| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 8.5 | MONTHLY P.M. | PATE::GEE | | Tue Nov 07 1995 00:58 | 91 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 11-07-95 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: A & B SHIFT
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___X___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___X___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___x___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:__.0025______
___x___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___.001____
Left Spindlele Runout:___.002____
___x___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:__.002____
Left Spindle Hub Runout:___.001_____
___x___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: -0.47
Right Spindle Force Error: -0.33
Left Spindle Calibration Variable:
Pre-adjust: .94 Post-adjust: .74
Right Spindle Calibration Variable:
Pre-adjust: .97 Post-adjust: .84
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___24.01____ Post-adjust:___N/A______
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 15.01/-15.01 Post-adjust:____N/A______
___X___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:__5.00______ Post-adjust:___N/A______
__N/A__ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___N/A______ Post-adjust:___N/A______
___x___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS: CHANGED THE SLURRY FILTER
__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.1 | Weekly PM Checksheet Template | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 08 1995 21:07 | 78 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:__________ SYSTEM RTC CODE:__________ EQUIP. TECH.:_______________
INITIAL
_______ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:________
Post-adjust:________
_______ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:________
Post-adjust:________
_______ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:________
_______ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_______ 6.1.5 Check all tubing and fittings for leaks.
_______ 6.1.6 Check all tubing and fittings for air leaks.
_______ 6.1.7 Check all indicator lights.
_______ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_______ 6.1.9 Wipe down polish table, tub, and splash ring.
_______ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_______ 6.1.11 Wipe down pad conditioning arm.
_______ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_______ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_______ 6.1.14 Wipe down outer surface of both spindle hubs.
_______ 6.1.15 Remove and clean O-rings, replace if necessary.
_______ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
_______ 6.1.17 Wipe down all surfaces of the robot.
_______ 6.1.18 Clean end effector vacuum chuck air port.
_______ 6.1.19 Inspect and clean end effector air nozzle.
_______ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_______ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_______ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_______ 6.1.23 Check Neslab TCU for leaks.
_______ 6.1.24 Check Neslab TCU temperature readout.
_______ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_______ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_______ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.2 | Monthly PM Checksheet Template | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 08 1995 21:07 | 90 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE:__________ SYSTEM RTC CODE:__________ EQUIP. TECH.:_________________
INITIAL
_______ 6.2.1 Perform weekly PM checks in addition to this monthly list.
_______ 6.2.2 Replace the fluid lines on the peristaltic pumps.
_______ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_______ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:____________
_______ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:____________
Left Spindlele Runout:____________
_______ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:____________
Left Spindle Hub Runout:____________
_______ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:____________
Right Spindle Force Error:____________
Left Spindle Calibration Variable:
Pre-adjust:____________ Post-adjust:____________
Right Spindle Calibration Variable:
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_______ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
_______ 6.2.10 Check shuttle travel. Adjust if necessary.
_______ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
_______ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
_______ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
_______ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.3 | Semi-annual PM Checksheet Template | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 08 1995 21:07 | 30 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Semmi-annual Preventive Maintenance Check Sheet, REV. C
INITIAL
_______ 6.3.1 Perform Weekly and Monthly PM's in addition to this Semi-Annual
list.
_______ 6.3.2 Check all safety interlocked doors for proper operation.
_______ 6.3.2 Check all EMO's for proper operation.
_______ 6.3.3 Change oil in the brush rotation gear box using AGMA #8 or
equivalent oil.
_______ 6.3.4 Change oil in the left and right spindle gear boxes using AGMA
#8 or equivalent oil.
_______ 6.3.5 Change oil in the polish table gear box using AGMA #8 or
equivalent oil.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.4 | Annual PM Checksheet Template | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 08 1995 21:08 | 27 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Annual Preventive Maintenance Check Sheet, REV. C
INITIAL
_______ 6.4.1 Perform Weekly, Monthly, and Semi-Annual PM's in addition to
this Annual list
_______ 6.4.2 Perform Bridge Position calibration.
_______ 6.4.3 Check Robot Position Alignment. Calibrate if necessary.
_______ 6.4.4 Check Robot Travel position. Adjust if necessary.
_______ 6.4.5 Check Robot Arm position. Adjust if necessary.
_______ 6.4.6 Check Elevator Height position. Adjust if necessary.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.6 | Weekly PM for 11/22 completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 22 1995 06:12 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11/22/95 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH.: BJ
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 psi
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks. - SEE COMMENTS
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Solenoid #31 in the valve cabinet is leaking and was ordered.
It is due in today and will be replaced time permitting.
|
| 8.7 | WEEKLY PM COMPLETED FOR WW22 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 21:54 | 74 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11/29/95 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Leon and BJ
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42 psi
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Checked both hubs due to bad uniformity. Found the left
hub out .08 mils and the right was at .0025. I brought
them both in within .0005 mils.
________________________________________________________________________
|
| 8.8 | Semi-annual check sheets (inc. weekly + monthly) | FABSIX::B_FINN | | Wed Dec 06 1995 13:04 | 211 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 12/06/95 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: MR/BF
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100____
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__86____
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___40___
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
-< Monthly PM Checksheet Template >-
-------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE:12/6/95 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.:BF/MR/TL
INITIAL
____X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
____X___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
____X___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
____X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___0.001"________
___X____ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:____0.001"________
Left Spindlele Runout:___0.001"_________
____X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:_____0.0005"_______
Left Spindle Hub Runout:______0.00075______
____X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:_____-0.79_______
Right Spindle Force Error:____-0.29________
Left Spindle Calibration Variable:
Pre-adjust:___0.98______ Post-adjust:____1.03________
Right Spindle Calibration Variable:
Pre-adjust:___0.99_________ Post-adjust:__1.04__________
___X____ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X____ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X____ 6.2.10 Check shuttle travel. Adjust if necessary.
___X____ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:__24.03_______ Post-adjust:___24.00_________
___X____ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___15.02_________ Post-adjust:___15.00_______
___X____ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:___5.00_________ Post-adjust:___5.00_________
__N/A___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
___X____ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X____ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X____ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X____ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Semmi-annual Preventive Maintenance Check Sheet, REV. C
DATE:12/6/95 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.:BF/MR/TL
INITIAL
___X____ 6.3.1 Perform Weekly and Monthly PM's in addition to this Semi-Annual
list.
___X___ 6.3.2 Check all safety interlocked doors for proper operation.
___X___ 6.3.2 Check all EMO's for proper operation.
___x___ 6.3.3 Change oil in the brush rotation gear box using AGMA #8 or
equivalent oil.
___X___ 6.3.4 Change oil in the left and right spindle gear boxes using AGMA
#8 or equivalent oil.
___X___ 6.3.5 Change oil in the polish table gear box using AGMA #8 or
equivalent oil.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.9 | weekly pm completed | FABSIX::B_FINN | | Sun Dec 10 1995 15:18 | 75 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:12/10/95 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: Finn
INITIAL
__X_____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:________ 100
Post-adjust:________
___X____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:________88
Post-adjust:________85
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:_40______
___x____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
___x___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
slurry pump 1+2 needed calibration changes
|
| 8.10 | weekly completed | FABSIX::B_FINN | | Tue Dec 19 1995 17:58 | 76 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:12/19/95 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: Finn/Landry
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:________ 100
Post-adjust:________100
___X____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:________88
Post-adjust:________85
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:_41______
___x____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
___x___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
Slurry pump 1 needed calibration changes
Added water to Neslab
Cleaned light coat of oil from drip pan from bridge lube. Saw no leaks.
|
| 8.11 | No PM necessary for WW26 FY96 | SUBPAC::TOOKER | | Thu Dec 21 1995 15:07 | 6 |
| Due to the scheduled FAB6 shutdown during Work Week 26 Fiscal Year 1996, no PM will be performed
on CMP.A2.
Jim Tooker
CMP Equipment Engineer
|
| 8.12 | WW27 WEEKLY PM COMPLETE | FABSIX::B_WESTPHAL | | Sat Jan 06 1996 16:51 | 78 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:06 JAN 96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.:POIRIER/WESTPHAL
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:_100____
Post-adjust:N/A_____
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:_86_____
Post-adjust:_N/A____
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:_UNREADABLE
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENT: ___
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.13 | MONTHLY PM FOR CMP.A2 COMPLETED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 10 1996 06:15 | 90 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 1/10/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: D shift
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___X___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___X___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: .0015
___X___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: .002
Left Spindle Runout: .001
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: .0015
Left Spindle Hub Runout: .001
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: 1.28
Right Spindle Force Error: .15
Left Spindle Calibration Variable:
Post-adjust: 169.52
Right Spindle Calibration Variable:
Post-adjust: 167.31
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.02 Post-adjust:____________
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: -15.02/15.02 Post-adjust:____________
___X___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5 Post-adjust:____________
__N/A__ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
___X___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.14 | weekly completed | FABSIX::B_FINN | | Fri Jan 19 1996 18:26 | 75 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
Week Ending 1-20-96 WW29
DATE: 1-19-96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: Brad/Brendan
INITIAL
__X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__X___ 6.1.2 N2 pressure @ 87 PSI: Pre-adjust: 88 psi
Post-adjust:_N/A____
__X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 psi
__X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X___ 6.1.5 Check all tubing and fittings for leaks.
__X___ 6.1.6 Check all tubing and fittings for air leaks.
__X___ 6.1.7 Check all indicator lights.
__X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X___ 6.1.9 Wipe down polish table, tub, and splash ring.
__x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__x___ 6.1.11 Wipe down pad conditioning arm.
__x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__x___ 6.1.14 Wipe down outer surface of both spindle hubs.
__x___ 6.1.15 Remove and clean O-rings, replace if necessary.
__x___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__x___ 6.1.17 Wipe down all surfaces of the robot.
__x___ 6.1.18 Clean end effector vacuum chuck air port.
__X___ 6.1.19 Inspect and clean end effector air nozzle.
__x__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__x___ 6.1.23 Check Neslab TCU for leaks.
__x___ 6.1.24 Check Neslab TCU temperature readout.
__x___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__x___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__x___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Slurry pump 1 + 2 was adjusted, was on the low side.
Added water to chiller.
|
| 8.15 | Weekly completed....two air motors installed | SUBPAC::LANDRY | | Tue Jan 23 1996 16:00 | 80 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 1-23-96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: Landry/Finn
INITIAL
_TL/BF_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
_TL/BF_ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 87 psi
Post-adjust:_N/A____
_TL/BF_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42 psi
_TL/BF_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_TL/BF_ 6.1.5 Check all tubing and fittings for leaks.
_TL/BF_ 6.1.6 Check all tubing and fittings for air leaks.
_TL/BF_ 6.1.7 Check all indicator lights.
_TL/BF_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_TL/BF_ 6.1.9 Wipe down polish table, tub, and splash ring.
_TL/BF_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_TL/BF_ 6.1.11 Wipe down pad conditioning arm.
_TL/BF_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_TL/BF_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_TL/BF_ 6.1.14 Wipe down outer surface of both spindle hubs.
_TL/BF_ 6.1.15 Remove and clean O-rings, replace if necessary.
_TL/BF_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_TL/BF_ 6.1.17 Wipe down all surfaces of the robot.
_TL/BF_ 6.1.18 Clean end effector vacuum chuck air port.
_TL/BF_ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_TL/BF_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_TL/BF_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_TL/BF_ 6.1.23 Check Neslab TCU for leaks.
_TL/BF_ 6.1.24 Check Neslab TCU temperature readout.
_TL/BF_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_TL/BF_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_TL/BF_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
* Changed air motors on both scrub/clean stations per Jim Tookers request.
* Ran MQC's after installation of the scrubber air motors.
* Conditioning disk was NOT changed out at this time. Cleaned and re-
installed original disk
|
| 8.16 | WW 31 Weekly PM | FABSIX::R_POIRIER | | Tue Jan 30 1996 05:53 | 79 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
WW31
DATE:_1/30/96_ SYSTEM RTC CODE:_CMP.A2_ EQUIP. TECH.:_B SHIFT_
INITIAL
_RP____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:_100 psi_
Post-adjust:__N/A__
_RP____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:_88 psi_
Post-adjust:_N/A_
_RP____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__42 psi_
_RP____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_RP____ 6.1.5 Check all tubing and fittings for leaks.
_RP____ 6.1.6 Check all tubing and fittings for air leaks.
_RP____ 6.1.7 Check all indicator lights.
_RP____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_RP____ 6.1.9 Wipe down polish table, tub, and splash ring.
_RP____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_RP____ 6.1.11 Wipe down pad conditioning arm.
_RP____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_RP____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_RP____ 6.1.14 Wipe down outer surface of both spindle hubs.
_RP____ 6.1.15 Remove and clean O-rings, replace if necessary.
_RP____ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
_RP____ 6.1.17 Wipe down all surfaces of the robot.
_RP____ 6.1.18 Clean end effector vacuum chuck air port.
_RP____ 6.1.19 Inspect and clean end effector air nozzle.
_N/A___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_RP____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_RP____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_RP____ 6.1.23 Check Neslab TCU for leaks.
_RP____ 6.1.24 Check Neslab TCU temperature readout.
_RP____ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_RP____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_RP____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:_Did Pad change during weekly PM. _______________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.17 | Waiver for WW32 Monthly PM | SUBPAC::TOOKER | | Fri Feb 09 1996 17:12 | 7 |
| Due to robot and software upgrade causing excessive down time this week, the
monthly PM scheduled to take place this week will not be performed. Instead,
a weekly PM has been performed and the monthly PM will be re-scheduled for next
week.
Thanks,
Jim Tooker
|
| 8.18 | MONTHLY PM COMPLETED FOR WW33 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Feb 17 1996 07:07 | 90 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 2/17/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: D SHIFT
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___X___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___X___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: .002
___X___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: .0025
Left Spindle Runout: .003
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: .001
Left Spindle Hub Runout: .0005
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: 1.36
Right Spindle Force Error: .68
Left Spindle Calibration Variable (Dead weight):
Pre-adjust: 163.03 Post-adjust: 166.75
Right Spindle Calibration Variable (Dead weight):
Pre-adjust: 167.31 Post-adjust:____________
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24 Post-adjust:____________
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 15.02/-15.01 Post-adjust:____________
___X___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 4.99 Post-adjust:____________
___X___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust: 12.01 Post-adjust:____________
___X___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.19 | WW34 Weekly PM | FABSIX::R_POIRIER | | Mon Feb 19 1996 05:56 | 72 |
| -< weekly ww34 >-
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 2/19/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: B-shift
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 88 psi
Post-adjust:________
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42 psi
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_______ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 8.20 | ww 35 pm weekly pm completed | FABSIX::B_FINN | | Wed Feb 28 1996 18:50 | 76 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 2/28/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: A-shift
___X__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___X__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 88 psi
Post-adjust:________
___X__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42 psi
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X__ 6.1.9 Wipe down polish table, tub, and splash ring.
