| T.R | Title | User | Personal
Name | Date | Lines |
|---|
| 69.1 | A shift CMP passdown 1/2/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Jan 02 1996 19:18 | 78 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 26 cmp.b1/.b2./.a2/.a1
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - VERIFY-U: needs new carriers/pad and mqcs.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: running XD0319 (m3).
CMP.B1 (Speedfam CMP-V) - DOWN: wafer breakage. Has a new pad and we
managed to salvage 3 carriers. There is one carrier in the rebuild room
that we can bring over to bring us up to four carriers on B1. We have no
more plates.
CMP.B2 (Speedfam CMP-V) - RUNNING: running XL0320 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XL0320 - B-lot
XL0338 - HOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
10
Down Equipment:
--------------
CMP.B1 - BROKEN WAFER
CMP.A1 - VERIFY-U
Scrap lots:
----------
* none *
Hold Lots:
---------
JD0046 - NEEDS 100% UV-1050
Monitor status:
--------------
1 box of 12K monitors
Number of product lots in room:
------------------------------
16
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0343 - M1 - 15WFRS
JD0044 - M3 - 11WFRS
XD0325 - M2 - 20WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
4 COMPLETE STRASBAUGH CARRIERS
3 STRASBAUGH PLATES FILMED (ONE WITH HOLES DRILLED)
0 EXTRA CARRIERS FOR SPEEDFAM (NO PLATES - MORE ON ORDER)
|
| 69.2 | A shift CMP passdown 1/3/96 | SUBPAC::SADIN | Freedom isn't free. | Wed Jan 03 1996 18:37 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 23 cmp.a1/.b1/.a2/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0323 (m3) JD0056 (m1).
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0054 (m1).
CMP.B1 (Speedfam CMP-V) - DOWN: carrier plates had 10+micron curvature
resulting in center slow polish (even with 155 OD setting). No carriers
in-house. More plates should be in tomorrow.
CMP.B2 (Speedfam CMP-V) - DOWN: down for vibration problems.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XL0320 - M3 - BLOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
6
Down Equipment:
--------------
CMP.B1 - NO CARRIERS
CMP.B2 - VIBRATION
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K monitor wafers (2 more boxes on order)
Number of product lots in room:
------------------------------
16
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0052 - M1 - 12WFRS
JD0053 - M1 - 12WFRS
JD0054 - M1 - 12WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
2 complete strasbaugh carriers + 3 plates filmed/shimmed
0 speedfam plates/carriers
|
| 69.3 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Thu Jan 04 1996 07:55 | 56 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING LOT XL0313
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING LOT JD0054
CMP.B1 (Speedfam CMP-V) - DOWN WAITING FOR PLATES WAS RUNNING XLO311,XL0320
CMP.B2 (Speedfam CMP_V) - DOWN WAITING FOR PLATES
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
HOT/B lots in area:
-------------------
B lot # XL0320
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:16 TOTAL LOTS IN AREA
--------------------
DOWN equipment:CMP.B1, CMP.B2
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 0 COMPLETE
STRAUSBAUGH COMPLETE 5 COMPLETE
HOLD LOTS:
----------
NONE
MONITOR status:
---------------
NUMBER of product lots in room: 12
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 69.4 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri Jan 05 1996 07:37 | 56 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING LOT YD0138
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - DOWN WAITING FOR PLATES
CMP.B2 (Speedfam CMP_V) - UP/IDLE ONLY USEING 3 CARRIERS JD0033,XD0315(BLOT)
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
HOT/B lots in area:
-------------------
B lot # XD0315
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:13 LOTS IN AREA
--------------------
DOWN equipment:CMP.B1
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 0 COMPLETE
STRAUSBAUGH COMPLETE 5 COMPLETE
HOLD LOTS:
----------
NONE
MONITOR status:
---------------
NUMBER of product lots in room: 13
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 69.5 | CMP C-SHIFT PD. 1/5/96 | FABSIX::E_DAWSON | | Sat Jan 06 1996 18:56 | 45 |
| <<< ASDG::DISK$SYS_DATA:[NOTES$LIBRARY]CMP.NOTE;1 >>>
-< CMP >-
================================================================================
Note 70.0 CMP C-SHIFT PD. 1/5/96 No replies
FABSIX::E_DAWSON 39 lines 5-JAN-1996 19:40
--------------------------------------------------------------------------------
CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING - XD0326 TM36 ILD2 24 Wafers
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING - XD0336 TM36 PMD 23 Wafers
CMP.B1 (Speedfam CMP-V) - DOWN....Carriers are being built.
CMP.B2 (Speedfam CMP-V) - RUNNING - JD0035 DC1026 ILD3 11 Wafers
CMP-SCRUB.A1 (On-track scrubber) - RUNNING XD0309 TM36 ILD3 24 Wafers
...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Hot Lots coming:
------------------ ---------------
XD0343 TM36 ILD2 15 Wafers
JD0058 DC1026 ILD2 23 Wafers
Static Lots: Scrap Lots:
----------- ----------
Hold Lots: Lots in CMP: 13
--------- -----------
Down Equipment: New SPEC/TDCO:
-------------- -------------
CMP.B1
MQC Monitors: Carriers:
------------- --------
4 Boxes 1 - Strasbaugh
MQC Mon. Used: 26 2 - Strasbaugh Plates
------------- 3 - Speedfam
*** Four boxes of "EXERCISE" wafers were order today. ***
|
| 69.6 | CMP C-SHIFT PD. 1/6/95 | FABSIX::E_DAWSON | | Sat Jan 06 1996 19:32 | 41 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING - XL0289 TM55 ILD2 23W
CMP.A2 (Strasbaugh 6DS-SP) - MQC
CMP.B1 (Speedfam CMP-V) - UP/IDLE....Needs Breakin & Mqc
CMP.B2 (Speedfam CMP-V) - UP/IDLE....Mqc peformed 6:00pm
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Hot Lots coming:
------------------ ---------------
Static Lots: Scrap Lots: 1 Wafer
----------- ----------
XL0338 TM55 ILD3
Hold Lots: 2 Lots in CMP: 5
--------- -----------
YD0141 TM36 ILD1 24W
XL0328 TM55 17W "STORES"
Down Equipment: New SPEC/TDCO:
-------------- -------------
MQC Monitors: Carriers:
------------- --------
2.5 Boxes 3 - Strasbaugh
2 - Strasbaugh Plates
MQC Mon. Used:16 5 - Speedfam
-------------
*** FOUR MORE BOXES OF MQC WAFERS WERE ORDERED ***
*** FOUR MORE BOXES OF EXERCISE WAFERS WERE ORDERED. "PLEASE DO NOT USE
THESE FOR MQC'S THEY ARE INTERNAL RECLAIM WAFERS. (ie. HIGH PART.)
