| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 75.1 | A-shift CMP passdown 6/2/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Jun 02 1996 20:56 | 79 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: failed mqcs. getting new pad.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0237 (m2) and XD0471 (m1).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0240 (m2) and YD0163 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING: YD0171 (m1).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0471 - BLOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0237 - 0.8DAYS
Down Equipment:
--------------
CMP.A1 - NEW PAD (failed 1st set of mqcs)
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2.5 boxes of 12K monitors
Number of product lots in room:
------------------------------
13
New specs/revs posted:
---------------------
SEE TDCO FOR STRASBAUGH BREAKIN PROCEDURE
Lots/wafers processed:
---------------------
ZD0117 - M1 - 22WFRS
XD0470 - PMD- 24
XD0473 - PMD- 24
JD0218 - M3 - 22
JD0213 - M3 - 22
XD0447 - M1 - 20
YD0171 - M1 - 23
JD0236 - M2 - 23
YD0167A- M2 - 12
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 PLATES READY FOR ASSEMBLY INTO STRASBAUGH CARRIERS
???? SPEEDFAM CARRIERS
|
| 75.2 | 6/3/96 cmp b shift passdown | FABSIX::L_CEDRONE | | Mon Jun 03 1996 07:21 | 78 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 17 cmp.a1/.b1/scrub
BREAKIN WAFERS 72 misc
BROKEN PRODUCT WAFERS 0
***SLURRY WENT DOWN AT 5:20AM AND IS STILL DOWN***
CMP.A1 (Strasbaugh 6DS-SP) - DOWN DUE TO BAD PARTICLES
CMP.A2 (Strasbaugh 6DS-SP) - DOWN DUE TO ROBOT
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0223 M3 + JD0248 M2
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0471 M1 B LOT + JD0237 M2
CMP-SCRUB.A1 (On-track scrubber) - UP, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP, MQC'S PERFORMED
Hot/B lots in area:
___________________
XD0471 M1 B LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
4 PMD'S NO MACHINE
2 M1'S NO MACHINE
Down Equipment:
--------------
CMP.A1 / .A2
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1/2 BOX OF MQC WAFERS
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
JD0246 M1
JD0163 M3
# of carriers for strasbaugh/speedfam:
-------------------------------------
15 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
4 PLATES FOR CMP.A1/.A2
|
| 75.3 | A-shift CMP passdown 6/3/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Jun 03 1996 20:35 | 80 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 9 mqcs
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - VERIFY: needs mqcs.(waiting for wafers)
CMP.A2 (Strasbaugh 6DS-SP) - MQC: needs mqcs.(waiting for wafers)
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0279 (m2) and JD0283 (pmd).
CMP.B2 (Speedfam CMP-V) - VERIFY: needs mqcs. (waiting for wafers)
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0279 - M2 HOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0288 - 0.9DAYS
JD0287 - 1.4DAYS
JD0292 - 1.2DAYS
Down Equipment:
--------------
CMP.A1 - VERIFY
CMP.A2 - MQC
CMP.B2 - VERIFY
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K monitor wafers just came in. One more box is coming in about
2hrs. Order a few more!
Number of product lots in room:
------------------------------
15
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0460 - M1 - 21WFRS
JD0248 - M2 - 24
JD0237 - M2 - 23
JD0223 - M3 - 20
XD0471 - M1 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
15 SPEEDFAM CARRIERS
0 STRASBAUGH CARRIERS
1 PLATE FILMED AND SHIMMED
|
| 75.4 | REP | FABSIX::M_PROVENCHER | | Tue Jun 04 1996 08:42 | 1 |
|
|
| 75.5 | PASSDOWN 6/4/95 CMP B-SHIFT | FABSIX::M_PROVENCHER | | Tue Jun 04 1996 08:43 | 74 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 2 cmp.a1/.b1/scrub
BREAKIN WAFERS 84 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING XD0464 M1
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0255 M2
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0216 M3/JD0214 M3
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0222 M3
CMP-SCRUB.A1 (On-track scrubber) - UP,
CMP-SCRUB.A2 (On-track scrubber) - UP,
Hot/B lots in area:
___________________
*NONE*
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
4 PMD'S NO TAGS
1 M1 NO TAG
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 1/2 BOXES OF MQC WAFERS
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
8 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
15 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
3 PLATES FOR CMP.A1/.A2
|
| 75.6 | A-shift CMP passdown 6/4/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Jun 04 1996 20:27 | 78 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 mqcs
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0263 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0214 and JD0222 (both m3).
