| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 74.1 | 5/5/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Sun May 05 1996 08:19 | 74 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
BROKEN PRODUCT WAFERS 2 REASON FOR CRASH IS UNKNOWN
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING YD0163 M1
CMP.A2 (Strasbaugh 6DS-SP) - UP MQC WITH NEW PAD AND CARRIERS AFTER CRASH
LOT JD0218 PMD HAS 2 WAFERS THAT NEED TO BE
SCRAPED WHEN THE LOT IS PROCTED OUT OF POLISH.
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0168 M3
CMP.B2 (SPEEDFAM CMP-V) - UP IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
JD0184 M2 NO TAG
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
7 lots
# of carriers for strasbaugh/speedfam:
-------------------------------------
13 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
7 filmed and shimed for CMP.A1/.A2
|
| 74.2 | A-shift CMP passdown 5/5/96 | SUBPAC::SADIN | Freedom isn't free. | Sun May 05 1996 20:07 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.a2/.b2/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0220 (pmd) and JD0193 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0212 (pmd).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0168 (m3) and JD0161 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0209 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0209 (M3)
JD0220 (PMD)
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
5 boxes of 12K monitors
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0218 - PMD - 22WFRS
YD0163 - M1 - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 carriers for speedfam
4 full carriers for strasbaugh
7 plates shimmed and filmed for strasbaugh
|
| 74.3 | 5/6/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon May 06 1996 08:31 | 84 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 18 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
BROKEN PRODUCT WAFERS 2 REASON FOR CRASH IS UNKNOWN
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0203 M1 + JD0196 M1
CMP.A2 (Strasbaugh 6DS-SP) - UP MQC WITH NEW PAD AND CARRIERS AFTER CRASH
LOT JD0226 PMD HAS 2 WAFERS THAT WERE SCRAPED.
LOT JD0195 M1 IS PROCED INTO THIS TOOL.
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0180 + JD0185 BOTH M2
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0170 M3
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
JD0226 PMD HAD 2 WAFERS SCRAPPED AT POLISH
Hold Lots:
---------
* NONE *
Monitor status:
---------------
2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
JD0212 PMD 24W
JD0220 PMD 24W
JD0222 PMD 24W
JD0226 PMD 22W
JD0193 M1 24W
XD0445 M2 24W
JD0184 M2 22W
JD0161 M3 21W
JD0209 M3 24W
JD0168 M3 22W
# of carriers for strasbaugh/speedfam:
-------------------------------------
13 spare carriers for CMP.B1/B2
? full carriers for CMP.A1/.A2
? filmed and shimed for CMP.A1/.A2
|
| 74.4 | A-shift CMP passdown 5/06/96 | SUBPAC::SADIN | Freedom isn't free. | Mon May 06 1996 20:33 | 82 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.a2/.b2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0203 (m2).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0456 (pmd).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0195 (m1).
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0442 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XD0469 (PMD - HOT)
JD0206 (ILD2 1 - BLOT)
Static Lots in area:
-------------------
JD0195 - 0.8DAYS
JD0182 - 0.9DAYS (NO TAG)
JD0181 - 0.7DAYS (NO TAG)
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2.5 boxes of 12K monitor wafers.
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0196 - M1 - 20WFRS
JD0203 - M1 - 22
JD0180 - M2 - 24
JD0185 - M2 - 24
JD0170 - M3 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPARE CARRIERS FOR SPEEDFAM
0 CARRIERS BUILT FOR STRASBAUGH
FYI:
* PLATES THAT ARE BUILT FOR STRASBAUGH HAVE NO GREEN PLUGS IN THEM. THEY
WILL NEED TO HAVE THE FILMS STRIPPED OFF AND BE REBUILT. PUSHING PLUGS INTO
THE PLATES NOW WOULD CAUSE BUBBLES UNDER THE FILM. *
|
| 74.5 | 5/7/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Tue May 07 1996 08:14 | 84 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP MQC, AFTER PAD CHANGE
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING XD0453 M1
CMP.B1 (Speedfam CMP-V) - UP MQC, 12HR
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0171 + JD0167 BOTH M3
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
JD0206 M2 B LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
JD0227 PMD NO TAG
JD0225 PMD NO TAG
JD0206 M2 NO TAG B LOT
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
JD0216 PMD 24W
XD0223 PMD 24W
XD0456 PMD 24W
XD0469 PMD 23W
JD0198 M1 24W
JD0195 M1 24W
JD0181 M2 24W
JD0182 M2 24W
JD0189 M2 23W
XD0442 M3 23W
# of carriers for strasbaugh/speedfam:
-------------------------------------
13 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
0 filmed and shimed for CMP.A1/.A2
|
| 74.6 | A-shift CMP passdown 5/7/96 | SUBPAC::SADIN | Freedom isn't free. | Tue May 07 1996 20:27 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 cmp.b2/.a2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0225 (pmd).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0227 (pmd) and JD0206 (m2).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0211 (m2) and XD0463 (m3).
