| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 22.1 | SHUTDOWN CHECKSHEET | STRATA::RIDLON | Eliminate the obvious | Mon May 27 1996 07:37 | 25 |
|
CMP.B SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) SCRUB SIDES OF CARRIERS ___B__/5/27__
2) RUN CARRIER BLOW OFF FOR 30 SECONDS ___B__/______
3) REMOVE ALL CARRIERS ___B__/______
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK ___B__/______
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. ___B__/______
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY ___B__/______
7) REMOVE CONDITIONER AND CLEAN ___B__/______
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. ___B__/______
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) ___B__/______
10) DRAIN ELEVATOR AND CONDITIONER TUBE ___B__/______
11) REMOVE PADS, AND CLEAN AND DRY TABLES ___B__/______
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI ___B__/______
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER ___B__/______
14) POWER DOWN SYSTEM.
|
| 22.2 | Startup Checksheet | SUBPAC::LANDRY | | Tue May 28 1996 20:02 | 19 |
|
CMP.B START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. A shift 5/28
2) POWER ON SYSTEM. A shift 5/28
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES A shift 5/28
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY A shift 5/28
5) DRY TABLES, INSTALL PADS A shift 5/28
6) INSTALL SCRUBBER BRUSHES A shift 5/28
7) INSTALL CONDITIONER A shift 5/28
8) INSTALL CARRIERS A shift 5/28
9) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) A shift 5/28
10) IF SLURRY SYSTEM WAS SHUT DOWN, CONTACT ASHLAND CHEMICAL,
REQUEST DI TO BE PURGE FROM SLURRY SYSTEM AND CHARGED WITH
SLURRY AND REQUEST A NEW SLURRY FILTER BE INSTALLED. N/A
11) CALIBRATE SLURRY FLOW A shift 5/28
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC A shift 5/28
|
| 22.3 | weekly pm completed | FABSIX::R_GEE | | Wed Jun 19 1996 00:36 | 82 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 30
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 25
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 22
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: No pressures changed.
The pad needed to be changed
____________________________________________________________
|
| 22.4 | Weekly PM for WW52 completed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jun 27 1996 01:02 | 86 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/25/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 84
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 34
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 22
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 1.5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: A small puddle of gear box oil found under tool. Cleaned
up and checked for source of leak.
Head #3 rotation Infranor blew out at boot-up after
panel were installed. None in stock. Reps have and will
bring it in in the a.m.
|
| 22.5 | B3 weekly PM completed for WW1 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 04 1996 02:52 | 81 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/3/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 1.5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: A large puddle of gear box oil found. Per EE, left as is.
|
| 22.6 | B3 SHUT-DOWN COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 04 1996 02:54 | 26 |
|
CMP.B SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
SHIFT / DATE
1) SCRUB SIDES OF CARRIERS D 7/3/96
2) RUN CARRIER BLOW OFF FOR 30 SECONDS D 7/3/96
3) REMOVE ALL CARRIERS D 7/3/96
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK D 7/3/96
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. D 7/3/96
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY D 7/3/96
7) REMOVE CONDITIONER AND CLEAN D 7/3/96
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. D 7/3/96
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) D 7/3/96
10) DRAIN ELEVATOR AND CONDITIONER TUBE D 7/3/96
11) REMOVE PADS, AND CLEAN AND DRY TABLES D 7/3/96
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI D 7/3/96
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER D 7/3/96
14) POWER DOWN SYSTEM. D 7/3/96
|
| 22.7 | B3 STARTUP COMPLETED | FABSIX::L_SHKOLNIKOV | | Sat Jul 06 1996 04:34 | 21 |
|
CMP.B3 START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. __LS__/7-6-96
2) POWER ON SYSTEM. __LS__/7-6-96
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES __LS__/7-6-96
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY __LS__/7-6-96
5) DRY TABLES, INSTALL PADS __LS__/7-6-96
6) INSTALL SCRUBBER BRUSHES __LS__/7-6-96
7) INSTALL CONDITIONER __LS__/7-6-96
8) INSTALL CARRIERS __LS__/7-6-96
9) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) __LS__/7-6-96
10) IF SLURRY SYSTEM WAS SHUT DOWN, CONTACT ASHLAND CHEMICAL,
REQUEST DI TO BE PURGE FROM SLURRY SYSTEM AND CHARGED WITH
SLURRY AND REQUEST A NEW SLURRY FILTER BE INSTALLED. __LS__/7-6-96
11) CALIBRATE SLURRY FLOW __LS__/7-6-96
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC __LS__/7-6-96
|
| 22.8 | work week #2 weekly p.m. | FABSIX::R_GEE | | Mon Jul 08 1996 05:58 | 81 |
|
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/8/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: B
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 29
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 22
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: A large puddle of gear box oil found. Per EE, left as is.
|
| 22.9 | MONTHLY COMPLETED | STRATA::WESTPHAL | | Fri Jul 19 1996 20:32 | 154 |
| <<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]CMP.NOTE;1 >>>
-< CMP >-
================================================================================
Note 30.1 IN-COMPLETE PMs 1 of 1
FABSIX::L_SHKOLNIKOV 143 lines 19-JUL-1996 07:42
-< b3 monthly incomplete checksheet >-
--------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
DATE: 7/18/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: C+D
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj:408___ Post-adj:375.1_
Head 2 Pre-Adj:389.1_ Post-adj:377.9_
Head 3 Pre-Adj:369.6_ Post-adj:375.1_
Head 4 Pre-Adj:391.2_ Post-adj:378.6_
Head 5 Pre-Adj:387.6_ Post-adj:375.9_
6.2.5 Perform Down Force Calibration on Conditioner Completed:
Actual Down Force Pre-Adj:___76.6______
Actual Down Force Post-Adj:__76.6______
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 24.07
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: +15.1/-14.97
6.2.13 Check the +5 Volt power supply Pre-Adjust: 5.04
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 31
6.2.15 Check Vacuum Pump Diaphrams Completed: X
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
--------------------------------------------------------------------------------
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 82
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 30
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 34
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 25
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 18
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 55
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 1.5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Oil still coming out from main polish table gearbox.
Per EE left as is.
** EP REGULATOR FOR CARRIER #1 DF IS OUT OF CAL.
CAL PROCEDURE/INFO WILL BE FAXED FROM SPEEDFAM AT 9AM.
|
| 22.10 | weekly p.m. | FABSIX::R_GEE | | Mon Jul 22 1996 22:43 | 80 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/23/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: B
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 29
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 22
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: X
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: A large puddle of gear box oil found. Per EE, left as is.
|
| 22.11 | WEEKLY PM FOR WW5 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jul 31 1996 23:46 | 82 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/31/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 10
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 58
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 24
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 58
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: A large puddle under polish table gear box (old news)
Per EE, left as is.
|
| 22.12 | WEEKLY PM FOR WW6 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Mon Aug 05 1996 18:38 | 82 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/5/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: A
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 17
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 20
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 2.5
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: puddle under polish table gear box (old news)
Per EE, left as is.
|
| 22.13 | B3 MONTHLY P.M. COMPLETED FOR WW07 | STRATA::SWENSON | | Sat Aug 17 1996 16:53 | 150 |
|
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
DATE: 8/17/96 RTC ENTITY: CMP.B3 SHIFT/TECH: C/D shift
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj: 408.0 Post-adj: 378.0
Head 2 Pre-Adj: 397.0 Post-adj: 375.1
Head 3 Pre-Adj: 411.0 Post-adj: 375.1
Head 4 Pre-Adj: 390.0 Post-adj: 378.4
Head 5 Pre-Adj: 409.5 Post-adj: 379.0
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj:_____________ 66.1
Actual Down Force Post-Adj:____________ 76.4
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.84
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: +/- 15.04
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.85
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 31.6
6.2.15 Check Vacuum Pump Diaphrams Completed: n/a
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments:
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/17/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: C/D SHIFT
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 14
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 22
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 82
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: Large puddle of oil found under 1st table gear box and
was cleaned up.
|
| 22.14 | WEEKLY PM FOR WW8 COMPLETED | FABSIX::L_SHKOLNIKOV | | Sat Aug 24 1996 08:19 | 82 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/24/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 60
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 50
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 20
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: puddle under polish table gear box (old news)
but it is very little at this time.
Per EE, left as is.
|
| 22.15 | WW IX - Weekly version | SUBPAC::LANDRY | | Tue Aug 27 1996 19:28 | 80 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/27/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: A shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 80
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 21
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 20
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: a small oil spot under the polish table gear box.
|
| 22.16 | CMP.B3 SHUTDOWN CHECKSHEET | FABSIX::R_POIRIER | | Mon Sep 02 1996 02:51 | 30 |
|
CMP.B3 SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
SHIFT / DATE
1) SCRUB SIDES OF CARRIERS B 9-1-96
2) RUN CARRIER BLOW OFF FOR 30 SECONDS B 9-1-96
3) REMOVE ALL CARRIERS B 9-1-96
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK B 9-1-96
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. B 9-1-96
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY B 9-1-96
7) REMOVE CONDITIONER AND CLEAN B 9-1-96
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. B 9-1-96
9) JUMPER DI PRESSURES SWITCHES B 9-1-96
10) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) B 9-1-96
11) DRAIN ELEVATOR AND CONDITIONER TUBE B 9-1-96
12) REMOVE PADS, AND CLEAN AND DRY TABLES B 9-1-96
13) REMOVE SCRUBBER BRUSHES AND SOAK IN DI B 9-1-96
14) DRY ENTIRE SYSTEM OF ANY STANDING WATER B 9-1-96
15) TURN OFF CHILLER B 9-1-96
** DO NOT TURN POWER OFF TO POLISHER **
** THE MAIN PCW VALES ARE TO BE SHUT IN THE PIPE GALLERY **
|
| 22.17 | ww10 weekly pm | FABSIX::L_SHKOLNIKOV | | Fri Sep 06 1996 08:13 | 80 |
| Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/6/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: D shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 86
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 16
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 20
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8 psi
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: a small oil spot under the polish table gear box.
|
| 22.18 | WW 11 MONTHLY P.M. COMPLETED | STRATA::SWENSON | | Sat Sep 14 1996 17:23 | 150 |
|
Speedfam Corp. CMP-V Planarizer SPEC# HF6O-0172
Monthly Preventative Maintenance Check Sheet, Rev D
DATE: 9/14/96 RTC ENTITY: CMP.B3 SHIFT/TECH: C/D shift
6.2.1 Change Peristaltic Pump Lines Completed: X
6.2.2 Clean Polish area tub drains Completed: X
6.2.3 Check Polish Table Belt for defects Completed: X
6.2.4 Perform Down Force Calibration on all 5 heads Completed: X
Down Frc: Head 1 Pre-Adj: 371.4 Post-adj: 376.5
Head 2 Pre-Adj: 374.9 Post-adj: 377.5
Head 3 Pre-Adj: 374.7 Post-adj: 377.5
Head 4 Pre-Adj: 373.2 Post-adj: 377.8
Head 5 Pre-Adj: 376.7 Post-adj: 376.7
6.2.5 Perform Down Force Calibration on Conditioner Completed: X
Actual Down Force Pre-Adj: 77.8
Actual Down Force Post-Adj: 77.8
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X
6.2.7 Check the Load Flipper alignment Completed: X
6.2.8 Check the Unload Flipper alignment Completed: X
6.2.9 Check the Elevator alignment Completed: X
6.2.10 Check wafer unload, from Index table to cassette Completed: X
6.2.11 Check the +24 Volt power supply Pre-Adjust: 23.89 vdc
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: 15.12 vdc
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.88 vdc
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 31.6 rpm
6.2.15 Check Vacuum Pump Diaphrams Completed: n/a
6.2.16 Check Vacuum Tank/Pump lines Completed: X
6.2.17 Check Load Cup Position alignment Completed: X
6.2.18 Check Load Cup Height alignment Completed: X
6.2.19 Check Robot alignments Completed: X
6.2.20 Check Muffin Fans for proper operation Completed: X
Comments: While inspecting belt found belt filings to be present on
bottom of tool.
