[Search for users] [Overall Top Noters] [List of all Conferences] [Download this site]

Conference asdg::cmp

Title:CMP
Notice:Welcome to the CMP notesfile
Moderator:FABSIX::B_TOWERLLE
Created:Tue Oct 31 1995
Last Modified:Fri Jun 06 1997
Last Successful Update:Fri Jun 06 1997
Number of topics:94
Total number of notes:6381

27.0. "CMP.B1 DECTREE USAGE" by SUBPAC::BJUBINVILLE (CMP-6 Equipment Engineering) Sat Dec 14 1996 05:53

    
    
         This note is designated for Process Engineering
      Dectree usage on CMP.B1.
T.RTitleUserPersonal
Name		DateLines
27.1Generic CMP Decision TreeYIELD::GUI$TREESRVThu Dec 19 1996 21:3958
APPLICATION: cmpgeneric.  (Developed with DECtree V3.0A)
Thu Dec 19 21:37:11 1996

MESSAGE: Welcome to the CMP Generic Fab6 Dectree 
        for SPC failures! You will be asked a 
        series of questions and given suggested 
        general actions to help troubleshoot the 
        failure and provide corrective action.
        
        Use the arrows and return keys to move 
        through the menus, and CTRL-B to backup.
        CTRL-Z quits.

INPUT:
  PROMPT: Was the data mis-entered?
  CHOICE: NO

INPUT:
  PROMPT: Does the SPC chart have the wrong 
          limits or rules turned on?
  CHOICE: NO

INPUT:
  PROMPT: What type of SPC failure happened?
  CHOICE: Other MQCs(Polish Rate/Nonuniformity)

INPUT:
  PROMPT: Is the processing tool due for a PM, 
          clean, pad change, or other routinely 
          scheduled maintenance?
  CHOICE: Not Sure

MESSAGE: Check for wafer counters to verify if
        maintenance is due.  If unable to verify
        contact PSS or Equipment Eng. to verify 
        that no maintenance is due.

INPUT:
  PROMPT: Is the processing tool due for a PM, 
          clean, pad change, or other routinely 
          scheduled maintenance?
  CHOICE: No

MESSAGE: Repeat MQC after processing 
        additional exercise wafers.

INPUT:
  PROMPT: Is the Repeat MQC check 
          in spec?
  CHOICE: NO

MESSAGE: Contact PSS to help further troublsehooting.

MESSAGE: End of Session.
++  BACKUP One Step
MESSAGE: Contact PSS to help further troublsehooting.

MESSAGE: End of Session.
27.2Generic CMP Decision TreeYIELD::GUI$TREESRVSat Dec 21 1996 15:5526
APPLICATION: cmpgeneric.  (Developed with DECtree V3.0A)
Sat Dec 21 15:53:56 1996

MESSAGE: Welcome to the CMP Generic Fab6 Dectree 
        for SPC failures! You will be asked a 
        series of questions and given suggested 
        general actions to help troubleshoot the 
        failure and provide corrective action.
        
        Use the arrows and return keys to move 
        through the menus, and CTRL-B to backup.
        CTRL-Z quits.

INPUT:
  PROMPT: Was the data mis-entered?
  CHOICE: YES

MESSAGE: Contact Supervisor to correct the data 
        in workstream and the PSS to delete the
        point in SPC.
        
        If it is a critical SPC chart, close
        the annotation saying wrong entry, 
        was deleted in SPC.

MESSAGE: End of Session.
27.3Generic CMP Decision TreeYIELD::GUI$TREESRVTue Jan 28 1997 08:5131
APPLICATION: cmpgeneric.  (Developed with DECtree V3.0A)
Tue Jan 28 08:48:05 1997

MESSAGE: Welcome to the CMP Generic Fab6 Dectree 
        for SPC failures! You will be asked a 
        series of questions and given suggested 
        general actions to help troubleshoot the 
        failure and provide corrective action.
        
        Use the arrows and return keys to move 
        through the menus, and CTRL-B to backup.
        CTRL-Z quits.

INPUT:
  PROMPT: Was the data mis-entered?
  CHOICE: NO

INPUT:
  PROMPT: Does the SPC chart have the wrong 
          limits or rules turned on?
  CHOICE: NO
++  BACKUP One Step++  BACKUP One Step++  BACKUP One Step
MESSAGE: Welcome to the CMP Generic Fab6 Dectree 
        for SPC failures! You will be asked a 
        series of questions and given suggested 
        general actions to help troubleshoot the 
        failure and provide corrective action.
        
        Use the arrows and return keys to move 
        through the menus, and CTRL-B to backup.
        CTRL-Z quits.
27.4Generic CMP Decision TreeYIELD::GUI$TREESRVWed Feb 19 1997 10:5338
APPLICATION: cmpgeneric.  (Developed with DECtree V3.0A)
Wed Feb 19 10:49:59 1997

MESSAGE: Welcome to the CMP Generic Fab6 Dectree 
        for SPC failures! You will be asked a 
        series of questions and given suggested 
        general actions to help troubleshoot the 
        failure and provide corrective action.
        
        Use the arrows and return keys to move 
        through the menus, and CTRL-B to backup.
        CTRL-Z quits.

INPUT:
  PROMPT: Was the data mis-entered?
  CHOICE: NO

INPUT:
  PROMPT: Does the SPC chart have the wrong 
          limits or rules turned on?
  CHOICE: NO

INPUT:
  PROMPT: What type of SPC failure happened?
  CHOICE: Other MQCs(Polish Rate/Nonuniformity)

INPUT:
  PROMPT: Is the processing tool due for a PM, 
          clean, pad change, or other routinely 
          scheduled maintenance?
  CHOICE: YES

MESSAGE: Put tool down for maintenance. 
        Contact supervisor to change annotation
        from NEW to OPEN while work is done on 
        the processing tool.

MESSAGE: End of Session.