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Conference asdg::cmp

Title:CMP
Notice:Welcome to the CMP notesfile
Moderator:FABSIX::B_TOWERLLE
Created:Tue Oct 31 1995
Last Modified:Fri Jun 06 1997
Last Successful Update:Fri Jun 06 1997
Number of topics:94
Total number of notes:6381

16.0. "CMP.B PM TEMPLATES" by STRATA::TDYER () Fri Apr 12 1996 15:45

    
    THIS NOTE IS FOR THE BLANK PM CHECK SHEETS FOR THE CMP.B TOOLS.
    ENTRIES INTO THIS NOTE (16) TO BE MADE BY EQUIPMENT ENGINEER ONLY. ALL 
    CMP.B PM CHECK SHEETS SHOULD BE COPIED FROM THIS FILE ONLY.
T.RTitleUserPersonal
Name		DateLines
16.1WEEKLY CMP.B PM TEMPLATESUBPAC::BJUBINVILLECMP-6 Equipment EngineeringMon Feb 03 1997 15:1599
                      SPEEDFAM CMP-V PREVENTIVE MAINTENANCE

                             SPEC# HF60-0172  REV-E  
                      
                       Speedfam Corp. CMP-V Planarizer

                Weekly Preventative Maintenance Check Sheet, Rev. E

DATE:         TOOL ENTITY:             TECHNICIAN(S):

START TIME:       COMPLETED TIME:
6.1.1  Check CDA pressure inside tool for 80-90 PSI	 Completed: 

6.1.2  Check N2 pressure inside tool for 55-65 PSI       Completed: 

6.1.3  Check incoming DI Water pressure for 20-30 PSI    Completed: 

6.1.4  Check Load Cup pressure for 40-50 PSI		 Completed: 

6.1.5  Check Pad Condition Balance pressure 10-20 PSI	 Completed:

6.1.6  Check Pad Conditioner Up pressure for 30-40 PSI	 Completed: 

6.1.7  Check Carrier Up pressure for 25-35 PSI		 Completed: 

6.1.8  Check Miscellaneous pressure for 40-50 PSI        Completed: 

6.1.9  Check Head Balance pressure for 6-6.5 PSI         Completed:  

6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 
       (Applicable for CMP.B1 only)

6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 

6.1.12 Check Open Load Flipper pressure for 45-55 PSI	 Completed: 

6.1.13 Check Open Unload Flipper pressure for 50-60 PSI	 Completed: 

6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI  Completed: 

6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI	 Completed:

6.1.16 Check Alignment Fixture pressure for 15-25 PSI    Completed: 

6.1.17 Check Scrubber In/Out pressure for 45-55 PSI	 Completed: 

6.1.18 Check MHTA pressure for 75-85 PSI	         Completed: 

6.1.19 Check Drip Pans for moisture/contamination        Completed:  

6.1.20 Check tubing/fittings for fluid leaks             Completed:  

6.1.21 Check tubing/fittings for pneumatic leaks         Completed:  

6.1.22 Check stations/components for contamination	 Completed:  

6.1.23 Check incoming Chilled Water pressure <10 PSI	 Completed:

6.1.24 Clean and lubricate the Scrubber rails		 Completed: 

6.1.25 Clean and lubricate the Paddle rails		 Completed: 

6.1.26 Remove and clean conditioning Wheel and Housing   Completed: 

6.1.27 Scrub clean the Polish area tub and walls         Completed: 

6.1.28 Remove all Load and Unload cups and scrub clean    
       with hydrogen peroxide.                           Completed:

6.1.29 Wipe the Load area, Mapper and Aligner w/ISO      Completed: 

6.1.30 Check slurry pump hoses and connectors for leaks  Completed: 

6.1.31 Remove and clean the Vacuum system filter          
       element and replaced as needed.                   Completed:

6.1.32 Check Carrier clean brushes for defects           Completed: 
       (On CMP.B1, rotate position)

6.1.33 Wipe the MHTA and covers with Isopropyl           Completed: 

6.1.34 Wipe the Process Area plexiglas doors w/Iso       Completed: 

6.1.35 Check chiller fluid resevoir for proper level     Completed: 

6.1.36 Check the chiller readout for 24 degrees C.       Completed:

6.1.37 Check the positioning and functionality of the
       wafer detect sensors.  Use the procedure in
       step 6.1.37.4 to check sensors without having to
       make any adjustments.                             Completed:  

6.1.38 Check the slurry flow alarm.                      Completed:  

Comments:
16.2MONTHLY CMP.B PM TEMPLATESUBPAC::BJUBINVILLECMP-6 Equipment EngineeringMon Feb 03 1997 15:20183
                     SPEEDFAM CMP-V PREVENTIVE MAINTENANCE

                           SPEC# HF60-0172  REV-E 

                        Speedfam Corp. CMP-V Planarizer

                Monthly Preventative Maintenance Check Sheet, Rev. E 

DATE:               TOOL ENTITY:              TECHNICIAN(S):

START TIME:            COMPLETED TIME:

6.2.1  Change Peristaltic Pump Lines and check flow     Completed:

6.2.2  Clean Polish area tub drains for clogs		Completed:

6.2.3  Check all table belts for defects		Completed:

6.2.4  Perform Down Force Calibration on all 5 heads   
       to read at +/- 1lbs of 354 lbs.
       NOTE:  The target is 23 lbs. below the actual
       377 lbs. due to the carrier weight minus the
       alignment fixture using the point-to-point
       method as described in the downforce procedure
       in 6.2.4.1 through 6.2.4.13.                     Completed:

       Down Frc: Head 1 Pre-Adj:______ Post-adj:______

                 Head 2 Pre-Adj:______ Post-adj:______

                 Head 3 Pre-Adj:______ Post-adj:______

                 Head 4 Pre-Adj:______ Post-adj:______

                 Head 5 Pre-Adj:______ Post-adj:______

6.2.5  Perform Down Force Calibration on Conditioner    Completed:
       to read +/- .5 lbs of 77lbs.
 
       Actual Down Force Pre-Adj:_____________

       Actual Down Force Post-Adj:____________

6.2.6  Check Scrubber Brushes for contaminates/defects	Completed:

6.2.7  Check the Load Flipper alignment			Completed:

6.2.8  Check the Unload Flipper alignment		Completed:

6.2.9  Check Elevator alignments			Completed:

6.2.10 Check wafer unload, from Index table to cassette Completed:

6.2.11 Check the +24 Volt power supply for +/- 1V 
       of 24 volts.                      Pre:    Post:       Tech:

6.2.12 Check the +/- 15 Volt power supply for +/- 1V
       of 15V                            Pre:    Post:       Tech:

6.2.13 Check the +5 Volt power supply for 4.5 to
       5.5 v.                              Pre:    Post:       Tech:

6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM  Completed:  

6.2.15 Check Vacuum Pump Diaphrams			Completed:

6.2.16 Replace liquid separator filter element         Completed: 

6.2.17 Check Vacuum Tank/Pump lines			Completed: 

6.2.18 Check carrier to Load Cup Position alignments    Completed:

6.2.19 Check Load Cup Height to carrier alignments      Completed:

6.2.20  Check the Robot alignments                       Completed:
                                         
6.2.21 Check Muffin Fans for proper operation           Completed:

Comments:

========================================================================



                      SPEEDFAM CMP-V PREVENTIVE MAINTENANCE

                             SPEC# HF60-0172  REV-E  
                      
                       Speedfam Corp. CMP-V Planarizer

                Weekly Preventative Maintenance Check Sheet, Rev. E

DATE:         TOOL ENTITY:             TECHNICIAN(S):

START TIME:       COMPLETED TIME:
6.1.1  Check CDA pressure inside tool for 80-90 PSI	 Completed: 

