| Title: | CMP |
| Notice: | Welcome to the CMP notesfile |
| Moderator: | FABSIX::B_TOWER LLE |
| Created: | Tue Oct 31 1995 |
| Last Modified: | Fri Jun 06 1997 |
| Last Successful Update: | Fri Jun 06 1997 |
| Number of topics: | 94 |
| Total number of notes: | 6381 |
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]EST_CMP.NOTE;1 >>>
-< EST_CMP Conference >-
================================================================================
Note 78.0 Pad change data 255 replies
FABSIX::E_BODENSIECK 12 lines 15-MAR-1995 12:08
--------------------------------------------------------------------------------
The following note will be used to enter in the pad change date and the
Lot that the pad was from.
Enter data whenever a pad is changed on any polisher (Speedfam,
Strasbaugh)
Entity Date Pad Lot # Reason for change
CMP.A1 3/14/95 BV4-RA5 Boken wafer
Bad uniformity
Pad count over 400
Pad on machine over weekend
no wafers run since Friday
================================================================================
Note 78.1 Pad change data 1 of 255
FABSIX::E_DAWSON 5 lines 16-MAR-1995 11:33
-< New Pad CMP.A1 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason For Change
CMP.A1 3/16/95 BV4-RA5 Wafers broke on pad.
================================================================================
Note 78.2 Pad change data 2 of 255
FABSIX::E_DAWSON 5 lines 17-MAR-1995 09:03
-< PAD CHANGE FOR CMP.A1 3/17/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
CMP.A1 3/17/95 DE4-RA7 2 Product wafer
broke on the pad.
================================================================================
Note 78.3 Pad change data 3 of 255
FABSIX::E_DAWSON 6 lines 21-MAR-1995 09:04
-< PAD CHANGE CMP.A2 3/21/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason For Change
Cmp.A2 3/21/95 BV4-RA6 Excercise wafer
broke on previous
pad.
================================================================================
Note 78.4 Pad change data 4 of 255
SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 5 lines 25-MAR-1995 06:03
-< A1 pad changed >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason
--------------------------------------------------------------
CMP.A1 3/25/95 BV4-RA6 Semi-Annual PM
================================================================================
Note 78.5 Pad change data 5 of 255
SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 7 lines 26-MAR-1995 21:02
-< Pad changed...... >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason
--------------------------------------------------------------
CMP.A2 3/25/95 BV4-RA6 slow removal rate
high pad count
================================================================================
Note 78.6 Pad change data 6 of 255
SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 7 lines 3-APR-1995 01:15
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason
--------------------------------------------------------------
CMP.A1 4/3/95 DE4-RA7 high pad count
================================================================================
Note 78.7 Pad change data 7 of 255
PATE::GEE 4 lines 4-APR-1995 23:10
-< CMP.A2 4/4/95 >-
--------------------------------------------------------------------------------
Entity Date Pad lot Reason for Change
CMP.A2 4/4/95 DE4-RA7 2 Oxide wafers
broke on the pad.
================================================================================
Note 78.8 Pad change data 8 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 6 lines 7-APR-1995 03:05
-< 2nd shift pad change >-
--------------------------------------------------------------------------------
Entity Date Pad lot Reason for Change
=================================================================
CMP.A1 4/6/95 DE4-RA7 bad uniformify
changed by 2nd shift
================================================================================
Note 78.10 Pad change data 10 of 255
PATE::GEE 4 lines 7-APR-1995 23:30
-< cmp.a2 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
CMP.A2 4/7/95 DE4-RA7 Poor Uniformity
High wafer count
================================================================================
Note 78.11 Pad change data 11 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 5 lines 10-APR-1995 05:26
-< Pad replaced >-
--------------------------------------------------------------------------------
Entity Date Pad lot Reason for Change
==================================================================
CMP.A2 4/10/95 DE4-RA7 wafer broke on the
pad.
================================================================================
Note 78.12 Pad change data 12 of 255
FABSIX::E_DAWSON 5 lines 11-APR-1995 14:53
-< PAD CHANGE CMP.A2 4/11/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for change?
CMP.A2 4/11/95 DE4-RA7 WAFER BROKE ON PAD
================================================================================
Note 78.13 Pad change data 13 of 255
FABSIX::E_DAWSON 6 lines 13-APR-1995 11:58
-< PAD CHANGE CMP.A2 4/13/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
CMP.A2 4/13/95 DE4-RA7 TWO WAFERS BROKE
================================================================================
Note 78.14 Pad change data 14 of 255
FABSIX::E_DAWSON 8 lines 18-APR-1995 13:09
-< PAD CHANGE CMP.A1 4/18/95 >-
--------------------------------------------------------------------------------
ENTITY DATE PAD LOT # REASON FOR CHANGE
CMP.A1 4/18/95 DE4-RA7 DI WATER SHUT OFF
OVER WEEKEND
================================================================================
Note 78.15 Pad change data 15 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 6 lines 21-APR-1995 01:00
-< A2 pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 4/21/95 CJ4-RA8 Poor Uniformity
High wafer count
**note** replaced with a SpeedFam type
================================================================================
Note 78.16 Pad change data 16 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 22-APR-1995 05:41
-< PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 4/22/95 BA4-RB1 wafer breakage
**note** replaced with a SpeedFam type
================================================================================
Note 78.17 Pad change data 17 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 25-APR-1995 06:28
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 4/25/95 BA4-RB1 particle problems
**note** replaced with a SpeedFam type
================================================================================
Note 78.18 Pad change data 18 of 255
FABSIX::E_DAWSON 7 lines 25-APR-1995 15:57
-< PAD CHANGE CMP.A1 4/26/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 4/26/95 BA4-RB1 BAD UNF./ FAILED MQC
**note** replaced with a SpeedFam type
================================================================================
Note 78.19 Pad change data 19 of 255
PATE::GEE 2 lines 26-APR-1995 23:34
-< cmpa1 >-
--------------------------------------------------------------------------------
cmp.a1 4/26/95 high wafer count
================================================================================
Note 78.20 Pad change data 20 of 255
FABSIX::J_ROA 16 lines 1-MAY-1995 17:51
-< CMP.A2 NEW PAD. >-
--------------------------------------------------------------------------------
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]EST_CMP.NOTE;1 >>>
-< EST_CMP Conference >-
================================================================================
Note 78.0 Pad change data for May
FABSIX::J_ROA Monday 05/01/95
--------------------------------------------------------------------------------
( Strasbaugh)
Entity Date Pad Lot # Reason for change
CMP.A2 5/1/95 CU4-RA7 Low removal rate.
Pad count at 366
( Speedfam pad )
================================================================================
Note 78.21 Pad change data 21 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 11 lines 2-MAY-1995 07:52
-< pad change >-
--------------------------------------------------------------------------------
======================================================================
Entity Date Pad Lot # Reason for change
CMP.A1 5/2/95 YD4-RA1 broke wafer on pad
Pad count at 365
( Speedfam pad )
================================================================================
Note 78.22 Pad change data 22 of 255
FABSIX::E_DAWSON 6 lines 2-MAY-1995 14:22
-< PAD CHANGE CMP.A2 5/2/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for change?
CMP.A2 5/2/95 DE4-RA1 Wafer broke on pad...
================================================================================
Note 78.23 Pad change data 23 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 4-MAY-1995 07:48
-< Pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for change?
===================================================================
CMP.A2 5/4/95 DE4-RA1 High pad count, poor
removal rate.
================================================================================
Note 78.24 Pad change data 24 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 8-MAY-1995 08:18
-< pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for change?
===================================================================
CMP.A2 5/7/95 DE4-RA1 High pad count
================================================================================
Note 78.25 Pad change data 25 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 10 lines 8-MAY-1995 08:19
-< pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for change?
===================================================================
CMP.A1 5/7/95 DE4-RA1 new pad after repairs
completed on robot.
================================================================================
Note 78.26 Pad change data 26 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 10 lines 15-MAY-1995 06:10
-< PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for change?
===================================================================
CMP.A1 5/15/95 EU5-JP4 High pad count
================================================================================
Note 78.27 Pad change data 27 of 255
PATE::GEE 2 lines 15-MAY-1995 23:41
-< cmp.a2 >-
--------------------------------------------------------------------------------
CMP.A2 5/15/95 EU5-JP2 Poor removal rate and
uniformity
================================================================================
Note 78.28 Pad change data 28 of 255
PATE::GEE 1 line 16-MAY-1995 20:42
-< CMP.a1 >-
--------------------------------------------------------------------------------
CMP.A1 5/16/95 EU5-JP2 No pad on the system
================================================================================
Note 78.29 Pad change data 29 of 255
FABSIX::E_DAWSON 7 lines 17-MAY-1995 10:11
-< PAD CHNAGE CMP.A1 5/17/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 5/17/95 DZ5-IP1 PAD HAD NO CENTER
REMOVAL
================================================================================
Note 78.30 Pad change data 30 of 255
PATE::GEE 2 lines 17-MAY-1995 23:50
-< cmp.a2 >-
--------------------------------------------------------------------------------
CMP.A2 5/17/95 BF4-RA2 Poor uniformity
Speedfam
================================================================================
Note 78.31 Pad change data 31 of 255
FABSIX::E_DAWSON 10 lines 18-MAY-1995 13:34
-< PAD CHANGE CMP.A1 5/18/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 5/18/95 DZ5-JP3 PAD HAD A SLOW
REMOVAL RATE AND BAD UNF.
PAD COUNT WAS ONLY 226
WAF. R/R WAS LESS THAN
500�
================================================================================
Note 78.32 Pad change data 32 of 255
PATE::GEE 2 lines 18-MAY-1995 23:28
-< CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 5/18/95 CU4-RA7 Poor uniformity
Speedfam Pad
================================================================================
Note 78.33 Pad change data 33 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 22-MAY-1995 02:23
-< Pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for change?
=========================================================================
CMP.A1 5/22/95 DJ4-RA6 Wafer broke on pad...
SpeedFam
================================================================================
Note 78.34 Pad change data 34 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 23-MAY-1995 08:07
-< Pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for change?
=========================================================================
CMP.A1 5/23/95 DJ4-RA6 Wafer broke on pad...
SpeedFam
================================================================================
Note 78.35 Pad change data 35 of 255
PATE::GEE 2 lines 23-MAY-1995 18:20
-< cmp.a1 >-
--------------------------------------------------------------------------------
CMP.A1 5/23/95 CU4-RA8 Wafer broke on pad...
Speedfam
================================================================================
Note 78.36 Pad change data 36 of 255
PATE::GEE 7 lines 23-MAY-1995 22:52
-< cmp.a1 >-
--------------------------------------------------------------------------------
CMP.A1 5/23/95 DJ4-RA7 Wafers sticking to the pad
changed conditioner disk,
but still didn't help.
almost broke wafers so
we decided to try a
different pad from a
different lot.
================================================================================
Note 78.37 Pad change data 37 of 255
FABSIX::R_POIRIER 2 lines 24-MAY-1995 18:36
-< CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 5/24/95 DZ5-JP2 Wafer broke on pad.
Strasbaugh Pad
================================================================================
Note 78.38 Pad change data 38 of 255
FABSIX::R_POIRIER 2 lines 24-MAY-1995 18:39
-< CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 5/24/95 DZ5-JP2 Previous pad was an
Strasbaugh Pad Evaluation pad.
================================================================================
Note 78.39 Pad change data 39 of 255
PATE::GEE 2 lines 1-JUN-1995 21:38
-< CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 6/1/95 CU4-RA8 None on the system
Speedfam
================================================================================
Note 78.40 Pad change data 40 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 4 lines 5-JUN-1995 06:23
-< PAD CHANGE >-
--------------------------------------------------------------------------------
CMP.A2 6/5/95 DJ4-RA6 HIGH PAD COUNT
Speedfam
================================================================================
Note 78.41 Pad change data 41 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 4 lines 8-JUN-1995 03:43
-< PAD CHANGE >-
--------------------------------------------------------------------------------
CMP.A2 6/8/95 DJ4-RA6 WAFER BROKE ON PAD
Speedfam
================================================================================
Note 78.42 Pad change data 42 of 255
FABSIX::R_POIRIER 3 lines 9-JUN-1995 23:07
-< PAD REPLACED >-
--------------------------------------------------------------------------------
CMP.A2 6/9/95 CU4-RA8 REMOVAL RATE DECREASING
Speedfam 352 WAFERS DONE ON PAD.
================================================================================
Note 78.43 Pad change data 43 of 255
PATE::GEE 2 lines 12-JUN-1995 00:04
-< cmp.a1 >-
--------------------------------------------------------------------------------
CMP.A1 6/11/95 CU4-RA8 Uniformity way out with a
concave shape
================================================================================
Note 78.44 Pad change data 44 of 255
FABSIX::E_DAWSON 8 lines 12-JUN-1995 10:28
-< PAD CHANGE 6/12/95 CMP.A2 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 6/12/95 CU4-RA8 WAFER BROKE ON
PREVIOUS PAD
================================================================================
Note 78.45 Pad change data 45 of 255
PATE::GEE 1 line 13-JUN-1995 03:45
-< cmp.a1 >-
--------------------------------------------------------------------------------
CMP.A1 6/13/905 CU4-RA8 No pad on system
================================================================================
Note 78.46 Pad change data 46 of 255
PATE::GEE 2 lines 14-JUN-1995 05:26
-< cmp.a2 >-
--------------------------------------------------------------------------------
CMP.A2 6/14/95 CU4-RA8 High wafer count
================================================================================
Note 78.47 Pad change data 47 of 255
SUBPAC::LANDRY 8 lines 16-JUN-1995 18:30
-< B1 >-
--------------------------------------------------------------------------------
CMP.B1 6-16-95 CP4-RA3 High Wafer Count /
silicon fragments
Doc / BC
================================================================================
Note 78.48 Pad change data 48 of 255
PATE::GEE 2 lines 26-JUN-1995 01:32
-< cmp.a1 >-
--------------------------------------------------------------------------------
CMP.A1 6/26/95 CP4-RA3 High wafer count
Speedfam
================================================================================
Note 78.49 Pad change data 49 of 255
FABSIX::E_DAWSON 8 lines 27-JUN-1995 08:49
-< apd change cmp.a2 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
cmp.a2 6/27/95 dj4-ra7 high wafer count
slow removal rate
================================================================================
Note 78.50 Pad change data 50 of 255
FABSIX::R_POIRIER 4 lines 27-JUN-1995 22:31
-< PAD CHANGE CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 6/27/95 DJ4-RA7 POOR UNIFORMITY
SPEEDFAM AND HIGH WAFER
COUNT.
================================================================================
Note 78.51 Pad change data 51 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 12 lines 4-JUL-1995 22:47
-< PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 7/4/95 FG4-RB3 Adhesive backing
was seperated in
different locations
from the polishing
pad due to possibly
being in wet idle
too long.
================================================================================
Note 78.52 Pad change data 52 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 12 lines 4-JUL-1995 22:47
-< PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 7/4/95 FG4-RB3 Adhesive backing
was seperated in
different locations
from the polishing
pad due to possibly
being in wet idle
too long.
================================================================================
Note 78.53 Pad change data 53 of 255
PATE::GEE 2 lines 10-JUL-1995 03:00
-< CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 7/9/95 FG4-RB3 Wafer broke on
Speedfam pad.
================================================================================
Note 78.54 Pad change data 54 of 255
PATE::GEE 1 line 11-JUL-1995 06:30
-< cmp.a2 >-
--------------------------------------------------------------------------------
CMP.A2 7/11/95 DJ4-RA7 Wafer broke
================================================================================
Note 78.55 Pad change data 55 of 255
PATE::GEE 1 line 16-JUL-1995 22:21
-< cmp.b1 >-
--------------------------------------------------------------------------------
CMP.B1 7/16/95 FG4-RB3 No pad on system
================================================================================
Note 78.56 Pad change data 56 of 255
PATE::GEE 3 lines 16-JUL-1995 22:22
-< cmp.a2 >-
--------------------------------------------------------------------------------
CMP.A2 7/16/95 FG4-RB3 High wafer count
================================================================================
Note 78.57 Pad change data 57 of 255
PATE::GEE 1 line 17-JUL-1995 03:19
-< cmp.a1 >-
--------------------------------------------------------------------------------
CMP.A1 7/16/95 FG4-RB3 Broke wafer
================================================================================
Note 78.58 Pad change data 58 of 255
FABSIX::R_POIRIER 3 lines 18-JUL-1995 23:29
-< CMP.A1 Pad change >-
--------------------------------------------------------------------------------
CMP.A1 7/18/95 FG4-RB3 Uniformity problems
PM also done
================================================================================
Note 78.59 Pad change data 59 of 255
FABSIX::R_POIRIER 2 lines 18-JUL-1995 23:31
-< CMP.A2 Pad change >-
--------------------------------------------------------------------------------
CMP.A1 FG4-RB3 Wafer broke
================================================================================
Note 78.60 Pad change data 60 of 255
PATE::GEE 2 lines 19-JUL-1995 01:06
-< cmp.b1 >-
--------------------------------------------------------------------------------
CMP.B1 FG4-RB3 Wafer broke
================================================================================
Note 78.61 Pad change data 61 of 255
PATE::GEE 1 line 31-JUL-1995 05:03
-< cmp.b1 >-
--------------------------------------------------------------------------------
CMP.B1 7/31/95 HM5-JP2 Pad dried out
================================================================================
Note 78.62 Pad change data 62 of 255
PATE::GEE 2 lines 31-JUL-1995 05:03
-< cmp.a2 >-
--------------------------------------------------------------------------------
CMP.A2 7/31/95 HM5-JP2 poor uniformity
================================================================================
Note 78.63 Pad change data 63 of 255
FABSIX::E_DAWSON 7 lines 1-AUG-1995 14:14
-< PAD CHANGE CMP.A1 8/1/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 8/1/95 HY5-JP1 BAD UNF
================================================================================
Note 78.64 Pad change data 64 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 3-AUG-1995 03:31
-< PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 8/3/95 backing-HL5-DA7-4 Bad Uniformity
pad-EXO680-Q
================================================================================
Note 78.65 Pad change data 65 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 3-AUG-1995 03:31
-< PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 8/3/95 backing-ES5-DA3-5 Bad Uniformity
pad-EXO-680-5
================================================================================
Note 78.66 Pad change data 66 of 255
PATE::GEE 2 lines 7-AUG-1995 02:29
-< cmp.b1 >-
--------------------------------------------------------------------------------
CMP.B1 8/7/95 backing-es5-da3-5 high wafer
pad no #'s count
================================================================================
Note 78.67 Pad change data 67 of 255
PATE::GEE 2 lines 7-AUG-1995 05:58
-< cmp.a1 >-
--------------------------------------------------------------------------------
cmp.a1 8/7/95 backing hl5-da7-4 High
pad #ex0680-q uniformity
================================================================================
Note 78.68 Pad change data 68 of 255
PATE::GEE 4 lines 9-AUG-1995 20:42
-< cmp.a2 >-
--------------------------------------------------------------------------------
cmp.a2 8/9/95 backing hl5-da7-4 monthly pm
pad ex0680-q required it
to be removed
================================================================================
Note 78.69 Pad change data 69 of 255
PATE::GEE 2 lines 10-AUG-1995 04:47
-< cmp.a2 >-
--------------------------------------------------------------------------------
cmp.a2 8/10/95 base hl5-da7-4 concave
pad ex0680-q uniformity
================================================================================
Note 78.70 Pad change data 70 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 2 lines 11-AUG-1995 20:52
-< PAD CHANGE >-
--------------------------------------------------------------------------------
CMP.A2 8/11/95 base GP5-DA7-5 PAD COUNT/
pad EX0860-J CHECKED DOWN FORCE
================================================================================
Note 78.71 Pad change data 71 of 255
PATE::GEE 2 lines 14-AUG-1995 06:23
-< cmp.a2 >-
--------------------------------------------------------------------------------
cmp.a2 8/14/95 base gp5-da7-5 Poor uniformity
pad exo860-j
================================================================================
Note 78.72 Pad change data 72 of 255
PATE::GEE 2 lines 14-AUG-1995 21:40
-< cmp.a1 >-
--------------------------------------------------------------------------------
cmp.a1 8/15/95 base gp5-da7-5 broken
pad exo860-j wafer
================================================================================
Note 78.73 Pad change data 73 of 255
PATE::GEE 4 lines 15-AUG-1995 05:25
-< cmp.a2 >-
--------------------------------------------------------------------------------
cmp.a2 8/15/95 base gp5-da7-5 pad lifting,
pad exo860-j large bubbles
under pad.
