| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 70.1 | 1/31/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Wed Jan 31 1996 07:01 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 13 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING MQC
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING JD0075 - TOUCH UP
CMP.B1 (Speedfam CMP-V) - UP RUNNING MQC
CMP.B2 (SPEEDFAM CMP-V) - DOWN, WAITING FOR MOTOR FOR INDEX TABLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
JD0076 24W NO TOLKEN
Down Equipment:
---------------
CMP.B2 - WAITNG FOR MOTOR FOR INDEX TABLE
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0374 ENG. STI LOT
Monitor status:
---------------
5 1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0363 23W PMD
XD0348 22W M1
JD0069 24W M1
# of carriers for strasbaugh/speedfam:
-------------------------------------
9 spare carriers for CMP.B1/B2
2 full carriers for CMP.A1/.A2
|
| 70.2 | CMP C-SHIFT PD. 2/1/96 | FABSIX::E_DAWSON | | Thu Feb 01 1996 19:32 | 27 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - DOWN...ROBOT SENSOR
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING-1 XL0365 TM55 PMD 23W
CMP.B1 (Speedfam CMP-V) - RUNNING-2 XD0355 ILD1 TM36 23W (NEEDS 100%)
YD0146 ILD2 TM36 22W (100% ON SCATTER)
CMP.B2 (Speedfam CMP-V) - DOWN...TABLE INDEXER/PART
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hold Lots: Lots in CMP: 5
--------- -----------
XL0313 TM55...100% P2
MQC Monitors: Carriers:
------------- --------
3.5 BOXES 4 - Strasbaugh
MQC Mon. Used: 6 2 - Strasbaugh Plates
------------- 10 - Speedfam
|
| 70.3 | CMP C-SHIFT PD.1/2/96 | FABSIX::E_DAWSON | | Fri Feb 02 1996 19:33 | 25 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING-1 XD0370 PMD TM36 22W
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING-1 XD0351 ILD2 TM36 23W
CMP.B1 (Speedfam CMP-V) - RUNNING-1 XL0346 TM55 ILD2 24W
CMP.B2 (Speedfam CMP-V) - DOWN...????
CMP-SCRUB.A1 (On-track scrubber) - RUNNING-1 XD0330 TM36 ILD3 21W
...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hold Lots: Lots in CMP:6
--------- -----------
MQC Monitors: Carriers:
------------- --------
3 BOXES 4 - Strasbaugh
MQC Mon. Used:16 3 - Strasbaugh Plates
------------- 11 - Speedfam
|
| 70.4 | CMP C-SHIFT PD. 2/3/96 | FABSIX::E_DAWSON | | Sat Feb 03 1996 19:02 | 34 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP-V) - RUNNING-1 B-LOT XD0352 TM36 ILD3 15W
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area:
------------------
B-LOT XD0352 TM36 ILD3 15W
B-LOT XDO340 TM36 ILD2 21W "NO T-TAG"
Static Lots:
-----------
XD0368 TM36 PMD 24W "NO T-TAG"
JD0038 DC1026 PMD 24W " "
Lots in CMP: 6
-----------
MQC Monitors: Carriers:
------------- --------
3 BOXES 4 - Strasbaugh
MQC Mon. Used: 1 2 - Strasbaugh Plates
------------- 12 - Speedfam
|
| 70.10 | 2/4/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Sun Feb 04 1996 07:22 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 3 cmp.a1/.b1/scrub
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0071, XD0368
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0078
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
XD0340 M2 B-LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
XD0340 M2 NO TOLKEN
XD0349 M2 NO TOLKEN
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
XD0358 M1 24W
JD0083 PMD 24W
# of carriers for strasbaugh/speedfam:
-------------------------------------
10 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
2 PLATES CMP.A1/.A2
|
| 70.5 | A-shift CMP passdown 2/4/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Feb 04 1996 19:17 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.a1/.a2/.b2/scrb
BREAKIN WAFERS 120 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0062 (m2).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0074 (m1).