6.1.2  Check N2 pressure inside tool for 55-65 PSI       Completed: 

6.1.3  Check incoming DI Water pressure for 20-30 PSI    Completed: 

6.1.4  Check Load Cup pressure for 40-50 PSI		 Completed: 

6.1.5  Check Pad Condition Balance pressure 10-20 PSI	 Completed:

6.1.6  Check Pad Conditioner Up pressure for 30-40 PSI	 Completed: 

6.1.7  Check Carrier Up pressure for 25-35 PSI		 Completed: 

6.1.8  Check Miscellaneous pressure for 40-50 PSI        Completed: 

6.1.9  Check Head Balance pressure for 6-6.5 PSI         Completed:  

6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 
       (Applicable for CMP.B1 only)

6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 

6.1.12 Check Open Load Flipper pressure for 45-55 PSI	 Completed: 

6.1.13 Check Open Unload Flipper pressure for 50-60 PSI	 Completed: 

6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI  Completed: 

6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI	 Completed:

6.1.16 Check Alignment Fixture pressure for 15-25 PSI    Completed: 

6.1.17 Check Scrubber In/Out pressure for 45-55 PSI	 Completed: 

6.1.18 Check MHTA pressure for 75-85 PSI	         Completed: 

6.1.19 Check Drip Pans for moisture/contamination        Completed:  

6.1.20 Check tubing/fittings for fluid leaks             Completed:  

6.1.21 Check tubing/fittings for pneumatic leaks         Completed:  

6.1.22 Check stations/components for contamination	 Completed:  

6.1.23 Check incoming Chilled Water pressure <10 PSI	 Completed:

6.1.24 Clean and lubricate the Scrubber rails		 Completed: 

6.1.25 Clean and lubricate the Paddle rails		 Completed: 

6.1.26 Remove and clean conditioning Wheel and Housing   Completed: 

6.1.27 Scrub clean the Polish area tub and walls         Completed: 

6.1.28 Remove all Load and Unload cups and scrub clean    
       with hydrogen peroxide.                           Completed:

6.1.29 Wipe the Load area, Mapper and Aligner w/ISO      Completed: 

6.1.30 Check slurry pump hoses and connectors for leaks  Completed: 

6.1.31 Remove and clean the Vacuum system filter          
       element and replaced as needed.                   Completed:

6.1.32 Check Carrier clean brushes for defects           Completed: 
       (On CMP.B1, rotate position)

6.1.33 Wipe the MHTA and covers with Isopropyl           Completed: 

6.1.34 Wipe the Process Area plexiglas doors w/Iso       Completed: 

6.1.35 Check chiller fluid resevoir for proper level     Completed: 

6.1.36 Check the chiller readout for 24 degrees C.       Completed:

6.1.37 Check the positioning and functionality of the
       wafer detect sensors.  Use the procedure in
       step 6.1.37.4 to check sensors without having to
       make any adjustments.                             Completed:  

6.1.38 Check the slurry flow alarm.                      Completed:  

Comments:
16.3SEMI-ANNUAL CMP.B PM TEMPLATESUBPAC::BJUBINVILLECMP-6 Equipment EngineeringMon Feb 03 1997 15:44406
                      SPEEDFAM CMP-V PREVENTIVE MAINTENANCE

                               SPEC# HF60-0172  REV-E    

                         Speedfam Corp. CMP-V Planarizer

             Semi-Annual Preventative Maintenance Check Sheet, Rev. E

DATE:            TOOL ENTITY:            TECHNICIAN(S):

START TIME:            COMPLETED TIME: 

6.4.1  Check all interlocks for functionality		Completed:

6.4.2  Check all EMO's for functionality		Completed:

6.4.3  Lubricate the Rotary Union			Completed:

6.4.4  Lubricate the Lead Screw				Completed:

6.4.5  Lubricate the Linear Guide Rails			Completed:

6.4.6  Lubricate the Idler Pulley			Completed:

6.4.7  Rebuild the vacuum pump using the appropriate    
       rebuild kit.                                     Completed:

Comments:

=======================================================================


                     SPEEDFAM CMP-V PREVENTIVE MAINTENANCE

                           SPEC# HF60-0172  REV-E 

                        Speedfam Corp. CMP-V Planarizer

                Monthly Preventative Maintenance Check Sheet, Rev. E 

DATE:               TOOL ENTITY:              TECHNICIAN(S):

