| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 48.1 | Weekly PM Checksheet Template | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Nov 08 1995 21:10 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:__________ SYSTEM RTC CODE:__________ TECH. NAME:__________________
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__________
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__________
6.1.3 Check the Drip Pan for contamination Completed:___________
6.1.4 Check all tubing/fittings for leaks Completed:___________
6.1.5 Check all wafer transport belts Completed:___________
6.1.6 Clean the Send module and Scrub modules Completed:___________
6.1.7 Check scrub brushes for contamination Completed:___________
6.1.8 Check scrub brush height in both modules Completed:___________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 48.4 | WW XX | SUBPAC::LANDRY | | Sun Nov 12 1995 18:54 | 23 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/12/95 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Landry/Finn
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____52____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__37/37___
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments:
|
| 48.5 | Weekly PM for 11/21 completed | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Tue Nov 21 1995 23:09 | 28 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/21/95 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH. NAME: BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 psi
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments: INSIDE - 319-F 330-R
OUTSIDE - 354-F 329-R
There is still a leak in the front/inside of the outside
brush station. The source is still unknown.
|
| 48.6 | Weekly PM for WW22 completed | FABSIX::L_SHKOLNIKOV | | Wed Nov 29 1995 07:21 | 23 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 29/11/95 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: BJ/LEON
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____50____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:____38____
6.1.3 Check the Drip Pan for contamination Completed:_____X_____
6.1.4 Check all tubing/fittings for leaks Completed:_____X_____
6.1.5 Check all wafer transport belts Completed:_____X_____
6.1.6 Clean the Send module and Scrub modules Completed:_____X_____
6.1.7 Check scrub brushes for contamination Completed:_____X_____
6.1.8 Check scrub brush height in both modules Completed:_____X_____
Comments: There is still a leak in the front/inside of the outside
brush station.
|
| 48.7 | weekly p.m. | FABSIX::R_GEE | | Mon Dec 04 1995 21:03 | 23 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/04/95 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: BG/MR
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____50____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__38/38___
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments: Brush heights Out Front - 354 Rear - 329
In Front - 319 Rear - 330
|
| 48.8 | WEEKLY PM WW24 | LUDWIG::RIDLON | Eliminate the obvious | Sun Dec 10 1995 04:07 | 23 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/10/95 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: BG/MR
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____53____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__38/38___
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments: Brush heights Out Front - 354 Rear - 329
In Front - 319 Rear - 330
|
| 48.9 | QUARTERLY PM WW24 | LUDWIG::RIDLON | Eliminate the obvious | Sun Dec 10 1995 04:07 | 21 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE: 12/10/95 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: MR/BG
6.3.1 Check muffin fans for functionality Completed:_____X_____
6.3.2 Check motor drive belts for defects Completed:_____X_____
6.3.3 Check the robot knife for loose hardware Completed:_____X_____
6.3.4 Check the spin station grippers Completed:_____X_____
6.3.5 Check the motor speed output readings Completed:_____X_____
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 48.10 | Weekly completed | SUBPAC::LANDRY | | Sun Dec 17 1995 13:12 | 23 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/17/95 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____51____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__37/37___
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments:
|
| 48.11 | No PM necessary for WW26 FY96 | SUBPAC::TOOKER | | Thu Dec 21 1995 15:11 | 6 |
| Due to the scheduled FAB6 shutdown during Work Week 26 Fiscal Year 1996, no PM will be performed
on CMP-SCRUB.A2.
Jim Tooker
CMP Equipment Engineer
|
| 48.12 | WW27 Weekly PM | FABSIX::R_POIRIER | | Mon Jan 01 1996 21:49 | 29 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:_1-1-96___ SYSTEM RTC CODE:_CMP-SCRUB.A2 TECH. NAME:_ "B" SHIFT_____
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__50PSI___
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_32/32_____
6.1.3 Check the Drip Pan for contamination Completed:___Done____
6.1.4 Check all tubing/fittings for leaks Completed:___Done____
6.1.5 Check all wafer transport belts Completed:___Done____
6.1.6 Clean the Send module and Scrub modules Completed:___Done____
6.1.7 Check scrub brushes for contamination Completed:___Done____
6.1.8 Check scrub brush height in both modules Completed:___Done____
Comments: Outside front 306 Outside rear 311
Inside front 303 Inside rear 331
__________________________________________________________________
__________________________________________________________________
|
| 48.13 | WW 28 - Weekly | SUBPAC::LANDRY | | Mon Jan 08 1996 15:50 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/8/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____51____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__37/38___
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
Comments:
|
| 48.14 | WEEKLY PM FOR WW29 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 17 1996 21:53 | 29 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/17/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: LEON, BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_____X____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___37_____
6.1.3 Check the Drip Pan for contamination Completed:______X____
6.1.4 Check all tubing/fittings for leaks Completed:______X____
6.1.5 Check all wafer transport belts Completed:______X____
6.1.6 Clean the Send module and Scrub modules Completed:______X____
6.1.7 Check scrub brushes for contamination Completed:______X____
6.1.8 Check scrub brush height in both modules Completed:______X____
Comments: Inside brush heights - Front - 303 rear - 381
Outside brush heights - Front - 306 rear - 311
__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 48.15 | forgot to post, weekly PM for WW30 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Jan 26 1996 20:22 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/24/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_____X____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___35_____
6.1.3 Check the Drip Pan for contamination Completed:______X____
6.1.4 Check all tubing/fittings for leaks Completed:______X____
6.1.5 Check all wafer transport belts Completed:______X____
6.1.6 Clean the Send module and Scrub modules Completed:______X____
6.1.7 Check scrub brushes for contamination Completed:______X____
6.1.8 Check scrub brush height in both modules Completed:______X____
Comments: Inside brush heights - Front - 360 rear - 335
Outside brush heights - Front - 375 rear - 355
|
| 48.16 | weekly ww31 | STRATA::RIDLON | Eliminate the obvious | Tue Jan 30 1996 00:05 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/29/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: b shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_____X____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___36_____
6.1.3 Check the Drip Pan for contamination Completed:______X____
6.1.4 Check all tubing/fittings for leaks Completed:______X____
6.1.5 Check all wafer transport belts Completed:______X____
6.1.6 Clean the Send module and Scrub modules Completed:______X____
6.1.7 Check scrub brushes for contamination Completed:______X____
6.1.8 Check scrub brush height in both modules Completed:______X____
Comments: Inside brush heights - Front - 360 rear - 335
Outside brush heights - Front - 375 rear - 355
|
| 48.17 | 2/5/95 weekly completed | FABSIX::B_FINN | | Mon Feb 05 1996 19:32 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/05/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: a shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:___50_____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___36_____
6.1.3 Check the Drip Pan for contamination Completed:______X____
6.1.4 Check all tubing/fittings for leaks Completed:______X____
6.1.5 Check all wafer transport belts Completed:______X____