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0349 (m2).
CMP.B2 (Speedfam CMP-V) - IDLE.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0340 - M2 (moving out)
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
* none *
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2.5 boxes of 12K monitors (2 more boxes on order)
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0340 - M2 - 21WFRS
JD0081 - PMD - 24WFRS
JD0071 - M1 - 24WFRS
XD0368 - PMD - 24WFRS
JD0078 - M1 - 23WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 SPEEDFAM CARRIERS
2 STRASBAUGH CARRIERS + 2 PLATES
|
| 70.6 | 2/5/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon Feb 05 1996 07:25 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 3 cmp.a1/.b1/scrub
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0071, XD0368
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0078
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
XD0340 M2 B-LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
XD0340 M2 NO TOLKEN
XD0349 M2 NO TOLKEN
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
XD0358 M1 24W
JD0083 PMD 24W
# of carriers for strasbaugh/speedfam:
-------------------------------------
10 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
2 PLATES CMP.A1/.A2
|
| 70.7 | A-shift passdown 2/05/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Feb 05 1996 19:38 | 83 |
|
*** special engineering request for all lots **
Please read the five wafers at incoming/outgoing thickness on a 9
site and a 5 site recipe (that will give you five readings at 9sites, 5 at
5sites). Send the mean and range of both the 9 site and 5 site (along with
lot#, level, and mask) to Eric Bodensieck (SUBPAC::BODENSIECK). That's all
five wafers, not just the average of the five. To get the five site recipe,
just edit the wafer map. I will show B-shift how to edit this.
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 cmp.a1/.b2/scrb
BREAKIN WAFERS 150 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0079 (M1)
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0070 (M3) HOT LOT
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0335 (M3)
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - DOWN: WEEKLY PM.
Hot/B lots in area:
__________________
JD0070 - M3 (HOT)
Hot lots coming to area:
-----------------------
JD0082 - UPP_PMD 1
Static Lots in area:
-------------------
XD0373 - 1.3DAYS (NO T-TAG)
Down Equipment:
--------------
CMP-SCRUB.A2 - WEEKLY PM
Scrap lots:
----------
* none *
Hold Lots:
---------
XL0314 - DONE POLISHING. ON HOLD FOR LCAM FOR COPIOUS P2 MEASUREMENTS.
Monitor status:
--------------
4.5 BOXES OF 12K MONITORS.
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0376 - PMD - 22WFRS
JD0063B - M2 - 11WFRS
XL0314 - M3 - 17WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
11 SPEEDFAM CARRIERS
2 STRASBAUGH CARRIERS + 2 PLATES
|
| 70.8 | 2/6/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Tue Feb 06 1996 07:17 | 80 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 1 cmp.a1/.b1/scrub
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0082
CMP.B2 (SPEEDFAM CMP-V) - UP IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
JD0082 PMD HOT-LOT
XD0369 M3 HOT-LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
XD0373 PMD NO TOLKEN
XL0377 PMD NO TOLKEN
XD0341 M3 REACHED GOAL
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0363 M1 WAITING TO BE COMBINED W/CHILD
XL0314 HOLD FOR LARRY CAM.
Monitor status:
---------------
4 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
JD0070 M3 23W
JD0079 M1 22W
XD0335 M3 23W
JD0066 M2 19W
# of carriers for strasbaugh/speedfam:
-------------------------------------
11 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
|
| 70.9 | A-shift CMP passdown 2/06/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Feb 06 1996 19:35 | 83 |
| ** note ** If the thickness tools are sitting idle, please measure some of
Frank Krupa's wafers that are sitting on the tall rack between the two
phones. They are blanket oxide wafers and should be measured on the same
recipe you measure mqc wafers on. After wafers are done measuring, please
place a sticker on the box that says "PREMEASURED ON THICKNESS.A4/.A5 - DO
NOT USE!".
