| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 77.1 | INCOMPLETE MONTHLY PM CHECKSHEET FOR CMP.B2 | FABSIX::R_POIRIER | | Mon Feb 03 1997 04:54 | 157 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
Date: 02/02/97 Tool: CMP.B2 Tech/shift: Mitch Ridlon (MR)
Roger Poirier (RP)
6.2.1 Change Peristaltic Pump Lines Completed: RP
6.2.2 Clean Polish area tub drains Completed:
6.2.3 Check Polish Table Belt for defects Completed: RP
6.2.4 Perform Down Force Calibration on all 5 heads Completed:
Down Frc: Head 1 Pre-Adj: 410 Post-adj: 377 lbs
Head 2 Pre-Adj: 415 Post-adj: 377 lbs
Head 3 Pre-Adj: 410 Post-adj: 377 lbs
Head 4 Pre-Adj: 414 Post-adj: 377 lbs
Head 5 Pre-Adj: 411 Post-adj: 377 lbs
6.2.5 Perform Down Force Calibration on Conditioner Completed:
Actual Down Force Pre-Adj: 79 lbs
Actual Down Force Post-Adj: 77 lbs
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: RP
6.2.7 Check the Load Flipper alignment Completed: RP
6.2.8 Check the Unload Flipper alignment Completed: RP
6.2.9 Check the Elevator alignment Completed: RP
6.2.10 Check wafer unload, from Index table to cassette Completed: RP
6.2.11 Check the +24 Volt power supply Pre-Adjust: 24.0 Post: 24.0V RP
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: +/-15.06V RP
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.99 V RP
6.2.14 Check Table Rotation Speed @ 30 RPM Completed:
6.2.15 Check Vacuum Pump Diaphrams Completed:
6.2.16 Check Vacuum Tank/Pump lines Completed: RP
6.2.17 Check Load Cup Position alignment Completed: RP
6.2.18 Check Load Cup Height alignment Completed: RP
6.2.19 Check Robot alignments Completed:
6.2.20 Check Muffin Fans for proper operation Completed: RP
Comments:
-------------------------------------------------------------------------------
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 02/02/97 Tool: CMP.B2 Tech/shift: Mitch Ridlon (MR)
Roger Poirier (RP)
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80 RP
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 RP
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 23 RP
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 RP
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 20 RP
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 RP
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 RP
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 50 RP
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6 RP
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 RP
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
(paddle not air driven on this tool)
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 16 RP
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 RP
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50 RP
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 26 RP
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 RP
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 48 RP
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 RP
6.1.19 Check Drip Pan for moisture/contamination Completed: RP
6.1.20 Check tubing/fittings for fluid leaks Completed: RP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP
6.1.22 Check stations/components for contamination Completed: RP
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust:8 psi RP
6.1.24 Clean and lubricate the Scrubber rails Completed: RP
6.1.25 Clean and lubricate the Paddle rails Completed: RP
6.1.26 Clean Conditioning Wheel and Housing Completed:
6.1.27 Scrub clean the Polish area tub and walls Completed: RP
6.1.28 Remove all Load and Unload cups and scrub clean Completed: RP
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP
6.1.31 Remove and clean the Vacuum system Check Valve Completed: RP
(water separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: RP
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: RP
6.1.34 Wipe the Process Area Plexiglas doors w/ISO Completed: RP
6.1.35 Clean the slurry delivery tube Completed: n/a
(Tool modified, no longer uses tube)
6.1.36 Check chiller fluid resevoir for proper level Completed: RP
Comments:
6.1.11 N/A Paddle not air driven on this tool.
Engineer informed.
6.1.35 N/A Tool modified, no longer uses tube.
Engineer informed.
|
| 77.1 | ww32 incomplete weekly for cmp.b1 | FABSIX::J_SWENSON | | Wed Feb 05 1997 17:23 | 102 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:2/5/97 TOOL ENTITY:CMP.B1 TECHNICIAN(S): John Poirier = JP
John Swenson = JS
START TIME:3:30 p.m. COMPLETED TIME:5:15p.m.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 81 JP
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 JP
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 22 JP
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45 JP
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 JP
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 JP
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 JP
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 JP
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 JP
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 JP
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 JP
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 JP
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 JP
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 18 JP
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 JP
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 18 JP
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 JP
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 JP
6.1.19 Check Drip Pans for moisture/contamination Completed: X JP
6.1.20 Check tubing/fittings for fluid leaks Completed: X JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X JP
6.1.22 Check stations/components for contamination Completed: X JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: X JP
6.1.24 Clean and lubricate the Scrubber rails Completed: X JP
6.1.25 Clean and lubricate the Paddle rails Completed: X JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: X JP
6.1.27 Scrub clean the Polish area tub and walls Completed: X JP
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: X JS
6.1.32 Check Carrier clean brushes for defects Completed: X JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X JP
6.1.35 Check chiller fluid resevoir for proper level Completed: X JP
6.1.36 Check the chiller readout for 24 degrees C. Completed:
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: X JP
6.1.38 Check the slurry flow alarm. Completed: X JP
Comments:
|
| 77.1 | weekly entries complete, monthly's open | SUBPAC::LANDRY | | Mon Feb 10 1997 08:09 | 77 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:2/09/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Tim Landry (TL)
Brendan Finn (BF)
Jim Sadin (JS)
INITIAL
__TL__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__TL__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__TL__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36
__JS__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BF__ 6.1.5 Check all tubing and fittings for leaks.
__BF__ 6.1.6 Check all tubing and fittings for air leaks.
_JS/BF_6.1.7 Check all indicator lights.
TL/JS/BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL__ 6.1.9 Wipe down polish table, tub, and splash ring.
__JS__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__JS__ 6.1.11 Wipe down pad conditioning arm.
__JS__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BF__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF__ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF__ 6.1.15 Remove and clean O-rings, replace if necessary.
__BF__ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__TL__ 6.1.17 Wipe down all surfaces of the robot.
__TL__ 6.1.18 Clean end effector vacuum chuck air port.
__TL__ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__JS__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__TL__ 6.1.23 Check Neslab TCU for leaks.