CMP.B2 (Speedfam CMP-V) - DOWN: waiting for parts. Blew main water line in
flex track.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JL0315 - DEP_ILD1 2
Static Lots in area:
-------------------
XD0476 - 1.0DAYS
JD0214 - 0.7DAYS
XD0475 - 1.1DAYS
JD0286 - 1.3DAYS
JD0261 - 0.9DAYS
XD0474 - 0.9DAYS
Down Equipment:
--------------
CMP.B2 - BUSTED WATER LINE
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3� boxes of 12K monitor wafers
Number of product lots in room:
------------------------------
15
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0464 - M1 - 24WFRS
JD0255 - M2 - 21
JD0216 - M3 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
15 SPEEDFAM CARRIERS
??? STRASBAUGH CARRIERS AND PLATES (JESUS HAS BEEN WORKING ON THEM TODAY)
|
| 75.7 | PASSDOWN CMP B-SHIFT 6/5/96 | FABSIX::M_PROVENCHER | | Wed Jun 05 1996 07:31 | 73 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 cmp.a1/.b1/scrub
BREAKIN WAFERS 62 misc
BROKEN PRODUCT WAFERS 1 ROBOT (A2)
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING XD0474 PMD / JD0267 M1
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0286 PMD / XD0475 PMD
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0247 M2 / XD0456 M3
CMP.B2 (SPEEDFAM CMP-V) - DN WAITING FOR PARTS
CMP-SCRUB.A1 (On-track scrubber) - UP, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP, MQC'S PERFORMED
Hot/B lots in area:
___________________
*NONE*
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
*1 PMD NO TAG *
*1 PMD NO MACHINE*
Down Equipment:
--------------
*CMP.B2*
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
*2 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*8 LOTS*
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
*4 LOTS*
# of carriers for strasbaugh/speedfam:
-------------------------------------
15 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
3 PLATES FOR CMP.A1/.A2
|
| 75.8 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Wed Jun 05 1996 20:25 | 87 |
| \
-< A shift CMP passdown - Wednesday 06/05/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 75 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
3 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
8 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - MQC: New pad and carriers installed after wafer
breakage. Presently running break-in wafers.
CMP.A2 (Strasbaugh 6DS-SP) - UP: Running lot JD0261/M1 through 2nd. 3 minutes
polish.
CMP.B1 (Speedfam CMP-V) - UP: Running JD0249/M2 and JD0224/M3
CMP.B2 (Speefam CMP_V ) - UP: Running JD0265A/M2
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
none
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
CMP.A1 MQC
Scrap lots:
----------
1 wafer scrapped from lot JD0267 ( cmp.a1 )
Hold Lots:
---------
Monitor status:
--------------
3 (12k) boxes
Number of product lots in room:
------------------------------
11 LOTS
New specs/revs posted:
---------------------
|
| 75.9 | 6/9/96 CMP B-SHIFT PASSDOWN | FABSIX::M_PROVENCHER | | Sun Jun 09 1996 08:11 | 77 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp.a2/
BREAKIN WAFERS 80 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0302 PMD(WILL NEED PAD CHANGE)
CMP.A2 (Strasbaugh 6DS-SP) - UP/JD0299 PMD/ JD0297 PMD
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JD0242 M3
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JD0279 M3(TOUCH UP)
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Hot/B lots in area:
___________________
*NONE*
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
*JD0272 M1 NO TAG*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
*2 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*6 LOTS*
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
*JD0239 M3 22WAFERS*
JD0229 M3 23WAFERS
XD0471 M2 (B LOT) 22WAFERS
JD0280 M1 24WAFERS
JD0273 M1 20WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
15 spare carriers for CMP.B1/B2
5 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 75.10 | A-shift CMP passdown 6/09/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Jun 09 1996 20:25 | 77 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0299 (pmd).
