| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 71.1 | A-shift CMP passdown 3/3/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Mar 03 1996 19:20 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1/.b2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0382 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0102 (m1).
CMP.B1 (Speedfam CMP-V) - VERIFY-U: verifying mqc results after pad change.
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0370 (m3) and JD0117 (m2 rocket lot).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0373 - M3 - B-LOT
JD0117 - M2 - ROCKET LOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - VERIFY - VERIFYING MQCS AFTER PAD CHANGE.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1.5boxes of 12K monitor wafers.
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0407 - PMD - 24WFRS
YD0140 - M3 - 19WFRS
XL0378 - M2 - 20WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 COMPLETE SPEEDFAM CARRIERS
6 COMPLETE STRASBAUGH CARRIERS + 2 PLATES
|
| 71.2 | 3/4/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Mon Mar 04 1996 07:30 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 8 cmp.a1/.b1/scrub
BREAKIN WAFERS 80 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN VERIFY AFTER PAD CHANGE
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING JD0110 PMD
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0080 M3 (TOUCH UP)
YD0152 M1
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0373 M3 (TOUCH UP)
XL0377 M2
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* NONE *
Down Equipment:
---------------
CMP.A1 - DOWN FOR PAD CHANGE
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
5 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
7 spare carriers for CMP.B1/B2
3 full carriers for CMP.A1/.A2
0 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 71.3 | A-shift CMP passdown 3/4/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Mar 04 1996 19:28 | 78 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.b1/.b2/.a2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs on std pad stack with
chiller temp at 22�C (vs a std temp of 37�C). If mqcs fail the chiller temp
will be set back to normal and mqcs run again.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0398 (pmd).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0088 (m2) and JD0106 (m2 - hot).
CMP.B2 (Speedfam CMP-V) - MQC: running mqcs after pad change.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0106 - M2 - HOT
Hot lots coming to area:
-----------------------
XD0402 - DEP2-1
Static Lots in area:
-------------------
JD0088 - 0.8DAYS (running on CMP.B1).
Down Equipment:
--------------
CMP.A1 - MQC
CMP.B2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
4 boxes of 12K monitor wafers.
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0390 - M1 - 24WFRS
JD0110 - PMD - 24WFRS
XL0377 - M2 - 24WFRS
JD0080 - M3 - 24WFRS
YD0152 - M1 - 24WFRS
XD0373 - M3 - 20WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 SPEEDFAM CARRIERS BUILT
4 STRASBAUGH CARRIERS BUILT + 4 PLATES
|
| 71.4 | 3/5/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Tue Mar 05 1996 07:30 | 77 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 cmp.a1/.b1/scrub
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0096 M2 + JD0098 M1
CMP.B2 (SPEEDFAM CMP-V) - UP IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
JD0111 - HOT LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* NONE *
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
XD0389 PMD
JD0088 M2
JD0106 M2
JD0111 PMD
# of carriers for strasbaugh/speedfam:
-------------------------------------
7 spare carriers for CMP.B1/B2
3 full carriers for CMP.A1/.A2
0 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 71.5 | A-shift CMP passdown 3/5/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Mar 05 1996 19:19 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.a1/.a2/.b1/.b2
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0393 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: down for pad change.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0096 (m2).
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0402 (m2).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0402 - M2 - HOT
Hot lots coming to area:
-----------------------
JD0085 - DEP_ILD3-2
Static Lots in area:
-------------------
XD0409 - 0.7DAYS - NO TOKIN
XD0410 - 1.3DAYS - NO TOKIN
Down Equipment:
--------------
CMP.A2 - DOWN FOR PAD CHANGE
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3.5 boxes of 12K mqc wafers
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0098 - M1 - 12WFRS
JD0096 - M2 - 24WFRS
JD0077 - M3 - 11WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 STRASBAUGH CARRIERS BUILT
8 SPEEDFAM CARRIERS BUILT
|
| 71.6 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri Mar 08 1996 07:19 | 46 |
|
CMP.A1 (Strasbaugh 6DS-SP) - DOWN THIRD CRASH OF THE NIGHT
CMP.A2 (Strasbaugh 6DS-SP) - UP/2ND MQC
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP-V)- UP/IDLE MQC DONE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:2 PMD LOTS WAITING FOR T TAGS
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:CMP.A1 CRASH
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE.
