| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 41.1 | CMP.D1 SOURCE REPORT | YIELD::TDYER | | Tue Feb 18 1997 10:10 | 123 |
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+---------------------------+ TM
| d | i | g | i | t | a | l | I N T E R O F F I C E M E M O R A N D U M
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| S e m i c o n d u c t o r |
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To: MaryAnn Piasecki Date: February 18th, 1997
From: Timothy P. Dyer, Bob Gee
Dept: CMP Engineering
ENET: Yield::TDYER
cc: Frank Krupa DTN: 225-5072
Dan Oconnor
Dennis Goodwin
Linda Bioseneualt
Ellen Mager
Subject: CMP.D1-7 (Speedfam Auriga #65, 952731) SOURCE INSPECTION REPORT
_______________________________________________________________________________
Summary:
Tool 65 was in a better state of readiness than past CMP tools which Digital
source inspected at Speedfam. We could not determine what accounted for the
improvements, whether it was due to some new organizational skills or if it
was solely due to the new improved Auriga platform. In either case it made
the source inspection run much smoother. On 2/12 we conducted the initial
inspection which included configuration verification and a 500 wafer marathon.
We created a recipe with the following basic parameters and began the 500
wafer marathon.
DF = 350lbs
Slurry = 350,350ml of KoH/DI
CrSpeed = 35
TblSpeed = 35
2nd table: 80lbs touch down, 150lbs polish, 15 seconds.
Several unexplained software errors were encounter and the marathon was
terminated. Tool 65 was running version 1.3.4 software when it errored. We
meet with Speedfam Software Engineering to discuss the problems and possible
related bugs. The Software group had a new release as of 2/8/97, version 1.4.1
which was created to address some of the false software errors. We requested
1.4.1 be installed on tool 65. On the second day, 2/13 we re-started the 500
wafer marathon with version 1.4.1. The 1st wafer loaded at 9:15am, all wafers
ran with out error and completed at 3:45pm, 500w/6.5h = 77w/h WOW! The Auriga
ran with no vibrations on either table with pressures in excess of 350lbs with
DI water ONLY. Tool 65 was accepted and ready for shipping with a few open
issues listed below:
Configuration Issues:
1. 2nd table conditioner not ready, still in design phase, will be a
retro-fit.
2. Requested CMP-V standard vacuum filter set up.
3. SECS-II not installed. Software not released.
4. N2 line and CDA lines crossed.
5. Slurry pump cabinet door latch broke, needs replacement.
Test and Calibration:
1. Scrubber speed cal not done or documented.
2. Pad conditioner EPRV not caled or documented.
3. Vertical table run out not documented.
4. Slurry pump cals not done or documented.
Software Issues:
1. No issue after 1.4.1 installation. There are however several
items such as error recovery which is desirable and will be added
a "which list".
Automation frame:
1. Load and Unload flipper drip pans a draining into the load/unload
module. I have requested the trays be angled towards the main frame
and requested the automation drain be plumbed to the main 3" drain.
Miscellaneous:
1. Vacuum pump exhausting water vapors due to insufficient vacuum tank
blow down. I have requested a frequency increase in the blow down,
however this is hard coded in the software and will require a rev
change.
2. Luxitron order scratched from PO. Digital will rely on Speedfam
Endpoint system. Speedfam requested to submit FORMAL timeline and
plans for Digital beta testing.
Process Issues:
1. No process tested. We wanted to avoid contaminating the tool and
there is Digital NO process developed yet for the Auriga
OTHER ISSUES AND ACCOMPLISHMENTS DURING THE VISIT AT SPEEDFAM:
o Met with the engineering design team. We brainstormed several concepts for
the second table conditioner. We have agreed on a primary concept and a
back-up concept. Engineering drawings will be create on the first concept
and submitted for my review in a couple of weeks. The project time line for
installation looks like late July early August.
o Met with the documentation department and discussed there plans and our needs
for electronic documentation. They are planning on going with an HTML
format, the package will run very similar to a web browser and may require
NetScape.
