TOPIC | 2.0 | PAD CHANGE DATA |
| 2.69 | Wed Dec 20 1995 10:34 | PAD CHANGE CMP.B1 12/20/95 | 7 lines |
| 2.86 | Thu Jan 04 1996 15:55 | PAD CHANGED CMP.B2 1/4/96 | 7 lines |
| 2.123 | Sat Jan 20 1996 18:41 | PAD INSTALLED CMP.B1 1/20/96 | 7 lines |
| 2.130 | Thu Jan 25 1996 19:26 | PAD CHANGE CMP.B2 1/25/96 | 8 lines |
TOPIC | 3.0 | CONDITIONER CHANGE DATA |
| 3.23 | Wed Sep 04 1996 19:02 | Conditioner Changed CMP.B1 9/4/96 | 7 lines |
TOPIC | 9.0 | STRASBAUGH CRASH FORMS |
| 9.13 | Thu Oct 24 1996 18:29 | CMP.A2 WAFER CRASH 10-26-96 | 37 lines |
| 9.14 | Fri Oct 25 1996 19:49 | CMP.A2 WAFER CRASH 10-25-96 | 38 lines |
| 9.17 | Sat Nov 16 1996 17:49 | CMP.A1 CRASHS REPORT | 47 lines |
| 9.35 | Sat Dec 14 1996 14:41 | CMP.A1 CRASH REPORT | 67 lines |
TOPIC | 32.0 | CMP.B WAFER CRASH FORM |
| 32.19 | Thu Nov 21 1996 15:01 | CMP.B1 CRASH REPORT | 40 lines |
| 32.25 | Sat Jan 04 1997 16:44 | CRASH REPORT | 54 lines |
TOPIC | 35.0 | CMP.C1 MQC DATA |
| 35.2 | Thu Feb 27 1997 15:30 | CMP.C1 MQC 2-27-97 | 38 lines |
| 35.3 | Fri Feb 28 1997 09:58 | CMP.C1 MQC 2-28-97 | 39 lines |
| 35.4 | Fri Feb 28 1997 15:52 | IONIC CONTAMINATION TEST | 18 lines |
| 35.5 | Wed Mar 05 1997 13:32 | W-PAD TEST | 40 lines |
| 35.6 | Wed Mar 05 1997 17:20 | CMP.C1 MQC'S 3-5-97 | 69 lines |
| 35.7 | Thu Mar 06 1997 14:47 | PAD TEST DATA 3-6-97 | 23 lines |
| 35.8 | Thu Mar 06 1997 15:36 | CMP.C1 MQC'S 3-6-97 | 39 lines |
| 35.9 | Sat Mar 08 1997 14:54 | CMP.C1 MQC 3-7-97 | 37 lines |
| 35.10 | Sat Mar 08 1997 15:15 | SUBA V MQC'S 3-8-97 | 40 lines |
| 35.11 | Sat Mar 08 1997 15:16 | SUBA V PAD TEST RESULTS | 28 lines |
| 35.12 | Sat Mar 08 1997 15:30 | CMP-SCRUB.C1 MQC'S 3-6-97 | 7 lines |
| 35.13 | Sat Mar 08 1997 16:31 | CMP.C1 SLURRY TANKS | 10 lines |
| 35.14 | Wed Mar 12 1997 11:05 | PAD CHANGE 3-12-97 | 8 lines |
| 35.15 | Wed Mar 12 1997 12:30 | CMP.C1 MQC DATA 3-12-97 | 36 lines |
| 35.16 | Wed Mar 12 1997 12:33 | FILTERS CHANGED 3-12-97 | 6 lines |
| 35.17 | Fri Mar 14 1997 09:58 | CMP.C1 MQC 3-14-97 | 35 lines |
| 35.18 | Fri Mar 14 1997 14:01 | IONIC CONT. TEST 3-13-97 | 96 lines |
| 35.19 | Sat Mar 15 1997 15:11 | CMP.C1 OX-FILTER CHANGED | 6 lines |
| 35.20 | Sat Mar 15 1997 15:13 | PANW PAD TEST | 80 lines |
| 35.21 | Wed Mar 19 1997 14:34 | CMP.C1 MQC 3/19/97 | 36 lines |
| 35.22 | Wed Mar 26 1997 11:13 | CMP.C1 MQC 3-26-97 | 36 lines |
| 35.23 | Thu Mar 27 1997 13:49 | OXIDE FILTER CHANGE | 4 lines |