CMP.B2 (Speedfam CMP-V) - MQC: running mqcs.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0211 - HOT
JD0206 - B
Hot lots coming to area:
-----------------------
JD0169 - ILD3 2
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K monitor wafers.
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0453 - M1 - 22WFRS
YD0162 - M3 - 24WFRS
JD0167 - M3 - 23WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
13 SPEEDFAM CARRIERS
O STRASBAUGH CARRIERS
|
| 74.7 | 5/8/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Wed May 08 1996 08:40 | 80 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 cmp.a1/.b1/scrub
BREAKIN WAFERS 75 misc
BROKEN PRODUCT WAFERS 3 NOT A CRASH
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING XD0461 PMD TOUCH UP
CMP.A2 (Strasbaugh 6DS-SP) - UP MQC
CMP.B1 (Speedfam CMP-V) - UP RUNNING XD0463 M3 TOUCH UP
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0097 M3 + JD0169 M3
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
JD0169 M3
JD0211 M2
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
JD0169 M3 HOT LOT 3 WAFERS BROKEN
Hold Lots:
---------
* NONE *
Monitor status:
---------------
2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
7 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
13 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
0 filmed and shimed for CMP.A1/.A2
Last night thickness.A4 and .A5 both gave us problems measuring lots.
They either kicked out the measurement sites or they did not have a GOF that
was acceptable. That is if they got that far for they also would not measure
their recognition sites.
|
| 74.8 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Wed May 08 1996 20:36 | 84 |
|
-< A shift CMP passdown - Wednesday 05/8/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 75 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
4 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
11 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - MQC: Running machine quality checks
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: Final polishing lot JD0191/m2.
Lot JD0224 is being measured 100% and will need to be touched up
CMP.B1 (Speedfam CMP-V) - IDLE/UP: ( Mqc's done on this tool )
CMP.B2 (Speefam CMP_V ) - IDLE/UP: ( Mqc's will be needed after 8:30 PM )
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
2 lots without tags
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
Number of product lots in room:
------------------------------
6 LOTS
New specs/revs posted:
---------------------
|
| 74.9 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri May 10 1996 06:49 | 40 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC FAILED FIRST TIME FOR UNIFORMITY AND
SCRATCHES. WAITING FOR MQC WAFERS.
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP-V)- UP/RUNNING LOT JD0200 100% ON A.5
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:2
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:
---------------
---------------
NUMBER of product lots in room:3
-------------------------------
LOTS COMPLETED : 7
----------------
|
| 74.10 | 5/12/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Sun May 12 1996 08:21 | 73 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.a1/.b1/scrub
BREAKIN WAFERS 75 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING XD0469 M1
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING YD0167 M1 B LOT
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0197 M2
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0217 M2
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
YD0167 M1 B LOT
XD0469 M1 B LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
6 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
13 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
|
| 74.11 | A-shift CMP passdown 5/12/96 | SUBPAC::SADIN | Freedom isn't free. | Sun May 12 1996 20:22 | 76 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.a1/.a2/scrb/.b1
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running mqcs after pad change.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0265 (pmd - hot) for touchups.
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0265 - HOT
Hot lots coming to area:
-----------------------
JD0220 - ILD2_2
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K monitor wafers
Number of product lots in room:
------------------------------
1
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0469 - M1 - 23WFRS
JD0239 - PMD - 24
YD0167 - M1 - 24
JD0265 - PMD - 24
JD0242 - PMD - 24
JD0197 - M2 - 24
JD0217 - M1 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 STRASBAUGH CARRIERS
3 SPEEDFAM CARRIERS
|
| 74.12 | 5/13/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon May 13 1996 06:42 | 72 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 cmp.a1/.b1/scrub
BREAKIN WAFERS 75 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0218 M1
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0179 M3 + JD0220 M2 HOT LOT
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
JD0220 M2 HOT LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
1 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 74.13 | A-shift CMP passdown 5/13/96 | SUBPAC::SADIN | Freedom isn't free. | Mon May 13 1996 20:41 | 96 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 .b2/.b1/scrb
BREAKIN WAFERS 100 misc
** note ** please read comments at end of passdown!! Important m3
processing information there.