poor uniformity
================================================================================
Note 78.74 Pad change data 74 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 4 lines 15-AUG-1995 23:11
-< pad change >-
--------------------------------------------------------------------------------
CMP.A1 8/15/95 base GP5-DA1-5 Bad Uniformity
pad EX0860-J
================================================================================
Note 78.75 Pad change data 75 of 255
PATE::GEE 2 lines 16-AUG-1995 02:53
-< cmp.a2 >-
--------------------------------------------------------------------------------
cmp.a2 8/16/85 base gp5-da1-5 air bubbles
pad ex0860-j under pad
================================================================================
Note 78.76 Pad change data 76 of 255
FABSIX::E_DAWSON 7 lines 16-AUG-1995 10:53
-< pad change cmp.a2 8/16/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
wafer broke
cmp.a2 8/16/95 suba#4 &
2"il,p,v lot #ex0860-j
================================================================================
Note 78.77 Pad change data 77 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 5 lines 17-AUG-1995 04:16
-< PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL: DATE: LOT NUMBER: REASON
--------------------------------------------------------------
CMP.A1 8/17/95 base HL5-DA8B-5 Bubbles
pad EX0680-AK
================================================================================
Note 78.78 Pad change data 78 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 5 lines 17-AUG-1995 04:44
-< PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL: DATE: LOT NUMBER: REASON
--------------------------------------------------------------
CMP.A2 8/17/95 base HL5-DA8B-5 Bubbles
pad EX0680-AK
================================================================================
Note 78.79 Pad change data 79 of 255
FABSIX::E_DAWSON 7 lines 17-AUG-1995 08:51
-< PAD CHANGE CMP.A2 8/16/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 8/17/95 IC1000 LOT#DZ5-RD0 BAD UNF.
SUBA 4 LOT#FG-DA7-5
================================================================================
Note 78.80 Pad change data 80 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 5 lines 18-AUG-1995 06:30
-< PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL: DATE: LOT NUMBER: REASON
--------------------------------------------------------------
CMP.A1 8/18/95 base FG5-DA7-5 Bubbles
pad DZ5-RD0
================================================================================
Note 78.81 Pad change data 81 of 255
FABSIX::E_DAWSON 7 lines 18-AUG-1995 07:09
-< PAD CHANGE CMP.A2 8/18/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 8/18/95 CR-IC1000 LOT#DZ5-RD0 LOW RR
CR-SUBA LITE LOT# FG5-DA7-5
================================================================================
Note 78.82 Pad change data 82 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 5 lines 19-AUG-1995 02:50
-< A1 pad change >-
--------------------------------------------------------------------------------
TOOL: DATE: LOT NUMBER: REASON
--------------------------------------------------------------
CMP.A1 8/18/95 base FG5-DA7-5 bad uniformity
pad DZ5-RD0
================================================================================
Note 78.83 Pad change data 83 of 255
PATE::GEE 2 lines 21-AUG-1995 04:59
-< cmp.a2 >-
--------------------------------------------------------------------------------
CMP.A2 8/21-95 base IM5-RD8 Bubbles under
pad IG5-DA7-4 pad.
================================================================================
Note 78.84 Pad change data 84 of 255
PATE::GEE 4 lines 22-AUG-1995 03:00
-< cmp.a2 >-
--------------------------------------------------------------------------------
cmp.a2 8/22/95 base im5-rd8 poor uniformity
low removal
pad ig5-da7-4 rate
================================================================================
Note 78.85 Pad change data 85 of 255
PATE::GEE 2 lines 22-AUG-1995 22:20
-< cmp.b1 >-
--------------------------------------------------------------------------------
cmp.b1 8/22/95 base im5-rd8 poor uniformity
pad ig5-da7-4 high wafer count
================================================================================
Note 78.86 Pad change data 86 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 24-AUG-1995 06:55
-< PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A2 8/24/95 base IG5-DA7 Low removal rate
pad IM5-RD0
================================================================================
Note 78.87 Pad change data 87 of 255
FABSIX::R_POIRIER 3 lines 24-AUG-1995 21:43
-< PAD CHANGE CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 BASE IG5-DA7-4 BAD UNIFORMITY/
PAD IM5-RD8 LOW REMOVAL RATE
================================================================================
Note 78.88 Pad change data 88 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 24-AUG-1995 22:48
-< Pad Change >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.B1 8/24/95 base IG5-DA7-4 WAFERS BLEW UP
ON PAD
pad DJ5-RE2
================================================================================
Note 78.89 Pad change data 89 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 25-AUG-1995 23:31
-< PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.B1 8/25/95 base IG5-DA7-4 FAILED MQC'S
pad IM5-RD8
================================================================================
Note 78.90 Pad change data 90 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 26-AUG-1995 07:32
-< PAD CHANGE AFTER WAFER BREAKAGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.B1 8/26/95 base IG5-DA7-4 BROKEN WAFERS
pad IM5-RD8
================================================================================
Note 78.91 Pad change data 91 of 255
PATE::GEE 2 lines 27-AUG-1995 21:34
-< cmp.b1 >-
--------------------------------------------------------------------------------
cmp.b1 8/27/95 base ig5-da7-4 Broken wafer
0 pad exo860-j
================================================================================
Note 78.92 Pad change data 92 of 255
PATE::GEE 2 lines 27-AUG-1995 22:43
-< cmp.a2 >-
--------------------------------------------------------------------------------
cmp.a2 8/27/95 base fg5-da7-5 low removal rate
pad dj5-re2
================================================================================
Note 78.93 Pad change data 93 of 255
PATE::GEE 2 lines 28-AUG-1995 00:13
-< cmp.a1 >-
--------------------------------------------------------------------------------
cmp.a1 8/28/95 base fg5-da7-5 low reemoval rate
pad im5-rd8 176 wafers
================================================================================
Note 78.94 Pad change data 94 of 255
PATE::GEE 2 lines 29-AUG-1995 06:38
-< cmp.a1 >-
--------------------------------------------------------------------------------
cmp.a1 8/29/95 base fg5-da7-5 bubbles under
pad dj5-re2 pad
================================================================================
Note 78.95 Pad change data 95 of 255
PATE::GEE 3 lines 29-AUG-1995 06:39
-< cmp.a2 >-
--------------------------------------------------------------------------------
cmp.a2 8/29/95 base fg5-da7-5 bubbles under
pad dj5-re2 pad
================================================================================
Note 78.96 Pad change data 96 of 255
FABSIX::R_POIRIER 3 lines 29-AUG-1995 21:25
-< Pad change CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 8-29-95 Base FG5-DA1-5 Poor removal
Pad IM5-RD8 rate
================================================================================
Note 78.97 Pad change data 97 of 255
PATE::GEE 3 lines 30-AUG-1995 03:10
-< cmp.a1 >-
--------------------------------------------------------------------------------
cmp.a1 8/29/95 base hl5-da8b-5 Bubbles under pad
pad ex0680-ak before mqc's
could be completed
================================================================================
Note 78.98 Pad change data 98 of 255
PATE::GEE 2 lines 30-AUG-1995 07:52
-< cmp.a1 >-
--------------------------------------------------------------------------------
cmp.a1 8/29/95 pad exo08ak bubbles between
pad
================================================================================
Note 78.99 Pad change data 99 of 255
FABSIX::R_POIRIER 2 lines 30-AUG-1995 22:45
-< Pad Change CMP.B1 >-
--------------------------------------------------------------------------------
CMP.B1 8-30-95 base DH5-RD8 Broken wafers
pad FG5-DA7-5
================================================================================
Note 78.100 Pad change data 100 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 31-AUG-1995 06:43
-< PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A2 8/30/95 base HL5-DA8B-5 HIGH PAD COUNT
pad IM5-RD6
================================================================================
Note 78.101 Pad change data 101 of 255
SUBPAC::SADIN "frankly scallop, I don't give a clam!" 7 lines 31-AUG-1995 09:10
-< pad change - cmp.b1 8/31/95 >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
cmp.b1 8/31/95 base FG5-DA7-5 bad uniformity
pad DA5-RD7
================================================================================
Note 78.102 Pad change data 102 of 255
SUBPAC::CLIFFORD 7 lines 1-SEP-1995 11:09
-< PAD CHANGE ON CMP.A2 >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A2 9/1/95 SUBA IV HL5-DA8B-5 SLOW REMOVAL RATE
IC-100 IM5-RD6
================================================================================
Note 78.103 Pad change data 103 of 255
FABSIX::E_DAWSON 7 lines 1-SEP-1995 14:10
-< PAD CHANGE CMP.B1 9/1/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 9/1/95 LOT JH5-JP4 IC1000 NEW PAD
THIS IS A PRE STACKED PAD
================================================================================
Note 78.104 Pad change data 104 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 2-SEP-1995 06:16
-< PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 9/2/95 LOT JI5-JP1 Ranger out of spec
================================================================================
Note 78.105 Pad change data 105 of 255
PATE::GEE 1 line 3-SEP-1995 07:11
-< cmp.b1 >-
--------------------------------------------------------------------------------
cmp.b1 9/3/95 lot jh5-jp4 poor uniformity
================================================================================
Note 78.106 Pad change data 106 of 255
STRATA::FINN 8 lines 3-SEP-1995 18:23
-< Pad Change Data >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for Change
Cmp.A2 9/3/95 JI5-JP1 Poor removal rate
(1000 A'/ min on PMD)
Poor uniformity (12-13%)
370 wafers on Pad @ change
================================================================================
Note 78.107 Pad change data 107 of 255
FABSIX::R_POIRIER 6 lines 3-SEP-1995 21:08
-< CMP.A1 Pad Change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for Change
CMP.A1 9-3-95 JI5-JP1 Poor uniformity possibly
caused by bad conditioner.
Pad count 50 wafers
================================================================================
Note 78.108 Pad change data 108 of 255
FABSIX::R_POIRIER 4 lines 5-SEP-1995 00:28
-< Pad change CMP.A2 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for change
CMP.A2 9-5-95 JI5-JP1 Poor removal rate
276 wafers on pad.
================================================================================
Note 78.109 Pad change data 109 of 255
SUBPAC::SADIN "frankly scallop, I don't give a clam!" 7 lines 5-SEP-1995 17:32
-< pad change - cmp.b1 9.5.95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for change
CMP.B1 9-5-95 JH5-JP4 rem-rate starting to drop
754 wafers on pad.
================================================================================
Note 78.110 Pad change data 110 of 255
PATE::GEE 4 lines 6-SEP-1995 04:17
-< CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 9/5/95 BASE HL5-DA8B-5 UNIFORMITY WAS WAY OUT OF
SPEC. AFTER ENG. LOT WAS
COMPLETED. 86 WAFERS RUN
ON LEFT SPINDLE ONLY.
================================================================================
Note 78.111 Pad change data 111 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 6-SEP-1995 23:56
-< Pad change after monhtly PM completed >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 9/6/95 LOT JH5-JP2 PM Completed
================================================================================
Note 78.112 Pad change data 112 of 255
FABSIX::L_SHKOLNIKOV 9 lines 9-SEP-1995 07:31
-< >-
--------------------------------------------------------------------------------
-< Pad change eng. run>-
Entity Date Pad ID# Reason
==============================================================
CMP.A1 09.08.95 QJMR0313A,P/V/SUBA IV,32" Bad uniformity
Lot# JH5-JP4
================================================================================
Note 78.113 Pad change data 113 of 255
SUBPAC::CLIFFORD 7 lines 9-SEP-1995 15:47
-< Pad change >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A1 9/9/95 CR SUBA IV, 28" IG5-DA4-4 NON-UNIFORMITY
QJMR0313A,28",P,V IM5-RD6
================================================================================
Note 78.114 Pad change data 114 of 255
PATE::GEE 3 lines 10-SEP-1995 04:04
-< cmp.b1 >-
--------------------------------------------------------------------------------
cmp.b1 9/10/95 qjmro313a,p/v/siv. poor removal
rate, high
wafer count.1066
================================================================================
Note 78.115 Pad change data 115 of 255
FABSIX::J_ROA 18 lines 10-SEP-1995 17:16
-< cmp.a1 new pad >-
--------------------------------------------------------------------------------
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]EST_CMP.NOTE;1 >>>
-< EST_CMP Conference >-
================================================================================
Note 78.0 Pad change data for September
FABSIX::J_ROA Sunday 09/10/95
--------------------------------------------------------------------------------
( Strasbaugh)
Entity Date Pad Lot # Reason for change
CMP.A1 9/10/95 JJ5-JP2 BAD UNIFORMITY
Q CR QJMR0313Q
P/V/SUBA IV 28",II
Pad count at 30
================================================================================
Note 78.116 Pad change data 116 of 255
FABSIX::J_ROA 19 lines 10-SEP-1995 19:49
-< ANOTHER NEW PAD FOR CMP.A1 >-
--------------------------------------------------------------------------------
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]EST_CMP.NOTE;1 >>>
-< EST_CMP Conference >-
================================================================================
Note 78.0 Pad change data for September
FABSIX::J_ROA Sunday 09/10/95
--------------------------------------------------------------------------------
( Strasbaugh) **** HAND STACKED PAD ****
Entity Date Pad Lot # Reason for change
CMP.A1 9/10/95 # IM5-RD6 BAD UNIFORMITY
QJMR0313Q, 28",PV
CMP.A1 9/10/95 CR SUBA IV, 28" -LOT# IG5-DA4P-4 EXP. DATE 2/12/96
Pad count at 18
================================================================================
Note 78.117 Pad change data 117 of 255
STRATA::FINN 121 lines 10-SEP-1995 20:04
-< Pad installation/replacement checksheet >-
--------------------------------------------------------------------------------
In an effort to gather meaningfull data on pads we are requesting that
at the installation of a new pad please record the following information:
Please note there is addtional information to be filled out at the time
of this pads rteplacement. This information is located in the last half
of this form.
**************************************************************************
Tech ______ Shift ______ Date ______ Time _______
Pad # __________________ :example - QJMR0313A, P V
Lot # __________________
PreStacked _____ or Hand Stacked _____
Backing # __________
Backing Lot number ______________
Note if pad is prestacked the backing number will be included in the pads number
i.e Q CR QJMR0313a P/V / Suba IV (or SIV short hand for Suba)
Number of wafers it took to break the
new pad pad in ___________
Initial data at release to Manufacturing
Uniformity at time of release per spindle
__________ __________ __________ __________ __________
Removal Rate at time of release per spindle
__________ __________ __________ __________ __________
Range at time of change release per spindle
__________ __________ __________ __________ __________
When this pad is removed from the system please record the following:
Tech ______ Shift ______ Date ______ Time _______
Reason for change ______________
Uniformity at time of change per spindle
__________ __________ __________ __________ __________
Removal Rate at time of change per spindle
__________ __________ __________ __________ __________
Range at time of change per spindle
__________ __________ __________ __________ __________
Total number of wafers run on this pad ___________________
Total time on Pad. __________________
Number of wafers on carries at pad change
__________ __________ __________ __________ __________
At what number of wafers did the pad begin to change significantly
for the following criteria.
Uniformity ______
Removal Rate ______
Range ______
================================================================================
Note 78.118 Pad change data 118 of 255
PATE::GEE 115 lines 11-SEP-1995 05:34
-< cmp.a1 >-
--------------------------------------------------------------------------------
Bob B 9/11/95 2:00am
Tech ______ Shift ______ Date ______ Time _______
QJMR0313a P/V/Suba Speedfam
Pad # __________________
JH5-JP4
Lot # __________________
PreStacked __X___ or Hand Stacked _____
Backing # _________
Backing Lot number ______________
Note if pad is prestacked the backing number will be included in the pads number
i.e Q CR QJMR0313a P/V / Suba IV (or SIV short hand for Suba)
Number of wafers it took to break the 30
new pad pad in ___________
Initial data at release to Manufacturing
Uniformity at time of release per spindle
19.1% 17.0%
__________ __________ __________ __________ __________
Removal Rate at time of release per spindle
1000 1007
__________ __________ __________ __________ __________
Range at time of change release per spindle
__________ __________ __________ __________ __________
When this pad is removed from the system please record the following:
Tech ______ Shift ______ Date ______ Time _______
Reason for change ______________
Uniformity at time of change per spindle
__________ __________ __________ __________ __________
Removal Rate at time of change per spindle
__________ __________ __________ __________ __________
Range at time of change per spindle
__________ __________ __________ __________ __________
Total number of wafers run on this pad ___________________
Total time on Pad. __________________
Number of wafers on carries at pad change
__________ __________ __________ __________ __________
At what number of wafers did the pad begin to change significantly
for the following criteria.
