ERROR, RESEATED THE CABLES FROM INVERTER TO
COMPUTER AND BROUGHT BACK UP.
|
| 21.71 | Inverter Communication Errors | ASDG::POIRIER | | Thu Sep 05 1996 20:22 | 9 |
|
Inverter Timeout Errors:
------------------------
Inverter Timeout errors repeatedly occured today during Wet Mode.
The series #10 computer cable next to the Inverter was snugged.
The system has been in Wet Idle since 3:00 with no further errors.
C Shift.
|
| 21.72 | Mapper Error | FABSIX::R_GEE | | Tue Sep 10 1996 08:39 | 5 |
| The system developed a Mapper error, tried several times
to map the cassettes with no luck. Powered down the mapper
and re-homed the load module, all set for now.
B Shift
|
| 21.73 | Robot to cassette adjustment | FABSIX::R_GEE | | Wed Sep 11 1996 08:28 | 7 |
| The robot was intermittently missing wafers at cassette #1,
found the robot to cassette alignment was off.
We adjusted the robot position and cassette tilt for both
#1 & #2 cassettes.
B Shift
|
| 21.74 | Carriers changed/System lockup | LUDWIG::SWENSON | | Fri Sep 13 1996 10:14 | 4 |
| Changed carriers 1,2 and 3 due to high wafer count.
While in service mode tool locked up for timeout for process door
inter-lock. Tool needed soft reboot to rectify lockup.
Returned tool back to production.
|
| 21.75 | Carrier clean brush moved | STRATA::WESTPHAL | | Fri Sep 13 1996 19:50 | 4 |
| CMP.B3 - Moved the carrier clean brush about an inch counter clockwise
as requested by engieering. This was done to increase the
brush to carrier contact.
|
| 21.76 | switch fix | SUBPAC::CMP | | Wed Sep 18 1996 19:36 | 5 |
| Had an inverter error today, the possible cause could be the darn doors
not allowing the interlock switch to close, so when in wet mode and the
pad arm is ready to drop on the polish table, the table does spin
causing the error. will look into enlarging the platform for the
switches.
|
| 21.77 | Inverter error during wet idle | LUDWIG::SWENSON | | Wed Sep 18 1996 20:11 | 8 |
| To follow on last reply doors will be reworked also.
Also, to bring the tool up from the inverter errror
we exited to dos, powered tool down and inspected interlock switches.
found no switches to be out of whack. powered tool up, no problems.
returned system to production with a warning of the inverter error.
C-shift
|
| 21.78 | Problem during PM | FABSIX::O_WHITFORD | | Thu Sep 19 1996 07:58 | 6 |
| During the "look see" phase of the weekly PM, the moisture alarm
went off. We discovered a lot of slurry leaking from pump #1. We
replace hoses for pumps 1, 2 & 3 and checked flow rates which were in
spec.
Dave & Leon
|
| 21.79 | INVERTER PROBLEMS | FABSIX::J_SWENSON | | Thu Sep 19 1996 20:19 | 28 |
| Inverter error first occurred this morning. Tried troubleshooting
what could be and tool ended up being powered down and up and
error cleared as usual. Check 3 phase in and out of the inverter
no problems. Checked all door interlocks and made some enhancements
but none were tripped. Checked and found the connection from RS485
connecter to the RS232 connection to be very loose at the side of the
cabinet (no posts between connectors). Installed mini tester between
the two and and secured. (observed transmit signal but no recieve
signal, the tool was working properly though. Completed weekly
p.m. after seeing there was no more visible problems and the tool
had been rebooted. Returned system to manufacturing, mqc's were run
without incident. The first five monitor breakin's ran fine and upon
the next set of five the inverter error orcurred in segment 3 of
recipe ILD1, table was not spinning, the carriers were spinning and
being lowered to the table so tool was emoed and rebootted. During
reboot noticed we did not have inverter microprocessor or the +15
volt from power supply number six. Reseated inverter cover and
regained micro processor and when measuring ps 6 again +15 was there.
This cleared the error again still no solution. Removed RS232 tester
secured connectors in PD cabinet. Checked RS232 connection at xport
number seven traced ribbon cable to scm mod no visual problems.
Left pd cabinet open with cone in front for future trouble shooting.
Ran 25 wafers with same program ILD1 without incident and returned
system to production.
c-shift,Kevin and rich
|
| 21.80 | invert comm errors | STRATA::RIDLON | Eliminate the obvious | Tue Sep 24 1996 05:57 | 10 |
| Operator was supposed to put tool down for load cell error. Screen
locked up and table was spinning. Had to emo tool to recover. Load cell
problem could not be duplicated. But in investigating that, we ended up
having continuous inverter comm errors. Opened up the inverter and
found RT1 broken. RT1 in on the RS232 line. Ran 15 wafers using
bkin2, bkin3, and bkin. Time will tell if this is the fix or not.
B-shift
|
| 21.81 | vacuum problem resolved | SUBPAC::LANDRY | | Tue Sep 24 1996 20:29 | 24 |
| Continuation of the previous shift recovery......
The system was alarming for "Low Main Vacuum". When in idle or wet
mode, the gauge off the pump was at ~27" Hg, excellent. Tried running
the NO_TOUCH program and observed the I/O's for carrier vacuum. It was
noted that head five was the first carrier to alarm, with the remaining
four heads not far behind. So, we dis-abled head five and ran the same
program with the other four heads. No error. Dropped carrier five and
inspected the carrier. The were some major smudges and "gritting
particles on the film surface. Installed a new carrier and retested
several runs. Good results across all five heads.
Whilst the carrier was being removed, the heads were flushed out and
the vacuum tanked dumped several times to assure clear sailing.
Breakin and MQC's went well. No errors were observed during running
today.
After the system came up, the carriers from the previuos night were
dismantled and checked. Major, no MAJOR, black pad mulch everywhere
in the carriers. Cleaned out all affected components and re-assembled
the carrier bodies.
Doc / Kevin C.
|
| 21.82 | Carrier crash on 2nd table 9/23 | FABSIX::R_POIRIER | | Tue Sep 24 1996 23:43 | 14 |
|
Operations was running a lot and paused the tool to replace a
wafer in the index table. When they resumed, the Multihead came
down on the 2nd table with no wafers on the carriers, started
rotation when carrier 3 stopped.
When carrier 3 stopped rotating it tore up the pad. All carriers,
and both pads were contaminated with pieces of the black pad.
We cleaned both tables and replaced both pads and all 5 carriers.
B Shift
|
| 21.83 | Pre Aligner Sensor Failure / Tin Split Lot | ASDG::POIRIER | | Thu Sep 26 1996 19:42 | 10 |
|
Pre Aligner Sensor:
------------------
The sensor was failing to detect wafers during a (Tin) split lot run.
It appears that the reflectivity differerence of the Tin was enough
to effect the sensor. We moved the sensor closer to the wafer surface
and had no further trouble.
C Shift.
|
| 21.84 | grounding | SUBPAC::CMP | | Fri Sep 27 1996 17:09 | 1 |
| The grounding of the robot and mapper is now completed.
|
| 21.85 | Carrier Rinse For Head #2 Failed to Turn Off. | ASDG::POIRIER | | Sat Sep 28 1996 20:25 | 12 |
|
Wafer Loss Detection Error:
--------------------------
The system errored for "Wafer Loss" today. The Carrier rinse water
nozzle for head #2 failed to turn off. Water was sprayed on the
wafer loss sensor between heads 1 & 2 causing the error.
Keep an eye on SV62, we may want to replace it if this happens again.
C Shift.
|
| 21.86 | I thought the bugs were gone. | LUDWIG::RIDLON | Eliminate the oblivious | Sun Sep 29 1996 23:00 | 16 |
| System sitting there in segment 12 of tup_f after shift change. 2 wafer
had loaded, 1 in load flipper, 1 in aligner, and 1 on robot. 4 wafers
in unload cups with 1 unloaded. 5 wafers on carriers that appeared to
have polished. Noticed the index table wasn't where it should be. It
didn't rotate far enough so that the unload and load cups were under
the solenoid. Not sure if this was the cause of it stopping or the
result of another problem as the machine wasn't alarming at all. Tried
to exit out and restart but maching wouldn't count down. Tried homing
the index table and indexing to proper cup but still a nogo. Tried
homing the mhta but still nothing. Checked the Digins and those should
have been lit were and those that shouldn't have been lit weren't.
Instructed operator to load up 10 wafers, running the first with tup_e
and the second with tup_f (the to recipes involved with this fiasco).
B-shift
|
| 21.87 | what the heck? | LUDWIG::RIDLON | Eliminate the oblivious | Sun Sep 29 1996 23:25 | 8 |
| The 10 wafers ran with no problems. The room is short on bkins so we're
going to leave this at that and shrug the "fault" off as a lost bit.
NOTE: When viewing the errors.log file under the view ascii file button
you only see faults up to July 12th (or there abouts). What the heck?
Doesn't offer much help when trying to troubleshoot.
B-shift
|
| 21.88 | #1 carrier clean nozzle | LUDWIG::RIDLON | Eliminate the oblivious | Mon Sep 30 1996 05:59 | 7 |
| Two wafer loss sense errors while processing. Both times it was due to
#2 wafer loss sense being wet. Dried and resumed both times with no
problems. ONce lot was done repositioned #1 carrier clean DI nozzle
which wasn't centered on carrier and overspraying.
B-shift
|
| 21.89 | inverter error | SUBPAC::CMP | | Tue Oct 01 1996 20:51 | 7 |
| Had an inverter error today and investigated. We found we had lost the
+15v on the power supply so we took the leads off TB9 and found the
voltage returned so we put the wires back only to find the voltage
was still there. We checked all the +15v connections at the TB's for
tightness and are still monitoring, with no error yet. I would suggest
that if this happens again that the +15v gets checked and look for
something that may be dragging the voltage down.
|
| 21.90 | Mapper Errors | FABSIX::J_SWENSON | | Sat Oct 05 1996 20:31 | 7 |
| Had a mapper error and could not clear.
checked all associated cables and grounds.
found exposed ground wire and fuse chain on back of controller
to be touching. taped up ground and monitored mapper error,
Had to soft boot to clear error.
no error's ocurred rest of shift. assist was logged.
|
| 21.91 | pad change | LUDWIG::RIDLON | Eliminate the oblivious | Wed Oct 09 1996 08:03 | 11 |
| A funny thing happened on the way to the unload cups....it dropped the
wafers. The subsequent main vac alarm was no surprise but when the
wafer track said the cups had unloaded AND then reloaded that was,
seeins how the load cups were still full. Anyhoot, we loaded the
carriers in manual ops and then restarted the 1 second touch ups and
observed while the system polished the next 10 wafers with out a hitch.