|
| 69.7 | A shift CMP passdown 1/08/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Jan 08 1996 19:20 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 cmp.b1/scrubbers
BREAKIN WAFERS 75 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING1: XD0343 (M3 hot lot).
CMP.A2 (Strasbaugh 6DS-SP) - IDLE.
CMP.B1 (Speedfam CMP-V) - VERIFY: 1st set of mqcs failed. Increase OD to
155 and try again. Still not running carrier 3.
CMP.B2 (Speedfam CMP-V) - DOWN: wafer loss detector problems.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0343 - M3 HOT LOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B1 - VERIFY - NEEDS ANOTHER SET OF MQCS RUN. 1ST SET CENTER SLOW.
CMP.B2 - DOWN - WAFER LOSS SENSOR PROBLEMS.
Scrap lots:
----------
* none *
Hold Lots:
---------
XL0328 - NEEDS TO BE SPLIT BETWEEN CMP.B1 AND CMP.B2. NEITHER MACHINE UP.
Monitor status:
--------------
3 BOXES OF 12K MONITORS.
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
YD0142 - M1 - 24WFRS
YD0141 - M1 - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
0 CARRIERS FOR SPEEDFAM (I don't think the shipment of plates made it today)
1 CARRIER FOR STRASBAUGH
|
| 69.8 | A shift CMP passdown 1/09/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Jan 09 1996 19:14 | 76 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.a1/.b1/.b2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0344 (pmd - hot).
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: needs new pad.
CMP.B1 (Speedfam CMP-V) - DOWN: down for scratches again.
CMP.B2 (Speedfam CMP-V) - RUNNING: running split lot XL0328 (CMP.B2
portion). DON'T USE MACHINE FOR REGULAR PRODUCT LOTS UNLESS YOU HAVE NO
OTHER MACHINES UP AND RUNNING. Wafer loss detection is still off-line.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0344 - PMD/HOT
Hot lots coming to area:
-----------------------
JD0061 - PMD
JD0058 - M3
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - PAD CHANGE
CMP.B1 - SCRATCHES
CMP.B2 - UP FOR SPLIT LOT BUT DON'T USE FOR PRODUCTION UNLESS ABSOLUTELY
NECESSARY.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12k monitors
Number of product lots in room:
------------------------------
1
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
* none *
# of carriers for strasbaugh/speedfam:
--------------------------------------
8 speedfam carries
2 complete strasbaugh carriers + 2 plates shimmed/filmed
|
| 69.9 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Wed Jan 10 1996 06:40 | 55 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IN VERIFY AFTER PM (NEED MQC)
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP_V) - UP/IDLE ONLY USE IF ALL OTHER MACHINES DOWN!
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:
--------------------
DOWN equipment:CMP.
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 2 COMPLETE
STRAUSBAUGH COMPLETE 8 COMPLETE
HOLD LOTS:
----------
XL0328
MONITOR status:
---------------
NUMBER of product lots in room:0
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 69.10 | CMP C-SHIFT PD. 1/10/96 | FABSIX::E_DAWSON | | Wed Jan 10 1996 19:33 | 32 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE....Needs mqc's
CMP.A2 (Strasbaugh 6DS-SP) - VERIFY-S...Needs Pad & Carriers
CMP.B1 (Speedfam CMP-V) - DOWN...Scratches....Running pad breakin
CMP.B2 (Speedfam CMP-V) - VERIFY-U....Running full mqc's
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Hot Lots coming:
------------------ ---------------
JD0058 ILD3 DC1026 23W (CMP.B1)
Hold Lots: Lots in CMP: 2
--------- -----------
XL0314 "STORES"
XL0328 " "
MQC Monitors: Carriers:
------------- --------
5 BOXES 3 - Strasbaugh
4 - Strasbaugh Plates
MQC Mon. Used: 22 8 - Speedfam
-------------
*** Four boxes of exercise wafers were ordered. ***
|
| 69.11 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Thu Jan 11 1996 07:26 | 55 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/running JD0051
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/IN VERIFY
CMP.B1 (Speedfam CMP-V) - DOWN FOR SCRATCHES
CMP.B2 (Speedfam CMP_V) -DOWN/VERIFY
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC COMPLETE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC COMPLETE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:0
--------------------
DOWN equipment:CMP.B1 FOR SCRATCHES
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 6 COMPLETE
STRAUSBAUGH COMPLETE 3 COMPLETE
HOLD LOTS:
----------
MONITOR status:
---------------
NUMBER of product lots in room:3
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 69.12 | CMP C-SHIFT PD. 1/11/95 | FABSIX::E_DAWSON | | Thu Jan 11 1996 19:42 | 33 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - JD0052 DC1026 ILD2 12W
CMP.A2 (Strasbaugh 6DS-SP) - VERIFY-S...WAITING FOR PAD.