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 cmp.b1/.b2/.a1/scrb
BREAKIN WAFERS 150 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0357 (PMD).
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: ROBOT/SOFTWARE UPGRADE.
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0341 (M3) and XD0345 (M2). mqcs
completed.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0065 (M2).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
1
Down Equipment:
--------------
CMP.A2 - ROBOT/SOFTWARE UPGRADES
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0363 - WAITING TO RECOMBINE WITH CHILD LOT
Monitor status:
--------------
4.5 boxes of 12K monitors
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0082 - PMD - 24WFRS
XD0373 - PMD - 24WFRS
XD0369 - M3 - 23WFRS
XL0377 - PMD - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
11 CARRIERS FOR SPEEDFAM
2 CARRIERS FOR STRASBAUGH + 1 PLATE
|
| 70.11 | CMP C-SHIFT PD. 2/8/96 | FABSIX::E_DAWSON | | Thu Feb 08 1996 19:18 | 28 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/ROBOT
CMP.B1 (Speedfam CMP-V) - DOWN/MODIFY...?
CMP.B2 (Speedfam CMP-V) - MQC...2ND SET
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Static Lots:
-----------
JD0085 DC1026 PMD 24W "NO T TAG"
XD0360 TM36 ILD2 24W "NO TOOL"
Lots in CMP: 8
-----------
MQC Monitors: Carriers:
------------- --------
3 BOXES 4 - Strasbaugh
MQC Mon. Used: 16 1 - Strasbaugh Plates
------------- 6 - Speedfam
|
| 70.12 | 2/11/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Sun Feb 11 1996 07:31 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp.a1/.b1/scrub
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0077 M1
CMP.A2 (Strasbaugh 6DS-SP) - DOWN MQC
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0073 + XD0362 FOR TOUCH UP
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
XD0371 PMD NO TOLKEN
JD0091 PMD NO TOLKEN
JD0071 M2 NO TOLKEN
Down Equipment:
---------------
CMP.A2 - DOWN, MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
XD0351 M3 23W
# of carriers for strasbaugh/speedfam:
-------------------------------------
10 spare carriers for CMP.B1/B2
2 full carriers for CMP.A1/.A2
1 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 70.13 | A-shift CMP passdown 2/11/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Feb 11 1996 19:21 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 12 cmp.b1/.b2/scrb
BREAKIN WAFERS 200 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0091 (pmd)
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0370 (m1)
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0349 (M3) and JD0071 (M2)
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0348 (M2)
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0364 - SPECIAL "ONE PASS" LOT. SEE REMARKS.
Down Equipment:
--------------
* none *
Scrap lots:
----------
XD0362 - POSSIBLE SCRAP DUE TO OVERPOLISH. ENG/PRODUCTION WILL HASH IT OUT
TOMORROW.
Hold Lots:
---------
XD0362 - HOLD FOR ENG EVAL.
Monitor status:
--------------
1 box of 12K monitors (2 more on order)
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0077 - M1 - 24WFRS
XD0371 - PMD - 24WFRS
JD0073 - M2 - 24WFRS
XD0362 - M1 - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
11 CARRIERS FOR SPEEDFAM
2 STRASBAUGH CARRIERS + 1 PLATE
|
| 70.14 | 2/13/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Tue Feb 13 1996 06:55 | 76 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 4 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0062 + JD0087 (HOT) BOTH AT TOUCH UP
CMP.B2 (SPEEDFAM CMP-V) - SCHED. DOWN
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
JD0087 HOT LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
JD0097 PMD NO TOLKEN
XD0380 PMD NO TOLKEN
JD0078 M2 NO TOLKEN
Down Equipment:
---------------
CMP.B2 - SCHED. DOWN
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
4 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
0 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 70.15 | A-shift CMP passdown for 2/12/96...notesfile down yesterday | SUBPAC::SADIN | Freedom isn't free. | Tue Feb 13 1996 10:45 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 cmp.a1/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0076 (m1)
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0080 (m1 touchup)
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0082 (m2 touchup) and JD0062 (m3)
CMP.B2 (Speedfam CMP-V) - SCHED_DOWN: down for next 3 days for scheduled
work.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0082 - M2
Hot lots coming to area:
-----------------------
JD0087 - ILD1-1
XD0388(BLOT)- UPP_PMD1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B2 - SCHED DOWN
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K wafers. 2 more on order (Novellus dep system is down)
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0096 - pmd - 24wfrs
JD0072 - m2 - 24wfrs
XD0364 - m1 - 24wfrs
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 speedfam carriers built, 5 waiting to be built
4 strasbaugh carriers built
|
| 70.16 | A-shift CMP passdown 2/13/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Feb 13 1996 19:18 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 cmp.a1/.a2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - SCHED_DOWN: pad change after monthly pm.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0078 (M2).