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0456 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0240 (pmd).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0178 (m3) and JD0193 (m2).
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0179 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XD0468 - UPP ILD1-1 HOT
JD0206 - DEP_ILD3-1 BLOT
Static Lots in area:
-------------------
JD0179 - 0.8DAYS
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of mqc wafers
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0222 - M1 - 24WFRS
XD0458 - PMD - 24
JD0218 - M1 - 22
JD0220 - M2 - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
2 STRASBAUGH PLATES
** note ** M3 lots have been getting the edges severly polished which in
turn is messing up contact etch (contacts are not getting etched fully,
hence yield loss). So, per engineering please do the following:
ON M3 LOTS ONLY! Adjust the id/od to get a good center-fast polish.
Run send ahead wafers to make sure that you are not removing more off the
edge than in the center! If you are unsure, run mqcs with the new id/od
settings and look at the 3d maps to verify center fast polishing. PLEASE
INFORM THE ONCOMING SHIFT OF THE NEW ID/OD SETTINGS AND WHAT RECIPES THEY
ARE IN.
Center the id/od around 115 (11.5 on CMP.B1 with new software). The
id should be no less than 95 (9.5) and the od should be no greater than 135
(13.5). Make sure they are equidistant from 115 (11.5).
Any questions should be directed to Frank Krupa (SUBPAC::KRUPA).
|
| 74.14 | 5/14/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Tue May 14 1996 08:20 | 72 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 2 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0244 PMD
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0196 M2 + XD0468 M1 HOT LOT BOTH AT 100%
CMP.B2 (SPEEDFAM CMP-V) - UP IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
XD0468 M1 HOT LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
9 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
2 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 74.15 | A-shift CMP passdown 5/14/96 | SUBPAC::SADIN | Freedom isn't free. | Tue May 14 1996 20:07 | 92 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 polish tools/scrubba
BREAKIN WAFERS 100 misc
** please see important M3 processing information at end of passdown **
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0243 (pmd).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0247 (pmd).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0226 (m1).
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
0 mqc wafers on hand. two more boxes on order. check status in
ASDG::FAB6_WAFERSTARTS notesfile and in workstream.
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0185 - M3 - 24WFRS
JD0244 - PMD - 23
JD0196 - M2 - 20
XD0468 - M1 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 speedfam carriers
2 strasbaugh carriers
2 strasbaugh plates
** note ** M3 lots have been getting the edges severly polished which in
turn is messing up contact etch (contacts are not getting etched fully,
hence yield loss). So, per engineering please do the following:
ON M3 LOTS ONLY! Adjust the id/od to get a good center-fast polish.
Run send ahead wafers to make sure that you are not removing more off the
edge than in the center! If you are unsure, run mqcs with the new id/od
settings and look at the 3d maps to verify center fast polishing. PLEASE
INFORM THE ONCOMING SHIFT OF THE NEW ID/OD SETTINGS AND WHAT RECIPES THEY
ARE IN.
Center the id/od around 115 (11.5 on CMP.B1 with new software). The
id should be no less than 95 (9.5) and the od should be no greater than 135
(13.5). Make sure they are equidistant from 115 (11.5).
Any questions should be directed to Frank Krupa (SUBPAC::KRUPA).
