| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 20.5 | B2 WEEKLY PM COMPLETED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 04 1996 00:36 | 60 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 1/3/96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 90
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 26
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 20
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 33
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 3.8
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 50
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 50
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 10
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments:
|
| 20.6 | weekly pm ww28 | LUDWIG::RIDLON | Eliminate the obvious | Tue Jan 09 1996 06:32 | 61 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 1/9/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: B-shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 90
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 60
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 20
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 33
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 17
Note: Sticker on gauge says 17 psi. Which is right?
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 50
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 25
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments:
|
| 20.8 | Monthly completed. | FABSIX::B_WESTPHAL | | Sat Jan 20 1996 18:02 | 80 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Monthly Preventative Maintenance Check Sheet, Rev C
DATE: 1/20/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80 psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 52 psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28 psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 44 psi
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 22 psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 psi
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 3.2 psi
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 25 psi
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 62 psi
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 50 psi
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 25 psi
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 psi
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60 psi
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80 psi
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: *N/A
6.2.1 Perform Weekly PM Tasks Completed: DONE
6.2.2 Change Peristaltic Pump Lines Completed: X
6.2.3 Clean Polish area drain tub Completed: X
6.2.4 Check Polish Table Belt for defects Completed: X
6.2.5 Check the Neslab water level Completed: X
6.2.6 Check the Neslab fittings for leaks Completed: X
6.2.7 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.8 Check the Load Flipper alignment Completed: X
6.2.9 Check the Unload Flipper alignment Completed: X
COMMENTS: * The conditioning arm gimbal bearing was cleaned but not
lubed. This is because of a recommendation made by speedfam. This is
the completed PM from the previous note.
|
| 20.9 | Weekly PM for B2 completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 25 1996 05:03 | 61 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 1/25/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 42
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 25
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 50
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 25
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 24
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 58
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
Comments: Darren asked us not to lubricate the gimbal anymore.... just
clean it...
|
| 20.10 | WW31 Weekly PM | FABSIX::R_POIRIER | | Wed Jan 31 1996 05:05 | 61 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 1/31/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: B Shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 52
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 30
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 30
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 58
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 27
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 30
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
Comments: Darren asked us not to lubricate the gimbal anymore.... just
clean it...
|
| 20.12 | ww32 weekly p.m. | FABSIX::R_GEE | | Mon Feb 05 1996 02:58 | 61 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 2/05/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: B Shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 30
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 25
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 55
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 25
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 58
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
Comments: Darren asked us not to lubricate the gimbal anymore.... just
clean it...
|
| 20.13 | Monthly PM for WW33 completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Mon Feb 12 1996 17:54 | 25 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Monthly Preventative Maintenance Check Sheet, Rev C
DATE: 2/12/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: Doc and BJ
6.2.1 Perform Weekly PM Tasks Completed: X
6.2.2 Change Peristaltic Pump Lines Completed: X
6.2.3 Clean Polish area drain tub Completed: X
6.2.4 Check Polish Table Belt for defects Completed: X
6.2.5 Check the Neslab water level Completed: X
6.2.6 Check the Neslab fittings for leaks Completed: X
6.2.7 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.8 Check the Load Flipper alignment Completed: X
6.2.9 Check the Unload Flipper alignment Completed: X
Comments: none
|
| 20.14 | weekly ww34 | STRATA::RIDLON | Eliminate the obvious | Mon Feb 19 1996 00:48 | 61 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 2/19/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: B Shift
w/ M.Andreoli
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 30
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 35
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 25
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 55
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 25
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 58
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
Comments: Darren asked us not to lubricate the gimbal anymore.... just
clean it...
|
| 20.15 | WW35 Weekly PM | FABSIX::R_POIRIER | | Mon Feb 26 1996 00:06 | 66 |
| --------------------------------------------------------------------------------
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 2/25/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: B Shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 88
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 23
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 25
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 45
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
Comments: Darren asked us not to lubricate the gimbal anymore.... just
clean it.
Found a water leak in cabinet under Index table. Load cup # 4
sensor fitting is dripping. Unable to reach in and tighten the
fitting.
|
| 20.16 | Weekly | SUBPAC::LANDRY | | Mon Mar 04 1996 19:37 | 60 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 3/4/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: A Shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 45
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 40
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 20
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 45
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
Comments:
|
| 20.17 | semi-a rescheduled | STRATA::TDYER | | Fri Mar 15 1996 16:10 | 7 |
|
The semi-annual PM will be rescheduled. This tool has been in MFG
for 3.5 months only. Perform and fill out a weekly check sheet for
this work week.
Tim Dyer
EEG
|
| 20.18 | Weekly for WW37 completed, Semi-annual waived | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Mar 15 1996 19:22 | 60 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 3/15/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 45
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 40
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 20
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 45
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
Comments: found DI water in fluids cabinet but source unknown.
|
| 20.19 | Weekly PM completed for WW38 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Mar 22 1996 21:49 | 64 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 3/22/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 90
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 25
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 45
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 25
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 82
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
Comments: found water leaking from chiller line. Gave alf turn to
stop but will remove and re-tape if it starts back up.
|
| 20.20 | ww 39 B2 weekly completed | FABSIX::B_FINN | | Sun Mar 24 1996 17:04 | 58 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 3/24/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: A shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust:82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust:82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust:29
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust:40
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust:23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust:35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust:30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust:40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust:3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust:24
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust:24
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust:60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust:60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust:24
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust:80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust:50
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust:80
6.1.18 Check system for fluid leaks Completed:done
6.1.19 Check tubing/fittings for leaks Completed:done
6.1.20 Check system for pneumatic leaks Completed:done
6.1.21 Check system indicator lamps Completed:done
6.1.22 Check stations/components for contamination Completed:done
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust:5
6.1.24 Clean and lubricate the Scrubber rails Completed:done
6.1.25 Clean and lubricate the Paddle rails Completed:done
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed:done
Comments: Adjusted water flow at cassette 2 due to cross slotted wafers
|
| 20.21 | Weekly PM started | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Apr 03 1996 06:26 | 58 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 4/3/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust:80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust:85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust:27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust:40
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust:23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust:35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust:30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust:40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust:3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust:25
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust:25
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust:60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust:60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust:27
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust:80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust:55
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust:80
6.1.18 Check system for fluid leaks Completed:
6.1.19 Check tubing/fittings for leaks Completed:
6.1.20 Check system for pneumatic leaks Completed:done
6.1.21 Check system indicator lamps Completed:done
6.1.22 Check stations/components for contamination Completed:
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust:5
6.1.24 Clean and lubricate the Scrubber rails Completed:done
6.1.25 Clean and lubricate the Paddle rails Completed:done
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: n/a
Comments: chafing neutral wire on vacuum pump
|
| 20.22 | Weekly PM completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Apr 04 1996 05:21 | 67 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 4/3/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: Brad & BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust:80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust:85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust:27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust:40
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust:23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust:35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust:30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust:40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust:3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust:25
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust:25
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust:60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust:60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust:27
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust:80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust:55
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust:80
6.1.18 Check system for fluid leaks Completed: done
6.1.19 Check tubing/fittings for leaks Completed: done
6.1.20 Check system for pneumatic leaks Completed: done
6.1.21 Check system indicator lamps Completed: done
6.1.22 Check stations/components for contamination Completed: done
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust:5
6.1.24 Clean and lubricate the Scrubber rails Completed: done
6.1.25 Clean and lubricate the Paddle rails Completed: done
6.1.26 Clean the Conditioner Gimbal Ass. Completed: done
Comments: chafing neutral wire on vacuum pump. Will repair when tool
available.
Leak detected in drip pan under the elevators, Reps aware.
Front right containment pan found full. Leak detection
system found off-line. DI leak appears to be coming from
scrubber area. DI picked up and detection system left
off-line.
|
| 20.23 | Weekly PM for WW41 completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Apr 10 1996 22:45 | 61 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 4/10/96 SYSTEM RTC CODE: CMP.B2 EQUIP. TECH: BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust:80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust:85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust:27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust:40
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust:23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust:35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust:30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust:40
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust:3.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust:24
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust:25
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust:60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust:60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust:27
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust:80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust:50
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust:80
6.1.18 Check system for fluid leaks Completed: done
6.1.19 Check tubing/fittings for leaks Completed: done
6.1.20 Check system for pneumatic leaks Completed: done
6.1.21 Check system indicator lamps Completed: done
6.1.22 Check stations/components for contamination Completed: done
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust:5
6.1.24 Clean and lubricate the Scrubber rails Completed: done
6.1.25 Clean and lubricate the Paddle rails Completed: done
6.1.26 Clean the Conditioner Gimbal Ass. Completed: done
Comments: Found small puddle of DI in drip pan under the elevators.
Unknown source and unkown if this was left over from the
previous fix.
|
| 20.24 | Weekly PM completed for WW42 | FABSIX::L_SHKOLNIKOV | | Fri Apr 19 1996 07:57 | 91 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 20
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 22
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.5
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: x
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Found (3) DI water leaks and (1) chilled water leak
The chiller leak has been corrected
(1) DI water leak was found in the fluids
cabinet coming from the bottom section of
blue solenoids on the right side. A small
drip it's there. Source unknown at this time.
The other (2) DI leaks are in the front
containment pan coming from the scrubber area.
Source unknown at this time.
____________________________________________________________
|
| 20.25 | MONTHLY PM CHECKSHEET WW43 | ASDG::POIRIER | | Sat Apr 27 1996 18:35 | 147 |
| Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
DATE: 4/27/96 ENTITY: CMP.B1 TECH: C and D shifts
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj: 382.3 Post-adj: 377.8
Head 2 Pre-Adj: 372.6 Post-adj: 374.8
Head 3 Pre-Adj: 390.8 Post-adj: 374.6
Head 4 Pre-Adj: 377.7 Post-adj: 377.7
Head 5 Pre-Adj: 392.2 Post-adj: 374.8
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj: 76.6
Actual Down Force Post-Adj: 76.6
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.92V
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: 15.08V
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.97V
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: X 31 RPM
6.2.15 Check Vacuum Pump Diaphrams Completed: X
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignments Completed: X
6.2.18 Check Load Cup Height alignments Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 20
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 25
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Small DI leak found in fluid cabinet. Looks like it is
coming from the lower right side of the DI manifold.
