| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 76.1 | PASSDOWN CMP B-SHIFT 07/01/96 | FABSIX::M_PROVENCHER | | Mon Jul 01 1996 07:59 | 81 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 B3
BREAKIN WAFERS 63 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0335 M1
CMP.B1 (SPEEDFAM CMP-V) - UP/RUNNING XD0467 M3
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JD0286 M3
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING JD0324 M3 (HOT LOT)
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Hot/B lots in area:
________________________
*JD0324 M3 24 WAFERS (HOT LOT) B3*
XD0492 M1 24 WAFERS (B-LOT)
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*XD0486 M1*
Monitor status:
---------------
*2 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*5 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JD0272 M3 24 WAFERS*
JD0278 M3 22 WAFERS
JD0320 M2 23 WAFERS
JD0334 M1 24 WAFERS
JD0268 M3 23 WAFERS
JD0348 PMD 15 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
16 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
4 PLATES FOR CMP.A1/.A2
|
| 76.2 | A-shift CMP passdown 7/01/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Jul 01 1996 20:30 | 79 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 17 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0353 (pmd) @ touchup.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0287 (m3).
CMP.B2 (Speedfam CMP-V) - MQC: running breakins and mqcs after crash.
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0312 (m2).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0492
Hot lots coming to area:
-----------------------
JD0326 - DEP_ILD3 2
Static Lots in area:
-------------------
XD0486 - 2.4DAYS (CURRENTLY RUNNING PARTIAL SPLITS ON ALL THREE SPEEDFAMS)
Down Equipment:
--------------
CMP.B2 - MQCS AFTER WAFER CRASH ON PRIMARY TABLE
CMP.A2 - WILL BE GOING NEAR SHIFT CHANGE FOR PAD CHANGE. PAD AT 350+.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1.5 boxes of 12K mqc wafers. 4 more boxes on order!
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0492 - M1 - 24WFRS
JD0353 - PMD - 23
JD0335 - M1 - 23
XD0467 - M3 - 19
JD0286 - M3 - 24
JD0324 - M3 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM CARRIERS
0 STRASBAUGH CARRIERS
4 STRASBAUGH PLATES
|
| 76.3 | PASSDOWN CMP B-SHIFT 07/02/96 | FABSIX::M_PROVENCHER | | Tue Jul 02 1996 07:42 | 79 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 A2,SCRUBAS
BREAKIN WAFERS 26 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (SPEEDFAM CMP-V) - UP/IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP/IDLE
CMP.B3 (SPEEDFAM CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQCS PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQCS PERFORMED
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*JD0324 M3 24 WAFERS*
JD0326 M3 24 WAFERS
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*JD0473 HOLD FOR L CAMMELETTI*
Monitor status:
---------------
*2 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*NONE*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JD0352 PMD 24 WAFERS*
XD0486 M1 19 WAFERS
JD0312 M2 24 WAFERS
JD0287 M3 24 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
4 PLATES FOR CMP.A1/.A2
|
| 76.4 | A-shift CMP passdown 7/2/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Jul 02 1996 20:21 | 76 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 22 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - XD0489 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0276 (m3).
CMP.B2 (Speedfam CMP-V) - MQC: running mqcs after pad change.
CMP.B3 (Speedfam CMP-V) - MQC: getting pad change now. will be running mqcs
at shift change.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B2 - MQC
CMP.B3 - PAD CHANGE AND MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K monitor wafers. 2 more boxes on order.
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0473 - M2 - 24WFRS
JD0326 - M3 - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 speedfam carriers
4 strasbaugh carriers
3 strasbaugh plates
|
| 76.5 | PASSDOWN CMP B-SHIFT 7/3/96 | FABSIX::M_PROVENCHER | | Wed Jul 03 1996 07:48 | 79 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 B3,B1
BREAKIN WAFERS 63 MISC
BROKEN PRODUCT WAFERS 2
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING XD0488 PMD
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (SPEEDFAM CMP-V) - UP/MQC AFTER PAD CHANGE (CRASH( HEAD 5)
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JD0289 M3
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING JD0274 M3/JD0322 M2
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*JD0339 PMD (2 WAFERS)*
Hold Lots:
------------
*NONE*
Monitor status:
---------------
*1 BOX OF MQC WAFERS*
Number of product lots in room:
------------------------------
*4 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JD0339 PMD 22 WAFERS*
XD0489 M1 24 WAFERS
JD0276 M3 24 WAFERS
JD0284 M3 24 WAFERS
JD0327 M2 20 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
8 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
4 PLATES FOR CMP.A1/.A2
|
| 76.6 | A-shift CMP passdown 7/3/96 | FABSIX::J_SADIN | Freedom isn't free. | Wed Jul 03 1996 20:37 | 78 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE. (pad, carriers and brushes have been
stripped in preparation for shutdown).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0322 (m2).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0326 (m3 rework) and JD0290 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0333 (m1).
