| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 82.1 | passdown cmp b-shift 10/01/96 | FABSIX::M_PROVENCHER | | Tue Oct 01 1996 07:54 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 17 MQC'S
BREAKIN WAFERS 26 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jd0521 pmd/jd0520 pmd
CMP.A1 24hr MQCS COMPLETED: 10/01/96 @ 4:00 am
CMP.A1 24hr MQCS NEXT DUE : 10/02/96 @ 4:00 am
CMP.A2 (Strasbaugh 6DS-SP) - dn/crash (needs carriers)
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - : up/mqc/down until 6:30 am
CMP.B1 24hr MQCS COMPLETED in process
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 10/01/96 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : 10/01/96 @ 7:00 pm
CMP.B2 (Speedfam CMP-V) - : up/mqc first set failed (head 3) uniformity
CMP.B2 24hr MQCS COMPLETED: in process
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: 9/30/96 @ 9:00 pm
CMP.B2 12hr MQCS NEXT DUE : 10/01/96 @ 9:00 am
CMP.B3 (Speedfam CMP-V) - : up/running ye0192 m3/ jl0515 m2 both at touchup
CMP.B3 24hr MQCS COMPLETED: 9/30/96 @ 8:30 am
CMP.B3 24hr MQCS NEXT DUE : 10/01/96 @ 8:30 am
CMP.B3 12hr MQCS COMPLETED: 9/30/96 @ 8:30 pm
CMP.B3 12hr MQCS NEXT DUE : 10/01/96 @ 8:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/01/96 @ 6:30 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/01/96 @ 6:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/01/96 @ 6:30 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/01/96 @ 6:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle/down from 11pm til 6:00 am
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/01/96 @ 6:30 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/01/96 @ 6:30 pm
Hot/B lots in area:
__________________
* xd0533 m3 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xd0513 3.6 days (hold for eng) *
jd0412 2.9 days (hold for eng)
Down Equipment:
--------------
* cmp.a2 needs carriers *
cmp.b1 mqc's in process
cmp.b2 mqc's in process
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0513 hold for proc eng to run *
jd0412 hold for proc eng to run
xd0560 eng stores @ cmp
xd0441 eng stores @ cmp hold for eric b.
Monitor status:
--------------
3 boxes of 12k mqc wafers.
1 boxes of 50K breakin wafers (one in process)*
Number of product lots in room:
------------------------------
* 18 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
Lots/wafers processed:
---------------------
* jl0536 pmd 23 wafers *
jl0511 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
11 speedfam carriers*
0 strasbaugh carriers*
? strasbaugh plates*
|
| 82.2 | A-shift CMP passdown 10/1/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Oct 01 1996 20:25 | 118 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0558 (pmd).
CMP.A1 24hr MQCS COMPLETED: 4:30am 10/1
CMP.A1 24hr MQCS NEXT DUE : 4:30am 10/2
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0550 (pmd).
CMP.A2 24hr MQCS COMPLETED: 2pm 10/1
CMP.A2 24hr MQCS NEXT DUE : 2pm 10/2
CMP.B1 (Speedfam CMP-V) - REPAIR: reps looking into carrier rotation
errors.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0534 (m1).
CMP.B2 24hr MQCS COMPLETED: 11:30am 10/1
CMP.B2 24hr MQCS NEXT DUE : 11:30am 10/2
CMP.B2 12hr MQCS COMPLETED: 11:30am 10/1
CMP.B2 12hr MQCS NEXT DUE : 11:30pm 10/1
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0513 (m3) and JD0412 (m3).
CMP.B3 24hr MQCS COMPLETED: 1pm 10/1
CMP.B3 24hr MQCS NEXT DUE : 1pm 10/2
CMP.B3 12hr MQCS COMPLETED: 1pm 10/1
CMP.B3 12hr MQCS NEXT DUE : 1am 10/2
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7:30pm 10/1
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7:30am 10/2
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7:30pm 10/1
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7:30am 10/2
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7:30pm 10/1
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7:30am 10/2
Hot/B lots in area:
__________________
JD0504 - M2 HOT
XD0533 - M3 HOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0513 - 4.1DAYS
JL0509 - 1.5DAYS
XE0546 - 1.0DAYS
JE0491 - 1.1DAYS
XD0548 - 1.3DAYS
JD0412 - 3.4DAYS
XD0533 - 0.8DAYS
JL0530 - 1.6DAYS
JL0514 - 1.2DAYS
Down Equipment:
--------------
CMP.B1 - DOWN FOR REPS TO REPLACE GEARBOX
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0412 - BEING RELEASED SHORTLY
ZE0141 - HOLD FOR METROLOGY TO MEASURE PRODUCT.
Monitor status:
--------------
2.5 boxes of 12K monitor wafers
0 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
17
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0520 - PMD - 24WFRS
JD0521 - PMD - 23
JD0504 - M2 - 24
JD0535 - M1 - 22
YE0192 - M3 - 12
JL0515 - M2 - 19
# of carriers for strasbaugh/speedfam:
--------------------------------------
SEE SAM GRALEY'S PASSDOWN
|
| 82.3 | passdown cmp b-shift 10/06/96 | FABSIX::M_PROVENCHER | | Sun Oct 06 1996 07:44 | 115 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 22 MQC'S
BREAKIN WAFERS 37 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc results pending as of 6:30am
CMP.A1 24hr MQCS COMPLETED: 10/01/96 @ 4:00 am
CMP.A1 24hr MQCS NEXT DUE : 10/02/96 @ 4:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running jd0551 pmd
was down until 6:30 am
CMP.A2 24hr MQCS COMPLETED: 10/06/96 @ 6:30 am
CMP.A2 24hr MQCS NEXT DUE : 10/07/96 @ 6:30 am
CMP.B1 (Speedfam CMP-V) - : unsched.down/ down all night
failed mqc's for low r/r and high unif.
ran 2 sets of mqc's. prior to 2nd set
changed offsets on heads 1 and 2. r/r still
too low.
CMP.B1 24hr MQCS COMPLETED n/a
CMP.B1 24hr MQCS NEXT DUE : when tool comes up
CMP.B1 12hr MQCS COMPLETED: 10/01/96 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : 10/01/96 @ 7:00 pm
CMP.B2 (Speedfam CMP-V) - : up/running xd0568 pmd (hotlot)/jl0486 m2
was down until @ 12:30 am, vacuum problem
CMP.B2 24hr MQCS COMPLETED: 10/06/96@ 3:00 am
CMP.B2 24hr MQCS NEXT DUE : 10/07/96@ 3:00 am
CMP.B2 12hr MQCS COMPLETED: 10/06/96@ 3:00 am
CMP.B2 12hr MQCS NEXT DUE : 10/06/96@ 3:00 pm
CMP.B3 (Speedfam CMP-V) - : up/mqc
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/06/96 @ 4:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/06/96 @ 4:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/06/96 @ 4:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/06/96 @ 4:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/06/96 @ 6:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/06/96 @ 6:00 pm
Hot/B lots in area:
__________________
* xd0568 pmd (b2) *
jd0505 m3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* jd0548 pmd (at p2) hold for drg
Down Equipment:
--------------
* cmp.a1 mqc *
cmp.a2 mqc
cmp.b1 mqc
Scrap lots:
----------
* none *
Hold Lots:
----------
* jd0548 pmd (at p2) hold for drg
Monitor status:
--------------
2 boxes of 12k mqc wafers. some on order
1/2 box of 50K breakin wafers. 2 on order
Number of product lots in room:
------------------------------
* 15 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
Lots/wafers processed:
---------------------
* jd0507 m3 *
# of carriers for strasbaugh/speedfam:
--------------------------------------
? speedfam carriers*
? strasbaugh carriers*
? strasbaugh plates*
|
| 82.4 | A-shift CMP passdown 10/6/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Oct 06 1996 20:16 | 107 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JL0528 (m2) and JD0553 (pmd).
CMP.A1 24hr MQCS COMPLETED: 10am 10/6
CMP.A1 24hr MQCS NEXT DUE : 10am 10/7
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0551 (m2).
CMP.A2 24hr MQCS COMPLETED: 7am 10/6
CMP.A2 24hr MQCS NEXT DUE : 7am 10/7
CMP.B1 (Speedfam CMP-V) - VERIFY: running mqcs after equipment techs
tweaked DF.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B2 24hr MQCS COMPLETED: 3am 10/6
CMP.B2 24hr MQCS NEXT DUE : 3am 10/7
CMP.B2 12hr MQCS COMPLETED: 5pm 10/6
CMP.B2 12hr MQCS NEXT DUE : 5am 10/7
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0550 (m1).
CMP.B3 24hr MQCS COMPLETED: 11am 10/6
CMP.B3 24hr MQCS NEXT DUE : 11am 10/7
CMP.B3 12hr MQCS COMPLETED: 11am 10/6
CMP.B3 12hr MQCS NEXT DUE : 11pm 10/6
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7:30pm 10/6
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7:30am 10/7
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7:30pm 10/6
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7:30am 10/7
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7:30pm 10/6
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7:30am 10/7
Hot/B lots in area:
__________________
JD0505 - ILD3
Hot lots coming to area:
-----------------------
JD0449 - DEP_M2
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - VERIFY: BAD UNIF AND LOW REM-RATE ALL DAY. RUNNING MQCS AGAIN.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
�box of 12K mqc wafers. (more on order)
0 boxes of 50K breakin wafers. (more on order)
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0551 - PMD - 24WFRS
JL0516 - M2 - 24
JL0486 - M2 - 24
XD0568 - PMD - 24
JD0505 - M3 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
?NEED TO CHECK CARRIER ROOM.
|
| 82.5 | passdown cmp b-shift 10/7/96 | FABSIX::M_PROVENCHER | | Mon Oct 07 1996 07:35 | 116 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 MQC'S
BREAKIN WAFERS 43 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - dn/crash @ 6:00 am (slurry problem)
pad/carrier changed will need mqc's
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - : unsched.down/ down all night
failed mqc's for std dev. id/od
changed for less centerfast polish.
will need mqc's
CMP.B1 24hr MQCS COMPLETED n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - : up/running ye0207 m1/xd0563 m1
CMP.B2 24hr MQCS COMPLETED: 10/07/96@ 5:00 am
CMP.B2 24hr MQCS NEXT DUE : 10/08/96@ 5:00 am
CMP.B2 12hr MQCS COMPLETED: 10/07/96@ 5:00 am
CMP.B2 12hr MQCS NEXT DUE : 10/07/96@ 5:00 pm
CMP.B3 (Speedfam CMP-V) - : up/running xd0558 m1/jd0521 m1
CMP.B3 24hr MQCS COMPLETED: 10/06/96 @ 11:00 am
CMP.B3 24hr MQCS NEXT DUE : 10/07/96 @ 11:00 am
CMP.B3 12hr MQCS COMPLETED: 10/06/96 @ 11:00 pm
CMP.B3 12hr MQCS NEXT DUE : 10/07/96 @ 11:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/07/96 @ 5:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/07/96 @ 5:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/07/96 @ 5:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/07/96 @ 5:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/07/96 @ 5:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/07/96 @ 5:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* jd0449 m2 *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 mqc *
cmp.a2 crash
Scrap lots:
----------
* jd0559 pmd 2 wafers *
Hold Lots:
----------
* none *
Monitor status:
--------------
0 boxes of 12k mqc wafers. 2 ordered @ 8:00pm
0 boxes of 50K breakin wafers 2 ordered @ 8:00pm
Number of product lots in room:
------------------------------
* 8 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
Lots/wafers processed:
---------------------
* jd0553 pmd 24 wafers *
jd0524 m1 23 wafers
jd0520 m1 23 wafers
xd0551 m2 22 wafers
jl0528 m2 24 wafers
jd0506 m2 22 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
1 speedfam carriers
1 strasbaugh carriers
? strasbaugh plates
|
| 82.6 | A-shift CMP passdown 10/7/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Oct 07 1996 20:31 | 110 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE. needs mqcs. waiting for more mqc wafers.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: down for parts. Needs new three way
valve for slurry pumps.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: YD0178 (m3) and XD0480 (m2).