Speedfam Corp. CMP-V Planarizer SPEC# HF6O-0172
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/14/96 SYSTEM RTC CODE: CMP.B3 SHIFT/TECH: C/D SHIFT
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 86
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 15
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 22
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 85
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
* Still leaking significant amounts of gear oil from main polish table gearbox
|
| 22.19 | WW 12 WEEKLY P.M. COMPLETED | FABSIX::J_SWENSON | | Thu Sep 19 1996 13:48 | 87 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Techs: Kevin,C/D Shift
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 87
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 11
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 18
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: x
6.1.20 Check tubing/fittings for fluid leaks Completed: x
6.1.21 Check tubing/fittings for pneumatic leaks Completed: x
6.1.22 Check stations/components for contamination Completed: x
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: x
6.1.25 Clean and lubricate the Paddle rails Completed: n/a
6.1.26 Clean Conditioning Wheel and Housing Completed: x
6.1.27 Scrub clean the Polish area tub and walls Completed: x
6.1.28 Remove all Load and Unload cups and scrub clean Completed: x
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: x
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DW LS
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: x
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: x
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: x
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: x
Comments: Found signifcant slurry leak from pump #1. Replced lines
for pumps 1,2,& 3 and checked flow rates.
|
| 22.20 | WW13 Weekly PM | ASDG::POIRIER | | Fri Sep 27 1996 18:41 | 86 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Shift: C Tech/s: JP & RB
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 86
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 30
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: n/a
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 52
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 61
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 85
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: n/a
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: n/a
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
Replaced springs on Multihead leadscrew cover (left side/middle cover).
|
| 22.21 | carrier 5 | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 01 1996 05:31 | 4 |
| Slipped a wafer out of carrier 5 due to no slurry. Replaced the carrier
and gave it back once slurry came back up.
B-shift
|
| 22.22 | WW14 Weekly P.M. Check Sheet | ASDG::POIRIER | | Thu Oct 03 1996 16:37 | 88 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
WEEKLY Preventative Maintenance Check Sheet, Rev D
SHIFT: C TECH/S: JP,BW,JS
--------------------------------------------------------------------------------
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 86
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 22
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 40
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 18
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 20
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 21 *
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 7
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: N/A
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
* The Scrubber Down pressure is listed as 80 PSI in item 6.1.16.
The gage for this pressure is reading 21 PSI. The Scrubber is
performing normally.
|
| 22.23 | B3 Weekly Complete | FABSIX::J_SWENSON | | Sat Oct 12 1996 19:32 | 91 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
WEEKLY Preventative Maintenance Check Sheet, Rev D
Shift/S C/D Tech/S C/BJ
--------------------------------------------------------------------------------
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 45
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A*
*this model doesn't
use air drive motor
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 16
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 22
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 22
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A*
*Tool doesn't have
slurry tube
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments: Found a considerable amount of oil and belt filings on bottom
of tool.
|
| 22.24 | WW XVII - Weekly completed | SUBPAC::LANDRY | | Mon Oct 21 1996 17:05 | 90 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 10/21/96 RTC #: CMP.B3 Techs: Gee / Landry
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 86
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 27
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 22
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X see
comments
6.1.20 Check tubing/fittings for fluid leaks Completed: X
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments:
6.1.11 There is no pressure gauge on this system
6.1.19 Found oil from the table drive motor assembly in spill pan
6.1.35 There is no delivery tube on this system
|
| 22.25 | ww18 - weekly PM. | FABSIX::L_SHKOLNIKOV | | Wed Oct 30 1996 05:16 | 87 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 10/30/96 RTC #: CMP.B3 Techs: Dave/ Leon
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 88
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 22
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X**
6.1.20 Check tubing/fittings for fluid leaks Completed: X **
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: **Found oil from the table drive motor assembly in spill pan
Small amount of ware was found in a slurry pump box. Leak
sensor was in water but tool wasn't alarming. Leak detection
circuit has been reset and tested for functionality.
|
| 22.26 | ww19 weekly pm. | FABSIX::L_SHKOLNIKOV | | Fri Nov 08 1996 07:18 | 85 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 11/08/96 RTC #: CMP.B3 Techs: Leon
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 88
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 20
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 60
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80
6.1.19 Check Drip Pan for moisture/contamination Completed: X **
6.1.20 Check tubing/fittings for fluid leaks Completed: X **
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X
6.1.22 Check stations/components for contamination Completed: X
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8
6.1.24 Clean and lubricate the Scrubber rails Completed: X
6.1.25 Clean and lubricate the Paddle rails Completed: X
6.1.26 Clean Conditioning Wheel and Housing Completed: X
6.1.27 Scrub clean the Polish area tub and walls Completed: X
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: X
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: X
Comments: **Found oil from the Polish table gearbox assembly in spill pan
and on the floor under the tool. (Tool has warning)
**Line for slurry pump#3 was replaced due to water leak.
|
| 22.27 | WW20 MONTHLY PM CHECKSHEET | ASDG::POIRIER | | Wed Nov 13 1996 18:30 | 171 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev
DATE: 11/12/96 TOOL: CMP.B3 TECH/SHIFT: Brian Jubinville (BJ)
Leon Shkolnikov (LS)
John Poirier (JP)
Bradly Westphal (BW)
John Swenson (JS)
Jim Sadin (JPS)
Rich Barrett (RB)
6.2.1 Change Peristaltic Pump Lines Completed: LS
6.2.2 Clean Polish area tub drains Completed: RB
6.2.3 Check Polish Table Belt for defects Completed: BJ
6.2.4 Perform Down Force Calibration on all 5 heads Completed: JS/JPS/BW
RB/JP
Down Frc: Head 1 Pre-Adj: 380.3 lbs. Post-adj: 377.2 lbs.
Head 2 Pre-Adj: 390.1 lbs. Post-adj: 377.0 lbs.
Head 3 Pre-Adj: 374.3 lbs. Post-adj: 376.7 lbs.
Head 4 Pre-Adj: 375.0 lbs. Post-adj: 376.5 lbs.
Head 5 Pre-Adj: 383.0 lbs. Post-adj: 377.7 lbs.
6.2.5 Perform Down Force Calibration on Conditioner Completed: JPS/JS
Actual Down Force Pre-Adj: 81.6 lbs.
Actual Down Force Post-Adj: 77.7 lbs.
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: BJ
6.2.7 Check the Load Flipper alignment Completed: BJ
6.2.8 Check the Unload Flipper alignment Completed: BJ
6.2.9 Check the Elevator alignment Completed: BJ
6.2.10 Check wafer unload, from Index table to cassette Completed: BJ
6.2.11 Check the +24 Volt power supply Pre-Adjust: 24.1 v BJ
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: 14.6/-14.8 v BJ
Post-adjust: 15.1/-15.2 v BJ
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.89 v BJ
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 31.6 rpm
JPS/JS
6.2.15 Check Vacuum Pump Diaphrams Completed: N/A JP
(Vacuum good, pump disassembly not necessary.)
6.2.16 Check Vacuum Tank/Pump lines Completed: BW
6.2.17 Check Load Cup Position alignment Completed: JPS/BW
6.2.18 Check Load Cup Height alignment Completed: JPS/JS
6.2.19 Check Robot alignments Completed: BJ
6.2.20 Check Muffin Fans for proper operation Completed: RB
Comments:
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 11/12/96 RTC #: CMP.B3 Techs: Brian Jubinville (BJ)
Leon Shkolnikov (LS)
Bradly Westphal (BW)
John Poirier (JP)
Rich Barrett (RB)
John Swenson (JS)
Jim Sadin (JPS)
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 85 BJ
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 BJ
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 20 BJ
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 BJ
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10 BJ
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 BJ
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 BJ
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 BJ
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2 BJ
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 BJ
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A BJ
(paddle motor driven now, no longer air)
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17 BJ
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 BJ
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 BJ
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30 BJ
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 20 BJ
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55 BJ
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 BJ
6.1.19 Check Drip Pan for moisture/contamination Completed: BJ
6.1.20 Check tubing/fittings for fluid leaks Completed: LS/BJ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ
6.1.22 Check stations/components for contamination Completed: BJ
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: BJ
6.1.25 Clean and lubricate the Paddle rails Completed: BJ
6.1.26 Clean Conditioning Wheel and Housing Completed: RB
6.1.27 Scrub/clean the Polish area tub and walls Completed: RB
6.1.28 Remove all Load and Unload cups and scrub clean Completed: BW
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: JS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: LS/BJ
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A JP
(This activity is no longer necessary, the
check valve has been eliminated)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: BJ
6.1.33 Wipe the MHTA and covers with Isopropyl Completed JPS
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: JS
6.1.35 Clean the slurry delivery tube Completed: N/A BJ
(Tool doesn't use tube)
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments: Lot of oil from the gear box, one on order.