CMP.B1 (Speedfam CMP-V) - REPAIR: reps repairing scrubber.
CMP.B2 (Speedfam CMP-V) - SCHED_DOWN: reps/eng working to optimize tool.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0345 (B)
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0097 - 1.4 NO TOKIN
XD0380 - 1.0 NO TOKIN
Down Equipment:
--------------
CMP.A1 - PAD CHANGE AFTER MONTHLY PM
CMP.B1 - SCRUBBER FAILURE
CMP.B2 - SCHED_DOWN FOR ENG/REPS TO CALIBRATE/OPTIMIZE TOOL
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of mqc wafers. More ordered but Novellus is holding them up.
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0062 - M3 - 21WFRS
JD0087 - M1 - 23WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 COMPLETE CARRIERS FOR SPEEDFAM
4 COMPLETE CARRIERS AND 2 PLATES SHIMMED AND FILMED
|
| 70.17 | 2/14/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Wed Feb 14 1996 06:33 | 74 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 19 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0074 M2
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING XD0345 M3 B LOT
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0083 M1 + JD0066 M3
CMP.B2 (SPEEDFAM CMP-V) - SCHED. DOWN
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
XD0345 B-LOT
Hot lots coming to area:
------------------------
XD0388 B-LOT PMD
Static Lots in area:
-------------------
* NONE *
Down Equipment:
---------------
CMP.B2 - SCHED. DOWN
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
3 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
10 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
2 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 70.18 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Wed Feb 14 1996 18:48 | 86 |
|
-< A shift CMP passdown - Wednesday 02/14/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 75 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
4 FULL CARRIERS BUILT ( STRASBAUGH )PLUS 2 PLATES
------------------------------------------
10 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING :Final polishing lot XD0388
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: Lot XD0379 running through initial
polish. It will need 100% measurements on UV1050 after.
CMP.B1 (Speedfam CMP-V) - RUNNING: Lot XD0345 was measured and JD0066
need to be 100% measured. Both lots need to be touched up.
CMP.B2 (Speefam CMP_V ) - SCHED/DOWN: Reps working to improved tool
performance.
CMP-SCRUB.A1 (On-track scrubber) - DOWN: Wafer broke in the spin station.
Need to clean up station, run excersise wafers and do a particle check.
CMP-SCRUB.A2 (On-track scrubber) - DOWN: Top motor on inside brush to be
replaced to avoid anymore error messages.