After the 15 wafers were completed it was time for the scheduled pad
change, 2001 pri and 1991 sec. Returned to production for mqc's.
B-shift
|
| 21.92 | Low DI Water Pressure error | PATE::GEE | | Mon Oct 14 1996 20:05 | 8 |
| The system errored for "Low DI water pressure". When we tried
to recover the touch screen froze-up on use, had to reset the
computer to recover. After the system recovered we checked
the DI water pressure at the systerm, it was 18 lbs. Adjusted
the main DI water regulator up to 24 lbs and ran 2 verification
runs, all set.
A shift
|
| 21.93 | 15v Power supply | FABSIX::L_SHKOLNIKOV | | Thu Oct 17 1996 06:42 | 9 |
|
The system was alarming for inverter error. Operator EMOed the tool.
After we powered it up I checked the 15 v power supply and did not
get +15v. After the output leads were disconnected the voltage returned.
Put the wires back - 0. So 15 volts power supply has been replaced.
System came back up and running MQC's now. No errors so far.
Leon
|
| 21.94 | Mapper Errors - Please Document All Failures | ASDG::POIRIER | | Fri Oct 18 1996 20:28 | 12 |
|
* Mapper Errors:
-------------
The system errored for the mapper this morning. The system was soft
booted and the kensington mapper controller was powered down. The
mapper performed normally for the rest of the shift. This is the
3rd time this week (on C Shift) that the mapper has failed. Please
make sure to log all mapper failures on CMP.B3 in Notes. We need the
documentation to convince Speedfam to replace the controller. The
Speedfam reps have a spare controller in their office.
C Shift.
|
| 21.95 | ionizer installed | LUDWIG::RIDLON | Eliminate the oblivious | Sun Oct 20 1996 08:12 | 8 |
| John Swenson passed on that he had obtained a ionizer for this tool but
was unable to install. Apparently some other companies have experienced
mapper errors as we have and an ionizer remedied the problem. We were
able to install as the tool wasn't used to capacity. Please continue to
document any mapper errors.
B-shift
|
| 21.96 | vac/particle problems | FABSIX::R_POIRIER | | Mon Oct 21 1996 05:39 | 11 |
| Failed for particles and also had some vacuum problems. We found the
wafer in carrier 2 misaligned but also carrier 3 vacuum switch would
not make. Cup to head alignment was checked and adjusted accordingly.
Carrier 3 was swapped with carrier 5 and during no touch carrier 5's
vacuum switch didn't make. Carrier 5 was changed and mqc's ran which
failed for hi particles. Inspected the pads and found red particles on
the primary platen. Changed primary and secondary pads. Over to
production for bkins and mqc's.
B-shift
|
| 21.97 | particles | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 22 1996 06:15 | 11 |
| AFter Ashlands work on the slurry system this tool failed for particles
X2 again. Point of use filter (1 micron) was installed and slurry flow
checked. During mqc's it crashed while running breakins. Both lines on
the pumps blew. Apparently the 1 micron couldn't handle the flow and
pressure built up at the pumps until the lines burst. The pad and three
carriers were changed as well as the pump lines. The pads been
conditioned and awaits further evaluation from EE.
B-shift
|
| 21.98 | Down force cal. | FABSIX::R_GEE | | Tue Oct 22 1996 20:03 | 12 |
| Work done on 10/21.
The system failed MQC's multiple times for high particles and
also head to head removal was out.
Per Eng. we calibrated down force on all 5 heads, all heads needed
some adjustments. Replaced the primary and secondary pads, performed
the weekly p.m. and cleaned the system thoroughly.
A shift
A shift
|
| 21.99 | leak | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 22 1996 23:04 | 11 |
| Failed uniformity X2 on heads 3 and 4. While changing them out we
noticed that the slurry pumps were soaked. The leak detector was also
soaked but still green (indicating no leak). Replaced the hose for pump
1 (split). Both hoses were just replaced yesterday so pump 2 was not
changed. The leak detector had a piece of nylon wipe under it that was
soaked. We tested the sensor with the standard paper (that supposed to
be there) that was soaked and it worked fine. Tested pumps after and
they worked fine and dry.
B-shift
|
| 21.100 | jump on it | STRATA::RIDLON | Eliminate the oblivious | Wed Oct 23 1996 07:58 | 16 |
| During breakins for mqc's wafers we got a wafers not on carrier alarm.
Found wafer on head 2 not seated. Reseated and continued. Next set of 5
crashed. A wafer came out of 2 and took out 1. Replaced the 2 bad
carriers and the pad. On the subsequent mqc tests the tool failed for
particles. All wafer showing the tell tale signs of slurry build up
around the edge. REplaced the brushes after the first test due to them
looking pretty bad. The second mqc didn't fair much better. Fearing we
have a major problem with the slurry delivery lines a barrel was
brought up and hooked up locally. Flowed slurry to test and it worked
fine. Now just waiting on ops to measure up some more mqc wafers. Other
tools didn't fail because they weren't tested. This will continue over
to A-shift.
B-shift
|
| 21.101 | cup 2 | STRATA::RIDLON | Eliminate the oblivious | Wed Oct 23 1996 08:04 | 10 |
| Forgot to mention that we rechecked the carrier to cup alignment and
cup height alignment. Both were good. We slowed down the down motion
for cup 2. We also checked the solenoid/plunger for any obvious signs
of evil there. Found that the plunger was not level as was evident by
the marks on the bottom of the plunger (as well as the level we used).
Rotated the plunger about 225 degrees and it leveled itself. Didn't
have any more loading problems the rest of the night.
B-shift
|
| 21.102 | Slurry pump 1 line broke | FABSIX::R_POIRIER | | Wed Oct 23 1996 08:11 | 9 |
| Peristalic pump 1 line cracked and was leaking. It didn't alarm because
of the material I used for a pad under the detector. We replaced the line
and the pad and cleaned the area.
Later in the shift line 1 broke again causing an alarm. Again we replaced
the line and the pad and cleaned the area.
B Shift
|
| 21.103 | Slurry & DI clean lines | FABSIX::R_GEE | | Wed Oct 23 1996 20:33 | 16 |
|
The system failed MQC's for high particles again. We calibrated
the slurry flow for both pump #1 & #2 individually, both were out
slightly. We tried to then due a calibration check with both pumps
running (551 mlm Standard process), it was way bellow the requested
flow rate, we found this was also the case with the table rinse
since they use the same lines..
We found that pump #1 & #2, 1/4" lines were tee'd together after
the pump, this wouldn't allow the correct flow to pass at the
standard hi volume. We removed the tee and connected the unused
pump #3 line to pump #2.
Now pump #1 & #2 have there own individual slurry dispense lines.
Calibrated the slurry flow and everything looks good. The unused
Pump #3, 1/4" line has been plugged after the pump.
A shift
|
| 21.104 | Recipe issues | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Oct 24 1996 08:11 | 12 |
|
Tool kept leaving wafers at lift off as a result of
the new recipe. Vacuum and carriers were verified as
not being the problem. Spoke with Frank and had us go
back to edge lift off which he said will probably show
particles, which it failed twice for. I tried extended
rinse times and speeds but I couldn't get the center
lift off to come through. It 7am now so I'm going to
wait for ENG to come in.
BJ
|
| 21.105 | particles/double slotted wafers/lift off problems | FABSIX::J_SWENSON | | Thu Oct 24 1996 19:38 | 16 |
| 1. System went down for slurry pump 3 hose (replaced)
2. system intermittently double slotting wafers at recieve cassette #2
( ongoing )
3. Changed out slurry supply tubing to muultihead (slurry flow
calibrated)
4. changed primary and secondary pads @ 1800 per Frank Krupa.
3. Process engineering continuing to evaluate wafer droppage/particles
during lift off.
C-Shift
|
| 21.106 | B3 tail chasing update | STRATA::WOOLDRIDGE | Pleasure, Spiked With Pain | Thu Oct 24 1996 20:14 | 72 |
|
B3 particle problem update 10/24:
!*see end for plans & status:
Teflon liner tubing mqc:
std recipe/ segment 6, 10s-377, seg 7, 20s 313, lift 12.7
Particle results:
large tot scratch
1 - 274 989 5.10
2 - 294 2286 32000
3 - 342 1307 1.18
4 - 466 1727 2.32
5 - 479 2069 29.1
Same recipe, but center lift:
Particle results:
large tot scratch
1 - 446 1641 0
2 - 302 1258 0
3 - 522 1988 1.04
4 - 707 2525 1.23
5 - 651 2472 0
changed pump 3's tygon tube because we noticed it was leaking/cracked.
Ran edge lift again-same recipe as above.
Particle results:
large tot scratch
2 - 481 1944 1.09
3 - 375 1138 0
4 - 264 8882 19.1
5 - 576 2228 4.13
Replaced teflon lined tube with old style
Particle results:
large tot scratch
1 - 227 724 1.24
2 - 297 1281 16.0
3 - 512 1929 0
4 - 244 901 6.94
5 - 194 674 26.3
Changed pads- cleaned conditioner- center lift off- same recipe:
Particle results:
large tot scratch
1 - failed
2 - "
3 - "
4 - "
5 - "
----------------^^mqc's on B2 now have failed. Although the
Strasbaugh tools MQC's are still clean, the only way we now see
getting the Speedfams up is to shut the room down and purge the slurry
lines. Last time this was done, the lines were purged for an hour. We
are contacting Ashland now to begin purging the lines from 8pm to
11pm - 3hrs. After this, the tools should be MQC'd and we will see
where we are at.