STRAUSBAUGH COMPLETE
MONITOR status:
---------------
NUMBER of product lots in room:2
-------------------------------
LOTS COMPLETED 6
----------------
|
| 71.7 | CMP C-SHIFT PD. 3/8/96 | FABSIX::E_DAWSON | | Fri Mar 08 1996 19:35 | 34 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - MQC
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE...MQC"S COMPLETED
CMP.B1 (Speedfam CMP-V) - RUNNING-1 JD0099 DC1035 ILD2 12W
CMP.B2 (Speedfam CMP-V) - RUNNING-1 *HOT LOT* JD0106 DC1026 ILD3 23W
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - RUNNING-1 *HOT LOT* JD0124 DC1026 PMD
...Mqc performed
Hot/B lots in area:
------------------
JD0106 ILD3 DC1026 23W
Static Lots: Scrap Lots:
----------- ----------
SEE WORKSTREAM 1 WAFER JD0124 PMD
Hold Lots: Lots in CMP:
--------- -----------
ZD0106 CMOS7/L.CAMILLETTI 8 LOTS
MQC Monitors:
------------
3 BOXES
MQC Mon. Used: 8
-------------
|
| 71.8 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Sat Mar 09 1996 07:04 | 40 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/MQC
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/AWAITING PARTS
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP-V)- UP/RUNNING HOT LOT XD0402 MQC DONE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area: 1
-------------------
XD0402
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:4 LOTS WAITING FOR T TAGS
--------------------
HOLD LOTS IN AREA:1
__________________
DOWN equipment:CMP.A2 AWAITING PARTS
---------------
MONITOR status:5 BOXS
---------------
NUMBER of product lots in room:6
-------------------------------
LOTS COMPLETED 5
----------------
|
| 71.9 | A-shift CMP passdown 3/10/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Mar 10 1996 19:16 | 80 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.a1/.b1/.b2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0396 (m2).
CMP.B1 (Speedfam CMP-V) - RUNNING3: YD0153 (m1), XD0357 (m3), JD0088 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING2: XD0364 (m3), JD0119 (pmd).
CMP-SCRUB.A1 (On-track scrubber) - IDLE. *warning* inside station top brush
motor is faulty. New one will be installed monday once we can get the parts
out of the FAB6 stockroom "dumbwaiter". Tool is ok to run for now.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0088 -BLOT - M3
XD0396 -BLOT - M2
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
YD0153 - M1 - 1.1DAYS
ZD0106 - M1 - 2.0DAYS (ENG HOLD)
XD0357 - M3 - 1.1DAYS
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
ZD0106 - M1 - HOLD FOR LARRY CAMILLETTI. NEEDS DEVELOPMENT WORK.
Monitor status:
--------------
6 boxes of 12K monitor wafers.
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0116 - PMD - 24WFRS
JD0111 - M1 - 11WFRS
JD0113 - M1 - 23WFRS
XD0364 - M3 - 23WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 CARRIERS FOR SPEEDFAM (1 GOOD ONE IN THE CHASE NEXT TO THE SINK. THE ONE
WITH THE GREEN STICKER LABLED SH200 IS BAD...CARRIER 2A NEXT TO IT IS
GOOD.)
