| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 18.5 | Weekly PM almost completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 08 1995 21:21 | 61 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 11/8/95 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100 psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 100 psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20 psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25 psi
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23 psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 70 psi
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 5.2 psi
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 40 psi
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20 psi
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 psi
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 50 psi
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 10 psi
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 58 psi
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80 psi
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 10 psi
6.1.24 Clean and lubricate the Scrubber rails Completed:
6.1.25 Clean and lubricate the Paddle rails Completed:
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed:
Comments:_____________________________________________________________________
______________________________________________________________________________
|
| 18.6 | WW 19 pm | SUBPAC::LANDRY | | Sat Nov 11 1995 15:13 | 58 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 11/11/95 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: Landry/Westphal
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 100
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 21
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 65
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 5.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 30
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 45
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 8
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 60
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 3
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments: Found a small amount of gear oil under the Index Table gear box.
|
| 18.7 | | SUBPAC::LANDRY | | Tue Nov 14 1995 18:34 | 58 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 11/14/95 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: Landry / Finn
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 100
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 21
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 65
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 5.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 30
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 45
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 8
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 60
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 3
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments:
|
| 18.8 | Weekly PM for 11/22 completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 22 1995 06:13 | 58 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 11/22/95 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: Gwen - BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 100
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 70
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.8
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 40
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 8
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 58
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X 11/20
Comments:
|
| 18.9 | WEEKLY PM ALMOST COMPLETE, SEMI-ANNUAL WAIVED PER T. DYER | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 30 1995 05:17 | 60 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 11/22/95 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: Gwen BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 95
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 70
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.8
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 40
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 5
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 48
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed:
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 5
6.1.24 Clean and lubricate the Scrubber rails Completed:
6.1.25 Clean and lubricate the Paddle rails Completed:
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed:
Comments: no NKS #2 grease in stock, shortage request made.
System unavailable for cleaning, currently running
|
| 18.10 | Weekly PM completed | SUBPAC::LANDRY | | Mon Dec 04 1995 15:40 | 58 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 12/04/95 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: Landry / Finn
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 18
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 65
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 5.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 30
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 45
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 8
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 60
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 3
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments:
|
| 18.11 | weekly completed | STRATA::FINN | | Mon Dec 11 1995 18:23 | 60 |
|
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 12/11/95 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH:Finn/Sadin/Camilletti
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 98
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: >65
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.8
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 40
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 9
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 3
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments:
|
| 18.12 | Weekly completed | SUBPAC::LANDRY | | Sun Dec 17 1995 12:36 | 58 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 12/17/95 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: Landry
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 92
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.8
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 40
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 45
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 15
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 60
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments:
|
| 18.13 | B1 weekly pm completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 03 1996 23:34 | 59 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 1/3/96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 90
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.5
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 40
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 12
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments:
|
| 18.14 | WW 28 - Weekly | SUBPAC::LANDRY | | Tue Jan 09 1996 13:04 | 58 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 1/9/96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: Landry
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 92
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.8
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 40
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 45
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 15
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 60
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments:
|
| 18.15 | WW28 Monthly PM Checksheet | ASDG::POIRIER | | Wed Jan 10 1996 17:38 | 28 |
|
--------------------------------------------------------------------------------
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Monthly Preventative Maintenance Check Sheet, Rev C
-------
WW28 1/9/96 & 1/10/96 Tim Landry & John Poirier
------------------------------------------------------------------------------
6.2.1 Perform Weekly PM Tasks Completed: TL
(See Comment )
6.2.2 Change Peristaltic Pump Lines Completed: JP
6.2.3 Clean Polish area drain tub Completed: TL
6.2.4 Check Polish Table Belt for defects Completed: TL
6.2.5 Check the Neslab water level Completed: TL
6.2.6 Check the Neslab fittings for leaks Completed: TL
6.2.7 Check Scrubber Brushes for contaminates/defects Completed: TL
6.2.8 Check the Load Flipper alignment Completed: TL
6.2.9 Check the Unload Flipper alignment Completed: TL
Comments: The Weekly PM Checksheet has been posted in reply #18.14.
|
| 18.16 | 1/19/96 weekly performed | FABSIX::B_FINN | | Fri Jan 19 1996 19:19 | 59 |
| --------------------------------------------------------------------------------
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 1/19/96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: Brendan/Brad
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 92
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 25
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.8
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 40
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 45
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 15
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 60
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments:
|
| 18.17 | WEEKLY COMPLETED | FABSIX::B_WESTPHAL | | Sat Jan 27 1996 18:20 | 66 |
| ================================================================================
Note 61.1 (CMP.B1) PM CHECKSHEETS 1 of 20
SUBPAC::TOOKER 60 lines 13-JUL-1995 14:57
-< Weekly PM Checksheet Template >-
--------------------------------------------------------------------------------
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 27 JAN 96 SYSTEM RTC CODE:_________ EQUIPTECH:JUBINVILLE/WESTPHAL
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 21
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.1
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 15
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: x
6.1.19 Check tubing/fittings for leaks Completed: x
6.1.20 Check system for pneumatic leaks Completed: x
6.1.21 Check system indicator lamps Completed: x
6.1.22 Check stations/components for contamination Completed: x
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: x
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: *X
Comments:_COMPLETED THE PM WHICH WAS STARTED ON B SHIFT. __* WAS NOT LUBED.____
_______________________________________________________________________________
|
| 18.18 | weekly ww31 | STRATA::RIDLON | Eliminate the obvious | Tue Jan 30 1996 05:24 | 59 |
|
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 1/30/96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: B shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 97
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 94
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 23
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 15
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments:
|
| 18.19 | Monthly PM almost completed, 3 outstanding items left | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Feb 03 1996 04:28 | 28 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Monthly Preventative Maintenance Check Sheet, Rev C
DATE: 1/30,2/3 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: B and D shift
6.2.1 Perform Weekly PM Tasks Completed: B
6.2.2 Change Peristaltic Pump Lines Completed:
6.2.3 Clean Polish area drain tub Completed:
6.2.4 Check Polish Table Belt for defects Completed:
6.2.5 Check the Neslab water level Completed: D
6.2.6 Check the Neslab fittings for leaks Completed: D
6.2.7 Check Scrubber Brushes for contaminates/defects Completed: D
6.2.8 Check the Load Flipper alignment Completed: D
6.2.9 Check the Unload Flipper alignment Completed: D
Comments:____________________________________________________________________
_____________________________________________________________________________
|
| 18.20 | (WW31) Monthly P.M. | ASDG::POIRIER | | Sat Feb 03 1996 17:02 | 29 |
|
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Monthly Preventative Maintenance Check Sheet, Rev C
DATE: 1/30,2/3 SYSTEM RTC CODE: CMP.B1 Shift: B, D & C
6.2.1 Perform Weekly PM Tasks Completed: B
6.2.2 Change Peristaltic Pump Lines Completed: C
6.2.3 Clean Polish area drain tub Completed: C
6.2.4 Check Polish Table Belt for defects Completed: C
6.2.5 Check the Neslab water level Completed: D
6.2.6 Check the Neslab fittings for leaks Completed: D
6.2.7 Check Scrubber Brushes for contaminates/defects Completed: D
6.2.8 Check the Load Flipper alignment Completed: D
6.2.9 Check the Unload Flipper alignment Completed: D
Comments:____________________________________________________________________
_____________________________________________________________________________
|
| 18.21 | WW32 Weekly PM | FABSIX::R_POIRIER | | Tue Feb 06 1996 05:01 | 59 |
|
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE: 2/06/96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: B shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 96
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 94
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 23
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 10
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: X
Comments: Found a small oil puddle under the index table.
|
| 18.22 | WW33 weekly PM | FABSIX::R_POIRIER | | Mon Feb 12 1996 00:47 | 66 |
| --------------------------------------------------------------------------------
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
Work Week 33
DATE: 2-12-96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: B Shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 98 psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 94 psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 21 psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45 psi
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23 psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50 psi
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.2 psi
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30 psi
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20 psi
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60 psi
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60 psi
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 10 psi
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60 psi
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80 psi
6.1.18 Check system for fluid leaks Completed: Done
6.1.19 Check tubing/fittings for leaks Completed: Done
6.1.20 Check system for pneumatic leaks Completed: Done
6.1.21 Check system indicator lamps Completed: Done
6.1.22 Check stations/components for contamination Completed: Done
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: Done
6.1.25 Clean and lubricate the Paddle rails Completed: Done
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: Done
------------------------------------------------------------------------------
Comments: Found a small oil leak under the Index table. Wiped up and will
continue to monitor.
Also, DI Water gauge in cabinet not working. Gauge on outside
of cabinet reading 21 psi.
______________________________________________________________________________
|
| 18.23 | ww34 weekly pm completed | FABSIX::B_FINN | | Mon Feb 19 1996 14:49 | 65 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
Work Week 34
DATE: 2-19-96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: A Shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 98 psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 95 psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20 psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 34 psi
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23 psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50 psi
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.2 psi
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30 psi
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20 psi
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60 psi
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60 psi
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 8 psi
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60 psi
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80 psi
6.1.18 Check system for fluid leaks Completed: Done
6.1.19 Check tubing/fittings for leaks Completed: Done
6.1.20 Check system for pneumatic leaks Completed: Done
6.1.21 Check system indicator lamps Completed: Done
6.1.22 Check stations/components for contamination Completed: Done
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 6 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: Done
6.1.25 Clean and lubricate the Paddle rails Completed: Done
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: Done
------------------------------------------------------------------------------
Comments: Found a small oil leak under the Index table. Wiped up , Tim
has rebuild kit on order.
Also, DI Water gauge in cabinet not working. Gauge on outside
of cabinet reading 21 psi.
Only cleaned Conditioner Gimbal ASS.
|
| 18.24 | WW35 Quarterly PM | FABSIX::R_POIRIER | | Mon Feb 26 1996 06:44 | 110 |
|
_____________________________________________________________________________
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Quarterly Preventative Maintenance Check Sheet, Rev C
DATE:_2/26/96___ SYSTEM RTC CODE:_CMP.B1_ EQUIP. TECH:_B Shift____
6.3.1 Perform the Weekly + Monthly PM Tasks Completed: Done
6.3.2 Check the 24 Volt power supply Pre-adjust: 23.79
6.3.3 Check the 15 Volt power supply Pre-adjust: 14.79
6.3.4 Check the 5 Volt power supply Pre-adjust: 4.79
6.3.5 Check Table Rotation Speed Completed: Done
6.3.6 Check Vacuum Pump Diaphrams Completed: Done
6.3.7 Check Vacuum Tank/Pump lines Completed: Done
6.3.8 Check Load Cup alignment Completed: Done
Comments:__Load cup alignments were off and had to be calibrated.
Weekly and Monthly PM checksheets follow below.
