| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 6.1 | Weekly PM Checksheet Template | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 08 1995 20:59 | 78 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:__________ SYSTEM RTC CODE:__________ EQUIP. TECH.:_______________
INITIAL
_______ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:________
Post-adjust:________
_______ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:________
Post-adjust:________
_______ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:________
_______ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_______ 6.1.5 Check all tubing and fittings for leaks.
_______ 6.1.6 Check all tubing and fittings for air leaks.
_______ 6.1.7 Check all indicator lights.
_______ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_______ 6.1.9 Wipe down polish table, tub, and splash ring.
_______ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_______ 6.1.11 Wipe down pad conditioning arm.
_______ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_______ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_______ 6.1.14 Wipe down outer surface of both spindle hubs.
_______ 6.1.15 Remove and clean O-rings, replace if necessary.
_______ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
_______ 6.1.17 Wipe down all surfaces of the robot.
_______ 6.1.18 Clean end effector vacuum chuck air port.
_______ 6.1.19 Inspect and clean end effector air nozzle.
_______ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_______ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_______ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_______ 6.1.23 Check Neslab TCU for leaks.
_______ 6.1.24 Check Neslab TCU temperature readout.
_______ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_______ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_______ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.2 | Monthly PM Checksheet Template | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 08 1995 21:01 | 94 |
| Note 57.2 (CMP.A1) PM CHECKSHEETS 2 of 21
SUBPAC::TOOKER 90 lines 13-JUL-1995 14:52
-< Monthly PM Checksheet Template >-
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE:__________ SYSTEM RTC CODE:__________ EQUIP. TECH.:_________________
INITIAL
_______ 6.2.1 Perform weekly PM checks in addition to this monthly list.
_______ 6.2.2 Replace the fluid lines on the peristaltic pumps.
_______ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_______ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:____________
_______ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:____________
Left Spindlele Runout:____________
_______ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:____________
Left Spindle Hub Runout:____________
_______ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:____________
Right Spindle Force Error:____________
Left Spindle Calibration Variable:
Pre-adjust:____________ Post-adjust:____________
Right Spindle Calibration Variable:
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_______ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
_______ 6.2.10 Check shuttle travel. Adjust if necessary.
_______ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
_______ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
_______ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
_______ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.3 | Semi-annual PM Checksheet Template | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 08 1995 21:05 | 32 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Semmi-annual Preventive Maintenance Check Sheet, REV. C
INITIAL
_______ 6.3.1 Perform Weekly and Monthly PM's in addition to this Semi-Annual
list.
_______ 6.3.2 Check all safety interlocked doors for proper operation.
_______ 6.3.2 Check all EMO's for proper operation.
_______ 6.3.3 Change oil in the brush rotation gear box using AGMA #8 or
equivalent oil.
_______ 6.3.4 Change oil in the left and right spindle gear boxes using AGMA
#8 or equivalent oil.
_______ 6.3.5 Change oil in the polish table gear box using AGMA #8 or
equivalent oil.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.4 | Annual PM Checksheet Template | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 08 1995 21:06 | 27 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Annual Preventive Maintenance Check Sheet, REV. C
INITIAL
_______ 6.4.1 Perform Weekly, Monthly, and Semi-Annual PM's in addition to
this Annual list
_______ 6.4.2 Perform Bridge Position calibration.
_______ 6.4.3 Check Robot Position Alignment. Calibrate if necessary.
_______ 6.4.4 Check Robot Travel position. Adjust if necessary.
_______ 6.4.5 Check Robot Arm position. Adjust if necessary.
_______ 6.4.6 Check Elevator Height position. Adjust if necessary.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.5 | A1 MONTHLY COMPLETED FOR 11/15 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Nov 17 1995 02:08 | 95 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 11/15/95 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: D SHIFT
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___X___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___X___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: >.001
___X___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: >.001
Left Spindlele Runout: >.001
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: >.001
Left Spindle Hub Runout: >.001
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: DONE AND RECORDED BY C SHIFT
LAST WEEK
Right Spindle Force Error: DONE AND RECORDED BY C SHIFT
Left Spindle Calibration Variable:
Pre-adjust: DONE AND RECORDED BY C SHIFT
LAST WEEK
Right Spindle Calibration Variable:
Pre-adjust: DONE AND RECORDED BY C SHIFT
LAST WEEK
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.0V Post-adjust:____________
___X___ 6.2.15 Check the -15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: -14.9V Post-adjust: -15.0V
___X___ 6.2.16 Check the +15 Volt Power Supply. Calibrate if necessary
Pre-adjust: 14.6V Post-adjust: 15.0V
_N/A___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
___X___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.6 | Weekly PM completed | SUBPAC::LANDRY | | Sat Nov 25 1995 18:17 | 74 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11/25/95 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: JP / Doc
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: N/A
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 86
Post-adjust: N/A
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: A piece of the DI water gun tubing was severly kinked. Cut out
bad section and re-attached gun.
Tightened up the conditioner air cylinder jam nut.
|
| 6.7 | WEEKLY PM FOR 11/28 COMPLETED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Tue Nov 28 1995 22:33 | 78 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11/28/95 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Leon & BJ
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 psi
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.8 | WEEKLY P.M. | FABSIX::R_GEE | | Mon Dec 04 1995 23:52 | 78 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 12/05/95 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: BG/MR
INITIAL
__x____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
__x____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:________
__x____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 psi
__x____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__x____ 6.1.5 Check all tubing and fittings for leaks.
__x____ 6.1.6 Check all tubing and fittings for air leaks.
__x____ 6.1.7 Check all indicator lights.
__x____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__x____ 6.1.9 Wipe down polish table, tub, and splash ring.
__x____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__x____ 6.1.11 Wipe down pad conditioning arm.
__x____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
Conditioning disk was replaced 12/3/95
__x____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__x____ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
__X____ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.9 | weekly p.m. | FABSIX::R_GEE | | Sun Dec 10 1995 01:54 | 78 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 12/10/95 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: BG/MR
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85 psi
Post-adjust:________
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 psi
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.11 | No PM necessary for WW26 FY96 | SUBPAC::TOOKER | | Thu Dec 21 1995 15:04 | 6 |
| Due to the scheduled FAB6 shutdown for Work Week 26 Fiscal Year 1996, no PM will be performed
on CMP.A1
Jim Tooker
CMP Equipment Engineer
|
| 6.12 | A1 MONTHLY PM COMPLETED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 22 1995 05:33 | 86 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 12/19-21/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: B and D shift
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___X___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___X___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: .002
___X___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: .001
Left Spindle Runout: .001
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: .0005
Left Spindle Hub Runout: .001
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: 1.28
Right Spindle Force Error: -1.46
Left Spindle Dead Weight Variable:
Pre-adjust: 150.26 Post-adjust: 169.52
Right Spindle Calibration Variable: 146.27
Pre-adjust: 142.37 Post-adjust:
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.01V Post-adjust:____________
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.01V/-15.0V Post-adjust:____________
___X___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5V Post-adjust:____________
__N/A__ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
___X___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS: Slurry filters weren't changed due slurry purge this weekend.
TCU auto-fill looked at. Running but auto-fill still off
line until it can be further investigated.
|
| 6.13 | CMP.A1 - WW27 - WEEKLY PM CHECKSHEET | ASDG::POIRIER | | Sat Jan 06 1996 16:59 | 92 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
Week Ending 1-6-96 WW27
DATE: 1-6-9 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: JP & BW
INITIAL
__BW___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__BW___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85 psi
Post-adjust:_N/A____
__BW___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38 psi
__BW___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BW___ 6.1.5 Check all tubing and fittings for leaks.
__BW___ 6.1.6 Check all tubing and fittings for air leaks.
__JP___ 6.1.7 Check all indicator lights.
__JP___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__JP___ 6.1.9 Wipe down polish table, tub, and splash ring.
__JP___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__JP___ 6.1.11 Wipe down pad conditioning arm.
__JP___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
(See Comment "D")
__JP___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__JP___ 6.1.14 Wipe down outer surface of both spindle hubs.
__JP___ 6.1.15 Remove and clean O-rings, replace if necessary.
__JP___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__JP___ 6.1.17 Wipe down all surfaces of the robot.
__BW___ 6.1.18 Clean end effector vacuum chuck air port.
__BW___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
(See Comment "C")
__JP___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__JP___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BW___ 6.1.23 Check Neslab TCU for leaks.
__BW___ 6.1.24 Check Neslab TCU temperature readout.
__JP___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
(See Comment "A)"
__JP___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
(See Comment "B)"
__JP___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENT: A) The Robot Lead Screw was lubricated with Mobil Velocite #6 oil
as recommended by Strasbaugh.
B) All Elevator Lead Screws were lubricated with Permatex Industrial
"Super Lube". This Multi-Purpose Synthetic Lubricant lasts longer
and does not cake-up like the NSK #2 grease. Please update spec on
the next rev.
C) The point-of use slurry filter is being removed per EE
instructions. Please update the spec on next rev.
D) The Conditioning Disk was replaced on "D" Shift last night
due to exessive wear. See note 3.9
|
| 6.14 | WW 28 - Weekly | SUBPAC::LANDRY | | Sun Jan 07 1996 10:47 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 1-7-96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: Landry
INITIAL
__TL___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__TL___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:_N/A____
__TL___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 34 psi
__TL___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__TL___ 6.1.5 Check all tubing and fittings for leaks.
__TL___ 6.1.6 Check all tubing and fittings for air leaks.
__TL___ 6.1.7 Check all indicator lights.
__TL___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
__TL___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__TL___ 6.1.11 Wipe down pad conditioning arm.
__TL___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__TL___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__TL___ 6.1.14 Wipe down outer surface of both spindle hubs.
__TL___ 6.1.15 Remove and clean O-rings, replace if necessary.
__TL___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__TL___ 6.1.17 Wipe down all surfaces of the robot.
__TL___ 6.1.18 Clean end effector vacuum chuck air port.
__TL___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__TL___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__TL___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__TL___ 6.1.23 Check Neslab TCU for leaks.
__TL___ 6.1.24 Check Neslab TCU temperature readout.
__TL___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__TL___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__TL___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.15 | monthly PM waived | SUBPAC::TOOKER | | Fri Jan 19 1996 10:25 | 7 |
| Due to robot and software upgrade causing excessive down time this week, the
monthly PM scheduled to take place this week will not be performed. Instead,
a weekly PM has been performed and the monthly PM will be re-scheduled for next
week.
Thanks,
Jim Tooker
|
| 6.16 | monthly delayed, weekly performed | FABSIX::B_FINN | | Fri Jan 19 1996 12:21 | 73 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
Week Ending 1-20-96 WW29
DATE: 1-18-96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: A+D shift
INITIAL TL= Tim Landry BJ= Brian Jubinville
__TL___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__TL___ 6.1.2 N2 pressure @ 87 PSI: Pre-adjust: 90 psi
Post-adjust:_N/A____
__TL___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 35 psi
__TL___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__TL___ 6.1.5 Check all tubing and fittings for leaks.
__TL___ 6.1.6 Check all tubing and fittings for air leaks.
__TL___ 6.1.7 Check all indicator lights.
__TL___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
__TL___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__TL___ 6.1.11 Wipe down pad conditioning arm.
__TL___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__TL___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__TL___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BJ___ 6.1.15 Remove and clean O-rings, replace if necessary.
__TL___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__TL___ 6.1.17 Wipe down all surfaces of the robot.
__TL___ 6.1.18 Clean end effector vacuum chuck air port.
__TL___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__TL___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__TL___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__TL___ 6.1.23 Check Neslab TCU for leaks.
__TL___ 6.1.24 Check Neslab TCU temperature readout.
__TL___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__TL___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__TL___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Slurry pump 1 was adjusted, was on the low side.
|
| 6.17 | A1 MONTHLY COMPLETED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 25 1996 00:37 | 85 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 1/26/95 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: A, C and D shifts
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___X____ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___X___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___0.001"________
___X____ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:____.002"________
Left Spindle Runout:_____.004"_________
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:_____0.0005"_______
Left Spindle Hub Runout:______0.001______
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: -.97
Right Spindle Force Error: .84
Left Spindle Calibration Variable:
Pre-adjust: 169.52 Post-adjust: N/C
Right Spindle Calibration Variable:
Pre-adjust: 146.27 Post-adjust: 165.83
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X____ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____24.04v_ Post-adjust:_same_____
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust:_15.02v____ Post-adjust:_same______
___X____ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:__5.06v__________ Post-adjust:_same______
___N/A____ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:__N/A______ Post-adjust:__N/A____
*__X____ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X____ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS: Resevoir is 2/3 full.
|
| 6.18 | A1 WEEKLY PM COMPLETED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Feb 01 1996 05:40 | 72 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 2/1/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: BJ
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:________
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 35 psi
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_______ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: found 1/8"line on end effector split, looks like the problem
vacuum.
|
| 6.19 | weekly ww32 | STRATA::RIDLON | Eliminate the obvious | Sun Feb 04 1996 01:33 | 70 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 2/4/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: B-shift
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:________
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 34 psi
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_______ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Replaced the 2.75X150 orings on both hubs.
|
| 6.20 | Monthly | SUBPAC::LANDRY | | Wed Feb 14 1996 08:30 | 93 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 02-13-96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Doc / Jim T
INITIAL
__TL___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
__TL___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__TL___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__TL____ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:__ .001 ___
__TL____ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___ .002 ___
Left Spindle Runout:__ .001 ____
__TL____ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:__ .001 _____
Left Spindle Hub Runout:__ .001 _____
_JT/TL_ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: -1.56
Right Spindle Force Error: 0.6
Left Spindle Calibration Variable:
Pre-adjust: 166.87 Post-adjust: 165.04
Right Spindle Calibration Variable:
Pre-adjust: 167.82 Post-adjust: 167.84
__TL___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
__TL___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__TL___ 6.2.10 Check shuttle travel. Adjust if necessary.
__TL___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___24.03____ Post-adjust:___N/A______
__TL___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.02/-15.12 Post-adjust:__ -15.00 ______
__TL___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:__5.14______ Post-adjust:___5.01______
__TL___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___N/A______ Post-adjust:___N/A______
__TL___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__TL___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__TL___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__TL___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS: * Added ~1/2 gallon of fluid to TCU
* Cleaned up some oil in the drip pan. The oil is from the
"oiler", NOT the gear box oil.
* Found and replaced a broken plastic fitting on Slurry Pump
# 1. It was found broken off where it would normally enter
the teflon block. The only thing holding it in place was a
large buildup of hardened slurry.
