| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 81.1 | A-shift CMP passdown 9/1/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Sep 01 1996 20:11 | 107 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 mqcs
BREAKIN WAFERS 10 misc
CMP.A1 (Strasbaugh 6DS-SP) - EXTERNAL: down for shutdown.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - EXTERNAL: down for shutdown.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: touching up JD0431 (m3). Then going down
for shutdown.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - EXTERNAL: down for shutdown.
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - RUNNING: touching up JL0479 (m1 - hot). Then
going down for shutdown.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: n/a
CMP-SCRUB.A1 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: n/a
CMP-SCRUB.A2 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: n/a
CMP-SCRUB.A3 12hr MQCS NEXT DUE : n/a
Hot/B lots in area:
__________________
JL0479 - M1
JL0473 - M1
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
all equipment being shutdown for PCW work.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
5.5 boxes of 12K mqc wafers. 4 boxes of 50K breakin wafers.
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
SEE EDCO BY CMP.B1.
Lots/wafers processed:
---------------------
JD0431 - M3 - 24WFRS
JL0479 - M1 - 23
XE0530 - PMD - 24
JD0497 - PMD - 6
# of carriers for strasbaugh/speedfam:
--------------------------------------
Jesus is building more now. Check room.
|
| 81.2 | A-shift CMP passdown 9/03/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Sep 03 1996 20:24 | 104 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS
BREAKIN WAFERS
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running breakins and mqcs after shutdown.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running breakins and mqcs after shutdown.
Had to rebuild right carrier (FYI).
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0516 (m1).
CMP.B1 24hr MQCS COMPLETED: 5:30pm 9/03
CMP.B1 24hr MQCS NEXT DUE : 5:30pm 9/04
CMP.B1 12hr MQCS COMPLETED: 5pm 9/03
CMP.B1 12hr MQCS NEXT DUE : 5am 9/04
CMP.B2 (Speedfam CMP-V) - IDLE. mqcs complete and in spec.
CMP.B2 24hr MQCS COMPLETED: 6:30pm 9/03
CMP.B2 24hr MQCS NEXT DUE : 6:30pm 9/04
CMP.B2 12hr MQCS COMPLETED: 5pm 9/03
CMP.B2 12hr MQCS NEXT DUE : 5am 9/04
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0473 (m1 - hot) and JL0447 (m2).
CMP.B3 24hr MQCS COMPLETED: 5pm 9/03
CMP.B3 24hr MQCS NEXT DUE : 5pm 9/04
CMP.B3 12hr MQCS COMPLETED: 5pm 9/03
CMP.B3 12hr MQCS NEXT DUE : 5am 9/04
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 3pm 9/03
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 3am 9/04
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 3:30pm 9/03
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 3:30am 9/04
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 3pm 9/03
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 3am 9/04
Hot/B lots in area:
__________________
JL0473 - M1
Hot lots coming to area:
-----------------------
XD0521 - DEP_ILD1 2
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
4.5 boxes of 12K mqc wafers.
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* SEE TDCO POSTED BY CMP.B1 FOR NEW INITIAL POLISH TIMES *
Lots/wafers processed:
---------------------
* none *
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM CARRIERS
0 STRASBAUGH CARRIERS
|
| 81.3 | PASSDOWN | FABSIX::D_CAUSE | | Wed Sep 04 1996 08:22 | 51 |
|
CMP.A1 (Strasbaugh 6DS-SP) - DOWN/3 MQC FAILURES REMOVEAL RATE INCREASING PAST
UCL. NEEDS PAD CHANGE
CMP.A2 (Strasbaugh 6DS-SP) -DOWN/ 3 MQC FAILURES FOR HIGH UNIFORMITY NEEDS PAD
CHANGE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JD0482 REWORK
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XD0527 FIRST PASS
CMP.B3 (Speedfam CMP-V) - UP/RUNNING XD0513 FIRST PASS
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - DOWN/SPIN STATION INOP
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:0
-------------------
STATIC lots in area:1
--------------------
HOLD LOTS IN AREA:0
__________________
DOWN equipment:
---------------
CMP.A1 HIGH REMOVAL RATE
CMP.A2 HIGH UNIFORMITY
CMP-SCRUB.A2 SPIN STATION INOP
NUMBER of product lots in room:4
-------------------------------
LOTS COMPLETED : 4
----------------
BREAK IN WAFERS USED: 15
MQC WAFERS USED:12
MQC WAFERS AVAIL:4.5 BOX
----------
|
| 81.4 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Thu Sep 05 1996 08:45 | 49 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/TO PROCESS ENG
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/IDLE MQC DONE NEW CONDITIONER RAISED REMOVAL
RATE TO AN AVERAGE OF 3300!!!!
CMP.B2 (Speedfam CMP-V) - UP/IDLE
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD0441 HOT LOT FIRST 400 SEC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - DOWN/SPIN STATION ERROR
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:1
-------------------
JD0441 **HOT**
STATIC lots in area:0
--------------------
HOLD LOTS IN AREA:0
__________________
DOWN equipment:
---------------
CMP-SCRUB.A2 SPIN STATION ERROR
NUMBER of product lots in room:1
-------------------------------
LOTS COMPLETED : 8
----------------
BREAK IN WAFERS USED: 15
MQC WAFERS USED:12
MQC WAFERS AVAIL:3 BOXS
----------
|
| 81.5 | PASSDOWN CMP B-SHIFT 9/8/96 | FABSIX::M_PROVENCHER | | Sun Sep 08 1996 07:33 | 110 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 MQC'S
BREAKIN WAFERS 37 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A1 24hr MQCS COMPLETED: 9/7/96 @5:00 PM
CMP.A1 24hr MQCS NEXT DUE : 9/8/96 @5:00 PM
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 24hr MQCS COMPLETED: 9/7/96 @2:00 PM
CMP.A2 24hr MQCS NEXT DUE : 9/8/96 @2:00 PM
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JL0450 M2 TOUCHUP
CMP.B1 24hr MQCS COMPLETED: 9/8/96 @1:00 AM
CMP.B1 24hr MQCS NEXT DUE : 9/9/96 @1:00 AM
CMP.B1 12hr MQCS COMPLETED: 9/8/96 @11:00PM
CMP.B1 12hr MQCS NEXT DUE : 9/8/96 @11:00AM
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XD0521 M2 (HOT LOT) TOUCHUP
CMP.B2 24hr MQCS COMPLETED: 9/8/96 @12:30AM
CMP.B2 24hr MQCS NEXT DUE : 9/9/96 @12:30AM
CMP.B2 12hr MQCS COMPLETED: 9/8/96 @12:30AM
CMP.B2 12hr MQCS NEXT DUE : 9/8/96 @12:30PM
CMP.B3 (Speedfam CMP-V) - : UP/IDLE
CMP.B3 24hr MQCS COMPLETED: 9/8/96 @ 2:30 AM
CMP.B3 24hr MQCS NEXT DUE : 9/9/96 @ 2:30 AM
CMP.B3 12hr MQCS COMPLETED: 9/8/96 @ 2:30 AM
CMP.B3 12hr MQCS NEXT DUE : 9/8/96 @ 2:30 PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/7/96 @ 10:00 PM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/8/96 @ 10:00 AM
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/7/96 @ 10:00 PM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/8/96 @ 10:00 AM
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/7/96 @ 10:00 PM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/8/96 @ 10:00 AM
Hot/B lots in area:
__________________
* XD0521 M2 (B2 TOUCHUP) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* XD0519 *
Monitor status:
--------------
3 BOXES of 12k mqc wafers. ( 2 ON ORDER )
1 BOX 50K BREAKIN WAFERS ( 4 ON ORDER )
Number of product lots in room:
------------------------------
* 2 LOTS *
New specs/revs posted:
---------------------
* SEE *NEW* TDCO BY CMP.B1 *
REGAURING NEW TIMES FOR SPEEDFAMS ONLY
Lots/wafers processed:
---------------------
* JL0488 PMD 23 WAFERS *
JL0474 M1 24 WAFERS
XD0520 M2 24 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
10 STRASBAUGH CARRIERS
? STRASBAUGH PLATES
|
| 81.6 | A-shift CMP passdown 9/08/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Sep 08 1996 20:31 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 7pm 9/08
CMP.A1 24hr MQCS NEXT DUE : 7pm 9/09
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 24hr MQCS COMPLETED: 7:30pm 9/08
CMP.A2 24hr MQCS NEXT DUE : 7:30pm 9/09
CMP.B1 (Speedfam CMP-V) - RUNNING: XE0530 (m1).
CMP.B1 24hr MQCS COMPLETED: 2am 9/08
CMP.B1 24hr MQCS NEXT DUE : 2am 9/09
CMP.B1 12hr MQCS COMPLETED: 3:30pm 9/08
CMP.B1 12hr MQCS NEXT DUE : 3:30am 9/09
CMP.B2 (Speedfam CMP-V) - RUNNING: JL0460 (m2) and XE0530 (m1).
CMP.B2 24hr MQCS COMPLETED: 12am 9/08
CMP.B2 24hr MQCS NEXT DUE : 12am 9/09
CMP.B2 12hr MQCS COMPLETED: 7pm 9/08
CMP.B2 12hr MQCS NEXT DUE : 7am 9/09
CMP.B3 (Speedfam CMP-V) - RUNNING: XE0524 (m1).
CMP.B3 24hr MQCS COMPLETED: 2:30am 9/08
CMP.B3 24hr MQCS NEXT DUE : 2:30am 9/09
CMP.B3 12hr MQCS COMPLETED: 5pm 9/08
CMP.B3 12hr MQCS NEXT DUE : 5am 9/09
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 4:30pm 9/08
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 4:30am 9/09
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 4:30pm 9/08
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 4:30am 9/09
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 4:30pm 9/08
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 4:30am 9/09
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0462 - 1.9 (STI LOT)
XD0519 - 0.9 (ON HOLD FOR FRANK K.)