| 35.24 | Thu Mar 27 1997 14:36 | POLYTEX PAD CHANGE | 1 lines |
| 35.25 | Thu Mar 27 1997 15:07 | CMP.C1 MQC 3-27-97 | 38 lines |
| 35.27 | Wed May 14 1997 10:39 | Carrier & Pad Change 5/13/97 | 3 lines |
TOPIC | 37.0 | CMP.C1-7 EE/PE PASSDOWNS |
| 37.408 | Sat Feb 22 1997 16:06 | CMP-C1-7 SLURRY TANKS | 10 lines |
TOPIC | 65.0 | CMP ops passdowns - Nov '95 |
| 65.23 | Fri Dec 15 1995 19:29 | CMP C-SHIFT PD 12/15/95 | 66 lines |
| 65.25 | Sat Dec 16 1995 19:37 | CMP C-SHIFT/PD 12/16/95 | 39 lines |
| 65.27 | Wed Dec 20 1995 19:27 | CMP C-SHIFT PD 12/20/95 | 38 lines |
TOPIC | 67.0 | CMP ops passdowns - Dec '95 |
| 67.15 | Sat Dec 23 1995 17:37 | CMP C-SHIFT PD. 12/23/95 | 40 lines |
TOPIC | 69.0 | CMP ops passdowns - Jan 1996 |
| 69.5 | Sat Jan 06 1996 18:56 | CMP C-SHIFT PD. 1/5/96 | 45 lines |
| 69.6 | Sat Jan 06 1996 19:32 | CMP C-SHIFT PD. 1/6/95 | 41 lines |
| 69.10 | Wed Jan 10 1996 19:33 | CMP C-SHIFT PD. 1/10/96 | 32 lines |
| 69.12 | Thu Jan 11 1996 19:42 | CMP C-SHIFT PD. 1/11/95 | 33 lines |
| 69.14 | Fri Jan 12 1996 19:42 | CMP C-SHIFT PD.1/12/95 | 31 lines |
| 69.16 | Sat Jan 13 1996 19:48 | CMP C-SHIFT PD. 1/13/95 | 31 lines |
| 69.22 | Thu Jan 18 1996 19:31 | CMP C-SHIFT PD. 1/18/95 | 32 lines |
| 69.24 | Fri Jan 19 1996 19:29 | CMP C-SHIFT PD. 1/19/96 | 36 lines |
| 69.25 | Sat Jan 20 1996 19:38 | CMP C-SHIFT PD. 1/20/96 | 37 lines |
| 69.34 | Wed Jan 24 1996 19:37 | CMP C-SHIFT PD. 1/24/96 | 25 lines |
| 69.36 | Thu Jan 25 1996 19:42 | CMP C-SHIFT PD. 1/25/96 | 37 lines |
| 69.37 | Fri Jan 26 1996 19:43 | CMP C-SHIFT PD. 1/26/96 | 35 lines |
| 69.38 | Sat Jan 27 1996 19:37 | CMP C-SHIFT PD. 1/27/96 | 30 lines |
TOPIC | 70.0 | CMP ops passdowns - Feb 1996 |
| 70.2 | Thu Feb 01 1996 19:32 | CMP C-SHIFT PD. 2/1/96 | 27 lines |
| 70.3 | Fri Feb 02 1996 19:33 | CMP C-SHIFT PD.1/2/96 | 25 lines |
| 70.4 | Sat Feb 03 1996 19:02 | CMP C-SHIFT PD. 2/3/96 | 34 lines |
| 70.11 | Thu Feb 08 1996 19:18 | CMP C-SHIFT PD. 2/8/96 | 28 lines |
| 70.19 | Thu Feb 15 1996 19:28 | CMP C-SHIFT PD. 2/15/96 | 28 lines |
| 70.26 | Thu Feb 22 1996 19:18 | CMP C-SHIFT PD. 2/22/96 | 37 lines |
| 70.34 | Sat Mar 02 1996 19:27 | CMP C-SHIFT PD. 3/2/96 | 33 lines |
TOPIC | 71.0 | March ops passdowns - 1996 |
| 71.7 | Fri Mar 08 1996 19:35 | CMP C-SHIFT PD. 3/8/96 | 34 lines |
| 71.16 | Sat Mar 16 1996 19:50 | CMP C-SHIFT PD. 4/16/95 | 42 lines |
| 71.20 | Wed Mar 20 1996 19:33 | CMP C-SHIFT PD. 3-20-96 | 34 lines |