CMP.B1 24hr MQCS COMPLETED: 5pm 10/7
CMP.B1 24hr MQCS NEXT DUE : 5pm 10/8
CMP.B1 12hr MQCS COMPLETED: 9am 10/7
CMP.B1 12hr MQCS NEXT DUE : 9pm 10/7
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0552 (pmd) and XE0555 (pmd).
CMP.B2 24hr MQCS COMPLETED: 5am 10/7
CMP.B2 24hr MQCS NEXT DUE : 5am 10/8
CMP.B2 12hr MQCS COMPLETED: 6am 10/7
CMP.B2 12hr MQCS NEXT DUE : now
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0551 (m2) and XE0540 (m2).
CMP.B3 24hr MQCS COMPLETED: 2pm 10/7
CMP.B3 24hr MQCS NEXT DUE : 2pm 10/8
CMP.B3 12hr MQCS COMPLETED: 11am 10/7
CMP.B3 12hr MQCS NEXT DUE : 11pm 10/8
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9:30am 10/7
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9:30pm 10/7
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9:30am 10/7
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9:30pm 10/7
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9:30am 10/7
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9:30pm 10/7
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - DOWN FOR FAULTY THREE WAY VALVES ON THE SLURRY PUMPS. WAITING FOR
PARTS.
CMP.A1 - NEEDS MQCS AFTER PAD/CARRIER CHANGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K mqc wafers.
1 box of 50K breakin wafers.
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0559 - PMD - 20WFRS
XD0563 - M1 - 18
YE0207 - M1 - 24
XD0558 - M1 - 22
JD0521 - M1 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
1 SPEEDFAM
1 STRASBAUGH
|
| 82.7 | passdown cmp.b-shift 10/08/96 | FABSIX::M_PROVENCHER | | Tue Oct 08 1996 07:22 | 116 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 MQC'S
BREAKIN WAFERS 47 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc right carrier changed due to high particles
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: down for parts. Needs new three way
valve for slurry pumps.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - : up/mqc carrier change on head 4
yd0178 logged onto tool
CMP.B1 24hr MQCS COMPLETED n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 10/07/96 @ 8:30 pm
CMP.B1 12hr MQCS NEXT DUE : 10/08/96 @ 8:30 am
CMP.B2 (Speedfam CMP-V) - : up/running jd0534 m2
CMP.B2 24hr MQCS COMPLETED: 10/07/96 @ 5:00 am
CMP.B2 24hr MQCS NEXT DUE : 10/08/96 now
CMP.B2 12hr MQCS COMPLETED: 10/07/96 @ 10:30 pm
CMP.B2 12hr MQCS NEXT DUE : 10/08/96 @ 10:30 am
CMP.B3 (Speedfam CMP-V) - : up/running xd0543 m3
CMP.B3 24hr MQCS COMPLETED: 10/07/96 @ 2:00 pm
CMP.B3 24hr MQCS NEXT DUE : 10/08/96 @ 2:00 pm
CMP.B3 12hr MQCS COMPLETED: 10/07/96 @ 11:00 pm
CMP.B3 12hr MQCS NEXT DUE : 10/08/96 @ 11:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/08/96 @ 6:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/08/96 @ 6:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/08/96 @ 6:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/08/96 @ 6:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/08/96 @ 6:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/08/96 @ 6:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 mqc after carrier change *
cmp.a2 waiting for parts
cmp.b1 mqc after carrier change
Scrap lots:
----------
* xe0577 (#8) pmd 1 wafers p.s.s. notified. *
Hold Lots:
----------
* none *
Monitor status:
--------------
3 boxes of 12k mqc wafers. 2 ordered @ 4:00am
3 boxes of 50K breakin wafers 2 ordered @ 4:00am
Number of product lots in room:
------------------------------
* 4 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
Lots/wafers processed:
---------------------
* xe0555 pmd 24 wafers *
jd0552 pmd 24 wafers
xd0577 pmd 23 wafers
xd0480 m2 13 wafers
xe0540 m2 24 wafers
jl0530 m2 24 wafers
yd0178 m3 21 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 speedfam carriers
0 strasbaugh carriers
? strasbaugh plates
|
| 82.8 | A-shift CMP passdown 10/8/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Oct 08 1996 20:35 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JL0555 (pmd).
CMP.A1 24hr MQCS COMPLETED: 11:30am 10/8
CMP.A1 24hr MQCS NEXT DUE : 11:30am 10/9
CMP.A2 (Strasbaugh 6DS-SP) - REPAIR: replaced right carrier. Running more
mqcs (2 sets failed for high unif on right carrier).
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: JE0491 (m3) and XD0548 (m3).
CMP.B1 24hr MQCS COMPLETED: 6:30am 10/8
CMP.B1 24hr MQCS NEXT DUE : 6:30am 10/9
CMP.B1 12hr MQCS COMPLETED: 8pm 10/7
CMP.B1 12hr MQCS NEXT DUE : now
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0532 (m2) and JD0534 (m2).
CMP.B2 24hr MQCS COMPLETED: 11:30am 10/8
CMP.B2 24hr MQCS NEXT DUE : 11:30am 10/9
CMP.B2 12hr MQCS COMPLETED: 10pm 10/7
CMP.B2 12hr MQCS NEXT DUE : now
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0559 (m1) and JD0525 (m3).
CMP.B3 24hr MQCS COMPLETED: 11:30am 10/8
CMP.B3 24hr MQCS NEXT DUE : 11:30am 10/9
CMP.B3 12hr MQCS COMPLETED: 9:30am 10/8
CMP.B3 12hr MQCS NEXT DUE : 9:30pm 10/8
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 10/8
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 10/8
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 10/8
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 10/8
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 10/8
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 10/8
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0543 - DEP_ILD1 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - REPAIR: REPLACED RIGHT CARRIER. RERUNNING MQCS.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1.5 boxes of 12K mqc wafers.
1.5 boxes of 50K breakin wafers.
Number of product lots in room:
------------------------------
13
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0558 - PMD - 23WFRS
JD0560 - PMD - 24
JD0546 - M1 - 22
JL0530 - M2 - 24
XD0559 - M1 - 23
XE0540 - M2 - 24
XD0543 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 SPEEDFAM CARRIERS
1 STRASBAUGH CARRIER
7 PLATES FILMED (HOLES DRILLED BUT NOT SHIMMED)
|
| 82.9 | passdown cmp b-shift 10/09/96 | FABSIX::M_PROVENCHER | | Wed Oct 09 1996 07:49 | 118 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 MQC'S
BREAKIN WAFERS 49 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24hr MQCS COMPLETED: 10/08/96 @ 11:30 am
CMP.A1 24hr MQCS NEXT DUE : 10/09/96 @ 11:30 am
CMP.A2 (Strasbaugh 6DS-SP) - up/mqc passed particles, failed uniformity
second set of mqc's running (after pad change)
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - : up/eng (now in possession of speedfam)
CMP.B1 24hr MQCS COMPLETED n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 10/08/96 @ 10:00 pm
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - : up/running jl0545 m1/jd0523 m2
CMP.B2 24hr MQCS COMPLETED: 10/08/96 @ 11:30 am
CMP.B2 24hr MQCS NEXT DUE : 10/09/96 @ 11:30 am
CMP.B2 12hr MQCS COMPLETED: 10/09/96 @ 1:30 am
CMP.B2 12hr MQCS NEXT DUE : 10/09/96 @ 1:30 pm
CMP.B3 (Speedfam CMP-V) - : up/mqc after pad change 1st, and secondary pads
were changed
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: 10/08/96 @ 11:00 pm
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/09/96 @ 6:30 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/09/96 @ 6:30 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/09/96 @ 6:30 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/09/96 @ 6:30 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/09/96 @ 6:30 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/09/96 @ 6:30 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a2 mqc after pad change *
cmp.b1 turned over to speedfam reps
Scrap lots:
----------
* jd0533 3 wafers, p.s.s. notified. *
Hold Lots:
----------
* none *
Monitor status:
--------------
3 boxes of 12k mqc wafers. 2 ordered @ 7:00am
3 boxes of 50K breakin wafers 2 ordered @ 7:00am
Number of product lots in room:
------------------------------
* 7 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
Lots/wafers processed:
---------------------
* jl0555 pmd 24 wafers *
xd0559 m1 23 wafers
jd0543 m1 24 wafers (hot lot)
jd0534 m2 24 wafers
jd0532 m2 24 wafers
jd0525 m2 23 wafers
jd0533 m2 21 wafers
xe0556 m2 24 wafers
jd0449 m2 6 wafers (hot lot)
xd0548 m3 24 wafers
je0491 m3 20 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 speedfam carriers
0 strasbaugh carriers
? strasbaugh plates
|
| 82.10 | | FABSIX::J_ROA | | Wed Oct 09 1996 20:34 | 120 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 4 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - : UP: Running lot JD0550
CMP.A1 24hr MQCS COMPLETED: 11:38 hours 10/09/96
CMP.A1 24hr MQCS NEXT DUE : 11:38 hours 10/10/96
========================================================================
CMP.A2 (Strasbaugh 6DS-SP) - : UP: Running lot JD0526
CMP.A2 24hr MQCS COMPLETED: 11:12 hours 10/09/96
CMP.A2 24hr MQCS NEXT DUE : 11:12 hours 10/10/96
========================================================================
CMP.B1 (Speedfam CMP-V) - : VERIFY: Reps worked all day on tool to try to
fix some of issues associated with this polisher and also to try a new soft-
ware.( The software loaded at the present time is the old version.)
A new pad was installed and break-ins and Mqcs wafers will be running shortly.
CMP.B1 24hr MQCS COMPLETED: Ongoing
CMP.B1 24hr MQCS NEXT DUE :
CMP.B1 12hr MQCS COMPLETED:
=========================================================================
CMP.B2 (Speedfam CMP-V) - : UP: Running lots XD0503 and XD0562B
CMP.B2 24hr MQCS COMPLETED: 10:30 hours 10/09/96
CMP.B2 24hr MQCS NEXT DUE : 10:30 hours 10/10/96
CMP.B2 12hr MQCS COMPLETED: DONE
=========================================================================
CMP.B3 (Speedfam CMP-V) - : UP: Running lot JD0377C (M3). Once this lots
gets the desire target it needs to be put on hold for Frank Krupa.
CMP.B3 24hr MQCS COMPLETED: 12:30 hours 10/09/96
CMP.B3 24hr MQCS NEXT DUE : 12:30 hours 10/10/96
CMP.B3 12hr MQCS COMPLETED: DONE
=========================================================================
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 10:48 hours 10/09/96
=========================================================================
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 10:48 hours 10/10/96
=========================================================================
CMP-SCRUB.A3 (On-track scrubber) - UP: Running lot JD0523 final clean
CMP-SCRUB.A4 12hr MQCS COMPLETED: 10:48 hours 10/10/96
Hot/B lots in area:
__________________
none
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
5 LOTS
Down Equipment:
--------------
CMP.B1 AT VERIFY
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0470 IN STORES
Monitor status:
--------------
2 boxes of 12K mqc wafers
3 boxes of 50k exercise wafers
Number of product lots in room:
------------------------------
10 lots
New specs/revs posted:
---------------------
* NEW TDCO POSTED TODAY REGARDING RUNNING PRODUCT AND DUMMY WAFERS. *
Lots/wafers processed:
---------------------
JL0545 _ M1 - 24 WAFERS
JD0523 _ M2 - 21 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 SPEEDFAM CARRIERS ( NO PLATES AVAILABLE.)
