| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 24.1 | WEEKLY PM FOR WW43 COMPLETED | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 24 1997 04:34 | 107 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 4/24/97 TOOL ENTITY: CMP.B4 TECHNICIAN(S): Brian Jubinville (BJ)
Dave Morin (DM)
Leon Shkolnikov (LS)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 BJ/DM
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 BJ/DM
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 22 BJ/DM
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45 BJ/DM
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 15 BJ/DM
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 BJ/DM
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 BJ/DM
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 45 BJ/DM
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 BJ/DM
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A BJ/DM
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 BJ/DM
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 45 BJ/DM
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 50 BJ/DM
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 BJ/DM
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25 BJ/DM
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 BJ/DM
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 50 BJ/DM
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 BJ/DM
6.1.19 Check Drip Pans for moisture/contamination Completed: BJ/DM/LS *
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ/DM
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ/DM
6.1.22 Check stations/components for contamination Completed: BJ/DM/LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 10 BJ
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BJ **
6.1.27 Scrub clean the Polish area tub and walls Completed: BJ/DM
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: BJ/DM
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BJ
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BJ
6.1.32 Check Carrier clean brushes for defects Completed: BJ
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BJ/LS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BJ/LS
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: BJ/LS/DM
6.1.38 Check the slurry flow alarm. Completed: BJ/LS/DM
Comments: * DI WAS RUNNING AT 36 PSI
** 4 OUT THE 6 HELICOILS/SCREWS THAT HOLD THE CONDITIONER ON
WERE ALL STRIPPED OUT. HOW IT WAS HOLDING I'LL NEVER KNOW.
WE DON'T HAVE ANY HELICOILS AND WE ONLY STOCK THE OLD STYLE
ADAPTORS SO I PUT THE OLD STYLE ON AND RE-CAL'ED THE
DOWNFORCE.
|
| 24.2 | WW44 WEEKLY PM COMPLETED | ASDG::MORIN | The Quest is on | Wed Apr 30 1997 07:48 | 102 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 4/30/97 TOOL ENTITY: CMP.B4 TECHNICIAN(S): Brian Jubinville (BJ)
Dave Morin (DM)
Leon Shkolnikov (LS)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80 LS/DM
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55 LS/DM
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 20 LS/DM
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45 LS/DM
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 15 LS/DM
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35 LS/DM
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30 LS/DM
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 45 LS/DM
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 LS/DM
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A BJ/DM
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20 LS/DM
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 45 LS/DM
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 55 LS/DM
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30 LS/DM
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 30 LS/DM
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20 LS/DM
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 50 LS/DM
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80 LS/DM
6.1.19 Check Drip Pans for moisture/contamination Completed: BJ/DM/LS *
6.1.20 Check tubing/fittings for fluid leaks Completed: BJ/DM/LS
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BJ/DM/LS
6.1.22 Check stations/components for contamination Completed: BJ/DM/LS
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 3 BJ/DM
6.1.24 Clean and lubricate the Scrubber rails Completed: LS
6.1.25 Clean and lubricate the Paddle rails Completed: LS
6.1.26 Remove and clean conditioning Wheel and Housing Completed: LS/DM
6.1.27 Scrub clean the Polish area tub and walls Completed: LS/DM
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: LS
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: LS
6.1.30 Check slurry pump hoses and connectors for leaks Completed: LS/DM
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: LS/DM
6.1.32 Check Carrier clean brushes for defects Completed: BJ
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: LS
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: LS
6.1.35 Check chiller fluid resevoir for proper level Completed: BJ/DM
6.1.36 Check the chiller readout for 24 degrees C. Completed: BJ/DM
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: BJ/LS/DM
6.1.38 Check the slurry flow alarm. Completed: BJ/LS/DM
Comments: * FOUND ELEVATOR DRIP PAN WITH WATER LEAK/CLEANED/UNABLE TO
REPAIR AT THIS TIME,EE NOTIFIED.
