| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 34.2 | bug on B2 | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 18 1996 09:24 | 28 |
|
SPEEDFAM CMPV
BUG/WISH FORM
PLEASE FILL IN YOUR SOFTWARE SUGGESTIONS AND E-MAIL TO SPEEDFAM AT
SUBPAC::CMP AND POST IN CMP NOTE FILE 23.L
YOUR NAME AND E-MAIL ADDRESS: SUBPAC::BJUBINVILLE
DATE: 4/18/96 TOOL #(B1,B2): B2 SOFTWARE VERSION: SPEED493?
IS THIS A BUG OR A WISH? BUG SCREEN #________________
DETAILS
-------
The index table/flippers don't load or unload
until the polish segments are completely finished
and the heads lift off the table. Usually it waits
until touch-down then everything starts to move. The
carriers/wafers sit there until all of the moves are
done on the index table with slurry dripping off them
and drying up.
|
| 34.1 | SOFTWARE BUG/WISH LIST | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 18 1996 22:26 | 22 |
|
SPEEDFAM CMPV
BUG/WISH FORM
PLEASE FILL IN YOUR SOFTWARE SUGGESTIONS AND E-MAIL TO SPEEDFAM AT
SUBPAC::CMP AND POST IN CMP NOTE FILE 32.L
YOUR NAME AND E-MAIL ADDRESS____________________________________________
DATE_______________ TOOL #(B1,B2)______ SOFTWARE VERSION: SPEED____
IS THIS A BUG OR A WISH?___________________ SCREEN #________________
DETAILS
-------
|
| 34.3 | Another bug | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Thu Apr 18 1996 22:30 | 23 |
|
SPEEDFAM CMPV
BUG/WISH FORM
PLEASE FILL IN YOUR SOFTWARE SUGGESTIONS AND E-MAIL TO SPEEDFAM AT
SUBPAC::CMP AND POST IN CMP NOTE FILE 23.L
YOUR NAME AND E-MAIL ADDRESS: SUBPAC::BJUBINVILLE
DATE: 4/18/96 TOOL #(B1,B2): B2 SOFTWARE VERSION: SPEED492
IS THIS A BUG OR A WISH? BUG SCREEN #________________
DETAILS
-------
You are suppose to be able to have the power to take
either elevator off-line and still run the tool with one
elevator however: If you take either one off-line, the tool
thinks both are off-line and won't let you start a run.
|
| 34.4 | DI spray bug | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Apr 19 1996 08:27 | 24 |
|
SPEEDFAM CMPV
BUG/WISH FORM
PLEASE FILL IN YOUR SOFTWARE SUGGESTIONS AND E-MAIL TO SPEEDFAM AT
SUBPAC::CMP AND POST IN CMP NOTE FILE 23.L
YOUR NAME AND E-MAIL ADDRESS: SUBPAC::BJUBINVILLE
DATE: 4/18/96 TOOL #(B1,B2): B1 and B2 SOFTWARE VERSION: SPEED492
IS THIS A BUG OR A WISH? BUG SCREEN #________________
DETAILS
------- When you are working on the pad, you keep the carriers
rotating and the spray rinsing on them. If you quit out
to move the multihead, the rotation stops but the spray
stays on and soaks the underside of the multihead if someone
forgets to shut it off before it goes. Have the rinse
shut-off with the rotation as a safety concern as it can
take out the wafer detect sensors.
|
| 34.5 | Not a bug this time.... | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Sat Apr 20 1996 08:15 | 24 |
|
SPEEDFAM CMPV
BUG/WISH FORM
PLEASE FILL IN YOUR SOFTWARE SUGGESTIONS AND E-MAIL TO SPEEDFAM AT
SUBPAC::CMP AND POST IN CMP NOTE FILE 32.L
YOUR NAME AND E-MAIL ADDRESS: SUBPAC::BJUBINVILLE
DATE: 4/20/96 TOOL #(B1,B2): B1 and B2 SOFTWARE VERSION: SPEED492
IS THIS A BUG OR A WISH? wish SCREEN #________________
DETAILS
------- Have the tool automatically go into WET MODE after a
run has completed......
