| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 85.1 | passdown cmp b-shift 12/01/96 | FABSIX::M_PROVENCHER | | Sun Dec 01 1996 05:51 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 MQC'S
BREAKIN WAFERS 21 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24hr MQCS COMPLETED: 12/01/96 @ 4:30 am
CMP.A1 24hr MQCS NEXT DUE : 12/01/96 @ 4:30 am
CMP.A2 (Strasbaugh 6DS-SP) - up/mqc in process
CMP.A2 24hr MQCS COMPLETED: 11/20/96 @ 7:30 am
CMP.A2 24hr MQCS NEXT DUE : 12/01/96 @ 7:30 am (running)
CMP.B1 (Speedfam CMP-V) - : up/idle
CMP.B1 24hr MQCS COMPLETED 12/01/96 @ 12:30 am
CMP.B1 24hr MQCS NEXT DUE : 12/02/96 @ 12:30 am
CMP.B1 12hr MQCS COMPLETED: 12/01/96 @ 2:00 am
CMP.B1 12hr MQCS NEXT DUE : 12/01/96 @ 2:00 pm
CMP.B2 (Speedfam CMP-V) - : up/running jd0647 m3 hot lot (touchup)
CMP.B2 24hr MQCS COMPLETED: 11/30/96 @ 6:00 pm
CMP.B2 24hr MQCS NEXT DUE : 12/01/96 @ 6:00 pm
CMP.B2 12hr MQCS COMPLETED: 12/01/96 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 12/01/96 @ 6:00 pm
CMP.B3 (Speedfam CMP-V) - : up/idle
CMP.B3 24hr MQCS COMPLETED: 11/30/96 @ 10:00 am
CMP.B3 24hr MQCS NEXT DUE : 12/01/96 @ 10:00 am
CMP.B3 12hr MQCS COMPLETED: 12/01/96 @ 6:00 am
CMP.B3 12hr MQCS NEXT DUE : 12/01/96 @ 6:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:11/30/96 @ 9:30 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :12/01/96 @ 9:30 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:11/30/96 @ 9:30 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :12/01/96 @ 9:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:11/30/96 @ 9:30 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :12/01/96 @ 9:30 am
Hot/B lots in area:
__________________
* jd0647 m3 (b2) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xd0582 sti lot *
zb0151 sti lot
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0582 sti lot *
zb0151 sti lot
Monitor status:
--------------
2 boxes of 12k mqc wafers
3 boxes of 50K breakin wafers
lot in the room
------------------------------
*1 lot (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE T.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jl0680 m1 23 wafers *
jd0686 pmd 23 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 speedfam carriers
11 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
* note to ops - there is a rework lot here, from films xd0560. this lot is
measuring 100% and some wafers need to be polished down. the window for the
thickness is: 12800� - 15200�. target is 15k per pss.oh, did I mention that
its an ILD3. It came into the room @ 6:00 am.
|
| 85.2 | A-shift CMP passdown 12/01/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Dec 01 1996 19:27 | 104 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 15 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0617 (m1).
CMP.A1 24hr MQCS COMPLETED: 5am 12/01
CMP.A1 24hr MQCS NEXT DUE : 5am 12/02
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0706 (m1).
CMP.A2 24hr MQCS COMPLETED: 9am 12/01
CMP.A2 24hr MQCS NEXT DUE : 9am 12/02
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0635 (m3).
CMP.B1 24hr MQCS COMPLETED: 12am 12/01
CMP.B1 24hr MQCS NEXT DUE : 12am 12/02
CMP.B1 12hr MQCS COMPLETED: 3pm 12/01
CMP.B1 12hr MQCS NEXT DUE : 3am 12/02
CMP.B2 (Speedfam CMP-V) - RUNNING: JL0675 (m2).
CMP.B2 24hr MQCS COMPLETED: 7:30pm 12/01
CMP.B2 24hr MQCS NEXT DUE : 7:30pm 12/02
CMP.B2 12hr MQCS COMPLETED: 7:30pm 12/01
CMP.B2 12hr MQCS NEXT DUE : 7:30am 12/02
CMP.B3 (Speedfam CMP-V) - IDLE.
CMP.B3 24hr MQCS COMPLETED: 4pm 12/01
CMP.B3 24hr MQCS NEXT DUE : 4pm 12/02
CMP.B3 12hr MQCS COMPLETED: 4pm 12/01
CMP.B3 12hr MQCS NEXT DUE : 4am 12/02
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 12/01
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 12/01
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 12/01
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 12/01
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 12/01
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 12/01
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0663 DEP_ILD2 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0582 - STI (HOLD FOR ENG)
Monitor status:
--------------
5 BOXES OF 12K MQC WAFERS
2 BOXES OF 50K BREAKIN WAFERS
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0647 - M3 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM CARRIERS
11 STRASBAUGH CARRIERS
5 STRASBAUGH PLATES
|
| 85.3 | passdown cmp b-shift 12/02/96 | FABSIX::M_PROVENCHER | | Mon Dec 02 1996 05:58 | 110 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 MQC'S
BREAKIN WAFERS 31 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24hr MQCS COMPLETED: 12/02/96 @ 5:00 am
CMP.A1 24hr MQCS NEXT DUE : 12/03/96 @ 5:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 11/01/96 @ 9:00 am
CMP.A2 24hr MQCS NEXT DUE : 12/02/96 @ 9:00 am
CMP.B1 (Speedfam CMP-V) - : up/idle
CMP.B1 24hr MQCS COMPLETED 12/02/96 @ 5:30 am
CMP.B1 24hr MQCS NEXT DUE : 12/03/96 @ 5:30 am
CMP.B1 12hr MQCS COMPLETED: 12/02/96 @ 5:30 am
CMP.B1 12hr MQCS NEXT DUE : 12/02/96 @ 5:30 pm
CMP.B2 (Speedfam CMP-V) - : up/running jl0570a m2
CMP.B2 24hr MQCS COMPLETED: 12/01/96 @ 7:30 pm
CMP.B2 24hr MQCS NEXT DUE : 12/02/96 @ 7:30 pm
CMP.B2 12hr MQCS COMPLETED: 12/02/96 @ 7:30 am
CMP.B2 12hr MQCS NEXT DUE : 12/02/96 @ 7:30 pm
CMP.B3 (Speedfam CMP-V) - : down/repair (speed fam reps @3:00 am)
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:12/01/96 @ 10:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :12/02/96 @ 10:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:12/01/96 @ 10:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :12/02/96 @ 10:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:12/01/96 @ 10:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :12/02/96 @ 10:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b3 *
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0582 sti lot *
Monitor status:
--------------
5� boxes of 12k mqc wafers
5� boxes of 50K breakin wafers
lot in the room
------------------------------
* 1 lot (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE T.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jl0707 m1 24 wafers *
xd0617 m1 23 wafers
ye0189 m2 16 wafers
jl0675 m2 20 wafers
jd0663 m2 24 wafers (hot lot)
jd0635 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 speedfam carriers
11 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 85.4 | A-shift CMP passdown 12/02/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Dec 02 1996 19:10 | 107 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 15 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JL0685 (m2).
CMP.A1 24hr MQCS COMPLETED: 5am 12/02
CMP.A1 24hr MQCS NEXT DUE : 5am 12/03
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0624 (pmd).
CMP.A2 24hr MQCS COMPLETED: 11am 12/02
CMP.A2 24hr MQCS NEXT DUE : 11am 12/03
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0605 (m2).
CMP.B1 24hr MQCS COMPLETED: 5am 12/02
CMP.B1 24hr MQCS NEXT DUE : 5am 12/03
CMP.B1 12hr MQCS COMPLETED: 5am 12/02
CMP.B1 12hr MQCS NEXT DUE : 5pm 12/02
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0616 (m3).
CMP.B2 24hr MQCS COMPLETED: 8pm 12/01
CMP.B2 24hr MQCS NEXT DUE : 8pm 12/02
CMP.B2 12hr MQCS COMPLETED: 8am 12/02
CMP.B2 12hr MQCS NEXT DUE : 8pm 12/02
CMP.B3 (Speedfam CMP-V) - DOWN: motor change. down until thurs.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 12/02
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 12/02
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 12/02
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 12/02
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 12/02
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 12/02
Hot/B lots in area:
__________________
XD0624 - PMD
XD0616 - M3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B3 - DOWN FOR MOTOR CHANGE. BACK UP SOMETIME THURS.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
5.5 boxes of 12k mqc wafers
6 boxes of 12K breakin wafers
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0624 - PMD - 24
JL0570A - M2 - 12
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM
11 STRASBAUGH
5 PLATES
(5 BOXES OF SPEEDFAM PLATES ARRIVED TODAY)
|
| 85.5 | passdown cmp b-shift 12/02/96 | FABSIX::M_PROVENCHER | | Tue Dec 03 1996 06:11 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 9 MQC'S
BREAKIN WAFERS 42 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc failed first set for uniformity.
( xd0606 m2/jd0687 pmd are on tool )
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : in process
CMP.A2 (Strasbaugh 6DS-SP) - up/running jl0694 m1/ jd0689 pmd
CMP.A2 24hr MQCS COMPLETED: 11/01/96 @ 9:00 am
CMP.A2 24hr MQCS NEXT DUE : 12/02/96 @ 9:00 am
CMP.B1 (Speedfam CMP-V) - : up/running xd0619 m2(hotlot)/jl0662 m2
CMP.B1 24hr MQCS COMPLETED 12/03/96 @ 12:30 am
CMP.B1 24hr MQCS NEXT DUE : 12/04/96 @ 12:30 am
CMP.B1 12hr MQCS COMPLETED: 12/03/96 @ 3:00 am
CMP.B1 12hr MQCS NEXT DUE : 12/03/96 @ 3:00 pm
CMP.B2 (Speedfam CMP-V) - : up/running xd0594 m3/jd0630 m3
CMP.B2 24hr MQCS COMPLETED: 12/02/96 @ 9:30 pm
CMP.B2 24hr MQCS NEXT DUE : 12/03/96 @ 9:30 pm
CMP.B2 12hr MQCS COMPLETED: 12/03/96 @ 7:30 am
CMP.B2 12hr MQCS NEXT DUE : 12/03/96 @ 7:30 pm
CMP.B3 (Speedfam CMP-V) - : down/repair (motor change)
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:12/02/96 @ 11:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :12/03/96 @ 11:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:12/02/96 @ 11:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :12/03/96 @ 11:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:12/02/96 @ 11:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :12/03/96 @ 11:00 am
Hot/B lots in area:
__________________
* xd0620 m3 *
xd0619 m2 b1
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b3 *
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0582 sti lot *
Monitor status:
--------------
5 boxes of 12k mqc wafers
5� boxes of 50K breakin wafers
lot in the room
------------------------------
* 10 lots (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE T.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jd0690 pmd 24 wafers *
xd0616 m3 23 wafers hot
xd0605 m2 18 wafers
jl0685 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 speedfam carriers
11 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
(5 BOXES OF SPEEDFAM PLATES ARRIVED 11/02/96)
|
| 85.6 | A-shift CMP passdown 12/03/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Dec 03 1996 19:43 | 116 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0687 (pmd) and XD0606 (m2).