Hot/B lots in area:
__________________
XD0345 AND XD0388
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
CMP.B2
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
1 boxe of 12K's
Number of product lots in room:
------------------------------
5 LOTS
New specs/revs posted:
---------------------
|
| 70.19 | CMP C-SHIFT PD. 2/15/96 | FABSIX::E_DAWSON | | Thu Feb 15 1996 19:28 | 28 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING-1 JD0081 DC1026 ILD1 24W
CMP.A2 (Strasbaugh 6DS-SP) - MQC
CMP.B1 (Speedfam CMP-V) - RUNNING-1 "HOT LOT" XD0365 ILD3 TM36 24W
CMP.B2 (Speedfam CMP-V) - MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: 1
------------------
XD0360 TM36 ILD3 24W
Lots in CMP: 4
-----------
MQC Monitors: Carriers:
------------- --------
1.5 BOXES 4 - Strasbaugh
MQC Mon. Used: 10 2 - Strasbaugh Plates
------------- 9 - Speedfam
|
| 70.20 | 2/18/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Sun Feb 18 1996 07:29 | 75 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 18 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING mqc
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING XD0371 and xd0389
CMP.B1 (Speedfam CMP-V) - UP RUNNING xd0363 hot, and jd0068 (M3)
CMP.B2 (SPEEDFAM CMP-V) - up mqc
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
XD0363 HOT LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* NONE *
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0397
YD0148
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
2 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
9 spare carriers for CMP.B1/B2
2 full carriers for CMP.A1/.A2
2 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 70.21 | A-shift CMP passdown 2/18/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Feb 18 1996 19:18 | 78 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.b1/.b2/.a1/scrb
BREAKIN WAFERS 150 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0084 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0387 (pmd transferred from CMP.A1)
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0075 (m2) and JD0068 (m3).
CMP.B2 (Speedfam CMP-V) - DOWN: wafers not seating properly on carriers.
(XL0354)
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0363 - HOT - MOVING OUT NOW
XD0403 - HOT - PMD
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0397 - STI LOT.
YD0148 - HOLD FOR ENG EVAL
Down Equipment:
--------------
CMP.B2 - WAFERS NOT SEATING PROPERLY ON CARRIERS.
Scrap lots:
----------
* none *
Hold Lots:
---------
YD0148 - HOLD FOR ENG EVAL.
XD0397 - STI LOT. ENG NEEDS TO RUN.
Monitor status:
--------------
3 FULL BOXES OF 12K MONITORS. APPROX 100 BREAKIN WAFERS AVAILABLE.
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0382 - PMD - 19WFRS
XD0387 - PMD - 24WFRS
XD0389 - PMD - 23WFRS
XD0371 - M1 - 24WFRS
XD0363 - M2 - 21WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 CARRIERS FOR SPEEDFAM (6 IN REBUILD ROOM, 1 IN CMP ROOM)
2 COMPLETE STRASBAUGH CARRIERS (+4 PLATES SHIMMED/FILMED)
|
| 70.22 | 2/19/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Mon Feb 19 1996 07:35 | 77 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.a1/.b1/scrub
BREAKIN WAFERS 150 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP MQC, RUNNING JD0084 (TOUCH UP)
CMP.A2 (Strasbaugh 6DS-SP) - UP MQC, RUNNING XD0370+XD0403 (TOUCH UP)
CMP.B1 (Speedfam CMP-V) - UP RUNNING XL0378
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XL0354
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* NONE *
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0397
YD0148
Monitor status:
---------------
1 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
JD0068 M3 19W
JD0075 M2 24W
XD0370 M2 19W
# of carriers for strasbaugh/speedfam:
-------------------------------------
9 spare carriers for CMP.B1/B2
2 full carriers for CMP.A1/.A2
0 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 70.23 | A-shift CMP passdown 2/19/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Feb 19 1996 19:16 | 84 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1/.a1/.a2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0085 (m1).
CMP.B1 (Speedfam CMP-V) - MQC: evaluating mqcs now after pad change.
CMP.B2 (Speedfam CMP-V) - DOWN: lost wafer earlier. Equip eng and speedfam
reps are working on tool.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0105 - DEP_PMD1
JD0083 - DEP ILD2-1
Static Lots in area:
-------------------
XL0354 - 1.3DAYS (WAITING FOR .B2 TO COME BACK UP)
YD0148 - 3.1DAYS (ON HOLD FOR ENG EVAL - LARRY CAMILLETTI)
Down Equipment:
--------------
CMP.B2 - LOST A WAFER. DOWN TO EQUIP ENG AND REPS.