Uniformity ______
Removal Rate ______
Range ______
================================================================================
Note 78.119 Pad change data 119 of 255
FABSIX::J_ROA 117 lines 11-SEP-1995 19:38
-< 1ST. TEST PAD FOR CMP.A1 >-
--------------------------------------------------------------------------------
At the installation of a new pad please record the following information:
Tech Jesus I. Roa Shift A Date 9-11-95 Time AM & PM
TOOL CMP.A1
==============
Top Pad= QJMR0313A, 28", II Lot # XE0680-AK (example - QJMR0313A, P V)
backing pad= CR SUBA IV, 28", II Lot # HL5=-DA8B-5
PreStacked or Hand Stacked X YES
Note if pad is prestacked the backing number will be included in the pads number
i.e Q CR QJMR0313a P/V / Suba IV (or SIV short hand for Suba)
Number of wafers it took to break the
new pad pad in 10 BREAK-IN WAFERS.
Initial data at release to Manufacturing
Uniformity at time of release per spindle
__________ __________ __________ __________ __________
Removal Rate at time of release per spindle
__________ __________ __________ __________ __________
Range at time of change release per spindle
__________ __________ __________ __________ __________
When this pad is removed from the system please record the following:
Tech __JESUS I. ROA Shift A Date 9-10-95 Time 4:OO PM
Reason for change BAD UNIFORMITY/RANGE
Uniformity at time of change per spindle
LEFT (16.8) 14.902%
RIGHT (16.8) 13.081%
Removal Rate at time of change per spindle
LEFT R/R 1156
RIGHT R/R 1105
Range at time of change per spindle
LEFT 1032
RIGHT 1077
Total number of wafers run on this pad = 12
Number of wafers on carries at pad change = OVER 150 WAFERS
__________ __________ __________ __________ __________
At what number of wafers did the pad begin to change significantly
for the following criteria. ( NEW PAD )
Uniformity ______
Removal Rate ______
Range ______
================================================================================
Note 78.120 Pad change data 120 of 255
FABSIX::J_ROA 116 lines 11-SEP-1995 19:51
-< 2ND PAD FOR CMP.A1 >-
--------------------------------------------------------------------------------
At the installation of a new pad please record the following information:
Tech Jesus I. Roa Shift A Date 9-11-95 Time AM & PM
TOOL CMP.A1
==============
Top Pad= QJMR0313A, 28",P,V Lot # IM5-RD6 (example - QJMR0313A, P V)
backing pad= CR SUBA IV, 28" Lot # IG5-DA4-4
PreStacked or Hand Stacked X YES
Note if pad is prestacked the backing number will be included in the pads number
i.e Q CR QJMR0313a P/V / Suba IV (or SIV short hand for Suba)
Number of wafers it took to break the
new pad pad in 10 BREAK-IN WAFERS.
Initial data at release to Manufacturing
Uniformity at time of release per spindle
__________ __________ __________ __________ __________
Removal Rate at time of release per spindle
__________ __________ __________ __________ __________
Range at time of change release per spindle
__________ __________ __________ __________ __________
When this pad is removed from the system please record the following:
Tech __JESUS I. ROA Shift A Date 9-11-95 Time
Reason for change BAD UNIFORMITY/RANGE
Uniformity at time of change per spindle
LEFT (14.8) 8.585%
RIGHT (14.8) 15.199%
Removal Rate at time of change per spindle
LEFT R/R 1095
RIGHT R/R 1134
Range at time of change per spindle
LEFT 813
RIGHT 1222
Total number of wafers run on this pad = 12
Number of wafers on carries at pad change = OVER 150 WAFERS
__________ __________ __________ __________ __________
At what number of wafers did the pad begin to change significantly
for the following criteria. ( NEW PAD )
Uniformity ______
Removal Rate ______
Range ______
================================================================================
Note 78.121 Pad change data 121 of 255
FABSIX::J_ROA 116 lines 12-SEP-1995 19:31
-< single ic1000 test >-
--------------------------------------------------------------------------------
At the installation of a new pad please record the following information:
Tech Jesus I. Roa Shift A Date 9-12-95 Time 9:00AM
TOOL CMP.A1
==============
Top Pad= QJMR0313A, 28",P,V Lot # IM5-RD6 (example - QJMR0313A, P V)
backing pad= No backing was used for this test
PreStacked or Hand Stacked X YES
Note if pad is prestacked the backing number will be included in the pads number
i.e Q CR QJMR0313a P/V / Suba IV (or SIV short hand for Suba)
Number of wafers it took to break the
new pad pad in 8 BREAK-IN WAFERS.
Initial data at release to Manufacturing
Uniformity at time of release per spindle
__________ __________ __________ __________ __________
Removal Rate at time of release per spindle
__________ __________ __________ __________ __________
Range at time of change release per spindle
__________ __________ __________ __________ __________
When this pad is removed from the system please record the following:
Tech __JESUS I. ROA Shift A Date 9-12-95 Time
Reason for change BAD UNIFORMITY/RANGE
Uniformity at time of change per spindle
LEFT (at 14.8)= 22.194% (backpress disabled)= 29.115%
RIGHT (at 14.8)= 19.207% (backpress disabled)= 26.312%
Removal Rate at time of change per spindle
at 14.8 psi backpress disabled
LEFT R/R 1105 R/R 1043
RIGHT R/R 1124 R/R 1096
Range at time of change per spindle
at 14.8 psi backpress disabled
LEFT 1552 2084
RIGHT 1747 2068
Total number of wafers run on this pad = 12
Number of wafers on carries at pad change = OVER 200 WAFERS
__________ __________ __________ __________ __________
At what number of wafers did the pad begin to change significantly
for the following criteria. ( NEW PAD )
Uniformity ______
Removal Rate ______
Range ______
================================================================================
Note 78.122 Pad change data 122 of 255
FABSIX::E_DAWSON 8 lines 13-SEP-1995 16:12
-< PAD CHANGE CMP.B1 9/13/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 9/13/95 QJMR0313A,P/V/SUBA4 32"
OD X 2"ID, 2 PAD EXCEEDED
LOT # JH5-JP4 SPEC COUNT
LOW RR
================================================================================
Note 78.123 Pad change data 123 of 255
SUBPAC::CLIFFORD 7 lines 14-SEP-1995 17:37
-< Pad Change .A1 >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A1 9/14/95 CR SUBA IV, 28" IG5-DA4-4 NON-UNIFORMITY
QJMR0313A,28",P,V IM5-RD6
================================================================================
Note 78.124 Pad change data 124 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 14-SEP-1995 21:07
-< PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A2 9/14/95 base - JE5-DA8-4 ENG. EXPER.
PAD - JC5-RE2
================================================================================
Note 78.125 Pad change data 125 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 6 lines 15-SEP-1995 04:28
-< B1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.B1 9/15/95 JJ5-JP3 PARTICLES ON PAD
================================================================================
Note 78.126 Pad change data 126 of 255
SUBPAC::CLIFFORD 7 lines 16-SEP-1995 15:42
-< PAD CHANGE .A1 >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A1 9/16/95 CR SUBA IV, 28" IG5-DA4-4 ENG EXPERIMENT
QJMR0313A,28",P,V IM5-RD6
================================================================================
Note 78.127 Pad change data 127 of 255
FABSIX::R_POIRIER 3 lines 17-SEP-1995 04:45
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 9-17-95 CR SUBA IV,28"II JE5-DA8-4 ENG EXP.
QJMR0313A,28"P,V JC5-RE2
================================================================================
Note 78.128 Pad change data 128 of 255
FABSIX::R_POIRIER 4 lines 18-SEP-1995 03:34
-< PAD CHANGE CMP.B1 >-
--------------------------------------------------------------------------------
CMP.B1 9-18-95 QJMR0131A,P,V JJ5-JP3 HIGH WAFER
32"ODX2ID,II COUNT(1243)
AND POOR
REMOVAL RATE
================================================================================
Note 78.129 Pad change data 129 of 255
SUBPAC::SADIN "frankly scallop, I don't give a clam" 16 lines 18-SEP-1995 09:29
-< CMP.B1 PAD CHANGE 09/18/95 >-
--------------------------------------------------------------------------------
Tech _J_SADIN_ Shift __A___ Date _9-18-95_ Time _09:30__
Pad # Q CR QJMR0313A P/V/SIV
Lot # JJ5-JP3
PreStacked _YES_
Backing # _SIV_
mqcs not run yet as machine is still down to equipment eng.
================================================================================
Note 78.130 Pad change data 130 of 255
FABSIX::R_POIRIER 5 lines 18-SEP-1995 21:26
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 9-18-95 QJMR0313A,P/V/SIV JJ5-JP3 FAILED
32" (SPEED-FAM) MQC'S
POOR
UNIFORMITY
================================================================================
Note 78.131 Pad change data 131 of 255
FABSIX::R_POIRIER 3 lines 19-SEP-1995 00:26
-< PAD CHANGE CMP.B1 >-
--------------------------------------------------------------------------------
CMP.B1 9-18-95 QJMR0313A,P/V/SIV FAILED MQC'S
#JJ5-JP3 POOR UNIFORMITY
================================================================================
Note 78.132 Pad change data 132 of 255
FABSIX::R_POIRIER 3 lines 19-SEP-1995 05:27
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 9-19-95 QJMR0313A,P/V/SUBA FAILED MQCS
IV,28",II JH5-JP1 POOR UNIFORMITY
================================================================================
Note 78.133 Pad change data 133 of 255
PATE::GEE 3 lines 20-SEP-1995 05:15
-< cmp.a1 >-
--------------------------------------------------------------------------------
cmp.a1 9-20-95 qjmr0313a,p/v/suba IV Failed mqc's
28",II #jj5-jp2 poor uniformity
14.6% and up
================================================================================
Note 78.134 Pad change data 134 of 255
FABSIX::L_SHKOLNIKOV 12 lines 20-SEP-1995 23:40
-< Pad Change >-
--------------------------------------------------------------------------------
**************************************************************************
Tech Leon S. Shift d-shift Date 09.20.95 Time 23.00__
Pad # QJMR313A, P/V/SIV
Lot # JJ5 - JP3
PreStacked _*_
Reason: Broken wafer
================================================================================
Note 78.135 Pad change data 135 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 6 lines 21-SEP-1995 03:25
-< B1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.B1 9/21/95 JJ5-JP3 FAILED MQC'S
================================================================================
Note 78.136 Pad change data 136 of 255
FABSIX::L_SHKOLNIKOV 3 lines 21-SEP-1995 04:42
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 9-21-95 QJMR0313A,P/V/SUBA ENG. EXP
IV,28",II JJ5-JP2
================================================================================
Note 78.137 Pad change data 137 of 255
FABSIX::E_DAWSON 7 lines 21-SEP-1995 17:34
-< CMP.B1 PAD CHANGE 9/21/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
cmp.b1 9/21/95 Q CR QJMR0313A,P/V/SUBA WAFER BROKE
VI,32"OD X 2'ID,II ON PAD
LOT# JH5-JP4
================================================================================
Note 78.138 Pad change data 138 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 6 lines 22-SEP-1995 03:15
-< A1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A1 9/22/95 JE5-DA8-4 PAD DRIED UP
================================================================================
Note 78.139 Pad change data 139 of 255
FABSIX::L_SHKOLNIKOV 7 lines 22-SEP-1995 05:42
-< CMP.B1 Pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 9/22/95 QJMR0313A,P/V/SUBA WAFER BROKE
IV,32"ODx2"ID,II ON PAD
LOT# JV5 - JP4
================================================================================
Note 78.140 Pad change data 140 of 255
SUBPAC::CLIFFORD 7 lines 22-SEP-1995 10:56
-< PAD CHANGE .A2 >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A2 9/22/95 CR SUBA IV, 28"II JE5-DA8-4 BAD UNIFORMITY
QJMR0313A,28",P,V JC5-RE2
================================================================================
Note 78.141 Pad change data 141 of 255
FABSIX::E_DAWSON 7 lines 22-SEP-1995 16:20
-< PAD CHANGE CMP.B1 9/22/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 9/22/95 Q CR QJMR0313A,P/V BAD UNF. SALAD BOWL
SUBA IV,32"ODx2"ID,II
LOT #JV5-JP1
================================================================================
Note 78.142 Pad change data 142 of 255
FABSIX::L_SHKOLNIKOV 10 lines 23-SEP-1995 05:34
-< new pad on A1 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 9/23/95 QJMR0313A,P/V/SIV, WAFER BROKE
32"OD X 2"ID,II ON PAD
LOT# JJ5-JP3
back
SUBA IV,28"II
LOT # JE5-DA8-4
================================================================================
Note 78.143 Pad change data 143 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 6 lines 23-SEP-1995 08:48
-< B1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.B1 9/23/95 JV5-JP1 UNIF/PARTICLES
================================================================================
Note 78.144 Pad change data 144 of 255
FABSIX::E_DAWSON 8 lines 23-SEP-1995 09:22
-< PAD CHANGE CMP.B1 9/23/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 9/23/95 Q CR QJMR0313A,P/V
SUBA IV,32"ODX2'ID,II
LOT #JV5-JP2
================================================================================
Note 78.145 Pad change data 145 of 255
SUBPAC::CLIFFORD 8 lines 23-SEP-1995 11:51
-< .A2 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A2 9/23/95 CR SUBA IV, 28"II JE5-DA8-4 BAD UNIFORMITY
QJMR0313A,P/V JC5-RE2
SUBA IV, 32"ODx2"ID,II JV5-JP2
================================================================================
Note 78.146 Pad change data 146 of 255
FABSIX::J_ROA 25 lines 24-SEP-1995 11:32
-< SPEEDFAM/SUBA COMBINATION >-
--------------------------------------------------------------------------------
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]EST_CMP.NOTE;1 >>>
-< EST_CMP Conference >-
================================================================================
Note 78.0 Pad change data for September
FABSIX::J_ROA Sunday 09/24/95
--------------------------------------------------------------------------------
( Strasbaugh)
Note: A Suba pad was installed first and then a Speedfam pad was
placed right on top of the Suba to try to improve uniformity.
Entity Date Pad Lot # Reason for change
CMP.A1 9/10/95 CR SUBA IV,28"II BAD UNIFORMITY
LOT # JE5-DA8-4
CMP.A1 9/10/95 Q CR QJMR0313A,P/V
SUBA IV, 32" ODx2" ID,II LOT #JV5-JP1
Pad count at 200
================================================================================
Note 78.147 Pad change data 147 of 255
FABSIX::L_CEDRONE 8 lines 24-SEP-1995 16:25
-< cmp.a1 9/24/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot # Reason for change
cmp.a1 9/24/95 jj5-jp2 annual pm completed
q cr qjmr0313a,p/v
comments-
2 prestacked pads of same lot number installed on machine.
================================================================================
Note 78.148 Pad change data 148 of 255
PATE::GEE 2 lines 26-SEP-1995 01:05
-< cmp.a1 >-
--------------------------------------------------------------------------------
cmp.a1 9/26/95 bottom jv5-jp1 high pad count 342
top je5-da8-4 poor uniformity
================================================================================
Note 78.149 Pad change data 149 of 255
PATE::GEE 1 line 26-SEP-1995 01:06
-< cmp.b1 >-
--------------------------------------------------------------------------------
cmp.b1 9/26/95 jv5-jp1 Down for repair
================================================================================
Note 78.150 Pad change data 150 of 255
SUBPAC::SADIN "frankly scallop, I don't give a clam" 14 lines 26-SEP-1995 11:11
-< CMP.B1 PAD CHANGE 09/26/95 >-
--------------------------------------------------------------------------------
Tech _J_SADIN_ Shift __A___ Date _9-26-95_ Time _10:30am__
bottom pad# = Q CR QJMR0313A,P/V SUBA IV, II lot# JV5-JP1
top pad# = Q CR QJMR0313A P/V SUBA IV, II lot# JV5-JP4
both pads prestacked.
this is the third pad change for this machine. the last change resulted
in mqcs with 11% non-uniformity and concave difference maps.
jim
================================================================================
Note 78.151 Pad change data 151 of 255
SUBPAC::SADIN "frankly scallop, I don't give a clam" 14 lines 26-SEP-1995 19:46
--------------------------------------------------------------------------------
Tech _J_SADIN_ Shift __A___ Date _9-27-95_ Time _2pm__
machine stacked pad # Q CR QJMR0313A,P/V SUBA IV,II lot# JV5-JP2
Uniformity on heads 1,2,3 approx 5%. Uniformity on heads 4,5 was up
at 10%, but product looked ok so we're running it with engineering's
blessing.
jim
================================================================================
Note 78.152 Pad change data 152 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 27-SEP-1995 04:03
-< A1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A1 9/27/95 (2) JV5-JP3 ENG. TEST, READY
FOR PRODUCTION.