|
| 22.28 | WEEKLY PM COMPLETED FOR WW21 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Nov 21 1996 05:37 | 90 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 11/21/96 RTC #: CMP.B3 Techs: Jubinville (BJ)
Whitford (DW)
Shkolnikov (LS)
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 88 DW
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82 DW
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 25 DW
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 DW
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10 DW
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 DW
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 DW
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 DW
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2 DW
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 DW
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A DW
(L/R paddle motor driver, doesn't use air)
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17 DW
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 DW
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 DW
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30 DW
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 22 DW
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55 DW
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 DW
6.1.19 Check Drip Pan for moisture/contamination Completed: LS **
6.1.20 Check tubing/fittings for fluid leaks Completed: LS/BJ/DW
6.1.21 Check tubing/fittings for pneumatic leaks Completed: LS/BJ/DW
6.1.22 Check stations/components for contamination Completed: LS/BJ/DW
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: DW
6.1.25 Clean and lubricate the Paddle rails Completed: DW
6.1.26 Clean Conditioning Wheel and Housing Completed: BJ
6.1.27 Scrub clean the Polish area tub and walls Completed: LS/BJ/DW
6.1.28 Remove all Load and Unload cups and scrub clean Completed: LS/DW
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: DW
6.1.30 Check slurry pump hoses and connectors for leaks Completed: LS
6.1.31 Remove and clean the Vacuum system Check Valve Completed: LS
(Liquid separator)
6.1.32 Check Carrier clean brushes for defects, rotate Completed: LS/BJ/DW
6.1.33 Wipe the MHTA and covers with Isopropyl Completed LS/BJ/DW
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: LS/BJ/DW
6.1.35 Clean the slurry delivery tube Completed: N/A BJ
(Tool doesn't use slurry tube)
6.1.36 Check chiller fluid resevoir for proper level Completed: BJ
Comments: **Found oil from the Polish table gearbox assembly in spill pan
and on the floor under the tool. (Tool has warning)
|
| 22.29 | WW 22 - Weekly completed | SUBPAC::LANDRY | | Sun Nov 24 1996 19:14 | 86 |
| SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 11/24/96 RTC #: CMP.B3 Techs: Finn, Landry
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 88 TL
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 82 TL
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28 TL
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 BF
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10 BF
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 BF
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 BF
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 TL
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2 TL
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 BF
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17 BF
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 BF
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 TL
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30 TL
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 22 TL
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55 BF
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 BF
6.1.19 Check Drip Pan for moisture/contamination Completed: TL
6.1.20 Check tubing/fittings for fluid leaks Completed: BF
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BF
6.1.22 Check stations/components for contamination Completed: TL
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8 BF
6.1.24 Clean and lubricate the Scrubber rails Completed: TL
6.1.25 Clean and lubricate the Paddle rails Completed: TL
6.1.26 Clean Conditioning Wheel and Housing Completed: BF
6.1.27 Scrub clean the Polish area tub and walls Completed: BF
6.1.28 Remove all Load and Unload cups and scrub clean Completed: TL
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: TL
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BF
6.1.31 Remove and clean the Vacuum system Check Valve Completed: BF
6.1.32 Check Carrier clean brushes for defects, rotate Completed: TL
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BF
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: TL/BF
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: TL
Comments: Found oil from the Polish table gearbox assembly in spill pan
and on the floor under the tool.
6.1.11 System is equipped with a motorized drive
6.1.35 System is not equipped with this feature
|
| 22.30 | ww23 Weekly PM. | FABSIX::L_SHKOLNIKOV | | Thu Dec 05 1996 05:43 | 83 |
| SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 12/05/96 RTC #: CMP.B3 Techs: BJ-B.JUBINVILLE
LS-L.SHKOLNIKOV
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 88 ls
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 ls
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28 ls
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 ls
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10 ls
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 ls
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 ls
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 ls
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2 ls
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 ls
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17 ls
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 ls
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 ls
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30 ls
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 ls
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50 ls
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 ls
6.1.19 Check Drip Pan for moisture/contamination Completed: ls
6.1.20 Check tubing/fittings for fluid leaks Completed: bj
6.1.21 Check tubing/fittings for pneumatic leaks Completed: bj
6.1.22 Check stations/components for contamination Completed: bj
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8 ls
6.1.24 Clean and lubricate the Scrubber rails Completed: ls
6.1.25 Clean and lubricate the Paddle rails Completed: ls
6.1.26 Clean Conditioning Wheel and Housing Completed: bj
6.1.27 Scrub clean the Polish area tub and walls Completed: bj
6.1.28 Remove all Load and Unload cups and scrub clean Completed: bj
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: ls
6.1.30 Check slurry pump hoses and connectors for leaks Completed: ls
6.1.31 Remove and clean the Vacuum system Check Valve Completed: bj
6.1.32 Check Carrier clean brushes for defects, rotate Completed: bj
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: bj
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: bj
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: ls
Comments: The main polish table gearbox is not leaking so far.
|
| 22.31 | Monthly PM complete | FABSIX::O_WHITFORD | Quticherwhinin' | Wed Dec 11 1996 04:44 | 172 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
<< WW 24 >>
Leon Shkolnikov
Dave Whitford
6.1.1 Check incoming CDA pressure for 80 PSI 80 Whitford
6.1.2 Check incoming N2 pressure for 80 PSI 48 Whitford
6.1.3 Check incoming DI Water pressure for 20 PSI 25 Whitford
6.1.4 Check Load Cup pressure for 45 PSI 40 Whitford
6.1.5 Check Pad Condition Balance pressure 15-30 PSI 10 Whitford
6.1.6 Check Pad Conditioner Up pressure for 35 PSI 35 Whitford
6.1.7 Check Carrier Up pressure for 30 PSI 30 Whitford
6.1.8 Check Miscellaneous pressure for 40 PSI 40 Whitford
6.1.9 Check Head Balance pressure for 2-6 PSI 6.2 Whitford
6.1.10 Check Alignment Fixture pressure for 20 PSI 20 Whitford
6.1.11 Check Transport Paddle L/R pressure for 30 PSI n/a *
6.1.12 Check Transport Paddle U/D pressure for 20 PSI 17 Whitford
6.1.13 Check Open Load Flipper pressure for 50 PSI 50 Whitford
6.1.14 Check Open Unload Flipper pressure for 50 PSI 60 Whitford
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI 28 Whitford
6.1.16 Check Wafer Scrub Down pressure for 80 PSI 25 Whitford
6.1.17 Check Scrubber In/Out pressure for 50 PSI 55 Whitford
6.1.18 Check MHTA pressure for 80 PSI 80 Whitford
6.1.19 Check Drip Pan for moisture/contamination Completed: Whitford
6.1.20 Check tubing/fittings for fluid leaks Completed: Whitford
6.1.21 Check tubing/fittings for pneumatic leaks Completed: Whitford
6.1.22 Check stations/components for contamination Completed: Whitford
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: Whitford
6.1.24 Clean and lubricate the Scrubber rails Completed: Shkolnikov
6.1.25 Clean and lubricate the Paddle rails Completed: Shkolnikov
6.1.26 Clean Conditioning Wheel and Housing Completed: Shkolnikov
6.1.27 Scrub clean the Polish area tub and walls Completed: Shkolnikov
Whitford
6.1.28 Remove all Load and Unload cups and scrub clean Completed: Whitford
Shkolnikov
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: Shkolnikov
6.1.30 Check slurry pump hoses and connectors for leaks Completed: Shkolnikov
6.1.31 Remove and clean the Vacuum system Check Valve Completed: Whitford
6.1.32 Check Carrier clean brushes for defects, rotate Completed: Whitford
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: Whitford
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: Shkolnikov
6.1.35 Clean the slurry delivery tube Completed: n/a**
6.1.36 Check chiller fluid resevoir for proper level Completed: Whitford
Comments:
* 6.1.11 This tool has no provision to read pressure on the xfer
paddle L/R move
** 6.1.35 This tool is equipped with "hard plumbed" slurry delivery
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
Dave Whitford
Leon Shkolnikov
6.2.1 Change Peristaltic Pump Lines Completed: Shkolnikov
6.2.2 Clean Polish area tub drains Completed: Shkolnikov
Whitford
6.2.3 Check Polish Table Belt for defects Completed: Whitford
6.2.4 Perform Down Force Calibration on all 5 heads Completed: Whitford
Down Frc: Head 1 Pre-Adj: 370.4 Post-adj: 377.5
Head 2 Pre-Adj: 368 Post-adj: 376.8
Head 3 Pre-Adj: 378.5 Post-adj: 377.0
Head 4 Pre-Adj: 378.9 Post-adj: 376.9
Head 5 Pre-Adj: 376.4 Post-adj: 376.4
6.2.5 Perform Down Force Calibration on Conditioner Completed: Whitford
Actual Down Force Pre-Adj: 82 PSI
Actual Down Force Post-Adj: 78 PSI
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: Shkolnikov
6.2.7 Check the Load Flipper alignment Completed: Shkolnikov
Whitford
6.2.8 Check the Unload Flipper alignment Completed: Whitford
Shkolnikov
6.2.9 Check the Elevator alignment Completed: Shkolnikov
6.2.10 Check wafer unload, from Index table to cassette Completed: Shkolnikov
6.2.11 Check the +24 Volt power supply Pre-Adjust: +24.3
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: +15.2/-15.3
6.2.13 Check the +5 Volt power supply Pre-Adjust: +4.92
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: Whitford
Shkolnikov
6.2.15 Check Vacuum Pump Diaphrams Completed: Whitford
6.2.16 Check Vacuum Tank/Pump lines Completed: Whitford
6.2.17 Check Load Cup Position alignment Completed: Whitford
6.2.18 Check Load Cup Height alignment Completed: Shkolnikov
Whitford
6.2.19 Check Robot alignments Completed: Whitford
Shkolnikov
6.2.20 Check Muffin Fans for proper operation Completed: Whitford
Comments:
Monthly P.M Complete
|
| 22.32 | WW25 Weekly PM | FABSIX::R_POIRIER | | Tue Dec 17 1996 05:14 | 92 |
| --------------------------------------------------------------------------------
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 12/17/96 (WW25) RTC #: CMP.B3 Techs: MR M Ridlon
RP R Poirier
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 88 RP
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 RP
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24 RP
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 RP
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10 RP
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 RP
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 RP
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 RP
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2 RP
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 RP
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 17 RP
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 52 RP
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 62 RP
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30 RP
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 RP
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 50 RP
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 RP
6.1.19 Check Drip Pan for moisture/contamination Completed: MR
6.1.20 Check tubing/fittings for fluid leaks Completed: RP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP
6.1.22 Check stations/components for contamination Completed: RP/MR
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 8 RP
6.1.24 Clean and lubricate the Scrubber rails Completed: MR
6.1.25 Clean and lubricate the Paddle rails Completed: MR
6.1.26 Clean Conditioning Wheel and Housing Completed: MR
6.1.27 Scrub clean the Polish area tub and walls Completed: MR
6.1.28 Remove all Load and Unload cups and scrub clean Completed: RP
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: MR
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: RP
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: MR
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: MR
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: RP
Comments: The main polish table gearbox is not leaking so far.
N/A 6.1.11 CMP.B3 does not have a Check Transport Paddle L/R Gauge.
N/A 6.1.31 CMP.B3 Vacuum system Check Valve removed.
N/A 6.1.35 CMP.B3 Slurry Delivery tube removed
|
| 22.33 | WEEKLY WW26 | FABSIX::M_RIDLON | Eliminate the oblivious | Sun Dec 22 1996 03:56 | 92 |
| --------------------------------------------------------------------------------
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 12/22/96 (WW26) RTC #: CMP.B3 Techs: MR M Ridlon
RP R Poirier
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 79 RP
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 RP
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24 RP
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 RP
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10 RP
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 RP
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 RP
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 RP
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.0 RP
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 RP
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 15 RP
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 52 RP
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 60 RP
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 30 RP
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 RP
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 55 RP
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 78 RP
6.1.19 Check Drip Pan for moisture/contamination Completed: MR
6.1.20 Check tubing/fittings for fluid leaks Completed: MR
6.1.21 Check tubing/fittings for pneumatic leaks Completed: MR
6.1.22 Check stations/components for contamination Completed: RP/MR
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 9 RP
6.1.24 Clean and lubricate the Scrubber rails Completed: RP
6.1.25 Clean and lubricate the Paddle rails Completed: RP
6.1.26 Clean Conditioning Wheel and Housing Completed: MR
6.1.27 Scrub clean the Polish area tub and walls Completed: MR
6.1.28 Remove all Load and Unload cups and scrub clean Completed: MR
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: MR
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: MR/RP
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: MR/RP
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: RP
Comments: The main polish table gearbox is not leaking so far.
