| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 47.59 | Inside brush station leaking | PATE::GEE | | Mon Nov 06 1995 06:27 | 5 |
| * The inside brush station was leaking DI water.
Replaced the front roller shaft o-ring, passed mqc's.
B shift
|
| 47.60 | robot fingers adjusted | FABSIX::R_GEE | | Tue Nov 21 1995 07:15 | 9 |
| * The robot wouldn't pickup wafers out of the spin station.
- Checked for any loose parts, none found.
- Had to adjust the robot finger offset from 310 to 480.
We will need to keep an eye on this, the position may be drifting.
B Shist
|
| 47.1 | INSTALLATION AND MECHANICAL ACCEPTANCE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 08 1995 23:49 | 173 |
| SUBPAC::LANDRY 13 lines 6-JUN-1994 17:02
-< 6/6 update >-
--------------------------------------------------------------------------------
All,
KSI has been working on hooking up the exhaust/DI water drain. All
seemed fine at noon time, with the plumbing attached to the system
(but unglued). After my new/improved protocol class, I went back into
the fab to see where everything stood. Much to my surprise, the
plumbing from the back of the system had been removed and was lying
on the floor next to the system. There wasn't anyone around to answer
why this is (maybe it's off to be PVC cemented???). I'll follow up on
this in the morning. No other activity seems to have taken place with
this system.
Doc
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 66.2 CMP-SCRUB.A2 2 of 125
SUBPAC::LANDRY 19 lines 16-JUN-1994 16:10
-< 6/16 Update >-
--------------------------------------------------------------------------------
Installation Update:
The electrical is complete, including the OCP. The OCP still needs the
communication line tie in.
The Ammonium Hydroxide line has been installed.
The high purity DI line has been run to the rack above the floor.
Still needs to be tied into the main system.
The GCW drain section has been installed. Still needs to be tied into
the exhaust duct, which has yet been run.
Earl Dawson and I moved all the accessory equipment up to the fab and
installed the "touch screen" monitor and one of the smoked grey covers.
There is still one more cover to attach at this time. Need hardware to
accomplish the feat.
Doc
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 66.3 CMP-SCRUB.A2 3 of 125
SUBPAC::TOOKER 24 lines 8-JUL-1994 11:04
-< Hook-Up Status For 7/8/94 >-
--------------------------------------------------------------------------------
CMP_SCRUB.A2 Tool Hook-Up Status For 7/8/94
COMPLETED ITEMS:
----------------
* DI Water connections
* Ammonium Hydroxide connections
* All GCW drain connections
* Eelectrical connections
OPEN ITEMS:
-----------
* CDA final connection
* All exhaust work
* OCP interface to system
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 66.4 CMP-SCRUB.A2 4 of 125
SUBPAC::TOOKER 14 lines 26-JUL-1994 09:22
-< CMP-SCRUB.A2 >-
--------------------------------------------------------------------------------
CMP-SCRUB.A2 Tool Hook-Up Status As Of 7/25/94
PUNCH LIST ITEMS
----------------
ITEM RESPONSIBLE PERSON
--------------------------------------------------------------------------
1) Complete exhaust work. D. Atkinson/NEEVCO
2) Install additional pipe D. Atkinson/NEEVCO
support on exhaust.
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 66.5 CMP-SCRUB.A2 5 of 125
SUBPAC::LANDRY 5 lines 1-AUG-1994 13:17
-< 8/1 equipment installation update >-
--------------------------------------------------------------------------------
Brian and I hooked up the last plumbing connection (CDA). The only
remaining hookup is the communications connection between the main
system and the OCP.
Doc
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 66.6 CMP-SCRUB.A2 6 of 125
SUBPAC::BJUBINVILLE 16 lines 2-AUG-1994 16:44
-< Ron Simmons has arrived!! >-
--------------------------------------------------------------------------------
Ron Simmons was in this afternoon so here's the scoop.
The facility guys were turning on the N2, DI water and CDA when
they discovered some leaks near CMP.A1 so the scrubbers were
on hold. Ron will be back in the morning around 8am to start
things into purge. The power is all hooked up but the 15A
breaker is off on both machines. There was a concern with a
fitting on the 1/2" ammonium line. Ron Simmons would rather
not use stainless. He doesn't need the fitting to put the
machine into purge so he'll bring the fitting/parts with him
on Monday.
BJ
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 66.7 CMP-SCRUB.A2 7 of 125
SUBPAC::BJUBINVILLE 11 lines 4-AUG-1994 17:46
-< passdown for 8/4/94 >-
--------------------------------------------------------------------------------
Doc and I got around 30psi for DI pressure for now.
Bob Kerwin is looking into trying to get it up to 45psi.
There was a leak detected later on in the afternoon by
Larry. Is was a slow drip but it eventually dispersed
a good size puddle. Greg found the leak ands we seem
to have stopped it. We put the machine back into purge
until Monday. Right now there seems to be a sensor problem
within the spin chamber. I'll be calling Ron Simmons in
the morning regarding this.
BJ
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]FILMS_ONLY.NOTE;1 >>>
-< Films Only! >-
================================================================================
Note 66.10 CMP-SCRUB.A2 10 of 125
SUBPAC::LANDRY 12 lines 11-AUG-1994 19:10
-< purged and purified!!! >-
--------------------------------------------------------------------------------
The H20 Purge on the ammonium Hydroxide line was completed at 3:00 PM.
The N2 purge on the line was then started and completed. The NH4OH
line was then re-attached to it's proper port. We could possibly see
NH4OH to the tool as soon as Friday.
We still need to have the OCP's interfaced to the main system
We attempted to run the systems today with a "burn-in" recipe. The
system expirienced several timeout/sensor problems. The rep will
be in to address the systems on Friday.
Doc
|
| 47.2 | MECHANICAL ACCEPTANCE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 08 1995 23:50 | 11 |
| SUBPAC::BJUBINVILLE 8 lines 9-AUG-1994 16:04
-< we're getting there here too! >-
--------------------------------------------------------------------------------
Ron I and worked with the wafers on this scrubber
today. We installed the brushes and we cycled about (50)
wafers without any problems. We are going to purge
the NH4OH with DI in the morning. All of the leaks
have be found and repaired.
BJ
|
| 47.3 | SYSTEM NOT INITIALIZING OR HOMING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 08 1995 23:51 | 40 |
| SUBPAC::BJUBINVILLE 37 lines 15-AUG-1994 18:09
-< Passdown for 8/15 >-
--------------------------------------------------------------------------------
A few problems this morning:
* Ron and I came into where the SCRUB_A2 was stopped and had
homing problems. After we rebooted the machine, there was
a problem on boot up. The machine is suppose to go right
into the OnTrak self initializing mode but it was staying
at the WinShell prompt. After Ron called the software
guru from OnTrack he had use copy a file over from another
directory. These machines are touch screens so we had to hunt
down a keyboard with a RS232 connector. We had to type the
following as these machines are not DOS operated.
WinShell:> COPY DATA2 DATA -R
After this is typed, reboot the machine it ok. Every 2 minutes
the machine does a self back-up of essential data files that usually
takes a couple of milliseconds. If you get acurate enough, if you
shut the machine the exact same time as this back-up starts, the
machine will put all of the robot offsets reset to factory defaults.
OnTrack said this has only happened twice in our model history.
This is very rare. I copied the offsets for both machines into
their respective logbooks. I will eventually copy them into here.
* The DI water is still an issue. I spoke with Bob Kerwin and
the issude is still being addressed. He's looking at least
another week before we some action.
* Repaired a few more leaks
* we went over some maintainence training as well as some process
issues with Steve.
BJ
|
| 47.4 | brush motor speed out of spec | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 08 1995 23:51 | 13 |
| SUBPAC::BJUBINVILLE 10 lines 17-AUG-1994 17:21
-< passdown 8/17 >-
--------------------------------------------------------------------------------
A "inside brush motor speed out of spec" pops up now and then.
We traced it to the drive belts on the rollers. We tightened them
up and the motor feed back was stable. The door switch in the
receiver tower was a giving both LOCKED and UNLOCKED at the same
time if you pushed on the door. The switch just needed some adjusting.
Everything else is running great.
BJ
|
| 47.5 | BRUSH HEIGHTS, MOTOR SPEEDS ADJUSTED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 08 1995 23:52 | 17 |
| SUBPAC::BJUBINVILLE 14 lines 18-AUG-1994 16:24
-< Passdown for 8/18 >-
--------------------------------------------------------------------------------
* Ron and I set the brush height to 14.5mm. After some
Oxide wafers were run on the Tencor, we found 14mm was the
best height.
* We tweaked in the outside, inside and spin motor speed
offsets for optimum stability.
* We've ran close to 600 wafers without any problems. We
should clear 1000 wafer for the mechanical acceptance
tomorrow.
BJ
|
| 47.6 | OCP INTERFACE CONFIG, PROBLEMS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 08 1995 23:52 | 22 |
| SUBPAC::BJUBINVILLE 19 lines 22-AUG-1994 17:03
-< Passdown for 8/22 >-
--------------------------------------------------------------------------------
This machine has been cycling wafers all day without any
problems.
The OCP interface that was designed for us through OnTrak
seems to be wrong. Their schematic seems to have been misplaced
so another one is being faxed to us tomorrow. We will be evaluating
this further tomorrow. Jim T. will be looking the original specs
that DEC layed out to OnTrak for our request.
The ammonia needed to be regulated at 35psi. but it was never
done. Dan Smith is looking to get me a teflon regulator and teflon
gauge in the morning. Unregulated, it will be around 45-50psi.
The DI water pressure was still sitting around 30psi at 3:30pm
today. Bob Kerwin did come into CMP to look at the gauge but it
remains to be unseen if anything was accomplished beyond 3:30pm.
BJ
|
| 47.7 | ROLLER SHAFT LEAKS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 08 1995 23:53 | 21 |
| SUBPAC::BJUBINVILLE 18 lines 25-AUG-1994 17:13
-< Passdown for 8/24 >-
--------------------------------------------------------------------------------
* Inner brush front roller shaft was leaking, replaced
seal. Note: upon removal of the seal, it was discovered
that the manufacturer installed the wrong seal. Ron is
aware of the seal and will speak to the main office about
it.
* The inner exit manifold leaking out end (brush lift end),
replaced manifold.
* The outer exit manifold leaking out end (brush lift end),
replaced manifold.
* tweaked in inside, outside and spin motor speed offsets
BJ
|
| 47.8 | TOUCH SCREEN FROZE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 08 1995 23:53 | 19 |
| SUBPAC::BJUBINVILLE 15 lines 29-AUG-1994 16:40
-< Passdown for 8/29 >-
--------------------------------------------------------------------------------
The brush height was adjusted again for
optimum cleaning.
The machine froze twice as a result to using
the touch screem. The new software might be here
tomorrow. This should take of problems like this.
We still didn't receive any info on the machine
tie in to the OCP. With no ammonia, light process
testing was done. OnTrak has to confirmed that on
two occasions, they faxed the tie in schematic to
B+V, our previous riggers. So, who knows what happened
to it. Once we get the ammonia on, process acceptance
will begin.
|
| 47.9 | SOFTWARE BACKED UP | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 08 1995 23:54 | 11 |
| SUBPAC::BJUBINVILLE 8 lines 31-AUG-1994 16:13
-< Passdown for 8/31 >-
--------------------------------------------------------------------------------
Backed up entire drive and installed new software.
So far so good. All of the bugs that we had are now gone.
Still no ammonia, still waiting....