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: bad unif after third mqc and 77 breakin
wafers. Changed pad and trying again.
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0301 (pmd).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0472 - NO T-TAG
Down Equipment:
--------------
CMP.A2 - NEW PAD INSTALLED. RUNNING BREAKINS.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of mqc wafers. 2 more on order.
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0297 - PMD - 22WFRS
JD0242 - M3 - 17
JD0281 - M1 - 24
JD0278 - M1 - 22
JD0272 - M1 - 24
JD0279 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
14 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
1 STRASBAUGH PLATE
|
| 75.11 | 6/10/96 CMP B-SHIFT PASSDOWN | FABSIX::M_PROVENCHER | | Mon Jun 10 1996 07:24 | 78 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 cmp.a2/SCRUBBERS
BREAKIN WAFERS 76 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING XD0467 M1
CMP.B1 (Speedfam CMP-V) - UP/ IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING XD0461 M3(TOUCH UP)
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
Hot/B lots in area:
___________________
*NONE*
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
*JD0284 M1 NO TAG*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*JD0299 WAFER #22 WAS SCRAPPED FOR
LOW THICKNESS
Hold Lots:
---------
*XD0473 M1 *
HOLD FOR F_KRUPA/L_CAMILLETTI
Monitor status:
---------------
*1/2 BOX OF MQC WAFERS*
Number of product lots in room:
------------------------------
*4 LOTS*
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
*JD0299 PMD 23 WAFERS*
JD0285 PMD 23 WAFERS (STRONG ARM LOT)
XD0472 M1 22 WAFERS
JD0301 PMD 24 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
12 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
1 PLATES FOR CMP.A1/.A2
|
| 75.12 | A-shift CMP passdown 6/10/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Jun 10 1996 20:30 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0462 (sti).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0307 (pmd) and JD0304 (pmd).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0259 (m3) and XD0473 (m1).
CMP.B2 (Speedfam CMP-V) - MQC: running mqcs.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0259
Hot lots coming to area:
-----------------------
JD0257 - DEP_ILD3 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0473 - ENG PROCESSING THIS LOT.
Monitor status:
--------------
2.5 boxes of 12K monitors.
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0467 - M1 - 22WFRS
XD0461 - M3 - 22
JD0284 - M1 - 24
JD0261 - M2 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
1 STRASBAUGH PLATE
|
| 75.13 | 6/11/96 PASSDOWN B-SHIFT CMP | FABSIX::M_PROVENCHER | | Tue Jun 11 1996 07:28 | 81 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 0
BREAKIN WAFERS 86 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0305 pmd
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JD0257 m3(HOT LOT)
CMP.B2 (SPEEDFAM CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Hot/B lots in area:
___________________
*JD0257 M3 (RUNNING B1)*
Hot lots coming to area:
------------------------
*XD0484 PMD (@9:00 AM)*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*JD0298 WAFER #08 WAS SCRAPPED FOR*
SCRATCHING FROM CMP TOOL A1
Hold Lots:
---------
*XD0473 M1 *
HOLD FOR F_KRUPA/L_CAMILLETTI
Monitor status:
---------------
*1 BOX OF MQC WAFERS*
Number of product lots in room:
------------------------------
*3 LOTS*
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
*JD0307 PMD 24 WAFERS*
JD0304 PMD 24 WAFERS
JD0298 PMD 13 WAFERS
JD0303 PMD 24 WAFERS
JD0292 M1 24 WAFERS
JD0259 M3 21 WAFERS (HOT LOT)
JD0246 M2 10 WAFERS
JD0274 M1 24 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
14 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
1 PLATES FOR CMP.A1/.A2
|
| 75.14 | A-shift CMP passdown 6/11/96 | YIELD::SADIN | | Tue Jun 11 1996 20:39 | 76 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0484 (pmd) and JD0306 (pmd).
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0283 (m1).