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0294 (m2) and XD0466 (m1).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 STRIPPED AND CLEANED FOR SHUTDOWN (NOT DOWN IN RTC PER DENNIS
GOODWIN).
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K mqc wafers. 2 more boxes on order since yesterday.
Number of product lots in room:
------------------------------
14
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0488 - PMD - 24WFRS
JL0329 - M1 - 12
JD0289 - M3 - 24
JD0274 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
6 STRASBAUGH PLATES
|
| 76.7 | C-shift CMP passdown 7-6-96 | FABSIX::J_SADIN | Freedom isn't free. | Sat Jul 06 1996 20:33 | 83 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 60 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0477 (m2) (needs 100% uv-1050).
CMP.B1 (Speedfam CMP-V) - MQC: running mqcs. **WARNING** do NOT use the
right send station. The controller is broken and a new one should be in
tomorrow or monday. Please only use the left send station until further
notice. thanks.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0282 (m3) and JD0293 (m3).
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0328 (m2 - touchup) and XD0493 (m1).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0493
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1.5 boxes of 12K monitors
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0359 - PMD - 24WFRS
JD0342 - PMD - 22
JL0321 - M1 - 12
JD0323 - M2 - 24
JD0291 - M3 - 17
XD0483 - M2 - 07
JD0336 - M1 - 24
JD0328 - M2 - 23
JD0332 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
|
| 76.8 | A-shift CMP passdown 7/7/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Jul 07 1996 20:18 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0305 (m2 3-way split lot for Frank K.)
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0355 - UPP_PMD 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0305 WILL BE GOING ON HOLD WHEN DONE. HOLD FOR FRANK KRUPA UNTIL TOMORROW
(monday).
Monitor status:
--------------
� box of 12K monitor wafers. 4 more boxes on order.
Number of product lots in room:
------------------------------
1
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0331 - M2 - 22WFRS
JD0340 - M1 - 24
XD0454 - M2 - 20
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
|
| 76.9 | A-shift CMP passdown 7-8-96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Jul 08 1996 20:22 | 72 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqc
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - DOWN: down for scheduled upgrade to index table.
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0478 (m3).
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0319 (m2) and XD0474 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0478 - B
Hot lots coming to area:
-----------------------
JD0355 - UPP_PMD 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - DOWN FOR INDEX TABLE UPGRADE.
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0305 - BEING EVAL'D NOW FOR FRANK KRUPA. WILL BE MOVING ON SOON.
Monitor status:
--------------
2.5 boxes of 12k mqc wafers.
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0387 - M1 - 12WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
|
| 76.10 | A-shift CMP passdown 7/9/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Jul 09 1996 20:33 | 81 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - VERIFY: running breakins and mqcs after
pad/carrier change.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0355 (hot pmd) and JD0347 (m1 -
tup).
CMP.B1 (Speedfam CMP-V) - DOWN: still down for upgrade.
CMP.B2 (Speedfam CMP-V) - MQC: running mqcs after pad/carrier change (wafer
crash).
CMP.B3 (Speedfam CMP-V) - DOWN: down for pad change. poor unif.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0355 - HOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - UPGRADES
CMP.A1 - VERIFY AFTER PAD/CARRIER CHANGE
CMP.B2 - MQC AFTER PAD/CARRIER CHANGE
CMP.B3 - DOWN FOR PAD CHANGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0305 - HOLD FOR FRANK KRUPA
Monitor status:
--------------
1 box of 12K mqc wafers
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0474 - M3 - 23WFRS
JD0300 - M3 - 23
JD0305 - M2 - 22
JD0301 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 STRASBAUGH CARRIERS
6 SPEEDFAM CARRIERS
|
| 76.11 | PASSDOWN CMP B-SHIFT 7/14/96 | FABSIX::M_PROVENCHER | | Sun Jul 14 1996 07:31 | 75 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 1 scrubbas
BREAKIN WAFERS 10 MISC
BROKEN PRODUCT WAFERS
CMP.A1 (Strasbaugh 6DS-SP) - DN/TO ENG. FOR SCRATCHES
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (SPEEDFAM CMP-V) - UP/IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JD0314 M3/ JD0306 M3
CMP.B3 (SPEEDFAM CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
---------------
*2 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*2 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*NONE*
# of carriers for strasbaugh/speedfam:
-------------------------------------
8 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
4 PLATES FOR CMP.A1/.A2
|
| 76.12 | A-shift CMP passdown 7/14/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Jul 14 1996 20:14 | 79 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 28 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: down to eng for severe scratching
problem.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0365 (pmd) and JD0368 (pmd).