___X__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X__ 6.1.11 Wipe down pad conditioning arm.
___X__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___x___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Slurry Pump #1 cal variable changed from .84 to .9
Slurry Pump #2 cal variable changed from .75 to .79
Added @ a gallon of water to TCU resevoir
System no longer utilizes a point of use slurry filter
Light coat of bridge oil found on drip pan
|
| 8.21 | MONTHLY PM COMPLETED FOR WW36 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Mar 07 1996 23:26 | 90 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 3/7-8/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: C+D SHIFT
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___X___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___X___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: .002
___X___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: .002
Left Spindle Runout: .002
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: .0005
Left Spindle Hub Runout: .002
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: < 2 - IN PC A2L-307.XLS
Right Spindle Force Error: < 2 - IN PC A2R-307.XLS
Left Spindle Calibration Variable (Dead weight):
Pre-adjust: IN PC Post-adjust:
Right Spindle Calibration Variable (Dead weight):
Pre-adjust: IN PC Post-adjust:____________
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24 Post-adjust:____________
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 15.02/-15.01 Post-adjust:____________
___X___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 4.99 Post-adjust:____________
___X___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust: 12.01 Post-adjust:____________
___X___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.22 | weekly p.m. completed | FABSIX::R_GEE | | Sun Mar 10 1996 23:17 | 72 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 03/10/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: B shift
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:______
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
replaced the carriers and pad.
|
| 8.23 | Weekly PM completed for WW38 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Mar 20 1996 06:30 | 74 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 03/20/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: BJ
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:______
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__N/A__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Replaced all slurry pump compression fittings on the input
and output on the slurry pumps.
|
| 8.24 | WW39 Weekly PM | FABSIX::R_POIRIER | | Sun Mar 24 1996 06:36 | 75 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 03/24/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: B Shift
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 84 psi
Post-adjust:______
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__N/A__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 8.25 | 3/31/96 weekly completed | STRATA::FINN | | Sun Mar 31 1996 18:35 | 74 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 03/31/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: A Shift
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 84 psi
Post-adjust:______
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 50
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
Added water to Chiller
Calibrated both slurry pumps
|
| 8.26 | WW41 Monthly PM | FABSIX::R_POIRIER | | Wed Apr 10 1996 01:37 | 156 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly/Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 04/10/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: B Shift
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 84 psi
Post-adjust:______
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 45
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
Found small amount of oil in drip pan.
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 04/10/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: B Shift
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___X___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___X___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: .002
___X___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: .001
Left Spindle Runout: .001
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: .001
Left Spindle Hub Runout: .001
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: < 2 - IN PC A1_L4196.XLS
Right Spindle Force Error: < 2 - IN PC A1_R4196.XLS
Left Spindle Calibration Variable (Dead weight):
Pre-adjust: IN PC Post-adjust:
Right Spindle Calibration Variable (Dead weight):
Pre-adjust: IN PC Post-adjust:____________
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24 Post-adjust:____________
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 15.02/-15.01 Post-adjust:____________
___X___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.01 Post-adjust:____________
___X___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust: 12.01 Post-adjust:____________
___X___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
|
| 8.27 | 4/14/96 weekly pm completed | FABSIX::B_FINN | | Sun Apr 14 1996 19:19 | 77 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 4/14/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: Landry/Finn
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: N/A
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 82 PSI
Post-adjust: N/A
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 45 PSI
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
_N/a___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__X____ 6.1.23 Check Neslab TCU for leaks.
__X____ 6.1.24 Check Neslab TCU temperature readout.
__X____ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS
Repair leak on pump 2 hose (replaced both Pump 1 and 2 hose)
Slurry pump 1+2 required cal after hose replacement
Small amount of bridge oil in drip tray
|
| 8.28 | ww43 weekly pm completed | FABSIX::B_FINN | | Mon Apr 22 1996 18:28 | 72 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 4/22/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: LANDRY/FINN
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__85______
Post-adjust:________
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__45______
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/a__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Required calibration to slurry pump 1
Light oil in tray from bridge oilier
Added a quart of water to chiller
|
| 8.29 | WW 44 completed.....Weekly version | SUBPAC::LANDRY | | Tue Apr 30 1996 09:38 | 74 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 4-30-96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: "A" shift
INITIAL
_TL/BF_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
_TL/BF_ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 84 psi
Post-adjust:_N/A____
_TL/BF_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42 psi
_TL/BF_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_TL/BF_ 6.1.5 Check all tubing and fittings for leaks.
_TL/BF_ 6.1.6 Check all tubing and fittings for air leaks.
_TL/BF_ 6.1.7 Check all indicator lights.
_TL/BF_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_TL/BF_ 6.1.9 Wipe down polish table, tub, and splash ring.
_TL/BF_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_TL/BF_ 6.1.11 Wipe down pad conditioning arm.
_TL/BF_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_TL/BF_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_TL/BF_ 6.1.14 Wipe down outer surface of both spindle hubs.
_TL/BF_ 6.1.15 Remove and clean O-rings, replace if necessary.
_TL/BF_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_TL/BF_ 6.1.17 Wipe down all surfaces of the robot.
_TL/BF_ 6.1.18 Clean end effector vacuum chuck air port.
_TL/BF_ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_TL/BF_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_TL/BF_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_TL/BF_ 6.1.23 Check Neslab TCU for leaks.
_TL/BF_ 6.1.24 Check Neslab TCU temperature readout.
_TL/BF_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_TL/BF_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_TL/BF_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Both slurry pumps required a minor variable value change. Both
were found to be slightly on the low side.
Added approximately 1/2 gallon on DI water to the TCU resevoir.
|
| 8.30 | MONTHLY PM FOR WW45 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu May 09 1996 22:22 | 159 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 05/09/96 SYSTEM RTC CODE:CMP.A2 SHIFT: C, D and Jim T.
INITIAL
JPS/JT/JP 6.2.1 Perform weekly PM checks in addition to this monthly list.
JPS/BW 6.2.2 Replace the fluid lines on the peristaltic pumps.
JPS/JP 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__X____ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002_____
__X____ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___.001_____
Left Spindlele Runout:__.001______
__X____ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:__.0005_____
Left Spindle Hub Runout:____.0015___
JPS/JT 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: .11
Right Spindle Force Error: .31
Left Spindle Calibration Variable:
Pre-adjust: 1.07 Post-adjust: 1.07
Right Spindle Calibration Variable:
Pre-adjust: 1.08 Post-adjust: 1.07
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
JPS 6.2.10 Check shuttle travel. Adjust if necessary.
JPS 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 23.99 VDC Post-adjust: 23.99
JPS 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 15.02 VDC Post-adjust: 15.02
JPS 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 4.95 VDC Post-adjust: 4.95
___X___ 6.2.17 Check the 12 VAC power supply. Calibrate if necessary.
Pre-adjust:____12.0 ___ Post-adjust:____n/a_____
JP 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
JPS 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
JPS 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
JPS 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS: RIGHT SEND TANK HAS SMALL LEAK,
LEFT RECIEVE FILL REGULATOR HAS SMALL LEAK AT VALVE STEM.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 05/09/96 SYSTEM RTC CODE: CMP.A2 SHIFT: C
INITIAL
JPS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JPS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JPS 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 41 PSI
JPS 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
JPS 6.1.5 Check all tubing and fittings for leaks.
JPS 6.1.6 Check all tubing and fittings for air leaks.
JP 6.1.7 Check all indicator lights.
JPS 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
JPS 6.1.9 Wipe down polish table, tub, and splash ring.
JPS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JPS 6.1.11 Wipe down pad conditioning arm.
JT 6.1.12 Remove, rinse, and replace diamond conditioning disk.
JPS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
JPS 6.1.14 Wipe down outer surface of both spindle hubs.
JPS 6.1.15 Remove and clean O-rings, replace if necessary.
JPS 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
JPS 6.1.17 Wipe down all surfaces of the robot.
JPS 6.1.18 Clean end effector vacuum chuck air port.
JPS 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
JPS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
JPS/JP 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
JPS 6.1.23 Check Neslab TCU for leaks.
JPS 6.1.24 Check Neslab TCU temperature readout.
JPS/JP 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
JPS/JP 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
JPS 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:FOUND 208 IND. LAMP TO BE BLOWN NEEDS REPLACING.
RECALIBRATED PUMP'S 1 AND 2. PUMP 1 .77 CHANGED TO .8 AND PUMP 2 CHANGED
FROM .75 TO .80.
|
| 8.31 | WW 46 weekly pm completed | STRATA::FINN | | Sun May 12 1996 18:10 | 74 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 5/12/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: A SHIFT
INITIAL
BF/TL 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
BF/TL 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 84 psi
Post-adjust:_N/A____
BF/TL 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42 psi
BF/TL 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
BF/TL 6.1.5 Check all tubing and fittings for leaks.
BF/TL 6.1.6 Check all tubing and fittings for air leaks.
BF/TL 6.1.7 Check all indicator lights.
BF/TL 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
BF/TL 6.1.9 Wipe down polish table, tub, and splash ring.
BF/TL 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
BF/TL 6.1.11 Wipe down pad conditioning arm.
BF/TL 6.1.12 Remove, rinse, and replace diamond conditioning disk.
BF/TL 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
BF/TL 6.1.14 Wipe down outer surface of both spindle hubs.
BF/TL 6.1.15 Remove and clean O-rings, replace if necessary.
BF/TL 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
BF/TL 6.1.17 Wipe down all surfaces of the robot.
BF/TL 6.1.18 Clean end effector vacuum chuck air port.
BF/TL 6.1.19 Inspect and clean end effector air nozzle.
BF/TL 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
N/A
BF/TL 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
BF/TL 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BF/TL 6.1.23 Check Neslab TCU for leaks.
BF/TL 6.1.24 Check Neslab TCU temperature readout.
BF/TL 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
BF/TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BF/TL 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Both slurry pumps required calibration.
Added approximately 0.5 gallon of DI water to the Chiller.
|
| 8.32 | WW 47 - Weekly | SUBPAC::LANDRY | | Tue May 21 1996 10:04 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 5/21/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: A SHIFT
INITIAL
BF/TL 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
BF/TL 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 84 psi
Post-adjust:_N/A____
BF/TL 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42 psi
BF/TL 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
BF/TL 6.1.5 Check all tubing and fittings for leaks.
BF/TL 6.1.6 Check all tubing and fittings for air leaks.
BF/TL 6.1.7 Check all indicator lights.
BF/TL 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
BF/TL 6.1.9 Wipe down polish table, tub, and splash ring.
BF/TL 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
BF/TL 6.1.11 Wipe down pad conditioning arm.
BF/TL 6.1.12 Remove, rinse, and replace diamond conditioning disk.
BF/TL 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
BF/TL 6.1.14 Wipe down outer surface of both spindle hubs.
BF/TL 6.1.15 Remove and clean O-rings, replace if necessary.
BF/TL 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
BF/TL 6.1.17 Wipe down all surfaces of the robot.
BF/TL 6.1.18 Clean end effector vacuum chuck air port.
BF/TL 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
BF/TL 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
BF/TL 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BF/TL 6.1.23 Check Neslab TCU for leaks.
BF/TL 6.1.24 Check Neslab TCU temperature readout.
BF/TL 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
BF/TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BF/TL 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Added approximately 0.5 gallon of DI water to the Chiller.
|
| 8.33 | SHUTDOWN CHECKSHEET | STRATA::RIDLON | Eliminate the obvious | Mon May 27 1996 06:34 | 39 |
| CMP.A1 & CMP.A2 SHUTDOWN CHECKSHEET
-----------------------------------
Tech. Date
------- -------
1. Change RTC status to SCHEDULED DOWN. ___B___ _5/27__
2. Remove all wafer carriers. If possible
keep them wet. If not ensure that there
are enough carriers with new films for
startup. ___B___ _5/27__
3. Remove all wafer cassettes and drain Send
and Receive DI Water tanks. ___B___ _5/27__
4. Purge both slurry lines with DI Water. ___B___ _5/27__
5. Remove and discard all polishing pads. ___B___ _5/27__
6. Remove all PVA scrub brushes and submerge
in DI water. ___B___ _5/27__
7. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry
all wet surfaces. ___B___ _5/27__
8. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing to UDR. ___B___ _5/27__
9. Power down each system. ___B___ _5/27__
10. Power down each vacuum pump cabinet. ___B___ _5/27__
11. Power down each Neslab TCU. ___B___ _5/27__
12. Enter checksheet into notesfile.
|
| 8.34 | weekly completed | STRATA::FINN | | Tue May 28 1996 18:35 | 69 |
| DATE: 5-27-96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: A shift
INITIAL
__X__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__X__ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 84 psi
Post-adjust:_N/A____
__X__ 6.1.3 DI Water pressure @ 36 PSI: Actual Reading: 42 psi
__X__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X__ 6.1.5 Check all tubing and fittings for leaks.
__X__ 6.1.6 Check all tubing and fittings for air leaks.
__X__ 6.1.7 Check all indicator lights.
__X__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X__ 6.1.9 Wipe down polish table, tub, and splash ring.
__X__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X__ 6.1.11 Wipe down pad conditioning arm.
__X__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X__ 6.1.14 Wipe down outer surface of both spindle hubs.
__X__ 6.1.15 Remove and clean O-rings, replace if necessary.
__X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__X__ 6.1.17 Wipe down all surfaces of the robot.
__X__ 6.1.18 Clean end effector vacuum chuck air port.
__X__ 6.1.19 Inspect and clean end effector air nozzle.
__N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__X__ 6.1.23 Check Neslab TCU for leaks.
__X__ 6.1.24 Check Neslab TCU temperature readout.
__X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Slurry Pumps required cal
|
| 8.35 | Startup Checksheet | SUBPAC::LANDRY | | Tue May 28 1996 18:49 | 33 |
|
CMP.A2 STARTUP CHECKSHEET
----------------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are
available and ready to use. B shift 5/28/96
2. Power up each system. A shift 5/28/96
3. Power up each vacuum pump cabinet. A shift 5/28/96
4. Power up each Neslab TCU. A shift 5/28/96
5. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing into the tool A shift 5/28/96
7. Install wafer carriers. A shift 5/28/96
8. Place cassettes in left and right send
and receive stations to fill DI Water
tanks. A shift 5/28/96
9. Install new polishing pads. A shift 5/28/96
10. Re-install PVA scrub brushes. A shift 5/28/96
11. Place systems in wet idle mode. A shift 5/28/96
12. Change RTC status to VERIFY and notify
Operations that the systems are ready
for pad break-in & MQC. A shift 5/28/96
|
| 8.36 | weekly completed | STRATA::FINN | | Tue May 28 1996 19:00 | 69 |
| DATE: 5-27-96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: A+Bshift
INITIAL
__X__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__X__ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 84 psi
Post-adjust:_N/A____
__X__ 6.1.3 DI Water pressure @ 36 PSI: Actual Reading: 42 psi
__X__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X__ 6.1.5 Check all tubing and fittings for leaks.
__X__ 6.1.6 Check all tubing and fittings for air leaks.
__X__ 6.1.7 Check all indicator lights.
__X__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X__ 6.1.9 Wipe down polish table, tub, and splash ring.
__X__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X__ 6.1.11 Wipe down pad conditioning arm.
__X__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X__ 6.1.14 Wipe down outer surface of both spindle hubs.
__X__ 6.1.15 Remove and clean O-rings, replace if necessary.
__X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__X__ 6.1.17 Wipe down all surfaces of the robot.
__X__ 6.1.18 Clean end effector vacuum chuck air port.
__X__ 6.1.19 Inspect and clean end effector air nozzle.
__N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__X__ 6.1.23 Check Neslab TCU for leaks.
__X__ 6.1.24 Check Neslab TCU temperature readout.
__X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Slurry Pumps required cal
|
| 8.37 | Weekly performed, S/A delayed one week | SUBPAC::LANDRY | | Sun Jun 02 1996 18:19 | 73 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 6/2/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: Doc
INITIAL
TL 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
TL 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 82 psi
Post-adjust:_N/A____
TL 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 43 psi
TL 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
TL 6.1.5 Check all tubing and fittings for leaks.