Another small puddle of DI was found in front of tool
under scrubber. After a week, a puddle about 2" in
diameter was found.
|
| 20.26 | Weekly PM completed for WW44 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu May 02 1996 00:11 | 84 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/1/96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 20
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 22
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 84
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 5
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Found DI water 3" spot under scrubber. Will look into
source later this week when tool free.
|
| 20.27 | WEEKLY PM FOR WW45 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu May 09 1996 23:53 | 79 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/8/96 TOOL: CMP.B2 TECH/SHIFT: C and D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 20
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 20
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 20.28 | CMP.B2 MONTHLY PM FOR WW46 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu May 16 1996 22:15 | 145 |
|
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
DATE: 5/16/96 TOOL: CMP.B2 TECH/SHIFT: D & C
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj: 367 Post-adj: 377
Head 2 Pre-Adj: 375 Post-adj: 377
Head 3 Pre-Adj: 358 Post-adj: 377
Head 4 Pre-Adj: 370 Post-adj: 377
Head 5 Pre-Adj: 373 Post-adj: 377
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj: 46 @ 67%
Actual Down Force Post-Adj: N/A
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: x
6.2.8 Check the Unload Flipper alignment Completed: x
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: X
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: X
6.2.13 Check the +5 Volt power supply Pre-Adjust: X
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: X
6.2.15 Check Vacuum Pump Diaphrams Completed: X
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check All Load Cup Height alignments Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments:
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 83
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23.5
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 24 POST 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30 New
Value
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: The "Vacuum Tank Blowout Pressure" has been increased to
30 psi as of 5/16/96.
|
| 20.29 | WW47 WEEKLY PM | FABSIX::L_SHKOLNIKOV | | Fri May 24 1996 05:12 | 82 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/22-24/96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 90
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 18
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 20.30 | SHUTDOWN CHECKSHEET | STRATA::RIDLON | Eliminate the obvious | Mon May 27 1996 07:36 | 25 |
|
CMP.B SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) SCRUB SIDES OF CARRIERS ___B__/5/27__
2) RUN CARRIER BLOW OFF FOR 30 SECONDS ___B__/______
3) REMOVE ALL CARRIERS ___B__/______
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK ___B__/______
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. ___B__/______
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY ___B__/______
7) REMOVE CONDITIONER AND CLEAN ___B__/______
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. ___B__/______
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) ___B__/______
10) DRAIN ELEVATOR AND CONDITIONER TUBE ___B__/______
11) REMOVE PADS, AND CLEAN AND DRY TABLES ___B__/______
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI ___B__/______
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER ___B__/______
14) POWER DOWN SYSTEM.
|
| 20.31 | Weekly PM performed | SUBPAC::LANDRY | | Tue May 28 1996 19:42 | 82 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/28/96 TOOL: CMP.B2 TECH/SHIFT: A & B shifts
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 90
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.4
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 55
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 20.32 | Startup Checksheet | SUBPAC::LANDRY | | Tue May 28 1996 20:01 | 19 |
|
CMP.B START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. A shift 5/28
2) POWER ON SYSTEM. A shift 5/28
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES A shift 5/28
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY A shift 5/28
5) DRY TABLES, INSTALL PADS A shift 5/28
6) INSTALL SCRUBBER BRUSHES A shift 5/28
7) INSTALL CONDITIONER A shift 5/28
8) INSTALL CARRIERS A shift 5/28
9) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) A shift 5/28
10) IF SLURRY SYSTEM WAS SHUT DOWN, CONTACT ASHLAND CHEMICAL,
REQUEST DI TO BE PURGE FROM SLURRY SYSTEM AND CHARGED WITH
SLURRY AND REQUEST A NEW SLURRY FILTER BE INSTALLED. N/A
11) CALIBRATE SLURRY FLOW A shift 5/28
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC A shift 5/28
|
| 20.33 | MONTHLY P.M. COMPLETED FOR WW 49 | FABSIX::J_SWENSON | | Sat Jun 08 1996 15:56 | 174 |
|
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
DATE 7/6/96 ENTITY CMP.B2 TECH/SHIFT: D-shift
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj:______ Post-adj:______ " SEE COMMENTS"
Head 2 Pre-Adj:______ Post-adj:______
Head 3 Pre-Adj:______ Post-adj:______
Head 4 Pre-Adj:______ Post-adj:______
Head 5 Pre-Adj:______ Post-adj:______
6.2.5 Perform Down Force Calibration on Conditioner Completed: x
Actual Down Force Pre-Adj:_____________50.1 @67%
Actual Down Force Post-Adj:____________
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.96
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust:+15.06/-15.09
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.97
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: X
6.2.15 Check Vacuum Pump Diaphrams Completed: X
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments:
--------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 84
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 24
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X***
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 5.5 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:These are the values for the 5 carrier heads during the down
force check. (NO ADJUSTMENTS WERE MADE, TOOL WAS RUNNING FINE WITH
CURRENT OFFSETS)
[ STATUS SCREEN ]
CARRIER # PROGRAMMED ACTUAL SENSOTEC LOAD
1 377 375 377.5
2 377 376 423.5
3 377 374 374.5
4 377 379 342
5 377 379 381.6
*** Head # 2 would ramp to around 275 then have about a ten sec. delay
*** and ramp up to the 400 range on the sensotec load.
* found small droplets of DI on bottom of fluids cabinet, manufacturing
needed the tool so returned for production use. This will need to be looked
at before becoming worse.
C SHIFT
|
| 20.34 | Weekly PM for WW50 completed | FABSIX::L_SHKOLNIKOV | | Wed Jun 12 1996 00:29 | 82 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/11/96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 20
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: n/a
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3.0
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 20.35 | Weekly PM for WW51 completed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jun 20 1996 05:39 | 83 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/20/96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 20
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: n/a
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3.5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 20.36 | weekly PM for WW52 completed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Jun 25 1996 23:47 | 84 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/25/96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 20.37 | B2 weekly PM completed for WW1 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 04 1996 02:49 | 89 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/3/96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: slurry detection system off-line until after shut-down.
The black wire in currently disconnected which deactivates
the detector and tricks the tool.
The black wire goes in the middle screw opening.
|
| 20.39 | B2 SHUT-DOWN COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 04 1996 02:55 | 26 |
|
CMP.B2 SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
SHIFT / DATE
1) SCRUB SIDES OF CARRIERS D 7/3/96
2) RUN CARRIER BLOW OFF FOR 30 SECONDS D 7/3/96
3) REMOVE ALL CARRIERS D 7/3/96
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK D 7/3/96
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. D 7/3/96
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY D 7/3/96
7) REMOVE CONDITIONER AND CLEAN D 7/3/96
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. D 7/3/96
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) D 7/3/96
10) DRAIN ELEVATOR AND CONDITIONER TUBE D 7/3/96
11) REMOVE PADS, AND CLEAN AND DRY TABLES D 7/3/96
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI D 7/3/96
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER D 7/3/96
14) POWER DOWN SYSTEM. D 7/3/96
|
| 20.40 | B1 Startup completed | FABSIX::L_SHKOLNIKOV | | Sat Jul 06 1996 04:33 | 21 |
|
CMP.B2 START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. __LS__/7-6-96
2) POWER ON SYSTEM. __LS__/7-6-96
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES __LS__/7-6-96
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY __LS__/7-6-96
5) DRY TABLES, INSTALL PADS __LS__/7-6-96
6) INSTALL SCRUBBER BRUSHES __LS__/7-6-96
7) INSTALL CONDITIONER __LS__/7-6-96
8) INSTALL CARRIERS __LS__/7-6-96
9) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) __LS__/7-6-96
10) IF SLURRY SYSTEM WAS SHUT DOWN, CONTACT ASHLAND CHEMICAL,
REQUEST DI TO BE PURGE FROM SLURRY SYSTEM AND CHARGED WITH
SLURRY AND REQUEST A NEW SLURRY FILTER BE INSTALLED. __LS__/7-6-96
11) CALIBRATE SLURRY FLOW __LS__/7-6-96
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC __LS__/7-6-96
|
| 20.41 | ww2 monthly p.m. completed | FABSIX::J_SWENSON | | Fri Jul 12 1996 12:49 | 147 |
|
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
DATE: 7/12/96 TOOL: CMP.B2 TECH/SHIFT: BJ,JP,JS&BW.
D & C SHIFTS.
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj: 371 Post-adj: 377
Head 2 Pre-Adj: 361 Post-adj: 377
Head 3 Pre-Adj: 383 Post-adj: 376
Head 4 Pre-Adj: 360 Post-adj: 375
Head 5 Pre-Adj: 373 Post-adj: n/c
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj:___77.1__________
Actual Down Force Post-Adj:__n/c__________
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: BJ
6.2.7 Check the Load Flipper alignment Completed: BJ
6.2.8 Check the Unload Flipper alignment Completed: BJ
6.2.9 Check the Elevator alignment Completed: BJ
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.6 v
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: 15.04 v
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.96 v
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 31.6 rpm
6.2.15 Check Vacuum Pump Diaphrams Completed: X
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: BJ
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments:
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/12/96 TOOL: CMP.B2 TECH/SHIFT: BJ,JP,JS & BW.
D & C Shifts.
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.5
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: BJ
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments: Found DI water on bottom of tool. Wiped up and will
monitor to determine leak origin.
|
| 20.42 | ww3 weekly pm | FABSIX::L_SHKOLNIKOV | | Sat Jul 20 1996 08:34 | 79 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/20/96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 84
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.6
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 20.43 | WW IV - Weekly | SUBPAC::LANDRY | | Tue Jul 23 1996 19:16 | 82 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/23/96 TOOL: CMP.B2 TECH/SHIFT: A shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 84
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Found excessive amount of slurry on the underside of the MHTA,
in the vacinity on the delivery tube entrance.
Pad and all carriers were changed out at this time due to high
particles and carriers drying out during idle time.
|
| 20.44 | WW05 WEEKLY PM | FABSIX::L_SHKOLNIKOV | | Sat Aug 03 1996 01:01 | 78 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/02/96 TOOL: CMP.B2 TECH/SHIFT: C+D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 20.45 | Monthly moved | STRATA::TDYER | | Fri Aug 09 1996 19:26 | 6 |
|
The monthly PM is being moved to next week, perform weekly in place.
Tim Dyer
EEG
|
| 20.46 | WW06 WEEKLY P.M. | FABSIX::J_SWENSON | | Sat Aug 10 1996 16:59 | 80 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/10/96 TOOL: CMP.B2 TECH/SHIFT: C/D SHIFT
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 83
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 39
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23.5
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30.5
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 52
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 19
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 52
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 20.47 | WW7 MONTHLY P.M. DEFERRED TO WW8 | ASDG::POIRIER | | Sat Aug 17 1996 19:59 | 6 |
|
WW7 MONTHLY & WEEKLY P.M.'S ARE BEING DEFERRED PER JOHN HOEKSTRA DUE
TO EQUIPMENT AVAILABILITY. BOTH PARTIALLY COMPLETED CHECKSHEETS
HAVE BEEN POSTED IN NOTE #60. (INCOMPLETE P.M. CHECKSHEETS)
C SHIFT.
|
| 20.48 | Monthly p.m. completed | FABSIX::R_GEE | | Sat Aug 17 1996 23:45 | 150 |
|
WW7 MONTHLY PM CHECKSHEET
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj:_380__ Post-adj:_377_+/-1 %_
Head 2 Pre-Adj:_362__ Post-adj:_377_+/-1 %
Head 3 Pre-Adj:_354__ Post-adj:_377_+/-1 %
Head 4 Pre-Adj:_380__ Post-adj:_377 +/-1 %
Head 5 Pre-Adj:_340__ Post-adj:_377 +/-1 %
6.2.5 Perform Down Force Calibration on Conditioner Completed:
Actual Down Force Pre-Adj:___83_______
Actual Down Force Post-Adj:__77 +/-1 %
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 22.94 VDC
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: 15.04 VDC
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.96 VDC
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: X
6.2.15 Check Vacuum Pump Diaphrams Completed: N/A
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments:
--------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 81 PSI
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 84
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 20
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 26
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 82
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 4 PSI
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 20.49 | ww08 weekly pm | FABSIX::L_SHKOLNIKOV | | Thu Aug 22 1996 06:19 | 79 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/22/96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 86
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: x
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: x
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: x
6.1.26 Clean Conditioning Wheel and Housing Completed: x
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: x
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: x
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: x
6.1.33 Wipe the MHTA and covers with Isopropyl Completed x
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: x
6.1.35 Clean the slurry delivery tube Completed: x
6.1.36 Check chiller fluid resevoir for proper level Completed: x
Comments: Found small puddle of DI in drip pan under the scrubber drain.