* A new pad and 2 new carriers were installed after this PM.
|
| 6.21 | Weekly | FABSIX::L_SHKOLNIKOV | | Thu Feb 22 1996 22:18 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:_02.22.96_ SYSTEM RTC CODE:_CMP.A1_ EQUIP. TECH.:_B.J. LEON_
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:________
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___85___
Post-adjust:________
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___35___
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
|
| 6.22 | ww35 weekly p.m. | FABSIX::R_GEE | | Sun Feb 25 1996 22:02 | 72 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 02/26/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: B shift
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:_85_____
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36 psi Max.
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
Found the polish table exhaust full of water / slurry (3gls +)
drained and cleaned.
|
| 6.23 | ww36 weekly p.m. | FABSIX::R_GEE | | Sun Mar 03 1996 00:03 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 03/03/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: B shift
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:_85_____
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 35 psi Max.
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.24 | weekly p.m. | FABSIX::R_GEE | | Mon Mar 11 1996 21:33 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 03/11/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: B shift
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:__98_____
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 90 psi
Post-adjust:_86_____
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 34
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
replaced the carriers and pad due to poor uniformity.
|
| 6.25 | Semi-Annual complete.....A & B shift | SUBPAC::LANDRY | | Tue Mar 19 1996 18:03 | 192 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 3-18-96 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH: A & B shifts
INITIAL
_TL/BF_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
_TL/BF_ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 87 psi
Post-adjust:_N/A____
_TL/BF_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42 psi
_TL/BF_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_TL/BF_ 6.1.5 Check all tubing and fittings for leaks.
_TL/BF_ 6.1.6 Check all tubing and fittings for air leaks.
_TL/BF_ 6.1.7 Check all indicator lights.
__TL___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
__TL___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__TL___ 6.1.11 Wipe down pad conditioning arm.
__TL___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__TL___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__TL___ 6.1.14 Wipe down outer surface of both spindle hubs.
_TL/BF_ 6.1.15 Remove and clean O-rings, replace if necessary.
__TL___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__TL___ 6.1.17 Wipe down all surfaces of the robot.
__TL___ 6.1.18 Clean end effector vacuum chuck air port.
__TL___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_TL/BF_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__TL___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_TL/BF_ 6.1.23 Check Neslab TCU for leaks.
_TL/BF_ 6.1.24 Check Neslab TCU temperature readout.
__TL___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__TL___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__TL___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 3/18/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: A & B Shift
INITIAL
__TL___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
_TL/BF_ 6.2.2 Replace the fluid lines on the peristaltic pumps.
_TL/BF_ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_TL/BF_ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:__ .001 ___
_TL/BF_ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___ .0005" (was .009")___
Left Spindle Runout:__ .0015" ____
_TL/BF_ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:__.001 _____
Left Spindle Hub Runout:__ .001 _____
_A / B_ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: -0.96
Right Spindle Force Error: -1.96
Left Spindle Calibration Variable:
Pre-adjust: 165.04 Post-adjust: 155.07
Right Spindle Calibration Variable:
Pre-adjust: 167.31 Post-adjust: 156.18
__TL___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
__JT___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__TL___ 6.2.10 Check shuttle travel. Adjust if necessary.
_TL/BF_ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:__24.03______ Post-adjust:__24.03_______
_TL/BF_ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust:__15.0______ Post-adjust:__15.0______
_TL/BF_ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:__4.99_______ Post-adjust:___4.99________
__N/A__ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___N/A______ Post-adjust:___N/A______
_TL/BF_ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
_TL/BF_ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
_TL/BF_ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
_TL/BF_ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Semmi-annual Preventive Maintenance Check Sheet, REV. C
DATE: 3-19-96 SYSTEM: CMP.A1 TECHS: B Shift
INITIAL
__TL___ 6.3.1 Perform Weekly and Monthly PM's in addition to this Semi-Annual
list.
_RP/MR_ 6.3.2 Check all safety interlocked doors for proper operation.
_RP/MR_ 6.3.2 Check all EMO's for proper operation.
_RP/MR_ 6.3.3 Change oil in the brush rotation gear box using AGMA #8 or
equivalent oil.
__N/A__ 6.3.4 Change oil in the left and right spindle gear boxes using AGMA
#8 or equivalent oil.
__N/A__ 6.3.5 Change oil in the polish table gear box using AGMA #8 or
equivalent oil.
COMMENTS:__________________________________________________________________
Oil level in left and right spindles looked ok. We didn't change it
___________________________________________________________________________
Oil in Conditioner gear box was changed because it was very dirty.
___________________________________________________________________________
Oil level in polish table was ok.
___________________________________________________________________________
___________________________________________________________________________
|
| 6.26 | WW39 Weekly PM | FABSIX::R_POIRIER | | Wed Mar 27 1996 06:50 | 72 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 03/27/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: B shift
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:__N/A____
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 84 psi
Post-adjust:_N/A_____
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 35
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
replaced the carriers and pad due wafer crash.
|
| 6.27 | ww40 Weekly p.m. | FABSIX::R_GEE | | Tue Apr 02 1996 03:14 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 04/02/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: B shift
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_______
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85 psi
Post-adjust:_______
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 44
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
replaced the carriers and pad due to engineering work.
Filled the bridge fluid.
|
| 6.28 | Weekly PM for WW41 completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Mon Apr 08 1996 10:27 | 69 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 04/08/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: A shift
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_______
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85 psi
Post-adjust:_______
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.29 | ww42 monthly completed | FABSIX::B_FINN | | Mon Apr 15 1996 19:55 | 178 |
| -< Monthly PM Checksheet Template >-
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE:4/15/95 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: A SHIFT
INITIAL
_BF/TL_ 6.2.1 Perform weekly PM checks in addition to this monthly list.
_BF/TL_ 6.2.2 Replace the fluid lines on the peristaltic pumps.
_BF/TL_ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_BF/TL_ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:__+0.001______
_BF/TL__ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___was 0.006 adj to 0.001_________
Left Spindlele Runout:__0.001__________
_BF/TL__ 6.2.6 Measure and record right and left spindle hub runout.
_BF/TL__ Right Spindle Hub Runout: 0.00075
_BF/TL__ Left Spindle Hub Runout: 0.0005
_BF/TL__ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:
Pre adjust = .98 Post adjust= 1.07
Right Spindle Force Error:
Pre adjust = .95 Post adjust= 1.10
Left Spindle Calibration Variable:
Pre-adjust: 155.07 Post-adjust: 163.3
Right Spindle Calibration Variable:
Pre-adjust: 156.18 Post-adjust: 170.81
_BF/TL_ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_BF/TL_ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
_BF/TL_ 6.2.10 Check shuttle travel. Adjust if necessary.
_BF/TL_ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +24.03 Post-adjust: N/A
_BF/TL_ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 15.00 / -14.72 Post-adjust: N/A / -14.99
_BF/TL_ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 4.99 Post-adjust: N/A
__N/A__ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_BF/TL_ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
_BF/TL_ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
_BF/TL_ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
_BF/TL_ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:4/15/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: A shift
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 99
Post-adjust: 100
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 39
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.30 | WW43 weekly PM | FABSIX::L_SHKOLNIKOV | | Fri Apr 26 1996 00:06 | 69 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 04/24/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: D shift
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_______
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85 psi
Post-adjust:_______
___x___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___x___ 6.1.5 Check all tubing and fittings for leaks.
___x___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___x___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x___ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___x___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___x___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___x___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___x___ 6.1.23 Check Neslab TCU for leaks.
___x___ 6.1.24 Check Neslab TCU temperature readout.
___x__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___x__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___x__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.31 | WW 44 - Weekly | SUBPAC::LANDRY | | Sun Apr 28 1996 20:29 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 4-28-96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: "A" shift
INITIAL
_TL/BF_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
_TL/BF_ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 84 psi
Post-adjust:_N/A____
_TL/BF_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 psi
_TL/BF_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_TL/BF_ 6.1.5 Check all tubing and fittings for leaks.
_TL/BF_ 6.1.6 Check all tubing and fittings for air leaks.
_TL/BF_ 6.1.7 Check all indicator lights.
_TL/BF_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_TL/BF_ 6.1.9 Wipe down polish table, tub, and splash ring.
_TL/BF_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_TL/BF_ 6.1.11 Wipe down pad conditioning arm.
_TL/BF_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_TL/BF_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_TL/BF_ 6.1.14 Wipe down outer surface of both spindle hubs.
_TL/BF_ 6.1.15 Remove and clean O-rings, replace if necessary.
_TL/BF_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_TL/BF_ 6.1.17 Wipe down all surfaces of the robot.
_TL/BF_ 6.1.18 Clean end effector vacuum chuck air port.
_TL/BF_ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_TL/BF_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_TL/BF_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_TL/BF_ 6.1.23 Check Neslab TCU for leaks.
_TL/BF_ 6.1.24 Check Neslab TCU temperature readout.
_TL/BF_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_TL/BF_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_TL/BF_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.32 | WW45 Weekly PM | FABSIX::R_POIRIER | | Mon May 06 1996 01:59 | 74 |
| ------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 5-5-96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: B shift
INITIAL
__X__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__X__ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 84 psi
Post-adjust:_N/A____
__X__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 psi
__X__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X__ 6.1.5 Check all tubing and fittings for leaks.
__X__ 6.1.6 Check all tubing and fittings for air leaks.
__X__ 6.1.7 Check all indicator lights.
__X__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X__ 6.1.9 Wipe down polish table, tub, and splash ring.
__X__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X__ 6.1.11 Wipe down pad conditioning arm.
__X__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X__ 6.1.14 Wipe down outer surface of both spindle hubs.
__X__ 6.1.15 Remove and clean O-rings, replace if necessary.
__X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__X__ 6.1.17 Wipe down all surfaces of the robot.
__X__ 6.1.18 Clean end effector vacuum chuck air port.
__X__ 6.1.19 Inspect and clean end effector air nozzle.
__N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__X__ 6.1.23 Check Neslab TCU for leaks.
__X__ 6.1.24 Check Neslab TCU temperature readout.
__X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Found and wiped up oil in drip pan, under polish table.
Also, needed to calibrate Slurry flow for both 1 & 2 by .03.
|
| 6.33 | Monthly PM for WW46 completed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu May 16 1996 08:17 | 157 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 5/15/96 SYSTEM RTC CODE: CMP.A1 SHIFT: C and D
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___x___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___x___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___x___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: +0.001
___X___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: .001
Left Spindle Runout: .001
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: .001
Left Spindle Hub Runout: .001
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: -.7
Right Spindle Force Error: .67
Left Spindle Calibration Variable: Dead Weight
Pre-adjust: 160.57 Post-adjust: n/c
Right Spindle Calibration Variable:
Pre-adjust: 158.79 Post-adjust: n/c
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.0 Post-adjust: N/A
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: -15.0/15.1 Post-adjust: N/C
___X___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 4.99 Post-adjust: 5.0
___X___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust: 9.8 Post-adjust: not adjustable, will see EE.
___x___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 5/15/96 SYSTEM RTC CODE: CMP.A1 SHIFT: C and D
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:________
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__85____
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___x___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___x___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___x____ 6.1.11 Wipe down pad conditioning arm.
___x___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___x____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___x___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___x___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___x___ 6.1.17 Wipe down all surfaces of the robot.
___x___ 6.1.18 Clean end effector vacuum chuck air port.
___x___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__N/A__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
|
| 6.34 | WW 47 - Weekly | SUBPAC::LANDRY | | Sun May 19 1996 13:26 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 5-19-96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: A shift
INITIAL
__X__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__X__ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 84 psi
Post-adjust:_N/A____
__X__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 psi
__X__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X__ 6.1.5 Check all tubing and fittings for leaks.
__X__ 6.1.6 Check all tubing and fittings for air leaks.
__X__ 6.1.7 Check all indicator lights.
__X__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X__ 6.1.9 Wipe down polish table, tub, and splash ring.
__X__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X__ 6.1.11 Wipe down pad conditioning arm.
__X__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X__ 6.1.14 Wipe down outer surface of both spindle hubs.
__X__ 6.1.15 Remove and clean O-rings, replace if necessary.
__X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__X__ 6.1.17 Wipe down all surfaces of the robot.
__X__ 6.1.18 Clean end effector vacuum chuck air port.
__X__ 6.1.19 Inspect and clean end effector air nozzle.
__N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__X__ 6.1.23 Check Neslab TCU for leaks.
__X__ 6.1.24 Check Neslab TCU temperature readout.
__X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Slurry Pump # 1 was adjusted from .76 to .69
|
| 6.35 | SHUTDOWN CHECKSHEET | STRATA::RIDLON | Eliminate the obvious | Mon May 27 1996 07:34 | 39 |
| CMP.A1 & CMP.A2 SHUTDOWN CHECKSHEET
-----------------------------------
Tech. Date
------- -------
1. Change RTC status to SCHEDULED DOWN. ___B___ _5/27__
2. Remove all wafer carriers. If possible
keep them wet. If not ensure that there
are enough carriers with new films for
startup. ___B___ _5/27__
3. Remove all wafer cassettes and drain Send
and Receive DI Water tanks. ___B___ _5/27__
4. Purge both slurry lines with DI Water. ___B___ _5/27__
5. Remove and discard all polishing pads. ___B___ _5/27__
6. Remove all PVA scrub brushes and submerge
in DI water. ___B___ _5/27__
7. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry
all wet surfaces. ___B___ _5/27__
8. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing to UDR. ___B___ _5/27__
9. Power down each system. ___B___ _5/27__
10. Power down each vacuum pump cabinet. ___B___ _5/27__
11. Power down each Neslab TCU. ___B___ _5/27__
12. Enter checksheet into notesfile.
|
| 6.37 | Startup Checksheet | SUBPAC::LANDRY | | Tue May 28 1996 19:48 | 33 |
|
CMP.A1 STARTUP CHECKSHEET
----------------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are
available and ready to use. B shift 5/28/96
2. Power up each system. A shift 5/28/96
3. Power up each vacuum pump cabinet. A shift 5/28/96
4. Power up each Neslab TCU. A shift 5/28/96
5. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing into the tool A shift 5/28/96
7. Install wafer carriers. A shift 5/28/96
8. Place cassettes in left and right send
and receive stations to fill DI Water
tanks. A shift 5/28/96
9. Install new polishing pads. A shift 5/28/96
10. Re-install PVA scrub brushes. A shift 5/28/96
11. Place systems in wet idle mode. A shift 5/28/96
12. Change RTC status to VERIFY and notify
Operations that the systems are ready
for pad break-in & MQC. A shift 5/28/96
|
| 6.38 | weekly completed | STRATA::FINN | | Tue May 28 1996 19:59 | 69 |
| DATE: 5-27-96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: A+B shift
INITIAL
__X__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__X__ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 84 psi