2 STRASBAUGH CARRIERS
|
| 71.10 | 3/11/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Mon Mar 11 1996 07:42 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0108
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING XD0395
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0088 + XD0389
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0081 + XD0384
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC DONE
Hot/B lots in area:
___________________
JD0088 B LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
XD0411 PMD NO TOLKEN
XD0412 PMD NO TOLKEN
JD0100 M2 NO TOLKEN
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
ZD0106-ENWAIT
Monitor status:
---------------
5 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
5 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
4 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
0 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 71.11 | A-shift CMP passdown 3/11/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Mar 11 1996 19:22 | 76 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 22 cmp.b1/.b2/scrb
BREAKIN WAFERS 150 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0411 (pmd).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0100 (m2).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0124 (m1 - hot).
CMP.B2 (Speedfam CMP-V) - IDLE. No t-tags for lots.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0124 - HOT LOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
5 boxes of 12K monitor wafers
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
ZD0106 - M1 - 23WFRS
JD0108 - M1 - 11WFRS
XD0395 - M1 - 23WFRS
XD0384 - M2 - 22WFRS
JD0088 - M3 - 24WFRS
JD0081 - M3 - 24WFRS
XD0389 - M2 - 23WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 CARRIERS FOR SPEEDFAM
0 CARRIERS FOR STRASBAUGH
|
| 71.12 | 3/12/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Tue Mar 12 1996 07:35 | 81 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 11 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP MQC, JD0100 M2 TOUCH UP
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0103 M2 + XD0404 M1 TOUCH UP
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0084 M3 + JD0102 M2 TOUCH UP
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC DONE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
JD0123 PMD NO TOLKEN
JD0127 PMD NO TOLKEN
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
5 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
JD0122 PMD 24W
XD0412 PMD 24W
XD0411 PMD 24W
JD0024 M1 23W
XL0378 M3 20W
XD0401 M1 23W
# of carriers for strasbaugh/speedfam:
-------------------------------------
4 spare carriers for CMP.B1/B2
2 full carriers for CMP.A1/.A2
0 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 71.13 | A-shift CMP passdown 3/12/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Mar 12 1996 19:23 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1/.b2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - MQC: running mqcs.
CMP.B2 (Speedfam CMP-V) - RUNNING2: JD0084 (m3) and XD0386 (m1).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
6 boxes of 12K monitor wafers
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
check out the new DCO posted next to CMP.B1!
Lots/wafers processed:
---------------------
JD0103 - M2 - 19WFRS
XD0404 - M1 - 23WFRS
JD0102 - M2 - 24WFRS
XD0386 - M1 - 24WFRS
JD0084 - M3 - 21WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 SPEEDFAM CARRIERS
4 STRASBAUGH CARRIERS
|
| 71.14 | 3/13/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Wed Mar 13 1996 07:40 | 78 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 1 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING XD0387 M1
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XL0377 M3
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC DONE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
XD0415 NO TOLKEN
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
5 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
JD0123 PMD
JD0127 PMD
XD0406 M1
JD0135 PMD
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
0 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 71.15 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Wed Mar 13 1996 19:34 | 84 |
|
-< A shift CMP passdown - Wednesday 03/13/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 75 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
12 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
6 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: New sofware installed. Equipment techs
still verifying if tool is free of errors.
CMP.A2 (Strasbaugh 6DS-SP) - MQC: failed mqc's twice. third pad installed is
ready for break-in wafers and them mqc's.
CMP.B1 (Speedfam CMP-V) - RUNNING: Send-aheads for lot JD0110 are running.
CMP.B2 (Speefam CMP_V ) - RUNNING: Lot XD0371 M3 running through first 300
seconds.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
B lot JD0110
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
cmp.a1
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
Number of product lots in room:
------------------------------
7 LOTS
New specs/revs posted:
---------------------
|
| 71.16 | CMP C-SHIFT PD. 4/16/95 | FABSIX::E_DAWSON | | Sat Mar 16 1996 19:50 | 42 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - DOWN - WAITING PART ??
