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Conference asdg::cmp

Title:	CMP
Notice:	Welcome to the CMP notesfile
Moderator:	FABSIX::B_TOWERLLE

Created:	Tue Oct 31 1995
Last Modified:	Fri Jun 06 1997
Last Successful Update:	Fri Jun 06 1997
Number of topics:	94
Total number of notes:	6381

36.0. "CMP.C#-7 PM TEMPLATES" by SUBPAC::BJUBINVILLE (CMP-6 Equipment Engineering) Sat Sep 28 1996 04:55

    
        THIS NOTE IS FOR THE BLANK PM CHECK SHEETS FOR THE 
    CMP.C#-7 TOOLS.  ENTRIES INTO THIS NOTE TO BE MADE BY
    MADE BY EQUIPMENT ENGINEERING ONLY.  ALL CMP.C#-7 PM 
    CHECKSHEETS SHOULD BE COPIED FROM THIS FILE ONLY.

T.R Title User Personal
Name Date Lines

36.1 Particles.... be gone!!!!1 SUBPAC::BJUBINVILLE CMP Equipment Engineering Sat Mar 22 1997 06:27 34

T.R	Title	User	Personal Name	Date	Lines
36.1	Particles.... be gone!!!!1	SUBPAC::BJUBINVILLE	CMP Equipment Engineering	`Sat Mar 22 1997 06:27`	34
	Took over from C shift for the particles issue. After 100 wafers were run, the tool still failed for over 100 particles. All of the motors were pulled out of the mounting shafts and there was carbon built-up on all of them except the one motor we replaced yesterday. There was signs of rust emitting from the outside brush station transport assembly so that was all rebuilt with new parts. Both roller arm shafts and many associated worn parts were replaced. The inside station was in fair condition as far as wear is concerned but no problems were found. The megasonic arm at home needed to be adjusted. When it came home, the arm was whacking up against the front panel. The spray nozzle was bumped to the left side of the wafer and wasn't spraying in the middle of the wafer. 200 wafers were run through the tool and MQC's were run... both wafers came in spec and removed particles. pre-5-29-0 post-5-27-0 pre-6-32-0 post-5-24-0 The tool was turned over to OPS but please monitor the MQC readings for a while to see the results stay near zero. The brush heights ad been changed since C shift so below are the new numbers. D shift OB IB ---- ---- The new brush heights are: Front 340 345 Rear 350 345


             Took over from C shift for the particles issue.
         After 100 wafers were run, the tool still failed for 
         over 100 particles.  All of the motors were pulled out 
         of the mounting shafts and there was carbon built-up on 
         all of them except the one motor we replaced yesterday.  
         There was signs of rust emitting from the outside brush 
         station transport assembly so that was all rebuilt with 
         new parts.  Both roller arm shafts and many associated 
         worn parts were replaced.  The inside station was in 
         fair condition as far as wear is concerned but no problems 
         were found.  The megasonic arm at home needed to be 
         adjusted. When it came home, the arm was whacking up 
         against the front panel.  The spray nozzle was bumped to 
         the left side of the wafer and wasn't spraying in the 
         middle of the wafer.  200 wafers were run through the 
         tool and MQC's were run...  both wafers came in spec
         and removed particles.   pre-5-29-0 post-5-27-0
                                  pre-6-32-0 post-5-24-0

         The tool was turned over to OPS but please monitor the
         MQC readings for a while to see the results stay near
         zero.  The brush heights ad been changed since C shift
         so below are the new numbers.
                                   
                                            D shift

                                  OB      IB
                                 ----    ----
The new brush heights are: Front 340      345  
                           Rear  350      345