TL 6.1.6 Check all tubing and fittings for air leaks.
TL 6.1.7 Check all indicator lights.
TL 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
TL 6.1.9 Wipe down polish table, tub, and splash ring.
TL 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
TL 6.1.11 Wipe down pad conditioning arm.
TL 6.1.12 Remove, rinse, and replace diamond conditioning disk.
TL 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
TL 6.1.14 Wipe down outer surface of both spindle hubs.
TL 6.1.15 Remove and clean O-rings, replace if necessary.
TL 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
TL 6.1.17 Wipe down all surfaces of the robot.
TL 6.1.18 Clean end effector vacuum chuck air port.
TL 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
TL 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
TL 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
TL 6.1.23 Check Neslab TCU for leaks.
TL 6.1.24 Check Neslab TCU temperature readout.
TL 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
TL 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Added approximately 0.5 gallon of DI water to the Chiller.
Both Carriers and the Pad Changed out during this PM.
|
| 8.38 | Annual PM resheduled for WW50 due to unscheduled down time | SUBPAC::TOOKER | | Fri Jun 07 1996 15:33 | 6 |
| Due to the unscheduled down time on cmp.a2 caused by the bad robot cable, the
annual pm scheduled for WW49 will not take place. The annual pm will be re-
scheduled for WW50.
Thanks,
Jim Tooker
|
| 8.40 | WW50 ANNNUAL P.M. | ASDG::POIRIER | | Fri Jun 14 1996 16:38 | 202 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Annual Preventive Maintenance Check Sheet, REV. C
DATE: 6/14/96 SYSTEM RTC CODE: CMP.A2 SHIFT(S): A, C and D
INITIAL
___X___ 6.4.1 Perform Weekly, Monthly, and Semi-Annual PM's in addition to
this Annual list
___X___ 6.4.2 Perform Bridge Position calibration.
___X___ 6.4.3 Check Robot Position Alignment. Calibrate if necessary.
___X___ 6.4.4 Check Robot Travel position. Adjust if necessary.
___X___ 6.4.5 Check Robot Arm position. Adjust if necessary.
___X___ 6.4.6 Check Elevator Height position. Adjust if necessary.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Semi-annual Preventive Maintenance Check Sheet, REV. C
INITIAL
___X___ 6.3.1 Perform Weekly and Monthly PM's in addition to this Semi-Annual
list.
___X___ 6.3.2 Check all safety interlocked doors for proper operation.
___X___ 6.3.2 Check all EMO's for proper operation.
___X___ 6.3.3 Change oil in the brush rotation gear box using AGMA #8 or
equivalent oil.
___X___ 6.3.4 Change oil in the left and right spindle gear boxes using AGMA
#8 or equivalent oil.
Right spindle gear box was completed only..
___X___ 6.3.5 Change oil in the polish table gear box using AGMA #8 or
equivalent oil.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE:__6-14-96_ SYSTEM RTC CODE:CMP.A2 EQUIP. TECH.: D+C
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___X___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___X___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:____.001________
___X___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___.0009_________
Left Spindlele Runout:__.0015__________
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:___.001_________
Left Spindle Hub Runout:_____.0015_______
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:_____.035_______
Right Spindle Force Error:____-1.87________
Left Spindle Calibration Variable:
Pre-adjust:____1.07________ Post-adjust:____1.08________
Right Spindle Calibration Variable:
Pre-adjust:___1.07_________ Post-adjust:____1.07________
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____24.0____ Post-adjust:_____24.0___
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___+/-15.02_ Post-adjust:____+/-15.02
___X___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:____4.99____ Post-adjust:____5.00____
___X___ 6.2.17 Check the ~ 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___~12.01___ Post-adjust:____________
___X___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 6/11/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: Brendan
INITIAL
BF 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
BF 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 82 psi
Post-adjust:_N/A____
BF 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 43 psi
BF 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
BF 6.1.5 Check all tubing and fittings for leaks.
BF 6.1.6 Check all tubing and fittings for air leaks.
BF 6.1.7 Check all indicator lights.
BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
BF 6.1.9 Wipe down polish table, tub, and splash ring.
BF 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
BF 6.1.11 Wipe down pad conditioning arm.
BF 6.1.12 Remove, rinse, and replace diamond conditioning disk.
BF 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
BF 6.1.14 Wipe down outer surface of both spindle hubs.
BF 6.1.15 Remove and clean O-rings, replace if necessary.
BF 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
BF 6.1.17 Wipe down all surfaces of the robot.
BF 6.1.18 Clean end effector vacuum chuck air port.
BF 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
BF 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
BF 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BF 6.1.23 Check Neslab TCU for leaks.
BF 6.1.24 Check Neslab TCU temperature readout.
BF 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
BF 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BF 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
|
| 8.41 | weekly p.m. completed | FABSIX::R_GEE | | Mon Jun 17 1996 04:31 | 72 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 6/17/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: B Shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
_X_ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 85 psi
Post-adjust:_80____
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 psi
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_X_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Filled the bridge oiler, 4oz.
Replaced the pad and conditioner disk.
|
| 8.42 | Weekly p.m. completed | FABSIX::R_GEE | | Tue Jun 25 1996 06:40 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 6/25/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: B Shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
_X_ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 85 psi
Post-adjust:_82____
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 psi
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_X_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Replaced the pad.
|
| 8.43 | weekly p.m. | FABSIX::R_GEE | | Mon Jul 01 1996 23:07 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 7/02/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: B Shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
_X_ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 85 psi
Post-adjust:_85____
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 psi
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_X_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Replaced the pad, carriers and condition disk.
|
| 8.44 | CMP.A2 JULY 4TH SHUT-DOWN CHECKSHEET | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jul 03 1996 23:40 | 42 |
|
CMP.A2 SHUTDOWN CHECKSHEET
--------------------------
Tech. Date
------- -------
1. Change RTC status to SCHEDULED DOWN. n/a per Dennis G.
2. Remove all wafer carriers. If possible
keep them wet. If not ensure that there
are enough carriers with new films for
startup. BJ 7/3/96
3. Remove all wafer cassettes and drain Send
and Receive DI Water tanks. BJ 7/3/96
4. Purge both slurry lines with DI Water. BJ 7/3/96
5. Remove and discard all polishing pads. BJ 7/3/96
6. Remove all PVA scrub brushes and submerge
in DI water. BJ 7/3/96
7. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry
all wet surfaces. BJ 7/3/96
8. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing to UDR. BJ 7/3/96
9. Power down each system. BJ 7/3/96
10. Power down each vacuum pump cabinet. BJ 7/3/96
11. Power down each Neslab TCU. BJ 7/3/96
12. Enter checksheet into notesfile. BJ 7/3/96
|
| 8.45 | A2 START-UP | FABSIX::L_SHKOLNIKOV | | Sat Jul 06 1996 06:38 | 35 |
|
CMP.A2 STARTUP CHECKSHEET
-------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are
available and ready to use. __LS___ 07-06-96
2. Power up each system. __LS___ 07-06-96
3. Power up each vacuum pump cabinet. __LS___ 07-06-96
4. Power up each Neslab TCU. __LS___ 07-06-96
5. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing into the tool __LS___ 07-06-96
6. Place cassettes in left and right send
and receive stations to fill DI Water
tanks. __LS___ 07-06-96
7. Install new polishing pads. __LS___ 07-06-96
8. Install wafer carriers. __LS___ 07-06-96
9. Re-install PVA scrub brushes. __LS___ 07-06-96
10. Place systems in wet idle mode. __LS___ 07-06-96
11. Change RTC status to VERIFY and notify
Operations that the systems are ready
for pad break-in & MQC. __LS___ 07-06-96
|
| 8.46 | Monthly PM for WW2 completed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jul 10 1996 07:07 | 157 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 7/10/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: BJ
INITIAL
BJ 6.2.1 Perform weekly PM checks in addition to this monthly list.
BJ 6.2.2 Replace the fluid lines on the peristaltic pumps.
BJ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
BJ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002_____
BJ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___.001_____
Left Spindle Runout:__.001______
BJ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:__.0005_____
Left Spindle Hub Runout:____.0005___
BJ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: .68
Right Spindle Force Error: -.69
Left Spindle Calibration Variable:
Pre-adjust: 1.07 Post-adjust: 1.06
Right Spindle Calibration Variable:
Pre-adjust: 1.07 Post-adjust: 1.07
BJ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
BJ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
BJ 6.2.10 Check shuttle travel. Adjust if necessary.
BJ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.01 VDC Post-adjust: N/A
BJ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 15.02 VDC Post-adjust: 15.02
BJ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.01 VDC Post-adjust: N/A
BJ 6.2.17 Check the 12 VAC power supply. Calibrate if necessary.
Pre-adjust: 12.0 Post-adjust: N/A
BJ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
BJ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
BJ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
BJ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 7/10/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: BJ
INITIAL
BJ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_90____
BJ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 85 psi
Post-adjust:_85____
BJ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38 psi
BJ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
BJ 6.1.5 Check all tubing and fittings for leaks.
BJ 6.1.6 Check all tubing and fittings for air leaks.
BJ 6.1.7 Check all indicator lights.
BJ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
BJ 6.1.9 Wipe down polish table, tub, and splash ring.
BJ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
BJ 6.1.11 Wipe down pad conditioning arm.
BJ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
BJ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
BJ 6.1.14 Wipe down outer surface of both spindle hubs.
BJ 6.1.15 Remove and clean O-rings, replace if necessary.
BJ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
BJ 6.1.17 Wipe down all surfaces of the robot.
BJ 6.1.18 Clean end effector vacuum chuck air port.
BJ 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
N/A 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
BJ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BJ 6.1.23 Check Neslab TCU for leaks.
BJ 6.1.24 Check Neslab TCU temperature readout.
BJ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
BJ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BJ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 8.47 | weekly p.m. completed | FABSIX::R_GEE | | Wed Jul 17 1996 01:19 | 236 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 7/17/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: B Shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
_X_ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 84 psi
Post-adjust:_84____
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38 psi
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_X_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Replaced the carriers.
|
| 8.48 | ww4 weekly pm completed | FABSIX::L_SHKOLNIKOV | | Thu Jul 25 1996 06:20 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 7/25/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: D Shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
_X_ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 82 psi
Post-adjust:_82____
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38 psi
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_x_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 8.49 | ww05 weekly p.m. | FABSIX::R_GEE | | Sun Jul 28 1996 21:56 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 7/28/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: B Shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
_X_ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 86 psi
Post-adjust:_80____
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38 psi
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_x_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Changed the pad and carriers.
|
| 8.50 | MONTHLY PM FOR WW6 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Aug 07 1996 06:10 | 158 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 8/7/96 SYSTEM RTC CODE: CMP.A2 TECH/SHIFT: D SHIFT
X 6.2.1 Perform weekly PM checks in addition to this monthly list.
X 6.2.2 Replace the fluid lines on the peristaltic pumps.
X 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
X 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002_____
X 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___.001_____
Left Spindle Runout:__.001______
X 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:__.0005_____
X
Left Spindle Hub Runout:____.0005___
X 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: .1.52
Right Spindle Force Error: -.25
Left Spindle Calibration Variable:
Pre-adjust: 1.06 Post-adjust: N/C
Right Spindle Calibration Variable:
Pre-adjust: 1.07 Post-adjust: N/C
X 6.2.8 Check left and right load station alignment. Adjust if
necessary.
X 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
X 6.2.10 Check shuttle travel. Adjust if necessary.
X 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 23.96 VDC Post-adjust: N/A
X 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 15.02 VDC Post-adjust: 15.02
X 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.00 VDC Post-adjust: N/A
X 6.2.17 Check the 12 VAC power supply. Calibrate if necessary.
Pre-adjust: 11.94 Post-adjust: N/A
X 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
X 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
X 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
X 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 8/6/96 SYSTEM RTC CODE: CMP.A2 TECH/SHIFT: D
INITIAL
X 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_90____
X 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 85 psi
Post-adjust:_85____
X 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36 psi
X 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
X 6.1.5 Check all tubing and fittings for leaks.
X 6.1.6 Check all tubing and fittings for air leaks.
X 6.1.7 Check all indicator lights.
X 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
X 6.1.9 Wipe down polish table, tub, and splash ring.
X 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
X 6.1.11 Wipe down pad conditioning arm.
X 6.1.12 Remove, rinse, and replace diamond conditioning disk.
X 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
X 6.1.14 Wipe down outer surface of both spindle hubs.
X 6.1.15 Remove and clean O-rings, replace if necessary.
X 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
X 6.1.17 Wipe down all surfaces of the robot.
X 6.1.18 Clean end effector vacuum chuck air port.
X 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
N/A 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
X 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
X 6.1.23 Check Neslab TCU for leaks.
X 6.1.24 Check Neslab TCU temperature readout.
X 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
X 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
X 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 8.51 | WW VII - Weekly version | SUBPAC::LANDRY | | Sun Aug 11 1996 13:03 | 73 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 8/11/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: A shift
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100_____
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__86______
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__37___
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X__ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Adjusted Slurry pump #1 variable number from .77 to .74
|
| 8.52 | WW08 WEEKLY PM | FABSIX::L_SHKOLNIKOV | | Wed Aug 21 1996 06:57 | 72 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 8/21/96 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: D shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: _100_
Post-adjust: N/A
_X_ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: _86__
Post-adjust: N/A
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__38__
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_X_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Adjusted Slurry pump #2 variable number from .80 to .76
|
| 8.53 | WW IX - Weekly version | SUBPAC::LANDRY | | Sun Aug 25 1996 12:31 | 73 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 8/25/96 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: A shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: _100_
Post-adjust: N/A
_X_ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: _82_
Post-adjust: N/A
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__36__
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_X_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Found the process cooling line check valve leaking. Removed said
valve, cleaned, rebuilt and re-installed.