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0519 - HOLD FOR FRANK K.
Monitor status:
--------------
4 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers (more on order)
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
SEE TDCO POSTED BY CMP.B1
Lots/wafers processed:
---------------------
JL0476 - M1 - 24WFRS
JD0468 - M1 - 24
JL0450 - M2 - 24
JD0467 - M2 - 22
XD0521 - M2 - 22
JD0483 - M1 - 14
JD0466 - M2 - 18
XD0510 - M2 - 21
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
10 STRASBAUGH CARRIERS
|
| 81.7 | PASSDOWN CMP. B-SHIFT 9/9/96 | FABSIX::M_PROVENCHER | | Mon Sep 09 1996 07:16 | 113 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 MQC'S
BREAKIN WAFERS 29 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A1 24hr MQCS COMPLETED: 9/8/96 @7:00 PM
CMP.A1 24hr MQCS NEXT DUE : 9/9/96 @7:00 PM
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 24hr MQCS COMPLETED: 9/8/96 @7:30 PM
CMP.A2 24hr MQCS NEXT DUE : 9/9/96 @7:30 PM
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B1 24hr MQCS COMPLETED: 9/9/96 @3:30 AM
CMP.B1 24hr MQCS NEXT DUE : 9/10/96 @3:30 AM
CMP.B1 12hr MQCS COMPLETED: 9/9/96 @3:30AM
CMP.B1 12hr MQCS NEXT DUE : 9/9/96 @3:30PM
CMP.B2 (Speedfam CMP-V) - UP/IDLE
CMP.B2 24hr MQCS COMPLETED: 9/9/96 @4:30AM
CMP.B2 24hr MQCS NEXT DUE : 9/10/96 @4:30AM
CMP.B2 12hr MQCS COMPLETED: 9/9/96 @4:30AM
CMP.B2 12hr MQCS NEXT DUE : 9/9/96 @4:30PM
CMP.B3 (Speedfam CMP-V) - : UP/IDLE
CMP.B3 24hr MQCS COMPLETED: 9/9/96 @ 2:30 AM
CMP.B3 24hr MQCS NEXT DUE : 9/10/96 @ 2:30 AM
CMP.B3 12hr MQCS COMPLETED: 9/9/96 @ 2:30 AM
CMP.B3 12hr MQCS NEXT DUE : 9/9/96 @ 2:30 PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/9/96 @ 3:00 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/9/96 @ 3:00 PM
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/9/96 @ 3:00 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/9/96 @ 3:00 PM
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/9/96 @ 3:00 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/9/96 @ 3:00 PM
Hot/B lots in area:
__________________
* NONE *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* JD0462 (STI LOT) 2.4 *
XD0519 (ON HOLD FOR F. KRUPA) 1.45
XD0508 (ON HOLD FOR F. KRUPA "EXTENSIVE P2 MEAS.") .35
Down Equipment:
--------------
* THICKNESS.A5 *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* XD0519 *
JD0462
XD0508
Monitor status:
--------------
3 1/2 BOXES of 12k mqc wafers. ( 2 ON ORDER )
1 1/2 BOX 50K BREAKIN WAFERS ( MORE ON ORDER )
Number of product lots in room:
------------------------------
* NONE *
New specs/revs posted:
---------------------
* SEE *NEW* TDCO BY CMP.B1 *
NEW TIMES FOR SPEEDFAMS ONLY
Lots/wafers processed:
---------------------
* XE0524 M1 24 WAFERS
XE0530 M1 24 WAFERS
XD0536 M1 11 WAFERS
JL0460 M2 23 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
10 STRASBAUGH CARRIERS
? STRASBAUGH PLATES
|
| 81.8 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Mon Sep 09 1996 20:41 | 123 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 4 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE/UP
CMP.A1 24hr MQCS COMPLETED: 15:46 hours 9/09/96
CMP.A1 24hr MQCS NEXT DUE : 12:32 hours 9/10/96
========================================================================
CMP.A2 (Strasbaugh 6DS-SP) - : DOWN: Needs new pad.
Lot XD0539 was 100% measured. Only 3 wafers need to be touched-up
and the lot will be done.
CMP.A2 24hr MQCS COMPLETED: Mqcs to begin after pad change.
CMP.A2 24hr MQCS NEXT DUE :
========================================================================
CMP.B1 (Speedfam CMP-V) - : MQC: Reps worked all day on tool to try to
fix the carrier rotation issues. The pad was replaced because a dummy
wafer broke on the pad.
CMP.B1 24hr MQCS COMPLETED: Ongoing
CMP.B1 24hr MQCS NEXT DUE :
CMP.B1 12hr MQCS COMPLETED:
=========================================================================
CMP.B2 (Speedfam CMP-V) - : RUNNING: JL0493 (PMD)
CMP.B2 24hr MQCS COMPLETED: 4:16 hours 9/09/96
CMP.B2 24hr MQCS NEXT DUE : 4:16 hours 8/10/96
CMP.B2 12hr MQCS COMPLETED: DONE
=========================================================================
CMP.B3 (Speedfam CMP-V) - : RUNNING: Lot XD0508 (M3) splitted six
different ways. We must try to get as close to target as possible.
Once lot completes polishing it needs to be final_sorted, then 100%
measured on thickness tool and put on hold for frank Krupa.
CMP.B3 24hr MQCS COMPLETED: 3:17 hours 9/09/96
CMP.B3 24hr MQCS NEXT DUE : 3:17 hours 9/10/96
CMP.B3 12hr MQCS COMPLETED: DONE
=========================================================================
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 14:48 hours 9/09/96
=========================================================================
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 14:48 hours 9/10/96
=========================================================================
CMP-SCRUB.A3 (On-track scrubber) - IDLE
CMP-SCRUB.A4 12hr MQCS COMPLETED: 14:48 hours 9/10/96
Hot/B lots in area:
__________________
none
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
none
Down Equipment:
--------------
Scrap lots:
----------
* none *
Hold Lots:
---------
Monitor status:
--------------
3 boxes of 12K mqc wafers
3 boxes of 50k exercise wafers
Number of product lots in room:
------------------------------
4 lots
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0519 _ M2 - 22 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
10 STRASBAUGH CARRIERS
|
| 81.9 | PASSDOWN CMP. B-SHIFT 9/10/96 | FABSIX::M_PROVENCHER | | Tue Sep 10 1996 07:48 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 MQC'S
BREAKIN WAFERS 43 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A1 24hr MQCS COMPLETED: 9/9/96 @4:00 PM
CMP.A1 24hr MQCS NEXT DUE : 9/10/96 @4:00 PM
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 24hr MQCS COMPLETED: 9/9/96 @10:30 PM
CMP.A2 24hr MQCS NEXT DUE : 9/10/96 @10:30 PM
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B1 24hr MQCS COMPLETED: 9/9/96 @11:00 PM
CMP.B1 24hr MQCS NEXT DUE : 9/10/96 @11:00 PM
CMP.B1 12hr MQCS COMPLETED: 9/9/96 @11:00 PM
CMP.B1 12hr MQCS NEXT DUE : 9/10/96 @11:00 AM
CMP.B2 (Speedfam CMP-V) - UP/MQC (MQC'S EDGE FAST HEADS 4, AND 5 ABOVE 8%
PAD STEP_H IS @ .061 )
CMP.B2 24hr MQCS COMPLETED: 9/10/96 IN PROCESS
CMP.B2 24hr MQCS NEXT DUE : 9/11/96 IN PROCESS
CMP.B2 12hr MQCS COMPLETED: 9/10/96 @7:00 AM
CMP.B2 12hr MQCS NEXT DUE : 9/10/96 @7:00 PM
CMP.B3 (Speedfam CMP-V) - : UP/RUNNING JL0473 M3 TOUCHUP
CMP.B3 24hr MQCS COMPLETED: 9/10/96 @ 4:30 AM
CMP.B3 24hr MQCS NEXT DUE : 9/11/96 @ 4:30 AM
CMP.B3 12hr MQCS COMPLETED: 9/10/96 @ 4:30 AM
CMP.B3 12hr MQCS NEXT DUE : 9/10/96 @ 4:30 PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/10/96 @ 7:00 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/10/96 @ 7:00 PM
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/10/96 @ 7:00 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/10/96 @ 7:00 PM
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/10/96 @ 7:00 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/10/96 @ 7:00 PM
Hot/B lots in area:
__________________
* NONE *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* JD0462 (STI LOT) 2.4 *
XD0508 (ON HOLD FOR F. KRUPA "POST P2 MEAS.") .15
Down Equipment:
--------------
* NONE *
Scrap lots:
----------
* JL0493 #12 ROBOT GRIPPER FAILURE *
Hold Lots:
---------
* JD0462 *
XD0508
Monitor status:
--------------
2 1/2 BOXES of 12k mqc wafers. ( 2 ON ORDER )
2 1/2 BOX 50K BREAKIN WAFERS ( 2 ON ORDER )
Number of product lots in room:
------------------------------
* 1 LOT *
New specs/revs posted:
---------------------
* SEE *NEW* TDCO BY CMP.B1 *
NEW TIMES FOR SPEEDFAMS ONLY
Lots/wafers processed:
---------------------
* XD0539 PMD 24 WAFERS *
JD0499 PMD 23 WAFERS
JL0493 PMD 23 WAFERS
JL0494 PMD 23 WAFERS
JD0497 M1 6 WAFERS
XD0508 M3 24 WAFERS (ON HOLD PER F.KRUPA FOR P2 MEAS.)
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
10 STRASBAUGH CARRIERS
? STRASBAUGH PLATES
|
| 81.10 | A-shift CMP passdown 9/10/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Sep 10 1996 20:26 | 106 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 mqc
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: down to eng for pad experiments.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0545 (pmd).