Wiped it out and put some silicone seal over the drain.
|
| 20.50 | CMP.B2 SHUTDOWN CHECKSHEET | FABSIX::R_POIRIER | | Mon Sep 02 1996 02:51 | 30 |
|
CMP.B2 SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
SHIFT / DATE
1) SCRUB SIDES OF CARRIERS B 9-1-96
2) RUN CARRIER BLOW OFF FOR 30 SECONDS B 9-1-96
3) REMOVE ALL CARRIERS B 9-1-96
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK B 9-1-96
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. B 9-1-96
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY B 9-1-96
7) REMOVE CONDITIONER AND CLEAN B 9-1-96
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. B 9-1-96
9) JUMPER DI PRESSURES SWITCHES B 9-1-96
10) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) B 9-1-96
11) DRAIN ELEVATOR AND CONDITIONER TUBE B 9-1-96
12) REMOVE PADS, AND CLEAN AND DRY TABLES B 9-1-96
13) REMOVE SCRUBBER BRUSHES AND SOAK IN DI B 9-1-96
14) DRY ENTIRE SYSTEM OF ANY STANDING WATER B 9-1-96
15) TURN OFF CHILLER B 9-1-96
** DO NOT TURN POWER OFF TO POLISHER **
** THE MAIN PCW VALES ARE TO BE SHUT IN THE PIPE GALLERY **
|
| 20.51 | semiannual completed on time but check sheet late | STRATA::WESTPHAL | | Tue Sep 03 1996 18:34 | 171 |
|
Speedfam Corp. CMP-V Planarizer
Semi-Annual Preventative Maintenance Check Sheet, Rev D
Date 8/31/96 Techs: c/b shift
6.4.1 Check all interlocks for functionality Completed: X
6.4.2 Check all EMO's for functionality Completed: X
6.4.3 Lubricate the Rotary Union Completed: * note
6.4.4 Lubricate the Lead Screw Completed: X
6.4.5 Lubricate the Linear Guide Rails Completed: X
6.4.6 Lubricate the Idler Pulley Completed: X
Comments:
--------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj: 376.8 Post-adj: N/A
Head 2 Pre-Adj: 399.8 Post-adj: 378.8
Head 3 Pre-Adj: 377.7 Post-adj: N/A
Head 4 Pre-Adj: 376.2 Post-adj: N/A
Head 5 Pre-Adj: 397.6 Post-adj: 377.4
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj: 86.7 LBS
Actual Down Force Post-Adj: 78.0 LBS
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.06 V
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: 15.04 V
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.96 V
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 30.3 RPM
6.2.15 Check Vacuum Pump Diaphrams Completed: N/A
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments:
--------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 84
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 18
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 50
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
* Note - Waiting for the correct lubricant then item will be
completed ASAP.
|
| 20.52 | WW X - completed | SUBPAC::LANDRY | | Sun Sep 08 1996 11:43 | 78 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/07-08/96 TOOL: CMP.B2 TECH/SHIFT: D + A shifts
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 86
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 20.53 | ww11 weekly pm | FABSIX::L_SHKOLNIKOV | | Fri Sep 13 1996 05:39 | 80 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/13/96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 84
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 22
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 25
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: x
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: x
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: x
6.1.26 Clean Conditioning Wheel and Housing Completed: x
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: x
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: x
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: x
6.1.33 Wipe the MHTA and covers with Isopropyl Completed x
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: x
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: x
Comments: The polish area drain pipe which located between index and
main polish table seems to be clogged - it drains the water
very slow. Will check it again in couple days.
|
| 20.54 | Weekly PM completed for WW12 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Sep 17 1996 23:45 | 78 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/17/96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 22
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 26
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 52
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 82
6.1.19 Check Drip Pan for moisture/contamination Completed: x
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: x
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: x
6.1.26 Clean Conditioning Wheel and Housing Completed: x
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: x
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: x
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
- the liquid seperator x
6.1.32 Check Carrier clean brushes for defects, rotate Completed: x
6.1.33 Wipe the MHTA and covers with Isopropyl Completed x
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: x
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: x
Comments:
|
| 20.55 | WEEKLY PM FOR WW13 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Sep 27 1996 20:34 | 84 |
| SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9-27-96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 84
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 24
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 22
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 18
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: x
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: x
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: x
6.1.26 Clean Conditioning Wheel and Housing Completed: x
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: x
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: x
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: x
6.1.33 Wipe the MHTA and covers with Isopropyl Completed x
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: x
6.1.35 Clean the slurry delivery tube Completed: x
6.1.36 Check chiller fluid resevoir for proper level Completed: x
Comments:
____________________________________________________________
|
| 20.56 | WEEKLY COMPLETED WW#14 | STRATA::WESTPHAL | | Sat Oct 05 1996 11:29 | 85 |
| --------------------------------------------------------------------------------
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/4/96 TOOL: CMP.B2 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 84
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 22
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 22
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: x
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: x
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: x
6.1.26 Clean Conditioning Wheel and Housing Completed: x
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: x
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: x
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: x
6.1.32 Check Carrier clean brushes for defects, rotate Completed: x
6.1.33 Wipe the MHTA and covers with Isopropyl Completed x
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: x
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: x
Comments: 6.1.28 completed while 2nd table pad was changed at
beginning of shift
|
| 20.57 | MONTHLY PM COMPLETED FOR WW15 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Oct 15 1996 20:33 | 155 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
Techs/c/d Shift
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: D-SHIFT
Down Frc: Head 1 Pre-Adj: 375LBS Post-adj: DID NOT CHANGE
Head 2 Pre-Adj: 384LBS Post-adj: 377LBS
Head 3 Pre-Adj: 377LBS Post-adj: DID NOT CHANGE
Head 4 Pre-Adj: 387LBS Post-adj: 376LBS
Head 5 Pre-Adj: 378LBS Post-adj: DID NOT CHANGE
6.2.5 Perform Down Force Calibration on Conditioner Completed: D-SHIFT
Actual Down Force Pre-Adj: 73LBS @ 100% 55LBS @ 67%
Actual Down Force Post-Adj:____________
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: BJ
6.2.8 Check the Unload Flipper alignment Completed: BJ
6.2.9 Check the Elevator alignment Completed: BJ
6.2.10 Check wafer unload, from Index table to cassette Completed: BJ
6.2.11 Check the +24 Volt power supply Pre-Adjust: 24.01
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust:+15.01/-15.05
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.96
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: D-SHIFT
6.2.15 Check Vacuum Pump Diaphrams Completed: x
6.2.16 Check Vacuum Tank/Pump lines Completed: x
6.2.17 Check Load Cup Position alignment Completed: D-SHIFT
6.2.18 Check Load Cup Height alignment Completed: D-SHIFT
6.2.19 Check Robot alignments Completed: BJ
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments: Pump diaphrams were checked, need replacement. Could not locate
part #
--------------------------------------------------------------------------------
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 22
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A*
newer model doesn't
have air driven
motor
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 14
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 52
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 82
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: D-SHIFT
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 5
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: D-SHIFT
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments:
|
| 20.58 | WW16 WEEKLY PM | FABSIX::L_SHKOLNIKOV | | Fri Oct 18 1996 00:49 | 88 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/17/96 TOOL: CMP.B2 TECH/SHIFT: D - SHIFT
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40psi
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 22psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40psi
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2psi
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20psi
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17psi
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50psi
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60psi
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27psi
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80psi
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 52psi
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80psi
6.1.19 Check Drip Pan for moisture/contamination Completed: ls
6.1.20 Check tubing/fittings for fluid leaks Completed: ls
6.1.21 Check tubing/fittings for pneumatic leaks Completed: ls
6.1.22 Check stations/components for contamination Completed: ls
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8psi
6.1.24 Clean and lubricate the Scrubber rails Completed: ls
6.1.25 Clean and lubricate the Paddle rails Completed: ls
6.1.26 Clean Conditioning Wheel and Housing Completed: ls
6.1.27 Scrub clean the Polish area tub and walls Completed: ls
6.1.28 Remove all Load and Unload cups and scrub clean Completed: ls
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: ls
6.1.30 Check slurry pump hoses and connectors for leaks Completed: ls
6.1.31 Remove and clean the Vacuum system Check Valve Completed: ls
(water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: ls
6.1.33 Wipe the MHTA and covers with Isopropyl Completed ls
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: ls
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: DW
Comments:
P.M started on 10/17/96 by Dave Whitford
____________________________________________________________
|
| 20.59 | WW17 WEEKLY PM COMPLETE | FABSIX::L_SHKOLNIKOV | | Thu Oct 24 1996 23:01 | 92 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/24/96 TOOL: CMP.B2 TECH/SHIFT: LS./ D - SHIFT
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 86psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40psi
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40psi
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2psi
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20psi
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 16psi
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50psi
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60psi
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27psi
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80psi
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50psi
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80psi
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8psi
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
(water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/ISO Completed: X
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comment: DURING THE PM FOUND THAT SOME CABLES WHICH GOES FROM FRAME
TO FLEX TRACK (I/O MANIFOLD) ARE DAMAGED - MISSING AND DAMAGED
INSULATION (AI/O #3, DI/O #7). I PUT WHITE TAPE ON THEM.