================================================================================
Note 78.153 Pad change data 153 of 255
FABSIX::L_SHKOLNIKOV 7 lines 27-SEP-1995 05:44
-< B1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date(TIME) Pad Lot Reason for Change
====================================================================
CMP.B1 9/27/95 Q CR QJMR0313A,P/V/SUBA WAFER BROKE
(SPEEDFAM) 5:00 AM IV,32"OD X 2'ID,II ON PAD
LOT# JV5-JP
================================================================================
Note 78.154 Pad change data 154 of 255
SUBPAC::CLIFFORD 11 lines 27-SEP-1995 13:18
-< PAD CHANGE .A2 >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A2 9/27/95 BAD UNIFORMITY
QJMR0313A,P/V JJ5-JP2
p/v/ SUBA IV, 28",II
QJMR0313A, P/V
SUBA IV,32"ODX2"ID,II
JV5-JP3
================================================================================
Note 78.155 Pad change data 155 of 255
SUBPAC::SADIN "frankly scallop, I don't give a clam" 13 lines 27-SEP-1995 13:43
-< PAD CHANGE CMP.A1 09/27/95 >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A1 9/27/95 wafer crash on pad
qjmr0313a,p/v
JJ5-JP2
QJMR0313A,P/V
JJ5-JP2
jim
================================================================================
Note 78.156 Pad change data 156 of 255
SUBPAC::SADIN "frankly scallop, I don't give a clam" 11 lines 27-SEP-1995 15:47
-< CMP.A1 PAD CHANGE 09/27/95 >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A1 9/27/95 wafer crash on pad
QJMR0313A,P/V
JV5-JP3
QJMR0313A,P/V
JJ5-JP2
================================================================================
Note 78.157 Pad change data 157 of 255
FABSIX::E_DAWSON 8 lines 27-SEP-1995 19:30
-< PAD CHANGE CMP.A1 9/27/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
cmp.a1 9/27/95 q cr qjmr0313a,p/v wafers kept
suba iv,32"odx2"id,II slipping
2 pads from the same lot were lot #jv5-jp2 out
put on this machine...
================================================================================
Note 78.158 Pad change data 158 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 27-SEP-1995 23:57
-< A1 pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 9/27/95 q cr qjmr0313a,p/v Wafers broke
suba iv,32"odx2"id,II on pad
2 pads from the same lot were lot #jv5-jp2
put on this machine...
================================================================================
Note 78.159 Pad change data 159 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 27-SEP-1995 23:58
-< Another A1 pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 9/27/95 q cr qjmr0313a,p/v Wafers broke
suba iv,32"odx2"id,II on pad
lot #jv5-jp2
One pre-stacked only this time
================================================================================
Note 78.160 Pad change data 160 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 28-SEP-1995 09:10
-< A1 pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 9/28/95 q cr qjmr0313a,p/v Wafers broke
suba iv,32"odx2"id,II on pad
lot #jv5-jp2
One pre-stacked only this time
================================================================================
Note 78.161 Pad change data 161 of 255
FABSIX::E_DAWSON 9 lines 28-SEP-1995 15:22
-< PAD CHANGE CMP.B1 9/27/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 9/28/95 1ST PAD= CR SUBA IV,32"ODX2"ID
2ND PAD= QJMR0313A,32"ODX2"ID
P,NON-CR II
LOT# JJ5-RE1
NO PAD ON .B1
================================================================================
Note 78.162 Pad change data 162 of 255
FABSIX::E_DAWSON 12 lines 28-SEP-1995 15:28
-< CMP.A2 PAD CHANGE 9/28/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 9/28/95 1ST PAD= CR SUBA IV,28"II
LOT #JE5-DA6-5
2ND PAD= Q CR QJMR0313A,P/V
SUBA IV,32"ODX2'ID,II
LOT #JV5-JP2
PAD RR SLOW
290 WAFER
COUNT
================================================================================
Note 78.163 Pad change data 163 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 11 lines 29-SEP-1995 05:06
-< A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 9/28/95 1ST PAD= (white) PAD RR SLOW
JE5-DA6-5 PAD COUNT
2ND PAD= (pre-stacked)
LOT #JV5-JP2
================================================================================
Note 78.164 Pad change data 164 of 255
FABSIX::L_SHKOLNIKOV 7 lines 29-SEP-1995 06:11
-< Bad Pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 9/29/95 Q CR QJMR0313A, Failed MQC
P/V/SUBA IV,32"OD Particles on pad
LOT# JV5-JP2
================================================================================
Note 78.165 Pad change data 165 of 255
FABSIX::E_DAWSON 9 lines 29-SEP-1995 13:19
-< PAD CHANGE CMP.A2 9/29/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 9/28/95 1ST PAD= CR SUBA IV,28"II WAFER BROKE
LOT #JE5-DA6-5 ON TABLE
2ND PAD= Q CR QJMR0313A,P/V
SUBA IV,32"ODX2"ID,II
LOT # JV5-JP2
================================================================================
Note 78.166 Pad change data 166 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 11 lines 30-SEP-1995 05:18
-< B1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 9/30/95 Bottom - JE5-DA6-5 WAFERS BROKE ON PAD
Top - JJ5-RE1
================================================================================
Note 78.167 Pad change data 167 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 13 lines 30-SEP-1995 05:21
-< A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 9/30/95 1ST PAD= (white) WAFERS BROKE ON PAD
JE5-DA6-5
2ND PAD= (white)
JE5-DA6-5
Top pad = JJ5-RE1
================================================================================
Note 78.168 Pad change data 168 of 255
FABSIX::E_DAWSON 9 lines 30-SEP-1995 10:28
-< PAD CHANGE CMP.A2 9/30/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 9/30/95 PAD #1= CR SUBA IV,28",II WAFER BROKE ON
LOT#JE5-DA6-5 PAD
PAD #2= Q CR QJMR0313A,P/V
SUBA VI,32"ODx2"ID,II
LOT #JV5-JP1
================================================================================
Note 78.169 Pad change data 169 of 255
SUBPAC::CLIFFORD 13 lines 30-SEP-1995 19:17
-< A1 pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 9/30/95 1ST PAD= (white) Low removal rates
JE5-DA6-5
2ND PAD= (white)
JE5-DA6-5
Top pad = JJ5-RE1
================================================================================
Note 78.170 Pad change data 170 of 255
FABSIX::R_POIRIER 6 lines 30-SEP-1995 22:42
-< CMP.A2 PAD CHANGE >-
--------------------------------------------------------------------------------
CMP.A2 9/30/95 PAD #1 CR SUBA IV, 32" POOR REMOVAL RATE
LOT#JE5-DA6-5 WAFER COUNT = 154
PAD #2 CR QJMR0313A,P/V
SUBA IV,32"
LOT#JV5-JP1
================================================================================
Note 78.171 Pad change data 171 of 255
FABSIX::R_POIRIER 6 lines 1-OCT-1995 07:35
-< PAD CHANGE CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 9-30-95 PAD#1 CR SUBA IV, 32" WAFER BROKE ON PAD
LOT#JE5-DA6-5 WAFER COUNT = 114
PAD#2 CR QJMR0313A,P/V
SUBS IV, 32"
LOT#JV5-JP1
================================================================================
Note 78.172 Pad change data 172 of 255
FABSIX::R_POIRIER 6 lines 2-OCT-1995 06:55
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 10-1-95 PAD#1 CR SUBA IV, 32" POOR UNIFORMITY
LOT#JE5-DA6-5 WAFER COUNT = 328
PAD#2 CR QJMR0313A,P/V
SUBA IV, 32"
LOT#JV5-JP1
================================================================================
Note 78.173 Pad change data 173 of 255
FABSIX::R_POIRIER 4 lines 3-OCT-1995 06:25
-< PAD CHANGE-CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 10-03-95 CR QJMR0313A,P/V WAFER BROKE ON
SUBA IV,32"ODX2"ID,II TABLE
LOT#JV5-JP1
================================================================================
Note 78.174 Pad change data 174 of 255
FABSIX::R_POIRIER 4 lines 4-OCT-1995 00:43
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A1 10/04/95 CR QJMRO313A,P/II POOR UNIFORMITY
SUBA LITE,28" II
LOT#KL5-JP5
================================================================================
Note 78.175 Pad change data 175 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 12 lines 4-OCT-1995 05:38
-< A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 10/4/95 PAD #1= Q CR QJMR0313A,P/V WAFER BROKE
SUBA VI,32"ODx2"ID,II ON PAD
LOT#JV5-JP5
PAD #2= Q CR QJMR0313A,P/V
SUBA VI,32"ODx2"ID,II
LOT#JV5-JP5
================================================================================
Note 78.176 Pad change data 176 of 255
SUBPAC::SADIN "frankly scallop, I don't give a clam" 14 lines 4-OCT-1995 08:55
-< A1 PAD CHANGE 10/4/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 10/4/95 PAD#1- Q CR QJMR0313A,P/V BROKE WAFER
SUBAIV, 32"ODX2"ID,II
LOT#JV5-JP5
PAD#2- Q CR QJMR0313A,P/V
SUBAIV, 32"ODX2"ID,II
LOT#JV5-JP5
JIM
================================================================================
Note 78.177 Pad change data 177 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 5-OCT-1995 01:22
-< B1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 10/4/95 Q CR QJMR0313A,P/V Bad Unif.
SUBAIV, 32"ODX2"ID,II
LOT#JV5-JP5
================================================================================
Note 78.178 Pad change data 178 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 5-OCT-1995 01:23
-< B1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 10/5/95 Q CR QJMR0313A,P/V Particles
SUBAIV, 32"ODX2"ID,II
LOT#JV5-JP5
================================================================================
Note 78.179 Pad change data 179 of 255
FABSIX::L_SHKOLNIKOV 11 lines 5-OCT-1995 02:40
-< A2 AGAIN A2 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 10/05/95 #1 Q CR QJMR0313A,P/V/SUBA WAFER BROKE
(top) VI,32"OD X 2'ID,II ON PAD
LOT# JV5-JP5
#2
(bottom) CR QJMR0313A,P/II/S -IV
LOT # KL5-JP2
================================================================================
Note 78.180 Pad change data 180 of 255
FABSIX::E_DAWSON 8 lines 5-OCT-1995 10:14
-< PAD CHANGE CMP.A2 10/5/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 10/5/95 PRE STACKED STRASBAUGH BAD UNF.
LOT #KO5-JP1
SUBA VI
LOT # KG5-DA4-5
================================================================================
Note 78.181 Pad change data 181 of 255
SUBPAC::LANDRY 9 lines 5-OCT-1995 12:06
-< B1 Pad Change Data >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 10/5/95 Q CR QJMR0313A,P/II Particles/Scratches
S-LITE, 32"ODX2"ID,II
LOT# KL5-JP7
Expiration Date 3/29/96
================================================================================
Note 78.182 Pad change data 182 of 255
FABSIX::E_DAWSON 7 lines 5-OCT-1995 13:21
-< PAD CHANGE CMP.A2 10/5/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 10/5/95 SUBA IV LOT#KG5-DA4-5 BROKE WAFER DURING
PRE-STACKED SPEEDFAM POLISH
LOT #JV5-JP5
================================================================================
Note 78.183 Pad change data 183 of 255
FABSIX::E_DAWSON 7 lines 5-OCT-1995 18:16
-< CMP.A1 PAD CHANGED 10/5/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 10/5/95 SUBA IV LOT# KG5-DA4-5 LOW REMOVAL RATE
STRAS. PRE STACKED
LOT #KL5-JP2
================================================================================
Note 78.184 Pad change data 184 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 5-OCT-1995 22:19
-< A2 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 10/5/95 SUBA IV LOT# KG5-DA4-5 WAFER BROKE ON
STRAS. PRE STACKED PAD ON C SHIFT
LOT #KL5-JP2
================================================================================
Note 78.186 Pad change data 186 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 6-OCT-1995 06:56
-< A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 10/6/95 SUBA IV LOT# KG5-DA4-5 WAFER BROKE ON
STRAS. PRE STACKED PAD
LOT #KL5-JP2
================================================================================
Note 78.187 Pad change data 187 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 6-OCT-1995 06:57
-< B1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 10/6/95 SUBA IV LOT# KG5-DA4-5 PARTICLES AND
STRAS. PRE STACKED UNIFORMITY
LOT #KO5-JP1
================================================================================
Note 78.188 Pad change data 188 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 7 lines 6-OCT-1995 06:59
-< A2 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 10/6/95 SUBA IV LOT# KG5-DA4-5 WAFER BROKE ON
STRAS. PRE STACKED PAD
LOT #KL5-JP2
================================================================================
Note 78.189 Pad change data 189 of 255
FABSIX::L_SHKOLNIKOV 9 lines 7-OCT-1995 07:01
-< A1-PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 10/07/95 TOP CR QJMR0313A,P/II/S-IV Bubbles under
28",V LOT# KL5-JP2 pad.
Wafer count 240
BOTTOM CR SUBA IV,28"II
LOT# KG5-DA4-5
================================================================================
Note 78.190 Pad change data 190 of 255
FABSIX::E_DAWSON 7 lines 7-OCT-1995 09:33
-< PAD CHANGE CMP.A2 10/7/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 10/7/95 SUBA IV (no lot #) BUBBLES/LOW RR
STRAS. PRE STACKED
LOT #KL5-JP2
================================================================================
Note 78.191 Pad change data 191 of 255
FABSIX::R_POIRIER 5 lines 7-OCT-1995 23:16
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
CM.A2 10-7-95 SUBA IV,28"II BUBBLES ON PAD
LOT# KG5-DA4-5 148 WAFERS ON PAD
CR QJMR0313A,P/II/S-IV
28",V
LOT# KL5-JP2
================================================================================
Note 78.192 Pad change data 192 of 255
FABSIX::R_POIRIER 6 lines 8-OCT-1995 05:07
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 10-7-95 CR SUBA IV,28"II FAILS MQC'S - POOR
LOT# KG5-DA4-5 RANGE AND HIGH
CR QJMR0313A,P/II/S-IV PARTICLE COUNT
28",V
LOT# KL5-JP1
================================================================================
Note 78.194 Pad change data 194 of 255
SUBPAC::SADIN "frankly scallop, I don't give a clam!" 9 lines 8-OCT-1995 19:37
-< CMP.B1 PAD CHANGE 10/08/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 10/08/95 SUBA IV LOT# KG5-DA4-5 440WFRS
STRAS PRE STACK
LOT# KL5-JP2
================================================================================
Note 78.195 Pad change data 195 of 255
FABSIX::R_POIRIER 4 lines 9-OCT-1995 05:30
-< PAD CHANGE CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 10/08/95 CR SUBA IV,28"II POOR UNIFORMITY
LOT# KG5-DA4-5 86 WAFERS
CR QJMR0313A,P/II/S-IV
28",V LOT# KL5-JP1
================================================================================
Note 78.196 Pad change data 196 of 255
FABSIX::B_FINN 11 lines 10-OCT-1995 11:55
-< pad change >-
--------------------------------------------------------------------------------
Cmp.B1 10/10/95 Q CR QJMR0313A, P/II/S-IV
32" ODX2"ID,V
LOT #KL5-JP2
REASON:
Running test to isolate house slurry line
================================================================================
Note 78.197 Pad change data 197 of 255
FABSIX::L_CEDRONE 8 lines 10-OCT-1995 16:09
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 10/10/95 Q CR QJMR0313A,P/II/S-IV
28",V
LOT # KL5-JP1
CR SUBA IV,28"II
LOT# KG5-DA4-5
EXP. DATE 03-29-96
================================================================================
Note 78.198 Pad change data 198 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 11-OCT-1995 23:18
-< A1 PAD CHANGE ON C SHIFT >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 10/11/95 SUBA IV LOT# KG5-DA4-5 HIGH PAD COUNT
STRAS PRE STACK
LOT# KL5-JP1
================================================================================
Note 78.199 Pad change data 199 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 11-OCT-1995 23:18
-< A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 10/11/95 SUBA IV LOT# KG5-DA4-5 BAD UNIF.
STRAS PRE STACK
LOT# KL5-JP1
================================================================================
Note 78.200 Pad change data 200 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 9 lines 12-OCT-1995 04:53
-< A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A1 10/12/95 SUBA IV LOT# JE5-DA6-5 WAFERS BROKE ON
STRAS PRE STACK THE PAD
LOT# KL5-JP1
================================================================================
Note 78.201 Pad change data 201 of 255
SUBPAC::CLIFFORD 9 lines 12-OCT-1995 08:40
-< .A2 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A2 10/12/95 CR SUBA IV, 28"II BREAKY WAFER
JE5-DA6-5
Q CR QJMRO313A,P/II/S-IV 28",V
KL5-JP1
================================================================================
Note 78.202 Pad change data 202 of 255
SUBPAC::CLIFFORD 9 lines 12-OCT-1995 08:43
-< .A1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A1 10/12/95 CR SUBA IV, 28"II BREAKY WAFER
JE5-DA6-5
Q CR QJMRO313A,P/II/S-IV 28",V
KL5-JP1
================================================================================
Note 78.203 Pad change data 203 of 255
SUBPAC::CLIFFORD 9 lines 12-OCT-1995 08:44
-< .B1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.B1 10/12/95 PARTICLES
Q CR QJMRO313A,P/II/S-IV 32"ODx2"ID,V
KL5-JP4
================================================================================
Note 78.204 Pad change data 204 of 255
FABSIX::E_DAWSON 7 lines 12-OCT-1995 12:52
-< PAD CHANGE CMP.B1 10/11/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
cmp.b1 10/11/95 suba iv lot #kg5-da4-5 bad unf.
ic1000# jj5-re1
================================================================================
Note 78.205 Pad change data 205 of 255
FABSIX::E_DAWSON 7 lines 12-OCT-1995 13:12
-< PAD CHANGE CMP.A2 10/11/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
cmp.a2 10/12/95 suba iv lot # kg5-da4-5 bad
ic1000 lot#jj5-re8 unf.
this is a hand stacked pad with only two pads on .a2
================================================================================
Note 78.206 Pad change data 206 of 255
SUBPAC::CLIFFORD 11 lines 12-OCT-1995 16:42
-< .A1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.a1 10/12/95 BREAKAGE
Q CR QJMRO313A,P/II/S-IV 28",V
KL5-JP4
CR SUBA IV,32"ODX2"ID KG5-DA4-5
================================================================================
Note 78.207 Pad change data 207 of 255
SUBPAC::CLIFFORD 11 lines 12-OCT-1995 16:45
-< PAD CHANGE CMP.A2 10/11/95 >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.a2 10/12/95 SUBA IV LOT# KG5-DA4-5 BAD UNF.
MACHINE STACKED SPEEDFAM PAD
LOT #KL5-JP4
================================================================================
Note 78.208 Pad change data 208 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 11 lines 13-OCT-1995 03:41
-< B1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.B1 10/12/95 SUBA IV LOT# KG5-DA4-5 BAD UNF.
MACHINE STACKED SPEEDFAM PAD
LOT #KL5-JP4
================================================================================
Note 78.209 Pad change data 209 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 11 lines 13-OCT-1995 03:42
-< B1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.B1 10/13/95 SUBA IV LOT# KG5-DA4-5 BAD UNF.
