| Title: | CMP |
| Notice: | Welcome to the CMP notesfile |
| Moderator: | FABSIX::B_TOWER LLE |
| Created: | Tue Oct 31 1995 |
| Last Modified: | Fri Jun 06 1997 |
| Last Successful Update: | Fri Jun 06 1997 |
| Number of topics: | 94 |
| Total number of notes: | 6381 |
<<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]EST_CMP.NOTE;1 >>>
-< EST_CMP Conference >-
================================================================================
Note 74.0 Conditioner Change Date 39 replies
FABSIX::E_BODENSIECK 17 lines 4-MAR-1995 09:12
--------------------------------------------------------------------------------
Enter the date and which machine that the diamond conditioner was
replaced on in this file
example
Entity Date Reason for change
____________________________________________________________________
CMP.a2 | 3/3/95 | Carriers not lifting off Pad.
| | Replaced Conditioner Carriers lifting
| | off now as usual.
| |
================================================================================
Note 74.1 Conditioner Change Date 1 of 39
SUBPAC::BJUBINVILLE "Brooks, Tritt and Diffie" 14 lines 16-MAR-1995 23:24
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.A1 | 3/16/95 | Table was drawing alot of amps
| | and was actuallly stopping. The
| | left spindle was slowing down as
| | well. Will see if this was an
| | issue.
================================================================================
Note 74.2 Conditioner Change Date 2 of 39
PATE::GEE 8 lines 4-APR-1995 20:36
-< CMP.a2 >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.a2 | 4/4/95 | Observed the carriers starting
| | to stick to the pad. Also, a heavy
| | vacuum sound at lift-off from the pad.
| | Replace, looks and sounds better.
| |
================================================================================
Note 74.3 Conditioner Change Date 3 of 39
PATE::GEE 6 lines 4-APR-1995 23:14
-< cmp.a1 >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.a1 | 4/4/95 | Losing wafers on the pad after the run
| | and carriers seemed to be sticking
| | to the Pad.
================================================================================
Note 74.4 Conditioner Change Date 4 of 39
FABSIX::E_DAWSON 6 lines 18-APR-1995 08:36
-< COND. CHANGE CMP.A1 4/18/95 >-
--------------------------------------------------------------------------------
ENTITY DATE REASON FOR CHANGE
CMP.A1 4/18/95 1 CARRIERS STICKNIG TO PAD
2 WAFER BEING LEFT ON TABLE
================================================================================
Note 74.5 Conditioner Change Date 5 of 39
FABSIX::E_DAWSON 6 lines 18-APR-1995 08:40
-< COND.CHANGE CMP.A2 4/18/95 >-
--------------------------------------------------------------------------------
ENTITY DATE REASON FOR CHANGE
CMP.A2 4/18/95 1. CARRIERS STICKING TO PAD
2. WAFERS BEING LEFT ON TABLE
================================================================================
Note 74.6 Conditioner Change Date 6 of 39
FABSIX::J_ROA 18 lines 1-MAY-1995 17:49
-< CMP.A2 CONDITIONER CHANGE >-
--------------------------------------------------------------------------------
================================================================================
Note 74.0 Conditioner Change Date
FABSIX::J_ROA
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.a2 | 5/1/95 | Condioning disk was not good.
| |
| |
| |
================================================================================
Note 74.7 Conditioner Change Date 7 of 39
FABSIX::G_ISAACS 1 line 15-MAY-1995 05:40
-< conditioner change >-
--------------------------------------------------------------------------------
cmp.A2 5/15/95 MQC reported scratches
================================================================================
Note 74.8 Conditioner Change Date 8 of 39
FABSIX::R_POIRIER 3 lines 24-MAY-1995 18:43
-< CONDITIONING DISK CHANGE CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 5/23/95 Wafers sticking to pad. No
improvement was observed after
disk was changed.
================================================================================
Note 74.9 Conditioner Change Date 9 of 39
PATE::GEE 2 lines 1-JUN-1995 21:41
-< CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 6/1/95 Wafers sticking
================================================================================
Note 74.10 Conditioner Change Date 10 of 39
PATE::GEE 1 line 7-JUN-1995 22:34
-< CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 6/7/95 Process Eng. request
================================================================================
Note 74.11 Conditioner Change Date 11 of 39
FABSIX::E_DAWSON 10 lines 12-JUN-1995 15:44
-< COND. CHANGE CMP.A2 6/12/95 >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.A2 | 6/12/95 | Carriers wafers being left on
pad...ed
================================================================================
Note 74.12 Conditioner Change Date 12 of 39
PATE::GEE 1 line 19-JUN-1995 06:53
-< cmp.a1 >-
--------------------------------------------------------------------------------
CMP.A1 6/19/95 Wafers sticking to pad.