__TL__ 6.1.24 Check Neslab TCU temperature readout.
_TL/BF_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_TL/BF_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BF__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.3 System unable to reach 40 PSI (36 at PM), Equip Eng notified
6.1.20 Point of use slurry filters no longer used, Equip Eng notified
|
| 77.1 | peristaltic lines need changing..that's it! | SUBPAC::LANDRY | | Wed Feb 12 1997 19:38 | 170 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 2-11-97 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH: James Sadin (JS)
Brendan Finn (BF)
Timothy Landry (TL)
INITIAL
JS/BF/TL 6.2.1 Perform weekly PM checks in addition to this monthly list.
______ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__BF__ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__TL__ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.002_____
__BF__ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___.001_______
Left Spindle Runout:_____.001_______
__JS__ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:____.001______
Left Spindle Hub Runout:_____.001______
___NA__ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:
Right Spindle Force Error:
Left Spindle Calibration Variable:
Pre-adjust: Post-adjust:
Right Spindle Calibration Variable:
Pre-adjust: Post-adjust:
__JS___ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
__JS____ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
__BF____ 6.2.10 Check shuttle travel. Adjust if necessary.
__TL__ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:___24.02_____ Post-adjust:___NONE_________
__TL__ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15.01/-15.01 Post-adjust:___NONE______
__TL__ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:___5.00_____ Post-adjust:___5.00____
__TL__ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:___9.9___ Post-adjust:__none available____
__BF__ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__TL__ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__BF__ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__BF__ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connections.
COMMENTS: 6.2.17 Twelve volt power supply is not equipped with adjust-
ment capabilities. Read is taken for a reference only.
6.1.18 The Glycol solution was emptied and a new batch was
installed
6.2.7 Jim Tooker has the results of the downforce cal.
6.2.2 Peristaltic lines still need to be changed.
================================================================================
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:2/09/97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: Tim Landry (TL)
Brendan Finn (BF)
Jim Sadin (JS)
INITIAL
__TL__ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
__TL__ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 85
Post-adjust: 85
__TL__ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 36
__JS__ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BF__ 6.1.5 Check all tubing and fittings for leaks.
__BF__ 6.1.6 Check all tubing and fittings for air leaks.
_JS/BF_6.1.7 Check all indicator lights.
TL/JS/BF 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
__TL__ 6.1.9 Wipe down polish table, tub, and splash ring.
__JS__ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
__JS__ 6.1.11 Wipe down pad conditioning arm.
__JS__ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
__BF__ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BF__ 6.1.14 Wipe down outer surface of both spindle hubs.
__BF__ 6.1.15 Remove and clean O-rings, replace if necessary.
__BF__ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
__TL__ 6.1.17 Wipe down all surfaces of the robot.
__TL__ 6.1.18 Clean end effector vacuum chuck air port.
__TL__ 6.1.19 Inspect and clean end effector air nozzle.
_N/A_ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS__ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
__JS__ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__TL__ 6.1.23 Check Neslab TCU for leaks.
__TL__ 6.1.24 Check Neslab TCU temperature readout.
_TL/BF_ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_TL/BF_ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
__BF__ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
6.1.20 Point of use slurry filters no longer used, Equip Eng notified
|
| 77.1 | ww33 CMP.B3 incomplete monthly pm checksheet. | FABSIX::L_SHKOLNIKOV | | Sat Feb 15 1997 07:33 | 183 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE:02.15.97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): Leon Shkolnikov - LS
Dave Whitford - DW
START TIME: 07:00 am COMPLETED TIME:
6.2.1 Change Peristaltic Pump Lines and check flow Completed: DW
6.2.2 Clean Polish area tub drains for clogs Completed:
6.2.3 Check all table belts for defects Completed:
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed:
Down Frc: Head 1 Pre-Adj:______ Post-adj:______
Head 2 Pre-Adj:______ Post-adj:______
Head 3 Pre-Adj:______ Post-adj:______
Head 4 Pre-Adj:______ Post-adj:______
Head 5 Pre-Adj:______ Post-adj:______
6.2.5 Perform Down Force Calibration on Conditioner Completed:
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj:_____________
Actual Down Force Post-Adj:____________
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: ls
6.2.7 Check the Load Flipper alignment Completed:
6.2.8 Check the Unload Flipper alignment Completed:
6.2.9 Check Elevator alignments Completed:
6.2.10 Check wafer unload, from Index table to cassette Completed:
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre: Post: Tech:
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre: Post: Tech:
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: Post: Tech:
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed:
6.2.15 Check Vacuum Pump Diaphrams Completed:
6.2.16 Replace liquid separator filter element Completed:
6.2.17 Check Vacuum Tank/Pump lines Completed:
6.2.18 Check carrier to Load Cup Position alignments Completed:
6.2.19 Check Load Cup Height to carrier alignments Completed:
6.2.20 Check the Robot alignments Completed:
6.2.21 Check Muffin Fans for proper operation Completed:
Comments:
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: TOOL ENTITY: TECHNICIAN(S):
START TIME: COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 ls
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 54 ls
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 24 ls
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 ls
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 ls
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 ls
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 ls
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 ls
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6.0 ls
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: n/a
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 ls
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 ls
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 ls
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 ls
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 ls
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 ls
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 ls
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 ls
6.1.19 Check Drip Pans for moisture/contamination Completed:
6.1.20 Check tubing/fittings for fluid leaks Completed:
6.1.21 Check tubing/fittings for pneumatic leaks Completed:
6.1.22 Check stations/components for contamination Completed:
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 10 ls
6.1.24 Clean and lubricate the Scrubber rails Completed: ls
6.1.25 Clean and lubricate the Paddle rails Completed: ls
6.1.26 Remove and clean conditioning Wheel and Housing Completed:
6.1.27 Scrub clean the Polish area tub and walls Completed:
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed:
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DW
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed:
6.1.32 Check Carrier clean brushes for defects Completed: ls
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed:
6.1.35 Check chiller fluid resevoir for proper level Completed: ls
6.1.36 Check the chiller readout for 24 degrees C. Completed: ls
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:
6.1.38 Check the slurry flow alarm. Completed:
Comments:
|
| 77.1 | INCOMPLETE WEEKLY PM CHECKSHEET FOR CMP.B3, WW34 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed Feb 19 1997 05:23 | 101 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 2/19/97 TOOL ENTITY: CMP.B3 TECH(S): Brian Jubinville - BJ
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 BJ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 22 BJ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 BJ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 BJ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 BJ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: n/a BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BJ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BJ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 BJ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BJ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BJ
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 BJ
6.1.19 Check Drip Pans for moisture/contamination Completed:
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed:
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 10 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed:
6.1.25 Clean and lubricate the Paddle rails Completed:
6.1.26 Remove and clean conditioning Wheel and Housing Completed:
6.1.27 Scrub clean the Polish area tub and walls Completed:
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed:
6.1.30 Check slurry pump hoses and connectors for leaks Completed:
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed:
6.1.32 Check Carrier clean brushes for defects Completed:
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed:
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed:
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:
6.1.38 Check the slurry flow alarm. Completed:
Comments:
|
| 77.1 | WEEKLY PM STARTED | FABSIX::O_WHITFORD | Lead, follow or step aside. | Fri Feb 28 1997 07:41 | 102 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:2/28/97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): Dave Whitford (DW)
START TIME: COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 DW
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 DW
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 26 DW
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 DW
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 DW
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 DW
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed:
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 DW
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 DW
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed:
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 DW
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 DW
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 DW
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 DW
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 DW
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 22 DW
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 43 DW
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 DW
6.1.19 Check Drip Pans for moisture/contamination Completed:
6.1.20 Check tubing/fittings for fluid leaks Completed:
6.1.21 Check tubing/fittings for pneumatic leaks Completed:
6.1.22 Check stations/components for contamination Completed:
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed:
6.1.24 Clean and lubricate the Scrubber rails Completed:
6.1.25 Clean and lubricate the Paddle rails Completed:
6.1.26 Remove and clean conditioning Wheel and Housing Completed:
6.1.27 Scrub clean the Polish area tub and walls Completed:
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed:
6.1.30 Check slurry pump hoses and connectors for leaks Completed:
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed:
6.1.32 Check Carrier clean brushes for defects Completed:
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed:
6.1.35 Check chiller fluid resevoir for proper level Completed:
6.1.36 Check the chiller readout for 24 degrees C. Completed:
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:
6.1.38 Check the slurry flow alarm. Completed:
Comments:
|
| 77.2 | cmp.b2 semi annual | FABSIX::B_FINN | | Tue Mar 04 1997 18:22 | 232 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Semi-Annual Preventative Maintenance Check Sheet, Rev. E
DATE: 3/4/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S):Brendan Finn=BF
Bob Gee =BG
Tim Landry =TL
Jim Sadin =JS
START TIME: 0900 hours COMPLETED TIME:
6.4.1 Check all interlocks for functionality Completed: JS
6.4.2 Check all EMO's for functionality Completed: JS
6.4.3 Lubricate the Rotary Union Completed:
6.4.4 Lubricate the Lead Screw Completed:
6.4.5 Lubricate the Linear Guide Rails Completed:
6.4.6 Lubricate the Idler Pulley Completed:
6.4.7 Rebuild the vacuum pump using the appropriate
rebuild kit. Completed: BG
Comments:
=======================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE: 3/4/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S):Brendan Finn=BF
Bob Gee =BG
Tim Landry =TL
Jim Sadin =JS
START TIME: 0900 hours COMPLETED TIME:
6.2.1 Change Peristaltic Pump Lines and check flow Completed: BG
6.2.2 Clean Polish area tub drains for clogs Completed: JS
6.2.3 Check all table belts for defects Completed: BG
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: BF,BG
JS,TL
Down Frc: Head 1 Pre-Adj: 357 Post-adj: 354
Head 2 Pre-Adj: 336 Post-adj: 354
Head 3 Pre-Adj: 334 Post-adj: 354
Head 4 Pre-Adj: 354 Post-adj: 354
Head 5 Pre-Adj: 338 Post-adj: 354
6.2.5 Perform Down Force Calibration on Conditioner Completed: BF,BG
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj. 77.4
Actual Down Force Post-Adj: 77.4
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: JS, TL
6.2.7 Check the Load Flipper alignment Completed: TL,BF,JS
BG,DR
6.2.8 Check the Unload Flipper alignment Completed: TL,BF,JS
BG,DR
6.2.9 Check Elevator alignments Completed: TL,BF,JS
BG
6.2.10 Check wafer unload, from Index table to cassette Completed: TL,BF,JS
BG
6.2.11 Check the +24 Volt power supply for +/-1V
of 24V. Pre: 24.12 Post: 24.12 Tech: JS,TL
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V. Pre: +15.03 Post: +15.03 Tech: JS, TL
Pre: -15.06 Post: -15.06
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: 4.96 Post: 4.96 Tech: JS, TL
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: JS, TL
6.2.15 Check Vacuum Pump Diaphrams Completed: BG
6.2.16 Replace liquid separator filter element Completed: BG
6.2.17 Check Vacuum Tank/Pump lines Completed: BG
6.2.18 Check carrier to Load Cup Position alignments Completed: BF,JS,BG
TL
6.2.19 Check Load Cup Height to carrier alignments Completed:
6.2.20 Check the Robot alignments Completed: JS, TL
6.2.21 Check Muffin Fans for proper operation Completed:
Comments:
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 3/4/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S): Brendan Finn (BF)
Jim Sadin (JS)
Tim Landry (TL)
Bob Gee (BG)
START TIME: COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 82
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 30
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6.2
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/a
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 52
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 26
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45
6.1.19 Check Drip Pans for moisture/contamination Completed: BG
6.1.20 Check tubing/fittings for fluid leaks Completed: BG
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BG
6.1.22 Check stations/components for contamination Completed: TL,BF,JS
BG
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: BF
6.1.24 Clean and lubricate the Scrubber rails Completed: BF
6.1.25 Clean and lubricate the Paddle rails Completed: BF
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BG
6.1.27 Scrub clean the Polish area tub and walls Completed: JS
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: JS/BF/TL/BG
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BF
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BF
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BG
6.1.32 Check Carrier clean brushes for defects Completed: TL