N/A 6.1.11 CMP.B3 does not have a Check Transport Paddle L/R Gauge.
N/A 6.1.31 CMP.B3 Vacuum system Check Valve removed.
N/A 6.1.35 CMP.B3 Slurry Delivery tube removed
|
| 22.34 | WW27 Weekly PM completed | FABSIX::R_POIRIER | | Tue Dec 31 1996 02:19 | 94 |
| SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 12/30/96 (WW27) RTC #: CMP.B3 Techs: Mitch Ridlon
Roger Poirier
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 84 RP
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 RP
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 24 RP
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 RP
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10 RP
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 RP
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 RP
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 RP
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.2 RP
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 22 RP
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 16 RP
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 52 RP
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 54 RP
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 28 RP
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 24 RP
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 54 RP
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 78 RP
6.1.19 Check Drip Pan for moisture/contamination Completed: MR
6.1.20 Check tubing/fittings for fluid leaks Completed: MR
6.1.21 Check tubing/fittings for pneumatic leaks Completed: MR
6.1.22 Check stations/components for contamination Completed: RP/MR
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 9 RP
6.1.24 Clean and lubricate the Scrubber rails Completed: MR
6.1.25 Clean and lubricate the Paddle rails Completed: MR
6.1.26 Clean Conditioning Wheel and Housing Completed: RP
6.1.27 Scrub clean the Polish area tub and walls Completed: MR/RP
6.1.28 Remove all Load and Unload cups and scrub clean Completed: MR/RP
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: MR
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: MR/RP
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: MR/RP
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: RP
Comments:
N/A 6.1.11 CMP.B3 does not have a Check Transport Paddle L/R Gauge.
N/A 6.1.31 CMP.B3 Vacuum system Check Valve removed.
N/A 6.1.35 CMP.B3 Slurry Delivery tube removed.
Engineer has been informed of all N/A's
|
| 22.35 | CMP.B3 shutdown checksheet completed | FABSIX::R_GEE | | Tue Dec 31 1996 15:40 | 28 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
CMP.B SHUT DOWN CHECK SHEET Tech: _Tim Landry
_Bob Gee
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) SCRUB SIDES OF CARRIERS TL_BG_/_12/31/96
2) RUN CARRIER BLOW OFF FOR 30 SECONDS TL_BG_/_12/31/96
3) REMOVE ALL CARRIERS TL_BG_/_12/31/96
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK TL_BG_/_12/31/96
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. TL_BG_/_12/31/96
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY TL_BG_/_12/31/96
7) REMOVE CONDITIONER AND CLEAN TL_BG_/_12/31/96
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. TL_BG_/_12/31/96
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) TL_BG_/_12/31/96
10) DRAIN ELEVATOR AND CONDITIONER TUBE TL_BG_/_12/31/96
11) REMOVE PADS, AND CLEAN AND DRY TABLES TL_BG_/_12/31/96
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI TL_BG_/_12/31/96
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER TL_BG_/_12/31/96
14) POWER DOWN SYSTEM.
|
| 22.36 | WEEKLY WW28 | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Jan 06 1997 03:05 | 95 |
| SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 1/6/97 (WW28) RTC #: CMP.B3 Techs: Mitch Ridlon
Albert Quillen
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 88 MR,AQ
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 MR,AQ
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 28 MR,AQ
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 MR,AQ
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 11 MR,AQ
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 MR,AQ
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 MR,AQ
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 MR,AQ
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.0 MR,AQ
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 MR,AQ
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 16 MR,AQ
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 MR,AQ
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 62 MR,AQ
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 18 MR,AQ
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 24 MR,AQ
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 54 MR,AQ
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 77 MR,AQ
6.1.19 Check Drip Pan for moisture/contamination Completed: MR,AQ
6.1.20 Check tubing/fittings for fluid leaks Completed: MR,AQ
6.1.21 Check tubing/fittings for pneumatic leaks Completed: MR,AQ
6.1.22 Check stations/components for contamination Completed: MR,AQ
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 9 MR,AQ
6.1.24 Clean and lubricate the Scrubber rails Completed: MR,AQ
6.1.25 Clean and lubricate the Paddle rails Completed: MR,AQ
6.1.26 Clean Conditioning Wheel and Housing Completed: MR,AQ
6.1.27 Scrub clean the Polish area tub and walls Completed: MR,AQ
6.1.28 Remove all Load and Unload cups and scrub clean Completed: MR,AQ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: MR,AQ
6.1.30 Check slurry pump hoses and connectors for leaks Completed: MR,AQ
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: MR,AQ
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: MR,AQ
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: MR,AQ
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: MR,AQ
Comments:
N/A 6.1.11 CMP.B3 does not have a Check Transport Paddle L/R Gauge.
N/A 6.1.31 CMP.B3 Vacuum system Check Valve removed.
N/A 6.1.35 CMP.B3 Slurry Delivery tube removed.
Engineer has been informed of all N/A's
|
| 22.37 | ww29 monthly pm completed. | FABSIX::L_SHKOLNIKOV | | Sat Jan 18 1997 01:46 | 159 |
| --------------------------------------------------------------------------------
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev D
Date: 1/17/97 Shift: C & D Techs: John Poirier - JP
Brad Westphal - BW
John Swenson - JS
Dave Whitford - DW
Leon Shkolnikov - LS
6.2.1 Change Peristaltic Pump Lines Completed: X JS
6.2.2 Clean Polish area tub drains Completed: X BW
6.2.3 Check Polish Table Belt for defects Completed: X LS
6.2.4 Perform Down Force Calibration on all 5 heads Completed: DW *
Down Frc: Head 1 Pre-Adj: 345 lbs Post-adj: 353 lbs
Head 2 Pre-Adj: 363 lbs Post-adj: 353 lbs
Head 3 Pre-Adj: 340 lbs Post-adj: 353 lbs
Head 4 Pre-Adj: 363 lbs Post-adj: 353 lbs
Head 5 Pre-Adj: 369 lbs Post-adj: 353 lbs
6.2.5 Perform Down Force Calibration on Conditioner Completed: LS
Actual Down Force Pre-Adj: 90 lbs
Actual Down Force Post-Adj: 77.0 lbs
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: X LS
6.2.7 Check the Load Flipper alignment Completed: X LS
6.2.8 Check the Unload Flipper alignment Completed: X LS
6.2.9 Check the Elevator alignment Completed: X LS
6.2.10 Check wafer unload, from Index table to cassette Completed: X LS
6.2.11 Check the +24 Volt power supply Pre-Adjust: 24.12 BW
6.2.12 Check the +/- 15 Volt power supply Pre-Adjust: 15.51 BW
6.2.13 Check the +5 Volt power supply Pre-Adjust: 4.78 BW
6.2.14 Check Table Rotation Speed @ 30 RPM Completed: 31 LS
6.2.15 Check Vacuum Pump Diaphrams Completed: X LS
6.2.16 Check Vacuum Tank/Pump lines Completed: X LS
6.2.17 Check Load Cup Position alignment Completed: X LS
6.2.18 Check Load Cup Height alignment Completed: X LS
6.2.19 Check Robot alignments Completed: X LS
6.2.20 Check Muffin Fans for proper operation Completed: X LS
--------------------------------------------------------------------------------
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 87 JS
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 JS
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 26 JS
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 JS
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10 JS
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 JS
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 JS
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 JS
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6 JS
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 22 JS
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A JP
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 24 JS
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 46 JS
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 44 JS
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 20 JS
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 JS
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 44 JS
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 JS
6.1.19 Check Drip Pan for moisture/contamination Completed: x JP
6.1.20 Check tubing/fittings for fluid leaks Completed: X JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X JP
6.1.22 Check stations/components for contamination Completed: X JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 9 JS
6.1.24 Clean and lubricate the Scrubber rails Completed: X JP
6.1.25 Clean and lubricate the Paddle rails Completed: X JP
6.1.26 Clean Conditioning Wheel and Housing Completed: X JP
6.1.27 Scrub clean the Polish area tub and walls Completed: X BW
6.1.28 Remove all Load and Unload cups and scrub clean Completed: X LS/DW
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X JP
6.1.31 Remove and clean the Vacuum system Check Valve Completed: X BW
6.1.32 Check Carrier clean brushes for defects, rotate Completed: X LS
6.1.33 Wipe the MHTA and covers with Isopropyl Completed X JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X JP
6.1.35 Clean the slurry delivery tube Completed: n/a*
6.1.36 Check chiller fluid resevoir for proper level Completed: X JS
Comments:
6.1.11 N/A The Transfer Paddle L/R motion is not air driven on this tool.
This line item refers to CMP.B1 only.
6.1.35 N/A There is no slurry delivery tube on this tool.
6.2.4 performed with no carriers on the tool.
|
| 22.38 | weekly ww30 | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Jan 20 1997 23:00 | 95 |
| SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
Date: 1/20/97 (WW30) RTC #: CMP.B3 Techs: Mitch Ridlon
Roger Poirier
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 88 MR
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 MR
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 30 MR
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 MR
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10 MR
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 35 MR
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 MR
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 MR
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6.0 MR
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 MR
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 16 MR
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 52 MR
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 42 MR
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 20 MR
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 MR
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 40 MR
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 MR
6.1.19 Check Drip Pan for moisture/contamination Completed: MR
6.1.20 Check tubing/fittings for fluid leaks Completed: MR
6.1.21 Check tubing/fittings for pneumatic leaks Completed: MR
6.1.22 Check stations/components for contamination Completed: MR,RP
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 9 MR
6.1.24 Clean and lubricate the Scrubber rails Completed: RP
6.1.25 Clean and lubricate the Paddle rails Completed: RP
6.1.26 Clean Conditioning Wheel and Housing Completed: MR
6.1.27 Scrub clean the Polish area tub and walls Completed: MR
6.1.28 Remove all Load and Unload cups and scrub clean Completed: MR,RP
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: MR
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: MR
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: RP
6.1.34 Wipe the Process Area Plexiglas doors w/Iso Completed: MR,RP
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: MR
Comments:
N/A 6.1.11 CMP.B3 does not have a Check Transport Paddle L/R Gauge.
N/A 6.1.31 CMP.B3 Vacuum system Check Valve removed.
N/A 6.1.35 CMP.B3 Slurry Delivery tube removed.