CMP.A2 24hr MQCS COMPLETED: 12am 9/10
CMP.A2 24hr MQCS NEXT DUE : 12am 9/11
CMP.B1 (Speedfam CMP-V) - DOWN: waiting for parts for conditioning arm.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0505 (m3).
CMP.B2 24hr MQCS COMPLETED: 2pm 9/10
CMP.B2 24hr MQCS NEXT DUE : 2pm 9/11
CMP.B2 12hr MQCS COMPLETED: 2pm 9/10
CMP.B2 12hr MQCS NEXT DUE : 2am 9/11
CMP.B3 (Speedfam CMP-V) - RUNNING: XM0515 (m2).
CMP.B3 24hr MQCS COMPLETED: 5am 9/10
CMP.B3 24hr MQCS NEXT DUE : 5am 9/11
CMP.B3 12hr MQCS COMPLETED: 4:30pm 9/10
CMP.B3 12hr MQCS NEXT DUE : 5:30am 9/11
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7:30pm 9/10
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7:30am 9/11
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7:30pm 9/10
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7:30am 9/11
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7:30pm 9/10
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7:30am 9/11
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XD0521 - DEP_ILD3 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - ENG
CMP.B1 - PARTS
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers.
6 boxes of 50K breakin wafers.
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* see tdco by CMP.B1 *
Lots/wafers processed:
---------------------
JD0462 - STI - 23WFRS
JD0497B - M3 - 5
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
10 STRASBAUGH CARRIERS
|
| 81.11 | passdown cmp b-shift 9/11/96 | FABSIX::M_PROVENCHER | | Wed Sep 11 1996 07:15 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 MQC'S
BREAKIN WAFERS 47 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: down to eng for pad experiments.
CMP.A1 24hr MQCS COMPLETED: N/A
CMP.A1 24hr MQCS NEXT DUE : N/A
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC
CMP.A2 24hr MQCS COMPLETED: IN PROCESS
CMP.A2 24hr MQCS NEXT DUE : N/A
CMP.B1 (Speedfam CMP-V) - DOWN: waiting for parts for conditioning arm.
CMP.B1 24hr MQCS COMPLETED: N/A
CMP.B1 24hr MQCS NEXT DUE : N/A
CMP.B1 12hr MQCS COMPLETED: N/A
CMP.B1 12hr MQCS NEXT DUE : N/A
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XD0521 M3 (HOT LOT)
CMP.B2 24hr MQCS COMPLETED: 9/11/96 @2:00 PM
CMP.B2 24hr MQCS NEXT DUE : 9/12/96 @2:00 PM
CMP.B2 12hr MQCS COMPLETED: 9/11/96 @6:00 AM
CMP.B2 12hr MQCS NEXT DUE : 9/11/96 @6:00 PM
CMP.B3 (Speedfam CMP-V) - : UP/RUNNING YE0191 M2/JL0472 M2
CMP.B3 24hr MQCS COMPLETED: 9/11/96 @ 4:00 AM
CMP.B3 24hr MQCS NEXT DUE : 9/12/96 @ 4:00 AM
CMP.B3 12hr MQCS COMPLETED: 9/11/96 @ 4:00 AM
CMP.B3 12hr MQCS NEXT DUE : 9/11/96 @ 4:00 PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/11/96 @ 7:30 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/11/96 @ 7:30 PM
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/11/96 @ 7:30 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/11/96 @ 7:30 PM
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/11/96 @ 7:30 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/11/96 @ 7:30 PM
Hot/B lots in area:
__________________
* XD0521 M3 cmp.B2 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* CMP.A1 eng. *
CMP.B1 parts
Scrap lots:
----------
* JD0482 wafer #5 over polished *
Hold Lots:
----------
* NONE *
Monitor status:
--------------
2 1/2 boxes of 12k mqc wafers.
5 1/2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 3 lots *
New specs/revs posted:
---------------------
* SEE *NEW* TDCO BY CMP.B1 *
NEW TIMES FOR SPEEDFAMS ONLY
Lots/wafers processed:
---------------------
* XD0545 PMD 24 wafers *
JD0482 M1 20 wafers
XD0528 M1 24 wafers
XM0515 M2 20 wafers
XD0516 M2 19 wafers
XD0505 M3 21 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 speedfam carriers
10 strasbaugh carriers
? strasbaugh plates
|
| 81.12 | A-shift CMP passdown 9/11 | FABSIX::J_SADIN | Freedom isn't free. | Wed Sep 11 1996 20:25 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 40 misc
CMP.A1 (Strasbaugh 6DS-SP) - ENG: down to eng for pad experiments.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0471 (m2).
CMP.A2 24hr MQCS COMPLETED: 8:30am 9/11
CMP.A2 24hr MQCS NEXT DUE : 8:30am 9/12
CMP.B1 (Speedfam CMP-V) - MQC: running mqcs after pad/carrier change.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0538 (m1).
CMP.B2 24hr MQCS COMPLETED: 4pm 9/11
CMP.B2 24hr MQCS NEXT DUE : 4pm 9/12
CMP.B2 12hr MQCS COMPLETED: 4pm 9/11
CMP.B2 12hr MQCS NEXT DUE : 4am 9/12
CMP.B3 (Speedfam CMP-V) - VERIFY: running breakins and mqcs after pad
change (both pads).
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11pm 9/11
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11am 9/12
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 11pm 9/11
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 11am 9/12
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 11pm 9/11
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11am 9/12
Hot/B lots in area:
__________________
XD0520 - M3
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - ENG
CMP.B1 - MQC
CMP.B3 - VERIFY
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1.5 boxes of 12K mqc wafers.
5 boxes of 50K mqc wafers.
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
see tdco by cmp.b1
Lots/wafers processed:
---------------------
JD0498 - PMD - 24WFRS
XD0521 - M3 - 22
JL0472 - M2 - 23
YE0191 - M2 - 21
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM CARRIERS
9 STRASBAUGH CARRIERS
|
| 81.13 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Thu Sep 12 1996 08:47 | 47 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/TO PROCESS ENG
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL0471 NEEDS 100% AND T/U
CMP.B1 (Speedfam CMP-V) - UP/IDLE MQC DONE
CMP.B2 (Speedfam CMP-V) - DOWN/FLIPPER ASSY MALFUNCTION
CMP.B3 (Speedfam CMP-V) - DOWN/MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:
-------------------
STATIC lots in area:7
--------------------
HOLD LOTS IN AREA:1
__________________
DOWN equipment:
---------------
CMP.A1 DOWN TO ENG
CMP.B2 FLIPPER ASSY
CMP.B3 FAILED MQC 5 TIMES
NUMBER of product lots in room:10
-------------------------------
LOTS COMPLETED : 3
----------------
BREAK IN WAFERS USED: 15
MQC WAFERS USED:45 WAFERS USED
MQC WAFERS AVAIL:2 BOXES
----------
|
| 81.14 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri Sep 13 1996 08:29 | 46 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/TO PROCESS ENG
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING XD0542 **HOT LOT**
CMP.B1 (Speedfam CMP-V) - DOWN/CRASH WILL NEED FULL MQC
CMP.B2 (Speedfam CMP-V) - UP/RUNNING FIRST 400 SEC ON JD0453
CMP.B3 (Speedfam CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:1
-------------------
XD0542 ****HOT LOT****
STATIC lots in area:0
--------------------
HOLD LOTS IN AREA:1
__________________
DOWN equipment:
---------------
CMP.B1 CRASH
NUMBER of product lots in room:2
-------------------------------
LOTS COMPLETED : 11
----------------
BREAK IN WAFERS USED: 25
MQC WAFERS USED:5 WAFERS USED
MQC WAFERS AVAIL:5 BOXES
----------
|
| 81.15 | passdown cmp b-shift 9/15/96 | FABSIX::M_PROVENCHER | | Sun Sep 15 1996 07:19 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 13 MQC'S
BREAKIN WAFERS 32 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: down to eng for pad experiments.
CMP.A1 24hr MQCS COMPLETED: N/A
CMP.A1 24hr MQCS NEXT DUE : N/A
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC
CMP.A2 24hr MQCS COMPLETED: IN PROCESS
CMP.A2 24hr MQCS NEXT DUE : N/A
CMP.B1 (Speedfam CMP-V) - : up/idle
CMP.B1 24hr MQCS COMPLETED: 9/14/96 @11:00 am
CMP.B1 24hr MQCS NEXT DUE : 9/15/96 @11:00 am
CMP.B1 12hr MQCS COMPLETED: 9/14/96 @ 9:00 pm
CMP.B1 12hr MQCS NEXT DUE : 9/15/96 @ 9:00 am
CMP.B2 (Speedfam CMP-V) - : up/mqc
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - : up/running XE0530 M2
CMP.B3 24hr MQCS COMPLETED: 9/14/96 @10:30 pm
CMP.B3 24hr MQCS NEXT DUE : 9/15/96 @10:30 pm
CMP.B3 12hr MQCS COMPLETED: 9/14/96 @10:30 pm
CMP.B3 12hr MQCS NEXT DUE : 9/15/96 @10:30 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/15/96 @12:30 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/15/96 @12:30 PM
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/15/96 @12:30 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/15/96 @12:30 PM
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/15/96 @12:30 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/15/96 @12:30 PM
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* CMP.A1 eng *
Scrap lots:
----------
* none *
Hold Lots:
----------
* XD0519 M3 on hold per F.Krupa *
Monitor status:
--------------
3 1/2 boxes of 12k mqc wafers.
4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 1 lot *
New specs/revs posted:
---------------------
* SEE *NEW* TDCO BY CMP.B1 *
NEW TIMES FOR SPEEDFAMS ONLY
Lots/wafers processed:
---------------------
* JL0494 m1 23 wafers *
JL0476 m2 24 wafers
XE0524 m2 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 speedfam carriers
8 strasbaugh carriers
? strasbaugh plates
|
| 81.16 | A-shift CMP passdown 9/15/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Sep 15 1996 20:10 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - ENG: pad experiments.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0503 (pmd).