| 71.27 | Fri Mar 29 1996 19:46 | CMP C-SHIFT PD. 3/29/96 | 33 lines |
TOPIC | 72.0 | Template for Speedfam offsets |
| 72.15 | Sat Mar 30 1996 18:58 | OFFSET CHANGE CMP.B1 3/30/96 | 15 lines |
| 72.34 | Sat May 04 1996 13:00 | CMP.B1 OFFSET CHANGE | 15 lines |
| 72.43 | Thu Jun 06 1996 18:17 | OFFSETS CHANGED CMP.B1 6/6/96 | 18 lines |
| 72.45 | Fri Jun 14 1996 19:05 | CMP.B1 OFFSET CHANGE 6/14/95 | 14 lines |
| 72.46 | Sat Jun 15 1996 14:14 | OFFSETS CHANGE CMP.B1 6/15/96 | 14 lines |
| 72.49 | Thu Jun 20 1996 12:51 | CMP.B1 OFFSET CHANGE 6/20/96 | 14 lines |
| 72.50 | Thu Jun 20 1996 12:54 | CMP.B1 OFFSET CHANGE 6/20/95 | 15 lines |
| 72.51 | Fri Jun 21 1996 10:53 | CMP.B3 OFFSET CHANGE 6/21/96 | 14 lines |
| 72.52 | Fri Jun 21 1996 18:49 | CMP.B1 OFFSET CHANGE 6/21/96 | 14 lines |
| 72.54 | Thu Jun 27 1996 17:10 | CMP.B2 OFFSET CHANGE 6/27/96 | 14 lines |
| 72.55 | Thu Jun 27 1996 17:13 | CMP.B2 OFFSET CHANGE 6/27/96 | 14 lines |
| 72.56 | Fri Jun 28 1996 12:11 | OFFSET CHANGE CMP.B1 6/28/96 | 14 lines |
| 72.57 | Sat Jul 06 1996 20:56 | CMP.B1 OFFSET CHANGE 7/6/96 | 14 lines |
| 72.58 | Thu Jul 11 1996 16:41 | CMP.B3 OFFSET CHANGE 7/11/96 | 15 lines |
| 72.59 | Thu Jul 11 1996 16:53 | OFFSET CHANGE CMP. 7/11/96 | 14 lines |
| 72.60 | Fri Jul 12 1996 17:41 | CMP.B2 OFFSET CHANGE 7/12/96 | 14 lines |
| 72.63 | Thu Jul 18 1996 20:44 | OFFSET CHANGE CMP.B2 7/18/96 | 14 lines |
| 72.68 | Thu Aug 01 1996 19:22 | CMP.B2 OFFSET CHANGE 8/1/96 | 15 lines |
| 72.69 | Thu Aug 01 1996 19:25 | CMP.B1 OFFSET CHANGE 8/1/96 | 14 lines |
| 72.70 | Thu Aug 01 1996 19:34 | CMP.B1 OFFSET CHANGE 8/1/96 | 14 lines |
| 72.71 | Thu Aug 01 1996 19:38 | CMP.B1 OFFSET CHANGE 8/1/96 | 15 lines |
| 72.74 | Sat Aug 10 1996 11:29 | CMP.B3 OFFSET CHANGE 8-10-96 | 15 lines |
| 72.75 | Thu Aug 15 1996 19:11 | CMP.B2 OFFSET CHANGE 8-15-96 | 14 lines |
| 72.77 | Fri Aug 16 1996 20:23 | CMP.B2 OFFSET CHANGE 8-16-96 | 14 lines |
| 72.88 | Wed Sep 04 1996 19:47 | CMP.B2 OFFSET CHANGE 9/4/96 | 14 lines |
| 72.90 | Thu Sep 05 1996 19:42 | OFFSET CHANGE CMP.B2 9/5/96 | 14 lines |
| 72.94 | Fri Sep 13 1996 14:44 | CMP.B1 OFFSET CHANGE 9/13/96 | 14 lines |
| 72.96 | Sat Sep 14 1996 09:48 | CMP.B1 OFFSET CHANGE 9/14/96 | 15 lines |
| 72.98 | Sat Sep 14 1996 18:03 | CMP.B2 OFFSET CHANGE 9/14/96 | 14 lines |
| 72.99 | Sat Sep 14 1996 19:03 | OFFSET CHANGE CMP.B2 9/14/96 | 14 lines |