Added fluid to Neslab resevoir.
|
| 8.54 | CMP.A1 SHUTDOWN CHECKSHEET | FABSIX::R_POIRIER | | Mon Sep 02 1996 01:48 | 36 |
| CMP.A1 & CMP.A2 SHUTDOWN CHECKSHEET
-----------------------------------
Tech. Date
------- -------
1. Remove all wafer carriers. If possible
keep them wet. If not ensure that there
are enough carriers with new films for
startup. ___B___ _9/1/96_
2. Remove all wafer cassettes and drain Send
and Receive DI Water tanks. ___B___ _9/1/96_
3. Purge both slurry lines with DI Water. ___B___ _9/1/96_
4. Remove and discard all polishing pads. ___B___ _9/1/96_
5. Remove all PVA scrub brushes and submerge
in DI water. ___B___ _9/1/96_
6. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry
all wet surfaces. ___B___ _9/1/96_
7. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing to UDR. ___B___ _9/1/96_
8. Power down each system. ___B___ _9/1/96_
9. Power down each vacuum pump cabinet. ___B___ _9/1/96_
10. Power down each Neslab TCU. ___B___ _9/1/96_
11. Enter checksheet into notesfile. ___B___ _9/1/96_
|
| 8.55 | WW X - Monthly version | SUBPAC::LANDRY | | Tue Sep 03 1996 16:17 | 160 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 9/1 + 3/96 SYSTEM RTC CODE: CMP.A2 TECH/SHIFT: A shift
X 6.2.1 Perform weekly PM checks in addition to this monthly list.
X 6.2.2 Replace the fluid lines on the peristaltic pumps.
X 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
X 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002_____
X 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___.001_____
Left Spindle Runout:__.001______
X 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:__.001_____
Left Spindle Hub Runout:____.001___
X 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: .54
Right Spindle Force Error: .42
Left Spindle Calibration Variable:
Pre-adjust: 1.06 Post-adjust: 1.07
Right Spindle Calibration Variable:
Pre-adjust: 1.07 Post-adjust: N/C
X 6.2.8 Check left and right load station alignment. Adjust if
necessary.
X 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
X 6.2.10 Check shuttle travel. Adjust if necessary.
X 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 23.98 VDC Post-adjust: N/A
X 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.01 VDC Post-adjust: N/A
-15.01 VDC Post-adjust: N/A
X 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 4.99 VDC Post-adjust: N/A
X 6.2.17 Check the 12 VAC power supply. Calibrate if necessary.
Pre-adjust: 11.94 Post-adjust: N/A
X 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
X 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
X 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
X 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
Comments: Added oil to the bridge lubricator.
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 9/1 + 3/96 SYSTEM RTC CODE: CMP.A2 TECH/SHIFT: A shift
INITIAL
X 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust: N/A
X 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 82 psi
Post-adjust: N/A
X 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 39 psi
X 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
X 6.1.5 Check all tubing and fittings for leaks.
X 6.1.6 Check all tubing and fittings for air leaks.
X 6.1.7 Check all indicator lights.
X 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
X 6.1.9 Wipe down polish table, tub, and splash ring.
X 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
X 6.1.11 Wipe down pad conditioning arm.
X 6.1.12 Remove, rinse, and replace diamond conditioning disk.
X 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
X 6.1.14 Wipe down outer surface of both spindle hubs.
X 6.1.15 Remove and clean O-rings, replace if necessary.
X 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
X 6.1.17 Wipe down all surfaces of the robot.
X 6.1.18 Clean end effector vacuum chuck air port.
X 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
X 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
X 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
X 6.1.23 Check Neslab TCU for leaks.
X 6.1.24 Check Neslab TCU temperature readout.
X 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
X 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
X 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 8.56 | startup checksheet | SUBPAC::LANDRY | | Tue Sep 03 1996 19:10 | 35 |
|
CMP.A2 STARTUP CHECKSHEET
-------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are
available and ready to use. ___A___ 09-03-96
2. Power up each system. ___A___ 09-03-96
3. Power up each vacuum pump cabinet. ___A___ 09-03-96
4. Power up each Neslab TCU. ___A___ 09-03-96
5. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing into the tool ___A___ 09-03-96
6. Place cassettes in left and right send
and receive stations to fill DI Water
tanks. ___A___ 09-03-96
7. Install new polishing pads. ___A___ 09-03-96
8. Install wafer carriers. ___A___ 09-03-96
9. Re-install PVA scrub brushes. ___A___ 09-03-96
10. Place systems in wet idle mode. ___A___ 09-03-96
11. Change RTC status to VERIFY and notify
Operations that the systems are ready
for pad break-in & MQC. ___A___ 09-03-96
|
| 8.57 | WW XI - Weekly | SUBPAC::LANDRY | | Tue Sep 10 1996 19:28 | 75 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 9/10/96 SYSTEM RTC CODE: CMP.A2 TECH/SHIFT: A shift
INITIAL
X 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust: N/A
X 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 82 psi
Post-adjust: N/A
X 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 psi
X 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
X 6.1.5 Check all tubing and fittings for leaks.
X 6.1.6 Check all tubing and fittings for air leaks.
X 6.1.7 Check all indicator lights.
X 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
X 6.1.9 Wipe down polish table, tub, and splash ring.
X 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
X 6.1.11 Wipe down pad conditioning arm.
X 6.1.12 Remove, rinse, and replace diamond conditioning disk.
X 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
X 6.1.14 Wipe down outer surface of both spindle hubs.
X 6.1.15 Remove and clean O-rings, replace if necessary.
X 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
X 6.1.17 Wipe down all surfaces of the robot.
X 6.1.18 Clean end effector vacuum chuck air port.
X 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
X 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
X 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
X 6.1.23 Check Neslab TCU for leaks.
X 6.1.24 Check Neslab TCU temperature readout.
X 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
X 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
X 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Both load stations had new pedistals installed at this PM
|
| 8.58 | ww12 weekly pm completed | STRATA::FINN | | Sun Sep 15 1996 10:36 | 74 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 9/15/96 SYSTEM RTC CODE: CMP.A2 TECH/SHIFT: A shift
INITIAL
X 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust: N/A
X 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 82 psi
Post-adjust: N/A
X 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 psi
x 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
x 6.1.5 Check all tubing and fittings for leaks.
x 6.1.6 Check all tubing and fittings for air leaks.
x 6.1.7 Check all indicator lights.
x 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
x 6.1.9 Wipe down polish table, tub, and splash ring.
x 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
x 6.1.11 Wipe down pad conditioning arm.
x 6.1.12 Remove, rinse, and replace diamond conditioning disk.
x 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
x 6.1.14 Wipe down outer surface of both spindle hubs.
x 6.1.15 Remove and clean O-rings, replace if necessary.
x 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
x 6.1.17 Wipe down all surfaces of the robot.
x 6.1.18 Clean end effector vacuum chuck air port.
x 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
x 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
x 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
x 6.1.23 Check Neslab TCU for leaks.
x 6.1.24 Check Neslab TCU temperature readout.
x 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
x 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
x 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Calibrated slurry pumps 1 + 2
|
| 8.59 | WW13 WEEKLY PM COMPLETED | FABSIX::O_WHITFORD | | Wed Sep 25 1996 22:21 | 81 |
| <<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]CMP.NOTE;1 >>>
-< CMP >-
================================================================================
Note 8.1 CMP.A2 PM CHECKSHEETS 1 of 58
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 78 lines 8-NOV-1995 21:07
-< Weekly PM Checksheet Template >-
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:_9/25/96___ SYSTEM RTC CODE:__CMP.A2__ EQUIP. TECH.: Dave W., BJ
INITIAL
___DW____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100______
Post-adjust:___100_____
__DW_____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___80_____
Post-adjust:____80____
__DW_____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:_38~42_____
__DW_____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__DW_____ 6.1.5 Check all tubing and fittings for leaks.
__DW_____ 6.1.6 Check all tubing and fittings for air leaks.
__DW_____ 6.1.7 Check all indicator lights.
__DW_____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X____ 6.1.9 Wipe down polish table, tub, and splash ring.
___X____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X____ 6.1.11 Wipe down pad conditioning arm.
___X____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__DW_____ 6.1.14 Wipe down outer surface of both spindle hubs.
__DW_____ 6.1.15 Remove and clean O-rings, replace if necessary.
__DW_____ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__DW_____ 6.1.17 Wipe down all surfaces of the robot.
__DW_____ 6.1.18 Clean end effector vacuum chuck air port.
__DW_____ 6.1.19 Inspect and clean end effector air nozzle.
__NA_____ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__DW_____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__DW_____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__DW_____ 6.1.23 Check Neslab TCU for leaks.
__DW 38C_____ 6.1.24 Check Neslab TCU temperature readout.
__DW_____ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__DW_____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__DW_____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Replaced the following o-rings in the hubs
LEFT - 6.75-outer (1st) RIGHT - 6.75-outer (1st)
- 2.75-3rd - 3.75-2nd
|
| 8.60 | WW14 Weekly PM | FABSIX::R_POIRIER | | Sun Sep 29 1996 04:15 | 72 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:_9/29/96___ SYSTEM RTC CODE:__CMP.A2__ EQUIP. TECH.: B Shift
INITIAL
___X_____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100______
Post-adjust:___100_____
___X_____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___84_____
Post-adjust:__________
___X_____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:_38~42_____
___X_____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X_____ 6.1.5 Check all tubing and fittings for leaks.
___X_____ 6.1.6 Check all tubing and fittings for air leaks.
___X_____ 6.1.7 Check all indicator lights.
___X_____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X____ 6.1.9 Wipe down polish table, tub, and splash ring.
___X____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X____ 6.1.11 Wipe down pad conditioning arm.
___X____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X_____ 6.1.14 Wipe down outer surface of both spindle hubs.
___X_____ 6.1.15 Remove and clean O-rings, replace if necessary.
___X_____ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X_____ 6.1.17 Wipe down all surfaces of the robot.
___X_____ 6.1.18 Clean end effector vacuum chuck air port.
___X_____ 6.1.19 Inspect and clean end effector air nozzle.
__NA_____ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X_____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X_____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X_____ 6.1.23 Check Neslab TCU for leaks.
___X_____ 6.1.24 Check Neslab TCU temperature readout. (38 C)
___X_____ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X_____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X_____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 8.61 | Monthly p.m. completed | FABSIX::R_GEE | | Tue Oct 08 1996 12:40 | 166 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 10/8/96 SYSTEM RTC CODE: CMP.A2 TECH/SHIFT: All shiftS
_X__ 6.2.1 Perform weekly PM checks in addition to this monthly list.
JS 6.2.2 Replace the fluid lines on the peristaltic pumps.
JT 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
B 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002_____
B 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___.001_____
Left Spindle Runout:__.001______
B 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:__.001_____
Left Spindle Hub Runout:____.001___
D 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: .97
Right Spindle Force Error: .99
Left Spindle Calibration Variable:
Pre-adjust: ___ Post-adjust: .41
Right Spindle Calibration Variable:
Pre-adjust: ___ Post-adjust: -.36
JT 6.2.8 Check left and right load station alignment. Adjust if
necessary.
ADJUSTED BY JT ON 10/03/96.
JT 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
ADJUSTED BY JT ON 10/03/96
B 6.2.10 Check shuttle travel. Adjust if necessary.
B 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 23.98 VDC Post-adjust: N/A
B 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.01 VDC Post-adjust: N/A
-15.01 VDC Post-adjust: N/A
B 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 4.99 VDC Post-adjust: N/A
B 6.2.17 Check the 12 VAC power supply. Calibrate if necessary.
Pre-adjust: 12.1 Post-adjust: N/A
B 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
B 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
>>> SOFT WATER ADDED TO BRING LEVEL UP.
B 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
B 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
Comments:
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 9/8/96 SYSTEM RTC CODE: CMP.A2 TECH/SHIFT: A/B shift
INITIAL
B 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust: N/A
B 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 82 psi
Post-adjust: N/A
B 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 psi
B 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
B 6.1.5 Check all tubing and fittings for leaks.
B 6.1.6 Check all tubing and fittings for air leaks.
B 6.1.7 Check all indicator lights.
A/B 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
A 6.1.9 Wipe down polish table, tub, and splash ring.
A 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
A 6.1.11 Wipe down pad conditioning arm.
A 6.1.12 Remove, rinse, and replace diamond conditioning disk.
A 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
A 6.1.14 Wipe down outer surface of both spindle hubs.
A 6.1.15 Remove and clean O-rings, replace if necessary.
B 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
B 6.1.17 Wipe down all surfaces of the robot.
B 6.1.18 Clean end effector vacuum chuck air port.
B 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
B 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
A 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
B 6.1.23 Check Neslab TCU for leaks.
B 6.1.24 Check Neslab TCU temperature readout.
B 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
B 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
B 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 8.62 | WW XVI - Weekly completed | SUBPAC::LANDRY | | Sun Oct 13 1996 14:24 | 73 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 10/13/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: A Shift
INITIAL
___X_____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100______
Post-adjust:____________
___X_____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___82______
Post-adjust:____________
___X_____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___37_____
___X_____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X_____ 6.1.5 Check all tubing and fittings for leaks.
___X_____ 6.1.6 Check all tubing and fittings for air leaks.
___X_____ 6.1.7 Check all indicator lights.
___X_____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X____ 6.1.9 Wipe down polish table, tub, and splash ring.
___X____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X____ 6.1.11 Wipe down pad conditioning arm.
___X____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X_____ 6.1.14 Wipe down outer surface of both spindle hubs.
___X_____ 6.1.15 Remove and clean O-rings, replace if necessary.
___X_____ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X_____ 6.1.17 Wipe down all surfaces of the robot.
___X_____ 6.1.18 Clean end effector vacuum chuck air port.
___X_____ 6.1.19 Inspect and clean end effector air nozzle.
__NA_____ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X_____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X_____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X_____ 6.1.23 Check Neslab TCU for leaks.
___X_____ 6.1.24 Check Neslab TCU temperature readout. (38 C)
___X_____ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X_____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X_____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 1) Topped off the Neslab TCU
2) section 6.1.20 no longer utilizes mentioned filters
|
| 8.63 | ww17 weekly pm. | FABSIX::L_SHKOLNIKOV | | Fri Oct 25 1996 06:02 | 71 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 10/24/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: D Shift
INITIAL
_ls__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100__
Post-adjust:
_ls__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___82__
Post-adjust:
_ls__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__35__
_ls__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_ls__ 6.1.5 Check all tubing and fittings for leaks.
_ls__ 6.1.6 Check all tubing and fittings for air leaks.