B3 qual should use the IO_Mqc recipe first. If this fails, try the
CEN_MQC recipe.
* Note- The scrubber on B3 is not working and needs repair.
Try to repair this when the slurry system is being purged.
-= Kyle & Frank
|
| 21.107 | Scrubber not working | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Oct 25 1996 05:00 | 9 |
|
a report that the scrubber wasn't working.
Found that the process time on the SCRUBBER #1
recipe was set to 0. Set to 7 seconds like B2.
and that's all she wrote!
D shift
|
| 21.108 | POOR HEAD TO HEAD REMOVAL | LUDWIG::WESTPHAL | | Sat Oct 26 1996 20:43 | 15 |
|
CMP.B3 - Down for head to head removal being out (head 2). Swapped the carrier
and process rechecked the MQCs. They failed. The DF was checked.
The EP regulators and DF were adjusted for each head.
PRE POST
381.5 377.2
371.9 377.2
373.1 377.8
369.9 376.9
371.2 377.0
The tool was set to verify-U to have the MQCs rechecked. The MQCs
passed so the repair was ended.
|
| 21.109 | crash | LUDWIG::RIDLON | Eliminate the oblivious | Sun Oct 27 1996 06:22 | 13 |
| Crashed during tup-175. 1 second into segment 5. Wafer came out of 2
and took out 1. Alarm on screen was main vac low. Operator put that the
alarm was wafer loss detect on the crash sheet but thats not the alarm
Roger or I saw. Pad was changed and the two carriers. Checking cup to
carrier alignments now. We are assuming that it was misload at the
carrier due to the same thing occurring during our shift last week. Why
it didn't happen on the other shifts is unknown. On a side note we
observed the scrubber not operating properly. The brushes stopped
prematurely while manually unloading 5 wafers. Motor was checked and
smells like it could be bad. Maxim is down so this might be passed on.
B-shift
|
| 21.110 | Index table alingment | FABSIX::R_POIRIER | | Sun Oct 27 1996 07:27 | 9 |
| We found head 2 to be out of alignment. Also, Index table needed
alignment. Old reading for Index table was -187. New reading after
alignment is -288.
Conditioned pad and wet down carriers and returned tool to Operations.
B Shift
|
| 21.111 | Particles....resolved? | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Oct 30 1996 07:25 | 20 |
|
The "plan" went through all bad. The last action on
list is what was left which we ran NOTOUCH which looked fine.
So, we went with an external batch of slurry from the barrel
in the B3 chase. It was lot # 12-17-96-22. The tool passed
with all heads under 50 particles. The house system was
reconnected and it failed bad, 1500-2000. The A tools passed
particles fine as well as B1. B3 is at the end of the loop so
it could be just that, last in line gets the crap. The work
load is too great right now so OPS won't let us have a flush
done. The only thing we did notice is that the 2nd table pad
was changed and not the primary. Per process spec, the
primary pad was change. I don't expect to see anything good
come out of this but it was just item that was open. Break-in
and MQC particles wafers were run and it passed particles with
the rest of the MQC's running now. Go figure...
D shift
|
| 21.112 | Scrubber issue | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Oct 31 1996 04:53 | 11 |
|
The scrubber stalling... I was watching it and
it does stop towards the end of the scrub process
and everytime it does, the MHTA has the heads on the
table rotating. When the heads are up and NOT rotating,
the scrubber works fine?????????????????????
BJ
|
| 21.113 | removing well | LUDWIG::RIDLON | Eliminate the oblivious | Sun Nov 03 1996 05:04 | 11 |
| Low removal rate when we came in. C-shift was in the process of
changing the pad so we finished it up. During the change we noticed
that the carrier clean nozzle for head 2 was spraying. Found the di psi
in the liquid cabinet to be at 26psi. Adjusted it down to 24 and
spraying stopped. Checked the slurry cal and also checked the ph and
both were good at 500mls/min and ~10 respectively. Removal rates came
in on the first test run, uniformity on the third.
Combined C and B-shift
|
| 21.114 | late entry, flipper tubbing | STRATA::TDYER | | Thu Nov 07 1996 15:45 | 12 |
|
CMP.B3 - Down for particles and problems with the load flipper. A barrel of
slurry was hooked up at the tool with no recirculation loop installed
and the particles were rechecked. The particles came in in the 100s.
Process Engineering wanted the MQCs rechecked with a recirculation
loop installed. While check the MQCs it was noticed that the conduit
on the load flipper was broke leaving the wires exposed. The conduit
was cut back and reattached. There was the later a problem with the
positioning of the load flipper to prealigner. This was probable
caused when working on the conduit. The flipper alignments were
performed and checked. The tool sets needing only MQCs.
|
| 21.115 | Polish table gear box getting worse | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Nov 08 1996 06:58 | 11 |
|
Whilest the weekly PM was being completed, Leon
discovered that the surface for the drip-pan under
the main polish table was almosty entirely covered
with oil. E.E. will be addressed in the morning
to check on status of tool. A WARNING was placed on
the tool.
D shift
|
| 21.116 | Scrubber WARNING | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Nov 09 1996 06:36 | 8 |
|
The scrubber is intermittently stopping during the scrub
process again. This is an on-going issue. Due to the workload,
we can't rip this puppy apart. As soon as the B2 or the workload
lightens up, it needs TLC. I put a WARNING on the tool.
D shift
|
| 21.117 | Mapper error | FABSIX::B_FINN | | Mon Nov 11 1996 19:08 | 5 |
|
Mapper error on B3. Ionizer turned back on. Fix has been
confirmed. Also needed a soft boot.
A shift
|
| 21.118 | Pad change | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Nov 15 1996 06:22 | 6 |
|
Tool failed MQC's for range and deviation. Both
pads and all (5) carriers were replaced.
D shift
|
| 21.119 | Pad change due to bad unif. | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Nov 21 1996 05:43 | 7 |
|
Tool uniformity went south during product lot. We
took the tool for pad changes and weekly PM.
D shift
|
| 21.120 | READJUST SCRUBBER AMP | SUBPAC::CMP | | Thu Nov 21 1996 17:14 | 4 |
| Looked at the scrubber for a delay in the time the brushes were
spinning. Found that the........... AMPLIFIER CARD WAS COMPLETELY
MISADJUSTED...................readjusted and time was set for 11
seconds. Tested AOK.
|
| 21.121 | Particle Control efforts | FABSIX::O_WHITFORD | Quticherwhinin' | Fri Nov 22 1996 21:13 | 10 |
| Previous shift had high particles. Secondary pad had been changed and
some minor mechanical tweaking to the DI delivery on the secondary
table, all of which helped, but didn't completely control the
particles. We replaced the primary polish pad and scrubbed down the
polish table area including the pad conditioner ring & arm. Also
drained the index table, scrubed the load and unload cups and wiped down
the interior surfaces of the index table. Returned to ops for
verification/MQC's.
D shift
|
| 21.122 | Particles... | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Nov 23 1996 05:22 | 12 |
|
Tool kept failing for particles (large out of spec).
The pads were replaced, tool cleaned ect... The brushes
were inspected. NOTOUCH was run without any problems.
Slurry flow was checked and it was ok. Rinse was checked
and that was fine. An EXTERNAL barrel was hooked up and
particles passed. The house system was put back on and
it failed for large particles and over-all count. We
are awaiting for an E.E. call-back to ok a slurry flush
from Ashland.
D shift
|
| 21.123 | Particles | FABSIX::J_SWENSON | | Sat Nov 23 1996 18:47 | 12 |
|
Tool failed for particles, carried over from D-shift
PAL filter changed over to Osmonic's
One hour time before next mqc's
mqc's passed for particles
Tool released for production use
C-Shift
|
| 21.124 | Pump #3 | FABSIX::R_GEE | | Mon Nov 25 1996 19:08 | 5 |
| Field Service connected pump #3 into pump #2's outgoing slurry
delivery line. This will allow DI water to flow to the secondary
table. Calibrated all 3 pumps.
A shift
|
| 21.125 | Polish table Motor and Gearbox replacement update | FABSIX::R_GEE | | Mon Dec 02 1996 19:03 | 7 |
|
All is on schedule, Field Service remove all obstructions.
The old motor and gearbox are ready to be removed from the system.
The riggers will be in tomorrow morning to move the old motor
and gearbox out and put the new one in. Everything should be left
as is until morning.
A shift
|
| 21.126 | Polish table motor and gearbox replacement update | FABSIX::R_GEE | | Tue Dec 03 1996 19:33 | 8 |
|
Installed new polish table motor and gear box. Field Service
re-installing everything that had been removed due to the
installation. They hope to test the table rotation before
leaving tonight. Facilities still needs to hook the exhaust
back up. The system should be left as is for the night.
A shift
|
| 21.127 | Slurry pump #2 problems | FABSIX::R_GEE | | Wed Dec 04 1996 19:14 | 8 |
| The polish table motor and gear box has been replaced and
verified good, slurry pump #2 is stopping intermittently.
As of the end of "A" shift pump #2 is still not functioning
properly, field service is still working the issue. The
system will remain down until the pump is fixed, read T.D.'s
passdown for more info.
A shift
|
| 21.128 | pump motor fix | SUBPAC::CMP | | Wed Dec 04 1996 20:36 | 5 |
| Replaced the analog output board because slurry pump 2 would
intermitently run. when board was removed we found some of the jumpers
to be misplaced. installed the new board with the correct jumper
placement and tested. We would like to try the old board tomorrow
to see if the jumpers were wrong or the board was actually bad.
|
| 21.129 | Pads changed due to failing MQC's | FABSIX::B_JUBINVILLE | | Thu Dec 05 1996 05:45 | 6 |
|
OPS couldn't bring uniformity in after a carrier change,
off-set program and ID/OD. Both pads were replaced and
weekly PM completed.