| 72.102 | Wed Sep 18 1996 09:57 | OFFSET CHANGE CMP.B2 9/18/96 | 15 lines |
| 72.107 | Fri Sep 27 1996 16:23 | OFFSET CHANGE CMP.B1 9/27/96 | 14 lines |
| 72.108 | Fri Sep 27 1996 18:26 | OFFSTE CHANGE CMP.B1 9-27-96 | 14 lines |
| 72.109 | Fri Sep 27 1996 18:59 | OFFSET CHANGE CMP.B2 9/27/96 | 14 lines |
| 72.110 | Fri Sep 27 1996 19:43 | OFFSET CHANGE CMP.B1 9/27/96 | 14 lines |
| 72.111 | Sat Sep 28 1996 19:04 | OFFSET CHANGE CMP.B2 9/28/96 | 14 lines |
| 72.113 | Wed Oct 02 1996 12:09 | OFFSET CHANGE CMP.B3 10/2/96 | 14 lines |
| 72.115 | Thu Oct 03 1996 20:35 | OFFSET CHANGE CMP.B3 10-3-96 | 14 lines |
| 72.121 | Thu Oct 10 1996 17:57 | OFFSTE CHANGE CMP.B2 | 14 lines |
| 72.122 | Thu Oct 10 1996 17:59 | OFFSET CHANGE CMP.B2 10-10-96 | 14 lines |
| 72.123 | Thu Oct 10 1996 18:31 | OFFSET CHANGE CMP.B3 10-10-96 | 14 lines |
| 72.125 | Sat Oct 12 1996 10:19 | OFFSET CHANGE CMP.B2 10-12-96 | 14 lines |
| 72.126 | Sat Oct 12 1996 11:14 | OFFSET CHANGE CMP.B1 10-12-96 | 14 lines |
| 72.128 | Wed Oct 16 1996 10:49 | OFFSET CHANGE CMP.B2 10-16-96 | 14 lines |
| 72.129 | Wed Oct 16 1996 14:22 | OFFSET CHANGE 10-16-96 | 14 lines |
| 72.130 | Thu Oct 17 1996 13:37 | OFFSET CHANGE CMP.B2 10-17-96 | 14 lines |
| 72.131 | Fri Oct 18 1996 13:04 | OFFSET CHANGE CMP.B2 10/18/96 | 14 lines |
| 72.150 | Thu Oct 31 1996 15:02 | OFFSET CHANGE CMP.B1 10-31-96 | 15 lines |
| 72.151 | Fri Nov 01 1996 19:08 | OFFSET CHANGE CMP.B1 11-1-96 | 14 lines |
| 72.171 | Fri Nov 15 1996 18:19 | OFFSET CHANGE CMP.B2 11/15/96 | 14 lines |
| 72.185 | Fri Dec 06 1996 08:34 | OFFSET CHANGE CMP.B2 12-6-96 | 14 lines |
| 72.186 | Fri Dec 06 1996 14:08 | CMP OFFSET CHANGE 12-6-96 | 14 lines |
| 72.191 | Thu Dec 19 1996 12:34 | CMP.B1 OFFSET CHANGE 12-19-96 | 14 lines |
| 72.192 | Fri Dec 20 1996 09:30 | CMP.B1 OFFSET CHANGE 120-20-96 | 14 lines |
| 72.193 | Sat Dec 21 1996 10:41 | CMP.B1 OFFSET CHANGE 12-21-96 | 14 lines |
| 72.194 | Thu Dec 26 1996 10:42 | CMP.B2 OFFSET CHANGE 12-26-96 | 14 lines |
| 72.195 | Thu Dec 26 1996 11:15 | CMP.B1 OFFSET CHANGE 12-26-96 | 15 lines |
| 72.196 | Thu Dec 26 1996 13:32 | CMP.B1 OFFSET CHANGED 12/26/96 | 14 lines |
| 72.197 | Thu Dec 26 1996 19:26 | CMP.B3 OFFSET CHANGE 12-26-96 | 14 lines |
| 72.199 | Fri Dec 27 1996 17:49 | OFFSET CHANGE CMP.B1 12-27-97 | 15 lines |
| 72.203 | Thu Jan 02 1997 13:43 | CMP.B2 OFFSET CHANGE 1/2/97 | 15 lines |
| 72.206 | Thu Jan 02 1997 16:48 | CMP.B1 OFFSET CHANGE 1-2-97 | 15 lines |