5 STRASBAUGH CARRIER AND 3 PLATES READY.
|
| 82.11 | passdown cmp b-shift 10/13/96 | FABSIX::M_PROVENCHER | | Sun Oct 13 1996 07:22 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 MQC'S
BREAKIN WAFERS 34 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc after pad change, pad was pulled, failed
particles
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - up/running jl0554/jd0561 pmd
CMP.A2 24hr MQCS COMPLETED: 10/13/96 @ 4:00 am
CMP.A2 24hr MQCS NEXT DUE : 10/14/96 @ 4:00 am
CMP.B1 (Speedfam CMP-V) - : up/idle
CMP.B1 24hr MQCS COMPLETED 10/12/96 @ 10:00 am
CMP.B1 24hr MQCS NEXT DUE : 10/13/96 @ 10:00 am
CMP.B1 12hr MQCS COMPLETED: 10/13/96 @ 5:00 am
CMP.B1 12hr MQCS NEXT DUE : 10/13/95 @ 5:00 pm
CMP.B2 (Speedfam CMP-V) - : up/running jd0565 pmd
CMP.B2 24hr MQCS COMPLETED: 10/12/96 @ 9:00 am
CMP.B2 24hr MQCS NEXT DUE : 10/13/96 @ 9:00 am
CMP.B2 12hr MQCS COMPLETED: 10/12/96 @ 10:00 pm
CMP.B2 12hr MQCS NEXT DUE : 10/13/96 @ 10:00 am
CMP.B3 (Speedfam CMP-V) - : up/running jd0524 m1/xd0549 m3
CMP.B3 24hr MQCS COMPLETED: 10/12/96 @ 7:00 pm
CMP.B3 24hr MQCS NEXT DUE : 10/13/96 @ 7:00 pm
CMP.B3 12hr MQCS COMPLETED: 10/08/96 @ 6:00 am
CMP.B3 12hr MQCS NEXT DUE : 10/13/96 @ 6:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/12/96 @10:30 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/13/96 @10:30 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/12/96 @10:30 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/13/96 @10:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/12/96 @10:30 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/13/96 @10:30 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* xd0550 pmd *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 mqc after pad change *
Scrap lots:
----------
* none *
Hold Lots:
----------
* none *
Monitor status:
--------------
1 box of 12k mqc wafers. 2 ordered @ 10:00pm
2 boxes of 50K breakin wafers 2 ordered @ 10:00pm
Number of product lots in room:
------------------------------
* 5 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* XD0550 M2 24 WAFERS *
JD0552 M1 24 WAFERS
JD0462 M1 22 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 speedfam carriers
0 strasbaugh carriers
? strasbaugh plates
|
| 82.12 | A-shift CMP passdown 10/13/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Oct 13 1996 20:26 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs after wafer crash. New
pad/carriers.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - VERIFY: running breakins after wafer crash.
New pad/carriers/disk.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0577 (pmd) and JL0527 (m1).
CMP.B1 24hr MQCS COMPLETED: 11am 10/13
CMP.B1 24hr MQCS NEXT DUE : 11am 10/14
CMP.B1 12hr MQCS COMPLETED: 8:30am 10/13
CMP.B1 12hr MQCS NEXT DUE : 8:30pm 10/13
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0560 (m1).
CMP.B2 24hr MQCS COMPLETED: 12pm 10/13
CMP.B2 24hr MQCS NEXT DUE : 12pm 10/14
CMP.B2 12hr MQCS COMPLETED: 7:30pm 10/13
CMP.B2 12hr MQCS NEXT DUE : 7:30am 10/14
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0558 (m1).
CMP.B3 24hr MQCS COMPLETED: 5pm 10/13
CMP.B3 24hr MQCS NEXT DUE : 5pm 10/14
CMP.B3 12hr MQCS COMPLETED: 3pm 10/13
CMP.B3 12hr MQCS NEXT DUE : 3am 10/14
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 2pm 10/13
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 2am 10/14
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 2pm 10/13
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 2am 10/14
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 2pm 10/13
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 2am 10/14
Hot/B lots in area:
__________________
JD0580 - PMD
JL0527 - M1
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC AFTER WAFER CRASH
CMP.A2 - VERIFY AFTER WAFER CRASH
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K mqc wafers
1/2 box of 50K breakin wafers
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
see EDCO by CMP.A1
Lots/wafers processed:
---------------------
JD0576 - PMD - 22WFRS
JD0561 - PMD - 24
JL0554 - PMD - 24
JD0462 - M1 - 22
XD0549 - M3 - 17
JD0524 - M2 - 22
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 STRASBAUGH (+ 3 PLATES SHIMMED/FILMED)
7 SPEEDFAM
|
| 82.13 | passdown cmp b-shift 10/14/96 | FABSIX::M_PROVENCHER | | Mon Oct 14 1996 07:37 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 MQC'S
BREAKIN WAFERS 41 misc
CMP.A1 (Strasbaugh 6DS-SP) - unsch dn/error -(leak in robot body)
CMP.A1 24hr MQCS COMPLETED: 10/14/96 @ 2:00 am
CMP.A1 24hr MQCS NEXT DUE : 10/15/96 @ 2:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running jl0583/jd0573 pmd
CMP.A2 24hr MQCS COMPLETED: 10/14/96 @ 2:00 am
CMP.A2 24hr MQCS NEXT DUE : 10/15/96 @ 2:00 am
CMP.B1 (Speedfam CMP-V) - : up/idle
CMP.B1 24hr MQCS COMPLETED 10/13/96 @ 11:00 am
CMP.B1 24hr MQCS NEXT DUE : 10/14/96 @ 11:00 am
CMP.B1 12hr MQCS COMPLETED: 10/13/96 @ 8:30 pm
CMP.B1 12hr MQCS NEXT DUE : 10/14/95 @ 8:30 am
CMP.B2 (Speedfam CMP-V) - : up/running jd0569 pmd at touchup
CMP.B2 24hr MQCS COMPLETED: 10/13/96 @ 12:00 pm
CMP.B2 24hr MQCS NEXT DUE : 10/14/96 @ 12:00 pm
CMP.B2 12hr MQCS COMPLETED: 10/14/96 @ 7:30 am
CMP.B2 12hr MQCS NEXT DUE : 10/14/96 @ 7:30 pm
CMP.B3 (Speedfam CMP-V) - : up/idle
CMP.B3 24hr MQCS COMPLETED: 10/13/96 @ 5:00 pm
CMP.B3 24hr MQCS NEXT DUE : 10/14/96 @ 5:00 pm
CMP.B3 12hr MQCS COMPLETED: 10/14/96 @ 6:30 am
CMP.B3 12hr MQCS NEXT DUE : 10/14/96 @ 6:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/14/96 @ 5:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/14/96 @ 5:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/14/96 @ 5:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/14/96 @ 5:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/14/96 @ 5:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/14/96 @ 5:00 am
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 robot problem *
Scrap lots:
----------
* none *
Hold Lots:
----------
* none *
Monitor status:
--------------
2 boxes of 12k mqc wafers. 2 ordered @ 7:00 am
1 boxes of 50K breakin wafers 2 ordered @ 7:00 am
lot in the room
------------------------------
* 3 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jl0527 m1 11 wafers (hotlot) *
jl0560 m1 23 wafers
jd0577 pmd 23 wafers
jd0580 pmd 22 wafers (hotlot)
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 speedfam carriers
3 strasbaugh carriers
? strasbaugh plates
|
| 82.14 | A-shift CMP passdown 10/14/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Oct 14 1996 20:25 | 106 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 10am 10/14
CMP.A1 24hr MQCS NEXT DUE : 10am 10/15
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0574 (pmd).
CMP.A2 24hr MQCS COMPLETED: 2am 10/14
CMP.A2 24hr MQCS NEXT DUE : 2am 10/15
CMP.B1 (Speedfam CMP-V) - DOWN: software upgrade.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: JL0582 (pmd).
CMP.B2 24hr MQCS COMPLETED: 11:30am 10/14
CMP.B2 24hr MQCS NEXT DUE : 11:30am 10/15
CMP.B2 12hr MQCS COMPLETED: 11am 10/14
CMP.B2 12hr MQCS NEXT DUE : 11pm 10/14
CMP.B3 (Speedfam CMP-V) - RUNNING: YD0167 (m3) and JD0412 (m4).
CMP.B3 24hr MQCS COMPLETED: 1pm 10/14
CMP.B3 24hr MQCS NEXT DUE : 1pm 10/15
CMP.B3 12hr MQCS COMPLETED: 9am 10/14
CMP.B3 12hr MQCS NEXT DUE : 9pm 10/14
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11am 10/14
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11pm 10/14
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 11am 10/14
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 11pm 10/14
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 11am 10/14
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11pm 10/14
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - SOFTWARE UPGRADE. DOWN UNTIL TOMORROW. DO NOT RUN!
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K mqc wafers
1 box of 50K breakin wafers
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0573 - PMD - 24WFRS
JL0583 - PMD - 24
JD0578 - PMD - 24
JD0544 - M1 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM
3 STRASBAUGH
|
| 82.15 | passdown cmp b-shift 10/15/96 | FABSIX::M_PROVENCHER | | Tue Oct 15 1996 07:36 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 MQC'S
BREAKIN WAFERS 47 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running xd0574 pmd/xe0564
CMP.A1 24hr MQCS COMPLETED: 10/14/96 @ 10:00 am
CMP.A1 24hr MQCS NEXT DUE : 10/15/96 @ 10:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 10/14/96 @ 2:30 am
CMP.A2 24hr MQCS NEXT DUE : 10/15/96 @ 2:30 am
CMP.B1 (Speedfam CMP-V) - : DOWN: software upgrade
CMP.B1 24hr MQCS COMPLETED n/a
CMP.B1 24hr MQCS NEXT DUE : due when tool comes up
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : due when tool comes up
CMP.B2 (Speedfam CMP-V) - : up/jl0545 m2/ xd0558 m3 (hotlot)
CMP.B2 24hr MQCS COMPLETED: 10/14/96 @ 11:00 am
CMP.B2 24hr MQCS NEXT DUE : 10/15/96 @ 11:00 am
CMP.B2 12hr MQCS COMPLETED: 10/14/96 @ 11:00 pm
CMP.B2 12hr MQCS NEXT DUE : 10/15/96 @ 11:00 am
CMP.B3 (Speedfam CMP-V) - : up/running jd0412 m4 at touchup
CMP.B3 24hr MQCS COMPLETED: 10/14/96 @ 1:00 pm
CMP.B3 24hr MQCS NEXT DUE : 10/15/96 @ 1:00 pm
CMP.B3 12hr MQCS COMPLETED: 10/14/96 @ 9:30 pm
CMP.B3 12hr MQCS NEXT DUE : 10/15/96 @ 9:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/14/96 @11:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/15/96 @11:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/14/96 @11:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/15/96 @11:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/14/96 @11:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/15/96 @11:00 am
Hot/B lots in area:
__________________
* xd0588 m3 b2 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b1 software upgrade *
Scrap lots:
----------
* none *
Hold Lots:
----------
* none *
Monitor status:
--------------
2 boxes of 12k mqc wafers. 2 ordered @ 1:00 am
1 boxes of 50K breakin wafers 2 ordered @ 1:00 am
lot in the room
------------------------------
* 6 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jl0582 pmd 24 wafers *
jd0574 pmd 24 wafers
yd0167 m3 5 wafers
jl0585 pmd 24 wafers
xe0541 m3 14 wafers
jd0546 m2 22 wafers
jl0527a m1 12 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 speedfam carriers
3 strasbaugh carriers
? strasbaugh plates
|
| 82.16 | A-shift CMP passdown 10/15/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Oct 15 1996 20:28 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 2pm 10/15
CMP.A1 24hr MQCS NEXT DUE : 2pm 10/16
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 24hr MQCS COMPLETED: 2am 10/15
CMP.A2 24hr MQCS NEXT DUE : 2am 10/16
CMP.B1 (Speedfam CMP-V) - DOWN: wafer crashed on pad.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0506 (m3) and XD0558 (m3).