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: JS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BF
6.1.35 Check chiller fluid resevoir for proper level Completed: BF
6.1.36 Check the chiller readout for 24 degrees C. Completed: JS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:
6.1.38 Check the slurry flow alarm. Completed: BF
Comments:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/a
(Applicable for CMP.B1 only) Does not apply to CMP.B2
6.1.35 Added water to chiller
|
| 77.3 | cmp.b1 monthly PM. | FABSIX::L_SHKOLNIKOV | No more experiments with freedom | Thu Mar 06 1997 07:38 | 187 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE: 03/06/97 TOOL ENTITY: CMP.B1 TECHNICIAN(S): DW Dave Whitford
LS Leon Shkolnikov
START TIME: 05:45 am COMPLETED TIME:
6.2.1 Change Peristaltic Pump Lines and check flow Completed:
6.2.2 Clean Polish area tub drains for clogs Completed: DW/LS
6.2.3 Check all table belts for defects Completed:
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: DW/LS
Down Frc: Head 1 Pre-Adj: 358 Post-adj: 354
Head 2 Pre-Adj: 323 Post-adj: 354
Head 3 Pre-Adj: 360 Post-adj: 354
Head 4 Pre-Adj: 340 Post-adj: 354
Head 5 Pre-Adj: 356 Post-adj: 354
6.2.5 Perform Down Force Calibration on Conditioner Completed: DW/LS
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj: 88.1
Actual Down Force Post-Adj: 76.8
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: LS
6.2.7 Check the Load Flipper alignment Completed: LS
6.2.8 Check the Unload Flipper alignment Completed: LS
6.2.9 Check Elevator alignments Completed: LS
6.2.10 Check wafer unload, from Index table to cassette Completed: LS
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre:23.8 Post:23.8 Tech: LS
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre: 15.8 Post:15.3 Tech: LS
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre:4.9 Post:4.9 Tech: LS
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: 29.9 LS
6.2.15 Check Vacuum Pump Diaphrams Completed:
6.2.16 Replace liquid separator filter element Completed: LS
6.2.17 Check Vacuum Tank/Pump lines Completed: LS
6.2.18 Check carrier to Load Cup Position alignments Completed:
6.2.19 Check Load Cup Height to carrier alignments Completed: LS
6.2.20 Check the Robot alignments Completed: LS
6.2.21 Check Muffin Fans for proper operation Completed: LS
Comments:
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 03.06.97 TOOL ENTITY: CMP.B1 TECHNICIAN(S): DW Dave Whitford
LS Leon Shkolnikov
START TIME: 05:45 am. COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed:
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed:
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed:
6.1.4 Check Load Cup pressure for 40-50 PSI Completed:
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed:
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed:
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed:
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed:
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed:
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed:
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed:
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed:
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed:
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed:
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed:
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed:
6.1.18 Check MHTA pressure for 75-85 PSI Completed:
6.1.19 Check Drip Pans for moisture/contamination Completed:
6.1.20 Check tubing/fittings for fluid leaks Completed:
6.1.21 Check tubing/fittings for pneumatic leaks Completed:
6.1.22 Check stations/components for contamination Completed: LS/DW
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed:
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: LS/DW
6.1.27 Scrub clean the Polish area tub and walls Completed: LS/DW
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed:
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: LS
6.1.32 Check Carrier clean brushes for defects Completed: LS
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed:
6.1.35 Check chiller fluid resevoir for proper level Completed: LS
6.1.36 Check the chiller readout for 24 degrees C. Completed:
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: LS
6.1.38 Check the slurry flow alarm. Completed: LS
Comments:
|
| 77.4 | Began Mo. PM | FABSIX::O_WHITFORD | Lead, follow or step aside. | Fri Mar 07 1997 07:27 | 170 |
|
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 3/6/97 SYSTEM RTC CODE: CMP.A2 EQUIP. TECH.: Dave Whitford (DW)
Leon Shkolnikov (LS)
INITIAL
DW 6.1.1 CDA pressure @ 100 PSI: Pre-adjust: 100
Post-adjust: 100
DW 6.1.2 N2 pressure @ 85 PSI: Pre-adjust: 83
Post-adjust: 83
DW 6.1.3 DI Water pressure @ 40 PSI: Actual Reading: 42
_______ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_______ 6.1.5 Check all tubing and fittings for leaks.
_______ 6.1.6 Check all tubing and fittings for air leaks.
_______ 6.1.7 Check all indicator lights.
_______ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_______ 6.1.9 Wipe down polish table, tub, and splash ring.
_______ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_______ 6.1.11 Wipe down pad conditioning arm.
_______ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_______ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_______ 6.1.14 Wipe down outer surface of both spindle hubs.
_______ 6.1.15 Remove and clean O-rings, replace if necessary.
_______ 6.1.16 Wipe down inside and outside of load/cleaning station buckets.
_______ 6.1.17 Wipe down all surfaces of the robot.
_______ 6.1.18 Clean end effector vacuum chuck air port.
_______ 6.1.19 Inspect and clean end effector air nozzle.
_______ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_______ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_______ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_______ 6.1.23 Check Neslab TCU for leaks.
_______ 6.1.24 Check Neslab TCU temperature readout.
_______ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_______ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_______ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:
Both carriers are approaching the max wafer count (both at 358) The new
carriers are on the cart by the tool.
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE:__________ SYSTEM RTC CODE:__________ EQUIP. TECH.:_________________
INITIAL
_______ 6.2.1 Perform weekly PM checks in addition to this monthly list.
_______ 6.2.2 Replace the fluid lines on the peristaltic pumps.
_______ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_______ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:____________
_______ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:____________
Left Spindlele Runout:____________
_______ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:____________
Left Spindle Hub Runout:____________
_______ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:____________
Right Spindle Force Error:____________
Left Spindle Calibration Variable:
Pre-adjust:____________ Post-adjust:____________
Right Spindle Calibration Variable:
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_______ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
_______ 6.2.10 Check shuttle travel. Adjust if necessary.
_______ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
_______ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
_______ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
_______ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 77.5 | CMP.B3 Incomplete Monthly PM | FABSIX::R_POIRIER | | Sun Mar 09 1997 07:19 | 187 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE: 3/9/97 TOOL ENTITY:cmp.b3 TECHNICIAN(S):Mitch Ridlon
Roger Poirier
Albert Quillen
START TIME:0500 COMPLETED TIME:
6.2.1 Change Peristaltic Pump Lines and check flow Completed:
6.2.2 Clean Polish area tub drains for clogs Completed:
6.2.3 Check all table belts for defects Completed:
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: MR, AQ
Down Frc: Head 1 Pre-Adj: 344 Post-adj: 354
Head 2 Pre-Adj: 348 Post-adj: 354
Head 3 Pre-Adj: 343 Post-adj: 354
Head 4 Pre-Adj: 344 Post-adj: 354
Head 5 Pre-Adj: 351 Post-adj: 354
NOTE: The spec states a deviation of +/- 5 lbs.