CMP.A2 (Strasbaugh 6DS-SP) - UP/ILDE
CMP.B1 (Speedfam CMP-V) -RUNNING-2 XD0396 ILD3 TM36 23W & JD0107 DC1035 11W
*WARNING* ONLY 4 HEADS POLISHING, PLEASE INSTALL
A NEW CARRIER AT NEXT MQC CHECK
CMP.B2 (Speedfam CMP-V) - DOWN/SCHED...PAD CHANGE/1045 WAFERS ON THE PAD.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Hot Lots coming:
------------------ ---------------
JD0116 DC1035 ILD2 24W SEE WORKSTREAM
XD0396 TM36 ILD3 23W
Hold Lots: 0 Lots in CMP: 6
--------- -----------
Down Equipment: New SPEC/TDCO:
-------------- -------------
CMP.A1...PART **** EDCO ***
NEXT TO SPEEDFAM PLEASE READ
MQC Monitors: Carriers:
------------- --------
5 1/2 BOXES SEE S.GRALEY'S PD.
MQC Mon. Used: 6
-------------
**** PLEASE NOTE:
DC1035 ILD2 WILL NOT ALIGN ON THICK.A5, PLEASE USE ILD1
RECEIPE TO MEASURE. THERE ARE CURRENTLY TWO DC1035 LOTS IN CMP.
|
| 71.17 | A-shift CMP passdown 3/18/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Mar 18 1996 19:17 | 76 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1/.b1/.a2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: semi-annual pm.
CMP.A2 (Strasbaugh 6DS-SP) - MQC: running mqcs.
CMP.B1 (Speedfam CMP-V) - RUNNING: YD0154 (m2).
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0389 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - SEMI-ANNUAL PM
CMP.A2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1 box of 12K monitor wafers (1 more coming).
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0134 - PMD - 24WFRS
XD0423 - PMD - 24WFRS
JD0124 - M3 - 21WFRS (ROCKET LOT)
XD0411 - M1 - 24WFRS
YD0150 - M2 - 23WFRS
XD0379 - M3 - 23WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 STRASBAUGH CARRIERS
8 SPEEDFAM CARRIERS
|
| 71.18 | 3/19/96 cmp b shift passdown | FABSIX::L_CEDRONE | | Tue Mar 19 1996 06:59 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 7 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN SEMI-ANNUAL
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING JD0137 PMD + JD0135 M2 (HOT)
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0127 M1 + JD0111
(After multible errors of carrier 4 not rotating it was taken off line.)
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0100 M3 TOUCH UP + JD0113 M2
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC DONE
Hot/B lots in area:
___________________
JD0135 M2 HOT LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
CMP.A1 SEMI-ANNUAL
Scrap lots:
----------
* NONE *
Hold Lots:
---------
XL0417 PMD-COULD NOT GET TO MEASURE ON UV1050
Monitor status:
---------------
1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
JD0123 M1
JD0108 M2
YD0154 M2
XD0389 M3
# of carriers for strasbaugh/speedfam:
-------------------------------------
4 spare carriers for CMP.B1/B2
1 full carriers for CMP.A1/.A2
0 PLATE FILMED AND SHIMED FOR CMP.A1/A2
|
| 71.19 | A-shift CMP passdown 3/19/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Mar 19 1996 19:35 | 80 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.a1/.b1/.b2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs after semi-annual pm.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0374 (m1).
CMP.B1 (Speedfam CMP-V) - MQC: running mqcs after pad change and rep work.
CMP.B2 (Speedfam CMP-V) - DOWN: sched down for pad change (1400+ wafers).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
PA1114 - BLOT - SPECIAL ENG LOT! CAN ONLY BE READ ON THICKNESS.A4 UNDER THE
CMP_MQC ACCOUNT. THE CABINET IS "SPECIAL", DRAWER IS THE LAST "200MM
MONITOR" AND FOLDER IS "49POINT METAL".
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
CMP.B1 - MQC
CMP.B2 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12k monitor wafers.