Engineer has been informed of all N/A's
|
| 22.39 | CMP.B3 WEEKLY CHECK SHEET (WW31) | ASDG::POIRIER | | Fri Jan 31 1997 13:56 | 90 |
|
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
Date: 1/30/97 WW31 RTC Entity: CMP.B3 Tech(s): John Poirier = JP
Brad Westphal = BW
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check incoming CDA pressure for 80 PSI Pre-adjust: 88 BW
6.1.2 Check incoming N2 pressure for 80 PSI Pre-adjust: 80 BW
6.1.3 Check incoming DI Water pressure for 20 PSI Pre-adjust: 32 BW
6.1.4 Check Load Cup pressure for 45 PSI Pre-adjust: 40 BW
6.1.5 Check Pad Condition Balance pressure 15-30 PSI Pre-adjust: 10 BW
6.1.6 Check Pad Conditioner Up pressure for 35 PSI Pre-adjust: 34 BW
6.1.7 Check Carrier Up pressure for 30 PSI Pre-adjust: 30 BW
6.1.8 Check Miscellaneous pressure for 40 PSI Pre-adjust: 40 BW
6.1.9 Check Head Balance pressure for 2-6 PSI Pre-adjust: 6 BW
6.1.10 Check Alignment Fixture pressure for 20 PSI Pre-adjust: 20 BW
6.1.11 Check Transport Paddle L/R pressure for 30 PSI Pre-adjust: N/A BW
6.1.12 Check Transport Paddle U/D pressure for 20 PSI Pre-adjust: 20 BW
6.1.13 Check Open Load Flipper pressure for 50 PSI Pre-adjust: 50 BW
6.1.14 Check Open Unload Flipper pressure for 50 PSI Pre-adjust: 40 BW
6.1.15 Check Vacuum Tank Blowout pressure for 15 PSI Pre-adjust: 20 BW
6.1.16 Check Wafer Scrub Down pressure for 80 PSI Pre-adjust: 25 BW
6.1.17 Check Scrubber In/Out pressure for 50 PSI Pre-adjust: 40 BW
6.1.18 Check MHTA pressure for 80 PSI Pre-adjust: 80 BW
6.1.19 Check Drip Pan for moisture/contamination Completed: JP
6.1.20 Check tubing/fittings for fluid leaks Completed: JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: JP
6.1.22 Check stations/components for contamination Completed: JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Pre-adjust: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: BW
6.1.25 Clean and lubricate the Paddle rails Completed: BW
6.1.26 Clean Conditioning Wheel and Housing Completed: BW
6.1.27 Scrub clean the Polish area tub and walls Completed: BW
6.1.28 Remove all Load and Unload cups and scrub clean Completed: BW
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: JP
6.1.31 Remove and clean the Vacuum system Check Valve Completed: N/A
6.1.32 Check Carrier clean brushes for defects, rotate Completed: JP
6.1.33 Wipe the MHTA and covers with Isopropyl Completed JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: JP
6.1.35 Clean the slurry delivery tube Completed: N/A
6.1.36 Check chiller fluid resevoir for proper level Completed: JP
Comments: N/A 6.1.11 - This line item refers to CMP.B1 only.
N/A 6.1.31 - The check valve is no longer used.
N/A 6.1.35 - The slurry delivery tube is not used on this tool.
|
| 22.40 | WW32 WEEKLY PM CHECKSHEET | ASDG::POIRIER | | Thu Feb 06 1997 15:19 | 102 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 2/6/97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): LS - Leon Shkolnikov
JP - John Poirier
JS - John Swenson
START TIME: 2:00 P.M. END TIME: 3:20 P.M.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 LS
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 LS
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 26 LS
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 LS
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 11 LS
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 LS
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 LS
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 LS
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 LS
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: X LS
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 LS
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 LS
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 LS
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 20 LS
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 LS
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 LS
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 LS
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 LS
6.1.19 Check Drip Pans for moisture/contamination Completed: X JP
6.1.20 Check tubing/fittings for fluid leaks Completed: X JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X JP
6.1.22 Check stations/components for contamination Completed: X JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 LS
6.1.24 Clean and lubricate the Scrubber rails Completed: X JP
6.1.25 Clean and lubricate the Paddle rails Completed: X JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: X JS
6.1.27 Scrub clean the Polish area tub and walls Completed: X JS
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: X JS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: X JS
6.1.32 Check Carrier clean brushes for defects Completed: X JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X JP
6.1.35 Check chiller fluid resevoir for proper level Completed: X LS
6.1.36 Check the chiller readout for 24 degrees C. Completed: X JP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: X JP
6.1.38 Check the slurry flow alarm. Completed: X JS
Comments:
|
| 22.41 | WW33 Monthly PM CheckSheet | ASDG::POIRIER | | Sat Feb 15 1997 13:16 | 184 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE:02.15.97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): Leon Shkolnikov - LS
Dave Whitford - DW
START TIME: 07:00 am COMPLETED TIME: 1:15 pm John Poirier - JP
John Swenson - JS
6.2.1 Change Peristaltic Pump Lines and check flow Completed: DW
6.2.2 Clean Polish area tub drains for clogs Completed: JP
6.2.3 Check all table belts for defects Completed: JP
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: JS/JP
Down Frc: Head 1 Pre-Adj: 364.0 Post-adj: 354.9
Head 2 Pre-Adj: 354.6 Post-adj: WITHIN SPEC
Head 3 Pre-Adj: 367.8 Post-adj: 354.1
Head 4 Pre-Adj: 359.9 Post-adj: 354.7
Head 5 Pre-Adj: 346.1 Post-adj: 354.4
6.2.5 Perform Down Force Calibration on Conditioner Completed: JS/JP
to read +/- .5 lbs of 77 lbs.
Actual Down Force Pre-Adj: 77.7
Actual Down Force Post-Adj: WITHIN SPEC
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: LS
6.2.7 Check the Load Flipper alignment Completed: JP/JS
6.2.8 Check the Unload Flipper alignment Completed: JP/JS
6.2.9 Check Elevator alignments Completed: JP/JS
6.2.10 Check wafer unload, from Index table to cassette Completed: JP/JS
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre: +23.87 Post:N/A Tech: JS
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre: +15.24 Pre: -15.37 Post:N/A Tech: JS
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: +4.86 Post:N/A Tech: JS
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: 31.6 JS
6.2.15 Check Vacuum Pump Diaphrams Completed: JP
6.2.16 Replace liquid separator filter element Completed: JS
6.2.17 Check Vacuum Tank/Pump lines Completed: JS
6.2.18 Check carrier to Load Cup Position alignments Completed: JP/JS *
6.2.19 Check Load Cup Height to carrier alignments Completed: JP/JS
6.2.20 Check the Robot alignments Completed: JP/JS
6.2.21 Check Muffin Fans for proper operation Completed: JP
Comments: Carrier to cup alignment on head #3 adjusted.
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: TOOL ENTITY: TECHNICIAN(S):
START TIME: COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 ls
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 54 ls
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 24 ls
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 ls
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 ls
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 ls
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 ls
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 ls
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6.0 ls
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: n/a
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 ls
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 ls
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 ls
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 ls
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 ls
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 ls
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 ls
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 ls
6.1.19 Check Drip Pans for moisture/contamination Completed: JP/JS
6.1.20 Check tubing/fittings for fluid leaks Completed: JS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: JS
6.1.22 Check stations/components for contamination Completed: JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 10 ls
6.1.24 Clean and lubricate the Scrubber rails Completed: ls
6.1.25 Clean and lubricate the Paddle rails Completed: ls
6.1.26 Remove and clean conditioning Wheel and Housing Completed: JP
6.1.27 Scrub clean the Polish area tub and walls Completed: JP/JS
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: JP/JS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DW
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: JS
6.1.32 Check Carrier clean brushes for defects Completed: ls
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: JP
6.1.35 Check chiller fluid resevoir for proper level Completed: ls
6.1.36 Check the chiller readout for 24 degrees C. Completed: ls
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: JS
6.1.38 Check the slurry flow alarm. Completed: JP
Comments:
|
| 22.42 | WW34 WEEKLY PM CHECKSHEET | ASDG::POIRIER | | Thu Feb 20 1997 19:08 | 101 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:2/20/97 TOOL ENTITY:CMP.B3 TECHNICIAN(S):John Poirier - JP
John Swenson - JS
START TIME:5:30PM COMPLETED TIME:7:00PM Brad Westphal - BW
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 JS
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 JS
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 30 JS
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 JS
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 11 JS
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 JS
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 JS
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 JS
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 JS
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A JS
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 JS
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 JS
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 JS
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 JS
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 JS
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 JS
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 JS
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 JS
6.1.19 Check Drip Pans for moisture/contamination Completed: X JP
6.1.20 Check tubing/fittings for fluid leaks Completed: X JS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X JS
6.1.22 Check stations/components for contamination Completed: X JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 JS
6.1.24 Clean and lubricate the Scrubber rails Completed: X JP
6.1.25 Clean and lubricate the Paddle rails Completed: X JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: X BW
6.1.27 Scrub clean the Polish area tub and walls Completed: X BW
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: X BW
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: X JP
6.1.32 Check Carrier clean brushes for defects Completed: X JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X JP
6.1.35 Check chiller fluid resevoir for proper level Completed: X JP
6.1.36 Check the chiller readout for 24 degrees C. Completed: X JS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: X BW
6.1.38 Check the slurry flow alarm. Completed: X BW
Comments:
|
| 22.43 | WW35 Weekly PM Check Sheet | ASDG::POIRIER | | Fri Feb 28 1997 10:04 | 102 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:2/28/97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): Dave Whitford (DW)
John Poirier (JP)
John Swenson (JS)
Dave Rocha (DR)
START TIME: 7:20 a.m. COMPLETED TIME: 10:00 a.m.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 DW
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 DW
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 26 DW
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 DW
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 DW
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 DW
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 JS
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 DW
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 DW
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 DW
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 DW
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 DW
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 DW
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 DW
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 22 DW
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 43 DW
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 DW
6.1.19 Check Drip Pans for moisture/contamination Completed: X JP
6.1.20 Check tubing/fittings for fluid leaks Completed: X JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X JP
6.1.22 Check stations/components for contamination Completed: X JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 JS
6.1.24 Clean and lubricate the Scrubber rails Completed: X JP
6.1.25 Clean and lubricate the Paddle rails Completed: X JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: X JS
6.1.27 Scrub clean the Polish area tub and walls Completed: X JS
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: X JP/JS/DR
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X JS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: X JP
6.1.32 Check Carrier clean brushes for defects Completed: X JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X JS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X JS
6.1.35 Check chiller fluid resevoir for proper level Completed: X JP
6.1.36 Check the chiller readout for 24 degrees C. Completed: X JP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: X JP/DR
6.1.38 Check the slurry flow alarm. Completed: X JP
Comments:
6.1.10 - Applies to CMP.B1 only.
|
| 22.44 | ww 36 weekly p.m. completed | FABSIX::R_GEE | | Mon Mar 03 1997 19:14 | 102 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:3/03/97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): James Sadin (JS)
Tim Landry (TL)
Brendan Finn (BF)
Bob Gee (BG)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 90 JS
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 60 JS
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 24 JS
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 BG
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 BG
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BG
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BF
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 BF
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BF
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 TL
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 TL
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 TL
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 JS
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BG
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 25 BF
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 TL
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 82 JS
6.1.19 Check Drip Pans for moisture/contamination Completed: X BF
6.1.20 Check tubing/fittings for fluid leaks Completed: X BF
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X BG
6.1.22 Check stations/components for contamination Completed: X TL
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 JS
6.1.24 Clean and lubricate the Scrubber rails Completed: X JS
6.1.25 Clean and lubricate the Paddle rails Completed: X BG
6.1.26 Remove and clean conditioning Wheel and Housing Completed: X TL
6.1.27 Scrub clean the Polish area tub and walls Completed: X BF
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: X BF/TL/JS/BG
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X JS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X BF
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: X TL
6.1.32 Check Carrier clean brushes for defects Completed: X BF
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X BG
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X BG
6.1.35 Check chiller fluid resevoir for proper level Completed: X JS
6.1.36 Check the chiller readout for 24 degrees C. Completed: X JS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: X BF/TL
6.1.38 Check the slurry flow alarm. Completed: X BF
Comments:
6.1.10 - Applies to CMP.B1 only, EE notified.
|
| 22.45 | MONTHLY COMPLETED | FABSIX::B_FINN | | Sun Mar 09 1997 19:44 | 195 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE: 3/9/97 TOOL ENTITY:cmp.b3 TECHNICIAN(S): MR=Mitch Ridlon
RP=Roger Poirier
AQ=Albert Quillen
BF=Brendan Finn
TL=Tim Landry
BG=Bob Gee
JS=Jim Sadin
START TIME:0500AM COMPLETED TIME: 1530 HOURS
6.2.1 Change Peristaltic Pump Lines and check flow Completed:BG
6.2.2 Clean Polish area tub drains for clogs Completed:JS
6.2.3 Check all table belts for defects Completed:BF,TL
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed:MR,AQ
TL,BF
BG,JS
Down Frc: Head 1 Pre-Adj: 344 Post-adj: 353.9
Head 2 Pre-Adj: 348 Post-adj: 354.1
Head 3 Pre-Adj: 343 Post-adj: 354.2
Head 4 Pre-Adj: 344 Post-adj: 354.2
hEAD 5 pRE-aDJ: 351 pOST-ADJ: 354.1
NOTE: The spec states a deviation of +/- 5 lbs.