6.2.5 Perform Down Force Calibration on Conditioner Completed:
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj:_____________
Actual Down Force Post-Adj:____________
6.2.6 Check Scrubber Brushes for contaminates/defects Completed:
6.2.7 Check the Load Flipper alignment Completed:
6.2.8 Check the Unload Flipper alignment Completed:
6.2.9 Check Elevator alignments Completed:
6.2.10 Check wafer unload, from Index table to cassette Completed:
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre: Post: Tech:
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre: Post: Tech:
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: Post: Tech:
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed:
6.2.15 Check Vacuum Pump Diaphrams Completed:
6.2.16 Replace liquid separator filter element Completed:
6.2.17 Check Vacuum Tank/Pump lines Completed:
6.2.18 Check carrier to Load Cup Position alignments Completed:
6.2.19 Check Load Cup Height to carrier alignments Completed:
6.2.20 Check the Robot alignments Completed:
6.2.21 Check Muffin Fans for proper operation Completed:
Comments:
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: TOOL ENTITY: TECHNICIAN(S):
START TIME: COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed:
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed:
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed:
6.1.4 Check Load Cup pressure for 40-50 PSI Completed:
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed:
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed:
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed:
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed:
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed:
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed:
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed:
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed:
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed:
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed:
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed:
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed:
6.1.18 Check MHTA pressure for 75-85 PSI Completed:
6.1.19 Check Drip Pans for moisture/contamination Completed:
6.1.20 Check tubing/fittings for fluid leaks Completed:
6.1.21 Check tubing/fittings for pneumatic leaks Completed:
6.1.22 Check stations/components for contamination Completed:
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed:
6.1.24 Clean and lubricate the Scrubber rails Completed:
6.1.25 Clean and lubricate the Paddle rails Completed:
6.1.26 Remove and clean conditioning Wheel and Housing Completed: RP
6.1.27 Scrub clean the Polish area tub and walls Completed: RP
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed:
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed:
6.1.32 Check Carrier clean brushes for defects Completed:
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: RP
6.1.35 Check chiller fluid resevoir for proper level Completed:
6.1.36 Check the chiller readout for 24 degrees C. Completed:
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:
6.1.38 Check the slurry flow alarm. Completed:
Comments:
|
| 77.1 | CMP.A1 SEMI ANNUAL PM INCOMPLETE CHECKSHEET | FABSIX::J_SADIN | Freedom isn't free. | Mon Mar 17 1997 19:21 | 211 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE: 03-17-97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: BRENDAN FINN (BF)
BOB GEE (BG)
TIM LANDRY (TL)
JAMES SADIN (JS)
INITIAL
__JS___ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:__100___
Post-adjust:_100____
__JS___ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:__80____
Post-adjust:_80*_____
__JS___ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:__36*___
_______ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
__BF___ 6.1.5 Check all tubing and fittings for leaks.
__BG___ 6.1.6 Check all tubing and fittings for air leaks.
__BF___ 6.1.7 Check all indicator lights.
________6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_______ 6.1.9 Wipe down polish table, tub, and splash ring.
_______ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_______ 6.1.11 Wipe down pad conditioning arm.
_______ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_______ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
__BG___ 6.1.14 Wipe down outer surface of both spindle hubs.
_BG/BF_ 6.1.15 Remove and clean O-rings, replace if necessary.
_______ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
_______ 6.1.17 Wipe down all surfaces of the robot.
_______ 6.1.18 Clean end effector vacuum chuck air port.
_______ 6.1.19 Inspect and clean end effector air nozzle.
__N/A__ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
__JS___ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_JS/TL_ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
__JS___ 6.1.23 Check Neslab TCU for leaks.
__JS___ 6.1.24 Check Neslab TCU temperature readout.
__TL___ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
__TL___ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_______ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
_________6.1.3 MAX AT 36, CAN'T GET 40._(ENG INFORMED)_____________________
_________6.1.2 MAX AT 80, CAN'T GET 85._(ENG INFORMED)_____________________
_________6.1.20 SYSTEM HAS NO POINT OF USE SLURRY FILTERS(ENG INFORMED)
___________________________________________________________________________
--------------------------------------------------------------------------------
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 03-17-97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: BRENDAN FINN (BF)
BOB GEE (BG)
TIM LANDRY (TL)
JAMES SADIN (JS)
INITIAL
_______ 6.2.1 Perform weekly PM checks in addition to this monthly list.
__JS___ 6.2.2 Replace the fluid lines on the peristaltic pumps.
__BG___ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
__BF___ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:___.001"____
__BF___ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:___0.025 ADJUSTED TO .001"__
Left Spindlele Runout:__.001"_____
__BF___ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:___.001"____
Left Spindle Hub Runout:_____.001"__
_______ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:____________
Right Spindle Force Error:____________
Left Spindle Calibration Variable:
Pre-adjust:____________ Post-adjust:____________
Right Spindle Calibration Variable:
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_______ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
_______ 6.2.10 Check shuttle travel. Adjust if necessary.
_TL/JS_ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:__24.03V____ Post-adjust:___24.03V___
_TL/JS_ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust: +15V/-15.01V Post-adjust: +15V/-15.01V
_TL/JS_ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:___4.99V____ Post-adjust:____4.99V___
_TL/JS_ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____9.91ACV POST-AJDUST:____9.91V*__
__BG___ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
__BG___ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
__BG___ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
__BF___ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
__________6.2.17 - NON ADJUSTABLE - REFERENCE READING ONLY_________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Semmi-annual Preventive Maintenance Check Sheet, REV. C
DATE: 03-17-97 SYSTEM RTC CODE: CMP.A1 EQUIP TECH: BRENDAN FINN (BF)
JAMES SADIN (JS)
INITIAL
_______ 6.3.1 Perform Weekly and Monthly PM's in addition to this Semi-Annual
list.