CMP.B1 (Speedfam CMP-V) - MQC: running mqcs after pad change.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0332 (m2).
CMP.B3 (Speedfam CMP-V) - IDLE.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - DOWN FOR HIGH SCRATCHS
CMP.B1 - RUNNING MQCS AFTER PAD CHANGE (HIGH PARTICLES)
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K mqc wafers
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0338 - PMD - 23WFRS
JD0306 - M3 - 22
JD0314 - M3 - 16
JD0311 - M3 - 24
JD0359 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
4 STRASBAUGH PLATES
|
| 76.13 | A-shift CMP passdown 7/15/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Jul 15 1996 20:23 | 80 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B3 (Speedfam CMP-V) - IDLE.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0340 - DEP_ILD3 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K mqc wafers. 4 more boxes on order.
Number of product lots in room:
------------------------------
0
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0351 - M1 - 23WFRS
JD0370 - PMD - 24
JD0369 - PMD - 24
JD0341 - M2 - 23
JD0352 - M1 - 24
JD0357 - M1 - 23
JD0342 - M1 - 22
XD0486 - M2 - 18
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
4 STRASBAUGH PLATES
|
| 76.14 | PASSDOWN CMP 7/16/96 | FABSIX::M_PROVENCHER | | Tue Jul 16 1996 07:53 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 22 A1,B1,B3, SCRUBBAS
BREAKIN WAFERS 37 A1,B1, AND MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0372 PMD
CMP.B1 (SPEEDFAM CMP-V) - UP/IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JL0384 M1
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING JD0340 M3 (HOT LOT)
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
Hot/B lots in area:
________________________
*JD0340 M3*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
---------------
*3 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*3 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*NONE*
# of carriers for strasbaugh/speedfam:
-------------------------------------
16 spare carriers for CMP.B1/B2
7 full carriers for CMP.A1/.A2
0 PLATES FOR CMP.A1/.A2
|
| 76.15 | A-shift CMP passdown 7/16/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Jul 16 1996 20:30 | 77 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 40 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running mqcs after pad change.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0355 (m2).
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0489 (m2).
CMP.B3 (Speedfam CMP-V) - IDLE.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0355 - M2
Hot lots coming to area:
-----------------------
JL0416 - UPP_PMD 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3.5 boxes of 12K mqc monitors.
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0372 - PMD - 22WFRS
JL0321 - M2 - 11
JD0336 - M2 - 21
JL0384 - M1 - 18
JD0340 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM CARRIERS
7 STRASBAUGH CARRIERS
0 PLATES
|
| 76.16 | PASSDOWN CMP B-SHIFT 7/17/96 | FABSIX::M_PROVENCHER | | Wed Jul 17 1996 07:32 | 82 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 9 A2
BREAKIN WAFERS 68 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC AFTER PAD/CONDITIONER/CARRIER CHANGE
CMP.B1 (SPEEDFAM CMP-V) - UP/RUNNING JD0347 M2/XD0492 M3 (B-LOT)
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JL0329 M2
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING JD0313 M3
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
Hot/B lots in area:
________________________
*XD0492 M3 (B-LOT) B1*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*PROFILER.A2*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
---------------
*3 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*4 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*XD0462 PMD 23 WAFERS*
XD0476 PMD 22 WAFERS
JD0360 M1 24 WAFERS
JD0361 M1 24 WAFERS
XD0489 M2 24 WAFERS
JD0355 M2 24 WAFERS (HOT LOT)
JD0308 M3 24 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
16 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
0 PLATES FOR CMP.A1/.A2
|
| 76.17 | A-shift CMP passdown 7/17/96 | FABSIX::J_SADIN | Freedom isn't free. | Wed Jul 17 1996 20:14 | 78 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 mqcs
BREAKIN WAFERS 60 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0371 (pmd) and JL0416 (pmd - hot)
for touchups.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE. **WARNING** ONLY RUN LEFT SPINDLE! RIGHT
SPINDLE HAS SUPER HIGH UNIF PROBLEMS.
CMP.B1 (Speedfam CMP-V) - DOWN: high particlie problems. down to maint.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0312 (m3).
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0313 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JL0416 - PMD
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0495 - 0.7DAYS
Down Equipment:
--------------
CMP.B1 - HIGH PARTICLES
Scrap lots:
----------
* none *
Hold Lots:
---------
** HOLD JD0373 (PMD) WHEN THE LOT GETS IN THE ROOM. THIS WILL BE USED FOR
SAMSUNG TRAINING ON "C" SHIFT. THANKS. **
Monitor status:
--------------
1.5 boxes of 12K mqcs wafers
Number of product lots in room:
------------------------------
12
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0492 - M3 - 22WFRS
JD0347 - M2 - 18
JL0329 - M2 - 12
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM CARRIERS
3 STRASBAUGH CARRIERS
7 PLATES
|
| 76.18 | CMP C-SHIFT PD. 7/19/96 | FABSIX::E_DAWSON | | Fri Jul 19 1996 20:48 | 31 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - JD0381 PMD, final t-up. Needs scrub'n and DRG.