| 72.207 | Fri Jan 03 1997 09:18 | CMP.B2 OFFSET CHANGE 1-3-96 | 15 lines |
| 72.211 | Sat Jan 04 1997 14:57 | CMP.B2 OFFSET CHANGE 1-4-96 | 15 lines |
| 72.213 | Thu Jan 09 1997 10:43 | CMP.B2 OFFSET CHANGE 1-9-97 | 14 lines |
| 72.218 | Fri Jan 10 1997 15:12 | CMP.B2 OFFSET CHANGE 1-10-97 | 14 lines |
| 72.220 | Sat Jan 11 1997 14:48 | CMP.B2 OFFSET CHANGE 1-11-96 | 14 lines |
| 72.224 | Thu Jan 16 1997 14:02 | CMP.B2 OFFSET CHANGE 1-16-96 | 14 lines |
| 72.227 | Wed Jan 22 1997 09:03 | CMP.B2 OFFSET CHANGE 1/22/97 | 14 lines |
| 72.230 | Thu Jan 23 1997 10:55 | CMP.B2 OFFSET CHANGE 1-23-97 | 15 lines |
| 72.231 | Fri Jan 24 1997 11:56 | CMP.B2 OFFSET CHANGE 1-24-97 | 14 lines |
| 72.234 | Sat Jan 25 1997 11:42 | CMP.B2 OFFSET CHANGE 1-25-97 | 15 lines |
| 72.246 | Sat Feb 08 1997 12:41 | CMP.B3 OFFSET CHANGE 2/7/97 | 22 lines |
| 72.249 | Thu Feb 13 1997 10:00 | CMP.B3 OFFSETS CHANGED 2-13-97 | 16 lines |
| 72.251 | Fri Feb 14 1997 08:42 | CMP.B3 OFFSET CHANGE 2-14-96 | 15 lines |
| 72.254 | Sat Feb 15 1997 15:44 | CMP.B3 | 14 lines |
TOPIC | 74.0 | Ops passdowns - May 1996 |
| 74.27 | Sat May 25 1996 20:33 | CMP C-SHIT PD. 5/25/96 | 32 lines |
TOPIC | 75.0 | CMP ops passdowns - June '96 |
| 75.32 | Sat Jun 29 1996 20:53 | CMP C-SHIFT PD. 6/29/96 | 57 lines |
TOPIC | 76.0 | CMP ops passdowns - July '96 |
| 76.18 | Fri Jul 19 1996 20:48 | CMP C-SHIFT PD. 7/19/96 | 31 lines |
| 76.19 | Sat Jul 20 1996 20:40 | CMP C-SHIFT PD. 7/20/96 | 28 lines |
TOPIC | 79.0 | CMP ops passdowns - August '96 |
| 79.7 | Fri Aug 09 1996 20:44 | CMP C-SHFT PD. 8/9/96 | 37 lines |
| 79.8 | Sat Aug 10 1996 20:47 | CMP C-SHIFT PD. 9-11-96 | 40 lines |
| 79.19 | Thu Aug 15 1996 20:46 | CMP C-SHIFT PD. 8-15-96 | 40 lines |
| 79.20 | Fri Aug 16 1996 20:38 | C-SHIFT CMP PD. 8-16-96 | 38 lines |
| 79.22 | Sat Aug 17 1996 20:24 | CMP C-SHIFT PD. 8/17/96 | 42 lines |
TOPIC | 81.0 | CMP ops passdowns - sept '96 |
| 81.22 | Sat Sep 21 1996 20:36 | CMP C-SHIFT PD. 9/21/96 | 45 lines |
TOPIC | 82.0 | CMP ops passdowns - Oct '96 |
| 82.25 | Thu Oct 24 1996 20:34 | CMP C-SHIFT PD. 10-24-96 | 44 lines |
| 82.26 | Fri Oct 25 1996 20:53 | CMP C- SHIFT PD. 10-25-96 | 58 lines |
TOPIC | 85.0 | CMP ops passdowns - dec '96 |
| 85.16 | Sat Dec 14 1996 19:31 | CMP C-SHIFT PD. 12-14-96 | 65 lines |
| 85.29 | Thu Dec 26 1996 19:38 | CMP C-SHIFT PD 12/26/96 | 50 lines |
TOPIC | 91.0 | Sat Mar 08 1997 15:33 | CMP-SCRUB.C1 MQC'S 3-7-97 | 4 lines |