Post-adjust:_N/A____
__X__ 6.1.3 DI Water pressure @ 36 PSI: Actual Reading: 42 psi
__X__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X__ 6.1.5 Check all tubing and fittings for leaks.
__X__ 6.1.6 Check all tubing and fittings for air leaks.
__X__ 6.1.7 Check all indicator lights.
__X__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X__ 6.1.9 Wipe down polish table, tub, and splash ring.
__X__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X__ 6.1.11 Wipe down pad conditioning arm.
__X__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X__ 6.1.14 Wipe down outer surface of both spindle hubs.
__X__ 6.1.15 Remove and clean O-rings, replace if necessary.
__X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__X__ 6.1.17 Wipe down all surfaces of the robot.
__X__ 6.1.18 Clean end effector vacuum chuck air port.
__X__ 6.1.19 Inspect and clean end effector air nozzle.
__N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__X__ 6.1.23 Check Neslab TCU for leaks.
__X__ 6.1.24 Check Neslab TCU temperature readout.
__X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Slurry Pumps required cal
|
| 6.39 | WW49 Weekly PM | FABSIX::R_POIRIER | | Wed Jun 05 1996 07:08 | 69 |
| --------------------------------------------------------------------------------
DATE: 06-04-96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: B shift
INITIAL
__X__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__X__ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 85 psi
Post-adjust:_N/A____
__X__ 6.1.3 DI Water pressure @ 36 PSI: Actual Reading: 39 psi
__X__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X__ 6.1.5 Check all tubing and fittings for leaks.
__X__ 6.1.6 Check all tubing and fittings for air leaks.
__X__ 6.1.7 Check all indicator lights.
__X__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X__ 6.1.9 Wipe down polish table, tub, and splash ring.
__X__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X__ 6.1.11 Wipe down pad conditioning arm.
__X__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X__ 6.1.14 Wipe down outer surface of both spindle hubs.
__X__ 6.1.15 Remove and clean O-rings, replace if necessary.
__X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__X__ 6.1.17 Wipe down all surfaces of the robot.
__X__ 6.1.18 Clean end effector vacuum chuck air port.
__X__ 6.1.19 Inspect and clean end effector air nozzle.
__N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__X__ 6.1.23 Check Neslab TCU for leaks.
__X__ 6.1.24 Check Neslab TCU temperature readout.
__X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.40 | ww50 weekly pm | STRATA::FINN | | Tue Jun 11 1996 21:31 | 68 |
| DATE: 06-11-96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: A shift
INITIAL
__X__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:_N/A____
__X__ 6.1.2 N2 pressure @ 80 PSI: Pre-adjust: 84 psi
Post-adjust:_N/A____
__X__ 6.1.3 DI Water pressure @ 36 PSI: Actual Reading: 39 psi
__X__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X__ 6.1.5 Check all tubing and fittings for leaks.
__X__ 6.1.6 Check all tubing and fittings for air leaks.
__X__ 6.1.7 Check all indicator lights.
__X__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X__ 6.1.9 Wipe down polish table, tub, and splash ring.
__X__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X__ 6.1.11 Wipe down pad conditioning arm.
__X__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X__ 6.1.14 Wipe down outer surface of both spindle hubs.
__X__ 6.1.15 Remove and clean O-rings, replace if necessary.
__X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__X__ 6.1.17 Wipe down all surfaces of the robot.
__X__ 6.1.18 Clean end effector vacuum chuck air port.
__X__ 6.1.19 Inspect and clean end effector air nozzle.
__N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__X__ 6.1.23 Check Neslab TCU for leaks.
__X__ 6.1.24 Check Neslab TCU temperature readout.
__X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Slurry pumps needed cal, water was added to chiller.
|
| 6.41 | WW 51 - Monthly version | SUBPAC::LANDRY | | Tue Jun 18 1996 19:42 | 153 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 6/18/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: A shift
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___x___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___x___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: +0.001
___X___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: .001
Left Spindle Runout: <.001
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: <.001
Left Spindle Hub Runout: <.0005
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: 1.03
Right Spindle Force Error: -.31
Left Spindle Calibration Variable: Dead Weight
Pre-adjust: _____ Post-adjust: 158.75
Right Spindle Calibration Variable:
Pre-adjust: _____ Post-adjust: 157.95
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.02 Post-adjust: N/A
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: -15.1/15.0 Post-adjust: N/C
___X___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.01 Post-adjust: 5.0
___X___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust: 9.8 Post-adjust: not adjustable, will see EE.
___X__ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 6/18/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: A shift
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:________
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__85____
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: The Hub groumets were changed during this PM.
|
| 6.42 | Weekly PM done | SUBPAC::LANDRY | | Sun Jun 23 1996 14:12 | 70 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 6/23/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: A shift
INITIAL
___x___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:________
___x___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__85____
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
___x___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___x___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: lowered calibration variable values by .05 on both slurry pumps
|
| 6.43 | WW#1 weekly completed | FABSIX::B_FINN | | Wed Jul 03 1996 20:24 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 7/3/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: A shift
INITIAL
__X____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:________
__X____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__85____
Post-adjust:________
__X____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
__X____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X____ 6.1.5 Check all tubing and fittings for leaks.
__X____ 6.1.6 Check all tubing and fittings for air leaks.
__X____ 6.1.7 Check all indicator lights.
__X____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X____ 6.1.9 Wipe down polish table, tub, and splash ring.
__X____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X____ 6.1.11 Wipe down pad conditioning arm.
__X____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X____ 6.1.14 Wipe down outer surface of both spindle hubs.
__X____ 6.1.15 Remove and clean O-rings, replace if necessary.
__X____ 6.1.16 Wipe down inside and outside of loaD/cleaning station buckets.
__X____ 6.1.17 Wipe down all surfaces of the robot.
__X____ 6.1.18 Clean end effector vacuum chuck air port.
__X____ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__X____ 6.1.23 Check Neslab TCU for leaks.
__X____ 6.1.24 Check Neslab TCU temperature readout.
__X____ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Oil in drip pan - added water to chiller - lowered slurry
Pump #1 by 0.03
|
| 6.44 | CMP.A1 Shutdown Checksheet | FABSIX::L_SHKOLNIKOV | | Thu Jul 04 1996 00:45 | 40 |
|
CMP.A1 shutdown CHECKSHEET
-----------------------------------
Date 07.04.96 Tech. LS
1. Change RTC status to SCHEDULED DOWN. _n/a___
2. Remove all wafer carriers. If possible
keep them wet. If not ensure that there
are enough carriers with new films for
startup. __X___
3. Remove all wafer cassettes and drain Send
and Receive DI Water tanks. __X___
4. Purge both slurry lines with DI Water. __X___
5. Remove and discard all polishing pads. __X___
6. Remove all PVA scrub brushes and submerge
in DI water. __X___
7. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry
all wet surfaces. __X___
8. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing to UDR. __X___
9. Power down system. __X___
10. Power down vacuum pump cabinet. __X___
11. Power down Neslab TCU. __X___
|
| 6.45 | A1 START-UP | FABSIX::L_SHKOLNIKOV | | Sat Jul 06 1996 07:38 | 35 |
|
CMP.A1 STARTUP CHECKSHEET
-------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are
available and ready to use. __LS___ 07-06-96
2. Power up each system. __LS___ 07-06-96
3. Power up each vacuum pump cabinet. __LS___ 07-06-96
4. Power up each Neslab TCU. __LS___ 07-06-96
5. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing into the tool __LS___ 07-06-96
6. Place cassettes in left and right send
and receive stations to fill DI Water
tanks. __LS___ 07-06-96
7. Install new polishing pads. __LS___ 07-06-96
8. Install wafer carriers. __LS___ 07-06-96
9. Re-install PVA scrub brushes. __LS___ 07-06-96
10. Place systems in wet idle mode. __LS___ 07-06-96
11. Change RTC status to VERIFY and notify
Operations that the systems are ready
for pad break-in & MQC. __LS___ 07-06-96
|
| 6.46 | WW 2 / 1997 - Weekly | SUBPAC::LANDRY | | Sun Jul 07 1996 13:46 | 71 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 7/7/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: A shift / Jim S
INITIAL
__X____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:________
__X____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__85____
Post-adjust:________
__X____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 35
__X____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X____ 6.1.5 Check all tubing and fittings for leaks.
__X____ 6.1.6 Check all tubing and fittings for air leaks.
__X____ 6.1.7 Check all indicator lights.
__X____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X____ 6.1.9 Wipe down polish table, tub, and splash ring.
__X____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X____ 6.1.11 Wipe down pad conditioning arm.
__X____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X____ 6.1.14 Wipe down outer surface of both spindle hubs.
__X____ 6.1.15 Remove and clean O-rings, replace if necessary.
__X____ 6.1.16 Wipe down inside and outside of loaD/cleaning station buckets.
__X____ 6.1.17 Wipe down all surfaces of the robot.
__X____ 6.1.18 Clean end effector vacuum chuck air port.
__X____ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__X____ 6.1.23 Check Neslab TCU for leaks.
__X____ 6.1.24 Check Neslab TCU temperature readout.
__X____ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Slurry Pump 1 variable lowered to .68
Slurry Pump 2 variable lowered to .73
|
| 6.47 | WW03 Monthly PM | FABSIX::R_POIRIER | | Mon Jul 15 1996 06:41 | 154 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 7/14/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: B shift
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___x___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___x___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: +0.001
___X___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: <.001
Left Spindle Runout: <.001
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: <.001
Left Spindle Hub Runout: <.002
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: -0.65
Right Spindle Force Error: 1.03
Left Spindle Calibration Variable: Dead Weight
Pre-adjust: 158.75 Post-adjust: 159.32
Right Spindle Calibration Variable:
Pre-adjust: 157.95 Post-adjust: 162.19
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.02 Post-adjust: N/A
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: -14.94/15.8 Post-adjust: N/C
___X___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.00 Post-adjust: N/C
___X___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust: N/A Post-adjust: N/A
___X__ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 7/14/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: B Shift
INITIAL
__X____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__98____
Post-adjust:________
__X____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__86____
Post-adjust:________
__X____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37
__X____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X____ 6.1.5 Check all tubing and fittings for leaks.
__X____ 6.1.6 Check all tubing and fittings for air leaks.
__X____ 6.1.7 Check all indicator lights.
__X____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X____ 6.1.9 Wipe down polish table, tub, and splash ring.
__X____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X____ 6.1.11 Wipe down pad conditioning arm.
__X____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X____ 6.1.14 Wipe down outer surface of both spindle hubs.
__X____ 6.1.15 Remove and clean O-rings, replace if necessary.
__X____ 6.1.16 Wipe down inside and outside of loaD/cleaning station buckets.
__X____ 6.1.17 Wipe down all surfaces of the robot.
__X____ 6.1.18 Clean end effector vacuum chuck air port.
__X____ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__x____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__x____ 6.1.23 Check Neslab TCU for leaks.
__X____ 6.1.24 Check Neslab TCU temperature readout.
__X____ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.48 | WEEKLY COMPLETED WW4 | STRATA::FINN | | Sat Jul 27 1996 14:07 | 71 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:7/27/96 SYSTEM RTC CODE:CMP.A1 EQUIP. TECH.:BRAD/BRENDAN
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100_____
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__84______
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__40___
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X__ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Added water to Neslab, CALIBRATED BOTH SLURRY PUMPS
|
| 6.49 | WW5 WEEKLY COMPLETE | STRATA::WESTPHAL | | Thu Aug 01 1996 19:31 | 73 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:7/27/96 SYSTEM RTC CODE:CMP.A1 EQUIP. TECH.:BRAD/BRENDAN
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100_____
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__84______
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__37___
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X__ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.50 | ww6 weekly completed | FABSIX::L_SHKOLNIKOV | | Sat Aug 10 1996 08:01 | 73 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:8/09/96 SYSTEM RTC CODE:CMP.A1 EQUIP. TECH.: LEON
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:___100_____
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__86______
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__38___
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X__ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.51 | ww07 monthly p.m. | FABSIX::R_GEE | | Mon Aug 12 1996 06:30 | 156 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 8/12/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: B shift
INITIAL
__x___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
__x___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__x___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__x___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: +0.001
__x___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: <.002
Left Spindle Runout: <.001
__x___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: <.001
Left Spindle Hub Runout: <.002
__x___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: 0.39
Right Spindle Force Error: 0.03
Left Spindle Calibration Variable: Dead Weight
Pre-adjust: 158.67 Post-adjust: 160.51
Right Spindle Calibration Variable:
Pre-adjust: 162.19 Post-adjust: 162.19
___x___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___x___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___x___ 6.2.10 Check shuttle travel. Adjust if necessary.
___x___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.03 Post-adjust: N/A
___x___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: -15.01/+15.0 Post-adjust: N/C
___x___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.01 Post-adjust: N/C
_n/a___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust: N/A Post-adjust: N/A
___X___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 8/12/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: B Shift
INITIAL
__X____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__n/a____
Post-adjust:________
__X____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__n/a___
Post-adjust:________
__X____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37
__X____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X____ 6.1.5 Check all tubing and fittings for leaks.
__X____ 6.1.6 Check all tubing and fittings for air leaks.
__X____ 6.1.7 Check all indicator lights.
__X____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X____ 6.1.9 Wipe down polish table, tub, and splash ring.
__X____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X____ 6.1.11 Wipe down pad conditioning arm.
__X____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X____ 6.1.14 Wipe down outer surface of both spindle hubs.
__X____ 6.1.15 Remove and clean O-rings, replace if necessary.
__X____ 6.1.16 Wipe down inside and outside of loaD/cleaning station buckets.
__X____ 6.1.17 Wipe down all surfaces of the robot.
__X____ 6.1.18 Clean end effector vacuum chuck air port.
__X____ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__X____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__x____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__x____ 6.1.23 Check Neslab TCU for leaks.