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0282 (m1) and JD0260 (m2).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0484
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0473 - HOLD FOR ENG. SPECIAL PAD LOT.
Monitor status:
--------------
1 box of 12K monitor wafers. 2 more on order.
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0462 - STI - 24WFRS
JD0303 - PMD - 24
JD0305 - PMD - 23
JD0257 - M3 - 20
JD0277 - M1 - 22
JD0274 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
12 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
1 STRASBAUGH PLATE
|
| 75.15 | PASSDOWN B-SHIFT CMP 6/16/96 | FABSIX::M_PROVENCHER | | Sun Jun 16 1996 07:40 | 79 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 0
BREAKIN WAFERS 69 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0273 M2
CMP.B1 (Speedfam CMP-V) - UP/RUNNING ZD0122 M1/JD0300 M1
CMP.B2 (SPEEDFAM CMP-V) - UP/JD0271 M2/JD0249 M3 BOTH TOUCHUP
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*JL0316 DC1043 ERROR MESSAGE ON UV 1050 TOOL*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
---------
*NONE*
Monitor status:
---------------
*1 BOX OF MQC WAFERS*
Number of product lots in room:
------------------------------
*6 LOTS*
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
*JD0310 PMD 24 WAFERS*
JD0296 M1 24 WAFERS
JD0319 M1 24 WAFERS (HOT LOT)
JD0291 M1 24 WAFERS
JD0240 M3 24 WAFERS
JD0249 M3 23 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
16 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
10 PLATES FOR CMP.A1/.A2
|
| 75.16 | A-shift CMP passdown 6/16/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Jun 16 1996 20:41 | 79 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 mqcs
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0280 (m2).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0238 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0302 (m1).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XD0484 - DEP_M2
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
JL0316 - DC1043 - NO RECIPE ON UV-1050. ENG NOTIFIED AND WILL FIX TOMORROW.
Monitor status:
--------------
3.5 boxes of 12K monitor wafers.
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0269 - M2 - 22WFRS
JD0320 - PMD - 23
JD0273 - M2 - 20
ZD0122 - M1 - 24
JD0300 - M1 - 24
JD0302 - M1 - 22
JD0281 - M2 - 24
JD0271 - M2 - 24
JD0249 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
10 STRASBAUGH PLATES
|
| 75.17 | PASSDOWN B-SHIFT CMP 6/17/96 | FABSIX::M_PROVENCHER | | Mon Jun 17 1996 07:44 | 79 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 a1,a2,scrubbers
BREAKIN WAFERS 99 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING YD0178 M1
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JD0247 M3
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*JL0316 DC1043 ERROR MESSAGE ON UV 1050 TOOL*
Down Equipment:
--------------
*PROFILER.A2 DOWN AT @4:30 AM*
Scrap lots:
-----------
*NONE*
Hold Lots:
---------
*JD0316 PMD (1043) ON HOLD FOR ENG*
Monitor status:
---------------
*3 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*6 LOTS*
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
*JD0312 PMD 24 WAFERS*
JD0314 PMD 17 WAFERS
JD0299 M1 23 WAFERS
JD0301 M1 24 WAFERS
JD0280 M2 24 WAFERS
JD0238 M3 24 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
16 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
10 PLATES FOR CMP.A1/.A2
|
| 75.18 | A-shift CMP passdown 6/17/96 - CMP.B3 up to production | SUBPAC::SADIN | Freedom isn't free. | Mon Jun 17 1996 20:18 | 79 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 mqcs
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0297 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0255 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING: IDLE.
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0467 (m2) and JD0252 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2.5 boxes of mqc wafers.