BJ
|
| 47.10 | AMMONIA IS FLOWING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:01 | 16 |
| SUBPAC::BJUBINVILLE "The other side of life -- 3rd" 13 lines 15-SEP-1994 16:27
-< Passdown for 9/15 >-
--------------------------------------------------------------------------------
We got our ammonia finally turned on at 11am. I've
completed running the 150 wafers with the ammonia as
requested by Steve. There is still a IC chip that needs
to be replaced on both OCP's. This chip was suppose to
be in either today or tomorrow. Dan Smith will be taking
care of this. If you want the ammonia shut off for any
reason, either hit the EMO button of the machine or
preferably the OCP. I will fill Jim in on what Dan
is going to do.
BJ
|
| 47.11 | PROCESS ACCEPTANCE AND BRUSH HEIGHTS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:01 | 20 |
| ASDG::COOPERMAN 17 lines 23-SEP-1994 13:40
-< scrub.a2 passdown 9/22 >-
--------------------------------------------------------------------------------
Jeff Farber came in on 9/22 to run some contamination wafers.
During the visit the brush heights were readjusted different
from original setting back on 8/29 (ib was at about same height
as ob). New settings are:
outside brush inside brush
front 342 (24.62mm/.969") 305 (25.52mm/1.005")
back 339 (24.8mm/.9765") 3035 (25.6mm/1.008")
Note heights are slightly higher on outside brush than previously.
Jeff recommends these heights for optimum cleaning. Please do not
change these heights without approval from process engineering.
Jeff also wrote a new cleaning recipe with faster brush rpm (called
stras_clean_best).
|
| 47.12 | SOFTWARE UPGRADE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:02 | 15 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 12 lines 7-OCT-1994 15:58
-< Passdown for 10/7 >-
--------------------------------------------------------------------------------
Ron came in and completed yet another software
upgrade to this machine. It was designed to
eliminate some small bugs that were irrevalent
to us but none the less, they're gone. The
new rev. # is listed in the book.
Ron also replaced the (4) spin station fingers
to a bigger style with better wafer handling.
Wafers were run through without any problems.
BJ
|
| 47.13 | ROLLER ARMS NOT CLOSING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:02 | 11 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 8 lines 13-OCT-1994 16:10
-< Passdown for 10/13 >-
--------------------------------------------------------------------------------
The situtation with the wafer sliding past the
outter brush came back. I increased the air pressure
on the rollers to try and stop this from happening.
It has been fine all day so please keep an eye on it.
BJ
|
| 47.14 | SCRUBBER WON'T GO INTO START | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:02 | 13 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 10 lines 19-OCT-1994 16:55
-< Passdown for 10/19 >-
--------------------------------------------------------------------------------
The scrubber wouldn't go into START. I went over
to check on the OCP and sure enough, the machine was in
an alarm condition. Why? I could not find out why. Mike
from Ashland said everything was ok downstairs. I cycled
the power to the OCP and everything was fine after that.
BJ
|
| 47.15 | HEAT LAMP NOT COMING ON | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:03 | 12 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 9 lines 2-NOV-1994 16:23
-< Passdown for 11/2 >-
--------------------------------------------------------------------------------
The lamp wasn't coming during its cycle. The lamp
was in the socket but wasn't making good contact. I
believe it was due to vibration in the room. I will
start to look into getting some kind of a clip to hold
it into place.
BJ
|
| 47.16 | SPIN STATION WAFER SENSOR | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:03 | 12 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 9 lines 21-NOV-1994 09:33
-< Passdown for 11/21 >-
--------------------------------------------------------------------------------
The wafer was going into the SPIN station but
the wafer sensor wasn't detecting the wafer coming
into the station. I had to adjust the wafer sensor
amplifier to dectect the wafer. It just needed to
be tweaked. I ran (6) wafers without any problems.
BJ
|
| 47.17 | HEAT LAMP WOULDN'T COME ON | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:04 | 10 |
| PATE::GEE 7 lines 5-DEC-1994 22:42
-< Heat Lamp Bulb >-
--------------------------------------------------------------------------------
The heat lamp didn't turn on. The bulb keeps vibrating out of the
spring clips, so I adjusted the spring clip bracket assembly in
slightly to put more pressure on the bulb.
Bob
|
| 47.18 | SPIN STATION HEAD | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:04 | 11 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 8 lines 9-DEC-1994 11:49
-< Passdown for 12/9 >-
--------------------------------------------------------------------------------
The four screws on the cap that holds the
fingers are suppose to be snug, not tight.
We loosened the screws and the fingers slide
nice now. We bent the tabs in the lamp socket
so the lamp will stay tight.
BJ
|
| 47.19 | A2 CHARACTERIZATION SHEET AS OF 12/12/94 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:05 | 204 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 201 lines 12-DEC-1994 03:03
-< A2 CHARACTERIZATION SHEET AS OF 12/12/94 >-
--------------------------------------------------------------------------------
CMP_SCRUB.A2
ONTRAK DSS-200 SCRUBBER
MACHINE MAINTENANCE CHARACTERIZATION SHEET
LOAD AREA
==========
____
ELEVATOR: PHYSICAL POSITION ||_| <-- (1)
(measurement taken from (1)top || ^
of the elevator mounting || ^
bracket to the (2)bottom of the || | <-- (2)
motor mount casing. ||||_____ <--elevator base
UPPER POSITION (SLOT #1) -- 1 7/8"
HOME POSITION -- 1 3/16"
LOWER POSITION (SLOT #25) -- 7 25/32"
MACHINE OFFSET -- (found in ROBOT OFFSETS menu)
LOAD STATION -- 1250
SPRAY MAINIFOLD --
(bar and nozzle position) verify alignment of scribed marks
============================================================================
SCRUB MODULES
=============
MICROMETER SETTINGS: verify ENGINEERING set point
INSIDE BRUSH STATION | OUTSIDE BRUSH STATION
SETTING/ACTUAL | SETTING/ACTUAL
--------------------------------------------
|
WAFER ROTATION (TACH READING IN RPM'S) 40 / 44 | 50 / 45
|
BRUSH ROTATION (TACH READING IN RPM'S) 118 / 117 | 118 / 114
SPRAY MAINIFOLD --
(bar and nozzle position) verify alignment of scribed marks
==============================================================================
SPIN STAION
===========
SETTING/ACTUAL
--------------
WAFER ROTATION (TACH READING IN RPM'S) 1800 / 1815
500 / 624
CUP HEIGHT -- (measurement taken UPPER POSITION -- 7 3/8"
from very top of any
finger to bottom of MIDDLE POSITION -- 6 13/16"
tub)
LOWER POSITION -- 4 5/16"
GRIPPER FINGERS -- (measurement taken FINGERS OPEN -- 8 19/32"
from center of left
rear finger to center FINGERS CLOSED -- 7 19/32"
of left front finger)
WAFER TEMPERATURE -- AS WAFER ENTERS SPIN STATION -- 75 F
AS LAMP IS ON -- 80 F
AFTER LAMP SHUTS OFF -- 75 F
EXHAUST VELOCITY (in inches) -- 1.3
============================================================================
ROBOT
=====
OFFSETS -- WRIST AT SPIN STATION -- 64
WRIST AT RECEIVE -- 304
SPIN XPORT DELAY -- 42
ROTATION AT SPIN STATION -- 862
ROTATION AT RECEIVE -- 1837
ROBOT FINGERS -- 380
ROBOT FINGERS -- (measurement taken OPEN -- 9 5/8"
from O.D. to O.D.
from finger to finger CLOSED -- 8 1/4"
==========================================================================
UNLOAD MODULE
=============
CASSETTE AT POSTION SLOT #1-- (insert new cassette
and let machine go to
position and slot #1. -- 16 9/16"
measure from the outer
most part of the back
panel the middle of slot
#1)
KNIFE EDGE -- (measure from very UPPER POSITION -- 10 1/4"
top of knife to the
top of panel that the LOWER POSITION -- 7/8"
edge goes into)
MACHINE OFFSET -- (found in ROBOT OFFSETS menu)
UNLOAD STATION -- 442
BLADE LIFTER -- 11650
=============================================================================
ELECTRONICS
===========
IDLE | RUNNING
========================
POWER SUPPLY VOLTAGE --
+5 VOLT POWER SUPPLY 5.18 | 5.18
|
+12 VOLT POWER SUPPLY 13.1 | 13.1
|
-12 VOLT POWER SUPPLY -13.8 | -13.8
|
+24 VOLT POWER SUPPLY 24.1 | 24.1
|
+48 VOLT POWER SUPPLY 48.2 | 48.2
SERVO DRIVE POWER SUPPLY-
+40 VOLT PICK-OFF 41 | 41
+5 VOLT PICK-OFF 5.1 | 5.1
============================================================================
FLOW SETTINGS
=============
SEND -- 5
AMMONIA OUTSIDE STATION -- 3
OUTSIDE BRUSH UPPER -- 10
OUTSIDE BRUSH LOWER -- 7
AMMONIA INSIDE STATION -- 3
INSIDE BRUSH UPPER -- 9
INSIDE BRUSH LOWER -- 7
SPIN STATION UPPER -- 3
SPIN STATION LOWER -- 3
MEGASONIC NOZZLE -- 9
===========================================================================
PRESSURE SETTING 50 PSI
================
SIGNET FLOW SETTING
=================== LOW -- 40
HIGH -- 0
|
| 47.20 | LIFER MISSING WAFERS AND DOUBLE SLOTING | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:06 | 20 |
| SUBPAC::BJUBINVILLE "Quit crying and play hockey!" 17 lines 3-JAN-1995 07:05
-< Passdown for 1/3 >-
--------------------------------------------------------------------------------
I notice the lifter at the receive station missed a
wafer when looking for an open slot. This would of caused
a crash if it had gone undetected. Sometimes it may be
a bad slot in the cassette. Adjusted the RECEIVE positioning
variable to be more centered on the blade lifter. It was at
442 and I moved it to 430. I let the machine do a wafer slot
check on an entire wafer and all of the wafers were handled
fine.
BJ
|
| 47.21 | double slotting wafers in the receive cassette | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:06 | 15 |
| PATE::GEE 12 lines 9-FEB-1995 23:34
-< receive station, weekly p.m. >-
--------------------------------------------------------------------------------
Problem: System was double slotting wafers in the receive
cassettes,number 1 slot.
Action:
* Inspected the receive cassette drive chain, no problems found.
* Rebooted system and ran 4, 6 wafer runs with no problems.
* Completed the weekly p.m.
John & Bob
|
| 47.22 | SOFTWARE UPGRADE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:07 | 20 |
| SUBPAC::LANDRY 17 lines 13-FEB-1995 17:17
-< Ron to the rescue! >-
--------------------------------------------------------------------------------
Ron Simmons came in today to perform a couple of upgrades. New
software was installed. It will prohibit the loss of data when the
system gets shut off. He also installed a booty in the spin station
to help prohibit any water from migrating into the lower cabinet.
He showed up with impeckable timing today. The system had just gone
down for a lack of water to the upper brushes. Seeing I was tied up
with the Strasbaugh, he said he'd repair the problem. A solenoid was
replaced to fix this. Thanks Ron!
Doc
ps. On both Scrubbers (A1 & A2), the new software installation wiped
out all login / passwords. If you had this capability, you will
need to re-do them.
|
| 47.23 | coiled electrical cord/send station elevator | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:07 | 15 |
| SUBPAC::LANDRY 12 lines 22-FEB-1995 16:36
-< Same cord problem as system A1 >-
--------------------------------------------------------------------------------
The coiled electrical cord for the send station elevator has been
chaffed conciderably. It was beginning to create particles on the
outside of the plexiglass box (no contamination within the box where
the wafers are loaded). As a temporary provision to stop this from
happening, a strand of electrical tape was applied.
OnTrak will be notified of the problem. We'll get the cords replaced
as well as possible changing the "style" of hardware that protrudes
from the plexiglass box. It currently has hex-head hardware where a
button head style would probably work out better. Stay tuned!