6.1.6 Clean the Send module and Scrub modules Completed:______X____
6.1.7 Check scrub brushes for contamination Completed:______X____
6.1.8 Check scrub brush height in both modules Completed:______X____
Comments: Inside brush heights - Front - 360 rear - 335
Outside brush heights - Front - 375 rear - 355
|
| 48.18 | WW33 Weekly PM | FABSIX::R_POIRIER | | Sun Feb 11 1996 03:42 | 26 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:_2-11-96 SYSTEM RTC CODE:CMP-SCRUB.A2 TECH. NAME: B SHIFT
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 35/36
6.1.3 Check the Drip Pan for contamination Completed:___Done____
6.1.4 Check all tubing/fittings for leaks Completed:___Done____
6.1.5 Check all wafer transport belts Completed:___Done____
6.1.6 Clean the Send module and Scrub modules Completed:___Done____
6.1.7 Check scrub brushes for contamination Completed:___Done____
6.1.8 Check scrub brush height in both modules Completed:___Done____
Comments:____Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
______Replaced bearings on Outside lower brush ___________________
|
| 48.19 | WEEKLY PM COMPLETED FOR WW34 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Fri Feb 23 1996 04:54 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/22/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 35
6.1.3 Check the Drip Pan for contamination Completed:___Done____
6.1.4 Check all tubing/fittings for leaks Completed:___Done____
6.1.5 Check all wafer transport belts Completed:___Done____
6.1.6 Clean the Send module and Scrub modules Completed:___Done____
6.1.7 Check scrub brushes for contamination Completed:___Done____
6.1.8 Check scrub brush height in both modules Completed:___Done____
Comments:____Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
|
| 48.20 | WW35 Weekly PM | FABSIX::R_POIRIER | | Mon Feb 26 1996 00:53 | 25 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/25/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: B Shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 36/36
6.1.3 Check the Drip Pan for contamination Completed:___Done____
6.1.4 Check all tubing/fittings for leaks Completed:___Done____
6.1.5 Check all wafer transport belts Completed:___Done____
6.1.6 Clean the Send module and Scrub modules Completed:___Done____
6.1.7 Check scrub brushes for contamination Completed:___Done____
6.1.8 Check scrub brush height in both modules Completed:___Done____
Comments:____Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
|
| 48.21 | WEEKLY PM COMPLETED FOR WW36 | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Mar 06 1996 04:28 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 3/6/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 35 psi
6.1.3 Check the Drip Pan for contamination Completed:___Done____
6.1.4 Check all tubing/fittings for leaks Completed:___Done____
6.1.5 Check all wafer transport belts Completed:___Done____
6.1.6 Clean the Send module and Scrub modules Completed:___Done____
6.1.7 Check scrub brushes for contamination Completed:___Done____
6.1.8 Check scrub brush height in both modules Completed:___Done____
Comments:____Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
|
| 48.22 | SEMI-ANNUAL PM FOR WW37 COMPLETED | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Thu Mar 14 1996 04:27 | 43 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE: 3/13/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: D shift
Weekly and Quarterly checksheets Completed:_____X_____
6.4.1 Check all EMO's for functionality Completed:_____X_____
6.4.2 Check all interlocks for functionality Completed:_____X_____
6.4.3 Check heat lamp housing/wiring for defects Completed:_____X_____
6.4.4 Check the robot hardware/wiring for defects Completed:_____X_____
6.4.5 Check the spindle bearings/bushings Completed:_____X_____
6.4.6 Check the spin sta. rollers/bearings/bushings Completed:_____X_____
6.4.7 Check the brush sta. drive bearings/bushings Completed:_____X_____
6.4.8 Check the +5 VDC power supply Pre-Adjust: 5.0
Post-Adjust:_________
6.4.9 Check the -12 VDC power supply Pre-Adjust: -12.6
6.4.10 Check the +12 VDC power supply Pre-Adjust: +12.6
6.4.11 Check the +24 VDC power supply Pre-Adjust: +24
Post-Adjust:_________
6.4.12 Check the +48 VDC power supply Pre-Adjust: +48
Post-Adjust:_________
Comments:____Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
|
| 48.23 | weekly ww38 | STRATA::RIDLON | Eliminate the obvious | Sun Mar 17 1996 21:51 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 3/17/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 60 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 36 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
|
| 48.24 | WW39 Weekly PM | FABSIX::R_POIRIER | | Sun Mar 24 1996 01:12 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 3/24/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 35 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
|
| 48.25 | WW40 Weekly PM | FABSIX::R_POIRIER | | Tue Apr 02 1996 05:29 | 27 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 04/02/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 35 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
|
| 48.26 | WW41 Weekly PM | FABSIX::R_POIRIER | | Mon Apr 08 1996 04:12 | 27 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 04/08/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 35 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
|
| 48.27 | ww42 weekly pm | FABSIX::L_SHKOLNIKOV | | Tue Apr 16 1996 22:59 | 27 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 04/16/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 38 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
|
| 48.28 | ww43 weekly pm | FABSIX::L_SHKOLNIKOV | | Wed Apr 24 1996 23:35 | 27 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 04/24/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 37 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
|
| 48.29 | WEEKLY PM COMPLETED FOR WW44 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Tue Apr 30 1996 23:59 | 35 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 04/30/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_ 50 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_ 40 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside Rear 355 Outside front 375
Inside rear 335 Inside front 360
Found DI water on top of the gear pulley above
the motor for the rollers in the inside brush station.
The o-ring on the shaft was replaced to start. If
in still leaks, the shaft will have to be pulled out.
Found lower rear roller arm in the inside brush
cracked while removing it to get to the o-ring, replaced
arm.
|
| 48.30 | WW 45 - Weekly | SUBPAC::LANDRY | | Mon May 06 1996 12:28 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 05/6/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 60 psi
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 psi
6.1.3 Check the Drip Pan for contamination Completed:___x____
6.1.4 Check all tubing/fittings for leaks Completed:___x____
6.1.5 Check all wafer transport belts Completed:___x____
6.1.6 Clean the Send module and Scrub modules Completed:___x____
6.1.7 Check scrub brushes for contamination Completed:___x____
6.1.8 Check scrub brush height in both modules Completed:___x____
Comments: Brush heights Outside rear 355 Outside front 375
Inside rear 335 Inside front 360
Adjusted the CDA to it's desired 50 PSI level
|
| 48.31 | WW 46 - Weekly | FABSIX::L_SHKOLNIKOV | | Fri May 17 1996 00:25 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/16/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:___50___
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:___38___
6.1.3 Check the Drip Pan for contamination Completed:____X____
6.1.4 Check all tubing/fittings for leaks Completed:____X____
6.1.5 Check all wafer transport belts Completed:____X____
6.1.6 Clean the Send module and Scrub modules Completed:____X____
6.1.7 Check scrub brushes for contamination Completed:____X____
6.1.8 Check scrub brush height in both modules Completed:____X____
Comments: BRUSH HEIGHTS: IB_F = 360 OB_F = 375
IB_R = 335 OB_R = 355
|
| 48.32 | WW 47 - Weekly | SUBPAC::LANDRY | | Tue May 21 1996 14:56 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/21/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:___50___
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38/37
6.1.3 Check the Drip Pan for contamination Completed:____X____
6.1.4 Check all tubing/fittings for leaks Completed:____X____
6.1.5 Check all wafer transport belts Completed:____X____
6.1.6 Clean the Send module and Scrub modules Completed:____X____
6.1.7 Check scrub brushes for contamination Completed:____X____
6.1.8 Check scrub brush height in both modules Completed:____X____
Comments: BRUSH HEIGHTS: IB_F = 360 OB_F = 375
IB_R = 335 OB_R = 355
|
| 48.33 | SHUTDOWN CHECKSHEET | STRATA::RIDLON | Eliminate the obvious | Mon May 27 1996 07:39 | 22 |