o Met with the Vise President of Sales and marketing and the Eastern sales
manager to discuss CMP.B1 reliability and plans and terms for an upgrade.
o Met with an Electrical Engineer from the reliability group. We discussed the
Infranor/motor project. They have corrected several problems related to
failing infranor and motor stalls. There was NO algorithm in the infranor for
the specific motors onboard the CMP-V polisher. The infranor amplifiers were
using the "closest matching program". They have sign loaded the amplifiers
with the correct algorithm. This new program re-aligned the phase, which were
previously 30 degrees out of phase and has the correct ramp and run rates
programmed. The amplifier auxiliary power was dropped down from 205 to 115vac
and the have installed more reliable filter capacitors. These changes have
power and efficiencies by 30-40%. Dynamic current monitor has decreased from
4vdc to .5vdc, IRM has been lowered from 14.5vdc to 10.5vdc. A CMP-V polisher
was tested at 450 of down force at Speedfam with NO stalling or high current
draw issues. This will be implemented on CMP.B1,2,3,4 and should address the
stalling problem.
o Meet with Bill Spencer, Carrier Films Manager. I have requested him to
email me with a monthly carrier film service report. We will use this to
do our blanket releases.
o Meet with Mike Slepekes, training manager, to discuss plan for Auriga
training. I have scheduled an onsite training class immediately following the
equipment start up of CMP.D1. One technician from B,C,D and myself will
attend.
|
| 41.2 | CONDITIONER REMOVED | YIELD::TDYER | | Wed Feb 26 1997 15:35 | 6 |
|
Removed conditioner end effector and bearing assembly. A custom
conditioner will be installed in ~three weeks.
TD
|
| 41.3 | FLUIDS CAB MOD | YIELD::TDYER | | Thu Mar 13 1997 16:04 | 9 |
|
The fluids cabinet MAIN DI line has been modified. The main DI line now
enter the right top of the fluids cabinet passes across the valve bank
than is routed (via a 90) down to the bottom of the valve manifold
block. This was done to allow for room for the 2 slurry manifolds.
fyi,
TD
|
| 41.4 | Vacuum pump / N2 pressure sensor lines | FABSIX::R_GEE | | Wed Mar 26 1997 18:58 | 8 |
| - Mounted the vacuum pump under the floor, it should be all set
for now. We still need to put a second vacuum gauge in-line
next to the filter housing.
- Re-routed the N2 wires up to the new N2 pressure sensor location.
A shift
|
| 41.5 | check out | SUBPAC::CMP | | Thu Mar 27 1997 19:11 | 2 |
| power up and checked a few functions. Tool seems to be ready for the
installation next week.
|
| 41.6 | MAIN DISCONNECT LOCATION | YIELD::TDYER | | Fri Apr 04 1997 14:22 | 6 |
|
THE MAIN DISCONNECT FOR CMP.D1 IS IN THE SUBFAB. 6.2N. IT IS
LOCATED IN THE CEILING ABOVE OXDEP.D2'S PUMP PACKAGE.
FYI,
TIM
|
| 41.7 | Conditioner | FABSIX::R_GEE | | Mon Apr 07 1997 10:11 | 9 |
|
Ran a line to the end of the conditioner pipe to supply slurry
to the conditioner.
Ran an N2 line from the fluids cabinet to the end of the conditioner,
waiting for parts to connect it to the main N2 line.
|
| 41.8 | Water in solenoids | FABSIX::R_GEE | | Mon Apr 07 1997 10:17 | 5 |
| Tee'ed into the main CDA line and connected the DI water in,
RAW water in and chilled water in solenoids. This will allow
the liquid to circulate even if the tool is powered off.
|
| 41.9 | GFI module | FABSIX::R_GEE | | Mon Apr 07 1997 10:24 | 6 |
| The tool wouldn't power up. Found that a door jumper had shorted
out and blow the GFI module. We removed the jumpers and Speedfam
replaced the GFI module.
|
| 41.10 | #3 wafer lose sensor | FABSIX::R_GEE | | Mon Apr 07 1997 13:44 | 4 |
| Couldn't calibrate #3 wafer lose sensor, Speedfam replaced and
calibrated. All set.
|
| 41.11 | installation of tool | SUBPAC::CMP | | Tue Apr 08 1997 12:15 | 5 |
| The installation is still continuing with a couple of minor problems,
such as, a GFIC that was replaced, and a side door on the autoframe
that was replaced due to warping.