D shift
|
| 21.130 | Wafer left on pad at lift-off | FABSIX::R_GEE | | Tue Dec 10 1996 19:02 | 6 |
| The system ran good all day, at 6:00pm a product wafer was
left on the pad at lift-off from carrier #2, last set off
wafers from a 30 wafer run. Re-seated the wafer and unloaded
in manual. Had to reboot to clear the wafer tracking screen.
A shift
|
| 21.131 | small slurry leak pump 1 | STRATA::FINN | | Sun Dec 15 1996 18:32 | 7 |
|
Respond to moisture sensor alarm. Found it to be in the slurry pump
cabinet. Leak was very small, located inside pump head on slurry 1. Repaired
leak and cleaned sensor and box. Tested aok.
a shift
|
| 21.132 | ? noisey bearing | SUBPAC::CMP | | Fri Dec 20 1996 01:03 | 8 |
| Received a call for an ungodly noise coming from the second table.
Checked the flange at the pulley and found a pile of rusty metal dust
and when the table was started there was a noise coming from that
general area. Coordinating parts and Phx. support for problem.
SF
|
| 21.133 | 2ND TABLE BEARING TRASHED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 20 1996 06:34 | 16 |
| While running MQC's.... A loud continuous dragging,
grinding squealing noise was coming from under/inside
the tool. While running the tool in MANUAL mode with
side covers off, the source of the noise was definitely
coming from the the 2nd table pulley assemble where the
belt goes around. A large pill of the wonder remains of
bearing guts, I mean dust was all around the base of the
shaft assembly. We did the usual phone-a-rep and spoke
with Rich. He came in and evaluated the situation and
got right on the horn with Pheonix and to get the ball
rolling on the the dis-assembly and getting the proper
parts sent in ASAP. The carriers were pulled off the
tool and put in water and the pads pulled off.
D shift
|
| 21.134 | second table bearing pulled parts on there way | FABSIX::J_SWENSON | | Fri Dec 20 1996 19:30 | 4 |
| Continuing on with repair.
Parts will be in by 2300.
C-shift
|
| 21.135 | 2nd Table | FABSIX::B_WESTPHAL | | Sat Dec 21 1996 19:43 | 26 |
|
CMP.B3 - Down for a loud grinding noise coming from the 2nd table. Closer
inspection revealed that the lower bearings were damaged. The lower
bearings and center shaft for the 2nd table were removed. The
bearings housings were rusted, some of the roller bearings themselves
were missing and The races were scored. All the parts were ordered by
Speedfam but not all of them made it here. We are still waiting on
some bolts and the lower shaft assembly. Those parts should be here
between 11:00 and 12:00 tonight via courier. The reps should also be
here about the same time but they requested that we have someone at
the desk to pick up the parts just in case. There is some question
about the 2nd table. It was noticed that there is a little rocking
motion in it and it rumbles when spun by hand. Speedfam speculated
that this will stop when the shaft is reinstalled. If that is not
true, Tim insists that the table be pulled and that upper bearing
inspected. Tim also wants to insure that the bolts securing the shaft
to the top of the platen be sealed with RTV and given time to cure.
|
| 21.136 | bearing replacement | SUBPAC::CMP | | Sun Dec 22 1996 03:16 | 7 |
| Replaced the lower pulley/bearing assy. for the second table, ran tool
with test wafers and noticed no unusual noises or operating conditions.
The tool is now quieter than a sleeping church mouse.
Upon checking with manufacturing about the rumbling noise coming from
the table when it was turned by hand, unless there is sticking or
binding the bearing should be fine.
|
| 21.137 | new pad and 2, 3, and 5 carriers | LUDWIG::RIDLON | Eliminate the oblivious | Tue Dec 24 1996 07:32 | 5 |
| Changed pad and carriers 2, 3, and 5 due to slow removal and high
uniformity.
B-shift
|
| 21.138 | mapper timeout | SUBPAC::LANDRY | | Tue Dec 24 1996 13:47 | 6 |
| The mapper failed today (timeout), the "B" mapper more specifically.
Powered off the mapper controller for a couple minutes. Repowered
said controller. Re-homed the Load Station. Good to go!
A shift
|
| 21.139 | EP Regulators, Down Force Calibrated due to Removal & Uniformity | ASDG::POIRIER | | Thu Dec 26 1996 19:19 | 28 |
|
Head to Head Removal Rates & Head to Head Uniformity out of Spec:
-----------------------------------------------------------------
The head to head removal rates were > 900 A. The EP Down Force
regulators were checked. EP #5 was 1. lb low at 59 lbs. (4095)
All others were within .10 lbs. of 60.
The down force was recalibrated, the results are as follows:
Before After
1) 377.6 n/a
2) 371.0 376.5
3) 389.6 377.8
4) 385.4 376.5
5) 364.7 377.2
Mqc's to commence.
Head to Head Uniformity:
----------------------
Carriers 2 & 5 were replaced due to high uniformity.
|
| 21.140 | Pads and carrier #2 replaced | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 27 1996 05:51 | 7 |
|
The tool failed for deviation miserably on #2 and the other
(4) heads were edge fast. After the pads and carrier #2 were
replaced, the tool came in.
D shift
|
| 21.141 | Unload cup issue | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 27 1996 07:44 | 11 |
|
The unload flipper failed to take the wafer out of
unload cup #3 earlier in the morning for no apparent
reason. It ran fine after that until it just did it
again. It was discovered that the unload cups were
all one location off of their correct holes. After the
cups were returned to their respective holes, the tool was
turned back over to OPS.
D shift
|
| 21.142 | Pad change due to low R.R. | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Dec 28 1996 07:05 | 6 |
|
24hr MQC's showed removal rate down near 2400.
Pad change at 375 wafers.... yea!
D shift
|
| 21.143 | Head to Head Removal rate probs / Pads suspect | ASDG::POIRIER | | Sat Dec 28 1996 19:39 | 31 |
|
Head to Head Removal Rates Out of Spec:
--------------------------------------
D Shift replaced the Pad just prior to shift change this morning.
Head #4 was removing 1000 A to 2500 A more than the other 4 heads
on a product lot. The carrier on head #4 was removed and measured,
the exposure was .008 -.009". The carrier was replaced with a new one
which measured .007 - .008. An MQC was run with the origional
offsets unchanged, the range changed to 600 A with carrier #4
having the lowest removal of the 5 heads.
At this point the offsets were recalculated and the range dropped to
198 A.
FYI: This tool had its down force and EP regulators calibrated
on Thursday. The initial offset calculation spread was
close to 30 right after the calibration and again today.
B1's down force and EP's were cal'd on Friday and the offset
calculation was between -22 and +20.
We usually see the initial offset cal under 10 right after a
cal. We've also been seeing the head to head removal and
uniformity all over the place during the week. We suspect
the pads are now causing problems with the Speedfams.
There are 200 + pads in the stockroom, try different lot #'s
if you get into trouble.
C Shift.
|
| 21.144 | No title required | FABSIX::M_RIDLON | Eliminate the oblivious | Sat Dec 28 1996 22:18 | 9 |
|
For the sake of uniformity (kind of an oxymoron since
all four Speedfams are different) the unload cups were
put back where they belong. Load 1 goes under the load
flipper and unload 1 goes under the unload flipper.
Unload flipper to unload cup alignment was checked before
and after the change and no difference was seen.
|
| 21.145 | carrier 5 | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Dec 31 1996 07:14 | 9 |
| Carrier 5 misloaded a wafer causing a main vac low alarm. This happened
last night as well and a cup to carrier alignment check was done which
showed the alignment to be good. A cup to carrier alignment tonight
had the same results. Checked the solenoid and found nothing wrong
their either. Raised the plunger up a thousands and did several manual
carrier 5 loads and the wafer was seated every time.
B-shift
|
| 21.146 | oem vac filt | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Jan 05 1997 03:13 | 4 |
| INstalled OEM vacuum filter and another gauge.
B-shift
|
| 21.147 | Diamond ring changed! | SUBPAC::LANDRY | | Tue Jan 07 1997 16:05 | 10 |
| Today........
The diamond conditioning ring was changed out per Process Engineerings
request. The wafer count (MECH_ACP WAFER COUNT key in the Service
screen) was 47337 at the time of the change.
A shift
|
| 21.148 | conditioner ring change procedure used | FABSIX::R_GEE | | Tue Jan 07 1997 17:10 | 18 |
| The procedure used to breakin the new conditioner ring was taken
from not 17.351. The procedure is as follows:
- Did not remove old pad.
- Checked pad step height to ensure there is >60 mils.
- Removed old ring and labeled it as "Used ring from cmp.b3", it's
on the shelf behind cmp.a1
- Installed New conditioner ring, sn#222.
- Ran conditioner manually at 80% downforce for 30 minutes on old pad.
- Changed pad.
- Recorded total number of wafers on the tool(Note this is the total
running counter that is not re-settable). This is being done to
track the total # of wafers on the conditioner ring. Recorded this
number in notes.
- Performed std 10 minute condition followed by normal breakins and
MQCs.
A shift
|
| 21.149 | Moisture Sensor Alarm / Looking For Cause | ASDG::POIRIER | | Thu Jan 09 1997 19:22 | 7 |
|
Moisture Sensor Alarm:
---------------------
The tool alarmed at 7:20 P.M. for a moisture Alarm. We are taking
a look at the situation now. We'll have more info at passdown.
C Shift.
|
| 21.150 | pad change | FABSIX::J_SWENSON | | Sat Jan 11 1997 18:00 | 14 |
| head to head variation out
-------------------------
primary pad 980
secondary 1000
carriers 500
primary pad thk .070
replaced primary and secondary pads
C-Shift
|
| 21.151 | More carrier rinse problems | FABSIX::O_WHITFORD | Quticherwhinin' | Sat Jan 18 1997 02:20 | 7 |
| Replaced solenoid valve #80 (carrier #2 rinse) as valve was sticking
most of the time and spaying water all over creation & multihead. While
finishing the monthly, carrier rinse #1 bagan to act up. Made minor
adjustments to the pressure delivered to carrier #1 & #2 rinse as this
seemed to be what was delaying or preventing the valves from closing on
time. The spray still fans nicely, it just doesn't reach the ceiling
anymore.... :p
|
| 21.152 | CB5 tripping | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Jan 21 1997 03:27 | 10 |
| Tracking a potential problem....on Saturday night CB-5 tripped after
the operator checked the pad step height. Proper procedures were
followed by the operator in that the OPEN PROCESS DOORS button was
pressed. No adverse conditions resulted Saturday night but tonight it
happened againg during the weekly and this time the infranor for the
pad conditioner errored (L3) and we had to power down the tool to bring
it back up.
