| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 79.1 | PASSDOWN CMP B-SHIFT 8/4/96 | FABSIX::M_PROVENCHER | | Sun Aug 04 1996 08:12 | 87 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 b1
BREAKIN WAFERS 58 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
WILL NEED MQC'S TODAY @4PM
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
WILL NEED MQC'S TODAY @ 4 PM
CMP.B1 (SPEEDFAM CMP-V) - DOWN/MQC
SEE KRUPA MAIL MESSAGE REGAURDING B1, AND MQC'S
CMP.B2 (SPEEDFAM CMP-V) - UP/IDLE
WILL NEED MQC'S (OVER DUE)
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING JD0378 M1
WILL NEED MQC'S TODAY @ 7 PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE WILL NEED MQC'S
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE WILL NEED MQC'S
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*CMP.B1*
THICKNESS.A4
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
----------------
*1 BOX*
Number of product lots in room:
------------------------------
*1 LOT*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*XD0506 PMD 23 WAFERS*
XD0507 PMD 24 WAFERS
JD0480 PMD 24 WAFERS
JD0394 M1 24 WAFERS
JD0376 M2 19 WAFERS
JD0364 M3 22 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
16 spare carriers for CMP.B1/B2/B3
11 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 79.2 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Sun Aug 04 1996 20:41 | 113 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC:Failed Mqc's twice. A new pad was installed
and we are running break-in wafers at the present time.
CMP.A1 24hr MQCS COMPLETED:
CMP.A1 24hr MQCS NEXT DUE :
========================================================================
CMP.A2 (Strasbaugh 6DS-SP) - IDLE
CMP.A2 24hr MQCS COMPLETED: 15:25pm 8/4/96
CMP.A2 24hr MQCS NEXT DUE : 15:25pm 8/5/96
========================================================================
CMP.B1 (Speedfam CMP-V) - MQC: The pad was changed twice on this tool.
The first mqc failed due to high particles. We are presently running
break-in wafers after the last pad change.
CMP.B1 24hr MQCS COMPLETED: ON GOING
CMP.B1 24hr MQCS NEXT DUE :
CMP.B1 12hr MQCS COMPLETED:
CMP.B1 12hr MQCS NEXT DUE :
=========================================================================
CMP.B2 (Speedfam CMP-V) - Running JD0370 (m3).
CMP.B2 24hr MQCS COMPLETED: 15:05 hours 8/4/96
CMP.B2 24hr MQCS NEXT DUE : 15:05 hours 8/5/96
CMP.B2 12hr MQCS COMPLETED: 15:05 hours 8/4/96
CMP.B2 12hr MQCS NEXT DUE : 3:05 hours 8/5/96
=========================================================================
CMP.B3 (Speedfam CMP-V) - IDLE:
Mqc's were due at the 19:20 hours. Mqc wafers are being measured on
thickness.A5.
CMP.B3 24hr MQCS COMPLETED:
CMP.B3 24hr MQCS NEXT DUE :
CMP.B3 12hr MQCS COMPLETED:
CMP.B3 12hr MQCS NEXT DUE :
=========================================================================
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9:10 hours 8/4/96
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 21:10 hours 8/4/96
=========================================================================
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9:10 hours 8/4/96
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 21:10 houra 8/4/96
=========================================================================
Hot/B lots in area:
__________________
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - HIGH PARTICLES. HAS NEW PAD. RUNNING BREAK-IN AND MQC WAFERS.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K mqc wafers. Some more coming.
Number of product lots in room:
------------------------------
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0378 - M1 - 23WFRS
JD0429 - PMD- 24 "
JD0365 - M3 - 24 "
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM CARRIERS
11 STRASBAUGH CARRIERS
|
| 79.3 | PASSDOWN CMP B-SHIFT 8/5/96 | FABSIX::M_PROVENCHER | | Mon Aug 05 1996 07:41 | 83 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 A1,B1,SCRUBBAS
BREAKIN WAFERS 48 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0399 PMD
MQC'S DONE @10 PM
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
WILL NEED MQC'S TODAY @ 4 PM
CMP.B1 (SPEEDFAM CMP-V) - UP/MQC
PARTICLES CAME IN. CHECKING R/R-DEV
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JD0338 M3
WILL NEED MQC'S @5PM
CMP.B3 (SPEEDFAM CMP-V) - UP/IDLE
MQC'S DONE @ 10:30 PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED @ 3 AM
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED @ 3 AM
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*THICKNESS.A4*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
----------------
*2 BOXES*
Number of product lots in room:
------------------------------
*2 LOT*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JD0382 M1 23 WAFERS*
JD0370 M3 22 WAFERS
XD0495 M3 24 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
9 spare carriers for CMP.B1/B2/B3
11 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 79.4 | | FABSIX::J_ROA | | Mon Aug 05 1996 20:43 | 124 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - :Running lot JL0427 (pmd)
CMP.A1 24hr MQCS COMPLETED: 14:54 hours 8/5/96
CMP.A1 24hr MQCS NEXT DUE : 14:54 hours 8/6/96
========================================================================
CMP.A2 (Strasbaugh 6DS-SP) - : Runnning XD0508 (pmd)
CMP.A2 24hr MQCS COMPLETED: 17:04 hours 8/5/96
CMP.A2 24hr MQCS NEXT DUE : 17:04 hours 8/6/96
========================================================================
CMP.B1 (Speedfam CMP-V) - : Running lot JD0338 (M3)
CMP.B1 24hr MQCS COMPLETED: 6:42 hours 8/5/96
CMP.B1 24hr MQCS NEXT DUE : 6:42 hours 8/6/96
CMP.B1 12hr MQCS COMPLETED: 13:25 hours 8/5/96
CMP.B1 12hr MQCS NEXT DUE : 1:25 hours 8/6/96
=========================================================================
CMP.B2 (Speedfam CMP-V) - DOWN: Failed Mqc's. Both primary and secondary
pad are going to be replaced.
Lot XD0498 was running on this tool prior to the mqc's. This lot needs to
be finished once the tools gets going. Or, it can be transfer to another
tool.
CMP.B2 24hr MQCS COMPLETED: Ongoing
CMP.B2 24hr MQCS NEXT DUE :
CMP.B2 12hr MQCS COMPLETED:
CMP.B2 12hr MQCS NEXT DUE :
=========================================================================
CMP.B3 (Speedfam CMP-V) - MQC: Facilities work most of the day hooking up
CMP.B3 to CMP.C1.
A new pad was installed after the tool was given back to manufacturing
because the previous pad had dried up while the hook-up took place.
CMP.B3 24hr MQCS COMPLETED: Ongoing. Ran break-ins and mqc wafers. Need to
measure and evaluate test.
CMP.B3 24hr MQCS NEXT DUE :
CMP.B3 12hr MQCS COMPLETED:
CMP.B3 12hr MQCS NEXT DUE :
=========================================================================
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9:30 hours 8/5/96
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 21:30 hours 8/5/96
=========================================================================
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9:30 hours 8/5/96
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 21:30 hourS 8/5/96
=========================================================================
Hot/B lots in area:
__________________
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
Scrap lots:
----------
* none *
Hold Lots:
---------
* XD0495 IS ON HOLD AT CMP FOR B SHIFT PSS FOR DISPOSITION AND REMARKS. *
Monitor status:
--------------
3 boxES of 12K mqc wafers.
Number of product lots in room:
------------------------------
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0367 - M2 - 23 WAFERS
JD0368 - M3 - 14 "
JD0399 - PMD- 24 "
JL0430 - PMD- 12 "
JD0344 - M2 - 23 "
# of carriers for strasbaugh/speedfam:
--------------------------------------
11 SPEEDFAM CARRIERS
11 STRASBAUGH CARRIERS
|
| 79.5 | PASSDOWN CMPB-SHIFT 8/6/96 | FABSIX::M_PROVENCHER | | Tue Aug 06 1996 08:04 | 86 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 b2!,,SCRUBBAS
BREAKIN WAFERS 51 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0405 M1/JD0407 M1
MQC'S DUE TODAY @5 PM
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0414 M1
WILL NEED MQC'S DUE TODAY @ 4 PM
CMP.B1 (SPEEDFAM CMP-V) - UP/RUNNING JD0390 TOUCH UP
WILL NEED MQC'S DUE TODAY
CMP.B2 (SPEEDFAM CMP-V) - UP/MQC IN PROCESS
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING JD0388 M1 (HOT)/XD0501 M2
MQC'S DONE @ 10:30 PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED @ 4 AM
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED @ 4 AM
Hot/B lots in area:
________________________
*JD0388 M1 (B3)*
Hot lots coming to area:
------------------------
*JL0436 M1*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*CMP.B2*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*XD0495 PSS B-SHIFT HAS BEEN NOTIFIED AND INFORMED*
Monitor status:
----------------
*2 BOXES*
Number of product lots in room:
------------------------------
*7 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JL0427 PMD 20 WAFERS*
JL0428 PMD 24 WAFERS
XD0508 PMD 24 WAFERS
XD0498 M2 24 WAFERS
JD0338 M3 22 WAFERS
JD0362 M3 23 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
11 spare carriers for CMP.B1/B2/B3
11 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 79.6 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Tue Aug 06 1996 20:28 | 118 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - :Running lot JD0407 m1. Once this lot is
done the tool need to have Mqc's performed.