Doc
|
| 47.24 | Robot fingers not repeating | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:08 | 18 |
| SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 15 lines 14-MAR-1995 09:07
-< Robot fingers not repeating >-
--------------------------------------------------------------------------------
It started out as an easy semi-annual PM and it just got
worse. The PM was completed but upon checking the finger
operation on the robot when I noticed the fingers not repeating
and barely holding onto the wafer. Curiosity lead to removing the
covers around the robot and the linkage that the OPEN and CLOSED
flags are was all loose. After the clamp was tightened down, the
finger got a little better but still not right. After speaking
with the field servive rep., he agreed on the steps that were taken
as well as trying some other things. Doc took the bull by the horns
and is having a rough ride. Ron will be here in the morning if
we can't solve this issue.
BJ and the Doctor
|
| 47.25 | The robot with inconsistant fingers | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:08 | 40 |
| SUBPAC::LANDRY 37 lines 14-MAR-1995 17:06
-< The robot with inconsistant fingers >-
--------------------------------------------------------------------------------
The Robot with the Inconsistant Fingers
Chapter II
We left off in chapter I with BJ returning to the ranch after a
long, hard evening and Doctor grasping the reins on the bull-
headed robot.
The robots fingers were not consistant in operation. They would grab
the wafer correctly at times, sometimes not. The sensor would recog-
nize the wafer, sometimes not. The flag that interrupts the sensor
would end up in different locations, only rarely repeating itself.
Found that the fingers open photo sensor was repeatable every time.
The fingers closed photo sensor, on the other hand, was incredibaly
inconsistant. Cleaned the closed photo sensor off to assure proper
opticle performance, no help. Checked the resistor / pc board and
again no help.
Knowing that the open fingers sensor was repeatable, began making
mechanical adjustments to the close fingers sensor's flag. We began
to get some different results. It appeared that these adjustments just
may do the trick as things were improving. As we slightly moved the
flag again and retried the robots performance, it picked up the wafer
fine. Then as the wafer was down-loaded into the cassette, the system
timed out in search of the fingers open sensor. The flag had flown
right on by the sensor. Back to square one.
The motor drives the fingers using step counts for location. The photo
sensors are only used to say that the task has been completed and the
next function may now take place.
There are several components that may be causing this, PIA or Int'l
stepper board, photo switch flakey, connections/cables. It could even
need the robot functions re-taught. The rep is due in Wednesday
morning to look at the problem (warranty work).
Doc
|
| 47.26 | robot finger error | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:08 | 12 |
| SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 9 lines 15-MAR-1995 05:59
-< robot finger error >-
--------------------------------------------------------------------------------
After continuing to make adjustments to the robot, it finally
started working. It was just a matter of being really touchy.
Yesterday, Doc and I noticed some software problems that need
to be addressed by Ron Simmons. Ron is suppose to be here this
morning. There is no work for the machine so I left it down.
If it is needed, it can be run. The software problem won't
effect the wafers.
BJ
|
| 47.27 | brushes NOT STAYING ON IN IDLE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:09 | 22 |
| SUBPAC::LANDRY 19 lines 15-MAR-1995 16:16
-< To rotate or not to rotate! >-
--------------------------------------------------------------------------------
System status..........
BJ did a nice job of bringing in the robot gripper sensors to where
all looks fine. Ran all day without a hitch.
At the start of the shift, we couldn't get the brushes to rotate in
it's normal idle state. By using the maintenance screen I/O func-
tions, we manually turned the brushes on. This would suffice until
the system would run it's cassette of wafers and end. Upon removing
the cassette, the brushes would shut down (as should) but after putting
the system in start, the brushes were still (no rotation). Back into
maintenance and manually start them. Well, the next time they ran the
system (and everytime after that) the brushes would rotate in every
state they normally would. So, I guess we'll keep an eye out for this
phenomina to return!
Bottom line, alls well for know.
1st shifters
|
| 47.28 | robot finger error | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:10 | 14 |
| SUBPAC::LANDRY 11 lines 16-MAR-1995 10:47
-< The case of the robot fingers has been solved! >-
--------------------------------------------------------------------------------
Today..........
Ron Simmons came in today to check out the problem we experienced this
week with the robot. Although the system was available for manufactur-
ing, the robot performance wasn't back to it's normal functionality.
Therefore, he re-taught the gripper function positions and re-setup
the photo sensor flags as well. The "bounce" that was left in the
gripper movement has vanished and the robot is humming along fine.
Doc
|
| 47.29 | MACHINE OFF-SETS AS OF 3/21/95 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:10 | 26 |
| SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 23 lines 21-MAR-1995 06:06
-< MACHINE OFF-SETS AS OF 3/21/95 >-
--------------------------------------------------------------------------------
CMP-SCRUB.A2 MACHINE OFF-SETS AS OF 3/21
LOAD STATION -- 1250
WRIST AT SPIN STATION -- 64
WRIST AT RECEIVE -- 304
SPIN XPORT DELAY -- 42
ROTATION AT SPIN STATION -- 864
ROTATION AT RECEIVE -- 1837
ROBOT FINGERS -- 270
UNLOAD STATION -- 430
BLADE LIFTER -- 11650
|
| 47.30 | Load Station elevator wiring harness replaced | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:11 | 19 |
| SUBPAC::LANDRY 16 lines 7-APR-1995 14:16
-< wiring harness replaced >-
--------------------------------------------------------------------------------
Ron Simmons, OnTrak Rep Extraodinaire, came in today to replace the
wiring for the Load Staion elevator power. The original wiring was
mounted such that the wiring would rub against the hardware protruding
from the load station tub. The new wiring has been installed such that
it will no longer rub in the previous manner. The socket head screws
will be replaced in the near future to button head screws, hence
preventing this chaffing to occur again.
We also checked out the possible leak on the feedthroughs in the brush
stations. Water was noticed to have formed there on one of his
previous visits. The last two times he was here, they have been dry,
as should be. Original sighting could have possible been attributed to
wet transfer boats, as they are some times temporarily placed there.
We'll monitor for future sightings.
Doc
|
| 47.31 | Send Station Rollers/Bad Bearings | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:11 | 17 |
| ASDG::POIRIER 14 lines 10-APR-1995 19:23
-< Send Station Rollers/Bad Bearings >-
--------------------------------------------------------------------------------
* Send Station Track Problem:
The send Station Track was moving much slower that normal on
first shift today. The system was alarming for "Time out" errors
at the Outside Brush Station. Bobby disassembled the Send Station
roller assembly and discovered high friction in the bearings. The
motor could just barely over-power the bearings. Bobby is planning
to replace the bearings on 2nd shift tonight.
John & Bob.
|
| 47.32 | send station belt bearings | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:11 | 10 |
| PATE::GEE 7 lines 10-APR-1995 23:10
-< send station belt bearings >-
--------------------------------------------------------------------------------
Problem: The wafers wouldn't go to the outside brush station.
Fix: Replaced two bearings on the send station belt drive. They
were all rusted and not functioning. Ran 50 wafers with no
problems, ran a particle check 2 adders.
Bob
|
| 47.33 | Roller arm was loose | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:11 | 10 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 12-APR-1995 06:06
-< Roller arm was loose >-
--------------------------------------------------------------------------------
The front roller in the outside brush station was opening
during the scrub cycle just from the force of the wafer.
The arm that clamps down on the shaft had all of its screws
loose.
BJ
|
| 47.34 | broken roller arm | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:12 | 15 |
| SUBPAC::LANDRY 12 lines 12-APR-1995 17:54
-< No cast will fix that broken arm! >-
--------------------------------------------------------------------------------
The system is down for parts. One of the roller arms in the outside
brush station broke today. Without the use of the arm, the wafer would
blow right on by the brushes and not get scrubbed at this station.
Well, there is no way we have an item of that nature stocked here. So,
the rep was contacted. He believes he has the arm here on the east
coast. He will be in tomorrow morning to replace the defective one.
If he has to get the part from the west coast, we're probably looking
at another day to get it shipped. The rep is researching the situation
as I type.
Doc
|
| 47.35 | repaired broken roller arm | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:12 | 9 |
| SUBPAC::LANDRY 6 lines 13-APR-1995 19:31
-< Spare Parts, the sequel! >-
--------------------------------------------------------------------------------
Ron Simmons arrived today to repair the broken arm on the roller
assembly. Upon attempting the task, it was noted that additional parts
would be needed (a second arm). He is having them ship them out
priority from California. We should receive them in the morning.
Doc
|
| 47.36 | broken roller arm | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:12 | 10 |
| PATE::GEE 7 lines 20-APR-1995 00:01
-< Arm >-
--------------------------------------------------------------------------------
Problem: Wafer would not exit the inside brush station. Found
the front brush arm broken at the shaft bolt holes.
Fix: Found a replacement in the Speedfam IO cabinet. Replaced,
realigned and preformed a verification particle test it
all set.
Bob
|
| 47.37 | replaced cracked roller arm | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:13 | 7 |
| SUBPAC::TOOKER 4 lines 2-MAY-1995 15:44
-< replaced cracked roller arm >-
--------------------------------------------------------------------------------
Inside brush station back roller arm cracked. Installed a new arm
and ran wafers to verify operation.
Jim T.
|
| 47.38 | DI water gun was installed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:13 | 15 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 12 lines 9-MAY-1995 05:45
-< Weekly PM completed, DI gun installed for ENG >-
--------------------------------------------------------------------------------
Weekly PM completed....
Note: A DI water gun was installed on this machine. It
picks off the right main 3/8" line and is shut off
by a needle valve. To use the gun, simply open the
valve. When you are done, shut the valve off and drain
any DI water from the line. Then, return the gun to
where you found it.
BJ
|
| 47.39 | Megasonics sweep arm sensor | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:13 | 12 |
| PATE::GEE 9 lines 10-MAY-1995 23:23
-< Megasonics sweep arm sensor >-
--------------------------------------------------------------------------------
Problem: The Megasonic arm in the spin station would not
move to home position.
Fix: Found the set screw that holds the sweep arm sensor flag
had loosed up. We retightened the set screw and ran 20
wafers through with no problems.
Second Shift
|
| 47.40 | Outer Brush motor problem | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:14 | 12 |
| FABSIX::R_POIRIER 9 lines 15-JUN-1995 23:42
-< Outer Brush motor >-
--------------------------------------------------------------------------------
There was a problem with the Outside top brush motor. It kept
stopping when in idle mode or it would stop if any torque was
applied to the motor, and would not start again by itself. We
replaced the motor and it has been running ok since.
2nd Shift
|
| 47.41 | new motor spin speed calibration | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:14 | 22 |
| SUBPAC::LANDRY 19 lines 16-JUN-1995 18:04
-< new motor spin speed calibration >-
--------------------------------------------------------------------------------
This morning...........
I took a few minutes to see exactly what the outside brush station
top brush was spinning at since the new motor installation. It was
within spec, but I attempted to bring it in even tighter. I found that
the calibration procedure (which is located in the OnTrak manual as
well as the Digital Maintenance spec) was rather hard to follow and
execute. Therefore, I contacted Ron Simmons for some guidance. He
clearified a few "hazy" spots for me. I will edit the maintenance
spec soon to better explain some of the circumstances. Before I go to
far, let me say that the procedure is correct in both the spec and the
manual. The planned editing will make it simplified.
Anyway, I used the tachometer to vefify that we were in spec. At a
setting od 125 RPM (cleaning step speed!) the external tachometer was
reading 122.4 RPM, well within the 10% variance allowed.
Doc
|
| 47.42 | OB sta brush change, new micrometer settings! | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:14 | 30 |
| SUBPAC::LANDRY 27 lines 23-JUN-1995 16:50
-< OB sta brush change, new micrometer settings! >-
--------------------------------------------------------------------------------
The infamous leak was repaired by the 3rd shifters. It's holding
the water back real well. No runs, no drips, no errors.....one part
left over in the fab. I found a small o-ring on the system. Not sure
if this was a changed out one, one left out or what. But hey, there
are no leaks, so I "ass/u/me" that all is well???