B-shift
|
| 21.153 | sticky fingers | SUBPAC::CMP | | Thu Jan 23 1997 16:04 | 5 |
| Intermitently dropping a wafer at unload flippers.
Found that some water infiltrated the unload flipper box, cleaned
the water and dirt, but found that the air cylinder was binding,
not allowing the fingers to close completely. Replaced the cylinder
and tested with no errors.
|
| 21.154 | Wafer not present errors | FABSIX::O_WHITFORD | Lead, follow or step aside. | Thu Jan 23 1997 23:54 | 16 |
| Wafer not present errors on carriers 1,2,3,& 5
Check vacuum system starting with the filter. Vacuum on pump side was
low at 20" Hg, even worse on tank side at 18" Hg. With wafers on the
carriers and the MHTA at polish table, vacuum slowly dropped to about
12" Hg on the tank side. Replaced the filter element and got vacuum back
to 22" Hg on the pump side, about 20" Hg on the tank side, but it still
failed with the MHTA at polish.
Checked vacuum line from tank to MHTA, reseated the lower connection from
the line leading thru the flex track, now vacuum on pump side is 26", and
24 on the tank side.
Ran 15 break in wafers with out a hitch.
Dave & Leon
|
| 21.155 | System Pausing During Load / Scrubber Time out | ASDG::POIRIER | | Sat Jan 25 1997 10:51 | 39 |
|
Load Flipper Timeout Error: (C Shift)
--------------------------
Fri. 1/24/97
C Shift neglected to include this in the passdown last night.
The Load Flipper lowered to the Prealigner, closed onto a wafer and
rose up approx 1 inch. The Flipper then stopped and the auto cycle
paused. The Operator pressed START and the Auto Cycle resumed without
incident.
C Shift.
-----------------------------------------------------------------------------
Load Flipper Timeout Error: (D Shift)
--------------------------
Sat. 1/25/97
D Shift neglected to include this in the passdown this morning.
The Load Flipper lowered to the Prealigner, closed on the wafer and
rose slightly. The Flipper stopped and the Auto Cycle paused.
The operator resumed the cycle by pressing the START button.
-------------------------------------------------------------------------
Scrubber Timeout Error: (C Shift)
----------------------
Sat. 1/25/97 10:30 a.m.
An Assist was logged by the Manufactring Tech for thr Scrubber Timing
out. The Scrubber moved forward, scrubbed the wafer and failed to
return to the home position.
C Shift.
|
| 21.156 | mapper error | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Jan 27 1997 20:53 | 5 |
| Tool alarmed for MAPPER 1 and MAPPER 2 errors during the start of
process run. Homed the load module which corrected the problem and tool
mapped as expected.
B-shift
|
| 21.157 | Software Utility Progran Run/No Corrupted Files | ASDG::POIRIER | | Thu Jan 30 1997 19:17 | 7 |
|
Software Utility Program Run:
----------------------------
Norton Utilities was run today by Speedfam. No corrupted files were
found.
C Shift/Dave.
|
| 21.158 | Pad change - scheduled | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Jan 31 1997 07:50 | 9 |
|
The step height was checked for the MQC's and
it was around .51. The wafer count was actually
over 2000 too. Both pads were replaced and the
primary table got (2) conditioning cycles. It is
WETMODE and needs full break-ins and MQC's.
D shift
|
| 21.159 | MHTA/infranor and Mapper issues | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Feb 06 1997 06:16 | 16 |
|
The mapped failed to do its thing. A hard boot didn't cure
it. At the the time of the failure, the other two Speedfams
were not available so we manually mapped the boat to get them
running. When the OPS tech went to hit START on the product
run. The MHTA went to LOAD position but then timed out for
NOT ARRIVING AT LOAD." We went into MANUAL MODE and sent the
MHTA to polish and then back to load again. It timed out again...
After this point, the MHTA wouldn't move at all. We noticed
there was no LED display on the infranor. We tried hard-booting
the tool to try and restore power to it but it was cooked.
We replaced the infranor and it worked fine. The mapper was working
fine as well...
D shift
|
| 21.160 | wafer loss adjust | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Feb 09 1997 03:44 | 5 |
| Wafer loss detect in segement 1 of tupa recipe. Found 2 of the sensors
needing to be tweaked. Resume processing with out error.
B-shift
|
| 21.161 | blah blah | FABSIX::M_RIDLON | Eliminate the oblivious | Wed Feb 12 1997 06:00 | 6 |
| Pads and carriers changed due to engineering lot contamination. MQC's
failed on head 4. It was changed again and given back.
b-shift
|
| 21.162 | B3 ? | SUBPAC::CMP | | Wed Feb 12 1997 19:49 | 4 |
| B3 lost a wafer after its run when the arms would lift off from the
main p. table. No one was able to tell me for sure which one droped the
wafer. I ran 50 wafers with the same recipe called "LIGHT". I had no
further problems. System was put back up.
|
| 21.163 | N2 GUN | FABSIX::B_WESTPHAL | | Sat Feb 22 1997 19:57 | 6 |
| CMP.B3 - Installed an N2 gun on the system.
|
| 21.164 | FILTER HOUSINGS MOVED. | FABSIX::B_WESTPHAL | | Sat Mar 01 1997 21:27 | 6 |
|
CMP.C1 - Moved the slurry housings from the front of the tool and put them in
the slurry distribution box as engineering requested. There are no
filters in the housings so they will need to be installed on Monday.
|
| 21.165 | door fix/upgrade | SUBPAC::CMP | | Mon Mar 03 1997 19:34 | 5 |
| Problems with doors. Found doors to be falling down with hardware
loose.
Replace door assy's with new style upgrade, wire new switches, and
locks. Return tool to operation for verify and MQC's
|
| 21.166 | inverter error | FABSIX::R_POIRIER | | Wed Mar 12 1997 07:25 | 13 |
|
While in wet idle, an Invertor Communication Error
occured. Problem was one of the process doors wasn't
making contact. Fixed the doors, and tried to run
a lot and had Carrier #2 rotation error. Soft-
booted tool and checked carrier rotation. OK
Re-started lot and it is running fine.
B Shift
|
| 21.167 | Vacuum error | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Mar 13 1997 05:49 | 14 |
|
The tool was alarming for NO WAFER PRESENT in #1,
#3 and #4. The OPS tech physically checked to see if
they were there and in the pocket correctly, which they
were. He hit start but the wafer in one of the carriers
slid out at touchdown and he EMO'ed the tool before
anything happened. We checked some of the HEAD to CUP
alignments and they were ok. We re-ran wafers to check
the vacuum and everything was fine. The tool came back
up without any problems.
D shift
|
| 21.168 | Wafer Breakage / Root Cause Unknown | ASDG::POIRIER | | Thu Mar 13 1997 17:20 | 44 |
|
Wafer Breakage:
--------------
Three wafers were broken and two scratched during a run this morning.
The following adjustments were checked:
EP Regulators: @ 4095
Head # pre post
--------------- ------------------- ---------------------
1 59.6 60.0
2 59.9 60.0
3 59.8 60.0
4 59.8 60.0
5 59.6 60.0
-----------------------------------------------------------------------------
Down Force: Point to point method.
Head # Pre Post
----------- -------------- ---------------
1 353.6 n/a
2 348.2 354.2
3 350.0 354.0
4 353.2 353.8
5 353.6 n/a
Wafer loss detection sensor #'s 3 & 5 were readjusted.
The pad had 1000 wafers run and the carriers had 212.
We're not sure what happened, root cause unknown.
Later in the day, when the MQC"S were being run, carrier #3
rotation started oscillating. DCX board #3 had error lights
4 & 5 lit. After the DCX board was reset, all carriers
failed to rotate. A soft boot was then performed and the
problem disapeared.
C Shift.
|
| 21.169 | Stall - Crash - Software Corruption | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat Mar 15 1997 06:40 | 20 |
|
The tool had excessive vibrations during a touch-up
run and the drive belt was starting to jump and snap.
The tool was EMO'ed before anything crashed. We checked
the slurry flow and it was fine. The TUP_B recipe was
checked for any problems and it looked fine. We started
up the tool with the same recipe to see if we could see a
problem. While looking for a problem during the polish
step #5, a break-in wafer slid out of head #5 and crashed.
Dave from Speedfam was buzzed and he came in. He was looking
into when we found out that the crash Thurs. morning
had the same symptoms. We suspected corrupt software
within TUP-B because we ran BIN2, BIN3, B-IN and TUP_A
with no problems. We ran TUP_B and it stalled. We
deleted TUP_B and copied over IO_MQC. After that,
TUP_B was ran and the tool was up and running.
D shift
|
| 21.170 | Wafer Loss Detection Board Replaced. | ASDG::POIRIER | | Sat Mar 15 1997 10:20 | 16 |
|
Wafer Loss Detection Board Failure:
----------------------------------
In response to Thurday mornings loss of 4 product wafers, a test of
the Wafer Loss Detection system was performed.. While running the NOTOUCH
recipe, a wafer was placed in the beam path of wafer detect sensor #3.
The alarm sounded and an error message appeared on the crt. However,
the contactor did not pull out and the polish table continued to
rotate.
The wafer loss detection board was replaced and the above mentioned
test was repeated. This time the contactor pulled out immeadiately
and the table stopped rotating.