WILL TALK TO EE IN THE MORNING TO HAVE THIS CABLES ON ORDER
____________________________________________________________
|
| 20.60 | WW XVIII - Weekly Completed | SUBPAC::LANDRY | | Sun Oct 27 1996 14:28 | 84 |
| SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/27/96 TOOL: CMP.B2 TECH/SHIFT: Landry
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82 psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 86 psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25 psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 psi
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 22 psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 psi
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2 psi
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 psi
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20 psi
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 psi
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55 psi
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 11 psi
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50 psi
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 psi
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 6 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
(water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/ISO Completed: X
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: 6.1.11 N/A due to the paddle for this system is motorized, not
pneumatically driven
6.1.35 N/A due to modification that has eliminated this feature
|
| 20.61 | MONTHLY PM COMPLETED FOR WW19 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Nov 08 1996 06:52 | 153 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
BJ = Brian Jubinville
LS = Leon Shkolnikov
6.2.1 Change Peristaltic Pump Lines Completed: LS
6.2.2 Clean Polish area tub drains Completed: BJ
6.2.3 Check Polish Table Belt for defects Completed: BJ
6.2.4 Perform Down Force Calibration on all 5 heads Completed: LS/BJ
Down Frc: Head 1 Pre-Adj: 383 Post-adj: 377
Head 2 Pre-Adj: 376 Post-adj: 377
Head 3 Pre-Adj: 381 Post-adj: 377
Head 4 Pre-Adj: 384 Post-adj: 377
Head 5 Pre-Adj: 372 Post-adj: 377
6.2.5 Perform Down Force Calibration on Conditioner Completed: LS/BJ
Actual Down Force Pre-Adj: 95 lbs
Actual Down Force Post-Adj: 77 lbs
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: BJ
6.2.7 Check the Load Flipper alignment Completed: BJ
6.2.8 Check the Unload Flipper alignment Completed: BJ
6.2.9 Check the Elevator alignment Completed: BJ
6.2.10 Check wafer unload, from Index table to cassette Completed: BJ
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.4V Post: 24.01 BJ
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: 15/-15 BJ
6.2.13 Check the +5 Volt power supply Pre-Adjust: 5V BJ
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 30.1
6.2.15 Check Vacuum Pump Diaphrams Completed: LS/BJ
6.2.16 Check Vacuum Tank/Pump lines Completed: LS/BJ
6.2.17 Check Load Cup Position alignment Completed: LS/BJ
6.2.18 Check Load Cup Height alignment Completed: LS/BJ
6.2.19 Check Robot alignments Completed: BJ
6.2.20 Check Muffin Fans for proper operation Completed: LS/BJ
Comments:
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80 psi BJ
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85 psi BJ
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20 psi BJ
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 psi BJ
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23 psi BJ
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi BJ
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi BJ
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 psi BJ
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2 psi BJ
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 psi BJ
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a BJ
(paddle not air driven on this tool)
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17 psi BJ
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 psi BJ
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 psi BJ
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27 psi BJ
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi BJ
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55 psi BJ
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 psi BJ
6.1.19 Check Drip Pan for moisture/contamination Completed: LS/BJ
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: LS/BJ
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10 psi BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Clean Conditioning Wheel and Housing Completed: LS/BJ
6.1.27 Scrub clean the Polish area tub and walls Completed: LS/BJ
6.1.28 Remove all Load and Unload cups and scrub clean Completed: LS/BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS/BJ
6.1.30 Check slurry pump hoses and connectors for leaks Completed: LS/BJ
6.1.31 Remove and clean the Vacuum system Check Valve Completed: LS/BJ
(water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: BJ
6.1.33 Wipe the MHTA and covers with Isopropyl Completed LS/BJ
6.1.34 Wipe the Process Area Plexiglas doors w/ISO Completed: LS/BJ
6.1.35 Clean the slurry delivery tube Completed: n/a BJ
(Tool modified, no longer uses tube)
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments:
|
| 20.62 | WEEKLY PM COMPLETED FOR WW20 | FABSIX::L_SHKOLNIKOV | | Thu Nov 14 1996 06:03 | 84 |
| SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/14/96 TOOL: CMP.B2 TECH/SHIFT: Jubinville (BJ)
Shkolnikov (LS)
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85 psi BJ
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 psi BJ
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22 psi BJ
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 psi BJ
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23 psi BJ
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi BJ
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi BJ
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 psi BJ
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2 psi BJ
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 psi BJ
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a BJ
(L/R paddle now motor driven, no air required)
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17 psi BJ
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 psi BJ
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 psi BJ
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 26 psi BJ
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi BJ
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 48 psi BJ
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 psi BJ
6.1.19 Check Drip Pan for moisture/contamination Completed: LS
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: LS/BJ
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10 psi BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Clean Conditioning Wheel and Housing Completed: LS
6.1.27 Scrub clean the Polish area tub and walls Completed: BJ
6.1.28 Remove all Load and Unload cups and scrub clean Completed: BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: LS
6.1.31 Remove and clean the Vacuum system Check Valve Completed: LS
(water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: BJ
6.1.33 Wipe the MHTA and covers with Isopropyl Completed LS/BJ
6.1.34 Wipe the Process Area Plexiglas doors w/ISO Completed: BJ
6.1.35 Clean the slurry delivery tube Completed: n/a BJ
(Tool upgraded, no longer uses tube)
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments:
|
| 20.63 | WEEKLY PM FOR WW21 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Nov 20 1996 22:42 | 84 |
| SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/20/96 TOOL: CMP.B2 TECH/SHIFT: Jubinville (BJ)
Whitford (DW)
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85 psi DW
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 psi DW
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24 psi DW
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 psi DW
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 22 psi DW
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 36 psi DW
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi DW
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 psi DW
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2 psi DW
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 psi DW
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a BJ
(L/R paddle now motor driven, no air required)
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15 psi DW
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 psi DW
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 psi DW
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27 psi DW
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi DW
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 48 psi DW
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 psi DW
6.1.19 Check Drip Pan for moisture/contamination Completed: BJ
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: BJ/DW
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: DW
6.1.25 Clean and lubricate the Paddle rails Completed: DW
6.1.26 Clean Conditioning Wheel and Housing Completed: BJ
6.1.27 Scrub clean the Polish area tub and walls Completed: BJ/DW
6.1.28 Remove all Load and Unload cups and scrub clean Completed: BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: DW
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DW
6.1.31 Remove and clean the Vacuum system Check Valve Completed: BJ
(water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: BJ
6.1.33 Wipe the MHTA and covers with Isopropyl Completed BJ
6.1.34 Wipe the Process Area Plexiglas doors w/ISO Completed: BJ
6.1.35 Clean the slurry delivery tube Completed: n/a BJ
(Tool upgraded, no longer uses tube)
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments:
|
| 20.64 | weekly pm complete | FABSIX::O_WHITFORD | Quticherwhinin' | Tue Nov 26 1996 22:53 | 87 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Weekly P.M. <WW22> CMP.B2 11/26/96 Tech Dave Whitford
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 57
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 22
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 36
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: na
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 62
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 48
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: DW
6.1.20 Check tubing/fittings for fluid leaks Completed: DW
6.1.21 Check tubing/fittings for pneumatic leaks Completed: DW
6.1.22 Check stations/components for contamination Completed: DW
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: DW
6.1.24 Clean and lubricate the Scrubber rails Completed: DW
6.1.25 Clean and lubricate the Paddle rails Completed: DW
6.1.26 Clean Conditioning Wheel and Housing Completed: DW
6.1.27 Scrub clean the Polish area tub and walls Completed: DW
6.1.28 Remove all Load and Unload cups and scrub clean Completed: DW
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: DW
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DW
6.1.31 Remove and clean the Vacuum system Check Valve Completed: DW
6.1.32 Check Carrier clean brushes for defects, rotate Completed: DW
6.1.33 Wipe the MHTA and covers with Isopropyl Completed DW
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: DW
6.1.35 Clean the slurry delivery tube Completed: DW
6.1.36 Check chiller fluid resevoir for proper level Completed: DW
Comments:
____________________________________________________________
|
| 20.65 | WW23 Monthly PM complete. | FABSIX::L_SHKOLNIKOV | | Fri Dec 06 1996 00:55 | 153 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
DW = Dave Whitford
LS = Leon Shkolnikov
6.2.1 Change Peristaltic Pump Lines Completed: WHITFORD
6.2.2 Clean Polish area tub drains Completed: WHITFORD
6.2.3 Check Polish Table Belt for defects Completed: SHKOLNIKOV
6.2.4 Perform Down Force Calibration on all 5 heads Completed: SHKOLNIKOV
WHITFORD
Down Frc: Head 1 Pre-Adj: 375 Post-adj: 377 lbs
Head 2 Pre-Adj: 375 Post-adj: 377 lbs
Head 3 Pre-Adj: 374 Post-adj: 377 lbs
Head 4 Pre-Adj: 394 Post-adj: 377 lbs
Head 5 Pre-Adj: 379 Post-adj: 377 lbs
6.2.5 Perform Down Force Calibration on Conditioner Completed: LS/DW
Actual Down Force Pre-Adj: 77 lbs
Actual Down Force Post-Adj: 77 lbs
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: LS
6.2.7 Check the Load Flipper alignment Completed: LS
6.2.8 Check the Unload Flipper alignment Completed: DW
6.2.9 Check the Elevator alignment Completed: LS
6.2.10 Check wafer unload, from Index table to cassette Completed: DW
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.7V Post: 23.91 V
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: +/-15.04 V
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.96 V
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 31
6.2.15 Check Vacuum Pump Diaphrams Completed: LS
6.2.16 Check Vacuum Tank/Pump lines Completed: LS
6.2.17 Check Load Cup Position alignment Completed: LS/DW
6.2.18 Check Load Cup Height alignment Completed: LS/DW
6.2.19 Check Robot alignments Completed: LS
6.2.20 Check Muffin Fans for proper operation Completed: LS
Comments:
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80 psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85 psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20 psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 psi
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23 psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 psi
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2 psi
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 psi
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
(paddle not air driven on this tool)
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17 psi
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 psi
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 psi
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27 psi
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55 psi
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 psi
6.1.19 Check Drip Pan for moisture/contamination Completed: LS
6.1.20 Check tubing/fittings for fluid leaks Completed: LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: LS
6.1.22 Check stations/components for contamination Completed: LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Clean Conditioning Wheel and Housing Completed: DW
6.1.27 Scrub clean the Polish area tub and walls Completed: LS/DW
6.1.28 Remove all Load and Unload cups and scrub clean Completed: LS/DW
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DW
6.1.31 Remove and clean the Vacuum system Check Valve Completed: LS
(water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: LS
6.1.33 Wipe the MHTA and covers with Isopropyl Completed LS
6.1.34 Wipe the Process Area Plexiglas doors w/ISO Completed: DW
6.1.35 Clean the slurry delivery tube Completed: n/a
(Tool modified, no longer uses tube)
6.1.36 Check chiller fluid resevoir for proper level Completed: LS
Comments:
|
| 20.66 | Weekly PM Check Sheet (WW24) | ASDG::POIRIER | | Fri Dec 13 1996 18:11 | 91 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Weekly P.M. <WW24> CMP.B2 12/11/96 Techs: Brian Jubinville
12/13/96 John Poirier
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80/Jubinville
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 56/Jubinville
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22/Jubinville
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40/Jubinville
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 22/Jubinville
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35/Jubinville
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30/Jubinville
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40/Jubinville
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2/Jubinville
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20/Jubinville
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A-Jubinville
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17/Jubinville
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50/Jubinville
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60/Jubinville
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 26/Jubinville
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80/Jubinville
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 48/Jubinville
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80/Jubinville
6.1.19 Check Drip Pan for moisture/contamination Completed: Poirier
6.1.20 Check tubing/fittings for fluid leaks Completed: Jubinville
6.1.21 Check tubing/fittings for pneumatic leaks Completed: Jubinville
6.1.22 Check stations/components for contamination Completed: Poirier
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8/Jubinville
6.1.24 Clean and lubricate the Scrubber rails Completed: Jubinville
6.1.25 Clean and lubricate the Paddle rails Completed: Jubinville
6.1.26 Clean Conditioning Wheel and Housing Completed: Poirier
6.1.27 Scrub clean the Polish area tub and walls Completed: Poirier
6.1.28 Remove all Load and Unload cups and clean Completed: Poirier
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: Poirier
6.1.30 Check slurry hoses and connectors for leaks Completed: Poirier
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A-Jubinville
6.1.32 Check Carrier clean brushes for defects Completed: Poirier
6.1.33 Wipe the MHTA and covers with Isopropyl Completed Poirier
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: Poirier
6.1.35 Clean the slurry delivery tube Completed: N/A-Jubinville
6.1.36 Check chiller fluid resevoir for proper level Completed: Jubinville
Comments:
N/A 6.1.11 - The air pressure reading for the Transport Paddle applies
to CMP.B1 only.
N/A 6.1.31 - The Vacuum System Check Valve has been removed from the tool.
N/A 6.1.35 - The Slurry Delivery Tube has been removed from the tool.
|
| 20.67 | WEEKLY WW25 | FABSIX::M_RIDLON | Eliminate the oblivious | Tue Dec 17 1996 04:32 | 87 |
| SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Weekly P.M. <WW25> CMP.B2 12/17/96 Techs: Ridlon/R.Poirier
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 21
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 19
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: RP
6.1.20 Check tubing/fittings for fluid leaks Completed: RP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP
6.1.22 Check stations/components for contamination Completed: RP
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: MR
6.1.25 Clean and lubricate the Paddle rails Completed: MR
6.1.26 Clean Conditioning Wheel and Housing Completed: MR
6.1.27 Scrub clean the Polish area tub and walls Completed: RP
6.1.28 Remove all Load and Unload cups and clean Completed: RP/MR
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry hoses and connectors for leaks Completed: MR
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects Completed: MR/RP
6.1.33 Wipe the MHTA and covers with Isopropyl Completed MR/RP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: MR/RP
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: MR
Comments:
N/A 6.1.11 - The air pressure reading for the Transport Paddle applies
to CMP.B1 only.
N/A 6.1.31 - The Vacuum System Check Valve has been removed from the tool.
N/A 6.1.35 - The Slurry Delivery Tube has been removed from the tool.
|
| 20.68 | WW26 Weekly PM | FABSIX::R_POIRIER | | Sun Dec 22 1996 06:04 | 90 |
| --------------------------------------------------------------------------------
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Weekly P.M. <WW26> CMP.B2 12/22/96 Techs: Ridlon/R.Poirier
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80 RP
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 RP
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26 RP
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 RP
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23 RP
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 RP
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 RP
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 RP
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2 RP
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 19 RP
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 19 RP
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 RP
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 RP
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27 RP
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 RP
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50 RP
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 RP
6.1.19 Check Drip Pan for moisture/contamination Completed: RP
6.1.20 Check tubing/fittings for fluid leaks Completed: RP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP
6.1.22 Check stations/components for contamination Completed: RP
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 6 RP
6.1.24 Clean and lubricate the Scrubber rails Completed: RP
6.1.25 Clean and lubricate the Paddle rails Completed: RP
6.1.26 Clean Conditioning Wheel and Housing Completed: MR
6.1.27 Scrub clean the Polish area tub and walls Completed: MR
6.1.28 Remove all Load and Unload cups and clean Completed: RP/MR
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry hoses and connectors for leaks Completed: MR
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects Completed: MR/RP
6.1.33 Wipe the MHTA and covers with Isopropyl Completed MR/RP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: MR/RP
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: RP
Comments:
N/A 6.1.11 - The air pressure reading for the Transport Paddle applies
to CMP.B1 only.