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
YD0178 - M1 - 24WFRS
XD0478 - PMD - 23
JL0316 - PMD - 12
JD0295 - M1 - 22
XD0459 - PMD - 17
JD0272 - M2 - 24
JD0247 - M3 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
10 STRASBAUGH PLATES
|
| 75.19 | PASSDOWN CMP B-SHIFT 6/18/96 | FABSIX::M_PROVENCHER | | Tue Jun 18 1996 07:26 | 85 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 0
BREAKIN WAFERS 176 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0313 PMD
CMP.B1 (Speedfam CMP-V) - UP/RUNNING XD0472 M2 B-LOT
CMP.B2 (SPEEDFAM CMP-V) - UP/IDLE
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING JD0256 M3
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Hot/B lots in area:
________________________
*XD0472 (B1) B-LOT*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
---------
*NONE*
Monitor status:
---------------
*2 1/2 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*4 LOTS*
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
*JD0232 PMD 24 WAFERS*
JD0297 M1 22 WAFERS
JD0304 M1 24 WAFERS
JD0305 M1 22 WAFERS
JD0307 M1 24 WAFERS
XD0467 M2 19 WAFERS
JD0268 M2 24 WAFERS
JD0278 M2 22 WAFERS
JD0246A M3 7 WAFERS
JD0252 M3 20 WAFERS
JD0255 M3 21 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
16 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
10 PLATES FOR CMP.A1/.A2
|
| 75.20 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Tue Jun 18 1996 20:45 | 91 |
|
-< A shift CMP passdown - Tuesday 06/18/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 19 cmp.b1 mqcs
BREAKIN WAFERS 50 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
6 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
16 SPEEDFAM B1, B2 AND B3 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - MQC: A monthly P.M was completed today.
After the P.M a new pad was installed and break-ins and Mqc wafer were
processed through the tool.
CMP.A2 (Strasbaugh 6DS-SP) - UP: Running hot lot XD0484 m2/tm36 and lot
XD0483 PMD/tm36
CMP.B1 (Speedfam CMP-V) - UP: Running lot JL0317 PMD/1016
CMP.B2 (Speefam CMP_V ) - UP: Idle
CMP.B3 (Speedfam CMP_V) - DOWN: Passed particle checks but failed mqc because of
low removal rate and high uniformity . A new pad will be installed shortly.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
Hot lot XD0484 m2/36 running on cmp.a2
B lot JD0262 waiting to be processed.
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
cmp.b3 failed mqc's
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
2 (12k) boxes
Number of product lots in room:
------------------------------
9 LOTS
New specs/revs posted:
---------------------
|
| 75.21 | CMP PASSDOWN B-SHIFT 6/19/96 | FABSIX::M_PROVENCHER | | Wed Jun 19 1996 07:46 | 82 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 27 A1,B1,B3,SCRUBBERS
BREAKIN WAFERS 74 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/MQC AFTER PAD CHANGE
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING JD0313 PMD
CMP.B1 (SPEEDFAM CMP-V) - UP/RUNNING JD0262 M3
CMP.B2 (SPEEDFAM CMP-V) - UP/JD0325 PMD B-LOT
CMP.B3 (SPEEDFAM CMP-V) - UP/RUNNING JD0298 M1 B-LOT
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC'S PERFORMED
Hot/B lots in area:
________________________
*JD0325 (PMD) B-LOT (B-2)*
JD0262 (M3) B-LOT (B-1)
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*XD0481 M1 (NO TAG)*
JD0283 M2 (NO TAG)
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
---------
*NONE*
Monitor status:
---------------
*1 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*6 LOTS*
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
*XD0483 PMD 22 WAFERS*
JD0292 M1 24 WAFERS
JD0306 M1 24 WAFERS
JD0277 M2 22 WAFERS
JD0284 M2 24 WAFERS
XD0484 M2 22 WAFERS (HOT LOT)
# of carriers for strasbaugh/speedfam:
-------------------------------------
16 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
10 PLATES FOR CMP.A1/.A2
|
| 75.22 | A-shift CMP passdown 6/19/96 | SUBPAC::SADIN | Freedom isn't free. | Wed Jun 19 1996 20:50 | 79 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 30 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs.
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running mqcs.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0288 (m2) and XD0465 (m3).
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0318 (m2).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0318 - HOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0246 - 0.9 - NO TAG
Down Equipment:
--------------
CMP.A1 - MQC
CMP.A2 - MQC
Scrap lots:
----------
JD0325 - PMD
Hold Lots:
---------
XD0486 - HOLD FOR FRANK KRUPA FOR CMP.B3 EXPERIMENT.