CMP.B1 (Speedfam CMP-V) - DOWN...SCRATHES
CMP.B2 (Speedfam CMP-V) - VERIFY-U...RUNNING MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Static Lots:
-----------
XD0332 TM36 ILD3 23W .9 DAYS
Hold Lots: Lots in CMP: 7
--------- -----------
XL0328 "STORES"
MQC Monitors: Carriers:
------------- --------
2 BOXES 3 - Strasbaugh
MQC Mon. Used: 47 1 - Strasbaugh Plates
------------- 6 - Speedfam
*** SIX BOXES OF EXERCISE WAFERS WERE ORDERED. ***
*** FOUR BOXES OF MQC WAFERS WERE ALSO ORDERED. ***
|
| 69.13 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri Jan 12 1996 07:44 | 55 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/running JD0057 AND JD0055
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/IN VERIFY
CMP.B1 (Speedfam CMP-V) - DOWN FOR SCRATCHES
CMP.B2 (Speedfam CMP_V) -DOWN/ FAILED MQC'S FOR UNIFORMITY FROM
A 140 OD THRU 155 BY INCREMENTS OF 5 AS PER SPEC.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:6
--------------------
DOWN equipment:CMP.B1 FOR SCRATCHES/.B2 FOR UNIFORMITY/.A2 FOR PAD
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 6 COMPLETE
STRAUSBAUGH COMPLETE 3 COMPLETE
HOLD LOTS:
----------
MONITOR status:
---------------
NUMBER of product lots in room:3
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 69.14 | CMP C-SHIFT PD.1/12/95 | FABSIX::E_DAWSON | | Fri Jan 12 1996 19:42 | 31 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - MQC
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING 1...XL0333 TM55 ILD2 23W
CMP.B1 (Speedfam CMP-V) - VERIFY-U...NEEDS FULL BREAKIN AND MQC'S
CMP.B2 (Speedfam CMP-V) - RUNNING 1...JD0048 DC1026 ILD3 12W
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Static Lots: 2 Scrap Lots: 2 WAFERS
----------- ----------
JD0048 IDL3 DC1026 12W @OP#1989 XL0333 "LOW INCOMEING STEP"
JD0053 ILD2 DC1026 12W @OP#3068 WAFERS SCRAPED BY PE. EB
Hold Lots: 0 Lots in CMP: 8
--------- -----------
MQC Monitors: Carriers:
------------- --------
2 BOXES 3 - Strasbaugh
MQC Mon. Used: 18 2 - Strasbaugh Plates
------------- 2 - Speedfam
|
| 69.15 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Sat Jan 13 1996 07:32 | 52 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/running JD0053,XD0336
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/MQC IN PROGRESS
CMP.B1 (Speedfam CMP-V) - DOWN FOR SCRATCHES
CMP.B2 (Speedfam CMP-V)- UP/RUNNING JD0048, JD0061 HOT LOT
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area: 1
-------------------
JD0061
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:2
--------------------
HOLD LOTS IN AREA:2
__________________
DOWN equipment:CMP.B1 FOR SCRATCHES/A2 FOR MQC
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 6 COMPLETE
STRAUSBAUGH COMPLETE 2 COMPLETE
MONITOR status:
---------------
NUMBER of product lots in room:8
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 69.16 | CMP C-SHIFT PD. 1/13/95 | FABSIX::E_DAWSON | | Sat Jan 13 1996 19:48 | 31 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - UNSCH_DOWN...ROBOT SENSOR..SEE E.E.
CMP.A2 (Strasbaugh 6DS-SP) - UNSCH_DOWN....PAD CHANGE...MQC'S FAILED
CMP.B1 (Speedfam CMP-V) - UNSCH_DOWN....SCRATCHES...SEE E.E.
CMP.B2 (Speedfam CMP-V) - UNSCH_DOWN....HIGH PART & BAD UNF...NEEDS PAD
CHANGE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Static Lots: Scrap Lots:
----------- ----------
XD0336 TM36 ILD1 23W
Hold Lots: Lots in CMP: 3
--------- -----------
MQC Monitors: Carriers:
------------- --------
2 BOXES 0 - Strasbaugh
MQC Mon. Used: 17 2 - Strasbaugh Plates
------------- 6 - Speedfam
***** FOUR BOXES OF MQC AND FOUR BOXES OF EXERCISE WAFERS WERE ORDERS.
|
| 69.17 | B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Sun Jan 14 1996 06:08 | 74 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 39 cmp.a1/.b1/scrub
BREAKIN WAFERS 200 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN, ROBOT END EFFECTOR SENSOR
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING XD0317 AND XD0336
CMP.B1 (Speedfam CMP-V) - RUNNING MQC'S
CMP.B2 (SPEEDFAM CMP-V) - RUNNING MQC'S
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
__________________
XD0317 B LOT
Hot lots coming to area:
-----------------------
* NONE *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 DOWN, ROBOT END EFFECTOR SENSOR
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
--------------
1/2 BOX MQC WAFERS
Number of product lots in room:
------------------------------
5
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
* NONE *
# of carriers for strasbaugh/speedfam:
-------------------------------------
6 spare carriers for CMP.B1/B2
0 full carriers for CMP.A1/.A2
2 plates filmed for CMP.A1/.A2
|
| 69.18 | A-shift CMP passdown 1/14/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Jan 14 1996 18:45 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.b1/.b2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: needs full mqcs. Ask shift supervisor if
he wants to leave the machine down since it's being taken at 8am for
upgrades.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XL0347 and XD0336.
CMP.B1 (Speedfam CMP-V) - DOWN: scratches. Experimental pad is installed.
Do not run any product on this pad!
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0317.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0317 - BLOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
3
Down Equipment:
--------------
CMP.A1 - MQC - UPGRADES SCHEDULED FOR 8AM
CMP.B1 - DOWN - SCRATCHES
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K monitor wafers
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0054 - M2 - 12WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
6 SPEEDFAM CARRIERS
2 PLATES SHIMMED/FILMED FOR STRASBAUGH
|
| 69.19 | A-shift CMP passdown 1/15/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Jan 15 1996 19:07 | 77 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 35 cmp.b1/.a2/.b2/scrub
BREAKIN WAFERS 120 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: down for upgrades.
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: pad changed and mqcs run...evaluating
now.
CMP.B1 (Speedfam CMP-V) - DOWN: all spindles are being pulled apart due to
rust and metal particles found inside. System is down hard.
CMP.B2 (Speedfam CMP-V) - DOWN: down for scratches(!) and high particles.