CMP.A1 24hr MQCS COMPLETED: 11am 12/03
CMP.A1 24hr MQCS NEXT DUE : 11am 12/04
CMP.A2 (Strasbaugh 6DS-SP) - VERFIY: running breakins after pad change.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: JL0696 (pmd).
CMP.B1 24hr MQCS COMPLETED: 12am 12/03
CMP.B1 24hr MQCS NEXT DUE : 12am 12/04
CMP.B1 12hr MQCS COMPLETED: 3am 12/03
CMP.B1 12hr MQCS NEXT DUE : 3pm 12/03
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0620 (m3).
CMP.B2 24hr MQCS COMPLETED: 9pm 12/02
CMP.B2 24hr MQCS NEXT DUE : 9pm 12/03
CMP.B2 12hr MQCS COMPLETED: 7:30pm 12/03
CMP.B2 12hr MQCS NEXT DUE : 7:30am 12/04
CMP.B3 (Speedfam CMP-V) - DOWN: new motor being installed.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 10am 12/03
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 10pm 12/03
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 10am 12/03
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 10pm 12/03
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 10am 12/03
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 10pm 12/03
Hot/B lots in area:
__________________
XD0620 - M3
Hot lots coming to area:
-----------------------
JD0663 - DEP_M3
Static Lots in area:
-------------------
XD0606 - M2 - 0.9DAYS
Down Equipment:
--------------
CMP.A2 - VERIFY AFTER PAD CHANGE
CMP.B3 - MOTOR CHANGE
Scrap lots:
----------
* none *
Hold Lots:
---------
ZB0151 - STI
XD0607 - STI
ZD0593 - STI
Monitor status:
--------------
2.5 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
15
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0582 - STI - 23WFRS
JD0689 - PMD - 24
JL0694 - M1 - 24
JL0662 - M2 - 17
XM0613 - PMD - 24
XD0619 - M2 - 22
XD0620 - M3 - 24
JD0630 - M3 - 22
XD0594 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM
11 STRASBAUGH
5 STRASBAUGH PLATES
|
| 85.7 | passdown cmp b-shift 12/04/96 | FABSIX::M_PROVENCHER | | Wed Dec 04 1996 06:05 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 MQC'S
BREAKIN WAFERS 38 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc (after crash) down since 1:00 am
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - up/running jl0691 pmd/xm0612 pmd
CMP.A2 24hr MQCS COMPLETED: 11/03/96 @ 11:00 pm
CMP.A2 24hr MQCS NEXT DUE : 12/04/96 @ 11:00 pm
CMP.B1 (Speedfam CMP-V) - : up/running jl0699 m2/jd0664
CMP.B1 24hr MQCS COMPLETED 12/04/96 @ 6:30 am
CMP.B1 24hr MQCS NEXT DUE : 12/05/96 @ 6:30 am *
CMP.B1 12hr MQCS COMPLETED: 12/04/96 @ 6:30 am *
CMP.B1 12hr MQCS NEXT DUE : 12/04/96 @ 6:30 pm*
CMP.B2 (Speedfam CMP-V) - : up/running jd0668 m1/xl0545a m1
CMP.B2 24hr MQCS COMPLETED: 12/03/96 @ 11:30 pm
CMP.B2 24hr MQCS NEXT DUE : 12/04/96 @ 11:30 pm
CMP.B2 12hr MQCS COMPLETED: 12/04/96 @ 7:30 am
CMP.B2 12hr MQCS NEXT DUE : 12/04/96 @ 7:30 pm
CMP.B3 (Speedfam CMP-V) - : down/repair (motor change)
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:12/03/96 @ 10:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :12/04/96 @ 10:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:12/03/96 @ 10:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :12/04/96 @ 10:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:12/03/96 @ 10:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :12/04/96 @ 10:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 *
cmp.b3
Scrap lots:
----------
* jl0669 m2 5 wafers over polished (tool era) *
Hold Lots:
----------
* ZB0151 - STI
XD0607 - STI
ZD0593 - STI
Monitor status:
--------------
2 boxes of 12k mqc wafers
3 boxes of 50K breakin wafers
lot in the room
------------------------------
* 11 lots (at time this passdown was sent)*
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE T.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jd0687 pmd 24 wafers *
jl0696 pmd 24 wafers
jl0674 m2 24 wafers
jl0678 m2 24 wafers
xd0606 m2 15 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 speedfam carriers
9 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 85.8 | A-shift CMP passdown 12/04/96 | FABSIX::J_SADIN | Freedom isn't free. | Wed Dec 04 1996 19:28 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0702 (pmd).
CMP.A1 24hr MQCS COMPLETED: 1pm 12/04
CMP.A1 24hr MQCS NEXT DUE : 1pm 12/05
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XE0553 (pmd).
CMP.A2 24hr MQCS COMPLETED: 12pm 12/04
CMP.A2 24hr MQCS NEXT DUE : 12pm 12/05
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B1 24hr MQCS COMPLETED: 6am 12/04
CMP.B1 24hr MQCS NEXT DUE : 6am 12/05
CMP.B1 12hr MQCS COMPLETED: 7:30pm 12/04
CMP.B1 12hr MQCS NEXT DUE : 7:30am 12/05
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0705 (m1).
CMP.B2 24hr MQCS COMPLETED: 11pm 12/03
CMP.B2 24hr MQCS NEXT DUE : 11pm 12/04
CMP.B2 12hr MQCS COMPLETED: 8am 12/04
CMP.B2 12hr MQCS NEXT DUE : 8pm 12/04
CMP.B3 (Speedfam CMP-V) - DOWN: motor installation (almost complete!).
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 12/04
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 12/04
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 12/04
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 12/04
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 12/04
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 12/04
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XD0624 - DEP_ILD1 1
JD0663 - DEP_ILD3 1
Static Lots in area:
-------------------
JL0669 - 0.7DAYS
Down Equipment:
--------------
CMP.B3 - DOWN FOR MOTOR REPLACEMENT
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0607 - 2.5DAYS HOLD FOR ENG (STI)
XD0593 - 2.4DAYS HOLD FOR ENG (STI)
Monitor status:
--------------
2.5 BOXES OF 12K MQC WAFERS
1 BOX OF 50K BREAKIN WAFERS
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XM0612 - PMD - 24WFRS
ZB0151 - STI - 24
JL0691 - PMD - 21
JL0669 - M2 - 18
JL0592 - M1 - 24
JD0664 - M2 - 24
XL0525A - M1 - 6
JD0668 - M1 - 23
JD0524 - M4 - 4
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM CARRIERS
7 STRASBAUGH CARRIERS
5 STRASBAUGH PLATES FILMED/SHIMMED
|
| 85.9 | chart recorder | FABSIX::B_FINN | | Wed Dec 04 1996 19:35 | 4 |
|
added chart recorder to analog i/o at eng request, to monitor table
amps.
|
| 85.10 | CMP 12-08-96 | FABSIX::S_MCREYNOLDS | | Sun Dec 08 1996 06:36 | 111 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 MQC'S
BREAKIN WAFERS 0 there were no 50k's in the room to use
we sure could have used them
CMP.A1 (Strasbaugh 6DS-SP) -up/MQC
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : N/A
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : N/A
both the Strasbaugh's needed MQC's due to the power glitch
CMP.B1 (Speedfam CMP-V) - : up/mqc
CMP.B1 24hr MQCS COMPLETED: in process
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - : up/mqc
CMP.B2 24hr MQCS COMPLETED: in process
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - : up/mqc-JD0690 m1 JL0673
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
all the Speedfam's needed MQC's due to the power glitch
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/08/96 @ 6:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11/08/96 @ 6:00 PM
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/08/96 @ 6:00 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/08/96 @ 6:00 PM
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/08/96 @ 6:00 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11/08/96 @ 6:00 PM
all the scrubbers needed MQC's due to the power glitch
Hot/B lots in area:
__________________
* XD0622 pmd 23w *
Hot lots coming to area:
-----------------------
*none*
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* all in MQC due to power glitch*
Scrap lots:
----------
* none *
Hold Lots:
----------
* XE0608 M1 *
XD0593 STI
XD0585 STI
Monitor status:
--------------
0 boxes of 12k mqc wafers.
0 box of 50K breakin wafers
more on order
Number of product lots in room:
------------------------------
* 4 lots *
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
* none *
# of carriers for strasbaugh/speedfam:
--------------------------------------
? speedfam carriers
? strasbaugh carriers
? strasbaugh plates
|
| 85.11 | A-shift CMP passdown 12/08/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Dec 08 1996 19:20 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 0 none available
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 12pm 12/08
CMP.A1 24hr MQCS NEXT DUE : 12pm 12/09
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running 24hr mqcs after pad change.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B1 24hr MQCS COMPLETED: 7pm 12/08
CMP.B1 24hr MQCS NEXT DUE : 7pm 12/09
CMP.B1 12hr MQCS COMPLETED: 7pm 12/08
CMP.B1 12hr MQCS NEXT DUE : 7am 12/09
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0686 (m1).