CMP.A1 24hr MQCS COMPLETED: 14:54 hours 8/5/96
CMP.A1 24hr MQCS NEXT DUE : 14:54 hours 8/6/96
========================================================================
CMP.A2 (Strasbaugh 6DS-SP) - : Runnnig JD0405 m1. Once this lot is
done the tool needs to have Mqc's performed.
CMP.A2 24hr MQCS COMPLETED: 17:04 hours 8/5/96
CMP.A2 24hr MQCS NEXT DUE : 17:04 hours 8/6/96
========================================================================
CMP.B1 (Speedfam CMP-V) - : Running hot lot JL0436
CMP.B1 24hr MQCS COMPLETED: 15:10 hours 8/6/96
CMP.B1 24hr MQCS NEXT DUE : 15:10 hours 8/7/96
CMP.B1 12hr MQCS COMPLETED: 15:10 hours 8/6/96
CMP.B1 12hr MQCS NEXT DUE : 3:10 hours 8/7/96
=========================================================================
CMP.B2 (Speedfam CMP-V) - VERIFY/U: This tool was down almost the entire
shift due to particle issues. The pad was replaced twice and we are now
evaluting the last mqc wafers.
CMP.B2 24hr MQCS COMPLETED: Ongoing
CMP.B2 24hr MQCS NEXT DUE :
CMP.B2 12hr MQCS COMPLETED:
CMP.B2 12hr MQCS NEXT DUE :
=========================================================================
CMP.B3 (Speedfam CMP-V) - :Running hot lot JL0410 m3
CMP.B3 24hr MQCS COMPLETED: 23:23 hours 8/5/96
CMP.B3 24hr MQCS NEXT DUE : 23:23 hours 8/6/96
CMP.B3 12hr MQCS COMPLETED: 19:30 hours 8/6/96
CMP.B3 12hr MQCS NEXT DUE : 6:30 hours 8/7/96
=========================================================================
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 9:30 hours 8/6/96
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 21:30 hours 8/7/96
=========================================================================
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 9:30 hours 8/6/96
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 21:30 hourS 8/7/96
=========================================================================
Hot/B lots in area:
__________________
hot lots JL0410, JL0436 and XL0514
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
--------------
2 boxes of 12K mqc wafers and 2 of 50k.
Number of product lots in room:
------------------------------
10 lots
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0414 _ M1 - 24 WAFERS
JD0390 - M2 - 23 "
JD0395 - M1 - 17 "
XD0501 - M2 - 24 "
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 SPEEDFAM CARRIERS
9 STRASBAUGH CARRIERS
|
| 79.7 | CMP C-SHFT PD. 8/9/96 | FABSIX::E_DAWSON | | Fri Aug 09 1996 20:44 | 37 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE -
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING 1 - XD0507 9 MIN
CMP.B1 (Speedfam CMP-V) - BGN ENG. -
CMP.B2 (Speedfam CMP-V) - RUNNING 2 - JD0372 JD0381 ILD'3
CMP.B3 (Speedfam CMP-V) - UP/ILDE - NEEDS FULL MQC'S *PLEASE SEE EE. PD.*
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - RUNNING 1 - JD0397 "NEEDS DGR"
Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area:0 Lots in CMP:8
------------------ -----------
Down Equipment: New SPEC/TDCO:"YES"
-------------- -------------
CMP.B1 - ENG. POSTED AT CMP.B1 PLEASE READ
MQC Monitors: Carriers:
------------- --------
2.5 BOXES See Carrier PD.
MQC Mon. Used:
-------------
I lost track after 50....
** THICKNESS.A4 IS ALSO STILL DOWN. **
|
| 79.8 | CMP C-SHIFT PD. 9-11-96 | FABSIX::E_DAWSON | | Sat Aug 10 1996 20:47 | 40 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE - Needs Mqc's
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE - Mqc's performed.
CMP.B1 (Speedfam CMP-V) - ENG -
CMP.B2 (Speedfam CMP-V) - UP/IDLE - Mqc's performed.
CMP.B3 (Speedfam CMP-V) - MQC - Running full brk'in & mqc.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: 0 Lots in CMP: 0
------------------ -----------
Lots Shipped: 10 New SPEC/TDCO: "YES"
------------ -------------
POSTED NEXT TO CMP.B1 "PLEASE READ"
Down Equipment: Carriers:
-------------- --------
CMP.B1/ENG See Carrier PD.
MQC Mon. Used: 15 MQC Monitors:
------------- ------------
1 Pod / 100 Wafers ordered
Misc.
----
* THICKNESS.A4 is still down for a handler issue.
**** PLEASE READ EE. PD. IN REGARDS TO "NEW" MQC RECEIPE. IF THERE
ARE ANY ? PLEASES SEE SOMEONE FROM THE EE. GROUP. *****
|
| 79.9 | PASSDOWN CMP B-SHIFT 8/11/96 | FABSIX::M_PROVENCHER | | Sun Aug 11 1996 07:55 | 82 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 b3,A1
BREAKIN WAFERS 38 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
MQC'S PERFORMED TODAY
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
WILL NEED MQC'S DUE TODAY
CMP.B1 (SPEEDFAM CMP-V) - UP/ENG
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JD0380 M3
WILL NEED MQC'S TODAY
CMP.B3 (SPEEDFAM CMP-V) - UP/IDLE
MQC'S PERFORMED TODAY
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*THICKNESS.A4*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
----------------
*1 BOX*
Number of product lots in room:
------------------------------
*1 LOT*
New specs/revs posted:
---------------------
*YES, POSTED AT CMP.B1 PLEASE READ*
Lots/wafers processed:
-----------------------
*JL0430A PMD 12 WAFERS*
JL0437 PMD 21 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
8 spare carriers for CMP.B1/B2/B3
9 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 79.10 | A-shift CMP passdown 8/11/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Aug 11 1996 20:19 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0422 (pmd).
CMP.A1 24hr MQCS COMPLETED: 10pm 8/10
CMP.A1 24hr MQCS NEXT DUE : 10pm 8/11
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running mqcs.
CMP.A2 24hr MQCS COMPLETED: running now.
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - MQC: running mqcs.
CMP.B1 24hr MQCS COMPLETED: running now.
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: 5:30pm 8/11
CMP.B1 12hr MQCS NEXT DUE : 5:30am 8/12
CMP.B2 (Speedfam CMP-V) - MQC: running mqcs.
CMP.B2 24hr MQCS COMPLETED: running now.
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: 5pm 8/11
CMP.B2 12hr MQCS NEXT DUE : 5am 8/12
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0375 (m3 - touchup).
CMP.B3 24hr MQCS COMPLETED: 12am 8/11
CMP.B3 24hr MQCS NEXT DUE : 12am 8/12
CMP.B3 12hr MQCS COMPLETED: 5:15pm 8/11
CMP.B3 12hr MQCS NEXT DUE : 5:15am 8/12
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 1pm 8/11
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 1am 8/12
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12pm 8/11
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12am 8/12
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12:30pm 8/11
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12:30am 8/12
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - MQC
CMP.B1 - MQC
CMP.B2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0503 - STI LOT. HOLD FOR ENGINEERING TO RUN.
Monitor status:
--------------
4 boxes of 12K mqc wafers. 2 more boxes on order.
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* SEE TDCO POSTED NEXT TO CMP.B1! NEW PARTICLE LIMITS FOR CMP.B2 AND
CMP.B3*
Lots/wafers processed:
---------------------
JL0438 - PMD - 24WFRS
JD0380 - M3 - 23
JD0375 - M3 - 21
JD0420 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
9 STRASBAUGH CARRIERS
2 STRASBAUGH PLATES
|
| 79.11 | PASSDOWN CMP B-SHIFT 8/12/96 | FABSIX::M_PROVENCHER | | Mon Aug 12 1996 07:54 | 86 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 22 A1,B1,B2,B3
SCRUBBERS
BREAKIN WAFERS 42 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/MQC
MQC'S IN PROCESS AFTER PAD CHANGE + MONTHLY P.M.
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
WILL NEED MQC'S DUE TODAY
CMP.B1 (SPEEDFAM CMP-V) - UP/IDLE
MQC'S PERFORMED
CMP.B2 (SPEEDFAM CMP-V) - UP/IDLE
MQC'S PERFORMED
CMP.B3 (SPEEDFAM CMP-V) - UP/MQC
MQC'S IN PROCESS AFTER OFFSET CHANGE. NEW CARRIER
ON HEAD THREE GAVE HIGH R/R. CAUSING HIGH RANGE.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A3 (ON-TRACK SCRUBBER) - UP/IDLE MQC'S PERFORMED
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*THICKNESS.A4*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*XD0503 (FOR ENG.)*
Monitor status:
----------------
*3 BOXES*
Number of product lots in room:
------------------------------
*1 LOT (ON HOLD)*
New specs/revs posted:
---------------------
*YES, POSTED AT CMP.B1 PLEASE READ*
Lots/wafers processed:
-----------------------
*JD0422 PMD 23 WAFERS*
XD0505 PMD 24 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
7 spare carriers for CMP.B1/B2/B3
9 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 79.12 | A-shift CMP passdown 8/12/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Aug 12 1996 20:48 | 115 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: mqcs after shutdown. New pad/carriers.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: down for robot vacuum problem. Needs
mqcs (new pad/carriers).