CMP.B2 24hr MQCS COMPLETED: 1pm 10/15
CMP.B2 24hr MQCS NEXT DUE : 1pm 10/16
CMP.B2 12hr MQCS COMPLETED: 10am 10/15
CMP.B2 12hr MQCS NEXT DUE : 10am 10/16
CMP.B3 (Speedfam CMP-V) - RUNNING: XE0552 (m2).
CMP.B3 24hr MQCS COMPLETED: 3pm 10/15
CMP.B3 24hr MQCS NEXT DUE : 3pm 10/16
CMP.B3 12hr MQCS COMPLETED: 12pm 10/15
CMP.B3 12hr MQCS NEXT DUE : 12am 10/16
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11am 10/15
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11pm 10/15
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 11am 10/15
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 11pm 10/15
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 11am 10/15
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11pm 10/15
Hot/B lots in area:
__________________
XD0558 - M3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - JUST CRASHED A WAFER ON THE PAD.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1/2 box of mqc wafers
1 box of breakin wafers
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
see tdco by cmp.a2
Lots/wafers processed:
---------------------
XE0565 - PMD - 22WFRS
XE0564 - PMD - 24
XD0574 - PMD - 24
XE0541 - M3 - 12
JL0545 - M2 - 24
JD0412 - M4 - 8
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 SPEEDFAM
3 STRASBAUGH
|
| 82.17 | passdown cmp b-shift 10/20/96 | FABSIX::M_PROVENCHER | | Sun Oct 20 1996 07:11 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 1 MQC'S
BREAKIN WAFERS 40 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/idle
CMP.A1 24hr MQCS COMPLETED: 10/19/96 @ 3:30 pm
CMP.A1 24hr MQCS NEXT DUE : 10/20/96 @ 3:30 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/idle
CMP.A2 24hr MQCS COMPLETED: 10/19/96 @ 3:30 pm
CMP.A2 24hr MQCS NEXT DUE : 10/20/96 @ 3:30 pm
CMP.B1 (Speedfam CMP-V) - : BGN_ENG - Rep's workin' on head #1 bearing
replacement.
CMP.B1 24hr MQCS COMPLETED n/a
CMP.B1 24hr MQCS NEXT DUE : due when tool comes up
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : due when tool comes up
CMP.B2 (Speedfam CMP-V) - : up/running jd0522 m25/jd0523 m25 see remark for
both lots
CMP.B2 24hr MQCS COMPLETED: 10/19/96 @ 11:30 am
CMP.B2 24hr MQCS NEXT DUE : 10/20/96 @ 11:30 am
CMP.B2 12hr MQCS COMPLETED: 10/19/96 @ 11:30 pm
CMP.B2 12hr MQCS NEXT DUE : 10/20/96 @ 11:30 am
CMP.B3 (Speedfam CMP-V) - : up/running jd0580 m2 (hotlot)
CMP.B3 24hr MQCS COMPLETED: 10/19/96 @ 5:00 pm
CMP.B3 24hr MQCS NEXT DUE : 10/20/96 @ 5:00 pm
CMP.B3 12hr MQCS COMPLETED: 10/20/96 @ 5:00 am
CMP.B3 12hr MQCS NEXT DUE : 10/20/96 @ 5:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/19/96 @11:00 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/20/96 @11:00 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/19/96 @11:00 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/20/96 @11:00 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/19/96 @11:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/20/96 @11:00 am
Hot/B lots in area:
__________________
* jd0580 m2 b3 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b1 bearing replacement *
Scrap lots:
----------
* none *
Hold Lots:
----------
* ye0199 on hold for L. Camilletti *
Monitor status:
--------------
6 boxes of 12k mqc wafers. none ordered
2� boxes of 50K breakin wafers none ordered
lot in the room
------------------------------
* 3 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* xe0577 pmd 24 wafers *
xd0583 pmd 23 wafers
jd0520 m3 23 wafers
xd0563 m2 18 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 speedfam carriers
14 strasbaugh carriers
? strasbaugh plates
|
| 82.18 | A-shift CMP passdown 10/20/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Oct 20 1996 20:31 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 5pm 10/20
CMP.A1 24hr MQCS NEXT DUE : 5pm 10/21
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0569 (m1).
CMP.A2 24hr MQCS COMPLETED: 5pm 10/20
CMP.A2 24hr MQCS NEXT DUE : 5pm 10/21
CMP.B1 (Speedfam CMP-V) - DOWN: still down for ongoing head one stuff.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0577 (m1).
CMP.B2 24hr MQCS COMPLETED: 7pm 10/20
CMP.B2 24hr MQCS NEXT DUE : 7pm 10/21
CMP.B2 12hr MQCS COMPLETED: 7pm 10/20
CMP.B2 12hr MQCS NEXT DUE : 7am 10/21
CMP.B3 (Speedfam CMP-V) - MQC: all five carriers changed (high wafer
count). mqcs in progress now.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: 7pm 10/20
CMP.B3 12hr MQCS NEXT DUE : 7am 10/21
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11am 10/20
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11pm 10/21
CMP-SCRUB.A2 (On-track scrubber) - IDLE
CMP-SCRUB.A2 12hr MQCS COMPLETED: 11am 10/20
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 11pm 10/21
CMP-SCRUB.A3 (On-track scrubber) - IDLE
CMP-SCRUB.A3 12hr MQCS COMPLETED: 11am 10/20
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11pm 10/21
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - HEAD ONE STUFF
CMP.B3 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
4 boxes of 12K mqc wafers
1 box of 50K breakin wafers
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XE0579 - PMD - 11WFRS
XD0581 - PMD - 24
JD0547 - M2 - 22
JD0523 - M25 - 14
JD0522 - M25 - 16
JD0567 - M1 - 24
JD0561 - M1 - 24
JD0580 - M2 - 18
# of carriers for strasbaugh/speedfam:
--------------------------------------
11 SPEEDFAM
11 STRASBAUGH (3 PLATES SHIMMED/FILMED)
|
| 82.19 | passdown cmp b-shift 10/21/96 | FABSIX::M_PROVENCHER | | Mon Oct 21 1996 07:17 | 113 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 MQC'S
BREAKIN WAFERS 52 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running xe0570 m1
CMP.A1 24hr MQCS COMPLETED: 10/20/96 @ 5:00 pm
CMP.A1 24hr MQCS NEXT DUE : 10/21/96 @ 5:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/running jd0576 m1
CMP.A2 24hr MQCS COMPLETED: 10/20/96 @ 5:00 pm
CMP.A2 24hr MQCS NEXT DUE : 10/21/96 @ 5:00 pm
CMP.B1 (Speedfam CMP-V) - : BGN_ENG - Rep's workin' on head #1 bearing
replacement.
CMP.B1 24hr MQCS COMPLETED n/a
CMP.B1 24hr MQCS NEXT DUE : due when tool comes up
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : due when tool comes up
CMP.B2 (Speedfam CMP-V) - : up/running jl0539 m2
CMP.B2 24hr MQCS COMPLETED: 10/20/96 @ 7:00 pm
CMP.B2 24hr MQCS NEXT DUE : 10/21/96 @ 7:00 pm
CMP.B2 12hr MQCS COMPLETED: 10/21/96 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 10/21/96 @ 6:00 pm
CMP.B3 (Speedfam CMP-V) - : up/mqc mqc's failed for particles/uniformity.also
had bad carrier(#5). carrier was changed. also
found debris (red?) on pad, pad was changed.
tool had vacuum problems all night
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/21/96 @ 2:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/21/96 @ 2:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/21/96 @ 2:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/21/96 @ 2:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/21/96 @ 2:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/21/96 @ 2:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b1 bearing replacement *
Scrap lots:
----------
* none *
Hold Lots:
----------
* ye0199 on hold for L. Camilletti *
Monitor status:
--------------
4 boxes of 12k mqc wafers. none ordered
1 box of 50K breakin wafers 2 boxes ordered @ 3:00 am
lot in the room
------------------------------
* 6 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jd0569 m1 23 wafers *
jd0577 m1 23 wafers
xd0480 m3 13 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 speedfam carriers
11 strasbaugh carriers
3 strasbaugh plates shimmed + filmed
|
| 82.20 | A-shift CMP passdown 10/21/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Oct 21 1996 20:40 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running 24hr mqcs.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0606 (pmd).
CMP.A2 24hr MQCS COMPLETED: 6pm 10/20
CMP.A2 24hr MQCS NEXT DUE : after lot is done.
CMP.B1 (Speedfam CMP-V) - DOWN: down to reps. same problems.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - MQC: running 24hr mqcs.
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - VERIFY: down for particles. Running more mqcs
after pad change.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 1pm 10/21
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 1am 10/22
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 1pm 10/21
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 1am 10/22
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 1pm 10/21
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 1am 10/22
Hot/B lots in area:
__________________
XD0589 - PMD
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
CMP.B1 - REPS
CMP.B2 - MQC
CMP.B3 - VERIFY-U (HIGH PARTICLES)
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
� box of 50K breakin wafers
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XE0570 - M1 - 18WFRS
JD0576 - M1 - 18
XD0568 - M2 - 22
JD0548 - M2 - 17
XD0480 - M3 - 13
JL0539 - M2 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 SPEEDFAM
11 STRASBAUGH (3 PLATES FILMED/SHIMMED)
|
| 82.21 | passdown cmp b-shift 10/22/96 | FABSIX::M_PROVENCHER | | Tue Oct 22 1996 07:51 | 118 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 MQC'S
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc running breakin/new pad, new carriers,
after crash, failed particles, down all night
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - up/mqc running breakin/new pad, (failed particles)
down all night
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - : BGN_ENG - Rep's workin' on head #1 bearing
replacement.
CMP.B1 24hr MQCS COMPLETED n/a
CMP.B1 24hr MQCS NEXT DUE : due when tool comes up
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : due when tool comes up
CMP.B2 (Speedfam CMP-V) - : unsched-dn/failed particles, tool scrubbed down
will need mqc's
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - : unsched-dn/tool crashed, pad replaced, 3 carriers
replaced, will need mqc's
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/22/96 @ 2:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/22/96 @ 2:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/22/96 @ 2:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/22/96 @ 2:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/22/96 @ 2:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/22/96 @ 2:00 pm
Hot/B lots in area:
__________________
* xd0589 pmd *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b1 bearing replacement *
cmp.a1 crash/ breakins in process/pad-carrier change
cmp.a2 breakins in process/pad change
cmp.b2 failed particles/tool scrubed+cleaned
cmp.b3 crash/failed particles/pad-3 carriers replaced
Scrap lots:
----------
* none *
Hold Lots:
----------
* ye0199 on hold for L. Camilletti *
Monitor status:
--------------
0 boxes of 12k mqc wafers. 2 boxes ordered @ 7:00 am, 1 box due @ 7:00am
1 box due @ 8:00am
� box of 50K breakin wafers 2 boxes ordered @ 7:00 am
lot in the room
------------------------------
* 7 pmd lots *
2 ild2 lots
1 ild3 lot
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* none *
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 speedfam carriers
9 strasbaugh carriers
3 strasbaugh plates shimmed + filmed
|
| 82.22 | A-shift CMP passdown 10/22/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Oct 22 1996 20:34 | 117 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 30 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0589 (pmd - hot).
CMP.A1 24hr MQCS COMPLETED: 6pm 10/22
CMP.A1 24hr MQCS NEXT DUE : 6pm 10/23
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0606 (pmd - tup).
CMP.A2 24hr MQCS COMPLETED: 6pm 10/22
CMP.A2 24hr MQCS NEXT DUE : 6pm 10/23
CMP.B1 (Speedfam CMP-V) - DOWN: down to speedfam for head 1 problems.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0552 (m2) and JD0560 (m2).