CMP.B2 24hr MQCS COMPLETED: 11am 12/08
CMP.B2 24hr MQCS NEXT DUE : 11am 12/09
CMP.B2 12hr MQCS COMPLETED: 11am 12/08
CMP.B2 12hr MQCS NEXT DUE : 11pm 12/08
CMP.B3 (Speedfam CMP-V) - IDLE.
CMP.B3 24hr MQCS COMPLETED: 12pm 12/08
CMP.B3 24hr MQCS NEXT DUE : 12pm 12/09
CMP.B3 12hr MQCS COMPLETED: 7pm 12/08
CMP.B3 12hr MQCS NEXT DUE : 7am 12/09
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 12/08
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 12/08
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 12/08
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 12/08
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 12/08
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 12/08
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XM0587 - DEP_M3
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
THICKNESS.A4 - WON'T BOOT BACK UP AFTER POWER GLITCH.
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0585 - STI; HOLD FOR ENG
XD0593 - STI; HOLD FOR ENG
XE0608 - STEP_M1; HOLD ??????
Monitor status:
--------------
2 BOXES OF 12K MQC WAFERS
0 BOXES OF 50K BREAKIN WAFERS
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
EDCO UPDATED BY SPEEDFAM
Lots/wafers processed:
---------------------
XD0622 - PMD - 23WFRS
JL0703A - M2 - 11
JL0673 - M2 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
??? CHECK REBUILD ROOM
|
| 85.12 | passdown cmp b-shift 12/09/96 | FABSIX::M_PROVENCHER | | Mon Dec 09 1996 06:07 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 MQC'S
BREAKIN WAFERS 26 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running xd0618 m1
CMP.A1 24hr MQCS COMPLETED: 12/08/96 @ 12:30 pm
CMP.A1 24hr MQCS NEXT DUE : 12/08/96 @ 12:30 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/mqc in process after crash
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - : up/idle
CMP.B1 24hr MQCS COMPLETED 12/08/96 @ 7:00 pm
CMP.B1 24hr MQCS NEXT DUE : 12/09/96 @ 7:00 pm
CMP.B1 12hr MQCS COMPLETED: 12/09/96 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : 12/09/96 @ 7:00 pm
CMP.B2 (Speedfam CMP-V) - : up/idle
CMP.B2 24hr MQCS COMPLETED: 12/08/96 @ 11:00 am
CMP.B2 24hr MQCS NEXT DUE : 12/09/96 @ 11:00 am
CMP.B2 12hr MQCS COMPLETED: 12/09/96 @ 3:00 am
CMP.B2 12hr MQCS NEXT DUE : 12/10/96 @ 3:00 pm
CMP.B3 (Speedfam CMP-V) - : up/running jl0693 m1/xd0622 pmd(hot lot that is a
rework. over depped at films. target is
9k�).
CMP.B3 24hr MQCS COMPLETED: 12/09/96 @ 12:00 midnight
CMP.B3 24hr MQCS NEXT DUE : 12/10/96 @ 12:00 midnight
CMP.B3 12hr MQCS COMPLETED: 12/09/96 @ 7:00 am
CMP.B3 12hr MQCS NEXT DUE : 12/09/96 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:12/08/96 @ 9:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :12/09/96 @ 9:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:12/08/96 @ 9:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :12/09/96 @ 9:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:12/08/96 @ 9:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :12/09/96 @ 9:00 am
Hot/B lots in area:
_______________________
* xd0622 pmd rework from films *
Hot lots coming to area:
-----------------------
* xm0587 m3 *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* thickness.a4 (all night) *
cmp-scrub.a1 (since @ 10 pm)
Scrap lots:
----------
* xd0618 m1 2 wafers from cmp.a2 crash *
Hold Lots:
----------
* xd0585 sti lot hold for eng *
xd0593 sti lot hold for eng
xe0602 step_m1 on hold??
Monitor status:
--------------
2 boxes of 12k mqc wafers two ordered @ 3:00 am
zero boxes of 50K breakin wafers two ordered @ 3:00 am
lot in the room
------------------------------
* 3 lots (at time this passdown was sent) *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE T.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jd0686 m1 23 wafers *
jd0690 m1 24 wafers
jd0689 m1 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 speedfam carriers
7 strasbaugh carriers
3 strasbaugh plates shimmed + filmed
|
| 85.13 | A-shift CMP passdown 12/09/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Dec 09 1996 19:31 | 110 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 15 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: new pad installed. running mqcs.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 24hr MQCS COMPLETED: 10am 12/09
CMP.A2 24hr MQCS NEXT DUE : 10am 12/10
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B1 24hr MQCS COMPLETED: 7pm 12/08
CMP.B1 24hr MQCS NEXT DUE : 7pm 12/09
CMP.B1 12hr MQCS COMPLETED: 7pm 12/08
CMP.B1 12hr MQCS NEXT DUE : 7am 12/09
CMP.B2 (Speedfam CMP-V) - RUNNING: XE0598 (m1).
CMP.B2 24hr MQCS COMPLETED: 4pm 12/09
CMP.B2 24hr MQCS NEXT DUE : 4pm 12/10
CMP.B2 12hr MQCS COMPLETED: 4pm 12/09
CMP.B2 12hr MQCS NEXT DUE : 4am 12/10
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0679 (m2) and JD0646 (m2).
CMP.B3 24hr MQCS COMPLETED: 5pm 12/09
CMP.B3 24hr MQCS NEXT DUE : 5pm 12/10
CMP.B3 12hr MQCS COMPLETED: 5pm 12/09
CMP.B3 12hr MQCS NEXT DUE : 5am 12/10
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7:30pm 12/09
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7:30am 12/10
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7:30pm 12/09
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7:30am 12/10
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7:30pm 12/09
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7:30am 12/10
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0585 - STI 4.0DAYS
XD0593 - STI 2.0DAYS
Down Equipment:
--------------
CMP.A1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0585 - STI - hold for eng
XD0593 - STI - hold for eng
Monitor status:
--------------
5 boxes of 12K mqc wafers
0 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0618 - M1 - 22WFRS
XE0608 - M1 - 24
XD0622 - PMD - 23
XD0617 - M2 - 23
JL0693 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
7 STRASBAUGH
3 PLATES F/S
|
| 85.14 | B shift passdown | FABSIX::M_PROVENCHER | | Tue Dec 10 1996 06:06 | 112 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/mqc after crash/running newpad
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) -dn/pad change after 2 sets of mqc's failed for
uniformity, after carriers were changed.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/idle (head three offline)
CMP.B1 24hr MQCS COMPLETED: 12/09/96 @ 10:30 pm
CMP.B1 24hr MQCS NEXT DUE : 12/10/96 @ 10:30 pm
CMP.B1 12hr MQCS COMPLETED: 12/10/96 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : 12/10/96 @ 7:00 pm
CMP.B2 (Speedfam CMP-V) - up/running jd0615 m2/xd0624 m2 hot lot
CMP.B2 24hr MQCS COMPLETED: 12/09/96 @ 4:00 pm
CMP.B2 24hr MQCS NEXT DUE : 12/10/96 @ 4:00 pm
CMP.B2 12hr MQCS COMPLETED: 12/10/96 @ 5:30 am
CMP.B2 12hr MQCS NEXT DUE : 12/10/96 @ 5:30 pm
CMP.B3 (Speedfam CMP-V) - up/running jd0646 m2/jl0679 m2
CMP.B3 24hr MQCS COMPLETED: 12/09/96 @ 5:00 pm
CMP.B3 24hr MQCS NEXT DUE : 12/10/96 @ 5:00 pm
CMP.B3 12hr MQCS COMPLETED: 12/10/96 @ 5:30 am
CMP.B3 12hr MQCS NEXT DUE : 12/10/96 @ 5:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/10/96 @ 7:30 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/10/96 @ 7:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/10/96 @ 7:30 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/10/96 @ 7:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/10/96 @ 7:30 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/10/96 @ 7:30 pm
Hot/B lots in area:
__________________
* xd0624 m2 cmp.b2 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0585 - STI LOT
XD0593 - STI LOT
Down Equipment:
--------------
thickness.a4
cmp.a1
cmp.a2
Scrap lots:
----------
* xd0625 pmd 2 wafers *
Hold Lots:
---------
XD0585 - STI - hold for eng
XD0593 - STI - hold for eng
Monitor status:
--------------
5 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 7 lots *
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
* xe0598 m1 24 wafers *
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
5 STRASBAUGH
3 PLATES F/S
|
| 85.15 | A-shift CMP passdown 12/10/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Dec 10 1996 19:18 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 15 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 10am 12/10
CMP.A1 24hr MQCS NEXT DUE : 10am 12/11
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 24hr MQCS COMPLETED: 12pm 12/10
CMP.A2 24hr MQCS NEXT DUE : 12pm 12/11
CMP.B1 (Speedfam CMP-V) - IDLE. (head 3 offline)
CMP.B1 24hr MQCS COMPLETED: 11pm 12/09
CMP.B1 24hr MQCS NEXT DUE : 11pm 12/10
CMP.B1 12hr MQCS COMPLETED: 6pm 12/10
CMP.B1 12hr MQCS NEXT DUE : 6am 12/11
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B2 24hr MQCS COMPLETED: 5pm 12/10
CMP.B2 24hr MQCS NEXT DUE : 5pm 12/11
CMP.B2 12hr MQCS COMPLETED: 5pm 12/10
CMP.B2 12hr MQCS NEXT DUE : 5am 12/11
CMP.B3 (Speedfam CMP-V) - RUNNING: touching up lot# JL0716 (pmd).
CMP.B3 24hr MQCS COMPLETED: 8pm 12/09
CMP.B3 24hr MQCS NEXT DUE : 8pm 12/10
CMP.B3 12hr MQCS COMPLETED: 8pm 12/10
CMP.B3 12hr MQCS NEXT DUE : 8am 12/11
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 12/10
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 12/10
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 12/10
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 12/10
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 12/10
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 12/10
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XD0622 - DEP_M1
JD0725 - DEP_ILD1 2
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0590 - HOLD FOR ERIC BODENSIECK.
