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Conference asdg::cmp

Title:CMP
Notice:Welcome to the CMP notesfile
Moderator:FABSIX::B_TOWERLLE
Created:Tue Oct 31 1995
Last Modified:Fri Jun 06 1997
Last Successful Update:Fri Jun 06 1997
Number of topics:94
Total number of notes:6381

38.0. "CMP.C1-7 PM CHECKSHEETS" by STRATA::TDYER () Fri Jul 26 1996 16:23

    THIS NOTE IS OF CMP.C1-7 PM CHECK SHEETS.
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38.1Broken roller armSUBPAC::BJUBINVILLECMP Equipment EngineeringFri Mar 28 1997 05:217
      The tool was EMO'ed because a wafer had come out of the 
    outside brush station.  The problem was traced to a broken
    lower front roller arm which was replaced.  All set....

                                      D shift