|
| 24.3 | WW45 weekly pm completed | FABSIX::J_SADIN | Freedom isn't free. | Sun May 04 1997 17:15 | 100 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 5/04/97 TOOL ENTITY: CMP.B4 TECHNICIAN(S): James Sadin
Timothy Landry
Brendan Finn
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 90js/tl
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55js/tl
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 20js/tl
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45js/tl
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 15js/tl
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35js/tl
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30js/tl
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 45js/tl
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6 js/tl
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20js/tl
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 50js/tl
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 55js/tl
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30js/tl
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 30js/tl
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20js/tl
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 50js/tl
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80js/tl
6.1.19 Check Drip Pans for moisture/contamination Completed: bf
6.1.20 Check tubing/fittings for fluid leaks Completed: tl
6.1.21 Check tubing/fittings for pneumatic leaks Completed: tl
6.1.22 Check stations/components for contamination Completed: tl/js/bf
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 8 js
6.1.24 Clean and lubricate the Scrubber rails Completed: js
6.1.25 Clean and lubricate the Paddle rails Completed: js
6.1.26 Remove and clean conditioning Wheel and Housing Completed: tl
6.1.27 Scrub clean the Polish area tub and walls Completed: tl
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: tl/js/bf
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: tl
6.1.30 Check slurry pump hoses and connectors for leaks Completed: js
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: tl
6.1.32 Check Carrier clean brushes for defects Completed: bf
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: bf/tl
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: js
6.1.35 Check chiller fluid resevoir for proper level Completed: js/tl
6.1.36 Check the chiller readout for 24 degrees C. Completed: js
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: js/tl/bf
6.1.38 Check the slurry flow alarm. Completed: tl
Comments: 6.1.10 - applicable to CMP.B1 only.
|
| 24.4 | WW46 WEEKLY PM COMPLETED. | SUBPAC::LANDRY | | Tue May 13 1997 11:57 | 102 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE:5/13/97 TOOL ENTITY:CMP.B4 TECHNICIAN(S): Tim Landry
James Sadin
Bob Gee
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed: 80
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 30
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 15
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 30
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 45
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A *
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 55
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 55
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 30
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80
6.1.19 Check Drip Pans for moisture/contamination Completed: TL/JS/RG
6.1.20 Check tubing/fittings for fluid leaks Completed: TL/JS/RG
6.1.21 Check tubing/fittings for pneumatic leaks Completed: TL/JS/RG
6.1.22 Check stations/components for contamination Completed: TL/JS/RG
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 9
6.1.24 Clean and lubricate the Scrubber rails Completed: TL/JS/RG
6.1.25 Clean and lubricate the Paddle rails Completed: TL/JS/RG
6.1.26 Remove and clean conditioning Wheel and Housing Completed: TL/JS/RG
6.1.27 Scrub clean the Polish area tub and walls Completed: TL/JS/RG
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: TL/JS/RG
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: TL/JS/RG
6.1.30 Check slurry pump hoses and connectors for leaks Completed: TL/JS/RG
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: TL/JS/RG
6.1.32 Check Carrier clean brushes for defects Completed: TL/JS/RG
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: TL/JS/RG
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: TL/JS/RG
6.1.35 Check chiller fluid resevoir for proper level Completed: TL/JS/RG
6.1.36 Check the chiller readout for 24 degrees C. Completed: TL/JS/RG
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: TL/JS/RG
6.1.38 Check the slurry flow alarm. Completed: TL/JS/RG
Comments:
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI *
(Applicable to CMP.B1 only) EE Notified
|
| 24.5 | CMP.B4 SHUTDOWN AND STARTUP CHECKSHEETS | FABSIX::J_SADIN | Freedom isn't free. | Tue May 27 1997 10:55 | 52 |
| --------------------------------------------------------------------------------
SPEC# HF60-0172 REV-E SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
CMP.B4
CMP.B SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) SCRUB SIDES OF CARRIERS AQ,BD/5-26-97
2) RUN CARRIER BLOW OFF FOR 30 SECONDS AQ,BD/5-26-97
3) REMOVE ALL CARRIERS AQ,BD/5-26-97
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK AQ,BD/5-26-97
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT
ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED
WITH DI WATER. AQ,BD/5-26-97
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY AQ,BD/5-26-97
7) REMOVE CONDITIONER AND CLEAN AQ,BD/5-26-97
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
CONDITIONER RINSE, ELEVATOR TANKS. AQ,BD/5-26-97
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN) AQ,BD/5-26-97
10) DRAIN ELEVATOR AND CONDITIONER TUBE AQ,BD/5-26-97
11) REMOVE PADS, AND CLEAN AND DRY TABLES AQ,BD/5-26-97
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI AQ,BD/5-26-97
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER AQ,BD/5-26-97
14) POWER DOWN SYSTEM.