Monitor status:
--------------
6.5 boxes of 12K mqc wafers
1 box of 50K breakin wafers
Number of product lots in room:
------------------------------
1
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0717 - PMD - 23WFRS
JD0709 - PMD - 24
XD0625 - PMD - 22
XD0624 - M2 - 24
JD0615 - M2 - 23
JL0679 - M2 - 16
JD0646 - M2 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM
5 STRASBAUGH
3 PLATES F/S
|
| 85.16 | CMP C-SHIFT PD. 12-14-96 | FABSIX::E_DAWSON | | Sat Dec 14 1996 19:31 | 65 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE - mqc's just performed
CMP.A2 (Strasbaugh 6DS-SP) -UNSC DOWN - both carriers sticking to the pad.
CMP.B1 (Speedfam CMP-V) - DOWN - inverter/rotation/...see EE. PD.
CMP.B2 (Speedfam CMP-V) - UP/IDLE - Needs full mqc's, pad cnt @ 2055/2051
CMP.B3 (Speedfam CMP-V) - UP/IDLE -
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Lots in CMP: 6 Hot/B lots in area: JD0725 ILD2
------------ ------------------- @OP #3019 THICK ILD2_2
Lots Shiped:
-----------
JD0665 ILD3 22W XM0587 ILD2 10W JL0723 PMD 24W
XE0662 ILD3 23W XD0632 PMD 24W JD0707 ILD1 24W
JL0715 PMD 24W JD0666 ILD1 24W JD0728 PMD 24W
JL0718 PMD 24W JD0690 ILD2 24W JD0652 ILD2 22W
JL0696 ILD1 24W
***** "NEW SPEC/TDCO": PLEASE READ *****
Subj: Documents processed on Thursday, 12/12/96
Document No. Rev Title
-----------------------------------------------------------------------------
2) HF6O-0069 J Strasbaugh 6DS Chemical/Mechanical
Planarization
6) HF6O-0070 L Speed Fam SMP.V (BMP.B1, CMP.B2
Chemical/Mechanical)
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: 13 MQC Monitors: 3.5 BOXES
------------- ------------
Misc: ***** "PLEASE READ" *****
----
**** LOT JD0710 IS 100% ON THICKNESS.A4 & SOME WAFERS STILL NEED
TO BE POLISHED. 2 WAFERS CRASHED ON CMP.A1 PLEASE SCRAP
ACCORDINGLY. THIS LOT IS AT POLISH STEP 1978 CMP_PMD
**** PLEASE T-UP LOT JL0698 ON CMP.B3. THIS LOT WAS 100% ON
THICKNESS.A5. LOT WAS PROC'ED TO STEP 3114 THK_CMP.
**** LOT JL0720 HAS BEEN PROC'ED TO CMP.A1 BUT HAS NOT BEEN
RUN "AT ALL".
|
| 85.17 | passdown cmp b-shift 12/15/96 | FABSIX::M_PROVENCHER | | Sun Dec 15 1996 06:20 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running xd0759 pmd (hot lot)
CMP.A1 24hr MQCS COMPLETED: 12/14/96 2 7:00 pm
CMP.A1 24hr MQCS NEXT DUE : 12/15/96 @ 7:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/idle
CMP.A2 24hr MQCS COMPLETED: 12/15/96 @
CMP.A2 24hr MQCS NEXT DUE : 12/16/96 @
CMP.B1 (Speedfam CMP-V) - up/running xd0623 m1
CMP.B1 24hr MQCS COMPLETED: 12/14/96 @ 10:00 am
CMP.B1 24hr MQCS NEXT DUE : 12/15/96 @ 10:00 am
CMP.B1 12hr MQCS COMPLETED: 12/15/96 @ 5:30 am
CMP.B1 12hr MQCS NEXT DUE : 12/15/96 @ 5:30 pm
CMP.B2 (Speedfam CMP-V) - up/running jd0688 m1/xe0596 m3 on tool
CMP.B2 24hr MQCS COMPLETED: 12/15/96 @ 6:00 am
CMP.B2 24hr MQCS NEXT DUE : 12/16/96 @ 6:00 am
CMP.B2 12hr MQCS COMPLETED: 12/14/96 @ 9:00 pm
CMP.B2 12hr MQCS NEXT DUE : 12/15/96 @ 9:30 am
CMP.B3 (Speedfam CMP-V) - up/mqc in process (xe0565m3/jd0725m2 Hotlot on tool)
CMP.B3 24hr MQCS COMPLETED: 12/15/96 @ 6:30 am
CMP.B3 24hr MQCS NEXT DUE : 12/16/96 @ 6:30 am
CMP.B3 12hr MQCS COMPLETED: 12/15/96 @ 6:00 am
CMP.B3 12hr MQCS NEXT DUE : 12/15/96 @ 6:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/15/96 @ 6:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/15/96 @ 6:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/15/96 @ 6:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/15/96 @ 6:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/15/96 @ 6:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/15/96 @ 6:00 pm
Hot/B lots in area:
__________________
* xd0759 pmd (a1) *
jd0725 m2 (b3)
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2� boxes of 12K mqc wafers
2 boxes of 50K breakin wafers ( 2 boxes at dep )
Number of product lots in room:
------------------------------
* 10 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
* jd0710 pmd 22 wafers *
jl0720 pmd 24 wafers
xl0525a m2 6 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
5 STRASBAUGH
4 PLATES F/S
|
| 85.18 | CMP A TEAM PASSDOWN | FABSIX::J_BLAIS | | Sun Dec 15 1996 19:51 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 9 mqcs
BREAKIN WAFERS 27 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running JL0742 pmd
CMP.A1 24hr MQCS COMPLETED: 12/15/96 @ 6:00 pm
CMP.A1 24hr MQCS NEXT DUE : 12/16/96 @ 6:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -MQC After crash.
CMP.A2 24hr MQCS COMPLETED: currently running
CMP.A2 24hr MQCS NEXT DUE :
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JD0681 ILD1/XL0525A ILD2
CMP.B1 24hr MQCS COMPLETED: 12/15/96 @ 11:00 am
CMP.B1 24hr MQCS NEXT DUE : 12/16/96 @ 11:00 am
CMP.B1 12hr MQCS COMPLETED: 12/15/96 @ 11:02 am
CMP.B1 12hr MQCS NEXT DUE : 12/15/96 @ 11:02 pm
CMP.B2 (Speedfam CMP-V) - up/running JD0689 ILD2
CMP.B2 24hr MQCS COMPLETED: 12/15/96 @ 6:00 am
CMP.B2 24hr MQCS NEXT DUE : 12/16/96 @ 6:00 am
CMP.B2 12hr MQCS COMPLETED: 12/15/96 @ 7:30 pm
CMP.B2 12hr MQCS NEXT DUE : 12/16/96 @ 7:30 am
CMP.B3 (Speedfam CMP-V) - up/ RUNNING XEO565 ILD3/JL0701 ILD1
CMP.B3 24hr MQCS COMPLETED: 12/15/96 @ 6:30 am
CMP.B3 24hr MQCS NEXT DUE : 12/16/96 @ 6:30 am
CMP.B3 12hr MQCS COMPLETED: 12/15/96 @ 7:30 am
CMP.B3 12hr MQCS NEXT DUE : 12/16/96 @ 7:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/15/96 @ 11:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/15/96 @ 11:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/15/96 @ 11:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/15/96 @ 11:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/15/96 @ 11:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/15/96 @ 11:00 pm
Hot/B lots in area:
__________________
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* CMP.A2 DOWN APPROX 5PM FOR WAFER BREAKAGE CURRENTLY POST MQC.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2� boxes of 12K mqc wafers
2 boxes of 50K breakin wafers ( 2 boxes at dep )
Number of product lots in room:
------------------------------
0 lots
New specs/revs posted:
---------------------
no
Lots/wafers processed:
---------------------
JD0710 PMD
JL0720 PMD
XD0759 PMD
JL0698 ILD1
JD0738 PMD
JD0725 ILD2
XD0623 ILD1
JD0688 ILD1
JD0682 PMD
XE0596 ILD3
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
5 STRASBAUGH
4 PLATES F/S
|
| 85.19 | passdown cmp b-shift 12/16/96 | FABSIX::M_PROVENCHER | | Mon Dec 16 1996 06:02 | 118 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 mqcs
BREAKIN WAFERS 32 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/idle
CMP.A1 24hr MQCS COMPLETED: 12/15/96 @ 6:00 pm
CMP.A1 24hr MQCS NEXT DUE : 12/16/96 @ 6:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up/running jl0743 pmd
CMP.A2 24hr MQCS COMPLETED: 12/15/96 @ 11:00 am
CMP.A2 24hr MQCS NEXT DUE : 12/16/96 @ 11:00 am
CMP.B1 (Speedfam CMP-V) - up/idle
CMP.B1 24hr MQCS COMPLETED: 12/16/96 @ 3:00 am
CMP.B1 24hr MQCS NEXT DUE : 12/17/96 @ 3:00 am
CMP.B1 12hr MQCS COMPLETED: 12/16/96 @ 3:00 am
CMP.B1 12hr MQCS NEXT DUE : 12/16/96 @ 3:00 pm
CMP.B2 (Speedfam CMP-V) - up/running xeo615 m1
CMP.B2 24hr MQCS COMPLETED: 12/16/96 @ 6:00 am
CMP.B2 24hr MQCS NEXT DUE : 12/17/96 @ 6:00 am
CMP.B2 12hr MQCS COMPLETED: 12/16/96 @ 6:00 pm
CMP.B2 12hr MQCS NEXT DUE : 12/16/96 @ 6:00 am
CMP.B3 (Speedfam CMP-V) - up/mqc in process (jd0724 m3/jl0693 m2 on tool)
CMP.B3 24hr MQCS COMPLETED: 12/16/96 @ 6:30 am
CMP.B3 24hr MQCS NEXT DUE : 12/17/96 @ 6:30 am
CMP.B3 12hr MQCS COMPLETED: 12/16/96 @ 6:30 am
CMP.B3 12hr MQCS NEXT DUE : 12/16/96 @ 6:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/15/96 @ 11:30 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/16/96 @ 11:30 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/15/96 @ 11:30 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/16/96 @ 11:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/15/96 @ 11:30 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/16/96 @ 11:30 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b3 24 hr mqc's *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1� boxes of 12K mqc wafers
1 boxe of 50K breakin wafers
Number of product lots in room:
------------------------------
* 7 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* ***** "NEW SPEC/TDCO": PLEASE READ *****
Subj: Documents processed on Thursday, 12/12/96
Document No. Rev Title
----------------------------------------------------------------------------
-
2) HF6O-0069 J Strasbaugh 6DS Chemical/Mechanical
Planarization
6) HF6O-0070 L Speed Fam SMP.V (BMP.B1, CMP.B2
Chemical/Mechanical)
Lots/wafers processed:
---------------------
* jl0701 m1 24 wafers *
jd0689 m2 24 wafers
jl0742 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
5 STRASBAUGH
4 PLATES F/S
|
| 85.20 | A-shift CMP passdown 12/16/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Dec 16 1996 19:37 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs after pad change.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0624 (m1).