__X____ 6.1.24 Check Neslab TCU temperature readout.
__x___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__x____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
added 1 pint of bridge oil.
adjusted the left spindle height to match the right.
|
| 6.52 | ww08 weekly p.m | FABSIX::L_SHKOLNIKOV | | Thu Aug 22 1996 01:13 | 73 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 8/22/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: D shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: _100_
Post-adjust: N/A
_X_ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: _86_
Post-adjust: N/A
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__37__
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_X_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Replaced inner O-ring inside left hub.
|
| 6.53 | WW IX - Weekly Version | SUBPAC::LANDRY | | Sun Aug 25 1996 12:13 | 73 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 8/25/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: A shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: _100_
Post-adjust: N/A
_X_ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: _86_
Post-adjust: N/A
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__37__
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_X_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Adjusted Slurry pump #2's variable number from .8 to .727
|
| 6.54 | WW X - Weekly version | SUBPAC::LANDRY | | Sun Sep 01 1996 13:19 | 73 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 9/1/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: A shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: _100_
Post-adjust: N/A
_X_ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: _86_
Post-adjust: N/A
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__38__
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_X_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.55 | CMP.A1 SHUTDOWN CHECKSHEET | FABSIX::R_POIRIER | | Mon Sep 02 1996 02:49 | 36 |
| CMP.A1 & CMP.A2 SHUTDOWN CHECKSHEET
-----------------------------------
Tech. Date
------- -------
1. Remove all wafer carriers. If possible
keep them wet. If not ensure that there
are enough carriers with new films for
startup. ___B___ _9/1/96_
2. Remove all wafer cassettes and drain Send
and Receive DI Water tanks. ___B___ _9/1/96_
3. Purge both slurry lines with DI Water. ___B___ _9/1/96_
4. Remove and discard all polishing pads. ___B___ _9/1/96_
5. Remove all PVA scrub brushes and submerge
in DI water. ___B___ _9/1/96_
6. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry
all wet surfaces. ___B___ _9/1/96_
7. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing to UDR. ___B___ _9/1/96_
8. Power down each system. ___B___ _9/1/96_
9. Power down each vacuum pump cabinet. ___B___ _9/1/96_
10. Power down each Neslab TCU. ___B___ _9/1/96_
11. Enter checksheet into notesfile. ___B___ _9/1/96_
|
| 6.56 | startup checksheet | SUBPAC::LANDRY | | Tue Sep 03 1996 20:10 | 35 |
|
CMP.A1 STARTUP CHECKSHEET
-------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are
available and ready to use. ___A___ 09-03-96
2. Power up each system. ___A___ 09-03-96
3. Power up each vacuum pump cabinet. ___A___ 09-03-96
4. Power up each Neslab TCU. ___A___ 09-03-96
5. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing into the tool ___A___ 09-03-96
6. Place cassettes in left and right send
and receive stations to fill DI Water
tanks. ___A___ 09-03-96
7. Install new polishing pads. ___A___ 09-03-96
8. Install wafer carriers. ___A___ 09-03-96
9. Re-install PVA scrub brushes. ___A___ 09-03-96
10. Place systems in wet idle mode. ___A___ 09-03-96
11. Change RTC status to VERIFY and notify
Operations that the systems are ready
for pad break-in & MQC. ___A___ 09-03-96
|
| 6.57 | ww 11 weekly pm | FABSIX::L_SHKOLNIKOV | | Thu Sep 12 1996 01:30 | 73 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 9/13/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: d shift
INITIAL
_x_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: _100_
Post-adjust: N/A
_x_ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: _85_
Post-adjust: N/A
_x_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__36__
_x_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_x_ 6.1.5 Check all tubing and fittings for leaks.
_x_ 6.1.6 Check all tubing and fittings for air leaks.
_x_ 6.1.7 Check all indicator lights.
_x_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_x_ 6.1.9 Wipe down polish table, tub, and splash ring.
_x_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_x_ 6.1.11 Wipe down pad conditioning arm.
_x_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_x_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_x_ 6.1.14 Wipe down outer surface of both spindle hubs.
_x_ 6.1.15 Remove and clean O-rings, replace if necessary.
_x_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_x_ 6.1.17 Wipe down all surfaces of the robot.
_x_ 6.1.18 Clean end effector vacuum chuck air port.
_x_ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_x_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_x_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_x_ 6.1.23 Check Neslab TCU for leaks.
_x_ 6.1.24 Check Neslab TCU temperature readout.
_x_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_x_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_x_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.58 | WW12 Annual PM | FABSIX::R_POIRIER | | Tue Sep 17 1996 07:55 | 217 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 09/16/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: A/B Shift
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:____100____
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___36____
Post-adjust:__85____
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__38____
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Calibrated both slurry pumps
Replaced Middle O-Ring on both spindles.
------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 09/16/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: A/B Shifts
INITIAL
___X___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
___X___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
___X___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
___X___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: 0.001"
___X___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: 0.001"
Left Spindlele Runout: 0.0015"
___X___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: 0.001
Left Spindle Hub Runout: 0.00075
___X___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: 1.07
Right Spindle Force Error:1.08
Left Spindle Calibration Variable:
Pre-adjust: 160.51 Post-adjust: 162.18
Right Spindle Calibration Variable:
Pre-adjust: 162.19 Post-adjust: 162.62
___X___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
___X___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
___X___ 6.2.10 Check shuttle travel. Adjust if necessary.
___X___ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:24.03 Post-adjust:24.03
___X___ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust:15.00 Post-adjust:15.00
___X___ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:5.00 Post-adjust:5.00
_N/A___ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
___X____ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
___X___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
___X___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
___X___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:___ADDED BRIDGE OIL
------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Semmi-annual Preventive Maintenance Check Sheet, REV. C
DATE: 09/16/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: A/B Shift
INITIAL
___X___ 6.3.1 Perform Weekly and Monthly PM's in addition to this Semi-Annual
list.
___X___ 6.3.2 Check all safety interlocked doors for proper operation.
___X___ 6.3.2 Check all EMO's for proper operation.
___X___ 6.3.3 Change oil in the brush rotation gear box using AGMA #8 or
equivalent oil.
___X___ 6.3.4 Change oil in the left and right spindle gear boxes using AGMA
#8 or equivalent oil.
___X___ 6.3.5 Change oil in the polish table gear box using AGMA #8 or
equivalent oil.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
-< CMP >-
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Annual Preventive Maintenance Check Sheet, REV. C
DATE: 09/16/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: A/B Shift
INITIAL
___X___ 6.4.1 Perform Weekly, Monthly, and Semi-Annual PM's in addition to
this Annual list
___X___ 6.4.2 Perform Bridge Position calibration.
___X___ 6.4.3 Check Robot Position Alignment. Calibrate if necessary.
___X___ 6.4.4 Check Robot Travel position. Adjust if necessary.
___X___ 6.4.5 Check Robot Arm position. Adjust if necessary.
___X___ 6.4.6 Check Elevator Height position. Adjust if necessary.
COMMENTS: Adjusted robot Arm theta and R postions
|
| 6.59 | WW XIII - Weekly | SUBPAC::LANDRY | | Mon Sep 23 1996 17:03 | 82 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 9/23/96 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: A shift
INITIAL
_X_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: _100_
Post-adjust: N/A
_X_ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: _85_
Post-adjust: N/A
_X_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__37__
_X_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_X_ 6.1.5 Check all tubing and fittings for leaks.
_X_ 6.1.6 Check all tubing and fittings for air leaks.
_X_ 6.1.7 Check all indicator lights.
_X_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_X_ 6.1.9 Wipe down polish table, tub, and splash ring.
_X_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_X_ 6.1.11 Wipe down pad conditioning arm.
_X_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_X_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_X_ 6.1.14 Wipe down outer surface of both spindle hubs.
_X_ 6.1.15 Remove and clean O-rings, replace if necessary.
_X_ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_X_ 6.1.17 Wipe down all surfaces of the robot.
_X_ 6.1.18 Clean end effector vacuum chuck air port.
_X_ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_X_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_X_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_X_ 6.1.23 Check Neslab TCU for leaks.
_X_ 6.1.24 Check Neslab TCU temperature readout.
_X_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_X_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_X_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Found the temperature on the Neslab at 65 degrees C. The set
point pot was jumping around. Cleaned up best as possible.
Temp set point has stabilized.
Found the SS slurry distribution tubes clogged. Unclogged,
cleaned up dried slurry all around the polish table area and
carrier/hubs, and then performed slurry cal. No variable
adjustment necessary.
Found the "dog_dish" not draining correctly. Drain hose was
"humped" above the dish height. Re-positioned
Cleaned conditioner disk, NOT CHANGED. New disk installed 9/22
|
| 6.60 | ww14 weekly | STRATA::RIDLON | Eliminate the oblivious | Sun Sep 29 1996 04:02 | 73 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:_9/29/96___ SYSTEM RTC CODE:__CMP.A1__ EQUIP. TECH.: B Shift
INITIAL
___X_____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100______
Post-adjust:___100_____
___X_____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___84_____
Post-adjust:__________
___X_____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:_38~42_____
___X_____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X_____ 6.1.5 Check all tubing and fittings for leaks.
___X_____ 6.1.6 Check all tubing and fittings for air leaks.
___X_____ 6.1.7 Check all indicator lights.
___X_____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X____ 6.1.9 Wipe down polish table, tub, and splash ring.
___X____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X____ 6.1.11 Wipe down pad conditioning arm.
___X____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X_____ 6.1.14 Wipe down outer surface of both spindle hubs.
___X_____ 6.1.15 Remove and clean O-rings, replace if necessary.
___X_____ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X_____ 6.1.17 Wipe down all surfaces of the robot.
___X_____ 6.1.18 Clean end effector vacuum chuck air port.
___X_____ 6.1.19 Inspect and clean end effector air nozzle.
__NA_____ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X_____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X_____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X_____ 6.1.23 Check Neslab TCU for leaks.
___X_____ 6.1.24 Check Neslab TCU temperature readout. (38 C)
___X_____ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X_____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X_____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.61 | ww15 weekly p.m. completed | FABSIX::R_GEE | | Tue Oct 08 1996 20:09 | 73 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:_10/07/96___ SYSTEM RTC CODE:__CMP.A1__ EQUIP. TECH.: A Shift
INITIAL
___X____ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100______
Post-adjust:________
___X____ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___86_____
Post-adjust:__________
___X____ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___39_____
___X____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X____ 6.1.5 Check all tubing and fittings for leaks.
___X____ 6.1.6 Check all tubing and fittings for air leaks.
___X____ 6.1.7 Check all indicator lights.
___X_____ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X____ 6.1.9 Wipe down polish table, tub, and splash ring.
___X____ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X____ 6.1.11 Wipe down pad conditioning arm.
___X____ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X____ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X____ 6.1.14 Wipe down outer surface of both spindle hubs.
___X____ 6.1.15 Remove and clean O-rings, replace if necessary.
___X____ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
___X____ 6.1.17 Wipe down all surfaces of the robot.
___X____ 6.1.18 Clean end effector vacuum chuck air port.
___X____ 6.1.19 Inspect and clean end effector air nozzle.
__NA_____ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
___X____ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
___X_____ 6.1.23 Check Neslab TCU for leaks.
___X_____ 6.1.24 Check Neslab TCU temperature readout. (38 C)
___X____ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: Calibrated the Fairchild regulators and spindle downforce due to
poor head to head removal.
|
| 6.62 | MONTHLY PM COMPLETED FOR WW16 | FABSIX::L_SHKOLNIKOV | | Wed Oct 16 1996 08:04 | 153 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 10/16/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: D - shift
INITIAL
__x__ 6.2.1 Perform weekly PM checks in addition to this monthly list.
__x__ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__x__ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__x__ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: .002
__x____ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: .002
Left Spindle Runout: .002
__x____ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: .001
Left Spindle Hub Runout: .0005
__x____ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: pre: -4.31 post: -.3
Right Spindle Force Error: pre: -11.77 post: -.27
Left Spindle Calibration Variable:
Pre-adjust: .98 Post-adjust: .96
Right Spindle Calibration Variable:
Pre-adjust: .98 Post-adjust: .95
__x____ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
__x__ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__x__ 6.2.10 Check shuttle travel. Adjust if necessary.
__x__ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.03 Post-adjust: 24.03
__x__ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.0/-15.1 Post-adjust:+15.0/-15.1
__x__ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.03 Post-adjust: 5.03
__x__ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust: 9.91 AC Post-adjust:____________
__x__ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__x__ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__x__ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__x__ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
INITIAL
__x__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust:________
__x__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 86
Post-adjust:________
__x__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36
__x____ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__x____ 6.1.5 Check all tubing and fittings for leaks.
__x____ 6.1.6 Check all tubing and fittings for air leaks.
__x__ 6.1.7 Check all indicator lights.
__x__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__x__ 6.1.9 Wipe down polish table, tub, and splash ring.
__x__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__x__ 6.1.11 Wipe down pad conditioning arm.
__x__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__x__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__x____ 6.1.14 Wipe down outer surface of both spindle hubs.
__x____ 6.1.15 Remove and clean O-rings, replace if necessary.
__x____ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__x____ 6.1.17 Wipe down all surfaces of the robot.
__x____ 6.1.18 Clean end effector vacuum chuck air port.
__x____ 6.1.19 Inspect and clean end effector air nozzle.
_n/a_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
(p.o.u. filters no longer used on tool)
__x__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__x____ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__x__ 6.1.23 Check Neslab TCU for leaks.
__x__ 6.1.24 Check Neslab TCU temperature readout.
__x____ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__x____ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__x____ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
|
| 6.63 | ww17 weekly pm. | FABSIX::L_SHKOLNIKOV | | Fri Oct 25 1996 06:55 | 71 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 10/23/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: D Shift
INITIAL
_ls__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100__
Post-adjust:
_ls__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___86__
Post-adjust:
_ls__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__37__
_ls__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_ls__ 6.1.5 Check all tubing and fittings for leaks.
_ls__ 6.1.6 Check all tubing and fittings for air leaks.
_ls__ 6.1.7 Check all indicator lights.
_ls__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_ls__ 6.1.9 Wipe down polish table, tub, and splash ring.
_ls__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_ls__ 6.1.11 Wipe down pad conditioning arm.
_ls__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_ls__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_ls__ 6.1.14 Wipe down outer surface of both spindle hubs.
_ls__ 6.1.15 Remove and clean O-rings, replace if necessary.
_ls__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_ls__ 6.1.17 Wipe down all surfaces of the robot.
_ls__ 6.1.18 Clean end effector vacuum chuck air port.