_______ 6.3.2 Check all safety interlocked doors for proper operation.
_______ 6.3.2 Check all EMO's for proper operation.
_BF/JS_ 6.3.3 Change oil in the brush rotation gear box using AGMA #8 or
equivalent oil.
_BF/JS_ 6.3.4 Change oil in the left and right spindle gear boxes using AGMA
#8 or equivalent oil.
_BF/JS_ 6.3.5 Change oil in the polish table gear box using AGMA #8 or
equivalent oil.
COMMENTS:__________________________________________________________________
___________LEFT ROTARY UNION FOUND TO BE BAD. REPLACED. ___________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 77.1 | WEEKLY PM FOR CMP.B1 STARTED AND INCOMPLETE | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 10 1997 21:36 | 98 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:04/10/97 TOOL ENTITY: CMP.B1 TECHNICIAN(S):Brian Jubinville (BJ)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 BJ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 22 BJ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45 BJ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 BJ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 BJ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 30 BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BJ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BJ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 17 BJ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BJ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BJ
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 BJ
6.1.19 Check Drip Pans for moisture/contamination Completed:
6.1.20 Check tubing/fittings for fluid leaks Completed:
6.1.21 Check tubing/fittings for pneumatic leaks Completed:
6.1.22 Check stations/components for contamination Completed:
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 5 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed:
6.1.25 Clean and lubricate the Paddle rails Completed:
6.1.26 Remove and clean conditioning Wheel and Housing Completed:
6.1.27 Scrub clean the Polish area tub and walls Completed:
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed:
6.1.30 Check slurry pump hoses and connectors for leaks Completed:
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed:
6.1.32 Check Carrier clean brushes for defects Completed:
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed:
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:
6.1.38 Check the slurry flow alarm. Completed:
Comments:
|
| 77.2 | MONTHLY PM FOR CMP.B2 FOR WW41 STARTED AND INCOMPLETE | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 10 1997 21:56 | 184 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE: 4/10/97 TOOL ENTITY: CMP.B2 TECHNICIAN(S): Brian Jubinville (BJ)
6.2.1 Change Peristaltic Pump Lines and check flow Completed:
6.2.2 Clean Polish area tub drains for clogs Completed:
6.2.3 Check all table belts for defects Completed:
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed:
Down Frc: Head 1 Pre-Adj: Post-adj:
Head 2 Pre-Adj: Post-adj:
Head 3 Pre-Adj: Post-adj:
Head 4 Pre-Adj: Post-adj:
Head 5 Pre-Adj: Post-adj:
6.2.5 Perform Down Force Calibration on Conditioner Completed:
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj.
Actual Down Force Post-Adj:
6.2.6 Check Scrubber Brushes for contaminates/defects Completed:
6.2.7 Check the Load Flipper alignment Completed: BJ
6.2.8 Check the Unload Flipper alignment Completed: BJ
6.2.9 Check Elevator alignments Completed: BJ
6.2.10 Check wafer unload, from Index table to cassette Completed: BJ
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24V. Pre: 22.5 Post: Tech: **
6.2.12 Check the +15 Volt power supply for +/- 1V
of 15V. Pre: 15.01 Post: 15.01 Tech: BJ
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: 4.8 Post: 4.8 Tech: BJ
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed:
6.2.15 Check Vacuum Pump Diaphrams Completed:
6.2.16 Replace liquid separator filter element Completed:
6.2.17 Check Vacuum Tank/Pump lines Completed:
6.2.18 Check carrier to Load Cup Position alignments Completed:
6.2.19 Check Load Cup Height to carrier alignments Completed:
6.2.20 Check the Robot alignments Completed: BJ
6.2.21 Check Muffin Fans for proper operation Completed:
Comments: * 6.2.11 - I checked the 24V at TB7 and it was at 22.5.
I wasn't able to adjust the @$v supply at this time so
it needs to be checked.
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 4/1097 TOOL ENTITY: CMP.B2 TECHNICIAN(S): Brian Jubinville (BJ)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 BJ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 26 BJ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 BJ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 20 BJ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 50 BJ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BJ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BJ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 25 BJ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BJ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BJ
6.1.19 Check Drip Pans for moisture/contamination Completed:
6.1.20 Check tubing/fittings for fluid leaks Completed:
6.1.21 Check tubing/fittings for pneumatic leaks Completed:
6.1.22 Check stations/components for contamination Completed:
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 2 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed:
6.1.25 Clean and lubricate the Paddle rails Completed:
6.1.26 Remove and clean conditioning Wheel and Housing Completed:
6.1.27 Scrub clean the Polish area tub and walls Completed:
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed:
6.1.30 Check slurry pump hoses and connectors for leaks Completed:
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed:
6.1.32 Check Carrier clean brushes for defects Completed:
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed:
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:
6.1.38 Check the slurry flow alarm. Completed:
Comments:
|
| 77.1 | WW42 MONTHLY PM CHECKSHEET | ASDG::POIRIER | | Thu Apr 17 1997 20:35 | 188 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE:4/17/97 TOOL ENTITY:CMP.B3 TECHNICIAN(S): John Poirier (JP)
Brad Westphal(BW)
Mike Standing(MS)
START TIME: 5:35 p.m. COMPLETED TIME:
6.2.1 Change Peristaltic Pump Lines and check flow Completed:
6.2.2 Clean Polish area tub drains for clogs Completed: JP
6.2.3 Check all table belts for defects Completed: JP
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: JP,BW,MS
Down Frc: Head 1 Pre-Adj: 353.9 Post-adj: 353.9
Head 2 Pre-Adj: 354.2 Post-adj: 354.2
Head 3 Pre-Adj: 356.1 Post-adj: 354.7
Head 4 Pre-Adj: 355.8 Post-adj: 354.1
Head 5 Pre-Adj: 355.0 Post-adj: 353.7
6.2.5 Perform Down Force Calibration on Conditioner Completed:
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj: 68.1 PSI
Actual Down Force Post-Adj:____________
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: JP
6.2.7 Check the Load Flipper alignment Completed:
6.2.8 Check the Unload Flipper alignment Completed:
6.2.9 Check Elevator alignments Completed:
6.2.10 Check wafer unload, from Index table to cassette Completed:
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre: 24.05V Post: 24.05V Tech: MS
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre: 15.24V Post: 15.24V Tech: MS
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: 4.84V Post: 4.84V Tech: MS
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed:
6.2.15 Check Vacuum Pump Diaphrams Completed:
6.2.16 Replace liquid separator filter element Completed: JP
6.2.17 Check Vacuum Tank/Pump lines Completed: JP