N/A 6.1.31 - The Vacuum System Check Valve has been removed from the tool.
N/A 6.1.35 - The Slurry Delivery Tube has been removed from the tool.
Engineer informed of all N/A's
|
| 20.69 | WW27 Weekly PM completed | FABSIX::R_POIRIER | | Tue Dec 31 1996 02:17 | 91 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Weekly P.M. <WW27> CMP.B2 12/30/96 Techs: Mitch Ridlon
Roger Poirier
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80 RP
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82 RP
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20 RP
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 RP
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23 RP
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 RP
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 RP
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 RP
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3 RP
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 18 RP
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 18 RP
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 RP
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 RP
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28 RP
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 RP
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50 RP
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 RP
6.1.19 Check Drip Pan for moisture/contamination Completed: RP/MR
6.1.20 Check tubing/fittings for fluid leaks Completed: RP/MR
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP/MR
6.1.22 Check stations/components for contamination Completed: RP/MR
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 6.0 RP
6.1.24 Clean and lubricate the Scrubber rails Completed: MR
6.1.25 Clean and lubricate the Paddle rails Completed: MR
6.1.26 Clean Conditioning Wheel and Housing Completed: MR
6.1.27 Scrub clean the Polish area tub and walls Completed: MR/RP
6.1.28 Remove all Load and Unload cups and clean Completed: RP/MR
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry hoses and connectors for leaks Completed: MR
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects Completed: MR/RP
6.1.33 Wipe the MHTA and covers with Isopropyl Completed MR/RP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: MR/RP
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: RP
Comments:
N/A 6.1.11 - The air pressure reading for the Transport Paddle applies
to CMP.B1 only.
N/A 6.1.31 - The Vacuum System Check Valve has been removed from the tool.
N/A 6.1.35 - The Slurry Delivery Tube has been removed from the tool.
DG-I/O cables 5,6,7,8 need to be replaced due to stress.
Engineer informed of all N/A's
|
| 20.70 | CMP.B2 shutdown checksheet completed | FABSIX::R_GEE | | Tue Dec 31 1996 15:40 | 28 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
CMP.B SHUT DOWN CHECK SHEET Tech: _Tim Landry
_Bob Gee
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) SCRUB SIDES OF CARRIERS TL_BG_/_12/31/96
2) RUN CARRIER BLOW OFF FOR 30 SECONDS TL_BG_/_12/31/96
3) REMOVE ALL CARRIERS TL_BG_/_12/31/96
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK TL_BG_/_12/31/96
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. TL_BG_/_12/31/96
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY TL_BG_/_12/31/96
7) REMOVE CONDITIONER AND CLEAN TL_BG_/_12/31/96
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. TL_BG_/_12/31/96
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) TL_BG_/_12/31/96
10) DRAIN ELEVATOR AND CONDITIONER TUBE TL_BG_/_12/31/96
11) REMOVE PADS, AND CLEAN AND DRY TABLES TL_BG_/_12/31/96
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI TL_BG_/_12/31/96
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER TL_BG_/_12/31/96
14) POWER DOWN SYSTEM.
|
| 20.71 | MONTHLY PM FOR WW28 COMPLETED | FABSIX::L_SHKOLNIKOV | | Wed Jan 08 1997 01:15 | 153 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
Date: 01.07.97 Tool: CMP.B2 Tech/shift: DW - Olin Whitford
LS - Leon Shkolnikov
BJ - Brian Jubinville
6.2.1 Change Peristaltic Pump Lines Completed: DW
6.2.2 Clean Polish area tub drains Completed: BJ/LS
6.2.3 Check Polish Table Belt for defects Completed: LS
6.2.4 Perform Down Force Calibration on all 5 heads Completed: DW,LS
Down Frc: Head 1 Pre-Adj: 410 Post-adj: 377 lbs
Head 2 Pre-Adj: 415 Post-adj: 377 lbs
Head 3 Pre-Adj: 410 Post-adj: 377 lbs
Head 4 Pre-Adj: 414 Post-adj: 377 lbs
Head 5 Pre-Adj: 411 Post-adj: 377 lbs
6.2.5 Perform Down Force Calibration on Conditioner Completed: DW/LS
Actual Down Force Pre-Adj: 79 lbs
Actual Down Force Post-Adj: 77 lbs
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: LS
6.2.7 Check the Load Flipper alignment Completed: BJ
6.2.8 Check the Unload Flipper alignment Completed: BJ
6.2.9 Check the Elevator alignment Completed: BJ
6.2.10 Check wafer unload, from Index table to cassette Completed: BJ
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.8V Post: 24.0V LS
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: +/-15.04V LS
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.96 V LS
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: BJ
6.2.15 Check Vacuum Pump Diaphrams Completed: BJ
6.2.16 Check Vacuum Tank/Pump lines Completed: LS
6.2.17 Check Load Cup Position alignment Completed: BJ
6.2.18 Check Load Cup Height alignment Completed: BJ
6.2.19 Check Robot alignments Completed: LS
6.2.20 Check Muffin Fans for proper operation Completed: LS
Comments:
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80 DW
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 55 DW
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 23 DW
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 DW
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 20 DW
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 30 DW
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 DW
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50 DW
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6 BJ
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 DW
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a BJ
(paddle not air driven on this tool)
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 16 DW
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 DW
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55 DW
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27 DW
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 DW
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 48 DW
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 DW
6.1.19 Check Drip Pan for moisture/contamination Completed: LS
6.1.20 Check tubing/fittings for fluid leaks Completed: LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: LS
6.1.22 Check stations/components for contamination Completed: LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust:10 psi LS
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Clean Conditioning Wheel and Housing Completed: DW
6.1.27 Scrub clean the Polish area tub and walls Completed: LS/BJ/DW
6.1.28 Remove all Load and Unload cups and scrub clean Completed: LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DW
6.1.31 Remove and clean the Vacuum system Check Valve Completed: LS
(water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: LS
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: LS
6.1.34 Wipe the Process Area Plexiglas doors w/ISO Completed: LS
6.1.35 Clean the slurry delivery tube Completed: n/a
(Tool modified, no longer uses tube)
6.1.36 Check chiller fluid resevoir for proper level Completed: LS
Comments:
|
| 20.72 | WW29 WEEKLY PM COMPLETED. | FABSIX::L_SHKOLNIKOV | | Thu Jan 16 1997 06:59 | 91 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 01.16.97 Tool: CMP.B2 Tech/shift: DW - Olin Whitford
LS - Leon Shkolnikov
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80 DW
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 60 DW
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26 DW
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 DW
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 20 DW
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 DW
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 DW
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50 DW
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6 DW
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 DW
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
(paddle not air driven on this tool)
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15 DW
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 DW
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55 DW
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27 DW
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 DW
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 45 DW
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 DW
6.1.19 Check Drip Pan for moisture/contamination Completed: LS
6.1.20 Check tubing/fittings for fluid leaks Completed: LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: LS
6.1.22 Check stations/components for contamination Completed: LS/DW
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8 DW
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Clean Conditioning Wheel and Housing Completed: DW **
6.1.27 Scrub clean the Polish area tub and walls Completed: DW/LS
6.1.28 Remove all Load and Unload cups and scrub clean Completed: LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: LS
6.1.31 Remove and clean the Vacuum system Check Valve Completed: LS
(water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: LS
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: DW/LS
6.1.34 Wipe the Process Area Plexiglas doors w/ISO Completed: DW/LS
6.1.35 Clean the slurry delivery tube Completed: n/a
(Tool modified, no longer uses tube)
6.1.36 Check chiller fluid resevoir for proper level Completed: LS
**Comments: Replaced pad conditioner ring per EE request. Total wafer count on
tool was 60,477
|
| 20.73 | WW30 WEEKLY PM COMPLETED. | FABSIX::L_SHKOLNIKOV | | Wed Jan 22 1997 06:51 | 88 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 01.22.97 Tool: CMP.B2 Tech/shift: Leon Shkolnikov - LS
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82 LS
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 84 LS
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 30 LS
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 LS
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 20 LS
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 LS
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 LS
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50 LS
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6 LS
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 LS
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a *
(paddle not air driven on this tool)
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15 LS
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 LS
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55 LS*
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 27 LS*
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 LS*
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 45 LS*
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 LS
6.1.19 Check Drip Pan for moisture/contamination Completed: LS
6.1.20 Check tubing/fittings for fluid leaks Completed: LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: LS
6.1.22 Check stations/components for contamination Completed: LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8 LS
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Clean Conditioning Wheel and Housing Completed: LS
6.1.27 Scrub clean the Polish area tub and walls Completed: LS
6.1.28 Remove all Load and Unload cups and scrub clean Completed: LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: LS
6.1.31 Remove and clean the Vacuum system Check Valve Completed: LS
(water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: LS
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: LS
6.1.34 Wipe the Process Area Plexiglas doors w/ISO Completed: LS
6.1.35 Clean the slurry delivery tube Completed: n/a *
(Tool modified, no longer uses tube)
6.1.36 Check chiller fluid resevoir for proper level Completed: LS
Comments: * SPEC BEING REVISED
|
| 20.74 | CMP.B2 WEEKLY CHECK SHEET (WW31) | ASDG::POIRIER | | Fri Jan 31 1997 13:55 | 90 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Date: 1/30/97 WW31 RTC Entity: CMP.B2 Tech(s): John Poirier = JP
Brad Westphal = BW
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80 JP
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 JP
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 34 JP
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 JP
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 20 JP
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 JP
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 JP
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50 JP
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6 JP
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 JP
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A JP
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 10 JP
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 JP
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50 JP
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 26 JP
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 JP
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 45 JP
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 JP
6.1.19 Check Drip Pan for moisture/contamination Completed: JP
6.1.20 Check tubing/fittings for fluid leaks Completed: JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: JP
6.1.22 Check stations/components for contamination Completed: JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 9
6.1.24 Clean and lubricate the Scrubber rails Completed: JP
6.1.25 Clean and lubricate the Paddle rails Completed: JP
6.1.26 Clean Conditioning Wheel and Housing Completed: BW
6.1.27 Scrub clean the Polish area tub and walls Completed: BW
6.1.28 Remove all Load and Unload cups and scrub clean Completed: BW
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: JP
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: JP
6.1.33 Wipe the MHTA and covers with Isopropyl Completed JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: JP
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: JP
Comments: N/A 6.1.11 - This line item refers to CMP.B1 only.
N/A 6.1.31 - The check valve is no longer used.