CMP.B1 - MQC.
Scrap lots:
----------
* none *
Hold Lots:
---------
YD0148 - 3.1DAYS (ON HOLD FOR ENG EVAL - LARRY CAMILLETTI)
JD0084 - ON HOLD FOR HIGH RANGE. PSS IS AWARE OF THIS LOT.
Monitor status:
--------------
1.5 BOXES OF 12K MONITOR WAFERS.
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
** SPEC CHANGE COMING SOON TO A SPEC NEAR YOU! **
The Strasbaugh spec will be edited to reflect the fact that we no
longer need to do a double scrub on product lots before they leave the
room. In the mean time, the Strasbaugh spec still DOES say to do a double
scrub. In order to comply with the current on-line spec, ALL LOTS RUN ON
THE STRASBAUGH TOOLS STILL NEED TO BE DOUBLE SCRUBBED. As soon as we get an
ECO or the spec gets changed, we can stop double-scrubbing Strasbaugh lots.
Lots/wafers processed:
---------------------
JD0098 - PMD - 12WFRS
XD0403 - PMD - 24WFRS
XL0378 - M1 - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM CARRIERS (6 IN THE REBUILD ROOM - 1 OVER HERE)
2 STRASBAUGH CARRIERS + 2 PLATES
|
| 70.24 | 2/20/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Tue Feb 20 1996 07:21 | 79 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 21 cmp.a1/.b1/scrub
BREAKIN WAFERS 350 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0077 + JD0105 (HOT)
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING XL0365
CMP.B1 (Speedfam CMP-V) - UP BREAK IN, MQC
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0073 + JD0083 (HOT)
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
JD0105 HOT LOT
JD0083 HOT LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* NONE *
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0397
YD0148
Monitor status:
---------------
1 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
JD0085 M1 24W
JD0102 PMD 24W
JD0088 M1 24W
XL0354 M3 19W
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
2 full carriers for CMP.A1/.A2
2 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 70.25 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Tue Feb 20 1996 20:18 | 88 |
|
-< A shift CMP passdown - Tuesday 02/20/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 75 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
2 FULL CARRIERS BUILT ( STRASBAUGH )PLUS 2 PLATES
------------------------------------------
5 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING : JD0103 AND XL0365
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: FAILED MQC'S TWICE AFTER PAD CHANGE.
LOT JD0077 WAS RUNNING ON THIS TOOL BEFORE IT WENT DOWN. LOT IS BEEN MEASURED
100% ON THICKNESS.A5
CMP.B1 (Speedfam CMP-V) - MQC: FAILED MQC'S MANY TIMES FOR UNIFORMITY AND
SCRATCHES. NEW PAD INSTALLED AND BROKEN IN. MQC WAFERS RAN AND NEED TO
BE EVALUTED.
CMP.B2 (Speefam CMP_V ) - RUNNING: LOTS JD0073 AND JD0083 WERE MEASURED AND
ARE READY TO BE TOUCHED UP
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
YD0147 - JD0083
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
CMP.A2
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
Number of product lots in room:
------------------------------
9 LOTS
New specs/revs posted:
---------------------
|
| 70.26 | CMP C-SHIFT PD. 2/22/96 | FABSIX::E_DAWSON | | Thu Feb 22 1996 19:18 | 37 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING-1 YD0147 TM36 ILD1 24W
WILL NEED A PAD CHANGE...
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING-1 **HOT LOT** XD0403 TM36 ILD1 24W 12
WILL NEED A PAD CHANGE...