For example: the case of the fab dump this morning,
the tool was still running wafers when OPS had to exit.
The tool sat out of wet idle until they could go back
into the fab resulting in pad changes.
|
| 34.6 | Polished wafers twices. | FABSIX::R_GEE | | Sun Apr 21 1996 08:05 | 27 |
| SPEEDFAM CMPV
BUG/WISH FORM
PLEASE FILL IN YOUR SOFTWARE SUGGESTIONS AND E-MAIL TO SPEEDFAM AT
SUBPAC::CMP AND POST IN CMP NOTE FILE 32.L
YOUR NAME AND E-MAIL ADDRESS__fabsix::r_gee
DATE___4/21/96______ TOOL #(B1,B2)______ SOFTWARE VERSION: SPEED492_
IS THIS A BUG OR A WISH?__"A MUST"__ SCREEN #________________
DETAILS
-------
This problem occurs when the system errors for something during
the polish cycle. The system will finish polishing and stop,
waiting for the error to be cleared, then it asks to push any
button to continue. When a button is pushed the system will
polish the five wafers on the multihead a second time. The
five wafers are then over polished and most likely scrap.
Refer to note 19.149 for more details.
|
| 34.7 | 2nd table issue | SUBPAC::BJUBINVILLE | CMP-6 Equipment Engineering | Wed Jun 26 1996 23:13 | 21 |
|
SPEEDFAM CMPV
BUG/WISH FORM
PLEASE FILL IN YOUR SOFTWARE SUGGESTIONS AND E-MAIL TO SPEEDFAM AT
SUBPAC::CMP AND POST IN CMP NOTE FILE 23.L
YOUR NAME AND E-MAIL ADDRESS: SUBPAC::BJUBINVILLE
DATE: 6/26/96 TOOL #(B1,B2): B3 SOFTWARE VERSION: SPEED493
IS THIS A BUG OR A WISH? BUG? SCREEN # during polish segments
DETAILS
------- While tool is polishing wafers on the main table, the
2nd table stays rotating and without any water on it.
Centrifical force from the rotation is causing the
table to table to dry out.
|
| 34.8 | Mapper Error Message/ Sugested Improvement | STRATA::SWENSON | | Thu Jul 18 1996 20:29 | 25 |
|
SPEEDFAM CMPV
BUG/WISH FORM
PLEASE FILL IN YOUR SOFTWARE SUGGESTIONS AND E-MAIL TO SPEEDFAM AT
SUBPAC::CMP AND POST IN CMP NOTE FILE 32.L
YOUR NAME AND E-MAIL ADDRESS C-Shift
DATE 7/18/96 TOOL #(B1,B2,B3) SOFTWARE VERSION: SPEED C
IS THIS A BUG OR A WISH? Wish SCREEN # map cassette screen
DETAILS
-------
Display reads "Mapper Error" (Highlighted Yellow): When a cross slotted wafer
or empty cassette is present after mapping.
Wish error message would read "Check for Missing Wafers/Cross Slotted Wafers"
in addition to "Mapper Error".
|
| 34.9 | clear button. | STRATA::RIDLON | Eliminate the obvious | Sun Sep 08 1996 02:22 | 22 |
|
SPEEDFAM CMPV
BUG/WISH FORM
PLEASE FILL IN YOUR SOFTWARE SUGGESTIONS AND E-MAIL TO SPEEDFAM AT
SUBPAC::CMP AND POST IN CMP NOTE FILE 32.L
YOUR NAME AND E-MAIL ADDRESS: Mitch Ridlon, Scoman::Ridlon
DATE: 9/8/96 TOOL #(B1,B2) ALL SOFTWARE VERSION: SPEED493c
IS THIS A BUG OR A WISH? Depends on your point of view. SCREEN # 5.21
DETAILS
-------
It would be nice to be able to clear the wafer track screen
with out having to reset the cpu.
|