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0135 - M2 - 19WFRS
JD0137 - PMD- 24WFRS
JD0123 - M2 - 23WFRS
JD0111 - M2 - 9WFRS
JD0127 - M1 - 23WFRS
JD0113 - M2 - 21WFRS
JD0100 - M3 - 22WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 SPEEDFAM CARRIERS
0 STRASBAUGH CARRIERS
|
| 71.20 | CMP C-SHIFT PD. 3-20-96 | FABSIX::E_DAWSON | | Wed Mar 20 1996 19:33 | 34 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - DOWN...BROKEN WAFERS...2X
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP-V) - VERIFY-U...RUNNING BREAKIN
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area:
------------------
PA1114 ILD2 TM?...GOOD LUCK!
Scrap Lots:
-----------
3 WAFER PA114...ON CMP.B2
New SPEC/TDCO:
--------------
* PLEASE READ NEXT TO SPEEDFAM *
ONLY 8 LOTS OUT OF 14 ARE MESSURED.
MQC Monitors:
-------------
3.5 BOXES
MQC Mon. Used: 10
-------------
|
| 71.21 | 3/24/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Sun Mar 24 1996 07:15 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0144 PMD
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0393 M3
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
PA1114 B LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
XD0410 M3
JD0118 M2
XD0407 M2
XD0418 M1
XD0398 M2
PA1114 M2
# of carriers for strasbaugh/speedfam:
-------------------------------------
11 spare carriers for CMP.B1/B2
9 full carriers for CMP.A1/.A2
0 PLATE FILMED AND SHIMED FOR CMP.A1/A2
|
| 71.22 | CMP A SHIFT SUNDAY PASSDOWN | FABSIX::J_ROA | | Sun Mar 24 1996 19:31 | 84 |
|
-< A shift CMP passdown - day 03/24/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 50 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
9 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
11 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - IDLE/UP
CMP.A2 (Strasbaugh 6DS-SP) - UP:Running hot lot JD0149 PMD/1026
CMP.B1 (Speedfam CMP-V) - UP: Running lot XD0382. Lot XD0391 is been measured
on thickness.A5 and will need to be touched up inmediatetly after.
CMP.B2 (Speefam CMP_V ) - UP: Running hot lot JD0138 M3/1026 through second
polish.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
hot lot JD0138
hot lot JD0149
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
Number of product lots in room:
------------------------------
4 LOTS
New specs/revs posted:
---------------------
|
| 71.23 | MONDAY CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Mon Mar 25 1996 19:11 | 85 |
|
-< A shift CMP passdown - Monday 03/25/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 50 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
8 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
11 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - IDLE/UP : B lot XD0435 just finished touch-ups
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: Failed MQC's because of scratches.
CMP.B1 (Speedfam CMP-V) - MQC: Daily quality checks in progress.
CMP.B2 (Speefam CMP_V ) - DOWN: High wafer count. Needs new pad.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
( 6 lots shipped out of the area )
Hot/B lots in area:
__________________
B lot XD0435 almost finished.
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
NONE
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
XD0382 is on hold for Larry Camilletti
to perform step height measurements.
Monitor status:
--------------
Number of product lots in room:
------------------------------
LOTS
New specs/revs posted:
---------------------
|
| 71.24 | TUESDAY CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Tue Mar 26 1996 19:13 | 84 |
|
-< A shift CMP passdown - Tuesday 03/26/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 50 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
8 FULL CARRIERS BUILT ( STRASBAUGH )
------------------------------------------
11 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - UP: Running lot JD0145 Through first polish.