Checks and adjustments have been done, and we are now ready for the
marathon.
|
| 41.12 | install continues | SUBPAC::CMP | | Wed Apr 09 1997 20:38 | 5 |
| Installation continued today, finished running wafers from yesterday
and replaced the 6 valves that were back flowing. Had some trouble with
the robot mapping and corrected by adjusting and recalibrating. The
testing will have to be restarted and we will continue tomorrow
morning.
|
| 41.13 | Polish tub rinse valve | FABSIX::R_GEE | | Thu Apr 10 1997 19:09 | 2 |
| Connected the air line that opens 9AV38 (polish tub rinse)
to the main CDA.
|
| 41.14 | Mechanical acceptances stopped | FABSIX::R_GEE | | Thu Apr 10 1997 20:47 | 12 |
|
On the second to last run of the 500 wafer mechanical acceptance
marathon we lost a wafer on the pad from head #5 (believe it was at
touchdown). Removed the wafers in queue using manual mode. Ran 25
more wafers, on the third run the system errored for no wafer on
carrier #1 (during load process). Checked carriers #1 & #5 cup to
load cup alignments and found them both off. Rebooted the too and
checked them again, they're still off. Field service has been notified
and will be in in the morning.
Note: We had to tighten the outside carrier screws at 450 wafers
most of them were falling out.
|
| 41.15 | completed marathon | SUBPAC::CMP | | Fri Apr 11 1997 20:47 | 3 |
| Well the marathon has been relegated to the history books. It looks
like everything ran well and completed smoothly. The tool is sitting in
wet mode for Mondays work.
|
| 41.16 | MARATON COMPLETED YESTERDAY | FABSIX::B_WESTPHAL | | Sat Apr 12 1997 20:31 | 91 |
|
pad# runs process events
0 50 DI only system power down, GFI burnt. (replace next day)
250 DI only no issues
40 w monitors failure: 6 block slurry manifold leaking by.
replace slurry valve manifold
50 DI only NO ISSUES
40 DI only assist: mapper (fix + resume)
10 10 W rate = ~2700, unif = ~4.5% (45,45)
~460 50 DI only failure: mapper (permenant sw fix + restart)
pad is plistering at bubbles
0 50 DI ONLY assist: false wafer loss (calibrated s-5)
50 DI only NO ISSUES
25 DI only NO ISSUES
replaced primary pad
40 DI only NO ISSUES
5 W DUMMIES NO ISSUES
50 5 W MONITORS NO ISSUES rate ~2800, unif = ~4.5% (45,45)
50 DI only NO ISSUES
40 DI only NO ISSUES
5 W DUMMIES NO ISSUES (increase pre-wet to 15s from 5)
150 5 W MONITORS NO ISSUES rate 2910, unif = 2.7% (45,45)
50 DI only NO ISSUES
40 DI only NO ISSUES
5 W DUMMIES NO ISSUES
250 5 W MONITORS NO ISSUES rate 3213,unif = 2.9% (t=35,c=45)
50 DI only NO ISSUES
40 DI only NO ISSUES
5 W DUMMIES NO ISSUES
350 5 W MONITORS NO ISSUES rate 3330,unif = 5.6% (t=35,c=45)
50 DI only NO ISSUES
40 DI only NO ISSUES
5 W DUMMIES NO ISSUES
450 5 W MONITORS NO ISSUES rate 3432,unif = 6.19% (t=35,c=45)
35 DI only Wafer crash (slide out at TD from head-5)
Alligbnents were out.