--------------------------------------------------------------------------------
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE:_2/26/96___ SYSTEM RTC CODE:_CMP.B1_ EQUIP. TECH:_B Shift____
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 96
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 96
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 44
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.2
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 49
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 12
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: Done
6.1.19 Check tubing/fittings for leaks Completed: Done
6.1.20 Check system for pneumatic leaks Completed: Done
6.1.21 Check system indicator lamps Completed: Done
6.1.22 Check stations/components for contamination Completed: Done
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: Done
6.1.25 Clean and lubricate the Paddle rails Completed: Done
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: Done
Comments:____Found a small puddle of oil under index table motor.
--------------------------------------------------------------------------------
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Monthly Preventative Maintenance Check Sheet, Rev C
6.2.1 Perform Weekly PM Tasks Completed: Done
6.2.2 Change Peristaltic Pump Lines Completed: N/A
6.2.3 Clean Polish area drain tub Completed: Done
6.2.4 Check Polish Table Belt for defects Completed: Done
6.2.5 Check the Neslab water level Completed: Done
6.2.6 Check the Neslab fittings for leaks Completed: Done
6.2.7 Check Scrubber Brushes for contaminates/defects Completed: Done
6.2.8 Check the Load Flipper alignment Completed: Done
6.2.9 Check the Unload Flipper alignment Completed: Done
Comments:____________________________________________________________________
|
| 18.25 | Weekly PM completed for WW36 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Tue Mar 05 1996 22:59 | 63 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
Work Week 34
DATE: 3-5-96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: D Shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 98 psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 95 psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20 psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45 psi
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23 psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60 psi
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.2 psi
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30 psi
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20 psi
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 58 psi
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60 psi
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 10 psi
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 64 psi
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80 psi
6.1.18 Check system for fluid leaks Completed: Done
6.1.19 Check tubing/fittings for leaks Completed: Done
6.1.20 Check system for pneumatic leaks Completed: Done
6.1.21 Check system indicator lamps Completed: Done
6.1.22 Check stations/components for contamination Completed: Done
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: Done
6.1.25 Clean and lubricate the Paddle rails Completed: Done
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
DI Water gauge in cabinet not working. Gauge on outside
of cabinet reading 20 psi. I will be removing the gauge
gaurd in the tool.
|
| 18.26 | WW37 Weekly PM | FABSIX::R_POIRIER | | Wed Mar 13 1996 01:08 | 63 |
| --------------------------------------------------------------------------------
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
Work Week 37
DATE: 3-13-96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: B Shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 98 psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 95 psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25 psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 48 psi
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23 psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60 psi
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.2 psi
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30 psi
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20 psi
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60 psi
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 56 psi
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 12 psi
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65 psi
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80 psi
6.1.18 Check system for fluid leaks Completed: Done
6.1.19 Check tubing/fittings for leaks Completed: Done
6.1.20 Check system for pneumatic leaks Completed: Done
6.1.21 Check system indicator lamps Completed: Done
6.1.22 Check stations/components for contamination Completed: Done
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: Done
6.1.25 Clean and lubricate the Paddle rails Completed: Done
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
Note: Found and cleaned oil leak under index table.
|
| 18.27 | Weekly PM for WW38 completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Mar 20 1996 03:20 | 64 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
Work Week 37
DATE: 3-20-96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 95 psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 95 psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 15 psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 48 psi
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 26 psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60 psi
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.2 psi
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30 psi
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20 psi
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60 psi
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60 psi
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 10 psi
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65 psi
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80 psi
6.1.18 Check system for fluid leaks Completed: Done
6.1.19 Check tubing/fittings for leaks Completed: Done
6.1.20 Check system for pneumatic leaks Completed: Done
6.1.21 Check system indicator lamps Completed: Done
6.1.22 Check stations/components for contamination Completed: Done
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 4.1 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: Done
6.1.25 Clean and lubricate the Paddle rails Completed: Done
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
Note: Found and cleaned oil leak under index table
Incoming DI won't get over 15 psi
|
| 18.28 | Weekly PM started... some items outstanding | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Mon Mar 25 1996 11:00 | 64 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
Work Week 37
DATE: 3-25-96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: A shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 95 psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 90 psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20 psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 44 psi
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23 psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60 psi
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.2 psi
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30 psi
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 18 psi
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60 psi
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 58 psi
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 10 psi
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 64 psi
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80 psi
6.1.18 Check system for fluid leaks Completed: no
6.1.19 Check tubing/fittings for leaks Completed: no
6.1.20 Check system for pneumatic leaks Completed: no
6.1.21 Check system indicator lamps Completed: Done
6.1.22 Check stations/components for contamination Completed: no
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 6 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: no
6.1.25 Clean and lubricate the Paddle rails Completed: no
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: N/A
Note:
|
| 18.29 | Monthly completed | SUBPAC::LANDRY | | Tue Apr 02 1996 14:22 | 31 |
|
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Monthly Preventative Maintenance Check Sheet, Rev C
DATE: 4-2-96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: A Shift
6.2.1 Perform Weekly PM Tasks Completed: TL
6.2.2 Change Peristaltic Pump Lines Completed: TL
6.2.3 Clean Polish area drain tub Completed: TL
6.2.4 Check Polish Table Belt for defects Completed: TL
6.2.5 Check the Neslab water level Completed: TL
6.2.6 Check the Neslab fittings for leaks Completed: TL
6.2.7 Check Scrubber Brushes for contaminates/defects Completed: TL
6.2.8 Check the Load Flipper alignment Completed: TL
6.2.9 Check the Unload Flipper alignment Completed: TL
Comments: Found the polish tables bottom drain ring was clogged. Removed
and cleaned the flex tubing under polish table. snaked all the
remaining hard_plumbed tubing as best as possible. Most (if not
all) of the restrictions have been eliminated.
Gear box oil (~10 CC's) was found. Reps to address this problem.
|
| 18.30 | Weekly PM for WW41 completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Apr 10 1996 22:41 | 66 |
| SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
Work Week 37
DATE: 3-10-96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 90 psi
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85 psi
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25 psi
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45 psi
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 23 psi
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 psi
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 psi
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60 psi
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.2 psi
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30 psi
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20 psi
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60 psi
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60 psi
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 10 psi
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 psi
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 62 psi
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80 psi
6.1.18 Check system for fluid leaks Completed: Done
6.1.19 Check tubing/fittings for leaks Completed: Done
6.1.20 Check system for pneumatic leaks Completed: Done
6.1.21 Check system indicator lamps Completed: Done
6.1.22 Check stations/components for contamination Completed: Done
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 5 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: Done
6.1.25 Clean and lubricate the Paddle rails Completed: Done
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: Done
Note: Found DI leak under inside bottom of tool on the right side.
Source unknown at this time, my head is too big. A bucket
was placed under the drip for now.
|
| 18.31 | Weekly PM for WW42 completed | FABSIX::L_SHKOLNIKOV | | Wed Apr 17 1996 08:14 | 81 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 4-17-96 SYSTEM RTC CODE: CMP.B1 EQUIP. TECH: BJ/LS
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 90
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 10
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 64
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: DONE
6.1.20 Check tubing/fittings for fluid leaks Completed: DONE
6.1.21 Check tubing/fittings for pneumatic leaks Completed: DONE
6.1.22 Check stations/components for contamination Completed: DONE
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3
6.1.24 Clean and lubricate the Scrubber rails Completed: DONE
6.1.25 Clean and lubricate the Paddle rails Completed: DONE
6.1.26 Clean Conditioning Wheel and Housing Completed: DONE
6.1.27 Scrub clean the Polish area tub and walls Completed: DONE
6.1.28 Remove all Load and Unload cups and scrub clean Completed: DONE
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: DONE
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DONE
6.1.31 Remove and clean the Vacuum system Check Valve Completed: DONE
6.1.32 Check Carrier clean brushes for defects, rotate Completed: DONE
6.1.33 Wipe the MHTA and covers with Isopropyl Completed DONE
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: DONE
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: DONE
Comments:
____________________________________________________________
|
| 18.32 | WW 43 PM completed - Weekly | SUBPAC::LANDRY | | Wed Apr 24 1996 17:52 | 80 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 4-24-96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: A Shift/Swenson
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 96
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 32
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 10
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 7
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Found small amount of gear box oil underneath the Index Table
gear box.
|
| 18.33 | Monthly PM completed for WW44 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed May 01 1996 08:04 | 143 |
|
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
DATE: 5/1/96 TOOL: CMP.B1 TECH/SHIFT: A, B and D
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj: 390 Post-adj: 377
Head 2 Pre-Adj: 400 Post-adj: 377
Head 3 Pre-Adj: 390 Post-adj: 378
Head 4 Pre-Adj: 353 Post-adj: 377
Head 5 Pre-Adj: 389 Post-adj: 376
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj: 79.1@100% 50@67%
Actual Down Force Post-Adj:
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: X
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: X
6.2.13 Check the +5 Volt power supply Pre-Adjust: X
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: X
6.2.15 Check Vacuum Pump Diaphrams Completed: X
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments:
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 96
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 32
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 10
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 7
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 18.34 | Weekly PM Checksheet - WW45 | ASDG::POIRIER | | Sat May 11 1996 18:10 | 79 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/8/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: BJ
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 95
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 10
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 64
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: x
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: x
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: x
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: x
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: x
6.1.33 Wipe the MHTA and covers with Isopropyl Completed x
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: x
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 18.35 | Weekly PM completed for WW46 | FABSIX::L_SHKOLNIKOV | | Sat May 18 1996 06:24 | 79 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/18/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: D - shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 90
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 22
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 10
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 64
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 65
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3.0
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 18.36 | WW47 weekly pm | FABSIX::L_SHKOLNIKOV | | Fri May 24 1996 23:40 | 82 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/24/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: D - shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 95
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 30
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 10
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 64
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3.0
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Oil spot about 5-6 in diameter was detected on very bottom of tool
under the index table motor. Everything wiped out. Will check for oil
leaks on the next week.
|
| 18.37 | SHUTDOWN CHECKSHEET | STRATA::RIDLON | Eliminate the obvious | Mon May 27 1996 07:36 | 25 |
|
CMP.B SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) SCRUB SIDES OF CARRIERS ___B__/5/27__
2) RUN CARRIER BLOW OFF FOR 30 SECONDS ___B__/______
3) REMOVE ALL CARRIERS ___B__/______
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK ___B__/______
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. ___B__/______
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY ___B__/______
7) REMOVE CONDITIONER AND CLEAN ___B__/______
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. ___B__/______
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) ___B__/______
10) DRAIN ELEVATOR AND CONDITIONER TUBE ___B__/______
11) REMOVE PADS, AND CLEAN AND DRY TABLES ___B__/______
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI ___B__/______
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER ___B__/______
14) POWER DOWN SYSTEM.