|
CMP-SCRUB.A1 & CMP-SRUB.A2 SHUTDOWN CHECKSHEET
----------------------------------------------
Tech. Date
------- -------
1. Change RTC status to SCHEDULED DOWN. ___B___ __5/27_
2. Remove all PVA scrub brushes and discard. __B____ _______
3. Perform a complete wipe down and dry of
all wet surfaces. ___B___ _______
4. Close main incoming DI Water valve to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. ___B___ _______
5. Power down each system. ___B___ _______
6. Enter checksheet into notesfile.
|
| 48.34 | Weekly PM ** note new brushes/heights | SUBPAC::LANDRY | | Tue May 28 1996 19:40 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 5/28/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A & B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/41
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: New Brushes installed at this PM.
Brush Heights: OB-front = 620 OB-rear = 615
IB-front = 570 IB-rear = 535
|
| 48.35 | Startup Checksheet | SUBPAC::LANDRY | | Tue May 28 1996 19:56 | 20 |
| CMP-SCRUB.A2 STARTUP CHECKSHEET
----------------------------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are
available and ready to use. A shift 5/28/96
2. Power up each system. A shift 5/28/96
3. Open incoming DI Water Valve to each
system. A shift 5/28/96
4. Close UDR valve at each system. A shift 5/28/96
5. Re-install new PVA scrub brushes. A shift 5/28/96
6. Change RTC status to VERIFY and notify
Operations that the systems are ready
for MQC. A shift 5/28/96
|
| 48.36 | WW 49 - Weekly | SUBPAC::LANDRY | | Tue Jun 04 1996 14:25 | 23 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/4/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 42/43
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Brush Heights: OB-front = 620 OB-rear = 615
IB-front = 570 IB-rear = 535
|
| 48.2 | Quarterly PM Checksheet Template | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Jun 11 1996 23:57 | 36 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE:__________ SYSTEM RTC CODE:__________ TECH. NAME:__________________
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__________
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__________
6.1.3 Check the Drip Pan for contamination Completed:___________
6.1.4 Check all tubing/fittings for leaks Completed:___________
6.1.5 Check all wafer transport belts Completed:___________
6.1.6 Clean the Send module and Scrub modules Completed:___________
6.1.7 Check scrub brushes for contamination Completed:___________
6.1.8 Check scrub brush height in both modules Completed:___________
6.3.1 Check muffin fans for functionality Completed:___________
6.3.2 Check motor drive belts for defects Completed:___________
6.3.3 Check the robot knife for loose hardware Completed:___________
6.3.4 Check the spin station grippers Completed:___________
6.3.5 Check the motor speed output readings Completed:___________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 48.3 | Semi-Annual PM Checksheet Template | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Jun 11 1996 23:58 | 66 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE:__________ SYSTEM RTC CODE:__________ TECH. NAME:__________________
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:__________
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:__________
6.1.3 Check the Drip Pan for contamination Completed:___________
6.1.4 Check all tubing/fittings for leaks Completed:___________
6.1.5 Check all wafer transport belts Completed:___________
6.1.6 Clean the Send module and Scrub modules Completed:___________
6.1.7 Check scrub brushes for contamination Completed:___________
6.1.8 Check scrub brush height in both modules Completed:___________
6.3.1 Check muffin fans for functionality Completed:___________
6.3.2 Check motor drive belts for defects Completed:___________
6.3.3 Check the robot knife for loose hardware Completed:___________
6.3.4 Check the spin station grippers Completed:___________
6.3.5 Check the motor speed output readings Completed:___________
6.4.1 Check all EMO's for functionality Completed:___________
6.4.2 Check all interlocks for functionality Completed:___________
6.4.3 Check heat lamp housing/wiring for defects Completed:___________
6.4.4 Check the robot hardware/wiring for defects Completed:___________
6.4.5 Check the spindle bearings/bushings Completed:___________
6.4.6 Check the spin sta. rollers/bearings/bushings Completed:___________
6.4.7 Check the brush sta. drive bearings/bushings Completed:___________
6.4.8 Check the +5 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
6.4.9 Check the -12 VDC power supply Pre-Adjust:__________
6.4.10 Check the +12 VDC power supply Pre-Adjust:__________
6.4.11 Check the +24 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
6.4.12 Check the +48 VDC power supply Pre-Adjust:__________
Post-Adjust:_________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 48.37 | Quarterly PM for WW50 completed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jun 12 1996 00:10 | 34 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE: 6/11/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed:____X______
6.1.4 Check all tubing/fittings for leaks Completed:____X______
6.1.5 Check all wafer transport belts Completed:____X______
6.1.6 Clean the Send module and Scrub modules Completed:____X______
6.1.7 Check scrub brushes for contamination Completed:____X______
6.1.8 Check scrub brush height in both modules Completed:____X______
6.3.1 Check muffin fans for functionality Completed:____X______
6.3.2 Check motor drive belts for defects Completed:____X______
6.3.3 Check the robot knife for loose hardware Completed:____X______
6.3.4 Check the spin station grippers Completed:____X______
6.3.5 Check the motor speed output readings Completed:____X______
Comments: Brush heights: Outside: Front-570, Rear-535
Inside: Front-620, Rear-615
|
| 48.38 | Weekly p.m. completed | FABSIX::R_GEE | | Wed Jun 19 1996 04:53 | 28 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/18/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Brush Heights: OB-front = 570 OB-rear = 535
IB-front = 620 IB-rear = 615
Adjusted the IB station rollers down to keep the back of
the wafers from hitting the belts.
Replaced the four bearings in the IB station top brush core.
|
| 48.39 | Weekly PM done | SUBPAC::LANDRY | | Sun Jun 23 1996 17:18 | 23 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 6/23/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39/40
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Brush Heights: OB-front = 570 OB-rear = 535
IB-front = 620 IB-rear = 615
|
| 48.40 | weekly p.m. completed | FABSIX::R_GEE | | Tue Jul 02 1996 02:31 | 23 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/03/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: B shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38/39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Brush Heights: OB-front = 570 OB-rear = 535
IB-front = 620 IB-rear = 615
|
| 48.41 | SCRUB.A2 SHUT-DOWN COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jul 04 1996 03:31 | 24 |
|
CMP-SCRUB.A2 SHUTDOWN CHECKSHEET
--------------------------------
Tech Date
------- -------
1. Change RTC status to SCHEDULED DOWN. BJ 7/3/96
2. Close main incoming DI Water valve(s) to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. BJ 7/3/96
3. Remove all PVA scrub brushes and submerge BJ 7/3/96
in DI water.