Monitor status:
--------------
2.5 BOXES OF 12K MQC WAFERS
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
SEE EMERGENCY DCO POSTED BY CMP.B1!!
Lots/wafers processed:
---------------------
JD0322 - PMD - 22WFRS
JL0317 - PMD - 12
JD0262 - M3 - 24
JD0325 - PMD - 24
JD0283 - M2 - 22
XD0481 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
?? STRASBAUGH PLATES
|
| 75.23 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Thu Jun 20 1996 07:58 | 45 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IN MQC
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE MQC DONE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING MQC
CMP.B2 (Speedfam CMP-V)- UP/RUNNING MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:5
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment: A1, B1, B2 ALL IN MQC
---------------
---------------
NUMBER of product lots in room:7
-------------------------------
LOTS COMPLETED : 6
----------------
MQC WAFERS: 1 1/2 BOX
----------
|
| 75.24 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Sat Jun 22 1996 08:13 | 52 |
| ******T TAGS ARE NO LONGER CHANGED IN CMP TO RUN LOTS RUN'EM AS THEY COME*****
CMP.A1 (Strasbaugh 6DS-SP) - UP/idle
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING jd0260 M3 FIRST 400SEC RUN
CMP.B2 (Speedfam CMP-V)- UP/RUNNING JD0331 PMD RUNNING 1ST PASS
CMP.B3 (Speedfam CMP-V)-UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - DOWN FOR REPAIRS
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:0
--------------------
HOLD LOTS IN AREA:2
XD0473 HOLD FOR LARRY CAMELETTI
XD0460 UNABLE TO READ ON UV1050 (BAD READINGS)
__________________
DOWN equipment:SCRUB.A1
---------------
---------------
NUMBER of product lots in room:4
-------------------------------
LOTS COMPLETED : 9
----------------
BREAK IN WAFERS USED: 50
MQC WAFERS: 5 1/2 BOXES
----------
|
| 75.25 | PASSDOWN CMP B-SHIFT 6/23/96 | FABSIX::M_PROVENCHER | | Sun Jun 23 1996 07:40 | 80 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 A2,B2,
BREAKIN WAFERS 78 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/JL0321 PMD @ TOUCHUP
CMP.B1 (SPEEDFAM CMP-V) - UP/RUNNING XD0478
CMP.B2 (SPEEDFAM CMP-V) - UP/IDLE
CMP.B3 (SPEEDFAM CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*NONE*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
---------
*XD0460 M3 HOLD FOR P.E. *
XD0473 M2 HOLD FOR P.E.
Monitor status:
---------------
*3 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*4 LOTS (2 LOTS HELD FOR P.E.)*
New specs/revs posted:
---------------------
*EMERGENCY D.C.O. POSTED AT CMP.B1*
Lots/wafers processed:
-----------------------
*XD0484 M3 22 WAFERS (B-LOT)*
JD0293 M2 24 WAFERS
XD0474 M2 23 WAFERS
JD0290 M2 14 WAFERS
JD0300 M2 24 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
16 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
10 PLATES FOR CMP.A1/.A2
|
| 75.26 | A-shift CMP passdown 6/23/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Jun 23 1996 20:30 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 22 mqc
BREAKIN WAFERS 35 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0337 (pmd).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0313 (m1).
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0447 (m3).
CMP.B3 (Speedfam CMP-V) - RUNNING: JD0263 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none*
Hot lots coming to area:
-----------------------
JD0324 - DEP_ILD1 2
Static Lots in area:
-------------------
XD0460 - 1.5DAYS
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0460 - HOLD FOR ENG (BAD UV-1050 MEASUREMENTS).
Monitor status:
--------------
3.5 boxes of 12K mqc wafers.
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
SEE EDCO POSTED NEXT TO CMP.B1.