Restart and system errored for wafer out not in
carrier 1, vacuum low.
Allignments recalibrated. Loose bolt on index table motor tightened. Index
table voltage offset change to .62v frm 0. Restart test and system errored
again for low vacuum carrier-1. Vacuum filter was found clogged. The root cause
is inadequate vacuum tank blow down. The system only blows down the vacuum tank
when it is started from and IDLE position, when it is run in continouse
(cassetetes placed in the system one after the other) it does NOT dump the tank.
This is how we ran most of the marathon and beleive to have caused water to
biuld up in the tabk and vacuum system. Filter changed amnd 500 wafer test
restarted.
New pad, new DF-200 carriers
50 DI only NO ISSUES
50 DI only NO ISSUES
15 DI only NO ISSUES
5 W DUMMIES NO ISSUES
125 5 W MONITORS assist: robot missed w #25 cass-A
15 DI only NO ISSUES
5 W DUMMIES NO ISSUES
150 5 W monitors rate , unif = % (35,45, met 202)
25 DI only No issues
50 DI only No issues
15 DI ONLY No issues
5 w dummies NO issues
250 5 W monitor Assist: Robot mised wafer top of cassette A
Restarted and same error. Robot retaught,
Marathon restarted.
restart = 0
50 DI only No issues
15 DI ONLY No issues
5 w dummies NO issues
325 5 W monitor rate =, unif =
25 DI only No issues
25 DI only No issues
25 DI only No issues
50 DI only No issues
carrier screws loose, tightened same.
15 DI ONLY No issues
5 w dummies NO issues
450 5 W monitor rate =, unif =
25 DI ONLY No issues
50 DI only No issues
50 DI only No issues
50 DI only No issues
675 50 DI only No issues
____
500 Maraton completed
|
| 41.17 | TOOL CLEANED/N2 GUN/FILTER HOUSINGS NOT IN | FABSIX::B_WESTPHAL | | Sat Apr 12 1997 20:33 | 8 |
|
CMP.D1- The process area was scubbed down as requested by engineering. The
tungston stains came off fairly easy with only tex wipes & IPA.
An N2 gun was hooked up. We went to Packaging Plus to pick up the
vacuum filter housings but FEDEX never got the parts here. We checked
at the HLO1 security desk but it wasn't there either.
|
| 41.18 | regulator/shutoff for cond arm now online | SUBPAC::LANDRY | | Sun Apr 13 1997 12:56 | 6 |
| The shut-off valve and pressure regulator for the condition arm N2
setup has been installed, and is quite functional. It's now ready
for Engineering evaluation.
"A" shift
|
| 41.19 | Primary polish tube rinse / DI leak | FABSIX::R_GEE | | Mon Apr 14 1997 17:36 | 7 |
| Moved the 1/8" air line from 9SV13 to the main CDA line so the
primary polish tube rinse stays open for continuous rinsing.
Repaired a DI water leak coming from the main line for table
rinse.
|
| 41.20 | pad conditioner rinse station | FABSIX::R_GEE | | Tue Apr 15 1997 10:13 | 4 |
| Modified the pad conditioner rinse station and conditioner
fittings so it submerges into the rinse station properly.
|
| 41.21 | Mega System for Oxide slurry | FABSIX::R_GEE | | Thu Apr 17 1997 12:43 | 5 |
| The mega system is on-line for oxide slurry. Put a pressure
gauge in-line with pump #6, we have flow but no pressure
Ashland's has been called and is working the issue.
|
| 41.22 | Vacuum pump filter | FABSIX::R_GEE | | Thu Apr 17 1997 12:45 | 3 |
| Replaced the vacuum pump filter with the clean housing type,
same as all the "B" tools.
|
| 41.23 | Chiller | FABSIX::R_GEE | | Mon Apr 21 1997 18:51 | 8 |
| Couldn't control the remote chiller temp. Found the Access cable
between the tool and the chiller was wired wrong. Removed the
wires from pins #8 & #13 and soldered them onto pins #6 & #7.