Pad being pulled and machine being cleaned.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0350 PMD B-LOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - DOWN FOR UPGRADES
CMP.A2 - RUNNING MQCS
CMP.B1 - DOWN FOR RUST IN SPINDLES
CMP.B2 - DOWN FOR PAD CHANGE/CLEANING DUE TO HIGH PARTICLES/SCRATCHES
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K monitor wafers (2 more on order)
Number of product lots in room:
------------------------------
2
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
YD0144 - M1 - 24WFRS
XL0327 - M3 - 28WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 COMPLETE CARRIERS BUILT FOR STRASBAUGH (2 PLATES SHIMMED/FILMED ALSO)
6 COMPLETE CARRIERS BUILT FOR SPEEDFAM
|
| 69.20 | A-shift CMP passdown 1/16/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Jan 16 1996 19:26 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.b2/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: robot/software upgrades.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0326 (M3). Will need pad change
after lot is done.
CMP.B1 (Speedfam CMP-V) - DOWN: multihead torn apart, vacuum tank replaced,
etc, etc....see EE passdown in the ASDG::CMP notesfile for details.
CMP.B2 (Speedfam CMP-V) - DOWN: scratches look good on this run! Reading
mqc wafers for uniformity now. If uniformity is ok, the machine is up.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
JD0067 - UPP_PMD1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - UPGRADES
CMP.B1 - CLEANING/UPGRADES
CMP.B2 - SCRATCHES ISSUE LOOKS RESOLVED...WAITING ON UNIFORMITY RESULTS.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
1� boxes of 12K wafers (1 box coming)
Number of product lots in room:
------------------------------
3
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0356 - PMD - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
5 CARRIERS FOR STRASBAUGH
1 CARRIER FOR SPEEDFAM (10 PLATES DUE IN TOMORROW)
|
| 69.21 | A-shift CMP passdown 1/17/96 | SUBPAC::SADIN | Freedom isn't free. | Wed Jan 17 1996 19:08 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.b2/.a2/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN: verify. Upgrades done.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0061 (m2) and XL0339 (m1).
CMP.B1 (Speedfam CMP-V) - DOWN: upgrades and repairs.
CMP.B2 (Speedfam CMP-V) - DOWN: verify. running more mqcs.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0061 - M2
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
4
Down Equipment:
--------------
CMP.A1 - VERIFY - UP TO VERIFY AFTER UPGRADES.
CMP.B1 - DOWN - UPGRADES.
CMP.B2 - VERIFY - READING MQC WAFERS NOW.
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2.5 boxes of 12K monitors
Number of product lots in room:
------------------------------
10
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0067 - PMD - 24
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 COMPLETE CARRIERS FOR STRASBAUGH PLUS 4 PLATES SHIMMED/FILMED
1 CARRIER BUILD FOR SPEEDFAM (NO PLATES)
** all speedfam carries have had the gimble assembly removed and cleaned.
As soon as we get plates we can build the carriers.
|
| 69.22 | CMP C-SHIFT PD. 1/18/95 | FABSIX::E_DAWSON | | Thu Jan 18 1996 19:31 | 32 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - DOWN/REPAIR (XD0329 ILD1 TM36 22W)
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING-1 XD0335 ILD1 TM36 24W
CMP.B1 (Speedfam CMP-V) - DOWN/REPAIR
CMP.B2 (Speedfam CMP-V) - UP/RUNNING-2 XD0331 TM36 ILD3 10W
XD0302 TM36 ILD3 23W
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Static Lots: 0 Scrap Lots:
----------- ----------
1 WAFER XD0329
Hold Lots: 0 Lots in CMP: 8
--------- -----------
MQC Monitors: Carriers:
------------- --------
9 BOXES 3 - Strasbaugh
MQC Mon. Used: 1 4 - Strasbaugh Plates
------------- 7 - Speedfam
|
| 69.23 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri Jan 19 1996 07:33 | 56 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/running XD0329 WARNING POSTED! SYSTEM
ALARM FOR NO WAFER FOUND IN RIGHT UNLOAD CUP
SET OFF EVERY CYCLE. RESETS ON OWN.
CMP.A2 (Strasbaugh 6DS-SP) - UP/RUNNING XL0328
CMP.B1 (Speedfam CMP-V) - DOWN/ STILL AWAITING REPAIR
CMP.B2 (Speedfam CMP-V)- UP/RUNNING MQC LOTS XD0322,XD0302 CARRIER THREE OFF
LINE. WARNING POSTED FOR B2; ERROR "CARRIER ONE NOT
ROTATEING" ACTIVATEING EVERY CYCLE.
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:2
--------------------
HOLD LOTS IN AREA:1
__________________
DOWN equipment:CMP.B1 DOWN AWAITING REPAIR
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 6 COMPLETE
STRAUSBAUGH COMPLETE 4 COMPLETE
MONITOR status:
---------------
NUMBER of product lots in room:8
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 69.24 | CMP C-SHIFT PD. 1/19/96 | FABSIX::E_DAWSON | | Fri Jan 19 1996 19:29 | 36 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING-2 *B-LOT XD0352 TM36 PMD 19W*
XD0329 TM36 ILD1 22W
CMP.A2 (Strasbaugh 6DS-SP) - MQC - RUNNING FULL BREAKIN AND MQC'S
CMP.B1 (Speedfam CMP-V) - DOWN/REPAIR
CMP.B2 (Speedfam CMP-V) - RUNNING-1 LOT XD0302 TM36 M3 20W
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Hot Lots coming:
------------------ ---------------
XD0352 TM36 PMD 19W
Static Lots: Scrap Lots:
----------- ----------
XD0329 TM36 ILD1 22W
XD0322 TM36 ILD3 20W
Hold Lots: Lots in CMP: 7
--------- -----------
MQC Monitors: Carriers:
------------- --------
11 BOXES 2 - Strasbaugh
MQC Mon. Used: 9 3 - Strasbaugh Plates
------------- 4 - Speedfam
|
| 69.25 | CMP C-SHIFT PD. 1/20/96 | FABSIX::E_DAWSON | | Sat Jan 20 1996 19:38 | 37 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - MQC...(LOT JD0062 DC1026 PMD 21W)
(B-LOT XD0358 TM36 ILD1 24W )
CMP.A2 (Strasbaugh 6DS-SP) - DOWN..PAD & CARRIER CHANGE
CMP.B1 (Speedfam CMP-V) - DOWN/REPAIR...WAFERS CYCLED, B2 NEEDS PANELS
INSTALLED, MORE BREAKIN WAFERS & MQC'S.