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE Pad Change (high particles), needs full
mqc's.
CMP.B1 (Speedfam CMP-V) - JL0356C ILD1, scrub'n will need 100%.
CMP.B2 (Speedfam CMP-V) - UP/IDLE Mqc are due, pad stp @ 65 Wf cnt@ 925
CMP.B3 (Speedfam CMP_v) - UP/IDLE Head #1 off line, needs full mqc's
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hold Lots: Lots in CMP: 5
--------- -----------
3 Lots in "STORES"
MQC Monitors: Carriers:
------------- --------
2.5 Boxes See "Sammy Davis Graley's" pd.
MQC Mon. Used: 10
-------------
|
| 76.19 | CMP C-SHIFT PD. 7/20/96 | FABSIX::E_DAWSON | | Sat Jul 20 1996 20:40 | 28 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE....mqc's performed
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE....mqc's performed
CMP.B1 (Speedfam CMP-V) - UP/IDLE....mqc's performed
CMP.B2 (Speedfam CMP-V) - UP/IDLE....mqc's performed
CMP.B3 (Speedfam CMP-V) - DOWN/PART...scrubber
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Lots in CMP: 3 Carriers: See "O'Graley's" Pd.
----------- --------
Down Equipment: MQC Monitos: 1 Box
-------------- -----------
CMP.B3....Parts/Scrubber 100 More mqc wafers ordered.
" " More exe wafers ordered.
MQC Mon. Used: 35..."ouch"
-------------
******* The particle gods are upon us. *******
|
| 76.20 | PASSDOWN CMP B-SHIFT 7/21/96 | FABSIX::M_PROVENCHER | | Sun Jul 21 1996 07:19 | 79 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 3 scrubbers a1.a2.and a1
BREAKIN WAFERS 43 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0365 M1 NEEDS MQCS TODAY
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE NEEDS MQCS
CMP.B1 (SPEEDFAM CMP-V) - UP/RUNNING JD0334 M3 NEEDS MQCS
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING XD0481 M3 NEEDS MQCS
CMP.B3 (SPEEDFAM CMP-V) - DN/NO SCRUBBER
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*CMP.B3*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
---------------
*1/2 BOX OF MQC WAFERS*
Number of product lots in room:
------------------------------
*3 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JD0379 PMD 24 WAFERS*
JD0370 M1 24 WAFERS
JD0339 M2 20 WAFERS
JD0333 M3 19 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
17 spare carriers for CMP.B1/B2
11 full carriers for CMP.A1/.A2
0 PLATES FOR CMP.A1/.A2
|
| 76.21 | A-shift CMP passdown 7/21/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Jul 21 1996 20:17 | 81 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0338 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - VERIFY: running breakins after wafer crash.
Pad/conditioner disk replaced.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0337 (m3).
CMP.B2 (Speedfam CMP-V) - MQC: re-running particle checks (brushes on
scrubber changed).
CMP.B3 (Speedfam CMP-V) - DOWN: waiting for new motor for scrubber.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A2 - VERIFY AFTER WAFER CRASH
CMP.B2 - MQC. RE-RUNNING PARTICLE CHECKS
CMP.B3 - WAITING FOR MOTOR FOR SCRUBBER
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
0 mqc wafers on hand! 6 more boxes ordered (two boxes are at dep now).
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0365 - M1 - 24WFRS
XD0487 - M3 - 22
JD0334 - M3 - 19
JD0335 - M3 - 21
XD0481 - M1 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM CARRIERS
8 STRASBAUGH CARRIERS
0 PLATES
|
| 76.22 | PASSDOWN CMP B-SHIFT 7/22/96 | FABSIX::M_PROVENCHER | | Mon Jul 22 1996 07:38 | 81 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 scrubbers a1.a2.and b1
BREAKIN WAFERS 56 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0406 PMD (HOT LOT)
CMP.B1 (SPEEDFAM CMP-V) - UP/IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP/IDLE
CMP.B3 (SPEEDFAM CMP-V) - DN/NO SCRUBBER
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
Hot/B lots in area:
________________________
*JD0406 PMD (HOT LOT)*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*CMP.B3*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
----------------
*NONE*
Number of product lots in room:
------------------------------
*1 LOT*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JD0380 PMD 24 WAFERS*
XD0500 PMD 24 WAFERS
XD0501 PMD 24 WAFERS
JD0369 M1 24 WAFERS
JD0338 M1 23 WAFERS
JD0351 M2 23 WAFERS
JD0337 M3 15 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
17 spare carriers for CMP.B1/B2
9 full carriers for CMP.A1/.A2
0 PLATES FOR CMP.A1/.A2
|
| 76.23 | A-shift CMP passdown 7/22/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Jul 22 1996 20:22 | 80 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 mqcs
BREAKIN WAFERS 20 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0371 (m1).