|
| 18.38 | Startup Checksheet | SUBPAC::LANDRY | | Tue May 28 1996 20:00 | 19 |
|
CMP.B START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. A shift 5/28
2) POWER ON SYSTEM. A shift 5/28
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES A shift 5/28
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY A shift 5/28
5) DRY TABLES, INSTALL PADS A shift 5/28
6) INSTALL SCRUBBER BRUSHES A shift 5/28
7) INSTALL CONDITIONER A shift 5/28
8) INSTALL CARRIERS A shift 5/28
9) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) A shift 5/28
10) IF SLURRY SYSTEM WAS SHUT DOWN, CONTACT ASHLAND CHEMICAL,
REQUEST DI TO BE PURGE FROM SLURRY SYSTEM AND CHARGED WITH
SLURRY AND REQUEST A NEW SLURRY FILTER BE INSTALLED. N/A
11) CALIBRATE SLURRY FLOW A shift 5/28
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC A shift 5/28
|
| 18.39 | B1 Monthly completed for WW48 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed May 29 1996 07:24 | 144 |
|
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
DATE: 5/29/96 ENTITY: CMP.B1 TECH/SHIFT: D shift
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj: 388 Post-adj: 377
Head 2 Pre-Adj: 370 Post-adj: 376
Head 3 Pre-Adj: 385 Post-adj: 377
Head 4 Pre-Adj: 375 Post-adj: 377
Head 5 Pre-Adj: 407 Post-adj: 377
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj: 57 @ 67%
Actual Down Force Post-Adj: N/A
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: +24.00
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: +15.3/-15.1
6.2.13 Check the +5 Volt power supply Pre-Adjust: +4.96
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: x
6.2.15 Check Vacuum Pump Diaphrams Completed: X
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed:
6.2.20 Check Muffin Fans for proper operation Completed: X
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/29/96 ENTITY: CMP.B1 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 90
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 86
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 30
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.0
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 10
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 62
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3.0
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 18.40 | ww49 weekly pm completed | FABSIX::L_SHKOLNIKOV | | Fri Jun 07 1996 00:00 | 82 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/06/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: D - shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 94
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 88
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 22
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 10
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3.0
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: During the PM this night I noticed that index table gearbox
still leaking. The leak appears to be in couple places.
|
| 18.41 | ww50 weekly pm | FABSIX::L_SHKOLNIKOV | | Thu Jun 13 1996 00:29 | 81 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/12/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: D - shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 96
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 23
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 58
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 10
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3.8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 18.42 | WW 51 - Weekly version | SUBPAC::LANDRY | | Mon Jun 17 1996 12:53 | 88 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/17/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: A shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 95
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 23
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 58
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.0
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 10
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: x
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 6.5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: x
6.1.33 Wipe the MHTA and covers with Isopropyl Completed x
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: x
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: 1) Repaired chilled water leaks fluid cabinet, retaped the elbow
fitting on both the on and off valves.
2) Found residual oil under Index Table motor gear box
3) Found small fragment in unload cup # 3. Had to rub agressively
with wipe to remove from cup.
4) Found a small amount of water in the main drip pan around the
vacuum tank area. Cleaned up, unable to identify the source
of the leak.
|
| 18.43 | ww52 weekly pm | FABSIX::L_SHKOLNIKOV | | Wed Jun 26 1996 06:02 | 81 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/25/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 95
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.0
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 10
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 4
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Found couple oil spots under Index Table motor gear box
and small amount of water in the main drip pan around the
vacuum tank area. Will try to identify the source of the leak.
|
| 18.44 | B1 weekly PM completed for WW1 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 04 1996 03:24 | 79 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/3/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 94
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 86
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 40
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.8
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 15
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.2
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Found couple oil spots under Index Table motor gear box
|
| 18.45 | B1 SHUT-DOWN COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 04 1996 03:27 | 26 |
|
CMP.B1 SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
SHIFT / DATE
1) SCRUB SIDES OF CARRIERS D 7/3/96
2) RUN CARRIER BLOW OFF FOR 30 SECONDS D 7/3/96
3) REMOVE ALL CARRIERS D 7/3/96
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK D 7/3/96
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. D 7/3/96
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY D 7/3/96
7) REMOVE CONDITIONER AND CLEAN D 7/3/96
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. D 7/3/96
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) D 7/3/96
10) DRAIN ELEVATOR AND CONDITIONER TUBE D 7/3/96
11) REMOVE PADS, AND CLEAN AND DRY TABLES D 7/3/96
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI D 7/3/96
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER D 7/3/96
14) POWER DOWN SYSTEM. D 7/3/96
|
| 18.46 | B1 STARTUP COMPLETED | FABSIX::L_SHKOLNIKOV | | Sat Jul 06 1996 04:32 | 21 |
|
CMP.B1 START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. __LS__/7-6-96
2) POWER ON SYSTEM. __LS__/7-6-96
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES __LS__/7-6-96
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY __LS__/7-6-96
5) DRY TABLES, INSTALL PADS __LS__/7-6-96
6) INSTALL SCRUBBER BRUSHES __LS__/7-6-96
7) INSTALL CONDITIONER __LS__/7-6-96
8) INSTALL CARRIERS __LS__/7-6-96
9) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) __LS__/7-6-96
10) IF SLURRY SYSTEM WAS SHUT DOWN, CONTACT ASHLAND CHEMICAL,
REQUEST DI TO BE PURGE FROM SLURRY SYSTEM AND CHARGED WITH
SLURRY AND REQUEST A NEW SLURRY FILTER BE INSTALLED. __LS__/7-6-96
11) CALIBRATE SLURRY FLOW __LS__/7-6-96
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC __LS__/7-6-96
|
| 18.47 | SEMI-ANNUAL PM FOR WW2 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Sat Jul 13 1996 00:30 | 173 |
|
Speedfam Corp. CMP-V Planarizer
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE: 7/12/96 ENTITY: CMP.B1 TECH/SHIFT: C + D
6.4.1 Check all interlocks for functionality Completed: X
6.4.2 Check all EMO's for functionality Completed: X
6.4.3 Lubricate the Rotary Union Completed: X
6.4.4 Lubricate the Lead Screw Completed: X
6.4.5 Lubricate the Linear Guide Rails Completed: X
6.4.6 Lubricate the Idler Pulley Completed: X
Comments:
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj:407.0_ Post-adj:375.6
Head 2 Pre-Adj:424.6_ Post-adj:375.6_
Head 3 Pre-Adj:386.0_ Post-adj:377.9_
Head 4 Pre-Adj:410.0_ Post-adj:375.9_
Head 5 Pre-Adj:379.4_ Post-adj:379.4_
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj:__66.8____________
Actual Down Force Post-Adj:_77.1___________
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 24.1
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust:+15/-15.2
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.99
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 29.9
6.2.15 Check Vacuum Pump Diaphrams Completed: X
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments:
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 88
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 59
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 55
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: X
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X *
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
* Brush was alittle worn but not bad enough to replace, just turned it 15
degrees.
|
| 18.48 | WEEKLY PM COMPLETED FOR WW3 | FABSIX::L_SHKOLNIKOV | | Wed Jul 17 1996 22:51 | 79 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/17/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 88
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.4
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 22
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3.8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Found couple oil spots under Index Table motor gear box
|
| 18.49 | ww4 weekly pm completed. | FABSIX::L_SHKOLNIKOV | | Wed Jul 24 1996 08:28 | 79 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/24/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 86
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.0
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 22
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3.0
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Found couple oil spots under Index Table motor gear box
|
| 18.50 | CMP.B1 Monthly P.M. Checksheet for WW5. | ASDG::POIRIER | | Fri Aug 02 1996 20:10 | 146 |
|
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
DATE: 8/2/96 ENTITY: CMP.B1 TECH/SHIFT: C shift
6.2.1 Change Peristaltic Pump Lines Completed: x
6.2.2 Clean Polish area tub drains Completed: x
6.2.3 Check Polish Table Belt for defects Completed: x
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj: 382.5 Post-adj: 377.2
Head 2 Pre-Adj: 381.6 Post-adj: 378.0
Head 3 Pre-Adj: 376.5 Post-adj: No Adj Necessary
Head 4 Pre-Adj: 376.7 Post-adj: " "
Head 5 Pre-Adj: 390.0 Post-adj: 376.2
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj: 87.6 lbs.
Actual Down Force Post-Adj: 76.9 lbs.
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.7 vdc
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: 15.10 vdc
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.98 vdc
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: X 29.9 rpm
6.2.15 Check Vacuum Pump Diaphrams Completed: N/A
6.2.16 Check Vacuum Tank/Pump Lines COmpleted: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/2/96 ENTITY: CMP.B1 TECH/SHIFT: C shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 58
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.8
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: x *
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: x
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 3.0
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: x
6.1.26 Clean Conditioning Wheel and Housing Completed: x
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: x
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: x
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: x
6.1.33 Wipe the MHTA and covers with Isopropyl Completed x
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: x
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: x
Comments: * The Index motor was leaking oil. Found a puddle that was about 5"
diameter.
|
| 18.51 | WW06 Weekly PM | FABSIX::R_POIRIER | | Mon Aug 05 1996 04:13 | 80 |
| --------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/5/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: B shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 86
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 21
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 58
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 17
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 68
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: x
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 9
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Found one oil spot under Index Table motor gear box
|
| 18.52 | B1 weekly PM completed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Aug 16 1996 01:29 | 82 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/15/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: BJ,LS,DW
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 52
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 20
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 70
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: A large puddle of either DI or city water was found in the
drip pan under index table and on the floor under the tool.