6.2.5 Perform Down Force Calibration on Conditioner Completed:BG,TL,BF,JS
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj: 69
Actual Down Force Post-Adj:77.2
6.2.6 Check Scrubber Brushes for contaminates/defects Completed:TL
6.2.7 Check the Load Flipper alignment Completed:JS,BF,TL
6.2.8 Check the Unload Flipper alignment Completed:JS,BF,TL
6.2.9 Check Elevator alignments Completed:JS,BF,TL
6.2.10 Check wafer unload, from Index table to cassette Completed:JS,BF,TL
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre:24.34 Post:24.34 Tech:JS
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre:-15.38 +15.25
Post:-15.38 +15.25 Tech:JS
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre:4.89 Post:4.89 Tech:JS
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed:BF,JS,TL,BG
6.2.15 Check Vacuum Pump Diaphrams Completed:BF,JS,TL,BG
6.2.16 Replace liquid separator filter element Completed:BF,BG
6.2.17 Check Vacuum Tank/Pump lines Completed:BG,TL
6.2.18 Check carrier to Load Cup Position alignments Completed:BF,JS,TL,BG
6.2.19 Check Load Cup Height to carrier alignments Completed:BF,JS,TL
6.2.20 Check the Robot alignments Completed:BG,TL,JS
6.2.21 Check Muffin Fans for proper operation Completed:BG,BF
Comments:
6.2.15 Changed Exhaust Diaphram
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed:BF
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed:BF
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed:BF
6.1.4 Check Load Cup pressure for 40-50 PSI Completed:BF
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed:BF
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed:BF
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed:BF
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed:BF
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed:BF
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed:BF
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed:BF
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed:BF
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed:BF
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed:BF
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed:BF
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed:BF
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed:BF
6.1.18 Check MHTA pressure for 75-85 PSI Completed:BF
6.1.19 Check Drip Pans for moisture/contamination Completed:TL
6.1.20 Check tubing/fittings for fluid leaks Completed:JS,BG,TL
6.1.21 Check tubing/fittings for pneumatic leaks Completed:BG,TL
6.1.22 Check stations/components for contamination Completed:BG,TL,JS,BF
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed:BF,TL
6.1.24 Clean and lubricate the Scrubber rails Completed:JS
6.1.25 Clean and lubricate the Paddle rails Completed:BG
6.1.26 Remove and clean conditioning Wheel and Housing Completed: RP
6.1.27 Scrub clean the Polish area tub and walls Completed: RP
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:BG,TL,BF
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed:TL,BF
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed:BF,BG
6.1.32 Check Carrier clean brushes for defects Completed:TL
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:JS,BF
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: RP
6.1.35 Check chiller fluid resevoir for proper level Completed:BG
6.1.36 Check the chiller readout for 24 degrees C. Completed:BG
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:TL,JS
6.1.38 Check the slurry flow alarm. Completed:TL,BF,BG
Comments:
6.1.37 Adjusted Wafer Detect Sensor #2
6.1.38 Adjusted Slurry detect sensor to sense loss of slurry
|
| 22.46 | ww38 weekly pm. | FABSIX::L_SHKOLNIKOV | | Wed Mar 19 1997 06:44 | 100 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:3/19/97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): Leon Shkolnikov ls
Brian Jubinville BJ
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 90 ls
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 60 ls
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 24 ls
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 ls
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 11 ls
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 ls
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 ls
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 ls
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 ls
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 ls
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 ls
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 ls
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 ls
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 ls
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 ls
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 ls
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 ls
6.1.19 Check Drip Pans for moisture/contamination Completed: X ls
6.1.20 Check tubing/fittings for fluid leaks Completed: X ls
6.1.21 Check tubing/fittings for pneumatic leaks Completed: X ls
6.1.22 Check stations/components for contamination Completed: X BJ/ls
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 ls
6.1.24 Clean and lubricate the Scrubber rails Completed: X ls
6.1.25 Clean and lubricate the Paddle rails Completed: X ls
6.1.26 Remove and clean conditioning Wheel and Housing Completed: X BJ
6.1.27 Scrub clean the Polish area tub and walls Completed: X BJ/ls
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: X ls
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: X ls
6.1.30 Check slurry pump hoses and connectors for leaks Completed: X ls
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: X ls
6.1.32 Check Carrier clean brushes for defects Completed: X ls
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: X ls
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: X ls
6.1.35 Check chiller fluid resevoir for proper level Completed: X ls
6.1.36 Check the chiller readout for 24 degrees C. Completed: X ls
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: X ls
6.1.38 Check the slurry flow alarm. Completed: X ls
Comments:
6.1.10 - Applies to CMP.B1 only, EE notified.
|
| 22.47 | WW39 WEEKLY PM COMPLETED. | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 23 1997 10:23 | 102 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:3/23/97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): BRENDAN FINN
JAMES SADIN
TIMOTHY LANDRY
BOB GEE
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 88
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 60
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 26
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80
6.1.19 Check Drip Pans for moisture/contamination Completed: BG
6.1.20 Check tubing/fittings for fluid leaks Completed: BG/JS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BG/JS
6.1.22 Check stations/components for contamination Completed: JS/BF/TL/BG
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: JS
6.1.24 Clean and lubricate the Scrubber rails Completed: BF
6.1.25 Clean and lubricate the Paddle rails Completed: BF
6.1.26 Remove and clean conditioning Wheel and Housing Completed: JS
6.1.27 Scrub clean the Polish area tub and walls Completed: JS/TL/BF
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: JS/BF
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: JS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BG
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: JS
6.1.32 Check Carrier clean brushes for defects Completed: BF
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BF/TL
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BF/TL
6.1.35 Check chiller fluid resevoir for proper level Completed: JS
6.1.36 Check the chiller readout for 24 degrees C. Completed: JS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: JS/BG
6.1.38 Check the slurry flow alarm. Completed: JS**
Comments:
6.1.10 - Applies to CMP.B1 only, EE notified.
6.1.38 - switch broken and jumpered out. Waiting on parts.
|
| 22.48 | WW40 Weekly PM completed | FABSIX::R_POIRIER | | Tue Apr 01 1997 05:24 | 99 |
| SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:04/01/97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): Roger Poirier (RP)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 88 RP
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 60 RP
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 26 RP
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 RP
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 RP
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 RP
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 RP
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 RP
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 RP
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 RP
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 RP
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 RP
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 18 RP
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 RP
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 25 RP
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 RP
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 RP
6.1.19 Check Drip Pans for moisture/contamination Completed: RP
6.1.20 Check tubing/fittings for fluid leaks Completed: RP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP
6.1.22 Check stations/components for contamination Completed: RP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9.0 RP
6.1.24 Clean and lubricate the Scrubber rails Completed: RP
6.1.25 Clean and lubricate the Paddle rails Completed: RP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: RP
6.1.27 Scrub clean the Polish area tub and walls Completed: RP
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: RP
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: RP
6.1.32 Check Carrier clean brushes for defects Completed: RP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: RP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: RP
6.1.35 Check chiller fluid resevoir for proper level Completed: RP
6.1.36 Check the chiller readout for 24 degrees C. Completed: RP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: RP
6.1.38 Check the slurry flow alarm. Completed: RP**
Comments:
6.1.10 - Applies to CMP.B1 only, EE notified.
6.1.38 - switch broken and jumpered out. Waiting on parts.
|
| 22.49 | WEEKLY PM FOR WW41 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 10 1997 00:47 | 96 |
| SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:04/9/97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): Brian Jubinville (BJ)
Leon Shkolnikov (LS)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 88 BJ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 25 BJ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 BJ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 BJ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 BJ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BJ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BJ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 18 BJ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 25 BJ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BJ
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 BJ
6.1.19 Check Drip Pans for moisture/contamination Completed: BJ/LS
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ/LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ/LS
6.1.22 Check stations/components for contamination Completed: BJ/LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 10 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BJ
6.1.27 Scrub clean the Polish area tub and walls Completed: BJ
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: BJ
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BJ *
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BJ
6.1.32 Check Carrier clean brushes for defects Completed: BJ
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BJ
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BJ
6.1.35 Check chiller fluid resevoir for proper level Completed: LS
6.1.36 Check the chiller readout for 24 degrees C. Completed: LS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: BJ/LS
6.1.38 Check the slurry flow alarm. Completed: BJ/LS
Comments: Found slurry line #1 leaking - liquid detect sensor turned off
|
| 22.50 | ww42 monthly pm complete. | FABSIX::L_SHKOLNIKOV | | Fri Apr 18 1997 01:21 | 191 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE:4/17/97 TOOL ENTITY:CMP.B3 TECHNICIAN(S): John Poirier (JP)
Brad Westphal(BW)
Mike Standing(MS)
Dave Whitford (DW)
Leon Shkolnikov (ls)
Brian Jubinville (BJ)
START TIME: 5:35 p.m. COMPLETED TIME:
6.2.1 Change Peristaltic Pump Lines and check flow Completed: DW
6.2.2 Clean Polish area tub drains for clogs Completed: JP
6.2.3 Check all table belts for defects Completed: JP
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: JP,BW,MS
Down Frc: Head 1 Pre-Adj: 353.9 Post-adj: 353.9
Head 2 Pre-Adj: 354.2 Post-adj: 354.2
Head 3 Pre-Adj: 356.1 Post-adj: 354.7
Head 4 Pre-Adj: 355.8 Post-adj: 354.1
Head 5 Pre-Adj: 355.0 Post-adj: 353.7
6.2.5 Perform Down Force Calibration on Conditioner Completed: DW
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj: 68.1 PSI
Actual Down Force Post-Adj: 77.4 Psi
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: JP
6.2.7 Check the Load Flipper alignment Completed: DW
6.2.8 Check the Unload Flipper alignment Completed: DW
6.2.9 Check Elevator alignments Completed: ls
6.2.10 Check wafer unload, from Index table to cassette Completed: DW
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre: 24.05V Post: 24.05V Tech: MS
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre: 15.24V Post: 15.24V Tech: MS
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: 4.84V Post: 4.84V Tech: MS
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: BJ/ls**
6.2.15 Check Vacuum Pump Diaphrams Completed: DW
6.2.16 Replace liquid separator filter element Completed: JP
6.2.17 Check Vacuum Tank/Pump lines Completed: JP
6.2.18 Check carrier to Load Cup Position alignments Completed: LS/DW
6.2.19 Check Load Cup Height to carrier alignments Completed: LS
6.2.20 Check the Robot alignments Completed: ls
6.2.21 Check Muffin Fans for proper operation Completed: JP
Comments:
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:4/17/97 TOOL ENTITY:CMP.B1 TECHNICIAN(S): JOHN POIRIER (JP)
BRAD WESTPHAL(BW)
MIKE STANDING(MS)
START TIME: 5:35 P.M. COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: JP 85
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: JP 65
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: JP 30
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: JP 40
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: JP 10
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: JP 35
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: JP 30
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: JP 40
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: JP 6
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only) SEE NOTE
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: JP 20
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: JP 50
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: JP 50
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: JP 15
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: JP 25
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: JP 20
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: JP 40
6.1.18 Check MHTA pressure for 75-85 PSI Completed: JP 80
6.1.19 Check Drip Pans for moisture/contamination Completed: BW
6.1.20 Check tubing/fittings for fluid leaks Completed: BW
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BW
6.1.22 Check stations/components for contamination Completed: BW
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: JP 9
6.1.24 Clean and lubricate the Scrubber rails Completed: JP
6.1.25 Clean and lubricate the Paddle rails Completed: JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: DW
6.1.27 Scrub clean the Polish area tub and walls Completed: ls/BJ
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: MS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: MS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: JP
6.1.32 Check Carrier clean brushes for defects Completed: JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: MS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: MS
6.1.35 Check chiller fluid resevoir for proper level Completed: JP
6.1.36 Check the chiller readout for 24 degrees C. Completed: JP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: ls/BJ
6.1.38 Check the slurry flow alarm. Completed: JP
Comments:
* The door fasteners were treated with loctite to prevent loosening.