_ls__ 6.1.19 Inspect and clean end effector air nozzle.
_n/a_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
(no longer in use)
_ls__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_ls__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_ls__ 6.1.23 Check Neslab TCU for leaks.
_ls__ 6.1.24 Check Neslab TCU temperature readout. (38 C)
_ls__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_ls__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_ls__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
|
| 6.64 | WW XVIII - Weekly Completed | SUBPAC::LANDRY | | Sun Oct 27 1996 18:51 | 74 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 10/27/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Landry
INITIAL
__X__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100__
Post-adjust:
__X__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___86__
Post-adjust:
__X__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__36__
__X__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__X__ 6.1.5 Check all tubing and fittings for leaks.
__X__ 6.1.6 Check all tubing and fittings for air leaks.
__X__ 6.1.7 Check all indicator lights.
__X__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__X__ 6.1.9 Wipe down polish table, tub, and splash ring.
__X__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__X__ 6.1.11 Wipe down pad conditioning arm.
__X__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__X__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__X__ 6.1.14 Wipe down outer surface of both spindle hubs.
__X__ 6.1.15 Remove and clean O-rings, replace if necessary.
__X__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__X__ 6.1.17 Wipe down all surfaces of the robot.
__X__ 6.1.18 Clean end effector vacuum chuck air port.
__X__ 6.1.19 Inspect and clean end effector air nozzle.
_n/a_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
(no longer in use)
__X__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__X__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__X__ 6.1.23 Check Neslab TCU for leaks.
__X__ 6.1.24 Check Neslab TCU temperature readout. (38 C)
__X__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__X__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__X__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A due to this filter is no longer utilized with this
system.
The system received a pad and both carriers change at this PM
|
| 6.65 | WW19 Weekly PM | FABSIX::R_POIRIER | | Sun Nov 03 1996 04:58 | 76 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11/03/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: R_Poirier, M_Ridlon
INITIAL
___X___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:________
___X___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___84___
Post-adjust:________
___X___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___38.5_
___X___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
___X___ 6.1.5 Check all tubing and fittings for leaks.
___X___ 6.1.6 Check all tubing and fittings for air leaks.
___X___ 6.1.7 Check all indicator lights.
___X___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
___X___ 6.1.9 Wipe down polish table, tub, and splash ring.
___X___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
___X___ 6.1.11 Wipe down pad conditioning arm.
___X___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
___X___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
___X___ 6.1.14 Wipe down outer surface of both spindle hubs.
___X___ 6.1.15 Remove and clean O-rings, replace if necessary.
___X___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
___X___ 6.1.17 Wipe down all surfaces of the robot.
___X___ 6.1.18 Clean end effector vacuum chuck air port.
___X___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
(No point of use filters)
___X___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
___X___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BOTH NEEDED CONSIDERABLE ADJUSTMENTS TO BRING IN FLOW.
PUMP 1 FROM .89 TO .75 / PUMP 2 FROM .9 TO .74
___X___ 6.1.23 Check Neslab TCU for leaks.
___X___ 6.1.24 Check Neslab TCU temperature readout.
___X___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
___X___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
___X___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:_FOUND SOME OIL IN DRIP PAN, CLEANED IT UP.
|
| 6.66 | WW 20 - Monthly completed | SUBPAC::LANDRY | | Sun Nov 10 1996 13:39 | 160 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 11/10/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Finn, Sadin, Landry
INITIAL
BF/TL/JS 6.2.1 Perform weekly PM checks in addition to this monthly list.
__JS___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__JS___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_BF/JS_ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: .003"
_BF/JS_ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: 0.0005"
Left Spindlele Runout: 0.001"
_BF/JS_ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: .001"
Left Spindle Hub Runout: .0015"
BF/TL/JS 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: pre .96 post .99
Right Spindle Force Error: pre .95 post .99
Left Spindle Calibration Variable:
Pre-adjust: 144.53 Post-adjust: 150.03
Right Spindle Calibration Variable:
Pre-adjust: 141.94 Post-adjust: 149.68
__JS___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
__JS___ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__TL___ 6.2.10 Check shuttle travel. Adjust if necessary.
_TL/JS_ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.02 Post-adjust: None
_TL/JS_ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.01 / -15.00 Post-adjust: None
_TL/JS_ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.00 Post-adjust: None
_TL/JS_ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust: +10.22 Post-adjust: Can't be done
__JS___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__TL___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__TL___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__TL___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS: Added oil to the bridge resevoir
================================================================================
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11/10/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Finn, Sadin, Landry
INITIAL
__TL___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: None
__TL___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 86
Post-adjust: None
__TL___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37
__TL___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__TL___ 6.1.5 Check all tubing and fittings for leaks.
__TL___ 6.1.6 Check all tubing and fittings for air leaks.
__TL___ 6.1.7 Check all indicator lights.
__JS___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__JS___ 6.1.9 Wipe down polish table, tub, and splash ring.
__JS___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__JS___ 6.1.11 Wipe down pad conditioning arm.
__JS___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__JS___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__JS___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF___ 6.1.15 Remove and clean O-rings, replace if necessary.
__TL___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__TL___ 6.1.17 Wipe down all surfaces of the robot.
__TL___ 6.1.18 Clean end effector vacuum chuck air port.
__TL___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_BF/JS_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__TL___ 6.1.23 Check Neslab TCU for leaks.
__TL___ 6.1.24 Check Neslab TCU temperature readout.
__BF___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BF___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__TL___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A = No longer use the point of use filters
* Found chiller pressure set 4 lbs above acceptable limit. Also, the
temperature was reading 15 degrees C.
|
| 6.67 | WW 21 - Weekly completed | SUBPAC::LANDRY | | Mon Nov 18 1996 19:17 | 73 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11/18/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Finn, Gee, Landry
INITIAL
__TL___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: None
__TL___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 86
Post-adjust: None
__TL___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 39
__TL___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BF___ 6.1.5 Check all tubing and fittings for leaks.
__BF___ 6.1.6 Check all tubing and fittings for air leaks.
__BF___ 6.1.7 Check all indicator lights.
_BG/BF_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__BG___ 6.1.9 Wipe down polish table, tub, and splash ring.
__BG___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__BG___ 6.1.11 Wipe down pad conditioning arm.
__TL___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__TL___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF___ 6.1.15 Remove and clean O-rings, replace if necessary.
__TL___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__TL___ 6.1.17 Wipe down all surfaces of the robot.
__TL___ 6.1.18 Clean end effector vacuum chuck air port.
__TL___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__BF___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__BF___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BG___ 6.1.23 Check Neslab TCU for leaks.
__BG___ 6.1.24 Check Neslab TCU temperature readout.
__BF___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BF___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__TL___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A = No longer use the point of use filters
6.1.22 Slight adjustments made to the slurry variables on both
pumps.
|
| 6.68 | WW-22 WEEKLY PM COMPLETED | FABSIX::B_FINN | | Sun Nov 24 1996 10:16 | 72 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 11/24/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Landry,Finn
INITIAL
__BF___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: None
__BF___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 86
Post-adjust: None
__BF___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
__TL___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__TL___ 6.1.5 Check all tubing and fittings for leaks.
__BF___ 6.1.6 Check all tubing and fittings for air leaks.
__TL___ 6.1.7 Check all indicator lights.
__TL___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
__BF___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__BF___ 6.1.11 Wipe down pad conditioning arm.
__BF___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BF___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__TL___ 6.1.14 Wipe down outer surface of both spindle hubs.
__TL___ 6.1.15 Remove and clean O-rings, replace if necessary.
__TL___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__BF___ 6.1.17 Wipe down all surfaces of the robot.
__BF___ 6.1.18 Clean end effector vacuum chuck air port.
__BF___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__BF___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__TL___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BF___ 6.1.23 Check Neslab TCU for leaks.
__BF___ 6.1.24 Check Neslab TCU temperature readout.
__TL___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__TL___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BF___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A = No longer use the point of use filters
|
| 6.69 | WW 23 - Weekly completed | SUBPAC::LANDRY | | Sun Dec 01 1996 18:39 | 72 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 12/1/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Landry/Finn/Gee
INITIAL
__BG___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: None
__BG___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 86
Post-adjust: None
__BG___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
__TL___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__TL___ 6.1.5 Check all tubing and fittings for leaks.
__TL___ 6.1.6 Check all tubing and fittings for air leaks.
__TL___ 6.1.7 Check all indicator lights.
__TL___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
__BF___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__BF___ 6.1.11 Wipe down pad conditioning arm.
__BF___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BF___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__TL___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BG___ 6.1.15 Remove and clean O-rings, replace if necessary.
__BG___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__TL___ 6.1.17 Wipe down all surfaces of the robot.
__TL___ 6.1.18 Clean end effector vacuum chuck air port.
__TL___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__TL___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__TL___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BF___ 6.1.23 Check Neslab TCU for leaks.
__BF___ 6.1.24 Check Neslab TCU temperature readout.
__BG___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__TL___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BG___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A = No longer use the point of use filters
|
| 6.70 | WW24 WEEKLY | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Dec 10 1996 05:38 | 72 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 12/10/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Ridlon/Poirier
INITIAL
__RP___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: None
__RP___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: None
__RP___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
__RP___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__RP___ 6.1.5 Check all tubing and fittings for leaks.
__RP___ 6.1.6 Check all tubing and fittings for air leaks.
__RP___ 6.1.7 Check all indicator lights.
__MR___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__MR___ 6.1.9 Wipe down polish table, tub, and splash ring.
__MR___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__MR___ 6.1.11 Wipe down pad conditioning arm.
__MR___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__MR___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__MR___ 6.1.14 Wipe down outer surface of both spindle hubs.
__MR___ 6.1.15 Remove and clean O-rings, replace if necessary.
__RP___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__RP___ 6.1.17 Wipe down all surfaces of the robot.
__RP___ 6.1.18 Clean end effector vacuum chuck air port.
__RP___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__MR___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__MR___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__RP___ 6.1.23 Check Neslab TCU for leaks.
__RP___ 6.1.24 Check Neslab TCU temperature readout.
__RP___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__RP___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__RP___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A = No longer use the point of use filters
6.1.4 Found and cleaned small pool of oil in drip pan
|
| 6.71 | MONTHLY PM COMPLETED FOR WW25 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Dec 20 1996 03:17 | 163 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 12/20/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: BJ - JUBINVILLE
LS - SHKOLNIKOV
DW - WHITFORD
INITIAL
6.2.1 Perform weekly PM checks in addition to this monthly list.
LS 6.2.2 Replace the fluid lines on the peristaltic pumps.
LS 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
BJ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout: .002
BJ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout: .001
Left Spindle Runout: .001
BJ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout: .0005
Left Spindle Hub Runout: .002
BJ/DW 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: Pre: -3.11 Post: .14
Right Spindle Force Error: Pre: 5.11 Post: .03
Left Spindle Calibration Variable:
Pre-adjust: 150.03 Post-adjust: 154.15
Right Spindle Calibration Variable:
Pre-adjust: 149.68 Post-adjust: 149.79
BJ/LS 6.2.8 Check left and right load station alignment. Adjust if
necessary.
BJ/LS 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
BJ/LS 6.2.10 Check shuttle travel. Adjust if necessary.
DW 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 24.2 Post-adjust:____________
DW 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: 15.1 Post-adjust:____________
DW 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: 5.1 Post-adjust:____________
DW 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust: 10 Post-adjust:____________
LS 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
LS 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
LS 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
BJ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
INITIAL
LS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 psi
Post-adjust:________
LS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 100 psi
Post-adjust:________
LS 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36 psi
BJ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
LS 6.1.5 Check all tubing and fittings for leaks.
LS 6.1.6 Check all tubing and fittings for air leaks.
LS 6.1.7 Check all indicator lights.
LS 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
LS 6.1.9 Wipe down polish table, tub, and splash ring.
LS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
LS 6.1.11 Wipe down pad conditioning arm.
LS 6.1.12 Remove, rinse, and replace diamond conditioning disk.
LS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
BJ 6.1.14 Wipe down outer surface of both spindle hubs.
BJ 6.1.15 Remove and clean O-rings, replace if necessary.
BJ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
LS 6.1.17 Wipe down all surfaces of the robot.
LS 6.1.18 Clean end effector vacuum chuck air port.
LS 6.1.19 Inspect and clean end effector air nozzle.
N/A 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
(Tool no longer uses p.o.u. filter)
LS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
LS 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
LS 6.1.23 Check Neslab TCU for leaks.
LS 6.1.24 Check Neslab TCU temperature readout.
LS 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
LS 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
LS 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.72 | WW 26 - Weekly completed | SUBPAC::LANDRY | | Sun Dec 22 1996 10:44 | 75 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 12/22/96 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Gee/Landry
INITIAL
__XX___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: None
__XX___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: None
__xx___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
__xx___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__xx___ 6.1.5 Check all tubing and fittings for leaks.
__xx___ 6.1.6 Check all tubing and fittings for air leaks.
__xx___ 6.1.7 Check all indicator lights.
__xx___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__xx___ 6.1.9 Wipe down polish table, tub, and splash ring.
__xx___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__xx___ 6.1.11 Wipe down pad conditioning arm.
__xx___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__xx___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__xx___ 6.1.14 Wipe down outer surface of both spindle hubs.
__xx___ 6.1.15 Remove and clean O-rings, replace if necessary.
__xx___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__xx___ 6.1.17 Wipe down all surfaces of the robot.
__xx___ 6.1.18 Clean end effector vacuum chuck air port.
__xx___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__xx___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__xx___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__xx___ 6.1.23 Check Neslab TCU for leaks.
__xx___ 6.1.24 Check Neslab TCU temperature readout.
__xx___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__xx___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__xx___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A = No longer use the point of use filters
6.1.4 Found and cleaned small pool of oil in drip pan
Replaced the pad and carriers.
Replaced 1 right hub o-ring (inside).
|
| 6.73 | CMP.A1 shutdown checksheet completed. | FABSIX::R_GEE | | Tue Dec 31 1996 15:27 | 40 |
|
CMP.A1 & CMP.A2 SHUTDOWN CHECKSHEET Tech: _Tim Landry_
----------------------------------- _Bob Gee____
Tech. Date
------- -------
1. Remove all wafer carriers. Do not re-use.
Ensure that there are a sufficient ammount
of re-built carriers to support the startup. ___X___ _12/31/96
2. Remove all wafer cassettes and drain Send
and Receive DI Water tanks. ___X___ _12/31/96
3. Purge both slurry lines with DI Water. ___X___ _12/31/96
4. Remove and discard all polishing pads. ___X___ _12/31/96
5. Remove all PVA scrub brushes and submerge
in a mixture of DI water and H2O2. ___X___ _12/31/96
6. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry
all wet surfaces. ___X___ _12/31/96
7. Rotate main incoming DI Water valves 180 deg.
so that all DI water is flowing to UDR. ___X___ _12/31/96
8. Disconnect incoming DI Water line and purge
system DI Water lines with N2. Re-connect
DI Water line when finished.
