| Title: | CMP |
| Notice: | Welcome to the CMP notesfile |
| Moderator: | FABSIX::B_TOWER LLE |
| Created: | Tue Oct 31 1995 |
| Last Modified: | Fri Jun 06 1997 |
| Last Successful Update: | Fri Jun 06 1997 |
| Number of topics: | 94 |
| Total number of notes: | 6381 |
THIS NOTE IS OF CMP.C1-7 PM CHECK SHEETS.
| T.R | Title | User | Personal Name | Date | Lines |
|---|---|---|---|---|---|
| 38.1 | Broken roller arm | SUBPAC::BJUBINVILLE | CMP Equipment Engineering | Fri Mar 28 1997 05:21 | 7 |
The tool was EMO'ed because a wafer had come out of the
outside brush station. The problem was traced to a broken
lower front roller arm which was replaced. All set....
D shift
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