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - MQC: new pad being installed. Needs mqcs after
shutdown.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE :
CMP.B2 (Speedfam CMP-V) - MQC: new pads being installed. Needs mqcs after
shutdown.
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - MQC: new pads being installed. Needs mqcs after
shutdown.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - MQC: mqc after shutdown.
CMP-SCRUB.A1 12hr MQCS COMPLETED: n/a
CMP-SCRUB.A1 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A2 (On-track scrubber) - MQC: mqc after shutdown.
CMP-SCRUB.A2 12hr MQCS COMPLETED: n/a
CMP-SCRUB.A2 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A3 (On-track scrubber) - MQC: mqc after shutdown.
CMP-SCRUB.A3 12hr MQCS COMPLETED: n/a
CMP-SCRUB.A3 12hr MQCS NEXT DUE : n/a
Hot/B lots in area:
__________________
XD0502 - M3 HOT
JL0439 - PMD HOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
CMP.A2 - ROBOT PROBLEMS
CMP.B1 - MQC
CMP.B2 - MQC
CMP.B3 - MQC
CMP-SCRUB.A1 - MQC
CMP-SCRUB.A2 - MQC
CMP-SCRUB.A3 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0503 - STI
Monitor status:
--------------
1 box of 12k mqc wafers. Need to order more!
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* SEE TDCO BY CMP.B1*
Lots/wafers processed:
---------------------
* none *
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM CARRIERS
7 STRASBAUGH CARRIERS
2 STRASBAUGH PLATES
|
| 79.13 | PASSDOWN CMP B-SHIFT 8/13/96 | FABSIX::M_PROVENCHER | | Tue Aug 13 1996 07:21 | 107 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 mqcs
BREAKIN WAFERS 68 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0433 PMD
CMP.A1 24hr MQCS COMPLETED: @ 10 PM 8/13
CMP.A1 24hr MQCS NEXT DUE : @ 10 PM 8/14
CMP.A2 (Strasbaugh 6DS-SP) - UP/
CMP.A2 24hr MQCS COMPLETED:
CMP.A2 24hr MQCS NEXT DUE :
CMP.B1 (Speedfam CMP-V) - DOWN: PAD CHANGE, AND TWO CARRIERS REPLACED. NEEDS
MQC'S AFTER CRASH
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE :
CMP.B2 (Speedfam CMP-V) - MQC: PAD CHANGE. WILL NEED MQC'S AFTER CRASH
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - MQC: MQC'S ON GOING. HAD NUMEROUS PROBLEMS WITH TOOL
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A1 12hr MQCS COMPLETED: @ 8PM 8/12
CMP-SCRUB.A1 12hr MQCS NEXT DUE : @ 8AM 8/13
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 12hr MQCS COMPLETED: @ 8PM 8/12
CMP-SCRUB.A2 12hr MQCS NEXT DUE : @ 8AM 8/13
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A3 12hr MQCS COMPLETED: @ 8PM 8/12
CMP-SCRUB.A3 12hr MQCS NEXT DUE : @ 8AM 8/13
Hot/B lots in area:
__________________
XD0502 - M3 HOT (B2 AT TOUCH UP)
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
B2 - PAD CHANGE + MQC
B3 - MQC
Scrap lots:
----------
*XD0502 M3 (HOT LOT) WAFERS #2, AND #6. VICTIMS OF B2 CRASH*
Hold Lots:
---------
XD0503 - STI
Monitor status:
--------------
2 BOXES of 12k mqc wafers. 2 BOXES ON ORDER
Number of product lots in room:
------------------------------
5 LOTS
New specs/revs posted:
---------------------
* SEE TDCO BY CMP.B1*
Lots/wafers processed:
---------------------
* JL0439 PMD 24 WAFERS (HOT) *
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 SPEEDFAM CARRIERS
7 STRASBAUGH CARRIERS
2 STRASBAUGH PLATES
|
| 79.14 | A-shift CMP passdown 8/13/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Aug 13 1996 20:39 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 mqcs
BREAKIN WAFERS 40 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JL0434 (pmd).
CMP.A1 24hr MQCS COMPLETED: 12am 8/13
CMP.A1 24hr MQCS NEXT DUE : 12am 8/14
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0427 (m1).
CMP.A2 24hr MQCS COMPLETED: 5am 8/13
CMP.A2 24hr MQCS NEXT DUE : 5am 8/14
CMP.B1 (Speedfam CMP-V) - DOWN: scheduled down. Reps working on system all
day.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : when up.
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : when up.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0398 (m2).
CMP.B2 24hr MQCS COMPLETED: 10am 8/13
CMP.B2 24hr MQCS NEXT DUE : 10am 8/14
CMP.B2 12hr MQCS COMPLETED: 7:30pm 8/13
CMP.B2 12hr MQCS NEXT DUE : 7:30am 8/14
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0436 (m2) and JD0376 (m3).
CMP.B3 24hr MQCS COMPLETED: 9am 8/13
CMP.B3 24hr MQCS NEXT DUE : 9am 8/14
CMP.B3 12hr MQCS COMPLETED: 7:30pm 8/13
CMP.B3 12hr MQCS NEXT DUE : 7:30am 8/14
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11:30am 8/13
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11:30pm 8/13
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 11:20am 8/13
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 11:20pm 8/13
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 12:20am 8/13
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 12:20pm 8/13
Hot/B lots in area:
__________________
JL0436 - M2 HOT LOT (TREAT AS HOT LOT BUT WILL NOT SHOW UP AS HOT ON
WORKSTREAM. HAS RED TAG HOLDERS.)
Hot lots coming to area:
-----------------------
JL0430 - DEP ILD1 1
Static Lots in area:
-------------------
XD0503 - STI. HOLD FOR ENG.
Down Equipment:
--------------
CMP.B1 - DOWN TO SPEEDFAM.
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0503 - STI. HOLD FOR ENG.
Monitor status:
--------------
1 box of 12K mqc wafers. 4 more boxes on order.
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* SEE TDCO NEAR CMP.B1 *
Lots/wafers processed:
---------------------
JD0433 - PMD - 24WFRS
XD0475 - M1 - 24
JD0395 - M2 - 17
XD0502 - M3 - 18
JD0394 - M2 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 SPEEDFAM CARRIERS
7 STRASBAUGH CARRIERS
2 STRASBAUGH PLATES
|
| 79.15 | PASSDOWN CMP.B-SHIFT 8/14/96 | FABSIX::M_PROVENCHER | | Wed Aug 14 1996 07:55 | 111 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 60 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0421 PMD/JL0430 M1 (HOT LOT)
CMP.A1 24hr MQCS COMPLETED: @ 1:40 AM 8/14
CMP.A1 24hr MQCS NEXT DUE : @ 1:40 AM 8/15
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC MQC'S IN PROCESS AFTER CRASH/PAD + CARRIERS
REPLACED
CMP.A2 24hr MQCS COMPLETED: N/A
CMP.A2 24hr MQCS NEXT DUE : N/A
CMP.B1 (Speedfam CMP-V) - UP/24 HOUR MQC'S IN PROCESS
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - UP/MQC MQC'S IN PROCESS AFTER CRASH/PAD + CARRIERS #3,
AND #4 REPLACED
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - : DOWN POLISH TABLE BELT SLIPPING
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A1 12hr MQCS COMPLETED: @ 8PM 8/12
CMP-SCRUB.A1 12hr MQCS NEXT DUE : @ 8AM 8/13
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 12hr MQCS COMPLETED: @ 8PM 8/12
CMP-SCRUB.A2 12hr MQCS NEXT DUE : @ 8AM 8/13
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A3 12hr MQCS COMPLETED: @ 8PM 8/12
CMP-SCRUB.A3 12hr MQCS NEXT DUE : @ 8AM 8/13
Hot/B lots in area:
__________________
JL0430 M1 (A1)
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
B3 - POLISH TABLE BELT SLIPPING
Scrap lots:
----------
*NONE*
Hold Lots:
---------
XD0503 - STI
Monitor status:
--------------
1 BOX of 12k mqc wafers. 3 BOXES ON ORDER
Number of product lots in room:
------------------------------
7 LOTS
New specs/revs posted:
---------------------
* SEE TDCO BY CMP.B1*
Lots/wafers processed:
---------------------
* JL0434 PMD 23 WAFERS *
JL0428 M1 24 WAFERS
JL0436 M2 22 WAFERS (HOT)
JD0398 M2 24 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
1 SPEEDFAM CARRIERS
5 STRASBAUGH CARRIERS
2 STRASBAUGH PLATES
|
| 79.16 | PASSDOWN CMP B-SHIFT 8/14/96 | FABSIX::M_PROVENCHER | | Wed Aug 14 1996 07:59 | 110 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 60 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0421 PMD/JL0430 M1 (HOT LOT)
CMP.A1 24hr MQCS COMPLETED: @ 1:40 AM 8/14
CMP.A1 24hr MQCS NEXT DUE : @ 1:40 AM 8/15
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC MQC'S IN PROCESS AFTER CRASH/PAD + CARRIERS
REPLACED
CMP.A2 24hr MQCS COMPLETED: N/A
CMP.A2 24hr MQCS NEXT DUE : N/A
CMP.B1 (Speedfam CMP-V) - DOWN/ COMPUTER ERA
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - UNSCD-DN/DOWN TO MAINT
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - : DOWN POLISH TABLE BELT SLIPPING
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A1 12hr MQCS COMPLETED: @ 8PM 8/12
CMP-SCRUB.A1 12hr MQCS NEXT DUE : @ 8AM 8/13
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 12hr MQCS COMPLETED: @ 8PM 8/12
CMP-SCRUB.A2 12hr MQCS NEXT DUE : @ 8AM 8/13
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A3 12hr MQCS COMPLETED: @ 8PM 8/12
CMP-SCRUB.A3 12hr MQCS NEXT DUE : @ 8AM 8/13
Hot/B lots in area:
__________________
JL0430 M1 (A1)
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
B3 - POLISH TABLE BELT SLIPPING
Scrap lots:
----------
*NONE*
Hold Lots:
---------
XD0503 - STI
Monitor status:
--------------
1 BOX of 12k mqc wafers. 3 BOXES ON ORDER
Number of product lots in room:
------------------------------
7 LOTS
New specs/revs posted:
---------------------
* SEE TDCO BY CMP.B1*
Lots/wafers processed:
---------------------
* JL0434 PMD 23 WAFERS *
JL0428 M1 24 WAFERS
JL0436 M2 22 WAFERS (HOT)
JD0398 M2 24 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
1 SPEEDFAM CARRIERS
5 STRASBAUGH CARRIERS
2 STRASBAUGH PLATES
|
| 79.17 | A-shift CMP passdown 8/14/96 | FABSIX::J_SADIN | Freedom isn't free. | Wed Aug 14 1996 20:58 | 109 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 40 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs after pad change (one
carrier changed also).