C Shift.
|
| 21.171 | | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Mar 17 1997 05:54 | 10 |
| Carriers 2 and 4 uniformity were running high out of spec. Changed them
and zeroed the df offsets. MQC's were better but removal rates for
carrier 4 are still running lower than the rest (same problem last
week when the Monthly was started). Its not out of spec so production
is still running. The air lines for carrier 4 df were checked in the
multihead and no loose connections were found, plus no other
abnormalities were seen either.
b-shift
|
| 21.172 | Rotation #2 blown infranor | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed Mar 19 1997 06:24 | 12 |
|
Tool was alarming after loading (5) wafers for circuit
breaker #5 tripped. Came in a found breaker #5 tripped
so we reset it. We then checked the infranors and found
Rotation #2 dead. #5 doesn't control Rotation #2 though.
hmmmm.... Tried resetting tool to see if rotation #2 would
come back but it wouldn't. We ended up replacing the
infranor and bring the tool back up.
D shift
|
| 21.173 | BROKEN SENSOR | FABSIX::B_WESTPHAL | | Wed Mar 19 1997 18:33 | 9 |
|
CMP.B3 - Down for a" no slurry available" alarm. Asland did a filter change
which caused a bubble in the line. When I moved the sensor on the
line to a place where slurry was, to clear the alarm, I accidentally
broke the sensor. Engineering is going to order a new part tomorrow.
I temporarily jumped out the sensor until the new parts arrive. The
tool is presently up with a warning.
|
| 21.174 | replaced slurry sensor | FABSIX::B_FINN | | Wed Mar 26 1997 19:29 | 5 |
|
Replaced broken slurry sensor. Cal/tested aok
A shift
|
| 21.175 | wafer slide out segment 3 of tup_b | FABSIX::J_SWENSON | | Fri Mar 28 1997 19:22 | 20 |
| tool crashed
--------------
- A wafer slid out of carrier four and into carrier 3 before the wafer
detect system stopped.
- Both wafers scrapped were product. (see note 9.55 for crash report)
- The error happened on recipe tup_b and it was during segment 3.
- The tool has been cleaned, carriers removed and pads removed.
- most probable cause of the slip may be an intermittent loading
issue. The tool ran fine all day.
- will pass on to D-Shift
C-Shift
|
| 21.176 | #4 arm problems source of crash | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat Mar 29 1997 04:13 | 15 |
|
Cleaned up tool after crash and started looking into
crash cause. All of the alignments were checked. Heads #2,
#4 and #5 were out. Head #4, which was the carrier that the
was the source of the crash, was out almost 3/8". After all
of the positions were corrected, we noticed that head #4 kept
taking a long time to home. When at home, the INPUT for #4
AT HOME was almost blinking. We ended up having to adjust the
position of the home switch. After that, we had to go through
with checking the LOAD position again. The tool was turned back
over to OPS for break-in for the new pads and carriers.
D shift
|
| 21.177 | Slurry Loss Detector broke | FABSIX::R_POIRIER | | Tue Apr 01 1997 06:32 | 9 |
| While doing the Weekly PM on B3, I broke the Slurry Loss detector.
I couldn't find a part number for it in SGMR, so I jumpered it out.
I also put a warning on the tool for this problem.
B Shift
|
| 21.178 | CMP.B3 crash | FABSIX::J_SADIN | Freedom isn't free. | Tue Apr 01 1997 20:35 | 16 |
|
System errored for wafers not on carriers in segment 1. Checked
carriers and found wafer in carrier 1 to not be seated properly. redid
alignment on carrier one. All was ok until carrier three slid a wafer
in subsequent runs. We lost carrier 2 and carrier 3, but managed to
save 4,5,1. Alignment fixtures are mounted on system, but we haven't
had a chance to align anything yet (multiple software glitches have
required reboots galore). A new primary pad has been installed and the
conditioner has been cleaned. Please reset the primary pad count when
you have a second.
Carriers 1,4,5 are sitting on CMP.B4 and two new carriers are on a
cart in the room next to CMP.B3.
a-shift
|
| 21.179 | Come on SUBPAC - This is the 2nd time you screwed up!! | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Apr 04 1997 23:17 | 24 |
|
ok.... what going on....
From Tuesday night....
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]CMP.NOTE;1 >>>
-< CMP >-
================================================================================
Note 21.179 CMP.B3 EE/PE PASSDOWNS 179 of 179
SUBPAC::BJUBINVILLE "CMP Equipment Engineering" 4 lines 2-APR-1997 05:47
--------------------------------------------------------------------------------
Took over from A shift with the alignments. Nothing
was found out of the ordinary. All head-to-cup and
carrier to cups-up alignments were ok. Installed two
new carriers and two new pads. Tool was turned over to
OPS for MQC's which passed.
D shift
|
| 21.180 | Slurry sensor replaced | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Apr 04 1997 23:18 | 7 |
|
Replaced the slurry sensor and housing. Alarm tested
ok.. It it sensitive enough to where when you check the
alarm, all you have to do is close the valve.
D shift
|
| 21.181 | | FABSIX::B_FINN | | Tue Apr 08 1997 20:41 | 21 |
|
Wafer crashed in receive cassette, Jim felt it was a misplaced cassette,
clean and ran test wafers aok.
System has low been running low removal rate for weeks. Pad is due for a change
due to end of life. The conditioner disk which is on the system now is from
the aruga per ee last week. He wants it changed with one from stock. (sitting
on stainless table in bag in CMP chase).
First Bruce wants pad conditioner checked for correct downforce. See CMP
note 31.1 for procedure also in the maint spec. After making any necessary
adjustments please Install the new conditioner disk. Break this in on the old
pad to remove any loose diamond per note 31.15. "conditioner disk breakin".
After note conditioner disk breakin has been completed the new pad can be
installed.
Please leave the old cond. dist labeled for return to Tim Dyer.
A shift
|
| 21.182 | Pad conditioner downforce calibration | FABSIX::A_QUILLEN | Nobody will get away with anything | Wed Apr 09 1997 07:50 | 8 |
| Performed pad conditioner downforce calibration (adjusted to 77lbs).
Installed new conditioner disk. Old disk is labeled and is on the table
next to the sink. Polish and index pads were changed. Initial MQC's
failed. ID OD was tweeked and the next run is expected to pass. Results
will be available by passdown.
B Shift
|
| 21.183 | cmp.b3 conditioner experiments | FABSIX::J_SADIN | Freedom isn't free. | Wed Apr 09 1997 20:47 | 18 |
|
Checked pad conditioner downforce again...still at 77lbs (nice job
b-shift). Checked conditioner centered on pad (good). Did slurry flow cal
and found we were only flowing 400ml/min when calling for 500ml/min.
Adjusted slurry flow until it matched what was called for. Mqcs were
run again with results still being substandard (no improvement).
Removed conditioner from CMP.B2 and placed on CMP.B3. Ran 300second
conditioning recipe and then 5 breakins and 5 mqc wafers. Results are
pending (wafers still reading on UV-1050). Will enter results into the
next note.
CMP.B2's conditioner was returned to CMP.B2 and CMP.B3's original
conditioner was put back on after mqcs were completed.
a-shift
|
| 21.184 | cmp.b3 mqc results | FABSIX::J_SADIN | Freedom isn't free. | Wed Apr 09 1997 20:57 | 13 |
|
Results for CMP.B3 with conditioning ring from CMP.B2
mean %dev rate/min
head 1 = 5586 8.5% 2793
head 2 = 5631 8.1% 2815
head 3 = 5610 8.6% 2805
head 4 = 5381 6.4% 2690
head 5 = 5850 8.1% 2925
|
| 21.185 | Tool has over 3000A R.R. with new pad.... | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 10 1997 07:19 | 15 |
|
Tool was in spec yet the OPS tech logged it
down at shift change. the tool was cleaned up
and while we had it, we did the WEEKLY PM. We
put the same pad from the same lot that is on B2
and the tool passed with over 3000A removal rate.
B1 MQC's were run and that passed with the same numbers
it has been for the last year... Process Engineering
lifted the WARNING on the tool.
Rock'n'roll baby!!!!
D shift
|
| 21.186 | Liquid detect unit/ Infranor | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 10 1997 08:48 | 15 |
|
On a side note...
While doing the PM, the peristaltic pump box
had slurry/water all inside with no LED on the
leak sensor... why??? Someone shut the detection
unit off.
The tool had been powered down before we were
going through the containment pans and slurry lines
being replaced when we powered up the tool and we
apparently lost head #5 rotation Infranor. It was
replaced and was good to go..
BJ
|
| 21.187 | Slurry Detect Sensor, Fluid's cabinet leak, Slurry ysprayano carrier4 | FABSIX::J_SWENSON | | Fri Apr 11 1997 15:52 | 34 |
| Slurry detect sensor
______________________
After filter change a bubble set off the sensor and would not
reset.
- checked 24 vdc npf
- checked continuity between connector npf
- Found switch setting to be off
- corrected switch setting
- verified sensor by removing from housing setting the sensor
off
Fluids Cabinet
--------------
Found raw water leaking at several fittings, replumbed and
tightened, no leaks found.
Found cwr line to be leaking tightened and no leaks found.
*** Noticed Slurry was spraying off of the madonna cup and hitting
carrier #4. Bruce would like someone to look into the issue at
hand. Tool had to be returned for production since B1 was down
for the weekly.
C-Shift
|
| 21.188 | SLurry Detect Error | ASDG::POIRIER | | Fri Apr 11 1997 20:21 | 15 |
|
Slurry Sensor:
-------------
The system alarmed for "NO Slurry" during the scheduled filter change.
The alarm would not silence. The slurry detect module switch position
was changed to the MIDDLE position and the problem ceased.
LEAKS:
-----
Small DI and raw water leaks were repaired in the fluids cabinet.
C Shift.
|
| 21.189 | adjust temp. | SUBPAC::CMP | | Tue Apr 15 1997 20:08 | 4 |
| The Tool has had some problems of late with low removal rates, one
thing that is being tried is to bring up the temp a couple of degrees.
Worked with Tech to adjust the cdata.cmp for the chiller coeffs to
bring temp. up to 26. Will monitor at new temp for any result.
|
| 21.190 | temp | FABSIX::B_FINN | | Tue Apr 15 1997 20:47 | 9 |
|
Actual temp readings at polish table show table 4'c colder than set
point. At EE request we adjusted input and output coff to raise temp Setpoint
to 27'C.