|
| 74.16 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Wed May 15 1996 07:43 | 41 |
|
CMP.A1 (Strasbaugh 6DS-SP) - DOWN/MONTHLY PM
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JD0203 LOT 100% ON A.4
CMP.B2 (Speedfam CMP-V)- UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:1 PMD NO T TAG
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment: A.1 MONTHLY PM
---------------
---------------
NUMBER of product lots in room:2
-------------------------------
LOTS COMPLETED : 7
----------------
***MQC WAFERS 100 ORDERED "0" INHOUSE***
|
| 74.17 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri May 17 1996 08:49 | 43 |
|
CMP.A1 (Strasbaugh 6DS-SP) - DOWN/LEFT SPINDLE TO LOW CAUSEING ROBOT TO HIT
CARRIER
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE NEEDS MQC
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JD0220 HOT 100% ON A5 READY FOR TOUCHUP
WAFERS IN SLOTS 5-9 HAVE SCRATCHES PSS NOTIFIED
WAITING FOR FURTHER INSPECTION
CMP.B2 (Speedfam CMP-V)- VERIFY-U RUNNING 50 WAFERS FOR VERIFY
CMP-SCRUB.A1 (On-track scrubber) - DOWN/EQUIPMENT SHUTTING DOWN WITHOUT ERROR
MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area:1
-------------------
JD0220
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:6
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment: A.1 SPINDLE/ SCRUB A1 SHUTTING DOWN/ B2 VERIFY
---------------
---------------
NUMBER of product lots in room:7
-------------------------------
LOTS COMPLETED : 5
----------------
|
| 74.18 | 5/19/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Sun May 19 1996 08:35 | 77 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 cmp.a1/.b1/scrub
BREAKIN WAFERS 58 misc
BROKEN PRODUCT WAFERS 1 CARRIER
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP MQC, REPLACED 1 CARRIER IT SHOULD COME BACK UP
FAST, PAST UNIF. NOW CHECKING PARTICLES
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0204 M2
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
JD0212 HOT LOT NEEDS FINAL MEASURMENTS
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
JD0252 PMD NO TAG
JD0257 PMD NO TAG (NEEDS SPECIAL RECIPE ON UV1050 SEE REMARK)
JD0219 PMD NO TAG
JD0259 PMD NO TAG
YD0166 M2 (SEE REMARK)
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
JD0227 M1 BROKE 1 WAFER ON CMP.A2
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
4 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
13 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 74.19 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Sun May 19 1996 20:27 | 87 |
|
-< A shift CMP passdown - Sunday 05/19/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 75 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
6 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
9 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - IDLE/UP:
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC: Monitors need to be read on thickness.a5
and the data need to be combined.
CMP.B1 (Speedfam CMP-V) - RUNNING: PMD lot JD0252 running for 25 seconds.
Lot JD0208 is been measured 100% on thickness.A4. It will have to be touched
when done with all the measurements.
CMP.B2 (Speefam CMP_V ) - RUNNING: Lot JD0193 running through 2nd. polish run
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
B LOT JD0193
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
2 PMD lots without tags
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
Lot YD0166 on hold per remark ( Larry Camilletti needs to be present
while processing this lot.)
Monitor status:
--------------
Number of product lots in room:
------------------------------
8 LOTS
New specs/revs posted:
---------------------
|
| 74.20 | 5/20/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon May 20 1996 08:09 | 73 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 cmp.a1/.b1/scrub
BREAKIN WAFERS 55 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0232 M1
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING JD0259 PMD
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0228 M1
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0221 M1 + JD0188 M3
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
JD0219 PMD NO TAG
JD0260 PMD NO TAG
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
YD0166 ON HOLD (LARRY CAM. MUST BE PRESENT WHILE LOT IS BEING RUN)
Monitor status:
---------------
1/2 BOX OF MQC WAFERS
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
4 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
12 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 74.21 | A-shift CMP passdown 5/20/96 | SUBPAC::SADIN | Freedom isn't free. | Mon May 20 1996 20:28 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 cmp.b2
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0200 (m2).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0215 (m2).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0195 (m3).
CMP.B2 (Speedfam CMP-V) - MQC: running mqcs after wafer crash.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0195 - BLOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0219 - PMD (NO TAG)
Down Equipment:
--------------
CMP.B2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
YD0166 - HOLD FOR ENG (LOT IS BEING SCRAPPED)
Monitor status:
--------------
* none * WE HAVE SIX 12K LOTS SITTING AT NOVELLUS WAITING FOR DEP. WE ARE
GETTING ONE LOT FROM P5000 UNTIL NOVELLUS CAN START OUR LOTS.
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0232 - M1 - 24WFRS
JD0259 - PMD- 24
JD0205 - M2 - 24
JD0228 - M1 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 STRASBAUGH CARRIERS
11 SPEEDFAM CARRIERS
|
| 74.22 | 5/21/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Tue May 21 1996 08:32 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP MQC
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING JD0215 M2 + JD0200 M2
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0189 M3
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0219 PMD
*LOT YD0168 M1 IS BEING 100% ON UV1050. SOME OF THE WAFERS MAY
NEED TO BE REMARKED.*
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
3 PMD'S NO TAG
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
YD0166 ON HOLD (LARRY CAM. MUST BE PRESENT WHILE LOT IS BEING RUN)
Monitor status:
---------------
2 BOX OF MQC WAFERS
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
2 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
11 spare carriers for CMP.B1/B2
1 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 74.23 | A-shift CMP passdown 5/21/96 | SUBPAC::SADIN | Freedom isn't free. | Tue May 21 1996 20:19 | 77 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp tools
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: YD0163 (m2).