CMP.A2 24hr MQCS COMPLETED: 8pm 12/15
CMP.A2 24hr MQCS NEXT DUE : 8pm 12/16
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0569 (m1).
CMP.B1 24hr MQCS COMPLETED: 3am 12/16
CMP.B1 24hr MQCS NEXT DUE : 3am 12/17
CMP.B1 12hr MQCS COMPLETED: 7pm 12/16
CMP.B1 12hr MQCS NEXT DUE : 7am 12/17
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0667 (m3) and XE0555 (m2).
CMP.B2 24hr MQCS COMPLETED: 6am 12/16
CMP.B2 24hr MQCS NEXT DUE : 6am 12/17
CMP.B2 12hr MQCS COMPLETED: 6am 12/16
CMP.B2 12hr MQCS NEXT DUE : 6pm 12/16
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0712 (m2) and JD0708 (m1).
CMP.B3 24hr MQCS COMPLETED: 7am 12/16
CMP.B3 24hr MQCS NEXT DUE : 7am 12/17
CMP.B3 12hr MQCS COMPLETED: 6pm 12/16
CMP.B3 12hr MQCS NEXT DUE : 6am 12/17
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 12/16
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 12/16
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 12/16
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 12/16
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 12/16
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 12/16
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC. RUNNING MQCS AFTER PAD CHANGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K mqc wafers
1.5 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
15
New specs/revs posted:
---------------------
SEE NEW SPEEDFAM AND STRASBAUGH SPECS
Lots/wafers processed:
---------------------
ZE0219 - PMD - 24WFRS
JL0748 - PMD - 24
JL0747 - PMD - 24
JL0743 - PMD - 24
JD0681 - M1 - 24
XE0615 - M1 - 23
JL0693 - M2 - 24
JD0724 - M2 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
5 STRASBAUGH
4 PLATES F/S
|
| 85.21 | passdown cmp b-shift 12/17/96 | FABSIX::M_PROVENCHER | | Tue Dec 17 1996 06:01 | 122 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 22 mqcs
BREAKIN WAFERS 38 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running XE0609 pmd/XE0628 pmd
CMP.A1 24hr MQCS COMPLETED: 12/17/96 @ 2:00 am
CMP.A1 24hr MQCS NEXT DUE : 12/18/96 @ 2:00 am
CMP.A2 (Strasbaugh 6DS-SP) -up/running jl0749 pmd
CMP.A2 24hr MQCS COMPLETED: 12/17/96 @ 4:30 am
CMP.A2 24hr MQCS NEXT DUE : 12/18/96 @ 4:30 am
CMP.B1 (Speedfam CMP-V) - up/running jl0716 m2/jl0605(1 pass lot for frank K.
send aheads are in process)
CMP.B1 24hr MQCS COMPLETED: 12/17/96 @ 3:30 am
CMP.B1 24hr MQCS NEXT DUE : 12/18/96 @ 3:30 am
CMP.B1 12hr MQCS COMPLETED: 12/17/96 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : 12/17/96 @ 7:00 pm
CMP.B2 (Speedfam CMP-V) - up/running xd0622 m2 (hotlot)/jd0667 m3
CMP.B2 24hr MQCS COMPLETED: 12/16/96 @ 6:00 am
CMP.B2 24hr MQCS NEXT DUE : 12/17/96 (to be performed @ 7:30 am)
CMP.B2 12hr MQCS COMPLETED: 12/16/96 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 12/17/96 @ 6:00 am
CMP.B3 (Speedfam CMP-V) - up/running jl0712 m1/jd0709 m1
CMP.B3 24hr MQCS COMPLETED: 12/16/96 @ 6:30 am
CMP.B3 24hr MQCS NEXT DUE : 12/17/96 (to be performed @ 7:30 am)
CMP.B3 12hr MQCS COMPLETED: 12/17/96 @ 6:30 am
CMP.B3 12hr MQCS NEXT DUE : 12/17/96 @ 6:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/17/96 @ 5:30 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/17/96 @ 5:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/17/96 @ 5:30 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/17/96 @ 5:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/17/96 @ 5:30 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/17/96 @ 5:30 pm
Hot/B lots in area:
__________________
* jd0622 m2 (cmp.b2) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b2 24 hr mqc's @ 7:30 *
cmp.b3 24 hr mqc's @ 7;30
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K mqc wafers (2 ordered @ 6:00 am)
� box of 50K breakin wafers (4 lots at dep, should get some during daytime)
Number of product lots in room:
------------------------------
* 15 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* ***** "NEW SPEC/TDCO": PLEASE READ *****
Subj: Documents processed on Thursday, 12/12/96
Document No. Rev Title
----------------------------------------------------------------------------
-
2) HF6O-0069 J Strasbaugh 6DS Chemical/Mechanical
Planarization
6) HF6O-0070 L Speed Fam SMP.V (BMP.B1, CMP.B2
Chemical/Mechanical)
Lots/wafers processed:
---------------------
* xd0569 m1 23 wafers *
jl0624 m1 24 wafers
jd0708 m1 24 wafers
xe0555 m2 24 wafers
xe0598 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
5 STRASBAUGH
4 PLATES F/S
|
| 85.22 | CMP PASSDOWN A SHIFT | FABSIX::J_BLAIS | | Tue Dec 17 1996 19:46 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 mqcs
BREAKIN WAFERS 15 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running JD0735/PMD, JL0691 ILD
CMP.A1 24hr MQCS COMPLETED: 12/17/96 @ 2:00 am
CMP.A1 24hr MQCS NEXT DUE : 12/18/96 @ 2:00 am
CMP.A2 (Strasbaugh 6DS-SP) -up/running JL0752/PMD
CMP.A2 24hr MQCS COMPLETED: 12/17/96 @ 4:30 am
CMP.A2 24hr MQCS NEXT DUE : 12/18/96 @ 4:30 am
CMP.B1 (Speedfam CMP-V) - up/running XD0618/ILD2
CMP.B1 24hr MQCS COMPLETED: 12/17/96 @ 3:30 am
CMP.B1 24hr MQCS NEXT DUE : 12/18/96 @ 3:30 am
CMP.B1 12hr MQCS COMPLETED: 12/17/96 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : NOW
CMP.B2 (Speedfam CMP-V) - up/running JD0646/ILD3, JD0726 ILD1 HOT
CMP.B2 24hr MQCS COMPLETED: 12/17/96 @ 11:54 am
CMP.B2 24hr MQCS NEXT DUE : 12/18/96 @ 11:54 AM
CMP.B2 12hr MQCS COMPLETED: 12/17/96 @ 6:00 PM
CMP.B2 12hr MQCS NEXT DUE : 12/18/96 @ 6:00 am
CMP.B3 (Speedfam CMP-V) - up/running JL0713/ILD1, JL0719/ILD1
CMP.B3 24hr MQCS COMPLETED: 12/17/96 @ 10:54 am
CMP.B3 24hr MQCS NEXT DUE : 12/18/96 @ 10:54 AM
CMP.B3 12hr MQCS COMPLETED: 12/17/96 @ 6:30 am
CMP.B3 12hr MQCS NEXT DUE : NOW
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/17/96 @ 9:15 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/17/96 @ 9:15 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/17/96 @ 9:15 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/17/96 @ 9:15 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/17/96 @ 9:15 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/17/96 @ 9:15 pm
Hot/B lots in area:
__________________
Down Equipment:
--------------
N/A
Scrap lots:
----------
N/A
Hold Lots:
---------
JL0605 ILD1/24 B1
Monitor status:
--------------
2 box of 12K mqc wafers
2 box of 50K breakin wafers
Number of product lots in room:
------------------------------
* 14 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* ***** "NEW SPEC/TDCO": PLEASE READ *****
Subj: Documents processed on Thursday, 12/12/96
Lots/wafers processed:
---------------------
JD0709 ILD1/24
JL0712 ILD1/23
JL0749 PMD/24
JD0667 ILD3/24
XE0609 PMD/24
XE0628 PMD/22
JD0733 PMD/24
JL0716 ILD1/24
JL0717 ILD1/23
XD0622 ILD2/19 B2 HOT
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM
5 STRASBAUGH
4 PLATES F/S
|
| 85.23 | A-shift CMP passdown 12/18/96 | FABSIX::J_SADIN | Freedom isn't free. | Wed Dec 18 1996 19:27 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running 2nd set of mqcs on new
pad/carriers.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0734 (pmd) and JD0730 (pmd).
CMP.A2 24hr MQCS COMPLETED: 11am 12/18
CMP.A2 24hr MQCS NEXT DUE : 11am 12/19
CMP.B1 (Speedfam CMP-V) - RUNNING: JL0721 (m1).
CMP.B1 24hr MQCS COMPLETED: 6am 12/18
CMP.B1 24hr MQCS NEXT DUE : 6am 12/19
CMP.B1 12hr MQCS COMPLETED: 6pm 12/18
CMP.B1 12hr MQCS NEXT DUE : 6am 12/19
CMP.B2 (Speedfam CMP-V) - RUNNING: JL0700 (m2).