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0476 (m1).
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B3 (Speedfam CMP-V) - IDLE. (needs new pad - experimental pad currently
installed)
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JL0416A - UPP_PMD 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1.5 boxes of 12K mqc wafers.
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0418A - PMD - 10WFRS
JD0406 - M1 - 24
XD0502 - PMD - 24
JD0372 - M1 - 22
JD0332 - M3 - 24
JD0342 - M2 - 20
JD0352 - M2 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
17 SPEEDFAM CARRIERS
9 STRASBAUGH CARRIERS
0 PLATES
|
| 76.24 | PASSDOWN CMP B-SHIFT 7/23/96 | FABSIX::M_PROVENCHER | | Tue Jul 23 1996 07:23 | 79 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 scrubbers a1.a2.b1,b3
BREAKIN WAFERS 76 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC
CMP.B1 (SPEEDFAM CMP-V) - UP/RUNNING JD0376 PMD /JD0341 M3 MQC'S PERFORMED
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING XL0448 M1
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING JD0357 M2 /XD0486 M3 (LAST OF SPLIT LOT)
MQC'S PERFORMED AFTER PAD CHANGE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*JL0416A (PMD HOT LOT)*
CURRENTLY ON HOLD AT #3360
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
----------------
*NONE*
Number of product lots in room:
------------------------------
*5 LOT*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JD0367 PMD 23 WAFERS*
JD0371 M1 24 WAFERS
XD0476 M1 22 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
16 spare carriers for CMP.B1/B2/B3
9 full carriers for CMP.A1/.A2
0 PLATES FOR CMP.A1/.A2
|
| 76.25 | A-shift CMP passdown 7/23/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Jul 23 1996 20:12 | 99 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 40 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A1 24hr MQCS COMPLETED: 2:15PM 7/23/96
CMP.A1 24hr MQCS NEXT DUE : 2:15PM 7/24/96
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0344 (pmd).
CMP.A2 24hr MQCS COMPLETED: 6:30am 7/23/96
CMP.A2 24hr MQCS NEXT DUE : 6:30am 7/24/96
CMP.B1 (Speedfam CMP-V) - MQC: failed particle checks. Will run no-touch
recipe to try and isolate source of particles.
CMP.B1 24hr MQCS COMPLETED: *in process now*
CMP.B1 24hr MQCS NEXT DUE : N/A
CMP.B1 12hr MQCS COMPLETED: N/A
CMP.B1 12hr MQCS NEXT DUE : N/A
CMP.B2 (Speedfam CMP-V) - PM: pad and carriers changed after ground bus
upgrade (pad/carriers dried out). Running breakins and mqcs now.
CMP.B2 24hr MQCS COMPLETED: *in progress now*
CMP.B2 24hr MQCS NEXT DUE : N/A
CMP.B2 12hr MQCS COMPLETED: N/A
CMP.B2 12hr MQCS NEXT DUE : N/A
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0350 (m2 - 3way split).
CMP.B3 24hr MQCS COMPLETED: 5am 7/23/96
CMP.B3 24hr MQCS NEXT DUE : 5am 7/24/96
CMP.B3 12hr MQCS COMPLETED: 6:30pm 7/23/96
CMP.B3 12hr MQCS NEXT DUE : 6:30am 7/24/96
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 6:45pm 7/23/96
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 6:45am 7/24/96
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 6:30pm 7/23/96
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 6:30am 7/24/96
Hot/B lots in area:
__________________
JL0416A - PMD
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - FAILED PARTICLE CHECKS DURING MQC (PAD/CARRIER CHANGED DUE TO CRASH).
CMP.B2 - RUNNING MQCS NOW (PAD/CARRIER CHANGE AFTER THEY DRIED OUT).
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 full boxes of 12K mqc wafers.
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0416A - PMD - 12WFRS
JD0376 - PMD - 20
XL0448 - M1 - 20
JD0357 - M2 - 23
XD0486 - M3 - 18
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 SPEEDFAM CARRIERS
9 STRASBAUGH CARRIERS
0 PLATES
|
| 76.26 | A-shift CMP passdown 7/28/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Jul 28 1996 20:47 | 108 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 30 mqcs
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - JD0406 (m2 - hot).
CMP.A1 24hr MQCS COMPLETED: 12:15am 7/28/96
CMP.A1 24hr MQCS NEXT DUE : 12:15am 7/29/96
CMP.A2 (Strasbaugh 6DS-SP) - XD0501 (m1).