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0405 (m2).
CMP.A2 24hr MQCS COMPLETED: 1pm 8/14
CMP.A2 24hr MQCS NEXT DUE : 1pm 8/15
CMP.B1 (Speedfam CMP-V) - VERIFY: needs recipes edited to match .b2/.b3 and
full breakins/mqcs.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0378 (m2).
CMP.B2 24hr MQCS COMPLETED: 6:30pm 8/14
CMP.B2 24hr MQCS NEXT DUE : 6:30pm 8/15
CMP.B2 12hr MQCS COMPLETED: due now
CMP.B2 12hr MQCS NEXT DUE : due now
CMP.B3 (Speedfam CMP-V) - VERIFY: needs full breakins and mqcs. Use this
system to copy recipes for CMP.B1.
CMP.B3 24hr MQCS COMPLETED: n/a
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11:40am 8/14
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11:40pm 8/14
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 12:29pm 8/14
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 12:29am 8/15
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 11:30am 8/14
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11:30pm 8/14
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0305 - DEP_ILD3 1
** rocket lot will be here by 10pm!! keep a machine open for it per
management **
Static Lots in area:
-------------------
n/a
Down Equipment:
--------------
CMP.B1 - VERIFY
CMP.B3 - VERIFY
CMP.A1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0503 - STI
XD0462 - BEING REWORKED AT FILMS. SEE PAUL SKOWRONSKI WITH QUESTIONS.
Monitor status:
--------------
2 boxes of 12K mqc wafers. 2 more on order.
Number of product lots in room:
------------------------------
18
New specs/revs posted:
---------------------
SEE TDCO NEAR CMP.B1
Lots/wafers processed:
---------------------
n/a
# of carriers for strasbaugh/speedfam:
--------------------------------------
???
|
| 79.18 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Thu Aug 15 1996 08:38 | 50 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0443 NEEDS 100% AND TOUCHUP
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - DOWN/PARTICLES
CMP.B2 (Speedfam CMP-V) - UP/RUNNING HOT LOT JD0305 IN TOUCHUP
CMP.B3 (Speedfam CMP-V) - UP/RUNNING JD0376 READY FOR TOUCHUP, JD0388 FIRST
PASS 400 COMPLETE.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:1
-------------------
JD0305
STATIC lots in area:14
--------------------
HOLD LOTS IN AREA:2
__________________
DOWN equipment:
---------------
CMP.B1/ PARTICLES
NUMBER of product lots in room:21
-------------------------------
LOTS COMPLETED : 6
----------------
BREAK IN WAFERS USED: 30
MQC WAFERS USED:40
MQC WAFERS AVAILABLE:11 WAFERS----A SHIFT ORDERED 50 AND D SHIFT ORDERED 50
ALSO 100 BREAKIN WAFERS ORDERED BY D SHIFT
----------
|
| 79.19 | CMP C-SHIFT PD. 8-15-96 | FABSIX::E_DAWSON | | Thu Aug 15 1996 20:46 | 40 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE - Needs MQC's
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE - Needs MQC's
CMP.B1 (Speedfam CMP-V) - DOWN - REPAIR
CMP.B2 (Speedfam CMP-V) - UP/IDLE - RUNNING 2 - JD0390 ILD3 Needs DRG.
JD0407 ILD2 100% Thick.A5.
Mqc's, Offsets performed.
CMP.B3 (Speedfam CMP-V) - Running 2 - JD0414 ILD2 100% on Thick.A5
JD0382 Scrubin / Scrub.A2 Needs100%
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: 0 Lots in CMP: 13
------------------ -----------
Lots Shiped: 12 New SPEC/TDCO:
----------- -------------
POSTED @CMP.B1 "PLEASE READ"
Down Equipment: Carriers:
-------------- --------
CMP.B1...REPAIR See Carrier PD.
MQC Mon. Used: 6 MQC Monitors: 1 Box
------------- ------------
Misc.
----
Hold lots:
XD0503...STI, XD0462...P2, XD0508...P2
|
| 79.20 | C-SHIFT CMP PD. 8-16-96 | FABSIX::E_DAWSON | | Fri Aug 16 1996 20:38 | 38 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE - Mqc's performed.
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE - Mqc's performed.
CMP.B1 (Speedfam CMP-V) - UP/IDLE - DOWN - See E.E. PD.
CMP.B2 (Speedfam CMP-V) - UP/IDLE - Mqc's performed.
CMP.B3 (Speedfam CMP-V) - UP/IDLE - JD0425 ILD2 @ T-up
XD0501 ILD3 @ t-up
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: 0 Lots in CMP: 7
------------------ -----------
Lots Shiped: 13 New SPEC/TDCO:
----------- -------------
POSTED @ CMP.B1 "PLEASE READ"
Down Equipment: Carriers:
-------------- --------
CMP.B1 - See E.E. See Carrier PD.
MQC Mon. Used: 10 MQC Monitors:
------------- ------------
3.5 Boxes
Misc:
----
Lots on Hold = XD0508..See PE.
|
| 79.21 | PASSDOWN | FABSIX::D_CAUSE | | Sat Aug 17 1996 08:33 | 47 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/IDLE MQC DONE
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD0389 M3 100% ON THICK.A5
CMP.B3 (Speedfam CMP-V) - DOWN/MONTHLY PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE JD0424 NEED DRG&FINAL
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:
-------------------
STATIC lots in area:0
--------------------
HOLD LOTS IN AREA:2
__________________
DOWN equipment:
---------------
CMP.B3 MONTHLY PM
NUMBER of product lots in room:2
-------------------------------
LOTS COMPLETED : 9
----------------
BREAK IN WAFERS USED: 15
MQC WAFERS USED:10
----------
|
| 79.22 | CMP C-SHIFT PD. 8/17/96 | FABSIX::E_DAWSON | | Sat Aug 17 1996 20:24 | 42 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE - Mqc's performed.
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE - Mqc's performed.
CMP.B1 (Speedfam CMP-V) - UP/IDLE - Needs Mqc's. @2:00am
CMP.B2 (Speedfam CMP-V) - PM - Monthly
CMP.B3 (Speedfam CMP-V) - MQC -
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: 0 Lots in CMP: 1
------------------ -----------
JD0377 "NO TAG"
Lots Shiped: 5 New SPEC/TDCO:
----------- -------------
Posted @ CMP.B1 "PLEASE READ"
Down Equipment: 0 Carriers:
-------------- --------
See Carrier PD.
MQC Mon. Used: 10 MQC Monitors:
------------- ------------
3.5 Boxes
Misc:
----
- Prometrix weekly mqc's performed on both thickness.
- Four more lots of mqc wafers were ordered, there are 11~
TM40 MA lots at ILD.