A shift / Rich
|
| 21.191 | New pad also put on previous to temp adjust | LUDWIG::BTOWER | | Wed Apr 16 1997 08:22 | 3 |
| Before the temp was adjusted a new pad from the stockroom(newest
delivery) was put on, broken in and MQC's run. Removal Rates are
still averaging 2800-2900.
|
| 21.192 | Removal problems | LUDWIG::STANDING | | Wed Apr 16 1997 20:56 | 3 |
| CMP.B3 Head removal rate problems, head 2 was normal, other four heads
were approx 2400 ang. Down force caled. head 2 replaced, runnin mqcs
|
| 21.193 | Low removal checks. | LUDWIG::BTOWER | | Fri Apr 18 1997 08:41 | 7 |
| Took slurry sample from system yesterday. % solids = 12.74. Specific
gravity = 1.074. Also checked down force recipes on B1,2 and 3. Each
system uses recipe 1(2 step recipe). All recipes matched except
B1 had 77% down force in step 2 as opposed to 67% for the other two.
Matt will be bumping up B3 today to see if it buys us anything with
the low removal. Still awaiting word from speedfam on cut of
conditioner. Reps also called them today for that info.
|
| 21.194 | TRANSFER PADDLE REPLACED | FABSIX::B_WESTPHAL | | Fri Apr 18 1997 21:47 | 6 |
|
CMP.B3- Down for problems with the unload transfer paddle. The paddle seemed
to be sticking when traveling toward the wafer tracks. The problem
was the tol-a-matic (the assembly the paddle rides on). The same was
replaced and adjusted. Tool was returned to production.
|
| 21.195 | Polish table belt and other problems | FABSIX::R_POIRIER | | Mon Apr 21 1997 07:44 | 33 |
|
While running a process (Tup_B) the polish table
began vibrating alot. We think the vibrations
caused the table belt adjustment to loosen which
started causing the banging noise that happens
when the belt slips. We checked the belt and it
was very loose as were the adjustment bolts. We
re-tightened the belt and ran more wafers. There
was still some vibrations, but they weren't as
loud. The second set of wafers vibrated even less.
Ran two more sets of wafers using TUP_H and there
were no vibrations at all. Recommended to the OPs
people to have Process check out TUP_B. After we
tightened belt, during boot up, unload transfer
paddle would not home. We had to re-teach it the
home and both track positions.
Also, earlier in the shift the operators found two
broken wafers in the left unload boat. Wafers in
slots 1 and 13 or 14 were broke (clean break). Unable
to determine the cause of this. Cleaned elevator and
continued running tool. Problem did not re-occur.
Later also in the left unload, wafers in slots 7 and
8 ended up cross-slotted. I think this was due to the
boat being bumped while trying to push a wafer into
the boat during the run.
B Shift
|
| 21.196 | tup_a recipe flaws caused vibration | SUBPAC::LANDRY | | Mon Apr 21 1997 18:53 | 15 |
| A followup to the vibration problem exhibited on B shift last night...
The recipe (TUP_B) was found to have two flaws. The first concerned
the ramp time for the table speed. It was incorrectly set. The table
was trying to make set point immediately (30 or so RPM), hence causing
the belt to jerk excessively. The second program problem was centered
around slurry flow prior to carrier touch down. Not sure what step it
was, but it was set for 1 secound, when it should have been 20. Both
steps were corrected, all is well with this problem.
The Opts tech also checked the TUP_A recipe and found a flaw with that
one as well. It had 230 secound pre-touchdown of slurry flow. A tad
bit much, yes/no? Edited that one as well.
A shift
|
| 21.197 | New pads and four carriers | FABSIX::A_QUILLEN | Nobody will get away with anything | Tue Apr 22 1997 06:39 | 5 |
| System went down for a polish and index pad change. Carriers #1, 3, 4
and 5 were also replaced. Following successful MQC's, the system was
put up.
B shift
|
| 21.198 | mapper error | FABSIX::J_SWENSON | | Sat Apr 26 1997 19:53 | 17 |
| mapper error
------------
- Tool would not map
- Found ionizer not working
- powered down controller
- replaced ionizer
- powered up controller
- no more mapper errors
C-Shift
|
| 21.199 | Mapper time-out | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed Apr 30 1997 07:37 | 2 |
|
FYI - Two mapping time-out errors this morning...
|
| 21.200 | Mapper errors | FABSIX::R_POIRIER | | Mon May 05 1997 06:14 | 14 |
|
B3 had more mapper errors last nite. First,
the B side wouldn't map at all., tool thought
the wafers were cross-slotted. A side mapped
but the robot had problems picking up the wafers.
We re-booted the tool and turned up the gain on
the ionizer. Ran wafers on both A and B sides
and had no more errors.
B Shift
|
| 21.201 | Pad due | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat May 10 1997 09:12 | 6 |
|
Tool failed 24 hrs MQC's for 2396 removal rate average.
Will pass to C shift for pad replacement.
BJ
|
| 21.202 | CMP.B3 crash recovery | FABSIX::J_SADIN | Freedom isn't free. | Sun May 11 1997 11:25 | 12 |
|
Cleaned up 2nd crash on CMP.B3 (tool had crashed earlier on
B-shift). Replaced both pads and all carriers. Checked head to cup
alignment and height, as well as vacuum level and recipes. All appeared
ok except for a time difference in step one of TUP-C (it was set to
2secs instead of 25secs). Changed the time back to 25 secs. The machine
had crashed during step 5 of TUP-C.
a-shift
|
| 21.203 | safety upgrade | SUBPAC::CMP | | Tue May 13 1997 20:23 | 4 |
| Today we installed a MHTA safety stop. What this does is keep the
multi-head lock from disengaging. To use it, requires the wedge shaped
piece to be placed under the MHTA lock lever. This will prevent the
multi-head from moving.
|
| 21.204 | CMP.B3 particle issue | FABSIX::J_SADIN | Freedom isn't free. | Tue May 13 1997 20:31 | 21 |
|
Operations alerted us to a high particle issue on this tool today
(after 24hr mqcs). Both large and total particle counts were out of
spec (filter change was done this morning before mqcs were run). We
changed the primary and secondary pads and cleaned the tool thoroughly.
After breakins and mqcs, particles were still out of spec for large and
total. As luck would have it, there was a barrel of SC112 in the chase.
We hooked the barrel up to CMP.B3 and ran another set of mqcs with the
barrel slurry. Large and total particles were now well within spec
(large < 50, total < 150).
All "B" machines have been displaying higher-than-normal particles over
the past two days. Ashland has been contacted and advised that we MAY
be requesting a filter change this evening (this needs to be
coordinated with ops since some tools are running now).
in peace and light,
TEAM-A
|
| 21.205 | Particles.... GONE!! | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed May 14 1997 07:14 | 7 |
|
Tool failed once more for particles just into our
shift. Contacted Ashland about another Slurry filter
change. After they swapped/replaced filters, B3 passed
particles.
D shift
|
| 21.206 | Wafer crash.... | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu May 15 1997 09:25 | 11 |
|
Head #4 never blew off its wafer that was just polished
and it was able to pick the next wafer by shear surface tension.
The heads touched down with 2 wafers on #4. The wafers spun
on each other then the bottom wafer slid out and hit #3 before
wafer detect tripped. Carrier issue?? Blow off solenoid? Tool
was 95% cleaned up. C shift took over.
total loss - 1 pad, 2 carriers and 3 product wafers
D shift
|
| 21.207 | Slurry alarm | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 16 1997 04:06 | 6 |
|
Tool didn't alarm for slurry loss. No product was
lost. After slurry system cmae back on-line, the slurry
sensor was adjusted and verified.
BJ
|
| 21.208 | 5/15 carrier 4 issue | FABSIX::J_SWENSON | | Fri May 16 1997 17:58 | 17 |
| Carrier four wafer breakage for 5/15/97.
----------------------------------------
This should have been posted yesterday.
- Inspected and verified the the electrical pneumatic functions of
carrier 4 and found everything to be functioning properly.
- Tried to force di through the carrier and none would come out.
- Tried to force cda through the carrier and none would come out.
- Dissassembled carrier and tried the above and same results.
The plate of the carrier seemed to be the culprit (Being clogged).
C-Shift
|
| 21.209 | #5 POOR UNIFORMITY | FABSIX::B_WESTPHAL | Bradley BP#661 EXT# 6610 | Sat May 17 1997 20:52 | 3 |
|
CMP.B3 - Had poor uniformity on carrier #5. The same was replaced.
|
| 21.210 | Down force calibrated | FABSIX::R_GEE | | Tue May 20 1997 20:15 | 15 |
| Operations asked us to check carrier #2 downforce due
to high removal. Using load cell # 511654 we found the
downforce at 408 lbs. Checked heads #3 & 4, these were
both way high also. Due to the high downforce found we decided
to remove the pads (count 1450) and due all 5 heads, all
5 heads were out. After the downforce was completed we checked
head #1 using load cell #477411, it read 311 lbs, should have
been 354 lbs. If the downforce was done last using this load
cell this would account for the high reading. Re-calibrated all
5 heads using the strasbaugh load cell witch was reading a happy
medium. We will bring both speedfam load cells to the cal. lab.
tomorrow AM. and ask for a rush.
A shift
|
| 21.211 | Spill... | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu May 22 1997 05:58 | 7 |
|
We ph tested the 3-5 gallons of liquid under B3 and
it was DI/glycol. we put 6-8 pillows under there to try
and soak it up.
D shift
|
| 21.212 | Chiller - Slurry supply | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 23 1997 06:16 | 20 |
|
The tool went through all of the break-ins fine
and the 1st run of MQC's showed the removal rate
average around 3200 but the range was 360, spec is 300.