Moved on to the new brush installation. This is usually an arduous
task to say the least. I don't know what new technique I used, but it
seemed to go fairly smoothly. Got the nubs to stay straight, evenly
distributed too! Re-installed said brushes. Ran a full cassette of
"break-in" wafers. Earl was ever_so_kind to perform the particle
checks/MQC. Results were positive. The systems back on line.
Only the outside station had the brushes changed out, as these were the
only ones to get contaminated. All 3 polishers were running, hence the
return of the scrubber to manufacturing. As soon as time permits, the
inside brushes can get changed. We need to keep the brush life between
stations consistant with each other. Once those brushes are changed,
we'll need to log down the wafer count in the NOTES file, then reset
the count on the system.
One last thing..........the new micrometer settings for the outside
brush are: Front = 3.05 + Rear = 3.10. This info has also been
entered in the log book on the system.
Doc
|
| 47.43 | New Brush Height Micrometer Settings | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:14 | 24 |
| SUBPAC::LANDRY 21 lines 24-JUN-1995 15:51
-< New Brush Height Micrometer Settings >-
--------------------------------------------------------------------------------
Between Friday morning and Saturday morning, all four brushes were
changed out on the system. The brush heights were adjusted. The new
micrometer settings are:
Outside Station Inside Station
----------------- ----------------
Front = 305 Front = 310
Rear = 310 Rear = 310
Please use these new settings when checking the brush heights during
the PM's. he numbers can also be found in the logbbok on the system.
Break-in wafers were run by third shift. MQC's were run on first
shift. Minor adjustments needed to be made to the micrometers after
the break-in wafers were run. Also adjusted the roller arms. The
wafer stop position (which the rollers control) were out of adjustment,
letting the wafer over travel a bit.
Doc
|
| 47.44 | Recieve Station Door Sensor | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:15 | 10 |
| ASDG::POIRIER 7 lines 25-JUL-1995 19:34
-< Recieve Station Door Sensor >-
--------------------------------------------------------------------------------
* Recieve Station Door Sensor:
Since the sensor was undamaged electrically, its' plastic housing was
bonded back together with Loctite. The door hinges were then
readjusted to compensate for the sag in the door. The sensor
broke due to interference with the door.
|
| 47.45 | broken or lost wafer error | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:15 | 18 |
| SUBPAC::LANDRY 15 lines 29-JUL-1995 18:19
-< broken or lost wafer error....... >-
--------------------------------------------------------------------------------
While checking out the "alarms" log on the system today, I noticed
several errors for "broken or lost wafer" in the spin station. They
are all fantom errors as the system never stops running. While
watching the system outputs page, I noticed that occasionally, the
spin fingers closed LED would flash on then off and remain off. To
familiarize you with this sensor, the fingers closed LED should NOT
light up, as this signifies that the fingers closed to their mechanical
end, and not the position that the wafer is grabbed. Therefore, when
the "fingers open LED is lit", this is a true sensor reading. Once the
fingers close around a wafer, this LED should go off and the Closed LED
should also remain off. So, I mechanically adjusted the microswitch for
this fix. We'll have to monitor it to see if it is adjusterd enough.
Doc
|
| 47.46 | PROCESS ENGINEERING CHANGES | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:15 | 30 |
| SUBPAC::LANDRY 27 lines 4-AUG-1995 19:20
-< major adjustments made / per Pro Eng >-
--------------------------------------------------------------------------------
Today, Frank Krupa and scrubber extrodinaire Pat McPherson (from fab 4)
performed some expirements on the system. They did the bulk of the job and
I assisted them with equipment adjustments when necessary. The objective was
to improve the megasonics performance and reduce particles. Many different
parameters were tried, as well as equipment adjustments. Some of the physical
adjustments showed extremely positive results with particle removement. They
include the raising of the megasonics arm, changing of the water flow rate at
the arm, increasing of the megasonics generator. Also, spin speeds helped
things dramatically. Due to operating specifications, some of the changes
could not be made perminent at this time. But, what items were not affected
by the spec have been made perminent. They are the Megasonics arm height and
generator setting and also the flow rate from the megasonics nozzle. The
height has been changed to 3/8" clearance over the wafer and the generator
has been turned up to it's max setting. The flow rate has been reduced to
500ML (or 5 on the flow meter).
Other changes to be made in the near future as the spec is DCO'd.
On another note, the "wafer lost or broken" alarm has been repaired.
The actual switch that was out was the reed switch on the bimba shaft. This
was detected by our ace Equipment Engineer, Jim Tooker. With his guidance,
we got the switch adjusted right (I hope 8*> ).
Doc
|
| 47.47 | BRUSH CHANGES AND ALIGNMENTS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:16 | 38 |
| LUDWIG::KRUPA 35 lines 23-AUG-1995 17:59
-< Ontrak Training/brush set-up >-
--------------------------------------------------------------------------------
WED - 08/23/95
Ron Simmons from Ontrak worked on CMP-SCRUB.A2 today. John Pourier, Doc,
and Brendan Finn, and myself were trained by Ron to perform the following:
1 brush change procedure: NOTE: NEED A BUCKET IN CMP ROOM TO SUBMERSE
THE BRUSH CORE IN TO MAKE INSTALLATION
EASIER.
2 brush parallelism: WERE WAY OUT ON BOTH TOOLS
3 brush height set-up: BOTH BRUSHES WERE SET TOO HIGH
4 alignment of wafer transfer in spin station and unload station
NOTE: Procedures 1-3 were also performed on CMP-SCRUB.A1 today. Procedure 4
was not due to time and system availability, but, needs to be done.
In addition Ron performed a "once-over" on the tool and identified the
following issues; some of which were corrected:
- No NH4OH was flowing to SCRUB.A1&A2. All flow regulators were closed.
even when they were opened, there was no supply and NO ALARMS!
Doc called Ashland chemical. Shortly after the call we heard the low
flow alarm go off. Soon after the NH4OH began to flow. Plan to
look into this further tomorrow to determine how long this was this
way and why we had no alarms.
- The exhaust for the spin station and brush stations are not set-up
correctly(their required exhaust tags are actually reversed).
Brush station should be ~5 scfm. Spin station should be ~50scfm.
Actual was ~16 scfm for both.
- The water in the spin station was turning on prior to the carriage
dropping into low position. This caused water to splash off the
wafer and out of the bucket. The low position sensor was found to
be bad(~1.2mV) and was replaced with a new one(0.26mV).
- The wafer appears to "wobble" when spinning in the station.
Alignment of the mechanism did not appear to help this any. Ron
will be looking into causes, but, we should be ok for now.
- The top rinse was not centered on the wafer and this was corrected.
-Frank, Ron, Doc, John, Brendan
|
| 47.48 | BRUSHES ALIGNMENTS, CHANGES AND EXHAUST | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:16 | 37 |
| SUBPAC::LANDRY 34 lines 23-AUG-1995 19:20
-< Brushes changed out. Sensor changed. >-
--------------------------------------------------------------------------------
WED - 08/23/95
Ron Simmons from Ontrak worked on CMP-SCRUB.A2 today. John Poirier, Doc,
and Brendan Finn, and myself were trained by Ron to perform the following:
1 brush change procedure: NOTE: NEED A BUCKET IN CMP ROOM TO SUBMERSE
THE BRUSH CORE IN TO MAKE INSTALLATION
EASIER.
2 brush parallelism: WERE OUT
3 brush height set-up: BOTH BRUSHES WERE SET TOO HIGH
4 alignment of wafer transfer in spin station and unload station
In addition Ron performed a "once-over" on the tool and identified the
following issues; some of which were corrected:
- No NH4OH was flowing to SCRUB.A2. All flow regulators were closed.
even when they were opened, there was no supply and NO ALARMS!
Doc called Ashland chemical. Shortly after the call we heard the low
flow alarm go off. Soon after the NH4OH began to flow. Plan to
look into this further tomorrow to determine how long this was this
way and why we had no alarms.
- The exhaust for the spin station and brush stations are not set-up
correctly(their required exhaust tags are actually reversed).
Brush station should be ~5 scfm. Spin station should be ~50scfm.
Actual was ~16 scfm for both.
- The water in the spin station was turning on prior to the carriage
dropping into low position. This caused water to splash off the
wafer and out of the bucket. The low position sensor was found to
be bad(~1.2mV) and was replaced with a new one(0.26mV).
- The wafer appears to "wobble" when spinning in the station.
Alignment of the mechanism did not appear to help this any. Ron
will be looking into causes, but, we should be ok for now.
- The top rinse was not centered on the wafer and this was corrected.
Frank, Ron, Doc, John, Brendan
|
| 47.49 | sensor replaced/motor speeds changed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:17 | 12 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 23-SEP-1995 09:01
-< sensor replaced/motor speeds changed >-
--------------------------------------------------------------------------------
The home sensor for the SEND station blew out and was
replaced.
The OUTSIDE brush and roller speeds were slightly out of spec
and kept tripping the alarm. The speeds were set to run at the
program speeds and the % error was brought to 0.
BJ
|
| 47.50 | Send Station Top limit sensor | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:17 | 10 |
| PATE::GEE 7 lines 26-SEP-1995 07:16
-< Send Station Top limit sensor >-
--------------------------------------------------------------------------------
The send cassette top limit switch wasn't working.
Found that the sensor is cracked. I repaired it for now,
but didn't have time to replace it. I pulled one from stock,
it's onto of the tool box.
B Shift
|
| 47.51 | Input Cassette Sensor | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:17 | 15 |
| FABSIX::B_FINN 12 lines 26-SEP-1995 18:40
-< Input Cassette Sensor >-
--------------------------------------------------------------------------------
Replaced input cassette top stop switch. (Please refer to B shifts
previous note on this tool). Adjusted sensor's flag so it will not strike
the new sensor. Ran several times to test, also ran half a boat of wafers, aok.
The old switch which is cracked, but functional (in a crisis) was tagged and
placed in the tool box.
A Shift
|
| 47.52 | Outside station Roller speed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:17 | 42 |
| PATE::GEE 39 lines 3-OCT-1995 07:25
-< Outside station Roller speed >-
--------------------------------------------------------------------------------
When we came in tonight the system was down for an
"outside brush-roller motor speed failure". The speed
was set at 50 rpm but the display only read 33 rpm.
Talked to A shift and they informed use that the procedure
in the manual didn't work. We called the field service rep.
to see if we could get a FAX of a procedure that works.
He told use to try and adjust pods R31 and R13 and see if
we could bring the speed into spec. It didn't do anything.
Pod R31 is located on the main motor controller board and
controls the speed in all areas of the system, we put the
Pod back to its original position. Called a second time and
never received a response.
Check the 5v,12v,24v and 48volt power supplies and they were
all good. Checked the inside brush station speeds and they
checked good also.
We decided to try the procedure in the manual on calibrating
the Dual DC motor controller board for motor drive #4,
this controls the outside brush-roller motor. When this
procedure is completed the set speed of 50 rpm should
be displayed on the screen and by adjusting pod R54
you can adjust the roller speed to match the display and
setpoint.
At a setpoint of 50 rpm we displayed 0 rpm and at the roller
we read 20 rpm.
We replaced the board hoping that one of the pods may have been
stuck, no luck we had the same results.
By adjusting pods R54 and R13 we could change the speed at the
roller and on the display screen, but never by the same amount.
Need to contact field service in the am for a procedure on
calibrating the speeds.
B Shift
|
| 47.53 | ROLLER MOTOR tach problems | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:18 | 27 |
| SUBPAC::LANDRY 24 lines 3-OCT-1995 19:35
-< tach problems >-
--------------------------------------------------------------------------------
The ride continues to be rough.......