_ls__ 6.1.7 Check all indicator lights.
_ls__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_ls__ 6.1.9 Wipe down polish table, tub, and splash ring.
_ls__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_ls__ 6.1.11 Wipe down pad conditioning arm.
_ls__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_ls__ 6.1.13 Remove, wipe down, and rinse pad conditioner park station.
_ls__ 6.1.14 Wipe down outer surface of both spindle hubs.
_ls__ 6.1.15 Remove and clean O-rings, replace if necessary.
_ls__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_ls__ 6.1.17 Wipe down all surfaces of the robot.
_ls__ 6.1.18 Clean end effector vacuum chuck air port.
_ls__ 6.1.19 Inspect and clean end effector air nozzle.
_n/a_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
(no longer in use)
_ls__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_ls__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_ls__ 6.1.23 Check Neslab TCU for leaks.
_ls__ 6.1.24 Check Neslab TCU temperature readout. (38 C)
_ls__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_ls__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_ls__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 8.64 | WW18 WEEKLY | LUDWIG::RIDLON | Eliminate the oblivious | Mon Oct 28 1996 23:52 | 81 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 10/28/96 SYSTEM RTC CODE: cmp.a2 EQUIP. TECH.: R_Poirier, M_Ridlon
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___82___
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___38___
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
___X___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BOTH PUMPS NEEDED SOME MINOR ADJUSTMENTS.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.65 | WW 19 - Monthly PM completed | SUBPAC::LANDRY | | Mon Nov 04 1996 19:31 | 169 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 11-4-96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Finn, Gee, Landry
INITIAL
_BG/TL_ 6.2.1 Perform weekly PM checks in addition to this monthly list.
__TL___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__TL___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__BF___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002______
__BG___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:____.000______
Left Spindle Runout:______.001______
__BG___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:_pre.007_ post.002______
Left Spindle Hub Runout:__.0015_______
_BG/TL_ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: -.60
Right Spindle Force Error: +.06
Left Spindle Calibration Variable:
Pre-adjust: 157.31 Post-adjust: 148.87
Right Spindle Calibration Variable:
Pre-adjust: 160.22 Post-adjust: 152.38
_BG/TL_ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_BG/TL_ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__TL___ 6.2.10 Check shuttle travel. Adjust if necessary.
__TL___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___24.00_____ Post-adjust:___NONE_________
__TL___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.02/-15.01 Post-adjust:___NONE______
__TL___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:___5.00_____ Post-adjust:___NONE____
__TL___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___12.18___ Post-adjust:__NONE____
__BG___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__BG___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__BG___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__TL___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connections.
COMMENTS: Added oil to the Bridge Lube resevoir
Added softwater to the Neslab TCU
================================================================================
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11-4-96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Gee, Landry
INITIAL
__BG___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: None
__BG___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 82 PSI
Post-adjust: 85 PSI
__BG___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 33 PSI
__BG___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__TL___ 6.1.5 Check all tubing and fittings for leaks.
__TL___ 6.1.6 Check all tubing and fittings for air leaks.
__BG___ 6.1.7 Check all indicator lights.
TL_BG_BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
_TL_BG_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__TL___ 6.1.11 Wipe down pad conditioning arm.
__TL___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BF___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF___ 6.1.15 Remove and clean O-rings, replace if necessary.
__BG___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__BG___ 6.1.17 Wipe down all surfaces of the robot.
__BG___ 6.1.18 Clean end effector vacuum chuck air port.
__BG___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
NOTE: No point of use filters.
__TL___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_BG_TL_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BG___ 6.1.23 Check Neslab TCU for leaks.
__BG___ 6.1.24 Check Neslab TCU temperature readout.
__BG___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BG___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BG___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.66 | WW XX - Weekly completed | SUBPAC::LANDRY | | Tue Nov 12 1996 10:52 | 70 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11/12/96 SYSTEM RTC CODE: cmp.a2 EQUIP. TECH.: TL,BG,BF
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___85___
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___28___
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A = No point of use filters on this system
|
| 8.67 | WW21 Weekly PM | FABSIX::R_POIRIER | | Mon Nov 18 1996 04:50 | 71 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11/18/96 SYSTEM RTC CODE: cmp.a2 EQUIP. TECH.: B Shift
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___85___
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___28___
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A = No point of use filters on this system
|
| 8.68 | WEEKLY WW22 | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Nov 25 1996 05:11 | 77 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11/25/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Ridlon
INITIAL
__XX___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100___
Post-adjust:________
__XX___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:____84__
Post-adjust:________
__XX___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___37___
__XX___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__XX___ 6.1.5 Check all tubing and fittings for leaks.
__XX___ 6.1.6 Check all tubing and fittings for air leaks.
__XX___ 6.1.7 Check all indicator lights.
__XX___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__XX___ 6.1.9 Wipe down polish table, tub, and splash ring.
__XX___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__XX___ 6.1.11 Wipe down pad conditioning arm.
__XX___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__XX___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__XX___ 6.1.14 Wipe down outer surface of both spindle hubs.
__XX___ 6.1.15 Remove and clean O-rings, replace if necessary.
__XX___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__XX___ 6.1.17 Wipe down all surfaces of the robot.
__XX___ 6.1.18 Clean end effector vacuum chuck air port.
__XX___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__XX___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__XX___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__XX___ 6.1.23 Check Neslab TCU for leaks.
__XX___ 6.1.24 Check Neslab TCU temperature readout.
__XX___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__XX___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__XX___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.69 | SEMI-ANNUAL PM COMPLETED FOR WW23 | FABSIX::O_WHITFORD | Quticherwhinin' | Thu Dec 05 1996 23:44 | 195 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Semi-annual Preventive Maintenance Check Sheet, REV. C
DATE: 12/5/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: JUBINVILLE
WHITFORD
JUBINVILLE 6.3.1 Perform Weekly and Monthly PM's in addition to this
Semi-Annual list.
WHITFORD 6.3.2 Check all safety interlocked doors for proper operation.
JUBINVILLE
JUBINVILLE 6.3.2 Check all EMO's for proper operation.
N/A 6.3.3 Change oil in the brush rotation gear box using AGMA #8 or
equivalent oil.
N/A 6.3.4 Change oil in the left and right spindle gear boxes using AGMA
#8 or equivalent oil.
N/A 6.3.5 Change oil in the polish table gear box using AGMA #8 or
equivalent oil.
COMMENTS:
RE: 6.3.3, 6.3.4 and 6.3.5: Per Jim Tooker, the oil in
the gear boxes are just to be checked for proper level,
not changed
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 12/5/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: JUBINVILLE
WHITFORD
INITIAL
JUBINVILLE 6.2.1 Perform weekly PM checks in addition to this monthly list.
WHITFORD 6.2.2 Replace the fluid lines on the peristaltic pumps.
JUBINVILLE 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
JUBINVILLE 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: .001
JUBINVILLE 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: .001
Left Spindle Runout: .001
JUBINVILLE 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: .001
Left Spindle Hub Runout: .002
JUBINVILLE 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: PRE: 1.1 POST: N/C
Right Spindle Force Error: PRE: -3.2 POST: .02
Left Spindle Calibration Variable:
Pre-adjust: 148.87 Post-adjust: N/C
Right Spindle Calibration Variable:
Pre-adjust: 152.78 Post-adjust: 154.74
JUBINVILLE 6.2.8 Check left and right load station alignment. Adjust if
necessary.
JUBINVILLE 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
JUBINVILLE 6.2.10 Check shuttle travel. Adjust if necessary.
WHITFORD 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 23.98 VDC Post-adjust: 23.98 VDC
WHITFORD 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 15.02 VDC Post-adjust: 15.02
WHITFORD 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.00 VDC Post-adjust: 5.00 VDC
WHITFORD 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust: 12 VAC Post-adjust: 12 VAC
WHITFORD 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
JUBINVILLE necessary using Shell Tellus 10 or equivalent.
JUBINVILLE 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
JUBINVILLE 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
JUBINVILLE 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 12/5/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: BRIAN JUBINVILLE
DAVE WHITFORD
INITIAL
WHITFORD 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: 100 PSI
WHITFORD 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85 PSI
Post-adjust: 85 PSI
WHITFORD 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 30 PSI
WHITFORD 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
WHITFORD 6.1.5 Check all tubing and fittings for leaks.
WHITFORD 6.1.6 Check all tubing and fittings for air leaks.
WHITFORD 6.1.7 Check all indicator lights.
WHITFORD 6.1.8 Check all stations/components for slurry, debris, or
JUBINVILLE any contaminants. Clean if necessary.
JUBINVILLE 6.1.9 Wipe down polish table, tub, and splash ring.
JUBINVILLE 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JUBINVILLE 6.1.11 Wipe down pad conditioning arm.
JUBINVILLE 6.1.12 Remove, rinse, and replace diamond conditioning disk.
JUBINVILLE 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
JUBINVILLE 6.1.14 Wipe down outer surface of both spindle hubs.
JUBINVILLE 6.1.15 Remove and clean O-rings, replace if necessary.
JUBINVILLE 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
JUBINVILLE 6.1.17 Wipe down all surfaces of the robot.
JUBINVILLE 6.1.18 Clean end effector vacuum chuck air port.
JUBINVILLE 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
N/A 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
JUBINVILLE 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
JUBINVILLE 6.1.23 Check Neslab TCU for leaks.
JUBINVILLE 6.1.24 Check Neslab TCU temperature readout.
JUBINVILLE 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
JUBINVILLE 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
JUBINVILLE 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 and 6.1.21 were eliminated from the tool a year ago
|
| 8.70 | WW 24 - Weekly completed | SUBPAC::LANDRY | | Sun Dec 08 1996 17:36 | 70 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 12/8/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Gee / Landry
INITIAL
__XX___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100___
Post-adjust:________
__XX___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:____80__
Post-adjust:___85___
__XX___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___38___
__XX___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__XX___ 6.1.5 Check all tubing and fittings for leaks.
__XX___ 6.1.6 Check all tubing and fittings for air leaks.
__XX___ 6.1.7 Check all indicator lights.
__XX___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__XX___ 6.1.9 Wipe down polish table, tub, and splash ring.
__XX___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__XX___ 6.1.11 Wipe down pad conditioning arm.
__XX___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__XX___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__XX___ 6.1.14 Wipe down outer surface of both spindle hubs.
__XX___ 6.1.15 Remove and clean O-rings, replace if necessary.
__XX___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__XX___ 6.1.17 Wipe down all surfaces of the robot.
__XX___ 6.1.18 Clean end effector vacuum chuck air port.
__XX___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__XX___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__XX___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__XX___ 6.1.23 Check Neslab TCU for leaks.
__XX___ 6.1.24 Check Neslab TCU temperature readout.
__XX___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__XX___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__XX___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 No longer utilizes said filters
|
| 8.71 | WW 25 - Weekly completed | FABSIX::R_GEE | | Sun Dec 15 1996 17:50 | 76 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 12/15/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Gee, Finn, Landry
INITIAL
__XX___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100___
Post-adjust:________
__XX___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:____80__
Post-adjust:___85___
__XX___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___41___
__XX___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__XX___ 6.1.5 Check all tubing and fittings for leaks.
__XX___ 6.1.6 Check all tubing and fittings for air leaks.
__XX___ 6.1.7 Check all indicator lights.
__XX___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__XX___ 6.1.9 Wipe down polish table, tub, and splash ring.
__XX___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__XX___ 6.1.11 Wipe down pad conditioning arm.
__XX___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__XX___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__XX___ 6.1.14 Wipe down outer surface of both spindle hubs.
__XX___ 6.1.15 Remove and clean O-rings, replace if necessary.
__XX___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__XX___ 6.1.17 Wipe down all surfaces of the robot.
__XX___ 6.1.18 Clean end effector vacuum chuck air port.
__XX___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__XX___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__XX___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__XX___ 6.1.23 Check Neslab TCU for leaks.
__XX___ 6.1.24 Check Neslab TCU temperature readout.
__XX___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__XX___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__XX___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 No longer utilizes said filters
Changed the Polish Pad, rebuilt the right carrier, changed the
conditioning disk.
Cleaned up oil (from oiler) in drip pan
|
| 8.72 | WW 26 - Weekly completed | SUBPAC::LANDRY | | Sun Dec 22 1996 10:45 | 75 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 12/22/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Gee, Landry
INITIAL
__XX___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100___
Post-adjust:________
__XX___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:____82__
Post-adjust:___85___
__XX___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___42___
__XX___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__XX___ 6.1.5 Check all tubing and fittings for leaks.
__XX___ 6.1.6 Check all tubing and fittings for air leaks.
__XX___ 6.1.7 Check all indicator lights.
__XX___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__XX___ 6.1.9 Wipe down polish table, tub, and splash ring.
__XX___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__XX___ 6.1.11 Wipe down pad conditioning arm.
__XX___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__XX___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__XX___ 6.1.14 Wipe down outer surface of both spindle hubs.
__XX___ 6.1.15 Remove and clean O-rings, replace if necessary.
__XX___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__XX___ 6.1.17 Wipe down all surfaces of the robot.
__XX___ 6.1.18 Clean end effector vacuum chuck air port.
__XX___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__XX___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__XX___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__XX___ 6.1.23 Check Neslab TCU for leaks.
__XX___ 6.1.24 Check Neslab TCU temperature readout.
__XX___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__XX___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__XX___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 No longer utilizes said filters
Changed the Polish Pad.
Cleaned up oil (from oiler) in drip pan
|
| 8.73 | WW27 Weekly PM completed | FABSIX::R_POIRIER | | Tue Dec 31 1996 02:16 | 78 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 12/29/96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Roger Poirier
Mitch Ridlon
INITIAL
__RP___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100___
Post-adjust:________
__RP___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:____84__
Post-adjust:_______
__RP___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___43___
__RP___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__RP___ 6.1.5 Check all tubing and fittings for leaks.
__RP___ 6.1.6 Check all tubing and fittings for air leaks.
_MR/RP_ 6.1.7 Check all indicator lights.
_MR/RP_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__RP___ 6.1.9 Wipe down polish table, tub, and splash ring.
__RP___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__RP___ 6.1.11 Wipe down pad conditioning arm.
__MR___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__RP___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__RP___ 6.1.14 Wipe down outer surface of both spindle hubs.
__RP___ 6.1.15 Remove and clean O-rings, replace if necessary.
__MR___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__MR___ 6.1.17 Wipe down all surfaces of the robot.
__MR___ 6.1.18 Clean end effector vacuum chuck air port.
__MR___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__MR___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__RP___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__RP___ 6.1.23 Check Neslab TCU for leaks.