CMP.B2 (Speedfam CMP-V) - UP/IDLE...CARRIER #3 NEEDS TO BE INSTALLED & FULL
MQC'S
SPEEDFAMS BEEPER IF ANY ???? 1-800-796-7363 PIN# 1033751
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Hot Lots coming:
------------------ ---------------
XD0350 TM36 ILD1 24W
Hold Lots: Lots in CMP: 5
--------- -----------
XL0313 TM55 ILD2 22W "STORES"
MQC Monitors: Carriers:
------------- --------
11 BOXES 4 - Strasbaugh
MQC Mon. Used: 14 2 - Strasbaugh Plates
------------- 4 - Speedfam
|
| 69.26 | 1/21/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Sun Jan 21 1996 07:13 | 77 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.a1/.b1/scrub
BREAKIN WAFERS 176 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING XD0337-TOUCH UP
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING XD0341, JD0068-TOUCH UP
CMP.B1 (Speedfam CMP-V) - DOWN, REPAIR
CMP.B2 (SPEEDFAM CMP-V) - DOWN, REPAIR
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
CMP.B1-DOWN, REPAIR
CMP.B2-DOWN, REPAIR
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
10 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0350 24W
JD0065 24W
JD0062 21W
# of carriers for strasbaugh/speedfam:
-------------------------------------
4 spare carriers for CMP.B1/B2
2 full carriers for CMP.A1/.A2
2 plates filmed for CMP.A1/.A2
|
| 69.27 | A-shift CMP passdown 1/21/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Jan 21 1996 19:10 | 74 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 cmp.a1/.a2/.b1/.b2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0344 (hot M3).
CMP.B1 (Speedfam CMP-V) - RUNNING: JD0061 (hot M3).
CMP.B2 (Speedfam CMP-V) - VERIFY: running breakins and mqcs.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0061 - M3
XD0344 - M3
XD0356 - M1
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.B2 - VERIFY - RUNNING BREAKINS AND MQCS.
CMP.A1 - MQC - CARRIERS BEING CHANGED AND MQCS BEING RE-RUN DUE TO BAD
UNIF.
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0337 - hold for process eng to evaluate. Erroneous edge readings.
Monitor status:
--------------
9 boxes of 12K monitors.
Number of product lots in room:
------------------------------
9
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0068 - PMD - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
3 COMPLETE STRASBAUGH CARRIERS + 1 PLATE SHIMMED/FILMED
4 COMPLETE SPEEDFAM CARRIERS
|
| 69.28 | 1/22/96 B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon Jan 22 1996 07:52 | 78 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0052
CMP.A2 (Strasbaugh 6DS-SP) - UP IDLE
CMP.B1 (Speedfam CMP-V) - UP RUNNING XD0356
CMP.B2 (SPEEDFAM CMP-V) - UP IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE
CMP-SCRUB.A2 (On-track scrubber) - IDLE
Hot/B lots in area:
___________________
XD0356 B LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* none *
Hold Lots:
---------
XL0347
Monitor status:
---------------
9 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0070 24W
XD0341 23W
XD0344 18W
JD0061 24W
XL0353 23W
# of carriers for strasbaugh/speedfam:
-------------------------------------
4 spare carriers for CMP.B1/B2
4 full carriers for CMP.A1/.A2
1 plates filmed for CMP.A1/.A2
|
| 69.29 | A-shift CMP passdown 1/22/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Jan 22 1996 19:06 | 78 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 30 cmp.a1/.a2/.b1/scrb
BREAKIN WAFERS 150 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0336 (m2).
CMP.B1 (Speedfam CMP-V) - MQC: running mqcs.
CMP.B2 (Speedfam CMP-V) - RUNNING2: JD0052 (m3) and XL0333 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0063 - PMD (reading 100% pre due to high incoming thickness on some wafers)
Hot lots coming to area:
-----------------------
JD0067 ILD 2-1
Static Lots in area:
-------------------
* none *
Down Equipment:
--------------
CMP.A1 - MQC
CMP.B1 - MQC
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
8 boxes of 12K monitors
Number of product lots in room:
------------------------------
8
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0356 - M1 - 24WFRS
XL0346 - M1 - 24WFRS
XL0347 - M1 - 24WFRS
JD0069 - PMD - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
1 COMPLETE CARRIER FOR STRASBAUGH + 1 PLATE SHIMMED/FILMED
4 COMPLETE SPEEDFAM CARRIERS
* NOTE * ALL operations are now active on the JIT board! Please keep the
board updated...thanks.
|
| 69.30 | 1/23/96 B SHIFT CMP PASSDOWN | FABSIX::L_CEDRONE | | Tue Jan 23 1996 07:39 | 77 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 4 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING JD0052-TOUCH UP
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING YL0143-TOUCH UP
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
JD0067 HOT LOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
9 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0336 23W
XL0333 12W
JD0063 23W
XL0354 22W
# of carriers for strasbaugh/speedfam:
-------------------------------------
10 spare carriers for CMP.B1/B2
6 full carriers for CMP.A1/.A2
|
| 69.31 | A-shift CMP passdown 1/23/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Jan 23 1996 19:13 | 73 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b2/.a1/.a2/scrb
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0072 (pmd).
CMP.A2 (Strasbaugh 6DS-SP) - DOWN: down for pad change.
CMP.B1 (Speedfam CMP-V) - DOWN: robot problems. reps working on it with EE
techs.