CMP.B2 24hr MQCS COMPLETED: 6pm 10/22
CMP.B2 24hr MQCS NEXT DUE : 6pm 10/23
CMP.B2 12hr MQCS COMPLETED: 6pm 10/22
CMP.B2 12hr MQCS NEXT DUE : 6am 10/23
CMP.B3 (Speedfam CMP-V) - MQC: running mqcs. particles passed.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 10/22
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 10/22
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 10/22
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 10/22
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 10/22
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 10/22
Hot/B lots in area:
__________________
XD0589 - PMD
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0569 - STI - 1.4DAYS
XD0589 - PMD - 1.0DAYS
JL0606 - PMD - 1.3DAYS
JD0551 - M2 - 0.9DAYS
JD0590 - PMD - 0.8DAYS
XD0584 - PMD - 0.8DAYS
JD0573 - M1 - 1.0DAYS
JD0565 - M1 - 0.9DAYS
JD0578 - M1 - 1.1DAYS
XD0561 - M2 - 0.7DAYS
XE0547 - M3 - 1.0DAYS
JD0559 - M2 - 0.9DAYS
JL0607 - PMD - 1.3DAYS
JL0600 - PMD - 1.1DAYS
JD0524 - M25 - 0.8DAYS
Down Equipment:
--------------
CMP.B1 - HEAD 1 ROTATION
CMP.B3 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K mqc wafers
2.5 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
25
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
* none *
# of carriers for strasbaugh/speedfam:
--------------------------------------
???? check rebuild room
|
| 82.23 | passdown cmp b-shift 10/23/96 | FABSIX::M_PROVENCHER | | Wed Oct 23 1996 07:35 | 133 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 MQC'S
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jd0578 m1/ xd0580 pmd
CMP.A1 24hr MQCS COMPLETED: 10/22/96 @ 6;00 pm
CMP.A1 24hr MQCS NEXT DUE : 10/23/96 @ 6:00 pm
CMP.A2 (Strasbaugh 6DS-SP) - up/running jd0573 m1
CMP.A2 24hr MQCS COMPLETED: 10/22/96 @ 6:00 pm
CMP.A2 24hr MQCS NEXT DUE : 10/23/96 @ 6:00 pm
CMP.B1 (Speedfam CMP-V) - : BGN_ENG - Rep's workin' on head #1 bearing
replacement.
CMP.B1 24hr MQCS COMPLETED n/a
CMP.B1 24hr MQCS NEXT DUE : due when tool comes up
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : due when tool comes up
CMP.B2 (Speedfam CMP-V) - : up/running jd0551 m2/jd0559 m2
CMP.B2 24hr MQCS COMPLETED: 10/22/96 @ 6:00 pm
CMP.B2 24hr MQCS NEXT DUE : 10/23/96 @ 6:00 pm
CMP.B2 12hr MQCS COMPLETED: 10/23/96 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 10/23/96 @ 6:00 pm
CMP.B3 (Speedfam CMP-V) - : unsched/dn-failed 2 sets of mqc's for particles
r/r+unf post in process maint to hook up
remote slurry.
slurry pump out back malfunctioned twice during
mqc runs. crash/pad change + 4 carriers changed
(two prior to crash, two after crash)
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/23/96 @ 2:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/23/96 @ 2:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/23/96 @ 2:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/23/96 @ 2:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/23/96 @ 2:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/23/96 @ 2:00 pm
Hot/B lots in area:
__________________
* jd0580 ILD3 *
Hot lots coming to area:
-----------------------
* jd0581 ILD1 *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.b1 bearing replacement *
Scrap lots:
----------
* XD0569 - STI - 1.9 DAYS *
JD0551 - M2 - 1.4 DAYS running on cmp.b2
JD0573 - M1 - 1.5 DAYS
JD0565 - M1 - 1.4 DAYS
jd0578 - m1 - 1.6 days
jl0585 - m1 - .7 days
jl0582 - m1 - .6 days
xd0561 - m2 - 1.2 days
jd0553 - m2 - 1.0 days
ye0207 - m2 - .8 days
jd0462 - m2 - .7 days
xe0547 - m3 - 1.5 days
Hold Lots:
----------
* none *
Monitor status:
--------------
3 boxes of 12k mqc wafers some should be ordered "Late" today
7 boxes of 50K breakin wafers
lot in the room
------------------------------
* 15 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* xd0589 pmd 24 wafers (hot lot) *
jl0606 pmd 24 wafers
jl0607 pmd 24 wafers
xd0584 pmd 24 wafers
jd0590 pmd 24 wafers
jl0601 pmd 24 wafers
jl0600 pmd 24 wafers
jl0605 pmd 24 wafers (1 pass lot)
jd0560 m2 23 wafers
jd0552 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 speedfam carriers
9 strasbaugh carriers
3 strasbaugh plates shimmed + filmed
|
| 82.24 | A-shift CMP passdown 10/23 | FABSIX::J_SADIN | Freedom isn't free. | Wed Oct 23 1996 20:28 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 50 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0573 (m1).
CMP.A1 24hr MQCS COMPLETED: 6pm 10/22
CMP.A1 24hr MQCS NEXT DUE : after lot is completed.
CMP.A2 (Strasbaugh 6DS-SP) - VERIFY: pad/carrier change after failed mqcs
for unif.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - DOWN: down to speedfam for head 1 rotation
problems.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - MQC: running mqcs. Particles ok!
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - DOWN: pad/carrier change after crash.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 10am 10/23
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 10pm 10/23
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 10am 10/23
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 10pm 10/23
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 10am 10/23
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 10pm 10/23
Hot/B lots in area:
__________________
JD0580 - M3
JD0581 - M1
JD0546 - M3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
just about everything!
Down Equipment:
--------------
CMP.A2 - VERIFY AFTER PAD/CARRIER CHANGE
CMP.B1 - HEAD 1 ROTATION
CMP.B2 - MQC
CMP.B3 - VERIFY AFTER CRASH. PAD/CARRIER CHANGE
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K mqc wafers. 2 more boxes on order (we burned up most of our
supply today. Waiting for more from dielectrics).
6 boxes of 50K monitor wafers.
Number of product lots in room:
------------------------------
19
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0580 - PMD - 24
JD0578 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 SPEEDFAM
0 STRASBAUGH
|
| 82.25 | CMP C-SHIFT PD. 10-24-96 | FABSIX::E_DAWSON | | Thu Oct 24 1996 20:34 | 44 |
| CMP
___
***** PLEASE READ PE. PASSDOWN REGARDING PARTICLE PROBLEM. *****
CMP.A1 (Strasbaugh 6DS-SP) - Running 1 - JD0565 ILD2 Ran for 6
minutes 100% on Thick.A4
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE - Broke wafers today, new pad and
carriers installed. Needs full
break'in and mqc's.
CMP.B1 (Speedfam CMP-V) - Down/Repair - Speedfam reps. adressing problems.
CMP.B2 (Speedfam CMP-V) - Mqc - Passed Rate Dev...Failed Particles
XE0547 & XE0552 100% on Thick.A5
CMP.B3 (Speedfam CMP-V) - Down/Repair - PE. adressing particle issue
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: 0 Lots in CMP: 22
------------------ -----------
Lots Shiped: 7 New SPEC/TDCO: 2
----------- -------------
Strasbaugh & Speedfam..."PEASE READ"
Down Equipment: Carriers:
-------------- --------
CMP.B1, CMP.B3 See Carrier PD.
MQC Mon. Used: ? MQC Monitors: 2.5
------------- ------------
Misc.
----
|
| 82.26 | CMP C- SHIFT PD. 10-25-96 | FABSIX::E_DAWSON | | Fri Oct 25 1996 20:53 | 58 |
|
!PLEASE READ!
*************************
DUE TO A UNSHCEDULED SLURRY FILTER CHANGE (FROM A ? FILTER TO A "BAG"
FILTER) ALL TOOLS WILL NEED FUL MQC'S BEFORE ANY PRODUCT CAN BE RUN.
************************
CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING 1 - XE0566 ILD1, 1/2 of the lot is
done, othere 1/2 needs t-up.
CMP.A2 (Strasbaugh 6DS-SP) - VERIFY-U - 2 WAFERS BROKE FROM LOT JL0539
- RUNNING 2 - *JD0558 ILD2 100% on Thick.A4 ready
for t-up.
*JL0539 6 wafers ran for 3 min 2 wafers
broke, the rest of the lot still needs
to be run.
CMP.B1 (Speedfam CMP-V) - DOWN/UNSHED - Failed mqc's please see EE.for
details concerning status.
CMP.B2 (Speedfam CMP-V) - RUNNING 1 - XD0550 100% on Thick.A5.
CMP.B3 (Speedfam CMP-V) - RUNNING 3 - *JD0563 ILD2 ready for t-up.
*JL595 ILD1 100% on Thick.A4 ready
for t-up.
*JL0596 ILD1 100% on Thick.A4 ready
for t-up.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Needs Mqc
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Needs Mqc
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Needs Mqc
Hot/B lots in area: 0 Lots in CMP: I ran out of fingers
------------------ ---------- and toes.
Lots Shiped:11 New SPEC/TDCO: 2
----------- -------------
Strasbaugh & Speedfam "PLEASE READ"
Down Equipment: Carriers:
-------------- --------
CMP.B1 See Carrier PD.
CMP.A2
MQC Mon. Used: 15 MQC Monitors: 1 1/2 BOXES
------------- ------------
Misc.
----
|
| 82.27 | TEST | FABSIX::G_ISAACS | | Sat Oct 26 1996 11:28 | 34 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE -
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE -
CMP.B1 (Speedfam CMP-V) - UP/IDLE -
CMP.B2 (Speedfam CMP-V) - UP/IDLE -
CMP.B3 (Speedfam CMP-V) - UP/IDLE -
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP:
------------------ -----------
Lots Shiped: New SPEC/TDCO:
----------- -------------
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
Misc.
----
|
| 82.28 | CMP C SHIFT 10/26/96 | FABSIX::G_ISAACS | | Sat Oct 26 1996 20:44 | 46 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE -
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING LOT # JL0527A for 6 min. lot is in
scrubber .A2.Will need 100%.
CMP.B1 (Speedfam CMP-V) - UP/IDLE -
CMP.B2 (Speedfam CMP-V) - UP/RUNNING LOT # XD0559
Lot has run for the first 400
seconds. 100% measurement on
thickness.A5
CMP.B3 (Speedfam CMP-V) - UP/RUNNING MQC'S
Ran three MQC's today then
equipment adjusted the down
force. Ran MQC with 0 down force,
put in the adjusted offsets and
re-ran the MQC.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP:
------------------ -----------
15
Lots Shiped: New SPEC/TDCO:
----------- -------------
10
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
25 7 box's
Misc.
----
|
| 82.29 | CMP C SHIFT 10/26/96 | FABSIX::G_ISAACS | | Sat Oct 26 1996 20:54 | 36 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE -
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING LOT # JL0527A FOR 6 MIN. LOT IN
SCRUBBER .A1 NEEDS 100%
CMP.B1 (Speedfam CMP-V) - UP/IDLE -
CMP.B2 (Speedfam CMP-V) - UP/RUNNING LOT # XD0559 ILD3 FIRST 400 SEC.
100% ON THICKNESS.A5
CMP.B3 (Speedfam CMP-V) - UP/IDLE - JUST COMPLETED MQC'S
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP:
------------------ -----------
15
Lots Shiped: New SPEC/TDCO:
----------- -------------
10
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
25 7 BOX'S
Misc.