CMP.A2 24hr MQCS COMPLETED: 10am 7/27/96
CMP.A2 24hr MQCS NEXT DUE : now (will need pad/carrier change as soon as
lot is done!)
CMP.B1 (Speedfam CMP-V) - VERIFY: down for high particles. New pad installed.
CMP.B1 24hr MQCS COMPLETED: n/a
CMP.B1 24hr MQCS NEXT DUE : needs 24hr mqcs after pad breakin
CMP.B1 12hr MQCS COMPLETED: n/a
CMP.B1 12hr MQCS NEXT DUE : 12am 7/29/96
CMP.B2 (Speedfam CMP-V) - JD0361 (m2).
CMP.B2 24hr MQCS COMPLETED: 2:20am 7/28/96
CMP.B2 24hr MQCS NEXT DUE : 2:20am 7/29/96
CMP.B2 12hr MQCS COMPLETED: 7:20pm 7/28/96
CMP.B2 12hr MQCS NEXT DUE : 7:20am 7/29/96
CMP.B3 (Speedfam CMP-V) - XD0496 (m2) and JD0367 (m1).
CMP.B3 24hr MQCS COMPLETED: 11am 7/28/96
CMP.B3 24hr MQCS NEXT DUE : 11am 7/29/96
CMP.B3 12hr MQCS COMPLETED: 11:15am 7/28/96
CMP.B3 12hr MQCS NEXT DUE : 11:15pm 7/29/96
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 5:50pm 7/28/96
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 5:50am 7/29/96
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 6pm 7/28/96
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 6am 7/29/96
Hot/B lots in area:
__________________
JD0406 - M2 HOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - HIGH PARTICLES. HAS NEW PAD. NEEDS BREAKINS AND MQCS.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K mqc wafers. 4 more boxes on order.
Number of product lots in room:
------------------------------
12
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0393 - PMD - 24WFRS
XD0501 - M1 - 24
XD0502 - M1 - 23
JD0362 - M2 - 23
JD0360 - M2 - 24
JD0380 - M2 - 24
JL0410 - M1 - 24
JD0379 - M2 - 14
XM0479 - M2 - 10
JD0364 - M2 - 22
# of carriers for strasbaugh/speedfam:
--------------------------------------
15 SPEEDFAM CARRIERS
11 STRASBAUGH CARRIERS
|
| 76.27 | PASSDOWN CMP B-SHIFT 7/29/96 | FABSIX::M_PROVENCHER | | Mon Jul 29 1996 07:40 | 88 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 19 scrubbers a2,b2
BREAKIN WAFERS 63 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
WILL NEED PAD CHANGE AND MQC'S (OVER DUE)
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC WILL NOT PASS UNIF.PARTCLES O.K.
MQC'S I.P.
CMP.B1 (SPEEDFAM CMP-V) - UP/RUNNING JD0376 M1
WILL NEED MQC'S TODAY
CMP.B2 (SPEEDFAM CMP-V) - UP/MQC
MQC'S PERFORMING
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING JD0352 M3/ JD0365 M2
WILL NEED MQC'S TODAY
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
----------------
*2 BOXES*
Number of product lots in room:
------------------------------
*9 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JD0394 PMD 24 WAFERS*
JD0397 PMD 24 WAFERS
JD0367 M1 23 WAFERS
XD0498 M1 24 WAFERS
YE0198 M1 23 WAFERS
JD0406 M2 24 WAFERS
XD0496 M2 24 WAFERS
JD0361 M2 24 WAFERS
XD0495 M2 24 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
15 spare carriers for CMP.B1/B2/B3
9 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 76.28 | A-shift CMP passdown 7/29/96 | FABSIX::J_SADIN | Freedom isn't free. | Mon Jul 29 1996 20:19 | 102 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0382 (pmd).
CMP.A1 24hr MQCS COMPLETED: 12:30pm 7/29
CMP.A1 24hr MQCS NEXT DUE : 12:30pm 7/30
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0378 (pmd).
CMP.A2 24hr MQCS COMPLETED: 3pm 7/29
CMP.A2 24hr MQCS NEXT DUE : 3pm 7/30
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0370 (m2) and JD0338 (m2).
CMP.B1 24hr MQCS COMPLETED: 9:45pm 7/28
CMP.B1 24hr MQCS NEXT DUE : 9:45pm 7/29
CMP.B1 12hr MQCS COMPLETED: 7:15pm 7/29
CMP.B1 12hr MQCS NEXT DUE : 7:15am 7/30
CMP.B2 (Speedfam CMP-V) - VERIFY: running particle checks. rate/unif good.