In IO module rack #1 slot #7 we moved wire #1178 from pin #1
to pin #3, Per TSB A7012A-A. this is the output to the chiller.
Set the chiller temp. to 15c
|
| 41.24 | Screen locked up | FABSIX::R_GEE | | Mon Apr 21 1997 19:17 | 7 |
| After the chiller work was completed we put the tool into
Wet Mode and left the room. 20 minutes later returned to the
room and found the tools screen frozen on the Operations
screen, with 4 thick black vertical lines in it. Re-booted
the tool, it seems to be o.k. now.
A shift
|
| 41.25 | Screen locked up | FABSIX::R_GEE | | Tue Apr 22 1997 19:52 | 4 |
| Came in this morning, the tool was in wet mode but the
screen was locked up again, Kevin re-booted the tool.
A shift & SF
|
| 41.26 | chiller wouldn't cool to set point | FABSIX::R_GEE | | Tue Apr 22 1997 20:30 | 12 |
| The chiller wouldn't cool to 15c, it would go down to 22c and
that was it.
Checked the incoming PCWS, the flow was 0 gpm at 70 lbs of
pressure. Found the incoming PCWS valve inside the chiller
was closed, this was tripping the compressor off. Loosened
the tention screw so the spring would allow the valve to open
and reset the compressor, all set.
Checked the actual temp. of the fluid inside the reservoir and
it matches the display.
A shift & SF
|
| 41.27 | Screen locked up / slurry to barrel lines removed | FABSIX::R_GEE | | Wed Apr 23 1997 20:07 | 18 |
| When Earl tried to start the tool today he mapped the cassettes
and went to the Operation screen. When he pressed start, the button
turned green but didn't do anything, after about 3 minutes he
then pressed Pause, it also turned green (start & pause both green).
We tried to abort but it wouldn't respond. It would only allow us
to backout to the main menu and that was it. Everytime we tried to
move into another function menu it would say (not allowed unless
the system is idle). Had to re-boot the tool, all set for now.
Speedfam has a TSB and hardware that should repair the lockup
problems.
Cleaned out the oxide slurry lines and removed them from the
barrel and the tool. Before the tool can be run the lines need
to be reconnected to slurry pump lines #4 & #5 then the lines
put back into the slurry barrel.
A shift
|
| 41.28 | CARRIER SCREWS | YIELD::TDYER | | Fri Apr 25 1997 17:52 | 28 |
|
Carrier screw and ring guide update:
During W-CMP processing the carrier screws are loosening and the ring guides
are cracking. We believe this is caused by vibration shock waves transmitting
through the polish table and into the carrier. Unlike the IC1000/Suba-4, the
PAN-W pad is very hard, very thin and offers no dampening. Carrier construction
materials will be optimized to alleviate this problem. In the interim, process
Engineering will tighten the carrier screws every 50 wafers. We have built
several test carriers for evaluation. They will be installed on Monday AM and
used during Process DOEs. The carriers are built as follows:
Backing plate torque = 15"/lbs
Ring guide initial torque = 8"/lbs
exposures = .005 - .006"
carrier-1 standard lockwashers
carrier-2 standard lock w. + locktight on washers
carrier-3 split lock washer
carrier-4 split lock w. + locktight on washers
carrier-5 split lock washer on top of plastic washer
The PPS carrier ring would not come in spec, all ring guides are Delrin.
We will be testing more washer and ring schemes plus experimenting with
compressible shims.
Tim/Brad/Sammy
|
| 41.29 | #2 load cup / Slurry pumps cal'ed | FABSIX::R_GEE | | Mon Apr 28 1997 19:36 | 15 |
| - Two wafers slid out from under carrier #2, crashed twice.
Found that carrier #2 unload cup was in the #2 load
cup position.
- Checked slurry flows for pumps #1 thru #3, all out.