----
|
| 82.30 | passdown cmp b-shift 10/27/96 | FABSIX::M_PROVENCHER | | Sun Oct 27 1996 06:33 | 119 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 30 MQC'S
BREAKIN WAFERS 38 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jd0544 m2/xd0557 m2
CMP.A1 24hr MQCS COMPLETED: 10/27/96 @ 4:00 am
CMP.A1 24hr MQCS NEXT DUE : 10/28/96 @ 4:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running jl0556 m2/xd0567 m2
CMP.A2 24hr MQCS COMPLETED: 10/27/96 @ 4:00 am
CMP.A2 24hr MQCS NEXT DUE : 10/28/96 @ 4:00 am
CMP.B1 (Speedfam CMP-V) - : up/mqc
passed particles, failed for uniformity, id/od
changed for less edge fast, 2nd set in process
CMP.B1 24hr MQCS COMPLETED in process (jd0524 is running on this tool)
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 10/27/96 @ 2:00 am
CMP.B1 12hr MQCS NEXT DUE : 10/27/96 @ 2:00 pm
CMP.B2 (Speedfam CMP-V) - : up/mqc
passed particles, failed for removal range
(432) offset program activated and offsets have
been changed, and placed into cmp notes.2nd set
in process no lots on this tool at this time.
CMP.B2 24hr MQCS COMPLETED: in process
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: 10/27/96 @ 2:00 am
CMP.B2 12hr MQCS NEXT DUE : 10/27/96 @ 2:00 pm
CMP.B3 (Speedfam CMP-V) - : verify
pad change/ (2)carriers changed after crash, pos-
-sible load cup to carrier alignment off.
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/27/96 @12:00 midnight
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/27/96 @12:00 noon
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/27/96 @12:00 midnight
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/27/96 @12:00 noon
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/27/96 @12:00 midnight
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/27/96 @12:00 noon
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* jd0581 m2 *
Static Lots in area:
-------------------
* yah right *
Down Equipment:
--------------
* cmp.b1 mqc *
cmp.b2 mqc
cmp.b3 mqc after crash
Scrap lots:
----------
* jd0566 m2 (2 wafers)
Hold Lots:
----------
* xd0544 *
Monitor status:
--------------
5 boxes of 12k mqc wafers
1 box of 50K breakin wafers 2 ordered @ 9:00 pm
lot in the room
------------------------------
* 24 lots *
jd0565 m1 (rework lot) check remarks
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jl0527 m2 12 wafers *
xd0559 m3 23 wafers
yd0204 m3 16 wafers
jl0555 m2 22 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 speedfam carriers
8 strasbaugh carriers
? strasbaugh plates shimmed + filmed
|
| 82.31 | A-shift CMP passdown 10/27/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Oct 27 1996 19:32 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 17 mqcs
BREAKIN WAFERS 15 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running breakins and mqcs after
pad/carrier change.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running breakins and mqcs after pad
change.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B1 24hr MQCS COMPLETED: 11am 10/27
CMP.B1 24hr MQCS NEXT DUE : 11am 10/28
CMP.B1 12hr MQCS COMPLETED: 11am 10/27
CMP.B1 12hr MQCS NEXT DUE : 11pm 10/27
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0557 (m3) and JD0549 (m3).
CMP.B2 24hr MQCS COMPLETED: 4pm 10/27
CMP.B2 24hr MQCS NEXT DUE : 4pm 10/28
CMP.B2 12hr MQCS COMPLETED: 4pm 10/27
CMP.B2 12hr MQCS NEXT DUE : 4am 10/28
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0581 (m2) and JD0562 (m2).
CMP.B3 24hr MQCS COMPLETED: 2pm 10/27
CMP.B3 24hr MQCS NEXT DUE : 2pm 10/28
CMP.B3 12hr MQCS COMPLETED: 2pm 10/27
CMP.B3 12hr MQCS NEXT DUE : 2am 10/28
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 2pm 10/27
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 2am 10/28
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 2pm 10/27
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 2pm 10/28
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 2pm 10/27
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 2pm 10/28
Hot/B lots in area:
__________________
JL0648 - PMD
JD0581 - M2
JL0649 - M2
Hot lots coming to area:
-----------------------
JL0632 - DEP_M1
Static Lots in area:
-------------------
LOTS OF 'EM.
Down Equipment:
--------------
CMP.A1 - MQC
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0524 - M25 - HOLD FOR ENG EVAL. HIGH RANGE.
Monitor status:
--------------
2.5 boxes of 12K mqc wafers
0.5 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
29
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0544 - M2 - 23WFRS
XD0567 - M2 - 24
JL0556 - M2 - 23
JL0649 - M1 - 5
YD0204 - M3 - 16
JD0566 - M2 - 22
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 STRASBAUGH CARRIERS
3 SPEEDFAM CARRIERS
5 STRASBAUGH PLATES
|
| 82.32 | passdown cmp b-shift 10/28/96 | FABSIX::M_PROVENCHER | | Mon Oct 28 1996 06:41 | 115 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 17 MQC'S
BREAKIN WAFERS 49 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jl0612 pmd/xe0557 m2
CMP.A1 24hr MQCS COMPLETED: 10/28/96 @ 2:00 am
CMP.A1 24hr MQCS NEXT DUE : 10/29/96 @ 2:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/running jl0611 pmd/jl0624 pmd
CMP.A2 24hr MQCS COMPLETED: 10/27/96 @11:00 pm
CMP.A2 24hr MQCS NEXT DUE : 10/28/96 @11:00 pm
CMP.B1 (Speedfam CMP-V) - : up/mqc after crash/pad change and downforce
calibrated. offsets changed, and ready for 2nd set
2nd set in process
CMP.B1 24hr MQCS COMPLETED in process
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 10/28/96 @ 6:00 am
CMP.B1 12hr MQCS NEXT DUE : 10/29/96 @ 6:00 pm
CMP.B2 (Speedfam CMP-V) - : up/idle (not for long)
CMP.B2 24hr MQCS COMPLETED: 10/27/96 @ 4:00 pm
CMP.B2 24hr MQCS NEXT DUE : 10/27/96 @ 4:00 pm
CMP.B2 12hr MQCS COMPLETED: 10/28/96 @ 6:00 am
CMP.B2 12hr MQCS NEXT DUE : 10/28/96 @ 6:00 pm
CMP.B3 (Speedfam CMP-V) - : up/running jd0526 m3/jd0550 m3
CMP.B3 24hr MQCS COMPLETED: 10/27/96 @ 2:00 pm
CMP.B3 24hr MQCS NEXT DUE : 10/28/96 @ 2:00 pm
CMP.B3 12hr MQCS COMPLETED: 10/28/96 @ 2:00 am
CMP.B3 12hr MQCS NEXT DUE : 10/28/96 @ 2:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/28/96 @ 6:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/28/96 @ 6:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/28/96 @ 6:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/28/96 @ 6:00 pm
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/28/96 @ 6:00 am
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/28/96 @ 6:00 pm
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* name it, it's here *
Down Equipment:
--------------
* cmp.b1 mqc after crash,and downforce cal. *
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0544 *
Monitor status:
--------------
3 boxes of 12k mqc wafers 2 ordered @ 7:00 am
1 box of 50K breakin wafers 2 ordered @ 7:00 am
lot in the room
------------------------------
* 28 lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jd0562 m2 22 wafers *
jd0581 m2 23 wafers (hot lot)
xe0578 pmd 24 wafers
jd0549 m3 22 wafers
jd0557 m3 22 wafers
jl0648 pmd 5 wafers (hot lot)
jd0588 m1 24 wafers
jd0565 m1 24 wafers (rework lot)
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 speedfam carriers
9 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 82.33 | A-shift CMP passdown 10/28/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Oct 28 1996 19:24 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE. (as mark says, "not for long!")
CMP.A1 24hr MQCS COMPLETED: 2am 10/28
CMP.A1 24hr MQCS NEXT DUE : 2am 10/29
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0611 (pmd - touchup).
CMP.A2 24hr MQCS COMPLETED: 11pm 10/27
CMP.A2 24hr MQCS NEXT DUE : 11pm 10/28
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0561 (m2) and JL0598 (m1).
CMP.B1 24hr MQCS COMPLETED: 2pm 10/28
CMP.B1 24hr MQCS NEXT DUE : 2pm 10/29
CMP.B1 12hr MQCS COMPLETED: 4pm 10/28
CMP.B1 12hr MQCS NEXT DUE : 4am 10/29
CMP.B2 (Speedfam CMP-V) - RUNNING: JL0632 (m1) and XD0534 (m2).
CMP.B2 24hr MQCS COMPLETED: 6pm 10/28
CMP.B2 24hr MQCS NEXT DUE : 6pm 10/29
CMP.B2 12hr MQCS COMPLETED: 5pm 10/28
CMP.B2 12hr MQCS NEXT DUE : 5am 10/29
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0599 (m1) and JD0526 (m3).
CMP.B3 24hr MQCS COMPLETED: 5pm 10/28
CMP.B3 24hr MQCS NEXT DUE : 5pm 10/29
CMP.B3 12hr MQCS COMPLETED: 5pm 10/28
CMP.B3 12hr MQCS NEXT DUE : 5am 10/28
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 10am 10/28
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 10pm 10/28
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 10am 10/28
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 10pm 10/28
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 10am 10/28
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 10pm 10/28
Hot/B lots in area:
__________________
JL0632 - M1
Hot lots coming to area:
-----------------------
JD0590 - DEP_ILD1 2
Static Lots in area:
-------------------
BUNCHES
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0544 - HOLD FOR ENG TO RUN.
JD0524 - HOLD FOR ENG EVAL.
Monitor status:
--------------
2 boxes of 12K mqc wafers
0 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
25
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0612 - PMD - 24WFRS
XE0557 - M2 - 18
JL0624 - PMD - 24
JL0611 - PMD - 24
JD0550 - M3 - 17
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 STRASBAUGH CARRIERS
5 STRASBAUGH PLATES
0 SPEEDFAM CARRIERS
|
| 82.34 | passdown cmp b-shift 10/29/96 | FABSIX::M_PROVENCHER | | Tue Oct 29 1996 06:24 | 123 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 MQC'S
BREAKIN WAFERS 48 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/running jd0604 pmd (rework lot)/xd0591 pmd
CMP.A1 24hr MQCS COMPLETED: 10/29/96 @ 3:00 am
CMP.A1 24hr MQCS NEXT DUE : 10/30/96 @ 3:00 am
CMP.A2 (Strasbaugh 6DS-SP) - up/mqc crashed @ 9:00 pm, and again @ 1:00 am,
also had robot problems
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - : up/mqc (vacuum filter clog -water- had this tool
down off and on, for most of the night
1st set of mqc data seem bogus, high
std_dev (+20%)? pre measuring 2nd set
CMP.B1 24hr MQCS COMPLETED in process
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 10/28/96 @ 6:00 am
CMP.B1 12hr MQCS NEXT DUE : 10/29/96 @ 6:00 pm
CMP.B2 (Speedfam CMP-V) - : up/running jd0522 m3/
CMP.B2 24hr MQCS COMPLETED: 10/28/96 @ 5:00 pm
CMP.B2 24hr MQCS NEXT DUE : 10/29/96 @ 5:00 pm
CMP.B2 12hr MQCS COMPLETED: 10/29/96 @ 6:30 am
CMP.B2 12hr MQCS NEXT DUE : 10/29/96 @ 6:30 pm
CMP.B3 (Speedfam CMP-V) - : up/running jd0589 m1/jd0525 m3
CMP.B3 24hr MQCS COMPLETED: 10/28/96 @ 5:00 pm
CMP.B3 24hr MQCS NEXT DUE : 10/29/96 @ 5:00 pm
CMP.B3 12hr MQCS COMPLETED: 10/29/96 @ 5:30 am
CMP.B3 12hr MQCS NEXT DUE : 10/29/96 @ 5:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED:10/28/96 @ 9:30 pm
CMP-SCRUB.A1 12hr MQCS NEXT DUE :10/29/96 @ 9:30 am
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED:10/28/96 @ 9:30 pm
CMP-SCRUB.A2 12hr MQCS NEXT DUE :10/29/96 @ 9:30 am
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED:10/28/96 @ 9:30 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE :10/29/96 @ 9:30 am
Hot/B lots in area:
__________________
* jd0590 m1 *
Hot lots coming to area:
-----------------------
* xd0588 m1 (at die electrics) *
Static Lots in area:
-------------------
* if its a static lot, we've got it *
Down Equipment:
--------------
* cmp.b1 mqc - vacuum filter clog (water) *
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0544 hold for eng to run *
jd0524 hold for eng eval
Monitor status:
--------------
3 boxes of 12k mqc wafers 2 ordered @ 7:00 am
2 boxes of 50K breakin wafers 2 ordered @ 7:00 am
lot in the room
------------------------------
* lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
SEE E.D.C.O. AT CMP.A1
Lots/wafers processed:
---------------------
* jl0611 pmd 24 wafers *
jd0591 pmd 24 wafers
jd0614 pmd 24 wafers
jl0620 pmd 24 wafers
jl0598 m1 21 wafers
xd0574 m1 24 wafers
jl0599 m1 24 wafers
jl0632 m1 12 wafers (hotlot)
xd0534 m2 22 wafers
jd0561 m2 24 wafers
jd0569 m2 23 wafers
jd0526 m3 23 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
1 speedfam carriers
5 strasbaugh carriers
5 strasbaugh plates shimmed + filmed
|
| 82.35 | A-shift CMP passdown 10/29/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Oct 29 1996 19:14 | 116 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 misc
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0604 (pmd - rework. see remarks)
and JD0619 (pmd - touchup).