* With the assistance of Ron Simmons, the speed out of spec problem
was found to be a bad tach on the roller motor. The motor was
replaced and board calibration for the motor was performed.
* The cause for the motor failure was due to a drip coming from the
outside station roller motor feedthrough, which was landing directly
on the motor. We RTV'd the leak and let it cure.
* Upon system verification run, the Spin Station motor was all out of
whack, running away in fact. This is where we are currently handing
over the system. Some info goes:
- we input a spin speed of 600 RPM. The tach readout on the screen
showed 815 RPM. The hand held tach read 768. This is giving
the system a out of spec tolerance.
- Peter Michaels (California) is FAX'ing a procedure to correct
this. Also, Ron Simmons has been left a phone message about the
problem.
A shifters
|
| 47.54 | Spin station / Send station SPEEDS | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:18 | 14 |
| PATE::GEE 11 lines 4-OCT-1995 07:18
-< Spin station / Send station >-
--------------------------------------------------------------------------------
* The spin station spin speed was out of spec.
Calibrated the Spin station spin speed. We used
the procedure in the manual.
* Wafers not arriving at the outside brush station.
Found the wafer sensor in the send station loose,
tightened the sensor and adjusted the off-set variable.
B shift & Brian
|
| 47.55 | transport rebuilding/ CARRIAGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:18 | 16 |
| SUBPAC::LANDRY 13 lines 4-OCT-1995 18:18
-< pm, transport rebuilding....... >-
--------------------------------------------------------------------------------
* Performed the Weekly PM; check sheet looged into the proper note.
* Rebuilt a defective transport pulley in the outside brush station.
All parts are stocked except for the pulley itself. I will issue
a SID sheet to stock these, as the one in the system shows some
wear at the bearing entrance.
* The leak in the outside brush station roller feedthrough tube that
was repaired the day before, appears to have sealed nicely. Still
no evidence of a leak.
the A team
|
| 47.56 | Small D.I. Water Leak on Gage Guard | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:19 | 14 |
| -< Small D.I. Water Leak on Gage Guard >-
--------------------------------------------------------------------------------
* D.I. Leak:
A small D.I. water leak has developed on the gage guard behind the
system. It's on the pressure gage to the left as viewed from the rear
of the tool. I attempted to order a replacement gage guard from the
094 stockromm but the SGMR system was down. "D" shift, please replace
the gage guard if time allows.
Thanks,
John.
|
| 47.57 | gauge guards removed, amplifer issue | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:20 | 14 |
| SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 11 lines 19-OCT-1995 06:31
-< gauge guards removed, amplifer issue >-
--------------------------------------------------------------------------------
Removed both gauge gaurds on the DI feed. Guess
what... We've got 40 psi!
The megasonic arm didn't go to home. It appears the
amplifier for the home sensor was not seated properly. The
arm move fine after that.
BJ
|
| 47.58 | Send Station Lock-up Problem | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 09 1995 00:20 | 14 |
| ASDG::POIRIER 11 lines 21-OCT-1995 20:01
-< Send Station Lock-up Problem >-
--------------------------------------------------------------------------------
* Send Station lock-up Problem:
The system errored numerous times this afternoon for "outside
brush station timeout". The send station wasn't sending any wafers
out. We reset both the outside brush station and send station
numerous times only to get the error again. Brad and I finally
EMO'd the system and rebooted. The system has performed numerous
runs without any further trouble.
John & Brad.
|
| 47.61 | arm not at home | FABSIX::B_FINN | | Wed Dec 20 1995 18:38 | 9 |
|
Megasonic's arm not homing. Home position sensor not illuminated even
when flag was met. Found yellow sensor not seated properly in bracket. Also
tightened arm to eliminate slop at top of arm as compared to Scrub.A1 Ran
two boats of wafers aok.
A SHIFT
|
| 47.62 | SYSTEM OFFSETS AS OF 12/21/95 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Dec 21 1995 00:36 | 20 |
|
LOAD STATION -- 1660
WRIST AT SPIN STATION -- 72
WRIST AT RECEIVE -- 304
SPIN XPORT DELAY -- 45
ROTATION AT SPIN STATION -- 864
ROTATION AT RECEIVE -- 1837
ROBOT FINGERS -- 480
UNLOAD STATION -- 430
BLADE LIFTER -- 11600
|
| 47.63 | Send Elevator Sensor Adjustment / Timeout Errors | ASDG::POIRIER | | Fri Dec 22 1995 17:55 | 13 |
|
* Send Elevator Sensor:
--------------------
The system errored numerous times today for "Timeout At Outside
Brush Station". The Send elevator would lower the cassette until
the bottom most wafer contacted the belt. At this point nothing
more would happen until the system errored for the timeout condition.
The Send Elevator sensor was rotated counter clockwise by 1 turn.
The sensor is now slightly higher/closer to the cassette. We've run
approx 100 wafers thru the system since the sensor was adjusted
without any timeout errors. Keep a watch on this condition as the
sensor may need a little more adjustment.
|
| 47.64 | WAfer transport not working | STRATA::RIDLON | Eliminate the obvious | Sat Dec 23 1995 06:54 | 5 |
| Wafer transport not working in send cassette. Sensor was seeing wafer
but motor was not turning on. Motor worked fine in manual. Cycled power
to reboot and ran some test wafers through with no problems.
MR
|
| 47.65 | Start-up for 12/29 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 29 1995 15:11 | 9 |
|
The DI came on but is still out of spec so we didn't want
to keep it to the tool so we shut off the DI feed and opened the
by-pass. Facilities still have some by-passes opened, that's
why we don't have very high pressure.
Mitch,John,Leon,BJ
|
| 47.66 | CMP-SCRUB.A2 START-UP COMPLETE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sun Dec 31 1995 14:40 | 28 |
|
CMP-SCRUB.A2 STARTUP CHECKSHEET
-------------------------------
Shift Date
------- -------
1. Ensure that all necessary facilities are B/C/D 12/31/95
available and ready to use.
2. Power up each system. B/C/D 12/31/95
3. Open incoming DI Water Valve to each B/C/D 12/31/95
system.
4. Close UDR valve at each system. B/C/D 12/31/95
5. Replaced scrub brushes in outside B/C/D 12/31/95
brush station. Re-installed brushes
in the inside brush station.
6. Change RTC status to SCHEDULED DOWN and
perform a Weekly PM on each system.
7. Change RTC status to VERIFY and notify
Operations that the systems are ready
for MQC.
|
| 47.67 | ammonia | FABSIX::R_GEE | | Tue Jan 02 1996 07:49 | 3 |
| * Ammonia was down from 8 pm to 3am.
B shift
|
| 47.68 | double loaded | SUBPAC::LANDRY | | Wed Jan 03 1996 17:46 | 8 |
|
The system did something unnatural today. It faulted out in the spin
station. Upon finding out why, I found two wafers in that station.
No explanable reason why. Removed them and tested system performance.
Alls well.
Doc
|
| 47.69 | Arm replaced | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 10 1996 06:20 | 4 |
|
Replaced rear top roller arm in the outside brush station.
BJ
|
| 47.70 | brush hight adjustment | FABSIX::B_FINN | | Fri Jan 19 1996 19:06 | 11 |
|
Found brush hights off.
ALL brush heights were adjusted new values are as follows;
Outside front = 375 Outside back = 355
Inside front = 360 Inside back = 335
Frank/Brad/Brendan
|
| 47.71 | Brush height adjustment | STRATA::RIDLON | Eliminate the obvious | Tue Jan 30 1996 00:02 | 4 |
| During the weekly pm found the inside back brush height off again.
Adjusted to 335 and locked it in.
B shift
|
| 47.72 | o-ring or drive belt? | FABSIX::L_SHKOLNIKOV | | Thu Feb 01 1996 07:18 | 10 |
| * O-Ring in outside brush station
--------------------
The system errored numerous times today for "Timeout looking for
outside brush wafer sensor." A wafer went past the sender and stopped
before outside brush station. Conveyer pulley wasn't spinning at the
brush station. Found o-ring (202-113) was loose. Replaced o-ring.
The machine worked fine after that.
D shift
|
| 47.73 | need volts? oh here they are! | SUBPAC::LANDRY | | Tue Feb 06 1996 19:24 | 10 |
| Was asked to look at the system today for no water flow in the
Send Station. Well, there was indeed water going to the station,
but the 24 VDC solenoid wasn't energizing. Checked for voltage
at the solenoid connector (J2). 24 Volts were there. Just about
to order a new solenoid when something caught my eye. J2 into J2!
I don't think so. J2 should be plugged into P2. After plugging
the proper sequence together, voila, water flow.
A Shift
|
| 47.74 | outside brush station lower brush bearings | FABSIX::R_GEE | | Sun Feb 11 1996 06:58 | 5 |
| * The outside brush station's lower brush was hesitating.
Replaced all 4 bearing.
B shift
|
| 47.75 | System halted | STRATA::FINN | | Sun Feb 11 1996 19:13 | 14 |
|
System stopped dead in its tracks with a wafer at spin station
and fingers closed around wafer, Robot at receive position. Load cassette was
not indexing and belts off. System would not retrieve wafer via wafer recovery
screen. Check I/O for all station, everything seemed satisfied. Tried to use
I/O's to remove wafer, but system would not respond. Powered system down, upon
boot up system prompted us to remove wafers via wafer recovery, this time it
worked fine. Ran 4 boats of wafers without error, returned to manufacturing.
A shift
|
| 47.76 | OCP failure | SUBPAC::LANDRY | | Tue Feb 13 1996 19:35 | 9 |
| Today, the OCP for the Ammonium Hydroxide kicked off, sending both
scrubbers into a halt mode. Checked the pressure gauge and it had
40 PSI going to the machine. So why did they alarm. Well, the
fault displayed a "timed out" (or something wordy like that). We
weren't able to reset the OCP's. Gave Ashland a call to check out
there end of the deal. The computer that controls the OCP hichup'd.
They need to down load a couple of files and we were back in business.
Doc
|
| 47.77 | motor replaced | SUBPAC::LANDRY | | Wed Feb 14 1996 19:31 | 15 |
| Well, the system was aggravating the people in the room as the alarm
horn kept sounding off for a "brush motor out of spec". The upper
brush in the Inside Brush station was the culprit. High-tech'ly
trouble shot the problem and found that the motor was bad. It would
run a programmed speed for awhile, then suddenly drop 20 RPM or so
for a few seconds. It was consistantly doing this.
Therefore, the motor was replaced. It ain't no fun trying to solder
them little wires/caps when the motor is round and rolling on the
table! Once done, the motor was installed. Of course, this means the
board needed to be calibrated, which I did do. Ran several exercise
wafers to confirm the fix. Okey Dokey!
Doc
|
| 47.78 | Leak | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Feb 15 1996 06:31 | 6 |
|
DI is leaking down the outside brush station at lower
brush motor. We will try and get the tool tomorrow
morning if no one else gets a chance to get it.
D shift
|
| 47.79 | Contact phone numbers for OnTrak | SUBPAC::TOOKER | | Fri Feb 16 1996 10:50 | 27 |
| Here is the latest list of service contacts for OnTrak Systems. These con-
tacts can be used to get answers to technical questions, field service requests,
and parts.
1) Ron Simmons: Office - 508-643-2772
Pager - 508-504-7906 (this is your best bet)
If no response in one hour, contact area supervisor in Fishkill, NY.
2) Pat Paino (area supervisor), Fishkill, NY:
Pager - 800-963-5770
If no response in one hour, contact area supervisor in Austin, TX.
3) Stan Jaskinski (area supervisor in Austin, TX:
Office - 512-448-4494
Pager - 800-905-9275
4) Brad Clements (regional manager), Austin, TX: (best bet for nights)
Office - 512-448-4494
Pager - 800-796-7363 PIN 193-3639 (7 X 24 response)
|
| 47.80 | BRUSH MOTOR REPLACED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Feb 17 1996 00:52 | 6 |
|
The bottom brush motor in the outside brush station seized up
because DI water leaked past the bearings. Everything was wiped
clean and the motor was replaced. The motor was recalibrated
and speed brought into spec.