CMP.A2 24hr MQCS COMPLETED: 7:30am 9/15
CMP.A2 24hr MQCS NEXT DUE : 7:30am 9/16
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0516 (m3).
CMP.B1 24hr MQCS COMPLETED: 7pm 9/15
CMP.B1 24hr MQCS NEXT DUE : 7pm 9/16
CMP.B1 12hr MQCS COMPLETED: 7pm 9/15
CMP.B1 12hr MQCS NEXT DUE : 7am 9/16
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B2 24hr MQCS COMPLETED: 7:30am 9/15
CMP.B2 24hr MQCS NEXT DUE : 7:30am 9/16
CMP.B2 12hr MQCS COMPLETED: 7:30pm 9/15
CMP.B2 12hr MQCS NEXT DUE : 7:30am 9/16
CMP.B3 (Speedfam CMP-V) - IDLE.
CMP.B3 24hr MQCS COMPLETED: 10pm 9/14
CMP.B3 24hr MQCS NEXT DUE : 10pm 9/15
CMP.B3 12hr MQCS COMPLETED: 4pm 9/15
CMP.B3 12hr MQCS NEXT DUE : 4am 9/16
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 4:45pm 9/15
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 4:45am 9/16
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 4:45pm 9/15
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 4:45am 9/16
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 4:45pm 9/15
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 4:45am 9/16
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XD0542 - DEP_ILD1 2
Static Lots in area:
-------------------
XD0519 - 0.9DAYS - HOLD FOR FRANK K.
Down Equipment:
--------------
CMP.A1 - ENG PAD EXPERIMENTS
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0519 - HOLD FOR FRANK K.
Monitor status:
--------------
4 BOXES OF 12K WAFERS
5 BOXES OF 50K WAFERS
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* SEE TDCO BY CMP.B1 *
Lots/wafers processed:
---------------------
XD0539 - M1 - 24WFRS
JD0501 - PMD - 24
JD0481 - M1 - 24
JD0497 - M3 - 6
XE0530 - M2 - 22
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 SPEEDFAM CARRIERS
8 STRASBAUGH CARRIERS
|
| 81.17 | passdown cmp b-shift 9/16/96 | FABSIX::M_PROVENCHER | | Mon Sep 16 1996 07:54 | 110 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 23 MQC'S
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: down to eng for pad experiments.
CMP.A1 24hr MQCS COMPLETED: N/A
CMP.A1 24hr MQCS NEXT DUE : N/A
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC
CMP.A2 24hr MQCS COMPLETED: IN PROCESS
CMP.A2 24hr MQCS NEXT DUE : N/A
CMP.B1 (Speedfam CMP-V) - : up/running xd0542 m1 hot lot/jd0499 m1
CMP.B1 24hr MQCS COMPLETED: 9/15/96 @ 7:00 pm
CMP.B1 24hr MQCS NEXT DUE : 9/16/96 @ 7:00 am
CMP.B1 12hr MQCS COMPLETED: 9/16/96 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : 9/16/96 @ 7:00 pm
CMP.B2 (Speedfam CMP-V) - : up/mqc
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - : up/mqc
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/16/96 @ 4:30 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/15/96 @ 4:30 PM
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/15/96 @ 4:30 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/15/96 @ 4:30 PM
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/15/96 @ 4:30 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/15/96 @ 4:30 PM
Hot/B lots in area:
__________________
* xd0542 m1 hot (b1) *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xd0519 m3 1.46 days hold per f.krupa *
Down Equipment:
--------------
* CMP.A1 eng *
Scrap lots:
----------
* none *
Hold Lots:
----------
* XD0519 M3 on hold per F.Krupa *
Monitor status:
--------------
3 boxes of 12k mqc wafers.
5 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 3 lots *
New specs/revs posted:
---------------------
* SEE *NEW* TDCO BY CMP.B1 *
NEW TIMES FOR SPEEDFAMS ONLY
Lots/wafers processed:
---------------------
* jd0503 pmd 24 wafers *
jl0513 pmd 24 wafers
jd0498 m1 24 wafers
xd0516 m3 19 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 speedfam carriers
8 strasbaugh carriers
? strasbaugh plates
|
| 81.18 | A-shift CMP passdown 9/16/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Sep 16 1996 20:35 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - PM: annual pm in progress. Should be done this
evening.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0509 (pmd).
CMP.A2 24hr MQCS COMPLETED: 10am 9/16
CMP.A2 24hr MQCS NEXT DUE : 10am 9/17
CMP.B1 (Speedfam CMP-V) - MQC: running 24hr mqcs.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 6:45pm 9/16
CMP.B1 12hr MQCS NEXT DUE : 6:45am 9/17
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B2 24hr MQCS COMPLETED: 8am 9/16
CMP.B2 24hr MQCS NEXT DUE : 8am 9/17
CMP.B2 12hr MQCS COMPLETED: 6pm 9/16
CMP.B2 12hr MQCS NEXT DUE : 6am 9/17
CMP.B3 (Speedfam CMP-V) - IDLE.
CMP.B3 24hr MQCS COMPLETED: 10am 9/16
CMP.B3 24hr MQCS NEXT DUE : 10am 9/17
CMP.B3 12hr MQCS COMPLETED: 10am 9/16
CMP.B3 12hr MQCS NEXT DUE : 10pm 9/16
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 4pm 9/16
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 4am 9/17
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 4pm 9/16
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 4am 9/17
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 4pm 9/16
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 4am 9/17
Hot/B lots in area:
__________________
XD0554 - PMD
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - ANNUAL PM
Scrap lots:
----------
15wfrs scrapped from XD0542 (over polished)
Hold Lots:
---------
XD0519 - M3 ON HOLD FOR FRANK K. (SPLIT LOT)
Monitor status:
--------------
3 boxes of 12K mqc wafers
4.5 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* see tdco by CMP.B1 *
Lots/wafers processed:
---------------------
JL0502 - PMD - 24WFRS
JL0513 - PMD - 24
XD0542 - M1 - 5
JD0499 - M1 - 23
XD0554 - PMD - 24
XD0545 - M1 - 23
XD0536 - M2 - 11
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 SPEEDFAM CARRIERS
8 STRASBAUGH CARRIERS
|
| 81.19 | passdown cmp b-shift 9/17/96 | FABSIX::M_PROVENCHER | | Tue Sep 17 1996 07:20 | 110 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 MQC'S
BREAKIN WAFERS 37 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: down to eng for pad experiments.
CMP.A1 24hr MQCS COMPLETED: N/A
CMP.A1 24hr MQCS NEXT DUE : N/A
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC (PAD CHANGE, carrier change)
CMP.A2 24hr MQCS COMPLETED: IN PROCESS
CMP.A2 24hr MQCS NEXT DUE : N/A
CMP.B1 (Speedfam CMP-V) - : up/running YD0187 M2/ YE0192 M2(BOTH AT TOUCHUP)
CMP.B1 24hr MQCS COMPLETED: 9/16/96 @ 9:30 pm
CMP.B1 24hr MQCS NEXT DUE : 9/17/96 @ 9:30 pm
CMP.B1 12hr MQCS COMPLETED: 9/17/96 @ 4:30 am
CMP.B1 12hr MQCS NEXT DUE : 9/17/96 @ 4:30 pm
CMP.B2 (Speedfam CMP-V) - : up/idle
CMP.B2 24hr MQCS COMPLETED: 9/17/96 @ 2:30 am
CMP.B2 24hr MQCS NEXT DUE : 9/18/96 @ 2:30 am
CMP.B2 12hr MQCS COMPLETED: 9/17/96 @ 4:30 am
CMP.B2 12hr MQCS NEXT DUE : 9/17/96 @ 4:30 pm
CMP.B3 (Speedfam CMP-V) - : up/idle
CMP.B3 24hr MQCS COMPLETED: 9/16/96 @10:00 am
CMP.B3 24hr MQCS NEXT DUE : 9/17/96 @10:00 am
CMP.B3 12hr MQCS COMPLETED: 9/17/96 @ 2:30 am
CMP.B3 12hr MQCS NEXT DUE : 9/17/96 @ 2:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/17/96 @ 4:30 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/17/96 @ 4:30 PM
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/17/96 @ 4:30 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/17/96 @ 4:30 PM
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/17/96 @ 4:30 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/17/96 @ 4:30 PM
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xd0519 m3 2.46 days hold per f.krupa *
Down Equipment:
--------------
* CMP.A1 (eng) *
cmp.a2 (pad change, carrier change)
Scrap lots:
----------
* none *
Hold Lots:
----------
* XD0519 M3 on hold per F.Krupa *
Monitor status:
--------------
2 1/2 boxes of 12k mqc wafers. (two on order)
5 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 3 lots *
New specs/revs posted:
---------------------
* SEE *NEW* TDCO BY CMP.B1 *
NEW TIMES FOR SPEEDFAMS ONLY
Lots/wafers processed:
---------------------
* xd0535 pmd 24 wafers *
jl0509 pmd 24 wafers
yd0184a m2 3 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 speedfam carriers
6 strasbaugh carriers
? strasbaugh plates
|
| 81.20 | A-shift CMP passdown 9/17/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Sep 17 1996 20:21 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - ENG: down to eng for pad experiments.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0508 (pmd).
CMP.A2 24hr MQCS COMPLETED: 5pm 9/17
CMP.A2 24hr MQCS NEXT DUE : 5pm 9/18
CMP.B1 (Speedfam CMP-V) - MQC: running mqcs and breakin wafers after
pad/carrier change.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0528 (m2).
CMP.B2 24hr MQCS COMPLETED: 4:30am 9/17
CMP.B2 24hr MQCS NEXT DUE : 4:30am 9/18
CMP.B2 12hr MQCS COMPLETED: 7pm 9/17
CMP.B2 12hr MQCS NEXT DUE : 7am 9/18
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0519 (m3).