================================================================================
Note 74.13 Conditioner Change Date 13 of 39
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 8 lines 22-JUN-1995 01:12
-< disk change >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.A1 | 6/22/95 | Losing wafers on the pad after the run
| | and carriers seemed to be sticking
| | to the Pad.
Gwen
================================================================================
Note 74.14 Conditioner Change Date 14 of 39
FABSIX::E_DAWSON 7 lines 29-JUN-1995 15:47
-< PAD CHANGE CMP.A2 6/29/95 >-
--------------------------------------------------------------------------------
Entity Date Pad Lot Reason for Change
====================================================================
CMP.A2 6/29/95 DJ4-RA7 PAD CHANGE
(*SPEEDFAM PAD)
================================================================================
Note 74.15 Conditioner Change Date 15 of 39
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 10 lines 6-JUL-1995 06:55
-< disk change >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.A2 | 7/6/95 | Wafers being left on pad
================================================================================
Note 74.16 Conditioner Change Date 16 of 39
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 10 lines 6-JUL-1995 06:56
-< disk change >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.A1 | 7/6/95 | Wafers being left on pad
================================================================================
Note 74.17 Conditioner Change Date 17 of 39
PATE::GEE 2 lines 10-JUL-1995 03:05
-< CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 7/10/95 Wafers sticking to pad. It looked
bad.
================================================================================
Note 74.18 Conditioner Change Date 18 of 39
PATE::GEE 2 lines 11-JUL-1995 06:28
-< cmp.a2 >-
--------------------------------------------------------------------------------
CMP.A2 7/11/95 Many bare spots. Rich
================================================================================
Note 74.19 Conditioner Change Date 19 of 39
PATE::GEE 1 line 18-JUL-1995 06:48
-< cmp.a1 >-
--------------------------------------------------------------------------------
CMP.A1 7/18/95 Monthly p.m. requires it
================================================================================
Note 74.20 Conditioner Change Date 20 of 39
SUBPAC::LANDRY 16 lines 27-JUL-1995 19:52
-< New ring.......new design >-
--------------------------------------------------------------------------------
Entity Date Reason for change
-------------------------------------------------------------------
CMP.B1 7/27/95 Suspected pad conditioning issue
with old one (bad week for broken
wafers, 4 crashes in thrre days).
New design diamond ring mounting
setup installed. The mounting
bracket is equipped with rubber
groumets to assist in uniform
conditioning.
Doc
================================================================================
Note 74.21 Conditioner Change Date 21 of 39
PATE::GEE 2 lines 30-JUL-1995 22:43
-< cmp.a1 >-
--------------------------------------------------------------------------------
CMP.A1 7/31/95 carriers sticking to the table.
Conditioner disk looks warn out
================================================================================
Note 74.22 Conditioner Change Date 22 of 39
PATE::GEE 2 lines 31-JUL-1995 05:41
-< cmp.a2 >-
--------------------------------------------------------------------------------
CMP.A2 7/31/95 Carriers sticking to table
================================================================================
Note 74.23 Conditioner Change Date 23 of 39
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 5 lines 11-AUG-1995 20:55
-< DISK CHANGE >-
--------------------------------------------------------------------------------
TOOL DATE REASON
-----------------------------------------------------------
CMP.A2 8/11/95 Conditioner disk warn out
================================================================================
Note 74.24 Conditioner Change Date 24 of 39
FABSIX::E_DAWSON 13 lines 13-AUG-1995 23:41
-< COND.CHANGE CMP.A1 8/13/95 >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.A1 | 8/13/95 | Carriers not lifting off Pad.
| | Replaced Conditioner Carriers lifting
| | off now as usual.
| |
================================================================================
Note 74.25 Conditioner Change Date 25 of 39
PATE::GEE 1 line 22-AUG-1995 03:02
-< cmp.a1 >-
--------------------------------------------------------------------------------
cmp.a1 8/22/95 wafers sticking to pad
================================================================================
Note 74.26 Conditioner Change Date 26 of 39
PATE::GEE 1 line 22-AUG-1995 03:03
-< cmp.a2 >-
--------------------------------------------------------------------------------
cmp.a2 8/22/95 wafers sticking to pad
================================================================================
Note 74.27 Conditioner Change Date 27 of 39
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 13 lines 31-AUG-1995 06:45
-< DISK CHANGE >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.A1 | 8/29/95 | Carriers not lifting off Pad.
| | Replaced Conditioner Carriers lifting
| | off now as usual.
| |
================================================================================
Note 74.28 Conditioner Change Date 28 of 39
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 13 lines 31-AUG-1995 06:45
-< DISK CHANGE >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.A2 | 8/30/95 | Carriers not lifting off Pad.
| | Replaced Conditioner Carriers lifting
| | off now as usual.