6.2.18 Check carrier to Load Cup Position alignments Completed:
6.2.19 Check Load Cup Height to carrier alignments Completed:
6.2.20 Check the Robot alignments Completed:
6.2.21 Check Muffin Fans for proper operation Completed: JP
Comments:
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:4/17/97 TOOL ENTITY:CMP.B1 TECHNICIAN(S): JOHN POIRIER (JP)
BRAD WESTPHAL(BW)
MIKE STANDING(MS)
START TIME: 5:35 P.M. COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: JP 85
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: JP 65
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: JP 30
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: JP 40
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: JP 10
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: JP 35
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: JP 30
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: JP 40
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: JP 6
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only) SEE NOTE
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: JP 20
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: JP 50
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: JP 50
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: JP 15
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: JP 25
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: JP 20
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: JP 40
6.1.18 Check MHTA pressure for 75-85 PSI Completed: JP 80
6.1.19 Check Drip Pans for moisture/contamination Completed: BW
6.1.20 Check tubing/fittings for fluid leaks Completed: BW
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BW
6.1.22 Check stations/components for contamination Completed: BW
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: JP 9
6.1.24 Clean and lubricate the Scrubber rails Completed: JP
6.1.25 Clean and lubricate the Paddle rails Completed: JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed:
6.1.27 Scrub clean the Polish area tub and walls Completed:
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: MS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: MS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: JP
6.1.32 Check Carrier clean brushes for defects Completed: JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: MS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: MS
6.1.35 Check chiller fluid resevoir for proper level Completed: JP
6.1.36 Check the chiller readout for 24 degrees C. Completed: JP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:
6.1.38 Check the slurry flow alarm. Completed: JP
Comments:
* The door fastners were treated with loctite to prevent loosening.
|
| 77.1 | CMP.A1 SA incomplete | FABSIX::B_WESTPHAL | Bradley BP#661 EXT# 6610 | Sat May 10 1997 20:33 | 99 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:5/10/97___ SYSTEM RTC CODE:CMP-SCRUB.A1 TECH. NAME:JOHN POIRIER,
MIKE STANDING
SAM GRALEY
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:50PSI_JP____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:38PSI JP__
6.1.3 Check the Drip Pan for contamination Completed:DRY_JP_____
6.1.4 Check all tubing/fittings for leaks Completed:DRY_JP_____
6.1.5 Check all wafer transport belts Completed:___________
6.1.6 Clean the Send module and Scrub modules Completed:DONE__JP___
6.1.7 Check scrub brushes for contamination Completed:CLEAN_JP___
6.1.8 Check scrub brush height in both modules Completed:___________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE:__________ SYSTEM RTC CODE:__________ TECH. NAME:__________________
6.1 Perform Weekly PM Completed:___________
6.3.1 Check muffin fans for functionality Completed:GOOD JP____
6.3.2 Check motor drive belts for defects Completed:__BW_______
6.3.3 Check the robot knife for loose hardware Completed:GOOD JP____
6.3.4 Check the spin station grippers Completed:GOOD JP____
6.3.5 Check the motor speed output readings Completed:___________
Comments:__ROBOT ROTATION BELT WAS REPLACED AND MOTOR POSITION ADJUSTED.___
__________________________________________________________________
__________________________________________________________________
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE:__________ SYSTEM RTC CODE:__________ TECH. NAME:__________________
6.1 Perform Weekly PM Completed:___________
6.3 Perform Quarterly PM Completed:___________
6.4.1 Check all EMO's for functionality Completed:GOOD MS____
6.4.2 Check all interlocks for functionality Completed:GOOD MS____
6.4.3 Check heat lamp housing/wiring for defects Completed:GOOD MS____
6.4.4 Check the robot hardware/wiring for defects Completed:___________
6.4.5 Check the spindle bearings/bushings Completed:___________
6.4.6 Check the spin sta. rollers/bearings/bushings Completed:___________
6.4.7 Check the brush sta. drive bearings/bushings Completed:___________
6.4.8 Check the +5 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
6.4.9 Check the -12 VDC power supply Pre-Adjust:__________
6.4.10 Check the +12 VDC power supply Pre-Adjust:__________
6.4.11 Check the +24 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
6.4.12 Check the +48 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 77.1 | Monthly PM FOR CMP.A1 incomplete | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed May 14 1997 08:40 | 163 |
| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE: 5/14/97 SYSTEM RTC CODE: CMP.A1 EQUIP. TECH.: Brian Jubinville (BJ)
Dave Morin (DM)
INITIAL BJ/DM
_______ 6.2.1 Perform weekly PM checks in addition to this monthly list.
_______ 6.2.2 Replace the fluid lines on the peristaltic pumps.
_______ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_______ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:____________
_______ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:____________
Left Spindlele Runout:____________
_______ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:____________
Left Spindle Hub Runout:____________
BJ/DM 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error: pre: -8.69 post: -1.6
Right Spindle Force Error: pre: .3 post: .3
Left Spindle Calibration Variable:
Pre-adjust: 159.02 Post-adjust: 167.71
Right Spindle Calibration Variable:
Pre-adjust: 155.19 Post-adjust: 155.19
_______ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_______ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
_______ 6.2.10 Check shuttle travel. Adjust if necessary.
_______ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
_______ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
_______ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
_______ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:__________ SYSTEM RTC CODE:__________ EQUIP. TECH.:_______________
INITIAL
_______ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:________
Post-adjust:________
_______ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:________
Post-adjust:________
_______ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:________
_______ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_______ 6.1.5 Check all tubing and fittings for leaks.
_______ 6.1.6 Check all tubing and fittings for air leaks.
_______ 6.1.7 Check all indicator lights.
_______ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_______ 6.1.9 Wipe down polish table, tub, and splash ring.
_______ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_______ 6.1.11 Wipe down pad conditioning arm.
_______ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_______ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_______ 6.1.14 Wipe down outer surface of both spindle hubs.
