| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 15.1 | slurry loss | LUDWIG::RIDLON | Eliminate the oblivious | Sun Sep 29 1996 04:59 | 11 |
| Both tools crashed tonight (A1 @1, A2 @1:30) as a result of loosing slurry
to the room. Ahsland was called and responded in a timely manner. His
report was that the filter had clogged (which was changed on Friday).
Two product wafers were lost per tool.
B-shift
|
| 15.2 | particles | STRATA::RIDLON | Eliminate the oblivious | Tue Oct 22 1996 00:16 | 11 |
| All tools failed for particles. Tim Dyer called in and requested that
the slurry day tank be flushed and cleaned, a new filter installed,
and, if possible, change slurry lot number. Ahsland was notified and
could do the first two but we don't have any other lot numbers in
house. Once they were done we flushed slurry through the lines using
for about 5 minutes and then the lines were di flushed for 10. The pad
was then scrubbed and mqc's requested.
B-shift
|
| 15.3 | filter change | STRATA::FINN | | Fri Oct 25 1996 17:37 | 29 |
|
The Fab6 CMP slurry system has been reconnected to the Osmmonic Filter
system. Ashland Chemical has agreed to replace the filters twice this weekend
to preventive filter clogging and the subsequent loss of slurry. Due to the
current filter configuration, it will be necessary to shut the CMP room
DOWN for a period of approximately one hour during each of these two filter
change events.
The First filter change will occur tomorrow at 4:00PM.
The Second filter change will occur Monday morning at 6:30 AM.
Please ensure that all processing has stopped prior to these times. In
addition Ashland Technicians will call the room at ext:4774 to confirm that
processing on the tools has ceased prior to their beginning work.
Ashland Technicians will again call the room when their work has been
completed and we may continue processing. Their primary contact will be the
operation group at ext 4774. In the event they are unable to reach anyone in
the room, the following names have been given to Ashland as backup contacts:
John Swenson (pager 697) for Saturday afternoon 4:00pm
Mitch Ridlon (pager 652) for Monday morning 6:30 am
Thank you for your anticipated cooperation.
Brendan
|
| 15.4 | fitler update | LUDWIG::RIDLON | Eliminate the oblivious | Sun Oct 27 1996 21:05 | 2 |
| Slurry room checked at 2015. Input pressure to filter at 26 output at
22. Flow good, pumping good. Will keep an eye on it.
|
| 15.5 | filter check | LUDWIG::RIDLON | Eliminate the oblivious | Mon Oct 28 1996 04:12 | 2 |
| Checked slurry room at 0245. Pressure looking good at 26 in 22 out.
Flow looking good and pumping souds steady.
|
| 15.6 | filter check | LUDWIG::RIDLON | Eliminate the oblivious | Mon Oct 28 1996 05:51 | 2 |
| Checked slurry room at 0430. Pressure maintaining at 26 in 22 out.
Flow's good, pump still pumping.
|
| 15.7 | filter check | LUDWIG::RIDLON | Eliminate the oblivious | Mon Oct 28 1996 06:34 | 3 |
| Checked slurry room at 0630. Pressure starting to fall off. 24 in 19
out. Flow's still good. Pump starting to work harder. Talked with
Ashland dudes; eight filters due in some time today.
|
| 15.8 | power glitch | FABSIX::M_RIDLON | Eliminate the oblivious | Mon Nov 25 1996 07:07 | 7 |
| Power glitch @0645. B tools not running. A tools were. Didn't lose any
wafers but had to power down tools to reset the motor controllers. A1
had product but they should be able to touch them up. A2 just had
50k's.
B-shift
|
| 15.9 | Gimbal Bearings Replaced - #3 & #11 | ASDG::POIRIER | | Wed Jan 22 1997 19:23 | 6 |
|
Carrier Gimbal Assemblies Rebuilt:
---------------------------------
Gimbal Assemblies #3 and #11 have had their gimbal bearings replaced.
|
| 15.10 | gimbal assy's | FABSIX::J_SWENSON | | Thu Jan 23 1997 19:33 | 9 |
| Carrier Gimbal Assy's Rebuilt
----------------------------
Carriers 1 and 13 had there gambal assys rebuilt
Had problem with carrier # 2 will look at tomorrow.
C-Shift
|
| 15.11 | Bad Pads Removed From Room | ASDG::POIRIER | | Sat Apr 12 1997 20:46 | 9 |
|
Pad Problems:
------------
Rodel IC 1000 pad lot # 6HO-JP2 has been removed from the room due
to repeated poor performance. We will leave them in Jim Tooker's
office.
J.P.
|