__RP___ 6.1.24 Check Neslab TCU temperature readout.
__MR___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__MR___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__MR___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: N/A 6.1.20 No longer utilizes said filters
Engineer informed of all N/A
Changed the Polish Pad/conditioning disk
Cleaned up oil (from oiler) in drip pan
|
| 8.74 | CMP.A2 shutdown checksheet completed | FABSIX::R_GEE | | Tue Dec 31 1996 15:28 | 40 |
|
CMP.A1 & CMP.A2 SHUTDOWN CHECKSHEET Tech: _Tim Landry_
----------------------------------- _Bob Gee____
Tech. Date
------- -------
1. Remove all wafer carriers. Do not re-use.
Ensure that there are a sufficient ammount
of re-built carriers to support the startup. ___X___ _12/31/96
2. Remove all wafer cassettes and drain Send
and Receive DI Water tanks. ___X___ _12/31/96
3. Purge both slurry lines with DI Water. ___X___ _12/31/96
4. Remove and discard all polishing pads. ___X___ _12/31/96
5. Remove all PVA scrub brushes and submerge
in a mixture of DI water and H2O2. ___X___ _12/31/96
6. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry
all wet surfaces. ___X___ _12/31/96
7. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing to UDR. ___X___ _12/31/96
8. Disconnect incoming DI Water line and purge
system DI Water lines with N2. Re-connect
DI Water line when finished.
9. Power down each system. ___X___ _12/31/96
10. Power down each vacuum pump cabinet. ___X___ _12/31/96
11. Power down each Neslab TCU. ___X___ _12/31/96
12. Enter checksheet into CMP Notesfile. ___X___ _12/31/96
|
| 8.75 | CMP.A2 START-UP COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 02 1997 07:38 | 34 |
|
CMP.A1 & CMP.A2 STARTUP CHECKSHEET
----------------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are BJ 1/2/97
available and ready to use.
2. Power up each system. BJ 1/2/97
3. Power up each vacuum pump cabinet. BJ 1/2/97
4. Power up each Neslab TCU. BJ 1/2/97
5. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing into the tool BJ 1/2/97
6. Place cassettes in left and right send
and receive stations to fill DI Water
tanks. BJ 1/2/97
7. Install new polishing pads. LS 1/2/97
8. Install new wafer carriers. BJ 1/2/97
9. Re-install PVA scrub brushes. LS 1/2/97
10. Place systems in wet idle mode. LS 1/2/97
11. Notify Operations that the systems are ready
for pad break-in & MQC. LS 1/2/97
12. Enter checksheet into notesfile. BJ 1/2/97
|
| 8.76 | WW 28 - Monthly completed | SUBPAC::LANDRY | | Tue Jan 07 1997 14:26 | 169 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 1-7-97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: Tim Landry (TL)
Bob Gee (BG)
Jim Sadin (JS)
Brendan Finn (BF)
INITIAL
__JS___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
_TL/JS_ 6.2.2 Replace the fluid lines on the peristaltic pumps.
_TL/JS_ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_TL/JS_ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002______
_TL/JS_ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:____.001______
Left Spindle Runout:______.001______
_TL/JS_ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:_pre.005_ post.001______
Left Spindle Hub Runout:__pre.004- post.001_______
_TL/JS_ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: +.04
Right Spindle Force Error: +.24
Left Spindle Calibration Variable:
Pre-adjust: 148.87 Post-adjust: 148.83
Right Spindle Calibration Variable:
Pre-adjust: 154.74 Post-adjust: 150.02
_TL/JS_ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_TL/JS_ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__BF___ 6.2.10 Check shuttle travel. Adjust if necessary.
_TL/JS_ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___23.97_____ Post-adjust:___NONE_________
_TL/JS_ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.01/-15.01 Post-adjust:___NONE______
_TL/JS_ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:___4.99_____ Post-adjust:___NONE____
_TL/JS_ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___12.17___ Post-adjust:__NONE____
_BF/BG_ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
_TL/JS_ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
_TL/JS_ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
_TL/JS_ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connections.
COMMENTS: Added softwater to the Neslab TCU
================================================================================
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 1-7-97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Tim Landry (TL)
Jim Sadin (JS)
Bob Gee (BG)
Brendan Finn (BF)
INITIAL
__BG___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: None
__BG___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 81 PSI
Post-adjust: 85 PSI
__BG___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 PSI
__BF___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BF___ 6.1.5 Check all tubing and fittings for leaks.
__BF___ 6.1.6 Check all tubing and fittings for air leaks.
_BG/BF_ 6.1.7 Check all indicator lights.
TL_BG_BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__JS___ 6.1.9 Wipe down polish table, tub, and splash ring.
_TL_BG_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__JS___ 6.1.11 Wipe down pad conditioning arm.
__JS___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__JS___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF___ 6.1.15 Remove and clean O-rings, replace if necessary.
__BG___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__BG___ 6.1.17 Wipe down all surfaces of the robot.
__BG___ 6.1.18 Clean end effector vacuum chuck air port.
__BG___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
NOTE: No point of use filters.
__TL___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_BG_TL_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BG___ 6.1.23 Check Neslab TCU for leaks.
__BG___ 6.1.24 Check Neslab TCU temperature readout.
__BG___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BG___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BG___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 The system no longer utilizes said filter. Equip Eng has
been notified.
6.1.2 N2 supply to the room is at 81 PSI, which is also what
the system is reading. Equip Eng has been notified.
|
| 8.77 | WW29 Weekly PM | FABSIX::R_POIRIER | | Sun Jan 12 1997 21:43 | 79 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 01/12/97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Roger Poirier
Mitch Ridlon
INITIAL
__RP___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100___
Post-adjust:__100___
__RP___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:____84__
Post-adjust:___85__
__RP___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___42___
__RP___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__RP___ 6.1.5 Check all tubing and fittings for leaks.
__RP___ 6.1.6 Check all tubing and fittings for air leaks.
_MR/RP_ 6.1.7 Check all indicator lights.
_MR/RP_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_MR/RP_ 6.1.9 Wipe down polish table, tub, and splash ring.
__RP___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__RP___ 6.1.11 Wipe down pad conditioning arm.
__MR___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__RP___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__RP___ 6.1.14 Wipe down outer surface of both spindle hubs.
__RP___ 6.1.15 Remove and clean O-rings, replace if necessary.
__MR___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__MR___ 6.1.17 Wipe down all surfaces of the robot.
__MR___ 6.1.18 Clean end effector vacuum chuck air port.
__MR___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__RP___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__RP___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__RP___ 6.1.23 Check Neslab TCU for leaks.
__RP___ 6.1.24 Check Neslab TCU temperature readout.
__MR___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__MR___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__MR___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: N/A 6.1.20 No longer utilizes said filters
Engineer informed of all N/A
Changed the Polish Pad/Carriers/Conditioning Disk
Cleaned up oil (from oiler) in drip pan
Re-calibrated Slurry Flow 2. (From 1.2 to 1.1)
|
| 8.78 | WW30 weekly pm | FABSIX::J_SADIN | Freedom isn't free. | Mon Jan 20 1997 14:35 | 77 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 01/20/97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: James Sadin
Brendan Finn
INITIAL Tim Landry
__JS___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100___
Post-adjust:__100___
__JS___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:____84__
Post-adjust:___84__
__JS___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___42___
__BF___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__JS___ 6.1.5 Check all tubing and fittings for leaks.
__JS___ 6.1.6 Check all tubing and fittings for air leaks.
_TL/BF_ 6.1.7 Check all indicator lights.
_JS/BF_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_JS/TL_ 6.1.9 Wipe down polish table, tub, and splash ring.
__BF___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__BF___ 6.1.11 Wipe down pad conditioning arm.
__JS___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__TL___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__JS___ 6.1.14 Wipe down outer surface of both spindle hubs.
__JS___ 6.1.15 Remove and clean O-rings, replace if necessary.
__JS___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__TL___ 6.1.17 Wipe down all surfaces of the robot.
__TL___ 6.1.18 Clean end effector vacuum chuck air port.
__BF___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__BF___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_TL/BF_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__JS___ 6.1.23 Check Neslab TCU for leaks.
__JS___ 6.1.24 Check Neslab TCU temperature readout.
__BF___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BF___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__TL___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: N/A 6.1.20 No longer utilizes said filters
Engineer informed of all N/A
6.1.2 - N2 pressure not adjustable any higher
|
| 8.79 | ww 31 weekly p.m. completed | FABSIX::R_GEE | | Sun Jan 26 1997 15:48 | 75 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:1/26/97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: Tim Landry (TL)
Brendan Finn (BF)
Jim Sadin (JS)
INITIAL Bob Gee (BG)
__BG___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__BG___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__BG___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
__BF___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__TL___ 6.1.5 Check all tubing and fittings for leaks.
__TL___ 6.1.6 Check all tubing and fittings for air leaks.
__JS___ 6.1.7 Check all indicator lights.
JS/TL/BF/BG 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
__TL___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__BF___ 6.1.11 Wipe down pad conditioning arm.
__TL___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BG___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BG___ 6.1.15 Remove and clean O-rings, replace if necessary.
__JS___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__BF___ 6.1.17 Wipe down all surfaces of the robot.
__BF___ 6.1.18 Clean end effector vacuum chuck air port.
__BF___ 6.1.19 Inspect and clean end effector air nozzle.
__NA___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__TL___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__TL___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BF___ 6.1.23 Check Neslab TCU for leaks.
__BF___ 6.1.24 Check Neslab TCU temperature readout.
__BG___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BG___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BG___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.3 System unable to reach 40 PSI, Equip Eng notified
6.1.20 Point of use slurry filters no longer used, Equip Eng notified
|
| 8.80 | WW32 Monthly PM | FABSIX::R_POIRIER | | Sun Feb 02 1997 05:02 | 170 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 2-2-97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: Mitch Ridlon (MR)
Roger Poirier (RP)
INITIAL
_MR/RP 6.2.1 Perform weekly PM checks in addition to this monthly list.
__MR__ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__RP__ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__MR/RP__ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002______
__MR/RP__ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:____.001______
Left Spindle Runout:______.001______
__MR/RP__ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:_pre.005_ post.001______
Left Spindle Hub Runout:__pre.004- post.001_______
__MR/RP__ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: .60
Right Spindle Force Error: -.85
Left Spindle Calibration Variable:
Pre-adjust: 144.26 Post-adjust: 143.66
Right Spindle Calibration Variable:
Pre-adjust: 149.52 Post-adjust: 149.62
__MR/RP__ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
__MR/RP__ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__MR___ 6.2.10 Check shuttle travel. Adjust if necessary.
__MR/RP__ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___24.03_____ Post-adjust:___NONE_________
__MR/RP__ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.03/-15.02 Post-adjust:___NONE______
__MR/RP__ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:___5.00_____ Post-adjust:___NONE____
__MR/RP__ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___12.26___ Post-adjust:__NONE____
__MR__ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__RP__ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__RP__ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__RP_ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connections.
COMMENTS:
================================================================================
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 2-2-97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: Mitch Ridlon (MR)
Roger Poirier (RP)
INITIAL
__RP___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: None
__RP___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 81 PSI
Post-adjust: 81 PSI
__RP___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 PSI
__MR/RP___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__RP/MR___ 6.1.5 Check all tubing and fittings for leaks.
__RP/MR___ 6.1.6 Check all tubing and fittings for air leaks.
__RP__ 6.1.7 Check all indicator lights.
__RP__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_MR/RP 6.1.9 Wipe down polish table, tub, and splash ring.
_MR/PR 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__MR__ 6.1.11 Wipe down pad conditioning arm.
__MR__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__MR__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__MR__ 6.1.14 Wipe down outer surface of both spindle hubs.
__MR__ 6.1.15 Remove and clean O-rings, replace if necessary.
__MR__ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__RP__ 6.1.17 Wipe down all surfaces of the robot.
__RP__ 6.1.18 Clean end effector vacuum chuck air port.
__RP__ 6.1.19 Inspect and clean end effector air nozzle.
_N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
NOTE: No point of use filters.
__MR__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__RP__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__RP___ 6.1.23 Check Neslab TCU for leaks.
__RP___ 6.1.24 Check Neslab TCU temperature readout.
__RP___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__RP___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__RP___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 The system no longer utilizes said filter. Equip Eng has
been notified.
6.1.2 N2 supply to the room is at 81 PSI, which is also what
the system is reading. Equip Eng has been notified.
6.1.12 The conditioning disk was replaced 50 wafers ago. Still
plenty of life in it so it was not replaced.
|
| 8.81 | WW33 Weekly PM | FABSIX::R_POIRIER | | Mon Feb 10 1997 05:09 | 76 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:02-10-97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: Roger Poirier (RP)
INITIAL
__RP___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__RP___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 82
Post-adjust: 82
__RP___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42
__RP___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__RP___ 6.1.5 Check all tubing and fittings for leaks.
__RP___ 6.1.6 Check all tubing and fittings for air leaks.
__RP___ 6.1.7 Check all indicator lights.
__RP___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__RP___ 6.1.9 Wipe down polish table, tub, and splash ring.
__RP___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__RP___ 6.1.11 Wipe down pad conditioning arm.
__RP___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__RP___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__RP___ 6.1.14 Wipe down outer surface of both spindle hubs.
__RP___ 6.1.15 Remove and clean O-rings, replace if necessary.
__RP___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__RP___ 6.1.17 Wipe down all surfaces of the robot.
__RP___ 6.1.18 Clean end effector vacuum chuck air port.
__RP___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__RP___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__RP___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__RP___ 6.1.23 Check Neslab TCU for leaks.
__RP___ 6.1.24 Check Neslab TCU temperature readout.
__RP___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__RP___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__RP___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Found small pool of oil under Polish table. Cleaned and notified
Equip. Engineer.
6.1.20 N/A Point of use slurry filters no longer used.
Equip Eng notified
|
| 8.82 | WW 34 - Weekly completed | SUBPAC::LANDRY | | Sun Feb 16 1997 18:19 | 76 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:02-16-97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: Brendan Finn (BF)
James Sadin (JS)
Timothy Landry (TL)
INITIAL
__TL___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__TL___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__TL___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37
__BF___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BF___ 6.1.5 Check all tubing and fittings for leaks.
__BF___ 6.1.6 Check all tubing and fittings for air leaks.
__JS___ 6.1.7 Check all indicator lights.
TL/JS/BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__JS___ 6.1.9 Wipe down polish table, tub, and splash ring.
__JS___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__BF___ 6.1.11 Wipe down pad conditioning arm.
__BF___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BF___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__TL___ 6.1.14 Wipe down outer surface of both spindle hubs.
__JS___ 6.1.15 Remove and clean O-rings, replace if necessary.
__TL___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__TL___ 6.1.17 Wipe down all surfaces of the robot.
__TL___ 6.1.18 Clean end effector vacuum chuck air port.
__TL___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__BF___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BF___ 6.1.23 Check Neslab TCU for leaks.
__BF___ 6.1.24 Check Neslab TCU temperature readout.
__JS___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__JS___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__JS___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A Point of use slurry filters no longer used.