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0217 (m2).
CMP.B2 (Speedfam CMP-V) - DOWN: main vac problems. EE techs looking into it
now...
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
XD0468 - DEP_ILD3 2
Static Lots in area:
-------------------
XD0464 - 1.3DAYS
JD0260 - 1.6 NO T-TAGS
JD0258 - 0.9
Down Equipment:
--------------
CMP.B2 - MAIN VAC PROBLEMS.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K wafers.
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0200 - M2 - 24
JD0215 - M2 - 23
JD0189 - M3 - 23
JD0219 - PMD- 12
# of carriers for strasbaugh/speedfam:
--------------------------------------
11 CARRIERS FOR SPEEDFAM
1 CARRIER FOR STRASBAUGH
2 PLATES FOR STRASBAUGH
|
| 74.24 | 5/22/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Wed May 22 1996 08:39 | 73 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.a1/.b1/scrub
BREAKIN WAFERS 110 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0234 M1 + YD0163 M2 NEEDS TOUCH UP
CMP.A2 (Strasbaugh 6DS-SP) - UP MQC, NEW PAD
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0260 PMD + JD0214 M2
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0192 M3 + XD0468 M3 TOUCH UP HOT LOT
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
XD0468 M3 RUNNING TOUCH UP HOT LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
3 PMD'S NO TAG
1 M1,M2 AND M3 NO MACHINE
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
LOT YD0163 NEEDS TOUCH UPS HOWEVER 4 WAFERS ARE OVER POLISHED
Hold Lots:
---------
YD0166 ON HOLD (LARRY CAM. MUST BE PRESENT WHILE LOT IS BEING RUN)
Monitor status:
---------------
0 BOX OF MQC WAFERS
Number of product lots in room:
------------------------------
14
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
4 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
11 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
2 PLATES FOR CMP.A1/.A2
|
| 74.25 | A-shift CMP passdown 5/22/96 | SUBPAC::SADIN | Freedom isn't free. | Wed May 22 1996 20:17 | 77 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 mqcs
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: just running mqcs now due to having no
mqc wafers all day.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0221 (m1) and JD0258 (pmd).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0233 (m1).
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0218 (m2).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0265 - DEP_ILD1 2
JD0265A- UPP_ILD1 1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K monitor wafers.
Number of product lots in room:
------------------------------
13
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0234 - M1 - 23WFRS
YD0163 - M2 - 22
JD0260 - PMD- 22
JD0214 - M2 - 22
XM0450 - M3 - 17
JD0192 - M3 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
11 SPEEDFAM CARRIERS
2 STRASBAUGH CARRIERS
|
| 74.26 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Sat May 25 1996 08:18 | 40 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING JD0202 100% A5/XL0469 NEEDS 100% ON A5
CMP.B2 (Speedfam CMP-V)- UP/IN MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area:1
-------------------
JD0202 B LOT
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:3
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:
---------------
---------------
NUMBER of product lots in room:5
-------------------------------
LOTS COMPLETED : 7
----------------
|
| 74.27 | CMP C-SHIT PD. 5/25/96 | FABSIX::E_DAWSON | | Sat May 25 1996 20:33 | 32 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE...Will need 2'nd set of mqc's, first
set failed for high unf. @ 10.7 &
11.3%.
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE....Mqc's performed.
CMP.B1 (Speedfam CMP-V) - UP/IDLE...Mqc's due @ 3:00am.
CMP.B2 (Speedfam CMP-V) - UP/IDLE...Mqc's perform.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Static Lots: Scrap Lots:
----------- ----------
See workstream 1 Wafer sraped "XD0469"
Hold Lots:0 Lots in CMP: 4 "No Tagz"
--------- -----------
MQC Monitors: Carriers:
------------- --------
1 1/2 Boxes See "The Holy Graley's" PD.
MQC Mon. Used: 11
-------------
|
| 74.28 | 5/26/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Sun May 26 1996 08:03 | 72 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - UP BREAKIN MQC
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING YD0169 M3 + XD0472 PMD
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0449 M3 + JD0270 PMD
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
XD0471 PMD IN SCRUBBER
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 BOX OF MQC WAFERS
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
5 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
15 spare carriers for CMP.B1/B2
3 full carriers for CMP.A1/.A2
3 PLATES FOR CMP.A1/.A2
|
| 74.29 | A-shift CMP passdown 5/26/96 | SUBPAC::SADIN | Freedom isn't free. | Sun May 26 1996 20:39 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 mqcs
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE. needs breakins and mqcs (new pad).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0247 (m1) and YD0159 (m3). Touchups on
both.
