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Conference asdg::cmp

Title:	CMP
Notice:	Welcome to the CMP notesfile
Moderator:	FABSIX::B_TOWERLLE

Created:	Tue Oct 31 1995
Last Modified:	Fri Jun 06 1997
Last Successful Update:	Fri Jun 06 1997
Number of topics:	94
Total number of notes:	6381

40.0. "CMP.D-7 PM TEMPLATES" by SUBPAC::BJUBINVILLE (CMP-6 Equipment Engineering) Mon Dec 30 1996 14:40

    
    
         This topic is designated for the PM Templates for CMP.D1-7.

T.R Title User Personal
Name Date Lines

40.1 Roller arm adjustment SUBPAC::BJUBINVILLE CMP Equipment Engineering Fri Mar 21 1997 06:24 9

T.R	Title	User	Personal Name	Date	Lines
40.1	Roller arm adjustment	SUBPAC::BJUBINVILLE	CMP Equipment Engineering	`Fri Mar 21 1997 06:24`	9
	The tool kept alarming for timing out waiting for the wafer at spin. The roller arms in the inside brush station weren't opening properly to release the wafers all of the way. They just needed to be tweaked. D shift

           The tool kept alarming for timing out waiting for
       the wafer at spin.  The roller arms in the inside brush
       station weren't opening properly to release the wafers
       all of the way.  They just needed to be tweaked.

                                               D shift