CMP.B2 24hr MQCS COMPLETED: n/a
CMP.B2 24hr MQCS NEXT DUE : n/a
CMP.B2 12hr MQCS COMPLETED: n/a
CMP.B2 12hr MQCS NEXT DUE : n/a
CMP.B3 (Speedfam CMP-V) - JD0344 (m1) and JD0408 (m1).
CMP.B3 24hr MQCS COMPLETED: 3pm 7/29
CMP.B3 24hr MQCS NEXT DUE : 3pm 7/30
CMP.B3 12hr MQCS COMPLETED: 3pm 7/29
CMP.B3 12hr MQCS NEXT DUE : 3am 7/30
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 7pm 7/29
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 7am 7/30
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 7pm 7/29
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 7am 7/30
Hot/B lots in area:
__________________
JD0408 - M1 HOT
Hot lots coming to area:
-----------------------
JL0391 - THK_ILD1 2
JL0416A - THK_ILD1 2
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B2 - HIGH PARTICLES. SEE FRANK KRUPA'S MAIL MESSAGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K mqc wafers. 4 more boxes on order.
Number of product lots in room:
------------------------------
12
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0376 - M1 - 19WFRS
JD0408 - M1 - 24
JD0352 - M3 - 23
JD0365 - M2 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
15 SPEEDFAM CARRIERS
7 STRASBAUGH CARRIERS
|
| 76.29 | PASSDOWN CMP B-SHIFT 7/30/96 | FABSIX::M_PROVENCHER | | Tue Jul 30 1996 07:45 | 91 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 b1,b2
BREAKIN WAFERS 68 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0392 M1
WILL NEED MQC'S TODAY @ 1PM
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0386 M1/ JD0390 M1
WILL NEED MQC'S TODAY @ 3PM
CMP.B1 (SPEEDFAM CMP-V) - UP/RUNNING JD0375 M2
MQC'S PERFORMED #4 HEAD REMOVING FAST
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JD0351 M3
MQC'S PERFORMED
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING JD0357 M3 / JD0342 M3
WILL NEED MQC'S TODAY
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE WILL NEED MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE WILL NEED MQC'S PERFORMED
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*JD0408 M1*
XL0514 PMD
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
----------------
*ZERO BOXES*
Number of product lots in room:
------------------------------
*12 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JD0378 PMD 24 WAFERS*
JD0382 PMD 24 WAFERS
JD0405 PMD 24 WAFERS
JD0414 PMD 24 WAFERS
JD0344 M1 24 WAFERS
XD0500 M1 23 WAFERS
JL0391 M1 22 WAFERS (HOT)
JD0370 M2 23 WAFERS
JD0338 M2 23 WAFERS
JL0416A M2 12 WAFERS (HOT)
JD0369 M2 24 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
15 spare carriers for CMP.B1/B2/B3
7 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 76.30 | A-shift CMP passdown 7/30/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Jul 30 1996 20:12 | 104 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 mqcs
BREAKIN WAFERS 40 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: mqcs after pad change.
CMP.A1 24hr MQCS COMPLETED: * running now *
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0386 (m1) and XL0514 (pmd).
CMP.A2 24hr MQCS COMPLETED: 6:15pm 7/30
CMP.A2 24hr MQCS NEXT DUE : 6:15pm 7/31
CMP.B1 (Speedfam CMP-V) - JD0373 (m2) and JD0372 (m2).
CMP.B1 24hr MQCS COMPLETED: 4am 7/30
CMP.B1 24hr MQCS NEXT DUE : 4am 7/31
CMP.B1 12hr MQCS COMPLETED: 1pm 7/30
CMP.B1 12hr MQCS NEXT DUE : 1am 7/31
CMP.B2 (Speedfam CMP-V) - JD0371 (m2).
CMP.B2 24hr MQCS COMPLETED: 12:30am 7/30
CMP.B2 24hr MQCS NEXT DUE : 12:30am 7/31
CMP.B2 12hr MQCS COMPLETED: 1pm 7/30
CMP.B2 12hr MQCS NEXT DUE : 1am 7/31
CMP.B3 (Speedfam CMP-V) - MQC: running mqcs after both pads changed.
CMP.B3 24hr MQCS COMPLETED: * running now *
CMP.B3 24hr MQCS NEXT DUE : n/a
CMP.B3 12hr MQCS COMPLETED: n/a
CMP.B3 12hr MQCS NEXT DUE : n/a
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 10:30am 7/30
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 10:30pm 7/31
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 10:30am 7/30
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 10:30pm 7/31
Hot/B lots in area:
__________________
XL0514 - PMD HOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - DOWN FOR PAD CHANGE. BAD UNIF.
CMP.B3 - RUNNING MQCS AFTER DUAL PAD CHANGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K mqc wafers. 3 more boxes on order.