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0449 (m3). touchups.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0232 - DEP_ILD2 1
JD0233 - " "
JD0265 _ " "
Static Lots in area:
-------------------
XD0458 - 0.8DAYS (NOT IN ROOM OR STOCKER?)
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K monitor wafers
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0467 - PMD- 23WFRS
JD0270 - PMD- 24
YD0169 - M3 - 24
XD0472 - PMD- 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
11 SPEEDFAM CARRIERS
3 STRASBAUGH CARRIERS
|
| 74.30 | 5/27/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon May 27 1996 07:33 | 75 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 0 cmp.a1/.b1/scrub
BREAKIN WAFERS 10 misc
BROKEN PRODUCT WAFERS 0
CMP.A1 (Strasbaugh 6DS-SP) - DOWN
CMP.A2 (Strasbaugh 6DS-SP) - DOWN
CMP.B1 (Speedfam CMP-V) - DOWN
CMP.B2 (SPEEDFAM CMP-V) - DOWN
CMP-SCRUB.A1 (On-track scrubber) - DOWN
CMP-SCRUB.A2 (On-track scrubber) - DOWN
Hot/B lots in area:
___________________
JD0233 HOT LOT
JD0232 HOT LOT
JL0315 HOT LOT (ON HOLD WILL NOT READ ON UV1050)
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
ALL
Scrap lots:
-----------
* NONE *
Hold Lots:
---------
JL0315 M1 (WILL NOT MEASURE ON UV1050) HOT LOT
XD0458 M1 (NO RECIPE ON THE UV1050)
Monitor status:
---------------
1 BOX OF MQC WAFERS
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
-----------------------
2 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
15 spare carriers for CMP.B1/B2
3 full carriers for CMP.A1/.A2
3 PLATES FOR CMP.A1/.A2
|
| 74.31 | A-shift CMP passdown 5/28/96 | SUBPAC::SADIN | Freedom isn't free. | Tue May 28 1996 20:24 | 79 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: broke wafers on pad. Kevin is working on
building two new carriers (this is the third crash today, hence we have no
carriers left).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0458 (m1) for first 3mins.
CMP.B1 (Speedfam CMP-V) - DOWN: waiting on parts for robot. Will be down
until tomorrow.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0233 (m2) and JD0232 (m2).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0232 - M2 HOT
JD0233 - M2 HOT
Hot lots coming to area:
-----------------------
JD0279 - DEP_PMD 1
Static Lots in area:
-------------------
JD0271 - PMD no tag
JD0274 - PMD no tag
JD0208 - M3
Down Equipment:
--------------
CMP.B1 - WAITING ON ROBOT PARTS
CMP.A1 - WAFER CRASH. NEEDS NEW PAD AND CARRIERS.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K monitor wafers (2 more boxes sitting at novellus and two more
on order)
Number of product lots in room:
------------------------------
13
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JL0315 - PMD - 12WFRS
JD0232 - M2 - 23
# of carriers for strasbaugh/speedfam:
--------------------------------------
1 SPEEDFAM CARRIER
0 STRASBAUGH CARRIERS
|
| 74.32 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Thu May 30 1996 08:55 | 40 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0256 WILL NEED 100%
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - DOWN/CARRIER ROTATION PROBLEMS
CMP.B2 (Speedfam CMP-V)- DOWN/MQC STILL HAS NOT PASSED MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - DOWN/AWAITING PARTS
HOT/B lots in area:1
-------------------
JD0215
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:7
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:
---------------
---------------
NUMBER of product lots in room:9
-------------------------------
LOTS COMPLETED : 4
----------------
|
| 74.33 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Thu Jun 06 1996 08:27 | 41 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE MQC DONE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING 1 LOT IN TOUCHUP JD0252
CMP.B2 (Speedfam CMP-V)- UP/MQC RUNNIG SECOND SET OF MQC CHANGED OFFSETS
JD0225 HAS HAD FIRST 400 SEC RUN
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:8
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:
---------------
---------------
NUMBER of product lots in room:12
-------------------------------
LOTS COMPLETED : 9
----------------
|