** The actual polish table table speed is 32.7 rpm. Engineer
notified.
|
| 22.50 | MONTHLY PM COMPLETED FOR WW42 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Apr 18 1997 07:24 | 193 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE:4/17/97 TOOL ENTITY:CMP.B3 TECHNICIAN(S): John Poirier (JP)
Brad Westphal(BW)
Mike Standing(MS)
Dave Whitford (DW)
Leon Shkolnikov (ls)
Brian Jubinville (BJ)
START TIME: 5:35 p.m. COMPLETED TIME:
6.2.1 Change Peristaltic Pump Lines and check flow Completed: DW
6.2.2 Clean Polish area tub drains for clogs Completed: JP
6.2.3 Check all table belts for defects Completed: JP
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: JP,BW,MS
Down Frc: Head 1 Pre-Adj: 353.9 Post-adj: 353.9
Head 2 Pre-Adj: 354.2 Post-adj: 354.2
Head 3 Pre-Adj: 356.1 Post-adj: 354.7
Head 4 Pre-Adj: 355.8 Post-adj: 354.1
Head 5 Pre-Adj: 355.0 Post-adj: 353.7
6.2.5 Perform Down Force Calibration on Conditioner Completed: DW
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj: 68.1 PSI
Actual Down Force Post-Adj: 77.4 Psi
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: JP
6.2.7 Check the Load Flipper alignment Completed: DW
6.2.8 Check the Unload Flipper alignment Completed: DW
6.2.9 Check Elevator alignments Completed: ls
6.2.10 Check wafer unload, from Index table to cassette Completed: DW
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre: 24.05V Post: 24.05V Tech: MS
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre: 15.24V Post: 15.24V Tech: MS
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: 4.84V Post: 4.84V Tech: MS
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: BJ/ls**
6.2.15 Check Vacuum Pump Diaphrams Completed: DW
6.2.16 Replace liquid separator filter element Completed: JP
6.2.17 Check Vacuum Tank/Pump lines Completed: JP
6.2.18 Check carrier to Load Cup Position alignments Completed: LS/DW
6.2.19 Check Load Cup Height to carrier alignments Completed: LS
6.2.20 Check the Robot alignments Completed: ls
6.2.21 Check Muffin Fans for proper operation Completed: JP
Comments:
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:4/18/97 TOOL ENTITY:CMP.B3 TECHNICIAN(S): JOHN POIRIER (JP)
BRAD WESTPHAL(BW)
MIKE STANDING(MS)
Leon Shkolnikov (ls)
Brian Jubinville (BJ)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: JP 85
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: JP 65
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: JP 30
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: JP 40
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: JP 10
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: JP 35
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: JP 30
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: JP 40
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: JP 6
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: JP 20
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: JP 50
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: JP 50
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: JP 15
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: JP 25
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: JP 20
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: JP 45
6.1.18 Check MHTA pressure for 75-85 PSI Completed: JP 80
6.1.19 Check Drip Pans for moisture/contamination Completed: BW
6.1.20 Check tubing/fittings for fluid leaks Completed: BW
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BW
6.1.22 Check stations/components for contamination Completed: BW
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: JP 9
6.1.24 Clean and lubricate the Scrubber rails Completed: JP
6.1.25 Clean and lubricate the Paddle rails Completed: JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: DW
6.1.27 Scrub clean the Polish area tub and walls Completed: ls/BJ
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: MS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: MS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: JP
6.1.32 Check Carrier clean brushes for defects Completed: JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: MS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: MS
6.1.35 Check chiller fluid resevoir for proper level Completed: JP
6.1.36 Check the chiller readout for 24 degrees C. Completed: JP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: ls/BJ
6.1.38 Check the slurry flow alarm. Completed: JP
Comments:
6.2.14 The actual polish table table speed is 32.7 rpm. Engineer
notified.
FYI - The door fasteners were treated with loctite to prevent loosening.
|
| 22.51 | cmp.b3 weekly p.m. completed for ww 43 | FABSIX::J_SWENSON | | Thu Apr 24 1997 19:41 | 101 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:4/24/97 TOOL ENTITY:CMP.B3 TECHNICIAN(S):MIKE STANDING (MS)
JOHN SWENSON (JS)
START TIME:10:30 A.M. COMPLETED TIME:1:00 P.M.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed:MS/JS
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed:MS/JS
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed:MS/JS
6.1.4 Check Load Cup pressure for 40-50 PSI Completed:MS/JS
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed:MS/JS
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed:MS/JS
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed:MS/JS
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed:MS/JS
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed:MS/JS
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed:MS/JS
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed:MS/JS
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed:MS/JS
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed:MS/JS
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed:MS/JS
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed:MS/JS
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed:MS/JS
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed:MS/JS
6.1.18 Check MHTA pressure for 75-85 PSI Completed:MS/JS
6.1.19 Check Drip Pans for moisture/contamination Completed: MS/JS
6.1.20 Check tubing/fittings for fluid leaks Completed: MS/JS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: MS/JS
6.1.22 Check stations/components for contamination Completed: MS/JS
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed:MS/JS
6.1.24 Clean and lubricate the Scrubber rails Completed:MS/JS
6.1.25 Clean and lubricate the Paddle rails Completed:MS/JS
6.1.26 Remove and clean conditioning Wheel and Housing Completed:MS/JS
6.1.27 Scrub clean the Polish area tub and walls Completed:MS/JS
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed:MS/JS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed:MS/JS
6.1.30 Check slurry pump hoses and connectors for leaks Completed:MS/JS
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed:MS/JS
6.1.32 Check Carrier clean brushes for defects Completed:MS/JS
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed:MS/JS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed:MS/JS
6.1.35 Check chiller fluid resevoir for proper level Completed:MS/JS
6.1.36 Check the chiller readout for 24 degrees C. Completed:MS/JS
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed:MS/JS
6.1.38 Check the slurry flow alarm. Completed: MS/JS
Comments:
|
| 22.52 | Weekly PM completed | FABSIX::R_POIRIER | | Mon Apr 28 1997 03:33 | 102 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:4/27/97 TOOL ENTITY:CMP.B3 TECHNICIAN(S):Roger Poirier (RP)
Bruce Durgin (BD)
START TIME: 9:30 P.M. COMPLETED TIME: 12:00 P.M.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 86 RP/BD
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 60 RP/BD
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 23 RP/BD
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 RP/BD
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 11 RP/BD
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 RP/BD
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 RP/BD
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 RP/BD
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 RP/BD
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A *
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 RP/BD
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 RP/BD
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 RP/BD
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 15 RP/BD
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 RP/BD
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 RP/BD
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 RP/BD
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 RP/BD
6.1.19 Check Drip Pans for moisture/contamination Completed: RP/BD
6.1.20 Check tubing/fittings for fluid leaks Completed: RP/BD
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP/BD
6.1.22 Check stations/components for contamination Completed: RP/BD
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 RP
6.1.24 Clean and lubricate the Scrubber rails Completed: RP
6.1.25 Clean and lubricate the Paddle rails Completed: RP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BD
6.1.27 Scrub clean the Polish area tub and walls Completed: RP/BD
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: RP/BD
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: RP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: RP/BD
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: RP
6.1.32 Check Carrier clean brushes for defects Completed: RP/BD
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: RP/BD
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: RP/BD
6.1.35 Check chiller fluid resevoir for proper level Completed: RP/BD
6.1.36 Check the chiller readout for 24 degrees C. Completed: RP/BD
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: RP/BD
6.1.38 Check the slurry flow alarm. Completed: RP/BD
Comments:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI *
(Applicable to CMP.B1 only) EE Notified
|
| 22.53 | SEMI-ANNUAL PM COMPLETED FOR WW45 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 09 1997 03:09 | 218 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Semi-Annual Preventative Maintenance Check Sheet, Rev. E
DATE: 5/9/97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): Brian Jubinville (BJ)
Dave Morin (DM)
START TIME: 3:15 p.m. COMPLETED TIME: 02:00
6.4.1 Check all interlocks for functionality Completed: BJ
6.4.2 Check all EMO's for functionality Completed: BJ
6.4.3 Lubricate the Rotary Union Completed: BJ
6.4.4 Lubricate the Lead Screw Completed: BJ
6.4.5 Lubricate the Linear Guide Rails Completed: BJ
6.4.6 Lubricate the Idler Pulley Completed: BJ
6.4.7 Rebuild the vacuum pump using the appropriate
rebuild kit. Completed: BJ/DM
Comments:
=======================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE: 5/9/97 TOOL ENTITY: CMP.B3 TECHNICIAN(S): John Poirier (JP)
Brian Jubinville (BJ)
Dave Morin (DM)
6.2.1 Change Peristaltic Pump Lines and check flow Completed: BJ/DM
6.2.2 Clean Polish area tub drains for clogs Completed: JP
6.2.3 Check all table belts for defects Completed: JP
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: BJ/DM
Down Frc: Head 1 Pre-Adj: 36.1 Post-adj: 354
Head 2 Pre-Adj: 363.3 Post-adj: 354
Head 3 Pre-Adj: 361 Post-adj: 354
Head 4 Pre-Adj: 357 Post-adj: 354
Head 5 Pre-Adj: 357.6 Post-adj: 354
6.2.5 Perform Down Force Calibration on Conditioner Completed: BJ/DM
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj: 84
Actual Down Force Post-Adj: 77
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: JP
6.2.7 Check the Load Flipper alignment Completed: BJ/DM
6.2.8 Check the Unload Flipper alignment Completed: BJ/DM
6.2.9 Check Elevator alignments Completed: BJ/DM
6.2.10 Check wafer unload, from Index table to cassette Completed: BJ/DM
6.2.11 Check the +24 Volt power supply for +/-1V
of 24V. Pre: 23.81 V Post: IN SPEC Tech: JP
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V. Pre: 15.23 V Post: IN SPEC Tech: JP
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre: 4.84 V Post: IN SPEC Tech: JP
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: BJ/DM
6.2.15 Check Vacuum Pump Diaphrams Completed: BJ/DM
6.2.16 Replace liquid separator filter element Completed: BJ/DM
6.2.17 Check Vacuum Tank/Pump lines Completed: BJ/DM
6.2.18 Check carrier to Load Cup Position alignments Completed: BJ/DM
6.2.19 Check Load Cup Height to carrier alignments Completed: BJ/DM
6.2.20 Check the Robot alignments Completed: BJ/DM
6.2.21 Check Muffin Fans for proper operation Completed: BJ/DM
Comments:
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:5/9/97 TOOL ENTITY:CMP.B3 TECHNICIAN(S): John Poirier (JP)
Brian Jubinville (BJ)
Dave Morin (DM)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 88 JP
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 60 JP
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 30 JP
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 JP
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 JP
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 JP
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 JP
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 JP
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 JP
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A JP
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 JP
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 45 JP
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 45 JP
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 JP
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 JP
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 JP
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 JP
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 JP
6.1.19 Check Drip Pans for moisture/contamination Completed: JP
6.1.20 Check tubing/fittings for fluid leaks Completed: JP
6.1.21 Check tubing/fittings for pneumatic leaks Completed: JP
6.1.22 Check stations/components for contamination Completed: JP
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 JP
6.1.24 Clean and lubricate the Scrubber rails Completed: JP
6.1.25 Clean and lubricate the Paddle rails Completed: JP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: JP
6.1.27 Scrub clean the Polish area tub and walls Completed: JP
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: JP
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: JP
6.1.30 Check slurry pump hoses and connectors for leaks Completed: JP
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: JP
6.1.32 Check Carrier clean brushes for defects Completed: JP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: JP
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: JP
6.1.35 Check chiller fluid resevoir for proper level Completed: JP
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ/DM
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: BJ/DM
6.1.38 Check the slurry flow alarm. Completed: BJ/DM
Comments: * 6.1.28 - REPLACED BROKEN SPRINGS ON MHTA LEAD SCREW COVER.