D shift
|
| 47.81 | IB Upper Arm problem | SUBPAC::LANDRY | | Wed Feb 28 1996 19:41 | 6 |
| The system is on WARNING for a broke upper arm in the outside brush
station. An order has been placed with OnTrak for this part. System
is working fine as is, but the arm does need to be replaced.
A Shift
|
| 47.82 | Spin Station - Wafers Double Stacked & Broken | ASDG::POIRIER | | Fri Mar 01 1996 19:31 | 6 |
|
* Wafers Double Stacked in Spin Station:
-------------------------------------
Product wafers broke in the Spin Station Today after being
double stacked. We reset the Station and no further occurances
were observed for the remainder of the shift.
|
| 47.83 | Top roller arm replaced | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Mar 02 1996 05:32 | 11 |
|
The top section of the front roller arm in the
outside brush station that was cracked has been replaced.
A little while later, top brush support arm must of
got bumped during the repair and was causing the wafers to
ride up on the roller. It was readjusted and has been ok
since.
D shift
|
| 47.84 | cracked index station cover | SUBPAC::TOOKER | | Tue Mar 12 1996 15:57 | 6 |
| The index station cover is cracked. I have ordered a replacement
cover. It should arrive here by this Friday. Until, then be very
gentle with the old one.
Thanks,
Jim
|
| 47.85 | Send Station Replaced | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Mar 23 1996 05:32 | 7 |
|
The new SEND station came in and it was replaced.
Alignments were done and tool passed MQC's.
BJ
|
| 47.86 | Send Station Indexer Motor | SUBPAC::LANDRY | | Sat Mar 23 1996 14:10 | 10 |
| The Send Station Indexer would not return to home position after a
cassette of wafers were run. I could hear the motor trying to drive
elevator home, but there was zero movement. Traced problem back to
the pulley on the indexer motor. It was wedged against the motor
retaining bracket. Adjusted said pulley for proper clearance, reset
up the drive belt tension, and tested several times. All is working
fine.
Doc
|
| 47.87 | roller motor inner station | STRATA::FINN | | Wed Mar 27 1996 18:34 | 12 |
|
Inner brush station motor roller motor, intermittently failing.
Removed old motor and shaft and resealed water leak, and changed oring
on white plastic seal cap at base of left roller arm. Also found bottom
gear missaligned so that it rubbed on bracket, realigned.
Reassembled and checked for leaks. Found none. New motor was
functional, but required board cal to prevent speed alarms due to high
speed. Ran test wafers aok , returned to manufacturing for mqc's.
A shift and HAWK
|
| 47.88 | CMP-SCRUB.A2 shutdown completed for facilities tie-in | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Mar 28 1996 06:16 | 28 |
|
SHUTDOWN: 5:00 AM ON 3/28/96
STARTUP: 9:00 PM ON 3/28/96
CMP-SCRUB.A2 SHUTDOWN CHECKSHEET
--------------------------------
Tech. Date
------- -------
1. Change RTC status to SCHEDULED DOWN. LEON 3/28/96
2. Remove all PVA scrub brushes and submerge
in DI water. If possible, DO NOT remove
the brushes from their cores. LEON 3/28/96
3. Perform a complete wipe down and dry of
all wet surfaces. LEON 3/28/96
4. Close main incoming DI Water valve to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. LEON 3/28/96
5. Power down each system.
LEON 3/28/96
|
| 47.89 | Inside & outside DI water flow regulators | FABSIX::R_GEE | | Tue Apr 02 1996 07:47 | 4 |
| Found the flow regulators for the inside and outside
brush stations closed. Set all four flow regulators
to the setting of scrub.a1
B shift
|
| 47.90 | door latch adjustment | FABSIX::L_SHKOLNIKOV | | Wed Apr 03 1996 08:24 | 4 |
| Numerous times system was alarmed for receiving door latch failure
Door latch has been adjusted. Run 16 wafers - OK!
D shift
|
| 47.91 | Inside brush station leak | FABSIX::L_SHKOLNIKOV | | Fri Apr 05 1996 07:42 | 9 |
| Inside brush station water leaking through the rear roller shaft
and through the front arm assembly as well. I took it apart resealed
water leak (as much as possible without changing roller shaft
assembly - we don't have it in stock) and changed o-rings.The water
leak stopped through the front arm but is still coming through the rear arm
shaft which need to be replaced. I will speak to Jim T. about
getting this part rushed in.
Leon
|
| 47.92 | Yet another leak | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Apr 06 1996 06:44 | 9 |
|
Tools still had a leak coming from the rear
roller assembly. The o-ring for the collar didn't
get replaced yesterday. Removed rear top roller
assembly in the inside brush station and replaced
the o-ring inside the white collar. So far, no leaks...
Leon
|
| 47.93 | Arm replaced | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Mon Apr 08 1996 16:58 | 6 |
|
Replaced top rear roller arm in the outside
brush station.
A shift
|
| 47.94 | Burnt out Quartz Lamp | FABSIX::R_POIRIER | | Sun Apr 14 1996 07:57 | 7 |
|
The Quartz Lamp in the Spin station burnt out. We replaced
and gave Scrubber back to Operations.
B Shift
|
| 47.95 | scheduled contractor work performed | SUBPAC::LANDRY | | Tue Apr 23 1996 19:53 | 20 |
| Today...........
The DI water input to the room was shut down to perform
some scheduled work with the DI line AND the OCP's had
work done concerning the communications/electronics
package. This necessitated us to remove ALL the scrub
brushes so that they may be placed in water to keep wet.
All brushes were labeled and re-installed in their original
station/position.
Ashland performed some electronic/communication work on the
OCP's. They verified that the work done to assure proper
communication between the delivery system/OCP/scrubber.
Once the water came back on and the system were allowed to
be started up again, the brushes were installed, test wafers
were run through the system, and MQC checks were performed.
The system came back up with no problems.
A Shift / Jim T
|
| 47.96 | Motors offset | STRATA::RIDLON | Eliminate the obvious | Mon May 13 1996 07:48 | 7 |
| The wafer rotation motors (good a name as any) were relocated. Orings
are being used in the interim until the belts, which have been ordered,
arrive. The belt is the same that raises and lowers the indexer.
B shift
|
| 47.97 | passdown | STRATA::FINN | | Mon May 13 1996 20:18 | 10 |
|
System was not staying in "start mode", Connector J9 had loose pins.
Also had intermittent problem were belts would not turn on at cassette.
And intermittent problem with spin station time out error. Adjusted
Roller arms at inside brush station.
Took some time to trace out the OCP/leak EMO relay/power supply
circuit. System now up and running.
A shift/ & "Jim the Toolman Tooker"
|
| 47.98 | New Ammonia Flow Meters installed | SUBPAC::LANDRY | | Tue May 21 1996 14:54 | 13 |
| Whilst doing the Weekly PM today.............
New flow meters were installed for ammonia use. The flow meters
installed dispense a smaller volume than the previously used flow
meters. The newer ones were installed to complete the ammonia drip
manifold project, which was started last week. Both the Inside and
Outside brush stations are now complete.
After installation, the flow meters were set dispense an adequate
amount of 2% ammonia.
Respectfully........ the A shift
|
| 47.99 | New brush heights | SUBPAC::LANDRY | | Tue May 28 1996 20:29 | 15 |
|
Today, we started the system up from a shutdown situation. At this
time, new brushes were installed. The wafer count was zero'd out
in conjunction with the new brush install. MQC's passed on the 1st
pass.
The New Brush Heights are: IB-front 570 IB-rear 535
OB-front 620 OB-rear 615
The new brush heights have been entered into the latest Weekly PM
checksheet. The Weekly PM has been performed for this week.
A shift
|
| 47.100 | Roller bearing shot! | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed May 29 1996 08:32 | 7 |
|
The rear roller bearing in the send station is cooked.
None in stock or not a stocked item. Waiting for the ok
to "borrow" the set-up from the Wet-Lab.
BJ
|
| 47.101 | Roller Bearing Assembly Ordered | ASDG::POIRIER | | Wed May 29 1996 20:30 | 5 |
|
Send Station Roller Bearing Assembly:
------------------------------------
The assembly has been ordered and will arrive tomorrow at 10:30 a.m.
|
| 47.102 | Send Station Sensor Temporarally Readjusted | ASDG::POIRIER | | Thu May 30 1996 20:45 | 7 |
|
Send Station Sensor Adjusted:
----------------------------
The Send Station sensor has been adjusted to allow the station
to feed wafers with only one set of belts. We will readjust the
sensor when the remaining parts of the pully assembly arrive tomorrow.
|
| 47.103 | send st pulley assembly. | FABSIX::L_SHKOLNIKOV | | Sat Jun 01 1996 06:15 | 7 |
|
Send Station Rear pulley assembly
--------------------------------
finally has been installed. The system has performed numerous
(all night) runs without any further trouble .
d-shift
|
| 47.104 | Megasonics arm home position amplifier | FABSIX::R_GEE | | Mon Jun 17 1996 08:15 | 7 |
| Errored for "megasonics arm not home". The arm was in the
home position but the sensor wasn't seeing it. The LED was
out on the photo amplifier. Removed the amplifier and found
some contamination on one of the pins. Cleaned and recrimped
the pins. Re-installed and tested, all set.
B shift
|
| 47.105 | You can start_me_up! | SUBPAC::LANDRY | | Sun Jun 23 1996 14:13 | 18 |
| Had a problem this morning with the system NOT going into the start
mode. Rebooted the system, all stations initialized as should, but
when attempting to put the system into start, there was no success.
The system was acting as if an inhibit switch was not being made.
There is no I/O or other page function to quickly look at to determine
if in fact this was the problem. Therefore, checked out all the
inhibit switches for proper operation. Both the IB and OB station
covers and the Spin Station door were checked. All had 24 VDC
coming to them as should. Ohm'd out the magnetic switches. All showed
they were working fine (the meter read OPEN when the switch was not
present and read less than a Ohm when the switch was made). Went into
the electronics cabinet and checked the pins/connector for the OCP
interface. The pins appeared to be not making proper contact. So,
I assured they were making contact by plugging the pins together minus
the connector. Lo and behold, the system now starts. Put the con-
nector back together and retried results. Voila!
Dr.
|
| 47.106 | panel / gauges installed | SUBPAC::LANDRY | | Tue Jun 25 1996 20:42 | 17 |
|
While the room was shut down for a couple of hours today, we
took advantage of that time and installed two inline gauges.
One for the DI Water and the other for Ammonia. The gauges
are mounted above the drip pan to the rear of the machine.
It is necessary to remove the rear panel (on the Send Station
end) to see the gauges. These are currently only for convien-
ience as they tie into a bigger project, which is alarm warnings
at the touch screen, which we don't presently have the capability
of on the systems today. New software and boards will be installed
in the near future which will give us that capability.
So, the two new gauges have been plumbed in place and are reading
the pressures. Be aware that 2% ammonia is flowing to it's new
gauge. The lines were checked for leaks, none were found.
A / Jim T
|
| 47.107 | OnTrak after hours support | SUBPAC::TOOKER | | Fri Jun 28 1996 11:30 | 6 |
| Here is a telephone number that can be used for contacting OnTrak Systems
field service and technical support after hours. This number will connect
you to an answering service. They will forward your message to the people
who are on call. The number is: 1-888-ONTRAK1
Jim T.
|
| 47.108 | power up o.k. | LUDWIG::SWENSON | | Fri Jul 05 1996 20:41 | 2 |
| powered tool up with no issues.
waiting for di water.
|
| 47.109 | Outside brush station lower brush | FABSIX::R_GEE | | Tue Jul 09 1996 06:05 | 3 |
| The outside lower brush was hesitating. Had to replace all
4 core bearings.