CMP.B2 (Speedfam CMP-V) - RUNNING: JD0054 (m3).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0067 - M2
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
JD0053 - 1.4
Down Equipment:
--------------
CMP.B1 - ROBOT PROBLEMS
CMP.A2 - PAD CHANGE
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
8 boxes of 12K monitor wafers
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0052 - M3 - 12WFRS
YL0143 - M2 - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
10 SPEEDFAM CARRIERS
6 STRASBAUGH CARRIERS
|
| 69.32 | robot repair/SpeedFam | SUBPAC::CMP | | Wed Jan 24 1996 11:19 | 2 |
| Robot continues with problem of stopping, bringing to ADE for
evaluation and repair.
|
| 69.33 | robot errors | SUBPAC::CMP | | Wed Jan 24 1996 11:24 | 2 |
| Robot continues with the problem of hanging, taking to ADE for
evaluation and repair.
|
| 69.34 | CMP C-SHIFT PD. 1/24/96 | FABSIX::E_DAWSON | | Wed Jan 24 1996 19:37 | 25 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - DOWN/PM
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.B1 (Speedfam CMP-V) - DOWN/REPAIR...ROBOT
CMP.B2 (Speedfam CMP-V) - RUNNING-1 JD0053 DC0126 ILD3 8W
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hold Lots: Lots in CMP: 3
--------- -----------
MQC Monitors: Carriers:
------------- --------
7 BOXES 4 - Strasbaugh
MQC Mon. Used: 6 2 - Strasbaugh Plates
------------- 13 - Speedfam
|
| 69.35 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Thu Jan 25 1996 07:31 | 52 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - VERIFY U PERFOMING MQC
CMP.B1 (Speedfam CMP-V) - UP/IDLE
CMP.B2 (Speedfam CMP-V)- UP/RUNNING
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:2 NO T TAG AVAIL
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 13 COMPLETE
STRAUSBAUGH COMPLETE 4 COMPLETE
MONITOR status:
---------------
NUMBER of product lots in room:2
-------------------------------
SPEACIAL NOTE*
______________
* NOTE * CMP.B1 MQC PASSED ( NEW .CTR-MQC RECIPE )
new spec/revs posted:
---------------------
*none*
|
| 69.36 | CMP C-SHIFT PD. 1/25/96 | FABSIX::E_DAWSON | | Thu Jan 25 1996 19:42 | 37 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING-1 XD0349 TM36 ILD1 24W
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING-1 *HOT LOT JD0063 ILD1 DC1035 12W
CMP.B1 (Speedfam CMP-V) - DOWN/REPAIR...ROBOT
CMP.B2 (Speedfam CMP-V) - DOWN....BROKEN WAFERS
(XD0350 TM36 ILD2 23W)
(XD0334 TM36 ILD3 6W)
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
Hot/B lots in area: Hot Lots coming:
------------------ ---------------
JD0063 ILD1 DC1035 12W "HOT"
XD0350 ILD3 TM36 23W "B-LOT"
Static Lots: 1 Scrap Lots:
----------- ----------
XD0359 TM36 PMD 24W "NO TAG"
Hold Lots: Lots in CMP: 10
--------- -----------
XL0314 TM55 ILD2 17W
MQC Monitors: Carriers:
------------- --------
7.5 BOXES 2 - Strasbaugh
MQC Mon. Used: 2 2 - Strasbaugh Plates
------------- 11 - Speedfam
|
| 69.37 | CMP C-SHIFT PD. 1/26/96 | FABSIX::E_DAWSON | | Fri Jan 26 1996 19:43 | 35 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - DOWN/REPAIR....SPINDLE VARIATION
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/PM...RUNNING BREAK IN
CMP.B1 (Speedfam CMP-V) - MQC
CMP.B2 (Speedfam CMP-V) - MQC
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Hot/B lots in area: Hot Lots coming:
------------------ ---------------
XD0340 TM36 ILD1 21W "B-LOT"
Static Lots: Scrap Lots:
----------- ----------
XL0340 TM55 ILD3 13W
JD0079 DC1026 PMD 22W
Hold Lots: Lots in CMP: 4
--------- -----------
MQC Monitors: Carriers:
------------- --------
4 BOXES 6 - Strasbaugh
MQC Mon. Used: 18 1 - Strasbaugh Plates
------------- 12 - Speedfam
|
| 69.38 | CMP C-SHIFT PD. 1/27/96 | FABSIX::E_DAWSON | | Sat Jan 27 1996 19:37 | 30 |
| CMP
___
CMP.A1 (Strasbaugh 6DS-SP) - MQC...(JD0074 DC1026 PMD 24W)
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE...BUBBLES ON THE PAD
CMP.B1 (Speedfam CMP-V) - UP/IDLE...WARNING "CARRIER #1 NOT ROTATING"
CMP.B2 (Speedfam CMP-V) - RUNNING-1 JD0066 DC1026 ILD1 19W
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE...Mqc performed
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE...Mqc performed
Static Lots: 1 Scrap Lots:
----------- ----------
XD0359 TM36 PMD 24W "NO TAG" 2 WAF/ JD0074 DC1026 PMD
Hold Lots: Lots in CMP: 5
--------- -----------
MQC Monitors: Carriers:
------------- --------
3 BOXES 4 - Strasbaugh
MQC Mon. Used: 14 1 - Strasbaugh Plates
------------- 13 - Speedfam
|
| 69.39 | A-shift CMP passdown 1/28/96 | SUBPAC::SADIN | Freedom isn't free. | Sun Jan 28 1996 18:51 | 72 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 20 mqcs - all tools
BREAKIN WAFERS 250 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: JD0064 and JD0063.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0359 and XD0360.
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0356 and XD0336.
CMP.B2 (Speedfam CMP-V) - DOWN: table not rotating (XL0339).
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
XD0356 - B
JD0053 - HOT
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
1
Down Equipment:
--------------
CMP.B2 - TABLE NOT ROTATING
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
3 boxes of 12K monitors (4 more ordered).
2 boxes of 50K breakin wafers ordered.