4. Perform a complete wipe down and dry of
all wet surfaces. BJ 7/3/96
5. Power down each system. BJ 7/3/96
6. Enter checksheet into notesfile. BJ 7/3/96
|
| 48.42 | STARTUP after SHUTDOWN. | FABSIX::L_SHKOLNIKOV | | Fri Jul 05 1996 23:50 | 24 |
|
CMP-SCRUB.A2 STARTUP CHECKSHEET
--------------------------------
DATE 7/5/96 TECH. NAME: Leon
1. Ensure that all necessary facilities are
available and ready to use. ___X___
2. Power up system. ___X___
3. Re-install PVA scrub brushes. ___X____
4. Open incoming DI Water Valve(s)
system. ___X___
5. Close UDR valve at system. ___X___
6. Change RTC status to VERIFY and notify
Operations that the systems are ready
for MQC. ___X___
|
| 48.43 | WW 2 / FY97 - Weekly | SUBPAC::LANDRY | | Sun Jul 07 1996 14:11 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/7/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A shift / Jim S
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 52
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 30/30
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Brush Heights: OB-front = 570 OB-rear = 535
IB-front = 620 IB-rear = 615
Found brush "splash guards" in bottom of both the IB and OB
stations. Re-installed.
|
| 48.44 | ww03 weekly pm | FABSIX::R_POIRIER | | Wed Jul 17 1996 05:22 | 25 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/17/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: B Shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37/37
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Brush Heights: OB-front = 570 OB-rear = 535
IB-front = 620 IB-rear = 615
|
| 48.45 | ww04 weekly pm | FABSIX::L_SHKOLNIKOV | | Fri Jul 26 1996 01:42 | 25 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/26/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: D Shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Brush Heights: OB IB
front 570 620
rear 535 615
|
| 48.46 | WW V - Weekly | SUBPAC::LANDRY | | Mon Jul 29 1996 14:22 | 24 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 7/29/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A Shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 53
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 38 / 39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Brush Heights: OB IB
front 570 620
rear 535 615
|
| 48.47 | WW06 Weekly PM | FABSIX::R_POIRIER | | Mon Aug 05 1996 04:40 | 25 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:08/05/96 SYSTEM RTC CODE:CMP_SCRUB.B2 TECH. NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_50_
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_38/38_
6.1.3 Check the Drip Pan for contamination Completed:__X__
6.1.4 Check all tubing/fittings for leaks Completed:__X__
6.1.5 Check all wafer transport belts Completed:__X__
6.1.6 Clean the Send module and Scrub modules Completed:__X__
6.1.7 Check scrub brushes for contamination Completed:__X__
6.1.8 Check scrub brush height in both modules Completed:__X__
Comments: BRUSH HEIGHTS OB IB
R 535 615
F 570 620
|
| 48.48 | Weekly PM for WW7 completed | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Aug 14 1996 22:12 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 08/14/96 SYSTEM RTC CODE: CMP_SCRUB.A2 TECH. NAME: Leon
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_50_
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_38
6.1.3 Check the Drip Pan for contamination Completed:__X__
6.1.4 Check all tubing/fittings for leaks Completed:__X__
6.1.5 Check all wafer transport belts Completed:__X__
6.1.6 Clean the Send module and Scrub modules Completed:__X__
6.1.7 Check scrub brushes for contamination Completed:__X__
6.1.8 Check scrub brush height in both modules Completed:__X__
Comments: BRUSH HEIGHTS OB IB
R 535 615
F 570 620
|
| 48.49 | WW08 Weekly PM | FABSIX::R_POIRIER | | Tue Aug 20 1996 00:19 | 26 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 08/19/96 SYSTEM RTC CODE: CMP_SCRUB.A2 TECH. NAME: B Shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:_50_
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:_38/38
6.1.3 Check the Drip Pan for contamination Completed:__X__
6.1.4 Check all tubing/fittings for leaks Completed:__X__
6.1.5 Check all wafer transport belts Completed:__X__
6.1.6 Clean the Send module and Scrub modules Completed:__X__
6.1.7 Check scrub brushes for contamination Completed:__X__
6.1.8 Check scrub brush height in both modules Completed:__X__
Comments: BRUSH HEIGHTS OB IB
R 535 615
F 570 620
|
| 48.50 | WW IX - Weekly version | SUBPAC::LANDRY | | Sun Aug 25 1996 13:48 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 8/25/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 52
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39 / 38
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found a puddle on frame underneath IB station.
OB IB
Brush Heights: Front 570 620
Rear 535 615
|
| 48.51 | CMP-SCRUB.A2 SHUTDOWN CHECKSHEET | FABSIX::R_POIRIER | | Mon Sep 02 1996 02:56 | 20 |
|
CMP-SCRUB.A1/.A1/.A3/.C1-7 SHUTDOWN CHECKSHEET
----------------------------------------------
Tech. Date
------- -------
1. Close main incoming DI Water valve to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR. ___B___ _9/1/96_
2. Remove all PVA scrub brushes and submerge
in DI water. Label each brush with the
tool name. ___B___ _9/1/96_
3. Perform a complete wipe down and dry of
all wet surfaces. ___B___ _9/1/96_
4. Power down each system. ___B___ _9/1/96_
5. Enter checksheet into notesfile. ___B___ _9/1/96_
|
| 48.52 | | FABSIX::B_FINN | | Tue Sep 03 1996 20:18 | 24 |
|
CMP-SCRUB.A2 STARTUP CHECKSHEET
--------------------------------
DATE 9/3/96 TECH. NAME: A shift
1. Ensure that all necessary facilities are
available and ready to use. ___X___
2. Power up system. ___X___
3. Re-install PVA scrub brushes. ___X____
4. Open incoming DI Water Valve(s)
system. ___X___
5. Close UDR valve at system. ___X___
6. Change RTC status to VERIFY and notify
Operations that the systems are ready
for MQC. ___X___
|
| 48.53 | WEEKLY PM COMPLETED | FABSIX::B_FINN | | Tue Sep 03 1996 20:31 | 26 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/3/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 52
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments: Found a puddle on frame underneath IB station.