SPEC# HF60-0172 REV-D SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
CMP.B START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER. _js/tl/5/27__
2) POWER ON SYSTEM. _js/tl/5/27__
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES _js/tl/5/27__
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY _js/tl/5/27__
5) DRY TABLES, INSTALL PADS _js/tl/5/27__
6) INSTALL SCRUBBER BRUSHES _js/tl/5/27__
7) INSTALL CONDITIONER _js/tl/5/27__
8) INSTALL CARRIERS _js/tl/5/27__
9) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS) _js/tl/5/27__
10) IF SLURRY SYSTEM WAS SHUT DOWN, CONTACT ASHLAND CHEMICAL,
REQUEST DI TO BE PURGE FROM SLURRY SYSTEM AND CHARGED WITH
SLURRY AND REQUEST A NEW SLURRY FILTER BE INSTALLED. _js/tl/5/27__
11) CALIBRATE SLURRY FLOW _NA___/______
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC _js/tl/5/27__
|
| 24.6 | ww47 monthly pm completed | FABSIX::L_SHKOLNIKOV | | Wed May 28 1997 07:46 | 187 |
|
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Monthly Preventative Maintenance Check Sheet, Rev. E
DATE:5/24/97 TOOL ENTITY:CMP.B4 TECHNICIAN(S): Mike Standing
Dave Morin (DM)
Leon Shkolnikov (ls)
START TIME:5/24/97 COMPLETED TIME: 05/28/97
6.2.1 Change Peristaltic Pump Lines and check flow Completed: DM
6.2.2 Clean Polish area tub drains for clogs Completed: ls/DM
6.2.3 Check all table belts for defects Completed: ls
6.2.4 Perform Down Force Calibration on all 5 heads
to read at +/- 1lbs of 354 lbs.
NOTE: The target is 23 lbs. below the actual
377 lbs. due to the carrier weight minus the
alignment fixture using the point-to-point
method as described in the downforce procedure
in 6.2.4.1 through 6.2.4.13. Completed: ls/DM
Down Frc: Head 1 Pre-Adj: 336 Post-adj: 354 lb
Head 2 Pre-Adj: 338 Post-adj: 354 lb
Head 3 Pre-Adj: 338 Post-adj: 354 lb
Head 4 Pre-Adj: 343 Post-adj: 354 lb
Head 5 Pre-Adj: 332 Post-adj: 354 lb
6.2.5 Perform Down Force Calibration on Conditioner Completed: ls/DM
to read +/- .5 lbs of 77lbs.