Equip Eng notified
A new pad and two new carriers were re-installed
|
| 8.83 | WW35 - weekly completed | FABSIX::J_SADIN | Freedom isn't free. | Sun Feb 23 1997 16:30 | 76 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:02-23-97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: Robert Gee (BG)
James Sadin (JS)
Timothy Landry (TL)
INITIAL
__JS___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__JS___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__JS___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42
__BG___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_BG__ 6.1.5 Check all tubing and fittings for leaks.
__BG___ 6.1.6 Check all tubing and fittings for air leaks.
__JS/TL/BG___ 6.1.7 Check all indicator lights.
TL/JS/BG 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
__TL___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__TL___ 6.1.11 Wipe down pad conditioning arm.
__BG___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__TL___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__JS___ 6.1.14 Wipe down outer surface of both spindle hubs.
__JS___ 6.1.15 Remove and clean O-rings, replace if necessary.
__BG___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__BG___ 6.1.17 Wipe down all surfaces of the robot.
__BG___ 6.1.18 Clean end effector vacuum chuck air port.
__BG___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_TL/JS___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__JS___ 6.1.23 Check Neslab TCU for leaks.
__JS___ 6.1.24 Check Neslab TCU temperature readout.
__TL___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BG___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__TL___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A Point of use slurry filters no longer used.
Equip Eng notified
A new pad and conditioner were installed.
|
| 8.84 | WW36 monthly pm completed | FABSIX::B_WESTPHAL | | Fri Mar 07 1997 19:25 | 182 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 3/6/97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Dave Whitford (DW)
3/7/97 Leon Shkolnikov (LS)
John Poirier (JP)
Brad Westphal (BW)
INITIAL
DW 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
DW 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 83
Post-adjust: 83
DW 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42
JP 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
JP 6.1.5 Check all tubing and fittings for leaks.
JP 6.1.6 Check all tubing and fittings for air leaks.
JP 6.1.7 Check all indicator lights.
JP 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
JP 6.1.9 Wipe down polish table, tub, and splash ring.
JP 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JP 6.1.11 Wipe down pad conditioning arm.
BW 6.1.12 Remove, rinse, and replace diamond conditioning disk.
BW 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
BW 6.1.14 Wipe down outer surface of both spindle hubs.
*1 BW 6.1.15 Remove and clean O-rings, replace if necessary.
JP 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
BW 6.1.17 Wipe down all surfaces of the robot.
BW 6.1.18 Clean end effector vacuum chuck air port.
BW 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
JP 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
N/A * 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
JP 6.1.23 Check Neslab TCU for leaks.
JP 6.1.24 Check Neslab TCU temperature readout.
JP 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
JP 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
JP 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
6.1.15 * 1 o-ring from each spindle was bad but we only had 1 spare
part w/ none in stock. shortage was filled out (06-12122-00)
6.1.20 The point of use slurry filters are no longer used.
6.1.22 The slurry pump hoses will be replaced and the pumps
recalibrated when the monthly portion of the pm is performed.
-------------------------------------------------------------------------------
-------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 3/7/97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: John Poirier (JP)
Brad Westphal (BW)
INITIAL
JP/BW 6.2.1 Perform weekly PM checks in addition to this monthly list.
* BW 6.2.2 Replace the fluid lines on the peristaltic pumps.
JP 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
JP/BW 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:__.0008__________
JP/BW 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:__.001__________
Left Spindlele Runout:__.001__________
JP/BW 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:_.001___________
Left Spindle Hub Runout:__.001__________
JP/BW 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: .8%
Right Spindle Force Error: .5%
Left Spindle Calibration Variable:
Pre-adjust: 148.5 Post-adjust: 148.5
Right Spindle Calibration Variable:
Pre-adjust: 149.62 Post-adjust: 156.31
JP 6.2.8 Check left and right load station alignment. Adjust if
necessary.
JP 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
JP 6.2.10 Check shuttle travel. Adjust if necessary.
6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
BW
Pre-adjust:_24.01v_____ Post-adjust:____N/A_____
6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
BW Pre-adjust:+15.01v/-15.02 Post-adjust:___N/A______
6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
BW Pre-adjust:_4.98v______ Post-adjust:____N/A_____
6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
BW Pre-adjust:_12.01___________ Post-adjust:____n/a________
JP 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
JP 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
JP 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
JP 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:_6.2.2 The pumps were recalibrated when the hoses were replaced.
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.85 | WW37 weekly pm complete | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 09 1997 11:18 | 83 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:03-09-97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: Robert Gee (BG)
James Sadin (JS)
Timothy Landry (TL)
Brendan Finn (BF)
INITIAL
__JS___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__JS___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__JS___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40
__BF___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_BG__ 6.1.5 Check all tubing and fittings for leaks.
__BG___ 6.1.6 Check all tubing and fittings for air leaks.
__JS/TL/BG/BF___ 6.1.7 Check all indicator lights.
TL/JS/BG/BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
__TL___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__TL___ 6.1.11 Wipe down pad conditioning arm.
__BG___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__TL___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__JS___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF___ 6.1.15 Remove and clean O-rings, replace if necessary.
__BG___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__BF___ 6.1.17 Wipe down all surfaces of the robot.
__BG___ 6.1.18 Clean end effector vacuum chuck air port.
__BG___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_TL/JS___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BF___ 6.1.23 Check Neslab TCU for leaks.
__BF___ 6.1.24 Check Neslab TCU temperature readout.
__TL___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BG___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__TL___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A Point of use slurry filters no longer used.
Equip Eng notified
A new pad was installed.
** - Found gear box oil leaking out of all gearbox bolts.
Checked gearbox oil level, drained 1/2 pint.
Tightened all lower gearbox bolts.
- tightened all exhaust bellows clamps.
|
| 8.86 | WW38 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 16 1997 16:50 | 82 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:03-16-97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: Robert Gee (BG)
James Sadin (JS)
Timothy Landry (TL)
Brendan Finn (BF)
INITIAL
__JS___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__JS___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__JS___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40
__BF___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_BG__ 6.1.5 Check all tubing and fittings for leaks.
__BG___ 6.1.6 Check all tubing and fittings for air leaks.
__JS/TL/BG/BF___ 6.1.7 Check all indicator lights.
TL/JS/BG/BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
__TL___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__TL___ 6.1.11 Wipe down pad conditioning arm.
__BG___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__TL___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__JS___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF___ 6.1.15 Remove and clean O-rings, replace if necessary.
__BG___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__BF___ 6.1.17 Wipe down all surfaces of the robot.
__BG___ 6.1.18 Clean end effector vacuum chuck air port.
__BG___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_TL/JS___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BF___ 6.1.23 Check Neslab TCU for leaks.
__BF___ 6.1.24 Check Neslab TCU temperature readout.
__TL___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BG___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__TL___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A Point of use slurry filters no longer used.
Equip Eng notified
A new pad, carriers and conditoner were installed.
a small puddle of oil was found under the motor/gearbox
coupling for the table. wiped clean and eng informed.
|
| 8.87 | WW39 Weekly PM completed | FABSIX::R_POIRIER | | Tue Mar 25 1997 07:01 | 84 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:03-25-97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: Roger Poirier (RP)
Mitch Ridlon (MR)
Al Quillen (AQ)
INITIAL
__RP___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__RP___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__RP___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 41
RP/MR/AQ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
RP/AQ/MR 6.1.5 Check all tubing and fittings for leaks.
__RP___ 6.1.6 Check all tubing and fittings for air leaks.
_RP/MR/AQ 6.1.7 Check all indicator lights.
__RP___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_AQ/RP_ 6.1.9 Wipe down polish table, tub, and splash ring.
__RP___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__RP___ 6.1.11 Wipe down pad conditioning arm.
_AQ/RP___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__RP___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__RP___ 6.1.14 Wipe down outer surface of both spindle hubs.
__RP___ 6.1.15 Remove and clean O-rings, replace if necessary.
__RP___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__RP___ 6.1.17 Wipe down all surfaces of the robot.
__RP___ 6.1.18 Clean end effector vacuum chuck air port.
__RP___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__RP___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__RP__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__RP___ 6.1.23 Check Neslab TCU for leaks.
__RP___ 6.1.24 Check Neslab TCU temperature readout.
__AQ___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__RP___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__RP___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A Point of use slurry filters no longer used.
Equip Eng notified
A new pad, and conditoner were installed.
a small puddle of oil was found under the motor/gearbox
coupling for the table. wiped clean and eng informed.
A large amount of water was found in lower drip pan.
Found a loose connector, tightened and drained the water.
|
| 8.88 | WW40 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 30 1997 16:15 | 77 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:03-30-97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: James Sadin
Brendan Finn
Timothy Landry
INITIAL
__JS___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__JS___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__JS___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42
_TL/BF_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_TL/BF_ 6.1.5 Check all tubing and fittings for leaks.
__JS___ 6.1.6 Check all tubing and fittings for air leaks.
_TL/JS_ 6.1.7 Check all indicator lights.
__BF__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
JS/BF/TL6.1.9 Wipe down polish table, tub, and splash ring.
_TL/BF_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__TL__ 6.1.11 Wipe down pad conditioning arm.
_JS___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__TL___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF___ 6.1.15 Remove and clean O-rings, replace if necessary.
__JS___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__JS___ 6.1.17 Wipe down all surfaces of the robot.
__TL___ 6.1.18 Clean end effector vacuum chuck air port.
__TL___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__JS__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_BF____ 6.1.23 Check Neslab TCU for leaks.
__BF___ 6.1.24 Check Neslab TCU temperature readout.
__TL___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BF___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__JS___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A Point of use slurry filters no longer used.
Equip Eng notified
A new pad, and conditoner were installed.
|
| 8.89 | WW41 monthly PM completed | FABSIX::J_SADIN | Freedom isn't free. | Tue Apr 08 1997 14:31 | 175 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:_04-08-97_ SYSTEM RTC CODE:_cmp.a2___ EQUIP. TECH.: brendan finn
james sadin
INITIAL
__js___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100__
Post-adjust:__100___
__js___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___85___
Post-adjust:__85____
__js___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__40____
__bf___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__bf___ 6.1.5 Check all tubing and fittings for leaks.
__bf___ 6.1.6 Check all tubing and fittings for air leaks.
__js___ 6.1.7 Check all indicator lights.
__js___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__js___ 6.1.9 Wipe down polish table, tub, and splash ring.
__js___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__bf___ 6.1.11 Wipe down pad conditioning arm.
__bf___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__bf___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__js___ 6.1.14 Wipe down outer surface of both spindle hubs.
__bf___ 6.1.15 Remove and clean O-rings, replace if necessary.
__js___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__js___ 6.1.17 Wipe down all surfaces of the robot.
__js___ 6.1.18 Clean end effector vacuum chuck air port.
__js___ 6.1.19 Inspect and clean end effector air nozzle.
__na___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__bf___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__bf___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__js___ 6.1.23 Check Neslab TCU for leaks.
__js___ 6.1.24 Check Neslab TCU temperature readout.
__bf___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__bf___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__bf___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:___6.1.12 - filters no longer in use______________________________
_____replaced 2.75" spindle o-ring on right spindle________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE:__04-08-97 SYSTEM RTC CODE:_cmp.a2___ EQUIP. TECH.:_brendan finn____
james sadin
INITIAL
__js/bf 6.2.1 Perform weekly PM checks in addition to this monthly list.
__bf___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__bf___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_js/bf_ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___<.001____
_js/bf_ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___<.001____ (adjusted from .004)
Left Spindle Runout:____<.001__
_js/bf_ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:___<.001____
Left Spindle Hub Runout:____<.001___
_js/bf_ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:__.18________
Right Spindle Force Error:___.61______
Left Spindle Calibration Variable:
Pre-adjust:___148.53___ Post-adjust:___153.14___
Right Spindle Calibration Variable:
Pre-adjust:__156.31____ Post-adjust:___155.70___
__js/bf 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_js/bf_ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
_js/bf_ 6.2.10 Check shuttle travel. Adjust if necessary.
__BF___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.00 vdc Post-adjust: 24.00 vdc
__BF___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.05 - 15.05 Post-adjust: + 15.05 -15.05
__BF___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.00 vdc Post-adjust: 5.00 vdc
__BF___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____12.05___ Post-adjust 12.05 vac
__js ___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__js___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__js___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__bf___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.90 | WW42 Weekly PM Checksheet | ASDG::POIRIER | | Thu Apr 17 1997 12:18 | 81 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:4/17/97_____ SYSTEM RTC CODE:CMP.A2____ EQUIP. TECH.:John Poirier JP
Mike Standing MS
INITIAL
_JP____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:_100____
Post-adjust:_100____
_JP____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:_85 ____
Post-adjust:_85_____
_JP____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:_42_____
_JP____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_JP____ 6.1.5 Check all tubing and fittings for leaks.
_JP____ 6.1.6 Check all tubing and fittings for air leaks.
_JP____ 6.1.7 Check all indicator lights.
_JP____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_JP____ 6.1.9 Wipe down polish table, tub, and splash ring.
_JP____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_JP____ 6.1.11 Wipe down pad conditioning arm.
_MS____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_MS____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_JP____ 6.1.14 Wipe down outer surface of both spindle hubs.
_JP____ 6.1.15 Remove and clean O-rings, replace if necessary.
_JP____ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
_ MS__ 6.1.17 Wipe down all surfaces of the robot.
___MS__ 6.1.18 Clean end effector vacuum chuck air port.
___MS__ 6.1.19 Inspect and clean end effector air nozzle.
___N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___JP__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___MS__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___MS__ 6.1.23 Check Neslab TCU for leaks.
___MS__ 6.1.24 Check Neslab TCU temperature readout.
___JP__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
JP_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__JP___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:N/A 6.1.20 Point of use slurry filters have been removed from
the tool.
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 8.91 | CMP.A2 WW43 WEEKLY PM COMPLETED | FABSIX::J_SADIN | Freedom isn't free. | Sun Apr 20 1997 09:53 | 81 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:04/20/97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: BRENDAN FINN
JAMES SADIN
TIMOTHY LANDRY
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS * 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 PSI
TL 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
TL 6.1.5 Check all tubing and fittings for leaks.
BF 6.1.6 Check all tubing and fittings for air leaks.
BF 6.1.7 Check all indicator lights.
BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
JS 6.1.9 Wipe down polish table, tub, and splash ring.
JS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JS 6.1.11 Wipe down pad conditioning arm.
BF 6.1.12 Remove, rinse, and replace diamond conditioning disk.
JS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
TL 6.1.14 Wipe down outer surface of both spindle hubs.
TL 6.1.15 Remove and clean O-rings, replace if necessary.
BF 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
JS 6.1.17 Wipe down all surfaces of the robot.
JS 6.1.18 Clean end effector vacuum chuck air port.
JS 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
JS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
TL/JS 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BF 6.1.23 Check Neslab TCU for leaks.