Number of product lots in room:
------------------------------
11
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
* none *
# of carriers for strasbaugh/speedfam:
--------------------------------------
2 complete strasbaugh carriers (plus one plate filmed/shimmed)
13 complete speedfam carriers
|
| 69.40 | 1/29/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Mon Jan 29 1996 07:18 | 81 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 6 cmp.a1/.b1/scrub
BREAKIN WAFERS 100 misc
CMP.A1 (Strasbaugh 6DS-SP) - UP RUNNING JD0065-TOUCH UP, JD0068
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING YDO140
CMP.B1 (Speedfam CMP-V) - UP IDLE
CMP.B2 (SPEEDFAM CMP-V) - UP IDLE
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
* NONE *
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
* none *
Down Equipment:
---------------
* NONE *
Scrap lots:
----------
* none *
Hold Lots:
---------
* NONE *
Monitor status:
---------------
3 1/2 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
4
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0360 24W
XD0359 24W
JD0064 24W
XD0356 24W
XD0336 22W
XL0339 24W
XD0361 24W
# of carriers for strasbaugh/speedfam:
-------------------------------------
9 spare carriers for CMP.B1/B2
2 full carriers for CMP.A1/.A2
|
| 69.41 | A-shift CMP passdown 1/29/96 | SUBPAC::SADIN | Freedom isn't free. | Mon Jan 29 1996 18:58 | 75 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 10 cmp.a1/.b1/scrb
BREAKIN WAFERS 200 misc
CMP.A1 (Strasbaugh 6DS-SP) - MQC: running mqcs. (JD0068)
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: JD0070 (m1).
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0350 (m3).
CMP.B2 (Speedfam CMP-V) - RUNNING: XD0352 (m2) and XL0353 (m1).
CMP-SCRUB.A1 (On-track scrubber) - PM: down for weekly pm.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
JD0070 - HOT
XD0352 - B
XD0350 - B
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0363 - 1.0 - NO TAG/TSHIRT
Down Equipment:
--------------
CMP-SCRUB.A1 - WEEKLY PM (WILL BE UP BY SHIFT CHANGE)
Scrap lots:
----------
* none *
Hold Lots:
---------
* none *
Monitor status:
--------------
2 boxes of 12K monitors (3 more on order)
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0065 - M1 - 23WFRS
YD0140 - M2 - 21WFRS
XD0335 - M2 - 24WFRS
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 CARRIERS FOR SPEEDFAM
2 CARRIERS FOR STRASBAUGH (+ 1 PLATE SHIMMED/FILMED)
|
| 69.42 | 1/30/96 CMP B SHIFT PASSDOWN | FABSIX::L_CEDRONE | | Tue Jan 30 1996 07:32 | 77 |
| CMP PASSDOWN
------------
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 5 cmp.a1/.b1/scrub
BREAKIN WAFERS 50 misc
CMP.A1 (Strasbaugh 6DS-SP) - DOWN, ROBOT NOT PICKING UP WAFER. JD0068 TOUCH UP
CMP.A2 (Strasbaugh 6DS-SP) - UP RUNNING MQC
CMP.B1 (Speedfam CMP-V) - UP RUNNING XD0329 AND XD0369
CMP.B2 (SPEEDFAM CMP-V) - UP RUNNING XD0362
CMP-SCRUB.A1 (On-track scrubber) - IDLE, MQC'S DONE
CMP-SCRUB.A2 (On-track scrubber) - IDLE, MQC'S DONE
Hot/B lots in area:
___________________
XD0369 HOT
Hot lots coming to area:
------------------------
* NONE *
Static Lots in area:
-------------------
XD0363 23W NO TOLKEN
Down Equipment:
---------------
CMP.A1 DOWN, ROBOT NOT PICKING UP WAFER
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0374 ENG.
Monitor status:
---------------
6 BOXS OF MQC WAFERS
Number of product lots in room:
------------------------------
6
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
JD0070 23W
XD0352 17W
XD0350 22W
XL0353 23W
# of carriers for strasbaugh/speedfam:
-------------------------------------
9 spare carriers for CMP.B1/B2
2 full carriers for CMP.A1/.A2
|
| 69.43 | A-shift CMP passdown 1/30/96 | SUBPAC::SADIN | Freedom isn't free. | Tue Jan 30 1996 19:21 | 77 |
| CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.a1/.a2/scrb
BREAKIN WAFERS 150 misc
CMP.A1 (Strasbaugh 6DS-SP) - RUNNING: XD0348 (M1). Occasional "Wafer on
Robot" errors. System starts right back up by pressing the "cycle start"
button.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: XD0363 (PMD) touchup.
CMP.B1 (Speedfam CMP-V) - RUNNING: XD0362 (PMD) touchup.
CMP.B2 (Speedfam CMP-V) - DOWN: will be down until tomorrow. waiting for
new motor for the index table. See Tim Dyer's passdown in ASDG::CMP for
more details.
CMP-SCRUB.A1 (On-track scrubber) - IDLE.
CMP-SCRUB.A2 (On-track scrubber) - IDLE.
Hot/B lots in area:
__________________
* none *
Hot lots coming to area:
-----------------------
* none *
Static Lots in area:
-------------------
XD0374 - 0.7 (HOLD - STI ENG LOT)
Down Equipment:
--------------
CMP.B2 - DOWN FOR NEW INDEX TABLE MOTOR.
Scrap lots:
----------
* none *
Hold Lots:
---------
XD0374 - STI LOT. HOLD FOR ENG.
Monitor status:
--------------
5 boxes of 12K monitors.
Number of product lots in room:
------------------------------
7
New specs/revs posted:
---------------------
* none *
Lots/wafers processed:
---------------------
XD0341 - 22
JD0068 - 24
XD0369 - 23
XD0329 - 21
# of carriers for strasbaugh/speedfam:
--------------------------------------
9 SPEEDFAM CARRIERS
??? STRASBAUGH. JESUS IS BUILDING MORE NOW.
|
| 69.44 | CMP A SHIFT PASSDOWN | FABSIX::J_ROA | | Wed Jan 31 1996 19:19 | 88 |
|
-< A shift CMP passdown - Wednesday 01/31/96 >-
--------------------------------------------------------------------------------
CMP
___
monitor wafer usage
-------------------
Type of monitor Number used Comments
--------------- ----------- --------
MQC-12K MONS 15 cmp.b1 mqcs
BREAKIN WAFERS 75 cmp.b1 breakin
Built carriers and plates available.