CMP.B1 (Speedfam CMP-V) - RUNNING-1 JD0071 DC1026 ILD3 24W
WILL NEED MQC'S
CMP.B2 (Speedfam CMP-V) - RUNNING-1 YD0150 TM36 24W
MQC'S DONE @ 6:00PM
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot Lots:
---------
XD0403 TM36 ILD1 24W...CMP.A2
Scrap Wafers:
-------------
"1 WAFER WILL BE" XD0403 OVERPOLISHED
Lots in CMP: 5
------------
MQC Monitors: Carriers:
------------- --------
1 BOX, 4 ORDERED 5 - Strasbaugh
3 - Strasbaugh Plates
MQC Mon. Used: 35 9 - Speedfam
-------------
|
| 70.27 | 2/25/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Sun Feb 25 1996 07:44 | 78 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 1 cmp.a1/.b1/scrub
BREAKIN WAFERS 25 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE (Eng. pad do not run any qual. lots)
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0097 (Is going to need a pad change)
(Two carriers also need to be changed)
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0379
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
XD0373 B LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* NONE *
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
XD0391 24W
XD0144 24W
XD0362 23W
XD0388 24W
# of carriers for strasbaugh/speedfam:
-------------------------------------
11 spare carriers for CMP.B1/B2
5 full carriers for CMP.A1/.A2
4 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 70.28 | A-shift CMP passdown 02/25/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Feb 25 1996 19:02 | 76 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 cmp.b1/.b2/scrb/.a1/.a2
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0073 (M3).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0373 (M2).
CMP.B1 (Speedfam CMP-V) - VERIFY-S: finishing up mqcs after pad change
(carrier 4 and 5 changed also).
CMP.B2 (Speedfam CMP-V) - VERIFY-U: running breakin wafers after 2nd table
crash.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0373 - BLOT - M2
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0107 - 0.8DAYS (NO TOKIN)
XL0385A - 2.5DAYS (NO TOKIN)
Down Equipment:
--------------
CMP.B1 - VERIFY-S - FINISHING MQCS
CMP.B2 - VERIFY-U - RUNNING BREAKINS
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2.5 boxes of 12K monitor wafers.
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0097 - M1 - 23WFRS
XD0379 - M1 - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM CARRIERS
5 STRASBAUGH CARRIERS
4 PLATES SHIMMED/FILMED FOR STRASBAUGH
|
| 70.29 | A-shift CMP passdown 02/26/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Feb 26 1996 19:15 | 72 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 14 cmp.b1/.b2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0072 (M3).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0105 (M2 - HOT) and JD0074 (M3).
CMP.B2 (Speedfam CMP-V) - RUNNING: YD0137 (M3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0105 - HOT
JD0106 - HOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
1
Down Equipment:
--------------
jd0074 1.1days
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K monitors
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
YD0151 - M1 - 24WFRS
JD0107 - PMD - 12WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
7 SPEEDFAM CARRIERS (NO PLATES)
5 STRASBAUGH CARRIES + 4 PLATES
|
| 70.30 | 2/27/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Tue Feb 27 1996 07:48 | 78 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 0 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP running (hot) jd0117
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING XD0395 (WAITING FOR PROMETRICS TO BE FIXED)
CMP.B1 (Speedfam CMP-V) - UP BREAKIN + MQC (COULD NOT MEASURE MQC WAFERS PROMETRIC
LOCKED UP)
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0379
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
JD0117 HOT LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* NONE *
Down Equipment:
---------------
CMP.B1 + .B2 PAD AND CARRIER CHANGE
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
JD0105 M2
JD0074 M3
JD0106 PMD
JD0072 M3
YD0137 M3
# of carriers for strasbaugh/speedfam:
-------------------------------------
3 spare carriers for CMP.B1/B2
3 full carriers for CMP.A1/.A2
1 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 70.31 | A-shift CMP passdown 02/27/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Feb 27 1996 19:27 | 80 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 35 cmp.b1/.b2/.a1/.a2
BREAKIN WAFERS 150 misc
CMP.A1 (Strasbaugh 6DS-SP) - IDLE. Just passed mqcs with new pad.
CMP.A2 (Strasbaugh 6DS-SP) - VERIFY-S: pad and carriers changed. Needs
breakin and mqcs.