OPS ran the off-set program and the rates dropped almost
500A a minute, failing bad!!! We contacted Tim and we
started to pull the chiller. All of the fittings on the
chillers have unions but they are all hard plumber. Worst
case, I needed to hack-saw one of the lines. Leon was
working on the weekly PM when I had the hack-saw in my
hand when he indicated that Slurry #1 supply valve was
turned off. The slurry sensor was not sensitive enough
either so that had to be tweaked, so, all of the tests
needed to be re-done. The chiller was hooked back-up
and filled. When it up to 27 degrees, OPS started
running wafers again. Once we know where we stand
with the MQC's, we'll go from there.
D shift
|
| 21.213 | GOOD TO GO!!!!!! | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 23 1997 07:17 | 13 |
|
Update: as a result of Leon's keen eyes and
alertivness, he noticed that the slurry #1 supply
valve was closed. As a result, the chiller was not
replaced and the original chiller was back on line.
The current chiller flow is 2 GPM, temp at 27 degrees
and the MQC's wafers passed unif. and the removal
rate average waws 3400 with a range of 155.
the anchovie pizza paid off for Leon!!!!
D shift
|
| 21.214 | Load problem | FABSIX::J_SWENSON | | Fri May 23 1997 20:34 | 23 |
| INVERTER ERROR
--------------
Tool errored for wafer not in pocket
Tool locked up
Rebooted tool
Tool still locked up
found m2 not being pulled in.
24v interlock problem
ohmed out circuit o.k.
still timeing out
went door to door checking switches
next thing you know tool powers up no problem
went to duplicate original error
created wafer not in pocket error.
Tool will need to have the load cup alignment's
checked.
Will pass on to B-shift
C-Shift
|
| 21.215 | No load problem but... | FABSIX::L_SHKOLNIKOV | | Sat May 24 1997 08:26 | 14 |
| The tool went down for vacuum or misload on carr#2. We checked carrier
to load cup alignment - fine. Released tool to production. Ran set of
MQC wafers with average ~2000� - too bad. So verified conditioner
downforce, slurry flow looks fine. There is only one related problem
that was found - the table rinse flow control valves were open all the
way out. We closed them to match B2 setup. Pad and carriers were
replaced. Two out of five carriers had polished guide rings. So
another set MQC has been run, the tool came up fine and is running
product now.
D-shift.
|
| 21.216 | C shift passdown regarding particles | FABSIX::B_JUBINVILLE | | Wed May 28 1997 22:13 | 17 |
| From: ASDG::POIRIER "FAB6 CMP EQUIPMENT TECHNICIAN. PAGER # 254 FUNCTION 1. TEL:6610,5804,4774,6609." 28-MAY-1997 19:29:29.78
To: FABSIX::B_JUBINVILLE,FABSIX::L_SHKOLNIKOV
CC: POIRIER
Subj: passdown
Brian & Leon,
Here is the latest situation:
CMP.B3 - DOWN/UNSCHEDULED: High Particles. Brad has verified that the house
slurry is not the cause. Try cleaning tool.
C Shift.
|
| 21.217 | Particles gone.... | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu May 29 1997 03:34 | 18 |
|
Came in to the tool being down for particles. Cleaned
entire tool. Found brownish tint to the DI water around
polish table area. Found metal reflective tape on all of the
carriers and polish table drain tubes completely oxidized.
This tape was used 5/22 during the day for the RPM testing.
Removed all corroded tape and cleaned tool. Inspected scrub
brushes and all of the top brushes had the same color as the
polish area. Running NO_TOUCH showed that the brushes were
causing adders so they were replaced. An allen wrench,
found in the scrubber tank and was causing the scrubber to
bind up, was removed. It saw it's better days.... OPS
ran particles and all heads passed and were all under 200
particles.
D shift
|
| 21.218 | Multiple Errors | FABSIX::J_SWENSON | | Fri May 30 1997 20:36 | 26 |
| Multiple errors
---------------
Tool errored for the following multiple times
- wafer in water track with no wafer being present
- pad conditioner not @ home
- robot errors
- lo di flow
No physical problems seen
Reset CPU, checked all cables
All seemed to be O.K.
Ran out of time will pass on to D Shift
C-shift
|
| 21.219 | Mappers/Tilts - D.O.A. | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat May 31 1997 07:44 | 24 |
|
Came with tool down with software errors for the robot
conditioner and mapper. We rebooted the tool when we got
in and all we got was an error for the mappers not initializing.
Tilt A was doing some funky moving and Tilt B was dead. We
swapped cables and the A was was dead and B was all screwed
up. Per Rich, we replaced the controller and everything was
dead. We then replaced both tilts and the cables to keep
everything as a matched set. The tilts and mappers initialized
fine but the signal never got back to the computer that they
initialized. All of the cables where checked and nothing was
found. Rich feels we had a bad controller in stock. He is
getting in another complete Mapping system in today. The
tilts in the tool were shimmed just to get the tool running
in manual mode. The mapper is powered off and is disabled
in HARDWARE.CMP. There is a WARNING on the tool for OPS to
manually map the cassettes and not to use AUTO mapping.
Rich will be calling in the a.m. with some shipment updates.
D shift
D shift
|
| 21.220 | Wafer crash in scrub station | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat May 31 1997 09:08 | 17 |
|
Tool was running fine until ~07:30. It appears that
the top middle scrub brush fell off its shaft and landed
on the bottom brush. When the scrubber went in to scrub
the 1st wafer of the bunch and BAM! CRASH! EXPLOSION! The
product wafer was in 1000 pieces. The brush was floating
in track #1, the pedestal fixtures were everywhere. The
next wafer was placed on one pedestal and fell to the
bottom of the scrub station. One wafer wafer was scrapped,
the one that fell and the one that was in the unload flipper
need to be inspected by PSS. They look ok... unfortunately
I have a weight problem and I can't get in to the scrub station.
C-shift will lower Hawk by his ankles to clean out the debris.
The paddle might be bent and will need to be looked at as
well.
D shift
|
| 21.221 | Mapper Problems | ASDG::POIRIER | | Sat May 31 1997 21:17 | 42 |
|
Scrubber Brush:
--------------
The scrubber brush that fell off an D shift last night was replaced.
The o-ring that belongs on the brush mount was missing.
Contamination in Chiller lines:
------------------------------
The chiller lines, platten water jacket & chiller tank were thoroughly
cleaned and flushed today. The chiller tank (screen/filter) element and
regulator screen were clogged with debris. The flow meter sight glass
was also disassembled and cleaned. It is now possible to accurately
read the clilled water flow through the platen. With the chiller
recirculation pressure @ 9 psi, the flow meter reads 2 1/2 gal/min.
Mapper Problems:
---------------
We followed up from D Shift on this problem ( See previous note). The
new kensington mapper controller and tilt elevators were installed.
When we placed a cassette on the tilt platform, it became apparent
that the tilt platforms were for (6") cassettes! We removed the 6"
tilt platforms and put the old 8" type & matching controller back
in the tool.
The only snag we're facing at this time is the shims. (See previous
note from D shift about shims under the tilt platform) The person
who removed the shims has left for the day. We're not absolutly
sure if they are back in as they were or why they are under the
platforms in the first place. B Shift, please verify that the robot
picking wafers out of cassette A & B properly before WUP'ing the
tool. A robot adjustment may be necessary. The system will have to
stay UP with a warning to MANUALLY MAP THE CASSETTES.
P.S. Rich Barrett from Speedfam was called about the mix-up and he
will send 8" tilt platforms and a matching controller ASAP.
C Shift.
|
| 21.222 | cmp.b3 chiller heater was off | FABSIX::J_SADIN | Freedom isn't free. | Mon Jun 02 1997 10:17 | 8 |
|
found chiller heater was turned off. This prevented the chiller
from reaching its setpoint of 28�C (per Bruce Tower). Please leave the
heaters on. Thanks.
a-shift
|
| 21.223 | Moisture detection / Pad Cond Infranor | SUBPAC::LANDRY | | Mon Jun 02 1997 20:23 | 25 |
| Rough ride with this system today.......
The system initially alarmed for a "Moisture Detection" alarm. Upon
checking for the leak, it was discovered that there was NO leak. All
sensors/papers were found to be dry and intact. Hmmmmmm! Acknowledged
the alarm and alas, we were back in business. About 20 minutes later,
the moisture alarm re-appeared. Again, NO sensors were wet. We allowed
the currently lot of wafers to be completed, then we took the system
down for a "hard boot". Upon reboot, the system failed initialization
badly. The Index table didn't move and the pad conditioner would go down.
We decided to reboot again. The pad conditioners Infranor had no power.
Said Infranor was replaced and a reboot went fine. The system then ran
for about an hour. Low and behold, the moisture detection re-appeared.
We checked the control unit of the detection system and found the "leak
LED" began to flicker. Wiring was checked. A very loose wire was found
on TB 11. This was tightened, but no luck.
The control unit appears to be bad at this time. It seems that it can't
compliment all the sensors. We can unplug each one individually, and the
LED flickering stops each and every time. We were going to change out
the control unit, but none were in stock. SF representatives will try to
get one in for us ASAP. At this time, the system is running with the
moisture detection shut off and under a warning state.
A shift
|
| 21.224 | Mapper installed / no moisture detect | SUBPAC::LANDRY | | Wed Jun 04 1997 18:13 | 21 |
| The mapper situation was finally addressed today. An abundance of lots
in the room early in the week was the cause for the delay in fixing
this unit.
A new mapper setup was installed. This included the tilts, cables and
the controller. The installation went ok, with some calibration
required post installation. NO shims were used! Thr mapper tilts were
calibrated first. Then the robot pickup positions were done on both
tilts. Finally, the robot to alignment fixture calibrations was
performed. We then cycled a multitude of wafers (NO_TOUCH) to verify
the handling capabilities. All went smooth.
The original pad was salvaged as well as the carriers. MQC's passed.
The tool is cranking them out again.
The tool is still running under one warning at this time. The moisture
detection unit did not arrive today. The moisture detection circuit
remains off line at this time. The unit is powered off.
SF Representatives and the A shift
|
| 21.225 | Brush fell off... | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Jun 05 1997 07:11 | 8 |
|
The top middle brush fell off and prevented a wafer
to be scrubbed. The brush was re-installed and it is a
real tight fit so I can't see how it came off. Seems ok
now.
D shift
|