MACHINE STACKED SPEEDFAM PAD
LOT #KL5-JP4
================================================================================
Note 78.210 Pad change data 210 of 255
SUBPAC::CLIFFORD 11 lines 13-OCT-1995 11:59
-< .A1 pad change >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.a1 10/13/95 Uniformity
Q CR QJMRO313A,P/II/S-IV 28",V
KL5-JP1
CR SUBA IV,32"ODX2"ID KG5-DA4-5
================================================================================
Note 78.211 Pad change data 211 of 255
FABSIX::E_DAWSON 7 lines 13-OCT-1995 13:15
-< PAD CHANGE CMP.A1 10/13/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
cmp.a1 10/13/95 suba4 lot #kg5-da4-5 wafers crashed
mach. stacked stras.
lot #kl5-jp1
================================================================================
Note 78.212 Pad change data 212 of 255
FABSIX::L_SHKOLNIKOV 10 lines 14-OCT-1995 00:35
-< A2 pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 10/14/95 Q CR QJMR0313A,P/II/S-IV HIGH RANGE
28",V
LOT# KL5-JP1
SUBA IV, 32"
LOT# KG5-DA4-5
================================================================================
Note 78.213 Pad change data 213 of 255
FABSIX::R_POIRIER 7 lines 14-OCT-1995 22:22
-< PAD CHANGE. CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 10-14-95 CR SUBA IV, 32"OD2"ID, HIGH RANGE
II, LOT# KG5-DA4-5 LOW REMOVAL
RATE
Q CR QJMR0313A,P/II/
S-IV 28",V
LOT# KL5-JP1
================================================================================
Note 78.214 Pad change data 214 of 255
FABSIX::B_FINN 6 lines 15-OCT-1995 10:04
-< PAD CHANGE >-
--------------------------------------------------------------------------------
CMP.A1 10-15-95 ic 1000 unavailable reason: broken wafer
CR SUBA IV 32"ODX2"ID,
LOT#KG5-DA4-5
EXP: DATE 4/2/96
================================================================================
Note 78.215 Pad change data 215 of 255
FABSIX::L_CEDRONE 10 lines 15-OCT-1995 11:25
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
cmp.a2 10-15-95 CR SUBA IV,32"ODX2"1D,
II ,LOT#KG5-DA4-5
EXP. DATE 04-02-96
CMP.A2 10-15-95 Q CR QJMR0313A,P/II/S-IV
32"ODX2"ID,V
LOT # KL5-JP4
================================================================================
Note 78.216 Pad change data 216 of 255
SUBPAC::SADIN "frankly scallop, I don't give a clam!" 7 lines 15-OCT-1995 17:20
-< CMP.B1 pad change >-
--------------------------------------------------------------------------------
CMP.B1 10-15-95 Q CR QJMR0313A,P/II/S-IV reason: bad unif
32"ODx2"ID,V
LOT# KL5-JP4
================================================================================
Note 78.217 Pad change data 217 of 255
FABSIX::R_POIRIER 6 lines 16-OCT-1995 00:35
-< PAD CHANGE CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 10-16-95 CR SUBA IV,32"ODX2"ID, WAFER CRASHED
II, LOT# KG5-DA4-5 ON PAD.
Q CR QJMR0313A,P/II/S-IV
32"ODX2"ID
LOT# KL5-JP4
================================================================================
Note 78.218 Pad change data 218 of 255
FABSIX::B_FINN 13 lines 16-OCT-1995 10:26
-< ID OD PAD >-
--------------------------------------------------------------------------------
CMP.A1 10-16-95 CR SUBA IV, 32"ODX2"ID,II, ENGINEERING TESTS
LOT# KG5-DA4-5
EXP. DATE 04-02-96
CUT DOWN FOR STRASBAUGH
QJMR0313A, 28",
CUT DOWN TO 8"ID 20"OD
P, NON-CR II
LOT# JJ5-RE8
================================================================================
Note 78.219 Pad change data 219 of 255
FABSIX::R_POIRIER 7 lines 17-OCT-1995 02:33
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 CR SUBA IV,32"ODX2",II HIGH WAFER COUNT
LOT# FX5-DA2-4 (362)
Q CR QJMR0313A,P/II/S-IV
32"ODX2"ID,V
LOT# KL5-JP4
================================================================================
Note 78.220 Pad change data 220 of 255
FABSIX::L_SHKOLNIKOV 9 lines 18-OCT-1995 07:19
-< A2 - Pad change. >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 10/18/95 TOP CR QJMR0313A,P/II/ Bad unif.
SUBA IV, LOT# LC5-JP2
BOTTOM CR SUBA IV,32"II
LOT# FX5-DA2-4
================================================================================
Note 78.221 Pad change data 221 of 255
SUBPAC::SADIN "Freedom isn't free." 17 lines 18-OCT-1995 15:04
-< pad change - CMP.B1 and CMP.A2 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 10/18/95 CR QJMR0313A,P/II/S-IV old pad worn out
32"ODx2"ID,V @800+ wafers
LOT# KL5-JP4
CMP.A2 10/18/95 TOP CR QJMR0313A,P/II/S-IV broken wafer
28",II
LOT# LC5-JP3
BOTTOM CR SUBA-IV,32"ODx2",II broken wafer
LOT# FX5-DA2-4
EXP: 04-02-96
================================================================================
Note 78.222 Pad change data 222 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 14 lines 19-OCT-1995 06:45
-< A2 pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 10/19/95 TOP CR QJMR0313A,P/II/S-IV broken wafer
28",II
LOT# LC5-JP2
BOTTOM CR SUBA-IV,32"ODx2",II
LOT# FX5-DA2-4
EXP: 04-02-96
================================================================================
Note 78.223 Pad change data 223 of 255
SUBPAC::CLIFFORD 11 lines 19-OCT-1995 10:15
-< .A2 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.a2 10/19/95 broke wafers
Q CR QJMRO313A,P/II/SUBA LITE,28"II
KL5-JP5
CR SUBA IV,32"ODX2"II FX5-DA2-5
================================================================================
Note 78.224 Pad change data 224 of 255
FABSIX::L_SHKOLNIKOV 18 lines 20-OCT-1995 02:06
-< .A1.A2 CHANGE change... >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 10/19/95 top CR QJMR0313A,P/II ENGINEERING TESTS
SUBA IV,28"
LOT# LC5-JP3
bottom CR SUBA IV,28"II
LOT# JC5-DA4-5
======================================================================
CMP.A2 10/19/95 top CR QJMR313A,P/II BAD UNIFORMITY
SUBA IV,28
LOT# LC5-JP3
bottom CR SUBA IV,28"II
LOT# JC5-DA4-5
================================================================================
Note 78.225 Pad change data 225 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 11 lines 20-OCT-1995 08:43
-< A1 pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
=====================================================================
CMP.A1 10/20/95 top CR QJMR0313A,P/II wafer broke on pad
SUBA IV,28" after table stalled
LOT# LC5-JP3
bottom CR SUBA IV,28"II
LOT# JC5-DA4-5
================================================================================
Note 78.226 Pad change data 226 of 255
FABSIX::L_SHKOLNIKOV 10 lines 21-OCT-1995 07:58
-< a2 pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 10/20/95 TOP CR QJMR0313A,P/II Wafer broke on pad
SUBA IV, 28"
LOT# LC5-JP5
BOTTOM CR SUBA IV,28"II
LOT# JC5-DA4-5
================================================================================
Note 78.228 Pad change data 228 of 255
SUBPAC::BODENSIECK 12 lines 20-OCT-1995 19:18
-< Pad Change CMP.A1 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
=====================================================================
CMP.A1 10/20/95 top CR QJMR0313A,P/II excercise wafer broke
SUBA IV,28" on pad
LOT# LC5-JP4
bottom CR SUBA IV,28"II
LOT# JC5-DA4-5
================================================================================
Note 78.229 Pad change data 229 of 255
FABSIX::L_CEDRONE 7 lines 22-OCT-1995 15:54
-< CMP.A1 PAD CHANGE - NOT CMP.A2 >-
--------------------------------------------------------------------------------
cmp.a2 10/22/95 top q cr qjmr0313a,p/II to many wafers on pad
suba IV,28",II pad
lot# lc5-jp2
bottom cr suba IV,28", II
lot# jc5-da4-5
================================================================================
Note 78.230 Pad change data 230 of 255
FABSIX::J_ROA 10 lines 22-OCT-1995 16:11
-< CMP.A2 NEW PAD >-
--------------------------------------------------------------------------------
Entity Date Pad lot Reason for change
=======================================================================
CMP.A2 10/22/95 TOP Q CR QJMR0313A,P/II High uniformity
SUBA IV, 28", II
LOT# LC5-JP2
" " BOTTOM CR SUBA IV, 28", II
LOT# JC5-DA4-5
================================================================================
Note 78.231 Pad change data 231 of 255
FABSIX::J_ROA 11 lines 23-OCT-1995 09:55
-< CMP.A1 NEW PAD >-
--------------------------------------------------------------------------------
Entity Date Pad lot Reason for change
========================================================================
CMP.A1 10/23/95 TOP Q CR KJMR0313A, P/II Wafer breakage
SUBA IV, 28", II
Lot# LC5-JP2
" " BOTTOM CR SUBA IV ,28", II
LOT# JC5-DA4-5
================================================================================
Note 78.232 Pad change data 232 of 255
FABSIX::L_CEDRONE 7 lines 23-OCT-1995 12:55
--------------------------------------------------------------------------------
CMP.A2 10/23/95 TOP Q CR QJMR0313A,P/II HIGH RANGE
SUBA IV,28",II
LOT# LC5-JP2
BOTTOM CR SUBA IV,28", II
LOT# JC5-DA4-5
================================================================================
Note 78.233 Pad change data 233 of 255
FABSIX::B_FINN 4 lines 23-OCT-1995 17:41
-< pad change >-
--------------------------------------------------------------------------------
CMP.B1 10/23/95 Q CR QJMR0313A,P/II/S-IV Old pad dried
32" ODx2"ID, V out during repair.
LOT # KL5-JP4
================================================================================
Note 78.234 Pad change data 234 of 255
FABSIX::L_CEDRONE 6 lines 24-OCT-1995 13:05
-< CMP.A2 PAD CHANGE >-
--------------------------------------------------------------------------------
CMP.A2 10/24/95 TOP Q CR QJMR0313A,P/II WAFFER BRAKE
SUBA IV,28",II
LOT# LC5-JP2
BOTTOM CR SUBA IV,28", II
LOT# JC5-DA4-5
================================================================================
Note 78.235 Pad change data 235 of 255
FABSIX::R_POIRIER 6 lines 24-OCT-1995 21:45
-< PAD CHANGE CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 10-24-95 TOP Q CR QJMR0313A,P/II WAFER BREAK
SUBA IV,28",II 180 WAFERS ON PAD
LOT# LC5-JP5 82 WAFERS ON CARRIERS
BOTTOM CR SUBA IV,28",II
LOT# JC5-DA4-5
================================================================================
Note 78.236 Pad change data 236 of 255
FABSIX::R_POIRIER 6 lines 25-OCT-1995 04:37
-< PAD CHANGE CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 10-24-95 TOP Q CRQJMR0313A, 28" P,V POOR UNIFORMITY
LOT# JC5-RE5 AFTER ENGINEERING
EXPERMENTS
BOTTOM (2) CR SUBA IV,28",II
LOT# JC5-DA4-5
================================================================================
Note 78.237 Pad change data 237 of 255
FABSIX::R_POIRIER 5 lines 25-OCT-1995 04:49
-< PAD CHANGE CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 10-25-95 TOP QJMR0313A,28" WAFER BREAK
P,NON-CR II 18 WAFERS ON PAD
9 WAFERS ON CARRIERS
BOTTOM (2) CR SUBA IV,28"
LOT# JC5-DA4-5
================================================================================
Note 78.238 Pad change data 238 of 255
FABSIX::L_SHKOLNIKOV 11 lines 26-OCT-1995 02:54
-< CMP.A2 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 10/26/95 TOP QJMR0313A,28", Wafer break on
P,NON-CR II pad.
LOT# JJ5-RE8
BOTTOM (2) CR SUBA IV,28"II
LOT# JC5-DA4-5
================================================================================
Note 78.239 Pad change data 239 of 255
SUBPAC::CLIFFORD 11 lines 26-OCT-1995 11:04
-< .A2 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.a1 10/26/95 broke wafers
QJMRO313A,28",P,non-CR II
JJ5-RE8
TWO(2)- CR SUBA IV,28" II JC5-DA4-5
================================================================================
Note 78.240 Pad change data 240 of 255
FABSIX::L_SHKOLNIKOV 13 lines 26-OCT-1995 22:26
-< CMP.A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 10/26/95 TOP CR QJMR0313A,28" Broke wafers
P'NON-CR II
LOT# JJ5-RE8
BOTTOM CR SUBA IV,28"II
LOT# JC5-DA4-5
CR SUBA IV,32"II
LOT# FX5-DA2-4
================================================================================
Note 78.241 Pad change data 241 of 255
FABSIX::L_SHKOLNIKOV 10 lines 28-OCT-1995 01:38
-< CMP.A2 Pad change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 10/28/95 TOP CR QJMR0313A,P/II Poor uniformity
SUBA IV, 32" High wafer count
LOT# LC5-JP5 320 wafers on pad
BOTTOM CR SUBA IV,32"II
LOT# JC5-DA4-5
================================================================================
Note 78.242 Pad change data 242 of 255
SUBPAC::CLIFFORD 10 lines 28-OCT-1995 15:48
-< .A2 Pad Change >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 10/28/95 TOP CR QJMR0313A,P/II Broke wafers
SUBA IV, 32"
LOT# LC5-JP5
BOTTOM CR SUBA IV,32"II
LOT# JC5-DA4-5
================================================================================
Note 78.243 Pad change data 243 of 255
PATE::GEE 10 lines 30-OCT-1995 04:32
-< cmp.a2 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 10/30/95 TOP CR QJMR0313A,P/II Broke wafers
SUBA IV, 32"
LOT# LC5-JP5
BOTTOM CR SUBA IV,32"II
LOT# JC5-DA4-5
================================================================================
Note 78.244 Pad change data 244 of 255
SUBPAC::SADIN "Freedom isn't free." 9 lines 30-OCT-1995 17:32
-< CMP.B1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 10/30/95 CR QJMR0313A,P/II 1000+ WAFERS ON
SUBA IV,32"ODX2"ID,II OLD PAD
LOT# LC5-JP5
================================================================================
Note 78.245 Pad change data 245 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 10 lines 1-NOV-1995 02:04
-< A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 11/1/95 CR QJMR0313A,P/II Bubbles and bad Unif.
SUBA IV,28",II
LOT# LM5-JP1
CR SUBA IV, 28", II
LOT# GP5-DA2-5
================================================================================
Note 78.246 Pad change data 246 of 255
FABSIX::L_SHKOLNIKOV 10 lines 1-NOV-1995 06:10
-< CMP.A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 11/01/95 TOP CR QJMR0313A,P/II Scratches on pad
SUBA IV,28",II after conditioner
LOT# LC5-JP5 crash.
BOTTOM CR SUBA IV,28"II
LOT# JP5-DA2-5
================================================================================
Note 78.247 Pad change data 247 of 255
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 10 lines 1-NOV-1995 07:19
-< A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 11/1/95 CR QJMR0313A,P/II Wafer broke in left
SUBA IV,28",II carrier
LOT# LM5-JP1
CR SUBA IV, 28", II
LOT# GP5-DA2-5
================================================================================
Note 78.248 Pad change data 248 of 255
SUBPAC::CLIFFORD 11 lines 2-NOV-1995 15:31
-< .A2 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A2 11/2/95 OVER 30O WAFERS
QJMRO313A,P/II/SUBA IV, 28",II
LM5-JP1
CR SUBA IV,28" II JP5-DA2-5
================================================================================
Note 78.249 Pad change data 249 of 255
SUBPAC::CLIFFORD 11 lines 2-NOV-1995 15:33
-< .A1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A1 11/2/95 BROKE WAFERS
QJMRO313A,P/II/SUBA IV, 28",II
LM5-JP1
CR SUBA IV,28" II JP5-DA2-5
================================================================================
Note 78.250 Pad change data 250 of 255
SUBPAC::CLIFFORD 11 lines 3-NOV-1995 13:31
-< .B1 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.B1 11/3/95 ENG EXPERIMENT
CUT TO ID OD
QJMRO313A,P/II/S-IV, 32"ODx2"ID,V
KL5-JP4
================================================================================
Note 78.251 Pad change data 251 of 255
FABSIX::L_SHKOLNIKOV 10 lines 3-NOV-1995 22:51
-< .A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 11/03/95 TOP CR QJMR0313A,P/II Wafer broke on pad
SUBA IV, 28"
LOT# LM5-JP1
BOTTOM CR SUBA IV,32"II
LOT# JC5-DA4-5
================================================================================
Note 78.252 Pad change data 252 of 255
FABSIX::L_SHKOLNIKOV 10 lines 4-NOV-1995 03:57
-< .A2 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 11/04/95 TOP CR QJMR0313A,P/II ENGINEERING TESTS
SUBA IV, 28"
LOT# LM5-JP1
BOTTOM CR SUBA IV,32"II
LOT# JC5-DA4-5
================================================================================
Note 78.253 Pad change data 253 of 255
FABSIX::L_SHKOLNIKOV 10 lines 4-NOV-1995 07:01
-< .A1 PAD CHANGE >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 11/04/95 TOP CR QJMR0313A,P/II Wafer broke on pad
SUBA IV, 28"
LOT# LM5-JP1
BOTTOM CR SUBA IV,32"II
LOT# JC5-DA4-5
================================================================================
Note 78.254 Pad change data 254 of 255
SUBPAC::CLIFFORD 12 lines 4-NOV-1995 14:29
-< .A2 PAD CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE LOT # REASON
==================================================================
CMP.A2 11/4/95 Broke Wafers
QJMRO313A,P/II/S-IV, 28"II
LM5-JP1
CR SUBA IV 32"OD X 2"ID,II
JC5-DA4-5
================================================================================
Note 78.255 Pad change data 255 of 255
FABSIX::E_DAWSON 3 lines 4-NOV-1995 17:30
-< PAD CHANGE CMP.A1 11/4/95 >-
--------------------------------------------------------------------------------
CMP.A1 11/4/95 SUBA IV LOT #GP5-DA2-5 (SPEEDFAM/CUT)
IC1000 PRE STACKED (SPEEDFAM/CUT)
LOT # LM5-JP3
| T.R | Title | User | Personal Name | Date | Lines |
|---|---|---|---|---|---|
| 2.1 | CMP.A2 PAD CHANGE | FABSIX::R_POIRIER | Tue Nov 07 1995 00:47 | 8 | |
CMP.A2 CR SUBA IV 32"OD NEEDED MONTHLY PM
X 2" ID, II
LOT#JC5-DA4-5
Q CR QJMR0313A,P/II
S-IV 32"X2",II
LOT#LM5-JP3
| |||||
| 2.2 | .A2 PAD CHANGE | SUBPAC::CLIFFORD | Wed Nov 08 1995 19:25 | 15 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A2 11/8/95 Tool down for
amp problem. Main.
worked on tool all
day. Dry pad.