Changed the Eng./Scale factor to correct.
pre post
pump #1 150 120
pump #2 150 127
pump #3 150 110
A shift
|
| 41.30 | 2% Citric to scrub brushes / Robot & DI water | FABSIX::R_GEE | | Mon Apr 28 1997 19:54 | 28 |
| * Process Eng. requested a way to pump 2% Citric acid into the
scrub station brushes.
Put a "tee" in-line after the DI water solenoid feeding the
scrub station brushed. And installed a pump under the elevators.
To operate the pump:
- Remove the air line for the scrubber brush DI solenoid
under elevator #1.
- Remove the cap from the "tee" and connect the hose for
the pump.
========================================================
* While connecting the above we sprung a DI water leak.
Had to replace the Automation frame #46 fuse, (dual outlet).
Dry out the robot controller, hand pendent & cables.
Tried to power the tool up, the robot wouldn't home, found
the cables had fallen off the robot. The cables between the
robot body and the controller are just pushed on, not screwed.
These cable ends are broken and need to be replaced.
A shift & Tim
|
| 41.31 | Modified Carriers 3 & 4 Sray nossles | FABSIX::R_GEE | | Mon Apr 28 1997 19:58 | 5 |
| Modified the carrier spray for carriers #3 & #4 so there is
an additional spray nossle pointed down onto the carriers.
Will do the rest tomorrow.
A shift
|
| 41.32 | Slurry pumps #4 & 5 cal'ed | FABSIX::R_GEE | | Tue Apr 29 1997 18:39 | 8 |
| Calibrated oxide slurry pumps #4 & #5, they were both low.
We adjusted the Gain pods on the motor controlers for this
Adjustment.
A shift & Eng.
|
| 41.33 | Enhanced carrier spray has been modified | FABSIX::R_GEE | | Tue Apr 29 1997 18:49 | 11 |
| Completed the installation of 5 additional carrier spray nozzles
on primary table to remove slurry from top of carriers. These are
activated by enhanced spray. Please be carefull when working around
the primary polish table, if these are move you will need to
re-position them.
A shift
|
| 41.34 | Scrubber brushes changed | FABSIX::R_GEE | | Wed Apr 30 1997 12:23 | 8 |
| Changed the scrub station scrub brushed due to
high particles.
|
| 41.35 | Tool locked up | FABSIX::R_GEE | | Wed Apr 30 1997 17:16 | 10 |
| The tool locked up in the operations screen, both start and
pause were lit, had to re-boot the tool. Found out later
in the day, when it locked up again, if you back out and re-seize
control then start over you can recover. There is a TSB
and hardware on the cabinet in the room that Speedfam needs
to install that should take care of this problem.
|
| 41.36 | Carrier retainer ring screw set-up | FABSIX::R_GEE | | Wed Apr 30 1997 17:38 | 14 |
|
Yesterday, all the carriers retainer ring screws, except for
carrier #2, loosened after only 15 wafers. Carrier #2 was built
with standard lock washers and loctite on washers. Re-built all
5 carriers this morning using the above setup at 12 lbs. Ran
70 wafers & checked the screws after each cassette, no loose screws.
Looks like this, "Standard lock washers with loctite on the
washers & screws", will keep the retainer ring screws
from backing out.
|
| 41.37 | Slurry lines and hinges | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri May 02 1997 06:54 | 8 |
|
Replaced the slurry lines on Slurry #5 and #6.
Per Tim we didn't check flow...
Replaced top broken hinge on the front lower
left door.
BJ
|
| 41.38 | elv-1, w-loss-1 | YIELD::TDYER | | Mon May 05 1997 02:08 | 9 |
|
Head-1 wafer loss sensor detecting false wafers, adjusted same.
Elevator-1 would not home. The level sensor float became wedge in
the elevator base, re-installed same. Also noted that the enhanced-
enhanced DI spray can not be turned on with the carriers down, it
will get the multi-head underside wet.
Tim + B shift
|