| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 54.1 | heat xchanger primary | STRATA::FINN | | Tue Sep 17 1996 20:34 | 9 |
|
Changed pump and motor for heat exchanger primary table.
Dan Smith installed new V block.
A shift
|
| 54.2 | BROKEN WAFER IN THE SPIN STATION. | STRATA::WESTPHAL | | Thu Sep 19 1996 20:49 | 10 |
| SCRUB.4 - Down for breaking wafers in the spin station. The rep was in for the
touch screen calibration on SCRUB.A1 so he looked at why we had some
of the problems we've had with SCRUB.4. He found that the spin
fingers needed to be turned on the shaft slightly. He also adjusted
the spindle finger open sensor. Both rollers in the inside brush
station were rotated clockwise about an 1/8 of an inch. This allowed
the wafer to enter the spin station in the center of the track. He
also recommended that the bushings in belt rollers in send station be
replaced. This should remedy the loading problems we had in the
past.
|
| 54.3 | Shaft Height Adg / Having Difficulty Removing Pad | ASDG::POIRIER | | Sat Sep 28 1996 20:17 | 9 |
|
Shaft Height:
------------
Brad in in the process of changing the shaft height per Tim Dyer's
instructions. However, he is having trouble removing the polishing
pad. The pad is shredding apart as it is being removed. Brad will
will send out an updated message before he leaves.
C Shift.
|
| 54.4 | OB station roller motor / Send station | FABSIX::R_GEE | | Tue Oct 15 1996 20:39 | 8 |
| Wafers were not rotating in the outside brush station.
Replaced the outside brush station roller motor, a.o.k.
Wafers not exiting from the send station. Adjusted the
send station off-set up 200, ran verification wafers, all set.
A shift
|
| 54.5 | Brushes Replaced | ASDG::POIRIER | | Thu Jan 16 1997 19:10 | 7 |
|
Brushes Replaced:
----------------
The brushes on both the Inside Brush & Outside Brush Stations
were replaced today.
C Shift.
|
| 54.6 | Brushes changed | LUDWIG::WESTPHAL | | Thu Jan 16 1997 19:52 | 3 |
| SCRUB4 - Brushes were changed as requested by engineering. Particle
check came in at -5 (18 large, 32 total - 13 large, 27 total).
|
| 54.7 | Black Empak cassettes can now be used | SUBPAC::TOOKER | | Wed Jan 22 1997 15:43 | 5 |
| OnTrak field service installed the new top plates on the cassette
receive station. This will allow the use of the black Empak cassettes
instead of the white cassettes.
Jim T.
|
| 54.8 | O.B. Motor ERRORS | FABSIX::B_WESTPHAL | | Thu Mar 06 1997 20:51 | 7 |
|
CMP-SCRUB.C1 - Down for errors for "outer brush roller motor speed out of
spec." Tried to calibrate the board for the top motor first but
the brush RPMs seems like it won't go over 36 RPMS. Suspect that the
motor may be bad. Also Process Engineering requested that the brushes
be changed. Ran out of time.
|
| 54.9 | Looks fine to me. | FABSIX::L_SHKOLNIKOV | No more experiments with freedom | Fri Mar 07 1997 07:19 | 7 |
|
Outside brush station roller motor speed has been adjusted and
all others have been brought back to spec. as well. All four
PVA brushes replaced per process engineering request. Run 25
wafers to verify - no errors. Tool needs MQC.
Leon
|
| 54.10 | SENDER HANDLING PROBLEM | FABSIX::B_WESTPHAL | | Thu Mar 20 1997 19:54 | 22 |
|
SCRUB.C1 - Down for handling problems in the send station. The elevator
would move down after the cassette was placed on the platform only
to move back up with out processing wafers. Sometimes it would take
the first 1 or 2 wafer and then go back up w/o processing the rest of
the boat. Found that the wafers were only being sensed intermittently.
Because there was sometimes a wafer there that the machine did not
recognize the elevator would continue to step down lifting the
cassette off the cassette switch sending the elevator back up.
Tried making several different adjustments to the wafer sensors but
this didn't work. This tool had an upgrade done to it when it still
belonged to the wet lab. The upgrade has a black box that the
original sensor and an extra wafer sensor plug into to combine the
2 signals. When this box was bypassed to either sensor they both
worked properly so this box seems to be the problem. Received
permission from engineering to remove the upgrade because there was
no obvious advantage in having the extra sensor for our uses. Made
the appropriate adjustments, ran a boat of wafers w/ no errors. The
tool presently sets w/ only the rear wafer sensor hooked up like the
rest of the scubbers. The black box is on Jim Tooker's Desk.
Returned the tool to production.
|
| 54.11 | WAFER SENSOR ADJUSTED | FABSIX::B_WESTPHAL | | Fri Mar 21 1997 19:52 | 7 |
|
SCRUB.C1 - Down for not sensing the wafers properly. The wafer sensor was
sensing the wafer to early. Tweeked the sensor alittle and ran a boat
of wafers. The tool was returned to production and ran all day w/o any
errors.
|
| 54.12 | ob brush | LUDWIG::FINN | | Tue Mar 25 1997 19:40 | 15 |
|
Engineering requested OB station brushes changed. Only one in stock.
Shortage request submitted and checked with equipment eng at home. One brush
up micrometer and brush height.
New reading for top OB station is
Front 320 Rear 360
Ran test wafers aok.
Note: New spay manifold and flow meter not net installed. Ran out of time.
A shift
|
| 54.13 | brush change | FABSIX::R_GEE | | Tue Apr 08 1997 17:20 | 10 |
| Replaced all 4 brushes.
new brush heights
IB station OB station
back = 390 back = 400
front = 375 front = 335
|
| 54.14 | BAD MOTOR/ERRORS WHEN POWERING UP | FABSIX::B_WESTPHAL | | Fri Apr 25 1997 18:23 | 12 |
|
SCRUB.C1-Down for an "inside upper brush motor out of spec." error. The upper
brush was not spinning. Switched the upper and lower brush motor
connectors and the bottom still worked and the top didn't so
installed a new motor from stock. The motor worked fine but the tool
immediately started alarming when the powered back on. This continues
even though no alarm state exists, until it was through homing. The
rep was here so I asked him about it but he did know what could cause
this either. A boat of wafers was run with no errors so the tool was
returned to production.
|
| 54.15 | Bad Motor | FABSIX::B_WESTPHAL | | Thu May 01 1997 20:34 | 5 |
|
CMP-SCRUB.C1 - Down for "outside upper brush motor speed out of spec". The
motor was verified bad and replaced. A half a boat of wafers were run
with no further problems.
|
| 54.16 | Water leak | FABSIX::L_SHKOLNIKOV | | Fri May 02 1997 07:29 | 6 |
| The outside station rear shaft leak has been repaired.
We replaced o ring on the shaft.
D - shift.
|
| 54.17 | Brush heights wrong, apparent spin station crash | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed May 07 1997 21:28 | 16 |
| From COMMENTS on WW45 weekly PM:
6.1.8 Check scrub brush height in both modules Completed: * BJ *
OB IB
---- ----
were at: Front 335 390
Rear 400 440
now back Front 335 375
at: Rear 400 390
* alot of wafer debris found in the spin station. It was
was definetly an un-document crash in the spin station.
All of the wafer pieces were removed and spin are cleaned.
|
| 54.18 | screen problem | FABSIX::J_SADIN | Freedom isn't free. | Mon Jun 02 1997 20:00 | 7 |
|
screen wouldn't come back after reboot. Found breaker tripped.
reset and everything ok.
a-shift
|