Lots/wafers processed:
---------------------
JL0321 - PMD - 12WFRS
XD0478 - M1 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 speedfam carriers
4 strasbaugh carriers
10 strasbaugh plates
|
| 75.27 | CMP PASSDOWN B-SHIFT 6/24/96 | FABSIX::M_PROVENCHER | | Mon Jun 24 1996 07:43 | 82 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 A1,B3,SCRUBBERS
BREAKIN WAFERS 83 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/MQC
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (SPEEDFAM CMP-V) - UP/RUNNING JD0296 M2
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JD0266 M3/JD0264 M3
CMP.B3 (SPEEDFAM CMP-V) - UP/MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQCS PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQCS PERFORMED
Hot/B lots in area:
________________________
*JL0356 M1 DC1030 (PSS IS CURRNTLY TRYING TO SET UP A*
PROGRAM IN UV 1050 THICKNESS TOOL)
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*XD0460 M3*
XD0473 M2
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
---------
*XD0460 M3 HOLD FOR P.E. *
XD0473 M2 HOLD FOR P.E.
Monitor status:
---------------
*2 1/2 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*8 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JD0337 PMD 22 WAFERS*
JD0334 PMD 24 WAFERS
XD0490 PMD 24 WAFERS
JD0313 M1 22 WAFERS
XD0447 M3 24 WAFERS
# of carriers for strasbaugh/speedfam:
-------------------------------------
16 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
10 PLATES FOR CMP.A1/.A2
|
| 75.28 | A-shift CMP passdown 6/24/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Jun 24 1996 20:37 | 77 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 mqc
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0299 (m2).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0296 (m2).
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0326 (m1).
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0472 (m3) and YD0182 (m1).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JL0356
JD0326
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1.5 boxes of mqc wafers
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0356 - M1 - 11WFRS
JD0301 - M2 - 23
JD0266 - M3 - 23
JD0264 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 speedfam carriers
4 strasbaugh carriers
10 strasbaugh plates
|
| 75.29 | passdown cmp b-shift 6/25/96 | FABSIX::M_PROVENCHER | | Tue Jun 25 1996 07:36 | 82 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 A2
BREAKIN WAFERS 74 MISC
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0335
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC
CMP.B1 (SPEEDFAM CMP-V) - UP/IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP/RUNNING JD0295 M2
CMP.B3 (SPEEDFAM CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Hot/B lots in area:
________________________
*NONE*
Hot lots coming to area:
------------------------
*NONE*
Static Lots in area:
--------------------
*XD0473 M2*
Down Equipment:
--------------
*NONE*
Scrap lots:
-----------
*NONE*
Hold Lots:
------------
*XD0473 M2 HOLD FOR P.E.*
Monitor status:
---------------
*2 BOXES OF MQC WAFERS*
Number of product lots in room:
------------------------------
*2 LOTS*
New specs/revs posted:
---------------------
*NONE*
Lots/wafers processed:
-----------------------
*JL0329 PMD 12 WAFERS*
JD0333 PMD 19 WAFERS
YD0182 M1 24 WAFERS
JD0326 M1 24 WAFERS (HOT LOT)
JD0299 M2 22 WAFERS
JD0296 M2 23 WAFERS
JD0302 M2 21 WAFERS
XD0472 M3 24 WAFERS (B-LOT)
# of carriers for strasbaugh/speedfam:
-------------------------------------
15 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
10 PLATES FOR CMP.A1/.A2
|
| 75.30 | A-shift CMP passdown 6/25/96 | FABSIX::J_SADIN | Freedom isn't free. | Tue Jun 25 1996 20:50 | 76 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqc
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0336 (pmd).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0291A (m2).
CMP.B1 (Speedfam CMP-V) - IDLE.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0307 (m2).
CMP.B3 (Speedfam CMP-V) - RUNNING: XD0483 (m1).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K montor wafers. 4 more boxes on order.