OB IB
Brush Heights: Front 570 620
Rear 535 615
|
| 48.54 | Semi ww11 | LUDWIG::RIDLON | Eliminate the obvious | Wed Sep 11 1996 05:26 | 69 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE: 9/11/96 SYSTEM RTC CODE:cmp-scrub.a2 TECH. NAME: B-shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust:____50____
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust:____40____
6.1.3 Check the Drip Pan for contamination Completed:_____X_____
6.1.4 Check all tubing/fittings for leaks Completed:_____X_____
6.1.5 Check all wafer transport belts Completed:_____X_____
6.1.6 Clean the Send module and Scrub modules Completed:_____X_____
6.1.7 Check scrub brushes for contamination Completed:_____X_____
6.1.8 Check scrub brush height in both modules Completed:_____X_____
Outside Front 570 Rear 535
Inside Front 620 Rear 615
6.3.1 Check muffin fans for functionality Completed:_____X_____
6.3.2 Check motor drive belts for defects Completed:_____X_____
6.3.3 Check the robot knife for loose hardware Completed:_____X_____
6.3.4 Check the spin station grippers Completed:_____X_____
6.3.5 Check the motor speed output readings Completed:_____X_____
6.4.1 Check all EMO's for functionality Completed:_____X_____
6.4.2 Check all interlocks for functionality Completed:_____X_____
6.4.3 Check heat lamp housing/wiring for defects Completed:_____X_____
6.4.4 Check the robot hardware/wiring for defects Completed:_____X_____
6.4.5 Check the spindle bearings/bushings Completed:_____X_____
6.4.6 Check the spin sta. rollers/bearings/bushings Completed:_____X_____
6.4.7 Check the brush sta. drive bearings/bushings Completed:_____X_____
6.4.8 Check the +5 VDC power supply Pre-Adjust:___5.00___
Post-Adjust:_________
6.4.9 Check the -12 VDC power supply Pre-Adjust:_-12.96___
6.4.10 Check the +12 VDC power supply Pre-Adjust:__12.64___
6.4.11 Check the +24 VDC power supply Pre-Adjust:__24.0____
Post-Adjust:_________
6.4.12 Check the +48 VDC power supply Pre-Adjust:___48.0___
Post-Adjust:_________
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
|
| 48.55 | WW XII - Weekly | SUBPAC::LANDRY | | Sun Sep 15 1996 18:50 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/15/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 52
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 / 40
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 570 620
Rear 535 615
|
| 48.56 | WW XIII - Weekly | SUBPAC::LANDRY | | Wed Sep 25 1996 19:59 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 9/25/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 52
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 / 40
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 570 620
Rear 535 615
|
| 48.57 | ww14 weekly pm | FABSIX::L_SHKOLNIKOV | | Fri Oct 04 1996 01:07 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/04/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: D shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 / 40
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Rear 535 615
Front 570 620
|
| 48.58 | WW XV - Weekly completed | SUBPAC::LANDRY | | Wed Oct 09 1996 11:58 | 25 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/09/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Rear 535 615
Front 570 620
|
| 48.59 | WW16 weekly p.m. completed | FABSIX::R_GEE | | Mon Oct 14 1996 18:23 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/14/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: A shift
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 42
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Rear 535 615
Front 570 620
|
| 48.60 | WW XVII - Weekly completed | SUBPAC::LANDRY | | Sun Oct 20 1996 18:18 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/20/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Gee / Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 41
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Rear 535 615
Front 570 620
|
| 48.61 | WW XVIII - Weekly completed | SUBPAC::LANDRY | | Sun Oct 27 1996 09:46 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 10/27/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 52
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 41/41
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Rear 535 615
Front 570 620
|
| 48.62 | WW 19 - Weekly completed | SUBPAC::LANDRY | | Tue Nov 05 1996 13:09 | 27 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/5/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Gee / Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Rear 535 615
Front 570 620
|
| 48.63 | WEEKLY PM FOR WW20 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Nov 12 1996 21:21 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/12/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Jubinville BJ
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
Comments:
OB IB
Brush Heights: Front 570 620
Rear 535 615
BRUSHES CHANGED ON 10/21 HENCE THE DIFFERENCE IN BRUSH
HEIGHTS FROM LAST WEEKS WEEKLY PM.
----------------------------------
|
| 48.64 | WW 21 weekly p.m. completed | FABSIX::R_GEE | | Mon Nov 18 1996 18:51 | 25 |
|
DATE: 11/18/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: BG
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40
6.1.3 Check the Drip Pan for contamination Completed: BG
6.1.4 Check all tubing/fittings for leaks Completed: BG
6.1.5 Check all wafer transport belts Completed: BG
6.1.6 Clean the Send module and Scrub modules Completed: BG
6.1.7 Check scrub brushes for contamination Completed: BG
6.1.8 Check scrub brush height in both modules Completed: BG
Comments:
OB IB
Brush Heights: Front 570 620
Rear 535 615
* Replaced the 4 bearings in the OB station top brush core.
|
| 48.65 | ww22 weekly pm completed | FABSIX::B_FINN | | Sun Nov 24 1996 13:43 | 27 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 11/24/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Landry,Finn
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40
6.1.3 Check the Drip Pan for contamination Completed: BF/TL
6.1.4 Check all tubing/fittings for leaks Completed: BF/TL
6.1.5 Check all wafer transport belts Completed: BF/TL
6.1.6 Clean the Send module and Scrub modules Completed: BF/TL
6.1.7 Check scrub brushes for contamination Completed: BF/TL
6.1.8 Check scrub brush height in both modules Completed: BF/TL
Comments:
OB IB
Brush Heights: Front 570 620
Rear 535 615
|
| 48.66 | WW 23 - Weekly completed | SUBPAC::LANDRY | | Sun Dec 01 1996 18:34 | 27 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/1/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Landry/Gee/Finn
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
Brush Heights: Front 570 620
Rear 535 615
|
| 48.67 | QUARTERLY PM FOR WW24 COMPLETED | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Tue Dec 10 1996 22:45 | 47 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
DATE: 12/10/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: JUBINVILLE
6.1 Perform Weekly PM Completed: JUBINVILLE
6.3.1 Check muffin fans for functionality Completed: JUBINVILLE
6.3.2 Check motor drive belts for defects Completed: JUBINVILLE
6.3.3 Check the robot knife for loose hardware Completed: JUBINVILLE
6.3.4 Check the spin station grippers Completed: JUBINVILLE
6.3.5 Check the motor speed output readings Completed: JUBINVILLE
Comments:__________________________________________________________________
__________________________________________________________________
__________________________________________________________________
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/10/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: JUBINVILLE
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 PSI
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40
6.1.3 Check the Drip Pan for contamination Completed: JUBINVILLE
6.1.4 Check all tubing/fittings for leaks Completed: JUBINVILLE
6.1.5 Check all wafer transport belts Completed: JUBINVILLE
6.1.6 Clean the Send module and Scrub modules Completed: JUBINVILLE
6.1.7 Check scrub brushes for contamination Completed: JUBINVILLE
6.1.8 Check scrub brush height in both modules Completed: JUBINVILLE
Comments: Inside Brush F-620 R-615
Outside Brush F-570 R-535
|
| 48.68 | WW XXV - Weekly completed | SUBPAC::LANDRY | | Sun Dec 15 1996 14:43 | 28 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/15/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Landry/Gee/Finn
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39/39
6.1.3 Check the Drip Pan for contamination Completed: X
6.1.4 Check all tubing/fittings for leaks Completed: X
6.1.5 Check all wafer transport belts Completed: X
6.1.6 Clean the Send module and Scrub modules Completed: X
6.1.7 Check scrub brushes for contamination Completed: X
6.1.8 Check scrub brush height in both modules Completed: X
Comments:
OB IB
---- ----
Brush Heights: Front 570 620
Rear 535 615
|
| 48.69 | WW26 Weekly PM | FABSIX::R_POIRIER | | Mon Dec 23 1996 00:59 | 29 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 12/23/96 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: R Poirier
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 RP
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40 RP
6.1.3 Check the Drip Pan for contamination Completed: RP
6.1.4 Check all tubing/fittings for leaks Completed: RP
6.1.5 Check all wafer transport belts Completed: RP
6.1.6 Clean the Send module and Scrub modules Completed: RP
6.1.7 Check scrub brushes for contamination Completed: RP
6.1.8 Check scrub brush height in both modules Completed: RP
Comments:
OB IB
---- ----
Brush Heights: Front 570 620
Rear 535 615
|
| 48.70 | cmp-scrub.a2 shutdown checkseet completed | FABSIX::R_GEE | | Tue Dec 31 1996 16:00 | 23 |
|
CMP-SCRUB.A1/.A2/.A3/.C1-7 SHUTDOWN CHECKSHEET Tech: Tim Landry
---------------------------------------------- Bob Gee
Tech. Date
------- -------
1. Close main incoming DI Water valve(s) to each Bob Gee 12/31/96
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water
to flow to UDR.