-----------------------------------
4 FULL CARRIERS BUILT ( STRASBAUGH )PLUS 1 PLATE
------------------------------------------
9 SPEEDFAM B1 AND B2 CARRIERS AVAILABLE
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE: If tool errors for " wafer sensed on
spindle" verify there is not wafer there, hit cycle start and continue
runnning. The rep will be here next week and will take care of the error.
CMP.A2 (Strasbaugh 6DS-SP) - RUNNING: Lot XL0354 is been measured 100% on
thickness tool. It will need touch ups .
CMP.B1 (Speedfam CMP-V) - RUNNING: Touching up lots ZD0101 and YD0145
CMP.B2 (Speefam CMP_V ) - DOWN. Reps working to correct tool problems.
CMP-SCRUB.A1 (On-track scrubber) - IDLE/UP:
CMP-SCRUB.A2 (On-track scrubber) - IDLE/UP:
Hot/B lots in area:
__________________
Hot lots coming to area:
-----------------------
Static Lots in area:
-------------------
Two PMD lots without T-tags
Down Equipment:
--------------
cmp.a1
Scrap lots:
----------
Hold Lots:
---------
Monitor status:
--------------
2 boxes of 12K's
Number of product lots in room:
------------------------------
six lots
New specs/revs posted:
---------------------
|
| 69.45 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri Feb 09 1996 07:37 | 49 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING JD0082*HOT LOT* & XL0365
CMP.A2 (Strasbaugh 6DS-SP) - DOWN FOR UPGRADE
CMP.B1 (Speedfam CMP-V) - UP/RUNNING LOTS JD0085,YD0137
CMP.B2 (Speedfam CMP-V)- UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE
HOT/B lots in area:
-------------------
JD0082 *HOT*
XD0340 *B LOT* NO T TAG
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:3 NO T TAG AVAIL
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:A2 UPGRADE
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 7 COMPLETE
STRAUSBAUGH COMPLETE 4 COMPLETE
MONITOR status:
---------------
NUMBER of product lots in room:8
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 69.46 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri Feb 16 1996 06:42 | 50 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING XD0357
CMP.A2 (Strasbaugh 6DS-SP) - DOWN/SLURRY LINE BURST
CMP.B1 (Speedfam CMP-V) - DOWN/PROCESS ENG
CMP.B2 (Speedfam CMP-V)- DOWN/CRASH LOTS JD0069 & JD0087 *HOT LOT*
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area:
-------------------
JD0087 *HOT*
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:
--------------------
HOLD LOTS IN AREA:2 LOTS YD0148 NEEDS ENGR ATTENTION BAD READINGS ON UV1050
XD0397 REMARKED TO HOLD FOR CMP ENGR 1ST SHIFT
__________________
DOWN equipment:A2 SLURRY LINE,B1 PROC ENG,B2 CRACH
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 8 COMPLETE
STRAUSBAUGH COMPLETE 4 COMPLETE
MONITOR status:
---------------
NUMBER of product lots in room:5
-------------------------------
new spec/revs posted:
---------------------
*none*
|
| 69.47 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Wed Feb 21 1996 06:42 | 46 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/RUNNING XD0372
CMP.A2 (Strasbaugh 6DS-SP) - UP/ RUNNING JD0091
CMP.B1 (Speedfam CMP-V) - DOWN/CONTINUES TO HAVE SCRATCHES ON MQC
CMP.B2 (Speedfam CMP-V)- DOWN/FLIPPER MOTOR FAILURE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC NOT DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC NOT DONE
HOT/B lots in area:
-------------------
YD0147 BLOT
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:5
--------------------
HOLD LOTS IN AREA:1
__________________
DOWN equipment:B1 SCRATCHES, B2 FLIPPER MOTOR
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 5 COMPLETE
STRAUSBAUGH COMPLETE 2 COMPLETE
MONITOR status:***NO MQC MONITORS 1 LOT IN PROCESS***
---------------
NUMBER of product lots in room:9
-------------------------------
|
| 69.48 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Fri Mar 01 1996 07:11 | 46 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/MQC ***WARNING ON MACHINE** SOFTWARE PROBLEM
CMP.B1 (Speedfam CMP-V) - UP/RUNNING ROCKET LOT JD0117**
CMP.B2 (Speedfam CMP-V)- UP/RUNNING HOT LOT XD0402
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area: 2
-------------------
JD0117,XD0402
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:2 PMD NO T TAG
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 8 COMPLETE
STRAUSBAUGH COMPLETE 2 COMPLETE
MONITOR status:4 BOXES
---------------
NUMBER of product lots in room:4
-------------------------------
LOTS COMPLETED 8
----------------
|
| 69.49 | D SHIFT PASSDOWN | FABSIX::D_CAUSE | | Sat Mar 02 1996 06:37 | 46 |
|
CMP.A1 (Strasbaugh 6DS-SP) - UP/IDLE
CMP.A2 (Strasbaugh 6DS-SP) - UP/IDLE ***WARNING ON MACHINE** SOFTWARE PROBLEM
CMP.B1 (Speedfam CMP-V) - UP/RUNNING LOT XD0387
CMP.B2 (Speedfam CMP-V)- UP/IDLE
CMP-SCRUB.A1 (On-track scrubber) - UP/IDLE MQC DONE
CMP-SCRUB.A2 (On-track scrubber) - UP/IDLE MQC DONE
HOT/B lots in area:
-------------------
HOT lots coming to area:
------------------------
Hot lot #
B LOT #
STATIC lots in area:
--------------------
HOLD LOTS IN AREA:
__________________
DOWN equipment:
---------------
CARRIERS::
-----------
SPEEDFAM PLATES COMPLETE. 9 COMPLETE
STRAUSBAUGH COMPLETE 6 COMPLETE
MONITOR status:3.5 BOXES
---------------
NUMBER of product lots in room:
-------------------------------
LOTS COMPLETED 2
----------------
|