N/A 6.1.35 - The slurry delivery tube is no longer used.
|
| 20.75 | MONTHLY PM COMPLETED FOR WW32 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Feb 05 1997 05:45 | 198 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE: 02/04/97 TOOL: CMP.B2 TECHNICIAN(S): Mitch Ridlon (MR)
Roger Poirier (RP)
Brian Jubinville (BJ)
Dave Whitford (DW)
Leon Shkolnikov (LS)
START TIME: 22:00 COMPLETED TIME: 00:30
6.2.1 Change Peristaltic Pump Lines and check flow Completed: RP
6.2.2 Clean Polish area tub drains for clogs Completed: LS,DW
6.2.3 Check all table belts for defects Completed: RP
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: LS,DW
Down Frc: Head 1 Pre-Adj: 361 Post-adj: 354
Head 2 Pre-Adj: 367 Post-adj: 354
Head 3 Pre-Adj: 358 Post-adj: 354
Head 4 Pre-Adj: 355 Post-adj: 354
Head 5 Pre-Adj: 350 Post-adj: 354
6.2.5 Perform Down Force Calibration on Conditioner Completed: LS,DW
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj: 78lbs
Actual Down Force Post-Adj: 77lbs
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: RP
6.2.7 Check the Load Flipper alignment Completed: RP
6.2.8 Check the Unload Flipper alignment Completed: RP
6.2.9 Check Elevator alignments Completed: RP
6.2.10 Check wafer unload, from Index table to cassette Completed: RP
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24V. Pre: 24.0 Post: 24.0 Tech: RP
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre: 15.06 Post: 15.06 Tech: RP
6.2.13 Check the +5 Volt power supply for +/- .5V
of 5V. Pre: 4.99 Post: 4.99 Tech: RP
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: LS/DW
6.2.15 Check Vacuum Pump Diaphrams Completed: BJ
6.2.16 Replace liquid separator element Completed: BJ
6.2.17 Check Vacuum Tank/Pump lines Completed: BJ
6.2.18 Check carrier to Load Cup Position alignments Completed: RP
6.2.19 Check Load Cup Height to carrier alignments Completed: RP
6.2.20 Check the Robot alignments Completed: BJ/LS
6.2.21 Check Muffin Fans for proper operation Completed: RP
Comments:
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 02/02/97 TOOL: CMP.B2 TECHNICIAN(S): Mitch Ridlon (MR)
Roger Poirier (RP)
Brian Jubinville (BJ)
Dave Whitford (DW)
Leon Shkolnikov (LS)
START TIME: COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: RP
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: RP
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: RP
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: RP
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: RP
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: RP
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: RP
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: RP
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: * BJ
* (Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: RP
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: RP
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: RP
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: RP
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: RP
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: RP
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: RP
6.1.18 Check MHTA pressure for 75-85 PSI Completed: RP
6.1.19 Check Drip Pans for moisture/contamination Completed: RP
6.1.20 Check tubing/fittings for fluid leaks Completed: RP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP
6.1.22 Check stations/components for contamination Completed: RP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: RP
6.1.24 Clean and lubricate the Scrubber rails Completed: RP
6.1.25 Clean and lubricate the Paddle rails Completed: RP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: RP
6.1.27 Scrub clean the Polish area tub and walls Completed: RP
6.1.28 Remove all Load and Unload cups and scrub clean
with 5% hydrogen peroxide. Completed: RP,DW,LS,BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BJ
6.1.32 Check Carrier clean brushes for defects Completed: RP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: RP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: RP
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: LS
6.1.38 Check the slurry flow alarm. Completed: LS/DW/BJ
Comments:
|
| 20.76 | ww33 weekly pm completed. | FABSIX::L_SHKOLNIKOV | | Sat Feb 15 1997 00:13 | 110 |
|
CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:2/14/97 TOOL ENTITY:CMP.B2 TECH(S): Leon Shkolnikov - LS
START TIME: 10:00 pm. COMPLETED TIME: 12:01 am.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 LS
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 LS
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 20 LS
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 LS
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 LS
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 LS
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 LS
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 LS
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 LS
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 LS
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 LS
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 55 LS
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 LS
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 LS
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 LS
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 LS
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 LS
6.1.19 Check Drip Pans for moisture/contamination Completed: LS
6.1.20 Check tubing/fittings for fluid leaks Completed: LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: LS
6.1.22 Check stations/components for contamination Completed: LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: LS
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: LS
6.1.27 Scrub clean the Polish area tub and walls Completed: LS
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: LS
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: LS
6.1.32 Check Carrier clean brushes for defects Completed: LS
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: LS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: LS
6.1.35 Check chiller fluid resevoir for proper level Completed: LS
6.1.36 Check the chiller readout for 24 degrees C. Completed: LS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: LS
6.1.38 Check the slurry flow alarm. Completed: LS
Comment: (I/O MANIFOLD) AI/O#3 cable slightly damaged. Will notify
to EE in the morning.
|
| 20.77 | WEEKLY PM FOR WW34 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Feb 20 1997 05:07 | 105 |
|
CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:2/20/97 TOOL ENTITY:CMP.B2 TECH(S): Brian Jubinville - BJ
Leon Shkolnikov - LS
Olin Whitford - OW
START TIME: 02:30 COMPLETED TIME: 05:00
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 BJ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 23 BJ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 BJ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 BJ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 BJ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BJ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 55 BJ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 BJ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BJ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BJ
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 BJ
6.1.19 Check Drip Pans for moisture/contamination Completed: LS/BJ
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: LS/BJ
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BJ
6.1.27 Scrub clean the Polish area tub and walls Completed: BJ
6.1.28 Remove all Load and Unload cups and scrub clean BJ
with hydrogen peroxide. Completed:
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BJ
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BJ
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: LS
6.1.32 Check Carrier clean brushes for defects Completed: BJ
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BJ
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BJ
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: BJ
6.1.38 Check the slurry flow alarm. Completed: BJ/LS
Comment:
|
| 20.78 | SEMI-A MOVED OUT 1 WEEK | YIELD::TDYER | | Thu Feb 27 1997 15:18 | 8 |
|
SEMI-ANNUAL PM WILL BE PUSHED OUT TO NEXT WEEK 3/3/97. THIS MAJOR PM
WILL BE PERFORMED DURRING THE INDEX TABLE UPGRADES NEXT WEEK. EEG TO
PERFORMA WEEKLY PM IN PLACE THIS WEEK.
TIM D.
EQUIPMENT ENGINEER.
|
| 20.79 | WW35 WEEKLY PM COMPLETED. | FABSIX::L_SHKOLNIKOV | | Fri Feb 28 1997 00:22 | 105 |
|
CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:2/27/97 TOOL ENTITY:CMP.B2 TECH(S): Leon Shkolnikov - LS
Olin Whitford - OW
START TIME: 09:30 COMPLETED TIME: 12:00
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 ls
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 ls
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 28 ls
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 ls
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 ls
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 ls
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 ls
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 ls
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 ls
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 ls
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 ls
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 55 ls
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 ls
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 ls
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 ls
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 ls
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 ls
6.1.19 Check Drip Pans for moisture/contamination Completed: LS/DW
6.1.20 Check tubing/fittings for fluid leaks Completed: LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: LS
6.1.22 Check stations/components for contamination Completed: LS/DW
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: LS
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: DW
6.1.27 Scrub clean the Polish area tub and walls Completed: DW
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: DW/LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DW**
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: LS
6.1.32 Check Carrier clean brushes for defects Completed: DW/LS
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: LS/DW
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: DW/LS
6.1.35 Check chiller fluid resevoir for proper level Completed: LS
6.1.36 Check the chiller readout for 24 degrees C. Completed: LS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: LS
6.1.38 Check the slurry flow alarm. Completed: DW
Comment: The slurry lines have been replaced and slurry flow calibrated.
|
| 20.80 | ww36 S/A pm completed. | FABSIX::L_SHKOLNIKOV | No more experiments with freedom | Tue Mar 04 1997 21:21 | 234 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Semi-Annual Preventative Maintenance Check Sheet, Rev. E
DATE: 3/4/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S):Brendan Finn =BF
Bob Gee =BG
Tim Landry =TL
Jim Sadin =JS
Leon Shkolnikov =LS
START TIME: 0900 hours COMPLETED TIME: 09:30 pm.
6.4.1 Check all interlocks for functionality Completed: JS
6.4.2 Check all EMO's for functionality Completed: JS
6.4.3 Lubricate the Rotary Union Completed: LS
6.4.4 Lubricate the Lead Screw Completed: LS
6.4.5 Lubricate the Linear Guide Rails Completed: LS
6.4.6 Lubricate the Idler Pulley Completed: LS
6.4.7 Rebuild the vacuum pump using the appropriate
rebuild kit. Completed: BG
Comments:
=======================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE: 3/4/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S):Brendan Finn=BF
Bob Gee =BG
Tim Landry =TL
Jim Sadin =JS
START TIME: 0900 hours COMPLETED TIME:
6.2.1 Change Peristaltic Pump Lines and check flow Completed: BG
6.2.2 Clean Polish area tub drains for clogs Completed: JS
6.2.3 Check all table belts for defects Completed: BG
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: BF,BG
JS,TL
Down Frc: Head 1 Pre-Adj: 357 Post-adj: 354
Head 2 Pre-Adj: 336 Post-adj: 354
Head 3 Pre-Adj: 334 Post-adj: 354
Head 4 Pre-Adj: 354 Post-adj: 354
Head 5 Pre-Adj: 338 Post-adj: 354
6.2.5 Perform Down Force Calibration on Conditioner Completed: BF,BG
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj. 77.4
Actual Down Force Post-Adj: 77.4
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: JS, TL
6.2.7 Check the Load Flipper alignment Completed: TL,BF,JS
BG,DR
6.2.8 Check the Unload Flipper alignment Completed: TL,BF,JS
BG,DR
6.2.9 Check Elevator alignments Completed: TL,BF,JS
BG
6.2.10 Check wafer unload, from Index table to cassette Completed: TL,BF,JS
BG
6.2.11 Check the +24 Volt power supply for +/-1V
of 24V. Pre: 24.12 Post: 24.12 Tech: JS,TL
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V. Pre: +15.03 Post: +15.03 Tech: JS, TL
Pre: -15.06 Post: -15.06
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: 4.96 Post: 4.96 Tech: JS, TL
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: JS, TL
6.2.15 Check Vacuum Pump Diaphrams Completed: BG
6.2.16 Replace liquid separator filter element Completed: BG
6.2.17 Check Vacuum Tank/Pump lines Completed: BG
6.2.18 Check carrier to Load Cup Position alignments Completed: BF,JS,BG
TL
6.2.19 Check Load Cup Height to carrier alignments Completed: LS
6.2.20 Check the Robot alignments Completed: JS, TL
6.2.21 Check Muffin Fans for proper operation Completed: LS
Comments:
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 3/4/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S): Brendan Finn (BF)
Jim Sadin (JS)
Tim Landry (TL)
Bob Gee (BG)
START TIME: COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 82
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 30
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6.2
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/a
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 52
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 26
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45
6.1.19 Check Drip Pans for moisture/contamination Completed: BG
6.1.20 Check tubing/fittings for fluid leaks Completed: BG
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BG
6.1.22 Check stations/components for contamination Completed: TL,BF,JS
BG
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: BF
6.1.24 Clean and lubricate the Scrubber rails Completed: BF
6.1.25 Clean and lubricate the Paddle rails Completed: BF
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BG
6.1.27 Scrub clean the Polish area tub and walls Completed: JS
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: JS/BF/TL/BG
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BF
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BF
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BG
6.1.32 Check Carrier clean brushes for defects Completed: TL
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: JS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BF
6.1.35 Check chiller fluid resevoir for proper level Completed: BF
6.1.36 Check the chiller readout for 24 degrees C. Completed: JS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: LS
6.1.38 Check the slurry flow alarm. Completed: BF
Comments:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/a
(Applicable for CMP.B1 only) Does not apply to CMP.B2
6.1.35 Added water to chiller
|
| 20.81 | WEEKLY PM FOR WW37 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Mar 14 1997 00:59 | 105 |
|
CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:3/14/97 TOOL ENTITY:CMP.B2 TECH(S): Leon Shkolnikov - LS
Brian Jubinville - BJ
START TIME: 23:00 COMPLETED TIME: 01:00
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 BJ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 28 BJ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 BJ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 BJ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 BJ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BJ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BJ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 BJ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BJ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BJ
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 BJ
6.1.19 Check Drip Pans for moisture/contamination Completed: LS/BJ
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: LS/BJ
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 7 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BJ
6.1.27 Scrub clean the Polish area tub and walls Completed: BJ
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: LS/BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BJ
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BJ
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BJ
6.1.32 Check Carrier clean brushes for defects Completed: BJ
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BJ
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BJ
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: LS/BJ
6.1.38 Check the slurry flow alarm. Completed: LS/BJ
Comment: A small puddle of DI was under the tool below the index table
area.