CMP.B3 24hr MQCS COMPLETED: 10am 9/17
CMP.B3 24hr MQCS NEXT DUE : 10am 9/18
CMP.B3 12hr MQCS COMPLETED: 10am 9/17
CMP.B3 12hr MQCS NEXT DUE : 10pm 9/17
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 6pm 9/17
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 6am 9/18
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 6pm 9/17
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 6am 9/18
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7:30pm 9/17
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7:30am 9/18
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0519 - 1.1DAYS
Down Equipment:
--------------
CMP.A1 - ENG
CMP.B1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0519 - HOLD FOR F. KRUPA
JD0377 - HOLD FOR L. CAMILLETTI
Monitor status:
--------------
2 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
see tdco by cmp.b1
Lots/wafers processed:
---------------------
XD0543 - PMD - 23WFRS
YD0168 - M3 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
(SAM WAS IN TODAY AND MAY HAVE BUILT MORE - SEE HIS PASSDOWN FOR DETAILS)
|
| 81.21 | PASSDOWN | FABSIX::D_CAUSE | | Wed Sep 18 1996 08:49 | 52 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) - UP/TO PROCESS ENG
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - DOWN/UNLOAD CUP STICKING LOT YE0194 NEED TO FINISH
FIRST RUN OF THE LAST 10 WAFERS, THEY ARE CLEARLY
MARKED, FOR 150 SEC
CMP.B2 (Speedfam CMP-V) - UP/MQC EVAL OF 3RD MQC
CMP.B3 (Speedfam CMP-V) - UP/RUNNIG JD0481 ***HOT LOT*** 5 SEND AHEADS
MEASURING ON THICK.A5 RUN FOR 150 SECS
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:1
-------------------
JD0481 ****HOT LOT****
STATIC lots in area:2
--------------------
HOLD LOTS IN AREA:2
__________________
DOWN equipment:
---------------
CMP.B1 UNLOAD CUP #2
NUMBER of product lots in room:4
-------------------------------
LOTS COMPLETED : 5
----------------
BREAK IN WAFERS USED: 25
MQC WAFERS USED:20 WAFERS USED
MQC WAFERS AVAIL:3.5 BOXES
----------
|
| 81.22 | CMP C-SHIFT PD. 9/21/96 | FABSIX::E_DAWSON | | Sat Sep 21 1996 20:36 | 45 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE - Break'in ran, needs full mqc's.
CMP.A2 (Strasbaugh 6DS-SP) - DOWN - Both L&R spindles stick'in to the pad.
CMP.B1 (Speedfam CMP-V) - UP/IDLE - Mqc's performed.
CMP.B2 (Speedfam CMP-V) - RUNNING 1 - "HOT LOT" JD0481 ILD3, S/A meassuring
on Thick.A4. Mqc's performed.
CMP.B3 (Speedfam CMP-V) - RUNNING 2 - "HOT LOT" XD0503 ILD2 running T-up's.
& JD0492 ILD2 100% on Thick.A5.
Mqc's performed.
CMP-SCRUB.A1 (On-track scrubber) - DOWN - Oustside brush station speed out
of spec.
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Lots in CMP: 7
------------------ -----------
JD0481 ILD3 DC1026 24W /.B2
XD0503 ILD2 DC1026 22W /.B3
JD0501 ILD2 DC1026 23W...THICKNESS
Lots Shiped: 4 New SPEC/TDCO:
----------- -------------
"POSTED AT CMP.B1/2"
Down Equipment: Carriers:
-------------- --------
CMP.A2 See Carrier PD.
CMP-SCRUB.A1
MQC Mon. Used: 16 MQC Monitors: 5.5 Boxes
------------- ------------
Misc.
----
|
| 81.23 | passdown cmp b-shift 9/22/96 | FABSIX::M_PROVENCHER | | Sun Sep 22 1996 07:54 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 26 MQC'S
BREAKIN WAFERS 41 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc after pad,carrier,brush,and conditioner
changes, due to failed particles
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : N/A
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC (pad change)
CMP.A2 24hr MQCS COMPLETED: IN PROCESS
CMP.A2 24hr MQCS NEXT DUE : N/A
CMP.B1 (Speedfam CMP-V) - : up/running jd0501 M2 hot/ jl0487 M2
(BOTH AT TOUCHUP)
CMP.B1 24hr MQCS COMPLETED: 9/21/96 @ 6:00 pm
CMP.B1 24hr MQCS NEXT DUE : 9/22/96 @ 6:00 am
CMP.B1 12hr MQCS COMPLETED: 9/22/96 @ 7:00 am
CMP.B1 12hr MQCS NEXT DUE : 9/22/96 @ 7:00 pm
CMP.B2 (Speedfam CMP-V) - : up/mqc failed 1st set dev (head #2)
CMP.B2 24hr MQCS COMPLETED: in process
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: 9/22/96 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 9/22/96 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - : up/running jd0498 m2/jd0483 m3 (both at touchup)
CMP.B3 24hr MQCS COMPLETED: 9/21/96 @ 4:00 pm
CMP.B3 24hr MQCS NEXT DUE : 9/22/96 @ 4:00 pm
CMP.B3 12hr MQCS COMPLETED: 9/22/96 @ 4:00 am
CMP.B3 12hr MQCS NEXT DUE : 9/22/96 @ 4:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/22/96 @ 4:00 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/22/96 @ 4:00 PM
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/22/96 @ 4:00 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/22/96 @ 4:00 PM
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/22/96 @ 4:00 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/22/96 @ 4:00 PM
Hot/B lots in area:
__________________
* jd0501 m2 b1 *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* jd0501 4 wafers *
jl0487 2 wafers
Hold Lots:
----------
* none *
Monitor status:
--------------
4 boxes of 12k mqc wafers. (two on order)
3 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 9 lots *
New specs/revs posted:
---------------------
* SEE *NEW* TDCO BY CMP.B1 *
NEW TIMES FOR SPEEDFAMS ONLY
Lots/wafers processed:
---------------------
* jd0503 m2 24 wafers (hot) *
jl0481 m2 22 wafers
jd0481 m3 24 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 speedfam carriers
4 strasbaugh carriers
? strasbaugh plates
|
| 81.24 | A-shift CMP passdown 9/22/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Sep 22 1996 20:36 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - VERIFY: brushes/pad changed. Still has high
particles. (3000~)
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - VERIFY: pad changed. brush heights reset.
still has high particles (3000~)
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: JL0517 (pmd).
CMP.B1 24hr MQCS COMPLETED: 7pm 9/21
CMP.B1 24hr MQCS NEXT DUE : 7pm 9/22 (due now - will run before shift change)
CMP.B1 12hr MQCS COMPLETED: 7pm 9/21
CMP.B1 12hr MQCS NEXT DUE : 7am 9/22 (due now - will run before shift change)
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B2 24hr MQCS COMPLETED: 8:30am 9/22
CMP.B2 24hr MQCS NEXT DUE : 8:30am 9/23
CMP.B2 12hr MQCS COMPLETED: 7am 9/22
CMP.B2 12hr MQCS NEXT DUE : 7pm 9/22
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0543 (m1).
CMP.B3 24hr MQCS COMPLETED: running now (insitu with XD0543).
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: now
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 5pm 9/22
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 5am 9/23
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 5pm 9/22
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 5am 9/23
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 5pm 9/22
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 5am 9/23
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XD0562 - DEP_PMD1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - HIGH PARTICLES
CMP.A2 - HIGH PARTICLES
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
2 boxes of 50K mqc wafers
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0487 - M2 - 22WFRS
JD0501 - M2 - 20
JL0516 - PMD - 24
XE0546 - PMD - 24
JL0570 - PMD - 6
JD0483 - M3 - 14
# of carriers for strasbaugh/speedfam:
--------------------------------------
15 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
|
| 81.25 | passdown cmp b-shift 9/23/96 | FABSIX::M_PROVENCHER | | Mon Sep 23 1996 07:29 | 114 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 24 MQC'S
BREAKIN WAFERS 49 misc
CMP.A1 (Strasbaugh 6DS-SP) - up @4:30 am/xd0562 pmd hotlot
CMP.A1 24hr MQCS COMPLETED: 9/23/96 @ 4:30 am
CMP.A1 24hr MQCS NEXT DUE : 9/24/96 @ 4:30 am
CMP.A2 (Strasbaugh 6DS-SP) - UP/mqc (carrier change)
CMP.A2 24hr MQCS COMPLETED: IN PROCESS
CMP.A2 24hr MQCS NEXT DUE : N/A
CMP.B1 (Speedfam CMP-V) - : up/running jl0493 m1/jd0507
CMP.B1 24hr MQCS COMPLETED: 9/23/96 @10:00 pm
CMP.B1 24hr MQCS NEXT DUE : 9/24/96 @10:00 pm
CMP.B1 12hr MQCS COMPLETED: 9/23/96 @ 7:30 am
CMP.B1 12hr MQCS NEXT DUE : 9/23/96 @ 7:30 pm
CMP.B2 (Speedfam CMP-V) - : up/running jd0499 m2
CMP.B2 24hr MQCS COMPLETED: 9/22/96 @ 8:30 am
CMP.B2 24hr MQCS NEXT DUE : 9/23/96 @ 8:30 am
CMP.B2 12hr MQCS COMPLETED: 9/22/96 @ 9:00 pm
CMP.B2 12hr MQCS NEXT DUE : 9/23/96 @ 9:00 am
CMP.B3 (Speedfam CMP-V) - : up/running jl0502 m1/jl0509 m1
CMP.B3 24hr MQCS COMPLETED: 9/22/96 @ 9:00 pm
CMP.B3 24hr MQCS NEXT DUE : 9/23/96 @ 9:00 pm
CMP.B3 12hr MQCS COMPLETED: 9/23/96 @ 7:30 am
CMP.B3 12hr MQCS NEXT DUE : 9/23/96 @ 7:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/23/96 @ 5:00 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/23/96 @ 5:00 PM
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/23/96 @ 5:00 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/23/96 @ 5:00 PM
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/23/96 @ 5:00 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/23/96 @ 5:00 PM
Hot/B lots in area:
__________________
* xd0562 pmd a1 *
Hot lots coming to area:
-----------------------
* xd0554 m2 *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a2 *
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0544 m2 after thickness per f.krupa *
Monitor status:
--------------
3 boxes of 12k mqc wafers. (two on order 9/22/96)
1 1/2 boxes of 50K breakin wafers (two on order 9/23/96)
Number of product lots in room:
------------------------------
* 7 lots *
New specs/revs posted:
---------------------
* SEE *NEW* TDCO BY CMP.B1 *
NEW TIMES FOR SPEEDFAMS ONLY
Lots/wafers processed:
---------------------
* jd0506 pmd 24 wafers *
jl0543 pmd 12 wafers
xd0543 m1 23 wafers
jd0508 m1 24 wafers
xd0535 m1 24 wafers
xd0511 m2 24 wafers
xd0511 m2 24 wafers
jd0536 m3 11 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 speedfam carriers
4 strasbaugh carriers
? strasbaugh plates
|
| 81.26 | A-shift CMP passdown 9/23/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Sep 23 1996 20:22 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JL0486 (pmd).