Number of product lots in room:
------------------------------
12
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0392 - M1 - 24WFRS
JD0390 - M1 - 24
JD0375 - M2 - 23
JD0377 - M2 - 23
JD0351 - M3 - 23
JD0342 - M3 - 20
# of carriers for strasbaugh/speedfam:
--------------------------------------
15 SPEEDFAM CARRIERS
7 STRASBAUGH CARRIERS
|
| 76.31 | PASSDOWN CMP B-SHIFT 7/31/96 | FABSIX::M_PROVENCHER | | Wed Jul 31 1996 07:59 | 92 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 b1,b2
BREAKIN WAFERS 63 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/XL0514A PMD/JD0388 PMD
WILL NEED MQC'S TODAY
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0407 PMD
WILL NEED MQC'S TODAY
CMP.B1 (SPEEDFAM CMP-V) - UP/MQC
OFFSETS CHANGED DUE TO LOW R/R ON HEAD 4 CAUSING HIGH RANGE
2ND SET OF MQC'S RUNNING
CMP.B2 (SPEEDFAM CMP-V) - UP/MQC
HIGH PARTICLES RECHECKING PARTICLES
CMP.B3 (SPEEDFAM CMP-V) - UP/IDLE
WILL NEED MQC'S TODAY
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE WILL MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE WILL MQC'S PERFORMED
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*NONE*
Monitor status:
----------------
*2 BOXES*
Number of product lots in room:
------------------------------
*3 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*XL0514 PMD 12 WAFERS (HOT)*
JD0389 M1 24 WAFERS
JD0392 M1 24 WAFERS
JD0386 M1 24 WAFERS
JD0396 M1 21 WAFERS
JD0373 M2 24 WAFERS
JD0372 M2 22 WAFERS
JD0371 M2 24 WAFERS
JD0381 M2 24 WAFERS
XL0448 M2 20 WAFERS
JD0357 M3 23 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
14 spare carriers for CMP.B1/B2/B3
5 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 76.32 | A-shift CMP passdown 7/31/96 | FABSIX::J_SADIN | Freedom isn't free. | Wed Jul 31 1996 20:29 | 107 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 25 mqcs
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: pad/carrier change after wafers crash.
CMP.A1 24hr MQCS COMPLETED: * running now *
CMP.A1 24hr MQCS NEXT DUE : n/a
CMP.A2 (Strasbaugh 6DS-SP) - MQC: pad change (pad at end of life).
CMP.A2 24hr MQCS COMPLETED: * running now *
CMP.A2 24hr MQCS NEXT DUE : n/a
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B1 24hr MQCS COMPLETED: 7:30am 7/31
CMP.B1 24hr MQCS NEXT DUE : 7:30am 8/1
CMP.B1 12hr MQCS COMPLETED: 5:45pm 7/31
CMP.B1 12hr MQCS NEXT DUE : 5:45am 8/1
CMP.B2 (Speedfam CMP-V) - JD0383 (m1) and YE0187 (rework ILD 1).
CMP.B2 24hr MQCS COMPLETED: 6:30am 7/31
CMP.B2 24hr MQCS NEXT DUE : 6:30am 8/1
CMP.B2 12hr MQCS COMPLETED: 5:30pm 7/31
CMP.B2 12hr MQCS NEXT DUE : 5:30am 8/1
CMP.B3 (Speedfam CMP-V) - JD0395 (pmd), transfered from CMP.A1. Needs two
wafers scrapped out after done polishing.
CMP.B3 24hr MQCS COMPLETED: 8:30pm 7/30
CMP.B3 24hr MQCS NEXT DUE : 8:30pm 7/31
CMP.B3 12hr MQCS COMPLETED: 2:20pm 7/31
CMP.B3 12hr MQCS NEXT DUE : 2:20am 8/1
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A1 12hr MQCS COMPLETED: 3:15pm 7/31
CMP-SCRUB.A1 12hr MQCS NEXT DUE : 3:15am 8/1
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 12hr MQCS COMPLETED: 3:30pm 7/31
CMP-SCRUB.A2 12hr MQCS NEXT DUE : 3:30am 8/1
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC AFTER PAD/CARRIER CHANGE
CMP.A2 - MQC AFTER PAD CHANGE
Scrap lots:
----------
2 wafers need to be scrapped out of JD0395 (broke on CMP.A1).
Hold Lots:
---------
Holding part of lot# YE0187 in room. Had to rework some wafers from
dielectrics. Will give verbal passdown with details.
Monitor status:
--------------
2 boxes of 12K mqc wafers. 4 more boxes on order.
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0388 - PMD - 24WFR
XL0514A - PMD - 12
XD0504 - PMD - 24
JD0407 - PMD - 24
JL0403 - M1 - 12
JL0416 - M2 - 10
JD0415 - PMD - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM CARRIERS
5 STRASBAUGH CARRIERS
|