| |
================================================================================
Note 74.29 Conditioner Change Date 29 of 39
FABSIX::R_POIRIER 2 lines 6-SEP-1995 06:56
-< Conditioner change CMP.A2 >-
--------------------------------------------------------------------------------
CMP.A2 9-6-95 Changed as part of PM
================================================================================
Note 74.30 Conditioner Change Date 30 of 39
PATE::GEE 1 line 20-SEP-1995 01:56
-< cmp.a1 >-
--------------------------------------------------------------------------------
cmp.a1 9/20/95 Requested to be changed by process
================================================================================
Note 74.31 Conditioner Change Date 31 of 39
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 13 lines 28-SEP-1995 09:12
-< A1 disk change >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.A1 | 9/28/95 | Carriers not lifting off Pad.
| | Also changed to try an eliminating
| | the wafer slip-outs due to possible
| | poor conditioning.
================================================================================
Note 74.32 Conditioner Change Date 32 of 39
FABSIX::R_POIRIER 3 lines 30-SEP-1995 22:45
-< Conditioning Disk change >-
--------------------------------------------------------------------------------
CMP.A2 9-30-95 Conditioner disk worn.
Also, pad change just done.
================================================================================
Note 74.33 Conditioner Change Date 33 of 39
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 11 lines 4-OCT-1995 05:41
-< A2 DISK CHANGE >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.A2 | 10/4/95 | Disk all worn
| |
================================================================================
Note 74.34 Conditioner Change Date 34 of 39
SUBPAC::BJUBINVILLE "NFD Fire - Rescue" 11 lines 4-OCT-1995 05:42
-< A1 DISK CHANGE >-
--------------------------------------------------------------------------------
Entity Date Reason for change
____________________________________________________________________
CMP.A1 | 10/4/95 | Disk all worn
| |
================================================================================
Note 74.35 Conditioner Change Date 35 of 39
FABSIX::R_POIRIER 2 lines 9-OCT-1995 05:32
-< CONDITIONING DISK. CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 10/08/95 DISK WORN
================================================================================
Note 74.36 Conditioner Change Date 36 of 39
ASDG::POIRIER 14 lines 12-OCT-1995 09:22
-< CMP.A1 Conditioner Disk Change >-
--------------------------------------------------------------------------------
ENTITY DATE REASON FOR CHANGE
------ ---- -----------------
CMP.A1 10/12/95 Wafer fly-out condition.
Previous disk was on tool
since 10/8/95. Inspection
under the microscope by
Larry Camilletti indicated
that the disk was of questionable
quality. Larry is saving the old
disk and is planning to show it to
the vendor.
================================================================================
Note 74.37 Conditioner Change Date 37 of 39
FABSIX::R_POIRIER 2 lines 14-OCT-1995 22:24
-< CONDITIONING DISK. CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 10-14-95 DISK WORN AND PAD CHANGED.
================================================================================
Note 74.38 Conditioner Change Date 38 of 39
SUBPAC::LANDRY 2 lines 18-OCT-1995 18:29
-< diamond change - 10/18 >-
--------------------------------------------------------------------------------
CMP.A2 10/18/95 Disk wear was non uniformed
================================================================================
Note 74.39 Conditioner Change Date 39 of 39
FABSIX::R_POIRIER 3 lines 24-OCT-1995 21:39
-< DISK CHANGE CMP.A1 >-
--------------------------------------------------------------------------------
CMP.A1 10-24-95 PAD CHANGED (180 WAFERS), CHANGED
CONDITIONING DISK AT SAME TIME.
| T.R | Title | User | Personal Name | Date | Lines |
|---|---|---|---|---|---|
| 3.1 | Disk change | LUDWIG::FINN | Wed Nov 15 1995 17:48 | 3 | |
CMP.A2 11/15/95 Disk showed signs of excessive wear
| |||||
| 3.2 | cmp.a2 | FABSIX::R_GEE | Sun Nov 19 1995 03:21 | 2 | |
cmp.a2 11/19/95 disk show sign of wear
| |||||
| 3.3 | A1 | SUBPAC::LANDRY | Sat Nov 25 1995 18:19 | 7 | |
CMP.A1 11-25-95 Disk showing wear; hadn't been changed
in several weeks. Changed during weekly
PM.