QJMRO313A,P/II/S-IV, 32"ODX 2"ID,II
LM5-JP3
CR SUBA IV 32"OD X 2"ID,II
JP5-DA2-5
| |||||
| 2.3 | .A1 PAD CHANGE | SUBPAC::CLIFFORD | Wed Nov 08 1995 19:26 | 15 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A1 11/8/95 Tool down for
amp problem. Main.
worked on tool all
day. Dry pad.
QJMRO313A,P/II/S-IV, 32"ODX 2"ID,II
LM5-JP3
CR SUBA IV 32"OD X 2"ID,II
JP5-DA2-5
| |||||
| 2.5 | B1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 09 1995 07:16 | 8 |
TOOL DATE LOT # REASON
==================================================================
CMP.B1 11/9/95 IC1000/SUBA-IV HIGH PAD COUNT
LOT # LM5-JP3 AND POOR REMOVAL
| |||||
| 2.6 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 09 1995 07:16 | 10 |
TOOL DATE LOT # REASON
==================================================================
CMP.A2 11/9/95 IC1000/SUBA-IV WAFERS BROKE
LOT # LM5-JP3 ON TABLE
SUBA-IV
LOT # GP5-DA2-5
| |||||
| 2.7 | PAD CHANGE CMP.A2 | FABSIX::R_POIRIER | Sat Nov 11 1995 21:19 | 4 | |
CMP.A2 11-11-95 Q CR QJMR0313A/P 250 WAFERS ON
II/SUBA IV,28",II PAD
LOT# LR5-JP7
| |||||
| 2.8 | CMP.B1 PAD CHANGE | SUBPAC::SADIN | Freedom isn't free. | Sun Nov 12 1995 17:12 | 7 |
CMP.B1 11/12/95 Q CR QJMR0313A,P/II BAD UNIF/RANGE
/S-IV 32"ODX2"ID,II 1000+ WAFERS
LOT# LM5-JP3
| |||||
| 2.9 | PAD CHANGE | FABSIX::B_FINN | Mon Nov 13 1995 14:10 | 6 | |
CMP.B1 11/13/95 Q CRQJMR0313A,P/II/S-IV BROKE WAFER
32"ODX(CUT TO 15""ID),V
LOT# KL5-JP2
| |||||
| 2.10 | CMP.B1 | FABSIX::R_GEE | Tue Nov 14 1995 01:55 | 3 | |
CMP.B1 11/14/95 Q CR QJMR0313A,P/II/S-IV HIGH
32"ODX(CUT TO 15"ID),V PARTICLES
LOT# LM5-JP1
| |||||
| 2.11 | CMP.B1 | SUBPAC::SADIN | Freedom isn't free. | Tue Nov 14 1995 15:09 | 5 |
CMP.B1 11/14/95 Q CR QJMR0313A,P/II/S-IV HIGH PARTS
32"ODX2"ID,II BAD UNIF
LOT# LR5-JP8
| |||||
| 2.12 | .B1 Pad change | FABSIX::L_SHKOLNIKOV | Wed Nov 15 1995 05:02 | 8 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 11/14/95 CR QJMR0313A,P/II/ High particles
S-IV,32"ODx(cut to 15"id)
LOT# LR5-JP8
| |||||
| 2.13 | CMP.A2 Pad Change 11/15/95 | ASDG::POIRIER | Wed Nov 15 1995 17:50 | 19 | |
ENTITY DATE PAD LOT # REASON
------ ---- --------- ------
CMP.A2 11/15/95 QJMR0313A,P/II/ ( Broken wafer on Pad.)
SUBA IV, 28", II The wafer broke during
Step #3 rinse. One
carrier dropped a wafer
as it lifted off the pad.
The other carrier remained
on the pad and collided
with the dropped wafer.
(The Pad had 178 wafers
run on it before the
broken wafer incident
occured)
| |||||
| 2.14 | A1 pad change | FABSIX::L_SHKOLNIKOV | Wed Nov 15 1995 23:12 | 8 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 11/15/95 SP CR IC1000-5, 28", Running engineering
II SPECIAL GRV tests.
LOT# MJ4-RC7
| |||||
| 2.15 | .A2 PAD CHANGE | SUBPAC::CLIFFORD | Thu Nov 16 1995 15:52 | 15 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A1 11/16/95 Tool down for
oil change. pad
dryed out.
QJMRO313A,P/II/Suba IV,28",II
LR5-JP7
CR SUBA IV 32"OD X 2"ID,II
JP5-DA2-5
| |||||
| 2.16 | B1 PAD CHANGE | FABSIX::L_SHKOLNIKOV | Thu Nov 16 1995 23:26 | 8 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 11/16/95 CR QJMR0313A,P/II/S-IV Tool was down for
32"OD S-IV(cut to 15"id) repair.Pad dried
LOT# LR5-JP8 out.
| |||||
| 2.17 | .A1 PAD CHANGE | SUBPAC::CLIFFORD | Fri Nov 17 1995 19:07 | 15 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A1 11/17/95 Needed to change
carriers. Pad was at
230 so changed that
too.
QJMRO313A,P/II/Suba IV,28",II
LR5-JP7
CR SUBA IV 32"OD X 2"ID,II
JC5-DA4-5
| |||||
| 2.18 | .A1 Pad change | FABSIX::L_SHKOLNIKOV | Sat Nov 18 1995 01:19 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 11/18/95 TOP CR QJMR0313A,P/II Wafer broke on pad
SUBA IV, 28"
LOT# LR5-JP7
BOTTOM CR SUBA IV,32"II
LOT# JC5-DA4-5
| |||||
| 2.19 | B1-bad change | FABSIX::L_SHKOLNIKOV | Sat Nov 18 1995 05:06 | 7 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 11/18/95 CR QJMR0313A,P/II/IV Wafers crashed on pad
32"OD(cut to 15"id)II
LOT# LR5-JP8
| |||||
| 2.20 | .A2 PAD CHANGE | SUBPAC::CLIFFORD | Sat Nov 18 1995 12:03 | 15 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A2 11/18/95 Low removal rate
and over 350 wafers.
QJMRO313A,P/II/Suba IV,28",II
LR5-JP7
CR SUBA IV 32"OD X 2"ID,II
JC5-DA4-5
| |||||
| 2.21 | cmp.a1 | FABSIX::R_GEE | Sun Nov 19 1995 03:18 | 1 | |
CMP.A1 11/19/95 lr5-jp6 poor uniformity | |||||
| 2.22 | cmp.a2 | FABSIX::R_GEE | Sun Nov 19 1995 03:20 | 1 | |
CMP.A2 11/19/95 lr5-jp6 broke a wafer | |||||
| 2.23 | CMP.b1 | SUBPAC::SADIN | Freedom isn't free. | Mon Nov 20 1995 14:14 | 8 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 11/20/95 CR QJMR0313A,P/II/S-IV wafer crash
32"ODX2"ID,II
LOT# LR5-JP9
| |||||
| 2.24 | CMP.A2 | SUBPAC::SADIN | Freedom isn't free. | Mon Nov 20 1995 18:33 | 10 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 11/20/95 TOP:CR QJMR0313A,P/II/SUBA PAD HAD 400+ WFRS ON IT
IV,28",II REM-RATE LOW
LOT# LR5-JP6
BOTTOM:CR SUBA IV,28",II
LOT# LW5-DA3-5
| |||||
| 2.25 | cmp.a2 | FABSIX::R_GEE | Mon Nov 20 1995 23:23 | 6 | |
cmp.a2 11/20/95 bottom: suba/IV Bubble between the
lot #LW5-DA3-5 pads
top: qjmr0313a,p/II/suba
lot#lr5-jp6
expiration date 4/30/96
| |||||
| 2.26 | .B1 Pad change | FABSIX::L_SHKOLNIKOV | Wed Nov 22 1995 23:52 | 8 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 11/22/95 CR QJMR0313A,P/II/S-IV High particles
32"OD x(cut to 15" ID) Bad uniformity
LOT# LP5-JP9
| |||||
| 2.27 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Nov 25 1995 03:28 | 11 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 11/25/95 CR QJMR0313A,P/II Bad uniformity
S-IV, 28", II
LOT# LR5-JP6
CR SUBA IV, 28",II
LOT# LW5-DA3-5
| |||||
| 2.28 | CMP.A1 PAD CHANGE | SUBPAC::SADIN | Freedom isn't free. | Sun Nov 26 1995 18:33 | 12 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 11/26/95 CR QJMR0313A,P/II/SUBA high wafer count
IV,28",II
LOT# LR5-JP6
CR SUBA IV,28",II
LOT# LW5-DA3-5
| |||||
| 2.29 | PAD CHANGE CMP.A2 | FABSIX::L_CEDRONE | Sun Nov 26 1995 22:27 | 7 | |
CMP.A2 BOTTOM CR SUBA IV,28" ,II POOR UNIFORMITY
LOT# LW5_DA3_5
TOP Q CR QJMR0313A,P/II/SUBA
IV,28" ,II
LOT # LR5_JP6
| |||||
| 2.30 | cmp.a1 | FABSIX::R_GEE | Mon Nov 27 1995 06:46 | 6 | |
cmp.a1 bottom cr suba IV,28",II Broke a wafer
lot# lw5-da3-5
top q cr qjmr0313a,p/II/suba
IV,28" , II
lot# lr5-jp6
| |||||
| 2.31 | CMP.A2 PAD CHANGE | FABSIX::L_CEDRONE | Mon Nov 27 1995 20:12 | 8 | |
CMP.A2 BOTTOM CR SUBA IV,28" ,II BROKE WAFER
LOT# LW5-DA3-5
TOP Q CR QJMR0313A,P/II/SUBA
IV,28",II
LOT # LR5-JP6
| |||||
| 2.32 | CMP.B1 | FABSIX::R_GEE | Mon Nov 27 1995 21:38 | 2 | |
cmp.b1 Q CR QJMR0313A,P/II/S-IV POOR REMOVAL RATE &
LOT# LR5-JP9 / IDOI CUTOUT UNIFORMITY
| |||||
| 2.33 | b2 change | STRATA::FINN | Tue Nov 28 1995 19:25 | 4 | |
CMP.B2 11/29/95 Q CR QJMRo313a,P/II/S-IV wafer broke
32"od Cut to 15 inch id, II
LOT # LR-JP8
| |||||
| 2.34 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 03:20 | 11 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 11/29/95 CR QJMR0313A,P/II poor removal rate
S-IV, 28", II
LOT# LR5-JP5
CR SUBA IV, 28",II
LOT# LW5-DA3-5
| |||||
| 2.35 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 29 1995 21:27 | 11 |
Entity Date Pad Lot Reason for Change
=====================================================================
CMP.A2 11/29/95 CR QJMR0313A,P/II Wafer broke on table
S-IV, 28", II
LOT# LR5-JP6
CR SUBA IV, 28",II
LOT# LW5-DA3-5
| |||||
| 2.36 | A1 Pad change | FABSIX::L_SHKOLNIKOV | Thu Nov 30 1995 08:20 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 11/30/95 TOP CR QJMR0313A,P/II Wafer broke on pad
SUBA IV, 28"
LOT# LR5-JP5
BOTTOM CR SUBA IV,28"II
LOT# LW5-DA3-5
| |||||
| 2.37 | B1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Nov 30 1995 08:34 | 7 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 11/30/95 CR QJMR0313A,P/II Wafer broke on pad
SUBA IV, 32"ODx2"ID,II
LOT# MM5-JP2
| |||||
| 2.38 | CMP.B1 | FABSIX::L_SHKOLNIKOV | Fri Dec 01 1995 02:04 | 7 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 12/01/95 CR QJMR313A,P/II/S-IV wafer crash
32"ODx(cut to 15"id)
LOT# JN5-JP4
| |||||
| 2.39 | B1 PAD CHANGE | FABSIX::L_SHKOLNIKOV | Fri Dec 01 1995 05:27 | 9 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 12/01/95 CR QJMR0313A,P/II/ Wafer broke on pad
S-IV,32"ODx(cut to 15"id)
LOT# JN5-JP4
| |||||
| 2.40 | B1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 01 1995 22:22 | 9 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 12/01/95 CR QJMR0313A,P/II/ Pad dried up
S-IV,32"ODx(cut to 15"id) during repair
LOT# MM5-JP3
| |||||
| 2.41 | B1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Dec 02 1995 01:39 | 9 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 12/02/95 CR QJMR0313A,P/II/ wafer crash
S-IV,32"ODx(cut to 15"id)
LOT# MM5-JP3
| |||||
| 2.42 | CMP.A1 | FABSIX::R_GEE | Sun Dec 03 1995 21:25 | 6 | |
CMP.A1 12/3/95 TOP Q CR QJMR0313A,P/II HIGH WAFER COUNT
SUBA IV,28" 417
LOT# LR5-JP5
BOTTOM CR SUBA IV,28",II
LOT# LW5-DA3-5
| |||||
| 2.43 | CMP.A2 | FABSIX::R_GEE | Mon Dec 04 1995 02:40 | 6 | |
CMP.A2 12/3/95 TOP Q CR QJMR0313A,P/II HIGH WAFER COUNT
SUBA IV,28" 516
LOT# LR5-JP5
BOTTOM CR SUBA IV,28",II
LOT# LW5-DA3-5
| |||||
| 2.44 | CMP.B1 | FABSIX::R_GEE | Mon Dec 04 1995 07:13 | 3 | |
CMP.B1 12/4/95 Q CR QJMR0313A,P/II BROKE A WAFER ON
32"OD X 2" ID,II THE PAD.
LOT# MM5-JP3
| |||||
| 2.45 | CMP.A1 PAD CHANGE | FABSIX::J_ROA | Tue Dec 05 1995 16:41 | 8 | |
CMP.A1 12/5/95 Q CR QJMR0313A,P/II/SUBA CR SUBA IV,28",II
IV, 28", II LOT #LR5-JP5 LOT# LW5-DA3-5
PAD WAS CHANGED DUE TO HIGH UNIFORMITY. WAFER COUNT WAS 298
| |||||
| 2.46 | pad change | FABSIX::B_FINN | Wed Dec 06 1995 11:41 | 9 | |
CMP.A2 12/6/95 CR Suba IV, 28", II Changed at the completion
Lot# LW5-DA3-5 of Semi Annual PM.
Q CR QJMR0313A,P/II/SUBA IV
28", II
Lot # LR5-JP6
| |||||
| 2.47 | Pad Change on .A2 | SUBPAC::CLIFFORD | Wed Dec 06 1995 17:03 | 14 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A2 12/06/95 Broke wafer
QJMRO313A,P/II/Suba IV,28",II
LR5-JP7
CR SUBA IV 28",II
LW5-DA3-5
| |||||
| 2.48 | Pad change on .A2 | SUBPAC::CLIFFORD | Fri Dec 08 1995 11:27 | 14 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A2 12/07/95 Over 300 wafers
QJMRO313A,P/II/Suba IV,28",II
LR5-JP7
CR SUBA IV 28",II
LW5-DA3-5
| |||||
| 2.49 | cmp.a1 | FABSIX::R_GEE | Sat Dec 09 1995 21:07 | 7 | |
cmp.a1 bottom cr suba iV,28", II poor uniformity
lot # lw5-da3-5
top q cr qjmr0313a,p/II/suba
lot # lr5-jp5
| |||||
| 2.50 | cmp.b1 | FABSIX::R_GEE | Sat Dec 09 1995 21:43 | 3 | |
cmp.b1 q cr qjmr0313a,p/II/s-IV scratches from pad
lot # mm5-jp4
| |||||
| 2.51 | CMP.B1 | SUBPAC::SADIN | Freedom isn't free. | Sun Dec 10 1995 10:56 | 6 |
CMP.B1 Q CR QJMR0313A,P/II/S-IV BAD UNIFORMITY
LOT# JN5-JP2 ON MQCS.
| |||||
| 2.52 | cmp.a1 new pad | FABSIX::J_ROA | Sun Dec 10 1995 18:37 | 10 | |
CMP.A1 12/10/95 CR SUBA IV, 28",II LOT # LW5-DA3-5
CMP.A1 12/10/95 Q CR QJMR0313A,P/II SUBA IV, 28", II LOT#ML5-JP8
The pad was changed due to bad uniformity
| |||||
| 2.53 | cmp.a2 new pad | FABSIX::J_ROA | Sun Dec 10 1995 19:07 | 9 | |
CMP.A2 12/10/95 CR SUBA IV, 28", II LOT# LW5-DA3-5
CMP.A2 12/10/95 Q CR QJMR0313A,P/II SUBA IV, 28", II LOT# ML5-JP8
Wafer count was near spec limits and uniformity was beginning to go.
| |||||
| 2.54 | CMP.A1 NEW PAD | FABSIX::K_WANG | Mon Dec 11 1995 16:19 | 7 | |
CMP.A1 12/11/95 Q CR QJMR0313A, P/II SUBA IV,28",II LOT#ML5-JP7
CMP.A1 12/11/95 CR SUBA IV,28",II LOT# LW5-DA3-5
| |||||
| 2.55 | Pad change CMP.A2 | FABSIX::R_POIRIER | Tue Dec 12 1995 05:19 | 7 | |
CMP.A2 Q CR QJMR0313A,P/II Wafer broke on pad
SUBA IV,28",II
LOT # ML5-JP7 Wafer count on pad = 232
Wafer count on carr. = 497
CR SUBA IV,28",II
LOT # LW5-DA3-5
| |||||
| 2.56 | Pad Replaced 12/12/95 7:30 p.m. | ASDG::POIRIER | Tue Dec 12 1995 19:47 | 13 | |
Entity Date Pad Lot# Reason For Change
------ ------- --------------- ----------------------------------
CMP.A2 12/12/95 SUBA IV,28", II Wafer broke on the previous Pad.