- XD0508 / Hold P2
|
| 79.23 | PASSDOWN CMP B-SHIFT 8/18/96 | FABSIX::M_PROVENCHER | | Sun Aug 18 1996 07:40 | 106 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 31 MQC'S
BREAKIN WAFERS 65 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JL0446 PMD
CMP.A1 24hr MQCS COMPLETED: @ 1:40 AM 8/17
CMP.A1 24hr MQCS NEXT DUE : @ 1:40 AM 8/18
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 24hr MQCS COMPLETED: @ 9:30 AM 8/17
CMP.A2 24hr MQCS NEXT DUE : @ 9:30 AM 8/18
CMP.B1 (Speedfam CMP-V) - UP/MQC (IN PROCESS)
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - UP/ RUNNING JD0373 M2.5 (M3)
CMP.B2 24hr MQCS COMPLETED: @ 4:00 AM 8/18
CMP.B2 24hr MQCS NEXT DUE : @ 4:00 AM 8/19
CMP.B2 12hr MQCS COMPLETED: @ 4:00 AM 8/18
CMP.B2 12hr MQCS NEXT DUE : @ 4:00 PM 8/18
CMP.B3 (Speedfam CMP-V) - : UP/RUNNING XD0500 M3/JD0420 M2
CMP.B3 24hr MQCS COMPLETED: @ 5:00 AM 8/18
CMP.B3 24hr MQCS NEXT DUE : @ 5:00 AM 8/19
CMP.B3 12hr MQCS COMPLETED: @ 5:00 AM 8/18
CMP.B3 12hr MQCS NEXT DUE : @ 5:00 PM 8/18
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A1 12hr MQCS COMPLETED: @ 3AM 8/18
CMP-SCRUB.A1 12hr MQCS NEXT DUE : @ 3PM 8/19
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 12hr MQCS COMPLETED: @ 3AM 8/18
CMP-SCRUB.A2 12hr MQCS NEXT DUE : @ 3PM 8/19
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A3 12hr MQCS COMPLETED: @ 3AM 8/18
CMP-SCRUB.A3 12hr MQCS NEXT DUE : @ 3PM 8/19
Hot/B lots in area:
__________________
* NONE *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* XD0508 HOLD P2*
XD0503 HOLD - STI LOT
Down Equipment:
--------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
XD0503 - STI
XD0508 - P2
Monitor status:
--------------
2 BOXES of 12k mqc wafers. 4 BOXES ON ORDER
Number of product lots in room:
------------------------------
4 LOTS
New specs/revs posted:
---------------------
* SEE TDCO BY CMP.B1*
Lots/wafers processed:
---------------------
* JD0377 M2.5 (M3)*
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 SPEEDFAM CARRIERS
9 STRASBAUGH CARRIERS
4 STRASBAUGH PLATES
|
| 79.24 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Sun Aug 18 1996 20:45 | 119 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - :Running JL0447 (PMD)
CMP.A1 24hr MQCS COMPLETED: 12:32 hours 8/18/96
CMP.A1 24hr MQCS NEXT DUE : 12:32 hours 8/19/96
========================================================================
CMP.A2 (Strasbaugh 6DS-SP) - : Runnnig XD0516 (PMD)
CMP.A2 24hr MQCS COMPLETED: 14:45 hours 8/18/96
CMP.A2 24hr MQCS NEXT DUE : 14:45 hours 8/19/96
========================================================================
CMP.B1 (Speedfam CMP-V) - : Running JD0386 (M3)
CMP.B1 24hr MQCS COMPLETED: 11:33 hours 8/18/96
CMP.B1 24hr MQCS NEXT DUE : 11:33 hours 8/19/96
CMP.B1 12hr MQCS COMPLETED: DONE
=========================================================================
CMP.B2 (Speedfam CMP-V) - : Running JD0393 (M3)
CMP.B2 24hr MQCS COMPLETED: 3:56 hours 8/18/96
CMP.B2 24hr MQCS NEXT DUE : 3:56 hours 8/19/96
CMP.B2 12hr MQCS COMPLETED: DONE
=========================================================================
CMP.B3 (Speedfam CMP-V) - : IDLE
CMP.B3 24hr MQCS COMPLETED: 4:39 hours 8/18/96
CMP.B3 24hr MQCS NEXT DUE : 4:39 hours 8/19/96
CMP.B3 12hr MQCS COMPLETED: DONE
=========================================================================
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 15:40 hours 8/18/96
=========================================================================
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 15:40 hours 8/18/96
=========================================================================
CMP-SCRUB.A3 (On-track scrubber) - IDLE
CMP-SCRUB.A4 12hr MQCS COMPLETED: 15:40 hours 8/18/96
Hot/B lots in area:
__________________
hot lot JL0464
Hot lots coming to area:
-----------------------
* ROCKET *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0503 and XD0508
Monitor status:
--------------
2 boxes of 12K mqc wafers
Number of product lots in room:
------------------------------
7 lots
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0500 _ M3 - 23 WAFERS
JD0420 - M2 - 24 "
JD0433 _ M1 - 24 "
JD0373 - M25- 16 "
JL0477A- M2 - 6 "
JL0446 - PMD 24 "
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 SPEEDFAM CARRIERS
11 STRASBAUGH CARRIERS
|
| 79.25 | PASSDOWN CMP B-SHIFT 8/19/96 | FABSIX::M_PROVENCHER | | Mon Aug 19 1996 07:51 | 112 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 MQC'S
BREAKIN WAFERS 48 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A1 24hr MQCS COMPLETED: @ 12:30 AM 8/18
CMP.A1 24hr MQCS NEXT DUE : @ 12:30 AM 8/19
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC (CRASHED WHILE RUNNING XD0521)
PAD CHANGED CARRIERS REPLACED
CMP.A2 24hr MQCS COMPLETED: N/A
CMP.A2 24hr MQCS NEXT DUE : N/A
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B1 24hr MQCS COMPLETED: @12:30 AM 8/18
CMP.B1 24hr MQCS NEXT DUE : @12:30 AM 8/19
CMP.B1 12hr MQCS COMPLETED: @ 4:00 AM 8/19
CMP.B1 12hr MQCS NEXT DUE : @ 4:00 PM 8/19
CMP.B2 (Speedfam CMP-V) - UP/ RUNNING JL0439 M2 (TOUCH UP)
CMP.B2 24hr MQCS COMPLETED: @ 4:00 AM 8/19
CMP.B2 24hr MQCS NEXT DUE : @ 4:00 AM 8/20
CMP.B2 12hr MQCS COMPLETED: @ 4:00 AM 8/19
CMP.B2 12hr MQCS NEXT DUE : @ 4:00 PM 8/19
CMP.B3 (Speedfam CMP-V) - : UP/IDLE
CMP.B3 24hr MQCS COMPLETED: @ 6:00 AM 8/19
CMP.B3 24hr MQCS NEXT DUE : @ 6:00 AM 8/20
CMP.B3 12hr MQCS COMPLETED: @ 4:00 AM 8/19
CMP.B3 12hr MQCS NEXT DUE : @ 4:00 PM 8/29
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A1 12hr MQCS COMPLETED: @ 4:00 AM 8/19
CMP-SCRUB.A1 12hr MQCS NEXT DUE : @ 4:00 PM 8/19
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 12hr MQCS COMPLETED: @ 4:00 AM 8/19
CMP-SCRUB.A2 12hr MQCS NEXT DUE : @ 4:00 PM 8/19
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A3 12hr MQCS COMPLETED: @ 4:00 AM 8/19
CMP-SCRUB.A3 12hr MQCS NEXT DUE : @ 4:00 PM 8/19
Hot/B lots in area:
__________________
* JL0439 (HOT) B2 TOUCH UP *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* XD0508 HOLD P2*
XD0503 HOLD - STI LOT
Down Equipment:
--------------
* NONE *
Scrap lots:
----------
* XD0521 (2 WAFERS) CRASH ON TOOL CMP A2 *
Hold Lots:
---------
XD0503 - STI
XD0508 - P2
Monitor status:
--------------
1 BOX of 12k mqc wafers. 1 ON ORDER
Number of product lots in room:
------------------------------
2 LOTS
New specs/revs posted:
---------------------
* SEE TDCO BY CMP.B1*
Lots/wafers processed:
---------------------
* JL0447 PMD 24 WAFERS *
XD0512 PMD 24 WAFERS
JL0464 M1 12 WAFERS (HOT)
JL0439 M2 23 WAFERS (HOT)
JD0393 M3 24 WAFERS
JD0386 M3 24 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 SPEEDFAM CARRIERS
9 STRASBAUGH CARRIERS
4 STRASBAUGH PLATES
|
| 79.26 | A-shift CMP passdown 8/19/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Aug 19 1996 20:47 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0510 (pmd).
CMP.A1 24hr MQCS COMPLETED: 4:30pm 8/19
CMP.A1 24hr MQCS NEXT DUE : 4:30pm 8/20
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0508 (m1 - split).
CMP.A2 24hr MQCS COMPLETED: 11:30am 8/19
CMP.A2 24hr MQCS NEXT DUE : 11:30am 8/20
CMP.B1 (Speedfam CMP-V) - RUNNING: JL0438 (m1).