2. Remove all PVA scrub brushes and submerge Tim Landry 12/31/96
in a mixture of DI water and H2O2. Label
each brush with the tool name and brush box
location.
3. Perform a complete wipe down and dry of
all wet surfaces. Bob Gee 12/31/96
4. Power down each system. Bob Gee 12/31/96
5. Enter checksheet into notesfile. Tim Landry 12/31/96
|
| 48.71 | WEEKLY PM COMPLETED FOR WW27 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Thu Jan 02 1997 07:39 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/2/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Olin Whitford (OW)
Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50/OW
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40/BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: OW
OB IB
---- ----
Brush Heights: Front 570 620
Rear 535 615
Comments:
|
| 48.72 | WEEKLY PM COMPLETED FOR WW28 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jan 08 1997 06:07 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/8/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50/BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/40/BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 570 620
Rear 535 615
Comments:
|
| 48.73 | Weekly PM complete for WW29 | FABSIX::O_WHITFORD | Quticherwhinin' | Wed Jan 15 1997 21:20 | 32 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/15/1997 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: DAVE WHITFORD (DW)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 DW
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37* DW
6.1.3 Check the Drip Pan for contamination Completed: DW
6.1.4 Check all tubing/fittings for leaks Completed: DW
6.1.5 Check all wafer transport belts Completed: DW
6.1.6 Clean the Send module and Scrub modules Completed: DW
6.1.7 Check scrub brushes for contamination Completed: DW
6.1.8 Check scrub brush height in both modules Completed: DW
Comments: BRUSH HEIGHTS
OUTER STATION
INSIDE = .570
OUTSIDE = .535
INNER STATION
INSIDE = .620
OUTSIDE = .615
NOTE: EE WAS NOTIFIED OF DI WATER PRESSURE DISCREPANCY
|
| 48.74 | WW30 Weeklu PM completed | FABSIX::R_POIRIER | | Sun Jan 19 1997 22:35 | 34 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/19/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: ROGER POIRIER (RP)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 RP
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37 * RP
6.1.3 Check the Drip Pan for contamination Completed: RP
6.1.4 Check all tubing/fittings for leaks Completed: RP
6.1.5 Check all wafer transport belts Completed: RP
6.1.6 Clean the Send module and Scrub modules Completed: RP
6.1.7 Check scrub brushes for contamination Completed: RP
6.1.8 Check scrub brush height in both modules Completed: RP
Comments: BRUSH HEIGHTS
OUTER STATION
FRONT = .570
BACK = .535
INNER STATION
FRONT = .620
BACK = .615
NOTE: 6.1.2 DI WATER PRESSURE @37
EE INFORMED ABOUT D.I. WATER PRESSURE
|
| 48.75 | WEEKLY PM COMPLETED FOR WW31 | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jan 29 1997 21:49 | 30 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 1/29/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50/BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 38/BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 570 620
Rear 535 615
Comments: 6.1.2 - Engineer notified
|
| 48.76 | WW32 WEEKLY PM COMPLETED | FABSIX::J_SADIN | Freedom isn't free. | Sun Feb 02 1997 17:57 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/2/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH: Jim Sadin
Doc Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50/JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40/JS
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: JS/TL
6.1.7 Check scrub brushes for contamination Completed: JS/TL
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 570 620
Rear 535 615
|
| 48.77 | WEEEEEEKLY WW33333333 | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Feb 10 1997 02:59 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/10/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH: AL QUILLEN
MITCH RIDLON
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 52/AQ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39/AQ
6.1.3 Check the Drip Pan for contamination Completed: AQ/MR
6.1.4 Check all tubing/fittings for leaks Completed: AQ/MR
6.1.5 Check all wafer transport belts Completed: AQ/MR
6.1.6 Clean the Send module and Scrub modules Completed: AQ/MR
6.1.7 Check scrub brushes for contamination Completed: AQ/MR
6.1.8 Check scrub brush height in both modules Completed: AQ
OB IB
---- ----
Brush Heights: Front 570 620
Rear 535 615
|
| 48.78 | WW 34 - Weekly completed | SUBPAC::LANDRY | | Tue Feb 18 1997 13:52 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/18/97 SYSTEM RTC CODE: CMP-SCRUB.A2 EQUIP TECH: Bob Gee (BG)
Tim Landry (TL)
Brendan Finn (BF)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BG
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 39/40 BG
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: BG
6.1.5 Check all wafer transport belts Completed: BG
6.1.6 Clean the Send module and Scrub modules Completed: TL
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: BF
OB IB
---- ----
Brush Heights: Front 570 620
Rear 535 615
|
| 48.79 | WW 35 - Weekly PM Completed | FABSIX::A_QUILLEN | Nobody will get away with anything | Mon Feb 24 1997 02:57 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/24/97 SYSTEM RTC CODE: CMP-SCRUB.A2 EQUIP TECH: Al Quillen
Mitch Ridlon
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 51 AQ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37 MR
6.1.3 Check the Drip Pan for contamination Completed: MR
6.1.4 Check all tubing/fittings for leaks Completed: AQ
6.1.5 Check all wafer transport belts Completed: MR
6.1.6 Clean the Send module and Scrub modules Completed: AQ
6.1.7 Check scrub brushes for contamination Completed: AQ
6.1.8 Check scrub brush height in both modules Completed: MR
OB IB
---- ----
Brush Heights: Front 570 620
Rear 535 615
|
| 48.79 | ww35 weekly | FABSIX::M_RIDLON | Eliminate the oblivious | Wed Feb 26 1997 07:37 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 2/24/97 SYSTEM RTC CODE: CMP-SCRUB.A2 EQUIP TECH: Al Quillen
Mitch Ridlon
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 51 AQ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37 MR
6.1.3 Check the Drip Pan for contamination Completed: MR
6.1.4 Check all tubing/fittings for leaks Completed: AQ
6.1.5 Check all wafer transport belts Completed: MR
6.1.6 Clean the Send module and Scrub modules Completed: AQ
6.1.7 Check scrub brushes for contamination Completed: AQ
6.1.8 Check scrub brush height in both modules Completed: MR
OB IB
---- ----
Brush Heights: Front 570 620
Rear 535 615
|
| 48.80 | WW36 weekly | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 02 1997 16:53 | 31 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 03/02/97 SYSTEM RTC CODE: CMP-SCRUB.A2 EQUIP TECH: James Sadin
Brendan Finn
Tim Landry
Bob Gee
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37 JS
6.1.3 Check the Drip Pan for contamination Completed: TL/BG
6.1.4 Check all tubing/fittings for leaks Completed: TL/BG
6.1.5 Check all wafer transport belts Completed: BF
6.1.6 Clean the Send module and Scrub modules Completed: BF
6.1.7 Check scrub brushes for contamination Completed: BF
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 570 620
Rear 535 615
|