CMP.A2 (Strasbaugh 6DS-SP) - UP: Running hot lot JD0152
CMP.B1 (Speedfam CMP-V) - IDLE/UP:
CMP.B2 (Speefam CMP_V ) - UP: Final polishing lot XD0386
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
Hot lot JD0152
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
NONE
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
Number of product lots in room:
------------------------------
4 LOTS
New specs/revs posted:
---------------------
|
| 71.25 | 3/27/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Wed Mar 27 1996 07:34 | 74 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 26 cmp.a1/.b1/scrub
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING MQC
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING XM0413 M2
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0408 M1
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
* NONE *
Down Equipment:
--------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
JD0145 PMD 24W
JD0152 PMD 24W
JD0111A PMD 13W
JD0139 M1 22W
# of carriers for strasbaugh/speedfam:
-------------------------------------
11 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
2 PLATE FILMED AND SHIMED FOR CMP.A1/A2
|
| 71.26 | WEDNESDAY CMP A SHIFT PASS | FABSIX::J_ROA | | Wed Mar 27 1996 19:29 | 86 |
|
-< A shift CMP passdown - Wednesday 03/27/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 50 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
2 FULL CARRIERS BUILT ( STRASBAUGH ) AND 2 PLATES.
------------------------------------------
11 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - UP: Running JD0143
CMP.A2 (Strasbaugh 6DS-SP) - IDLE/UP:
CMP.B1 (Speedfam CMP-V) - IDLE/UP:
CMP.B2 (Speefam CMP_V ) - UP: Running lot JD0122 through first polish.
Lot XD0406 is been measured 100% on Thickness.A5. It will have to be touched-up.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
Hot lot JD0149 on thickness tool.
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
NONE
Down Equipment:
--------------
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
Number of product lots in room:
------------------------------
4 LOTS
New specs/revs posted:
---------------------
|
| 71.27 | CMP C-SHIFT PD. 3/29/96 | FABSIX::E_DAWSON | | Fri Mar 29 1996 19:46 | 33 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING-1 XL0427 ILD1 TM55 21W
RAN FOR 6 MIN/SCRUBBING. NEEDS 100%
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - DOWN-UNSHCED...CARRIER #5 ROTATION
CMP.B2 (Speedfam CMP-V) - RUNNING-1 JD0114 ILD3 DC1026 22W
100% ON THICK.A5
CMP-SCRUB.A1 (On-track scrubber) - DOWN/REPIAR...PLEASE CYCLE WAFERS AND
PERFORM MQC'S WHEN TOOL IS RELEASED
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area:
------------------
XD0435 B-LOT TM36 ILD1 24W..."NO TAG"
Lots in CMP: 7
-----------
"3 WITH NO TAGS'....ILD1
MQC Monitors:
-------------
3.5 BOXES
MQC Mon. Used: 0
-------------
|
| 71.28 | 3/31/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Sun Mar 31 1996 08:49 | 77 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 cmp.a1/.b1/scrub
BREAKIN WAFERS 65 misc
BROKEN PRODUCT WAFERS 1 B1 CRASHED LOT #XD0411 M2
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING XD0414 M2 + JD0155 PMD BOTH AT TOUCH UPS
CMP.B1 (Speedfam CMP-V) - UP MQC, CHANGED PAD AND CARRIERS 4 + 5 DO TO CRASH
1 PRODUCT WAFER WAS SCRAPED LOT #XD0411
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0431 M1 TOUCH UPS
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S PERFORMED
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S PERFORMED
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
--------------------
XL0433 PMD REACHED GOAL
XL0417A M1 REACHED GOAL
Down Equipment:
--------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
----------------------
JD0144 M1
XD0412 M2
XD0411 M2
XD0420 M2
XD0401 M3
# of carriers for strasbaugh/speedfam:
-------------------------------------
11 spare carriers for CMP.B1/B2
5 full carriers for CMP.A1/.A2
|
| 71.29 | A-shift CMP passdown 3/31/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Mar 31 1996 20:08 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 cmp.a1/.b2/.b1/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0118 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0416 (m2).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0139 - THK_ILD2_1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2� boxes of 12K monitor wafers
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0407 - M3 - 24WFRS
XL0433 - PMD - 24WFRS
JD0155 - PMD - 23WFRS
JD0150 - M2 - 23WFRS
XL0417A - M1 - 12WFRS
XD0431 - M1 - 23WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 SPEEDFAM CARRIERS
5 STRASBAUGH CARRIERS
|