7:30 p.m. LOT# LW5-DA3-5
CMP.A2 12/12/95 Machine Stacked. Same as above.
7:30 p.m. Q CR QJMRO313A,P/II
SUBA IV, 28", II
LOT# ML5-JP7
John Poirier.
| |||||
| 2.57 | A2 Pad change | FABSIX::L_SHKOLNIKOV | Wed Dec 13 1995 04:55 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 12/13/95 TOP CR QJMR0313A,P/II Bubbles under pad
SUBA IV, 28" before start MQC'S
LOT# ML5-JP8 wafer count - 38
BOTTOM CR SUBA IV,28"II
LOT# LV5-DA5-4
| |||||
| 2.58 | .A2 Pad change | FABSIX::L_SHKOLNIKOV | Wed Dec 13 1995 22:43 | 11 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 12/13/95 TOP CR QJMR0313A,P/II Reclaim wafer broke
SUBA IV,28",II on pad
LOT# ML5-JP8
BOTTOM CR SUBA IV,28"II
LOT# LV5-DA5-4
| |||||
| 2.59 | .A1 Pad change | FABSIX::L_SHKOLNIKOV | Thu Dec 14 1995 04:53 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 12/14/95 TOP CR QJMR0313A,P/II Wafer broke in brush
SUBA IV,28",II station
LOT# ML5-JP8
BOTTOM CR SUBA IV,28"II
LOT# LV5-DA5-4
| |||||
| 2.60 | .A2 Pad change | FABSIX::L_SHKOLNIKOV | Thu Dec 14 1995 07:22 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 12/14/95 TOP CR QJMR0313A,P/II Wafer broke on pad
SUBA IV,28",II during MQC's
LOT# ML5-JP7
BOTTOM CR SUBA IV,28"II
LOT# LV5-DA5-4
| |||||
| 2.61 | A1 Pad change | FABSIX::L_SHKOLNIKOV | Thu Dec 14 1995 22:54 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 12/14/95 TOP CR QJMR0313A,P/II Pad dried-out due to
SUBA IV,28"II DI water shut off
LOT# ML5-JP7
BOTTOM CR SUBA IV,28"II
LOT# LV5-DA5-4
| |||||
| 2.62 | A2 Pad change | FABSIX::L_SHKOLNIKOV | Fri Dec 15 1995 02:00 | 9 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 12/15/95 TOP CR QJMR0313A,P/II Pad dried out due to SUBA IV,28",II
LOT# ML5-JP7 DI water shut off
BOTTOM CR SUBA IV,28"II
LOT# LV5-DA5-4
| |||||
| 2.63 | .B1 Pad change | FABSIX::L_SHKOLNIKOV | Fri Dec 15 1995 02:05 | 8 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 12/15/95 CR QJMR0313A,P/II/ Pad dried out due to
S-IV,32"OD DI water source shut off
LOT# MM5-JP4
| |||||
| 2.64 | A1 Pad change | FABSIX::L_SHKOLNIKOV | Sat Dec 16 1995 07:11 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 12/16/95 TOP CR QJMR0313A,P/II Wafer broke on pad
SUBA IV, 28"
LOT# ML5-JP7
BOTTOM CR SUBA IV,28"II
LOT# LV5-DA5-4
| |||||
| 2.65 | PAD CHANGE CMP.A2 | FABSIX::R_POIRIER | Sat Dec 16 1995 23:10 | 7 | |
CMP.A2 12/16/95 Top Q CR QJMR0313A,P/II Failed MQC's
SUBA IV,28",II
LOT # ML5-JP7
Bottom CR SUBA IV,28",II
LOT # LV5-DA5-4
| |||||
| 2.66 | CMP.A1 NEW PAD | FABSIX::J_ROA | Mon Dec 18 1995 19:54 | 8 | |
cmp.a1 12/18/95 Top Q CR QJMR0313A,P/II
SUBA IV,28",II
LOT#ML5-JP7
Bottom CR SUBA IV,28",II
LOT# LV5-DA5-4
| |||||
| 2.67 | CMP.B1 PAD CHANGE | SUBPAC::SADIN | Freedom isn't free. | Tue Dec 19 1995 10:13 | 7 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 12/19/95 CR QJMR01313A,P/II/S-IV 1000+ WFRS ON PAD
LOT# MM5-JP4
| |||||
| 2.68 | CMP.A2 PAD CHANGE | FABSIX::K_JUBINVILLE | Tue Dec 19 1995 18:04 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 12/19/95 Q CR QJMR0313A,P/II
SUBA IV,28",II
LOT#ML5-JP7
BOTTOM PAD CR SUBA IV,28",II
LOT# LV5-DA5-4 HIGH WAFER COUNT.
| |||||
| 2.69 | PAD CHANGE CMP.B1 12/20/95 | FABSIX::E_DAWSON | Wed Dec 20 1995 10:34 | 7 | |
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B1 12/20/95 MM5-JP4 SCRATCHES ON MQC
| |||||
| 2.70 | B2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Dec 21 1995 00:08 | 8 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B2 12/21/95 Q CR QJMR0313A,P/II PARTICLES
SUBA IV,32"ODx15"ID,II
LOT#MM5-JP4
| |||||
| 2.71 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Dec 21 1995 00:09 | 10 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 12/21/95 Q CR QJMR0313A,P/II WAFER BROKE ON PAD
SUBA IV,28",II
LOT#ML5-JP7
BOTTOM PAD CR SUBA IV,28",II
LOT# LV5-DA5-4
| |||||
| 2.72 | A1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 22 1995 05:35 | 11 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 12/22/95 Q CR QJMR0313A,P/II MONTHLY PM
SUBA IV,28",II COMPLETED
LOT#ML5-JP7
BOTTOM PAD CR SUBA IV,28",II
LOT# LV5-DA5-4
| |||||
| 2.73 | B2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 22 1995 05:36 | 8 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B2 12/22/95 Q CR QJMR0313A,P/II SCRATCHES
SUBA IV,32"ODx15"ID,II
LOT#NB5-JP2
| |||||
| 2.74 | B1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Dec 22 1995 05:36 | 8 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 12/22/95 Q CR QJMR0313A,P/II SCRATCHES
SUBA IV,32"ODx15"ID,II
LOT#NB5-JP2
| |||||
| 2.75 | cmp.a1 | FABSIX::R_GEE | Mon Jan 01 1996 23:51 | 6 | |
CMP.a1 1/1/95 top q cr qjmr0313a,p/II after shutdown
suba IV,28",II
lot #ml5-jp8
bottom cr suba IV,28",II
lot# lv5-da5-4
| |||||
| 2.76 | cmp.a2 | FABSIX::R_GEE | Mon Jan 01 1996 23:55 | 6 | |
cmp.a2 1/1/95 top q cr qjmr0313a,p/II after shutdown
suba IV,28#,II
lot# ml5-jp8
bottom cr suba IV,28",II
lot# lv5-da5-4
| |||||
| 2.77 | cmp.b2 | FABSIX::R_GEE | Mon Jan 01 1996 23:57 | 3 | |
cmp.b2 1/1/95 q cr qjmr0313a,p/II/s-IV after shutdown
32"odx15"id,II
lot # na5-j p8
| |||||
| 2.78 | cmp.b1 | FABSIX::R_GEE | Tue Jan 02 1996 00:01 | 3 | |
cmp.b1 1/1/95 q cr qjmr0313a,p/II/s-IV after shutdown
32"odx15"id,II
lot# na5-jp8
| |||||
| 2.79 | cmp.a2 | FABSIX::R_GEE | Tue Jan 02 1996 07:52 | 7 | |
cmp.a2 1/2/96 top q cr qjmr0313a,p/II/suba Broken
IV,28",II wafer
lot # lr5-jp5
bottom cr suba IV,28",II
lot # lv5-da5-4
| |||||
| 2.80 | cmp.b1 | FABSIX::R_GEE | Tue Jan 02 1996 07:54 | 2 | |
cmp.b1 1/2/96 q cr qjmr0313a,p/II/s-IV scratches
lot# na5-jp8
| |||||
| 2.81 | cmp.b2 | FABSIX::R_GEE | Tue Jan 02 1996 07:54 | 1 | |
cmp.b2 1/2/96 lot# na5-jp8 poor uniformity | |||||
| 2.82 | CMP.A1 PAD CHANGE | FABSIX::R_POIRIER | Tue Jan 02 1996 23:23 | 7 | |
CMP.A1 1-2-96 CR SUBA IV,28",II REPLACED PAD AFTER
LOT# LV5-DA5-4 HUB ALIGNMENT ON
CARRIER
Q CR QJMR0313A,P,II
SUBA IV,28",II
LOT# LR5-JP5
| |||||
| 2.83 | CMP.B1 PAD CHANGE | SUBPAC::SADIN | Freedom isn't free. | Wed Jan 03 1996 13:34 | 9 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 1/03/96 Q CR QJMR0313A,P/II BROKEN WAFER
S-IV,32"ODX15"ID,II
LOT# NA5-JP8
| |||||
| 2.84 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 04 1996 00:38 | 10 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 1/04/95 Q CR QJMR0313A,P/II WAFERS BROKE
SUBA IV,28",II ON TABLE
LOT#LR5-JP5
BOTTOM PAD CR SUBA IV,28",II
LOT# LV5-DA5-4
| |||||
| 2.85 | .A2 PAD CHANGE | SUBPAC::CLIFFORD | Thu Jan 04 1996 09:29 | 14 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A1 01/04/96 Over 300 wafers
QJMRO313A,P/II/Suba IV,28",II
LR5-JP5
CR SUBA IV 28",II
LV5-DA5-4
| |||||
| 2.86 | PAD CHANGED CMP.B2 1/4/96 | FABSIX::E_DAWSON | Thu Jan 04 1996 15:55 | 7 | |
Entity Date Pad Lot Reason for Change
====================================================================
CMP.B2 1/4/96 NA5-JP7 PAD AND CARRIERS
REPLACED
| |||||
| 2.87 | PAD CHANGED CMP.B2 | FABSIX::L_SHKOLNIKOV | Fri Jan 05 1996 01:07 | 7 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B2 01/05/96 CR QJMR0313A,P/II/S-IV Wafer broke on pad
LOT# NA5-JP7
| |||||
| 2.88 | .A2 PAD CHANGE | FABSIX::G_ISAACS | Fri Jan 05 1996 08:58 | 8 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 01/05/96 CR QJMR0313A,P/II/S-IV BAD UNIFORMITY
LOT# LR5-JP5
CR SUBA IV,28"II
LV5-DA5-4
| |||||
| 2.89 | A1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Jan 06 1996 06:49 | 8 |
Entity Date Pad Lot Reason for Change
===================================================================
CMP.A1 1/06/96 CR QJMR0313A,P/II/S-IV BIG BUBBLES
LOT# LT5-JP3
CR SUBA IV,28"II
LOT# LV5-DA5-4
| |||||
| 2.91 | .A2 pad change | FABSIX::G_ISAACS | Sat Jan 06 1996 16:52 | 8 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 01/06/96 CR QJMR0313A,P/II/S-IV BAD UNIFORMITY
LOT# LT5-JP3 over 326 wafers
CR SUBA IV,28"II
LV5-DA5-4
| |||||
| 2.92 | PAD CHANGE CMP.A2 | FABSIX::R_POIRIER | Sun Jan 07 1996 03:30 | 7 | |
CMP.A2 01-07-96 Q CR QJMR0313A,P/II/S-IV WAFER BREAK ON
32"OD X 2"ID PAD
LOT# LR5-JP9
CR SUBA IV,28",II
LOT# LV5-DA5-4
| |||||
| 2.93 | CMP.B1 PAD CHANGE | SUBPAC::SADIN | Freedom isn't free. | Mon Jan 08 1996 15:32 | 4 |
CMP.B1 01/08/06 Q CR QJMR0313A,P/II/S-IV WAFER CRASH
32"ODX15"ID,II
LOT# NA5-JP7
| |||||
| 2.94 | CMP.A1 | SUBPAC::SADIN | Freedom isn't free. | Tue Jan 09 1996 14:02 | 7 |
CMP.A1 01/09/96 Q CR QJMR0313A,P/II/S-IV BAD UNIF
32"ODX15"ID,II
LOT# NA5-JP7
| |||||
| 2.95 | CMP.B2 | SUBPAC::SADIN | Freedom isn't free. | Tue Jan 09 1996 14:03 | 8 |
CMP.B2 01/09/96 Q CR QJMR0313A,P/II/S-IV PAD DRIED OUT
32"ODX15"ID,II
LOT# NA5-JP7
| |||||
| 2.96 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Tue Jan 09 1996 20:53 | 11 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 1/09/96 CR QJMR0313A,P/II/S-IV BAD UNIFORMITY
32"ODx2"ID,II CUT TO 28" OD
LOT# NA5-JP7
CR QJMR0313A,P/II/S-IV
32"ODx2"ID,II CUT TO 28" OD
LOT# MM5-JP4
| |||||
| 2.97 | B1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Tue Jan 09 1996 20:56 | 8 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 1/09/96 CR QJMR0313A,P/II/S-IV SCRATCHES
32"ODx2"ID,II
LOT# NA5-JP7
| |||||
| 2.98 | A1 pad change | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 11 1996 06:48 | 12 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 1/11/96 CR QJMR0313A,P/II/S-IV Poor removal rate
32"ODx2"ID,II CUT TO 28" OD
LOT# MM5-JP4
CR SUBA IV
32"ODx2"ID,II CUT TO 28" OD
LOT# JC5-DA4-5
| |||||
| 2.99 | B1 pad change | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 11 1996 06:49 | 8 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 1/11/96 CR QJMR0313A,P/II/S-IV SCRATCHES
32"ODx2"ID,II
LOT# NA5-JP6
| |||||
| 2.100 | B2 pad change | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 11 1996 06:49 | 8 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B2 1/11/96 CR QJMR0313A,P/II/S-IV Wafer crash
32"ODx2"ID,II
LOT# NA5-JP6
| |||||
| 2.101 | .A1 Pad change | SUBPAC::CLIFFORD | Thu Jan 11 1996 11:40 | 14 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A1 01/11/96 Broke exercise wafer
two(2) QJMRO313A,P/II/Suba IV,32","ODx2"IDII
NA5-JP6
| |||||
| 2.102 | B2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 12 1996 05:18 | 8 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B2 1/12/96 CR QJMR0313A,P/II/S-IV Bad Uniformity
32"ODx15"ID,II
LOT# MM5-JP4
| |||||
| 2.103 | B1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 12 1996 05:19 | 8 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 1/12/96 CR QJMR0313A,P/II/S-IV SCRATCHES
32"ODx15"ID,II
LOT# MM5-JP4
| |||||
| 2.104 | .A2 PAD CHANGE | SUBPAC::CLIFFORD | Fri Jan 12 1996 10:24 | 15 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A2 01/12/96 New pad type
QJMRO313A,P/V SUBA IV,28", PSA 7
6AI-JP2
CR SUBA IV, 28", PSA 7
NS5-DA3-5
| |||||
| 2.105 | .A1 Pad change | SUBPAC::CLIFFORD | Fri Jan 12 1996 16:00 | 15 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A1 01/12/96 Over 300 wafers
Wafers stickin' to pad
after polish.
QJMRO313A,P/II S-IV,28", II
6AK-JP3
CR SUBA IV, 28"
NX5-DA4-5
| |||||
| 2.106 | CMP.A2 | FABSIX::L_SHKOLNIKOV | Sat Jan 13 1996 01:40 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 01/13/96 CR QJMR0313A,P/II/ Wafer crash
S-IV, 28",II
LOT# 6AK-JP3
CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.107 | B1 PAD CHANGE | FABSIX::L_SHKOLNIKOV | Sat Jan 13 1996 07:35 | 9 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 1/13/96 CR QJMR0313A,P/II/S-IV SCRATCHES
32"OD
LOT# 6AK-JP1
| |||||
| 2.108 | .A2 pad change | SUBPAC::CLIFFORD | Sat Jan 13 1996 15:03 | 15 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A2 01/13/96 Broke wafer.
QJMRO313A,P/II S-IV,28", II
6AK-JP3
CR SUBA IV, 28"
NX5-DA4-5
| |||||
| 2.109 | PAD CHANGE CMP.A2 | FABSIX::R_POIRIER | Sat Jan 13 1996 21:23 | 7 | |
CMP.A2 01-13-96 Q CR QJMR0313A,P/II FAILED MQC'S
S-IV,28",II
LOT# 6AK-JP3
CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.110 | PAD CHANGE CMP.B2 | FABSIX::R_POIRIER | Sat Jan 13 1996 21:36 | 5 | |
CMP.B2 01-13-96 Q CR QJMR0313A,P/II FAILED MQCS
S-IV,32"OD X 2"ID,II POOR UNIF.
LOT# 6AK-JP1
| |||||
| 2.111 | cmp.b1 pad change | SUBPAC::SADIN | Freedom isn't free. | Sun Jan 14 1996 12:15 | 7 |
CMP.B1 01-14-96 Q 1400(QJMR0313A),P,32" BIG SCRATCHES ON
OD X 2"ID,PSA OLD PAD. TRYING
LOT# NE5-RC5S EXPERIMENTAL PAD
` PAD# 19 AT ENG REQUEST.
| |||||
| 2.112 | SUBPAC::SADIN | Freedom isn't free. | Mon Jan 15 1996 19:15 | 9 | |
NEW PSA 7 PAD INSTALLED! SHOULD BE EASIER TO REMOVE.