We need a 2 year old to slide under the table to find the
source as I am too fat and Leon is blind.
|
| 18.54 | ww08 weekly completed | FABSIX::L_SHKOLNIKOV | | Wed Aug 21 1996 02:09 | 81 |
| --------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/21/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 88
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 52
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 55
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 8x
6.1.19 Check Drip Pan for moisture/contamination Completed: x
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: x
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: x
6.1.26 Clean Conditioning Wheel and Housing Completed: x
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: x
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: x
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: x
6.1.33 Wipe the MHTA and covers with Isopropyl Completed x
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: x
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: x
Comments: Found one oil spot under Index Table motor gear box
about 5".
|
| 18.55 | ww09 weekly pm completed. | FABSIX::L_SHKOLNIKOV | | Thu Aug 29 1996 01:37 | 81 |
| --------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/28/96 SYSTEM RTC CODE: CMP.B1 EQUIP TECH: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 88
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 32
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 55
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 18
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Found one oil spot under Index Table motor gear box
about 3".
|
| 18.56 | CPM.B1 SHUTDOWN CHECKSHEET | FABSIX::R_POIRIER | | Mon Sep 02 1996 02:50 | 30 |
|
CMP.B1 SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
SHIFT / DATE
1) SCRUB SIDES OF CARRIERS B 9-1-96
2) RUN CARRIER BLOW OFF FOR 30 SECONDS B 9-1-96
3) REMOVE ALL CARRIERS B 9-1-96
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK B 9-1-96
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. B 9-1-96
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY B 9-1-96
7) REMOVE CONDITIONER AND CLEAN B 9-1-96
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. B 9-1-96
9) JUMPER DI PRESSURES SWITCHES B 9-1-96
10) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) B 9-1-96
11) DRAIN ELEVATOR AND CONDITIONER TUBE B 9-1-96
12) REMOVE PADS, AND CLEAN AND DRY TABLES B 9-1-96
13) REMOVE SCRUBBER BRUSHES AND SOAK IN DI B 9-1-96
14) DRY ENTIRE SYSTEM OF ANY STANDING WATER B 9-1-96
15) TURN OFF CHILLER B 9-1-96
** DO NOT TURN POWER OFF TO POLISHER **
** THE MAIN PCW VALES ARE TO BE SHUT IN THE PIPE GALLERY **
|
| 18.57 | WW10 Monthly P.M. Check Sheet | ASDG::POIRIER | | Fri Sep 06 1996 20:12 | 146 |
|
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj: 395.1 Post-adj: 378.0
Head 2 Pre-Adj: 378.1 Post-adj: n/a
Head 3 Pre-Adj: 376.6 Post-adj: n/a
Head 4 Pre-Adj: 377.9 Post-adj: n/a
Head 5 Pre-Adj: 409.0 Post-adj: 375.7
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj: 94.2
Actual Down Force Post-Adj: 77.1
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.73
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: 15.79
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.97
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 29.9 RPM
6.2.15 Check Vacuum Pump Diaphrams Completed: N/A
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments:
--------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 87
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 22
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 55
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 15
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 48
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 70
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 9 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 18.58 | WW XI - Weekly | SUBPAC::LANDRY | | Tue Sep 10 1996 20:30 | 79 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/10/96 TOOL: CMP.B1 TECH/SHIFT: A shifts
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 88
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 100
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.0
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 18.59 | CMP.B1 WEEKLY COMPLETED | STRATA::WESTPHAL | | Wed Sep 18 1996 19:47 | 65 |
| (CMP.B1)
================================================================================
Note 61.1 (CMP.B1) PM CHECKSHEETS 1 of 20
SUBPAC::TOOKER 60 lines 13-JUL-1995 14:57
-< Weekly PM Checksheet Template >-
--------------------------------------------------------------------------------
SpeedFam CMP-V Planarizer Maintenance Procedures HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev C
DATE:18 SEPT 96 SYSTEM RTC CODE:_CMP.B1__ EQUIP. TECH:_BRAD/JIM S.______
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure for 23 PSI Pre-adjust: 22
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 4.2 PSI Pre-adjust: 4.0
6.1.10 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.11 Check Transport Paddle U/D pressure for 45 PSI Pre-adjust: 20
6.1.12 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.13 Check Open Unload Flipper pressure for 45 PSI Pre-adjust: 60
6.1.14 Check Vacuum Tank Blowout pressure for <"<">10 PSI Pre-adjust: 18
6.1.15 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.16 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 70
6.1.17 Check MHTA pressure for 60 PSI Pre-adjust: 80
6.1.18 Check system for fluid leaks Completed: X
6.1.19 Check tubing/fittings for leaks Completed: X
6.1.20 Check system for pneumatic leaks Completed: X
6.1.21 Check system indicator lamps Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <"<">10 PSI Pre-adjust: 9
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean and lubricate the Conditioner Gimbal Ass. Completed: NA
Comments:_____________________________________________________________________
|
| 18.60 | WW13 WEEKLY PM CHECKSHEET | ASDG::POIRIER | | Fri Sep 27 1996 20:21 | 87 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Shift: C Tech/s: JP
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 100
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 22
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 60
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 18
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 30
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 15
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
REPLACED THE SPRINGS ON THE (LEFT SIDE/MIDDLE) MULTIHEAD
LEAD SCREW COVER.
|
| 18.61 | WW14 Monthly PM | FABSIX::R_POIRIER | | Sun Sep 29 1996 07:41 | 152 |
| --------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj: 381.7 Post-adj: 377
Head 2 Pre-Adj: 367.0 Post-adj: 377
Head 3 Pre-Adj: 367.7 Post-adj: 377
Head 4 Pre-Adj: 365.0 Post-adj: 377
Head 5 Pre-Adj: 381.5 Post-adj: 377
NOTE: On head 5 the initial actual df on the screen didn't equal the
the sensotec reading. All other heads were the same on sensotec
and screen. Head 5 was reading 402 actual.
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj: 84.0
Actual Down Force Post-Adj: na
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.73
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: +15.7
-15.1
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.98
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 29.9 RPM
6.2.15 Check Vacuum Pump Diaphrams Completed: N/A
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments:
--------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 15
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 48
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 7 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
|
| 18.62 | ww15 weekly PM. | FABSIX::L_SHKOLNIKOV | | Fri Oct 11 1996 06:16 | 85 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/11/96 TOOL: CMP.B1 TECH/SHIFT: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 14
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
( water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A*
* there is no slurry
tube on this tool
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments: BJ - found small leak in the fluids cabinet under DI in valve.
Found small paddle of oil under the index table.
|
| 18.63 | ww16 weekly pm. | LUDWIG::RIDLON | Eliminate the oblivious | Tue Oct 15 1996 02:25 | 90 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 88
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 18
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 55
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 15
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 68
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: B-shift
6.1.20 Check tubing/fittings for fluid leaks Completed: B-shift
NOTE: DI return manual shutoff valve leaking.
6.1.21 Check tubing/fittings for pneumatic leaks Completed: B-shift
6.1.22 Check stations/components for contamination Completed: B-shift
6.1.23 Ch eck incoming Chilled Water pressure <10 PSI Pre-adjust: 10psi
6.1.24 Clean and lubricate the Scrubber rails Completed: B-shift
6.1.25 Clean and lubricate the Paddle rails Completed: B-shift
6.1.26 Clean Conditioning Wheel and Housing Completed: B-shift
6.1.27 Scrub clean the Polish area tub and walls Completed: B-shift
6.1.28 Remove all Load and Unload cups and scrub clean Completed: B-shift
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: B-shift
6.1.30 Check slurry pump hoses and connectors for leaks Completed: B-shift
6.1.31 Remove and clean the Vacuum system Check Valve Completed: NA
It has been removed.
6.1.32 Check Carrier clean brushes for defects, rotate Completed: B-shift
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: B-shift
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: B-shift
6.1.35 Clean the slurry delivery tube Completed: NA
Not applicable to this tool.
6.1.36 Check chiller fluid resevoir for proper level Completed: B-shift
Comments: Changed vacuum filter.
____________________________________________________________
|
| 18.64 | WEEKLY PM FOR WW17 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Fri Oct 25 1996 22:27 | 90 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80 Brian J.
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 50 Brian J.
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20 Brian J.
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 Brian J.
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23 Brian J.
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 Brian J
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 Brian J
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50 Brian J
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 3.2 Brian J.
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 17 Brian J.
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30 Brian J.
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20 Brian J.
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 Brian J.
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 Brian J.
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 17 Brian J.
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 Brian J.
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60 Brian J.
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 Brian J.
6.1.19 Check Drip Pan for moisture/contamination Completed: JS
6.1.20 Check tubing/fittings for fluid leaks Completed: Brian J.
6.1.21 Check tubing/fittings for pneumatic leaks Completed: Brian J.
6.1.22 Check stations/components for contamination Completed: JS
6.1.23 Check incoming Chilled Water pressure <10 PSI 10psi Brian J.
6.1.24 Clean and lubricate the Scrubber rails Completed: JS
6.1.25 Clean and lubricate the Paddle rails Completed: Brian J.
6.1.26 Clean Conditioning Wheel and Housing Completed: Brendan f.
6.1.27 Scrub clean the Polish area tub and walls Completed: BF,JP,JS
6.1.28 Remove all Load and Unload cups and scrub clean Completed: JP,BW
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: JS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: Brian J.
6.1.31 Remove and clean the Vacuum system Check Valve Completed: NA
It has been removed.
6.1.32 Check Carrier clean brushes for defects, rotate Completed: Brian J.
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: JS,JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: JS,JP
6.1.35 Clean the slurry delivery tube Completed: NA
Not applicable to this tool.
6.1.36 Check chiller fluid resevoir for proper level Completed: Brian J.
Comments:6.1.19 Found oil under index table.
JS = John Swenson
JP = John Poirier
BF = brendan Finn
BW = Bradley Westphal
Brian J. = Brian Jubinville
|
| 18.65 | WW18 Monthly PM complete | FABSIX::O_WHITFORD | Quticherwhinin' | Fri Nov 01 1996 21:26 | 165 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
BJ = Brian Jubinville
LS = Leon Shkolnikov
TL = Tim Landry
BG = Bob Gee
JS = John Swenson
BW = Brad Wesphal
JP = John Poirier
DW = Dave Whitford
6.2.1 Change Peristaltic Pump Lines Completed: JS
6.2.2 Clean Polish area tub drains Completed: BJ
6.2.3 Check Polish Table Belt for defects Completed: JS
6.2.4 Perform Down Force Calibration on all 5 heads Completed: JS/JP
Down Frc: Head 1 Pre-Adj: 376.8 Post-adj: 376.8
Head 2 Pre-Adj: 377.1 Post-adj: 377.1
Head 3 Pre-Adj: 377.8 Post-adj: 377.8
Head 4 Pre-Adj: 374.2 Post-adj: 377.1
Head 5 Pre-Adj: 373.6 Post-adj: 376.8
6.2.5 Perform Down Force Calibration on Conditioner Completed: LS
Actual Down Force Pre-Adj: 73lbs @ 67%
Actual Down Force Post-Adj: 77lbs @ 67%
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: BJ *
6.2.7 Check the Load Flipper alignment Completed: BJ
6.2.8 Check the Unload Flipper alignment Completed: BJ
6.2.9 Check the Elevator alignment Completed: BJ
6.2.10 Check wafer unload, from Index table to cassette Completed: BJ
6.2.11 Check the +24 Volt power supply Pre-Adjust:23.97 BJ/LS
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust:15.01 BJ/LS
6.2.13 Check the +5 Volt power supply Pre-Adjust: 5.02 BJ/LS
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 30 LS/DW
6.2.15 Check Vacuum Pump Diaphrams Completed: n/a
6.2.16 Check Vacuum Tank/Pump lines Completed: JS
6.2.17 Check Load Cup Position alignment Completed: JS/BW
6.2.18 Check Load Cup Height alignment Completed: DW/LS
6.2.19 Check Robot alignments Completed: BJ/LS
6.2.20 Check Muffin Fans for proper operation Completed: BJ/LS
Comments: *-Asked Kevin if he could get us one last week. I will
speak to him to see if one is available soon.