START TIME:            COMPLETED TIME:

6.2.1  Change Peristaltic Pump Lines and check flow     Completed:

6.2.2  Clean Polish area tub drains for clogs		Completed:

6.2.3  Check all table belts for defects		Completed:

6.2.4  Perform Down Force Calibration on all 5 heads   
       to read at +/- 1lbs of 354 lbs.
       NOTE:  The target is 23 lbs. below the actual
       377 lbs. due to the carrier weight minus the
       alignment fixture using the point-to-point
       method as described in the downforce procedure
       in 6.2.4.1 through 6.2.4.13.                     Completed:

       Down Frc: Head 1 Pre-Adj:______ Post-adj:______

                 Head 2 Pre-Adj:______ Post-adj:______

                 Head 3 Pre-Adj:______ Post-adj:______

                 Head 4 Pre-Adj:______ Post-adj:______

                 Head 5 Pre-Adj:______ Post-adj:______

6.2.5  Perform Down Force Calibration on Conditioner    Completed:
       to read +/- .5 lbs of 77lbs.
 
       Actual Down Force Pre-Adj:_____________

       Actual Down Force Post-Adj:____________

6.2.6  Check Scrubber Brushes for contaminates/defects	Completed:

6.2.7  Check the Load Flipper alignment			Completed:

6.2.8  Check the Unload Flipper alignment		Completed:

6.2.9  Check Elevator alignments			Completed:

6.2.10 Check wafer unload, from Index table to cassette Completed:

6.2.11 Check the +24 Volt power supply for +/-1V
       of  24V.                          Pre:    Post:       Tech:

6.2.12 Check the +/- 15 Volt power supply for +/- 1V
       of 15V.                           Pre:    Post:       Tech:

6.2.13 Check the +5 Volt power supply for 4.5 to
       5.5 v.                            Pre:    Post:       Tech:

6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM  Completed:  

6.2.15 Check Vacuum Pump Diaphrams			Completed:

6.2.16 Replace liquid separator filter element          Completed: 

6.2.17 Check Vacuum Tank/Pump lines			Completed: 

6.2.18 Check carrier to Load Cup Position alignments    Completed:

6.2.19 Check Load Cup Height to carrier alignments      Completed:

6.2.20  Check the Robot alignments                       Completed:
                                         
6.2.21 Check Muffin Fans for proper operation           Completed:

Comments:

========================================================================



                      SPEEDFAM CMP-V PREVENTIVE MAINTENANCE

                             SPEC# HF60-0172  REV-E  
                      
                       Speedfam Corp. CMP-V Planarizer

                Weekly Preventative Maintenance Check Sheet, Rev. E

DATE:         TOOL ENTITY:             TECHNICIAN(S):

START TIME:       COMPLETED TIME:
6.1.1  Check CDA pressure inside tool for 80-90 PSI	 Completed: 

6.1.2  Check N2 pressure inside tool for 55-65 PSI       Completed: 

6.1.3  Check incoming DI Water pressure for 20-30 PSI    Completed: 

6.1.4  Check Load Cup pressure for 40-50 PSI		 Completed: 

6.1.5  Check Pad Condition Balance pressure 10-20 PSI	 Completed:

6.1.6  Check Pad Conditioner Up pressure for 30-40 PSI	 Completed: 

6.1.7  Check Carrier Up pressure for 25-35 PSI		 Completed: 

6.1.8  Check Miscellaneous pressure for 40-50 PSI        Completed: 

6.1.9  Check Head Balance pressure for 6-6.5 PSI         Completed:  

6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 
       (Applicable for CMP.B1 only)

6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 

6.1.12 Check Open Load Flipper pressure for 45-55 PSI	 Completed: 

6.1.13 Check Open Unload Flipper pressure for 50-60 PSI	 Completed: 

6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI  Completed: 

6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI	 Completed:

6.1.16 Check Alignment Fixture pressure for 15-25 PSI    Completed: 

6.1.17 Check Scrubber In/Out pressure for 45-55 PSI	 Completed: 

6.1.18 Check MHTA pressure for 75-85 PSI	         Completed: 

6.1.19 Check Drip Pans for moisture/contamination        Completed:  

6.1.20 Check tubing/fittings for fluid leaks             Completed:  

6.1.21 Check tubing/fittings for pneumatic leaks         Completed:  

6.1.22 Check stations/components for contamination	 Completed:  

6.1.23 Check incoming Chilled Water pressure <10 PSI	 Completed:

6.1.24 Clean and lubricate the Scrubber rails		 Completed: 

6.1.25 Clean and lubricate the Paddle rails		 Completed: 

6.1.26 Remove and clean conditioning Wheel and Housing   Completed: 

6.1.27 Scrub clean the Polish area tub and walls         Completed: 

6.1.28 Remove all Load and Unload cups and scrub clean    
       with hydrogen peroxide.                           Completed:

6.1.29 Wipe the Load area, Mapper and Aligner w/ISO      Completed: 

6.1.30 Check slurry pump hoses and connectors for leaks  Completed: 

6.1.31 Remove and clean the Vacuum system filter          
       element and replaced as needed.                   Completed:

6.1.32 Check Carrier clean brushes for defects           Completed: 
       (On CMP.B1, rotate position)

6.1.33 Wipe the MHTA and covers with Isopropyl           Completed: 

6.1.34 Wipe the Process Area plexiglas doors w/Iso       Completed: 

6.1.35 Check chiller fluid resevoir for proper level     Completed: 

6.1.36 Check the chiller readout for 24 degrees C.       Completed:

6.1.37 Check the positioning and functionality of the
       wafer detect sensors.  Use the procedure in
       step 6.1.37.4 to check sensors without having to
       make any adjustments.                             Completed:  

6.1.38 Check the slurry flow alarm.                      Completed:  

Comments:




              <<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]CMP.NOTE;1 >>>
                                    -< CMP >-
================================================================================
Note 16.2                      CMP.B PM TEMPLATES                         2 of 2
SUBPAC::BJUBINVILLE "CMP-6 Equipment Engineering"   183 lines   3-FEB-1997 15:20
                         -< MONTHLY CMP.B PM TEMPLATE >-
--------------------------------------------------------------------------------

                     SPEEDFAM CMP-V PREVENTIVE MAINTENANCE

                           SPEC# HF60-0172  REV-E 

                        Speedfam Corp. CMP-V Planarizer

                Monthly Preventative Maintenance Check Sheet, Rev. E 

DATE:               TOOL ENTITY:              TECHNICIAN(S):

START TIME:            COMPLETED TIME:

6.2.1  Change Peristaltic Pump Lines and check flow     Completed:

6.2.2  Clean Polish area tub drains for clogs		Completed:

6.2.3  Check all table belts for defects		Completed:

6.2.4  Perform Down Force Calibration on all 5 heads   
       to read at +/- 1lbs of 354 lbs.
       NOTE:  The target is 23 lbs. below the actual
       377 lbs. due to the carrier weight minus the
       alignment fixture using the point-to-point
       method as described in the downforce procedure
       in 6.2.4.1 through 6.2.4.13.                     Completed:

       Down Frc: Head 1 Pre-Adj:______ Post-adj:______

                 Head 2 Pre-Adj:______ Post-adj:______

                 Head 3 Pre-Adj:______ Post-adj:______

                 Head 4 Pre-Adj:______ Post-adj:______

                 Head 5 Pre-Adj:______ Post-adj:______

6.2.5  Perform Down Force Calibration on Conditioner    Completed:
       to read +/- .5 lbs of 77lbs.
 
       Actual Down Force Pre-Adj:_____________

       Actual Down Force Post-Adj:____________

6.2.6  Check Scrubber Brushes for contaminates/defects	Completed:

6.2.7  Check the Load Flipper alignment			Completed:

6.2.8  Check the Unload Flipper alignment		Completed:

6.2.9  Check Elevator alignments			Completed:

6.2.10 Check wafer unload, from Index table to cassette Completed:

6.2.11 Check the +24 Volt power supply for +/- 1V 
       of 24 volts.                      Pre:    Post:       Tech:

6.2.12 Check the +/- 15 Volt power supply for +/- 1V
       of 15V                            Pre:    Post:       Tech:

6.2.13 Check the +5 Volt power supply for 4.5 to
       5.5 v.                              Pre:    Post:       Tech:

6.2.14 Check Table Rotation Speed for +/- 1.5 of 30RPM  Completed:  

6.2.15 Check Vacuum Pump Diaphrams			Completed:

6.2.16 Replace liquid separator filter element         Completed: 

6.2.17 Check Vacuum Tank/Pump lines			Completed: 

6.2.18 Check carrier to Load Cup Position alignments    Completed:

6.2.19 Check Load Cup Height to carrier alignments      Completed:

6.2.20  Check the Robot alignments                       Completed:
                                         
6.2.21 Check Muffin Fans for proper operation           Completed:

Comments:

========================================================================



                      SPEEDFAM CMP-V PREVENTIVE MAINTENANCE

                             SPEC# HF60-0172  REV-E  
                      
                       Speedfam Corp. CMP-V Planarizer

                Weekly Preventative Maintenance Check Sheet, Rev. E

DATE:         TOOL ENTITY:             TECHNICIAN(S):

START TIME:       COMPLETED TIME:
6.1.1  Check CDA pressure inside tool for 80-90 PSI	 Completed: 

6.1.2  Check N2 pressure inside tool for 55-65 PSI       Completed: 

6.1.3  Check incoming DI Water pressure for 20-30 PSI    Completed: 

6.1.4  Check Load Cup pressure for 40-50 PSI		 Completed: 

6.1.5  Check Pad Condition Balance pressure 10-20 PSI	 Completed:

6.1.6  Check Pad Conditioner Up pressure for 30-40 PSI	 Completed: 

6.1.7  Check Carrier Up pressure for 25-35 PSI		 Completed: 

6.1.8  Check Miscellaneous pressure for 40-50 PSI        Completed: 

6.1.9  Check Head Balance pressure for 6-6.5 PSI         Completed:  

6.1.10 Check Transport Paddle L/R pressure for 25-35 PSI Completed: 
       (Applicable for CMP.B1 only)

6.1.11 Check Transport Paddle U/D pressure for 10-20 PSI Completed: 

6.1.12 Check Open Load Flipper pressure for 45-55 PSI	 Completed: 

6.1.13 Check Open Unload Flipper pressure for 50-60 PSI	 Completed: 

6.1.14 Check Vacuum Tank Blowout pressure for 15-30 PSI  Completed: 

6.1.15 Check Wafer Scrub Down pressure for 20-30 PSI	 Completed:

6.1.16 Check Alignment Fixture pressure for 15-25 PSI    Completed: 

6.1.17 Check Scrubber In/Out pressure for 45-55 PSI	 Completed: 

6.1.18 Check MHTA pressure for 75-85 PSI	         Completed: 

6.1.19 Check Drip Pans for moisture/contamination        Completed:  

6.1.20 Check tubing/fittings for fluid leaks             Completed:  

6.1.21 Check tubing/fittings for pneumatic leaks         Completed:  

6.1.22 Check stations/components for contamination	 Completed:  

6.1.23 Check incoming Chilled Water pressure <10 PSI	 Completed:

6.1.24 Clean and lubricate the Scrubber rails		 Completed: 

6.1.25 Clean and lubricate the Paddle rails		 Completed: 

6.1.26 Remove and clean conditioning Wheel and Housing   Completed: 

6.1.27 Scrub clean the Polish area tub and walls         Completed: 

6.1.28 Remove all Load and Unload cups and scrub clean    
       with hydrogen peroxide.                           Completed:

6.1.29 Wipe the Load area, Mapper and Aligner w/ISO      Completed: 

6.1.30 Check slurry pump hoses and connectors for leaks  Completed: 

6.1.31 Remove and clean the Vacuum system filter          
       element and replaced as needed.                   Completed:

6.1.32 Check Carrier clean brushes for defects           Completed: 
       (On CMP.B1, rotate position)

6.1.33 Wipe the MHTA and covers with Isopropyl           Completed: 

6.1.34 Wipe the Process Area plexiglas doors w/Iso       Completed: 

6.1.35 Check chiller fluid resevoir for proper level     Completed: 

6.1.36 Check the chiller readout for 24 degrees C.       Completed:

6.1.37 Check the positioning and functionality of the
       wafer detect sensors.  Use the procedure in
       step 6.1.37.4 to check sensors without having to
       make any adjustments.                             Completed:  

6.1.38 Check the slurry flow alarm.                      Completed:  

Comments:
16.4CMP.B SHUTDOWN/STARTUP CHECKSHEETSSUBPAC::BJUBINVILLECMP-6 Equipment EngineeringMon Feb 03 1997 15:4550
        
SPEC# HF60-0172  REV-E       SPEEDFAM CMP-V PREVENTIVE MAINTENANCE




                        CMP.B SHUT DOWN CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
								 INIT / DATE
1) SCRUB SIDES OF CARRIERS					______/______
2) RUN CARRIER BLOW OFF FOR 30 SECONDS				______/______
3) REMOVE ALL CARRIERS						______/______
4) PLACE WIPES UNDER CARRIER FILMS AND LAY CARRIERS DI TANK	______/______
5) IF POWER TO SLURRY SYSTEM IS GOING TO BE LOST, CONTACT 
   ASHLAND CHEMICAL AND HAVE SLURRY SYSTEM PURGED AND CHARGED 
   WITH DI WATER.						______/______
6) CLEAN ENTIRE SYSTEM OF DRIED SLURRY 			        ______/______
7) REMOVE CONDITIONER AND CLEAN					______/______
8) CYCLE/RINSE ALL DI FUNCTIONS: SPRAY NOZZLES, SLURRY PUMPS,
   CONDITIONER RINSE, ELEVATOR TANKS.				______/______
9) SHUT OFF DI BEHIND SYSTEM (ROTATE 3W VLV TO FULL RETURN)     ______/______ 
10) DRAIN ELEVATOR AND CONDITIONER TUBE				______/______
11) REMOVE PADS, AND CLEAN AND DRY TABLES			______/______
12) REMOVE SCRUBBER BRUSHES AND SOAK IN DI			______/______
13) DRY ENTIRE SYSTEM OF ANY STANDING WATER			______/______
14) POWER DOWN SYSTEM.



SPEC# HF60-0172  REV-D       SPEEDFAM CMP-V PREVENTIVE MAINTENANCE


                        CMP.B START UP CHECK SHEET
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
                                                                 INIT / DATE
1) TURN ON DI WATER (ROTATE 3W VLV TO FULLY TO POLISHER.	______/______
2) POWER ON SYSTEM.						______/______
3) CYCLE/RUN ALL DI FUNCTIONS FOR 15 MINUTES			______/______
4) WIPE DOWN SYSTEM CLEAN ALL DRIED SLURRY	                ______/______
5) DRY TABLES, INSTALL PADS					______/______
6) INSTALL SCRUBBER BRUSHES					______/______
7) INSTALL CONDITIONER						______/______
8) INSTALL CARRIERS						______/______
9) RUN WET IDLE PROGRAM FOR 15 MIN. (ENOUGH TO CLEAN CARRIERS)  ______/______
10) IF SLURRY SYSTEM WAS SHUT DOWN, CONTACT ASHLAND CHEMICAL,
    REQUEST DI TO BE PURGE FROM SLURRY SYSTEM AND CHARGED WITH 
    SLURRY AND REQUEST A NEW SLURRY FILTER BE INSTALLED.	______/______
11) CALIBRATE SLURRY FLOW					______/______
12) PUT IN WET IDLE AND TURN OVER TO MFG FOR MQC		______/______