CMP.B1 (Speedfam CMP-V) - MQC: running mqcs now. (Mapper for cassette A and
B are not working properly. We can only use cassette A and we need to
manually pick the slots with wafers in them. We cannot automatically map in
wafers. New parts are on order).
CMP.B2 (Speedfam CMP-V) - RUNNING2: XD0364 (m2) and XD0403 (m2 - hot).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0403 - M2 HOT
Hot lots coming to area:
-----------------------
JD0085 - ILD2-1
Static Lots in area:
-------------------
XD0381 - M1 - 0.8DAYS
XD0364 - M2 - 0.7DAYS
PA1114 - PMD - 1.7DAYS
XD0404 - PMD - 0.7DAYS
Down Equipment:
--------------
CMP.A1 - DOWN FOR PAD CHANGE
CMP.A2 - VERIFY - PADS/CARRIERS CHANGED. NEEDS BREAKIN/MQC.
CMP.B1 - MQC - RUNNING MQCS NOW.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
� box of 12K monitors left, 2 more boxes ordered today.
Number of product lots in room:
------------------------------
12
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0117 - PMD - 23WFRS
XD0395 - PMD - 23WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 SPEEDFAM CARRIERS (6 NEW PLATES IN THE ROOM)
4 STRASBAUGH CARRIERS + 3 PLATES
|
| 70.32 | 2/28/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Wed Feb 28 1996 07:27 | 74 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 16 cmp.a1/.b1/scrub
BREAKIN WAFERS 98 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0099 M1 + JD0076 M2
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING JD0113 PMD + XD0404 PMD
CMP.B1 (Speedfam CMP-V) - UP RUNNING JD0376 M2 + JD0079 M3
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING JD0078 M3 + XD0358 M3
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* NONE *
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
3 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
4 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|
| 70.33 | | FABSIX::J_ROA | | Wed Feb 28 1996 18:55 | 86 |
|
-< A shift CMP passdown - Wednesday 02/28/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 75 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
4 FULL CARRIERS BUILT ( STRASBAUGH )PLUS 2 PLATES
------------------------------------------
6 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: Lot JD0076 ran for 6 minutes so far.
JD0099 needs touch ups.
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE:
CMP.B1 (Speedfam CMP-V) - RUNNING: Final polishing lot JD0079. Lot JD0078
still needs to to touched up.
CMP.B2 (Speefam CMP_V ) - DOWN: High uniformity/range. Tool needs new pad
and some carriers. Head #3 is the worse.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE:
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE:
Hot/B lots in area:
__________________
B lot JD0085
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Down Equipment:
--------------
CMP.B2
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
Number of product lots in room:
------------------------------
8 LOTS
New specs/revs posted:
---------------------
|
| 70.34 | CMP C-SHIFT PD. 3/2/96 | FABSIX::E_DAWSON | | Sat Mar 02 1996 19:27 | 33 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING TUP ON JD0081 ILD2 WILL NEED SCRUB
& FINAL MESSURMENT
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING 1- XD0396 RUNNING 9 MINS, NEEDS SCRUB
&100%
CMP.B1 (Speedfam CMP-V) - MQC
CMP.B2 (Speedfam CMP-V) - UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
B lots in area:
--------------
XD0396 ILD1
Static Lots:
-----------
SEE WORKSTREAM
Lots in CMP:7
-----------
MQC Monitors: Carriers:
------------- --------
2.5 BOXES SEE S.GRALEY PD.
MQC Mon. Used:16
-------------
|
| 70.35 | 3/3/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Sun Mar 03 1996 08:02 | 74 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 4 cmp.a1/.b1/scrub
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING XD0407 PMD
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING YD0140M3 (TOUCH UP) + XD0370 M3
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0371 + XL0370 BOTH M2
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* NONE *
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* NONE *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
1 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
--------------------
4 LOTS
# of carriers for strasbaugh/speedfam:
-------------------------------------
7 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
4 PLATE FILMED AND SHIMED FOR CMP.A1/.A2
|