CMP.A2 01-15-96 Q CR QJMR0313A,P/II OVER 400WFRS
S-IV,28",II
LOT# 6AK-JP3
SUBA IV,28",PSA 7
LOT# NS5-DA3-5
| |||||
| 2.113 | PAD CHANGE CMP.B2 | FABSIX::R_POIRIER | Mon Jan 15 1996 22:16 | 4 | |
CMP.B2 01-15-96 Q CR QJMR0313A,P/II SCRATCHES ON WAFERS
S-IV,32"ODX2"ID,II
LOT# NA5-JP6
| |||||
| 2.114 | NEW PAD B2 | LUDWIG::RIDLON | Eliminate the obvious | Tue Jan 16 1996 05:45 | 3 |
CMP.B2 01/16/96 Q CR QJMR0313A,P/II SCRATCHES ON WAFERS
S-IV,32"ODX2"ID,II
LOT # 6AK-JP1
| |||||
| 2.115 | CMP.A2 | FABSIX::R_GEE | Wed Jan 17 1996 06:58 | 6 | |
cmb.b2 01-17-96 Q CR QJMR-0313A OVER 400WFRS 496
P/II/S-IV,28", II
LOT# 6AK-JP3
CR SUBA IV
LOT # NX5-DA4-5
| |||||
| 2.116 | CMP.A1 | FABSIX::L_SHKOLNIKOV | Thu Jan 18 1996 03:44 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 01/18/96 CR QJMR0313A,P/II Failed MQC's
S-IV,28", II
LOT# 6AK-JP3
CR SUBA IV,28"II
LOT# NX5-DA4-5
| |||||
| 2.117 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 18 1996 03:50 | 10 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 1/18/96 CR QJMR0313A,P/II Bad Uniformity
S-IV,28", II
LOT# 6AK-JP3
CR SUBA IV,28"II
LOT# NX5-DA4-5
| |||||
| 2.118 | B2 pad change | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 19 1996 07:11 | 9 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B2 1/19/96 CR QJMR0313A,P/II/S-IV Wafer breakage
32"OD
LOT# 6AK-JP1
| |||||
| 2.120 | .A2 PAD CHANGE | FABSIX::G_ISAACS | Fri Jan 19 1996 17:41 | 8 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 01/19/96 Q CR QJMR0313A,P/II/S-IV POOR REMOVAL RATE
LOT# 6AK-JP3 372 wafers ON PAD
CR SUBA IV,28"II
# NX5-DA4-5
| |||||
| 2.121 | CMP.A1 | FABSIX::L_SHKOLNIKOV | Sat Jan 20 1996 07:23 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 01/20/96 CR QJMR0313A,P/II High uniformity
SUBA IV, 28",II 366 wafers on pad
LOT# 6AK-JP4
BOTTOM CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.122 | .A1 Pad change | SUBPAC::CLIFFORD | Sat Jan 20 1996 16:40 | 16 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A1 01/20/96 100 wafers run. Low
removal rates.
Left = 1050
Right = 775
QJMRO313A,P/II S-IV,28", II
6AK-JP3
CR SUBA IV, 28"
NX5-DA4-5
| |||||
| 2.123 | PAD INSTALLED CMP.B1 1/20/96 | FABSIX::E_DAWSON | Sat Jan 20 1996 18:41 | 7 | |
TOOL DATE LOT # REASON
==================================================================
CMP.B1 01/20/96 LOT # LR5-JP9 NO PAD ON THE
TOOL
| |||||
| 2.124 | .A2 Pad Change | SUBPAC::CLIFFORD | Sat Jan 20 1996 19:42 | 16 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A2 01/20/96 Over 300 wafers run. Low
removal rates.
QJMRO313A,P/II S-IV,28", II
6AK-JP3
CR SUBA IV, 28"
NX5-DA4-5
| |||||
| 2.125 | CMP.A2 NEW PAD | FABSIX::J_ROA | Tue Jan 23 1996 19:20 | 9 | |
CMP.A2 01/23/96 WAFERS ON PREVIOUS PAD
272
BOTTOM PAD CR SUBA IV - LOT # NX5-DA4-5
TOP PAD Q CR QJMR0313A, P, II - SUBA IV, 28", II LOT # 6AK-JP4
| |||||
| 2.126 | CMP.B2 | FABSIX::L_SHKOLNIKOV | Wed Jan 24 1996 00:18 | 8 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B2 01/24/96 CR QJMR0313A,P/II/S-IV High range
32"OD X 2" Wafers on previous
LOT# LR5-JP9 pad - 810
| |||||
| 2.127 | A1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 24 1996 06:48 | 11 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 01/24/96 CR QJMR0313A,P/II bubbles and pad
SUBA IV, 28",II count
LOT# 6AK-JP4
BOTTOM CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.128 | A1 Pad Change | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 25 1996 00:47 | 11 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 01/25/96 CR QJMR0313A,P/II Monthly PM
SUBA IV, 28",II
LOT# 6AK-JP4
BOTTOM CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.129 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Jan 25 1996 06:48 | 11 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 01/25/96 CR QJMR0313A,P/II Bubbles
SUBA IV, 28",II
LOT# 6AK-JP4
BOTTOM CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.130 | PAD CHANGE CMP.B2 1/25/96 | FABSIX::E_DAWSON | Thu Jan 25 1996 19:26 | 8 | |
TOOL DATE LOT # REASON
==================================================================
CMP.B2 01/25/96 LR5-JP7 WAFER BROKE
| |||||
| 2.131 | CMP.A1 | FABSIX::L_SHKOLNIKOV | Fri Jan 26 1996 02:11 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 01/26/96 CR QJMR0313A,P,II Bad Uniformity
SUBA IV,28",II High range
LOT# 6AK-JP5 154 wafers on pad
CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.132 | .A2 PAD CHANGE | SUBPAC::CLIFFORD | Fri Jan 26 1996 19:02 | 16 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A2 01/26/96 Over 300 wafers run. Low
removal rates.
QJMRO313A,P/II S-IV,28", II
6AK-JP5
CR SUBA IV, 28"
NX5-DA4-5
| |||||
| 2.133 | A1 pad change | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 26 1996 21:43 | 10 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 01/26/96 CR QJMR0313A,P,II looked into unformity
SUBA IV,28",II problems with different
LOT# 6AK-JP5 cal. procedures.
CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.134 | .B1 PAD CHANGE | SUBPAC::CLIFFORD | Sat Jan 27 1996 11:26 | 15 | |
TOOL DATE LOT # REASON
==================================================================
CMP.B1 01/27/96 High particles.
Q CR QJMRO313A,P/II S-IV,32"ODX 2"ID, II
6AP-JP3
| |||||
| 2.135 | .A1 Pad change | SUBPAC::CLIFFORD | Sat Jan 27 1996 17:33 | 16 | |
TOOL DATE LOT # REASON
==================================================================
CMP.A1 01/27/96 Broke wafers
QJMRO313A,P/II S-IV,28", II
6AK-JP5
CR SUBA IV, 28"
NX5-DA4-5
| |||||
| 2.136 | CMP.A2 | FABSIX::R_GEE | Sat Jan 27 1996 20:51 | 6 | |
CMP.A2 1/27/96 BOTTOM CR SUBA IV BUBBLE BETWEEN THE
LOT# NX5-DA4-5 PADS
TOP Q CR QJMR0313A,P,II
SUBA IV,28",II
LOT# 6AKJP5
| |||||
| 2.137 | CMP.A2 | FABSIX::R_GEE | Sun Jan 28 1996 00:43 | 11 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 1/28/95 TOP CR QJMR0313A,P/II POOR UNIFORMITY,
S-IV, 28", II 34 WAFERS ON THE
LOT# 6AK-JP5 PAD, FAILED MQC'S
TWICE.
BOTTOM CR SUBA IV, 28",II
LOT# NX5-DA4-5
| |||||
| 2.138 | CMP.A1 PAD CHANGE | FABSIX::R_POIRIER | Sun Jan 28 1996 07:37 | 7 | |
CMP.A1 1/28/96 TOP Q CR QJMR0313A,P,II BUBBLE IN PAD
SUBA IV,28",II 130 WAFERS
LOT# 6AK-JP5
BOTTEM CR SUBA IV
LOT#NX5-DA4-5
| |||||
| 2.139 | Pad change B1 | STRATA::FINN | Sun Jan 28 1996 14:00 | 7 | |
CMP.b1 1/28/96 Q CR QJMR0313a,P/II/S-IV Pad was visibly worn
Lot #LR5-JP9
| |||||
| 2.140 | cmp.b2 | FABSIX::R_GEE | Mon Jan 29 1996 03:06 | 3 | |
cmp.b2 1/29/96 q cr qjmr0313a,p,ii,s-iv broken wafer
lot# 6ap-jp3
| |||||
| 2.141 | PAD CHANGE CMP.A2 | FABSIX::R_POIRIER | Tue Jan 30 1996 05:46 | 7 | |
CMP.A2 1/30/96 Q CR QJMR0313A,P,II HIGH WAFER COUNT
SUBA IV,28",II 400+
LOT# 6AK-JP5
CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.142 | PAD CHANGE CMP.A1 | FABSIX::R_POIRIER | Wed Jan 31 1996 05:08 | 7 | |
CMP.A1 1-31-96 Q CR QJMR0313A,P,II Wafer broke on pad
SUBA IV,28",II
LOT # 6AK-JP5
CR SUBA IV
LOT # NX5-DA4-5
| |||||
| 2.143 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 31 1996 22:01 | 12 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 1/31/96 TOP CR QJMR0313A,P/II wafer count (450)
S-IV, 28", II and high unformity
LOT# 6AK-JP5
BOTTOM CR SUBA IV, 28",II
LOT# NX5-DA4-5
| |||||
| 2.144 | CMP.B2 | FABSIX::L_SHKOLNIKOV | Fri Feb 02 1996 21:45 | 8 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B2 02/02/96 CR QJMR0313A,P/II/ Broken wafer
S-IV,32"
LOT# 6AP-JP3
| |||||
| 2.145 | cmp.b1 | FABSIX::R_GEE | Mon Feb 05 1996 03:27 | 8 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 1/28/95 TOP CR QJMR0313A,P/II POOR REMOVAL,
S-IV, 28", II 3100 wafers
LOT# 6AP-JP4
| |||||
| 2.146 | CMP.B1 | FABSIX::L_SHKOLNIKOV | Wed Feb 07 1996 22:17 | 7 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 02/07/96 CR QJMR0313A,P/II/ Bad Uniformity
S-IV,32"ODx High wafer count
Lot # 6AP-JP3
| |||||
| 2.147 | A1 pad change | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Feb 08 1996 21:27 | 12 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 2/8/96 TOP CR QJMR0313A,P/II Poor removal rate
S-IV, 28", II
LOT# 6AK-JP5
BOTTOM CR SUBA IV, 28",II
LOT# NX5-DA4-5
| |||||
| 2.148 | B1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Feb 08 1996 22:58 | 8 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 2/8/96 CR QJMR0313A,P/II Rep. work on Head #1
S-IV, 32", II, ID 15"
LOT# 6AP-JP3
| |||||
| 2.149 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Feb 09 1996 23:34 | 12 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 2/9/96 TOP CR QJMR0313A,P/II SCRATCHES
S-IV, 28", II
LOT# 6AK-JP4
BOTTOM CR SUBA IV, 28",II
LOT# NX5-DA4-5
| |||||
| 2.150 | PAD CHANGE CMP.A2 | FABSIX::R_POIRIER | Sun Feb 11 1996 04:28 | 7 | |
CMP.A2 2-11-96 TOP Q CR QJMR0313A,P,II SCRATCHES
SUBA IV,28",II
LOT# 6AK-JP4
BOTTOM CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.151 | cmp.a2 | FABSIX::R_GEE | Sun Feb 11 1996 07:07 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 1/28/95 TOP CR QJMR0313A,P/II Scratches
S-IV, 28", II
LOT# 6AK-JP4
Bottom CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.152 | cmp.a2 | FABSIX::R_GEE | Mon Feb 12 1996 21:35 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 1/28/95 TOP CR QJMR0313A,P/II poor uniformity
S-IV, 28", II 428 wafers
LOT# 6AK-JP4
Bottom CR SUBA IV
LOT# NX5-DA4-5
| |||||
| 2.153 | CMP.B2 PAD CHANGE - PRIMARY AND SECONDARY | SUBPAC::SADIN | Freedom isn't free. | Tue Feb 13 1996 10:47 | 13 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B2 2/13/96 CR QJMR0313A,P/II WAFER CRASH
S-IV, 32"ODX2"ID,II
LOT# 6AP-JP1
2NDARY TABLE CR POLITEX REG.20.625"II WAFER CRASH
LOT# GW4-EA6
EXP.DATE 3/17/95
| |||||
| 2.154 | b1 | STRATA::RIDLON | Eliminate the obvious | Wed Feb 14 1996 02:45 | 3 |
cmp.b1 2/13/96 CR QJMR0313A,P/II Reps upgraded
S-IV, 32"ODX2"ID,II scrubber.
LOT#6AP-JP1
| |||||
| 2.155 | A1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Feb 14 1996 22:04 | 10 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 2/14/96 TOP CR QJMR0313A,P/II Pad count and
S-IV, 28", II removal rate
LOT# 6AK-JP4
Bottom CR SUBA IV
LOT# 6AV-DA1-4
| |||||
| 2.156 | A1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Feb 15 1996 21:55 | 10 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 2/15/96 TOP CR QJMR0313A,P/II Pad count and
S-IV, 32", II removal rate
LOT# 6AP-JP1
Bottom CR SUBA IV
LOT# 6AV-DA1-4
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| 2.157 | B1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Feb 16 1996 21:41 | 8 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 2/16/96 CR QJMR0313A,P/II scratches
S-IV, 32"ODX2"ID,II
LOT# 6AP-JP3
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| 2.158 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Feb 17 1996 07:05 | 10 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 2/17/96 TOP CR QJMR0313A,P/II monthly PM
S-IV, 32", II
LOT# 6BJ-JP6
Bottom CR SUBA IV
LOT# 6AV-DA1-4
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| 2.159 | cmp.b2 | FABSIX::R_GEE | Sat Feb 17 1996 22:39 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B2 2/17/96 TOP CR QJMR0313A,P/II broken wafer
S-IV, 28", II
LOT# 6AP-JP3
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| 2.160 | PAD CHANGE CMP.A1 | FABSIX::R_POIRIER | Sat Feb 17 1996 23:53 | 7 | |
CMP.A1 2/17/96 TOP Q CR QJMR0313A,P/II HIGH PAD
SUBA IV,28",II COUNT
LOT# 6BJ-JP6
BOTTOM CR SUBA IV,28",II
LOT# 6AV-DA1-4
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| 2.161 | CMP.B2 NEW PAD | FABSIX::J_ROA | Sun Feb 18 1996 16:58 | 3 | |
cmp.b2 2/18/96 Pre-stacked Q CR QJMR0313A, P II/S-IV
32" ODX 2" ID, II LOT #6AP-JP3
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| 2.162 | cmp.b2 | FABSIX::R_GEE | Sun Feb 18 1996 22:21 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B2 2/17/96 TOP CR QJMR0313A,P/II bubble under pad
S-IV, 28", II
LOT# 6AP-JP3
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| 2.163 | PAD CHANGE CMP.A2 | FABSIX::R_POIRIER | Mon Feb 19 1996 06:01 | 7 | |
CMP.A2 2-19-96 TOP Q CR QJMR0313A,P,II HIGH WAFER COUNT
SUBA IV,28"II
LOT# 6BJ-JP6
BOTTOM CR SUBA IV,28",II
LOT # 6AV-DA1-4
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| 2.164 | PAD CHANGE CMP.A1 | FABSIX::R_POIRIER | Mon Feb 19 1996 06:05 | 6 | |
CMP.A1 2-19-96 TOP Q CR QJMR0313A,P,II POOR UNIFORMITY
SUBA IV,28",II
LOT # 6BJ-JP6
BOTTOM CR SUBA IV,28",II
LOT # 6AV-DA1-4
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| 2.165 | Pad change CMP.B1 | FABSIX::R_POIRIER | Tue Feb 20 1996 00:20 | 4 | |
CMP.B1 2-19-96 Q CR QJMR0313A,P/II Scratches on
S-IV,32"ODX 2"ID,II wafers
LOT # 6AP-JP3
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| 2.166 | Pad change CMP.B1 | FABSIX::R_POIRIER | Tue Feb 20 1996 06:23 | 4 | |
CMP.B1 2-20-96 Q CR QJMR0313A,P/II Poor uniformity
S-IV,32"ODX 2"ID,II 1st and 2nd
LOT # 6AP-JP3 MQC runs
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| 2.167 | cmp.b1 | FABSIX::R_GEE | Tue Feb 20 1996 07:12 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 2/20/96 TOP CR QJMR0313A,P/II wafers sticking
S-IV, 32", II to the pad
LOT# 6AP-JP2
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| 2.168 | A1 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Tue Feb 20 1996 20:53 | 11 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A1 2/20/96 TOP CR QJMR0313A,P/II BAD UNIF.
S-IV, 32", II
LOT# 6BJ-JP6
Bottom CR SUBA IV
LOT# 6AV-DA1-4
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| 2.169 | A2 PAD CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Tue Feb 20 1996 20:54 | 10 |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 2/20/96 TOP CR QJMR0313A,P/II BAD UNIF.
S-IV, 32", II
LOT# 6BJ-JP6
Bottom CR SUBA IV
LOT# 6AV-DA1-4
| |||||
| 2.170 | cmp.b1 | FABSIX::L_SHKOLNIKOV | Wed Feb 21 1996 02:40 | 7 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.B1 02/20/96 CR QJMR0313A,P/II/ Scratches. Failed
S-IV,32",II MQC's
LOT# 6AP-JP1
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| 2.171 | CMP.A2 | FABSIX::L_SHKOLNIKOV | Thu Feb 22 1996 23:29 | 10 | |
Entity Date Pad Lot Reason for Change
======================================================================
CMP.A2 02/22/96 CR QJMR0313A,P/II Bad Uniformity
SUBA IV,28",II Low removal
LOT# 6BJ-JP6 244 wafers on pad
CR SUBA IV
LOT# 6AV-DA1-4
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| 2.172 | note write-locked | SUBPAC::SADIN | Freedom isn't free. | Sun Feb 25 1996 17:06 | 8 |
this note is now write locked and future replies are prohibited.
Please use Workstream to log all pad changes.
jim
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