9. Power down each system. ___X___ _12/31/96
10. Power down each vacuum pump cabinet. ___X___ _12/31/96
11. Power down each Neslab TCU. ___X___ _12/31/96
12. Enter checksheet into CMP Notesfile. ___X___ _12/31/96
|
| 6.74 | WEEKLY PM COMPLETED FOR WW27 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 02 1997 22:07 | 76 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 1/2/97 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.:
Brian Jubinville (BJ)
Leon Shkolnikov (LS)
INITIAL
__BJ___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: None
__BJ___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: None
__BJ___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40
__BJ___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BJ___ 6.1.5 Check all tubing and fittings for leaks.
__BJ___ 6.1.6 Check all tubing and fittings for air leaks.
__BJ___ 6.1.7 Check all indicator lights.
__BJ___ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__BJ___ 6.1.9 Wipe down polish table, tub, and splash ring.
__BJ___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__BJ___ 6.1.11 Wipe down pad conditioning arm.
__BJ___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BJ___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BJ___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BJ___ 6.1.15 Remove and clean O-rings, replace if necessary.
__BJ___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__LS___ 6.1.17 Wipe down all surfaces of the robot.
__LS___ 6.1.18 Clean end effector vacuum chuck air port.
__BJ___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_N/A___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__BJ___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BJ___ 6.1.23 Check Neslab TCU for leaks.
__BJ___ 6.1.24 Check Neslab TCU temperature readout.
__LS___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__LS___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BJ___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 N/A = No longer use the point of use filters
6.1.21 N/A = No longer uses compression fittings
Replaced the pad.
|
| 6.75 | weekly ww28 | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Jan 06 1997 04:12 | 77 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:1/6/97 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.:MITCH RIDLON
ALBERT QUILLEN
INITIAL
_MR,AQ_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:_100____
_MR,AQ_ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:___83___
Post-adjust:__84____
_MR,AQ_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:___36___
_MR,AQ_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_MR,AQ_ 6.1.5 Check all tubing and fittings for leaks.
_MR,AQ_ 6.1.6 Check all tubing and fittings for air leaks.
_MR,AQ_ 6.1.7 Check all indicator lights.
_MR,AQ_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_MR,AQ_ 6.1.9 Wipe down polish table, tub, and splash ring.
_MR,AQ_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_MR,AQ_ 6.1.11 Wipe down pad conditioning arm.
_MR,AQ_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_MR,AQ_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_MR,AQ_ 6.1.14 Wipe down outer surface of both spindle hubs.
_MR,AQ_ 6.1.15 Remove and clean O-rings, replace if necessary.
_MR,AQ_ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
_MR,AQ_ 6.1.17 Wipe down all surfaces of the robot.
_MR,AQ_ 6.1.18 Clean end effector vacuum chuck air port.
_MR,AQ_ 6.1.19 Inspect and clean end effector air nozzle.
__NA___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_MR,AQ_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_MR,AQ_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_MR,AQ_ 6.1.23 Check Neslab TCU for leaks.
_MR,AQ_ 6.1.24 Check Neslab TCU temperature readout.
_MR,AQ_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_MR,AQ_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_MR,AQ_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.2 Highest N2 pressure attainable was 84psi.
6.1.3 Highest DI water pressure attainable was 36psi.
6.1.20 Point of use slurry filters no longer used.
Engineer notified.
|
| 6.76 | ww29 monthly completed | FABSIX::B_FINN | | Tue Jan 14 1997 15:08 | 177 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 1-14-97 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: James Sadin (JS)
Brendan Finn (BF)
Timothy Landry (TL)
Bob Gee (BG)
INITIAL
__JS___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
__TL__ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__BF__ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
JS/BF/TL 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002______
JS/BF/TL 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:____.001______
Left Spindle Runout:______.001______
JS/BF/TL 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:_pre.001_ post.001______
Left Spindle Hub Runout:__pre.001- post.001_______
_TL/BG_ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: +.25
Right Spindle Force Error: +1.9
Left Spindle Calibration Variable:
Pre-adjust: 153.56 Post-adjust: 150.02
Right Spindle Calibration Variable:
Pre-adjust: 149.43 Post-adjust: 147.88
__BG__ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
__BG__ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__BG__ 6.2.10 Check shuttle travel. Adjust if necessary.
_TL/JS_ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___24.00_____ Post-adjust:___NONE_________
__TL__ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.00/-15.00 Post-adjust:___NONE______
_TL/JS_ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:___5.09_____ Post-adjust:___5.00____
_TL/BF_ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___9.9___ Post-adjust:__none available____
__BG__ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__TL__ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
_TL/BF_ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__BF__ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connections.
COMMENTS: 6.2.19 Added softwater to the Neslab TCU
Engineer notified.
6.2.16 Five volt supply found to be 5.09 adjusted to 5.0
volts. Engineer Notified.
6.2.17 Twelve volt supply found at 9.9 volts, no adjustment
available. Engineer Notified.
================================================================================
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 1-14-97 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.:Tim Landry (TL)
Jim Sadin (JS)
Bob Gee (BG)
Brendan Finn (BF)
INITIAL
__BF___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100 PSI
Post-adjust: None
__BF___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85 PSI
Post-adjust: 85 PSI
__BF___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 PSI
_BF/TL___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__TL___ 6.1.5 Check all tubing and fittings for leaks.
__BF___ 6.1.6 Check all tubing and fittings for air leaks.
__BG__ 6.1.7 Check all indicator lights.
TL_BG_BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__JS___ 6.1.9 Wipe down polish table, tub, and splash ring.
_TL/BF_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__JS___ 6.1.11 Wipe down pad conditioning arm.
__JS___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__JS___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF___ 6.1.15 Remove and clean O-rings, replace if necessary.
__BG___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__BF___ 6.1.17 Wipe down all surfaces of the robot.
__BF___ 6.1.18 Clean end effector vacuum chuck air port.
__BF___ 6.1.19 Inspect and clean end effector air nozzle.
_N/A___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
NOTE: No point of use filters.
__TL___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_BF/TL_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BG___ 6.1.23 Check Neslab TCU for leaks.
__BG___ 6.1.24 Check Neslab TCU temperature readout.
__BG___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BG___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BG___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS: 6.1.20 The system no longer utilizes said filter. Equip Eng has
been notified.
6.1.3 Water supply is at 37 PSI, spec called for 40 psi.
Could not increase. Equip Eng has been notified.
|
| 6.77 | WW XXX - Weekly completed | SUBPAC::LANDRY | | Sun Jan 19 1997 19:33 | 75 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:1/19/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Tim Landry (TL)
Brendan Finn (BF)
Jim Sadin (JS)
INITIAL
__JS___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__JS___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 82
Post-adjust: 85
__JS___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
__BF___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__TL___ 6.1.5 Check all tubing and fittings for leaks.
__TL___ 6.1.6 Check all tubing and fittings for air leaks.
__JS___ 6.1.7 Check all indicator lights.
JS/TL/BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
__TL___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__BF___ 6.1.11 Wipe down pad conditioning arm.
__TL___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__TL___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF___ 6.1.15 Remove and clean O-rings, replace if necessary.
__JS___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__BF___ 6.1.17 Wipe down all surfaces of the robot.
__BF___ 6.1.18 Clean end effector vacuum chuck air port.
__BF___ 6.1.19 Inspect and clean end effector air nozzle.
__NA___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__TL___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__TL___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BF___ 6.1.23 Check Neslab TCU for leaks.
__BF___ 6.1.24 Check Neslab TCU temperature readout.
__JS___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__JS___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BF___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.3 System unable to reach 40 PSI, Equip Eng notified
6.1.20 Point of use slurry filters no longer used, Equip Eng notified
|
| 6.78 | ww 31 weekly p.m. completed | FABSIX::R_GEE | | Sun Jan 26 1997 15:29 | 75 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:1/26/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Tim Landry (TL)
Brendan Finn (BF)
Jim Sadin (JS)
INITIAL Bob Gee (BG)
__BG___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__BG___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 80
Post-adjust: 85
__BG___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36
__BF___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__TL___ 6.1.5 Check all tubing and fittings for leaks.
__TL___ 6.1.6 Check all tubing and fittings for air leaks.
__JS___ 6.1.7 Check all indicator lights.
JS/TL/BF/BG 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL___ 6.1.9 Wipe down polish table, tub, and splash ring.
__TL___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__BF___ 6.1.11 Wipe down pad conditioning arm.
__TL___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BG___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF___ 6.1.14 Wipe down outer surface of both spindle hubs.
__BG___ 6.1.15 Remove and clean O-rings, replace if necessary.
__JS___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__BG___ 6.1.17 Wipe down all surfaces of the robot.
__BG___ 6.1.18 Clean end effector vacuum chuck air port.
__BG___ 6.1.19 Inspect and clean end effector air nozzle.
__NA___ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__TL___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__TL___ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BF___ 6.1.23 Check Neslab TCU for leaks.
__BF___ 6.1.24 Check Neslab TCU temperature readout.
__BG___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BG___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BG___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.3 System unable to reach 40 PSI, Equip Eng notified
6.1.20 Point of use slurry filters no longer used, Equip Eng notified
|
| 6.79 | WW32 Weekly PM completed | FABSIX::R_POIRIER | | Tue Feb 04 1997 02:58 | 76 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:2/03/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Mitch Ridlon (MR)
Roger Poirier (RP)
INITIAL
__RP__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__RP__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__RP__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
__RP__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__RP__ 6.1.5 Check all tubing and fittings for leaks.
__RP__ 6.1.6 Check all tubing and fittings for air leaks.
__RP__ 6.1.7 Check all indicator lights.
__RP__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__RP__ 6.1.9 Wipe down polish table, tub, and splash ring.
__RP__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__RP__ 6.1.11 Wipe down pad conditioning arm.
__RP__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__RP__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__RP__ 6.1.14 Wipe down outer surface of both spindle hubs.
__RP__ 6.1.15 Remove and clean O-rings, replace if necessary.
__RP__ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__RP__ 6.1.17 Wipe down all surfaces of the robot.
__RP__ 6.1.18 Clean end effector vacuum chuck air port.
__RP__ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__RP__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__RP__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__RP__ 6.1.23 Check Neslab TCU for leaks.
__RP__ 6.1.24 Check Neslab TCU temperature readout.
__RP__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__RP__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__RP__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.3 System unable to reach 40 PSI, Equip Eng notified
6.1.20 Point of use slurry filters no longer used, Equip Eng notified
|
| 6.80 | WW 33 - Weekly completed | SUBPAC::LANDRY | | Sun Feb 09 1997 16:16 | 76 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:2/09/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Tim Landry (TL)
Brendan Finn (BF)
Jim Sadin (JS)
INITIAL
__TL__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__TL__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__TL__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36
__JS__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BF__ 6.1.5 Check all tubing and fittings for leaks.
__BF__ 6.1.6 Check all tubing and fittings for air leaks.
_JS/BF_6.1.7 Check all indicator lights.
TL/JS/BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL__ 6.1.9 Wipe down polish table, tub, and splash ring.
__JS__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__JS__ 6.1.11 Wipe down pad conditioning arm.
__JS__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BF__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF__ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF__ 6.1.15 Remove and clean O-rings, replace if necessary.
__BF__ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__TL__ 6.1.17 Wipe down all surfaces of the robot.
__TL__ 6.1.18 Clean end effector vacuum chuck air port.
__TL__ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__JS__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__TL__ 6.1.23 Check Neslab TCU for leaks.
__TL__ 6.1.24 Check Neslab TCU temperature readout.
_TL/BF_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_TL/BF_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BF__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.3 System unable to reach 40 PSI (36 at PM), Equip Eng notified
6.1.20 Point of use slurry filters no longer used, Equip Eng notified
|
| 6.80 | MONTHLY PM COMPLETED FOR WW33 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Feb 13 1997 23:26 | 167 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 2-13-97 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: James Sadin (JS)
Brendan Finn (BF)
Timothy Landry (TL)
Brian Jubinville (BJ)
INITIAL Jim Tooker (JT)
JS/BF/TL 6.2.1 Perform weekly PM checks in addition to this monthly list.
__BJ__ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__BF__ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__TL__ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002_____
__BF__ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___.001_______
Left Spindle Runout:_____.001_______
__JS__ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:____.001______
Left Spindle Hub Runout:_____.001______
_BJ/JT_ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: < 3
Right Spindle Force Error: < 3
Left Spindle Calibration Variable:
Pre-adjust: 148.65 Post-adjust: 148.65
Right Spindle Calibration Variable:
Pre-adjust: 141.85 Post-adjust: 141.85
__JS___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
__JS____ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__BF____ 6.2.10 Check shuttle travel. Adjust if necessary.
__TL__ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___24.02_____ Post-adjust:___NONE_________
__TL__ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.01/-15.01 Post-adjust:___NONE______
__TL__ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:___5.00_____ Post-adjust:___5.00____
__TL__ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___9.9___ Post-adjust:__none available____
__BF__ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__TL__ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__BF__ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__BF__ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connections.
COMMENTS: 6.2.17 Twelve volt power supply is not equipped with adjust-
ment capabilities. Read is taken for a reference only.
6.1.18 The Glycol solution was emptied and a new batch was
installed
================================================================================
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:2/09/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Tim Landry (TL)
Brendan Finn (BF)
Jim Sadin (JS)
INITIAL
__TL__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__TL__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__TL__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36
__JS__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BF__ 6.1.5 Check all tubing and fittings for leaks.
__BF__ 6.1.6 Check all tubing and fittings for air leaks.
_JS/BF_6.1.7 Check all indicator lights.
TL/JS/BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL__ 6.1.9 Wipe down polish table, tub, and splash ring.
__JS__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__JS__ 6.1.11 Wipe down pad conditioning arm.
__JS__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BF__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF__ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF__ 6.1.15 Remove and clean O-rings, replace if necessary.