CMP.A1 24hr MQCS COMPLETED: 4:30am 9/23
CMP.A1 24hr MQCS NEXT DUE : 4:30am 9/24
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0528 (pmd).
CMP.A2 24hr MQCS COMPLETED: 11am 9/23
CMP.A2 24hr MQCS NEXT DUE : 11am 9/24
CMP.B1 (Speedfam CMP-V) - RUNNING: JE0491 (m1).
CMP.B1 24hr MQCS COMPLETED: 10pm 9/22
CMP.B1 24hr MQCS NEXT DUE : 10pm 9/23
CMP.B1 12hr MQCS COMPLETED: 3:30pm 9/23
CMP.B1 12hr MQCS NEXT DUE : 3:30am 9/24
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0528 (m3).
CMP.B2 24hr MQCS COMPLETED: 11am 9/23
CMP.B2 24hr MQCS NEXT DUE : 11am 9/24
CMP.B2 12hr MQCS COMPLETED: 11am 9/23
CMP.B2 12hr MQCS NEXT DUE : 11pm 9/23
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0545 (m2).
CMP.B3 24hr MQCS COMPLETED: 11pm 9/22
CMP.B3 24hr MQCS NEXT DUE : 11pm 9/23
CMP.B3 12hr MQCS COMPLETED: 9am 9/23
CMP.B3 12hr MQCS NEXT DUE : 9pm 9/23
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 10:30am 9/23
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 10:30pm 9/23
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 10:30am 9/23
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 10:30pm 9/23
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 10:30am 9/23
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 10:30pm 9/23
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0503 - DEP_M3
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
4 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0480 - PMD - 14WFRS
XE0556 - PMD - 24
JL0493 - M2 - 23
JD0507 - M1 - 24
XD0539 - M2 - 24
JL0509 - M1 - 24
JL0502 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
|
| 81.27 | CMP Passdowm B shift | FABSIX::S_MCREYNOLDS | | Tue Sep 24 1996 08:41 | 112 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 MQC'S
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) -up idle
CMP.A1 24hr MQCS COMPLETED: 9/24/96 @ 4:30 am
CMP.A1 24hr MQCS NEXT DUE : 9/25/96 @ 4:30 am
CMP.A2 (Strasbaugh 6DS-SP) - UP/running JL0530 pmd
CMP.A2 24hr MQCS COMPLETED: 9/23/96 @ 10:42am
CMP.A2 24hr MQCS NEXT DUE : 9/24/96 @ 10:42am
CMP.B1 (Speedfam CMP-V) - : up/running XD0528 m3
CMP.B1 24hr MQCS COMPLETED: 9/23/96 @10:00 pm
CMP.B1 24hr MQCS NEXT DUE : 9/24/96 @10:00 pm
CMP.B1 12hr MQCS COMPLETED: 9/23/96 @ 7:30 am
CMP.B1 12hr MQCS NEXT DUE : 9/23/96 @ 7:30 pm
CMP.B2 (Speedfam CMP-V) - : up/idle
CMP.B2 24hr MQCS COMPLETED: 9/23/96 @ 8:30 am
CMP.B2 24hr MQCS NEXT DUE : 9/24/96 @ 8:30 am
CMP.B2 12hr MQCS COMPLETED: 9/23/96 @ 9:00 pm
CMP.B2 12hr MQCS NEXT DUE : 9/24/96 @ 9:00 am
CMP.B3 (Speedfam CMP-V) - : down
CMP.B3 24hr MQCS COMPLETED: N/A
CMP.B3 24hr MQCS NEXT DUE : N/A
CMP.B3 12hr MQCS COMPLETED: N/A
CMP.B3 12hr MQCS NEXT DUE : N/A
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/24/96 @ 5:00 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/24/96 @ 5:00 PM
CMP-SCRUB.A2 (On-track scrubber) - running/JE0491
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/24/96 @ 5:00 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/24/96 @ 5:00 PM
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/24/96 @ 5:00 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/24/96 @ 5:00 PM
Hot/B lots in area:
__________________
* XD0554 ILD2 profiler *
Hot lots coming to area:
-----------------------
*none*
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.B3 *
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0544 m2 at profiler f.krupa *
JD0520 unable to measure
Monitor status:
--------------
4 boxes of 12k mqc wafers.
3� boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
* 5 lots *
New specs/revs posted:
---------------------
* SEE *NEW* TDCO BY CMP.B1 *
NEW TIMES FOR SPEEDFAMS ONLY
Lots/wafers processed:
---------------------
* JL0528 PMD 24
JL0486 PMD 24
XD0539 ILD2 24
XD0545 ILD2 19
JE0491 ILD1 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 speedfam carriers
4 strasbaugh carriers
? strasbaugh plates
|
| 81.28 | A-shift CMP passdown 9/24/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Sep 24 1996 20:48 | 106 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 mqcs
BREAKIN WAFERS 40 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 5am 9/24
CMP.A1 24hr MQCS NEXT DUE : 5am 9/25
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0514 (m1).
CMP.A2 24hr MQCS COMPLETED: 4pm 9/24
CMP.A2 24hr MQCS NEXT DUE : 4pm 9/25
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0548 (m1).
CMP.B1 24hr MQCS COMPLETED: 4pm 9/24
CMP.B1 24hr MQCS NEXT DUE : 4pm 9/25
CMP.B1 12hr MQCS COMPLETED: 11am 9/24
CMP.B1 12hr MQCS NEXT DUE : 11pm 9/24
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0528 (m3).
CMP.B2 24hr MQCS COMPLETED: 2:30pm 9/24
CMP.B2 24hr MQCS NEXT DUE : 2:30pm 9/25
CMP.B2 12hr MQCS COMPLETED: 2:30pm 9/24
CMP.B2 12hr MQCS NEXT DUE : 2:30am 9/25
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0544 (m1) and JL0510 (m1).
CMP.B3 24hr MQCS COMPLETED: 2pm 9/24
CMP.B3 24hr MQCS NEXT DUE : 2pm 9/25
CMP.B3 12hr MQCS COMPLETED: 2pm 9/24
CMP.B3 12hr MQCS NEXT DUE : 2am 9/25
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 4pm 9/24
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 4am 9/25
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 4pm 9/24
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 4am 9/25
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 4pm 9/24
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 4am 9/25
Hot/B lots in area:
__________________
JL0570 - M1 HOT
JD0554 - M2 HOT (moving out now)
Hot lots coming to area:
-----------------------
JD0503 - DEP_ILD3 2
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
1 box of 50K breakin wafers
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
SEE NEW STRASBAUGH AND SPEEDFAM SPECS. SHOULD BE ON LINE TODAY.
PRE-MEASUREMENTS ARE BEING ELIMINATED!
Lots/wafers processed:
---------------------
XD0554 - M2 - 23WFRS
JL0530 - PMD - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
|
| 81.29 | passdown cmp b-shift 9/25/96 | FABSIX::M_PROVENCHER | | Wed Sep 25 1996 06:41 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 MQC'S
BREAKIN WAFERS 36 misc
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc failed 1st set for particles
tool placed in mqc @ 4 am
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - UP/xd0551 pmd
CMP.A2 24hr MQCS COMPLETED: 9/24/96 @ 4:00 pm
CMP.A2 24hr MQCS NEXT DUE : 9/25/96 @ 4:00 pm (pad count is high)
CMP.B1 (Speedfam CMP-V) - : up/running jl0515 m1
CMP.B1 24hr MQCS COMPLETED: 9/24/96 @ 4:30 pm
CMP.B1 24hr MQCS NEXT DUE : 9/25/96 @ 4:30 pm
CMP.B1 12hr MQCS COMPLETED: 9/25/96 @ 3:00 am
CMP.B1 12hr MQCS NEXT DUE : 9/25/96 @ 3:00 pm
CMP.B2 (Speedfam CMP-V) - : up/running jl0570 m1 hot lot
CMP.B2 24hr MQCS COMPLETED: 9/24/96 @ 4:30 pm
CMP.B2 24hr MQCS NEXT DUE : 9/25/96 @ 4:30 pm
CMP.B2 12hr MQCS COMPLETED: 9/24/96 @ 8:30 pm
CMP.B2 12hr MQCS NEXT DUE : 9/25/96 @ 8:30 am
CMP.B3 (Speedfam CMP-V) - : up/running xd0506 m3 hot lot
CMP.B3 24hr MQCS COMPLETED: 9/24/96 @ 2:00 pm
CMP.B3 24hr MQCS NEXT DUE : 9/25/96 @ 2:00 pm
CMP.B3 12hr MQCS COMPLETED: 9/24/96 @ 9:30 pm
CMP.B3 12hr MQCS NEXT DUE : 9/25/96 @ 9:00 am
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/25/96 @ 6:00 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/25/96 @ 6:00 PM
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/25/96 @ 6:00 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/25/96 @ 6:00 PM
CMP-SCRUB.A3 (On-track scrubber) - up/idle
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/25/96 @ 6:00 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/25/96 @ 6:00 PM
Hot/B lots in area:
__________________
* xd0506 m3 hot lot (b3) *
jl0570 m1 hot lot (b2)
Hot lots coming to area:
-----------------------
* jd0501 m3 (@ 2134 dep ILD3) *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0544 m2 after post cmp_thickness per f.krupa *
Monitor status:
--------------
2 boxes of 12k mqc wafers. (two on order)
1 boxes of 50K breakin wafers (two on order)
Number of product lots in room:
------------------------------
* 5 lots *
New specs/revs posted:
---------------------
* SEE NEW STRASBAUGH AND SPEEDFAM SPECS. SHOULD BE ON LINE TODAY.