Actual Down Force Pre-Adj: 116 lb
Actual Down Force Post-Adj: 77 lb
6.2.6 Check Scrubber Brushes for contaminates/defects Completed: ls
6.2.7 Check the Load Flipper alignment Completed: ls
6.2.8 Check the Unload Flipper alignment Completed: ls
6.2.9 Check Elevator alignments Completed: ls
6.2.10 Check wafer unload, from Index table to cassette Completed: ls
6.2.11 Check the +24 Volt power supply for +/- 1V
of 24 volts. Pre:23.6 Post:23.6 Tech: DM
6.2.12 Check the +/- 15 Volt power supply for +/- 1V
of 15V Pre:14.9 Post:14.9 Tech: DM
6.2.13 Check the +5 Volt power supply for 4.5 to
5.5 v. Pre:5.1 Post:5.1 Tech: DM
6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM Completed: 31 DM
6.2.15 Check Vacuum Pump Diaphrams Completed: DM
6.2.16 Replace liquid separator filter element Completed: ls
6.2.17 Check Vacuum Tank/Pump lines Completed: ls
6.2.18 Check carrier to Load Cup Position alignments Completed: ls/DM
6.2.19 Check Load Cup Height to carrier alignments Completed: ls
6.2.20 Check the Robot alignments Completed: ls
6.2.21 Check Muffin Fans for proper operation Completed: ls
Comments:Was unable to complete this pm due to the tool CMP.B4 not
being listed on the quartly pm schedule, and due to the bottle neck of
work in CMP production would not release the tool for an extended down
time... Mike Standing.
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 5/27/97 TOOL ENTITY: CMP.A4 TECHNICIAN(S): DAVE MORIN (DM)
Leon Shkolnikov (ls)
START TIME: COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed:80(DM)
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55(DM)
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 28(DM)
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45(DM)
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed:15(DM)
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35(DM)
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 35(DM)
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 45(DM)
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6(DM)
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20(DM)
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 55(DM)
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 55(DM)
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30(DM)
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 30(DM)
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20(DM)
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45(DM)
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80(DM)
6.1.19 Check Drip Pans for moisture/contamination Completed: ls
6.1.20 Check tubing/fittings for fluid leaks Completed: ls
6.1.21 Check tubing/fittings for pneumatic leaks Completed: ls
6.1.22 Check stations/components for contamination Completed: ls/DM
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: ls
6.1.25 Clean and lubricate the Paddle rails Completed: ls
6.1.26 Remove and clean conditioning Wheel and Housing Completed: DM/ls
6.1.27 Scrub clean the Polish area tub and walls Completed: DM/ls
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: DM/ls
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: DM
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DM
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: ls
6.1.32 Check Carrier clean brushes for defects Completed: ls/DM
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: ls
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: ls
6.1.35 Check chiller fluid resevoir for proper level Completed: ls
6.1.36 Check the chiller readout for 24 degrees C. Completed: ls
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: ls
6.1.38 Check the slurry flow alarm. Completed: ls/DM
Comments:
|
| 24.7 | ww48 weekly pm. | FABSIX::L_SHKOLNIKOV | | Wed May 28 1997 07:48 | 103 |
|
========================================================================
SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 5/28/97 TOOL ENTITY: CMP.A4 TECHNICIAN(S): DAVE MORIN (DM)
Leon Shkolnikov (ls)
START TIME: COMPLETED TIME:
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed:80(DM)
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55(DM)
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 28(DM)
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45(DM)
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed:15(DM)
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35(DM)
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 35(DM)
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 45(DM)
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6(DM)
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20(DM)
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 55(DM)