__BF__ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__TL__ 6.1.17 Wipe down all surfaces of the robot.
__TL__ 6.1.18 Clean end effector vacuum chuck air port.
__TL__ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__JS__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__TL__ 6.1.23 Check Neslab TCU for leaks.
__TL__ 6.1.24 Check Neslab TCU temperature readout.
_TL/BF_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_TL/BF_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BF__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.20 Point of use slurry filters no longer used, Equip Eng notified
|
| 6.81 | WW33 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Sun Feb 16 1997 19:42 | 76 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:2/16/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Brendan Finn (BF)
Tim Landry (TL)
Jim Sadin (JS)
INITIAL
__BF__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__BF__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__JS__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 38
__JS__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BF__ 6.1.5 Check all tubing and fittings for leaks.
__BF__ 6.1.6 Check all tubing and fittings for air leaks.
__TL/JS__ 6.1.7 Check all indicator lights.
__TL__ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL__ 6.1.9 Wipe down polish table, tub, and splash ring.
__BF__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__JS__ 6.1.11 Wipe down pad conditioning arm.
__TL__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__TL__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__TL__ 6.1.14 Wipe down outer surface of both spindle hubs.
__JS__ 6.1.15 Remove and clean O-rings, replace if necessary.
__BF__ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__BF__ 6.1.17 Wipe down all surfaces of the robot.
__JS__ 6.1.18 Clean end effector vacuum chuck air port.
__JS__ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__TL__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__BF__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__JS__ 6.1.23 Check Neslab TCU for leaks.
__JS__ 6.1.24 Check Neslab TCU temperature readout.
__TL__ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__BF__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BF__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.3 System unable to reach 40 PSI, Equip Eng notified
6.1.20 Point of use slurry filters no longer used, Equip Eng notified
|
| 6.82 | WW35 WEEKLY PM | FABSIX::R_POIRIER | | Sun Feb 23 1997 06:54 | 77 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:2/23/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Mitch Ridlon (MR)
Roger Poirier (RP)
Albert Quillen (AQ)
INITIAL
__RP_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__RP_ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__RP_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36
__MR_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
MR/RP 6.1.5 Check all tubing and fittings for leaks.
MR/RP 6.1.6 Check all tubing and fittings for air leaks.
MR/RP 6.1.7 Check all indicator lights.
AQ/RP/MR 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__MR_ 6.1.9 Wipe down polish table, tub, and splash ring.
__MR_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__MR_ 6.1.11 Wipe down pad conditioning arm.
__MR_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__MR_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__MR_ 6.1.14 Wipe down outer surface of both spindle hubs.
__MR_ 6.1.15 Remove and clean O-rings, replace if necessary.
MR/AQ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
__MR_ 6.1.17 Wipe down all surfaces of the robot.
__MR_ 6.1.18 Clean end effector vacuum chuck air port.
__MR_ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__RP_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
AQ/RP/MR 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__RP_ 6.1.23 Check Neslab TCU for leaks.
__RP_ 6.1.24 Check Neslab TCU temperature readout.
__MR_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__MR_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__RP_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.3 System unable to reach 40 PSI, Equip Eng notified
6.1.20 Point of use slurry filters no longer used, Equip Eng notified
|
| 6.83 | WW36 WEEKLY PM CHECKSHEET | ASDG::POIRIER | | Wed Mar 05 1997 18:47 | 78 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:4/5/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: John Poirier - JP
John Swenson - JS
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS * 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 35 PSI
JP 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
JP 6.1.5 Check all tubing and fittings for leaks.
JP 6.1.6 Check all tubing and fittings for air leaks.
JP 6.1.7 Check all indicator lights.
JS 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
JS 6.1.9 Wipe down polish table, tub, and splash ring.
JS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JP 6.1.11 Wipe down pad conditioning arm.
JP 6.1.12 Remove, rinse, and replace diamond conditioning disk.
JP 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
JP 6.1.14 Wipe down outer surface of both spindle hubs.
JS 6.1.15 Remove and clean O-rings, replace if necessary.
JS 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
JS 6.1.17 Wipe down all surfaces of the robot.
JS 6.1.18 Clean end effector vacuum chuck air port.
JS 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
JP 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
JP/JS 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
JP 6.1.23 Check Neslab TCU for leaks.
JP 6.1.24 Check Neslab TCU temperature readout.
JP 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
JP 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
JP 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* 6.1.3 System unable to reach 40 PSI, Equip Eng notified.
N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 6.84 | ww37 weekly p.m. completed | FABSIX::R_GEE | | Sun Mar 09 1997 19:25 | 75 |
|
DATE:4/9/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Bob Gee - BG
INITIAL
BG 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
BG 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
BG * 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 35 PSI
BG 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
BG 6.1.5 Check all tubing and fittings for leaks.
BG 6.1.6 Check all tubing and fittings for air leaks.
BG 6.1.7 Check all indicator lights.
BG 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
BG 6.1.9 Wipe down polish table, tub, and splash ring.
BG 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
BG 6.1.11 Wipe down pad conditioning arm.
BG 6.1.12 Remove, rinse, and replace diamond conditioning disk.
BG 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
BG 6.1.14 Wipe down outer surface of both spindle hubs.
BG 6.1.15 Remove and clean O-rings, replace if necessary.
BG 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
BG 6.1.17 Wipe down all surfaces of the robot.
BG 6.1.18 Clean end effector vacuum chuck air port.
BG 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
BG 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
BG 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BG 6.1.23 Check Neslab TCU for leaks.
BG 6.1.24 Check Neslab TCU temperature readout.
BG 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
BG 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BG 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* 6.1.3 System unable to reach 40 PSI, Equip Eng notified.
N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 6.85 | WW38 SEMI-ANNUAL PM COMPLETED | FABSIX::R_POIRIER | | Tue Mar 18 1997 06:56 | 217 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 03-17-97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: BRENDAN FINN (BF)
BOB GEE (BG)
TIM LANDRY (TL)
JAMES SADIN (JS)
MITCH RIDLON (MR)
AL QUILLEN (AQ)
ROGER POIRIER (RP)
INITIAL
__JS___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:_100____
__JS___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__80____
Post-adjust:_80*_____
__JS___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__36*___
__AQ___ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BF___ 6.1.5 Check all tubing and fittings for leaks.
__BG___ 6.1.6 Check all tubing and fittings for air leaks.
__BF___ 6.1.7 Check all indicator lights.
__MR____6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__AQ___ 6.1.9 Wipe down polish table, tub, and splash ring.
__AQ___ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__AQ___ 6.1.11 Wipe down pad conditioning arm.
__AQ___ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__AQ___ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BG___ 6.1.14 Wipe down outer surface of both spindle hubs.
_BG/BF_ 6.1.15 Remove and clean O-rings, replace if necessary.
__AQ___ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__AQ___ 6.1.17 Wipe down all surfaces of the robot.
__AQ___ 6.1.18 Clean end effector vacuum chuck air port.
__AQ___ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_JS/TL_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__JS___ 6.1.23 Check Neslab TCU for leaks.
__JS___ 6.1.24 Check Neslab TCU temperature readout.
__TL___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__TL___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__MR___ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
_________6.1.3 MAX AT 36, CAN'T GET 40._(ENG INFORMED)_____________________
_________6.1.2 MAX AT 80, CAN'T GET 85._(ENG INFORMED)_____________________
_________6.1.20 SYSTEM HAS NO POINT OF USE SLURRY FILTERS(ENG INFORMED)
___________________________________________________________________________
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 03-17-97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: BRENDAN FINN (BF)
BOB GEE (BG)
TIM LANDRY (TL)
JAMES SADIN (JS)
MITCH RIDLON (MR)
AL QUILLEN (AQ)
ROGER POIRIER (RP)
INITIAL
__RP___ 6.2.1 Perform weekly PM checks in addition to this monthly list.
__JS___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__BG___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__BF___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.001"____
__BF___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___0.025 ADJUSTED TO .001"__
Left Spindlele Runout:__.001"_____
__BF___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:___.001"____
Left Spindle Hub Runout:_____.001"__
__RP___ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:____-0.18___
Right Spindle Force Error:___-0.22____
Left Spindle Calibration Variable:
Pre-adjust:___.99______ Post-adjust:___1.00_____
Right Spindle Calibration Variable:
Pre-adjust:___.99 _____ Post-adjust:___1.00_____
_AQ/RP_ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_AQ/RP_ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__RP___ 6.2.10 Check shuttle travel. Adjust if necessary.
_TL/JS_ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:__24.03V____ Post-adjust:___24.03V___
_TL/JS_ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15V/-15.01V Post-adjust: +15V/-15.01V
_TL/JS_ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:___4.99V____ Post-adjust:____4.99V___
_TL/JS_ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____9.91ACV POST-AJDUST:____9.91V*__
__BG___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__BG___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__BG___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__BF___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
__________6.2.17 - NON ADJUSTABLE - REFERENCE READING ONLY_________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Semmi-annual Preventive Maintenance Check Sheet, REV. C
DATE: 03-17-97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: BRENDAN FINN (BF)
JAMES SADIN (JS)
ROGER POIRIER (RP)
INITIAL
__RP___ 6.3.1 Perform Weekly and Monthly PM's in addition to this Semi-Annual
list.
__MR___ 6.3.2 Check all safety interlocked doors for proper operation.
__MR___ 6.3.2 Check all EMO's for proper operation.
_BF/JS_ 6.3.3 Change oil in the brush rotation gear box using AGMA #8 or
equivalent oil.
_BF/JS_ 6.3.4 Change oil in the left and right spindle gear boxes using AGMA
#8 or equivalent oil.
_BF/JS_ 6.3.5 Change oil in the polish table gear box using AGMA #8 or
equivalent oil.
COMMENTS:__________________________________________________________________
___________LEFT ROTARY UNION FOUND TO BE BAD. REPLACED. ___________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.86 | WW39 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Mon Mar 24 1997 09:29 | 80 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:03/24/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: BRENDAN FINN
JAMES SADIN
TIMOTHY LANDRY
BOB GEE
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS * 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 PSI
TL 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
BG 6.1.5 Check all tubing and fittings for leaks.
BG 6.1.6 Check all tubing and fittings for air leaks.
BF 6.1.7 Check all indicator lights.
BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
JS 6.1.9 Wipe down polish table, tub, and splash ring.
JS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JS 6.1.11 Wipe down pad conditioning arm.
BF 6.1.12 Remove, rinse, and replace diamond conditioning disk.
JS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
TL 6.1.14 Wipe down outer surface of both spindle hubs.
TL 6.1.15 Remove and clean O-rings, replace if necessary.
BF 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
BG 6.1.17 Wipe down all surfaces of the robot.
BG 6.1.18 Clean end effector vacuum chuck air port.
BG 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
JS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
TL/JS 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
JS 6.1.23 Check Neslab TCU for leaks.
JS 6.1.24 Check Neslab TCU temperature readout.
TL 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BF 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* 6.1.3 System unable to reach 40 PSI, Equip Eng notified.
N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 6.87 | WW40 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 30 1997 11:58 | 79 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:03/30/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: BRENDAN FINN
JAMES SADIN
TIMOTHY LANDRY
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS * 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 PSI
TL 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
TL 6.1.5 Check all tubing and fittings for leaks.
BF 6.1.6 Check all tubing and fittings for air leaks.
BF 6.1.7 Check all indicator lights.
BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
JS 6.1.9 Wipe down polish table, tub, and splash ring.
JS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JS 6.1.11 Wipe down pad conditioning arm.
BF 6.1.12 Remove, rinse, and replace diamond conditioning disk.
JS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
TL 6.1.14 Wipe down outer surface of both spindle hubs.
TL 6.1.15 Remove and clean O-rings, replace if necessary.
BF 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
JS 6.1.17 Wipe down all surfaces of the robot.
JS 6.1.18 Clean end effector vacuum chuck air port.
JS 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
JS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
TL/JS 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BF 6.1.23 Check Neslab TCU for leaks.
BF 6.1.24 Check Neslab TCU temperature readout.
TL 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BF 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* 6.1.3 System unable to reach 40 PSI, Equip Eng notified.
N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 6.88 | WW41 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Sun Apr 06 1997 13:11 | 79 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:04/06/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: BRENDAN FINN
JAMES SADIN
TIMOTHY LANDRY
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS * 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 PSI
TL 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
TL 6.1.5 Check all tubing and fittings for leaks.
BF 6.1.6 Check all tubing and fittings for air leaks.
BF 6.1.7 Check all indicator lights.
BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
JS 6.1.9 Wipe down polish table, tub, and splash ring.
JS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JS 6.1.11 Wipe down pad conditioning arm.
BF 6.1.12 Remove, rinse, and replace diamond conditioning disk.
JS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
TL 6.1.14 Wipe down outer surface of both spindle hubs.
TL 6.1.15 Remove and clean O-rings, replace if necessary.
BF 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
JS 6.1.17 Wipe down all surfaces of the robot.
JS 6.1.18 Clean end effector vacuum chuck air port.
JS 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
JS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
TL/JS 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BF 6.1.23 Check Neslab TCU for leaks.
BF 6.1.24 Check Neslab TCU temperature readout.
TL 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BF 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* 6.1.3 System unable to reach 40 PSI, Equip Eng notified.
N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 6.89 | WW42 - Monthly completed | SUBPAC::LANDRY | | Wed Apr 16 1997 08:05 | 165 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 04-15-97 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: James Sadin (JS)
Brendan Finn (BF)
Timothy Landry (TL)
INITIAL
BF/JS/TL 6.2.1 Perform weekly PM checks in addition to this monthly list.
__TL__ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__TL__ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__JS__ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002_____
__JS__ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___.001_______
Left Spindle Runout:_____.001_______
__JS__ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:____.001______
Left Spindle Hub Runout:_____.001______
_TL/JS_ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: -.75
Right Spindle Force Error: -.81
Left Spindle Calibration Variable:
Pre-adjust: 151.00 Post-adjust: 159.24
Right Spindle Calibration Variable:
Pre-adjust: 149.21 Post-adjust: 153.47
__BF__ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
__BF__ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__BF__ 6.2.10 Check shuttle travel. Adjust if necessary.
__TL__ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___24.05_____ Post-adjust:___NONE_________
__TL__ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.00/-15.01 Post-adjust:___NONE______
__TL__ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:___5.00_____ Post-adjust:___5.00____
__TL__ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___9.9___ Post-adjust:__none available____
__JS__ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__BF__ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__BF__ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__BF__ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connections.