CMP.B1 24hr MQCS COMPLETED: 1pm 8/19
CMP.B1 24hr MQCS NEXT DUE : 1pm 8/20
CMP.B1 12hr MQCS COMPLETED: 1pm 8/19
CMP.B1 12hr MQCS NEXT DUE : 1am 8/20
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B2 24hr MQCS COMPLETED: 3:30am 8/19
CMP.B2 24hr MQCS NEXT DUE : 3:30am 8/20
CMP.B2 12hr MQCS COMPLETED: 7pm 8/19
CMP.B2 12hr MQCS NEXT DUE : 7am 8/20
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0506 (m2).
CMP.B3 24hr MQCS COMPLETED: 4:30am 8/19
CMP.B3 24hr MQCS NEXT DUE : 4:30am 8/20
CMP.B3 12hr MQCS COMPLETED: 7:30pm 8/19
CMP.B3 12hr MQCS NEXT DUE : 7:30am 8/20
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7:30pm 8/19
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7:30am 8/20
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7:30pm 8/19
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7:30am 8/20
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7:30pm 8/19
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7:30am 8/20
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0508 - HOLD FOR ERIC BODENSIECK (6 WAY SPLIT LOT).
Monitor status:
--------------
2 boxes of 12K mqc wafers.
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
TDCO POSTED BY CMP.B1.
Lots/wafers processed:
---------------------
XD0521 - PMD - 22WFRS
XD0503 - STI - 19
JD0431 - M1 - 24
JD0392 - M3 - 24
JD0400 - M2 - 23
XD0507 - M2 - 22
# of carriers for strasbaugh/speedfam:
--------------------------------------
2 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
3 STRASBAUGH PLATES
|
| 79.27 | PASSDOWN CMP B-SHIFT 8/20/96 | FABSIX::M_PROVENCHER | | Tue Aug 20 1996 07:45 | 112 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 MQC'S
BREAKIN WAFERS 49 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING XD0522 PMD
CMP.A1 24hr MQCS COMPLETED: @ 4:30 PM 8/19
CMP.A1 24hr MQCS NEXT DUE : @ 4:30 PM 8/20
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING XD0494 PMD
CMP.A2 24hr MQCS COMPLETED: @ 11:30 AM 8/19
CMP.A2 24hr MQCS NEXT DUE : @ 11:30 AM 8/20
CMP.B1 (Speedfam CMP-V) - UP/MQC (CRASHED @ 5:00 AM) HEADS 1,AND 5 REPLACED
CMP.B1 24hr MQCS COMPLETED: IN PROCESS
CMP.B1 24hr MQCS NEXT DUE : " "
CMP.B1 12hr MQCS COMPLETED: @ 6:00 AM 8/20
CMP.B1 12hr MQCS NEXT DUE : @ 6:00 PM 8/20
CMP.B2 (Speedfam CMP-V) - UP/ RUNNING JL0428 M2/JD0493 M3
CMP.B2 24hr MQCS COMPLETED: @ 6:00 AM 8/20
CMP.B2 24hr MQCS NEXT DUE : @ 6:00 AM 8/21
CMP.B2 12hr MQCS COMPLETED: @ 6:00 AM 8/20
CMP.B2 12hr MQCS NEXT DUE : @ 6:00 PM 8/20
CMP.B3 (Speedfam CMP-V) - : UP/RUNNING JL0434 M2/JD0395 M3
CMP.B3 24hr MQCS COMPLETED: @ 6:00 AM 8/20
CMP.B3 24hr MQCS NEXT DUE : @ 6:00 AM 8/21
CMP.B3 12hr MQCS COMPLETED: @ 6:00 AM 8/20
CMP.B3 12hr MQCS NEXT DUE : @ 6:00 PM 8/20
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A1 12hr MQCS COMPLETED: @ 6:30 AM 8/20
CMP-SCRUB.A1 12hr MQCS NEXT DUE : @ 6:30 PM 8/20
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 12hr MQCS COMPLETED: @ 6:30 AM 8/20
CMP-SCRUB.A2 12hr MQCS NEXT DUE : @ 6:30 PM 8/20
CMP-SCRUB.A3 (On-track scrubber) - DOWN/UNSCHED (WAITING FOR PARTS)
CMP-SCRUB.A3 12hr MQCS COMPLETED: N/A
CMP-SCRUB.A3 12hr MQCS NEXT DUE : N/A
Hot/B lots in area:
__________________
* NONE*
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* NONE*
Down Equipment:
--------------
* CMP-SCRUB.A3 *
Scrap lots:
----------
* JL0428 M2 (2 WAFERS) CRASH ON TOOL CMP B1 *
Hold Lots:
---------
XD0508 - FOR ERIC B.
Monitor status:
--------------
3 BOXES of 12k mqc wafers. 3 ON ORDER
Number of product lots in room:
------------------------------
6 LOTS
New specs/revs posted:
---------------------
* SEE TDCO BY CMP.B1*
Lots/wafers processed:
---------------------
* XD0510 PMD 22 WAFERS
JL0477 PMD 6 WAFERS
JL0445 PMD 24 WAFERS
JD0421 M1 24 WAFERS
JL0438 M1 24 WAFERS
XD0506 M2 19 WAFERS
JD0397 M3 24 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
3 STRASBAUGH PLATES
|
| 79.28 | A-shift CMP passdown 8/20/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Aug 20 1996 20:49 | 117 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqc
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: failed mqcs for high unif. Replacing
pad.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 24hr MQCS COMPLETED: needs mqcs now! ran eng work all day.
CMP.A2 24hr MQCS NEXT DUE : needs mqcs now! ran eng work all day.
CMP.B1 (Speedfam CMP-V) - DOWN: head one not rotating. Parts on order.
Machine can be run with only heads 2,3,4,5 if absolutely necessary.
CMP.B1 24hr MQCS COMPLETED: 7:45am 8/20
CMP.B1 24hr MQCS NEXT DUE : 7:45am 8/21
CMP.B1 12hr MQCS COMPLETED: 6am 8/20
CMP.B1 12hr MQCS NEXT DUE : now
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B2 24hr MQCS COMPLETED: 6am 8/20
CMP.B2 24hr MQCS NEXT DUE : 6am 8/21
CMP.B2 12hr MQCS COMPLETED: 6pm 8/20
CMP.B2 12hr MQCS NEXT DUE : 6am 8/21
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0427 (m2).
CMP.B3 24hr MQCS COMPLETED: 6am 8/20
CMP.B3 24hr MQCS NEXT DUE : 6am 8/21
CMP.B3 12hr MQCS COMPLETED: 2:30pm 8/20
CMP.B3 12hr MQCS NEXT DUE : 2:30am 8/21
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 5pm 8/20
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 5am 8/21
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 5pm 8/20
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 5am 8/21
CMP-SCRUB.A3 (On-track scrubber) - DOWN: rep will be in tomorrow morning to
fix the tool.
CMP-SCRUB.A3 12hr MQCS COMPLETED: n/a
CMP-SCRUB.A3 12hr MQCS NEXT DUE : n/a
Hot/B lots in area:
__________________
JL0430 - M2 HOT (*ONLY MEASURE ON THICKNESS.A5. THICK.A4 IS NOT OPTIMIZED
FOR THIS DEVICE YET*).
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - CARRIER ONE ROTATION
CMP.A1 - BAD UNIF AFTER MQCS
CMP-SCRUB.A3 - DOWN FOR REP TO FIX IN AM.
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0508 - DONE POLISHING! HOLD FOR ENG FOR EXTENSIVE P2 MEASUREMENTS.
Monitor status:
--------------
3 BOXES OF 12K MQC WAFERS. BUNCHES ON ORDER.
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
TDCO POSTED NEXT TO CMP.B1
Lots/wafers processed:
---------------------
XD0517 - PMD - 24WFRS
XD0522 - PMD - 24
XD0508 - M1 - 24
XD0494 - PMD - 18
JL0387B - M1 - 12
JL0428 - M2 - 22
JD0394 - M3 - 24
JL0434 - M1 - 23
JD0395 - M3 - 17
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
3 STRASBAUGH PLATES
|
| 79.29 | PASSDOWN | FABSIX::D_CAUSE | | Thu Aug 22 1996 08:41 | 47 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE MQC COMPLETE
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE MQC COMPLETE
CMP.B1 (Speedfam CMP-V) - UP/IDLE MQC COMPLETE
CMP.B2 (Speedfam CMP-V) - UP/RUNNING JD0399 SEND AHEADS
CMP.B3 (Speedfam CMP-V) - UP/IN MQC WAFERS BEING EVALUATED
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:0
-------------------
STATIC lots in area:0
--------------------
HOLD LOTS IN AREA:0
__________________
DOWN equipment:
---------------
NUMBER of product lots in room:1
-------------------------------
LOTS COMPLETED : 3
----------------
BREAK IN WAFERS USED: 15
MQC WAFERS USED:21
MQC WAFERS AVAIL:1 BOX
----------
|
| 79.30 | A-shift CMP passdown 8/25/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Aug 25 1996 20:21 | 102 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: YD0172 (m1).