PRE-MEASUREMENTS ARE BEING ELIMINATED!
Lots/wafers processed:
---------------------
* jl0514 M1 24 wafers *
xd0548 m1 24 wafers
xd0528 m3 24 wafers
xd0544 m1 23 wafers (placed on hold @ post cmp thickness per f. krupa)
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 speedfam carriers
4 strasbaugh carriers
? strasbaugh plates
|
| 81.30 | A-shift CMP passdown 9/25/96 | FABSIX::J_SADIN | Freedom isn't free. | Wed Sep 25 1996 20:47 | 111 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - VERIFY: running mqcs after pad/carrier change.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - PM: down for scheduled pad change. will need
breakins and mqcs.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0542 (m3).
CMP.B1 24hr MQCS COMPLETED: 1pm 9/25
CMP.B1 24hr MQCS NEXT DUE : 1pm 9/26
CMP.B1 12hr MQCS COMPLETED: 1pm 9/25
CMP.B1 12hr MQCS NEXT DUE : 1am 9/26
CMP.B2 (Speedfam CMP-V) - RUNNING: XE0526 (m1).
CMP.B2 24hr MQCS COMPLETED: 6pm 9/25
CMP.B2 24hr MQCS NEXT DUE : 6pm 9/26
CMP.B2 12hr MQCS COMPLETED: 6pm 9/25
CMP.B2 12hr MQCS NEXT DUE : 6am 9/26
CMP.B3 (Speedfam CMP-V) - IDLE.
CMP.B3 24hr MQCS COMPLETED: 7pm 9/25
CMP.B3 24hr MQCS NEXT DUE : 7pm 9/26
CMP.B3 12hr MQCS COMPLETED: 7pm 9/25
CMP.B3 12hr MQCS NEXT DUE : 7am 9/26
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7:45pm 9/25
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7:45am 9/26
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7:45pm 9/25
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7:45am 9/26
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7:45pm 9/25
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7:45am 9/26
Hot/B lots in area:
__________________
JD0501 - M3 HOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - DOWN. HIGH PARTICLES AFTER LAST MQC. PAD AND CARRIERS WERE
CHANGED.
CMP.A2 - ROUTINE PAD CHANGE. EXCEEDED MAX WAFER COUNT.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
2 boxes of 50K breakin wafers
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
SEE FRANK KRUPA'S MAIL MESSAGE ABOUT THE CHANGES MADE IN THE SPEEDFAM SPEC.
THICKNESS PRE-MEASUREMENTS ARE ELIMINATED!
Lots/wafers processed:
---------------------
JD0504 - M1 - 24WFRS
JL0515 - M1 - 19
JL0511 - M1 - 24
JD0501 - M3 - 20
JD0503 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 SPEEDFAM CARRIERS
0 STRASBAUGH CARRIERS
|
| 81.31 | PASSDOWN | FABSIX::D_CAUSE | | Fri Sep 27 1996 08:29 | 50 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING YD0204 FIRST 180 SEC
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING XD0441 FIRST 180 SEC
CMP.B1 (Speedfam CMP-V) - UP/RUNNING XD0533**HOT LOT** 100% ON THK.A5
CMP.B2 (Speedfam CMP-V) - DOWN/PARTICLE PROBLEMS STILL EXIST 3 MQC'S DONE
CMP.B3 (Speedfam CMP-V) - UP/RUNNIG JD0500 WILL NEED 100% 1 WAFER SCRAPPED
DURING RECOVERY FROM SCRUBBER
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:1
-------------------
XD0533 ****HOT LOT****
STATIC lots in area:1
--------------------
HOLD LOTS IN AREA:2
__________________
DOWN equipment:
---------------
CMP.B2 PARTICLES
NUMBER of product lots in room:5
-------------------------------
LOTS COMPLETED : 5
----------------
BREAK IN WAFERS USED: 30
MQC WAFERS USED:31 WAFERS USED
MQC WAFERS AVAIL:3/4 BOX (2 MORE LOTS RUNNING IN DIALECTRICS)
----------
|
| 81.32 | PASSDOWN | FABSIX::D_CAUSE | | Sat Sep 28 1996 08:34 | 48 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING XD0494, JD498 BOTH WILL NEED 100%
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XE0530 FIRST 400SEC DONE
CMP.B3 (Speedfam CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:
-------------------
STATIC lots in area:1
--------------------
HOLD LOTS IN AREA:2
__________________
DOWN equipment:
---------------
NUMBER of product lots in room:4
-------------------------------
LOTS COMPLETED : 7
----------------
BREAK IN WAFERS USED:
MQC WAFERS USED:0 WAFERS USED
MQC WAFERS AVAIL:3 BOXES
----------
|
| 81.33 | passdown cmp b-shift 9/29/96 | FABSIX::M_PROVENCHER | | Sun Sep 29 1996 07:49 | 119 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 26 MQC'S
BREAKIN WAFERS 42 misc
cmp down from @ 12:30 am to @ 2am due to slurry filter clogging.
A1, and A2 crashed.
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc (crash. slurry flow stopped @12:30 am.)
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - UP/mqc (crash @ 12:30 am failed for high dev)
CMP.A2 24hr MQCS COMPLETED: in process
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - : down/@4am. down for vibrations/heads 4, and 5 not
rotating, also taken for monthly pm. will
need mqc's after monthly
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - : up/mqc in process (down @ 6:30 am)
CMP.B2 24hr MQCS COMPLETED: in process
CMP.B2 24hr MQCS NEXT DUE :
CMP.B2 12hr MQCS COMPLETED:
CMP.B2 12hr MQCS NEXT DUE :
CMP.B3 (Speedfam CMP-V) - : up/running jd0508 m2 (down until @5:30 am)
CMP.B3 24hr MQCS COMPLETED: 9/29/96 @ 5:30 am
CMP.B3 24hr MQCS NEXT DUE : 9/30/96 @ 5:30 pm
CMP.B3 12hr MQCS COMPLETED: 9/29/96 @ 5:30 am
CMP.B3 12hr MQCS NEXT DUE : 9/29/96 @ 5:30 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/29/96 @ 5:00 AM
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/29/96 @ 5:00 PM
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/29/96 @ 5:00 AM
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/29/96 @ 5:00 PM
CMP-SCRUB.A3 (On-track scrubber) - down/@ 7 am screen will not initialize, and
robot problems
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/29/96 @ 5:00 AM
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 9/29/96 @ 5:00 PM
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* cmp.a1 mqc after crash
cmp.a2 mqc after crash
cmp.b1 down to maint vibration, carrier rotation problems, and monthly pm
cmp.b2 mqc
Scrap lots:
----------
* xd0541 M1 2 wafers (a2) *
jd0506 M1 2 wafers (a1)
Hold Lots:
----------
* none *
Monitor status:
--------------
4 boxes of 12k mqc wafers.
0 boxes of 50K breakin wafers (two on order)
Number of product lots in room:
------------------------------
* 5 lots *
New specs/revs posted:
---------------------
* SEE NEW STRASBAUGH AND SPEEDFAM SPECS. SHOULD BE ON LINE TODAY.
PRE-MEASUREMENTS ARE BEING ELIMINATED!
Lots/wafers processed:
---------------------
* jl0517 m1 12 wafers *
jl0516 m1 24 wafers
jd0507 m2 24 wafers
xd0511 m3 24 wafers (need 2nd measurment on e test tm69 seven site, see
remark for this lot)
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 speedfam carriers
3 strasbaugh carriers
? strasbaugh plates
|
| 81.34 | A-shift CMP passdown 9/29/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Sep 29 1996 20:15 | 110 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XE0540 (m1).
CMP.A1 24hr MQCS COMPLETED: 8am 9/29
CMP.A1 24hr MQCS NEXT DUE : 8am 9/30
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0551 (m1).
CMP.A2 24hr MQCS COMPLETED: 12pm 9/29
CMP.A2 24hr MQCS NEXT DUE : 12pm 9/30
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0535 (m2).
CMP.B1 24hr MQCS COMPLETED: 11:30am 9/29
CMP.B1 24hr MQCS NEXT DUE : 11:30am 9/30
CMP.B1 12hr MQCS COMPLETED: 11:30am 9/29
CMP.B1 12hr MQCS NEXT DUE : 11:30pm 9/29
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0545 (m3).
CMP.B2 24hr MQCS COMPLETED: 8am 9/29
CMP.B2 24hr MQCS NEXT DUE : 8am 9/30
CMP.B2 12hr MQCS COMPLETED: 7pm 9/29
CMP.B2 12hr MQCS NEXT DUE : 7am 9/30
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0499 (m3).