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0336
JD0335
JD0295
JD0333
# of carriers for strasbaugh/speedfam:
--------------------------------------
11 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
10 STRASBAUGH PLATES
|
| 75.31 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Sat Jun 29 1996 08:29 | 51 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/NEEDS FULL MQC
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE MQC DONE
CMP.B1 (Speedfam CMP-V) - DOWN/CRASH LOST 5 WAFERS FROM LOT JD0347
7 MORE STILL NEED TOUCHUP
CMP.B2 (Speedfam CMP-V)- UP/RUNNING JD0292 FIRST 400SEC MQC DONE
CMP.B3 (Speedfam CMP-V)-UP/IDLE MQC DONE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:1
--------------------
HOLD LOTS IN AREA:2
J0L317 UNABLE TO READ ON UV1050 (BAD READINGS)
J0D0343 NEEDS SPECIAL MEASURMENT FROM DSS SEE REMARK
__________________
DOWN equipment:CMP.B1
---------------
---------------
NUMBER of product lots in room:4
-------------------------------
LOTS COMPLETED : 6
----------------
BREAK IN WAFERS USED: 50
MQC WAFERS: 3.5 BOXES
----------
|
| 75.32 | CMP C-SHIFT PD. 6/29/96 | FABSIX::E_DAWSON | | Sat Jun 29 1996 20:53 | 57 |
| Monitor Wafer USAge
-------------------
Type of monitor Amount used Comments
--------------- ----------- --------
MQC-12K MONS 3 A2/Scrubba's
Wafers BROKE 0
BREAK-IN WAFERS 32
CMP.A1 (Strasbaugh 6DS-SP) - MQC - Needs full MQC'S.
CMP.A2 (Strasbaugh 6DS-SP) -Up/Idle - New Pad, Needs full MQC's.
CMP.B1 (Speedfam CMP-V) - Down - Carrier to Load Cup alighment problems.
CMP.B2 (Speedfam CMP-V) - Up/Idle -
CMP.B3 (Speedfam CMP-V) - Running 2 - JD0314 DC1026 ILD2 @ Touch Up.
XD0493 TM36 PMD 23W @ Touch Up.
CMP-SCRUB.A1 (On-track scrubber) - UP - Idle. Mqc's performed
CMP-SCRUB.A2 (On-track scrubber) - UP - Idle. Mqc's performed
Hot/B lots in area:
__________________
JL0387 PMD DC1054 12W *HOT LOT*
*******THIS LOT IS ON HOLD FOR NO PATTERN RC. ON UV1050******
XD0493 PMD TM36 23W *B-LOT*
*Monitor status:
______________
3 Pod's 12k
Number of product lots in room:
______________________________
* SEVEN (7) * *Lots processed:
______________
* EIGHT(8) *
# of carriers for strasbaugh/speedfam:
_____________________________________
See Samuel "HOLY" Graley's passdown.
|
| 75.33 | A-shift CMP passdown 6/30/96 | FABSIX::J_SADIN | Freedom isn't free. | Sun Jun 30 1996 20:33 | 79 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 40 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0320 (m2).
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0272 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0278 (m3).
CMP.B3 (Speedfam CMP-V) - IDLE. (will be going down for pad change after
JD0288 moves out).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
?????????????
Static Lots in area:
-------------------
XD0486 - ON HOLD FOR 3-WAY SPLITS.
Down Equipment:
--------------
CMP.B3 WILL BE GOING DOWN AROUND SHIFT CHANGE FOR A NEW PAD.
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0486 - 3 way splits
Monitor status:
--------------
2 boxes of 12K mqc monitors.
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0387 - PMD - 12WFRS
JD0351 - PMD - 24
JD0350 - PMD - 24
JD0310 - M2 - 24
JD0308 - M2 - 24
JD0288 - M3 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
16 speedfam carriers
0 strasbaugh carriers
4 strasbaugh plates
|
| 75.34 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Thu Jul 04 1996 06:53 | 48 |
|
CMP.A1 (Strasbaugh 6DS-SP) - IDLE
CMP.A2 (Strasbaugh 6DS-SP) - IDLE
CMP.B1 (Speedfam CMP-V) - IDLE
CMP.B2 (Speedfam CMP-V) - IDLE
CMP.B3 (Speedfam CMP-V) - IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:11
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:
---------------
---------------
NUMBER of product lots in room:10
-------------------------------
LOTS COMPLETED : 6
----------------
BREAK IN WAFERS USED: 20
MQC BOXES: 1/2 BOX
----------
|