_______ 6.1.15 Remove and clean O-rings, replace if necessary.
_______ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
_______ 6.1.17 Wipe down all surfaces of the robot.
_______ 6.1.18 Clean end effector vacuum chuck air port.
_______ 6.1.19 Inspect and clean end effector air nozzle.
_______ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_______ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_______ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_______ 6.1.23 Check Neslab TCU for leaks.
_______ 6.1.24 Check Neslab TCU temperature readout.
_______ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_______ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_______ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
|
| 77.1 | WW47 WEEKLY PM FOR CMP.B3 STARTED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Wed May 21 1997 23:39 | 101 |
| SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:5/21/97 TOOL ENTITY:CMP.B3 TECH(S): Brian Jubinville (BJ)
START TIME: COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 85 BJ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 29 BJ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 BJ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 BJ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 BJ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A * BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BJ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BJ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 BJ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BJ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BJ
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 BJ
6.1.19 Check Drip Pans for moisture/contamination Completed:
6.1.20 Check tubing/fittings for fluid leaks Completed:
6.1.21 Check tubing/fittings for pneumatic leaks Completed:
6.1.22 Check stations/components for contamination Completed:
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 10 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed:
6.1.25 Clean and lubricate the Paddle rails Completed:
6.1.26 Remove and clean conditioning Wheel and Housing Completed:
6.1.27 Scrub clean the Polish area tub and walls Completed:
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed:
6.1.30 Check slurry pump hoses and connectors for leaks Completed:
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed:
6.1.32 Check Carrier clean brushes for defects Completed:
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed:
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:
6.1.38 Check the slurry flow alarm. Completed:
Comments:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI *
(Applicable to CMP.B1 only) EE Notified
|
| 77.2 | CMP.B4 Monthly pm checksheet. | STRATA::STANDING | | Sat May 24 1997 20:06 | 186 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE:5/24/97 TOOL ENTITY:CMP.B4 TECHNICIAN(S):Mike Standing
START TIME: COMPLETED TIME:
6.2.1 Change Peristaltic Pump Lines and check flow Completed:
6.2.2 Clean Polish area tub drains for clogs Completed:
6.2.3 Check all table belts for defects Completed:
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed:
Down Frc: Head 1 Pre-Adj:______ Post-adj:______
Head 2 Pre-Adj:______ Post-adj:______
Head 3 Pre-Adj:______ Post-adj:______
Head 4 Pre-Adj:______ Post-adj:______
Head 5 Pre-Adj:______ Post-adj:______
6.2.5 Perform Down Force Calibration on Conditioner Completed:
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj:_____________
Actual Down Force Post-Adj:____________
6.2.6 Check Scrubber Brushes for contaminates/defects Completed:
6.2.7 Check the Load Flipper alignment Completed:
6.2.8 Check the Unload Flipper alignment Completed:
6.2.9 Check Elevator alignments Completed:
6.2.10 Check wafer unload, from Index table to cassette Completed:
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre: Post: Tech:
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre: Post: Tech:
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: Post: Tech:
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed:
6.2.15 Check Vacuum Pump Diaphrams Completed:
6.2.16 Replace liquid separator filter element Completed:
6.2.17 Check Vacuum Tank/Pump lines Completed:
6.2.18 Check carrier to Load Cup Position alignments Completed:
6.2.19 Check Load Cup Height to carrier alignments Completed:
6.2.20 Check the Robot alignments Completed:
6.2.21 Check Muffin Fans for proper operation Completed:
Comments:Was unable to complete this pm due to the tool CMP.B4 not
being listed on the quartly pm schedule, and due to the bottle neck of
work in CMP production would not release the tool for an extended down
time.
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: TOOL ENTITY: TECHNICIAN(S):
START TIME: COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed:
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed:
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed:
6.1.4 Check Load Cup pressure for 40-50 PSI Completed:
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed:
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed:
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed:
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed:
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed:
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed:
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed:
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed:
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed:
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed:
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed:
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed:
6.1.18 Check MHTA pressure for 75-85 PSI Completed:
6.1.19 Check Drip Pans for moisture/contamination Completed:
6.1.20 Check tubing/fittings for fluid leaks Completed:
6.1.21 Check tubing/fittings for pneumatic leaks Completed:
6.1.22 Check stations/components for contamination Completed:
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed:
6.1.24 Clean and lubricate the Scrubber rails Completed:
6.1.25 Clean and lubricate the Paddle rails Completed:
6.1.26 Remove and clean conditioning Wheel and Housing Completed:
6.1.27 Scrub clean the Polish area tub and walls Completed:
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed:
6.1.30 Check slurry pump hoses and connectors for leaks Completed:
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed:
6.1.32 Check Carrier clean brushes for defects Completed:
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed:
6.1.35 Check chiller fluid resevoir for proper level Completed:
6.1.36 Check the chiller readout for 24 degrees C. Completed:
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:
6.1.38 Check the slurry flow alarm. Completed:
Comments:
|
| 77.3 | ww47 partial checksheet for CMP_SCRUB.A3 | ASDG::POIRIER | | Sat May 24 1997 20:41 | 46 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE:5/24/97 SYSTEM RTC CODE:CMP-SCRUB.A3 TECH. NAME:John Poirier
Mike Standing
6.1 Perform Weekly PM Completed:___________
6.3 Perform Quarterly PM Completed:___________
6.4.1 Check all EMO's for functionality Completed: JP
6.4.2 Check all interlocks for functionality Completed: JP
6.4.3 Check heat lamp housing/wiring for defects Completed: JP
6.4.4 Check the robot hardware/wiring for defects Completed:___________
6.4.5 Check the spindle bearings/bushings Completed:___________
6.4.6 Check the spin sta. rollers/bearings/bushings Completed:___________
6.4.7 Check the brush sta. drive bearings/bushings Completed:___________
6.4.8 Check the +5 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
6.4.9 Check the -12 VDC power supply Pre-Adjust:__________
6.4.10 Check the +12 VDC power supply Pre-Adjust:__________
6.4.11 Check the +24 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
6.4.12 Check the +48 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|