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 55(DM)
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30(DM)
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 30(DM)
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20(DM)
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45(DM)
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80(DM)
6.1.19 Check Drip Pans for moisture/contamination Completed: ls
6.1.20 Check tubing/fittings for fluid leaks Completed: ls
6.1.21 Check tubing/fittings for pneumatic leaks Completed: ls
6.1.22 Check stations/components for contamination Completed: ls/DM
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: ls
6.1.25 Clean and lubricate the Paddle rails Completed: ls
6.1.26 Remove and clean conditioning Wheel and Housing Completed: DM/ls
6.1.27 Scrub clean the Polish area tub and walls Completed: DM/ls
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: DM/ls
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: DM
6.1.30 Check slurry pump hoses and connectors for leaks Completed: DM
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: ls
6.1.32 Check Carrier clean brushes for defects Completed: ls/DM
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: ls
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: ls
6.1.35 Check chiller fluid resevoir for proper level Completed: ls
6.1.36 Check the chiller readout for 24 degrees C. Completed: ls
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: ls
6.1.38 Check the slurry flow alarm. Completed: ls/DM
Comments:
|
| 24.8 | ww49 weekly p.m. completed | FABSIX::R_GEE | | Mon Jun 02 1997 17:02 | 102 |
| SPEEDFAM CMP-V PREVENTIVE MAINTENANCE
SPEC# HF60-0172 REV-E
Speedfam Corp. CMP-V Planarizer
Weekly Preventative Maintenance Check Sheet, Rev. E
DATE: 6/02/97 TOOL ENTITY: CMP.B4 TECHNICIAN(S): Bob Gee (BG)
Brendan Finn (BF)
Tim Landry (TL)
Jim Sadin (JS)
6.1.1 Check CDA pressure inside tool for 80-90 PSI Completed:80(BG)
6.1.2 Check N2 pressure inside tool for 55-65 PSI Completed: 55(JS)
6.1.3 Check incoming DI Water pressure for 20-30 PSI Completed: 30(BG)
6.1.4 Check Load Cup pressure for 40-50 PSI Completed: 45(BG)
6.1.5 Check Pad Condition Balance pressure 10-20 PSI Completed: 15(BG)
6.1.6 Check Pad Conditioner Up pressure for 30-40 PSI Completed: 35(BG)
6.1.7 Check Carrier Up pressure for 25-35 PSI Completed: 35(BG)
6.1.8 Check Miscellaneous pressure for 40-50 PSI Completed: 45(BG)
6.1.9 Check Head Balance pressure for 6-6.5 PSI Completed: 6(BG)
6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: N/A
(Applicable for CMP.B1 only)
6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 20(TL)
6.1.12 Check Open Load Flipper pressure for 45-55 PSI Completed: 55(TL)
6.1.13 Check Open Unload Flipper pressure for 50-60 PSI Completed: 55(TL)
6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI Completed: 30(TL)
6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI Completed: 25(TL)
6.1.16 Check Alignment Fixture pressure for 15-25 PSI Completed: 20(TL)
6.1.17 Check Scrubber In/Out pressure for 45-55 PSI Completed: 45(TL)
6.1.18 Check MHTA pressure for 75-85 PSI Completed: 80(TL)
6.1.19 Check Drip Pans for moisture/contamination Completed: BF
6.1.20 Check tubing/fittings for fluid leaks Completed: BF
6.1.21 Check tubing/fittings for pneumatic leaks Completed: BF
6.1.22 Check stations/components for contamination Completed: BF
6.1.23 Check incoming Chilled Water pressure <10 PSI Completed: 10
6.1.24 Clean and lubricate the Scrubber rails Completed: BF
6.1.25 Clean and lubricate the Paddle rails Completed: BF
6.1.26 Remove and clean conditioning Wheel and Housing Completed: BF
6.1.27 Scrub clean the Polish area tub and walls Completed: BF
6.1.28 Remove all Load and Unload cups and scrub clean
with hydrogen peroxide. Completed: BF
6.1.29 Wipe the Load area, Mapper and Aligner w/ISO Completed: BF
6.1.30 Check slurry pump hoses and connectors for leaks Completed: BF
6.1.31 Remove and clean the Vacuum system filter
element and replaced as needed. Completed: BF
6.1.32 Check Carrier clean brushes for defects Completed: BF
(On CMP.B1, rotate position)
6.1.33 Wipe the MHTA and covers with Isopropyl Completed: BF
6.1.34 Wipe the Process Area plexiglas doors w/Iso Completed: BF
6.1.35 Check chiller fluid resevoir for proper level Completed: BF
6.1.36 Check the chiller readout for 24 degrees C. Completed: BF
6.1.37 Check the positioning and functionality of the
wafer detect sensors. Use the procedure in
step 6.1.37.4 to check sensors without having to
make any adjustments. Completed: BF
6.1.38 Check the slurry flow alarm. Completed: BF
Comments: Found the main table gear box leaking, notified EE and field
service.
|