COMMENTS: 6.2.17 Twelve volt power supply is not equipped with adjust-
ment capabilities. Read is taken for a reference only.
================================================================================
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:04-15-97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Tim Landry (TL)
Brendan Finn (BF)
Jim Sadin (JS)
INITIAL
__BF__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__BF__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__BF__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36
__JS__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__TL__ 6.1.5 Check all tubing and fittings for leaks.
__TL__ 6.1.6 Check all tubing and fittings for air leaks.
__BF__ 6.1.7 Check all indicator lights.
TL/JS/BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__JS__ 6.1.9 Wipe down polish table, tub, and splash ring.
__TL__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__JS__ 6.1.11 Wipe down pad conditioning arm.
__JS__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__JS__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF__ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF__ 6.1.15 Remove and clean O-rings, replace if necessary.
__TL__ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__JS__ 6.1.17 Wipe down all surfaces of the robot.
__JS__ 6.1.18 Clean end effector vacuum chuck air port.
__JS__ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__TL__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_JS/TL_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__BF__ 6.1.23 Check Neslab TCU for leaks.
__BF__ 6.1.24 Check Neslab TCU temperature readout.
__JS_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__JS__ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BF__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.20 Point of use slurry filters no longer used, Equip Eng notified
|
| 6.90 | Weekly PM completed | FABSIX::R_POIRIER | | Mon Apr 21 1997 07:46 | 81 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:04/20/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Roger Poirier (RP)
Bruce Durgun (BD)
Al Quillen (AQ)
INITIAL
RP/BD 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
RP/BD 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
RP/BD 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 PSI *
RP/BD 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
RP/BD 6.1.5 Check all tubing and fittings for leaks.
RP/BD 6.1.6 Check all tubing and fittings for air leaks.
RP/BD 6.1.7 Check all indicator lights.
RP/BD 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
RP/BD/AQ 6.1.9 Wipe down polish table, tub, and splash ring.
RP/BD/AQ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
RP/BD/AQ 6.1.11 Wipe down pad conditioning arm.
AQ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
BD 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
RP 6.1.14 Wipe down outer surface of both spindle hubs.
RP 6.1.15 Remove and clean O-rings, replace if necessary.
RP 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
RP 6.1.17 Wipe down all surfaces of the robot.
RP 6.1.18 Clean end effector vacuum chuck air port.
RP 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
RP 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
RP/BD 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
RP 6.1.23 Check Neslab TCU for leaks.
RP 6.1.24 Check Neslab TCU temperature readout.
RP 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
RP 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
RP 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* 6.1.3 System unable to reach 40 PSI, Equip Eng notified.
N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 6.91 | Weekly PM for WW44 completed. | FABSIX::J_SADIN | Freedom isn't free. | Sun Apr 27 1997 11:26 | 81 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:04/27/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: James Sadin
Timothy Landry
Bob Gee
INITIAL
js/bg 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
js/bg 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
js/bg 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 37 PSI *
tl 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
bg 6.1.5 Check all tubing and fittings for leaks.
bf 6.1.6 Check all tubing and fittings for air leaks.
tl/js 6.1.7 Check all indicator lights.
tl/js 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
tl/js/bg 6.1.9 Wipe down polish table, tub, and splash ring.
tl/js/bg 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
js 6.1.11 Wipe down pad conditioning arm.
js 6.1.12 Remove, rinse, and replace diamond conditioning disk.
js 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
tl 6.1.14 Wipe down outer surface of both spindle hubs.
*tl 6.1.15 Remove and clean O-rings, replace if necessary.
tl 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
bg 6.1.17 Wipe down all surfaces of the robot.
bg 6.1.18 Clean end effector vacuum chuck air port.
bg 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
js 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
js/tl 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
js 6.1.23 Check Neslab TCU for leaks.
js 6.1.24 Check Neslab TCU temperature readout.
tl 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
tl 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
tl 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* 6.1.3 System unable to reach 40 PSI, Equip Eng notified.
* 6.1.15 Replaced innermost o-ring on both spindles. Equip eng
notified.
N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 6.92 | ww45 weekly pm. | FABSIX::L_SHKOLNIKOV | | Sat May 10 1997 00:08 | 79 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:05/09/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Leon Shkolnikov ls
Dave Morin DM
INITIAL
ls 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
ls 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
ls 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 PSI
DM 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
ls 6.1.5 Check all tubing and fittings for leaks.
ls 6.1.6 Check all tubing and fittings for air leaks.
ls 6.1.7 Check all indicator lights.
ls/DM 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
DM 6.1.9 Wipe down polish table, tub, and splash ring.
DM 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
DM 6.1.11 Wipe down pad conditioning arm.
DM 6.1.12 Remove, rinse, and replace diamond conditioning disk.
ls 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
ls/DM 6.1.14 Wipe down outer surface of both spindle hubs.
ls/DM 6.1.15 Remove and clean O-rings, replace if necessary.
ls/DM 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
ls 6.1.17 Wipe down all surfaces of the robot.
ls 6.1.18 Clean end effector vacuum chuck air port.
ls 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
ls 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
ls/DM 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
ls 6.1.23 Check Neslab TCU for leaks.
ls 6.1.24 Check Neslab TCU temperature readout.
ls 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
ls 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
ls 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 6.93 | ww 46 monthly p.m. completed | FABSIX::J_SWENSON | | Wed May 14 1997 19:46 | 164 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 5/14/97 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Brian Jubinville (BJ)
Dave Morin (DM)
John Swenson (JS)
INITIAL BJ/DM Mike Standing (MS)
JS/MS__ 6.2.1 Perform weekly PM checks in addition to this monthly list.
JS_____ 6.2.2 Replace the fluid lines on the peristaltic pumps.
____JS_ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_JS/MS_ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:_.002"_
_JS/MS__ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:_.0015"__
Left Spindlele Runout:_.0005"__
__JS/MS 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:_.002"__
Left Spindle Hub Runout:__.001"_____
BJ/DM 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: pre: -8.69 post: -1.6
Right Spindle Force Error: pre: .3 post: .3
Left Spindle Calibration Variable:
Pre-adjust: 159.02 Post-adjust: 167.71
Right Spindle Calibration Variable:
Pre-adjust: 155.19 Post-adjust: 155.19
JS/MS__ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
JS/MS__ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
JS/MS__ 6.2.10 Check shuttle travel. Adjust if necessary.
____JS_ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___24.05_________ Post-adjust:____24.05________
____JS_ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.00/-14.94 Post-adjust: +15.00/-14.94
____JS_ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust: +4.99 Post-adjust: +4.99
____JS_ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:10vac____________ Post-adjust:10vac____________
_____JS_ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
_____JS_ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
_____JS_ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
_____JS_ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:6.2.17 There is no adj. capabilities, reading is used only as a
reference.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:__________ SYSTEM RTC CODE:__________ EQUIP. TECH.:_______________
INITIAL
____JS_ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:________100
Post-adjust:_______100_
____JS_ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:________89
Post-adjust:________85
____JS_ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__38psi___
____JS_ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_____JS_ 6.1.5 Check all tubing and fittings for leaks.
____JS_ 6.1.6 Check all tubing and fittings for air leaks.
_____JS_ 6.1.7 Check all indicator lights.
____MS_ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
____MS_ 6.1.9 Wipe down polish table, tub, and splash ring.
____MS_ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_____MS_ 6.1.11 Wipe down pad conditioning arm.
_____MS_ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_____MS_ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
____MS_ 6.1.14 Wipe down outer surface of both spindle hubs.
____MS_ 6.1.15 Remove and clean O-rings, replace if necessary.
____MS_ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
____JS_ 6.1.17 Wipe down all surfaces of the robot.
____JS_ 6.1.18 Clean end effector vacuum chuck air port.
____JS_ 6.1.19 Inspect and clean end effector air nozzle.
___N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
____JS_ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_JS/MS_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
____JS_ 6.1.23 Check Neslab TCU for leaks.
____JS_ 6.1.24 Check Neslab TCU temperature readout.
____JS_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
____JS_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
____JS_ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:6.1.20 :: No longer use filters
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 6.94 | WW47 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Sun May 18 1997 17:31 | 80 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:05/18/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: James Sadin
Bob Gee
Dave Whitford
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36 PSI*
BG 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
BG 6.1.5 Check all tubing and fittings for leaks.
6.1.6 Check all tubing and fittings for air leaks.
BG
6.1.7 Check all indicator lights.
JS/DW 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
JS/DW 6.1.9 Wipe down polish table, tub, and splash ring.
JS/DW 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
BG 6.1.11 Wipe down pad conditioning arm.
BG 6.1.12 Remove, rinse, and replace diamond conditioning disk.
BG 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
JS/BG 6.1.14 Wipe down outer surface of both spindle hubs.
JS/BG 6.1.15 Remove and clean O-rings, replace if necessary.
DW 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
DW 6.1.17 Wipe down all surfaces of the robot.
BG/DW 6.1.18 Clean end effector vacuum chuck air port.
BG/DW 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
JS/DW 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
JS/DW 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BG 6.1.23 Check Neslab TCU for leaks.
BG 6.1.24 Check Neslab TCU temperature readout.
BG 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
BG 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BG 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
6.1.3 - CAN'T REACH 40PSI. ENG NOTIFIED.
|
| 6.95 | WW48 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 10:21 | 80 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:05/25/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: James Sadin
Bob Gee
Tim Landry
Brendan Finn
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 PSI
BG 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
BG/TL 6.1.5 Check all tubing and fittings for leaks.
BG/TL 6.1.6 Check all tubing and fittings for air leaks.
BF 6.1.7 Check all indicator lights.
BG/TL 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
TL/BF 6.1.9 Wipe down polish table, tub, and splash ring.
TL/JS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
BF/BG 6.1.11 Wipe down pad conditioning arm.
TL 6.1.12 Remove, rinse, and replace diamond conditioning disk.
TL/JS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
BF/JS 6.1.14 Wipe down outer surface of both spindle hubs.
TL/BG 6.1.15 Remove and clean O-rings, replace if necessary.
JS/TL 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
BG 6.1.17 Wipe down all surfaces of the robot.
BG/TL 6.1.18 Clean end effector vacuum chuck air port.
BG 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
BG/JS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
JS/BG 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BG/JS 6.1.23 Check Neslab TCU for leaks.
BG/JS 6.1.24 Check Neslab TCU temperature readout.
TL/BG 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
BG/TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
BF/BG 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|
| 6.96 | CMP.A1 SHUTDOWN AND STARTUP CHECKSHEETS | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 11:04 | 83 |
|
CMP.A1
CMP.A1 & CMP.A2 SHUTDOWN CHECKSHEET FOR 5/26/97
-----------------------------------------------
ROGER POIRIER (RP)
BRUCE DURGIN (BD)
Tech. Date
------- -------
1. Change Workstream tool status to NON-SCHEDULED
DOWN. If Workstream will not let the tools go
to NON-SCHEDULED, leave the tools at UP IDLE.
DO NOT put any tools to SCHEDULED or UNSCHEDULED RP 5-26
DOWN. _______ _______
2. Remove all wafer carriers. Do not re-use.
Ensure that there are a sufficient ammount RP 5-26
of re-built carriers to support the startup. _______ _______
3. Remove all wafer cassettes and drain Send BD,RP 5-26
and Receive DI Water tanks. _______ _______
RP 5-26
4. Purge both slurry lines with DI Water. _______ _______
RP 5-26
5. Remove and discard all polishing pads. _______ _______
6. Remove all PVA scrub brushes and submerge RP 5-26
in a mixture of DI water and H2O2. _______ _______
7. Perform a complete clean of each system
to remove dried slurry. Wipe down and dry BD,RP 5-26
all wet surfaces. _______ _______
8. Rotate main incoming DI Water valves 180 deg. RP 5-26
so that all DI water is flowing to UDR. _______ _______
RP 5-26
9. Power down each system. _______ _______
RP 5-26
10. Power down each vacuum pump cabinet. _______ _______
RP 5-26
11. Power down each Neslab TCU. _______ _______
12. Enter checksheet into CMP Notesfile.
CMP.A1 & CMP.A2 STARTUP CHECKSHEET FOR 5/27
-------------------------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are js/tl 5/27
available and ready to use. _______ _______
js/tl 5/27
2. Power up each system. _______ _______
js/tl 5/27
3. Power up each vacuum pump cabinet. _______ _______
js/tl 5/27
4. Power up each Neslab TCU. _______ _______
5. Rotate main incoming DI Water valves 180 deg. js/tl 5/27
so that all DI water is flowing into the tool _______ _______
6. Place cassettes in left and right send
and receive stations to fill DI Water js/tl 5/27
tanks. _______ _______
js/tl 5/27
7. Install new polishing pads. _______ _______
js/tl 5/27
8. Install new wafer carriers. _______ _______
js/tl 5/27
9. Re-install PVA scrub brushes. _______ _______
js/tl 5/27
10. Perform polish pad breakin. _______ _______
11. Notify Operations that the systems are ready js/tl 5/27
MQC's. _______ _______
12. Enter checksheet into notesfile. js/tl 5/27
|
| 6.97 | WW49 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Sun Jun 01 1997 11:40 | 80 |
| --------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:06/01/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: James Sadin
Bob Gee
Tim Landry
INITIAL
JS 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
JS 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
JS 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 40 PSI
BG 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
BG/TL 6.1.5 Check all tubing and fittings for leaks.
BG/TL 6.1.6 Check all tubing and fittings for air leaks.
JS 6.1.7 Check all indicator lights.
BG/TL 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
TL/JS 6.1.9 Wipe down polish table, tub, and splash ring.
TL/JS 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
JS/BG 6.1.11 Wipe down pad conditioning arm.
TL 6.1.12 Remove, rinse, and replace diamond conditioning disk.
TL/JS 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
BG/JS 6.1.14 Wipe down outer surface of both spindle hubs.
TL/BG 6.1.15 Remove and clean O-rings, replace if necessary.
JS/TL 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
BG 6.1.17 Wipe down all surfaces of the robot.
BG/TL 6.1.18 Clean end effector vacuum chuck air port.
BG 6.1.19 Inspect and clean end effector air nozzle.
N/A * 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
BG/JS 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
JS/BG 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
BG/JS 6.1.23 Check Neslab TCU for leaks.
BG/JS 6.1.24 Check Neslab TCU temperature readout.
TL/BG 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
BG/TL 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
JS/BG 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
* N/A 6.1.20 Point of use slurry filters no longer used, Equip Eng notified.
|