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85/BJ
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85/BJ
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 17/BJ
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45/BJ
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23/BJ
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35/BJ
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30/BJ
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50/BJ
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2/BJ
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 16/BJ
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30/BJ
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20/BJ
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50/BJ
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50/BJ
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 17/BJ
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 85/BJ
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60/BJ
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80/BJ
6.1.19 Check Drip Pan for moisture/contamination Completed: BJ/LS
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: BJ/LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10psi/BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Clean Conditioning Wheel and Housing Completed: LS
6.1.27 Scrub clean the Polish area tub and walls Completed: LS/BJ
6.1.28 Remove all Load and Unload cups and scrub clean Completed: JS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BJ/LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: JS
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A *
(Tool no longer uses a check valve)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: BJ *
6.1.33 Wipe the MHTA and covers with Isopropyl Completed JS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: JS
6.1.35 Clean the slurry delivery tube Completed: N/A
(Tool doesn't use delivery tube)
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments: *-Asked Kevin if he could get us one last week. I will
speak to him to see if one is available soon.
Found sensor for load cup Five busted, rumaged through stockroom
and could not locate a duplicate, repaired original. Will need to
monitor for any water leaks.
|
| 18.66 | ww19 weekly pm. | FABSIX::L_SHKOLNIKOV | | Thu Nov 07 1996 06:30 | 84 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/07/96 TOOL: CMP.B1 TECH/SHIFT: Leon
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 15
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 65
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X*
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
( water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A*
* there is no slurry
tube on this tool
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: *Oil leak from index table gearbox.
|
| 18.67 | WW XX - Weekly completed | SUBPAC::LANDRY | | Sun Nov 10 1996 16:50 | 82 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/10/96 TOOL: CMP.B1 TECH/SHIFT: Finn / Landry
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 15
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 17
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 62
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
( water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: 6.1.35 The system has been modified, with this feature removed
|
| 18.68 | ww21 weekly pm. | FABSIX::M_RIDLON | Eliminate the oblivious | Wed Nov 20 1996 00:17 | 88 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/20/96 TOOL: CMP.B1 TECH/SHIFT: R.Poirier, Ridlon
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 15
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 17
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 62
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
( water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: 6.1.35 The system has been modified, with this feature removed
I/O CABLE #1 BULKHEAD PLUG (RIGHT SIDE BULKHEAD MOUNT) IS BROKEN. OBVIOUSLY
THE TOOL IS STILL FUNCTIONAL BUT THIS SHOULD PROBABLY BE CHANGED IN THE NEAR
FUTURE.
|
| 18.69 | WW22 MONTHLY PM COMPLETE. | FABSIX::L_SHKOLNIKOV | | Wed Nov 27 1996 23:36 | 179 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
Shift: C+D Work Week: 22 Tech/s: John Poirier = JP
John Swenson = JS
Dave Whitford- DW
Leon Shkolnikov-LS
SEE COMMNETS = *
6.2.1 Change Peristaltic Pump Lines Completed: DW
6.2.2 Clean Polish area tub drains Completed: LS,DW
6.2.3 Check Polish Table Belt for defects Completed: X JS
6.2.4 Perform Down Force Calibration on all 5 heads Completed: LS,DW
Down Frc: Head 1 Pre-Adj: 383 Post-adj: 377 lb
Head 2 Pre-Adj: 382 Post-adj: 377 lb
Head 3 Pre-Adj: 375 Post-adj: 377 lb
Head 4 Pre-Adj: 379 Post-adj: 377 lb
Head 5 Pre-Adj: 379 Post-adj: 377 lb
6.2.5 Perform Down Force Calibration on Conditioner Completed: LS,DW
Actual Down Force Pre-Adj: 79.5 lb
Actual Down Force Post-Adj: 77.0 lb
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X JP
6.2.7 Check the Load Flipper alignment Completed: LS
6.2.8 Check the Unload Flipper alignment Completed: LS
6.2.9 Check the Elevator alignment Completed: LS
6.2.10 Check wafer unload, from Index table to cassette Completed: LS
6.2.11 Check the +24 Volt power supply Pre-Adjust: X 23.79 JP
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: X 15.78 JP
6.2.13 Check the +5 Volt power supply Pre-Adjust: X 4.97 JP
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: X 29.9 JP
6.2.15 Check Vacuum Pump Diaphrams Completed: N/A JP *
6.2.16 Check Vacuum Tank/Pump lines Completed: X JS *
6.2.17 Check Load Cup Position alignment Completed: X JS
6.2.18 Check Load Cup Height alignment Completed: X JS
6.2.19 Check Robot alignments Completed: LS
6.2.20 Check Muffin Fans for proper operation Completed: X JS
Comments:
6.2.15 The Vacuum Pump diaphrams are no longer cleaned due to the addition
of the filter trap that was installed at the pump inlet.
6.2.16 The main vacuum line (thin walled black tubing) leading from the
bulkhead fitting to the pump, is partially collapsed due to a
tight bend radius.
--------------------------------------------------------------------------------
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Shift: C Work Week: 22 Tech/s: John Poirier = JP
John Swenson = JS
(Speedfam) Dave Rocha = DR
SEE COMMENTS = *
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80 JS
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82 JS
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24 JS
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 44 JS
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23 JS
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 JS
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 JS
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 52 JS
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4 JS
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 15 JS
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30 JS
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20 JS
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 JS
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50 JS
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 15 JS
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80 JS
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 63 JS
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 JS
6.1.19 Check Drip Pan for moisture/contamination Completed: X JS
6.1.20 Check tubing/fittings for fluid leaks Completed: X JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X JP
6.1.22 Check stations/components for contamination Completed: X JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 6 JP
6.1.24 Clean and lubricate the Scrubber rails Completed: X JP
6.1.25 Clean and lubricate the Paddle rails Completed: X JP
6.1.26 Clean Conditioning Wheel and Housing Completed: X JS
6.1.27 Scrub clean the Polish area tub and walls Completed: X LS
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X JP,DR,JS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X JP
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A JP
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X JP
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X JP
6.1.35 Clean the slurry delivery tube Completed: N/A JP
6.1.36 Check chiller fluid resevoir for proper level Completed: X JP
Comments:
6.1.19 I/O #2 bulkhead fitting is damaged.
6.1.19 Small puddle of oil in base under Index Table gearbox.
6.1.31 Check Valve no longer in use.
6.1.35 Cleaning of the slurry delivery tube applies to CMP.B2 only.
|
| 18.70 | ww-23 weekly pm completed | FABSIX::B_FINN | | Sun Dec 01 1996 18:49 | 85 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/1/96 TOOL: CMP.B1 TECH/SHIFT: Finn=bf,Gee=rg,Landry=tl
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 51
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 15
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 17
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 62
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: bf*
6.1.20 Check tubing/fittings for fluid leaks Completed: tl
6.1.21 Check tubing/fittings for pneumatic leaks Completed: tl
6.1.22 Check stations/components for contamination Completed: rg
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: bf
6.1.25 Clean and lubricate the Paddle rails Completed: bf
6.1.26 Clean Conditioning Wheel and Housing Completed: bf
6.1.27 Scrub clean the Polish area tub and walls Completed: tl
6.1.28 Remove all Load and Unload cups and scrub clean Completed: rg
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: bf
6.1.30 Check slurry pump hoses and connectors for leaks Completed: rg
6.1.31 Remove and clean the Vacuum system Check Valve Completed: bf
( water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: tl
6.1.33 Wipe the MHTA and covers with Isopropyl Completed rg
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: bf
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: tl
Comments: 6.1.35 The system has been modified, with this feature removed
6.1.19 Small amount of oil (~1 ts full) found under index
table motor
|
| 18.71 | WW 24 - Weekly completed | SUBPAC::LANDRY | | Sun Dec 08 1996 13:39 | 83 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/8/96 TOOL: CMP.B1 TECH/SHIFT: Gee, Landry
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 52
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 15
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 17
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 62
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
( water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: 6.1.35 The system has been modified, with this feature removed
|
| 18.72 | WW XXV - Weekly completed | SUBPAC::LANDRY | | Sun Dec 15 1996 17:43 | 84 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/15/96 TOOL: CMP.B1 TECH/SHIFT: Gee, Finn, Landry
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 52
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 17
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 17
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 62
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
( water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: 6.1.35 The system has been modified, with this feature removed
* Found a small amount of gear box oil under the Index Table gear box.
|
| 18.73 | ww26 weekly pm. | FABSIX::L_SHKOLNIKOV | | Thu Dec 26 1996 20:59 | 84 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/26/96 TOOL: CMP.B1 TECH/SHIFT: L.SHKOLNIKOV
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 84
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 52
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 4.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 15
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 15
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 80
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: x
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: x
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: x
6.1.26 Clean Conditioning Wheel and Housing Completed: x
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: x
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: x
6.1.30 Check slurry pump hoses and connectors for leaks Completed: x
6.1.31 Remove and clean the Vacuum system Check Valve Completed: x
( water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: x
6.1.33 Wipe the MHTA and covers with Isopropyl Completed x
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: x
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: x
Comments: 6.1.35 The system has been modified, with this feature removed
* Found a small amount of gear box oil under the Index Table gear box.
|
| 18.74 | CMP.B1 shutdown checksheet completed | FABSIX::R_GEE | | Tue Dec 31 1996 15:39 | 28 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
CMP.B SHUT DOWN CHECK SHEET Tech: _Tim Landry
_Bob Gee
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) SCRUB SIDES OF CARRIERS TL_BG_/_12/31/96
2) RUN CARRIER BLOW OFF FOR 30 SECONDS TL_BG_/_12/31/96
3) REMOVE ALL CARRIERS TL_BG_/_12/31/96
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK TL_BG_/_12/31/96
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. TL_BG_/_12/31/96
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY TL_BG_/_12/31/96
7) REMOVE CONDITIONER AND CLEAN TL_BG_/_12/31/96
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. TL_BG_/_12/31/96
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) TL_BG_/_12/31/96
10) DRAIN ELEVATOR AND CONDITIONER TUBE TL_BG_/_12/31/96
11) REMOVE PADS, AND CLEAN AND DRY TABLES TL_BG_/_12/31/96
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI TL_BG_/_12/31/96
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER TL_BG_/_12/31/96
14) POWER DOWN SYSTEM.