| 48.81 | S/A PM COMPLETED. | FABSIX::L_SHKOLNIKOV | | Sat Mar 15 1997 04:06 | 95 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Semi-Annual Preventative Maintenance Check Sheet, Rev D
DATE: 03.14.97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: DW/Dave Whitford
BJ Brian Jubinville
LS Leon Shkolnikov
6.1 Perform Weekly PM Completed: X LS
6.3 Perform Quarterly PM Completed: X DW/BJ
6.4.1 Check all EMO's for functionality Completed: X BJ
6.4.2 Check all interlocks for functionality Completed: X BJ
6.4.3 Check heat lamp housing/wiring for defects Completed: X LS
6.4.4 Check the robot hardware/wiring for defects Completed: X BJ
6.4.5 Check the spindle bearings/bushings Completed: X LS
6.4.6 Check the spin sta. rollers/bearings/bushings Completed: X LS
6.4.7 Check the brush sta. drive bearings/bushings Completed: X BJ/LS
6.4.8 Check the +5 VDC power supply Pre-Adjust: 5.1 BJ
Post-Adjust: 5.1 BJ
6.4.9 Check the -12 VDC power supply Pre-Adjust: -12.3 BJ
6.4.10 Check the +12 VDC power supply Pre-Adjust: +12.0 BJ
6.4.11 Check the +24 VDC power supply Pre-Adjust: 23.9 BJ
Post-Adjust: 23.9 BJ
6.4.12 Check the +48 VDC power supply Pre-Adjust: 47.7 BJ
Post-Adjust: 47.7 BJ
Comments:
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Quarterly Preventative Maintenance Check Sheet, Rev D
6.1 Perform Weekly PM Completed: LS
6.3.1 Check muffin fans for functionality Completed: LS
6.3.2 Check motor drive belts for defects Completed: LS
6.3.3 Check the robot knife for loose hardware Completed: LS
6.3.4 Check the spin station grippers Completed: LS
6.3.5 Check the motor speed output readings Completed: DW/BJ
Comments:__________________________________________________________________
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 LS *
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 LS
6.1.3 Check the Drip Pan for contamination Completed: DW/LS
6.1.4 Check all tubing/fittings for leaks Completed: DW/LS
6.1.5 Check all wafer transport belts Completed: DW/LS
6.1.6 Clean the Send module and Scrub modules Completed: DW/LS
6.1.7 Check scrub brushes for contamination Completed: DW/LS **
6.1.8 Check scrub brush height in both modules Completed: LS ***
Comments:* Adj. the CDA to it's desired 50 PSI.
** At this time, new brushes were installed per EE request.
OB IB
---- ----
*** The new brush heights are: Front 375 360
Rear 355 335
|
| 48.82 | WW38 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Sun Mar 16 1997 13:17 | 29 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 03/16/97 SYSTEM RTC CODE: CMP-SCRUB.A2 EQUIP TECH: James Sadin
Tim Landry
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37 JS
6.1.3 Check the Drip Pan for contamination Completed: TL/JS
6.1.4 Check all tubing/fittings for leaks Completed: TL/JS
6.1.5 Check all wafer transport belts Completed: TL
6.1.6 Clean the Send module and Scrub modules Completed: TL/JS
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 375 360
Rear 355 335
|
| 48.83 | WW39 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Tue Mar 25 1997 12:56 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/25/97 SYSTEM RTC CODE: CMP-SCRUB.A1 TECH: Timothy Landry (TL)
James Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 38 JS
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL/JS
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 375 360
Rear 355 335
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 48.84 | WW40 weekly pm completed. | FABSIX::J_SADIN | Freedom isn't free. | Mon Mar 31 1997 10:32 | 32 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:03/31/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH: Timothy Landry (TL)
James Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 37 JS
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL/JS
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 375 360
Rear 355 335
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
|
| 48.85 | WW41 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Wed Apr 09 1997 10:55 | 35 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/09/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH: Timothy Landry (TL)
James Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 JS
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: * 37 JS
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL/JS
6.1.7 Check scrub brushes for contamination Completed: TL
6.1.8 Check scrub brush height in both modules Completed: JS
OB IB
---- ----
Brush Heights: Front 375 360
Rear 355 335
Comments: 6.1.2 * EE has been notified that DI water pressure can't be
adjusted up to 40 psi.
found small puddle of water under machine. could not determine
source. cleaned up water.
|
| 48.86 | WEEKLY PM FOR WW42 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Apr 18 1997 07:07 | 34 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/18/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH: Brian Jubinville (BJ)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 BJ
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 BJ
6.1.3 Check the Drip Pan for contamination Completed: BJ
6.1.4 Check all tubing/fittings for leaks Completed: BJ
6.1.5 Check all wafer transport belts Completed: BJ
6.1.6 Clean the Send module and Scrub modules Completed: BJ
6.1.7 Check scrub brushes for contamination Completed: BJ
6.1.8 Check scrub brush height in both modules Completed: BJ
OB IB
---- ----
Brush Heights: Front 375 360
Rear 355 335
Comments: Found rather large puddle of water in pan but it looks
like run-off from loading wafers.
Outside scrub station cover has a crack in it....
|
| 48.87 | Weekly PM completed | FABSIX::R_POIRIER | | Mon Apr 21 1997 07:45 | 36 |
|
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE:04/20/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH: Roger Poirier (RP)
Bruce Durgin (BD)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 RP BD
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 RP BD
6.1.3 Check the Drip Pan for contamination Completed: RP BD
6.1.4 Check all tubing/fittings for leaks Completed: RP BD
6.1.5 Check all wafer transport belts Completed: RP BD
6.1.6 Clean the Send module and Scrub modules Completed: RP BD
6.1.7 Check scrub brushes for contamination Completed: RP BD
6.1.8 Check scrub brush height in both modules Completed:
OB IB
---- ----
Brush Heights: Front 375 360
Rear 355 335
Comments: Found rather large puddle of water in pan but it looks
like run-off from between Outside and Inside modules.
Outside scrub station cover has a crack in it....
Informed EE.
|
| 48.88 | WW44 weekly pm completed | FABSIX::O_WHITFORD | Lead, follow or step aside. | Sun Apr 27 1997 13:33 | 45 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 4/27/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Dave Whitford (DW)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: DW*
6.1.4 Check all tubing/fittings for leaks Completed: DW
6.1.5 Check all wafer transport belts Completed: DW
6.1.6 Clean the Send module and Scrub modules Completed: DW
6.1.7 Check scrub brushes for contamination Completed: DW
6.1.8 Check scrub brush height in both modules Completed: DW
Comments: *6.1.3 Found a SERIOUS amount of water in the drip pan, coming from
the front shaft of the outer brush station, and from the vicinity of the rear
shaft of the inner brush staion. Found the upper shaft seal on the outer brush
station had been installed upside down. (spring side UP) Replaced shaft.
