| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Weekly Preventive Maintenance Check Sheet, REV. C
DATE:__________ SYSTEM RTC CODE:__________ EQUIP. TECH.:_______________
INITIAL
_______ 6.1.1 CDA pressure @ 100 PSI: Pre-adjust:________
Post-adjust:________
_______ 6.1.2 N2 pressure @ 85 PSI: Pre-adjust:________
Post-adjust:________
_______ 6.1.3 DI Water pressure @ 40 PSI: Actual Reading:________
_______ 6.1.4 Check drip pan for any slurry/moisture. Clean any
contamination found.
_______ 6.1.5 Check all tubing and fittings for leaks.
_______ 6.1.6 Check all tubing and fittings for air leaks.
_______ 6.1.7 Check all indicator lights.
_______ 6.1.8 Check all stations/components for slurry, debris, or
any contaminants. Clean if necessary.
_______ 6.1.9 Wipe down polish table, tub, and splash ring.
_______ 6.1.10 Wipe down polypropylene deck and all stainless steel surfaces.
_______ 6.1.11 Wipe down pad conditioning arm.
_______ 6.1.12 Remove, rinse, and replace diamond conditioning disk.
_______ 6.1.13 Remove, wipe down ,and rinse pad conditioner park station.
_______ 6.1.14 Wipe down outer surface of both spindle hubs.
_______ 6.1.15 Remove and clean O-rings, replace if necessary.
_______ 6.1.16 Wipe down inside and outside of loa/cleaning station buckets.
_______ 6.1.17 Wipe down all surfaces of the robot.
_______ 6.1.18 Clean end effector vacuum chuck air port.
_______ 6.1.19 Inspect and clean end effector air nozzle.
_______ 6.1.20 Replace point of use slurry filters on Slurry Pump 1 & 2.
_______ 6.1.21 Inspect compression fittings on Slurry Pump 1 & 2 for leaks.
_______ 6.1.22 Check calibration of Slurry Pump 1 & 2, recalibrate if
necessary.
_______ 6.1.23 Check Neslab TCU for leaks.
_______ 6.1.24 Check Neslab TCU temperature readout.
_______ 6.1.25 Lubricate robot travel lead screw with NSK #2 grease.
_______ 6.1.26 Lubricate all elevator lead screws with NSK #2 grease.
_______ 6.1.27 Drain and wipe down inside and outside surfaces of all
elevator DI Water tanks.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
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| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Monthly Preventive Maintenance Check Sheet, REV. C
DATE:__________ SYSTEM RTC CODE:__________ EQUIP. TECH.:_________________
INITIAL
_______ 6.2.1 Perform weekly PM checks in addition to this monthly list.
_______ 6.2.2 Replace the fluid lines on the peristaltic pumps.
_______ 6.2.3 Check bridge drive belt for cracking, fraying or any signs of
deterioration. Replace if necessary.
_______ 6.2.4 Measure and record polish table alignment runout.
Polish Table Runout:____________
_______ 6.2.5 Measure and record right and left spindle runout.
Right Spindle Runout:____________
Left Spindlele Runout:____________
_______ 6.2.6 Measure and record right and left spindle hub runout.
Right Spindle Hub Runout:____________
Left Spindle Hub Runout:____________
_______ 6.2.7 Perform the spindle down Force Calibration on the right and
left spindles.
Left Spindle Force Error:____________
Right Spindle Force Error:____________
Left Spindle Calibration Variable:
Pre-adjust:____________ Post-adjust:____________
Right Spindle Calibration Variable:
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.8 Check left and right load station alignment. Adjust if
necessary.
_______ 6.2.9 Check left and right cleaning station alignment. Adjust if
necessary.
_______ 6.2.10 Check shuttle travel. Adjust if necessary.
_______ 6.2.14 Check the 24 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.15 Check the +/- 15 Volt Power Supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.16 Check the 5 Volt Power Supply. Calibrate if necessary
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.17 Check the +/- 12 Volt power supply. Calibrate if necessary.
Pre-adjust:____________ Post-adjust:____________
_______ 6.2.18 Check the oil level in the bridge lube resevoir. Adjust if
necessary using Shell Tellus 10 or equivalent.
_______ 6.2.19 Check the Neslab Temperature Control Unit (TCU) water level.
Adjust level if necessary.
_______ 6.2.20 Check the Neslab Temperature Control Unit (TCU) for loose
fittings.
_______ 6.2.21 Check the system vacuum cabinet for any loose fittings or
connectors.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
___________________________________________________________________________
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| R. H. Strasbaugh 6DS-SP Planarizer (CMP.A1/CMP.A2) HF6O-0171
Annual Preventive Maintenance Check Sheet, REV. C
INITIAL
_______ 6.4.1 Perform Weekly, Monthly, and Semi-Annual PM's in addition to
this Annual list
_______ 6.4.2 Perform Bridge Position calibration.
_______ 6.4.3 Check Robot Position Alignment. Calibrate if necessary.
_______ 6.4.4 Check Robot Travel position. Adjust if necessary.
_______ 6.4.5 Check Robot Arm position. Adjust if necessary.
_______ 6.4.6 Check Elevator Height position. Adjust if necessary.
COMMENTS:__________________________________________________________________
___________________________________________________________________________
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