CMP.B2 24hr MQCS COMPLETED: 7:30pm 12/18
CMP.B2 24hr MQCS NEXT DUE : 7:30pm 12/19
CMP.B2 12hr MQCS COMPLETED: 7:30pm 12/18
CMP.B2 12hr MQCS NEXT DUE : 7:30am 12/19
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0759 (m1) and JD0615 (m3).
CMP.B3 24hr MQCS COMPLETED: 7:30pm 12/18
CMP.B3 24hr MQCS NEXT DUE : 7:30pm 12/19
CMP.B3 12hr MQCS COMPLETED: 7:30pm 12/18
CMP.B3 12hr MQCS NEXT DUE : 7:30am 12/19
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 12/18
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 12/18
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 12/18
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 12/18
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 12/18
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 12/18
Hot/B lots in area:
__________________
JD0730 - PMD
XD0759 - M1
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC AFTER PAD/CARRIER CHANGE
Scrap lots:
----------
JL0696A - m1 (scrapped out from a few days ago. 8 wafers were split off
from the mother lot JL0696 and scrapped for overpolish. Lot was just
scrapped today).
Hold Lots:
---------
* none *
Monitor status:
--------------
1/2 box of 12K mqc wafers (more on order)
0 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
13
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0730 - PMD - 24WFRS
JD0735 - PMD - 24
JL0605 - M1 - 24
JD0664 - M3 - 21
JD0646 - M3 - 23
JL0714 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
??????
SAMMY WAS IN TODAY. LOOK IN CARRIER REBUILD ROOM.
|
| 85.24 | PASSDOWN CMP B-SHIFT 12/22/96 | FABSIX::M_PROVENCHER | | Sun Dec 22 1996 06:53 | 131 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 mqcs
BREAKIN WAFERS 32 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running jl0837 m1(hotlot)
CMP.A1 24hr MQCS COMPLETED: 12/22/96 @ 4:00 am
CMP.A1 24hr MQCS NEXT DUE : 12/22/96 @ 4:00 am
CMP.A2 (Strasbaugh 6DS-SP) -up running jd0838 pmd(hotlot)
CMP.A2 24hr MQCS COMPLETED: 12/21/96 @ 11:00 am
CMP.A2 24hr MQCS NEXT DUE : 12/22/96 @ 11:00 am
CMP.B1 (Speedfam CMP-V) - up/running jd0683 m3 (hotlot)/jd0686 m3
CMP.B1 24hr MQCS COMPLETED: 12/22/96 @ 2:00 am
CMP.B1 24hr MQCS NEXT DUE : 12/23/96 @ 2:00 am
CMP.B1 12hr MQCS COMPLETED: 12/23/96 @ 2:00 am
CMP.B1 12hr MQCS NEXT DUE : 12/23/96 @ 2:00 pm
CMP.B2 (Speedfam CMP-V) - up/mqc (both 1st and 2nd pads, and carrier were
changed, due to exceeded wafer counts on
all)
CMP.B2 24hr MQCS COMPLETED: in process
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - up/mqc (back from speedfam boys)
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/22/96 @ 6:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/22/96 @ 6:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/running jd0740 pmd
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/22/96 @ 6:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/22/96 @ 6:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/22/96 @ 6:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/22/96 @ 6:00 pm
Hot/B lots in area:
__________________
* jd0838 pmd (a2) *
jl0837 m1 (a1)
jd0863 m3 (b1)
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xb0634 sti lot 1.65 days *
xd0633 m1 (hold) 2.86 days
Down Equipment:
--------------
* cmp.b2 in mqc after pad/carrier change *
cmp.b3 in mqc after speedfam
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xb0634 sti lot *
xd0633 m1
Monitor status:
--------------
� box of 12K mqc wafers (2 ordered @ 10:00 pm)
0 boxes of 50K breakin wafers (2 ordered @ 10:00 pm)
Number of product lots in room:
------------------------------
* 7 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* ***** "NEW SPEC/TDCO": PLEASE READ *****
Subj: Documents processed on Thursday, 12/12/96
Document No. Rev Title
----------------------------------------------------------------------------
-
2) HF6O-0069 J Strasbaugh 6DS Chemical/Mechanical
Planarization
6) HF6O-0070 L Speed Fam SMP.V (BMP.B1, CMP.B2
Chemical/Mechanical)
Lots/wafers processed:
---------------------
* jdo740 pmd 24 wafers
xd0632 m1 21 wafers
jl0698 m2 24 wafers
jd0652 m3 22 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 85.25 | PASSDOWN CMP A SHIFT | FABSIX::J_BLAIS | | Sun Dec 22 1996 19:27 | 109 |
| CMP A SHIFT J_BLAIS
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 19 mqcs
BREAKIN WAFERS 00 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running JD0732 PMD/23
CMP.A1 24hr MQCS COMPLETED: 12/22/96 @ 5:00 PM
CMP.A1 24hr MQCS NEXT DUE : 12/23/96 @ 5:00 PM
CMP.A2 (Strasbaugh 6DS-SP) -up running JD0731 PMD/24,
CMP.A2 24hr MQCS COMPLETED: 12/22/96 @ 5:04 PM
CMP.A2 24hr MQCS NEXT DUE : 12/23/96 @ 5:04 PM
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B1 24hr MQCS COMPLETED: 12/22/96 @ 2:00 am
CMP.B1 24hr MQCS NEXT DUE : 12/23/96 @ 2:00 am
CMP.B1 12hr MQCS COMPLETED: 12/22/96 @ 2:00 AM
CMP.B1 12hr MQCS NEXT DUE : 12/23/96 @ 2:00 pm
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD0689 ILD3/24, JD0681 ILD2 24
CMP.B2 24hr MQCS COMPLETED: 12/22/96 @ 9:55 AM
CMP.B2 24hr MQCS NEXT DUE : 12/23/96 @ 9:55 AM
CMP.B3 12hr MQCS COMPLETED: 12/22/96 @ 7:30 PM
CMP.B2 12hr MQCS NEXT DUE : 12/23/96 @ 7:30 AM
CMP.B3 (Speedfam CMP-V) - up/RUNNING JL0720 ILD1/24, JD0738 ILD1/24
CMP.B3 24hr MQCS COMPLETED: 12/22/96 @ 11:37 AM
CMP.B3 24hr MQCS NEXT DUE : 12/23/96 @ 11:37 AM
CMP.B3 12hr MQCS COMPLETED: 12/22/96 @ 7:30 PM
CMP.B3 12hr MQCS NEXT DUE : 12/23/96 @ 7:30 AM
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/22/96 @ 12:23 PM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/23/96 @ 12:23 AM
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/22/96 @ 12:23 PM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/23/96 @ 12:23 AM
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/22/96 @ 12:23 PM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/23/96 @ 12:23 AM
Hot/B lots in area:
__________________
na
Hot lots coming to area:
-----------------------
na
Down Equipment:
--------------
None
Hold Lots:
---------
xb0634 sti lot
xd0633 m1 NOTE NEEDS SPECIAL POLISH
Monitor status:
--------------
2 boxe(s) of 12K mqc wafers
0 boxe(s) of 50K breakin wafers, on order.
Number of product lots in room:
------------------------------
15 lots @ time of send out.
New specs/revs posted:
---------------------
***** "NEW SPEC/TDCO": PLEASE READ *****
Lots/wafers processed:
---------------------
Jl0837 ILD1/6 (hotlot)
JD0838 PMD/12 (hotlot)
JD0652 ILD3/22
JD0740 PMD/24
JD0838A ILD/5 (ROCKET LOT)
JD0683 ILD3/21 HOT LOT
jd0686 ILD3/23
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM
9 STRASBAUGH
2 PLATES F/S
|
| 85.26 | passdown cmp b-shift 12/23/96 | FABSIX::M_PROVENCHER | | Mon Dec 23 1996 06:01 | 126 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 mqcs
BREAKIN WAFERS 33 misc
CMP.A1 (Strasbaugh 6DS-SP) -down to maint/(jd0729 pmd/jl0754 pmd on tool)
CMP.A1 24hr MQCS COMPLETED: 12/22/96 @ 5:00 pm
CMP.A1 24hr MQCS NEXT DUE : 12/23/96 @ 5:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -up running jl0769 pmd/jl0770 pmd
CMP.A2 24hr MQCS COMPLETED: 12/22/96 @ 5:00 pm
CMP.A2 24hr MQCS NEXT DUE : 12/23/96 @ 5:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jd0689 m3/
CMP.B1 24hr MQCS COMPLETED: 12/23/96 @ 7:30 am
CMP.B1 24hr MQCS NEXT DUE : 12/24/96 @ 7:30 am
CMP.B1 12hr MQCS COMPLETED: 12/23/96 @ 4:30 am
CMP.B1 12hr MQCS NEXT DUE : 12/23/96 @ 4:30 pm
CMP.B2 (Speedfam CMP-V) - up/idle
CMP.B2 24hr MQCS COMPLETED: 12/23/96 @ 5:00 am
CMP.B2 24hr MQCS NEXT DUE : 12/24/96 @ 5:00 am
CMP.B2 12hr MQCS COMPLETED: 12/23/96 @ 5:00 am
CMP.B2 12hr MQCS NEXT DUE : 12/23/96 @ 5:00 pm
CMP.B3 (Speedfam CMP-V) - up/running jl0720 m1/
CMP.B3 24hr MQCS COMPLETED: 12/22/96 @ 11:30 am
CMP.B3 24hr MQCS NEXT DUE : 12/23/95 @ 11:30 am
CMP.B3 12hr MQCS COMPLETED: 12/23/96 @ 7:30 am
CMP.B3 12hr MQCS NEXT DUE : 12/23/96 @ 7:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/23/96 @ 6:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/23/96 @ 6:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/23/96 @ 6:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/23/96 @ 6:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/23/96 @ 6:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/23/96 @ 6:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xb0634 sti lot 2.65 days *
xd0633 m1 (hold) 3.86 days
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xb0634 sti lot *
xd0633 m1
Monitor status:
--------------
2 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 20 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* ***** "NEW SPEC/TDCO": PLEASE READ *****
Subj: Documents processed on Thursday, 12/12/96
Document No. Rev Title
----------------------------------------------------------------------------
-
2) HF6O-0069 J Strasbaugh 6DS Chemical/Mechanical
Planarization
6) HF6O-0070 L Speed Fam SMP.V (BMP.B1, CMP.B2
Chemical/Mechanical)
Lots/wafers processed:
---------------------
* jd0736 pmd 21 wafers *
jd0731 pmd 24 wafers
jd0738 m1 24 wafers
jd0681 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM
9 STRASBAUGH
2 PLATES F/S
|
| 85.27 | A-shift CMP passdown 12/23/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Dec 23 1996 19:55 | 116 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0633 (m1).