Noted leak on inner brush station appears to be a breach in
the plexi "collar" for the shaft mount and the base of the tub itself. Will
monitor theis to verify the location of the leak before replacing any more
parts.
Brush heights
OUTER
Front .375
Rear .355
INNER
Front .360
Rear .335
|
| 48.89 | WW45 WEEKLY PM COMPLETED | FABSIX::J_SADIN | Freedom isn't free. | Tue May 06 1997 13:17 | 38 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 05/06/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: JAMES SADIN
TIMOTHY LANDRY
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 37*
6.1.3 Check the Drip Pan for contamination Completed: JS
6.1.4 Check all tubing/fittings for leaks Completed: TL
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL
6.1.7 Check scrub brushes for contamination Completed: JS
6.1.8 Check scrub brush height in both modules Completed: TL
Brush heights
OUTER
Front .375
Rear .355
INNER
Front .360
Rear .335
* 6.1.2 - CANNOT ADJUST HIGHER. EQUIP ENG NOTIFIED.
|
| 48.90 | WW46 weekly pm completed | FABSIX::B_DURGIN | | Tue May 13 1997 03:52 | 38 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 05/12/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME:bd=Bruce Durgin
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: bd
6.1.4 Check all tubing/fittings for leaks Completed: bd
6.1.5 Check all wafer transport belts Completed: bd
6.1.6 Clean the Send module and Scrub modules Completed: bd
6.1.7 Check scrub brushes for contamination Completed: bd
6.1.8 Check scrub brush height in both modules Completed: bd
Brush heights
OUTER
Front .375
Rear .335
INNER
Front .405
Rear .422
|
| 48.91 | Current brush heights as of 5/13/97 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Tue May 13 1997 22:48 | 8 |
|
The below brush height readings are the current
ones on the tool and have been verified. Please make
note of them in the next weekly PM.
Front Rear
Inside .395 .385
Outside .375 .332
|
| 48.92 | WW46 Weekly PM | FABSIX::R_POIRIER | | Mon May 19 1997 22:12 | 39 |
|
--------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 05/12/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME:bd=Bruce Durgin
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: bd
6.1.4 Check all tubing/fittings for leaks Completed: bd
6.1.5 Check all wafer transport belts Completed: bd
6.1.6 Clean the Send module and Scrub modules Completed: bd
6.1.7 Check scrub brushes for contamination Completed: bd
6.1.8 Check scrub brush height in both modules Completed: bd
Brush heights
OUTER
Front .375
Rear .335
INNER
Front .405
Rear .422
|
| 48.93 | WW47 Weekly PM completed | FABSIX::R_POIRIER | | Tue May 20 1997 04:57 | 38 |
| --------------------------------------------------------------------------------
OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 05/20/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Roger Poirier (RP)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50 RP
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 RP
6.1.3 Check the Drip Pan for contamination Completed: RP
6.1.4 Check all tubing/fittings for leaks Completed: RP
6.1.5 Check all wafer transport belts Completed: RP
6.1.6 Clean the Send module and Scrub modules Completed: RP
6.1.7 Check scrub brushes for contamination Completed: RP
6.1.8 Check scrub brush height in both modules Completed: RP
Brush heights
OUTER
Front .375
Rear .327
INNER
Front .395
Rear .385
|
| 48.94 | CMP-SCRUB.A2 SHUTDOWN AND STARTUP CHECKSHEETS | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 11:10 | 59 |
|
Scrub.A2
CMP-SCRUB.A1/.A2/.A3/.C1 SHUTDOWN CHECKSHEET FOR 5/26/97
--------------------------------------------------------
Tech. Date
------- -------
1. Change Workstream tool status to NON_SCHEDULED
DOWN. If Workstream will not let the tools go
to NON-SCHEDULED, leave the tools at UP IDLE.
DO NO put any tools to SCHEDULED or UNSCHEDULED RP 5-26-97
DOWN. _______ _______
2. Close main incoming DI Water valve(s) to each
system and open the DI Water return valve
(UDR). This will allow all incoming DI Water RP 5-26-97
to flow to UDR. _______ _______
3. Remove all PVA scrub brushes and submerge
in a mixture of DI water and H2O2. Label
each brush with the tool name and brush box RP 5-26-97
location. _______ _______
4. Perform a complete wipe down and dry of RP 5-26-97
all wet surfaces. _______ _______
RP 5-26-97
5. Power down each system. _______ _______
6. Enter checksheet into notesfile.
CMP-SCRUB.A1/.A2/.A3/.C1-7 STARTUP CHECKSHEET FOR 5/27/97
---------------------------------------------------------
Tech. Date
------- -------
1. Ensure that all necessary facilities are tl 5/27
available and ready to use. _______ _______
tl 5/27
2. Power up each system. _______ _______
tl 5/27
3. Re-install PVA scrub brushes. _______ _______
4. Open incoming DI Water Valve(s) to each tl 5/27
system. _______ _______
tl 5/27
5. Close UDR valve at each system. _______ _______
6. Cycle a minimum of 25 wafers through each tl 5/27
tool to verify proper operation. _______ _______
7. Notify Operations that the systems are ready tl 5/27
for MQC. _______ _______
8. Enter checksheet into notesfile. tl 5/27
|
| 48.95 | WW 48 - Weekly completed | SUBPAC::LANDRY | | Tue May 27 1997 15:48 | 31 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 05/25/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Tim Landry (TL)
Jim Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: JS
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL
6.1.7 Check scrub brushes for contamination Completed: JS
6.1.8 Check scrub brush height in both modules Completed: TL/JS
Brush heights OUTER INNER
Front 375 Front 395
Rear 327 Rear 385
|
| 48.96 | WW 49 - Weekly completed | SUBPAC::LANDRY | | Sun Jun 01 1997 19:56 | 28 |
| OnTrak DSS-200 Scrubber Maintenance Procedures HF6O-0170
Weekly Preventative Maintenance Check Sheet, Rev D
DATE: 06/1/97 SYSTEM RTC CODE: CMP-SCRUB.A2 TECH. NAME: Tim Landry (TL)
Jim Sadin (JS)
6.1.1 Check the CDA pressure for 50 PSI Pre-Adjust: 50
6.1.2 Check the D.I. Water pressure for 40 PSI Pre-Adjust: 40 / 41
6.1.3 Check the Drip Pan for contamination Completed: TL
6.1.4 Check all tubing/fittings for leaks Completed: JS
6.1.5 Check all wafer transport belts Completed: JS
6.1.6 Clean the Send module and Scrub modules Completed: TL
6.1.7 Check scrub brushes for contamination Completed: JS
6.1.8 Check scrub brush height in both modules Completed: TL/JS
Brush heights OUTER INNER
Front 375 Front 395
Rear 327 Rear 385
|