|
| 20.82 | WW38 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 16 1997 13:02 | 104 |
|
CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:3/16/97 TOOL ENTITY:CMP.B2 TECH(S): Timothy Landry (TL)
Brendan Finn (BF)
Bob Gee (BG)
James Sadin (JS)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 JS
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 JS
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 28 JS
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 JS
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 JS
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 JS
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 JS
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 JS
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 JS
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A JS
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 JS
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 JS
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 JS
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 JS
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 JS
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 21 JS
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 JS
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 JS
6.1.19 Check Drip Pans for moisture/contamination Completed: TL/BF
6.1.20 Check tubing/fittings for fluid leaks Completed: BG
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BG
6.1.22 Check stations/components for contamination Completed: TL/BG
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: BF
6.1.24 Clean and lubricate the Scrubber rails Completed: BF
6.1.25 Clean and lubricate the Paddle rails Completed: BF
6.1.26 Remove and clean conditioning Wheel and Housing Completed: TL
6.1.27 Scrub clean the Polish area tub and walls Completed: TL/JS
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: TL/JS/BF/BG
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: TL
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BG
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: TL
6.1.32 Check Carrier clean brushes for defects Completed: JS
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: TL/JS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: TL/JS
6.1.35 Check chiller fluid resevoir for proper level Completed: BF
6.1.36 Check the chiller readout for 24 degrees C. Completed: BF
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: TL/JS
6.1.38 Check the slurry flow alarm. Completed: BG/BF
COMMENTS:
6.1.19 - found small puddle of DI under load cup 4 area of drip pan.
|
| 20.83 | WW39 Weekly PM completed | FABSIX::R_POIRIER | | Wed Mar 26 1997 06:27 | 106 |
|
CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:3/26/97 TOOL ENTITY:CMP.B2 TECH(S): Roger Poirier (RP)
Al Quillen (AQ)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 RP
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 RP
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 28 RP
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 RP
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 RP
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 RP
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 RP
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 RP
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6.2 RP
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A RP
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 RP
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 RP
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 RP
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 RP
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 RP
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 22 RP
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 RP
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 RP
6.1.19 Check Drip Pans for moisture/contamination Completed: RP/AQ
6.1.20 Check tubing/fittings for fluid leaks Completed: AQ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP
6.1.22 Check stations/components for contamination Completed: RP/AQ
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: RP
6.1.24 Clean and lubricate the Scrubber rails Completed: AQ
6.1.25 Clean and lubricate the Paddle rails Completed: AQ
6.1.26 Remove and clean conditioning Wheel and Housing Completed: RP
6.1.27 Scrub clean the Polish area tub and walls Completed: RP
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: RP
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: RP
6.1.32 Check Carrier clean brushes for defects Completed: RP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: RP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: RP
6.1.35 Check chiller fluid resevoir for proper level Completed: RP
6.1.36 Check the chiller readout for 24 degrees C. Completed: RP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: RP
6.1.38 Check the slurry flow alarm. Completed: RP
COMMENTS:
6.1.10 - Check Transport Paddle L/R pressure for 25-35 PSI
Applicable for CMP.B1 only. Engineer informed.
6.1.19 - Found small puddle of DI under load cup 4 area of drip pan.
No leak found. Engineer informed.
|
| 20.84 | WW40 Weekly PM completed. | FABSIX::R_POIRIER | | Tue Apr 01 1997 02:20 | 105 |
|
CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:3/31/97 TOOL ENTITY:CMP.B2 TECH(S): Roger Poirier (RP)
Bruce Durgin (BD)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 RP/BD
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 RP/BD
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 28 RP/BD
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 RP/BD
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 RP/BD
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 RP/BD
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 RP/BD
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 RP/BD
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6.0 RP/BD
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A RP/BD
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 RP/BD
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 45 RP/BD
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 RP/BD
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 RP/BD
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 RP/BD
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 RP/BD
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 RP/BD
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 RP/BD
6.1.19 Check Drip Pans for moisture/contamination Completed: RP/BD
6.1.20 Check tubing/fittings for fluid leaks Completed: RP/BD
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP/BD
6.1.22 Check stations/components for contamination Completed: RP/BD
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 RP
6.1.24 Clean and lubricate the Scrubber rails Completed: RP/BD
6.1.25 Clean and lubricate the Paddle rails Completed: /BD
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BD
6.1.27 Scrub clean the Polish area tub and walls Completed: RP
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: RP
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BD
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP/BD
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: RP
6.1.32 Check Carrier clean brushes for defects Completed: RP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: RP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: RP
6.1.35 Check chiller fluid resevoir for proper level Completed: RP
6.1.36 Check the chiller readout for 24 degrees C. Completed: RP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: RP
6.1.38 Check the slurry flow alarm. Completed: RP
COMMENTS:
6.1.10 - Check Transport Paddle L/R pressure for 25-35 PSI
Applicable for CMP.B1 only. Engineer informed.
6.1.19 - Found small puddle of DI under load cup 4 area of drip pan.
Couldn't find where leak originated. Engineer informed.
|
| 20.85 | MONTHLY PM COMPLETED FOR WW41 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat Apr 12 1997 02:38 | 180 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE: 4/11/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S): Brian Jubinville (BJ)
Leon Shkolnikov (LS)
6.2.1 Change Peristaltic Pump Lines and check flow Completed: BJ/LS
6.2.2 Clean Polish area tub drains for clogs Completed: BJ/LS
6.2.3 Check all table belts for defects Completed: BJ/LS
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: BJ/LS
Down Frc: Head 1 Pre-Adj: 357 Post-adj: 354
Head 2 Pre-Adj: 350 Post-adj: 354
Head 3 Pre-Adj: 357 Post-adj: 354
Head 4 Pre-Adj: 344 Post-adj: 354
Head 5 Pre-Adj: 352 Post-adj: 354
6.2.5 Perform Down Force Calibration on Conditioner Completed: BJ/LS
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj.: 70.2
Actual Down Force Post-Adj.: 77
6.2.6 Check Scrubber Brushes for contaminates/defects Completed:
6.2.7 Check the Load Flipper alignment Completed: BJ
6.2.8 Check the Unload Flipper alignment Completed: BJ
6.2.9 Check Elevator alignments Completed: BJ
6.2.10 Check wafer unload, from Index table to cassette Completed: BJ
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24V. Pre: 22.5 Post: 23.8 Tech: BJ/LS
6.2.12 Check the +15 Volt power supply for +/- 1V
of 15V. Pre: 15.01 Post: 15.01 Tech: BJ
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: 4.8 Post: 4.8 Tech: BJ
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: LS
6.2.15 Check Vacuum Pump Diaphrams Completed: LS
6.2.16 Replace liquid separator filter element Completed: LS
6.2.17 Check Vacuum Tank/Pump lines Completed: LS
6.2.18 Check carrier to Load Cup Position alignments Completed: BJ/LS
6.2.19 Check Load Cup Height to carrier alignments Completed: BJ/LS
6.2.20 Check the Robot alignments Completed: BJ
6.2.21 Check Muffin Fans for proper operation Completed: BJ/LS
Comments:
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 4/11/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S): Brian Jubinville (BJ)
Leon Shkolnikov (LS)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 BJ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 26 BJ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 BJ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 BJ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 BJ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BJ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BJ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 BJ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BJ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BJ
6.1.19 Check Drip Pans for moisture/contamination Completed: LS
6.1.20 Check tubing/fittings for fluid leaks Completed: LS/BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: LS/BJ
6.1.22 Check stations/components for contamination Completed: LS/BJ
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 2 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: LS
6.1.27 Scrub clean the Polish area tub and walls Completed: LS/BJ
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: LS/BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: LS/BJ
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: LS
6.1.32 Check Carrier clean brushes for defects Completed: LS/BJ
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: LS/BJ
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: LS/BJ
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: LS
6.1.38 Check the slurry flow alarm. Completed: LS
Comments:
|
| 20.86 | ww42 weekly pm. | FABSIX::L_SHKOLNIKOV | | Wed Apr 16 1997 01:14 | 102 |
|
CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:4/15/97 TOOL ENTITY:CMP.B2 TECH(S): Leon Shkolnikov (ls)
Dave Whitford (DW)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 ls
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 ls
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 24 DW
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 DW
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 DW
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 DW
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 DW
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 DW
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6.0 DW
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A ls
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 DW
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 DW
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 52 DW
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 DW
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 DW
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 DW
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 DW
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 DW
6.1.19 Check Drip Pans for moisture/contamination Completed: ls*
6.1.20 Check tubing/fittings for fluid leaks Completed: ls
6.1.21 Check tubing/fittings for pneumatic leaks Completed: ls
6.1.22 Check stations/components for contamination Completed: ls
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 ls
6.1.24 Clean and lubricate the Scrubber rails Completed: ls
6.1.25 Clean and lubricate the Paddle rails Completed: ls
6.1.26 Remove and clean conditioning Wheel and Housing Completed: ls
6.1.27 Scrub clean the Polish area tub and walls Completed: ls
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: ls
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: ls
6.1.30 Check slurry pump hoses and connectors for leaks Completed: ls
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: ls
6.1.32 Check Carrier clean brushes for defects Completed: ls
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: ls
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: ls
6.1.35 Check chiller fluid resevoir for proper level Completed: ls
6.1.36 Check the chiller readout for 24 degrees C. Completed: ls
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: ls
6.1.38 Check the slurry flow alarm. Completed: ls
COMMENTS:
*6.1.19 - Found small puddle of DI under load cup 4 area of drip pan.
Couldn't find where leak originated. Engineer informed.
|
| 20.87 | WW43 weekly pm complete | FABSIX::O_WHITFORD | Lead, follow or step aside. | Thu Apr 24 1997 14:16 | 104 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 4/24/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S): Dave Whitford (DW)
John Poirier (JP)
START TIME: 10:30 COMPLETED TIME: 12:30
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 DW
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 DW
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 22 DW
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 DW
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 DW
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 DW
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 DW
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 DW
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6.2 DW
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A DW
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 DW
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 DW
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 DW
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 DW
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 20 DW
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 DW
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 DW
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 DW
6.1.19 Check Drip Pans for moisture/contamination Completed: JP
6.1.20 Check tubing/fittings for fluid leaks Completed: JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: JP
6.1.22 Check stations/components for contamination Completed: JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 JP
6.1.24 Clean and lubricate the Scrubber rails Completed: JP
6.1.25 Clean and lubricate the Paddle rails Completed: JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: DW
6.1.27 Scrub clean the Polish area tub and walls Completed: DW
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: DW
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: JP
6.1.32 Check Carrier clean brushes for defects Completed: JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: JP
6.1.35 Check chiller fluid resevoir for proper level Completed: JP
6.1.36 Check the chiller readout for 24 degrees C. Completed: JP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: DW
6.1.38 Check the slurry flow alarm. Completed: JP
Comments: Lost Infranor for ROTATION, ARM 5 when tool was powered up.