B shift
|
| 47.110 | OB station exit belt rollers | FABSIX::R_GEE | | Sun Jul 21 1996 08:13 | 6 |
| The wafer wasn't making it to the inside brush station fast
enough.
Had to clean the roller shafts, replace the bearings and a
"c" clip.
B shift
|
| 47.111 | ocp mod's | FABSIX::B_FINN | | Sun Jul 28 1996 20:39 | 6 |
|
Tied Scrubber A2 into OCP circuit for Scrubber A1. Both these
systems are running off one OCP. Tested aok. Ran wires from
OCP # 2 to Cmp-Scrub.A3 and labeled for OnTrak rep.
A shift
|
| 47.112 | Do not use the rubber boots on the carriers | SUBPAC::TOOKER | | Fri Aug 16 1996 15:59 | 12 |
| Yesterday during Strasbaugh's visit, we learned that they no longer
recommend using the rubber boots on the carriers. Their data now
shows that the boot is interfering with the free movement of the
gyro bearings and therefore impacting uniformity. The boot was
designed to keep slurry from getting into the gyro bearings. Be-
cause the carriers are disassembled and cleaned every few hundred
wafers, not using the boot should not cause a problem. I have
gone through the cmp and carrier build room and removed all of the
boots.
Thanks,
Jim Tooker
|
| 47.113 | Spin station motor controller replaced | SUBPAC::TOOKER | | Wed Sep 04 1996 14:45 | 12 |
| CMP-SCRUB.A2 went down last night on D shift because the spin station motor
was not working. Leon replaced the motor controller PCB. At the start of
C shift, the motor was working, but needed to be calibrated. The motor
controller PCB comes with a manual from the OEM supplier that has a calibration
procedure. Please do not attempt to use this procedure. The correct
procedure can be found in the OnTrak service manual. We performed the
calibration as per the manual and the system is now operating correctly.
Also, as a separate item, we made a slight adjustment to the spin lock
solenoid.
Jim T./Jim S./John P.
|
| 47.114 | Adjusted spin station wafer sensor | SUBPAC::TOOKER | | Wed Sep 04 1996 16:41 | 4 |
| Adjusted spin station wafer sensor amplifier and processed 25 wafers
to verify.
Jim T.
|
| 47.115 | SPin Station Motor COntroller | ASDG::POIRIER | | Wed Sep 04 1996 20:46 | 9 |
|
Spin Station Motor Controller:
-----------------------------
We had trouble getting the span pot to yield 1800 rpm. A jumper was
moved on the board and the span pot responded correctly. Both the zero
and span pots were adjusted to bring the spin station rotation into
spec.
C Shift.
|
| 47.116 | robot fingers not closed. | FABSIX::L_SHKOLNIKOV | | Thu Sep 05 1996 08:31 | 14 |
|
The system robot functions were messed up this morning. The
fingers were not closing to their proper position, causing the system
to "timeout" Robot fingers not closed. Found the several problems with the
system. Problem one was the flags for the open + closed potitions were
not being made.
After this was little adjastment and, we attempted to run some wafers.
We found the gripper arms to be overtraveling,causing the grippers to flex
back. The closed position was readjasted. Transfered 75 wafers - robot
works great but occasionally, error lost wafer at spin comes up.
So here we are now.
D shift
|
| 47.117 | High Particles | ASDG::POIRIER | | Thu Sep 05 1996 20:25 | 9 |
|
Particle Problems:
-----------------
The system failed MQC's at 6:00 p.m. for high particles. (500+)
Three cassettes of wafers have been run thru the tool in an attempt
to purge it clean. D Shift, run MQC's when you get in.
C Shift.
|
| 47.118 | Receive station door lock | FABSIX::R_GEE | | Tue Sep 10 1996 08:38 | 6 |
| The system was alarming for receive station door lock
failure. Found the door lock wasn't retracting back into
the air cylinder fast enough. Cleaned out the air cylinder
venting port and adjusted the door lock assembly, all set.
B shift
|
| 47.119 | O.B. Tach problem | FABSIX::R_POIRIER | | Sun Sep 22 1996 07:40 | 6 |
| System was alarming for Outside brush station out of spec.
We found a a loose wire going to the Tach. Re-soldered the
wire back and problem went away.
B Shift
|
| 47.120 | Robot finger issue | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Sep 27 1996 22:13 | 10 |
|
Came in with tool down because the robot fingers were
failing to close properly...
Powered down tool with no success. We ended up bringing
in the finger motor count by 10. Tool ran 25 wafer verify
with no problems.
BJ
|
| 47.121 | OnTrak upgrade work continues | SUBPAC::TOOKER | | Thu Oct 03 1996 17:06 | 6 |
| OnTrak field service continued work on the pressure interlock upgrades.
New software was installed and all electronics were installed. He
is lacking some plumbing fittings that should be here tomorrow. When
OnTrak leaves for the day, the tool will be available for Operations.
Jim
|
| 47.122 | UPGRADES | STRATA::WESTPHAL | | Thu Oct 03 1996 20:28 | 5 |
| SCRUB.2 - Ontrack Rep was in to do the same upgrades that were done yesterday
on SCRUB.1. Rep installed sensors to monitor various pressures and
check for a heat lamp burn out condition. He will return tomorrow to
install the software on both tools.
|
| 47.123 | Update on pressure interlock upgrades | SUBPAC::TOOKER | | Fri Oct 04 1996 17:04 | 15 |
| Today OnTrak field service continued work on the pressure interlock upgrades.
They have now completed all necessary work on cmp-scrub.a1/.a2/.a3 except
for the following open items:
1) CMP-SCRUB.A1: Needs new software installed to enable the new pressure
& interlocks. The new software will arrive on Monday and
CMP-SCRUB.A2 OnTrak will be back on Tuesday to install.
2) CMP-SCRUB.A3: Needs final connection of the NH4OH pressure interlock
to the incoming NH4OH supply line. We will do this
ourselves because all three scrubbers will need to go
down for 45 minutes to perform this task.
Jim
|
| 47.124 | software / alarms tied in | SUBPAC::LANDRY | | Tue Oct 08 1996 20:36 | 9 |
|
New software was installed today. The new software has allowed
for the DI Water and Ammonia to be tied into the alarm package.
Both fluids were tested to assure that the alarms worked when
a lack of fluid pressure would occur. The software also ties
in the Heat lamp. If the lamp fails to illuminate, the alarm
sounds. This featiures was tested as well.
A shift
|
| 47.125 | IGNORE THIS ALARM | LUDWIG::WESTPHAL | | Thu Oct 10 1996 20:35 | 5 |
| SCRUB.A2 - Both scrubbers have been alarming been alarming intermittently for a
"leak detected in machine floor". The rep believes the problem is
being caused by a floating ground. This does not effect the proper
operation of the tool. If the error is received just clear and
continue running. ONTRAK is working on a fix.
|
| 47.126 | OCP alarm | FABSIX::B_FINN | | Tue Oct 15 1996 15:42 | 6 |
|
OCP alarm for NH4 no flow. Flow was good, tried to reset OCP,
but could not, had to emo and reboot OCP controller
A shift
|
| 47.127 | pulley slipping | FABSIX::B_FINN | | Sun Nov 10 1996 19:25 | 11 |
|
Scrub.A2's outer station transport belts failed to come on.
Inspection showed the motor and primary belts turning but secondary
pulley slipping. All set screws on the pulley/shaft were tight.
Removed pulley and found its inner bushing slipping within the pulley.
Non in stock. We used a center punch to drive the bushing out.
Applied "locktight" and reinstalled bushing to pulley, then reinstalled
pulley on shaft. Tested aok
A SHIFT and Jim Sadin
|
| 47.128 | Low Ammonia alarm problem solved | SUBPAC::LANDRY | | Mon Nov 18 1996 19:19 | 7 |
| After a couple of days of intermittent "low ammonia" alarms, Ashland
was able to find the fault. They traced the problem to a stuck valve
within their control panel down stairs. The problem was fixed before
10:00 AM, with no alarms happening the rest of the shift. Hopefully,
it stays that way.
A shift
|
| 47.129 | Glass Bearings Replaced On the Outside Brush Station. | ASDG::POIRIER | | Thu Nov 21 1996 19:32 | 10 |
|
Outside (Top) Brush Rotation Problems:
-------------------------------------
The system errored for "brush rotation rpm" on the outside brush
station today. All four glass bearings were replaced on the top brush
and the problem ceased.
C Shift.
|
| 47.130 | Brush motor replaced | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Nov 23 1996 05:18 | 9 |
|
Tool kept alarming for outside top motor speed
out of spec. Tweaked the speed to match the output
and matched with tach. It ran fine for several hours
then it dragged low again. This time, the motor was
replaced and checked out ok...
D shift
|
| 47.131 | cassettes broken | FABSIX::M_RIDLON | Eliminate the oblivious | Wed Dec 04 1996 03:59 | 8 |
| Timed out for robot not leaving spin station. Found the cassette switch
not being made because the cassette had a broken tab. Threw it away and
replaced with a whole cassette. Happened again later in the night and
again it was the cassette which again it had a broken tab. Instructed
the operator on how to check for this.
B-shift
|
| 47.132 | IB & OB HANDLING PROBLEMS | FABSIX::B_WESTPHAL | | Wed Dec 11 1996 19:24 | 8 |
|
SCRUB.2 - Down for upper brush on the IB station not going down and other
general handling problems. The J.P & J.S. team corrected the Brush
not going down problem by adjusting the brush's lift cylinder. The
rollers for both the IB & OB stations were changed out and adjusted.
A Transfer belt in the IB station was also found to be defective and
was replaced.
|
| 47.133 | TOP ROLLER ARM REPLACED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Dec 12 1996 06:13 | 7 |
|
Replaced the front top roller arm in the inside brush station.
It was observed to having a hair-line crack during the Quarterly
PM.
D shift
|
| 47.134 | Recieve Station Lifter Failed To Rise to the top Position | ASDG::POIRIER | | Sat Jan 18 1997 19:34 | 27 |
|
Recieve Station Lifter:
______________________
The Lifter in the Recieve Station failed to rise to the top position
today. This caused the Robot to drop a wafer into the base of the tool.
The tool was powered down and rebooted. The lifter then worked
normally. This condition has occured a few times over the last month
on C shift. If it happens again, we might want to replace the pia board
for the Recieve Station. Ontrak talked about this type of intermittent
symtom in class. The usual cause is a chip on the pia board. We kept
the tool up due to the high usage in the area today.
FYI: Except for the time lost due to the breakage on A2 this morning, all
five polishers cranked for the entire shift. The only issue
affecting thruput was the Operators waiting at the UV1050's
and at the Ontrak Scrubbers.
If we put B4 on line and have a day like we did today, the
effect of adding this tool will be less than optimal.
(Another Scrubber & UV1050?)
(Are they comming soon?)
C Shift.
|
| 47.135 | bad load station roller bearing | FABSIX::J_SADIN | Freedom isn't free. | Sun Jan 19 1997 18:27 | 11 |
|
Load Station Transport roller bearing and o-ring:
------------------------------------------------
Rear load station rollers were found not to be spinning. Replaced
left roller bearing (it was rusted/frozen) and large o-ring to rear
load-station rollers (old o-ring was badly stretched).
|
| 47.136 | dropped wafer in unload station again | FABSIX::J_SADIN | Freedom isn't free. | Tue Jan 21 1997 18:02 | 18 |
|
Receive station lifter (again):
The lifter (blade) in the receive station didn't come to its top
position and dropped a wafer that was in the process of unloading.
