| APPLICATION: cmpgeneric. (Developed with DECtree V3.0A)
Fri Mar 28 10:10:18 1997
MESSAGE: Welcome to the CMP Generic Fab6 Dectree
for SPC failures! You will be asked a
series of questions and given suggested
general actions to help troubleshoot the
failure and provide corrective action.
Use the arrows and return keys to move
through the menus, and CTRL-B to backup.
CTRL-Z quits.
INPUT:
PROMPT: Was the data mis-entered?
CHOICE: NO
INPUT:
PROMPT: Does the SPC chart have the wrong
limits or rules turned on?
CHOICE: NO
INPUT:
PROMPT: What type of SPC failure happened?
CHOICE: Other MQCs(Polish Rate/Nonuniformity)
INPUT:
PROMPT: Is the processing tool due for a PM,
clean, pad change, or other routinely
scheduled maintenance?
CHOICE: No
MESSAGE: Repeat MQC after processing
additional exercise wafers.
++ BACKUP One Step
MESSAGE: Repeat MQC after processing
additional exercise wafers.
++ BACKUP One Step
INPUT:
PROMPT: Is the processing tool due for a PM,
clean, pad change, or other routinely
scheduled maintenance?
CHOICE: No
MESSAGE: Repeat MQC after processing
additional exercise wafers.
++ BACKUP One Step
INPUT:
PROMPT: Is the processing tool due for a PM,
clean, pad change, or other routinely
scheduled maintenance?
CHOICE: No
MESSAGE: Repeat MQC after processing
additional exercise wafers.
++ BACKUP One Step
MESSAGE: Repeat MQC after processing
additional exercise wafers.
++ BACKUP One Step++ BACKUP One Step++ BACKUP One Step++ BACKUP One Step++ BACKUP One Step
MESSAGE: Welcome to the CMP Generic Fab6 Dectree
for SPC failures! You will be asked a
series of questions and given suggested
general actions to help troubleshoot the
failure and provide corrective action.
Use the arrows and return keys to move
through the menus, and CTRL-B to backup.
CTRL-Z quits.
INPUT:
PROMPT: Was the data mis-entered?
CHOICE: NO
INPUT:
PROMPT: Does the SPC chart have the wrong
limits or rules turned on?
CHOICE: NO
|
| APPLICATION: cmpgeneric. (Developed with DECtree V3.0A)
Fri Mar 28 10:12:39 1997
MESSAGE: Welcome to the CMP Generic Fab6 Dectree
for SPC failures! You will be asked a
series of questions and given suggested
general actions to help troubleshoot the
failure and provide corrective action.
Use the arrows and return keys to move
through the menus, and CTRL-B to backup.
CTRL-Z quits.
INPUT:
PROMPT: Was the data mis-entered?
CHOICE: NO
INPUT:
PROMPT: Does the SPC chart have the wrong
limits or rules turned on?
CHOICE: NO
INPUT:
PROMPT: What type of SPC failure happened?
CHOICE: Product Chart
INPUT:
PROMPT: Did the lot(s) that flagged have splits
at this or other operations that could
affect this SPC entry?
CHOICE: NO
MESSAGE: Verify that the correct metrology recipe was
used to measure the lot.
INPUT:
PROMPT: Was the wrong measurement recipe used?
CHOICE: NO
INPUT:
PROMPT: Were there Pre and POST readings done
on this lot?
CHOICE: YES
INPUT:
PROMPT: Were the pre readings typical for this
device?
CHOICE: YES
INPUT:
PROMPT: Does the measurement program read the
wafer in the correct spot?
CHOICE: YES
MESSAGE: Run SPC and look up the spc chart
that failed. Check to see if any other
lots failed the same SPC chart on the
same processing tool in the last 3 days
or if the process is trending.
INPUT:
PROMPT: Is there a process trend for this
device on this processing tool?
CHOICE: NO
MESSAGE: Check the MQC SPC charts for the processing
tool. Verify that MQC's were run and are in spec.
INPUT:
PROMPT: Are MQC's out of spec or showing a trend
on this tool?
CHOICE: NO
MESSAGE: Check that the wafers have the
correct lot number, are at the correct
workstream operation, and were run on
the correct process recipe.
INPUT:
PROMPT: Was the correct lot run, at the correct operation,
with the correct processing recipe?
CHOICE: YES
INPUT:
PROMPT: Does the process recipe agree with the spec?
CHOICE: YES
INPUT:
PROMPT: Were the correct number of warmup wafers
or pilot wafers or conditioning done before
processing the lot?
CHOICE: YES
MESSAGE: Contact PSS to disposition lot.
MESSAGE: End of Session.
|