CMP.A1 24hr MQCS COMPLETED: 5pm 12/23
CMP.A1 24hr MQCS NEXT DUE : 5pm 12/24
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0773 (pmd) and JL0771 (m1).
CMP.A2 24hr MQCS COMPLETED: 5pm 12/22
CMP.A2 24hr MQCS NEXT DUE : 5pm 12/23
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B1 24hr MQCS COMPLETED: 2am 12/22
CMP.B1 24hr MQCS NEXT DUE : now
CMP.B1 12hr MQCS COMPLETED: 6am 12/23
CMP.B1 12hr MQCS NEXT DUE : now
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B2 24hr MQCS COMPLETED: 5am 12/23
CMP.B2 24hr MQCS NEXT DUE : 5am 12/24
CMP.B2 12hr MQCS COMPLETED: 8am 12/23
CMP.B2 12hr MQCS NEXT DUE : 8pm 12/23
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0742 (m1).
CMP.B3 24hr MQCS COMPLETED: 1pm 12/23
CMP.B3 24hr MQCS NEXT DUE : 1pm 12/24
CMP.B3 12hr MQCS COMPLETED: 9am 12/23
CMP.B3 12hr MQCS NEXT DUE : 9pm 12/23
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 12/23
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 12/23
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 12/23
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 12/23
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 12/23
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 12/23
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0364 - 3.1 (STI LOT)
XD0633 - 4.4 (M1 LOT)
JD0682 - 1.2 (STEP M1)
XD0626 - 0.9 (STEP M1)
JL0624 - 1.1 (M2 LOT)
XD0590 - 0.8 (M3 LOT)
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0633 - hold for engineering splits
XB0634 - sti. hold for eng.
Monitor status:
--------------
7 boxes of 12K mqc wafers
6 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
23
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0754 - PMD - 24WFRS
JL0770 - PMD - 24
JL0773 - PMD - 24
JD0707 - M2 - 22
JD0688 - M2 - 23
JD0689 - M3 - 24
JL0742 - M1 - 24
JL0723 - M1 - 24
JL0720 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
??????????????
|
| 85.28 | passdown cmp b-shift 12/24/96 | FABSIX::M_PROVENCHER | | Tue Dec 24 1996 06:24 | 131 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) -up/running xe0600 pmd/jl0772 pmd
CMP.A1 24hr MQCS COMPLETED: 12/23/96 @ 5:00 pm
CMP.A1 24hr MQCS NEXT DUE : 12/24/96 @ 5:00 pm
CMP.A2 (Strasbaugh 6DS-SP) -running jd0765 pmd
CMP.A2 24hr MQCS COMPLETED: 12/22/96 @ 5:00 pm
CMP.A2 24hr MQCS NEXT DUE : 12/23/96 @ 5:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jd0838a (ROCKET LOT) m3
(xd0591 m3/xd0598 m3 placed on the back
burner for rocket lot)
CMP.B1 24hr MQCS COMPLETED: 12/24/96 @ 5:00 am
CMP.B1 24hr MQCS NEXT DUE : 12/25/96 @ 5:00 am
CMP.B1 12hr MQCS COMPLETED: 12/23/96 @ 10:00 pm
CMP.B1 12hr MQCS NEXT DUE : 12/23/96 @ 10:00 pm
CMP.B2 (Speedfam CMP-V) - up/jl0743 m1/jl0701 m2 went down at 2am due to a
crash up at 6am
CMP.B2 24hr MQCS COMPLETED: 12/24/96 @ 6:00 am
CMP.B2 24hr MQCS NEXT DUE : 12/25/96 @ 6:00 am
CMP.B2 12hr MQCS COMPLETED: 12/24/96 @ 10:00 pm
CMP.B2 12hr MQCS NEXT DUE : 12/24/96 @ 10:00 am
CMP.B3 (Speedfam CMP-V) - up/running jl0624 m2/xd0626 m1
CMP.B3 24hr MQCS COMPLETED: 12/24/96 @ 1:00 am
CMP.B3 24hr MQCS NEXT DUE : 12/25/95 @ 1:00 am
CMP.B3 12hr MQCS COMPLETED: 12/24/96 @ 1:00 am
CMP.B3 12hr MQCS NEXT DUE : 12/24/96 @ 1:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/24/96 @ 6:30 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/24/96 @ 6:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/24/96 @ 6:30 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/24/96 @ 6:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/24/96 @ 6:30 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/24/96 @ 6:30 pm
Hot/B lots in area:
__________________
* jd0838a m3 rocket lot *
jl0837 m2
jd0730 m2
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xb0634 sti lot 3.55 days *
xd0633 m1 (hold) 4.86 days
Down Equipment:
--------------
* none *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* xb0634 sti lot *
xd0633 m1
Monitor status:
--------------
6 boxes of 12K mqc wafers
4� boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 22 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* ***** "NEW SPEC/TDCO": PLEASE READ *****
Subj: Documents processed on Thursday, 12/12/96
Document No. Rev Title
----------------------------------------------------------------------------
-
2) HF6O-0069 J Strasbaugh 6DS Chemical/Mechanical
Planarization
6) HF6O-0070 L Speed Fam SMP.V (BMP.B1, CMP.B2
Chemical/Mechanical)
Lots/wafers processed:
---------------------
* jl0773 pmd 24 wafers *
jl0711 pmd 24 wafers
jd0729 pmd 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM
8 STRASBAUGH
2 PLATES F/S
|
| 85.29 | CMP C-SHIFT PD 12/26/96 | FABSIX::E_DAWSON | | Thu Dec 26 1996 19:38 | 50 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING 1 - JD0702 ILD2 DC0126 RUNNING 6 MINS,
WILL NEED SCRUB & 100%
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING 2 - JD0682 ILD1 DC1026 100% ON THICK.A4
NEEDS T-UPS
JL0747 ILD1 DC1064 RUNNING 6 MINS
NEEDS SCRUB & 100% & T-UPS
CMP.B1 (Speedfam CMP-V) - RUNNING 2 - JL0701 ILD2 DC1040, 100% ON THICK.A4
JL0710 ILD1 DC1026, 100% ON THICK.A4
BOTH LOTS NEED T-UPS
CMP.B2 (Speedfam CMP-V) - RUNNING 2 - "HOT LOT" XD0632 ILD3 100% ON THICK.A4 &
XE0598 ILD3 100% ON THICK.A5, BOTH
NEED TOUCH UP.
CMP.B3 (Speedfam CMP-V) - VERIFY-U - CARRIER #2 & 5 WHERE REPLACED FOR UNF.
& RR ISSUES. DOWN FORCED CALD. AND MQC'S RUN
, OFFSETS ENTERED, MQC'S TO BE RE-RUN.
*** ANNOTATION #'S 842,848,857,877,878,879,880 ARE ALL OPEN
AGAINST CMP.B3.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Hot/B lots in area: 1 Lots in CMP: 21
------------------ -----------
XD0623 ILD3 TM69...B2
Lots Shiped: ? New SPEC/TDCO: "YES"
----------- -------------
SPEEDFAM...PLEASE READ
Down Equipment: Carriers:
-------------- --------
CMP.B3 See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
Misc.
----
|
| 85.30 | PASSDOWN CMP B-SHIFT 12/29/96 | FABSIX::M_PROVENCHER | | Sun Dec 29 1996 06:08 | 118 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 18 mqcs
BREAKIN WAFERS 42 misc
CMP.A1 (Strasbaugh 6DS-SP) -down to maint/robot problems (down all night)
CMP.A1 24hr MQCS COMPLETED: 12/23/96 @ 5:00 pm
CMP.A1 24hr MQCS NEXT DUE : when tool comes up
CMP.A2 (Strasbaugh 6DS-SP) -up/mqc failed for uniformity on its 24 hr mqc's
pad was changed, and breakin/mqc's in process
(tool went down at 3:30 am,breakins started 5:00
am).
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/running xe0615 m2/jd0729 m1 (hotlot)
CMP.B1 24hr MQCS COMPLETED: 12/28/96 @ 7:00 am
CMP.B1 24hr MQCS NEXT DUE : 12/29/96 @ 7:00 am
CMP.B1 12hr MQCS COMPLETED: 12/23/96 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 12/23/96 @ 9:00 am
CMP.B2 (Speedfam CMP-V) - up/running jl0714 m2/xd0569 m2
CMP.B2 24hr MQCS COMPLETED: 12/28/96 @ 3:00 pm
CMP.B2 24hr MQCS NEXT DUE : 12/29/96 @ 3:00 pm
CMP.B2 12hr MQCS COMPLETED: 12/28/96 @ 9:00 pm
CMP.B2 12hr MQCS NEXT DUE : 12/29/96 @ 9:00 am
CMP.B3 (Speedfam CMP-V) - up/running jl0691 m2/jl0696 m2
CMP.B3 24hr MQCS COMPLETED: 12/28/96 @ 9:30 am
CMP.B3 24hr MQCS NEXT DUE : 12/29/95 @ 9:30 am
CMP.B3 12hr MQCS COMPLETED: 12/28/96 @ 7:00 pm
CMP.B3 12hr MQCS NEXT DUE : 12/29/96 @ 7:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/28/96 @ 10:30 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/29/96 @ 10:30 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/28/96 @ 10:30 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/29/96 @ 10:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/28/96 @ 10:30 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/29/96 @ 10:30 am
Hot/B lots in area:
__________________
* jd0729 m1 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* jl0605 ild2 1.48 days *
xd0590 ild4 6.27 days
Down Equipment:
--------------
* cmp.a1 *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* jl0605 ild2 on hold for frank k. *
xd0590 ild4 on hold for eric b.