|
| 18.75 | B1 ALMOST COMPLETE, SEE #11 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 02 1997 08:20 | 21 |
|
CMP.B1 START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. LS / 1/2/97
2) POWER ON SYSTEM. BJ / 1/2/97
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES LS / 1/2/97
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY BJ / 1/2/97
5) DRY TABLES, INSTALL PADS LS / 1/2/97
6) INSTALL SCRUBBER BRUSHES LS / 1/2/97
7) INSTALL CONDITIONER BJ / 1/2/97
8) INSTALL CARRIERS LS / 1/2/97
9) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) LS / 1/2/97
10) IF SLURRY SYSTEM WAS SHUT DOWN, CONTACT ASHLAND CHEMICAL,
REQUEST DI TO BE PURGE FROM SLURRY SYSTEM AND CHARGED WITH
SLURRY AND REQUEST A NEW SLURRY FILTER BE INSTALLED. BJ / 1/2/97
11) CALIBRATE SLURRY FLOW
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC LS / 1/2/97
|
| 18.76 | SEMI-ANNUAL PM COMPLETED FOR WW27 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 02 1997 22:03 | 179 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE: 1/2/97 TOOL: CMP.B1 TECH/SHIFT: Brian Jubinville (BJ)
Leon Shkolnikov (LS)
Olin Whitford (OW)
6.4.1 Check all interlocks for functionality Completed: BJ
6.4.2 Check all EMO's for functionality Completed: BJ
6.4.3 Lubricate the Rotary Union Completed: BJ
6.4.4 Lubricate the Lead Screw Completed: BJ
6.4.5 Lubricate the Linear Guide Rails Completed: BJ
6.4.6 Lubricate the Idler Pulley Completed: BJ
Comments:
--------------------------------------------------------------------------------
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
6.2.1 Change Peristaltic Pump Lines and checked
flow. Completed: BJ
6.2.2 Clean Polish area tub drains Completed: BJ
6.2.3 Check Polish Table Belt for defects Completed: BJ
6.2.4 Perform Down Force Calibration on all 5 heads Completed: BJ,LS,OW
Down Frc: Head 1 Pre-Adj: 367 Post-adj: 377
Head 2 Pre-Adj: 358 Post-adj: 377
Head 3 Pre-Adj: 356 Post-adj: 377
Head 4 Pre-Adj: 359 Post-adj: 377
Head 5 Pre-Adj: 357.5 Post-adj: 377
6.2.5 Perform Down Force Calibration on Conditioner Completed: BJ
Actual Down Force Pre-Adj: 85
Actual Down Force Post-Adj: 77
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: BJ
6.2.7 Check the Load Flipper alignment Completed: BJ
6.2.8 Check the Unload Flipper alignment Completed: BJ
6.2.9 Check the Elevator alignment Completed: BJ
6.2.10 Check wafer unload, from Index table to cassette Completed: BJ
6.2.11 Check the +24 Volt power supply Pre-Adjust: 24.1/BJ
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust:-15.1/15/BJ
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.99/BJ
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: BJ
6.2.15 Check Vacuum Pump Diaphrams Completed: BJ
6.2.16 Check Vacuum Tank/Pump lines Completed: BJ
6.2.17 Check Load Cup Position alignment Completed: BJ,LS
6.2.18 Check Load Cup Height alignment Completed: BJ
6.2.19 Check Robot alignments Completed: BJ
6.2.20 Check Muffin Fans for proper operation Completed: BJ
Comments:
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 86/BJ
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 88/BJ
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24/BJ
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45/BJ
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23/BJ
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35/BJ
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30/BJ
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 52/BJ
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6/BJ
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20/BJ
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust:30/BJ
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust:20/BJ
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50/BJ
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50/BJ
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 15/BJ
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 20/BJ
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60/BJ
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80/BJ
6.1.19 Check Drip Pan for moisture/contamination Completed: BJ
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: BJ
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10/BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Clean Conditioning Wheel and Housing Completed: BJ
6.1.27 Scrub clean the Polish area tub and walls Completed: BJ
6.1.28 Remove all Load and Unload cups and scrub clean Completed: BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BJ
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BJ
6.1.31 Remove and clean the Vacuum system Check Valve Completed: BJ
6.1.32 Check Carrier clean brushes for defects, rotate Completed: BJ
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BJ
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BJ
6.1.35 Clean the slurry delivery tube Completed: n/a/BJ
(This model tool doesn't have this option)
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments:
|
| 18.77 | WEEKLY PM FOR WW28 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jan 08 1997 23:28 | 95 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/8/97 TOOL ENTITY: CMP.B1 TECH(S): Brian Jubinville (BJ)
Olin Witford (OW)
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85/BJ
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85/BJ
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 23/BJ
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45/BJ
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23/BJ
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35/BJ
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30/BJ
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 52/BJ
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6/BJ
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20/BJ
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust:30/BJ
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust:20/BJ
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50/BJ
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50/BJ
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 15/BJ
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: * 20/BJ
* Engineer aware of change *
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60/BJ
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80/BJ
6.1.19 Check Drip Pan for moisture/contamination Completed: BJ
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: BJ
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10/BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Clean Conditioning Wheel and Housing Completed: BJ/OW
6.1.27 Scrub clean the Polish area tub and walls Completed: BJ
6.1.28 Remove all Load and Unload cups and scrub clean Completed: BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BJ
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BJ
6.1.31 Remove and clean the Vacuum system Check Valve Completed: BJ
6.1.32 Check Carrier clean brushes for defects, rotate Completed: BJ
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BJ
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BJ
6.1.35 Clean the slurry delivery tube Completed: n/a/BJ
(This model tool doesn't have this option)
* Engineer notified and aware of change *
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments: The M5 screws that connect the conditioner wheel to the
bearing assembly were all stripped. All (6) helicoils
were removed and new ones installed by Mr. Whitford.
|
| 18.78 | ww 29 weekly p.m. completed | FABSIX::R_GEE | | Mon Jan 13 1997 08:17 | 86 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/12/97 TOOL ENTITY: CMP.B1 TECH(S): Bob Gee (BG)
Tim Landry (TL)
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85/TL
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 85/TL
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24/TL
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45/BG
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 23/BG
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35/BG
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30/BG
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 52/BG
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 5.8/BG
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20/BG
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30/BG
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20/BG
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50/BG
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50/BG
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 15/BG
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25/BG
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60/BG
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80/BG
6.1.19 Check Drip Pan for moisture/contamination Completed: TL
6.1.20 Check tubing/fittings for fluid leaks Completed: TL
6.1.21 Check tubing/fittings for pneumatic leaks Completed: TL
6.1.22 Check stations/components for contamination Completed: BG/TL
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10/BG
6.1.24 Clean and lubricate the Scrubber rails Completed: TL
6.1.25 Clean and lubricate the Paddle rails Completed: TL
6.1.26 Clean Conditioning Wheel and Housing Completed: BG
6.1.27 Scrub clean the Polish area tub and walls Completed: TL
6.1.28 Remove all Load and Unload cups and scrub clean Completed: TL/BG
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: TL
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BG/TL
6.1.31 Remove and clean the Vacuum system Check Valve Completed: BG
6.1.32 Check Carrier clean brushes for defects, rotate Completed: BG
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: TL
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BG
6.1.35 Clean the slurry delivery tube Completed: na/BG
6.1.36 Check chiller fluid resevoir for proper level Completed: TL
Comments: 6.1.35 System not equiped with this feature
6.1.16 Notified Equip Eng of this.
|
| 18.79 | WW30 weekly pm completed. | FABSIX::L_SHKOLNIKOV | | Tue Jan 21 1997 23:53 | 86 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/21/97 TOOL ENTITY: CMP.B1 TECH(S): Leon Shkolnikov - LS
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 84/LS
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82/LS
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25/LS
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45/LS
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 20/LS
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35/LS
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30/LS
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50/LS
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.0/LS
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20/LS
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30/LS
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20/LS
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50/LS
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50/LS
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 15/LS
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25/LS
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60/LS
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80/LS
6.1.19 Check Drip Pan for moisture/contamination Completed: LS
6.1.20 Check tubing/fittings for fluid leaks Completed: LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: LS
6.1.22 Check stations/components for contamination Completed: LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10/LS
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Clean Conditioning Wheel and Housing Completed: LS
6.1.27 Scrub clean the Polish area tub and walls Completed: LS
6.1.28 Remove all Load and Unload cups and scrub clean Completed: LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: LS
6.1.31 Remove and clean the Vacuum system Check Valve Completed: LS
6.1.32 Check Carrier clean brushes for defects, rotate Completed: LS
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: LS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: LS
6.1.35 Clean the slurry delivery tube Completed: na/LS
6.1.36 Check chiller fluid resevoir for proper level Completed: LS
Comments: 6.1.35 System not equiped with this feature
6.1.16 Notified Equip Eng of this.
|
| 18.80 | MONTHLY PM COMPLETED FOR WW31 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 30 1997 06:43 | 162 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
DATE: 1/30/97 TOOL ENTITY: CMP.B1 TECH(S): Brian Jubinville (BJ)
Leon Shkolnikov (LS)
Dave Whitford (DW)
6.2.1 Change Peristaltic Pump Lines and checked
flow. Completed: LS
6.2.2 Clean Polish area tub drains Completed: DW
6.2.3 Check Polish Table Belt for defects Completed: LS
6.2.4 Perform Down Force Calibration on all 5 heads Completed: BJ,DW
Down Frc: Head 1 Pre-Adj: 388 Post-adj: 377
Head 2 Pre-Adj: 363 Post-adj: 377
Head 3 Pre-Adj: 379 Post-adj: 377
Head 4 Pre-Adj: 384 Post-adj: 377
Head 5 Pre-Adj: 374 Post-adj: 377
6.2.5 Perform Down Force Calibration on Conditioner Completed: BJ,DW
Actual Down Force Pre-Adj: 74
Actual Down Force Post-Adj: 77
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: LS
6.2.7 Check the Load Flipper alignment Completed: BJ
6.2.8 Check the Unload Flipper alignment Completed: BJ
6.2.9 Check the Elevator alignment Completed: BJ
6.2.10 Check wafer unload, from Index table to cassette Completed: BJ
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.75BJ
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust:-15.1/15/BJ
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.98/BJ
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: BJ
6.2.15 Check Vacuum Pump Diaphrams Completed: LS
6.2.16 Check Vacuum Tank/Pump lines Completed: LS
6.2.17 Check Load Cup Position alignment Completed: BJ,LS,DW
6.2.18 Check Load Cup Height alignment Completed: BJ
6.2.19 Check Robot alignments Completed: BJ
6.2.20 Check Muffin Fans for proper operation Completed: LS
Comments:
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 86/DW
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80/DW
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20/DW
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45/DW
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 20/DW
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35/DW
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30/DW
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 52/DW
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6/DW
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20/DW
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: 30/DW
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20/DW
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50/DW
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50/DW
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18/DW
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25/DW*
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 40/DW
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80/DW
6.1.19 Check Drip Pan for moisture/contamination Completed: LS
6.1.20 Check tubing/fittings for fluid leaks Completed: LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: LS
6.1.22 Check stations/components for contamination Completed: BJ,DW,LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10/LS
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Clean Conditioning Wheel and Housing Completed: DW
6.1.27 Scrub clean the Polish area tub and walls Completed: DW
6.1.28 Remove all Load and Unload cups and scrub clean Completed: BJ,DW,LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: LS
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A/BJ
6.1.32 Check Carrier clean brushes for defects, rotate Completed: BJ
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BJ,DW
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BJ,DW
6.1.35 Clean the slurry delivery tube Completed: n/a/BJ
(This model tool doesn't have this option)
6.1.36 Check chiller fluid resevoir for proper level Completed: LS
Comments:
6.1.16 New setting per Eng. Eng. notified
6.1.31 Tool no longer uses a check valve.
New spec being signed off. This check
will be removed. Eng. notified.