BF 6.1.24 Check Neslab TCU temperature readout.
TL 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BF 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* 6.1.3 System unable to reach 40 PSI, Equip Eng notified.
N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
* found small puddle of oil under motor/gearbox mating point. cleaned
up.
|
| 8.92 | CMP.A2 WW44 WEEKLY PM COMPLETED. | FABSIX::J_SADIN | Freedom isn't free. | Sun Apr 27 1997 16:01 | 84 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:04/27/97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: Bob Gee
Timothy Landry
James Sadin
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS * 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 PSI
TL 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
TL 6.1.5 Check all tubing and fittings for leaks.
BG 6.1.6 Check all tubing and fittings for air leaks.
BG 6.1.7 Check all indicator lights.
BG 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
JS 6.1.9 Wipe down polish table, tub, and splash ring.
JS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JS 6.1.11 Wipe down pad conditioning arm.
BG 6.1.12 Remove, rinse, and replace diamond conditioning disk.
JS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
TL 6.1.14 Wipe down outer surface of both spindle hubs.
TL 6.1.15 Remove and clean O-rings, replace if necessary.
BG 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
JS 6.1.17 Wipe down all surfaces of the robot.
JS 6.1.18 Clean end effector vacuum chuck air port.
JS 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
JS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
TL/JS 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BG 6.1.23 Check Neslab TCU for leaks.
BG 6.1.24 Check Neslab TCU temperature readout.
TL 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BG 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* 6.1.3 System unable to reach 40 PSI, Equip Eng notified.
N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
* found small puddle of oil under motor/gearbox mating point. cleaned
up.
* lots of bridge oil under polish table. cleaned up and refilled oil
reservoir.
|
| 8.93 | Monthy PM for WW45 completed | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 09 1997 03:56 | 164 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 05.09.97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Leon Shkolnikov ls
INITIAL
__ls__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100__
Post-adjust:__100__
__ls__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___85___
Post-adjust:__85___
__ls__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__40__
__ls__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__ls__ 6.1.5 Check all tubing and fittings for leaks.
__ls__ 6.1.6 Check all tubing and fittings for air leaks.
__ls__ 6.1.7 Check all indicator lights.
__ls__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__ls__ 6.1.9 Wipe down polish table, tub, and splash ring.
__ls__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__ls__ 6.1.11 Wipe down pad conditioning arm.
__ls___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__ls___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__ls___ 6.1.14 Wipe down outer surface of both spindle hubs.
__ls___ 6.1.15 Remove and clean O-rings, replace if necessary.
__ls___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__ls___ 6.1.17 Wipe down all surfaces of the robot.
__ls___ 6.1.18 Clean end effector vacuum chuck air port.
__ls___ 6.1.19 Inspect and clean end effector air nozzle.
__**___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__ls___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__ls___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__ls___ 6.1.23 Check Neslab TCU for leaks.
__ls___ 6.1.24 Check Neslab TCU temperature readout.
__ls___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__ls___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__ls___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: ** Not in use any more. EE notified.
___________________________________________________________________________
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 05.09.97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Leon Shkolnikov ls
Brian Jubinville BJ
INITIAL
__ls__ 6.2.1 Perform weekly PM checks in addition to this monthly list.
__ls__ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__ls__ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__ls__ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: <.001
__ls__ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: <.001
Left Spindle Runout: <.001
bj/ls 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: .001
Left Spindle Hub Runout: pre: .005 post: 0005
bj 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: pre: -8.38 post: -.9
Right Spindle Force Error: pre: -11.61 post: .15
Left Spindle Calibration Variable:
Pre-adjust: 153.14 Post-adjust: 161.52
Right Spindle Calibration Variable:
Pre-adjust: 155.7 Post-adjust: 163.91
__ls__ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
__ls__ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__ls__ 6.2.10 Check shuttle travel. Adjust if necessary.
__ls__ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 23.98 vdc Post-adjust: 23.98 vdc
__ls__ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +/-15.01 Post-adjust: +/-15.01
__ls__ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.00 vdc Post-adjust: 5.00 vdc
__ls__ 6.2.17 Check the ~ 12 Volt power supply. Calibrate if necessary.
Pre-adjust: 12.05 Post-adjust 12.05 vac
__ls__ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__ls___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__ls___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__ls___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
|
| 8.94 | ww46 weekly p.m. completed | FABSIX::R_GEE | | Tue May 13 1997 17:45 | 77 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:05/13/97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: Bob Gee
Timothy Landry
James Sadin
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 PSI
TL 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
TL 6.1.5 Check all tubing and fittings for leaks.
BG 6.1.6 Check all tubing and fittings for air leaks.
BG 6.1.7 Check all indicator lights.
BG 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
TL 6.1.9 Wipe down polish table, tub, and splash ring.
JS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JS 6.1.11 Wipe down pad conditioning arm.
BG 6.1.12 Remove, rinse, and replace diamond conditioning disk.
JS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
TL 6.1.14 Wipe down outer surface of both spindle hubs.
TL 6.1.15 Remove and clean O-rings, replace if necessary.
BG 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
JS 6.1.17 Wipe down all surfaces of the robot.
JS 6.1.18 Clean end effector vacuum chuck air port.
JS 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
JS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
TL/JS 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BG 6.1.23 Check Neslab TCU for leaks.
BG 6.1.24 Check Neslab TCU temperature readout.
TL 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BG 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 8.95 | ww47 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Sun May 18 1997 10:38 | 77 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:05/18/97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: Bob Gee
Dave Whitford
James Sadin
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 PSI
DW 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
DW 6.1.5 Check all tubing and fittings for leaks.
BG 6.1.6 Check all tubing and fittings for air leaks.
BG 6.1.7 Check all indicator lights.
BG 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
DW 6.1.9 Wipe down polish table, tub, and splash ring.
JS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JS 6.1.11 Wipe down pad conditioning arm.
BG 6.1.12 Remove, rinse, and replace diamond conditioning disk.
JS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
DW 6.1.14 Wipe down outer surface of both spindle hubs.
DW 6.1.15 Remove and clean O-rings, replace if necessary.
BG 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
JS 6.1.17 Wipe down all surfaces of the robot.
JS 6.1.18 Clean end effector vacuum chuck air port.
JS 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
JS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
DW/JS 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BG 6.1.23 Check Neslab TCU for leaks.
BG 6.1.24 Check Neslab TCU temperature readout.
DW 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
DW 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BG 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 8.96 | ww48 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 09:21 | 81 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:05/25/97 SYSTEM RTC CODE: CMP.A2 EQUIP TECH: James Sadin
Bob Gee
Tim Landry
Brendan Finn
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 PSI
BG 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
BG/TL 6.1.5 Check all tubing and fittings for leaks.
BG/TL 6.1.6 Check all tubing and fittings for air leaks.
BF 6.1.7 Check all indicator lights.
BG/TL 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
TL/BF 6.1.9 Wipe down polish table, tub, and splash ring.
TL/JS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
BF/BG 6.1.11 Wipe down pad conditioning arm.
TL 6.1.12 Remove, rinse, and replace diamond conditioning disk.
TL/JS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
BF/JS 6.1.14 Wipe down outer surface of both spindle hubs.
TL/BG 6.1.15 Remove and clean O-rings, replace if necessary.
JS/TL 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
BG 6.1.17 Wipe down all surfaces of the robot.
BG/TL 6.1.18 Clean end effector vacuum chuck air port.
BG 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
BG/JS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
JS/BG 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BG/JS 6.1.23 Check Neslab TCU for leaks.
BG/JS 6.1.24 Check Neslab TCU temperature readout.
TL/BG 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
BG/TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BF/BG 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 8.97 | CMP.A2 SHUTDOWN AND STARTUP CHECKSHEETS | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 10:04 | 84 |
|
CMP.A2
CMP.A1 & CMP.A2 SHUTDOWN CHECKSHEET FOR 5/26/97
-----------------------------------------------
AL QUILLEN (AQ)
BRUCE DURGIN (BD)
ROGER POIRIER (RP)
Tech. Date
------- -------
1. Change Workstream tool status to NON-SCHEDULED
DOWN. If Workstream will not let the tools go
to NON-SCHEDULED, leave the tools at UP IDLE.
DO NOT put any tools to SCHEDULED or UNSCHEDULED RP 5-26
DOWN. _______ _______
2. Remove all wafer carriers. Do not re-use.
Ensure that there are a sufficient ammount AQ,BD 5-26
of re-built carriers to support the startup. _______ _______
3. Remove all wafer cassettes and drain Send BD,AQ 5-26
and Receive DI Water tanks. _______ _______
AQ,BD 5-26
4. Purge both slurry lines with DI Water. _______ _______
AQ,BD 5-26
5. Remove and discard all polishing pads. _______ _______
6. Remove all PVA scrub brushes and submerge AQ,BD 5-26
in a mixture of DI water and H2O2. _______ _______
7. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry BD,AQ 5-26
all wet surfaces. _______ _______
8. Rotate main incoming DI Water valves 180 deg. AQ,BD 5-26
so that all DI water is flowing to UDR. _______ _______
AQ,BD 5-26
9. Power down each system. _______ _______
AQ,BD 5-26
10. Power down each vacuum pump cabinet. _______ _______
AQ,BD 5-26
11. Power down each Neslab TCU. _______ _______
12. Enter checksheet into CMP Notesfile. RP 5-26
------- -------
CMP.A1 & CMP.A2 STARTUP CHECKSHEET FOR 5/27
-------------------------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are js/tl/bg 5/27
available and ready to use. _______ _______
js/tl/bg 5/27
2. Power up each system. _______ _______
js/tl/bg 5/27
3. Power up each vacuum pump cabinet. _______ _______
js/tl/bg 5/27
4. Power up each Neslab TCU. _______ _______
5. Rotate main incoming DI Water valves 180 deg. js/tl/bg 5/27
so that all DI water is flowing into the tool _______ _______
6. Place cassettes in left and right send js/tl/bg 5/27
and receive stations to fill DI Water
tanks. _______ _______
js/tl/bg 5/27
7. Install new polishing pads. _______ _______
js/tl/bg 5/27
8. Install new wafer carriers. _______ _______
js/tl/bg 5/27
9. Re-install PVA scrub brushes. _______ _______
js/tl/bg 5/27
10. Perform polish pad breakin. _______ _______
11. Notify Operations that the systems are ready js/tl/bg 5/27
MQC's. _______ _______
js/tl/bg 5/27
12. Enter checksheet into notesfile.
|
| 8.98 | ww49 Annual p.m. completed | FABSIX::R_GEE | | Sun Jun 01 1997 14:38 | 213 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Annual Preventive Maintenance Check Sheet, REV. C
DATE: 6-1-97 SYSTEM RTC CODE: CMP.A2 SHIFT(S): Bob Gee (BG)
Tim Landry (TL)
Jim Sadin (JS)
Brendan Finn (BF)
INITIAL
BF/BG/JS/TL 6.4.1 Perform Weekly, Monthly, and Semi-Annual PM's in addition to
this Annual list
_TL___ 6.4.2 Perform Bridge Position calibration.
_BF___ 6.4.3 Check Robot Position Alignment. Calibrate if necessary.
_JS___ 6.4.4 Check Robot Travel position. Adjust if necessary.
_BG___ 6.4.5 Check Robot Arm position. Adjust if necessary.
_TL___ 6.4.6 Check Elevator Height position. Adjust if necessary.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Semi-annual Preventive Maintenance Check Sheet, REV. C
INITIAL
BF/BG/JS/TL 6.3.1 Perform Weekly and Monthly PM's in addition to this Semi-Annual
list.
_BG___ 6.3.2 Check all safety interlocked doors for proper operation.
_BF___ 6.3.2 Check all EMO's for proper operation.
_BG/TL_ 6.3.3 Change oil in the brush rotation gear box using AGMA #8 or
equivalent oil.
__BG__ 6.3.4 Change oil in the left and right spindle gear boxes using AGMA
#8 or equivalent oil.
__BG__ 6.3.5 Change oil in the polish table gear box using AGMA #8 or
equivalent oil.
Comments: 6.3.3, 6.3.4, 6.3.5 Checked oil levels only per. EE.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE:__6-1-97_ SYSTEM RTC CODE:CMP.A2 EQUIP. TECH.: Bob Gee (BG)
Tim Landry (TL)
Jim Sadin (JS)
Brendan Finn (BF)
INITIAL
BF/BG/JS/TL 6.2.1 Perform weekly PM checks in addition to this monthly list.
_JS___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__BF__ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_BF/BG_ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___ .00075 _________
_BF/BG/JS/TL_ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___ .001 _________
Left Spindlele Runout:__ .001 __________
_BG/JS_ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:___ .001 _________
Left Spindle Hub Runout:___ .001 _________
BF/BG/JS/TL 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:___1.78_________
Right Spindle Force Error:__.04______
Left Spindle Calibration Variable:
Pre-adjust:____1.06_______ Post-adjust:____1.05_______
Right Spindle Calibration Variable:
Pre-adjust:____1.06________ Post-adjust:___1.05_________
_JS___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_BG___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
_BF___ 6.2.10 Check shuttle travel. Adjust if necessary.
__TL__ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____23.97____ Post-adjust:_____23.99___
__TL__ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___ -15.01 __ Post-adjust:__ -15.01 ___
Pre-adjust:___ +15.00 __ Post-adjust:__ +15.00 ___
__TL__ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:____4.99____ Post-adjust:____4.99____
__TL__ 6.2.17 Check the ~ 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___11.82___ Post-adjust:____11.82________
__JS__ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__JS__ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__JS__ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__JS__ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
Comments: 6.2.17 There is no adjustment for this item. The reading is
for reference ONLY. EE has been notified
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 6-1-97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: Bob Gee (BG)
Tim Landry (TL)
Jim Sadin (JS)
Brendan Finn (BF)
INITIAL
__BF__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__BF__ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 82 psi
Post-adjust:_N/A____
__BF__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 43 psi
__BG__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BG__ 6.1.5 Check all tubing and fittings for leaks.
__JS__ 6.1.6 Check all tubing and fittings for air leaks.
__JS__ 6.1.7 Check all indicator lights.
BG/JS/BF/TL 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__JS__ 6.1.9 Wipe down polish table, tub, and splash ring.
__JS__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__BG__ 6.1.11 Wipe down pad conditioning arm.
__BG__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BG__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF__ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF__ 6.1.15 Remove and clean O-rings, replace if necessary.
__TL__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__TL__ 6.1.17 Wipe down all surfaces of the robot.
__TL__ 6.1.18 Clean end effector vacuum chuck air port.
__TL__ 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_JS__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_BG/JS_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__JS__ 6.1.23 Check Neslab TCU for leaks.
__JS__ 6.1.24 Check Neslab TCU temperature readout.
__TL__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__TL__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__TL__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
Comments: 6.1.20 no point of use slurry filters.
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