CMP.A1 24hr MQCS COMPLETED: 3am 10/29
CMP.A1 24hr MQCS NEXT DUE : 3am 10/30
CMP.A2 (Strasbaugh 6DS-SP) - REPAIR: new pad/carriers after crash. Will
need breakins/mqcs. Pad is already conditioned.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - VERIFY: mqcs reading now. Particles are in!
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0590 (m1) and JD0522 (m3). JD0588 (m1)
on deck.
CMP.B2 24hr MQCS COMPLETED: 6pm 10/29
CMP.B2 24hr MQCS NEXT DUE : 6pm 10/30
CMP.B2 12hr MQCS COMPLETED: 6pm 10/29
CMP.B2 12hr MQCS NEXT DUE : 6am 10/30
CMP.B3 (Speedfam CMP-V) - REPAIR: running particle checks. Went down for
high particles today.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9am 10/29
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9pm 10/30
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9am 10/29
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9pm 10/29
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9am 10/29
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9pm 10/29
Hot/B lots in area:
__________________
XD0581 - THK ILD1
XD0588 - ILD 1
JD0590 - ILD 1
Hot lots coming to area:
-----------------------
JD0469 - DEP_PMD1
Static Lots in area:
-------------------
TOO MANY
Down Equipment:
--------------
CMP.A2 - NEEDS BREAKINS AND MQCS AFTER PAD/CARRIER CHANGE (WAFER CRASH).
CMP.B1 - MQCS READING NOW.
CMP.B3 - DOWN FOR HIGH PARTICLES. MQCS EVALUATING NOW.
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0544 - HOLD FOR ERIC BODENSIECK.
Monitor status:
--------------
1.5 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
19
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0591 - PMD - 24WFRS
JD0619 - PMD - 22
JL0621 - PMD - 24
JD0524 - M25 - 15
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 STRASBAUGH
5 STRASBAUGH PLATES
0 SPEEDFAM
|
| 82.36 | PASSDOWN | FABSIX::D_CAUSE | | Wed Oct 30 1996 07:37 | 52 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING XD0580 FIRST 3 MIN DONE
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL0607 FIRST 3 MINUTES,XD0590 100%
ON THK.A4
CMP.B1 (Speedfam CMP-V) - VERIFY/FAILED FOR UNIFORMITY 4 TIMES
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL0597 1ST PASS,XD0583 FINAL TOUCHUP
CMP.B3 (Speedfam CMP-V) - VERIFY/RUNNING MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT/B lots in area:1
-------------------
JL0648
STATIC lots in area:7
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:2
---------------
CMP.B1 UNIFORMITY
CMP.B3 UNIFORMITY
NUMBER of product lots in room:14
-------------------------------
LOTS COMPLETED : 11
----------------
BREAK IN WAFERS USED:35
MQC WAFERS USED:44 WAFERS USED
MQC WAFERS AVAIL:2 3/4 BOXES
----------
|
| 82.37 | PASSDOWN | FABSIX::D_CAUSE | | Thu Oct 31 1996 07:39 | 52 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING XD0570 RUNNING TU
CMP.A2 (Strasbaugh 6DS-SP) -UP/MQC ALS0 RUNNING JL0601 NEEDS 100% AND TU
CMP.B1 (Speedfam CMP-V) - VERIFY/U DONT ASK
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD0567 FIRST PASS, JD0547 800 SEC RUN
AND STILL AT 17K
CMP.B3 (Speedfam CMP-V) - UP/2 LOTS READY FOR TU
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT/B lots in area:1
-------------------
JL0632
STATIC lots in area:
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:1`
---------------
CMP.B1
NUMBER of product lots in room:LOST COUNT
-------------------------------
LOTS COMPLETED : 7
----------------
BREAK IN WAFERS USED:40
MQC WAFERS USED:24 WAFERS USED
MQC WAFERS AVAIL:2 BOXES
----------
|
| 82.38 | PASSDOWN | FABSIX::D_CAUSE | | Fri Nov 08 1996 07:28 | 53 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -VERIFY-U PAD CHANGE DUE TO BUBBLES RUNNING FULL MQC
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING 2 LOTS:JD0567 NEEDS 100% AND TOUCH UP
****HOT**** XD0588 FIRST 400 SEC
CMP.B2 (Speedfam CMP-V) - VERIFY-S AFTER MONTHLY PM EVALUATEING FIRST MQC'S
CMP.B3 (Speedfam CMP-V) - VERIFY-S RUNNING MQC AFTER PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:1
-------------------
XD0588***
STATIC lots in area:3
--------------------
HOLD LOTS IN AREA:3
__________________
ON HOLD FOR PROCESSING BY ERIC B. AND FRANK
DOWN equipment:
---------------
CMP.A1 PAD CHANGE
CMP.B2 VERFIY-S MQC AFTER PM
CMP.B3 VERIFY-S MQC AFTER PM
NUMBER of product lots in room:5
-------------------------------
LOTS COMPLETED : 6
----------------
BREAK IN WAFERS USED:25
MQC WAFERS USED:13 WAFERS USED
MQC WAFERS AVAIL:3 BOXES
----------
|
| 82.39 | PASSDOWN | FABSIX::D_CAUSE | | Sat Nov 09 1996 07:45 | 54 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING 2 LOTS:JD0655 HOT LOT WILL NEED 100%
JL0600 100% ON THK.A5 NEEDS TU
CMP.B2 (Speedfam CMP-V) - UP/RUNNING 1 JD0569 100% ON THK.A4
****WARNING ON EQUIPMENT READ BEFORE RUNNING***
CMP.B3 (Speedfam CMP-V) - RUNNING 2 LOTS: JL0609 IN SCRUB.A3 NEEDS 100%
JD0614 NEEDS 100% AND TU
*****WARNING ON SCRUBBER******
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:3
-------------------
JD0655
XD0643
JL0642
STATIC lots in area:2
--------------------
HOLD LOTS IN AREA:2
__________________
ON HOLD FOR PROCESSING BY ERIC B. AND FRANK
DOWN equipment:
--------------
NUMBER of product lots in room:9
-------------------------------
LOTS COMPLETED : 8
----------------
BREAK IN WAFERS USED:25
MQC WAFERS USED:0 WAFERS USED
MQC WAFERS AVAIL:5.5 BOXES
----------
|
| 82.40 | PASSDOWN | FABSIX::D_CAUSE | | Fri Nov 22 1996 07:48 | 52 |
| D SHIFT PASSDOWN
PLEASE ADD FABSIX::M_CADIEUX AND FABSIX::D_GIROUARD TO YOUR DIS LIST
FOR THE CMP AREA
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JD0650 RUNNING SECOND 3 MIN
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING FIRST PASS
CMP.B2 (Speedfam CMP-V) - UP/IDLE
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD0604 800 SEC COMPLETE NEEDS 100%
CMP-SCRUB.A1 (On-track scrubber) - DOWN/EXTENAL FROM 8AM-12PM
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
-------------------
STATIC lots in area:
--------------------
HOLD LOTS IN AREA:2
__________________
ON HOLD FOR PROCESSING BY ERIC B. AND FRANK
DOWN equipment:
--------------
CMP-SCRUB.A1
NUMBER of product lots in room:3
-------------------------------
LOTS COMPLETED :
----------------
BREAK IN WAFERS USED:25
MQC WAFERS USED:23 WAFERS USED
MQC WAFERS AVAIL:1/2 BOX
----------
|
| 82.41 | PASSDOWN | FABSIX::D_CAUSE | | Wed Nov 27 1996 08:05 | 51 |
| D SHIFT PASSDOWN
PLEASE ADD FABSIX::M_CADIEUX AND FABSIX::D_GIROUARD TO YOUR DIS LIST
FOR THE CMP AREA
CMP.A1 (Strasbaugh 6DS-SP) -UP/RUNNING JL0677 NEEDS 100% ON THK.A4
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/FAILED 24HR MQC NEEDS PAD CHANGE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING T/U ON JL0660 JD0663 HOT LOT
READY TO POLISH
CMP.B2 (Speedfam CMP-V) - UP/MQC RUNNING FOURTH MQC REPLACED CARRIER 1
AFTER 3RD FAILURE
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD0634 FIRST PASS 400 SEC
JL0554 100% THK ON A5 FOR TU
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:1
------------------
JD0663
STATIC lots in area:
--------------------
HOLD LOTS IN AREA:2
__________________
ON HOLD FOR PROCESSING BY ERIC B. AND FRANK
DOWN equipment:
--------------
NUMBER of product lots in room:7
--------------------------------
BREAK IN WAFERS USED:45
MQC WAFERS USED:32 WAFERS USED
MQC WAFERS AVAIL:1 1/4 BOXS
----------
|
| 82.42 | @cmp.dis 11/27/96 | FABSIX::G_ISAACS | | Wed Nov 27 1996 19:37 | 40 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING LOT # JL0703A for touch-up
" " " is 100% measuring on
thickness .A4, you need to measure
in bin date 7/96 thru 9/96, tool
is not set up thru 12/96 bin.
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE -
CMP.B1 (Speedfam CMP-V) - DOWN/ Monthly PM
CMP.B2 (Speedfam CMP-V) - UP/RUNNING LOT # JD0654
Lot in in scrub .A3 needs 100% measurement.
CMP.B3 (Speedfam CMP-V) - UP/IDLE -
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP:
------------------ -----------
3
Lots Shiped: New SPEC/TDCO:
----------- -------------
Down Equipment: Carriers:
-------------- --------
.B1 PM Monthly See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
15 75
Misc.
----
|
| 82.43 | ex | FABSIX::G_ISAACS | | Wed Nov 27 1996 19:38 | 34 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE -
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE -
CMP.B1 (Speedfam CMP-V) - UP/IDLE -
CMP.B2 (Speedfam CMP-V) - UP/IDLE -
CMP.B3 (Speedfam CMP-V) - UP/IDLE -
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP:
------------------ -----------
Lots Shiped: New SPEC/TDCO:
----------- -------------
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
Misc.
----
|
| 82.44 | FOR @CMP.DIS | FABSIX::G_ISAACS | | Wed Nov 27 1996 19:47 | 37 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING LOT # JL0703A FOR TOUCH-UP.
Lot measuring on thickness.A4.
You need to measure using bin 7/96 thru 9/96.
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE -
CMP.B1 (Speedfam CMP-V) - UP/DOWN MONTHLY PM
CMP.B2 (Speedfam CMP-V) - UP/RUNNING LOT JD0654 NEEDS 100%
CMP.B3 (Speedfam CMP-V) - UP/IDLE -
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP:
------------------ -----------
3
Lots Shiped: New SPEC/TDCO:
----------- -------------
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
15 75
Misc.