6.1.35 New spec being signed off. This check
will be removed. Eng. notified.
|
| 18.81 | WEEKLY PM FOR WW32 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Feb 06 1997 06:31 | 106 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:2/5/97 TOOL ENTITY:CMP.B1 TECH(S): John Poirier = JP
John Swenson = JS
Brian Jubinville = BJ
Leon Shkolnikov = LS
START TIME:3:30 p.m. COMPLETED TIME:5:15p.m.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 81 JP
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 JP
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 22 JP
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45 JP
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 JP
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 JP
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 JP
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 JP
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 JP
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 JP
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 JP
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 JP
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 JP
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 18 JP
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 JP
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 18 JP
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 JP
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 JP
6.1.19 Check Drip Pans for moisture/contamination Completed: X JP
6.1.20 Check tubing/fittings for fluid leaks Completed: X JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X JP
6.1.22 Check stations/components for contamination Completed: X JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: X JP
6.1.24 Clean and lubricate the Scrubber rails Completed: X JP
6.1.25 Clean and lubricate the Paddle rails Completed: X JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: X JP
6.1.27 Scrub clean the Polish area tub and walls Completed: X JP
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: BJ/LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: X JS
6.1.32 Check Carrier clean brushes for defects Completed: X JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X JP
6.1.35 Check chiller fluid resevoir for proper level Completed: X JP
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ/LS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: X JP
6.1.38 Check the slurry flow alarm. Completed: X JP
Comments:
|
| 18.82 | WEEKLY PM FOR WW33 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Feb 13 1997 22:56 | 106 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:2/13/97 TOOL ENTITY:CMP.B1 TECH(S): Dave Whitford = DW
Brian Jubinville = BJ
START TIME: 8:30 p.m. COMPLETED TIME: 10:45p.m.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 DW
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 DW
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 20 DW
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 48 DW
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 DW
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 DW
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 DW
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 DW
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 DW
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 DW
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 DW
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 DW
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 DW
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 27 DW
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 DW
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 DW
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 DW
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 DW
6.1.19 Check Drip Pans for moisture/contamination Completed: BJ
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: BJ
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BJ
6.1.27 Scrub clean the Polish area tub and walls Completed: BJ
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BJ
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BJ/DW *
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BJ
6.1.32 Check Carrier clean brushes for defects Completed: BJ
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BJ
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BJ
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: BJ/DW
6.1.38 Check the slurry flow alarm. Completed: BJ
Comments: Slurry lines found split. Replaced both lines and checked flow
|
| 18.83 | WW34 Weekly PM completed | FABSIX::R_POIRIER | | Mon Feb 17 1997 04:47 | 107 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:2/17/97 TOOL ENTITY:CMP.B1 TECH(S): Roger Poirier (RP)
Albert Quillen (AQ)
START TIME: 2:40 AM COMPLETED TIME: 4:20 AM
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 RP AQ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 RP AQ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 20 RP AQ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 44 RP AQ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 RP AQ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 RP AQ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 RP AQ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 RP AQ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 RP AQ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 RP AQ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 RP AQ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 RP AQ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 RP AQ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 RP AQ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 RP AQ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 18 RP AQ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 RP AQ
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 RP AQ
6.1.19 Check Drip Pans for moisture/contamination Completed: RP AQ
6.1.20 Check tubing/fittings for fluid leaks Completed: RP AQ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP AQ
6.1.22 Check stations/components for contamination Completed: RP AQ
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 RP AQ
6.1.24 Clean and lubricate the Scrubber rails Completed: RP AQ
6.1.25 Clean and lubricate the Paddle rails Completed: RP AQ
6.1.26 Remove and clean conditioning Wheel and Housing Completed: AQ RP
6.1.27 Scrub clean the Polish area tub and walls Completed: AQ
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: RP AQ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP AQ
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: RP AQ
6.1.32 Check Carrier clean brushes for defects Completed: RP AQ
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: RP AQ
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: RP AQ
6.1.35 Check chiller fluid resevoir for proper level Completed: RP AQ
6.1.36 Check the chiller readout for 24 degrees C. Completed: RP AQ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: RP AQ
6.1.38 Check the slurry flow alarm. Completed: RP
Comments: Found small pool of oil under Index table gear box.
Cleaned up oil and informed EE.
|
| 18.84 | WW35 Weekly PM Check Sheet | ASDG::POIRIER | | Thu Feb 27 1997 17:17 | 103 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 2/27/97 TOOL ENTITY: CMP.B1 TECHNICIAN(S): John Poirier - JP
Brad Westphal - BW
START TIME: 3:20 p.m. COMPLETED TIME: 5:00 P.M.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 JP
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 JP
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 25 JP
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45 JP
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 JP
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 JP
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 JP
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 JP
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 JP
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 JP
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 JP
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 JP
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 JP
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 28 JP
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 28 JP
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 JP
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 40 JP
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 JP
6.1.19 Check Drip Pans for moisture/contamination Completed: X JP *
6.1.20 Check tubing/fittings for fluid leaks Completed: X JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X JP
6.1.22 Check stations/components for contamination Completed: X JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 8 JP
6.1.24 Clean and lubricate the Scrubber rails Completed: X JP
6.1.25 Clean and lubricate the Paddle rails Completed: X JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: X BW
6.1.27 Scrub clean the Polish area tub and walls Completed: X BW
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: X JP
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X BW
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: X JP
6.1.32 Check Carrier clean brushes for defects Completed: X BW
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X BW
6.1.35 Check chiller fluid resevoir for proper level Completed: X BW
6.1.36 Check the chiller readout for 24 degrees C. Completed: X BW
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: X BW
6.1.38 Check the slurry flow alarm. Completed: X BW
Comments:
6.1.19 - Found small puddle of gear oil on drip pan under index
table gearbox.
|
| 18.85 | WW36 Monthly PM CheckSheet | ASDG::POIRIER | | Thu Mar 06 1997 22:08 | 190 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE: 03/06/97 TOOL ENTITY: CMP.B1 TECHNICIAN(S): DW Dave Whitford
LS Leon Shkolnikov
JS John Swenson
START TIME: 05:45 am COMPLETED TIME: 09:20 am JP John Poirier
6.2.1 Change Peristaltic Pump Lines and check flow Completed: JS
6.2.2 Clean Polish area tub drains for clogs Completed: DW/LS
6.2.3 Check all table belts for defects Completed: JS
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: DW/LS
Down Frc: Head 1 Pre-Adj: 358 Post-adj: 354
Head 2 Pre-Adj: 323 Post-adj: 354
Head 3 Pre-Adj: 360 Post-adj: 354
Head 4 Pre-Adj: 340 Post-adj: 354
Head 5 Pre-Adj: 356 Post-adj: 354
6.2.5 Perform Down Force Calibration on Conditioner Completed: DW/LS
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj: 88.1
Actual Down Force Post-Adj: 76.8
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: LS
6.2.7 Check the Load Flipper alignment Completed: LS
6.2.8 Check the Unload Flipper alignment Completed: LS
6.2.9 Check Elevator alignments Completed: LS
6.2.10 Check wafer unload, from Index table to cassette Completed: LS
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre:23.8 Post:23.8 Tech: LS
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre: 15.8 Post:15.3 Tech: LS
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre:4.9 Post:4.9 Tech: LS
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: 29.9 LS
6.2.15 Check Vacuum Pump Diaphrams Completed: JP
6.2.16 Replace liquid separator filter element Completed: LS
6.2.17 Check Vacuum Tank/Pump lines Completed: LS
6.2.18 Check carrier to Load Cup Position alignments Completed: JS
6.2.19 Check Load Cup Height to carrier alignments Completed: LS
6.2.20 Check the Robot alignments Completed: LS
6.2.21 Check Muffin Fans for proper operation Completed: LS
Comments:
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 03.06.97 TOOL ENTITY: CMP.B1 TECHNICIAN(S): DW Dave Whitford
LS Leon Shkolnikov
JS John Swenson
START TIME: 05:45 am. COMPLETED TIME: 09:20 am. JP John Poirier
BW Brad Westphal
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: JS 82
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: JS 55
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: JS 24
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: JS 44
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: JS 20
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: JS 35
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: JS 30
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: JS 50
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: JS 6
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: JS 30
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: JS 20
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: JS 45
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: JS 50
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: JS 30
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: JS 25
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: JS 20
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: JS 50
6.1.18 Check MHTA pressure for 75-85 PSI Completed: JS 80
6.1.19 Check Drip Pans for moisture/contamination Completed: JS
6.1.20 Check tubing/fittings for fluid leaks Completed: JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: JP
6.1.22 Check stations/components for contamination Completed: LS/DW
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: JS 9
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: LS/DW
6.1.27 Scrub clean the Polish area tub and walls Completed: LS/DW
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: BW
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: JS
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: LS
6.1.32 Check Carrier clean brushes for defects Completed: LS
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: JP
6.1.35 Check chiller fluid resevoir for proper level Completed: LS
6.1.36 Check the chiller readout for 24 degrees C. Completed: BW
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: LS
6.1.38 Check the slurry flow alarm. Completed: LS
Comments:
|
| 18.86 | ww37 weekly pm completed. | FABSIX::L_SHKOLNIKOV | No more experiments with freedom | Thu Mar 13 1997 02:03 | 103 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 3/13/97 TOOL ENTITY: CMP.B1 TECHNICIAN : Leon Shkolnikov LS
START TIME: 10:20 p.m. COMPLETED TIME: 1:30 a.m.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 LS
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 LS
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 22 LS
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45 LS
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 LS
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 LS
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 LS
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 LS
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 LS
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 LS
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 LS
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 LS
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 LS
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 28 LS
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 LS
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 LS
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 50 LS
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 LS
6.1.19 Check Drip Pans for moisture/contamination Completed: X LS *
6.1.20 Check tubing/fittings for fluid leaks Completed: X LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X LS
6.1.22 Check stations/components for contamination Completed: X LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 8 LS
6.1.24 Clean and lubricate the Scrubber rails Completed: X LS
6.1.25 Clean and lubricate the Paddle rails Completed: X LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: X LS
6.1.27 Scrub clean the Polish area tub and walls Completed: X LS
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: X LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X LS
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: X LS
6.1.32 Check Carrier clean brushes for defects Completed: X LS
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X LS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X LS
6.1.35 Check chiller fluid resevoir for proper level Completed: X LS
6.1.36 Check the chiller readout for 24 degrees C. Completed: X LS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: X LS
6.1.38 Check the slurry flow alarm. Completed: X LS
Comments:
6.1.19 - Found small puddle of gear oil on drip pan under index
table gearbox.