Rescued wafer from the bottom of the tool (didn't break). Reset unload
station ok (blade came back to top position), but then machine robot
wouldn't unload wafer from spin station. Had to power down the tool and
restart to get the wafers unloaded. All seemed ok after that.
As John mentioned in .134, this has happened before, possibly due
to a faulty chip in the pia board. We'll check and see if there is one
in stock. Tool is back to production for now (lotsa work in the area).
A-shift
|
| 47.137 | status of software upgrade | SUBPAC::TOOKER | | Wed Jan 22 1997 15:41 | 8 |
| OnTrak field service came in today to install a new revision of
software. This new revision will add a small time delay before
alarming for low DI Water or NH4OH pressure. This will help to
eliminate alarms due to pressure fluctuations from valves actuating.
However after doing the installation, OnTrak found a bug in the
software. He removed the new rev. and re-installed the old rev.
Jim T.
|
| 47.138 | Software Upgrade - Unsucessful | ASDG::POIRIER | | Wed Jan 22 1997 19:33 | 11 |
|
Software Upgrade Unsucessful:
----------------------------
The OnTrak rep arrived with the new version of software. This version
was installed to prevent the eronious Ammonium Hydroxide and D.I.
Water "Low Pressure" Alarms. The system would not detect any pressure
after this latest version was installed. The Ontrak software Dept is
going to make another attempt at getting this problem solved.
C Shift.
|
| 47.139 | robot to blade transfer problem | SUBPAC::LANDRY | | Sun Feb 23 1997 19:38 | 32 |
| Whilst the Sunday morning EE passdown meeting was taking place, the
system's robot to blade transfer messed up, causing the wafer to drop
to the base, and break upon impact. Previous occurances of this have
happened in the past week or two (with A shift seeing it only once
prior). Seeing no one actually witnessed this mis-hand-off (or any of
the other occurrnces to our knowledge), it was being "assumed" that the
blade didn't come up to it's proper height. We on A shift can not
confirm if any other shift actually knows if the blade was low or not.
So, we sat and watched the system run for awhile. The cover over the
blade mechanism was removed. The motor, gears, belt, and sensors were
all running properly. No problems were exhibited. So, we decided to
put the cover back on and close up the electronics cabinet. Once the
electronics door was closed, we rebooted the system and resumed
testing. Please note that we left the few wafers in the unload station
in the cassette before resuming. As it was lifting the wafers up to
detect an occupied slot, it missed picking one up, causing the blade to
rise between two wafers. We immediately halted and removed the
cassette from the unload station. At this moment, we noticed a great
deal of slop in the cassette. The cassette was checked and we found
that a locating tab was sheared off of the cassette. This caused the
cassette to rotate in the unload station (which vibration of the unload
handler movement caused). This caused the blade to cassette slotting
to be off, which in turn caused the wafer to make contact with a slot
guide witin the cassette, hence sending the wafer down to destruction.
After we installed a cassette of the utmost craftsmanship, we could not
duplicate the robot to blade mishap.
After this monumental discovery, we purged several cassettes from the
fab which had this broken / or missing locating tab.
A shift
|
| 47.140 | lifter not high | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Feb 24 1997 03:11 | 19 |
| Tool dropped a product wafer at around 10pm. The wafer didn't break and
was inspected for chips (none). The lifter was observed as not coming up
to the proper height. We checked the cassettes as well and found them
to be in satifactory condition. Pressing the RESET STATION didn't correct
the lifter, however, pressing RESET RECV did. This problem seems to be
extremely intermittent. We decided to swap the intelligent stepper
board that drives the lifter motor (also drives the receive motor) with
the board that drives the send motor (other channel is spare). We then
ran 150 wafers with no alarms or dropped wafers. (The spare channel and
the lifter channel were the same between the boards for those inquiring
minds). The intelligent stepper boards are the 4 boards next to the DC
motor control boards. We swapped the 2nd and 3rd boards (ribbon cables
are clearly marked). We left them swapped as this is too intermittent
to determine if this is the cause. The part number for the board is
28-0075-001.
B-shift
|
| 47.141 | Knife belt/bearings replaced | STRATA::FINN | | Sun Mar 02 1997 19:18 | 11 |
|
Dropped a wafer during unload at receive station knife. Removed old
Knife Belt and inspected. Replaced the belt at EE's directive. Also replaced
two bearings in the belts upper sprocket assembly. Adjusted the new belt's
tension several times to insure it was not skipping teeth and that it's
travel was repeatable.
Ran 25 wafers aok and returned system to manufacturing.
A shift
|
| 47.142 | broken wafer in spin station | FABSIX::J_SADIN | Freedom isn't free. | Wed Mar 12 1997 19:33 | 7 |
|
wafer pulverised in spin station at full rpm. cleaned tool and
running 25 dummy wafers. Leaving for D-shift to verify fix and put tool
up.
a-shift
|
| 47.143 | replaced o-ring on outside brush station | FABSIX::J_SADIN | Freedom isn't free. | Mon Mar 17 1997 19:35 | 8 |
|
replaced o-ring 202-113 that drives the incoming transport rollers
on the outside brush station (rollers were not spinning). running well
now.
a-shift
|
| 47.144 | o-ring replaced | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 23 1997 12:25 | 9 |
|
replaced incoming transport roller o-ring again (on outside
brush station). Rollers were not spinning properly. Appears to be
working properly now.
a-shift
|
| 47.145 | Wafer left at SPIN | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat Mar 29 1997 04:16 | 6 |
|
A wafer was left in the spin nest after the robot
either missed it or never picked it up. Ran a 25 wafer
VERIFY without any other problems.
D shift
|
| 47.146 | wafer roller drive belt | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 30 1997 19:56 | 12 |
|
The drive belt for the front side wafer roller (OB station) fell
off today. Adjusted the pulleys for the belt so that the belt would not
ride up so close to the top of the back pulley (allowing it to slip
off). Has been running fine since.
a-shift
|
| 47.148 | Sensor not seeing these particular wafers | FABSIX::B_WESTPHAL | | Fri Apr 04 1997 20:03 | 12 |
|
CMP-SCRUB.A2 - Down for waiting for wafers in the spin station. Looked on the
I/O screen and seen that the wafers were not being sensed in the spin
station. The wafers were removed from the tool and sent through
SCRUB.A3 while looking at problem on SCRUB.A2. SCRUB.A3 then alarmed
for the same thing. Found out that the lot (PE0028) was an engineering
lot. Seen no reason to adjust the sensor to these particular wafers
so I pushed the last 10 Engineering wafers through on A3 & ran a boat
on A2 with no errors. Gave the tool back to production.
|
| 47.149 | Robot Stopped At Spin Station / Tool Locked Up. | ASDG::POIRIER | | Thu Apr 10 1997 20:32 | 10 |
|
Robot Errored AT Spin Station:
-----------------------------
The robot stopped while attempting to pick up a wafer at the Spin
Station. The system locked up after the robot stopped. The tool
was powered down and rebooted. There have been no reoccurences
of this problem since 10:00 a.m. this morning.
C Shift.
|
| 47.150 | Robot dropping wafers | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat Apr 12 1997 07:02 | 12 |
|
The robot missed/dropped a wafer the spin station. 25
wafers were run and there weren't any problems. Later on,
it did it again. The handling was checked and the only thing
that was found was that the robot was gripping the wafers too
tight. You are suppose to be able to rotate the wafers when the
robot fingers are closed and I couldn't even move it a 1/2".
I backed off on the off-sets and ran more wafers. The problem
hasn't come back but I'm a little unsure if that was the real
fix.
|
| 47.151 | Wafers dropped by robot | FABSIX::R_POIRIER | | Mon Apr 14 1997 08:41 | 23 |
|
Scrubber was dropping wafers in spin station.
This happened three times. The first two times
we were able to recover because fingers knew that
a wafer wasn't present, but the last time the
robot thought it had the wafer. Robot tried
to put wafer into lifter but no wafer was
present. It had fallen into the spin station.
While trying to recover, open fingers flag
didn't trip Open fingers sensor and the cam
continued to turn until flags were 180 degrees
out. The fingers would open when commanded to
close and close when commanded to open. We
re-adjusted the flags to take care of that problem
and then tightened the tension of the fingers
using Teach. (Increased from 130-150)
B Shift
|
| 47.152 | Heat lamp blown | FABSIX::R_POIRIER | | Sun Apr 27 1997 07:54 | 9 |
|
Scrub A2 blew it's heat lamp last nite.
Found a spare in the vidmar and replaced
bad lamp.
B Shift
|
| 47.153 | Leaking shafts | FABSIX::O_WHITFORD | Lead, follow or step aside. | Sun Apr 27 1997 20:02 | 12 |
| During the weekly, it was noted that there was some pretty considerable
leakage from both the outer and inner brush stations. Working under
some time constraints, only the outer station leak was addressed at this
time. Found the front roller shaft was leaking. When it was removed, we
found the upper seal was installed up-side down (spring facing up),
the outer face was missing a chunk and scored. We replaced the shaft
and managed to crack the lower support are while remounting it to the
shaft. Replaced that, lined it up and ran some verification wafers with
no problems, check particles and they were in spec. Will try to
schedule time tomorrow AM to work the inner brush station leak issue.
Dave W.
|
| 47.154 | Completion of shaft replacements | FABSIX::O_WHITFORD | Lead, follow or step aside. | Mon Apr 28 1997 20:24 | 10 |
| Replaced the leaking shaft on the inner brush station today. Follow up
visit revealed that the leak(s) have been slowed, but there is still a
persistant leaker somewhere at the rear of the tool in the vicinity of
the inner brush station. Re checked all water line connection, all
tight and no evidence of leakage from one of these. No evidence of more
leaking shafts. ?? THAT much accumilation from between the out and
ineer brush station? Possible but doesn't seem there would be THAT much
in only a couple hours of operation.....
Dave W
|
| 47.155 | TOOL LOCKED UP | LUDWIG::STANDING | | Thu May 01 1997 20:16 | 4 |
| SCRUB.A2 Went down for lockup, with wafers stuck in the robot arm and
both scrub stations. EMOd tool and recovered wafers. I think that
the unload cassette came off the cassette switch. Returned tool to
manufacturing.
|
| 47.156 | Lifter bearings | FABSIX::O_WHITFORD | Lead, follow or step aside. | Sun May 11 1997 11:39 | 10 |
| Picked up from B shift.
Looked over lifter mechanism and found top sprocket shaft tilted
at a crazy angle. Lowered lifter all the way down and removed support
housing for the top sprocket shaft. Left end bearing was falling apart.
Replaced bearings and ran verification wafers with no problems.
A shift
|
| 47.157 | Current brush heights as of 5/13/97 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Tue May 13 1997 22:47 | 8 |
|
The below brush height readings are the current
ones on the tool and have been verified. Please make
note of them in the next weekly PM.
Front Rear
Inside .395 .385
Outside .375 .332
|
| 47.158 | WW46 Weekly PM completed | FABSIX::R_POIRIER | | Sat May 17 1997 22:45 | 39 |
|
--------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 05/12/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME:bd=Bruce Durgin
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: bd
6.1.4 Check all tubing/fittings for leaks Completed: bd
6.1.5 Check all wafer transport belts Completed: bd
6.1.6 Clean the Send module and Scrub modules Completed: bd
6.1.7 Check scrub brushes for contamination Completed: bd
6.1.8 Check scrub brush height in both modules Completed: bd
Brush heights
OUTER
Front .375
Rear .335
INNER
Front .405
Rear .422
|
| 47.159 | Wafer lost in the receive? | FABSIX::B_WESTPHAL | Bradley BP#661 EXT# 6610 | Thu May 29 1997 20:43 | 4 |
| CMP-SCRUB.A2 - Down for losing a wafer in the receive station. No definite fix
was found. 2 boats of wafers were run without repeating the problem
returned the tool to operations.
|