Powered down to replace and then ROTATION ARM 2 appeared dead. While
signing on to order replacement, came b ack and ROTATION ARM 2 now
indicates o.k. Passed initialization. ????
|
| 20.88 | WW 44 WEEKLY COMPLETED FOR B2 | FABSIX::J_SWENSON | | Wed Apr 30 1997 20:35 | 99 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:4/30/97 TOOL ENTITY:CMP.B2 TECHNICIAN(S):MIKE STANDING
START TIME:1540 COMPLETED TIME:1810
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed:MS
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed:MS
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed:MS
6.1.4 Check Load Cup pressure for 40-50 PSI Completed:MS
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed:MS
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed:MS
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed:MS
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed:MS
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed:MS
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed:MS
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed:MS
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed:MS
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed:MS
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed:MS
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed:MS
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed:MS
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed:MS
6.1.18 Check MHTA pressure for 75-85 PSI Completed:MS
6.1.19 Check Drip Pans for moisture/contamination Completed:MS
6.1.20 Check tubing/fittings for fluid leaks Completed:MS
6.1.21 Check tubing/fittings for pneumatic leaks Completed:MS
6.1.22 Check stations/components for contamination Completed:MS
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed:MS
6.1.24 Clean and lubricate the Scrubber rails Completed:MS
6.1.25 Clean and lubricate the Paddle rails Completed:MS
6.1.26 Remove and clean conditioning Wheel and Housing Completed:MS
6.1.27 Scrub clean the Polish area tub and walls Completed:MS
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:MS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed:MS
6.1.30 Check slurry pump hoses and connectors for leaks Completed:MS
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed:MS
6.1.32 Check Carrier clean brushes for defects Completed:MS
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:MS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed:MS
6.1.35 Check chiller fluid resevoir for proper level Completed:MS
6.1.36 Check the chiller readout for 24 degrees C. Completed:MS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:MS
6.1.38 Check the slurry flow alarm. Completed:MS
Comments:
|
| 20.89 | ww45 weekly pm check sheet | ASDG::POIRIER | | Sat May 10 1997 19:53 | 102 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 5/10/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S): John Poirier (JP)
Mike Standing (MS)
START TIME: 5:30 P.M. COMPLETED TIME: 6:50 P.M.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 JP
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 JP
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 30 JP
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 JP
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 19 JP
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 JP
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 35 JP
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 JP
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6.2 JP
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A *
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 18 JP
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 JP
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 JP
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 JP
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 JP
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 JP
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 JP
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 JP
6.1.19 Check Drip Pans for moisture/contamination Completed: JP
6.1.20 Check tubing/fittings for fluid leaks Completed: JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: JP
6.1.22 Check stations/components for contamination Completed: JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 4 JP
6.1.24 Clean and lubricate the Scrubber rails Completed: JP
6.1.25 Clean and lubricate the Paddle rails Completed: JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: JP
6.1.27 Scrub clean the Polish area tub and walls Completed: JP
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: JP
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: MS
6.1.32 Check Carrier clean brushes for defects Completed: JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: JP
6.1.35 Check chiller fluid resevoir for proper level Completed: JP
6.1.36 Check the chiller readout for 24 degrees C. Completed: JP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: JP
6.1.38 Check the slurry flow alarm. Completed: MS
Comments: 6.1.10 APPLIES TO CMP.B1 ONLY.
|
| 20.90 | Monthly PM completed | FABSIX::R_POIRIER | | Wed May 14 1997 11:29 | 189 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE: 5/12/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S): Roger Poirier (RP)
Bruce Durgin (BD)
6.2.1 Change Peristaltic Pump Lines and check flow Completed: BD/RP
6.2.2 Clean Polish area tub drains for clogs Completed: RP/BD
6.2.3 Check all table belts for defects Completed: RP/BD
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: RP
Down Frc: Head 1 Pre-Adj: 358 Post-adj: 355
Head 2 Pre-Adj: 351 Post-adj: 354
Head 3 Pre-Adj: 356 Post-adj: 355
Head 4 Pre-Adj: 348 Post-adj: 355
Head 5 Pre-Adj: 351 Post-adj: 354
6.2.5 Perform Down Force Calibration on Conditioner Completed: RP
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj.: 72.1
Actual Down Force Post-Adj.: 77
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: RP/BD
6.2.7 Check the Load Flipper alignment Completed: RP/BD
6.2.8 Check the Unload Flipper alignment Completed: RP/BD
6.2.9 Check Elevator alignments Completed: RP
6.2.10 Check wafer unload, from Index table to cassette Completed: RP
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24V. Pre: 23.8 Post: 23.8 Tech: RP
6.2.12 Check the +15 Volt power supply for +/- 1V
of 15V. Pre: 15.02 Post: 15.01 Tech: RP
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: 4.90 Post: 4.90 Tech: RP
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: RP
6.2.15 Check Vacuum Pump Diaphrams Completed: RP/BD
6.2.16 Replace liquid separator filter element Completed: BD/BD
6.2.17 Check Vacuum Tank/Pump lines Completed: RP/BD
6.2.18 Check carrier to Load Cup Position alignments Completed: RP/BD
6.2.19 Check Load Cup Height to carrier alignments Completed: RP/BD
6.2.20 Check the Robot alignments Completed: RP/BD
6.2.21 Check Muffin Fans for proper operation Completed: RP
Comments:
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 5/12/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S): Rgoer Poirier (RP)
Bruce Durgin (BD)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 RP/BD
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 RP/BD
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 25 RP/BD
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 RP/BD
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 RP/BD
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 RP/BD
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 RP/BD
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 RP/BD
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6.5 RP/BD
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A RP
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 RP/BD
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 RP/BD
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 52 RP/BD
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 RP/BD
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 RP/BD
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 RP/BD
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 RP/BD
6.1.19 Check Drip Pans for moisture/contamination Completed: RP/BD *
6.1.20 Check tubing/fittings for fluid leaks Completed: RP/BD
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP/BD
6.1.22 Check stations/components for contamination Completed: RP/BD
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 2 RP
6.1.24 Clean and lubricate the Scrubber rails Completed: BD
6.1.25 Clean and lubricate the Paddle rails Completed: BD
6.1.26 Remove and clean conditioning Wheel and Housing Completed: RP
6.1.27 Scrub clean the Polish area tub and walls Completed: BD
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: BD
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BD
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BD
6.1.32 Check Carrier clean brushes for defects Completed: RP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: RP/BD
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BD
6.1.35 Check chiller fluid resevoir for proper level Completed: BD
6.1.36 Check the chiller readout for 24 degrees C. Completed: RP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: RP/BD
6.1.38 Check the slurry flow alarm. Completed: RP/BD
Comments:
6.1.10 - Check Transport Paddle L/R pressure for 25-35 PSI
Applicable for CMP.B1 only. Engineer informed.
6.1.19 - Found small puddle of DI under load cup 4 area of drip pan.
No leak found. Engineer informed.
Note: Found Left side Bulkhead cable #3 had frayed outer shielding.
No damage to inner shield or wires noted. E.E informed.
|
| 20.91 | ww47 weekly p.m. completed / pads changed | FABSIX::R_GEE | | Sun May 18 1997 10:23 | 103 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 5/18/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S): Jim Sadin (JS)
Bob Gee (BG)
Dave Whitford (DW)
START TIME: 8:30 A.M. COMPLETED TIME: 9:45 A.M.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 BG
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BG
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 22 BG
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 BG
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 19 BG
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BG
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BG
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 BG
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6.2 BG
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A *
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 18 BG
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BG
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 52 BG
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 BG
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BG
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BG
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BG
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 BG
6.1.19 Check Drip Pans for moisture/contamination Completed: BG
6.1.20 Check tubing/fittings for fluid leaks Completed: BG
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BG
6.1.22 Check stations/components for contamination Completed: BG
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 6 BG
6.1.24 Clean and lubricate the Scrubber rails Completed: DW
6.1.25 Clean and lubricate the Paddle rails Completed: DW
6.1.26 Remove and clean conditioning Wheel and Housing Completed: DW/JS
6.1.27 Scrub clean the Polish area tub and walls Completed: DW/JS/BG
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: DW/JS/BG
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: DW/JS/BG
6.1.30 Check slurry pump hoses and connectors for leaks Completed: JS
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BG
6.1.32 Check Carrier clean brushes for defects Completed: JS
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: DW/JS/BG
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: DW/JS/BG
6.1.35 Check chiller fluid resevoir for proper level Completed: DW
6.1.36 Check the chiller readout for 24 degrees C. Completed: DW
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: DW/JS/BG
6.1.38 Check the slurry flow alarm. Completed: DW/JS/BG
Comments: 6.1.10 APPLIES TO CMP.B1 ONLY.
Changed both primary and secondary pads due to high wafer count.
|
| 20.92 | WW48 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 10:22 | 101 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 5/25/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S): James Sadin (js)
Bob Gee (bg)
` Timothy Landry (tl)
Brendan Finn (bf)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 85 bg
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 57 bg
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 28 bg
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45js/tl
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 15js/tl
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35js/tl
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30js/tl
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 45js/tl
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 js/tl
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20js/tl
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50bg/bf
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 55bg/bf
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 28bg/bf
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 30js/tl
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 25js/tl
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45js/tl
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80js/tl
6.1.19 Check Drip Pans for moisture/contamination Completed: bf
6.1.20 Check tubing/fittings for fluid leaks Completed: bg
6.1.21 Check tubing/fittings for pneumatic leaks Completed: bg
6.1.22 Check stations/components for contamination Completed: tl/js/bf/bg
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 8 js
6.1.24 Clean and lubricate the Scrubber rails Completed: bg
6.1.25 Clean and lubricate the Paddle rails Completed: bf
6.1.26 Remove and clean conditioning Wheel and Housing Completed: tl
6.1.27 Scrub clean the Polish area tub and walls Completed: bg
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: tl/js/bf/bg
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: bg
6.1.30 Check slurry pump hoses and connectors for leaks Completed: js
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: tl
6.1.32 Check Carrier clean brushes for defects Completed: bf
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: bf/tl
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: js
6.1.35 Check chiller fluid resevoir for proper level Completed: js/tl
6.1.36 Check the chiller readout for 24 degrees C. Completed: js
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: js/tl/bf
6.1.38 Check the slurry flow alarm. Completed: tl
Comments: 6.1.10 - applicable to CMP.B1 only.
|
| 20.93 | CMP.B2 SHUTDOWN AND STARTUP CHECKSHEETS | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 10:51 | 50 |
| --------------------------------------------------------------------------------
SPEC# HF60-0172 REV-E SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
CMP.B2
CMP.B SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) SCRUB SIDES OF CARRIERS RP,AQ,BD/5-26-97
2) RUN CARRIER BLOW OFF FOR 30 SECONDS RP,AQ,BD/5-26-97
3) REMOVE ALL CARRIERS RP,AQ,BD/5-26-97
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK RP,AQ,BD/5-26-97
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. RP,AQ,BD/5-26-97
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY RP,AQ,BD/5-26-97
7) REMOVE CONDITIONER AND CLEAN RP,AQ,BD/5-26-97
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. RP,AQ,BD/5-26-97
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) RP,AQ,BD/5-26-97
10) DRAIN ELEVATOR AND CONDITIONER TUBE RP,AQ,BD/5-26-97
11) REMOVE PADS, AND CLEAN AND DRY TABLES RP,AQ,BD/5-26-97
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI RP,AQ,BD/5-26-97
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER RP,AQ,BD/5-26-97
14) POWER DOWN SYSTEM.
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
CMP.B START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. _js/tl/05/27_
2) POWER ON SYSTEM. _js/tl/05/27_
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES _js/tl/5/27__
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY _js/tl/5/27__
5) DRY TABLES, INSTALL PADS _js/tl/5/27__
6) INSTALL SCRUBBER BRUSHES _js/tl/5/27__
7) INSTALL CONDITIONER _js/tl/5/27__
8) INSTALL CARRIERS _js/tl/5/27__
9) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) _js/tl/5/27__
10) IF SLURRY SYSTEM WAS SHUT DOWN, CONTACT ASHLAND CHEMICAL,
REQUEST DI TO BE PURGE FROM SLURRY SYSTEM AND CHARGED WITH
SLURRY AND REQUEST A NEW SLURRY FILTER BE INSTALLED. _js/tl/5/27__
11) CALIBRATE SLURRY FLOW _NA__________
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC _js/tl/5/27__
|