CMP.B3 24hr MQCS COMPLETED: 6am 9/29
CMP.B3 24hr MQCS NEXT DUE : 6am 9/30
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : now
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7pm 9/29
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7am 9/30
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7pm 9/29
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7am 9/30
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7pm 9/29
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7am 9/30
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0513 - 2.1DAYS (HOLD FOR ENG)
JD0412 - 1.4DAYS (HOLD FOR ENG)
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0513 - M3 HOLD FOR ENG TO RUN
JD0412 - M3 " "
Monitor status:
--------------
4 boxes of 12K mqc wafers
0 boxes of 50K breakin wafers (supe notified - more wafers coming)
Number of product lots in room:
------------------------------
12
New specs/revs posted:
---------------------
SEE NEW SPEEDFAM SPEC
Lots/wafers processed:
---------------------
JD0506 - M1 - 22WFRS
XE0541 - M1 - 14
JD0449 - PMD - 6
XD0535 - M2 - 24
JD0519 - PMD - 24
JD0508 - M2 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM CARRIERS
3 STRASBAUGH CARRIERS
|
| 81.35 | passdown cmp b-shift 9/30/96 | FABSIX::M_PROVENCHER | | Mon Sep 30 1996 07:22 | 119 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 MQC'S
BREAKIN WAFERS 32 misc
[EOB]
CMP.A1 (Strasbaugh 6DS-SP) - up/mqc
CMP.A1 24hr MQCS COMPLETED: in process
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - UP/running jd0524 pmd/jl0536 pmd
CMP.A2 24hr MQCS COMPLETED: 9/29/96 @ 12:00 pm
CMP.A2 24hr MQCS NEXT DUE : 9/30/96 @ 12:00 pm
CMP.B1 (Speedfam CMP-V) - : up/running jl0486 m1/jl0509 m2
CMP.B1 24hr MQCS COMPLETED: 9/29/96 @ 11:30 am
CMP.B1 24hr MQCS NEXT DUE : 9/30/96 @ 11:30 am
CMP.B1 12hr MQCS COMPLETED: 9/30/96 @ 12:00 am
CMP.B1 12hr MQCS NEXT DUE : 9/30/96 @ 12:00 pm
CMP.B2 (Speedfam CMP-V) - : up/running xd0556 m1/jl0510 m2
CMP.B2 24hr MQCS COMPLETED: 9/29/96 @ 8:00 am
CMP.B2 24hr MQCS NEXT DUE : 9/30/96 @ 8:00 am
CMP.B2 12hr MQCS COMPLETED: 9/30/96 @ 7:00 am
CMP.B2 12hr MQCS NEXT DUE : 9/30/96 @ 7:00 pm
CMP.B3 (Speedfam CMP-V) - : up/mqc
CMP.B3 24hr MQCS COMPLETED: in process
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: 9/30/96 @ 3:00 am
CMP.B3 12hr MQCS NEXT DUE : 9/30/96 @ 3:00 pm
CMP-SCRUB.A1 (On-track scrubber) - up/idle
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9/30/96 @ 6:00 am
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 9/30/96 @ 6:00 pm
CMP-SCRUB.A2 (On-track scrubber) - up/idle
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9/30/96 @ 6:00 am
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 9/30/96 @ 6:00 pm
CMP-SCRUB.A3 (On-track scrubber) - down/down from 11pm on
CMP-SCRUB.A3 12hr MQCS COMPLETED: 9/29/96 @ 7:00 pm
CMP-SCRUB.A3 12hr MQCS NEXT DUE : when tool comes up
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* xd0513 2.6 days (hold for eng) *
jd0412 1.9 days (hold for eng)
Down Equipment:
--------------
* cmp-scrub.a3 (maint) *
cmp.a1 mqc
cmp.b2 mqc
Scrap lots:
----------
* none *
Hold Lots:
----------
* xd0513 hold for proc eng to run *
jd0412 hold for proc eng to run
xd0560 eng stores @ cmp
xd0441 eng stores @ cmp hold for eric b.
Monitor status:
--------------
4 boxes of 12k mqc wafers. *
0 boxes of 50K breakin wafers (two on order)*
Number of product lots in room:
------------------------------
* 13 lots excluding hold lots *
New specs/revs posted:
---------------------
* SEE NEW SPEEDFAM SPEC. *
Lots/wafers processed:
---------------------
* xd0551 m1 24 wafers *
jl0528 m1 24 wafers
xe0540 m1 24 wafers
jl0502 m2 24 wafers
xd0539 m3 24 wafers
jd0499 m3 19 wafers
yd0148 m3 3 wafers
xd0545 m3 19 wafers
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 speedfam carriers*
3 strasbaugh carriers*
? strasbaugh plates*
|
| 81.36 | A-shift CMP passdown 9/30/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Sep 30 1996 20:34 | 121 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 30 misc
special note!! Lot# JL0515 was received into CMP with a thickness of 13K�
@ild1 (should be 18K�). Lot has been taken back to films and is being
reworked. It should be back in the room sometime tonight.
Also, please make sure to let your supervisor and PSS know if you
crash product wafers. They need to fill out a report to track the losses.
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: crashed dummy wafers on the pad. Needs
new pad/carriers.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running more breakins and mqcs. First set
failed for high unif.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - DOWN: inverter errors. Reps are working on the
tool now.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : when up.
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : when up.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0535 (m1) and JL0511 (m2).
CMP.B2 24hr MQCS COMPLETED: 9am 9/30
CMP.B2 24hr MQCS NEXT DUE : 9am 10/1
CMP.B2 12hr MQCS COMPLETED: 9am 9/30
CMP.B2 12hr MQCS NEXT DUE : 9pm 9/30
CMP.B3 (Speedfam CMP-V) - RUNNING: YE0192 (m3) and JL0515 (m1).
CMP.B3 24hr MQCS COMPLETED: 8:30am 9/30
CMP.B3 24hr MQCS NEXT DUE : 8:30am 10/1
CMP.B3 12hr MQCS COMPLETED: 8:30am 9/30
CMP.B3 12hr MQCS NEXT DUE : 8:30pm 9/30
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7:30pm 9/30
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7:30am 10/1
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7:30pm 9/30
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7:30am 10/1
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7:30pm 9/30
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7:30am 10/1
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XD0533 - DEP_ILD3 2
Static Lots in area:
-------------------
XD0513 - 3.1DAYS
JD0412 - 2.4DAYS
Down Equipment:
--------------
CMP.A1 - DUMMY CRASHED ON PAD. NEEDS PAD/CARRIERS.
CMP.A2 - MQCS.
CMP.B1 - INVERTER ERRORS. REPS GETTING NEW BOARD.
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0513 - HOLD FOR ENG TO PROCESS
JD0412 - HOLD FOR ENG TO PROCESS
Monitor status:
--------------
4 BOXES OF 12K MQC WAFERS
0 BOXES OF 50K BREAKIN WAFERS
Number of product lots in room:
------------------------------
15
New specs/revs posted:
---------------------
SEE NEW SPEEDFAM SPEC
Lots/wafers processed:
---------------------
JL0486 - M1 - 24WFRS
JD0524 - PMD - 22
XE0556 - M1 - 24
XD0543 - M2 - 23
XD0480 - M1 - 13
JL0510 - M2 - 22
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM CARRIERS
0 STRASBAUGH CARRIERS
|
| 81.37 | PASSDOWN | FABSIX::D_CAUSE | | Thu Oct 10 1996 08:27 | 48 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE IN ENGINEERING
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE IN ENGINEERING
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JL0539 FIRST PASS
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD0526 WILL NEED 100%, JL0531 FIRST PASS
CMP.B3 (Speedfam CMP-V) - UP/IDLE RUNNING YD0184 FIRST PASS 350 SEC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:
-------------------
STATIC lots in area:8
--------------------
HOLD LOTS IN AREA:2
__________________
DOWN equipment:
---------------
NUMBER of product lots in room:13
-------------------------------
LOTS COMPLETED : 8
----------------
BREAK IN WAFERS USED:
MQC WAFERS USED:15 WAFERS USED
MQC WAFERS AVAIL:1.5 BOXES
----------
|
| 81.38 | PASSDOWN | FABSIX::D_CAUSE | | Sat Oct 12 1996 08:33 | 50 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP-V) - UP/MQC RUNNING 4TH MQC PARTICLES AND DEV GOOD
FAILED FOR RANGE 784A
CMP.B3 (Speedfam CMP-V) - UP/RUNNING 2 HOT LOTS JD0523 5 SA ON THK.A5
JD0559 NEED 100% AND TOUCHUP
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:2
-------------------
STATIC lots in area:4
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:
---------------
NUMBER of product lots in room:6
-------------------------------
LOTS COMPLETED : 5
----------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:20 WAFERS USED
MQC WAFERS AVAIL:2 BOXES
----------
|
| 81.39 | PASSDOWN | FABSIX::D_CAUSE | | Wed Oct 16 1996 08:23 | 51 |
| D SHIFT PASSDOWN
CMP.A1 (Strasbaugh 6DS-SP) - TECHS FINISHING MONTHLY PM WILL NEED FULL MQC
CMP.A2 (Strasbaugh 6DS-SP) -UP/RUNNING JL0596 FIRST PASS
CMP.B1 (Speedfam CMP-V) - UP/TO ENGINEERING
CMP.B2 (Speedfam CMP-V) - VERIFY/PAD CHANGE FOR LOW REMOVAL RATE
JD0506 NEEDS T/U , XD0551 FIRST 400 SEC DONE
CMP.B3 (Speedfam CMP-V) - UP/RUNNING XE0540 NEED 100% WHEN FINISHED
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE
HOT/B lots in area:
-------------------
STATIC lots in area:1
--------------------
HOLD LOTS IN AREA:1
__________________
DOWN equipment:2
---------------
CMP.A1 MONTHLY PM
CMP.B2 PAD CHANGE FOR LOW REMOVAL RATE
NUMBER of product lots in room:6
-------------------------------
LOTS COMPLETED : 5
----------------
BREAK IN WAFERS USED:30
MQC WAFERS USED:20 WAFERS USED
MQC WAFERS AVAIL:2 BOXES
----------
|