Monitor status:
--------------
4 boxes of 12K mqc wafers
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 8 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed:
---------------------
* jd0762 pmd 24 wafers *
jd0735 m1 24 wafers
xe0608 m3 22 wafers
jd0730 m3 23 wafers (hotlot)
# of carriers for strasbaugh/speedfam:
--------------------------------------
15 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 85.31 | A-shift CMP passdown 12/29/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Dec 29 1996 19:42 | 116 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: computer problems. Rep called in.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0722 (m2).
CMP.A2 24hr MQCS COMPLETED: 7am 12/29
CMP.A2 24hr MQCS NEXT DUE : 7am 12/30
CMP.B1 (Speedfam CMP-V) - RUNNING: JL0721 (m2) and JD0838B (m3).
CMP.B1 24hr MQCS COMPLETED: 7am 12/29
CMP.B1 24hr MQCS NEXT DUE : 7am 12/30
CMP.B1 12hr MQCS COMPLETED: 7pm 12/29
CMP.B1 12hr MQCS NEXT DUE : 7am 12/30
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B2 24hr MQCS COMPLETED: 6pm 12/29
CMP.B2 24hr MQCS NEXT DUE : 6pm 12/30
CMP.B2 12hr MQCS COMPLETED: 7pm 12/29
CMP.B2 12hr MQCS NEXT DUE : 7am 12/30
CMP.B3 (Speedfam CMP-V) - DOWN: begin repair after wafer crash. New
pad/carriers being installed.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11am 12/29
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11pm 12/29
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 11am 12/29
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 11pm 12/29
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 11am 12/29
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11pm 12/29
Hot/B lots in area:
__________________
JD0838B - ILD3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0590 - 6.8DAYS
JL0605 - 2.0DAYS
Down Equipment:
--------------
CMP.A1 - DOWN FOR COMPUTER PROBLEMS
CMP.B3 - DOWN AFTER WAFER CRASH
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0590 - HOLD FOR ERIC B
JL0605 - HOLD FOR FRANK K
Monitor status:
--------------
4.5 boxes of 12K mqc wafers
2.5 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0750 - M1 - 24WFRS
XE0615 - M2 - 23
JL0714 - M2 - 24
XD0569 - M2 - 23
XM0630 - M1 - 24
JD0734 - M1 - 23
JD0729 - M1 - 24
JL0696 - M2 - 16
JL0691 - M2 - 21
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 85.32 | passdown cmp b-shift 12/30/96 | FABSIX::M_PROVENCHER | | Mon Dec 30 1996 05:23 | 120 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 18 mqcs
BREAKIN WAFERS 42 misc
CMP.A1 (Strasbaugh 6DS-SP) -down to maint/computer problems (down all night)
CMP.A1 24hr MQCS COMPLETED: 12/23/96 @ 5:00 pm
CMP.A1 24hr MQCS NEXT DUE : when tool comes up
CMP.A2 (Strasbaugh 6DS-SP) -up/running jd0783 pmd/mqc's after to be run
after 7am
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - up/running jl0753 m1/jd0666 m3 mqc's to follow
CMP.B1 24hr MQCS COMPLETED: 12/29/96 @ 7:00 am
CMP.B1 24hr MQCS NEXT DUE : 12/30/96 @ 7:00 am
CMP.B1 12hr MQCS COMPLETED: 12/30/96 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : 12/31/96 @ 7:00 pm
CMP.B2 (Speedfam CMP-V) - down/(down at 9pm for
crash- 2 sets of mqc's failed one head only.
eeg is looking at a possible wiring problem)
CMP.B2 24hr MQCS COMPLETED: in process when given back to us
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - up/ running jl0768 m1/jd0707 m3
(was down at 8pm-up at 2:00 am)
CMP.B3 24hr MQCS COMPLETED: 12/30/96 @ 2:00 am
CMP.B3 24hr MQCS NEXT DUE : 12/31/95 @ 2:00 am
CMP.B3 12hr MQCS COMPLETED: 12/30/96 @ 2:00 am
CMP.B3 12hr MQCS NEXT DUE : 12/30/96 @ 2:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/29/96 @ 11:30 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/30/96 @ 11:30 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/29/96 @ 11:30 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/30/96 @ 11:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/29/96 @ 11:30 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/30/96 @ 11:30 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* jl0605 ild2 2.48 days *
xd0590 ild4 7.27 days
Down Equipment:
--------------
* cmp.a1 *
cmp.b2
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* jl0605 ild2 on hold for frank k. *
xd0590 ild4 on hold for eric b.
Monitor status:
--------------
4 boxes of 12K mqc wafers
1 boxes of 50K breakin wafers (two on order @ 5:00 am)
Number of product lots in room:
------------------------------
* 8 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed:
---------------------
* jd0784 pmd 24 wafers *
jl0722 m1 24 wafers
jl0721 m2 24 wafers
jd0838b m3 5 wafers (hotlot)
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|
| 85.33 | A-shift CMP passdown 12/30/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Dec 30 1996 19:39 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: down to the rep.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0783 (pmd).
CMP.A2 24hr MQCS COMPLETED: 3pm 12/30
CMP.A2 24hr MQCS NEXT DUE : 3pm 12/31
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0584 (m2) and JL0746 (m1).
CMP.B1 24hr MQCS COMPLETED: 9am 12/30
CMP.B1 24hr MQCS NEXT DUE : 9am 12/31
CMP.B1 12hr MQCS COMPLETED: 9am 12/30
CMP.B1 12hr MQCS NEXT DUE : 9pm 12/30
CMP.B2 (Speedfam CMP-V) - RUNNING: JL0751 (m1) and JD0688 (m3).
CMP.B2 24hr MQCS COMPLETED: 10am 12/30
CMP.B2 24hr MQCS NEXT DUE : 10am 12/31
CMP.B2 12hr MQCS COMPLETED: 10am 12/30
CMP.B2 12hr MQCS NEXT DUE : 10pm 12/31
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0839 (pmd - hotlot).
CMP.B3 24hr MQCS COMPLETED: 2am 12/30
CMP.B3 24hr MQCS NEXT DUE : 2am 12/31
CMP.B3 12hr MQCS COMPLETED: 2am 12/30
CMP.B3 12hr MQCS NEXT DUE : 2pm 12/31
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7pm 12/30
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7am 12/31
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7pm 12/30
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7am 12/31
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7pm 12/30
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7am 12/31
Hot/B lots in area:
__________________
JD0839 - PMD
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0787 - .75DAYS PMD
JD0688 - 1.0DAYS ILD3
Down Equipment:
--------------
CMP.A1 - DOWN TO REP
Scrap lots:
----------
* none *
Hold Lots:
---------
JL0605 - HOLD FOR FRANK K.
XD0590 - HOLD FOR ERIC B.
Monitor status:
--------------
4.5 boxes of 12K mqc wafers
1/2 box of 50K monitor wafers
Number of product lots in room:
------------------------------
21
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0666 - M3 - 19WFRS
JL0753 - M1 - 23
JL0768 - M1 - 24
JD0839 - PMD - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 speedfam
11 strasbaugh
2 plates f/s
|
| 85.34 | padddown cmp.b-shift 12/31/96 happy newyear!!!!! | FABSIX::M_PROVENCHER | | Tue Dec 31 1996 05:27 | 117 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 mqcs
BREAKIN WAFERS 45 misc
CMP.A1 (Strasbaugh 6DS-SP) -down/down to reps (down all night)
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) -up/running xd0781 pmd (at touchup)
CMP.A2 24hr MQCS COMPLETED: 12/30/96 @ 3:00 pm
CMP.A2 24hr MQCS NEXT DUE : 12/31/96 @ 3:00 pm
CMP.B1 (Speedfam CMP-V) - up/running jl0751 m1 (rework lot)
CMP.B1 24hr MQCS COMPLETED: 12/30/96 @ 9:00 am
CMP.B1 24hr MQCS NEXT DUE : 12/31/96 @ 9:00 am
CMP.B1 12hr MQCS COMPLETED: 12/31/96 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : 12/31/96 @ 7:00 pm
CMP.B2 (Speedfam CMP-V) - dn/crash down to maint
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - up/idle
CMP.B3 24hr MQCS COMPLETED: 12/30/96 @ 2:30 am
CMP.B3 24hr MQCS NEXT DUE : 12/31/95 @ 2:30 am
CMP.B3 12hr MQCS COMPLETED: 12/30/96 @ 11:00 am
CMP.B3 12hr MQCS NEXT DUE : 12/31/96 @ 11:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 12/31/96 @ 7:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 12/31/96 @ 7:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12/31/96 @ 7:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12/31/96 @ 7:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12/31/96 @ 7:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12/31/96 @ 7:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* jd0787 pmd *
jd0688 ild3
Down Equipment:
--------------
* cmp.a1 down to reps *
Open annotations:
lot#/tool/ooc#
----------------
* none *
Scrap lots:
----------
* jd0688 4 wafers *
Hold Lots:
---------
* jl0605 ild2 on hold for frank k. *
xd0590 ild4 on hold for eric b.
Monitor status:
--------------
4 boxes of 12K mqc wafers
1 boxes of 50K breakin wafers (two on order @ 5:00 am)
Number of product lots in room:
------------------------------
* 12 lots (when this passdown was sent out) *
New specs/revs posted:
---------------------
* None *
Lots/wafers processed
--------------------
* jd0763 pmd 23 wafers *
jd0787 pmd 24 wafers
jl0746 m1 24 wafers
xd0584 m2 23 wafers
jd0707 m3 22 wafers
jd0688 m3 19 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 SPEEDFAM
11 STRASBAUGH
2 PLATES F/S
|