(LEFT SIDE/MIDDLE COVER)
|
| 22.54 | WW46 WEEKLY P.M. COMPLETED | SUBPAC::LANDRY | | Tue May 13 1997 16:24 | 102 |
| SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:5/13/97 TOOL ENTITY:CMP.B3 TECHNICIAN(S): Bob Gee (BG)
Tim Landry (TL)
Jim Sadin (JS)
START TIME: 2:30 P.M. COMPLETED TIME: 3:30 P.M.
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 86 TL
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 60 TL
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 23 TL
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 TL
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 TL
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 TL
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 TL
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 BG
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BG
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A *
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 JS
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BG
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BG
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 28 TL
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 TL
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 TL
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 42 TL
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 TL
6.1.19 Check Drip Pans for moisture/contamination Completed: BG
6.1.20 Check tubing/fittings for fluid leaks Completed: BG
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BG
6.1.22 Check stations/components for contamination Completed: TL
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9
6.1.24 Clean and lubricate the Scrubber rails Completed: BG
6.1.25 Clean and lubricate the Paddle rails Completed: TL
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BG
6.1.27 Scrub clean the Polish area tub and walls Completed: BG
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: TL / BG
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BG
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BG
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BG
6.1.32 Check Carrier clean brushes for defects Completed: TL
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: JS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BG
6.1.35 Check chiller fluid resevoir for proper level Completed: BG
6.1.36 Check the chiller readout for 24 degrees C. Completed: BG
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: TL
6.1.38 Check the slurry flow alarm. Completed: TL
Comments:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI *
(Applicable to CMP.B1 only) EE Notified
|
| 22.55 | ww47 weekly pm completed. | FABSIX::L_SHKOLNIKOV | | Fri May 23 1997 04:15 | 101 |
| SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:5/21/97 TOOL ENTITY:CMP.B3 TECH(S): Brian Jubinville (BJ)
Leon Shkolnikov ls
Dave Morin (DM)
START TIME: 1:15am COMPLETED TIME: 3:00am
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 85 BJ
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 29 BJ
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 BJ
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 BJ
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 BJ
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A * BJ
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BJ
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BJ
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 BJ
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BJ
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45 BJ
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 BJ
6.1.19 Check Drip Pans for moisture/contamination Completed: ls
6.1.20 Check tubing/fittings for fluid leaks Completed: ls
6.1.21 Check tubing/fittings for pneumatic leaks Completed: ls
6.1.22 Check stations/components for contamination Completed: ls
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 10 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: ls
6.1.25 Clean and lubricate the Paddle rails Completed: ls
6.1.26 Remove and clean conditioning Wheel and Housing Completed: DM
6.1.27 Scrub clean the Polish area tub and walls Completed: DM
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: ls/DM
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: DM
6.1.30 Check slurry pump hoses and connectors for leaks Completed: ls
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: ls
6.1.32 Check Carrier clean brushes for defects Completed: ls
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: ls/DM
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: ls/DM
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: ls/DM
6.1.38 Check the slurry flow alarm. Completed: ls/DM
Comments:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI *
(Applicable to CMP.B1 only) EE Notified
|
| 22.56 | CMP.B3 SHUTDOWN AND STARTUP CHECKSHEETS | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 10:52 | 52 |
| --------------------------------------------------------------------------------
SPEC# HF60-0172 REV-E SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
CMP.B3
CMP.B SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) SCRUB SIDES OF CARRIERS RP,AQ,BD/5-26-97
2) RUN CARRIER BLOW OFF FOR 30 SECONDS RP,AQ,BD/5-26-97
3) REMOVE ALL CARRIERS RP,AQ,BD/5-26-97
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK RP,AQ,BD/5-26-97
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. RP,AQ,BD/5-26-97
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY RP,AQ,BD/5-26-97
7) REMOVE CONDITIONER AND CLEAN RP,AQ,BD/5-26-97
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. RP,AQ,BD/5-26-97
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) RP,AQ,BD/5-26-97
10) DRAIN ELEVATOR AND CONDITIONER TUBE RP,AQ,BD/5-26-97
11) REMOVE PADS, AND CLEAN AND DRY TABLES RP,AQ,BD/5-26-97
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI RP,AQ,BD/5-26-97
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER RP,AQ,BD/5-26-97
14) POWER DOWN SYSTEM.
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
CMP.B START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. _js/tl/5/27__
2) POWER ON SYSTEM. _js/tl/5/27__
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES _js/tl/5/27__
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY _js/tl/5/27__
5) DRY TABLES, INSTALL PADS _js/tl/5/27__
6) INSTALL SCRUBBER BRUSHES _js/tl/5/27__
7) INSTALL CONDITIONER _js/tl/5/27__
8) INSTALL CARRIERS _js/tl/5/27__
9) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) _js/tl/5/27__
10) IF SLURRY SYSTEM WAS SHUT DOWN, CONTACT ASHLAND CHEMICAL,
REQUEST DI TO BE PURGE FROM SLURRY SYSTEM AND CHARGED WITH
SLURRY AND REQUEST A NEW SLURRY FILTER BE INSTALLED. _js/tl/5/27__
11) CALIBRATE SLURRY FLOW _NA___/______
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC _js/tl/5/27__
|
| 22.57 | WW48 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 18:36 | 102 |
| SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:5/27/97 TOOL ENTITY:CMP.B3 TECHNICIAN(S): Bob Gee (BG)
Tim Landry (TL)
Jim Sadin (JS)
Brendan Finn(BF)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 86 TL
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 60 TL
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 23 TL
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 TL
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 TL
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 TL
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 TL
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 BG
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BG
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A *
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 JS
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 BF
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BG
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 28 TL
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 TL
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 TL
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 42 TL
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 TL
6.1.19 Check Drip Pans for moisture/contamination Completed: BF
6.1.20 Check tubing/fittings for fluid leaks Completed: BG
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BG
6.1.22 Check stations/components for contamination Completed: TL
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9
6.1.24 Clean and lubricate the Scrubber rails Completed: BF
6.1.25 Clean and lubricate the Paddle rails Completed: TL
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BG
6.1.27 Scrub clean the Polish area tub and walls Completed: BG
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: TL / BF
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BG
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BG
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BG
6.1.32 Check Carrier clean brushes for defects Completed: TL
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: JS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BF
6.1.35 Check chiller fluid resevoir for proper level Completed: BG
6.1.36 Check the chiller readout for 24 degrees C. Completed: BG
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: TL
6.1.38 Check the slurry flow alarm. Completed: TL
Comments:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI *
(Applicable to CMP.B1 only) EE Notified
|
| 22.58 | WW49 Weekly PM completed | FABSIX::R_POIRIER | | Mon Jun 02 1997 22:49 | 103 |
| --------------------------------------------------------------------------------
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:6/02/97 TOOL ENTITY:CMP.B3 TECHNICIAN(S): Roger Poirier (RP)
Bruce Durgin (BD)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 88 RP/BD
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 RP/BD
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 28 RP/BD
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 40 RP/BD
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 10 RP/BD
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 RP/BD
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 RP/BD
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 40 RP/BD
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 RP/BD
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A *
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 RP/BD
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50 RP/BD
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 RP/BD
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 RP/BD
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 RP/BD
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 25 RP/BD
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 50 RP/BD
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 RP/BD
6.1.19 Check Drip Pans for moisture/contamination Completed: RP/BD
6.1.20 Check tubing/fittings for fluid leaks Completed: RP/BD
6.1.21 Check tubing/fittings for pneumatic leaks Completed: RP/BD
6.1.22 Check stations/components for contamination Completed: RP/BD
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9 RP/BD
6.1.24 Clean and lubricate the Scrubber rails Completed: RP
6.1.25 Clean and lubricate the Paddle rails Completed: RP
6.1.26 Remove and clean conditioning Wheel and Housing Completed: RP/BD
6.1.27 Scrub clean the Polish area tub and walls Completed: RP/BD
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: RP/BD
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BD
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BD
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: RP/BD
6.1.32 Check Carrier clean brushes for defects Completed: RP
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: RP/BD
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BD
6.1.35 Check chiller fluid resevoir for proper level Completed: RP/BD
6.1.36 Check the chiller readout for 24 degrees C. Completed: RP
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: RP/BD
6.1.38 Check the slurry flow alarm. Completed: RP/BD
Comments:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI *
(Applicable to CMP.B1 only) EE Notified
|