CMP.A1 24hr MQCS COMPLETED: 3:30pm 8/25
CMP.A1 24hr MQCS NEXT DUE : 3:30pm 8/26
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running mqcs.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0517 (m1).
CMP.B1 24hr MQCS COMPLETED: 3am 8/25
CMP.B1 24hr MQCS NEXT DUE : 3am 8/26
CMP.B1 12hr MQCS COMPLETED: 7:15pm 8/25
CMP.B1 12hr MQCS NEXT DUE : 7:15am 8/26
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0425 (m3).
CMP.B2 24hr MQCS COMPLETED: 9am 8/25
CMP.B2 24hr MQCS NEXT DUE : 9am 8/26
CMP.B2 12hr MQCS COMPLETED: 7pm 8/25
CMP.B2 12hr MQCS NEXT DUE : 7am 8/26
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0463 (m1) and JD0400 (m3).
CMP.B3 24hr MQCS COMPLETED: 5:15am 8/25
CMP.B3 24hr MQCS NEXT DUE : 5:15am 8/26
CMP.B3 12hr MQCS COMPLETED: 7:30pm 8/25
CMP.B3 12hr MQCS NEXT DUE : 7:30am 8/26
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7:30pm 8/25
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7:30am 8/26
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7:30pm 8/25
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7:30am 8/26
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7:30pm 8/25
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7:30am 8/26
Hot/B lots in area:
__________________
JL0463 - HOT M1
Hot lots coming to area:
-----------------------
JD0440 - DEP_M2
Static Lots in area:
-------------------
XD0519 - 2.4DAYS (ON HOLD FOR ENG)
Down Equipment:
--------------
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0519 - HOLD FOR ENG.
Monitor status:
--------------
5 boxes of 12K mqc wafers.
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XM0515 - PMD - 24WFRS
JD0466 - PMD - 19
# of carriers for strasbaugh/speedfam:
--------------------------------------
?????
|
| 79.31 | PASSDOWN CMP B-SHIFT 8/26/96 | FABSIX::M_PROVENCHER | | Mon Aug 26 1996 08:04 | 113 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 MQC'S
BREAKIN WAFERS 49 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JL0465 PMD
CMP.A1 24hr MQCS COMPLETED: @ 3:30 PM 8/25
CMP.A1 24hr MQCS NEXT DUE : @ 3:30 PM 8/26
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING XD0518 PMD
CMP.A2 24hr MQCS COMPLETED: @ 8:00 PM 8/25
CMP.A2 24hr MQCS NEXT DUE : @ 8:00 PM 8/26
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B1 24hr MQCS COMPLETED: @ 7:00 AM 8/26
CMP.B1 24hr MQCS NEXT DUE : @ 7:00 AM 8/27
CMP.B1 12hr MQCS COMPLETED: @ 3:00 AM 8/26
CMP.B1 12hr MQCS NEXT DUE : @ 3:00 PM 8/26
CMP.B2 (Speedfam CMP-V) - UP/MQC
CMP.B2 24hr MQCS COMPLETED: IN PROCESS
CMP.B2 24hr MQCS NEXT DUE : " "
CMP.B2 12hr MQCS COMPLETED: @ 4:00 AM 8/26
CMP.B2 12hr MQCS NEXT DUE : @ 4:00 PM 8/26
CMP.B3 (Speedfam CMP-V) - : UP/RUNNING JD0377 M3
CMP.B3 24hr MQCS COMPLETED: @ 6:30 AM 8/25
CMP.B3 24hr MQCS NEXT DUE : @ 6:30 AM 8/26
CMP.B3 12hr MQCS COMPLETED: @ 6:00 AM 8/26
CMP.B3 12hr MQCS NEXT DUE : @ 6:00 PM 8/26
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A1 12hr MQCS COMPLETED: @ 7:00 AM 8/25
CMP-SCRUB.A1 12hr MQCS NEXT DUE : @ 7:00 PM 8/25
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 12hr MQCS COMPLETED: @ 7:00 AM 8/25
CMP-SCRUB.A2 12hr MQCS NEXT DUE : @ 7:00 PM 8/25
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A3 12hr MQCS COMPLETED: @ 7:00 AM 8/25
CMP-SCRUB.A3 12hr MQCS NEXT DUE : @ 7:00 AM 8/25
Hot/B lots in area:
__________________
* NONE*
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* NONE*
Down Equipment:
--------------
* NONE*
Scrap lots:
----------
* NONE*
Hold Lots:
---------
* XD0519 M1 HOLD FOR F.KRUPA, SEE REMARKS
Monitor status:
--------------
4 BOXES of 12k mqc wafers.
Number of product lots in room:
------------------------------
5 LOTS
New specs/revs posted:
---------------------
* SEE TDCO BY CMP.B1*
Lots/wafers processed:
---------------------
*JD0467 PMD 24 WAFERS
JL0463 M1 24 WAFERS (HOT)
YD0172 M1 14 WAFERS
XD0517 M1 24 WAFERS
XD0522 M1 24 WAFERS
JL0417 M2 21 WAFERS
JD0400 M3 23 WAFERS
JD0425 M3 21 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM CARRIERS
2 STRASBAUGH CARRIERS
? STRASBAUGH PLATES
|
| 79.32 | A-shift CMP passdown 8/26/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Aug 26 1996 20:36 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - VERIFY: running breakins and mqcs after
pad/carrier change.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running third set of mqcs (high unif but
good center fast 3d map).
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0431 (m2).
CMP.B1 24hr MQCS COMPLETED: 6:50am 8/26
CMP.B1 24hr MQCS NEXT DUE : 6:50am 8/27
CMP.B1 12hr MQCS COMPLETED: 3:50pm 8/26
CMP.B1 12hr MQCS NEXT DUE : 3:50am 8/27
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0373 (m3).
CMP.B2 24hr MQCS COMPLETED: 10am 8/26
CMP.B2 24hr MQCS NEXT DUE : 10am 8/27
CMP.B2 12hr MQCS COMPLETED: 10am 8/26
CMP.B2 12hr MQCS NEXT DUE : 10pm 8/26
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0506 (m3).
CMP.B3 24hr MQCS COMPLETED: 6:30am 8/26
CMP.B3 24hr MQCS NEXT DUE : 6:30am 8/27
CMP.B3 12hr MQCS COMPLETED: 3:55pm 8/26
CMP.B3 12hr MQCS NEXT DUE : 3:55am 8/27
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7:30pm 8/26
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7:30am 8/27
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7:30pm 8/26
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7:30am 8/27
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 7:30pm 8/26
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 7:30am 8/27
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0440 - DEP_ILD2 1
Static Lots in area:
-------------------
XD0519 - 3.4 DAYS (ENG RUNNING NOW)
Down Equipment:
--------------
CMP.A1 - VERIFY AFTER PAD/CARRIER CHANGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
7 boxes of 12K monitors.
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0465 - PMD - 24WFRS
XD0518 - PMD - 24
XD0459 - M3 - 15
XD0507 - M3 - 22
JD0377 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 SPEEDFAM CARRIERS
3 STRASBAUGH CARRIERS (SOME ON HOLD FOR KYLE - PRE-PUNCHED FILM)
?? STRASBAUGH PLATES
|
| 79.33 | PASSDOWN CMP B-SHIFT 8/27/96 | FABSIX::M_PROVENCHER | | Tue Aug 27 1996 07:23 | 112 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 MQC'S
BREAKIN WAFERS 62 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JL0451 PMD
CMP.A1 24hr MQCS COMPLETED: @ 9:00 PM 8/26
CMP.A1 24hr MQCS NEXT DUE : @ 9:00 PM 8/27
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 24hr MQCS COMPLETED: @ 8:00 PM 8/26
CMP.A2 24hr MQCS NEXT DUE : @ 8:00 PM 8/27
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B1 24hr MQCS COMPLETED: @ 5:00 AM 8/27
CMP.B1 24hr MQCS NEXT DUE : @ 5:00 AM 8/28
CMP.B1 12hr MQCS COMPLETED: @ 5:00 AM 8/27
CMP.B1 12hr MQCS NEXT DUE : @ 5:00 PM 8/27
CMP.B2 (Speedfam CMP-V) - UP/IDLE
CMP.B2 24hr MQCS COMPLETED: @ 10:00 AM 8/26
CMP.B2 24hr MQCS NEXT DUE : @ 10:00 AM 8/27
CMP.B2 12hr MQCS COMPLETED: @ 10:00 PM 8/26
CMP.B2 12hr MQCS NEXT DUE : @ 10:00 AM 8/27
CMP.B3 (Speedfam CMP-V) - : UP/IDLE
CMP.B3 24hr MQCS COMPLETED: @ 6:30 AM 8/27
CMP.B3 24hr MQCS NEXT DUE : @ 6:30 AM 8/28
CMP.B3 12hr MQCS COMPLETED: @ 5:00 AM 8/27
CMP.B3 12hr MQCS NEXT DUE : @ 5:00 PM 8/27
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A1 12hr MQCS COMPLETED: @ 7:00 AM 8/27
CMP-SCRUB.A1 12hr MQCS NEXT DUE : @ 7:00 PM 8/27
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 12hr MQCS COMPLETED: @ 7:00 AM 8/27
CMP-SCRUB.A2 12hr MQCS NEXT DUE : @ 7:00 PM 8/27
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A3 12hr MQCS COMPLETED: @ 7:00 AM 8/27
CMP-SCRUB.A3 12hr MQCS NEXT DUE : @ 7:00 AM 8/27
Hot/B lots in area:
__________________
* NONE*
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* NONE*
Down Equipment:
--------------
* NONE*
Scrap lots:
----------
* NONE*
Hold Lots:
---------
* NONE *
Monitor status:
--------------
6 BOXES of 12k mqc wafers.
Number of product lots in room:
------------------------------
1 LOT
New specs/revs posted:
---------------------
* SEE TDCO BY CMP.B1*
Lots/wafers processed:
---------------------
*JL0472 PMD 23 WAFERS*
JL0470 PMD 24 WAFERS
JL0456 M1 24 WAFERS
JL0477 M1 6 WAFERS
JD0431 M2 24 WAFERS
XD0506 M3 19 WAFERS
JD0373 M3 21 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM CARRIERS
2 STRASBAUGH CARRIERS
? STRASBAUGH PLATES
|
| 79.34 | A-shift CMP passdown 8/27/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Aug 27 1996 20:24 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 9pm 8/26
CMP.A1 24hr MQCS NEXT DUE : 9pm 8/27
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running 24hr mqcs.
CMP.A2 24hr MQCS COMPLETED: n/a
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B1 24hr MQCS COMPLETED: 5am 8/27
CMP.B1 24hr MQCS NEXT DUE : 5am 8/28
CMP.B1 12hr MQCS COMPLETED: 5pm 8/27
CMP.B1 12hr MQCS NEXT DUE : 5am 8/28
CMP.B2 (Speedfam CMP-V) - RUNNING: JL0438 (m2).
CMP.B2 24hr MQCS COMPLETED: 10:30am 8/27
CMP.B2 24hr MQCS NEXT DUE : 10:30am 8/28
CMP.B2 12hr MQCS COMPLETED: 10:30am 8/27
CMP.B2 12hr MQCS NEXT DUE : 19:30pm 8/27
CMP.B3 (Speedfam CMP-V) - IDLE.
CMP.B3 24hr MQCS COMPLETED: 7am 8/27
CMP.B3 24hr MQCS NEXT DUE : 7am 8/28
CMP.B3 12hr MQCS COMPLETED: 5pm 8/27
CMP.B3 12hr MQCS NEXT DUE : 5am 8/28
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 10am 8/27
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 10pm 8/27
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 10am 8/27
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 10pm 8/27
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 10am 8/27
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 10pm 8/27
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0441 - DEP_ILD1 1
JD0440 - DEP_ILD2 2
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - MQCS
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
6 boxes of 12K wafers.
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0448 - PMD - 21WFRS
JL0451 - PMD - 24
XD0527 - PMD - 24
XE0524 - PMD - 24
JL0434 - M2 - 23
JL0447 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM CARRIERS
2 STRASBAUGH CARRIERS
|
| 79.35 | PASSDOWN CMP B-SHIFT 8/28/96 | FABSIX::M_PROVENCHER | | Wed Aug 28 1996 07:56 | 108 |
|
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 MQC'S
BREAKIN WAFERS 56 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0454 M1
CMP.A1 24hr MQCS COMPLETED: @ 9:00 PM 8/27
CMP.A1 24hr MQCS NEXT DUE : @ 9:00 PM 8/28
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0441 M1 (HOT)
CMP.A2 24hr MQCS COMPLETED: @ 8:00 PM 8/27
CMP.A2 24hr MQCS NEXT DUE : @ 8:00 PM 8/28
CMP.B1 (Speedfam CMP-V) - DOWN/REPAIR CRASH WILL NEED MQC'S
CMP.B1 24hr MQCS COMPLETED: N/A
CMP.B1 24hr MQCS NEXT DUE : N/A
CMP.B1 12hr MQCS COMPLETED: N/A
CMP.B1 12hr MQCS NEXT DUE : N/A
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XL0525 M1 (HOT)
CMP.B2 24hr MQCS COMPLETED: @ 10:00 AM 8/27
CMP.B2 24hr MQCS NEXT DUE : @ 10:00 AM 8/28
CMP.B2 12hr MQCS COMPLETED: @ 10:30 PM 8/28
CMP.B2 12hr MQCS NEXT DUE : @ 10:30 AM 8/29
CMP.B3 (Speedfam CMP-V) - : UP/MQC FAILED FIRST SET (HIGH UNIFORMITY)
CMP.B3 24hr MQCS COMPLETED: IN PROCESS
CMP.B3 24hr MQCS NEXT DUE : " "
CMP.B3 12hr MQCS COMPLETED: " "
CMP.B3 12hr MQCS NEXT DUE : " "
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A1 12hr MQCS COMPLETED: @ 7:00 AM 8/27
CMP-SCRUB.A1 12hr MQCS NEXT DUE : @ 7:00 PM 8/27
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 12hr MQCS COMPLETED: @ 7:00 AM 8/27
CMP-SCRUB.A2 12hr MQCS NEXT DUE : @ 7:00 PM 8/27
CMP-SCRUB.A3 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A3 12hr MQCS COMPLETED: @ 7:00 AM 8/27
CMP-SCRUB.A3 12hr MQCS NEXT DUE : @ 7:00 AM 8/27
Hot/B lots in area:
__________________
* XL0525 M1 (B2)*
JD0441 M1 (A2)
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* NONE*
Down Equipment:
--------------
* CMP.B1 *
Scrap lots:
----------
* NONE*
Hold Lots:
---------
* NONE *
Monitor status:
--------------
5 BOXES of 12k mqc wafers.
Number of product lots in room:
------------------------------
5 LOTS
New specs/revs posted:
---------------------
* SEE TDCO BY CMP.B1*
Lots/wafers processed:
---------------------
*JL0438 M2 24 WAFERS *
XD0475 M3 24 WAFERS
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 SPEEDFAM CARRIERS
2 STRASBAUGH CARRIERS
? STRASBAUGH PLATES
|
| 79.36 | A-shift CMP passdown 8/28/96 | FABSIX::J_SADIN | Freedom isn't free. | Wed Aug 28 1996 20:34 | 112 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 40 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: failed first set of mqcs for high
uniformity (new pad). Center fast removal tho'. Running more breakins and
will need to rerun mqcs.
CMP.A1 24hr MQCS COMPLETED: n/a
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JL0458 (m1) and JD0454 (m1).
CMP.A2 24hr MQCS COMPLETED: 8pm 8/27
CMP.A2 24hr MQCS NEXT DUE : 8pm 8/28
CMP.B1 (Speedfam CMP-V) - MQC: running 2nd set of mqcs after changing
carrier #2. Particles in, unif too high.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : n/a
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : n/a
CMP.B2 (Speedfam CMP-V) - MQC: running 2nd set of mqcs after changing both
pads.
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - RUNNING: JL0477C (m2), XD0512 (m1), and JD0452
(m1).
CMP.B3 24hr MQCS COMPLETED: 3:40pm 8/28
CMP.B3 24hr MQCS NEXT DUE : 3:40pm 8/29
CMP.B3 12hr MQCS COMPLETED: 3:40pm 8/28
CMP.B3 12hr MQCS NEXT DUE : 3:40am 8/29
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 11:30am 8/28
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 11:30pm 8/28
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 11:30am 8/28
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 11:30pm 8/28
CMP-SCRUB.A3 (On-track scrubber) - IDLE.
CMP-SCRUB.A3 12hr MQCS COMPLETED: 11:30am 8/28
CMP-SCRUB.A3 12hr MQCS NEXT DUE : 11:30pm 8/28
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JL0465 - DEP_M1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B2 - MQC AFTER BOTH PADS CHANGED.
CMP.B1 - MQC AFTER CARRIER#2 CHANGED.
CMP.A1 - MQC AFTER PAD CHANGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
5 boxes of 12K mqc wafers.
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0441 - M1 - 23WFRS
XD0527 - PMD - 24
XD0510 - M1 - 22
XL0525 - M1 - 12
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 SPEEDFAM CARRIERS
2 STRASBAUGH CARRIERS
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| 79.37 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Sat Aug 31 1996 08:33 | 48 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) -UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/IDLE MQC COMPLETE
CMP.B2 (Speedfam CMP-V) - UP/RUNNING XD0462 FIRST 300 SEC DONE MEASURMENTS A4
MQC COMPLETE
CMP.B3 (Speedfam CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A3 (ONTRACK SCRUBBER) - UP/IDLE MQC COMPLETE
HOT/B lots in area:0
-------------------
STATIC lots in area:0
--------------------
HOLD LOTS IN AREA:0
__________________
DOWN equipment:0
---------------
NUMBER of product lots in room:1
-------------------------------
LOTS COMPLETED : 9
----------------
BREAK IN WAFERS USED: 25
MQC WAFERS USED:11
MQC WAFERS AVAIL:2.5 BOX
----------
|