|
| 18.86 | ww37 weekly pm. | FABSIX::L_SHKOLNIKOV | | Thu Mar 13 1997 22:28 | 103 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 3/13/97 TOOL ENTITY: CMP.B1 TECHNICIAN : Leon Shkolnikov LS
START TIME: 10:20 p.m. COMPLETED TIME: 1:30 a.m.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 LS
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 LS
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 22 LS
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45 LS
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 LS
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 LS
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 LS
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 LS
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 LS
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 LS
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 LS
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 LS
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 LS
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 28 LS
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 LS
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 LS
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 50 LS
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 LS
6.1.19 Check Drip Pans for moisture/contamination Completed: X LS *
6.1.20 Check tubing/fittings for fluid leaks Completed: X LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X LS
6.1.22 Check stations/components for contamination Completed: X LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 8 LS
6.1.24 Clean and lubricate the Scrubber rails Completed: X LS
6.1.25 Clean and lubricate the Paddle rails Completed: X LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: X LS
6.1.27 Scrub clean the Polish area tub and walls Completed: X LS
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: X LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X LS
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: X LS
6.1.32 Check Carrier clean brushes for defects Completed: X LS
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X LS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X LS
6.1.35 Check chiller fluid resevoir for proper level Completed: X LS
6.1.36 Check the chiller readout for 24 degrees C. Completed: X LS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: X LS
6.1.38 Check the slurry flow alarm. Completed: X LS
Comments:
6.1.19 - Found small puddle of gear oil on drip pan under index
table gearbox.
|
| 18.87 | << WW38 Weekly PM >> | FABSIX::O_WHITFORD | Lead, follow or step aside. | Wed Mar 19 1997 06:53 | 107 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:03-19-97 TOOL ENTITY: CMP.B1 TECHNICIAN(S):Brian Jubinville (BJ)
Leon Shkolnikov (LS)
START TIME: 04:20 COMPLETED TIME: 06:50 Dave Whitford (DW)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 (DW)
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 (DW)
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 20 (DW)
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 44 (DW)
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 (DW)
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 (DW)
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 (DW)
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 (DW)
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 (DW)
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 (DW)
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 (DW)
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 (DW)
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 (DW)
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 26 (DW)
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 (DW)
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 (DW)
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 55 (DW)
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 (DW)
6.1.19 Check Drip Pans for moisture/contamination Completed: (DW)
6.1.20 Check tubing/fittings for fluid leaks Completed: (DW)
6.1.21 Check tubing/fittings for pneumatic leaks Completed: (DW)
6.1.22 Check stations/components for contamination Completed: (DW)
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: @5 (DW)
6.1.24 Clean and lubricate the Scrubber rails Completed: (DW)
6.1.25 Clean and lubricate the Paddle rails Completed: (DW)
6.1.26 Remove and clean conditioning Wheel and Housing Completed: (DW)
6.1.27 Scrub clean the Polish area tub and walls Completed: (DW)
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: (DW)
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: (DW)
6.1.30 Check slurry pump hoses and connectors for leaks Completed: (DW)
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: (DW)
6.1.32 Check Carrier clean brushes for defects Completed: (DW)
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: (DW)
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: (DW)
6.1.35 Check chiller fluid resevoir for proper level Completed: (DW)
6.1.36 Check the chiller readout for 24 degrees C. Completed: (BJ)
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: (DW,BJ)
6.1.38 Check the slurry flow alarm. Completed: (DW)
Comments:
1) Considerable oil leak from the index table motor/gearbox assembly
@ 2 tblspoons since last week...
2) Oil leak developing in the polish table motor/gearbox assembly. Several
droplets forming on the lower fins of the motor housing.
3) Replaced INFRANOR oscillation arm #3, it never came back from the
wafer detect test.....
|
| 18.88 | WEEKLY PM COMPLETED FOR WW39 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Mar 27 1997 00:13 | 106 |
| SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:03-26-97 TOOL ENTITY: CMP.B1 TECHNICIAN(S):Brian Jubinville (BJ)
Leon Shkolnikov (LS)
START TIME: 22:15 COMPLETED TIME: 00:15 Dave Whitford (DW)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 BJ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 20 BJ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45 BJ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 BJ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 BJ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BJ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BJ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 17 BJ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BJ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BJ
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 BJ
6.1.19 Check Drip Pans for moisture/contamination Completed: BJ
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: DW/BJ
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 7 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BJ
6.1.27 Scrub clean the Polish area tub and walls Completed: DW/BJ
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: DW/BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DW *
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BJ
6.1.32 Check Carrier clean brushes for defects Completed: BJ
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BJ/LS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BJ/LS
6.1.35 Check chiller fluid resevoir for proper level Completed: DW
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: BJ/LS
6.1.38 Check the slurry flow alarm. Completed: LS/DW
Comments:
* - Both slurry lines ready to blow open.... replaced them both!
1) Considerable oil leak from the index table motor/gearbox assembly
@ 2 tblspoons since last week...
2) Oil leak developing in the polish table motor/gearbox assembly. Several
droplets forming on the lower fins of the motor housing.
|
| 18.89 | MONTHLY PM FOR WW40 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 03 1997 00:48 | 180 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE:04/02/97 TOOL ENTITY: CMP.B1 TECHNICIAN(S):Brian Jubinville (BJ)
Leon Shkolnikov (LS)
START TIME: 20:00 COMPLETED TIME: 23:30
6.2.1 Change Peristaltic Pump Lines and check flow Completed: BJ
6.2.2 Clean Polish area tub drains for clogs Completed: BJ/LS
6.2.3 Check all table belts for defects Completed: BJ
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: BJ
Down Frc: Head 1 Pre-Adj: 356 Post-adj: 354
Head 2 Pre-Adj: 366 Post-adj: 354
Head 3 Pre-Adj: 350 Post-adj: 354
Head 4 Pre-Adj: 354 Post-adj: 354
Head 5 Pre-Adj: 350 Post-adj: 354
6.2.5 Perform Down Force Calibration on Conditioner Completed: BJ
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj: 67
Actual Down Force Post-Adj: 77
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: BJ
6.2.7 Check the Load Flipper alignment Completed: BJ
6.2.8 Check the Unload Flipper alignment Completed: BJ
6.2.9 Check Elevator alignments Completed: BJ
6.2.10 Check wafer unload, from Index table to cassette Completed: BJ
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre: 23.7 Post: 23.7 Tech: BJ
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre: 15.1 Post: 15.1 Tech: BJ
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: 4.98 Post: 4.98 Tech: BJ
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: BJ
6.2.15 Check Vacuum Pump Diaphrams Completed: BJ
6.2.16 Replace liquid separator filter element Completed: BJ
6.2.17 Check Vacuum Tank/Pump lines Completed: BJ
6.2.18 Check carrier to Load Cup Position alignments Completed: BJ
6.2.19 Check Load Cup Height to carrier alignments Completed: BJ
6.2.20 Check the Robot alignments Completed: BJ
6.2.21 Check Muffin Fans for proper operation Completed: BJ/LS
Comments:
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:04/02/97 TOOL ENTITY: CMP.B1 TECHNICIAN(S):Brian Jubinville (BJ)
Leon Shkolnikov (LS)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 BJ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 20 BJ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45 BJ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 BJ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 BJ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BJ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BJ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 17 BJ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BJ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BJ
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 BJ
6.1.19 Check Drip Pans for moisture/contamination Completed: BJ
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: BJ/LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 5 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: LS
6.1.27 Scrub clean the Polish area tub and walls Completed: LS/BJ
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: BJ/LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BJ
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BJ
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BJ
6.1.32 Check Carrier clean brushes for defects Completed: BJ
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BJ/LS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BJ/LS
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: BJ/LS
6.1.38 Check the slurry flow alarm. Completed: BJ/LS
Comments: Area of 8" of oil found under index table gear box
|
| 18.90 | WW41 WEEKLY PM CHECK SHEET | ASDG::POIRIER | | Fri Apr 11 1997 16:02 | 102 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 4/11/97 TOOL ENTITY: CMP.B1 TECHNICIAN(S): JOHN POIRIER (JP)
MIKE STANDING (MS)
START TIME: 1:00 P.M. COMPLETED TIME: 2:50 P.M.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 JP
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 JP
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 22 JP
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 44 JP
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 JP
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 JP
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 JP
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 JP
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 JP
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 JP
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 JP
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 JP
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 JP
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 15 JP
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 JP
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 JP
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 50 JP
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 JP
6.1.19 Check Drip Pans for moisture/contamination Completed: MS
6.1.20 Check tubing/fittings for fluid leaks Completed: MS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: MS
6.1.22 Check stations/components for contamination Completed: MS
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9
6.1.24 Clean and lubricate the Scrubber rails Completed: JP
6.1.25 Clean and lubricate the Paddle rails Completed: JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: MS
6.1.27 Scrub clean the Polish area tub and walls Completed: JP
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: JP & MS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: MS
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: JP
6.1.32 Check Carrier clean brushes for defects Completed: JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: MS
6.1.35 Check chiller fluid resevoir for proper level Completed: JP
6.1.36 Check the chiller readout for 24 degrees C. Completed: JP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: JP
6.1.38 Check the slurry flow alarm. Completed: JP
Comments:
|
| 18.91 | WW 42 weekly PM complete | FABSIX::O_WHITFORD | Lead, follow or step aside. | Wed Apr 16 1997 23:48 | 103 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 4/16/97 TOOL ENTITY: CMP.B1 TECHNICIAN(S): Brian Jubinville (BJ)
Dave Whitford (DW)
Leon Shkolnikov (LS)
START TIME: 21:30 COMPLETED TIME: 23:00
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 DW
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 DW
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 20 DW
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45 DW
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 DW
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 DW
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 DW
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 DW
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 DW
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 DW
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 DW
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 DW
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 DW
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 15 DW
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 DW
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 DW
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 50 DW
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 DW
6.1.19 Check Drip Pans for moisture/contamination Completed: BJ
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: BJ
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: DW
6.1.25 Clean and lubricate the Paddle rails Completed: DW
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BJ
6.1.27 Scrub clean the Polish area tub and walls Completed: BJ
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: DW
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BJ/LS
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: DW
6.1.32 Check Carrier clean brushes for defects Completed: BJ
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BJ
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BJ
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: BJ/LS/DW
6.1.38 Check the slurry flow alarm. Completed: BJ
Comments:
Small puddle of gear oil under index table gearbox
|
| 18.92 | PMS WAIVED | SUBPAC::MJONES | | Sun Apr 20 1997 03:11 | 1 |
| PM'S WAIVED UNTIL TOOL HAS BEEN REINSTALLED.
|