Doc / JP
| |||||
| 3.4 | cmp.a1 | FABSIX::R_GEE | Mon Dec 04 1995 02:48 | 1 | |
cmp.a1 12/3/95 Disk showed wear. | |||||
| 3.5 | cmp.a2 | FABSIX::R_GEE | Mon Dec 04 1995 02:49 | 1 | |
cmp.a2 12/3/95 Disk showed wear. | |||||
| 3.6 | cmp.a1 | FABSIX::R_GEE | Sat Dec 09 1995 21:13 | 3 | |
cmp.a1
disk showing wear
| |||||
| 3.7 | Conditioning disk change. CMP.A2 | FABSIX::R_POIRIER | Tue Dec 12 1995 05:23 | 2 | |
CMP.A2 Changed disk with Pad/carriers
change. Wafer broke on pad.
| |||||
| 3.8 | disk changer CMP.A2 | FABSIX::R_POIRIER | Sat Dec 16 1995 23:01 | 3 | |
CMP.A2 Changed disk with pad change
(failed MQCs')
| |||||
| 3.9 | A1 DISK CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Sat Jan 06 1996 06:52 | 5 |
Entity Date Reason for change
_______________________________________________________
CMP.A1 1/6/96 DISK SHOWED EXCESSIVE WEAR
| |||||
| 3.10 | CMP.A2 CONDITIONER DISK CHANGED | ASDG::POIRIER | Sat Jan 06 1996 16:45 | 7 | |
ENTITY DATE REASON FOR CHANGE
------ ---- -----------------
CMP.A2 1-6-96 CHANGED DURING WEEKLY P.M.
THE DISK WAS LAST CHANGED ON
12-16-95.
| |||||
| 3.11 | .A1 DISK CHANGE | SUBPAC::CLIFFORD | Fri Jan 12 1996 10:58 | 3 | |
CMP.A1 Disk showin' wear!
| |||||
| 3.12 | .A2 Disk change | SUBPAC::CLIFFORD | Fri Jan 12 1996 10:58 | 3 | |
CMP.A2 Disk showin' wear!
| |||||
| 3.13 | cmp.b2 | FABSIX::R_GEE | Wed Jan 17 1996 06:54 | 1 | |
cmp.a2 shows wear | |||||
| 3.14 | A1 DISK CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Wed Jan 24 1996 06:25 | 5 |
Entity Date Reason for change
_______________________________________________________
CMP.A1 1/24/96 DISK SHOWED EXCESSIVE WEAR
| |||||
| 3.15 | CMP.A2 | FABSIX::R_GEE | Sun Jan 28 1996 00:44 | 1 | |
CMP.A2 1/28/96 SHOWED WEAR, FAILED MQC'S TWICE. | |||||
| 3.16 | Conditioning disk change | FABSIX::R_POIRIER | Wed Jan 31 1996 05:10 | 2 | |
CMP.A1 1/31/96 Showed wear
| |||||
| 3.17 | cmp.a2 | FABSIX::R_GEE | Mon Feb 12 1996 21:37 | 1 | |
cmp.a2 2/12/96 show wear | |||||
| 3.18 | CMP.A1 | FABSIX::R_POIRIER | Sat Feb 17 1996 23:54 | 2 | |
CMP.A1 2/17/96 Changed disk with Pad change.
| |||||
| 3.19 | CMP.A2 DISK CHANGE | FABSIX::R_POIRIER | Mon Feb 19 1996 06:02 | 2 | |
CMP.A2 2-19-96 DISK WORN/PAD CHANGED
| |||||
| 3.20 | DISK CHANGE CMP.A1 | FABSIX::R_POIRIER | Mon Feb 19 1996 06:06 | 2 | |
CMP.A1 2-19-96 DISK WORN/PAD CHANGE
| |||||
| 3.21 | A2 DISK CHANGE | SUBPAC::BJUBINVILLE | NFD Fire - Rescue | Tue Feb 20 1996 21:04 | 4 |
CMP.A2 2-20-96 DISK WORN/PAD CHANGE
| |||||
| 3.22 | CMP.B3 8/24/96 | FABSIX::G_ISAACS | Sat Aug 24 1996 16:49 | 14 | |
System: CMP.B3 Date 8/22/96 OLD NEW HEAD OFFSET OFFSET ---- ------ ------ 1 -15 -17 2 +15 +10 3 - 2 +11 4 +10 +18 5 -15 - 9 Reason for change: Head to head variation was greater than A/min on MQCs, after pm. | |||||
| 3.23 | Conditioner Changed CMP.B1 9/4/96 | FABSIX::E_DAWSON | Wed Sep 04 1996 19:02 | 7 | |
CMP.B1 had it conditioner change on 9/4/96 for RR. increase.
User #2 wafer count @ 89093
Serial # of Conditioner is 216
| |||||
| 3.24 | Conditioning Disk & Pad Replaced - Wafer Breakage | ASDG::POIRIER | Sat Dec 14 1996 11:37 | 20 | |
------------------------------------------------------------------------
CMP.A2 12/14/96 Broken Product Wafers C Shift
------------------------------------------------------------------------
Tool experienced high apmerage on table controller (> 48 amps) just
prior to wafer breakage.
This happened after 106 wafers were run on pad.
Corrective Action:
-----------------
Replaced Pad, Carriers & Conditioning Disk. Installed Pad from new
lot. (6EL-JQ6) The remaining pads from the lot that crashed were set
aside and labled as "suspected bad pads". They're on top of black
cabinet.
C Shift.
| |||||