----
|
| 82.45 | PASSDOWN | FABSIX::D_CAUSE | | Wed Dec 11 1996 07:50 | 51 |
| D SHIFT PASSDOWN
PLEASE ADD FABSIX::M_CADIEUX AND FABSIX::D_GIROUARD TO YOUR DIS LIST
FOR THE CMP AREA
CMP.A1 (Strasbaugh 6DS-SP) -UP RUNNING XM0613 NEEDS TOUCH UP
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/IDLE **WARNING** ON EQUIP CARRIER #3 OFFLINE
MQC DONE
CMP.B2 (Speedfam CMP-V) - UP/RUNNING HOT LOT XM0587B NEEDS 100% AND TU
*** READ REMARKS CAREFULLY THIS LOT IS
A M-2 NOT A M-3 AS STATED IN WIP***
CMP.B3 (Speedfam CMP-V) - UP/IDLE MQC DONE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:1
------------------
XM0587B
STATIC lots in area:
--------------------
HOLD LOTS IN AREA:1
__________________
ON HOLD FOR PROCESSING BY ERIC B. AND FRANK
DOWN equipment:
--------------
NUMBER of product lots in room:2
--------------------------------
BREAK IN WAFERS USED:20
MQC WAFERS USED:15 WAFERS USED
MQC WAFERS AVAIL:5 3/4 BOXS
----------
|
| 82.46 | PASSDOWN | FABSIX::D_CAUSE | | Fri Dec 27 1996 07:32 | 47 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -DOWN/FAILED 24 HR MQC NEEDS PAD CHANGE
CMP.A2 (Strasbaugh 6DS-SP) -UP/MQC HIGH UNIFORMITY ON LAST TWO LOTS RUNNING
MQC TO VERIFY EQUIPMENT
CMP.B1 (Speedfam CMP-V) - UP/RUNNING 2 M-3 LOTS FOR SECOND PASS WILL NEED
100% AND TOUCHUP
CMP.B2 (Speedfam CMP-V) - UP/RUNNING 2 M-3 LOTS FIRST 400 COMPLETE READY FOR
SECOND PASS
CMP.B3 (Speedfam CMP-V) - DOWN/UNLOAD CUP #3 MISSING AT UNLOAD RUNNING 2 LOTS
SEND AHEADS BEING EVALUATED
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
------------------
HOLD LOTS IN AREA:1
__________________
ON HOLD FOR PROCESSING BY ERIC B.
DOWN equipment:
--------------
CMP.A1 NEEDS PAD CHANGE
CMP.B3 UNLOAD CUP #3 MISSING UNLOAD
NUMBER of product lots in room:21
--------------------------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:20 WAFERS USED
MQC WAFERS AVAIL:2.5 BOXS
----------
|
| 82.47 | PASSDOWN | FABSIX::D_CAUSE | | Sat Dec 28 1996 07:40 | 46 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -DOWN/ROBOT PROBLEMS (JL0775 HALF OF THE LOT HAS
BEEN RUN)
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL0776 100% WILL NEED TU
CMP.B1 (Speedfam CMP-V) - UP/RUNNING 2 LOTS READY FOR TU
CMP.B2 (Speedfam CMP-V) - UP/RUNNING TU ON JL0712
CMP.B3 (Speedfam CMP-V) - DOWN/FAILED 24 HOUR MQC HAD PAD CHANGE NEEDS
FULL MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:
------------------
HOLD LOTS IN AREA:1
__________________
ON HOLD FOR PROCESSING BY ERIC B.
DOWN equipment:
--------------
CMP.A1 ROBOT PROBLEMS
CMP.B3 PAD CHANGE FOR MQC FAILURE
NUMBER of product lots in room:23
--------------------------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:30 WAFERS USED
MQC WAFERS AVAIL:4 BOXS
----------
|
| 82.48 | PASSDOWN | FABSIX::D_CAUSE | | Fri Jan 03 1997 07:50 | 45 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) -UP/IDLE MONITOR STILL NOT WORKING PASSED MQC
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING SEND AHEADS FOR 2 PMD'S
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JL0745 FINAL TU NEEDS DRG AND FINAL
JL0745 READY FOR FIRST PASS
CMP.B2 (Speedfam CMP-V) - DOWN/VERIFY U PAD CHANGE FOR LOW REMOVAL RATE AND STD
RUNNING MQC'S
CMP.B3 (Speedfam CMP-V) - UP/RUNNING XD0573 READY FOR TU
CMP-SCRUB.A1 (On-track scrubber) - UP/RUNNING XD0759 NEEDS DRG AND FINAL
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT lots in area:JD0729 DUE AT 8AM
------------------
HOLD LOTS IN AREA:2
__________________
ON HOLD FOR PROCESSING BY ERIC B.
DOWN equipment:
--------------
CMP.B2 PAD CHANGE FOR UNIFORMITY
NUMBER of product lots in room:12
--------------------------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:7 WAFERS USED
MQC WAFERS AVAIL:3.5 BOXES
----------
|
| 82.49 | ex | FABSIX::G_ISAACS | | Fri May 23 1997 20:31 | 63 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - DOWN/ Pad change.
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/
crash. Lost 2 wafers, crash report
has been filled out. Lot has not
been run.
MQC'S DONE.
CMP.B1 (Speedfam CMP-V) - TAKING A TRIP
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL1374 ILD1 rate=4881 time=160
needs drg.
JL1323 ILD1 rate=4546 time=160
needs drg.
MQC'S DONE.
CMP.B3 (Speedfam CMP-V) - UP/RUNNING 2 lots Send-a-heads 200 sec.
# JL1319 ILD2
JL1331 ILD2
Wafers are in same cassette
JL1331 are in slots 6-10
JL1319 are in slots 11-15
MQC'S DONE
CMP.B4 (Speedfam CMP-V)-- Down/ Recalb conditioner arm.
Installed new pad. Needs MQC's
wafers pre measured on .A1
File #'s 1.1170
2.1171
3.1172
4.1173
5.1174
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP:
------------------ -----------
Lots Shiped: New SPEC/TDCO:
----------- -------------
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
Misc.
----
|
| 82.50 | @cmp.dis | FABSIX::G_ISAACS | | Fri May 23 1997 20:48 | 69 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - DOWN Pad change. Ready for break-in and MQC.
CMP.A2 (Strasbaugh 6DS-SP) -UP/ RUNNING JD1596 PMD 1ST PASS.
Will need 100%.
CMP.B1 (Speedfam CMP-V) - TAKING A TRIP
CMP.B2 (Speedfam CMP-V) - DOWN/ Pad replaced. Will need break-in and
MQC.
CMP.B3 (Speedfam CMP-V) - DOWN/ Carriers not seeing wafers at pick-up
JL1508 ILD2 sa heads ran 190 sec measured
on .A5. Removal rate-3735
First 5 wafers in cassette are the
send-a-head wafers, need 1 sec touch-up.
JL1514 ILD2 sa heads ran 190 sec
measured on .A5 Removal rate-3925
Send-a-head wafers are done and in
cassette next to lot.
MQC wafers have been pre-measured on .A4
File # 3390 thru 3394.
CMP.B4 (Speedfam CMP-V)-- UP/RUNNING ROCKET LOT. JD1566 lot 100% on .A1
Removal rate
1 thru 5 400 sec 1569
6 10 1825
11 15 1842
16 20 2369
21 24 2551
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP:
------------------ -----------
Lots Shiped: New SPEC/TDCO:
----------- -------------
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
Misc.
----
|
| 82.51 | @cmp.dis 5/24/97 | FABSIX::G_ISAACS | | Sat May 24 1997 20:52 | 67 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JL1098 ILD1 first pass 180 sec.
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD1552 ILD1 100% on .A4
ran for 180 sec.
CMP.B1 (Speedfam CMP-V) - TAKING A TRIP
CMP.B2 (Speedfam CMP-V) - DOWN/ CRASHED break-in wafers.
Tool has new pads and carriers.
FAILED particles. SCRATCHES
HOT LOT JD1563 ILD1 ran send-a-heads
are in seperate cassette.
JL1522 ILD2 send-a-heads ran and are in
seperate cassette.
MQC post readings are reading on
thickness .A4.
needs drg.
JL1323 ILD1 rate=4546 time=160
needs drg.
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD1450 is ready to run. No
wafers have run yet.
CMP.B4 (Speedfam CMP-V)-- UP/RUNNING HOT LOT XE1478 first 400 sec.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE..was down all day.
Hot/B lots in area: Lots in CMP:
------------------ -----------
XE1478
JD1563
Lots Shiped: New SPEC/TDCO:
----------- -------------
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
Misc.
----
|
| 82.52 | | FABSIX::G_ISAACS | | Thu May 29 1997 20:12 | 78 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD1310, needs 100%
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/
CMP.B1 (Speedfam CMP-V) - TAKING A TRIP
CMP.B2 (Speedfam CMP-V) - UP/RUNNING
CMP.B3 (Speedfam CMP-V) - UP/RUNNING 2 LOTS MQC'S DONE
JD1562 ILD1
Removal rate=3035
Run time =245
running needs scrub and 100%
measurements.
JD1451 ILD3
First 400 sec.
CMP.B4 (Speedfam CMP-V)-- UP/RUNNING 2 LOTS
XD1506 ILD1
Removal rate=3650
Run time =215
Lot has run and needs scrub and 100%
measurements.
JD1401 ILD3
first 400 sec.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP:
------------------ -----------
Lots Shiped: New SPEC/TDCO:
----------- -------------
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
Misc.
----
|
| 82.53 | @CMP.DIS | FABSIX::G_ISAACS | | Fri May 30 1997 20:32 | 72 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE MQC's done.
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL1630 PMD
Will need scrub and 100.
Removal rate=2380
Run time =120
MQC'S DONE.
CMP.B1 (Speedfam CMP-V) - TAKING A TRIP
CMP.B2 (Speedfam CMP-V) - UP/RUNNING 2 lots JD1533 ILD2 JD1452 ILD2
Send-a-heads have been run for
both lots. Will need to be read.
Run time=185 sec. for both lots.
MQC'S DONE.
CMP.B3 (Speedfam CMP-V) - DOWN/ RUNNING JD1449 ILD3 will need
100% measurements.
Removal rate=1050
Run time =400 sec.
MQC'S ARE DONE.
CMP.B4 (Speedfam CMP-V)-- UP/RUNNING LOT # XD1557 ILD1
Running touch-up
Removal rate=3240
Run time =200 sec.
MQC'S DONE.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP:
------------------ -----------
Lots Shiped: New SPEC/TDCO:
----------- -------------
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
Misc.
----
|
| 82.54 | | FABSIX::G_ISAACS | | Fri May 30 1997 20:44 | 63 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD1310, needs 100%
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/ Wafer broke send cassette do
to robot.
XD1292 was on tool at time of
crash. Lost 2 wafers, crash report
has been filled out. Lot has not
been run.
MQC'S DONE.
CMP.B1 (Speedfam CMP-V) - TAKING A TRIP
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JL1374 ILD1 rate=4881 time=160
needs drg.
JL1323 ILD1 rate=4546 time=160
needs drg.
MQC'S DONE.
CMP.B3 (Speedfam CMP-V) - UP/RUNNING 2 lots Send-a-heads 200 sec.
# JL1319 ILD2
JL1331 ILD2
Wafers are in same cassette
JL1331 are in slots 6-10
JL1319 are in slots 11-15
MQC'S DONE
CMP.B4 (Speedfam CMP-V)-- Down/ Recalb conditioner arm.
Installed new pad. Needs MQC's
wafers pre measured on .A1
File #'s 1.1170
2.1171
3.1172
4.1173
5.1174
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP:
------------------ -----------
Lots Shiped: New SPEC/TDCO:
----------- -------------
Down Equipment: Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: MQC Monitors:
------------- ------------
Misc.
----
|